High Vacuum Pumps Turbomolecular Pumps TURBOVAC

240.00.02 Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 Catalog Part High Vacuum Pumps

High Vacuum Pumps

Turbomolecular Pumps TURBOVAC Turbomolecular Pumps TURBOVAC MAG Oil Diffusion Pumps DIP/LEYBOJET/OB Cryo Pumpes COOLVAC Cold Heads COOLPOWER Compressor Units COOLPAK Notes

316 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold General to Hybrid Pumps ...... 328 ...... Pumps Hybrid to General Turbomolecular PumpswithHybrid(magnetic/mechanical)RotorSuspension Products Accessories for TURBOVAC . Pumps 327 Applications for TURBOVAC . Pumps 326 TURBOVACPumps . to General General Turbomolecular Pumps High Vacuum Pumps Contents MAG DIGITAL Turbomolecular PumpswithMagneticRotorSuspension Turbomolecular PumpswithMechanicalRotorSuspension Special Turbomolecular Pumps with integrated Frequency Converter and integrated Vacuumwith integrated System Frequency Controller . Converter 336 . 336 Gas Filter to G 1/4" for Purge Gas and Venting Valve...... 440 . . . 439 ...... 438 ...... Accessories . . . for . . . Serial . . . Interfaces . . . RS . 232 . VentingValve. and Gas Purge for 1/4" . G to Filter C Gas . . and . . RS . 485 . . C . . . . 441 . Adapter . . Set . . for . . Seal . . Gas . and . . Venting . . Valve . . . for . the . Venting . Valve and Gas SL Purge . pumps . . 440 . . . Power . Failure . Venting . Valve, . electromagnetically . . actuated VentingFailureValve. Power 439 Solenoid Venting Valve . 438 Securing Collar for Octal Socket Plugs . . Fine 438 Filter . . 438 Flange Heater for CF High Vacuum . Flanges 437 Air CoolingUnit Vibration . Absorber 436 Electronic Frequency Converters Accessories Services ...... 442 Services Miscellaneous without integrated Frequency Converter...... 378 . . . . with . Compound . . 396 Stage . . with separateFrequency . Converter ...... with . Compound . 382 Stage . . . with integratedFrequency Converter . . . . MAG INTEGRA ...... Converter. Frequency integrated without with integrated Frequency . . Converter 374 with CompoundStage with Frequency Converter for Attaching with orwithoutCompoundStage or . 370 Separate without Compound Stage . 346 for ClassicLine and SL . . 440 Pump 430 . . . . . for . TURBOVAC . SL . . Pump 437 . for . TURBOVAC . ClassicLine . . Pumps 436 ...... Suspension. Rotor TurbomolecularMagnetic for with Pumps for Turbomolecular Pumps with Mechanical . Rotor 424 Suspension TURBOVAC /TURBOVAC MAG . 344 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016

...... 320 . 320 317

High Vacuum Pumps Oil Diffusion Pumps DIP, LEYBOJET, OB ...... 444 General Applications and Accessories for Oil Diffusion Pumps ...... 444 Oil for Diffusion Pumps, for different fields of application ...... 445 Oil for Diffusion Pumps, for different pump types ...... 446 Products DIP Pumps, Water-Cooled ...... 450 LEYBOJET 630, Water-Cooled ...... 454 Oil Booster OB ...... 456 Accessories Astrotorus Baffles ...... 458 Temperature dependant Switching Components for Automatic Pump System Control ...... 460 Adsorption Traps with Aluminium Oxide Insert ...... 464 Monitoring Instruments ...... 461 Power Controller ...... 462

Cryo Pumps, Cold Heads and Compressor Units COOLVAC / COOLPOWER / COOLPAK ...... 465 General Applications and Accessories Cryo Pumps ...... 465 Cryogenics ...... 466 Cryo Pumps ...... 467 Refrigerating Capacity of Cryogenic Cold Heads ...... 469 Cold Heads ...... 470 Compressor Units ...... 473 Products Cryo Pumps Standard Cryo Pumps BasicLine COOLVAC 800 BL ...... 474 Cryo Pumps with Fully Automatic Control ClassicLine COOLVAC 800 CL, 1.500 CL ...... 476 COOLVAC 2.000 CL, 3.000 CL ...... 480 COOLVAC 5.000 CL, 10.000 CL ...... 484 COOLVAC 18.000 CL, 30.000, 60.000 ...... 488 Cryogenics Cold Heads Pneumatically driven Single-Stage Cold Head COOLPOWER 50 and 140 T ...... 490 Dual-Stage Cold Heads COOLPOWER 7/25, 5/100 and 5/100 T ...... 492 Mechanically driven Dual-Stage Cold Heads COOLPOWER 10 MD ...... 494

318 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Safety Valve...... 517 ...... 512 ...... 514 ...... 515 ...... Valve. Safety ...... Temperature . . . . 516 Sensor ...... TemperatureLow 211S MODEL Instrument Measurement 508 ...... TemperatureLow 9700 MODEL Controller ...... Dual . . and . . Multiple . . Operation . Operation Dual 513 ...... Single . Operation . . 511 . . . . COOLVAC . ClassicLine,SystemConfiguration . . . . Pumps. Cryo for Units Monitoring and Controllers Cryo Pumps/Cryogenics Accessories Refrigerator Cryostats General Accessories COOLPAKfor Compressor Units 6000 COOLPAKHMD/6200 . HMD withwatercooling . . 504 502 formechanicallydrivencoldheadsandpumps COOLPAK 6000 H/6200 H/6000 . COOLPAKHD 500 2000/2200 . 498 withwatercooling COOLPAK 2000 A/2200 A withaircooling . . 496 forpneumaticallydrivencoldheadsandpumps Compressor Units optical, based on the RDK . . based 6-320 506 on the RDK . 6-320 505 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 319

High Vacuum Pumps General to TURBOVAC Pumps

Turbomolecular vacuum pumps (TUR- are equipped with a number of rotor larger then the spacing between the BOVAC) are used in applications which blades. Located between the rotating rotor and the stator blades (typically a require a clean high or ultrahigh vacu- rotor blades are stationary stator disks few tenths of a millimetre). Corre spond- um like, for example, in research, de - with blades arranged in the opposite ingly the molecules chiefly collide with velopment or in industrial fields like the direction. By means of a momentum the optically dense rotor blades, result- semiconductor industry, analytical in - transfer from the rotating rotor blades ing in a highly efficient pumping action. strumentation or coating technology. to the gas molecules their initially non- In the laminar flow range (i.e. at pres- directional thermal motion is changed sures over 10-1 mbar (0.75 x 10-1 Torr)) in to a directional motion from the inlet the effect of the rotor is im paired by fre- Principle of Operation flange of the pump in the axial direction quent collisions between molecules towards the forevacuum flange. In the themselves. For this reason, a turbo- In principle, the turbomolecular pump is molecular flow range (i.e. at pressures molecular pump is not capable of a turbine rapidly revolving in a housing below 10-3 mbar (0.75 x 10-3 Torr)) the pump ing gases at atmospheric pres- where the rotor stages of the turbine mean free path of the gas molecules is sure.

Rotor blades High vacuum flange

Compound stage Permanent magnetic bearing

Ceramic ball bearings Stator discs

Drive electronics Drive motor

Communication Purge gas connection interface

Forevacuum flange

Sectional drawing of a turbomolecular pump (TURBOVAC i)

Rotor Bearing Oerlikon Leybold Vacuum offers differ- a hybrid bearing (TURBOVAC i / iX) ing. Typical for all these types of bear- ent rotor bearing systems. A purely where the bearing on the forevacuum ing is that they do not require any lubri- classic mechanical type of rotor bear- side is a ceramic ball bearing lubricated cating oil which under circumstances ing (TURBOVAC) or a magnetic rotor for life and where the bearing on the like standstill of the pump might diffuse bearing (TURBOVAC MAG) and also high vacuum side is implemented by back into the vacuum chamber due to way of a non-wearing magnetic bear the lack of any pumping action.

320 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold pressure S=S(p speed isanonlinearfunctionoftheinlet unit ofmeasurement [l/s].Thepumping mon tostatethepumpingspeedin of highvacuumengineeringitiscom- for air, respectively nitrogen. Inthefield speed ofthepumpiscommonlystated the maximumattainablepumping son thenominalpumpingspeed,i.e. on thetypeofgassothatforthisrea- opening ofthepump.Itisdependent veyed volumeflowthrough theintake The pumpingspeed“S”isthecon- Pumping speed(volumeflowrate) Characteristic Quantities ces in acontrolled mannertothelevelne speed, thestart-upcurrent isreduced cy feed.Afterattainingthenominal steadily increasing voltageandfrequen- of thepumprotor isattainedbya tors thesystem.Optimumrunningup the motorandalsoautomaticallymoni- voltage andtheoutputfrequency for quency converterdeliversthedriving quency converter(inverter).Thefre- lecular pumprequires anelectronic fre- Driving andmonitoringtheturbomo- Drive Electronics/Control Unit saryfornormaloperation. 1 ) - Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 of gas. Compression isdependentonthetype isting installations. facilitating easyintegrationwithinex hensive rangeofoptionalaccessories may besupplementedbyacompre- stallation conditions,thecontrol unit Depending onthegivensystemandin viscous flow the transitionrangefrom molecularto highest possiblegasthroughput alsoin high intakepressures. Thisensures the for aminimaldrop ofspeedevenat of theTURBOVAC havebeende The frequency converterandthemotor Q =Q(p ing speedthrough theinletpressure. ment [mbarxl/s]islinkedtothepump Gas throughput “Q”,unitofmeasure- Gas throughput K =K(p side. and thepressure onthehighvacuum um sideoftheturbomolecularpump between thepressure ontheforevacu- Compression “K”isdefinedastheratio Compression VV 1 ) =p ) =p 1 VV xS(p /p HV . 1 ). signed - - - The ultimatepressure “p Ultimate pressure (basepressure) (DIVAC) maybeused. also diaphragmvacuumpumps compression stage(compoundstage) the rotor isequippedwithanadditional case ofthewiderangevariantwhere vacuum pumps(SCROLLVAC).In the vacuum pumps(SOGEVAC BI)orscroll cases alsosingle-stagerotary vane (TRIVAC) willbesuitable.Insome ly two-stagerotary vanepumps arrangement withrotor blades,general- forevacuum pump.Fortheclassicrotor will alwaysrequire asufficiently rated atmospheric pressure theiroperation capable ofcompressing directly against Since turbomolecularpumpsare not Forevacuum Pump p ment arrangement. bake-out (degassing)ofthemeasure- chamber 48hoursaftera24-hour pression ratiowhichisattainedinatest tween forevacuum pressure andcom- out isdefinedthrough theratiobe molecular pumpwhichcanbebaked um flangeandthebake-outconditions. types ofsealsusedforthehighvacu- type offorevacuum pumpused,the the cleannessofapparatus, sure dependsamongotherthingson The maximumattainableultimatepres- ult =p FV /K 0 . ult ” ofaturbo- - 321

High Vacuum Pumps TURBOVAC Product Line used in all high vacuum and ultrahigh vacuum fields of application. In particu- The TURBOVAC pumps are turbo- lar, the TURBOVAC pumps are running molecular pumps with mechanical rotor very successfully in mass spectrome- suspension which are used in the pres- ters, in CD, DVD and hard disk produc- sure range from 10-1 mbar (0.75 x 10-1 tion units, in the manufacture of large Torr) to 10-10 mbar (0.75 x 10-10 Torr) area optical coatings, in non-corrosive Pumping speeds for air vary from semiconductor production processes 35 l x s-1 (inlet flange diameter = 40 mm and in laboratories as well as research (1.57 in.)) to 1,150 l x s-1 (inlet flange institutes diameter = 250 mm (9.84 in.)). Besides a variant with extremely reliable The most important advantages of the ceramic ball bearings on the forevacu- TURBOVAC product line are: um and the high vacuum side, Oerlikon - Oil-free pumps for the generation of Leybold Vacuum also offers a line of clean high and ultra-high vacuum turbomolecular pumps equipped with conditions TURBOVAC (T) 350 iX hybrid bearings which on the forevacu- - Highest performance in any um side are equipped with a ceramic orientation ball bearing and on the high vacuum side with a permanent magnetic bear- - Highest degree of operating ing (TURBOVAC i line). reliability - Easy to operate Owing to their compact design and ease of operation, these pump lines are - Compact design

TURBOVAC MAG Product Line The TURBOVAC MAG pumps are The most important advantages of the turbomolecular pumps with magnetic TURBOVAC MAG product line are: rotor suspension which are used in the - Hydrocarbon-free pumps for the pressure range from 10-1 mbar generation of clean high and ultra- (0.75 x 10-1 Torr) to 10-10 mbar high vacuum conditions (0.75 x 10-10 Torr). Pumping speeds for air vary from 300 l x s-1 (inlet flange - High performance in any orientation diameter = 100 mm (3.94 in.)) to - High degree of operating reliability 3,200 l x s-1 (inlet flange diameter = - Extremely low vibration 320 mm (12.6 in.)). - Designed for pumping of corrosive The TURBOVAC MAG pumps are gases mostly installed on semiconductor pro- - Almost maintenance-free cessing lines like etching, CVD, PVD TURBOVAC MAG 2200 iPL and ion implantation, i.e. in applica tions where corrosive gases need to be pumped. Also electron beam microscopy is an important area of application for these pumps.

322 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold has continuallyoptimizeditsproducts. instruments, OerlikonLeyboldVacuum ties andthemanu and incooperationwithresearch facili- On thebasisofdecades displacedaboveallthe free operationithasinmostcases pact designandalmostmainte vacuum, mostsimpleoperation,com- ideal. Thankstothehydrocarbon-free molecular pumphasbeenfoundtobe high vacuumapplications,theturbo- vacuum is instruments the copes andmany conditions. Alsoin reason require adequatehigh rely onmassspectrometers andforthis ample GC-MS,LC-MSand liquid andplasmaanalysis–likeforex analytical methodsforgas, All modern in AnalyticalInstruments Use ofTurbomolecular Pumps TURBOVAC MAGW600iP essential. Inover90%ofall production ofahigh surface facturers ofanalytical electron micros dif analysis fusionpump. experience ICP-MS – vacuum nance- - - Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 work andleaksearching. active unitwithoutinvolvedassembly servicingasimplereplacement ofthe of thecustomer’s systemandduring an innovativeandcost-effective design cartridge solu ment costsfortheentire system.The vidual pumps,significantlylowerinvest- compared totheuseofdiscrete indi- tion, perfor vacuum systemswithoutsacrificing are theextreme compactnessofthe ample. Thebenefitsforthecustomers increased samplethroughput, forex systems, forasmallerfootprintandan higher detectionsensitivityofanalytical and gasthroughput inorder toattaina have beentailored forpumpingspeed gle multi-inletpump.Thesepumps pumped downsimultaneouslybyasin- Two ormore analysischamberscanbe ical instruments. achieved amajorstepaheadforanalyt- on specialcustomerrequirements, Oerlikon LeyboldVacuum has,based of theTURBOVAC multiinletseries, configuration. Through theintroduction find themostcost-effective system can beintegratedperfectlyandthus ly tohisrequirements. Thecomponents may adaptthevacuumsystemprecise- Owing tothemodularconceptuser flexible andreliable products. the area ofanalyticalengineeringhighly attained, makingavailabletousersin series, afurtherimprovement hasbeen Through theTURBOVAC widerange stable vacuumconnectionsand, man ce density, simpleinstalla- tion, moreover, allowsfor - instrumentation. applications inthearea of um systemopti Vacuum isabletooffer thebestvacu- SCROLLVAC, like theSOGEVAC, TRIVAC or In combinationwithbackingpumps - Lower maintenance costs Reductionofsystem costs - Increase insamplethroughput - - Smaller analytical systems Increase indetectionsensitivity - tical instruments: reflected bytheefficiency oftheanaly- The benefitsforthecustomersare Easypumpreplacement without - Compactvacuumsystem - Nolossesinconductance - Highereffective pumpingspeed - Cartridge benefits,whichconvince TURBOVAC iMultiInlet chambers sensitive massspectrometer having todisassemblethehighly Oerlikon Leybold mized forallmajor analytical 323

High Vacuum Pumps Use of Turbomolecular Pumps in the Area of Semiconductor Processes In the semiconductor industry turbo- temperature. Such temper a ture rotary vane pumps from the TRIVAC molecular pumps are used on the controlled variants are optionally availa- range, possibly fitted with the BCS following processes, among others: ble for the MAG 1500 C, MAG 2000 C, system. MAG 2800 and MAG 3200. - Etching - Sputtering In contrast to turbo molecular pumps with mechanical bearings, magnetically - Ion implantation levitated pumps provide the advantage - CVD that they prevent overheating of the - Lithography. bearings at high gas flows and In these applications pumping of effectively exclude any damage to the aggressive gases is often required. magnetic bearings by aggressive This may necessitate the use of pumps media. equipped with a purge gas facility or a In electron microscopes and in litho- magnetic suspension in order to avoid graphic equipment, low vibration levels damaged bearings. Especially during are metal etching, deposits may occur in exceptionally important. For this reason the forevacuum space of the turbomole- magnetically levitated turbomolecular TURBOVAC MAG W 2000 CT cular pump. In order to prevent this the pumps should be used here. The pumps must be heated to a certain recommended backing pumps are

324 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold (0.75 x10 10 leybold the pressure rangebetween10 sputtering thecoatingprocess isrunin processing chamber. Inthecaseof water moleculesare removed from the pres the vacuumchamberdownto the qualityofcoating.By ge The wayinwhichthevacuumis uniform andadhere tothesubstrate. to ensure thattheformedlayerswillbe vacuumconditions.Thisistheonlyway as architectural glassrequires high age media,opticalcomponentsaswell Coating ofopticalandmagneticstor- Systems in theArea ofCoating Use ofTurbomolecular Pumps are beingused.Sincetheapplication pumps from OerlikonLeyboldVacuum ment, alltypesofturbomolecular In thefieldofresearch anddevelop- implement theseprocesses atall. a basicrequirement forbeingableto cal processes, vacuumtechnologyis ideas shallbetransformedintotechni- In manyapplicationsinwhichnew in research anddevelopment Use ofturbomolecularpumps ner -2 mbar(0.75x10 sures intherangeof10 ated hasasignificantimpacton -6 Torr), interfering gasand -3 and0.75x -6 pumping mbar -3 and Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 mbar (0.75x10 memories (CD,DVD,hard discs),coat each application,beitcoatingofdata Thus therightpumpisavailablefor (1.57 in.to9.84in.)nominalwidth. ranging from 40mmto250 tion coating, 10 includes pumps from OerlikonLeyboldVacuum almost idealmanner. Therangeof maintenance-free operation, compactdesignandalmost hydrocarbon-free vacuum,verysimple requirements ofthecustomersastoa The turbomolecularpumpmeetsall range ofequipmentbeingoffered. put togetherfrom thecomprehensive nent orthematchingsystemcanbe in largelaboratories,therightcompo- dustrial development,inresearch and between universitybasicresearch, in requirements differ widely, forexample are beingused.Sincetheapplication requirements differ widely, forexample -2 Torr), and inthecaseofevapora-

pumps withflangediameters pressures below10 -4 Torr) are operation inan utilized. -4

pumps coating systemwithTURBOVAC TW250S Entire highvacuumequipmentofaCD/DVD Nuclear fusiontechnology nents, displaysorarchitectural glass. lenses inthearea ofopticalcompo- ing oftoolsandcoatingprecision 325

High Vacuum Pumps Applications for TURBOVAC Pumps

Pumps TURBOVACTURBOVACTURBOVAC 50 TURBOVAC 151, TURBOVAC 361 600 (C) TURBOVACC 1000TURBOVAC C1100TURBOVAC SLC TURBOVAC80 TWTURBOVAC 250 (T) 350/450 S MAG(T) 350/450 WMAG i i Multi 300/400/600/700 MAGW iXInlet 1300/1600/1700/2200 WMAG 300/400/600/700 WMAG 830/1300iP MAGW 1500 MAGW C iP(L)2200CTP WMAG 2000C W C/CT2800/3200 C/CT Applications Analytical Instruments Leak detectors Mass spectrometers Gas chromatography (GC-MS) Liquid chromatography (LC-MS) Quadrupol time of flight (Q-TOF) Matrix assisted laser desorption time of flight (MALDI-TOF) Inductively coupled plasma mass spectrometry (ICP-MS) Electron beam microscopy Coating Data storage / optical Data storage / magnetic Flat panel displays Optical coating Large area coating Decorative coating Metallization Wear protection Metallurgy R & D (Research and Development) Surface analysis UHV / XHV systems Particle accelerators Fusion experiments Space simulation Semiconductor Processes Load locks and transfer chambers Etch PECVD PVD Ion implantation

326 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Accessories forTURBOVAC Pumps leybold Applications Control Software forTURBOVAC Accessories forserialinterfaces Relais box Electronic brakemodule Power failure ventingvalve Purge gasandventingvalve Purge gasvalve Venting valve Flange heatersforCFflanges Water coolingkit Air coolingunit absorber Vibration Inlet screen /Splinterguard Mounting Kit Power Supply Power Supply FrequencyExternal Converterand FrequencyExternal Converter Integrated Frequency Converter

Pumps Oerlikon Leybold Vacuum FullLine Catalog 2015/2016

TURBOVAC 50

TURBOVAC 151, 361 (C)

TURBOVAC 600 C

TURBOVAC 1000 C TURBOVAC 1100 C

TURBOVAC SL 80

TURBOVAC TW 250 S

TURBOVAC (T) 350/450 i

TURBOVAC (T) 350/450 iX

TURBOVAC i Multi Inlet

MAG W 300/400/600/700 iP

MAG W 1300/1600/1700/2200 iP(L)

MAG W 300/400/600/700 P

MAG W 830/1300 C

MAG W 1500 CT

MAG W 2200 C

MAG W 2000 C/CT MAG W 2800/3200 C/CT 327

High Vacuum Pumps General to TURBOVAC i / iX Pumps Turbomolecular Pumps with Hybrid (mechanical/ magnetic) Rotor Suspension

TURBOVAC i, iX / T i, T iX Advantages to the User The TURBOVAC i / iX series is a modu- Owing to the many possible combina- - High pumping performance from a lar line of turbomolecular vacuum tions (electronics, pump stage design, compact size pumps. With the integrated drive elec- housing and the range of accessories) - Cost-effective price-to-performance tronics (frequency converter) it forms a the TURBOVAC i / iX can be flexibly ratio single unit. adapted to the specific application in In the development of the TURBOVAC each case. - Highly reliable, maintenance-free i / iX special emphasis was placed on For example, in comparison with the bearing concept without oil lubrica - the maximum attainable pump perfor- TURBOVAC i, the TURBOVAC iX is tion mance in consideration of its footprint. equipped with an integrated vacuum - Owing to the overall modular con- The specially developed rotor/stator system control unit which drives acces- cept, individually adaptable to the de sign, upon request with an additional sory components like vacuum gauge, respective conditions and require- compression stage, guarantees excel- valves, fans and forevacuum pumps. ments lent performance data as to pumping Moreover, numerous optionally avail - speed, gas throughput and compres- able communication interfaces facilitate - Variety of housings and flange op - sion especially also for light gases. easy integration within your installation. tions In all pumps of this line, the bearing The pump stage design (rotor, stator - Easy and easily adaptable installa - consists of a non-wearing permanent and Holweck stage) can be selected tion, any mounting position magnetic bearing on the high vacuum specifically in consideration of the re- side and an oil-free ceramic ball bear- spective process requirements and - Easy process integration due to the ing which is lubricated for life on the offers variants for highest possible gas numerous interfacing options forevacuum side. For this reason, the throughput, pumping speed and/or - Flexible accessory options (power usually required standard maintenance compression in single or multi-chamber supply, cooling, heating, venting, in- involving an oil change is no longer systems. Equally comprehensive is the stallation etc.) nec essary. The ceramic ball bearing is range of housing and flange variants re placeable on-site, should this be re- being offered where the vacuum con- quired. nections can be adapted flexibly to the The pumps are equipped as standard on-site installation conditions. The with a venting and purge gas facility for com prehensive range of accessories directly connecting a venting valve, completes the TURBOVAC i / iX line purge gas valve or purge gas throttle to thereby extending the fields of applica- the pump. tion for these pumps.

Overview of Variants Electronics Variants All pumps are equipped with integrated drive electronics with a 24 V/48 V pow - er supply which controls the amount of drive power and which monitors all pump functions.

The individual requirements with regard to communication interfaces and the functional scope of the driving options Left: TURBOVAC i with standard interface for accessory components can be cov- Centre: TURBOVAC i with Anybus interface extension ered through a number of different Right: TURBOVAC iX with integrated vacuum system control unit and Anybus interface extension elec tronics variants.

328 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Flexiblyprogrammable software, for - 1vacuumgaugeheadconnection - 3 outputsforcontrolling vacuum - interface extension),additionally: Features likeTURBOVAC i(Anybus unit andAnybusinterfaceextension. integratedvacuumsystemcontrol With trol unit) TURBOVAC iX User-friendly interfaces(USB,15-pin - Features likeTURBOVAC I,additionally: sion) TURBOVAC i User-friendly interfaces(USB, - Accessoryconnectionforupto2 - - Status LEDs 24/48VDCfrequency Internal con- - basic functionsandinterfaces. Cost-effective solutionequippedwith TURBOVAC i Electronics Variants control connections customising theconfigurationof tem control tion ofpressure datafor pump sys- vacuum gaugeheadsandapplica- for poweringanddatarecording of pump accessories request) (furtherinterfacesupon Ethernet/IP interface options:RS232,Profibus, instead oftheRS485forfurther digital I/O)andAnybusinterface RS 485,15-pindigitalI/O) controllable accessorycomponents verter

(Anybus interfaceexten- (Standard) (Vacuum systemcon-

Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Integrated vacuumsystemcontrol unitoftheTURBOVAC iX Anybus interfaceexpansionforTURBOVAC i Standard interfaceUSB,RS485and15-pindigitalI/OforTURBOVAC i 329

High Vacuum Pumps Performance Variants

TURBOVAC i, iX TURBOVAC T i, T iX TURBOVAC i Multi-Inlet The standard variant for UHV applica - The “T” version with its classic rotor de - The variant with a special rotor design tions and compact pump system solu- sign without additional compression and two or more inlets as an efficient tions. Owing to the additional Holweck stage is suited for deployment under and compact vacuum solution for compression stage it delivers a high more stringent process conditions and multi-chamber systems. It allows for a pumping speed and a high compres- high gas loads. Compared to the stan - high degree of system integration and sion especially for light gases, and due dard variant it stands for faster run-up convinces compared to systems with to its high forevacuum tolerance it is times, increased gas throughput and discreet turbomolecular pumps through suited for operation in connection with an improved tolerance with regard to its lower weight and smaller footprint diaphragm or scroll forevacuum pumping of particle or dust containing as well as an increased reli abil ity of the pumps. media. entire vacuum system through the reliance on fewer components compared to similar systems equipped with discrete turbomolecular pumps.

Housing and Flange Variants The optimised rotor geometry has been Multiple inlet stages can be implemen- specially adapted to the industrial stan - ted through the TURBOVAC Multi- dard sizes for max i mum pump perfor- Inlet. Here in addition to the special mance. Housings with ISO-K as well as cartridge solution which facilitates easy CF flanges are available. Moreover, the replacement in the field, also custom standard housings with an additional housing and chamber solutions are inlet stage are available upon request. offered for utmost system integration.

Flexibility The forevacuum connection on all pumps is rotatable thereby facilitating flexible installation within existing systems making optimum use of the available space. Moreover, the required amount of installation space may be Left: TURBOVAC i with radial forevacuum flange reduced by a detachable cable con- Right: TURBOVAC i with axial forevacuum flange nected interface module

330 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Requires aconnectioncabletothe - For remote control viainterface - Status LEDsandstatusrelays for - on/off switchfortheturbo With - Control unitandpowersupplyfor - Supply TURBO.CONTROL300 Pump control unitwithPower Requires acountry-specificmains - Alsoforbenchtopplacementwith - Includingshortconnectingcableto - Plug-and-playpowersupplyfor - TURBO.POWER integra Power Supply TURBOVAC i,iX/T Accessories for 24/48VDC-InplugTURBOVAC i - customer. for adaptingthesupplyvoltage bythe DC PumpPlug incl.connectioncablewithaM8 - an M8connector. control voltageisconnectedthrough nected usingmainspowercords, the Mains powerandconsumerare con- like abackingpump,forexample. a mainspowered electricconsumer, the 24VDCoutputonTURBOVAC i The relay boxallowsyoutocontrol via Relay Box cific powersupplyunits bare wire endsofforcustomerspe- Connecting cablestothepumpwith 17.5, 35.0,70.0ft)) pump (1,3,5,10,20m(3.5,10.5, monitoring thepump molecular pump rack installation cord (EU,US,UK…) (3.5, 10.5,17.5ft)) optional extensioncable(1,3,5m the pump 100-240 V the pump, fitting underneath plug, 2m(7.0ft)long specific mainscord (EU,US,UK...)

and country- - Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 331

High Vacuum Pumps Radial air cooler for lateral installation on the pump, including connection plug - Flexible positioning

Axial air cooler For installation underneath the pump, including connection plug

Water cooling for flexible installation on the pump (required for degassing the turbomolecular pump)

Heating Collar for degassing the pump - Degassing temperature 100 °C (212 °F) - Requires a country-specific mains cord (EU, US, UK …) - With optional relay box and accessory cable, automatic control via the electronics of the TURBOVAC i / iX is possible

332 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Purge gasthrottle 24sccm - G1/8" inlet(insidethread) anddis- - purge gasquantity for passivelycontrolling theadmitted Purge GasThrottle leybold The valveisnormallyopen - for ventingtheturbomolecularpump nection theventingconnection) Power Failure Venting Valve Thevalveisnormallyclosed - for ventingtheturbomolecularpump ing connection) Venting Valve IncludingO-ringandconnecting - G1/8"inlet(insidethread) anddis- - Powersupply24VDC - Accessory Valves ExtendstheM8accessoryconnec- - Y-Splitter - G1/8" Prevents contaminationandclog- - for connectiontothevalvesorthrottles Air Filter charge (outsidethread) connection TURBOVAC i/iX to theaccessoryinputon cable withM8plugforconnection charge (outsidethread) connection are switchedsynchronously Here bothaccessorycomponents accessory components. connection forparalleldrivingoftwo tion ontheTURBOVAC ibyafurther ging ofvalvesandthrottles (forconnectionthevent- (forcon- Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Thevalveisnormallyclosed - quantity for controlling theadmittedpurgegas lecular pump) purge gasconnectionontheturbomo- Purge GasValve (for connectiontothe 333

High Vacuum Pumps Installation and Mounting Accessories Mounting kit for safe mounting of the pump

The mounting kits include: ISO-K kit (100 und 160): centering rings and clamps Mounting kits (left ISO-KF, centre ISO-F, right CF) ISO-F kit (100 und 160): collar flange, outside ring, bolts and nuts CF kit (100 und 160): 2 copper gaskets, bolts, nuts and washers

Centering Rings with Splinter Guard (DN 100 and 160 ISO-K/F)

Centering Rings with Inlet Screens (DN 100 and 160 ISO-K/F)

Splinter Guards (DN 100 und 160 CF)

Inlet Screens (DN 100 und 160 CF) for protecting the pump against ingest- ing parts. Inlet screen, 3.2 mm (0.01 ft) mesh Splinter guard, 0.8 mm (0.003 ft) mesh Note: For ISO-K/F, both inlet screen and splinter guard have been integrated in the centering ring.

Vibration Absorber (DN 100/160 ISO-K and 100/160 CF)

Prevents any possible vibration transfer from the pump to sensitive instrumentation or apparatus.

334 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Different languagesandwithdiffer- - Automatic detectionofconnected - InterfaceusesUSB(withcable - messagelogging Alarm/warning - - Data logging Reading/writingofparameters - Configuringtheaccessoryfunctions - Trend configurationandreport - Displayofvacuumsystemstatus - Functions detection. RS 232interfacewithautomaticpump molecular pumpsviaUSB,RS485or tion, control andmonitoringofturbo- Software forPC-basedcommunica- Software LEYASSIST Software LEYASSIST forturbomolecularvacuumpumps Ordering Information ent useraccesslevelsare available Leybold pumptypeorinstrument tion meters,control anddataacquisi- - Functions: reading/writing ofpara- RS 485or232(withdongle) 2.0, Type A/B, 1.8m(6.3ft)long), of theTURBOVAC i/iX Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Part. No.230439V01 335

High Vacuum Pumps Products

TURBOVAC with Hybrid (mag/mech) Rotor Suspension with integrated Frequency Converter TURBOVAC (T) 350 i and (T) 450 i

TURBOVAC (T) 350 i (left) and (T) 450 i (right) with integrated Frequency Converter and integrated Vacuum System Controller TURBOVAC (T) 350 iX and (T) 450 iX

TURBOVAC (T) 350 iX (left) and (T) 450 iX (right)

336 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Insulation vacuumandleakdetec- - Electron beamwelders - Load locks,transferchambers, - Industrial andCoatingapplications - - Life Sciences Analyticaltechnologies/Research & - Typical Applications tion handling systems taics - Thinfilmtechnologies,photovol- - CD/DVD/Blu-RayDiscproduction - Opticalcoatings - PVD-PhysicalVapour deposition - Production ofhighqualityimplants - Gammasterilisation - Proton therapy - UHVsystems - MBE(MolecularBeamEpitaxy) - Laboratorycoatingsystems tons - Particleacceleratorsandsynchro- - X-ray-analysis - Surfaceanalysis - Electron microscopes - Massspectrometers Development Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Improved run-uptime - Increased toleranceagainstdust - increased gasthroughput - Variant withoutCompoundStage - TURBOVAC Ti,iX Flexibility tomatchdifferent process - Flexible accessoryprogram options - Integrated vacuumsystemcontroller - TURBOVAC iX Optimized size/performanceratioon - rangeofinterfaceoptions Widest - On-site maintenancepossibility - Theonlymaintenancefree hybrid - Superiorreliability duetoinnovative - Installationinanyorientation - Vacuum portdesignflexibility - Bestinclasspumpingspeedand - Integratedelectronic driveunitwith - TURBOVAC i Technical Features and particles and applicationrequirements for easyplug&play vacuum pumpsetc. ing units,valves,gauges,fore- accessory portsforcontrol ofcool- with flexibleinterfacesandseveral 100 and160flanges standard) (USB ,RS485and15pinDigI/Oas vice costsandtime (bearing exchange)toreduce ser- - noneedforoilchanges mechanical TMP pump andbearingdesign gases compression especiallyforlight 24/48 VDCsupply Fastcycleoperationandpump - Suitablefordemandingprocess - TURBOVAC Ti,iX Avoid extracostsforseparatepump - Easyplug&playpumpsystemcon- - TURBOVAC iX Down-sizingofvacuumsystemin - Superiorpumpingperformancefor - Improved pump-downtimeandtar- - Highestproductivity andsystem - Maximumuserflexibilityforeasy - Bestperformanceandfunctionality - TURBOVAC i Advantages totheUser down possible operation applications andhighthroughput system control unitsandcabling trol of smallforevacuum pumps) terms ofcostsanddimensions(use light gases get pressures ership) uptime atlowestCoO(CostofOwn- control system integration,operationand for yourmoney 337

High Vacuum Pumps Ø d

Ø d1 h VENT G 1/8" h8

h4 h6 h1 h2 h5 h7 b h M6 - 10 b2 PURGE b5 9

b1 DN 25 KF b6

b3 b4

b7 b8

a 32° a2 a1

32°

Type DN a a1 a2 b b1 b2 b3 b4 TURBOVAC (T) 350 i ISO-K mm (in.) 107.5 (4.23) 65.4 (2.57) 67.6 (2.66) 20.0 (0.79) 100.7 (3.96) 99.2 (3.91) 107.5 (4.23) 78.1 (3.07) CF mm (in.) 107.5 (4.23) 65.4 (2.57) 67.6 (2.66) 20.0 (0.79) 100.7 (3.96) 99.2 (3.91) 107.5 (4.23 78.1 (3.07) TURBOVAC (T) 450 i ISO-K mm (in.) 107.5 (4.23) 65.4 (2.57) 67.6 (2.66) 20.0 (0.79) 100.7 (3.96) 99.2 (3.91) 107.5 (4.23 78.1 (3.07) CF mm (in.) 107.5 (4.23) 65.4 (2.57) 67.6 (2.66) 20.0 (0.79) 100.7 (3.96) 99.2 (3.91) 107.5 (4.23 78.1 (3.07)

DN b5 b6 b7 b8 d d1 h h1 TURBOVAC (T) 350 i ISO-K mm (in.) 47.0 (1.85) 105.0 (4.13) 55.5 (2.19) 57.2 (2.25) 130.0 (5.12) 165.0 (6.5) 232.0 (9.13) 20.8 (0.82) CF mm (in.) 47.0 (1.85) 105.0 (4.13) 55.5 (2.19) 57.2 (2.25) 180.0 (7.09) 165.0 (6.5) 245.0 (9.65) 20.8 (0.82) TURBOVAC (T) 450 i ISO-K mm (in.) 47.0 (1.85) 105.0 (4.13) 55.5 (2.19) 57.2 (2.25) 130.0 (5.12) 165.0 (6.5) 216.0 (8.5) 20.8 (0.82) CF mm (in.) 47.0 (1.85) 105.0 (4.13) 55.5 (2.19) 57.2 (2.25) 180.0 (7.09) 165.0 (6.5) 222.0 (8.74) 20.8 (0.82)

DN h2 h3 h4 h5 h6 h7 h8 h9 TURBOVAC (T) 350 i ISO-K mm (in.) 25.5 (1.0) 61.5 (2.42) 39.0 (1.54) 19.4 (0.76) 32.0 (1.26) 19.0 (0.75) 18.8 (0.74) 18.4 (0.72) CF mm (in.) 25.5 (1.0) 61.5 (2.42) 39.0 (1.54) 19.4 (0.76) 32.0 (1.26) 19.0 (0.75) 18.8 (0.74) 18.4 (0.72) TURBOVAC (T) 450 i ISO-K mm (in.) 25.5 (1.0) 61.5 (2.42) 39.0 (1.54) 19.4 (0.76) 32.0 (1.26) 19.0 (0.75) 18.8 (0.74) 18.4 (0.72) CF mm (in.) 25.5 (1.0) 61.5 (2.42) 39.0 (1.54) 19.4 (0.76) 32.0 (1.26) 19.0 (0.75) 18.8 (0.74) 18.4 (0.72)

Ø d

Ø d1

h VENT G 1/8" h8

h4 h6 h1 h2 h5 h7 b PURGE M6 - 10 b5 h9 b1 b2 DN 25 KF b6

b3 b4

b7 b8

a 32° a2 a1

32°

Dimensional drawing for the TURBOVAC (T) pumps, 350 i top and 450 i bottom

338 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Dimensional drawing fortheTURBOVAC (T)pumps,350iXtopand450 iXbottom DN F m(n) 8. 70) 6. 65 250(.6 2. 08) 60(.2 100(.3 130(.6 76.0(2.99) 103.0(4.06) 110.0(4.33) 26.0(1.02) 21.0(0.83) 225.0(8.86) 165.0(6.5) 180.0(7.09) mm(in.) CF F m(n) 20(.4 4. 18) 00(.9 30(.2 3. 12) 40(.2 4. 18) 23.0(0.91) 47.0(1.85) 64.0(2.52) 32.0(1.26) 3.0 (0.12) 20.0(0.79) 48.0(1.89) 62.0(2.44) mm(in.) CF UBVC T 5 X S- m i. 100(.2 150(.) 1. 86) 10(.3 2. 10) 1. 43) 0. 40) 76. 103.0(4.06) 110.0(4.33) 26.0(1.02) 21.0(0.83) 219.0(8.62) 165.0(6.5) 130.0(5.12) mm(in.) ISO-K TURBOVAC (T)450iX DN d d UBVC T 5 X S- m i. 6. 24) 80(.9 2. 07) . 01) 20(.6 6. 25) 70(.5 23.0(0. 47.0(1.85) 64.0(2.52) 32.0(1.26) 3.0(0.12) 20.0(0.79) 48.0(1.89) 62.0(2.44) mm(in.) ISO-K TURBOVAC (T)450iX F m(n) 1. 43) 80(.7 2. 07) 0. 39) 3. 54) 40(.3 56.0(2.2) 54.0(2.13) 138.0(5.43) 101.0(3.98) 20.0(0.79) 78.0(3.07) 111.0(4.37) mm(in.) CF F m(n) 8. 70) 6. 65 280(.6 2. 08) 60(.2 100(.3 130(.6 76.0(2.99) 103.0(4.06) 110.0(4.33) 26.0(1.02) 21.0(0.83) 248.0(9.76) 165.0(6.5) 180.0(7.09) mm(in.) CF 56.0(2.2) 54.0(2.13) 138.0(5.43) 101.0(3.98) 20.0(0.79) 78.0(3.07) 111.0(4.37) mm(in.) ISO-K TURBOVAC (T)450iX F m(n) 20(.4 4. 18) 00(.9 30(.2 3. 12) 40(.2 4. 18) 23.0(0.91) 47.0(1.85) 64.0(2.52) 32.0(1.26) 3.0 (0.12) 20.0(0.79) 48.0(1.89) 62.0(2.44) mm(in.) CF F m(n) 1. 43) 80(.7 2. 07) 0. 39) 3. 54) 40(.3 56.0(2.2) 54.0(2.13) 138.0(5.43) 101.0(3.98) 20.0(0.79) 78.0(3.07) 111.0(4.37) mm(in.) CF UBVC T 5 X S- m i. 6. 24) 80(.9 2. 07) . 01) 20(.6 6. 25) 70(.5 23.0(0. 47.0(1.85) 64.0(2.52) 32.0(1.26) 3.0(0.12) 20.0(0.79) 48.0(1.89) 62.0(2.44) mm(in.) 76. 103.0(4.06) 110.0(4.33) ISO-K 26.0(1.02) TURBOVAC (T)350iX 21.0(0.83) 235.0(9.25) 165.0(6.5) 130.0(5.12) mm(in.) 56.0(2.2) ISO-K 54.0(2.13) TURBOVAC (T)350iX 138.0(5.43) 101.0(3.98) 20.0(0.79) 78.0(3.07) 111.0(4.37) mm(in.) ISO-K TURBOVAC (T)350iX T ype DN a a

32° 32°

32°

32° a a h h 1 1 a a 1 1 b b 1 1 b b

3 3 Ø d Ø d Ø b b d Ø 1 d b b 1 4 4 2x M6-10 2x M6-10 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 h h a a 2 2 h h h 6 h h h 3 3 h h 4 4 h h 5 5 h h 6 6 h h 7 7 3 7 1 h h b b h h h h VENT VENT 8 8 8 b b h h h 2 2 9 9 9 1 1 h h b G 1/8" G 1/8" DN 25KF DN 25KF 10 2 2 b h PURGE PURGE h h 10 10 h h 11 11 h h 12 12 h h 13 13 h 11 3 3 h b h 12 4 4 h h 0 (2.99) 0 (2.99) 13 5 91) 91) 339

High Vacuum Pumps Technical Data TURBOVAC 350 i / iX 450 i / iX T 350 i / iX T 450 i / iX High-vacuum connection DN 100 ISO-K 160 ISO-K 100 ISO-K 160 ISO-K 100 CF 160 CF 100 CF 160 CF Forevacuum connection DN 25 ISO-KF 25 ISO-KF 25 ISO-KF 25 ISO-KF Pumping speed -1 N2 I x s 290 430 290 430 Ar I x s-1 260 400 260 400 He I x s-1 360 440 360 440 -1 H2 I x s 350 420 320 400 Gas throughput -1 N2 mbar x I x s 4.5 4.5 11.5 11.5 -1 Ar mbar x I x s 2.0 2.0 6.0 6.0 -1 He mbar x I x s 8.0 8.0 20.0 20.0 -1 H2 mbar x I x s 8.0 8.0 20.0 20.0 Compression ratio 11 11 10 10 N2 1 x 10 1 x 10 1 x 10 1 x 10 Ar 1 x 1011 1 x 1011 1 x 1011 1 x 1011 He 1 x 108 1 x 108 1 x 106 1 x 106 6 6 4 4 H2 1 x 10 1 x 10 1 x 10 1 x 10 Ultimate pressure with 2-stage oil-sealed rotary vane vacuum pump ISO-K / CF flange mbar < 10-8 / < 10-10 < 10-8 / < 10-10 < 10-8 / < 10-10 < 10-8 / < 10-10 (Torr) (< 0.75 x 10-8 / (< 0.75 x 10-8 / (< 0.75 x 10-8 / (< 0.75 x 10-8 / < 0.75 x 10-10) < 0.75 x 10-10) < 0.75 x 10-10) < 0.75 x 10-10) Max. forevacuum pressure

N2 mbar (Torr) 10.0 (7.5) 10.0 (7.5) 0.5 (0.375) 0.5 (0.375) Recommended forevacuum pumps TRIVAC D 4 B D 4 B D 16 B D 16 B SCROLLVAC SC 5 D / 15 D SC 5 D / 15 D SC 15 D / 30 D SC 15 D / 30 D DIVAC 3.8 HV3 3.8 HV3 – – Operating speed min-1 (rpm) 60 000 60 000 60 000 60 000 Speed adjustment range % 50 to 100 50 to 100 50 to 100 50 to 100 Run-up time, approx. min 5.5 5.5 3.5 3.5 Ambient temperature during operation °C +5 to +45 +5 to +45 +5 to +45 +5 to +45 (°F) (+41 to +113) (+41 to +113) (+41 to +113) (+41 to +113) during storage °C -15 to -70 -15 to -70 -15 to -70 -15 to -70 (°F) (+5 to -94) (+5 to -94) (+5 to -94) (+5 to -94) Cooling standard Convection Convection Convection Convection optional Air or water Air or water Air or water Air or water Cooling water connection Plug connection Plug connection Plug connection Plug connection for 6 x 1 hose for 6 x 1 hose for 6 x 1 hose for 6 x 1 hose alternatively G 1/8" G 1/8“ G 1/8“ G 1/8“ Screw-in thread Screw-in thread Screw-in thread Screw-in thread Cooling water consumption l/h 50 to 100 50 to 100 50 to 100 50 to 100 Permissible cooling water pressure bar(g) 3 to 6 3 to 6 3 to 6 3 to 6 Permissible cooling water temperature °C +15 to +35 +15 to +35 +15 to +35 +15 to +35 (°F) (+59 to +95) (+59 to +95) (+59 to +95) (+59 to +95) Noise level with convection cooling db(A) < 44 < 44 < 44 < 44 with radial cooler db(A) < 47 < 47 < 47 < 47 with axial cooler db(A) < 49 < 49 < 49 < 49

340 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold (lbs) kg IP Weight ISO-K/CF Accessory connection Other interfaces VDC W Interfaces A Type ofprotection at ultimatepressure Power consumption Max. powerconsumption Max. current consumption Supply voltage the integratedDriveElectronics Technical Datafor Frequency Converter(iVersion) Additional Technical Dataforthe (lbs) kg V/W Weight ISO-K/CF Gauge headconnection (cooler orvalvesupply) IP Max. loadforthe24VDCoutput VDC W Interfaces A Type ofprotection W Power consumptionatultimatepressure Max. powerconsumption Max. current consumption Supply voltage and Vacuum SystemController the integratedDriveElectronics Technical Datafor Frequency Converter(iXVersion) Additional Technical Dataforthe Accessory connections

W Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 . 20 . 30 . 15 7.7/12.5 (17.0/27.6) 7.5/11.5 (16.5/25.4) 8.2/13.0 (18.1/28.7) (17.6/26.5) 8.0/12.0 15-way Sub-D 15-way Sub-D 15-way 15-way Sub-D Sub-D 4/mx 2 4/mx 2 4/mx 2 24/max.12 24/max.12 24 / max.12 24/max.12 4 C 4 C 4 C 24VDC 24VDC 24VDC 24VDC c.M8cnetr c.M8cnetr c.M8cnetr 3pcs.M8connector 3pcs.M8connector 3pcs.M8connector 3pcs.M8connector rfbs .) rfbs .) rfbs .) Profibus, ...) Profibus, ...) Profibus, ...) Profibus, ...) S45 S22 R 8,R 3, S45 S22 RS485,232, RS485,232, RS485,232, RS485,232, nbs(ihr nbs(ihr nbs(ihr Anybus(either Anybus(either Anybus(either Anybus(either USB+,15 pin standard, USB+,15 pin standard, USB+,15 pin standard, USB+,15 pin standard, USB+,15pinstandard, USB+,15pinstandard, USB+,15pinstandard, USB+,15pinstandard, 2 2 2 20 40 20 40 20 40 40 7.2/12.0 20 (15.9/26.5) 7.0/11.0 240 240 (15.4/14.3) 7.7/12.5 (17.0/27.6) (16.5/25.4) 7.5/11.5 0a 4 C 0a 4 C 0a 4 C 10at24VDC 10at24VDC 10at24VDC 24VDC 10at24VDC 24VDC 24VDC 24VDC 44 1% 44 1% 44 1% 24/48±10% 24/48±10% 24/48±10% 24/48±10% Uponrequest RS485,USB, Uponrequest 40 15-pindigitalI/O 20 RS 485, USB, Uponrequest 15-pindigitalI/O 40 24/48±10% 240 RS485,USB, 20 1pcs.M8connector 15-pindigitalI/O 1pcs.M8connector Uponrequest 1pcs.M8connector 1pcs.M8connector 10at24VDC 15-pindigitalI/O 40 240 RS485,USB, 24/48 ±10% 20 10at24VDC 40 240 24/48±10% 10at24VDC 20 10at24VDC 240 24/48±10% 5 X 5 X 5 X T450iX T350iX 450iX 350iX T450i T350i 450i 350i TURBOVAC TURBOVAC 341

High Vacuum Pumps Ordering Information TURBOVAC Wide Range Classic 350 i 450 i T 350 i T 450 i

TURBOVAC Part No. Part No. Part No. Part No. with integrated frequency converter, RS 485, USB+ and 15-Pin digital I/O interface DN 100 ISO-K 830051V1000 — 830050V1000 — DN 100 CF 830061V1000 — 830060V1000 — DN 160 ISO-K — 830071V1000 — 830070V1000 DN 160 CF — 830081V1000 — 830080V1000 other interfaces Upon request Upon request Upon request Upon request

Ordering Information TURBOVAC Wide Range Classic 350 iX 450 iX T 350 iX T 450 iX

TURBOVAC Part No. Part No. Part No. Part No. with integrated frequency converter and vacuum system controller, RS 485, USB+ and 15-Pin digital I/O interface DN 100 ISO-K 830051V3300 — 830050V3300 — DN 100 CF 830061V3300 — 830060V3300 — DN 160 ISO-K — 830071V3300 — 830070V3300 DN 160 CF — 830081V3300 — 830080V3300 other interfaces Upon request Upon request Upon request Upon request

Ordering Information TURBOVAC (T) 350 i, iX / 450 i, iX

Mandatory Accessories P PS Part No. Power supply TURBO.POWER integra, including 0.3 (1.1 ft) long cable 800100V0003

Mains cable, 3 m (10.5 ft) EU plug 800102V0002 UK plug 800102V0003 US plug 5-15P, 115 V 800102V1002

Cable pump - TURBO.POWER integra 01 m (3.5 ft) 800096V0100 03 m (10.5 ft) 800096V0300 05 m (17.5 ft) 800096V0500

Mounting kit TURBOVAC DN 100 ISO-K 800134V0020 DN 160 ISO-K 800134V0030 DN 100 ISO-K auf ISO-F 800134V0025 DN 160 ISO-K auf ISO-F 800134V0035 DN 100 CF 800134V0021 DN 160 CF 800134V0031

Forevacuum pump TRIVAC D 4 B TRIVAC D 16 B see Catalog Part „Oil Sealed Vacuum Pumps“

SCROLLVAC SC 5 D SCROLLVAC SC 15 D DIVAC 3.8 HV3 see Catalog Part „Dry Compressing Vacuum Pumps“

342 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Accessories, optional The flangemounting componentsandtheinletscreen are notincludedinthedelivery High andforevacuum flangesare protective-capped Included intheDeliveryof thePump DN160CF DN100CF Coarse inletscreen, 3.2mm(0.13") mesh DN160CF DN100CF Fine Inletscreen, 0.8mm(0.03")mesh DN160ISO-K/F DN100ISO-K/F withcoarseinletscreen, 3.2mm(0.13")mesh DN160ISO-K/F DN100ISO-K/F withfineinletscreen, 0.8mm(0.03")mesh Centering ring DN160CF DN100CF DN160ISO-K DN100ISO-K absorber Vibration DN160CF, 115V DN160CF, 230V DN100CF, 115V DN100CF, 230V Flange heater Air filter, G1/8" Purge gasthrottle, 24sccm Purge gasvalve,24VDC,G1/8",sccm Power failure ventingvalve,24VDC,G1/8" Venting valve,24VDC,G1/8" Water coolingTURBOVAC 350/450i axial radial Air coolerTURBOVAC 350/450i Start stopswitch Relay boxforforevacuum pump,1-phase,10A Y cableM8 US-plug 5-15P, 115V UK-plug EU-plug Mains cable,3m(10.5ft)( USB cable2.0,Type A/B,1.8m(6.3ft)long 24/48 VDCInplugTURBOVAC 20m(70ft) 10m(35ft) Heating Venting andpurgegas Cooling Cable pump-TURBO.CONTROL300 Power supplyandcontrol unitTURBO.CONTROL300 Power supply, cable,otheraccessories leybold Ordering Information 0 0 0 5 m(17.5ft) 3 m(10.5ft) 1 m(3.5ft) TURBOVAC (T)450i,iX TURBOVAC (T)350i,iX iiX FC P for connection of the heating collar) for connectionoftheheatingcollar) Connecting cable

Oerlikon Leybold Vacuum FullLine Catalog 2015/2016

P P (TURBO.CONTROL 300) TURBO.POWER integra PS

TURBOVAC (T)350i/450 i Mains cable 800132V0031 800132V0021 800132V0032 800132V0022 800133V0031 800133V0021 800133V0032 800133V0022 800131V1100 800102V1002 800102V0003 800102V0002 800137V0008 800137V0007 800137V0006 800137V0005 800110V0022 800120V0014 800120V0013 800120V0022 800120V0012 800135V0005 800136V0006 800136V0005 800110V0021 800110V0030 800110V0020 800110V0108 800090V0000 800092V2000 800092V1000 800092V0500 800092V0300 800092V0100 800100V0001 Part No. 500072 500071 500073

343

High Vacuum Pumps Special Turbomolecular Pumps

The TURBOVAC 350-400 i Multi Inlet Performance line has been especially developed to - Industry-leading pumping speed meet the requirements of analytical especially for light gases (up to 60 % instruments and features an extremely higher than existing products) high level of flexibility, allowing you to choose the number, height and posi- - Optimized rotor diameter to provide tion of the multiple vacuum ports. The maximum pumping performance result: a pump that is perfectly fitted to - > 40 l/s pumping speed at Inter- your specific performance needs and stage port 2 installation requirements.

Additionally, we offer the support and Flexibility experience in vacuum system design - Vacuum port design flexibility which opens a wide range of possibili- - Rotatable fore-vacuum port ties, from the adaptation of the pump - Multiple interstage ports housing to your vacuum chamber - High level of flexibility in terms of through to the design of a custom-built height and position of vacuum TURBOVAC i Multi Inlet Cartridge housing/chamber that meets your par- ports ticular needs. Your benefit: optimum Precision is key when it comes to ana- system integration of the pump(s) into - Unique cartridge solutions for opti- lytical instruments. your instrument and a reduced time to mized system integration with fast Outfitted with two or more inlets, the market. and simple field replacement innovative turbopumps with integrated - Special pump housing solutions drive electronics provide extraordinary adapted to your instrument pumping performance and are adapta- Your Advantage - Complete vacuum system design ble to the system requirements of each - Perfect integration of the pump(s) including your vacuum chamber instrument. within your instrumentation - Variable rotor and Holweck design In combination with our support for the - Cutting of system costs to adapt the performance to your whole vacuum system design, it will - Smaller size of the analytical system application result in the best possible level of pump system integration you have ever expe- - Reduction in the number of individu- rienced. al vacuum components Installation, operation and control - Choice between cartridge and cus- - Integrated 24/48 V DC drive elec- tom pump housing tronics to avoid expensive cabling - Widest range of communication In order to simplify installation, opera- interfaces: USB, RS 485 and remote tion and control, all TURBOVAC i vari- 15 pin digital I/O as standard ants feature an integrated electronic options drive with 24/48 V DC supply and a - Highly efficient motor detachable operator interface with - Thermal isolation by design for opti- USB, RS 485 and digital I/O connec- mized cooling of bearing and tions. improved pump lifetime - Simply-supported shaft reduces vibration - Maintenance free upper passive magnetic bearing - Oil free, lifetime lubricated lower mechanical ceramic ball bearing, field-replaceable

344 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold sensitive applications.Optimizedcool- stress andnegativeimpactonvibration which reduces noise,mechanical results inalowvibrationpumpdesign The simply-supportedshaftsystem that neverneedsanoilchange. innovative lifetimelubricationsystem that’s becauseweequippeditwithan by itsextreme reliability anddurability– hybrid bearingsystemischaracterized The uniquemaintenanceandoilfree Superior reliability which are upto60%higherthanthose speed levelsespeciallyforlightgases increased pumping cations. With mance forallmassspectrometer appli- uct lineprovides thehighestperfor- stage design,ournewMultiInletprod- Thanks toitsvariablerotor anddrag Outstanding performance Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 rates. ty levelsandhighersamplethroughput pressures, improved detectionsensitivi- advantages foryourinstruments:lower the market,itprovides significant offered byotherproducts currently on will bemore efficient than ever. the operationofyourvacuumsystem bination withlowcostsofownership, uptime aswellproductivity. Incom- increased significantly, butalsosystem sequence, notonlypumplifetimeis equipped withapurgeport.Ascon- critical gasesorparticles,allpumpsare motor. To protect thebearingsfrom thermal isolationandthehighlyefficient ing ofthebearingsisensured through Typical Applications Practicallymaintenancefree - Installationanduser friendly - - Favourable price-to-performance Lowcomponentcount - Spaceandweightsaving - Hybridbearingsuspension forlow - Free ofhydrocarbons - Highsamplethroughput - Highdetectionsensitivity - Highefficiency foranalyticalinstru- - Higheffective pumpingspeed - Highgasthroughput - Advantages totheUser upon request Customized versionsare available Compactvacuumsystem - Cartridgesolutions(withoutpump - Higheffective pumpingspeed - Triple inlet(pumpingdown of three - DualInlet(pumpingdownoftwo - Technical Features Heliumleakdetectors - ICP-MS(inductivelycoupledplasma - TOF-MS(time-of-flightmassspec- - GC/MS(linkingofagaschromato- - LC-MS(linkingofaliquidchromato- - For example ratio vibration levels ments housing) are available upto50l/s upto400l/s Interstage IS2 upto300l/s Interstage IS1 HV stage analysis chambers) analysis chambers) mass spectrometry) trometer) graph toamassspectrometer) graph toamassspectrometer) 345

High Vacuum Pumps Mechanical Rotor Suspension without Compound Stage TURBOVAC 50

Typical Applications - Leak detectors - Mass spectrometers - Electron beam microscopy - TV tube manufacturing - Load locks and transfer chambers - High vacuum chambers

DN Technical Features A C - Small footprint

a - Installation in any orientation C - Cooling by convection is sufficient B for most applications h B - Air and water cooling can be added

b easily h2

h1 - Oil-free pump for generating Top view clean high and ultra-high vacuum conditions DN 16 KF Ø d

DN a b d h h1 h2 40 ISO-KF mm 54.5 55 93 166 71.5 119 in. 2.15 2.17 3.66 6.54 2.81 4.69 63 ISO-K mm 54.5 55 93 157.5 71.5 119 in. 2.15 2.17 3.66 6.20 2.81 4.69

Dimensional drawing for the TURBOVAC 50

103 Advantages to the User

N2 - Space-saving He H2 - Easy to integrate into complex -1 l x s vacuum systems 102 - Low operating costs - Highly reliable operation also in processes loaded with particles 101 Pumping Speed

0 10 2468 -3 -2 -1 0 1 10-5 10-4 10 10 10 10 10 mbar Inlet Pressure

Pumping speed as a function of the inlet pressure (TURBOVAC 50 with flange DN 63 ISO-K)

346 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection egt prx kg(lbs) IP mm(in.) A V Weight, approx. °C(°F) Dimensions (WxHD) W Admissible ambienttemperature 50/60Hz Protection rating Max. outputcurrent Max. outputvoltage Max. powerconsumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio Technical Data e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

. 44 2.0(4.4) 2.0(4.4) 1 o+5(5 o+5 +10to+35(+50+95) +10to+35(+50+95) o7 3to7 3to7 5t 5 15to25 15to25 0m oenzl 10mmhosenozzle 10mmhosenozzle i ae Air/Water Convection Air/Water Convection 1x10 200 72000 +10to+55(+50+131) TRIVAC D2,5E 15 45 2 +10to+55(+50+131) 72000 15 TRIVAC D2,5E 45 2 (.*"(2. *q("% (2. *%q"% 2x10 5x10 <5x10 2x10 6IOK 16ISO-KF 16ISO-KF 2x10 0.30 0.40 0.80 1.00 30 48 50 0.25 55 0.30 0.70 0.90 28 36 30 33 -1 -8 (7.5x10 (<3.8x10 2 6 6 2 5x10 106 x128233(4.175.049.17) -2 TURBOTRONIK NT10 )

-8 )

0 to+40(+32+104) 100-120 or200-240V TURBOVAC 50 1.5 (3.3) 3 x150 20 45 6 < 5x10 1 x10 2 x10 2 x10 2 x10 -1 -8 (7.5x10 (<3.8x10 2 6 6 2 -2 )

-8 ) 347

High Vacuum Pumps Ordering Information TURBOVAC 50

TURBOVAC 50 P Part No. without Compound Stage

DN 40 ISO-KF, convection 854 00 DN 40 CF, convection 853 99 DN 63 ISO-K, convection 854 01 DN 63 CF, convection 854 02

Mandatory Accessories FC PS Electronic frequency converter TURBOTRONIK NT 10 with EURO plug, 180-240 V 859 00 with US plug, 90-140 V 859 01

Connecting cable converter – TURBOVAC 01.0 m (03.5 ft) 200 11 609 03.0 m (10.5 ft) 121 08 05.0 m (17.5 ft) 121 09 10.0 m (35.0 ft) 161 10 20.0 m (70.0 ft) 800150V2000

Forevacuum pump TRIVAC D 2,5 E 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 000 110-120 V, 200-240 V, 50/60 Hz; without plug, world version 140 001 110-120 V, 50/60 Hz; NEMA plug, US version 140 002 100 V, 50/60 Hz; NEMA plug, Japan version 140 003

For further types, see Catalog Part “Oil sealed Vacuum Pumps”

348 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold P Connecting cable, max. 20 m FC TURBOVAC 50 Mains cable PS

NT 10

Ordering Information TURBOVAC 50 High Vacuum Pumps Vacuum Accessories, optional Part No.

Air cooling unit 230 V AC 854 05 100 - 115 V AC 800152V0015

Water cooling kit (hose nozzles [ 10 mm (0.4 in.) 800135V0003

Vibration absorber DN 63 ISO-K 800131V0063

Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, normally open 24 V DC, DN 16 ISO-KF 800120V0021 Included in the Delivery of the Pump P Inlet screen, centering ring with FPM sealing ring, outer ring ISO-K

Inlet screen, centering ring with FPM O-ring, clamping ring ISO-KF

Centering ring with O-ring, clamping ring Foreline Flange Included in the Delivery of the Frequency Converter FC PS Mains cable

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 349 Mechanical Rotor Suspension without Compound Stage TURBOVAC 151, 151 C ClassicLine

Turbomolecular pumps without a purge gas facility are only suited for pumping of air or inert gases. They are not suited for pumping of aggressive or reactive gases.

TURBOVAC pumps with a “C” in the type designation are equipped with a purge gas facility. The purge gas protects the bearing area and the motor of the TURBOVAC.

Typical Applications

DN A 60° F - Leak detectors C - Mass spectrometers a ° a1 a2 30 - Optical coating C B - R & D D h - UHV systems B D E - Particle accelerators h3 E ød1 h1 l h4 20° - Load locks and transfer chambers h2 Top view b ød Technical Features - Small footprint 151 151 C - Operation in any orientation DN h h h1 h2 h3 h4 a a1 a2 b d d1 l 100 ISO-K mm 207 207 88 47 126 73 76 79 78 76 132 10 136 - Oil-free pump for generating clean in. 8.14 8.14 3.46 1.85 4.96 2.87 2.99 3.11 3.07 2.99 5.20 0.39 5.35 high and ultra-high vacuum 100 CF mm 224 – – 47 126 73 76 79 78 76 132 10 136 in. 8.82 – – 1.85 4.96 2.87 2.99 3.11 3.07 2.99 5.20 0.39 5.35 conditions - Bearing temperature measurement Dimensional drawing for the TURBOVAC 151 and 151 C through the TURBO.DRIVE TD 20 classic 1000 500 Advantages to the User I x s-1 200 - Space-saving

100 - Easy to integrate into complex vacuum systems

Pumping Speed - Low operating costs - Highly reliable operation also in 10 -6 2468-5 -4 -3 -2 -1 processes loaded with particles 10 10 10 10 10 mbar 10

N2 Inlet Pressure Ar He H2

Pumping speed as a function of the inlet pressure (TURBOVAC 151 with flange DN 100)

350 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection egt prx kg(lbs) IP mm(in.) A Weight, approx. V °C(°F) Dimensions (WxHD) Admissible ambienttemperature W Protection rating 50/60Hz Interface Max. outputcurrent Max. outputvoltage Max. powerconsumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio Technical Data e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

5x10 8x10 2x10 1x10 rmTIA D4Bt 6B from TRIVAC D4Bto16 from TRIVAC D4Bto16 1x10 1.0 25ISO-KF 1.5 100CF 1.3 1.5 115 135 1.0 150 1.5 145 1.3 1.5 25ISO-KF 115 100ISO-K 135 150 145 <1x10 1) 8(17) 3to7 15to35 10to25(5077) 10mmhosenozzle 8(17) 3to7 50000 10to25(5077) 10to55(50131) 15to35 Air Water 10mmhosenozzle 70 300 10to55(50131) 2 Air Water 50000 70 300 2 Without, RS232C,485Profibus or25-wayterminalstrip Without, -10 -1 (3.8x10 (<7.5x10 4 9 9 2 213 x128315(8.395.0412.40) TURBO.DRIVE TD20 -1 100 to240V(+15%/-10%) ) TURBOVAC 151(C)

-11 0 to+45(+32+113) )

4.0 (8.8) 3 x47 500 20 5 < 1x10 classic 5 x10 -10 2 x10 1 x10 1 x10 8 x10 -1 (3.8x10 (<7.5x10 4 9 9 2

-1 ) -11 ) 351

High Vacuum Pumps Ordering Information TURBOVAC 151 (C)

TURBOVAC 151 (C) P Part No. without Compound Stage

DN 100 ISO-K, water-cooled 856 31 DN 100 ISO-K, water-cooled (C version) 856 35 DN 100 CF, water-cooled 856 32 DN 100 CF, water-cooled (C version) 103 41

Mandatory Accessories FC PS TURBO.DRIVE TD 20 classic without interface 800075V0001 with RS 232 C interface 800075V0002 with RS 485 C interface 800075V0004 with Profibus 800075V0003 with 25-pol I/O 800075V0005 Connecting cable TURBOVAC - frequency converter 003 m (10.5 ft) 857 65 005 m (17.5 ft) 857 66 010 m (35.0 ft) 857 67 020 m (70.0 ft) 857 68 050 m (175.0 ft) 800152V0008 060 m (210.0 ft) 800152V0007 080 m (280.0 ft) 800152V0080 140 m (490.0 ft) 800152V0140 Mains cable 3 m (10.5 ft) EURO plug 800102V0002 UK plug 800102V0003 US plug 5-15 P 800102V1002 2 m (7.5 ft) US plug 115 V AC 992 76 513 Forevacuum pump TRIVAC D 4 B 1 phase motor; 230 V, 50 Hz 112 45 1 phase dual voltage motor; 100-120 V / 200-240 V; 50/60 Hz 140 081 1) TRIVAC D 8 B 1 phase motor; 230 V, 50 Hz 112 55 1 phase dual voltage motor; 100-220 V / 200-240 V; 50/60 Hz 140 082 1) TRIVAC D 16 B 1 phase motor; 230 V, 50 Hz 112 65 1 phase motor; 230 V, 50/60 Hz 113 25 3 phase motor; 200-240 V/380-400 V, 50 Hz / 200-240 V/380-480 V, 60 Hz 112 66 SCROLLVAC SC 30 D 1 phase motor; 200-230 V, 50/60 Hz 133 002 1 phase motor; 100-115 V, 50/60 Hz 133 102 3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V 60 Hz 133 004 For further types, see Catalog Parts “Oil Sealed Vacuum Pumps” and “Dry Compressing Vacuum Pumps”

1) The mains cord (Part No. 200 81 091) must be ordered additionally

352 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold P

Connecting cable FC TURBOVAC 151 (C) Mains cable PS

TURBO.DRIVE TD20 classic

Ordering Information TURBOVAC 151 (C)

Accessories, optional Part No.

Air cooling unit High 230 V AC 855 31 Vacuum Pumps Vacuum 100 - 115 V AC 800152V0016

Flange heater DN 100 CF, 230 V, 50 Hz 854 27 DN 100 CF, 115 V, 60 Hz 854 28

Vibration absorber DN 100 ISO-K 800131V0100 DN 100 CF 500 071

Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF 800120V0021

Purge gas and venting valve gas flow at 1 bar 0.4 mbar x l x s-1 (24 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC 800152V0014 100 - 115 V AC 800152V0041 24 V DC 800152V0013

Gas filter to G 1/4" for purge gas and venting valve 800110V0012

Replacement filter (for gas filter to G 1/4" for purge gas and venting valve) E 200 18 515 Included in the Delivery of the Pump P Inlet screen, centering ring with FPM sealing ring, outer ring ISO-K

Inlet screen CF

Centering ring with O-ring, clamping ring Foreline Flange

Pivoted threaded fittings to replace the included hose nipples Water Cooling

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 353 Mechanical Rotor Suspension without Compound Stage TURBOVAC 361, 361 C ClassicLine

Turbomolecular pumps without a purge gas facility are only suited for pumping of air or inert gases. They are not suited for pumping of aggressive or reactive gases.

TURBOVAC pumps with a “C” in the type designation are equipped with a purge gas facility. The purge gas protects the bearing area and the motor of the TURBOVAC.

Typical Applications DN A Top view - Leak detectors

l - Mass spectrometers a a 60∞ F - Data storage C C b ød h 30∞ - Optical coating D E - R & D h3 B B h4 h1 - UHV systems h2 D - Particle accelerators E ød a 1 - Load locks and transfer chambers 20∞ 361 361 C

DN h h h1 h2 h3 h4 a b d1 l Technical Features 100 ISO-K mm 254 254 88 47 135 77 98 94 10 166 in. 10 10 3.46 1.85 5.31 3.03 3.86 3.70 0.39 6.54 - Small footprint 100 CF mm 268 – – 47 135 77 98 94 10 166 - Installation in any orientation in. 10.55 – – 1.85 5.31 3.03 3.86 3.70 0.39 6.54 160 ISO-K mm 227 227 88 47 135 77 98 94 10 166 - Oil-free pump for generating clean in. 8.94 8.94 3.46 1.85 5.31 3.03 3.86 3.70 0.39 6.54 high and ultra-high vacuum 160 CF mm 226 – – 47 135 77 98 94 10 166 conditions in. 8.90 – – 1.85 5.31 3.03 3.86 3.70 0.39 6.54 - Bearing temperature measurement Dimensional drawing for the TURBOVAC 361 and 361 C through the TURBO.DRIVE TD 20 classic Torr 10-6 10-5 10-4 10-3 10-2 750

1000 500 cfm Advantages to the User 500 I x s-1 - Space-saving

200 100 - Easy to integrate into complex vacuum systems 100 50 - Low operating costs Pumping Speed - Highly reliable operation also in

10 processes loaded with particles

10 2468 10-6 10-5 10-4 10-3 10-2 10-1 mbar N2 Intake Pressure Ar He H2

Pumping speed as a function of the inlet pressure (TURBOVAC 361 with flange DN 100)

354 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection Technical Data egt prx kg(lbs) IP mm(in.) A Weight, approx. V °C(°F) Dimensions (WxHD) Admissible ambienttemperature W Protection rating 50/60Hz Interface Max. outputcurrent Max. outputvoltage Max. powerconsumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

5x10 3x10 6x10 1x10 rmTIA D1 oD2 from TRIVAC D16Bto25 from TRIVAC D16Bto25 2 % (2. *q"% (2. *q"% <1x10 2(6 12(26) 3to7 15to35 10to25(5077) 10mmhosenozzle 12(26) 3to7 45000 10to25(5077) 10to55(50131) 15to35 Air Water 10mmhosenozzle 70 300 10to55(50131) 2 Air Water 45000 70 300 2 1x10 2.0 25ISO-KF 3.0 2.5 3.0 370 380 2.0 410 3.0 400 2.5 3.0 25ISO-KF 340 340 350 345 Without, RS232C,485Profibus or25-wayterminalstrip Without, -10 -1 (<7.5x10 (4x10 4 9 9 3 213 x128315(8.395.0412.40) TURBO.DRIVE TD20 -1 ) 100 to240V(+15%/-10%)

TURBOVAC 361(C) -11 0 to+45(+32+113) )

4.0 (8.8) 3 x47 500 20 5 < 1x10 classic 5 x10 -10 6 x10 1 x10 1 x10 3 x10 -1 (3.8x10 (<7.5x10 4 9 9 3

-1 ) -11

) 355

High Vacuum Pumps Ordering Information TURBOVAC 361 (C)

TURBOVAC 361 (C) P Part No. without Compound Stage

DN 100 ISO-K, water-cooled 856 70 DN 100 ISO-K, water-cooled (C version) 856 75 DN 100 CF, water-cooled 856 71 DN 100 CF, water-cooled (C version) 112 09 DN 160 ISO-K, water-cooled 856 72 DN 160 ISO-K, water-cooled (C version) 856 77 DN 160 CF, water-cooled 856 73

Connecting cable TURBOVAC - frequency converter 003 m (10.5 ft) 857 65 005 m (17.5 ft) 857 66 010 m (35.0 ft) 857 67 020 m (70.0 ft) 857 68 050 m (175.0 ft) 800152V0008 060 m (210.0 ft) 800152V0007 080 m (280.0 ft) 800152V0080 140 m (490.0 ft) 800152V0140

Mains cable 3 m (10.5 ft) EURO plug 800102V0002 UK plug 800102V0003 US plug 5-15 P 800102V1002 2 m (7.5 ft) US plug 115 V AC 992 76 513 Forevacuum pump TRIVAC D 16 B 1 phase motor; 230 V, 50 Hz 112 65 1 phase motor; 230 V, 50/60 Hz 113 25 3 phase motor; 200-240 V/380-400 V, 50 Hz / 200-240 V/380-480 V, 60 Hz 112 66 TRIVAC D 25 B 1 phase motor; 230 V, 50 Hz 112 75 1 phase motor; 230 V, 50/60 Hz 113 35 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 112 76 SCROLLVAC SC 30 D 1 phase motor; 200-230 V, 50/60 Hz 133 002 1 phase motor; 100-115 V, 50/60 Hz 133 102 3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V, 60 Hz 133 004 For further types, see Catalog Parts “Oil Sealed Vacuum Pumps” and “Dry Compressing Vacuum Pumps”

356 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold P

Connecting cable FC TURBOVAC 361 (C) Mains cable PS

TURBO.DRIVE TD20 classic

Ordering Information TURBOVAC 361 (C)

Accessories, optional Part No.

Air cooling unit High 230 V AC 855 31 Vacuum Pumps Vacuum 100 - 115 V AC 800152V0016

Flange heater DN 100 CF, 230 V, 50 Hz 854 27 DN 100 CF, 115 V, 60 Hz 854 28 DN 160 CF, 230 V, 50 Hz 854 37 DN 100 CF, 115 V, 60 Hz 854 38

Vibration absorber DN 100 ISO-K 800131V0100 DN 100 CF 500 071 DN 160 ISO-K 500 073 DN 160 CF 500 072

Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF 800120V0021

Purge gas and venting valve gas flow at 1 bar 0.4 mbar x l x s-1 (24 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC 800152V0014 100 - 115 V AC 800152V0042 24 V DC 800152V0013

Gas filter to G 1/4" for purge gas and venting valve 800110V0012

Replacement filter E 200 18 515 Included in the Delivery of the Pump P Inlet screen, centering ring with FPM sealing ring, outer ring ISO-K

Inlet screen CF

Centering ring with O-ring, clamping ring Foreline Flange

Pivoted threaded fittings to replace the included hose nipples Water Cooling

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 357 Mechanical Rotor Suspension without Compound Stage TURBOVAC 600 C ClassicLine

Typical Applications - Load locks and transfer chambers - Optical coating - Flat panel displays - R & D

Technical Features Bottom view - Small footprint DN A a a1 - Installation in any orientation C b1 E - Oil-free pump for generating clean b high and ultra-high vacuum condi- d 90° F C* B tions h E - Bearing temperature measurement D* h b2 1 D through the TURBO.DRIVE h h E B 2 classic 5 h3 TD 20 * drawn offset by 45° - Seal gas connection h 4 - Venting connection

[ DN h h1 h2 h3 h4 h5 a a1 b b1 b2 d 160 ISO-K mm 317 175 116 97 28 105 134 124.5 178 124.7 124.5 225 in. 12.48 6.89 4.57 3.82 1.10 4.13 5.28 4.90 7.01 4.91 4.90 8.86 160 CF mm 323 175 116 97 28 105 134 124.5 178 124.7 124.5 225 in. 12.72 6.89 4.57 3.82 1.10 4.13 5.28 4.90 7.01 4.91 4.90 8.86

Dimensional drawing for the TURBOVAC 600 C

Advantages to the User 1000 600 - Installation in any orientation 500 - Highly reliable due to hybrid ceramic l x s-1 200 ball bearings He 100 H 2 N 2 Ar Pumping Speed

10 2 4 6 8 -6 -5 -4 -3 -2 -1 10 10 10 10 10 mbar10 Pressure

Pumping speed for different gases as a function of intake pressure (TURBOVAC 600 C with flange DN 160 ISO-K)

358 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection Technical Data egt prx kg(lbs) IP mm(in.) A Weight, approx. V °C(°F) Dimensions (WxHD) Admissible ambienttemperature W Protection rating 50/60Hz Interface Max. outputcurrent Max. outputvoltage Max. powerconsumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

Without, RS232C,485Profibus or25-wayterminalstrip Without, 213 x128315(8.395.0412.40) TURBO.DRIVE TD20 100 to240V(+15%/-10%) TURBOVAC 600C < 1.0x10 TRIVAC D25 B/D40 0 to+45(+32+113) 1.0 x10 (2. *q"% 10 to55(50131) 10 mmhosenozzle 10 to30(5086) 17.0 (37.5) 40 ISO-KF 1.1 x10 2.0 x10 20 to80 4.0 (8.8) 36 000 3 x47 3 to7 Water -10 > 10 > 10 -1 500 400 570 600 550 560 4.0 5.5 4.0 4.0 Air 20 90 (7.5x10 (<7.5x10 5 3

9 9

4 3

-2 )

-11 ) classic 359

High Vacuum Pumps Ordering Information TURBOVAC 600 C

TURBOVAC 600 C P Part No. without Compound Stage

DN 160 ISO-K, water-cooled 800150V0015 DN 160 CF, water-cooled 800150V0017

Mains cable 3 m (10.5 ft) EURO plug 800102V0002 UK plug 800102V0003 US plug 5-15 P 800102V1002 2 m (7.5 ft) US plug 115 V AC 992 76 513 Forevacuum pump TRIVAC D 25 B 1 phase motor; 230 V, 50 Hz 112 75 1 phase motor; 230 V, 50/60 Hz 113 35 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz; 112 76 TRIVAC D 40 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 112 86 3 phase motor; 200/346 V, 50 Hz / 208/360 V, 60 Hz 113 47 SCROLLVAC SC 30 D 1 phase motor; 200-230 V, 50/60 Hz 133 002 1 phase motor; 100-115 V, 50/60 Hz 133 102 3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V, 60 Hz 133 004 For further types, see Catalog Parts “Oil Sealed Vacuum Pumps” and “Dry Compressing Vacuum Pumps”

360 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold P

Connecting cable FC TURBOVAC 600 C Mains cable PS

TURBO.DRIVE TD20 classic

Ordering Information TURBOVAC 600 C

Accessories, optional Part No.

Air cooling unit High 230 V AC 855 41 Vacuum Pumps Vacuum 100 - 115 V AC 800152V0017

Flange heater DN 160 CF, 230 V, 50 Hz 854 37 DN 100 CF, 115 V, 60 Hz 854 38

Vibration absorber DN 160 ISO-K 500 073 DN 160 CF 500 072

Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF 800120V0021

Purge gas and venting valve gas flow at 1 bar 0.6 mbar x l x s-1 (36 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC 800152V0040 100 - 115 V AC 800152V0043 24 V DC 800152V0012

Gas filter to G 1/4" for purge gas and venting valve 800110V0012

Replacement filter E 200 18 515 Included in the Delivery of the Pump P Inlet screen, centering ring with FPM sealing ring, outer ring ISO-K

Inlet screen CF

Centering ring with O-ring, clamping ring Foreline Flange

Pivoted threaded fittings to replace the included hose nipples Water Cooling

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 361 Mechanical Rotor Suspension without Compound Stage TURBOVAC 1000 C ClassicLine

Typical Applications - Research systems

Technical Features DN A Bottom view 1) DN 40 ISO-KF, D - Robust rotor design d cast base flange 2) a1 C E 45°α DN 63 ISO-K, - Installation in any orientation d B h 1 h screwed in D 4 F - Highest pumping speed and E B (C) α h1 h h E highest throughput F 2 3 b - Bearing temperature measurement a through the TURBO.DRIVE DN h h h h h a a b[ d [ d classic 1 2 3 4 1 1 TD 20 160 ISO-K/40 ISO-KF 1) mm 338 111 102 123 62 140 133 141 241 258 in. 13.31 4.37 4.02 4.84 2.44 5.51 5.24 5.55 9.49 10.16 - Seal gas connection 2) 160 ISO-K/63 ISO-K mm 341 111 94 123 62 153 133 152 241 258 - Venting connection in. 13.43 4.37 3.7 4.84 2.44 6.02 5.24 5.98 9.49 10.16 160 CF/40 ISO-KF 1) mm 348 108 99 121 83 140 133 141 241 258 in. 13.70 4.25 3.90 4.76 3.27 5.51 5.24 5.55 9.49 10.16 200 ISO-K/40 ISO-KF 1) mm 351 111 102 123 62 140 133 141 241 258 in. 13.82 4.37 4.02 4.84 2.44 5.51 5.24 5.55 9.49 10.16 200 CF/40 ISO-KF 1) mm 336 108 99 121 83 140 133 141 241 258 in. 13.23 4.25 3.90 4.76 3.27 5.51 5.24 5.55 9.49 10.16 250 ISO-K/40 ISO-KF 1) mm 307 108 99 121 83 140 133 141 241 258 in. 12.09 4.25 3.90 4.76 3.27 5.51 5.24 5.55 9.49 10.16 250 ISO-K/63 ISO-K ISO-KF 2) mm 310 111 94 121 91 153 133 141 241 258 in. 12.20 4.37 3.70 4.76 3.58 6.02 5.24 5.55 9.49 10.16

Dimensional drawing for the TURBOVAC 1000 C

Advantages to the User 10000 l x s-1 - Installation in any orientation

1500 TURBOV AC 1000 C - Highly reliable due to hybrid ceramic 1000 500 ball bearings 200 - Standard model: 100 water cooling Pumping Speed - Purge gas facility

10 2468 -6 -5 -4 -3 -2 -1 10 10 10 10 10 mbar 10 Pressure

Pumping speed for air as a function of intake pressure (TURBOVAC 1000 C with DN 250 flange)

362 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection Technical Data egt prx kg(lbs) IP mm(in.) A Weight, approx. V °C(°F) Dimensions (Wx HxD) Admissible ambienttemperature W Protection rating 50/60Hz Interface Max. outputcurrent Max. outputvoltage Max. powerconsumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed forpurgegasoperation forstandard operation Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

50(51 2. 5.) 25(55.1) 25.0(55.1) 10to30(5086) 10to30(5086) 25.0(55.1) 10to30(5086) o7 o7 3to7 3to7 3to7 0t 0 0t 0 20to80 20to80 10mmhosenozzle Air Water 10mmhosenozzle 20to80 Air 10to55(50131) 200 10mmhosenozzle Water 300 9 10to55(50131) Air 200 Water 300 10to55(50131) 9 200 300 9 600 600 36000 36000 36000 RVC 0B/D6 TIA D4 5B TRIVAC D40B/65 TRIVAC D40B/65 TRIVAC D40B/65 2 % 2 % (2. * (2. *q"% (2. *q"%

<1x10 5x10 5x10 1x10 RVC 5B/D4 TIA D2 0B TRIVAC D25B/40 TRIVAC D25B/40 TRIVAC D25B/40 (.*(.* (.*(2. *%q(2. * (2. *% (2. *%q(2. * 80 . 8.0 7.0 4.0 >1x10 6.5 8.0 7.0 1000 4.0 1000 6.5 1100 8.0 1150 7.0 970 4.0 975 6.5 1050 1100 900 880 810 850 > 1x10 -10 -2 (3.8x10 (<7.5x10 Without, RS232C,485Profibus or25-wayterminalstrip Without, 4 4 5x10 1x10 9 9 >1x10 >1x10 -2 5x10 ) -11 213 x128315 (8.39 x5.0412.40) <1x10 ) TURBO.DRIVE TD20 100 to240V(+15%/-10%) TURBOVAC 1000C 0 to+45(+32+113) 4.0 (8.8) -10 3 x47 -2 500 (3.8x10 (<7.5x10 20 5 4 4 5x10 1x10 9 9 >1x10 >1x10 -2 5x10 ) -11 <1x10 ) classic -10 -2 (3.8x10 (<7.5x10 4 4

9 9

-2 ) -11 363 )

High Vacuum Pumps Ordering Information TURBOVAC 1000 C

TURBOVAC 1000 C P Part No. without Compound Stage

DN 160 ISO-K / DN 40 ISO-KF, water-cooled 855 35 DN 160 ISO-K / DN 63 ISO-K, water-cooled 855 38 DN 160 CF / DN 40 ISO-KF, water-cooled 854 91 DN 200 ISO-K / DN 40 ISO-KF, water-cooled 153 00 DN 200 CF / DN 40 ISO-KF, water-cooled 117 64 DN 250 ISO-K / DN 40 ISO-KF, water-cooled 855 36 DN 250 ISO-K / DN 63 ISO-K, water-cooled 855 39

Mandatory Accessories FC PS

TURBO.DRIVE TD 20 classic without interface 800075V0001 with RS 232 C interface 800075V0002 with RS 485 C interface 800075V0004 with Profibus 800075V0003 with 25-pol I/O 800075V0005

Mains cable 3 m (10.5 ft) EURO plug 800102V0002 UK plug 800102V0003 US plug 5-15 P 800102V1002 2 m (7.5 ft) US plug 115 V AC 992 76 513 Forevacuum pump TRIVAC D 25 B 1 phase motor; 230 V, 50 Hz 112 75 1 phase motor; 230 V, 50/60 Hz 113 35 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 112 76 TRIVAC D 40 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 112 86 3 phase motor; 200/346 V, 50 Hz / 208/360 V, 60 Hz 113 47 TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 112 96 3 phase motor; 230/346 V, 50 Hz / 208/360 V, 60 Hz 113 57 SCROLLVAC SC 30 D 1 phase motor; 200-230 V, 50/60 Hz 133 002 1 phase motor; 100-115 V, 50/60 Hz 133 102 3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V, 60 Hz 133 004 For further types, see Catalog Parts “Oil Sealed Vacuum Pumps” and “Dry Compressing Vacuum Pumps”

364 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold P

Connecting cable FC Mains TURBOVAC 1000 C PS

TURBO.DRIVE TD20 classic

Ordering Information TURBOVAC 1000 C

Accessories, optional Part No.

Air cooling unit High 230 V AC 855 41 Vacuum Pumps Vacuum 100 - 115 V AC 800152V0017

Flange heater DN 160 CF, 230 V, 50 Hz 854 37 DN 100 CF, 115 V, 60 Hz 854 38

Vibration absorber DN 160 ISO-K 500 073 DN 160 CF 500 072

Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF 800120V0021

Purge gas and venting valve gas flow at 1 bar 0.6 mbar x l x s-1 (36 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC 800152V0040 100-115 V AC 800152V0043 24 V DC 800152V0012

Gas filter to G 1/4" for purge gas and venting valve 800110V0012

Replacement filter E 200 18 515 Included in the Delivery of the Pump P Inlet screen, centering ring with FPM sealing ring, outer ring ISO-K

Inlet screen CF

Centering ring with O-ring, clamping ring Foreline Flange

Pivoted threaded fittings to replace the included hose nipples Water Cooling

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 365 Mechanical Rotor Suspension without Compound Stage TURBOVAC 1100 C ClassicLine

Typical Applications - Data storage - Flat panel displays - Optical coating - Large area coating - Load locks and transfer chambers

Technical Features Top view DN A b - Robust rotor design - Installation in any orientation E 45∞ h 1 a h2 (C) - Highest pumping speed and C h ød highest throughput D h6 h5 F B 45∞ - Bearing temperature measurement B E 45∞ E through the TURBO.DRIVE h3 h4 D classic F TD 20 - Oil-free pump for generating clean a1 high and ultra-high vacuum DN h h h h h h h a a b d 1 2 3 4 5 6 1 conditions 160 ISO-K mm 341 230 247 111 94 63 28.5 133 153 141 258 in. 13.43 9.06 9.72 4.37 3.70 2.48 1.12 5.24 6.02 5.55 10.16 - Seal gas connection 200 ISO-K mm 325 214 231 111 94 63 28.5 133 153 141 258 - Venting connection in. 12.80 8.43 9.09 4.37 3.70 2.48 1.12 5.24 6.02 5.55 10.16 250 ISO-K mm 310 200 217 111 94 63 28.5 133 153 141 258 in. 12.20 7.87 8.54 4.37 3.70 2.48 1.12 5.24 6.02 5.55 10.16

Dimensional drawing for the TURBOVAC 1100 C

-5 -4 -3 -2 -1 Torr Advantages to the User 10 10 10 10 10 750 104 - Space-saving

I x s-1 - Easy to integrate into complex

103 vacuum systems - High productivity

102 - Low operating costs - Highly reliable operation also in processes loaded with particles 1 Pumping Speed 10 8 6 4

2 100 -5 2468 -4 -3 -2 -1 10 10 10 10 10 mbar 1 N2 Inlet Pressure Ar H2

Pumping speed as a function of the inlet pressure (TURBOVAC 1100 C with flange DN 250)

366 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection Technical Data egt prx kg(lbs) IP mm(in.) A Weight, approx. V °C(°F) Dimensions (Wx HxD) Admissible ambienttemperature W Protection rating 50/60Hz Interface Max. outputcurrent Max. outputvoltage Max. powerconsumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

2(8 2 4) 22(48) 22(48) 10to30(5086) 10to30(5086) 22(48) 10to30(5086) o7 o7 3to7 3to7 3to7 4t 0 4t 0 24to60 24to60 10mmhosenozzle Air Water 10mmhosenozzle 24to60 Air 10to55(50131) 300 10mmhosenozzle Water 400 9 10to55(50131) Air 300 Water 400 10to55(50131) 9 300 400 9 000 000 30000 30000 30000 90 . 9.0 8.0 6.5 63ISO-K >1x10 6.5 9.0 250ISO-K 8.0 630 6.5 850 6.5 980 9.0 1050 63ISO-K 8.0 600 6.5 750 200ISO-K 6.5 760 830 520 650 660 63ISO-K 710 160ISO-K RVC 5B/ RVC 5B/ TRIVAC D65B/ TRIVAC D65B/ SCROLLVAC SC15/30D SCROLLVAC SC15/30D TRIVAC D65B/ SCROLLVAC SC15/30D <1.0x10 <3.0x10 3x10 >1x10 1x10 -10 -1 Without, RS232C,485Profibus or25-wayterminalstrip Without, (<7.5x10 (<2.3x10 4 3 7 7 -2 -10 213 x128315 (8.39 x5.0412.40) <1.0x 10 ) TURBO.DRIVE TD20 )

100 to240V(+15%/-10%) TURBOVAC 1100C < 3.0x10 0 to+45(+32+113) > 1x10 > 1x10 4.0 (8.8) 3 x10 1 x10 3 x47 -10 -1 500 20 (<7.5x10 (<2.3x10 5 4 3 7 7 -2 -10 <1.0x10 ) )

classic < 3.0x10 > 1x10 > 1x10 3 x10 1 x10 -10 -1 (<7.5x10 (<2.3x10 4 3

7 7

-2 -10 367 ) )

High Vacuum Pumps Ordering Information TURBOVAC 1100 C

TURBOVAC 1100 C P Part No. without Compound Stage

DN 160 ISO-K / DN 63 ISO-K, water-cooled 800150V0030 DN 200 ISO-K / DN 63 ISO-K, water-cooled 800150V0031 DN 250 ISO-K / DN 63 ISO-K, water-cooled 800150V0032

Mains cable 3 m (10.5 ft) EURO plug 800102V0002 UK plug 800102V0003 US plug 5-15 P 800102V1002 2 m (7.5 ft) US plug 115 V AC 992 76 513 Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 112 96 3 phase motor; 230/346 V, 50 Hz / 208/360 V, 60 Hz 113 57 SCROLLVAC SC 30 D 1 phase motor; 200-230 V, 50/60 Hz 133 002 1 phase motor; 100-115 V, 50/60 Hz 133 102 3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V, 60 Hz 133 004 For further types, see Catalog Parts “Oil Sealed Vacuum Pumps” and “Dry Compressing Vacuum Pumps”

368 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold P

Connecting cable FC TURBOVAC 1100 C Mains cable PS

TURBO.DRIVE TD20 classic

Ordering Information TURBOVAC 1100 C

Accessories, optional Part No.

Vibration absorber High DN 160 ISO-K 500 073 Vacuum Pumps Vacuum Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF 800120V0021

Purge gas and venting valve gas flow at 1 bar 0.6 mbar x l x s-1 (36 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC 800152V0040 100-115 V AC 800152V0043 24 V DC 800152V0012

Gas filter to G 1/4" for purge gas and venting valve 800110V0012

Replacement filter E 200 18 515 Included in the Delivery of the Pump P Inlet screen, centering ring with FPM sealing ring, outer ring ISO-K

Inlet screen CF

Centering ring with O-ring, clamping ring Foreline Flange

Pivoted threaded fittings to replace the included hose nipples Water Cooling

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 369 Mechanical Rotor Suspension with Frequency Converter for Attaching or Separate with or without Compound Stage TURBOVAC SL 80 / L 80 H / SL 80 C

Typical Applications - Helium leak detectors - Mass spectrometers (gas chromatography GC-MS), liquid chromatography (LC-MS), residual gas analysis, mobile analytical systems, etc.) - Electron beam microscopy - XHV-/UHV systems - Transfer chambers

Technical Features DN d h h1 h2 63 ISO-K mm 95 145 - 22 - Oil-free pump ISO-K in. 3.74 5.71 - 0.87 CF 63 CF mm 95 166 150 27 - High pressure foreline tolerance Ø d Ø d in. 3.74 5.71 5.91 1.06 - Excellent resistance to vibration due h b b 3 1 to proven mechanical bearings 63 ISO-K mm 17 114 66 in. 0.67 4.49 2.60 - Efficient convection cooling due to a 63 CF mm 22 114 66 large number of cooling fins in. 0.87 4.49 2.60 - Purge gas/venting connection b2 b3 b4 63 ISO-K mm - - - - Installation in any orientation in. - - - ° - Flexible attachment of the frequency 63 CF mm 59 101 117 ° converter to the pump in. 2.32 3.98 4.61 - Small footprint - Delayed venting through the fre- ° ° quency converter TURBO.DRIVE ° TD 400 (optional) ° S ° - Selection of interfaces, USB, ° RS 232 C, RS 485 C, Profibus Dimensional drawing for the TURBOVAC SL 80: attachment examples

Advantages to the User 70 l x s-1 - Easy to integrate into complex N 60 2 Ar vacuum systems He 50 - Space-saving H2 - Prepared for pumping of slightly 40 corrosive gases owing to the seal gas connection 30

Pumping Speed - High reliability,

20 MTTF over 200,000 hours - Matching accessories (fan, water 10 cooling, seal gas/venting valves, power failure venting valves, flange 0 -6 -5 -4 -3 -2 -1 heaters, different cable lengths etc.) 10 10 10 10 10 10 mbar 1 Inlet Pressure - High reliability due to self-monitoring

Pumping speed as a function of the inlet pressure

370 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Torr) mbar Max. foreline pressure forN Ultimate pressure leybold N Compression ratio DN DN N Gas throughput N Pumping speed Outlet Inlet Connection Technical Data egt prx kg(lbs) IP mm(in.) V Weight, approx. °C(°F) Dimensions (Wx HxD) W Admissible ambienttemperature VDC A Protection rating Interface Max. outputvoltage Max. powerconsumption Max. current consumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. (lbs) kg Weight, approx. H H He Ar 2 2 2 2 2 2 Ixs Ixs mbar·Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

>1x10 16ISO-KF 45 50 65 70 49 16ISO-KF 55 60 49 65 49 55 40 55 60 44 60 65 16ISO-KF 34 65 40 4x10 2x10 >1x10 o7 o7 2to7 15to60 2to7 10to40(50104) 15to60 8mmhosenozzle 10to40(50104) 72000 G1/8",insidethread / 8mmhosenozzle 2to7 10to40(50104) 15to60 G1/8",insidethread / 8mmhosenozzle G1/8",insidethread / 17 +15to +45(+50to+113) 72000 120 1.5 +15to+45(+50+113) 17 +15to+45(+50+113) 120 1.5 17 72000 120 1.5 <2x10 63ISO-K 63CF 63ISO-K 63CF 63ISO-K 40ISO-KF 6(2 1 1) 0.35(0.26) 16(12) TRIVAC D2,5E/4B TRIVAC D2,5E/4B 16(12) TRIVAC D2,5E/4B (<1.5x10 ae i Wtr/Ar Water /Air 1.9 (4.19) Water /Air Convection (4.19)(6.84) 1.93.1 (3.97) (4.19) (6.84) 3.1 1.9) 1.8 Convection Water /Air Convection IA 14H3 DIVAC 1.4HV3 DIVAC 1.4HV3 SCROLLVAC SC5D/15 SCROLLVAC SC5D/15 SCROLLVAC SC5D/15 05 06 1.0 2.0 3.5 3.5 0.6 1.5 0.8 0.5 0.9 1.2 1.6 2.0 L8 S 0H SL80C SL80H SL 80 4 6 -10 11 11 8x10 6x10 -10 >1x10 >1x10 (<1.5x10 ) <2x10 USB, RS232C,485CorProfibus TURBO.DRIVE TD400 100 x90(3.9 x3.53.9) +5 to+45(+41+113) TURBOVAC 0.7 (1.6) 3 x24 190 24 20 8 4 6 -10 11 11 2x10 6x10 -10 2x10 2x10 <5x10 (<4.0x10 ) – 2 2 6 6

-8 -8

) 371

High Vacuum Pumps Ordering Information TURBOVAC SL 80 / SL 80 H / SL 80 C

TURBOVAC SL 80 P Part No. with compound stage DN 40 ISO-KF 800002V3004 DN 63 ISO-K / DN 16 ISO-KF 800002V3001 DN 63 ISO-K / DN 16 ISO-KF (SL 80 H) 800002V3005 DN 63 CF / DN 16 ISO-KF 800002V3002 DN 63 CF / DN 16 ISO-KF (SL 80 H) 800002V3006 without compound stage DN 63 ISO-K / DN 16 ISO-KF (SL 80 C) 800002V3008 Mandatory Accessories P FC PS Electronic frequency converter TURBO.DRIVE TD 400 with USB interface 800073V0008 with RS 232 C interface 800073V0002 with RS 485 C interface 800073V0003 with Profibus 800073V0004 Connecting cable pump - frequency converter 00.2 m (0.7 ft) 800152V0021 00.3 m (1.1 ft) 800152V0023 00.4 m (1.4 ft) 800152V0022 00.5 m (1.75 ft) 800152V0050 01.0 m (3.5 ft) 152 47 02.5 m (8.75 ft) 864 49 03.0 m (10.5 ft) 864 40 05,0 m (17.5 ft) 864 50 10.0 m (35.0 ft) 800080V1000 Power supply and control unit TURBO.CONTROL 300 800100V0001 24 V connecting cable power supply - TURBO.CONTROL 300 01 m (03.5 ft) 800091V0100 03 m (10.5 ft) 800091V0300 05 m (17.5 ft) 800091V0500 10 m (35.0 ft) 800091V1000 20 m (70.0 ft) 800091V2000 Power supply TURBO.POWER 300 800100V0002 24 V connecting cable power supply - TURBO.POWER 300 01 m (03.5 ft) 800094V0100 03 m (10.5 ft) 800094V0300 05 m (17.5 ft) 800094V0500 10 m (35.0 ft) 800094V1000 20 m (70.0 ft) 800094V2000 Mains cable 3 m (10.5 ft) - TURBO.CONTROL 300 / TURBO.POWER 300 with EURO plug 800102V0002 with UK plug 800102V0003 with US plug 5-15 P 800102V1002 with US plug 115 V AC, 2 m (7.5 ft) 992 76 513 START/STOP switch for manual operation of the turbomolecular pump 152 48 Forevacuum pump TRIVAC D 2,5 E 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 000 110-120 V / 220-240 V, 50/60 Hz, without plug, (world version) 140 001 TRIVAC D 4 B 1 phase EURO motor; 230 V, 50 Hz 112 45 1 phase dual voltage motor; 100-120 V / 200-240 V; 50/60 Hz 140 081 1) DIVAC 1.4 HV3 90-230 V, 50/60 Hz 127 90 V SCROLLVAC SC 5 D 1 phase motor; 200-230 V, 50/60 Hz 133 000 1 phase motor; 100-115 V, 50/60 Hz 133 100 SCROLLVAC SC 15 D 1 phase motor; 200-230 V, 50/60 Hz 133 001 1 phase motor; 100-115 V, 50/60 Hz 133 101 3 phase motor; 380-415 V, 50 Hz / 200-230 V, 460 V, 60 Hz 133 003 For further types, see Catalog Parts “Oil Sealed Vacuum Pumps” and “Dry Compressing Vacuum Pumps”

1) The mains cord (Part No. 200 81 091) must be ordered additionally

372 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Connecting cable Connecting cable Mains cable P FC PS

TURBOVAC SL 80 TURBO.DRIVE TD 400 TURBO.POWER 300 TURBO.CONTROL 300

Ordering Information TURBOVAC SL 80 / SL 80 H / SL 80 C

Accessories, optional P FC PS Part No. Mounting kit TD 400 for SL 80, incl. 0.2 m (0.7 ft.) long connecting cable pump - frequency converter for installing the frequency converter beside the pump 800110V0005 for installing the frequency converter beneath the pump (not for 800073V0007) 800110V0008

Water cooling unit with 2x G 1/8" connections, including 2 hose nozzles G 1/8" 8 mm (0.3 in.) OD, High 2 gaskets (copper) 10 x 14 x 1 mm (0.4 x 0.6 x 0.04 in.) and hose clamps 800135V0001 Vacuum Pumps Vacuum Air cooling unit 800136V0001

Flange heater DN 63 CF, 230 V, 50 Hz 854 04 DN 63 CF, 115 V, 60 Hz 854 07

Inlet screen DN 40 ISO-KF E 200 17 169 DN 63 ISO-K (coarse) E 200 17 170 DN 63 CF (coarse) E 200 17 171

Fine filter with centering ring DN 63 ISO-K 887 20

Vibration absorber DN 63 ISO-K 800131V0063 DN 63 CF 500 070

Pump connection adapter DN 10 ISO-KF / pump connection M 8 (incl. O-ring, filter and clamping ring) 800110V0011

Purge gas and venting valve gas flow at 1 bar 0.4 mbar x l x s-1 (24 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC 800152V0014 100 - 115 V AC 800152V0042 24 V DC 800152V0013

Gas filter to G 1/4" for purge gas and venting valve 800110V0012

Replacement filter E 200 18 515

Power failure venting valve, normally open 24 V DC, DN 16 ISO-KF 800120V0021

Power failure venting valve, normally open 024 V DC, DN 10 ISO-KF 174 46 230 V AC / 50/60 Hz, DN 10 ISO-KF 174 26

Hat rail adaptor as mounting aid 800110V0003

Fin type cooler 800110V0001

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 373 Mechanical Rotor Suspension with integrated Frequency Converter with Compound Stage TURBOVAC TW 250 S

Typical Applications - Analytical Instruments - Coating - R & D - Transfer chambers

Bottom view Technical Features b b1 d d1 h DN 100 ISO-K mm 20 22 160 146.6 175 7,5° - High gas throughput in. 0.79 0.87 6.30 5.77 6.89 120° DN 100 CF mm 20 22 160 146.6 175 105° - Oil-free pump in. 0.79 0.87 6.30 5.77 6.89 - Insensitive to impact and movement

d1 due to the mechanical bearing h1 h2 h3 h4 h5 M4 DN 100 ISO-K mm 37 14 4 20 40 concept in. 1.46 0.55 0.16 0.79 1.57 DN - Installation in any orientation DN 100 CF mm 37 14 4 20 40 in. 1.46 0.55 0.16 0.79 1.57 - Small footprint h - Integrated fan - Purge gas/venting connection

h1 h5

b b1 h4 h2 d h3

Dimensional drawing for the TURBOVAC TW 250 S without frequency converter

Advantages to the User 102

-1 - Highest throughput for N2 and Ar 10 - Highest reliability in operation

1 - Space-saving - High reliability due to self-monitoring 10-1 - Easy to integrate into complex VAC TW 250 S -2 vacuum systems Throughput 10 TURBO TRIV AC D 16 B

TRIV AC D 8 B 10-3

10-4

10-5 10-5 10-4 10-3 10-2 10-1 110 mbar

Inlet pressure

Operation diagram for nitrogen for TURBOVAC TW 250 S

374 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection Technical Data egt prx kg(lbs) IP mm(in.) V Weight, approx. °C(°F) Dimensions (Wx HxD) W Admissible ambienttemperature VDC A Protection rating Interface Max. outputvoltage Max. powerconsumption Max. current consumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed <3mbar(<2.3Torr) withanultimatepressure diaphragm pump Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

G 1/8",insidethread /10mmhosenozzle TRIVAC D8B(atpurgegasoperation) USB, RS232C,485CorProfibus TURBO.DRIVE TD400 TURBOVAC TW250S 100 x90(3.9 x3.53.9) +15 to+40(+59+104) +5 to+45(+41+113) < 2x10 20 to40(+68+104) (2. *q"% TRIVAC D2,5E upon request 16 ISO-KF 5.8 (12.8) 30 to60 0.7 (1.6) 3.0 (2.3) 5 x10 1 x10 1 x10 1 x10 1600 51 3 x24 -8 3 to7 Water 190 140 150 210 230 (<1.5x10 1.1 2.4 3.5 3.7 Air 24 20 20 80 8 3

2 4 8 8

-8

) 375

High Vacuum Pumps Ordering Information TURBOVAC TW 250 S

TURBOVAC TW 250 S P Part No. with Compound Stage

DN 100 ISO-K / DN 16 ISO-KF, water-cooled, Profibus 114 37 DN 100 ISO-K / DN 16 ISO-KF, water-cooled, Profibus, inlet screen coarse 800150V0016 DN 100 ISO-K / DN 16 ISO-KF, air-cooled, Profibus, inlet screen coarse 800150V0009 DN 100 ISO-K / DN 16 ISO-KF, air-cooled, RS 232 C interface 800150V0011 DN 100 ISO-K / DN 16 ISO-KF, air-cooled, RS 485 C interface 800150V0013 DN 100 CF/ DN 16 ISO-KF, air-cooled, RS 232 C interface 800150V0012 DN 100 CF / DN 16 ISO-KF, air-cooled, RS 485 C interface 800150V0014 Mandatory Accessories P FC PS Power supply and control unit TURBO.CONTROL 300 800100V0001

24 V connection line frequency converter TD 400 - TURBO.CONTROL 300 01 m (03.5 ft) 800091V0100 03 m (10.5 ft) 800091V0300 05 m (17.5 ft) 800091V0500 10 m (35.0 ft) 800091V1000 20 m (70.0 ft) 800091V2000

Power supply TURBO.POWER 300 800100V0002

24 V connection line frequency converter TD 400 - TURBO.POWER 300 01 m (03.5 ft) 800094V0100 03 m (10.5 ft) 800094V0300 05 m (17.5 ft) 800094V0500 10 m (35.0 ft) 800094V1000 20 m (70.0 ft) 800094V2000

Mains cable 3 m (10.5 ft) - TURBO.CONTROL 300 / TURBO.POWER 300 with EURO plug 800102V0002 with UK plug 800102V0003 with US plug 5-15 P 800102V1002 with US plug 115 V AC, 2 m (7.5 ft) 992 76 513

START/STOP switch for manual operation of the turbomolecular pump 152 48

Forevacuum pump TRIVAC D 2,5 E 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 000 110-120 V / 220-240 V, 50/60 Hz, without plug, (world version) 140 001

TRIVAC D 8 B 1 phase EURO motor; 230 V, 50 Hz 112 55 1 phase dual voltage motor; 100-120 V / 200-240 V; 50/60 Hz 140 082 1)

For further types, see Catalog Part “Oil Sealed Vacuum Pumps”

1) The mains cord (Part No. 200 81 091) must be ordered additionally

376 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold P Connecting cable Mains cable FC PS

TURBOVAC TW 250 S TURBO.CONTROL 300 TURBO.POWER 300

Ordering Information TURBOVAC TW 250 S

Accessories, optional P FC PS Part No. Flange heater High DN 100 CF, 230 V, 50 Hz 854 27 Vacuum Pumps Vacuum DN 100 CF, 115 V, 60 Hz 854 28

Inlet screen DN 100 ISO-K (coarse) 800132V0101 DN 100 ISO-K (fine) 800132V0102

Vibration absorber DN 100 ISO-K 800131V0100 DN 100 CF 500 071 Included in the Delivery of the Pump P Centering ring with FPM sealing ring, clamping shoe with gasket Foreline Flange

Sealing screw and a gasket ring Vent Port

High vacuum connection elements are not part of the supplied equipment

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 377 Mechanical Rotor Suspension without integrated Frequency Converter with Compound Stage TURBOVAC TW 250 S

Typical Applications - Analytical Instruments - Coating - R & D - Transfer chambers

h1 h5

b b1 h4 h2 d h3

Dimensional drawing for the TURBOVAC TW 250 S without frequency converter

Advantages to the User 102

-1 - Highest throughput for N2 and Ar 10 - Highest reliability in operation

1 - Space-saving - High reliability due to self-monitoring 10-1 - Easy to integrate into complex VAC TW 250 S -2 vacuum systems Throughput 10 TURBO TRIV AC D 16 B

TRIV AC D 8 B 10-3

10-4

10-5 10-5 10-4 10-3 10-2 10-1 110 mbar

Inlet pressure

Operation diagram for nitrogen for TURBOVAC TW 250 S

378 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold liaepesr mbar(Torr) Max. foreline pressure forN Ultimate pressure leybold Ote DN DN N Gas throughput N Pumping speed Outlet Inlet Connection egt prx kg(lbs) IP mm(in.) V Weight, approx. °C(°F) Dimensions (Wx HxD) W Admissible ambienttemperature VDC A Protection rating Interface Max. outputvoltage Max. powerconsumption Max. current consumption Mains connection Technical Data Permissible coolingwatertemperature Permissible coolingwaterpressure N Compression ratio Technical Data e mbar·Ixs mbar·Ixs Ixs Ixs H He Ar H He Ar oia oainsed min Nominal rotation speed <3mbar(<2.3Torr) withanultimatepressure diaphragm pump Recommended forevacuum pump oln ae osmto Ixh Cooling waterconsumption Cooling waterconnection optional W min standard °C(°F) Cooling Admissible ambienttemperature W Power consumptionatultimatepressure Max. powerconsumption Run-up time,approx. Weight kg (lbs) H H He Ar 2 2 2 2 2 2 Ixs mbar·Ixs Ixs mbar·Ixs 2 mbar (Torr) bar °C (°F) -1 (rpm) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 -1 -1 -1 -1

G 1/8",insidethread /10mmhosenozzle TRIVAC D8B(atpurgegasoperation) USB, RS232C,485CorProfibus TURBO.DRIVE TD400 TURBOVAC TW250S 100 x90(3.9 x3.53.9) +20 to+40(+68+104) +15 to+40(+59+104) +5 to+45(+41+113) < 2x10 TRIVAC D2,5E upon request 100 ISO-K 16 ISO-KF 30 to60 0.7 (1.6) 3.0 (2.3) 5 x10 1 x10 1 x10 1 x10 1600 51 3 x24 -8 3 to7 Water 5 (11) 190 140 150 210 230 (<1.5x10 ¶ 1.1 2.4 3.5 3.7 Air 24 20 20 80 8

3 2 4 8 8

-8 ) 379

High Vacuum Pumps Ordering Information TURBOVAC TW 250 S

TURBOVAC TW 250 S P Part No. with Compound Stage DN 100 ISO-K / DN 16 ISO-KF, air-cooled, inlet screen coarse 113 52 DN 100 ISO-K / DN 16 ISO-KF, air-cooled, inlet screen coarse 800150V0007 (with vibration absorber)

Mandatory Accessories P FC PS Electronic frequency converter TURBO.DRIVE TD 400 with USB interface 800073V0008 RS 232 C interface 800073V0002 RS 485 C interface 800073V0003

Connecting cable pump - TURBO.DRIVE TD 400 01 m (03.5 ft) 152 47 03 m (10.5 ft) 864 40 05 m (17.5 ft) 864 50 Power supply and control unit TURBO.CONTROL 300 800100V0001

24 V connecting cable TURBO.DRIVE TD 400 - TURBO.CONTROL 300 01 m (03.5 ft) 800091V0100 03 m (10.5 ft) 800091V0300 05 m (17.5 ft) 800091V0500 10 m (35.0 ft) 800091V1000 20 m (70.0 ft) 800091V2000 Power supply TURBO.POWER 300 800100V0002

24 V connecting cable TURBO.DRIVE TD 400 - TURBO.POWER 300 01 m (03.5 ft) 800094V0100 03 m (10.5 ft) 800094V0300 05 m (17.5 ft) 800094V0500 10 m (35.0 ft) 800094V1000 20 m (70.0 ft) 800094V2000 Mains cable 3 m (10.5 ft) - TURBO.CONTROL 300 / TURBO.POWER 300 with EURO plug 800102V0002 with UK plug 800102V0003 with US plug 5-15 P 800102V1002 with US plug 115 V AC, 2 m (7.5 ft) 992 76 513 Forevacuum pump TRIVAC D 2,5 E 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 000 110-120 V / 220-240 V, 50/60 Hz, without plug, (world version) 140 001 TRIVAC D 8 B 1 phase EURO motor; 230 V, 50 Hz 112 55 1 phase dual voltage motor; 100-120 V / 200-240 V; 50/60 Hz 140 082 1) For further types, see Catalog Part “Oil Sealed Vacuum Pumps”

1) The mains cord (Part No. 200 81 091) must be ordered additionally

380 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Connecting cable Connecting cable Mains cable P FC PS

TURBOVAC TW 250 S TURBO.DRIVE 400 TURBO.CONTROL 300 TURBO.POWER 300

Ordering Information TURBOVAC TW 250 S

Accessories, optional P FC PS Part No. Inlet screen High DN 100 ISO-K (coarse) 800132V0101 Vacuum Pumps Vacuum DN 100 ISO-K (fine) 800132V0102

Vibration absorber DN 100 ISO-K 800131V0100 DN 100 CF 500 071 Included in the Delivery of the Pump P Centering ring with FPM sealing ring, blank flange with clamping shoe Foreline Flange

Sealing screw and a gasket ring Vent Port

DC coupling for the power supply is included

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 381 MAG INTEGRA - Magnetic Rotor Suspension with integrated Frequency Converter, with Compound Stage TURBOVAC MAG W 300/400 iP

Typical Applications - Gas analysis systems - Particle accelerators - Electron microscopes - Research - Coating systems

Technical Features - Installation in any orientation - DN 100 or 160 ISO-K and/or CF high vacuum connection - DN 16 ISO-KF with clamped fore vacuum connection

- Purge gas/venting connection DN 16 ISO-KF with clamped connection (purge/vent) - Water or air cooling optional

- 2 slots for industrial communica tions modules h - Standard 9 pin 24 V SPS

PLC-IO in Control Slot h h - RS 232 C in Service Slot - further interfaces can be fitted: Profibus, RS 485 C, DeviceNet, [ [ DN d1 d2 h h1 h2 l b b* a s1 s2 MAG W 300 iP mm 100 ISO-K 130.0 155.0 250.0 77.7 70.0 156.0 250.0 233.0 16° 19.0 103.0 EtherNet IP, EtherCat in. 5.12 6.10 9.84 3.06 2.76 6.14 9.84 9.17 16° 0.75 4.06 mm 100 CF 151.5 155.0 264.3 77.7 70.0 156.0 250.0 233.0 16° 15.0 129.0 in. 5.96 6.10 10.41 3.06 2.76 6.14 9.84 9.17 16° 0.59 5.08 Advantages to the User

MAG W 400 iP mm 160 ISO-K 180.0 155.0 241.0 77.7 70.0 168.5 262.5 245.5 16° 19.0 106.0 - Highest pumping speed from the in. 7.09 6.10 9.49 3.06 2.76 6.63 10.33 9.67 16° 0.75 4.17 smallest possible size mm 160 CF 202.5 155.0 234.7 77.7 70.0 181.2 273.7 256.7 16° 14.0 129.0 - New standard regarding mainte- in. 7.97 6.10 9.24 3.06 2.76 9.13 10.78 10.11 16° 0.55 5.08 b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE iS nance-free systems - Suitability for vibration sensitive Dimensional drawing for the TURBOVAC MAG W 300/400 iP applications in the area of analytical engineering, thin-film technology, 700 l x s-1 electron microscopes, research, 600 development among others

500 - Flexibility due to the modular concept; the converter is optionally also 400 MAG W 400 available by way of a bench top unit 300 MAG W 300 Pumping Speed 200

100

0 -6 -5 -4 -3 -2 -1 10 10 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed for N2 of the TURBOVAC MAG W 300/400 iP as a function of the inlet pressure

382 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold prtn pe min DN N Compression ratio Operating speed N Pumping speed Inlet flange Technical Data mxmm W V at3x1.5mm A V Length oftheDCconnectioncable,max. W DC powersupplyvoltagerange DC current consumption,max. at ultimate maximum pressure Power consumption Ripple % Power supply Technical Data e Ixs Ixs H He Ar egt prx kg(lbs) min DN DN G Weight, approx. Water coolingconnection(optional) Purge / vent port(clamped) Foreline flange(clamped) Run-up time Recommended backingpump (Torr) mbar °C(°F) Max. foreline pressure forN Max. degassingtemperature Ultimate pressure He H rtcincas IP (°F) (°F) Pollution category °C Overvoltage category Protection class °C non-condensing % Relative humidityoftheair, during storage during operation Permissible ambienttemperature Contact ratingfortherelays, max. at3x2.5mm 2 2 2 2 Ixs Ixs

2 2 m m (ft) (ft) 2 mbar (Torr) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

0 P W400iP W300iP

o8 5t 5 o8 5to85 2 II 5to85 0to+60 2 30 (0to+140) II 30 0to+60 +10to+40 2 5to85 (0to+140) 5(17.5) 20(70.0) II (+50to+104) 32V; 0,5A 30 2 +10to+40 43to53 <2 0to+60 (+50 to+104) (0to +140) II 5to85 5(17.5) 20(70.0) 32V; 0,5 A 30 7.5to9.3 +10 to +40 (+50 to+104) (0to+140) 43to53 0to+60 32V; 0,5A 20(70.0) <2 (+50to+104) 5(17.5) 7.5to9.3 +10to+40 43to53 32V; 259 0,5A 400 20(70.0) 5(17.5) 7.5to9.3 259 <2 400 43to53 7.5to9.3 259 400 259 <2 400 8 0 5 80 8 0 58800 58800 200 58800 280 330 365 200 1.0x10 280 330 58800 365 190 260 260 190 300 260 260 300 2(6 1 2) 2(6 12(26) 12(26) 12(26) 12(26) 3.2 x 10 0 S- 10C 10IOK 160CF 160ISO-K 100CF 100ISO-K (<0.75x10 < 10 <5 <5 8(6) 16ISO-KF <5 16ISO-KF 1/8" 16ISO-KF 16ISO-KF 8(6) 1/8" <5 16ISO-KF TRIVAC D8B 16ISO-KF 1/8" TRIVAC D8B 8(6) 16ISO-KF TRIVAC D2,5E 1/8" 16ISO-KF <5 TRIVAC D2,5E TRIVAC D8B TRIVAC D2,5E TRIVAC D8B 8(6) TRIVAC D2,5E – 9.2x10 48

-8 < 10 10 4 3 9.2x10 3.2x10 1.0 x 10 -8 (<0.75x10 ) Integrated Frequency Converter 0(7) – 80 (176) 48 TURBOVAC MAG TURBO.DRIVE iS

-10 < 10 10 4 3 9.2x10 3.2x10 -10 1.0x10 (<0.75x10 ) 48

-8 < 10 10 4 3 9.2x10 3.2x10 1.0x10 -8 (<0.75 x 10 ) 80 (176) 48 -10

10 4 3

-10

383 )

High Vacuum Pumps Ordering Information TURBOVAC MAG W 300/400 iP

TURBOVAC MAG W 300 iP P FC Part No. with Integrated Frequency Converter and Seal Gas Connection

DN 100 ISO-K 410300V0505 DN 100 CF 410300V0506 TURBOVAC MAG W 400 iP P FC with Integrated Frequency Converter and Seal Gas Connection

DN 160 ISO-K 410400V0505 DN 160 CF 410400V0506 Mandatory Accessories P FC Power supply TURBO.POWER 500 410300V0221

DC cable frequency converter - power supply 410300V2001 01 m (03.5 ft) 410300V2003 03 m (10.5 ft) 410300V2005 05 m (17.5 ft) 410300V2010 10 m (35.0 ft) 410300V2020 20 m (70.0 ft)

Mains cable, 3 m (10.5 ft) 800102V0002 with EURO plug 800102V1002 with US plug 5-15 P Forevacuum pump TRIVAC D 2,5 E 140 000 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 002 110-120 V, 50/60 Hz; NEMA plug, US version TRIVAC D 8 B 112 55 1 phase motor; 230 V, 50/60 Hz 112 56 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz

384 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With integrated Frequency Converter P

FC TURBO.POWER 500

DC connecting cable Mains cable max. 20 m PS MAG W 300/400 iP

Ordering Information TURBOVAC MAG W 300/400 iP High Vacuum Pumps Vacuum

Accessories, optional P Part No.

Inlet screen DN 100 ISO-K coarse (3.2 x 3.2 mm (0.13 x 0.13 in.)) 800132V0101 fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) 800132V0102 DN 100 CF coarse (3.2 x 3.2 mm (0.13 x 0.13 in.)) 200 91 514 fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) E 200 17 195 DN 160 ISO-K E 200 00 307 DN 160 CF E 200 17 247

Flange heater 100 CF, 230 V, 50 Hz 854 27 100 CF, 115 V, 60 Hz 854 28 160 CF, 230 V, 50 Hz 854 37 160 CF, 115 V, 60 Hz 854 38

Water cooling unit 410300V0101

Air cooling unit 410300V0102

START/STOP switch for manual operation of the turbomolecular pump 152 48

DC plug 800 001 694

Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, normally open 800120V0021 Included in the Delivery of the Pump P Flanges for forevacuum, venting and purge gas are blank-flanged

Centering ring with FPM sealing ring and a clamping yoke

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 385 MAG INTEGRA - Magnetic Rotor Suspension with integrated Frequency Converter, with Compound Stage TURBOVAC MAG W 600/700 iP

Typical Applications - Gas analysis systems - Particle accelerators - Electron microscopes - Research - Coating systems

Technical Features - Installation in any orientation - DN 160 or 200 ISO-K and/or CF high vacuum connection - DN 25 ISO-KF with clamped forevacuum connection - Purge gas/venting connection DN 16 ISO-KF with clamped con-

nection (purge/vent)

- Water or air cooling optional - 2 slots for industrial communica tions h modules

- Standard 9 pin 24 V SPS h PLC-IO in Control Slot h - RS 232 C in Service Slot

[ [ - further interfaces can be fitted: DN d1 d2 h h1 h2 l b b* a s1 s2 MAG W 600 iP mm 160 ISO-K 180.0 204.0 281.5 90 80 204.0 274.5 257.5 21° 13.0 121.0 Profibus, RS 485 C, DeviceNet, in. 7.09 8.03 11.08 3.54 3.15 8.03 10.81 10.14 21° 0.51 4.76 EtherNet IP, EtherCat mm 160 CF 202.5 204.0 294.0 90 80 204.0 274.5 257.5 21° 10.0 150.0 in. 7.97 8.03 11.57 3.54 3.15 8.03 10.81 10.14 16° 0.39 5.91 MAG W 700 iP mm 200 ISO-K 240.0 204.0 280.5 90 80 240.0 292.5 275.5 21° 13.0 130.0 Advantages to the User in. 9.45 8.03 11.04 3.54 3.15 9.45 11.52 10.85 21° 0.51 5.12 mm 200 CF 253.0 204.0 275.0 90 80 253.0 299.0 282.0 21° 9.0 156.0 - Highest pumping speed from the in. 9.96 8.03 10.83 3.54 3.15 9.96 11.77 11.10 21° 0.35 6.14 smallest possible size b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE iS - New standard regarding mainte- Dimensional drawing for the TURBOVAC MAG W 600/700 iP nance-free systems - Suitability for vibration sensitive 700 applications in the area of analytical -1 l x s engineering, thin-film technology, 600 MAG W 700 electron microscopes, research, MAG W 600 500 development among others

400 - Flexibility due to the modular concept; the converter is optionally also 300 available by way of a bench top unit Pumping Speed 200

100

0 î -6 -5 -4 -3 -2 -1 10 10 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed for N2 of the TURBOVAC MAG W 600/700 iP as a function of the inlet pressure

386 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold prtn pe min DN N Compression ratio Operating speed N Pumping speed Inlet flange Technical Data mxmm W V at3x1.5mm A V Length oftheDCconnectioncable,max. W DC powersupplyvoltagerange DC current consumption,max. at ultimate maximum pressure Power consumption Ripple % Power supply Technical Data e Ixs Ixs H He Ar egt prx kg(lbs) DN min G DN Weight, approx. Water coolingconnection(optional) (clamped) Purge / vent port Foreline flange(clamped) Run-up time Recommended backingpump (Torr) mbar °C(°F) Max. foreline pressure forN Max. degassingtemperature Ultimate pressure He H rtcincas IP (°F) (°F) Pollution category °C Overvoltage category Protection class °C non-condensing % Relative humidityoftheair, during storage during operation Permissible ambienttemperature Contact ratingfortherelays, max. at3x2.5mm 2 2 2 2 Ixs Ixs

2 2 m m (ft) (ft) 2 mbar (Torr) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

8 0 4 00 8 0 48000 48000 430 48000 600 540 590 430 1.6x10 600 540 48000 590 410 570 520 410 550 570 520 550 7(75 1 3.) 7(75 17(37.5) 17(37.5) 17(37.5) 17(37.5) 0 P W700iP W600iP 3.4x10 6 S- 10C 20IOK 200CF 200ISO-K 160CF 160ISO-K (<0.75x10 <6 <6 16ISO-KF <6 25ISO-KF 1/8" 16ISO-KF 6.0(4.5) 1/8" 25ISO-KF 16ISO-KF <6 6.0(4.5) 1/8" TRIVAC D8B 25ISO-KF 16ISO-KF 1/8" TRIVAC D8B TRIVAC D2,5E 25ISO-KF <6 6.0(4.5) TRIVAC D2,5E TRIVAC D8B TRIVAC D2,5E TRIVAC D8B TRIVAC 6.0(4.5) D2,5E < 10 – 1.7x10

-8 < 10 10 6 4 1.7x10 3.4x10 1.6x10 -8 (<0.75x10 ) Integrated Frequency Converter 0(7) – 80 (176) 48 TURBOVAC MAG TURBO.DRIVE iS

-10 < 10 10 6 4 1.7 3.4 x x 10 10 -10 1.6x10 (<0.75x10 ) 48

-8 < 10 10 6 4 1.7x10 3.4x10 1.6 x 10 -8 (<0.75 x 10 ) 80 (176) 48 -10

10 6 4

-10

387 )

High Vacuum Pumps Ordering Information TURBOVAC MAG W 600/700 iP

TURBOVAC MAG W 600 iP P FC Part No. with Integrated Frequency Converter and Seal Gas Connection

DN 160 ISO-K 410600V0505 DN 160 CF 410600V0506 TURBOVAC MAG W 700 iP P FC with Integrated Frequency Converter and Seal Gas Connection

DN 200 ISO-K 410700V0505 DN 200 CF 410700V0506 Mandatory Accessories P FC Power supply TURBO.POWER 500 410300V0221

DC cable frequency converter - power supply 01 m (03.5 ft) 410300V2001 03 m (10.5 ft) 410300V2003 05 m (17.5 ft) 410300V2005 10 m (35.0 ft) 410300V2010 20 m (70.0 ft) 410300V2020

Mains cable, 3 m (10.5 ft) with EURO plug 800102V0002 with US plug 5-15 P 800102V1002 Forevacuum pump TRIVAC D 2,5 E 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 000 110-120 V, 50/60 Hz; NEMA plug, US version 140 002 TRIVAC D 8 B 1 phase motor; 230 V, 50/60 Hz 112 55 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz 112 56

388 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With integrated Frequency Converter P

FC TURBO.POWER 500

DC connecting cable Mains cable max. 20 m PS MAG W 600/700 iP

Ordering Information TURBOVAC MAG W 600/700 iP High Vacuum Pumps Vacuum

Accessories, optional P Part No.

Inlet screen DN 160 ISO-K E 200 00 307 DN 160 CF E 200 17 247 DN 200 ISO-K 200 91 639 DN 200 CF 400 001 515

Flange heater 160 CF, 230 V, 50 Hz 854 37 160 CF, 115 V, 60 Hz 854 38

Water cooling unit 410600V0101

Air cooling unit 410600V0102

START/STOP switch for manual operation of the turbomolecular pump 152 48

DC plug 800 001 694

Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, normally open 800120V0021 Included in the Delivery of the Pump P Flanges for forevacuum, venting and purge gas are blank-flanged

Centering ring with FPM sealing ring and a clamping yoke

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 389 MAG INTEGRA - Magnetic Rotor Suspension with integrated Frequency Converter, with Compound Stage TURBOVAC MAG W 1300 iP(L) to 2200 iP(L)

Typical Applications - PVD coatings systems - Coating of architectural glass - Optical coatings - LC displays - Flat panels - Research Ø d 17° 17° iP iPL 1 - Analytical systems DN

Technical Features - Installation in any orientation I h

s3 - DN 200 and/or 250 in ISO-F and/or CF high vacuum connection h5 h7 - DN 40 KF forevacuum connection s 5 h - Purge gas/venting connection b 6

Ø d1 DN 16 KF with clamped connection

s (purge/vent) s6 4 Ø d 2 - Water cooling - Protection class IP 54 h - 2 slots for industrial communica tions h4 modules

s2 h1 - Standard ProfiBus h2 h 3 - RS 232 C in Service Slot

s1 - further interfaces can be fitted: Forevacuum Purge gas l1 l 2 RS 485 C, 9 pin 24 V PLC, DeviceNet, EtherNet IP, EtherCat Type DN b d1 d2 h h1 h2 h3 h4 h5 h6 MAG W 1300 200 ISO-F mm 420 1) 285 285 305 114 94 7 260 442 251 in. 16.54 1) 11.22 11.22 12.01 4.49 3.70 0.38 10.24 17.40 9.88 200 CF mm 416 254 285 335 114 94 7 260 472 251 Advantages to the User in. 16.38 10.00 11.22 13.19 4.49 3.70 0.38 10.24 18.58 9.88 MAG W 1600/1700 250 ISO-F mm 442 335 317 325 114 94 7 260 463 251 - Highest pumping speed and gas in. 17.40 13.19 12.48 12.80 4.49 3.70 0.38 10.24 18.23 9.88 throughput from a very small size 250 CF mm 432 305 317 330 114 94 7 260 467 251 in. 17.01 12.01 12.48 12.99 4.49 3.70 0.38 10.24 18.39 9.88 - Rugged and reliable operation in MAG W 2200 250 ISO-F mm 450 335 349 355 114 94 7 260 492 251 industrial applications in. 17.18 13.19 13.74 13.19 4.49 3.70 0.38 10.24 19.37 9.88 250 CF mm 446 305 349 372 114 94 7 260 506 251 - Sets new benchmarks for mainte- in. 17.56 12.01 13.74 14.65 4.49 3.70 0.38 10.24 19.92 9.88 nance-free systems

h7 l l1 l2 s1 s2 s3 s4 s5 s6 - Suited for vibration sensitive appli- MAG W 1300 200 ISO-F mm 114 311 1) 311 1) 332 1) 42 140 0 15 241 98 cations in the areas of analytical, in. 4.49 12.24 1) 12.24 1) 13.07 1) 1.65 5.51 0 0.59 9.49 3.86 200 CF mm 114 307 307 – 32 164 0 – – 98 thin-film, electron microscopy, in. 4.49 12.09 12.09 – 1.26 6.46 0 – – 3.86 research and development among MAG W 1600/1700 250 ISO-F mm 114 335 331 374 39 154 0 14 259 98 others. in. 4.49 13.19 12.24 14.72 1.54 6.06 0 0.55 10.20 3.86 250 CF mm 114 335 322 – 29 173 0 9 285 98 - Flexibility through the modular con- in. 4.49 13.19 12.68 – 1.14 6.81 0 0.35 11.22 3.86 MAG W 2200 250 ISO-F mm 114 343 340 392 34 165 0 12 272 98 cept; the converter is either attached in. 4.49 13.50 13.39 15.43 1.34 6.50 0 0.47 10.71 3.86 to the side or under the pump 250 CF mm 114 339 340 – 26 187 0 8 302 98 in. 4.49 13.35 13.39 – 1.02 7.36 0 0.32 11.89 3.86

1) 4 mm (o.16 in.) for cooling coil

Dimensional drawing for the MAG INTEGRA, dimensions in mm

390 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold mbarxIs mbarxIs N Max. gasthroughput H at1sccm He Ar leybold prtn pe min DN Operating speed N Pumping speed Inlet flange Technical Data rtcincas IP °C(°F) °C(°F) Pollution category W Overvoltage category Protection class V non-condensing % Hz Relative humidityoftheair, duringstorage W duringoperation Permissible ambienttemperature Contact ratingfortherelays, max. at ultimate maximum pressurePower consumption Mains frequency Power supply mbar(Torr) ISO-Fflange Ultimate pressure Ar N Technical Data Ar N Max. compression ratio tonominalspeed H Ixs He Ixs Ar A mbar (Torr) Ar Ffag mbar(Torr) CFflange egt prx kg(lbs) DN dB(A) min G at max.speed DN levelathighvacuumflange Vibration Noise levelacc.ISO3744 Weight, approx. Water coolingconnection Purge /ventport(clamped) Foreline flange Run-up time Recommended backingpump a.dgsigtmeaue °C(°F) N Max. foreline pressure Max. degassingtemperature tnb pe dutbefo min standby speedadjustablefrom 2 2 2 2 2 2 2

mbar (Torr) at1sccm Ixs Ixs ncniuu prto in continuousoperation briefly, e.g.duringpumpdown in continuousoperation briefly, e.g.duringpumpdown -1 -1 -1 -1

mbar xIs mbar xIs Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 μ m -1 -1 -1 -1 -1 -1

1 1 1 <41 50(110) <41 0.01 45(99) 0.01 <41 45(99) 0.01 <41 0.01 40(88) 8.0x10 < 10 < 2.0x10 > 10 <7 <10 16KF 40KF 16KF <7 40KF 1/8" 2.5(1.9) 2.5(1.9) 1/8" 80(176) 16KF <7 40KF 0.6(0.45) 4.0(3.00) 1/8" 80(176) 1.0(0.75) 16KF 1.0(0.75) 1/8" 40KF <5 80(176) 0.6(0.45) 4.0(3.00) 30 80(176) 30 60 30 2200iP(L) 1700iP(L) 1600iP(L)Booster 1300iP(L)

2 3 2 17 20 30 20 0 F 5 F 250CF 250CF 250ISO-F 250ISO-F 250ISO-F 200CF 200ISO-F 2 3 2 20 20 30 20 780 300 300 30600 33000 1750 2050 13800(230Hz) 1900 33000 2100 1660 13800(230Hz) 1710 1480 1610 13800(230Hz) > 1570 1770 37800 10 1470 13800(230Hz) 1600 1130 1220 1050 1100 1 2 1 12 15 20 15 < 10 -10 -8 (<7.5x10 (<7.5x10 8 8 > > 10 10 5 3 1.0x10 6.0x10 -11 -9 ) < 10 ) Integrated Frequency Converter TRIVAC Bordrycompressing pumps -8 TURBOVAC MAGW (<7.5x10 +10 to+45(+50+113) -10 to+60(+14+140) – MAG.DRIVE iM < 10 200 -240±10% 7 7 > > 10 10 3 4 4.0x10 2.0x10 32 V, 0.5A 50 /60 5 to85 -9 150 750 ) < 10 54 2 II

-10 -8 (<7.5x10 (<7.5x10 8 8 > > 10 10 3 5 5.0x10 5.0x10 -11 -9 ) < 10 ) < 10 -10 -8 (<7.5x10 (<7.5x10 8 8

3 4

391 -11 -9 ) )

High Vacuum Pumps Ordering Information TURBOVAC MAG W 1300/1600/1700/2200 iP(L) TURBOVAC MAG W 1300 P FC PS Part No. with Integrated Frequency Converter and Purge Gas Connection

MAG W 1300 iP, DN 200 ISO-F, Profibus 411300V0504 MAG W 1300 iP, DN 200 ISO-F, 24 V SPS interface 411300V0514 MAG W 1300 iP, DN 200 CF, Profibus 411300V0506 MAG W 1300 iP, DN 200 CF, 24 V SPS interface 411300V0516 MAG W 1300 iPL, DN 200 ISO-F, Profibus 411300V0704 MAG W 1300 iPL, DN 200 ISO-F, 24 V SPS interface 411300V0714 MAG W 1300 iPL, DN 200 CF, Profibus 411300V0706 MAG W 1300 iPL, DN 200 CF 24 V SPS interface 411300V0716 TURBOVAC MAG W 1600 Booster P FC PS with Integrated Frequency Converter and Purge Gas Connection

MAG W 1600 iP Booster, DN 250 ISO-F, Profibus 411600V0504 MAG W 1600 iP Booster, DN 250 ISO-F, 24 V SPS interface 411600V0514 MAG W 1600 iPL Booster, DN 250 ISO-F, Profibus 411600V0704 MAG W 1600 iPL Booster, DN 250 ISO-F, 24 V SPS interface 411600V0714 TURBOVAC MAG W 1700 P FC PS with Integrated Frequency Converter and Purge Gas Connection

MAG W 1700 iP, DN 250 ISO-F, Profibus 411700V0504 MAG W 1700 iP, DN 250 ISO-F, 24 V SPS interface 411700V0514 MAG W 1700 iP, DN 250 CF, Profibus 411700V0506 MAG W 1700 iP, DN 250 CF, 24 V SPS interface 411700V0516 MAG W 1700 iPL, DN 250 ISO-F, Profibus 411700V0704 MAG W 1700 iPL, DN 250 ISO-F, 24 V SPS interface 411700V0714 MAG W 1700 iPL, DN 250 CF, Profibus 411700V0706 MAG W 1700 iPL, DN 250 CF, 24 V SPS interface 411700V0716 TURBOVAC MAG W 2200 P FC PS with Integrated Frequency Converter and Purge Gas Connection

MAG W 2200 iP, DN 250 ISO-F, Profibus 412200V0504 MAG W 2200 iP, DN 250 ISO-F, 24 V SPS interface 412200V0514 MAG W 2200 iP, DN 250 CF, Profibus 412200V0506 MAG W 2200 iP, DN 250 CF, 24 V SPS interface 412200V0516 MAG W 2200 iPL, DN 250 ISO-F, Profibus 412200V0704 MAG W 2200 iPL, DN 250 ISO-F, 24 V SPS interface 412200V0714 MAG W 2200 iPL, DN 250 CF, Profibus 412200V0706 MAG W 2200 iPL, DN 250 CF, 24 V SPS interface 412200V0716

Other interfaces upon request

392 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With integrated Frequency Converter and Power Supply P FC Mains cable PS

MAG W 1300 iP(L), MAG W 1600 iP(L) Booster, MAG W 1700 iP(L), MAG W 2200 iP(L)

Ordering Information TURBOVAC MAG W 1300/1600/1700/2200 iP(L) High Vacuum Pumps Vacuum Mandatory Accessories P Part No. Set of bolts, nuts and washers for ISO-F flange (12 each) Bolts M 10 x 50 400153V0012 Bolts M 10 x 35 400153V0010 Centering with O-ring Al/FPM DN 200 268 44 DN 250 268 45 Stainless steel/FPM DN 200 887 02 DN 250 887 08 Set of bolts, nuts and washers for CF flange (8 each) Bolts M 8 x 40 400153V0016 (For DN 200, 3 sets are required; for DN 250, 4 sets) Copper gasket rings for CF flange DN 200 (Set of 10 pieces) 839 47 DN 250 (Set of 5 pieces) 839 48 Set of hex. bolts with nuts, bolts and washers for CF flange DN 200 839 07 DN 250 (2 sets required) 839 07 Accessories, optional P FC PS Mains cable, 2.5 m (8.75 ft) with EURO plug 411310V03 with US plug 411320V03 Seal Kit DN 250 Metal 200 07 901 Seal kit, metal, for other flanges upon request Purge gas and venting valve 24 V DC 0.6 mbar·l/s at 1.5 to 6 bar 121 33 0.6 mbar·l/s at 1 to 1.5 bar 800152V0010 Cable set (2 pieces) for connection to the pump 411300V01 Cooling water valve kit 411300V02 Spare Parts Inlet screen DN 200 ISO-F and DN 200 CF E 200 04 558 DN 250 ISO-F and DN 250 CF E 200 04 557 Included in the Delivery of the Pump P Flanges for forevacuum, venting and purge gas are blank-flanged Converter-side mains plug (IP 54) Inlet screen

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 393 2200 2200 MAG W 1300 MAG W 1600 2000 2000 l x s-1 l x s-1 1800 1800

1600 1600

1400 1400

1200 1200

1000 1000 800 800 Pumping Speed Pumping Speed He He 600 600 H H2 2 N N 400 2 400 2 Ar Ar 200 200

0 0 -6 -5 -4 -3 -2 -1 -6 -5 -4 -3 -2 10-1 10 10 10 10 10 mbar 10 10 10 10 10 10 mbar Highvacuum Pressure Highvacuum Pressure

2200 2200 MAG W 1700 MAG W 2200 2000 2000 l x s-1 l x s-1 1800 1800

1600 1600

1400 1400

1200 1200

1000 1000

800 800 Pumping Speed Pumping Speed He He 600 600 H H2 2 N N 400 2 400 2 Ar Ar 200 200

0 0 -6 -5 -4 -3 -2 -1 10-6 10-5 10-4 10-3 10-2 mbar 10-1 10 10 10 10 10 mbar 10 Highvacuum Pressure Highvacuum Pressure

Pumping speed curves of the MAG W 1300, W 1600, W 1700 and W 2200

394 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Notes Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 395

High Vacuum Pumps MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 300/400 P

Typical Applications - Gas analysis systems - Particle accelerators - Electron microscopes - Research - Coating systems

Technical Features - Installation in any orientation - DN 100 or 160 ISO-K and/or CF high vacuum connection - DN 16 ISO-KF with clamped fore vacuum connection - Purge gas/venting connection DN 16 ISO-KF with clamped con nection (purge/vent) - Water or air cooling optional

h Advantages to the User

- Highest pumping speed from the h h smallest possible size

- New standard regarding mainte- DN [ d [ d h h h l b b* a s s 1 2 1 2 1 2 nance-free systems MAG W 300 P 100 ISO-K mm 130.0 155.0 250.0 77.7 70.0 156.0 250.0 233.0 16° 19.0 103.0 in. 5.12 6.10 9.84 3.06 2.76 6.14 9.84 9.17 16° 0.75 4.06 - Suitability for vibration sensitive 100 CF mm 151.5 155.0 264.3 77.7 70.0 156.0 250.0 233.0 16° 15.0 129.0 applications in the area of analytical in. 5.97 6.10 10.41 3.06 2.76 6.14 9.84 9.17 16° 0.59 5.08 engineering, thin-film technology, MAG W 400 P 160 ISO-K mm 180.0 155.0 241.0 77.7 70.0 168.5 262.5 245.5 16° 19.0 106.0 electron microscopes, research, in. 7.09 6.10 9.49 3.06 2.76 6.63 10.34 9.67 16° 0.75 4.17 160 CF mm 202.5 155.0 234.7 77.7 70.0 181.2 273.7 256.7 16° 14.0 129.0 development among others in. 7.97 6.10 9.24 3.06 2.76 7.13 10.78 10.11 16° 0.55 5.08 - Flexibility due to the modular

b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE iS concept; alternatively the pump is available also with an integrated Dimensional drawing for the TURBOVAC MAG W 300/400 P frequency converter

700 l x s-1 600

500

400 MAG W 400

300 MAG W 300 Pumping Speed 200

100

0 -6 -5 -4 -3 -2 -1 10 10 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed for N2 of the TURBOVAC MAG W 300/400 P as a function of the inlet pressure

396 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold e Ixs min N DN Compression ratio Operating speed H He N Pumping speed Inlet flange uigsoae °C(°F) % °C(°F) Hz Relative humidityoftheair duringstorage duringoperation V/A A Temperature V W Load capability, relay outputX1 W Max. frequency System fuse V Hz Fuses F1,F25x20mm Max. pumpcurrent Max. motorvoltage maximum stand-by Power consumption Nominal frequency Voltage range Technical Data Technical Data r Ixs Ar egt prx kg(lbs) min DN G DN Weight, approx. Water coolingconnection(optional) Purge / vent port(clamped) Foreline flange(clamped) Run-up time Recommended backingpump (Torr) mbar °C(°F) Max. foreline pressure forN Max. degassingtemperature Ultimate pressure He H 2 2 2 2 Ixs Ixs

2 mbar (Torr) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

8 0 5 80 8 0 58800 58800 200 58800 280 330 1.0x10 200 365 280 58800 330 365 190 260 260 190 300 260 260 300 2(6 1 2) 2(6 12(26) 12(26) 12(26) 12(26) 0 W400P W300P 3.2x10 0 S- 10C 10IOK 160CF 160ISO-K 100CF 100ISO-K (<0.75x10 <5 <5 16ISO-KF 8(6) <5 16ISO-KF 1/8" 16ISO-KF 16ISO-KF 1/8" 8(6) <5 16ISO-KF 1/8" 16ISO-KF TRIVAC D8B 16ISO-KF 1/8" TRIVAC D8B 8(6) TRIVAC D2,5E 16ISO-KF <5 TRIVAC D2,5E TRIVAC D8B TRIVAC D2,5E TRIVAC D8B 8(6) TRIVAC D2,5E < 10 – 9.2x10

-8 < 10 10 4 3 9.2x10 3.2x10 1.0x10 -8 (<0.75x10 ) 0(7) – 80 (176) high breaking capacity250V -10 to+60(+14+140) TURBOVAC MAG 0 to+45(+32+113) MAG.DRIVE S -10 95 (non-condensing) L orGcharacteristic 100 -240,±10% < 10 10 4 3 9.2 3.2 x x 10 10 10 Afastblow -10 1.0x10 (<0.75x10 ) 0 to2000 32 /0,5 50 /60 400 100 48 6

-8 < 10 10 4 3 9.2x10 3.2x10 1.0 x 10 -8 (<0.75 x 10 ) 80 (176) -10

10 4 3

-10

397 )

High Vacuum Pumps Ordering Information TURBOVAC MAG W 300/400 P

TURBOVAC MAG W 300 P P Part No. with separate Frequency Converter and Compound Stage

DN 100 ISO-K 410300V0005 DN 100 CF 410300V0006

TURBOVAC MAG W 400 P P with separate Frequency Converter and Compound Stage

DN 160 ISO-K 410400V0005 DN 160 CF 410400V0006 Mandatory Accessories P FC Electronic frequency converter MAG.DRIVE S 410300V0202 MAG.DRIVE S with display 410300V0212

Connecting cable DRIVE/BEARING (connection between pump and MAG.DRIVE S) 03.0 m (10.5 ft) 410300V4003 05.0 m (17.5 ft) 410300V4005 10.0 m (35.0 ft) 410300V4010 20.0 m (70.0 ft) 410300V4020

Mains cable 03.0 m (10.5 ft) EURO plug 800102V0002 0 US plug 5-15 P 800102V1002 2.0 m (7.5 ft) US plug 115 V AC 992 76 513

Forevacuum pump TRIVAC D 2,5 E 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 000 110-120 V, 50/60 Hz; NEMA plug, US version 140 002

TRIVAC D 8 B 1 phase motor; 230 V, 50/60 Hz 112 55 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz 112 56

398 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With separate Frequency Converter P

Connecting cable max. 20 m FC MAG W 300/400 P PS Mains cable

MAG.DRIVE S

Ordering Information TURBOVAC MAG W 300/400 P High Vacuum Pumps Vacuum

Accessories, optional P Part No. Inlet screen DN 100 ISO-K coarse (3.2 x 3.2 mm (0.13 x 0.13 in.) 800132V0101 fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) 800132V0102 DN 100 CF coarse (3.2 x 3.2 mm (0.13 x 0.13 in.)) 200 91 514 fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) E 200 17 195 DN 160 ISO-K E 200 00 307 DN 160 CF E 200 17 247

Flange heater 100 CF, 230 V, 50 Hz 854 27 100 CF, 115 V, 60 Hz 854 28 160 CF, 230 V, 50 Hz 854 37 160 CF, 115 V, 60 Hz 854 38

Water cooling unit 410300V0101

Air cooling unit 410300V0102

Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, normally open 800120V0021 Included in the Delivery of the Pump P Flanges for forevacuum, venting and purge gas are blank-flanged

Centering ring with FPM sealing ring and a clamping yoke

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 399 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 600/700 P

Typical Applications - Gas analysis systems - Particle accelerators - Electron microscopes - Research - Coating systems

Technical Features - Installation in any orientation - DN 160 or 200 ISO-K and/or CF high vacuum connection - DN 25 ISO-KF with clamped fore vacuum connection - Purge gas/venting connection DN 16 ISO-KF with clamped

con nection (purge/vent)

- Water or air cooling optional

h Advantages to the User

- Highest pumping speed from the h h smallest possible size - New standard regarding mainte- DN ø d1 ø d2 h h1 h2 l b b* a s1 s2 MAG W 600 P mm 160 ISO-K 180.0 204.0 281.5 90 80 204.0 274.5 257.5 21° 13.0 121.0 nance-free systems in. 7.09 8.03 11.08 3.54 3.15 8.03 10.81 10.14 21° 0.51 4.76 - Suitability for vibration sensitive mm 160 CF 202.5 204.0 294.0 90 80 204.0 274.5 257.5 21° 10.0 150.0 in. 7.97 8.03 11.57 3.54 3.15 8.03 10.81 10.14 21° 0.39 5.91 applications in the area of analytical MAG W 700 P mm 200 ISO-K 240.0 204.0 280.5 90 80 240.0 292.5 275.5 21° 13.0 130.0 engineering, thin-film technology, in. 9.45 8.03 11.04 3.54 3.15 9.45 11.52 10.85 21° 0.51 5.12 electron microscopes, research, mm 200 CF 253.0 204.0 275.0 90 80 253.0 299.0 282.0 21° 9.0 156.0 development among others in. 9.96 8.03 10.83 3.54 3.15 9.96 11.77 11.10 21° 0.35 6.14 b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE iS - Flexibility due to the modular concept; alternatively the pump is Dimensional drawing for the TURBOVAC MAG W 600/700 P available also with an integrated frequency converter 700 l x s-1 600 MAG W 700

MAG W 600 500

400

300 Pumping Speed 200

100

0 î -6 -5 -4 -3 -2 -1 10 10 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed for N2 of the TURBOVAC MAG W 600/700 P as a function of the inlet pressure

400 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold prtn pe min N DN Compression ratio Operating speed N Pumping speed Inlet flange Technical Data uigsoae °C(°F) % °C(°F) Hz Relative humidityoftheair duringstorage duringoperation V/A A Temperature V W Load capability, relay outputX1 W Max. frequency System fuse V Hz Fuses F1,F25x20mm Max. pumpcurrent Max. motorvoltage maximum stand-by Power consumption Nominal frequency Voltage range Technical Data e Ixs Ixs H He Ar egt prx kg(lbs) min DN G DN Weight, approx. Water coolingconnection(optional) Purge / vent port(clamped) Foreline flange(clamped) Run-up time Recommended backingpump (Torr) mbar °C(°F) Max. foreline pressure forN Max. degassingtemperature Ultimate pressure He H 2 2 2 2 Ixs Ixs

2 mbar (Torr) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

8 0 4 00 8 0 48000 48000 430 48000 600 540 1.6x10 430 590 600 48000 540 590 410 570 520 410 550 570 520 550 7(75 1 3.) 7(75 17(37.5) 17(37.5) 17(37.5) 17(37.5) 0 W700P W600P 3.4x10 6 S- 10C 20IOK 200CF 200ISO-K 160CF 160ISO-K (<0.75x10 <6 <6 16ISO-KF <6 25ISO-KF 1/8" 16ISO-KF 6.0(4.5) 25ISO-KF 1/8" <6 16ISO-KF 1/8" 6.0(4.5) 25ISO-KF TRIVAC D8B 16ISO-KF 1/8" TRIVAC D8B TRIVAC D2,5E 25ISO-KF <6 6.0(4.5) TRIVAC D2,5E TRIVAC D8B TRIVAC D2,5E TRIVAC D8B TRIVAC D2,5E 6.0(4.5) < 10 – 1.7x10

-8 < 10 10 6 4 1.7x10 3.4x10 1.6x10 -8 (<0.75x10 ) 0(7) – 80 (176) high breaking capacity250V -10 to+60(+14+140) TURBOVAC MAG 0 to+45(+32+113) MAG.DRIVE S -10 95 (non-condensing) L orGcharacteristic 100 -240,±10% < 10 10 6 4 1.7 3.4 x x 10 10 10 Afastblow -10 1.6x10 (<0.75x10 ) 0 to2000 32 /0,5 50 /60 400 100 48 6

-8 < 10 10 6 4 1.7x10 3.4x10 1.6 x 10 -8 (<0.75 x 10 ) 80 (176) -10

10 6 4

-10

401 )

High Vacuum Pumps Ordering Information TURBOVAC MAG W 600/700 P

TURBOVAC MAG W 600 P P Part No. with separate Frequency Converter and Compound Stage

DN 160 ISO-K 410600V0005 DN 160 CF 410600V0006 TURBOVAC MAG W 700 P P with separate Frequency Converter and Compound Stage

DN 200 ISO-K 410700V0005 DN 200 CF 410700V0006 Mandatory Accessories P FC Electronic frequency converter MAG.DRIVE S 410300V0202 MAG.DRIVE S with display 410300V0212

Connecting cable DRIVE/BEARING (connection between pump and MAG.DRIVE S) 0 03.0 m (10.5 ft) 410300V4003 0 05.0 m (17.5 ft) 410300V4005 10.0 m (35.0 ft) 410300V4010 20.0 m (70.0 ft) 410300V4020

Mains cable 3.0 m (10.5 ft) EURO plug 800102V0002 0 US plug 5-15 P 800102V1002 2.0 m (7.5 ft) US plug 115 V AC 992 76 513 Forevacuum pump TRIVAC D 2,5 E 220-240 V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version 140 000 110-120 V, 50/60 Hz; NEMA plug, US version 140 002 TRIVAC D 8 B 1 phase motor; 230 V, 50/60 Hz 112 55 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz 112 56

402 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With separate Frequency Converter P

Connecting cable max. 20 m FC MAG W 600/700 P PS Mains cable

MAG.DRIVE S High

Ordering Information TURBOVAC MAG W 600/700 P Pumps Vacuum

Accessories, optional P Part No. Inlet screen DN 160 ISO-K E 200 00 307 DN 160 CF E 200 17 247 DN 200 ISO-K 200 91 639 DN 200 CF 400 001 515

Flange heater 160 CF, 230 V, 50 Hz 854 37 160 CF, 115 V, 60 Hz 854 38

Water cooling unit 410600V0101

Air cooling unit 410600V0102

Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF 800120V0011

Power failure venting valve, normally open 800120V0021 Included in the Delivery of the Pump P Flanges for forevacuum, venting and purge gas are blank-flanged

Centering ring with FPM sealing ring and a clamping yoke

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 403 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 830/1300 C

Typical Applications - Semiconductor processes, like PVD and ion implantation - Transfer chambers - Particle accelerators - Research - Coating systems

Technical Features Bottom view A 40∞

30∞ 20∞ - Active 5-axis magnetic bearing E

system - Digital monitoring of the bearing

Ø N Ø B system

O P

F Forevacuum - Low noise and vibration levels

connection Ø C R Q - Installation in any orientation

50∞ - Advanced rotor design for high

G L throughput

H K T 30∞ Ø D 30∞ - Purge gas connection J M 30∞ S - Intelligent power control system

Forevacuum flange Inlet flange A B C D E MAG W 830 C DN 40 ISO-KF 160 ISO-F mm 225 262 260 175 16 DN 40 ISO-KF 160 ISO-F in. 8.86 10.31 10.24 6.89 0.63 MAG W 1300 C DN 40 ISO-KF / DN 25 ISO-KF 200 ISO-F mm 285 262 260 175 16 DN 40 ISO-KF / DN 25 ISO-KF 250 ISO-F in. 11.22 10.31 10.24 6.89 0.63 MAG W 1300 C DN 40 ISO-KF 250 ISO-F mm 335 262 260 175 16 DN 40 ISO-KF 250 ISO-F in. 13.19 10.31 10.24 6.89 0.63 Advantages to the User F G H J K L M N MAG W 830 C mm 353 72 50 113 35 109.5 163 243 - Maintenance-free in. 13.9 2.83 1.97 4.45 1.38 4.31 6.42 9.57 MAG W 1300 C mm 306 72 50 113 35 109.5 163 243 - High throughput for all process in. 12.05 2.83 1.97 4.45 1.38 4.31 6.42 9.57 gases MAG W 1300 C mm 306 72 50 113 35 109.5 163 243 - High pumping speed at low MAG W 1300 C in. 12.05 2.83 1.97 4.45 1.38 4.31 6.42 9.57 pressure O P Q R S T - High foreline pressure tolerance: MAG W 830 C mm 103 114.7 98 8.3 85 31 up to 2 mbar (1.5 Torr) in. 4.06 4.52 3.86 0.33 3.35 1.22 MAG W 1300 C mm 103 114.7 98 8.3 85 31 - Lowest weight and size in its class in. 4.06 4.52 3.86 0.33 3.35 1.22 MAG W 1300 C mm 103 114.7 98 8.3 85 31 - Application specific design in. 4.06 4.52 3.86 0.33 3.35 1.22

Dimensional drawing for the TURBOVAC MAG W 830/1300 C

404 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold (Torr) mbar Max. foreline pressure forN Ultimate pressure according toDIN28400 leybold prtn pe min N DN Compression ratio Operating speed N Pumping speedaccording toPNEUROP Inlet flange Technical Data egt prx kg(lbs) Hz A mm(in.) V Weight, approx. °C(°F) Dimensions (WxHD) Permissible ambienttemperature V Nominal frequency Max. motorvoltage max. Current forconnectedconsumers Mains connection,50/60Hz Technical Data e Ixs Ixs H He Ar offering apumpingspeedof100m ordry compressing pump Rotaryvanepump mbar(Torr) Recommended backingpump mbar (Torr) with with convectioncooling water cooling egt prx kg(lbs) mm(in.) DN DN min Weight, approx. (OD oftube) Cooling waterconnection Purge andventport Foreline flange Run-up time 2 2 2 Ixs Ixs 2

3 /h Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

600 400 600 600 36000 36000 36000 24000 36000 740 350920 11501100 1200 1020 500 900 11001050 1180 650 750 11701100 1220 700 900 6 F 6 S- 20C 20IOF 250ISO-F 1.5x10 200ISO-F 200CF 160ISO-F 160CF <1x10

(<0.75x10 0.2 (0.15) –0.2 – (0.15) – <4 <6 <6 <6 <6 D65BCS <4 2.0(1.5) D65BCS 2.0(1.5) <6 D65BCS 2.0(1.5) D65BCS D65BCS 2.0(1.5) 2.0(1.5) 5(73 3 7.) 5(73 3 7.) 32(70.6) 32(70.6) 6 35(77.3) 6 32(70.6) 10ISO-KF/ 1/4" 10ISO-KF/ 35(77.3) 1/4" 10ISO-KF/ 1/4" 10ISO-KF/ 10ISO-KF/ 16 ISO-KF 16 40 ISO-KF 16 ISO-KF 40 ISO-KF 16 ISO-KF 40 ISO-KF 16 ISO-KF 40 TRIVAC TRIVAC TRIVAC TRIVAC ISO-KF ISO-KF 40 ISO-KF TRIVAC 3 3 W10 W1300C W1300 W830C W 830 -10 8 >5x10 -10 < 10 (<0.75x10 ) 483 x2131/219"(19.028.3919") -8 <1x10 7 MAG.DRIVE digital 1.5x10 TURBOVAC MAG -8 200 -240,+10%/-15% (<0.75x10 ) 0 to+45(+32+113) 10 (22) 50/60 60 20

-10 8 > 10 -10 (<0.75x10 ) < 10 -8 8 -8 (<0.75x10 ) < 10 > 10 -8 8

405 -8 )

High Vacuum Pumps Ordering Information TURBOVAC MAG W 830 (C) / W 1300 (C) TURBOVAC MAG W 830 (C) P Part No. with separate Frequency Converter and Compound Stage

DN 160 CF (MAG W 830) 400100V0041 DN 160 ISO-F (MAG W 830 C) 400100V0005

TURBOVAC MAG W 1300 (C) P with separate Frequency Converter and Compound Stage

DN 200 CF (MAG W 1300) 400110V0051 DN 200 ISO-F (MAG W 1300 C) 400110V0011 DN 250 ISO-F (MAG W 1300 C) 400110V0021 Mandatory Accessories P FC Electronic frequency converter 1) MAG.DRIVE digital 400035V0011 MAG.DRIVE digital, Profibus 400035V0013 MAG.DRIVE digital, RS 232 C interface 400035V0014

Plug-in control 121 36

Connecting cable converter – pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 400036V0001 03.0 m (10.5 ft) DRIVE/BEARING 400036V0008 05.0 m (17.5 ft) DRIVE/BEARING 400036V0004 10.0 m (35.0 ft) DRIVE/BEARING 400036V0002 20.0 m (70.0 ft) DRIVE/BEARING 400036V0003

Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 113 98 3 phase motor; 208-23/460 V, 60 Hz / 200-220/380 V, 60 Hz 913 98-2

For further types, see Catalog Part “Oil Sealed Vacuum Pumps”

1) Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC). Replacement mains cord are Part Numbers 180 097 or 180 096 respectively 2) Further connecting cables can be found under MAG.DRIVE digital in the chapter “Turbomolecular Pumps with Magnetic Rotor Suspension”, para. “Electronic Frequency Converters”

10000

I x s-1

1000

100 Pumping Speed

10 N2 8 6 He 4 H2

2 1 -4 2468-3 -2 -1 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed of the TURBOVAC MAG W 1300 C (DN 250) as a function of the inlet pressure

406 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With separate Frequency Converter P

Connecting cable max. 20 m FC MAG W 830/1300 (C) PS Mains cable

MAG.DRIVE digital

Ordering Information TURBOVAC MAG High Vacuum Pumps Vacuum W 830 (C) / W 1300 (C) Accessories, optional P Part No. Purge gas and venting valve 121 33

Connecting cable for optional purge gas valve (pump/converter) 01.5 m (5.25 ft) 400038V0007 03.0 m (10.5 ft) 400038V0006 10.0 m (35.0 ft) 400038V0002 20.0 m (70.0 ft) 400038V0009 Included in the Delivery of the Pump P Inlet screen DN 160 ISO-F E 200 00 307 DN 160 CF E 200 17 247 DN 200 ISO-F 200 91 470 DN 200 CF E 200 17 248 DN 250 ISO-F 200 91 471

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 407 408 Dimensional drawingfortheTURBOVAC MAG W1500CT with CompoundStage with separateFrequency Converter, MAG DIGITAL -MagneticRotorSuspension TURBOVAC MAGW1500CT 0 S- m 145 5 165 8x1 3 9 8 3 5 25 6 213 260 285 150 3 200 182 ISO-F mm 9 262 175 285 243307 32 296 M8x15 279 116.5 231 159 164.5 200 16 84 mm 118 200 ISO-F a a in. 6.48 6.26 4.59 M8 x 0.6 5.91 1.26 0.357.170.12 11.22 10.24 8.39 5 S- m 145 5 165 8x1 3 9 8 3 5 35 1 261 310 335 150 3 182 9 32 M8x15 116.5 159 164.5 mm 250 ISO-F n 1.168 12 95 1.91.51.8 .9 .7 .3 .1 4.65 3.31 0.63 7.87 9.09 12.09 11.65 10.98 9.57 10.316.8911.22 in. in. 6.48 6.26 4.59 M8 x 0.6 5.91 1.26 0.357.170.12 11.22 12.20 10.28 d 5 S- m 6 7 8 23 0 9 7 3 0 1 8 118 84 16 250 200 307296 279231 243 mm 262 ISO-F 175 285 n 1.168 12 95 1.91.51.8 .9 .7 .3 .1 4.65 3.31 0.63 7.87 9.09 12.09 11.65 10.98 9.57 10.316.8911.22 in.

h h

3 d ø ø ø ø ø

d d d

d 4 1 2 3 1 4 a d 2 5 a d a

7 3 6 a h h DN 40KF h 4 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 4

ø a d Heatband 5 b b 1 5 1 b b h a 3

2 h a Bottom view 1 ø d

105° 3 1

h b

26°

a a 4 2

4 2

h d d d

5 5 h

6 60° 1

h d

60° 70°

30°

7 2 Intelligentpowercontrol system - - Integrated Integratedpurgegassystem - Advancedrotor designforhigh - Installationinanyorientation - Lownoiseandvibration levels - - Corrosion resistant Bearingandtemperature system - Active5-axismagnetic bearing - Technical Features - Typical Applications Highpumpingspeedatlow - Highthroughput forallprocess - - Maintenance-free Advantages totheUser Robustagainstparticlesand - Highresistance againstcorrosive - Highforeline pressure tolerance: - Applicationspecificdesign - Lowestweightandsizeinitsclass - Temperature control upto90°C - ment system(TMS) pressures pump speedsandforevacuum are controlled digitally system Implantation such asEtch,CVD,PVDandIon All majorsemiconductor gases depos gases up to2.6mbar(1.95Torr) pressure (194 °F)toavoidcondensation its temperature manage-

processes leybold

mbar (Torr) Max. foreline pressure forN Ultimate pressure according toDIN28400 leybold prtn pe min N DN Compression ratio Operating speed N Pumping speedaccording toPNEUROP Inlet flange Technical Data egt prx kg(lbs) Hz A mm(in.) V Weight, approx. °C(°F) Dimensions (WxHD) Permissible ambienttemperature V Nominal frequency Max. motorvoltage max. Current forconnectedconsumers Mains connection,50/60Hz Technical Data e Ixs Ixs H He Ar offering apumpingspeedof100m ordry compressing pump Rotaryvanepump Recommended backingpump egt prx kg(lbs) mm(in.) DN VCR Weight, approx. (OD oftube) min Cooling waterconnection Purge andventport Foreline flange at 95%ofnominalspeed Run-up time 2 2 2 Ixs Ixs

2 mbar (Torr) 3 /h Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

. 19) . 19) 2.6(1.95) 2.6(1.95) 2.6(1.95) < 10 0 S- 20IOF 200CF 1100 250ISO-F 1220 200ISO-F 1100 RVC 5BS RVC 5BS TRIVAC D65BCS TRIVAC D65BCS TRIVAC D65BCS 15 18 1050 1180 1050 <6 <6 <6 <6 10 10 1100 1200 1100 0IOK 4 S-F 40ISO-KF 40ISO-KF 40ISO-KF 90 00 920 1020 920 . 02) . 02) 6.4(0.25) 6.4(0.25) 1/4" 6.4(0.25) 1/4" 1/4" 600 600 36000 36000 36000 2(06 3 7.) 32(70.6) 32(70.6) 32(70.6) -8 (<0.75x10 > 10 8 483 x2131/219"(19.028.3919") -8 TURBOVAC MAGW1500CT ) < 10 MAG.DRIVE digital 200 -240,+10%/-15% 0 to+45(+32+113) -8 (<0.75x10 10 (22) 50/60 > 10 60 20

8 -8 ) < 10 -10 (<0.7510 > 10 8 -10 ) 409

High Vacuum Pumps Ordering Information TURBOVAC MAG W 1500 CT

TURBOVAC MAG W 1500 CT P Part No. with separate Frequency Converter and Compound Stage

DN 200 ISO-F 400026V0002 DN 250 ISO-F 400027V0002 DN 200 CF 400030V0002

Mandatory Accessories P FC Electronic frequency converter 1) MAG.DRIVE digital 400035V0011 MAG.DRIVE digital, Profibus 400035V0013 MAG.DRIVE digital, RS 232 C interface 400035V0014

Connecting cable converter – pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 400036V0001 01.5 m (5.25 ft) TMS 400037V0001 03.0 m (10.5 ft) DRIVE/BEARING 400036V0008 03.0 m (10.5 ft) TMS 400037V0008 05.0 m (17.5 ft) DRIVE/BEARING 400036V0004 05.0 m (17.5 ft) TMS 400037V0004 10.0 m (35.0 ft) DRIVE/BEARING 400036V0002 10.0 m (35.0 ft) TMS 400037V0002 20.0 m (70.0 ft) DRIVE/BEARING 400036V0003 20.0 m (70.0 ft) TMS 400037V0003

Plug-in control 121 36

Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 113 98 3 phase motor; 208-23/460 V, 60 Hz / 200-220/380 V, 60 Hz 913 98-2

For further types, see Catalog Part “Oil Sealed Vacuum Pumps”

410 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With separate Frequency Converter P

Connecting cable max. 20 m FC MAG W 1500 CT PS Mains cable

MAG.DRIVE digital

Ordering Information TURBOVAC MAG W 1500 CT High Vacuum Pumps Vacuum

Accessories, optional P Part No.

Seal kit DN 250 metal 200 07 901 Included in the Delivery of the Pump P Inlet screen DN 200 ISO-F 200 91 470 DN 250 ISO-F 200 91 471 DN 250 CF 200 91 638

Integrated purge gas system VRC nut 1/4"

Integrated temperature management system

Cooling water connection Swagelock 1/4" tube Included in the Delivery of the Frequency Converter FC Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug

10000

I x s-1

1000

100 Pumping Speed

10 N2 8 6 He 4 H2

2 1 -4 2468-3 -2 -1 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed of the TURBOVAC MAG W 1500 CT (DN 250) as a function of the inlet pressure

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 411 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter with Compound Stage TURBOVAC MAG W 2000 C/CT

Typical Applications - All major semiconductor processes such as Etch, CVD, PVD and Ion Implantation

Technical Features - Active 5-axis magnetic bearing system - Patented KEPLA-COAT® for rotor and stator to prevent corrosion - Low noise and vibration levels - Installation in any orientation - Advanced rotor design for high

Ø 335 Bottom view “C” DN 250 ISO-F pump speeds and forevacuum 43° 167 pressures

32 5 197 - Integrated purge gas system 303 273 40° Ø 339 388 160 - CT versions: Integrated temperature 113 management system (TMS)

Forevacuum ﬂange DN 40 KF 67 47 35 38 Cooling water IN Purge gas connector Advantages to the User Ø 199 38° Cooling water OUT 42° Drive Bearing connector Bottom view “CT” - Maintenance-free 43° - High throughput for all etch gases 167 R205 Ø310 32 5 - High pumping speed at low Heater 197 Ø pressure 40°

160 - High foreline pressure tolerance: 113 up to 5.3 mbar (4 Torr)

11 - High resistance against corrosive 11x30° gases 38° - Robust against particles and Dimensional drawing for the TURBOVAC MAG W 2000 C/CT depos its - Temperature management system 10000 (TMS) to avoid condensation -1 I x s - Application specific design

1000

100 Pumping Speed

10 N2 8 6 He 4 H2

2 1 -4 2468-3 -2 -1 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed of the TURBOVAC MAG W 2000 CT (DN 250) as a function of the inlet pressure

412 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold offering apumpingspeedof100m mbar (Torr) Max. foreline pressure forN Ultimate pressure according toDIN 28 400 leybold prtn pe min N DN Compression ratio Operating speed N Pumping speedaccording toPNEUROP Inlet flange Technical Data egt prx kg(lbs) Hz A mm(in.) V Weight, approx. °C(°F) Dimensions (WxHD) Permissible ambienttemperature V Nominal frequency Max. motorvoltage max. Current forconnectedconsumers Mains connection,50/60Hz Technical Data e Ixs Ixs H He Ar ordrycompressing pump Rotaryvanepump Recommended backingpump egt prx kg(lbs) mm(in.) DN VCR min Weight, approx. (OD oftube) Cooling waterconnection Purge andventport Foreline flange Run-up time 2 2 2 Ixs Ixs

2 mbar (Torr) 3 /h Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

00C W2000CT W2000C < 10 5 S- 250ISO-F 1500 1800 > 1650 1760 28 28 1500 250ISO-F 1800 10 1650 1760 800 800 . 26) 3.5(2.63) TRIVAC D65BCS TRIVAC D65BCS 3.5(2.63) 8(5) 68(150) 6.4(0.25) <8 40ISO-KF 68(150) 6.4(0.25) 1/4" 40ISO-KF <8 1/4" -8 (<0.75x10 483 x2131/219"(19.028.3919") 8 -8 MAG.DRIVE digital )

200 -240,+10%/-15% TURBOVAC MAG 0 to+45(+32+113) 10 (22) 50/60 60 20

< 10 -8 (<0.75x10 > 10 8 -8 ) 413

High Vacuum Pumps Ordering Information TURBOVAC MAG W 2000 C/CT

TURBOVAC MAG W 2000 C/CT P Part No. with separate Frequency Converter and Compound Stage

DN 250 ISO-F (MAG W 2000 C) 400047V0001 DN 250 ISO-F (MAG W 2000 CT) 400047V0002

Mandatory Accessories P FC Electronic frequency converter 1) MAG.DRIVE digital 400035V0011 MAG.DRIVE digital, Profibus 400035V0013 MAG.DRIVE digital, RS 232 C interface 400035V0014

Plug-in control 121 36

Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 113 98 3 phase motor; 208-23/460 V, 60 Hz / 200-220/380 V, 60 Hz 913 98-2

For further types, see Catalog Part “Oil Sealed Vacuum Pumps”

414 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With separate Frequency Converter P

Connecting cable max. 20 m FC MAG W 2000 (C/CT) PS Mains cable

MAG.DRIVE digital

Ordering Information TURBOVAC MAG W 2000 C/CT High Vacuum Pumps Vacuum

Included in the Delivery of the Pump P Part No.

Inlet screen DN 250 ISO-F 200 91 471

Integrated purge gas system VRC nut 1/4"

Integrated temperature management system (only CT version)

Cooling water connection Swagelock 1/4" tube Included in the Delivery of the Frequency Converter FC Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 415 416 Dimensional drawingfortheTURBOVAC MAG W2200C with CompoundStage with separateFrequency Converter, MAG DIGITAL -MagneticRotorSuspension TURBOVAC MAGW2200C/CT A B C D E F G H J K L M 0 S- m 253719368. 6. 3 8 1 2 5 39 200 285317199396 117120155 85.5 78 mm 164.6 ISO-F 23 n 11.22 in. 12.48 7.83 15.59 3.37 6.480.913.074.614.726.101.54 5 S- m 353719318. 6. 3 8 1 2 5 39 250 335317199371 117120155 85.5 78 mm 164.6 ISO-F 23 n 13.19 in. 12.48 7.83 14.61 3.37 6.480.913.074.614.726.101.54 5 F m 0 1 9 0 551462 7 171015 39 305317199401 117120155 85.5 78 mm 164.6 23 250 CF n 12.01 in. 12.48 7.83 15.79 3.37 6.480.913.074.614.726.101.54 D E Ø C Ø A

Ø B

Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 45°

DN 40KF Bottom view K

8°

36.5°

36° Integratedtemperature - Intelligentpowercontrol system - Purgegasconnection - Advancedrotor designforhigh - Installationinanyorientation - Lownoiseandvibrationlevels - Digitalmonitoringofthebearing - Active5-axismagnetic bearing - Technical Features - Research - Particle accelerators connection Versions withCFhighvacuum - Coating systems Allmajorsemiconductor - Typical Applications Highpumpingspeedatlow - Highthroughput forallprocess - - Maintenance-free Advantages totheUser Applicationspecificdesign - Lowestweightandsizeinitsclass - Highforeline pressure tolerance: - (“CT” versiononly) management System(TMS) pressures pump speedsandforevacuum system system Implantation such asEtch,CVD,PVDandIon gases up to2mbar(1.5Torr) pressure

processes leybold

offering apumpingspeedof100m mbar (Torr) Max. foreline pressure forN Ultimate pressure according toDIN28400 leybold prtn pe min DN N Compression ratio Operating speed N Pumping speedaccording toPNEUROP Inlet flange egt prx kg(lbs) Hz A mm(in.) V Weight, approx. °C(°F) Dimensions (WxHD) Permissible ambienttemperature V Nominal frequency Max. motorvoltage max. Current forconnectedconsumers Mains connection,50/60Hz Technical Data Technical Data e Ixs Ixs H He Ar ordrycompressing pump Rotaryvanepump mbar(Torr) mbar Recommended backingpump (Torr) with withconvectioncooling water cooling egt prx kg(lbs) DN Weight, approx. (OD oftube) min Cooling waterconnection Purge andventport Foreline flange at 95%ofnominalspeed Run-up time 2 2 2 Ixs Ixs

3 /h Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

12 12 Swagelok 1/2" tube 1/2" DN 1/4" 1/4" 10/16 VCR VCR 1600 20001800 8(0) 8(0) 60(132) <8 48(106) <8 48(106) <8 TRIVAC D65BCS TRIVAC D65BCS 40 TRIVAC D65BCS ISO-KF 40 ISO-KF 40 ISO-KF 0 S- 20IOF 250CF 250ISO-F 200ISO-F 1450 19001700 < 10 15 2(.) 1(0.75) 2(1.5) 0.1 2(1.5) – (0.075) – 1780 1980 1720 1930 940 940 29400 29400 >1x10 29400

-8 (<0.75x10 8 20CC W2200 W 2200C/CT 483 x2131/219"(19.028.3919") -8 )

MAG.DRIVE digital 200 -240,+10%/-15% TURBOVAC MAG 0 to+45(+32+113) < 10 -8 > 1x10 (<0.75x10 10 (22) 50/60 60 20

8 1x10 -8 <1x10 ) -10 (<0.75x10 8

1/4" -10 417 )

High Vacuum Pumps Ordering Information TURBOVAC MAG W 2200 C/CT

TURBOVAC MAG W 2200 C/CT P Part No. with separate Frequency Converter and Compound Stage

DN 200 ISO-F (MAG W 2200 C) 400081V0011 DN 250 ISO-F (MAG W 2200 C) 400081V0021 DN 250 CF (MAG W 2200) 400081V0061 DN 200 ISO-F (MAG W 2200 CT) 400081V0013 DN 250 ISO-F (MAG W 2200 CT) 400081V0023

Mandatory Accessories P FC Electronic frequency converter 1) MAG.DRIVE digital 400035V0011 MAG.DRIVE digital, Profibus 400035V0013 MAG.DRIVE digital, RS 232 C interface 400035V0014

Connecting cable converter – pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 400036V0001 01.5 m (5.25 ft) TMS 3) 400037V0001 03.0 m (10.5 ft) DRIVE/BEARING 400036V0008 03.0 m (10.5 ft) TMS 3) 400037V0008 05.0 m (17.5 ft) DRIVE/BEARING 400036V0004 05.0 m (17.5 ft) TMS 3) 400037V0004 10.0 m (35.0 ft) DRIVE/BEARING 400036V0002 10.0 m (35.0 ft) TMS 3) 400037V0002 20.0 m (70.0 ft) DRIVE/BEARING 400036V0003 20.0 m (70.0 ft) TMS 3) 400037V0003

Plug-in control 121 36

Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 113 98 3 phase motor; 208-23/460 V, 60 Hz / 200-220/380 V, 60 Hz 913 98-2

For further types, see Catalog Part “Oil Sealed Vacuum Pumps”

418 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With separate Frequency Converter P

Connecting cable max. 20 m FC MAG W 2200 (C/CT) PS Mains cable

MAG.DRIVE digital

Ordering Information TURBOVAC MAG W 2200 C/CT High Vacuum Pumps Vacuum Accessories, optional P Part No.

Purge gas and venting valve 121 33

Connection cable for optional seal gas valve (pump/converter) 01.5 m (5.25 ft) 400038V0007 03.0 m (10.5 ft) 400038V0006 10.0 m (35.0 ft) 400038V0002 20.0 m (70.0 ft) 400038V0009

Seal kit DN 250 metal 200 07 901 Included in the Delivery of the Pump P Inlet screen DN 200 ISO-F E 400 000 096 DN 250 ISO-F E 400 000 100 DN 250 CF E 200 15 157 Included in the Delivery of the Frequency Converter FC Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug

10000

I x s-1

1000

100 Pumping Speed

10 N2 8 6 He 4 H2

2 1 -4 2468-3 -2 -1 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed of the TURBOVAC MAG W 2200 C (DN 250) as a function of the inlet pressure leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 419 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 2800/3200 C/CT

Typical Applications - All major semiconductor processes such as Etch, CVD, PVD and Ion Implantation Versions with CF high vacuum connection

- Particle accelerators - Research

Technical Features - Active 5-axis magnetic bearing TURBOVAC MAG W 2800 CT (left) and TURBOVAC MAG W 3200 CT (right) system - Bearing and temperature system Bottom view Ø A are controlled digitally

Ø B O Ø C - Corrosion resistant

- Low noise and vibration levels 50.5° - Installation in any orientation 30°

Ø N

J - Advanced rotor design for high Ø D Ø M H pump speeds and forevacuum E

pressures 42° - Integrated purge gas system M 8, 14 depth

F - CT versions: Integrated temperature

G DN 40 KF 102° management system (TMS)

L - Intelligent power control system 137° K

Advantages to the User A B C D E F G H J 250 ISO-F mm 335 310 261 293 408 176 89 361 293 - Maintenance-free in. 13.19 12.2 10.28 11.54 16.06 6.93 3.50 14.21 11.54 250 CF mm 305 284 268 307 422 176 89 391 248 - High throughput for all process in. 12.01 11.18 10.55 12.09 16.61 6.93 3.50 15.39 9.76 gases 320 ISO-F mm 425 395 318 248 363 176 89 316 248 in. 16.73 15.55 12.52 9.76 14.29 6.93 3.50 12.44 9.76 - High pumping speed at low pressure K L M N O - High foreline pressure tolerance: 250 ISO-F mm 199 196.5 353 415 32 in. 7.83 7.74 13.9 16.34 1.26 up to 2 mbar (1.5 Torr) 250 CF mm 199 196.5 353 415 32 - High resistance against corrosive in. 7.83 7.74 13.9 16.34 1.26 gases 320 ISO-F mm 199 196.5 353 415 32 in. 7.83 7.74 13.9 16.34 1.26 - Robust against particles and depos its Dimensional drawing for the TURBOVAC MAG W 2800/3200 C/CT - Temperature control up to 90 °C (194 °F) to avoid condensation - Lowest weight and size in its class - Application specific design

420 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold offering apumpingspeedof100m (Torr) mbar Max. foreline pressure forN Ultimate pressure according toDIN28400 leybold prtn pe min N DN Compression ratio Operating speed N Pumping speedaccording toPNEUROP Inlet flange Technical Data egt prx kg(lbs) Hz mm(in.) V Weight, approx. °C(°F) Dimensions (WxHD) Permissible ambienttemperature V Nominal frequency Max. motorvoltage A Current forconnectedconsumers,max. Mains connection,50/60Hz Technical Data e Ixs Ixs H He Ar ordrycompressing pump Rotaryvanepump mbar(Torr) Recommended backingpump mbar (Torr) with with convectioncooling water cooling egt prx kg(lbs) DN min Weight, approx. Swageloktube Cooling waterconnection Purge / vent port Foreline flange Run-up time 2 2 2 Ixs Ixs

3 /h Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1

1x10 28 2100 2250 2650 2650 3000 2450 3000 800 28 2650 2650 3200 800 28 800 28 800 80C 80C W20 W3200CT W2800 W2800CT W2800C – 0.3 – – (0.23) – 2.0 (1.5) 2.0 (1.5) 3.0 (2.3) 2.0 (1.5) RVC 5BS RVC 5BS RVC 5BS TRIVAC D65BCS TRIVAC D65BCS TRIVAC D65BCS TRIVAC D65BCS 5 S- 20IOF 5 F 320ISO-F 250CF 250ISO-F 250ISO-F < 10 (<0.75x10 4(4.) 4(4.) 5(6.) 65(143.5) <10 1/4"VCR 75(165.6) 40ISO-KF <10 DN10/16 64(141.3) 40ISO-KF 1/4"VCR <10 64(141.3) 40ISO-KF 1/4"VCR 40ISO-KF <10 1/4" 1/4" -8 8 < 10 1x10 -8 (<0.75x10 ) 483 x2131/219"(19.028.3919") MAG.DRIVE digital 200 -240,+10%/-15% TURBOVAC MAG 0 to+45(+32+113) -8 8 <1x10- 1x10 -8 (<0.75 x 10 ) 10 (22) 50/60 60 20 9 1x10 10 -10 (<0.75 x 10 ) < 10 -8 8

-8 ) 421

High Vacuum Pumps Ordering Information TURBOVAC MAG W 2800 / 3200 C/CT TURBOVAC MAG W 2800 (C/CT) P Part No. with separate Frequency Converter and Compound Stage

DN 250 CF (MAG W 2800) 400006V0071 DN 250 ISO-F (MAG W 2800 C) 400000V0001 DN 250 ISO-F (MAG W 2800 CT) 400000V0002

TURBOVAC MAG W 3200 (C/CT) P with separate Frequency Converter and Compound Stage

DN 320 ISO-F (MAG W 3200) 400003V0003 DN 320 ISO-F (MAG W 3200 C) 400003V0001 DN 320 ISO-F (MAG W 3200 CT) 400003V0002

Mandatory Accessories P FC Electronic frequency converter 1) MAG.DRIVE digital 400035V0011 MAG.DRIVE digital, Profibus 400035V0013 MAG.DRIVE digital, RS 232 C interface 400035V0014

Plug-in control 121 36

Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 112 96 3 phase motor; 208-23/460 V, 60 Hz / 200-220/380 V, 60 Hz 912 96-2

For further types, see Catalog Part “Oil Sealed Vacuum Pumps”

422 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold With separate Frequency Converter P

Connecting cable max. 20 m FC MAG W 2800/3200 (C/CT) PS Mains cable

MAG.DRIVE digital

Ordering Information TURBOVAC High MAG W 2800 C/CT / 3200 CT Pumps Vacuum Accessories, optional P Part No. Purge gas and venting valve 121 33

Seal kit DN 250 metal 200 07 901 Included in the Delivery of the Pump P Inlet screen DN 250 ISO-F E 400 000 100 DN 250 CF 200 15 157 DN 320 ISO-F E 400 000 134 Included in the Delivery of the Frequency Converter FC Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug

10000

I x s-1

1000

100 Pumping Speed

10 N2 8 6 He 4 H2

2 1 -4 2468-3 -2 -1 10 10 10 10 mbar 1 Inlet Pressure

Pumping speed of the TURBOVAC MAG W 3200 C (DN 320) as a function of the inlet pressure

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 423 Accessories Electronic Frequency Converters for Pumps with Mechanical Rotor Suspension TURBO.DRIVE TD 20 classic

Technical Features Advantages to the User - For operating the TURBOVAC - Easy integration within a vacuum 151 (C), 361 (C), 600 C, 1000 C and system owing to the large variety of 1100 C turbomolecular pump different modern interfaces as well - Front panel with LED as for modernising older systems - Status, Power, Error, pump run-up, - Start/stop function through keys on pumping power the front panel - Wide voltage range mains input - Remote control and process - Current interfaces like Profibus, control through analog and PLC DeviceNet, Ethernet/IP, RS 232 C, compatible inputs and outputs RS 485 C and 25-way terminal strip, - Compatible to frequency converter available as options NT 20, NT 151/361 and NT 361

213 198

135 128 122.4

315

107

196

Dimensional drawing for the electronic frequency converter TURBO.DRIVE TD 20 classic

424 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold

19 140m(490.0ft) TURBOVAC -frequency converter Connecting cable USplug115VAC 2m(7.5ft) USplug5-15P UK plug 3m(10.5ft) EURO plug Mains cable with25-polI/O with with RS485Cinterface Profibus withRS232Cinterface without interface leybold egt prx kg(lbs) IP mm(in.) A Weight, approx. V °C(°F) Dimensions (WxHD) Admissible ambienttemperature W Protection rating 50/60Hz Interface Max. outputcurrent Max. outputvoltage Max. powerconsumption Mains connection Technical Data 1) TURBO.DRIVE TD20 Ordering Information PC software TURBO.DRIVEServer PLC interfaceneedstobereplaced) (required whenaNT20withconnected 25-way PLCinterfaceto2xPhoenixplugs Adapter cable,0.2m(0.7ft)long Pump adaptercable Software supportsonlyRS232C,485 CandProfibus " 0 0 0 0 0 00 00 rackmountingframe3HU 80 m(280.0ft) 60 m(210.0ft) 50 m(175.0ft) 20 m( 10 m( 5 m( 3 m( 0 0 0 0 70.0 ft) 35.0 ft) 17.5 ft) 10.5 ft) classic

Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Without, RS232C,485Profibus or25-wayterminalstrip Without, (see Chapter“Accessories”atthe endofthesection) 213 x128315(8.395.0412.40) TURBO.DRIVE TD20 TURBO.DRIVE TD20 100 to240V(+15%/-10%) 0 to+45(+32+113) 800152V0140 800152V0080 800152V0007 800152V0008 800110V0102 800152V0020 800102V1002 800102V0003 800102V0002 800075V0005 800075V0003 800075V0004 800075V0002 800075V0001 800 000006 992 76513 Part No. 4.0 (8.8) 161 00 857 68 857 67 857 66 857 65 3 x47 500 20 5

classic classic 425

High Vacuum Pumps TURBOTRONIK NT 10

Technical Features - For operating the TURBOVAC 50 - Controls and indicators on the front turbomolecular pump panel - Bench top unit - Inputs for remote control and process controller - Also for rack mounting (1/4 19", 3 HU) - Freely assignable relays (e.g. to control the backing pumps)

Technical Data TURBOTRONIK NT 10

Mains connection 50/60 Hz 100-120 or 200-240 V Max. power consumption W 45 Max. output voltage V 3 x 150 Max. output current A 6 Protection rating IP 20 Admissible ambient temperature °C (°F) 0 to +40 (+32 to +104) Dimensions (W x H x D) mm (in.) 106 x 128 x 233 (4.17 x 5.04 x 9.17) Weight, approx. kg (lbs) 1.5 (3.3)

Ordering Information TURBOTRONIK NT 10

Part No.

100 - 120 V (with US plug) 859 01

200 - 240 V (with EURO plug) 859 00

Connecting cable pump - converter 01 m (03.5 ft) 200 11 609 03 m (10.5 ft) 121 08 05 m (17.5 ft) 121 09 10 m (35.0 ft) 161 10 15 m (52.5 ft) 119 90 20 m (70.0 ft) 800150V2000

426 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold UB.RV T 0 Fotsd)DimensionaldrawingfortheTURBO.DRIVETD400 Technical Features TURBO.DRIVE TD400(Front side) and RS485Cinterfaces Accessories forRS232C Hat railadaptorasmountingaid START/STOP switch(formanualoperation) 5.0m(17.5ft) 3.0m(10.5ft) 2.5m(8.75ft) 1.0m(3.50ft) 0.5m(1.75ft) 0.4m(1.40ft) 0.3m(1.15ft) 0.2m(0.70ft) Connecting cableTD400-Pump with withRS485Cinterface Profibus withRS232Cinterface withUSBinterface kg(lbs) TURBO.DRIVE TD400 IP mm(in.) Ordering Information V Weight, approx. °C(°F) Dimensions (WxHD) W VDC Admissible ambienttemperature A Protection rating Interface Max. outputvoltage Max. powerconsumption Max. current consumption Mains connection Technical Data USB, RS232C,485 - - Small footprint for TURBOVAC SL80andTW250S TURBO.DRIVE TD400(TD400) Profibus interface orEthernet/IP Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 - Configurations: cular pump - integrated withintheturbomole- - as aseparatefrequency converter (see Chapter“Accessories” attheendofsection) 18,5 18,2 TD 400 TURBO.DRIVE 41,0 USB, RS232C,485CorProfibus DRIVE (X3) ETSN HEAT SINK HEAT SINK TURBO.DRIVE TD400 TURBO.DRIVE TD400 100 x90(3.93.53.9) 79,0 63,8 100 24VDC(X4) +5 to+45(+41+113) 73,3 800110V0003 800152V0050 800152V0022 800152V0023 800152V0021 800073V0004 800073V0003 800073V0002 800073V0008 P152 47 Part No. 0.7 (1.6) 152 48 864 50 864 40 864 49

3 x24 190 24 20 27,6 15,9 8

50 Cost-effective supplyof24VDC - Flexiblemountingoptions - Remotecontrol viaremote - 100 interface 427

High Vacuum Pumps TURBO.CONTROL 300 Power Supply Unit for TURBO.DRIVE TD 400

211 Front view

315 213 198.1

START 263 START 1 NORMAL 128.4 0 STOP 111 POWER ERROR 122.4

TURBO.CONTROL 300/700

Ø 3.2

Dimensional drawing for the power supply TURBO.CONTROL 300

Technical Features - Cost-effective supply of 24 V DC power for SL 80, TW 250 S and TURBO.DRIVE TD 400 - Plug & play - Bench top unit or for cabinet mount ing - Mains switch - START/STOP switch for the turbomolecular pump - Remote control via remote interface - Status indicating LEDs and status relays

428 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold USplug115VAC 2m(7.5ft) withUSplug5-15P withUKplug withEUROplug 3m(10.5ft) Mains cable 20m(70.0ft) 10m(35.0ft) egt prx kg(lbs) IP mm(in.) Weight, approx. A Dimensions (WxHD) °C(°F) VDC Admissible ambienttemperature W Protection rating 50/60Hz Max. current consumption Max. outputvoltage Max. powerconsumption Mains connection frequency converter-powersupply DC cable Power supplyTURBO.CONTROL300 Ordering Information Technical Data

0 0 0 5 m(17.5ft) 3 m(10.5ft) 1 m( 0 3.5 ft) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 213 x129320(8.45.112.6) TURBO.CONTROL 300 TURBO.CONTROL 300 24 VDCcontrol cable 0 to+40(+32+104) Power Supply Power Supply 800102V1002 800102V0003 800102V0002 800091V2000 800091V1000 800091V0500 800091V0300 800091V0100 800100V0001 992 76513 Part No. 85-264 V 1.5 (3.3) 300 8.4 20 24

429

High Vacuum Pumps Electronic Frequency Converters for Pumps with Magnetic Rotor Suspension MAG.DRIVE S

MAG.DRIVE S without display MAG.DRIVE S with display

Advantages to the User - Operation of turbomolecular pumps - Setting of speed and other func tions - 2 slots for industrial communica tions with magnetically levitated rotors: - Warning in case the pump is running modules MAG W 300/400 P and out of specification - rear side: Standard 9 pin 24 V SPS MAG W 600/700 P - Storing of all parameters in the PLC-IO in Control Slot - Easy operation through the controls pump’s memory - front side: - Communication to host computer of - Small size and low weight RS 232 C in Service Slot the customer via serial interface and - Integrated fan - further interfaces can be fitted: conventional interface possible Ethernet, Profibus, DeviceNet, RS 485 C

Space for DRIVE/BEARING cable l 2 347 l1

111h 2 h h111 1294 122,5h 3 SERVICE 1 STOP START ERR 129h PWR STS MAG.DRIVE S 2 327l l3 198b1 213 b(Frontplatte)

b b1 h h1 h2 h3 h4 l l1 l2 l3 mm 213 198 129.0 122.5 111 111 129 327 347 220 2 in. 8.39 7.80 5.08 4.82 4.37 4.37 5.08 12.87 13.66 8.66 0.08

Dimensional drawing for the MAG.DRIVE S

RS 232 C interface

Mains (100 - 240 V)

Main S upply

OFFO N

PE ET F2 DR HV IVE/ B E Power ARING ON

CONTRO L PLC or DRIVE/BEARING cable optional interface Pump accessories, e.g. air cooling

Overview connection lines

430 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold 20.0m(70.0ft) leybold 10.0m(35.0ft) egt prx kg(lbs) °C(°F) % °C(°F) Hz Weight, approx. Relative humidityoftheair duringstorage duringoperation V/A A Temperature V W Load capability, relay outputX1 W Max. frequency System fuse V Hz Fuses F1,F25x20mm Max. pumpcurrent Max. motorvoltage maximum stand-by Power consumption Nominal frequency Voltage range 1) USplug115VAC 2.0m(7.5ft) USplug5-15P 3.0m(10.5ft) EURO plug Mains cable and MAG.DRIVES) (connection betweenpump Connecting cableDRIVE/BEARING MAG.DRIVESwithdisplay MAG.DRIVE S Electronic frequency converter Ordering Information Technical Data SuitedforoperatingtheMAGW300/400only 0 0 5.0 m(17.5ft) 3.0 m(10.5ft) 1) 1)

Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 high breaking capacity250V -10 to+60(+14+140) 0 to+45(+32+113) MAG.DRIVE S MAG.DRIVE S 95 (non-condensing) L orGcharacteristic 100 -240,±10% 800102V1002 800102V0002 410300V4020 410300V4010 410300V4005 410300V4003 410300V0212 410300V0202 10 Afastblow 992 76513 65 (14.35) 0 to2000 Part No. 32 /0,5 50 / 60 400 100 48 6

431

High Vacuum Pumps MAG.DRIVE digital

MAG.DRIVE digital without plug-in control MAG.DRIVE digital with plug-in control

Advantages to the User - Operation of turbomolecular pumps - Communication to host computer - Plug-in control with magnetically levitated rotors: of the customer via serial interface - Small size and low weight and conventional interface possible MAG W 830/1300 C, - Integrated fan MAG (W) 1500 CT, - Setting of speed, temperature of the - Integrated temperature management MAG W 2000 C/CT, basic flange and other functions system (TMS) MAG W 2200 C/CT and - Warning in case the pump is running MAG W 2800/3200 C/CT out of specification - Easy operation through the controls - Storing of all parameters in the or the use of plug-in control unit pump’s memory

40∞ l1 b l l2 ød b1

h2 h h3 h1

b b1 d h h1 h2 h3 l l1 l2 l3 mm 213 198 3.3 113 135 128 122.4 455 27 100 70 in. 8.39 7.80 0.13 4.45 5.31 5.04 4.82 17.91 1.06 3.94 2.76

Dimensional drawing for the MAG.DRIVE digital

0° 0°

270° 90°

Connection 225° DRIVE/BEARING 180° Connection TMS 180°

Overview connection lines

432 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold 2. 7. t srih bne bended Vent bended bended Purge bended straight TMS bended180° 19 Cable outletpump Cableoutlet bended225° bended180° Connector forhardware interface 20.0 m(70.0 ft) straight 10.0 m(35.0ft) frequency straight converter bended225° bended225° Purge/ Vent (onlyforoptionalpurgeventvalvePartNo.12133) 20.0 m(70.0ft) 10.0 m(35.0ft) TS M Heater TMS TMS Cableoutletpump Cableoutlet frequency converter Replacementmainscord are PartNumbers180 097or180096respectively leybold egt prx kg(lbs) Hz mm(in.) V °C(°F) V A Electronic frequency converter Ordering Information Weight, approx. Dimensions (WxHD) Permissible ambienttemperature Nominal frequency Max. motorvoltage Current forconnectedconsumers,max. Mains connection,50/60Hz Technical Data 1) DIEBAIG RV/ERN PK DRIVE/BEARING Cableoutletpump Cableoutlet DRIVE/BEARING frequency converter DRIVE/BEARINGoftheTURBOVAC MAG...C/CT Connection lineleadingtothe Plug-in control withRS232Cinterface withProfibus interface MAG.DRIVE digital 3. 15f) edd25 srih straight straight straight straight straight straight straight straight bended225° (onlyforCTversions) bended225° bended225° TMS 30.0 m(105ft) bended225° 23.0 m(80.5ft) 20.0 m(70.0ft) 10.0 m(35.0ft) Includedare 2mains cords. OnewithEUROplugand onewithUSplug(220VAC). " installationframe 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 . 52 t srih bne bended bended bended bended bended225° straight bended180° bended180° 3.0 m(10.5ft) bended180° bended180° straight 1.5 m(5.25ft) straight bended180° straight straight straight bended225° bended225° bended225° 8.0 m(28.0ft) bended40° 5.0 m(17.5ft) bended225° 3.0 m(10.5ft) 1.5 m(5.25ft) 1.5 m(5.25ft) . 1. t srih srih straight straight straight straight straight straight straight straight straight bended270° straight straight straight bended180° bended225° straight bended 180° bended225° straight straight 8.0 m(28.0ft) 5.0 m(17.5ft) bended225° straight 5.0 m(17.5ft) 3.0 m(10.5ft) bended40° 3.0 m(10.5ft) bended225° 3.0 m(10.5ft) 1.5 m(5.25ft) 1.5 m(5.25ft) 1)

Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 483 x2131/219 MAG.DRIVE digital MAG.DRIVE digital 200 -240,+10%/-15% 0 to+45(+32+113) 400038V0007 400036V0005 400038V0009 400038V0002 400038V0006 400035V0014 400035V0013 400035V0011 400037V0003 400037V0002 400037V0005 400037V0004 400037V0008 400037V0025 400037V0001 400036V0011 400036V0012 400036V0003 400036V0002 400036V0010 400036V0004 400036V0009 400036V0008 400036V0006 400036V0025 400036V0001 upon request Part No. 161 00 121 36 10 (22) " 50/60 (19.02x8.391/219") 60 20

433

High Vacuum Pumps Power Supply TURBO.POWER 500 for TURBOVAC MAG W 300/400/600/700 iP

Min. distance for venting 80 Top view 60

POWER IN POWER OUT

F1 100 100 F2

TURBO.POWER 500

130 5 15 15 250

Dimensional drawing for the power supply TURBO.POWER 500

Technical Features - For supplying 48 V DC power to the MAG W 300/400/600/700 iP - Bench top unit or for cabinet mount ing

434 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold USplug115VAC 2.0m(7.5ft) USplug5-15P 3.0m(10.5ft) EURO plug Mains cable 20.0m(70.0ft) 10.0m(35.0ft) mx A VA V DC at3x1.5mm VA Length oftheDCconnectioncable,max. max. POWER Hz OUT DC voltagerange ofthepump atultimatepressure operation V maximum Power consumption Nominal frequency Power supply(POWER IN) TURBO.POWER 500andMAG.DRIVEiS) DC cable(connectionbetween Power supplyTURBO.POWER500

Technical Data egt prx kg(lbs) IP Weight, approx. °C(°F) % Pollution category °C(°F) Overvoltage category Protection class Relative humidityoftheair duringstorage duringoperation Ambient temperature at3x2.5mm Ordering Information 0 0 0 5.0 m(17.5ft) 3.0 m(10.5ft) 1.0 m( 0 3.5 ft) 2 2 m m (ft) (ft) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 TURBO.POWER 500 TURBO.POWER 500 +10 to+40(+50+104) 5 to85(non-condensing) -10 to-70(+14-94) Power Supply Power Supply 100 -240,±10% 800102V1002 800102V0002 410300V2020 410300V2010 410300V2005 410300V2003 410300V2001 410300V0221 992 76513 Part No. 20 (70.0) 4.0 (8.8) 5 (17.5) 50 /60 450 650 10 48 30 2 II

435

High Vacuum Pumps Vibration Absorber Vibration absorbers are used to inhibit the propagation of vibrations from the turbomolecular pump to highly sensitive instruments like electron beam microscopes, micro-balances or analytical instruments.

Ordering Information Vibration Absorber Part No.

Vibration absorber DN 063 ISO-K 066 mm (2.60 in.) long 800131V0063 DN 063 CF 081 mm (3.19 in.) long 500 070 DN 100 ISO-K 084 mm (3.31 in.) long 800131V0100 DN 100 CF 100 mm (4.09 in.) long 500 071 DN 160 ISO-K 084 mm (3.31 in.) long 500 073 DN 160 CF 104 mm (4.09 in.) long 500 072

Air Cooling Unit for TURBOVAC ClassicLine Pumps For the purpose of retrofitting the TURBOVAC 50, 151, 361 and 600 pumps for air cooling, an air cooling unit is available by way of a retrofit kit. This kit can be easily fitted to the respective pump using the fitting components included with the accessories.

Technical Data Air Cooling Unit

Rated power consumption of the air cooling unit when connected to TURBOVAC 50, 151 (C)/361 (C) W 10.5 TURBOVAC 600 C, 1000 C W 21.0

Ordering Information Air Cooling Unit Part No. Part No.

Air cooling unit for 230 V 100-115 V TURBOVAC 50 854 05 800152V0015 TURBOVAC 1 51 (C)/361 (C) 855 31 800152V0016 TURBOVAC 600 C, 1000 C 855 41 800152V0017

436 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold For fittingtotheturbomolecularpumpSL80 leybold N10C W DN160CF DN100CF DN160CF leybold DN Flange heater DN the flangeheater Rated powerconsumptionof Air coolingunitforTURBOVAC SL80 Ordering Information Ordering Information Technical Data vacuum chamber. when simultaneouslybakingoutthe molecular pumpwillonlybeuseful UHV range.Degassingoftheturbo ultimatepressure attainedinthe baked outinorder toimprove the Most TURBOVAC pumps can be Technical Data Flange HeaterforCFHighVacuum Flanges Air coolingunitsforthepumpSL80 ouefo m IP kg(lbs) mA °C(°F) Volume flow Weight, approx. VDC Protection class Operating temperature Power W Current rating Power supplyvoltage Air CoolingUnitforTURBOVAC SLPump 0 0 3C 63 CF W 63 CF, DN100CF - Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 3 /h atN. PartNo. PartNo. 843 854 854 854 854 854 854 38 28 37 07 27 04 3 115V 230 V +10 to+40(+50+104) Air CoolingUnit Air CoolingUnit Flange Heater Flange Heater 800136V0001 0.23 (0.51) Part No. 150 100 0.9 20 20 39 24

437

High Vacuum Pumps Fine Filter A fine filter integrated in the centering ring protects the pump against particles and dust on the high vacuum side.

Ordering Information Fine Filter Part No.

Connection flange of the fine filter DN 040 ISO-KF 883 98 DN 063 ISO-K 887 20 DN 100 ISO-K 887 21

Securing Collar for Octal Socket Plugs for ClassicLine Pumps TURBOVAC 151 (C), 361 (C), 600 C, 1000 C and 1100 C

The securing collar serves the purpose of securing the plug on the ClassicLine pumps TURBOVAC 151 (C), 361 (C), 600 C, 1000 C and 1100 C against being disconnected inadvertently.

Ordering Information Securing Collar for Octal Socket Plugs Part No.

Securing collar for octal socket plugs 800001830

Solenoid Venting Valve

Technical Data Venting Valve Drive voltage V DC 24 Power consumption W 4 Connecting flange DN 16 ISO-KF Weight, approx. kg (lbs) 0.3 (0.66)

Ordering Information Venting Valve Part No. Solenoid venting valve, normally closed 800120V0011

Power Failure Venting Valve

Technical Data Power Failure Venting Valve

Drive voltage V DC 24 Power consumption W 4 Connecting flange DN 16 ISO-KF Weight, approx. kg (lbs) 0.3 (0.66)

Ordering Information Power Failure Venting Valve Part No. Power failure venting valve, normally open 800120V0021

438 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Power Failure Venting Valve, Electromagnetically Actuated

Technical Data Power Failure Venting Valve

Technical data See Catalog “Valves”, para. “Special Valves” 65,8

Ordering Information Power Failure Venting Valve

DN 10 ISO-KF Part No. Power failure venting valve DN 10 ISO-KF, 30 27 electromagnetically actuated 024 V DC 174 46 230 V AC / 50/60 Hz 174 26 41

Dimensional drawing for the electromagnetically astuated power failure venting valve

Purge Gas and Venting Valve

Technical Data Purge Gas and Venting Valve High Vacuum Pumps Vacuum Connecting flange DN 10 ISO-KF Weight, approx. kg (lbs) 0.7 (1.55)

Ordering Information Purge Gas and Venting Valve

Part No. Purge gas and venting valve, 230 V 0.2 mbar x l x s-1 (12 sccm) 855 19 0.4 mbar x l x s-1 (24 sccm) 855 29

Purge Gas and Venting Valve

Technical Data Purge Gas and Venting Valve

Connecting flange Inlet 1/4" tube Outlet pump specific or DN 16 ISO-KF Purge gas pressure, abs. bar 1.5 to 6,0 Weight, approx. kg (lbs) 0.5 (1.1)

Ordering Information Purge Gas and Venting Valve Part No. Purge gas and venting valve, 24 V DC 0.6 mbar x l x s-1 121 33

Further 0.6 mbar x l x s-1 valves upon request

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 439 Purge Gas and Venting Valve for ClassicLine and SL Pumps

Technical Data Purge Gas and Venting Valve

Connecting flange Pump side DN 10 ISO-KF Gas connection G 1/4"

Seal gas pressure, abs. bar 1

Weight, approx. kg (lbs) 0.3 (0.66)

Ordering Information Purge Gas and Venting Valve Part No.

Purge gas and venting valve at 1 bar 0.2 mbar x l x s-1 (12 sccm), 24 V DC 113 50 0.2 mbar x l x s-1 (12 sccm), 110 - 115 V AC 800152V0041 0.2 mbar x l x s-1 (12 sccm), 230 V AC 800152V0019 0.4 mbar x l x s-1 (24 sccm), 24 V DC 800152V0013 0.4 mbar x l x s-1 (24 sccm), 110 - 115 V AC 800152V0042 0.4 mbar x l x s-1 (24 sccm), 230 V AC 800152V0014 0.6 mbar x l x s-1 (36 sccm), 24 V DC 800152V0012 0.6 mbar x l x s-1 (36 sccm), 110 - 115 V AC 800152V0043 0.6 mbar x l x s-1 (36 sccm), 230 V AC 800152V0040

Adapter Set for Seal Gas and Venting Valve for the SL pumps

Technical Data Adapter Set

Pump flange adapter M8 / DN 10 ISO-KF incl. adapter centering ring with sinter filter insert and clamping ring DN 10 / DN 16 ISO-KF

Ordering Information Adapter Set Part No.

Adapter set for purge gas and venting valve 800110V0011

Gas Filter to G 1/4" for Purge Gas and Venting Valve

Technical Data Gas Filter

Gasfilter including fitting G 1/4" and 2 gaskets

Ordering Information Gas Filter Part No.

Gas filter to G 1/4" for seal gas and venting valve 800110V0012

Replacement filter for gas filter to G 1/4" E 200 18 515 for seal gas and venting valve

440 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold PC Software LEYASSIST capabilities canbeimplementedin control, monitoringandinformation Through theseaccessoriesmany RS 232Cand485 Accessories forSerialInterfaces includingCDwithdriversandmanual for connectionofRS232CtoUSB (PC), Adaptor USB/RS232C mains connection230V, 50Hz,EURO plug Adaptor RS232C/RS485C Ordering Information with RS232C/RS485 CInterface Interface AdaptorforFrequency Converter PC software LEYASSIST Ordering Information Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 pumps. quency convertersandturbo connection withtheelectronic fre- Interface AdaptorRS232C/RS485C PC Software LEYASSIST molecular 800110V0103 800110V0101 230439V01 Part No. Part No.

frequency convertersare supported. All turbomolecularpumpsorelectronic - Alarm/warning messagelogging Alarm/warning - - Data logging Reading/writingofparameters - Configuringtheaccessoryfunctions - Displayofvacuumsystemstatus - Functions detection. RS 232interfacewithautomaticpump molecular pumpsviaUSB,RS485or tion, control andmonitoringofturbo- Software forPC-basedcommunica- of theTURBOVAC i/iX 441

High Vacuum Pumps Miscellaneous

Services for Mechanically Suspended Turbomolecular Pumps

Complete Refurbishing at the Service Centre Complete refurbishing at the service centre includes the following: Complete disassembly, cleaning, replacement of all wearing parts, mounting, electrical safety test, final test including vibration measurement

Complete Refurbishing with Decontamination at the Service Centre Complete refurbishing with decontamination at the service centre includes the following: Complete disassembly, cleaning and decontamination, replacement of all wearing parts, mounting, electrical safety test, final test including vibration measurement

Ordering Information Complete Refurbishing Complete Refurbishing at the Service Centre with Decontamination at the Service Centre

Part No. Part No.

For pump

TURBOVAC 35 / 50D AS 2165 AS 2165 D

TURBOVAC 50 AS 2133 AS 2133 D

TURBOVAC SL 80 LAS 2368 LAS 2368 D

TURBOVAC TW 70 H AS 2368 AS 2368 D

TURBOVAC 151 AS 2134 AS 2134 D

TURBOVAC TW 250 S AS 2168 AS 2168 D

TURBOVAC SL 300 LAS 2369 LAS 2369 D

TURBOVAC TW 300 AS 2369 AS 2369 D

TURBOVAC 361 AS 2135 AS 2135 D

TURBOVAC 600 / 1000 AS 2136 AS 2136 D

TURBOVAC TW 701 / 690 AS 2330 AS 2330 D

TURBOVAC 1100 AS 2137 AS 2137 D

442 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Ordering Information test includingvibrationmeasurement Complete disassembly, cleaninganddecontamination,replacement ofallwearingparts,mounting,electricalsafetytest,final Complete refurbishing withdecontaminationattheservicecentre includesthefollowing: Complete RefurbishingwithDecontaminationattheServiceCentre measurement Complete disassembly, cleaning,replacement ofall wearing parts,mounting,electricalsafetytest,finaltestincludingvibrat Complete refurbishing attheservicecentre includesthefollowing: Complete RefurbishingattheServiceCentre Turbomolecular Pumps Services forMagneticallyLevitated 1) If additionalspare partsare neededforrepairs, thentheseare invoicedseparatelyaccording toacostestimate. request. The listedservicesincludethecostsformaterialandworkinghoursstandard pumps.Servicesforpump variantsupon Notes MAG2800/3200 MAG MAG900/10001200 2200 MAG(W)830/13001500 MAG(W)1600/2000 TURBOVAC MAG400C/CT TURBOVAC 340MC/MCT TURBOVAC 340M For pump Including rotor replacement Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 S24 AS2141D AS2141 AS 2142 tteSrieCnr withDecontamination CompleteRefurbishing attheServiceCentre CompleteRefurbishing atN. PartNo. PartNo. AS AS AS AS2143 AS 2800 AS 2200 2160 2370 2164 attheServiceCentre 1) 1) 1) 1) 1) 1) 1) AS AS AS AS AS AS 2800 2200 2160 2370 2164 2142 D D D D D D AS 2143 D 1) 1) 1) 1) 1) 1) 1) ion 443

High Vacuum Pumps General

Applications and Accessories for Oil Diffusion Pumps

Pumps DIP 3000 DIP 8000 DIP 12000 DIP 20000 DIP 30000 DIP 50000 LEYBOJET OB630 6000 OB 12000 OB 18000 Application

Vacuum coating (e.g. Sputtering)

Research and development

Metallurgy/furnaces

Mechanical engineering

Sputtering process

Secondary metallurgy (e.g. VIM, VID)

High vacuum furnaces

Accessories Page

Astrotorus baffle 458

Over-temperature protection switch 460

Contact thermometer 460

Resistance thermometer Pt100 460

Monitoring instruments 461

Energieregler 434

Adsorption trap 464 For generating an oil-free vacuum with oil sealed backing pumps

444 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold for different fieldsofapplication Oil forDiffusion Pumps “Oils /Greases /LubricantsLEYBONOL For informationonoilspecificationspleaserefer toCatalogPart For furtherquestions,pleasecontactourtechnicalSalessupport. The tableonlylistsgeneralapplications.Your specificrequirements mightbesubjecttodeeperanalysis. 1) LVO 540 LVO 530 LVO 520 LVO 510 LVO 500 LEYBONOL Oils OnlyforOBpumps = Standard = = Possible =

Application 1) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 ® ”.

Vacuum coating

Research and development

Metallurgy/furnaces

Mechanical engineering Sputter processes 445

High Vacuum Pumps Oil for Diffusion Pumps for different pump types

000 0 000 Pumps DIP 3 000 DIP 8 000 DIP 12 000 DIP 2 DIP 30 000 DIP 50 LEYBOJET 630OB 6000 OB 12000 OB 18000 LEYBONOL Oils LVO 500

LVO 510

LVO 520

LVO 530

LVO 540

= Standard = Possible

Note All oils may be used. The pumps are supplied as standard without oil.

The table only lists general applications. Your specific requirements might be subject to deeper analysis. For further questions, please contact our technical Sales support.

For information on oil specifications please refer to Catalog Part “Oils / Greases / Lubricants LEYBONOL®”.

446 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold - Pump boiler Systemofnozzles - Cooledpumpbodywithintakeand - vapor-phase pumpfluidsare: pumps, theoperationofwhichrelies on The maincomponentsofdiffusion Entrainment Vacuum Pumps Operating PrincipleofFluid exhaust ports Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 the pumpbody. Thepumpbodyis by the vapor jet.Theisthendeflected nozzles), thuscreating ahighspeed ex they acceleratethevaportoaspeed e within thepump.Thenozzlesare ge vapor isthenforced through nozzles such anextentthatitisvaporized.The fluid containedinaboilerisheatedto In thecaseofdiffusion pumpsapump rally designedinsuchaway, that ceed nozzles ataspecificangleonto ing thespeedofsound(Laval n - vacuum portsothatitcanbe compressed sufficiently atthefore- The gaswhichistobepumped vapor jet. on thetransportingcapacityof en action ofdiffusion pumpsandfluid to theboilerasaliquid.Thepumping back fluid condensesandisreturned cooled,sothatthevaporizedpump out byabackingpump. trainment pumpsingeneralisbased pumped 447

High Vacuum Pumps Oil Diffusion Pumps Operating Backstreaming of the Pump Oil Diffusion Pumps Fluid Compared to other fluid entrainment pumps the density of the vapor in the Forevacuum Undesirable backstreaming of mole- boiler and in the vapor jet is fairly low cules from the pump fluid is caused by In all cases diffusion pumps require a so that the gas molecules may almost the effect that some molecules are able sufficiently sized backing pump (see completely diffuse into the vapor jet. to leave the vapor jet and thus do not Technical Data). The size and type of Thus most of the molecules which enter arrive at the cooled pump body. forevacuum pump depends on the the vapor jet are also pumped out. Because of collisions between each operating conditions and the quantities other and due to reflection at the pump For this reason, the pumping speed of of gas which are to be pumped. body, these molecules are then able to diffusion pumps is extremely high with 1. Continuous operation at operating move in the direction of the vacuum respect to the intake area and constant pressures above 10-4 mbar chamber. – starting at an inlet pressure of approx. (0.75 x 10-4 Torr) – large 10-3 mbar (0.75 x 10-3 Torr) down to For DIP pumps the backstreaming quantities of gas. very low pressures – as within the effect amounts only to a few μg pressure range the vapor jet is not 2. Continuous operation at operating per cm2 of intake area per minute. -4 influenced in any way by the pressure pressures below 10 mbar Backstreaming may be almost com- -4 within the vacuum vessel. (0.75 x 10 Torr) – smaller quantities pletely suppressed by including of gas. a cold cap baffle or an additional In applications which rely on diffusion Astrotorus baffle. HM pumps, the vacuum chamber must VM 2 be connected via a valve (3) and a BV 4 roughing line directly to the backing Backstreaming of Oil in the pump. This is done so that the vacuum Case of Diffusion Pumps 5 chamber may be pre- evacuated by the - Pump without baffle 3 6 backing pump down to a pressure approx. 1 x 10-2 mg x cm-2 x min-1 where the diffusion pump can take VM 1 over. Until the high vacuum valve (4) - Pump with cold cap baffle -3 -2 -1 2 opens, both diffusion pump and pump approx. 1 x 10 mg x cm x min fluid are preserved. Before venting the - Pump with Astrotorus baffle 7 vacuum chamber the forevacuum valve (T = 10 °C (50 °F)) (2) and the high vacuum valve (4) must approx. 1 x 10-5 mg x cm-2 x min-1 1 be closed, whereby the diffusion pump The values stated have been measured remains in the ready status. at an intake pressure of < 1 x 10-4 mbar and apply to LEYBONOL LVO 500.

1 Two-stage rotary vane vacuum pump 2 Forevacuum valve Pumping Speed 3 Rough vacuum valve The pumping speed of any pump is 4 High vacuum valve 5 Baffle equivalent to the volume throughput 6 Oil diffusion pump through the intake opening of a pump. 7 Adsorption trap In the case of diffusion pumps the HM High vacuum gauge pumping speed for lighter gases is VM1 Forevacuum gauge/diffusion pump higher compared to heavier gases. VM2 Forevacuum gauge/roughing line BV Venting valve

Diagram of a pump system with diffusion pump

448 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold and baffle. connections, between ultra sealingringsmustbeusedinthe In order toprevent pressure be used. sealing ringsmadeofaluminummust 150 °C(302°F)]sealingringsorultra tchouc), temperature resistant upto are sufficient. FPM[FKM(=Fluorcaou- temperatures ofupto150°C(302°F) leybold ihAtoou afe mbar(Torr) mbar(Torr) mbar(Torr) 1) With Astrotorus baffle With coldcapbaffle Without baffle Attainable UltimatePressure Attainable UltimatePressures withOilDiffusion Pumps 10 For ultimatepressures downto Sealing Methods tribute toan When excludingalleffects whichcon- surfaces withinthevacuumchamber. welded jointsandthe baffle, leaksatconnecting fluid, shapeandtemperature ofthe on thevaporpressure ofthepump rating ofthediffusion pump,butalso only onthetypeandpumpingspeed particular vacuumsystemdependsnot The attainableultimatepressure fora Attainable UltimatePressure Attained inconsiderationofthenotesgivenunder“SealingMethods”chapter“General”para.“OilDiffusion Pumps”and vacuum chamberforseveralhoursat200°C(392°F) -8 mbar(0.75x10 increase inpressure within -8 Torr) bakeout condition ofthe diffusion pump flanges or variations, 1) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 (0.75 x10 sealing ringsmadeofaluminium. FPM (FKM)sealingringsorultra In thisway, itisstillacceptabletouse flange ofthepump. (302 °F)isnotexceededattheintake trap sothatatemperature of150°C gradient across thebaffle orthecold (752 °F)andtomaintainatempera out thevacuumchamberto400°C However, itisonlynecessarytobake temperatures upto400°C(752°F). Ultimate pressures below10 vapors. needing alowvacuumfree ofoil has beenfoundtoworkverywellwhen In practicethefollowingcombination chapter “General”. Oil Diffusion Pumps(DIP)”givenin “Attainable UltimatePressures with ultimate pressures statedinthetable walls, itwillbepossibletoattainthe contamination ofthevacuum the vacuum chamberduetoleaksand -8 Torr) require bakeout LEYBONOL LVO 500 -8 chamber mbar 1.5 x10 5.0 x10 1.5 x10 ture -7 -7 -6 (1.1x10 (3.8x10 (1.1x10 pump fluidinthebaffle. the condensationtemperature ofthe vacuum chamberdependsstrongly on the through thediffusion pump,because flow through thebaffle firstandthen cooling watermustalwaysbemadeto the pumpandbaffle inseries,the connecting thecoolingsystemof pump fluidcannotbeensured. When otherwisesufficient and 30°C(86°F)atthedischarge, not exceed25°C(77°F)attheintake The coolingwatertemperature should Cooling Water-cooled coldcapbaffle asa - pump. high vacuumflangeofthediffusion as anadditional torus baffle whichmaybeinstalled together withawater-cooled Astro- integral partofthediffusion pump attainable ultimatepressure inthe -7 -7 -6 ) ) ) after degassingtheconnected component onthe condensation ofthe 449

High Vacuum Pumps Products

DIP Pumps Water-Cooled

The DIP range of pumps was developed for operation in industrial systems. Excellent vacuum performance data combined with the inherent ruggedness of this kind of pump, make our diffusion pumps a reliable component in high and medium vacuum applications.

DIP 12 000 DIP 30 000 with Power Controller

Advantages to the User Typical Applications - High pumping speeds in the fine - A standard built-in thermostat acts The diffusion pumps from the DIP and high vacuum ranges as an thermal overload switch and range are used in coating systems, ensures that the heating cartridges - Low attainable ultimate pressure vacuum melting and drying systems as can not overheat well as in vacuum furnaces in the area - Integrated, water-cooled cold cap - All pumps are prepared for instal- of metallurgy. baffle guarantees low oil back- lation with an over-tempe rature streaming rates into the vacuum switch (optional) for checking the chamber cooling water circuit, and a contact Supplied Equipment - Low oil losses (even at high gas thermometer (optional) to monitor The DIP pumps are supplied ready for throughputs) by integrated water- the operating temperature of the connection but without the filling of cooled forevacuum baffle diffusion pump pump fluid. - High forevacuum resistance even at - Indication of the oil level by sight- reduced heating power glass permits simple checking of the The inside of the pump is cleaned - The heating cartridges are accessi- current oil level be fore delivery to such an extent that it is free of oil. The inside is evacuated. ble from the outside via heating - All DIP pumps are delivered with High and forevacuum flanges are in serts which are built into the boiler. their inside chamber cleaned in such equipped with gaskets and centering This ensures a quick exchange of a manner that it is free of oil. The rings having shipping flanges and single heating cartridges (even when inside is evacuated. In the condition complete with clamping components. the pump is hot) as delivered, the pumps may be - A separate automatic circuit breaker also operated with silicone oil for each heating cartridge ensures a - Utilisation of the DIP power control- high level of electrical safety ler cuts power consumption by up to 30% without impairing pump performance (option)

450 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold as afunctionofintake pressure Pumping speedcharacteristicsoftheDIP 3000to12000pumps Dimensional drawingfortheDIP3000[left],8000and12000[middle], DIP20000to50[right];dimensionsinb

Pumping Speed h DN a 50(20) 8 3.1 90(7 13 4.9 15 5.9 1880(74.02) 1450(57.09) 1130(44.49) 940(37) 785(30.91) 560(22.05) h d b a a N 5 S- 40IOK 0 S- 60IOF 0 S- 1000ISO-F 800ISO-F 630ISO-F 500ISO-K 400ISO-K 250ISO-K DN 20(.5 30(37) 2 1.4 50(12) 0 2.2 800(31.5) 600(23.62) 540(21.26) 420(16.54) 350(13.78) 240(9.45) a a h 20(14) 5 1.2 50(16) 5 2.3 90(62) 1120(44.09) 920(36.22) 750(29.53) 550(21.65) 450(17.72) 290(11.42) Quantity d d d of d holes – 20 24 32 43(74) 4 2.1 75(05) 8 3.8 15 4.8 1350(53.15) 1150(45.28) 980(38.58) 775(30.51) 643(25.31) 443(17.44) b a h d I 300 0 1 0 2 0 3 0 50000 30000 20000 12000 8000 3000 DIP 10000 15000 l/s 20000 1 5000 3 2 1 5 4 3 2 1 1 5° 0° 0° 0° 0° 25° 20° 30° 30° 30° 45° 3 2 1 5. 98) 7. 1.8 42(7 46(95) 3 2.0 636(25.04) 536(21.10) 496(19.53) 432(17) 375.5(14.78) 250.5(9.86) 8(.8 8 34) 2(.2 9 38) 0 40) 102(4.02) 116(4.57) 102(4.02) 116(4.57) 1275(50.2) 110(4.33) 97(3.82) 870(34.25) 620(24.41) 106(4.17) 92(3.62) 47018.5) 102(4.02) 88(3.46) 400(15.75) 75(2.95) 68(2.68) 250(9.84) – 70(83) 9 3.4 1090(42.91) 890(35.04) 720(28.35) 916(36.06) – 1040(40.94) 716(28.19) 1000(39.37) 840(33.07) 636(25.04) 790(31.10) 800(31.5) – 760(29.92) 506(19.92) 690(27.17) 651(25.63) 14 630(24.80) 405(15.94) – 600(23.62) 50119.72) 530(20.87) – (0.55) 14 – 460(18.11) 400(15.75) – – 278(10.94) (0.55) 14 373(14.69) 261(10.28) 276(10.87) (0.55) 1 1 1 1 15° 25° 45° 15° 30° 45° 15° 30° 45° 15° 30° 45° 15° 30° 45° – – 20° 1 0 3IOK 3IOK 0 S- 10IOK 6 S- 160ISO-K 160ISO-K 100ISO-K 100ISO-K 63ISO-K 63ISO-K 10 -6 DIP 3000 DIP 8000 DIP 12000 10 -5 10 -4 Intake Pressure 10 -3 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 10 -2 10 -1 mbar 10 0 as afunctionofintake pressure Pumping speedcharacteristicsoftheDIP 20000to50000pumps

Pumping Speed 10000 15000 20000 25000 30000 35000 40000 l/s 45000 5000 0 10 -6 DIP 20000 DIP 30000 DIP 50000 10 -5 10 -4 Intake Pressure 10 -3 rackets ()are ininch 10 -2 10 -1 mbar 451 10 0

High Vacuum Pumps Technical Data DIP 3 000 DIP 8 000 DIP 12 000

High vacuum / forevacuum connection DN 250 ISO-K / 63 ISO-K 400 ISO-K / 63 ISO-K 500 ISO-K / 100 ISO-K Pumping speed for air 1) below 1 x 10-4 mbar l x s-1 3 000 8 000 12 000 Operating range mbar < 10-2 to 10-7 < 10-2 to 10-7 < 10-2 to 10-7 (Torr) (0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7) (0.75 x 10-2 to 0.75 x 10-7) Ultimate total pressure 1) mbar (Torr) < 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7) < 5.0 x 10-7 (3.75 x 10-7) Max. permissible forevacuum pressure mbar (Torr) 6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1) 6.0 x 10-1 (4.5 x 10-1) Pump fluid filling, min. / max. l (qts) 1.0 / 1.4 (1.1 / 1.5) 1.7 / 3.4 (1.8 / 3.6) 2.4 / 5.3 (2.5 / 5.6) Mains connection Standard EURO, 50/60 Hz V 230 ~ 1 Ph 400 ~ 3 Ph Y 400 ~ 3 Ph Y Standard Americas, 50/60 Hz V 230 ~ 1 Ph 460 ~ 3 Ph Y 460 ~ 3 Ph Y Special, 50/60 Hz V – 230 ~ 3 Ph ƃ 230 ~ 3 Ph ƃ Heating power kW 2.4 4.8 7.2 Number of heating cartridges 2 6 9 Heating up time min < 25 < 25 < 25 Cooling water (minimum) for pump 2) l x h-1 (gal/min) 160 (0.7) 290 (1.28) 500 (2.2) for cold cap baffle l x h-1 (gal/min) 20 (0.09) 30 (0.13) 50 (0.22) max. supply pressure bar (psig) 6 (87) 6 (87) 6 (87) Number of cooling circuits (including cold cap baffle) 2 2 2 Cooling water connection for pump G (BPS) 3/8" 1/2" 1/2" for cold cap baffle G (BPS) 1/4" 3/8" 3/8" Weight, approx. kg (lbs) 29 (64) 70 (154) 102 (225) Recommended backing pump 3) at operating pressures > 10-4 mbar (> 0.75 x 10-4 Torr) TRIVAC D 65 B + W 251 SV 300 + W 251 SV 300 + W 501 at operating pressures < 10-4 mbar (< 0.75 x 10-4 Torr) – TRIVAC D 65 B + W 251 TRIVAC D 65 B + W 251

Ordering Information DIP 3 000 DIP 8 000 DIP 12 000

Part No. Part No. Part No. Oil diffusion pump Standard EURO 222 10 222 20 222 25 Standard Americas 222 10 500 670 500 591 Special – 500 649 22225V003 Astrotorus baffle 227 50 227 60 227 65 Water flow monitor 500006623 500006623 500006623 Over-temperature protection switch 122 84 122 84 122 84 Contact thermometer 218 81 218 81 218 81 Resistance thermometer Pt100 sensor 200 02 958 200 02 958 200 02 958 Pump fluid 4) see Catalog Part “Oils / Greases / Lubricants LEYBONOL”

1) Measured to DIN 28 427 with LEYBONOL LVO 500 as the pump fluid 2) The required quantity of cooling water refers to ƃT = 10 °C (50 °F). The discharge temperature should not exceed 30 °C (86 °F) 3) Single- or two-stage rotary vane vacuum pump (TRIVAC; SOGEVAC) from our range of forevacuum pumps jointly with Roots vacuum pumps (RUVAC) in pump systems 4) Oil must be purchased separately

452 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold jointlywithRootsvacuum pumps (RUVAC) in pump systems leybold < atoperatingpressures 10 4) 3) 2) 1) Pump fluid Resistance thermometerPt100 sensor Contact thermometer Over-temperature protection switch Water flowmonitor Astrotorus baffle Retrofit kitenergycontrol unitUS Retrofit kitenergycontrol unit Special Standard Americas Standard Standard Americaswithcontrol unit EURO Standard EUROwithcontrol unit Oil diffusion pump Ordering Information (Torr) mbar Ultimate totalpressure Operating range Pumping speedforair DN High vacuum/forevacuum connection Technical Data below 1x10 egt prx kg(lbs) G(BPS) G(BPS) Recommended backingpump Weight, approx. forcoldcapbaffle forpump bar(psig) Cooling waterconnection lxh (including coldcapbaffle) Number ofcoolingcircuits max. supplypressure forcoldcapbaffle > atoperatingpressures 10 etn ptm min kW V for pump Cooling water(minimum) Heating uptime kW Number ofheatingcartridges mbar V Heating power V (Torr) power controller (savesup30%) Reduced powerconsumptionthrough Special,50/60Hz Standard Americas,50/60Hz l(qts) Standard EURO,50/60Hz Mains connection Pump fluidfilling,min./max. Max. permissibleforevacuum pressure Oilmustbepurchased separately Single-ortwo-stagerotary vanevacuumpump(TRIVAC; SOGEVAC) from ourrange offorevacuum pumps Therequired quantityofcooling water refers to Measured toDIN28427with -4 -4 mbar(<0.75x10 mbar(>0.75x10 4) -4 2) lxh ma lxs mbar 1) 1)

mbar (Torr) -4 -4 LEYBONOL LVO 500 Torr) Torr) 3)

-1 -1 (gal/min) (gal/min) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 ƃ T =10°C(50°F).Thedischargetemperature shouldnotexceed30°C(86°F) -1 <5.0x10 . . 63/95 70/1. 74/1.) 12.0/25.0(12.726.4) 7.0/15.0(7.415.9) 6.0/9.0(6.39.5) 6.0x10 (0.75 x 10 3/8 atN. atN. PartNo. 22240V001 22235V001 PartNo. 560(1235) 22230V001 PartNo. 296(653) 172(379) 000 000 50000 30000 20000 1000ISO-F/160ISO-K 800ISO-F/160ISO-K 630ISO-F/100ISO-K 6 hY 6 hY 460~3PhY 400~3PhY 460~3PhY 400~3PhY 230~3Ph 460~3PhY 400~3PhY 2 002 2 502 22240V002 22235V002 22230V002 SV630B+W2001 SV300+W501 SV300+W1001 SV300+W251 TRIVAC D65B+W251 SV200+W501 < 10 84 26 16.8 12.6 8.4 2 0 2 5 22240 22235 22230 5 0 <30 <30 24 24 <25 18 18 12 12 0 8 5065 500728 500665 500882 0 26 90(.) 1500(6.6) 900(4.0) 600(2.6) 0 4V0 536801 503 648V001 503648V001 500 654 503647V001 22235V006 22230V004 0(.6 8 03) 150(0.66) 80(0.35) 60(0.26) 0 4V0 536802 503 648V002 503648V002 503647V002 8) 8) 6(87) 6(87) 6(87) 2 0 2 5 22780 22775 22770 1/2 2 3 2 4 2 4 12284 12284 500006623 12284 500006623 500006623 1 1 1 1 21881 21881 21881 0 298 0 298 20002958 20002958 20002958 seeCatalogPart “Oils/Greases /LubricantsLEYBONOL” asthepumpfluid I 000DIP30000 DIP 20000 DIP 20000 -2 -1 -2 to0.75x10 -7 (4.5x10 to10 (3.75 x10 " " 3/8 1/2 ƃ -7 <10 230~3Ph -1 6.0x10 ) -7 -7 )

) (0.75 x 10 < 5.0x10 DIP 30000 -2 -1 -2 to0.75x10 -7 (4.5x10 to10 (3.75 x10 " " 3/8 1/2 ƃ -7 < 10 230~3Ph -1 6.0x10 ) -7 -7 <5.0x10 ) ) (0.75 x 10 DIP 50000 DIP 50000 -2 -1 -2 to0.75x10 -7 (4.5x10 to10 (3.75 x10 " "

ƃ -7

-1 ) -7 453 -7 ) )

High Vacuum Pumps LEYBOJET 630 Water-Cooled The oil diffusion pumps from Oerlikon Advantages for the User Leybold Vacuum are well proven in - High and stable pumping speed well industrial high vacuum applications. into medium vacuum range They excel through their excellent - Low ultimate pressure vacuum performance data and owing - Low oil backstreaming due to inte- to their rugged design are a reliable grated water-cooled cold cap baffle component in many medium and high vacuum systems. - High forevacuum tolerance - Each heating cartridge is protected The water-cooled LEYBOJET 630 was by a separate circuit breaker developed especially with the medium vacuum in mind. - In maintaining the well proven heating system - heating insert with

LEYBOJET 630 ther mally conducting panels and heat ing cartridges - the LEYBOJET 630 is now equipped with an addi- D Top View D1 tional ejector nozzle for the purpose D2 l2 15° of obtaining a stable pumping speed DN 630 ISO-F G3/8" well into the medium

27° vacuum range l1

30° l DN 160 ISO-K 15° D 3 G1/2" Typical Applications 30° 45° H 1 The principal areas of application of the

H LEYBOJET 630 are modern sputtering H2 processes as well as vacuum melting and drying plants.

D4 D5 Supplied Equipment LEYBOJET 630 D D1 D2 D3 D4 D5 H H1 H2 mm 750 720 651 180 585 625 1144 650 423 The LEYBOJET 630 are supplied ready in. 29.53 28.35 25.63 7.09 23.03 24.61 45.04 25.60 16.65 for connection but without the filling of l l1 l2 mm 1215 604 24 pump fluid. in. 47.83 23.78 094 The inside of the pump is cleaned Dimensional drawing for the LEYBOJET 630 be fore delivery to such an extent that it is free of oil. The inside is evacuated.

14.000 High and forevacuum flanges are l/s equipped with gaskets, centering rings, 12.000 shipping flanges, and clamping

10.000 components.

8.000

6.000 Pumping Speed 4.000

2.000

0 10 -5 10 -4 10 -3 10 -2 10 -1 mbar

Intake Pressure pHV

Pumping speed curve of the LEYBOJET 630 as a function of the intake pressure

454 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold jointlywith Rootsvacuumpumps(RUVAC) inpumpsystems leybold < atoperatingpressures 10 prtn ag mbar(Torr) Ultimate totalpressure DN Operating range DN Pumping speedforair Forevacuum connection High vacuumconnection Technical Data 4) 3) 2) 1) Pump fluid Resistance thermometerPt100sensor Contact thermometer Over-temperature protection switch Water flowmonitor Astrotorus baffle LEYBOJET 630 Oil diffusion pump Ordering Information kg(lbs) G(BPS) G(BPS) G Recommended backingpump Weight, approx. forcoldcapbaffle forpump Cooling waterconnection (including coldcapbaffle) Number ofcoolingcircuits connection <1x10 at1x10 at1x10 > atoperatingpressures 10 etn ptm min kW mbar min. (Torr) throughput Cooling water V Heating uptime Number ofheatingcartridges l(qts) Heating power Mains connection50/60Hz Pump fluidfilling,min./max. Max. permissibleforevacuum pressure Oilmustbepurchased separately Single- ortwo-stagerotary vanevacuumpump(TRIVAC; SOGEVAC) from ourrangeofforevacuum pumps The required quantityofcoolingwaterrefers to Measured toDIN28427with -4 -4 mbar(<0.75x10 mbar(>0.75x10 -4 4) -3 -2 ma lxs mbar ma lxs lxs mbar mbar 2) lxh 1) 1)

mbar (Torr) -4 -4 LEYBONOL LVO 500 Torr) Torr) 3)

-1 (gal/min) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016

·3¦"¦% 3GDCHRBG@QFDSDLODQ@STQDRGNTKCMNSDWBDDC -1 -1 -1

seeCatalogPart“Oils/Greases /LubricantsLEYBONOL” as thepumpfluid TRIVAC D65B+W251 < 5x10 LEYBOJET 630 LEYBOJET 630 < 10 5.0 /8.0(5.38.5) 6 x10 SV 200+W501 200 02958 500006623 -2 160 ISO-K 630 ISO-F 400, 3Ph 145 (320) 502 180 Part No. 500 (2.2) (<0.75x10 218 81 122 84 227 70 -7 2000 12 000 12 -1 700 1 (<3.75x10 < 30 10.8 1/2 1/2 3/8 (4.5x10 9 2

" " "

¦"¦% -1 -2 ) ) -7 ) 455

High Vacuum Pumps Oil Booster OB 6000 to OB 18000

The design of the oil booster pumps from Oerlikon Leybold Vacuum is well proven in industrial high vacuum applications. They excel above all through excellent vacuum performance data and are, owing to their rugged design a reliable component in many medium and high vacuum units.

The water cooled oil booster pump was developed in particular for applications in the rough and medium vacuum range. The pumps from the OB line from Oerlikon Leybold Vacuum deliver when properly deployed, a maximum pumping speed at high gas through- Oil Booster OB 6000 (left), OB 12000 (middle) and OB 18000 (right) puts.

Advantages for the User Typical Applications Supplied Equipment - Very high pumping speed from a - Vacuum Induction Melting (VIM) or The OB pumps are plug-and-play but small sized pump Vacuum Induction Degassing (VID) are delivered without pump fluid. - Pump sizes 6000, 12,000 and of special alloys are utmost impor- The pump chamber is free of oil and 18,000 m3 per hour tant process steps in the metallurgy. has been cleaned. The inside volume is evacuated. The - Simple to operate - Depending on the required steel- quality, the required process pres- high vacuum and forevacuum flanges - Rugged and long life sure in such applications is particu- are equipped with sealing and center- - Selectable flange connections larly low. ing rings as well as shipping flanges. (OB 12,000 and 18,000 only) Moreover, the electric circuit breaker - Secondary metallurgy processes are box and the cooling water manifold - Small manageable amount of spare becoming more popular thanks to have been installed for immediate con- parts the greater demand for better steels nection. - Pump components (e.g. heating ele- e.g. in the automotive, construction The included Pt100 temperature sen- ments, diffusion corpus, jet corpus) and rail markets. sor ensures safe oil temperature moni- are similar for all OB sizes and can toring. be exchanged easily The installed overtemperature protec- - Modern electronic pump monitoring tion switch monitors and ensures safe (PLC controlled) operation of the pump. - High efficiency due to direct heating - Optimized heating design for long oil change intervals

456 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Pumping speedcurvesoftheOilBooster OB6000to18000asafunctionoftheintakepressure Ordering Information Technical Data Pump fluid USversion(460V) EUROversion(380V) -temperature withcontrol unitandwaterflow/ monitoring US withcontrol unit version EURO version Standard G US Standard EURO Oil diffusion pump V (Torr) connection V V l(qts) Cooling water Weight kg Special,50/60Hz mbar Standard Americas,50/60Hz Standard EURO,50/60Hz DN mbar(Torr) Mains connection DN Pump fluidfilling Ultimate totalpressure DN Operating range (lbs) Fore vacuumconnection(standard) optional standard High vacuumconnection below 1.0x10 Pumping speedforair mbarxls consumption l x h

Pumping Speed 10.000 12.000 14.000 16.000 18.000 20.000 22.000 -3 2.000 4.000 6.000 8.000 l/s mbar(7.5x10 0 10 -4 -3 Torr) 10 -3 OB 12 -1 (gal/min) OB 6 000 OB 18 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 000 Intake Pressurep 000 -1

B60 O 20 OB18000 OB12000 OB6000 B60 O 20 OB18000 OB12000 OB6000 6 S- 10IOK 160ISO-K 160ISO-K ASA32/35 1to10 ASA16/20 160ISO-K 18.000 ASA16/18 12.000 6.000 5(76 6 6.) 90(95.1) 460~3PhY 400~3PhY 460~3PhY 400~3PhY 60(63.4) 230~3Ph 460~3PhY 400~3PhY 45(47.6) 5x10 atN. atN. PartNo. 503508V004 503508V003 503654V004 503654V003 503508V006 503508V002 503750V004 PartNo. 503750V003 503654V006 503508V005 503654V002 503508V001 503750V006 503654V005 503750V002 503654V001 503750V005 PartNo. 503750V001 (0.75to10 0 S- 60IOF 630ISO-F 630ISO-F 800ISO-F/1000 500ISO-K/800ISO-F 400ISO-K/ 400ISO-K 0 31 80(.) 1360(6.0) 1400(3086) 800(3.5) 850(1874) 700(3.1) 450(992) 1" 1" 10 -2 HV 6 (<3.75x10 seeCatalogPart“Oils/Greases /LubricantsLEYBONOL” 10 -1 -6 1to10 -6 ƃ ) (0.75 to 10 230~3Ph mbar -6 5x10 ) 10 -0 Oil Booster Oil Booster 6 (<3.75x10 -6 1to10 -6 ƃ ) (0.75 to 10 230~3Ph -6 5x10 ) 6 (<3.75x10 -6 -6 ƃ ) -6 ) 457

High Vacuum Pumps Accessories for Oil Diffusion Pumps

Astrotorus Baffles

The cooling inserts of the astrotorus baffles are made of copper, whereas the housing and the connection flange are made of standard steel.

Section through an astrotorus baffle

[ [ [ DN a b d d1 d2 250 ISO-K mm 265 30 416 290 – d in. 10.4 0.18 16.4 11.4 – d 400 ISO-K mm 362 120 512 450 – d d 2 1 in. 14.25 4.72 20.2 17.7 – d2 d1 DN 500 ISO-K mm 412 120 612 550 – 24 DN 24 in. 16.22 4.72 24.1 21.7 – 140 630 ISO-F mm 440 – 750 720 14 57 140 57 in. 17.32 – 29.53 28.35 0.55 d2 a 800 ISO-F mm 546 – 920 890 14 24 d2 a 24 in. 21.5 – 36.22 35.04 0.55 Hose nozzle, 14 mm ( 0.55 in.) dia. Hose nozzle, 14 mm ( 0.55 in.) dia. 1000 ISO-F mm 599 – 1120 1090 14 in. 23.58 – 44.09 42.91 0.55

DN Quantity h h1 a a1 250 ISO-K mm – 195 97 – – in. 7.68 3.82 – – 400 ISO-K mm – 193 96 – – in. 7.6 3.78 – – 30° 1 30° 500 ISO-K mm – 193 96 – – 1 in. 7.6 3.78 – – 630 ISO-F mm 20 140 – 18 ° 9 ° in. 20 5.5 – 18 ° 9 ° 800 ISO-F mm 24 140 – 15 ° 7,5 ° in. 24 5.5 – 15 ° 7,5 ° 1000 ISO-F mm 32 140 – 11.25 ° 5.625 ° in. 32 5.5 – 11.25 ° 5.625 °

Dimensional drawing for the astrotorus baffle ISO-K (left) and ISO-F (right)

458 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold % lxs Astrotorus baffle Ordering Information DN Weight kg DIP Conductance Throttling ofthepumpingspeed,approx. HV connectionflanges Connection topump (lbs) Technical Data 500 ISO-K 400 ISO-K 250 ISO-K Astrotorus lxs baffle Ordering Information DN Weight kg DIP Conductance approx. % Throttling ofthepumpingspeed, HV connectionflanges Connection topump (lbs) Technical Data 1000 ISO-F For matchingvalves,pleaseaskusforaquotation. 0 0 800 ISO-F 630 ISO-F Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 000 000 50000 30000 20000 12000 8000 3000 800 800 50000 28000 18000 12000 30 30 9000 3000 30 3 S- 0 S- 1000ISO-F 800ISO-F 630ISO-F 250 ISO-K 400 ISO-K 500 ISO-K 2. 249 100(7.) 190.0(419.4) 170.0(375.3) 120.0(264.9) 65.0(143.5) 30.0(66.2) 25.0(55.2) atN. atN. PartNo. PartNo. – – PartNo. 227 70 PartNo. PartNo. – – PartNo. 227 50 – 227 – 80 227 – – – 75 227 – 65 227 – – – 60 Astrotorus Baffles Astrotorus Baffles Astrotorus Baffles Astrotorus Baffles 459

High Vacuum Pumps Temperature dependant Switching Components for Automatic Pump System Control

The operational status of the diffusion pump’s body. location of the diffusion pump. The pump depends on the temperature of contacting thermometer is not suited Max. switching current: 5 A (230 V, the pump fluid in the pump boiler. for remote signaling of temperatures. 50/60 Hz). Through temperature dependent Resistance thermometer Pt100 sen- switching components which are Contact thermometer with a range sor. The measurement range of this inserted into the pump boiler it is pos- from 0 to 400 °C (32 to 752 °F). sensor depends on the temperature sible to monitor the operational status Through a trailing pointer two display unit used by the customer of the diffusion pump and signal its switching thresholds may be set up where also the required thresholds are status to a process controller. independently. The current oil tempe - set up. The Pt100 sensor is ideal for rature and the thresholds which have For this, the diffusion pump requires remote signaling of temperatures. been set up can be read off at the two thresholds. Depending on the type of pump, the upper threshold should a1 be between 180 and 200 °C (356 b a and 392 °F) and the lower threshold 200 150 250 be tween 90 and 100 °C (194 and 100 300 212 °F). 50 350 0 400

The upper threshold indicates that the a2 c diffusion pump is ready for operation a3 30∞ d2 d3 and thus actuates certain devices, for d1 example opening of the high vacuum d valve ahead of the diffusion pump. l l1 a a a a b c [ d [ d [ d [ d l l The lower threshold indicates that the 1 2 3 1 2 3 1 mm 95.0 119.5 17.5 62.0 101.5 92.0 14.0 12.0 9.0 G 1/2 170.0 33.0 diffusion pump has cooled down to in. 3.74 4.70 0.69 2.44 4.00 3.62 0.55 0.47 0.35 G 1/2 6.70 1.30 such an extent that the backing pump and the cooling water supply may be Dimensional drawing for the contact thermometer switched off.

Over-temperature protection l3

switches are used to monitor the d2 temperature of the cooling water in the cooling water circuit of the diffusion d d3 pumps. When the temperature rises to d1 l1 unacceptably high levels (for example l4 l2 when the cooling water supply fails) the l heater in the diffusion pump is switched [ d [ d [ d [ d l l l l l off (correct electrical connection to the 1 2 3 1 2 3 4 main supply is required). The use of mm 12 6 G 1/2 22 230 115 170 25 30 in. 0.47 0.24 G 1/2 0.87 9.06 4.53 6.69 0.98 1.18 over-tempe rature protection switches avoids unnecessary alarms that may be Dimensional drawing for the resistance thermometer Pt100 sensor triggered by contaminated water when only a water flow monitor is used. The Ordering Information Monitoring Instruments over-temperature protection switch is screwed on to a contact plate which is soldered to the cooling pipe on the Part No. Over-temperature protection switch 122 84 Contact thermometer 218 81 (Measurement range 0 to +400 °C (+32 to +752 °F), Rating at 220 V AC: 250 mA [resistive load], Over-temperature protection switch Weight: 1.7 kg (3.7 lbs)) Resistance thermometer Pt100 sensor 200 02 958

460 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold 100 VA (230V, 50/60 Hz). Max. switchingcapacity: any orientation. Water flowmonitorsmaybeinstalledin degree ofreproducibility. within thelimitsstatedwithahigh The waterthroughput maybeset (0.06 to2.52gal/min) Measurement range:1to40l·h type ofcircuit. or signalistriggered, dependingofthe pump isswitchedofflight orawarning level, eithertheheaterindiffusion water throughput drops belowacertain diffusion pump.Whenthecooling the coolingwaterreturn sectionofthe Water flowmonitors Overheating Protection against Monitoring Instruments controlling”). Product Section “Vacuum measuring- adjustable switchingthreshold (see our vacuumgaugeswhichoffer an caused byapowerfailure youmayuse ase intheforevacuum linewhichisnot For protection againstapressure incre- Line Increases intheForevacuum Protection againstPressure standard. safety valve(intakeisolationvalve)as series are equippedwithanautomatic vacuum pumpsfrom theTRIVAC B automatic isolationvalve.Rotaryvane pumps whichare notequippedwithan a powerfailure affecting backing pump orthefluidineventof to prevent damagetothediffusion installed intheforevacuum lineinorder Section “Vacuum Valves”) mustbe A SECUVAC valve(seeProduct Power Failure Protection against are installedin -1 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Water flowmonitor Ordering Information Water FlowMonitor 500006623 Part No. 461

High Vacuum Pumps Power Controller

When it comes to the aspect of economic and efficient operation of diffusion pumps, power consumption plays an important role. Through our DIP power controller, you may now drastically cut your power consumption - and this without impairing pump performance in any way!

Oerlikon Leybold Vacuum Solutions provides an unique energy control unit Power controller with integrated USB interface Ethernet interface for PLC data integration with less thermal loss to control the heating power to save energy signifi- Advantages to the User cantly! - Energy saving up to 30% (low costs - Improved service life for oil and and ROI in less than three years) heating cartridges - Further potential savings through - Easy and exact to operate via PLC temperature decrease in standby- or manual directly at the pump mode - Uncomplicated integration of gener- - High quality regulation with custom- ated data into your own process ized software control or export data via USB port - Increased operation safety and - Strategically process analysis and comfort optimization by interpretation of energy control unit data

462 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold ehia aa PowerController for Technical Data 1) PowerController for Full-service retrofit kit DIP50000 DIP30000 DIP20000 Retrofit kit(DIPpowercontroller) DIP50000 DIP30000 DIP20000 lxh Oil diffusion pumpwithpowercontroller min Ordering Information forthepump kW Cooling water(minimum) Heating uptime Number ofheatingcartridges Installed heatingpower below 1x10 Pumping speedforair

Mineral oilLVO 500 DIP50000 DIP30000 DIP20000 Silicone oilLVO 530 Silicone oilLVO 520 Mineral oilLVO 510 Delivery, installation,commissioning andinstructionofthestaff isincluded IRUWKHFROGFDSEDIñH 00 00 00 00 00 0 00 00 20 l 1 l 5 l 1 l 5 l 1 l 5 l 1 l -4 ma lxs mbar 1)

lxh Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1

8 8 150 1500 80 900 80 600 5 0 <30 <30 9 24 <25 6 18 2 12 I 000 I 000 I 0000 DIP50 000 DIP30 000 DIP20 I 000 I 000 I 0000 DIP50 000 DIP30 000 DIP20 atN. atN. PartNo. – PartNo. – 50000 PartNo. 22230V001 30000 20000 – 22240V001 – – – 22235V001 534V0 – – – 503647V001 – 503649V001 – – – 503648V001 A80F – – AS8100F – AS8102F – – – AS8101F L53001 L52005 L52005 L52001 L51005 L51001 L50020 L50020 L50005 L50005 L50001 463

High Vacuum Pumps Adsorption Traps with Aluminium Oxide Insert

Adsorption traps are installed in all those cases where an oil-free vacuum is to be produced with oil-sealed vacuum pumps.

Adsorption trap (left) and insert (right)

Advantages to the User d - Backstreaming of oil is reduced by 99% DN - Long service life - High conductance h - Filling can be easily exchanged a1 - Improvement in the ultimate pressure attained by backing pumps by h1 one order of magnitude a DN - Stainless steel housing and insert

DN a a1 [ d h h1 - NBR gasket 16 ISO-KF mm 82 82 135 147 32 in. 3.23 3.23 5.31 5.79 1.25 25 ISO-KF mm 102 102 175 155 33 Typical Applications in. 4.02 4.02 6.89 6.10 1.26 40 ISO-KF mm 132 65 235 160 20 - Product of an oil-free vacuum in. 5.19 2.56 9.25 6.3 0.79

Residual gas spectrum; top ahead of a rotary Dimensional drawing for the adsorption traps Supplied Equipment vacuum pump, bottom ahead of a rotary vacuum pump with adsorption trap - Complete with insert - Without adsorbent Technical Data Adsorption Traps 16 ISO-KF 25 ISO-KF 40 ISO-KF

Conductance at 10-2 mbar (Torr) l x s-1 4.0 6.0 12.0 Service live with Al oxide Months 3 3 3 Al oxide filling l (qts) 0.5 (0.53) 1.0 (1.06) 2.0 (2.1) Weight, approx. kg (lbs) 1.3 (2.9) 1.3 (2.9) 4.0 (8.8)

Ordering Information Adsorption Traps 16 ISO-KF 25 ISO-KF 40 ISO-KF

Part No. Part No. Part No. Adsorption trap 854 14 854 15 854 16 Activated aluminum oxide in tin 1.6 l (approx. 1.2 kg (2.65 lbs)) 854 10 854 10 854 10

464 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold eprtr esr 516 504 504 Temperature 514 sensor Low temperature controller MODEL9700 500 Gas manifoldGD4 496/499 Gas manifoldGD2 COOLPAK 6000H/6200H/6000HD Compressor unit COOLPAK 2000(A)/2200(A) Compressor unit Electron beamweldingsystems Space simulationchambers Metallization systems Ion implanters Sputtering systems Evaporation coatingsystems General research Transfer chambers/ Loadlock Beam tubesinparticleaccelerators UHV systems Application General [ Accessories leybold Applications andAccessories,CryoPumps ] =Fordualandmultipleoperationonly

Cryo pumps Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Page

[

] COOLVAC 800 BL

[

] COOLVAC 800 CL

[

]

COOLVAC 1.500 CL [

COOLVAC 2.000 CL ]

[

] COOLVAC 3.000 CL

COOLVAC 5.000 CL

COOLVAC 10.000 CL

COOLVAC 18.000 CL

COOLVAC 30.000 COOLVAC 60.000 465

High Vacuum Pumps Applications and Accessories, Cryogenics

Cold heads COOLPOWERCOOLPOWER 50 COOLPOWER 140COOLPOWER T 7/25COOLPOWER 5/100COOLPOWER 5/100 T 10 MD Application

Cooling of samples and detectors

Cooling of superconductors ( ) ( ) Cooling of cryopanels

Cleaning of gases

Calibration of sensors

Optical spectroscopy

Infrared spectroscopy

Matrix spectroscopy

Testing of superconductors

Cooling of superconducting magnets, coils and components HTC + LTC ( ) ( )

Accessories Page Compressor unit COOLPAK 2000 (A)/2200 (A) 496/498

Compressor unit COOLPAK 6000 H/6200 H 500

Compressor unit COOLPAK 6000 HMD/6200 HMD 502

Low temperature controller MODEL 9700 514

Low temperature measurement instrument MODEL 211S 515

Temperature sensor 516

( ) = Only high Tc superconductors

Conversion of Units Celsius, Fahrenheit, Kelvin The inverse equations are as follows: Kelvin (abbreviated as K) is the unit of m K = (m – 273.15) °C temperature. m °C = (1.8 m + 32) °F Temperatures on the Kelvin scale are converted into temperatures on the m K = (1.8 m – 459.67) °F. Celsius scale as follows: The following applies in particular to n °C = (n + 273.15) K. absolute zero:

Since the following equation applies 0 K = -273.15 °C ; -459.67 °F. between Celsius scale and Fahrenheit scale bar, psi n °F = 5/9 (n – 32) °C 1 bar = 14.5 psi it follows that 1 MPa = 10 bar n °F = 5/9 (n + 459.67) K.

466 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Cryo Pumps

Cryo pumps are gas entrapment Further Advantages Depending on the type of pump and vacuum pumps for the pressure range the operating conditions operating tem- - Much more compact than com- from 10-3 to # 10-11 mbar (0.75 x 10-3 peratures of 45 to 80 K are attained. parable pump systems offering a to # 0.75 x 10-11 Torr). The principle of Correspondingly water vapor condens- pumping speed of over 1500 l x s-1 operation is that gaseous substances es at this temperature. are bound to the cold surfaces within - Backing pump is only required The thermal shield and baffle are made the pump by means of cryoconden- during start-up and during of copper which conducts heat very sation, cryo sorption or cryotrapping. regen e r ation well so as to optimally utilize the refrig- - Easy process control and pump In order to be able to produce a high or erating capacity which is available. control via computer ultra-high vacuum the cold surfaces Moreover, the thermal shield is (cryopanels) must be cooled to a suffi- - Favorable price-to-performance metal lized so that reflective losses will ciently low tempe rature. Depending on ratio and low running costs espe- be minimal. the type of cooling system used a dif- cially at higher pumping speeds ference is made between refrigerator The cryo pumps are cooled by the The second stage of the cold head (7) cryo pumps, bath cryo pumps and well-proven two-stage cold heads from is used to cool the cryopanels (8).

eva porator cryo pumps. Oerlikon Leybold Vacuum’s Depending on the operating conditions, High

COOLPOWER line (Gifford/McMahon operating temperatures of 10 to 20 K Pumps Vacuum Oerlikon Leybold Vacuum manufac- principle). are attained. tures only cryo pumps which are cooled by means of a refrigerator. The design of a refrigerator cryopump Here the process of cryocondensation from the COOLVAC range is shown of N , O and argon will take place. Advantages to the User 2 2 schematically in the figure below. The active pumping surfaces are made Advantages offered by the Pumping The first stage of the cold head (9) of copper of high thermal conductivity Principle cools the thermal radiation shield (5) and they are tightly linked thermally to - High effective pumping speed for all and the baffle (6) of the pump. the second stage of the cold head.

gases H2, Ne and He are also adsorbed on to - Extremely high pumping speed for these surfaces which are partly covered water vapor with activated charcoal. For a given diameter of the high vacuum flange, the cryopump offers 6 the highest pumping speed of all high vacuum pumps. 1 7 Advantages offered by Design

In contrast to gas transfer high vacuum 2 1 High vacuum flange 5 pumps (mechanically suspended tur bo- 2 Pump body molecular pumps, for example), cryo 3 Foreline flange 4 Safety valve with flange 3 pumps do not have any mechanically 4 connection for connection moving, oil, or grease lubricated parts of an exhaust line on the vacuum side. 5 Thermal radiation shield 10 6 Baffle 8 The following advantages are a direct 7 Second stage of the cold head result of this design characteristic: 8 Cryopanels 11 9 First stage of the cold head 9 - Hydrocarbon-free vacuum in the 10 Helium gas connections pressure range from 10-3 to 11 Cold head motor with housing # 10-11 mbar (0.75 x 10-3 to and electrical connections # 0.75 x 10-11 Torr). - Insensitivity to mechanical distur- bances from particles coming from COOLVAC refrigerator cryopump the process or external vibrations.

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 467 All cryo pumps from the COOLVAC In order to be able to safely remove any The pump’s body, all flanges and the range are equipped with a safety valve gases which may present a health safety valve are made of high-quality (respectively with a bursting disk in the hazard when the safety valve re sponds, stainless steel. case of the UHV variants) which is set the valve is equipped with an additional in the factory so that it will open at an DN 40 KF flange where an exhaust line overpressure of 150 mbar (113 Torr). is connected.

Multiple Operation of Advantages to the User Refrigerator Cryo Pumps - Significantly reduced investment and The powerful Oerlikon Leybold Vacuum operating costs compressor units COOLPAK 6000 HD - Small footprint open up the possibility of operating two cold heads or refrigerator cryo pumps simultaneously.

Regenerating Cryo Pumps tric heaters. In this case, a defined and of ignitable gases right from the start. controlled temperature distribution This ensures the utmost safety during An important aspect in the operation of within the cryopump can be set up. the regeneration of cryo pumps from cryo pumps is that of regeneration. This controlled warming process Oerlikon Leybold Vacuum. Since a cryopump is a gas entrapment ensures that the pumped gases are pump, the gasses which have accu- In the case of cryogenic pumps with removed sequentially, i.e. the pumped mulated in the pump during the fully automatic control there exist two gases are released one after the other “pumping” mode must from time to cryopump lines. in the following sequence: time be removed from the pump. This 1. The COOLVAC BasicLine is done by switching the compressor - Gases adsorbed at the cryopanels (COOLVAC BL) offering the following unit off and by warming up the cryo- (e.g. hydrogen, helium, neon), pumping speed class for Nitrogen in panels to room temperature or sightly - Gases condensed at the cryopanels l/s: 800; COOLVAC 800 BL, for higher so that the released substances (e.g. nitrogen, oxygen, argon), example. can be pumped out by a forevacuum - Gases and vapors which have con- Other pumping speed classes from pump. densed on to the baffle and thermal 1 500 to 18 000 l/s are available on Cryo Pumps without Electric radiation shield (e.g. water vapor). request. Regeneration System The electric method of regeneration For more information please contact The cryopump is warmed up to room from Oerlikon Leybold Vacuum prevents your local Oerlikon Leybold Vacuum temperature by purging the inside of gases such as hydrogen and oxygen representative. the pump with a dry, pre-warmed inert from being present in the pump at the 2. The COOLVAC ClassicLine gas (such as nitrogen). In this case it is same time. This excludes the formation (COOLVAC CL) offering the following not possible to set up defined and of ignitable gas mixtures right from the pumping speed classes for nitrogen controlled temperatures within the start. in l/s: 800, 1 500, 2 000, 3 000, cryo pump. Thus the simultaneous 5 000, 10 000 and 18 000; Cryo pumps without fully automatic presence of gases such as hydrogen COOLVAC 1500 CL, for example. control and without electric regen e ra- and oxygen in the pump can not be tion system belong to the BasicLine In the price list the designators “V” entirely excluded. The formation of (BL), like the COOLVAC 800 BL, for appears in connection with the pump ignitable gas mixtures is only prevented example. designations. by the diluting effect of the dry inert gas. “V”: The warming up process is fully Cryo Pumps with Fully Automatic The high vacuum flange is located auto matic. Pressure and temperature Electric Regeneration System from at the top and the cold head below, as distribution within the pump are set up Oerlikon Leybold Vacuum is the case for the and controlled by the control system at The cryopump is warmed up to room COOLVAC 1500 CL-V, DN 200 CF. all times. The sequential regeneration of temperature by heating the 1st and pumped gases prevents the formation 2nd stages of the cold head with elec-

468 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold The refrigerating capacitiesstatedapplytoverticaloperationwiththecold endatthebottom. Typical refrigerating capacityofthecoldheadCOOLPOWER5/100T Typical refrigerating capacityofthecoldheadCOOLPOWER5/100 Typical refrigerating capacityofthecoldheadCOOLPOWER7/25 Typical refrigerating capacityofthecoldheadCOOLPOWER50 Cryogenic ColdHeads Refrigerating Capacityof

2 nd Stage Temperature 2nd Stage Temperature K

K Cooling Capacity (W) 25 10 15 20 35 30 15 10 20 25 30 0 5 5 0 100 120 0 20 40 60 80 0 0 Capacity ration Refrige- Stage 2nd Capacity Refrigeration 2nd Stage 55 51015101520252025300 275 250 225 200 175 150 125 100 75 50 25 0 20 20 0W 2W 10W 4W 8W 6W 0W 20W 0W 9W 1W 10W 2W 10W 8W 3W 4W 5W 6W 7W 40 40 40W 1stStageTemperature Refrigeration Capacity 1st Stage 60W 1st StageRefrigerationCapacity 1st Stage Temperature Temperature (K) 60 60 80W 25W 100W 80 80 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 120W 100 100 140W 35W 120 120 K K 140 140 Typical refrigerating capacityofthecoldheadCOOLPOWER10MD Typical refrigerating capacityofthecoldheadCOOLPOWER140T 2 st Stage Temperature

K 2 nd Stage Temperature 20 15 10 25 K 5 15 10 20 25 30 35 40 0 0 5 Cooling Capacity Capacity Refrigeration 2st Stage W 0 200 175 100 125 150 25 50 75 Capacity ration Refriga- Stage 2nd 0 100 0 20 02 04 06 08 90 80 70 60 50 40 30 20 10 20 17.5 W 12.5 W 2.5 W 7.5 W 0 W 20 W 15 W 10 W 5 W 0W 2W 4W 6W 8W 10W 12W 0 W 25 W 40 40 40W 1st StageRefrigarationCapacity 50 W 1st Stage Temperature 1st Stage Temperature 1st Stage 60 Temperature 80W 75 W 60 100W 100 W 80 80 Refrigeration Capacity 1st Stage 120W 100 125 W 100 140W 120 K K 150 W K 120 120 140 469

High Vacuum Pumps Cold Heads

A refrigerator (cold head) is a gas Advantages by Design cooling machine which operates on the - No space problems since cold - Cooling of superconducting basis of a thermodynamic cycle to pro- head and compressor unit can be mag nets; in magnetic resonance duce cryogenic temperatures in stalled and operated apart tomographs, for example (T # 120 K). - Installation of the cold head basi cally - Cooling of samples and detectors; Refrigerators operating according to in any orientation especially for cooling of the Gifford/McMahon principle have - High reliability - samples for spectroscopic ana lysis succeeded over other methods of in the areas of solid state and cooling cryo pumps and cryostats. It is - Long periods of operation without surface physics thus employed exclusively by Oerlikon maintenance Leybold Vacuum. - high temperature superconductors - superconductors and semicon- In order to account for individual Typical Applications ductors requirements from customers, Oerlikon - Cooling of cryopanels in cryo pumps Leybold Vacuum offers customized - infrared and gamma detectors thereby producing high or ultra-high cryostats as well. - Calibration of sensors vacuum

13 Gifford/McMahon- 1 Electrical connection and current lead-through for cold head motor 12 Refrigerators 2 Helium high pressure connection 11 3 Helium low pressure connection Advantages to the User 10 4 Cylinder, 1st stage 9 - Low temperatures on a single key 5 Displacement piston, 1st stage 6 Regenerator, 1st stage 8 press 14 7 Expansion volume, 1st stage 7 8 1st (refrigerator) stage (copper flange) 15 - No liquid helium and no liquid 6 9 Cylinder, 2nd stage 16 nitrogen are required 5 10 Displacement piston, 2nd stage 17 - Very simple to operate 11 Refrigerator, 2nd stage 4 18 - High refrigerating capacity from a 12 Expansion volume, 2nd stage 3 13 2nd (refrigerator) stage (copper flange) 2 small volume 14 Vapor pressure measurement chamber 19 1 - Easy process control and 15 Control piston tem pe ra ture control via a computer 16 Control volume 17 Control disc 18 Control valve 19 Cold head motor

Dual-stage Gifford/McMahon cold head (schematic diagram)

470 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Cold Heads from the Pneumatically driven Advantages Through High COOLPOWER Range Cold Heads Reliability The standard range of single-stage and Advantages As to reliability, Oerlikon Leybold two-stage cold heads matches a wide Vacuum cold heads are top per- - Simple Design range of applications. formers. The pneumatic drive system for the Oerlikon Leybold Vacuum is offering displacer of these cold heads from Especially high reliability is required for refrigerators with usable refrigerating Oerlikon Leybold Vacuum consists medical instrumentation, specifically in powers of 140 W at 80 K of only two mechanically moving connection with nuclear spin tomo- (COOLPOWER 140 T, single-stage) components: the rotating control graphs. In this application cold heads and down to 3.5 W at 10 K valve and the synchronous motor are used to cool superconducting (COOLPOWER 5/100 T; dual-stage). driving the control valve. magnets and they are thus exposed to strong magnetic fields. The cold heads basically consist of - Easy and quick maintenance three subassemblies: All Oerlikon Leybold Vacuum cryo The leading manufacturers of nuclear pumps from the COOLVAC range spin tomographs have therefore - Drive and control unit for the are equipped with pneumatically decided to use Oerlikon Leybold dis placer driven Oerlikon Leybold Vacuum Vacuum cold heads to cool the super- - Displacer cold heads. conducting magnets.

- First stage of the cold head (and Owing to the simple design of the High

second stage in the case of two- built-in cold heads, maintenance is Pumps Vacuum stage cold heads). easy. Maintenance can be per- formed in place without detaching

W the cryopump from the vacuum 200 5/100 chamber.

. 150 Q 1 Mechanically driven Cold 100 7/25 Heads 50 Advantages

0 In the case of the mechanically driven 0 50 100 150 200 250 300 K Oerlikon Leybold Vacuum cold heads, T 1 the displacer is moved through the Refrigerating capacity as a function of temperature; operation in connection with the recom- so-called “Scotch yoke” directly by the mended compressor unit at 50 Hz; measured drive motor. This elaborate mechanism under standard acceptance. conditions: allows the gas flow and the movement Refrigerating capacity Q of the first stage as 1 of the displacer to be precisely con- a function of temperature T1 of the first stage . trolled through which it is possible to (2nd stage: Q2 = 0). attain with two-stage cold heads especially high refrigerating capacities in the W range of lowest temperatures (refrigera- 30 7/25 tors of the COOLPOWER 10 MD line). . 25 Q 2 20 5/100 15

0 0 50 100 150 200 250 300 K T2 . Refrigerating capacity Q2 of the second stage as

a function of temperature T2, of the second

stage (1st stage: T1 = 80 K = constant). Standard acceptance conditions: Cold head in a vacuum, 2nd cold stage thermally shielded by a radiation shield (high-gloss nickel-plated). attached to the 1st stage, thermal loading Q simulated by electrical heating.

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 471 Refrigerator Cryostats Typical Applications Especially in connection with: (Basic Units) - Cooling of - Spectroscopic investigations in the infrared, visible and ultraviolet Advantages to the User - high temperature super conductors spectral ranges - Can be installed basically in any - superconductors and semi - - Matrix spectroscopy orientation thereby offering a high conductors - Moessbauer spectroscopy degree of flexibility in experimental - infrared and gamma detectors arrangements - Magneto-optic experiments - Measurement of electric and thermal - Can be set to any temperature transport quantities, as a function of within 6.5 and 320 K the temperature, such as - High refrigerating capacity, constant - electric and thermal conductance temperatures - electromotive force - No liquid refrigerants are required - Very simple to operate - Temperature control without pro blems through standardized control and connecting components - Possible high throughput of samples due to short cooldown and warming-up periods

472 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold

OLA 60 M/20HD COOLPAK 6000HMD/6200HMD OLA 60 D COOLPAK 6000HD COOLPAK 2000(A)/2200(A)

COOLPOWER flexlines FLandthecoldhead leybold

opesrUi Cl ed CryoPumps Fortheoperationof ColdHeads COOLPAK 2000/2200 Compressor Unit The possibilitiesforsingleandmultipleoperationofrefrigerator cryopumpsare giveninthefollowingtable: cryostats. multipleoperationofcryopumpsand COOLPOWER lineaswellfor of theremaining coldheadsfrom the are availableforsingleoperation COOLPAK 2000to6000 compressor unitCOOLPAK 6000/6200, rators inthiscatalogpart(consistingof The OerlikonLeyboldVacuum refrige- Approval 1) COOLPAK 6000H/6200H Compressor Units NRTL (NationallyRecognizedTestingNRTL systems –therequirements ofthe Atreduced power 2) ) meet–ascomplete compressors pt 2xCOOLPOWER5/100 up to Oerlikon Leybold Vacuum FullLine Catalog 2015/2016

2) UL 471: 2006 R3.06. are listedunderthereference number Oerlikon LeyboldVacuum refrigerators Ameri Labora temperature andthecoolingwater adsorber. Ifthevaluesforambient depends ontheservicelifeof Leybold Vacuum compressor units nance willberequired ontheOerlikon The periodduringwhichnomainte- 2 xCOOLPOWER50and7/25 1 xCOOLPOWER10MD 1 xCOOLPOWER50and7/25 COPWR 0ad72 1xCOOLVAC 800/1500/2000/3000 1 xCOOLPOWER50and7/25 COPWR 4 3xCOOLVAC 800/1500/2000 1 xCOOLPOWER140T 1 xCOOLPOWER5/100 Resp. formerly RGD can continent. tory) approval fortheNorth

1) 2xCOOLVAC 5000

required -of18000operatinghours. during whichno for theadsorber-andthusaperiod Vacuum guaranteesaservicelife specified range,OerlikonLeybold entry temperature remain withinthe directives. safety andhealthoftherelevant EC the basic pressor units The OerlikonLeyboldVacuum com- CE Approval 2 xCOOLVAC 800/1500/2000/3000 1 xCOOLVAC 5000/10000 1 xCOOLVAC 800/1500/2000/3000 2 xCOOLVAC 3000(5000 requirements regarding RW andCOOLPAKRW meet maintenance willbe 1) 1) )

473

High Vacuum Pumps Products Cryo Pumps

Standard Cryo Pumps, BasicLine COOLVAC 800 BL

Advantages to the User Advantages to the User Advantages to the User - Hydrocarbon-free high vacuum - Hydrocarbon-free ultra-high vacuum - Hydrocarbon-free ultra-high vacuum - High capacity for argon and hydrogen - High pumping speed for water - High pumping speed for water - High pumping speed for water vapor, nitrogen and hydrogen vapor, nitrogen and hydrogen vapor, argon and hydrogen

Typical Applications Typical Applications Typical Applications - Lamps and tubes manufacture - Beam tubes in particle accelerators - Beam tubes in particle accelerators - Transfer chambers / Loadlock - General research - UHV systems - General research

Top turned by 90° Top turned by 90° Top turned by 90°

ø180 ø202,5 ø202,5

78,5 81 81 22 153,5 156 156 188,5 191

386 389 389 418 420 420

535 538 538

45∞ 13,5∞ 13,5∞ 45∞ 45∞ 13,5∞ 13,5∞ 13,5∞ 13,5∞ 45∞

ø181 ø181

45∞ 9∞ ∞ 45∞ 9

Dimensional drawing for the Dimensional drawing for the Dimensional drawing for the COOLVAC 800 BL (160 ISO-K) COOLVAC 800 BL (160 CF) COOLVAC 800 BL UHV (160 CF)

474 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold e barxl(Torr xl) COOLPOWER Ar/N Max. throughput Built-in coldhead He Ar/N Capacity DN H DN DN Pumping speed connection forgasexhaustline Safety valvewithDN40KFflange Flange forotherpurposes Fore vacuumflange High vacuumflange Technical Data 10 m(35.0ft)long Cable forthesilicondiode, Low temperature measuringinstrument orFL9.0(1/2",1/2") FL4.5(1/2",1/2") Flexlines Electric extensioncableEL4.5 Compressor –coldhead,4.5m(15.75ft) Connecting cable COOLPAK 2200A COOLPAK 2000A COOLPAK 2200 COOLPAK 2000 Compressor unit COOLVAC at secondstageofthecoldhead Silicon diodefortemperature measurements H H Ar/N vrl egt mm(in.) min Weight kg mbarxl(Torr xl) Overall height Cool downtimeto20K Crossover value H (lbs) Ordering Information 2 2 2 2 mbarxls lxs lxs at10 /He O 2 2 2 mbarxls barxl(Torr xl) lxs -6 ma barxl(Torr xl) mbar -1 -1 (Torr xls (Torr xls Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 ) )

eddi wle-n mountedonDN16CF 2600 welded-in 2600 welded-in 2600 00/30 00/30 1000/300 640/800 1000/300 640/800 1000/300 burst 640/800 disk 0 L(S-) 0 L(F 800BLUHV(CF) 800BL(CF) COOLVAC 800BL(ISO-K) 5K 2 F 40CF 16CF(1x),40(1x) 25KF 16KF(2x) 16KF(2x) 25KF 6 S- 10C 160CF 160CF 800BLUHV(CF) 160ISO-K 800BL(CF) COOLVAC 800BL(ISO-K) ih4wy ih4wy with4-way 12(26.5) 538(21.18) 2(1.5) 150(112) with4-way 12(26.5) withUHVfeedthrough 4(3)/ built-intoaDN16CF 538(21.18) HVcurrent feedthrough 0.5(375) 50 with4-way 2(1.5) 150(112) built-intoaDN16KF HVcurrent feedthrough 4.5(3375) 12(26.5) built-intoaDN16KF 4(3)/ 50 535(21.06) 0.5(375) 150(112) 7/25 2(1.5) 4.5(3375) 50 4(3)/ 7/25 0.5(375) 4.5(3375) 7/25 atN. atN. PartNo. PartNo. PartNo. 0002 E40033 E 400000323 E400000323 E400000323 840000V2210 840000V2010 840000V2200 840000V2210 840000V2000 840000V2010 840000V2200 840000V2210 840000V2000 840000V2010 844160V9002 840000V2200 840000V2000 844160V1002 844160V1006 9 8 9 8 89288 89287 upon request 89374 upon request 89288 uponrequest 89287 uponrequest 89374 uponrequest uponrequest 89288 89287 89374 300 (225000)/

300 (225000)/

300 (225000)/ 475

High Vacuum Pumps Cryo Pumps with Fully Automatic Control, ClassicLine COOLVAC 800 CL COOLVAC 1.500 CL

COOLVAC 1.500 CL

Advantages to the User Advantages to the User - Hydrocarbon-free high vacuum - Hydrocarbon-free high vacuum - High capacity for argon and hydrogen - High capacity for argon and hydrogen - High crossover value - High crossover value - Simple operation - Simple operation - Trouble-free integration into complex systems - Trouble-free integration into complex systems - Fully automatic regeneration through Cryo Compact - Fully automatic regeneration through Cryo Compact Control Control - Easy servicing - Easy servicing

Typical Applications Typical Applications - Evaporators - Evaporators - Sputtering systems - Sputtering systems - Ion implanters - Ion implanters - Optical coating systems - Optical coating systems - Metallization systems - Metallization systems

Ø 180 DN 160 ISO-K Ø 240

DN 40 KF

153 257 DN 16 KF DN 25 KF 143

386 320 418 535

549

Dimensional drawing for the COOLVAC 800 CL (DN 160 ISO-K) Dimensional drawing for the COOLVAC 1.500 CL (DN 200 ISO-K)

476 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold H leybold Ar/N Max. throughput 1ts ae V AC COOLPOWER V Cooldown timetoT AC Weight kg W Built-in coldhead W 2nd stage 1st stage Temperature sensor DN COOLVAC 2nd DN stage (lbs) 1st stage Heaters Si diodeonaflange 4-way current feedthrough for DN for gasexhaustline DN Safety valvewithflangeconnection DN Flange fortheelectricalconnection DN Flange forconnectionagaugehead Fore vacuumflange High vacuum(HV)flange Technical Data Ar/N Capacity H Ar / N eimcnetos DN outside thread, type5400-S2-8) (Self-sealing couplings: Helium connections H rsoe au mbarxl(Torr xl) H Pumping speed Crossover value 2 2 2 2 lxs mbarxls lxs O at10 O 2 2 2 lxs barxl mbarxls -6 ma barxl mbar 2 =2 min =20K -1 -1 (Torr xls (Torr xls Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 ) )

0 L 1.500CL 800CL

4 0 1200/1500 25(55.2) 4600 640/800 60 7/25 16KF 2600 15(33.1) 210 40KF Pt100 150 50 42 16KF 90 (157) 16KF 42 Si 7/25 (112) 160 25KF Si Pt100 diode 42 16KF 90 diode 42 40KF 160 16KF 16KF 25KF 0 0 1000/ 300/ 2500 1000 15 6(4.5) 2(1.5) 1/2 3 3 12(9)/ 12.0 4(3)/ 4.5 6 S- 6 F 200ISO-K/ CF/6 160 ISO-K/CF " 1/2 " " ANSI 477

High Vacuum Pumps Ordering Information COOLVAC 800 CL Single Operation Dual operation Multiple Operation Europe USA/Japan Europe Europe USA/Japan Europe USA/Japan

Part No. Part No. Part No. COOLVAC 800 CL DN 160 CF 844160V0002 844160V0002 (2x) 844160V0002 (3x) DN 160 ISO-K 844160V0006 844160V0006 (2x) 844160V0006 (3x) Electronics and Cables System controller SC 844 230 844 230 844 230 844 230 844 230 Power supply PS (50/60 Hz) 230 V, 1-ph. (switchable to 115 V) 844 135 844 135 – – – 200 V, 3-ph. (switchable to 400 V) – – 844 235 844 235 844 235 Network communication cable – System controller to the pump(s) 10 m (35.0 ft) 844 261 844 261 844 261 844 261 844 261 20 m (70.0 ft) 844 262 844 262 844 262 844 262 844 262 Network PM cable for the link between the pumps 03 m (10.5 ft) – 844 256 844 256 844 256 844 256 (2x) 10 m (35.0 ft) – 844 258 844 258 844 258 844 258 (2x) Power supply cable from power supply to pump 10 m (35.0 ft) – – 844 251 (2x) 844 251 (2x) 844 251 (3x) 20 m (70.0 ft) – – 844 252 (2x) 844 252 (2x) 844 252 (3x) Remote control cable CP, 1 m (3.5 ft) – – 844 265 844 265 844 265 Cable compressor – Power supply 10 m (35.0 ft) 844 129 844 129 – – – 20 m (70.0 ft) 844 139 844 139 – – – Cable system controller – Power supply 01 m (3.5 ft) 844 141 844 141 – – – Cable pump module PM – Power supply 10 m (35.0 ft) 844 128 844 128 (2x) – – – 20 m (70.0 ft) 844 138 844 138 (2x) – – – Connecting cable E 400000323 E 400000323 compressor – pump, 4.5 m (15.75 ft) (2x) – – – Electric extension cable EL 4.5 893 74 893 74 (2x) – – – Compressors and Flexlines Compressor CP 2000 840000V2000 – – – – – – CP 2000 A 840000V2010 – – – – – – CP 2200 – 840000V2200 – – – – – CP 2200 A – 840000V2210 – – – – – CP 6000 HD – – 840000V6004 – – – – CP 6000 H – – – 840000V6001 – 840000V6001 – CP 6200 H – – – – 840000V6201 – 840000V6201 Accessories Water cooling discharge throttle – – E 840000133 – – – – Power supply cable for compressor 1) 1) 1) 1) 1) Set of flexlines FL 4.5 (1/2", 1/2") 892 87 892 87 (2x) 892 87 (2x) 892 87 (2x) 892 87 (3x) or FL 9.0 (1/2", 1/2") 892 88 892 88 (2x) 892 88 (2x) 892 88 (2x) 892 88 (3x) Gas manifold (1 piece each) GD 2 – 840 253 (2x) 840 253 (2x) 840 253 (2x) – GD 4 – – – – 840 254 (2x)

The arrangement of the components is shown in the chapter “Accessories” under the heading “COOLVAC ClassicLine, System Components”

1) See Ordering Information for the compressor units COOLPAK

478 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold DN200ISO-K leybold Electric extensioncableEL4.5 compressor –pump,4.5m(15.75ft) Connecting cable 20m(70.0ft) 10m(35.0ft) Cable pumpmodulePM–Powersupply Cable systemcontroller –Powersupply 20m(70.0ft) 10m(35.0ft) Cable compressor –Powersupply Remote control cableCP, 1m(3.5ft) 20m(70.0ft) 10m(35.0ft) to pump Power supplycablefrom powersupply 10m(35.0ft) the pumps Network PMcableforthelinkbetween 20m(70.0ft) 10m(35.0ft) System controller tothepump(s) Network communicationcable– 200V, 3-ph.(switchableto400V) 230V, 1-ph.(switchableto115V) Power supplyPS(50/60Hz) System controller SC Electronics andCables DN DN200CF 6 COOLVAC 1.500CL 1) The arrangementofthecomponentsis showninthechapter“Accessories”underheading“COOLVAC ClassicLine,System Componen GD 4 GD 2 Gas manifold(1pieceeach) orFL9.0(1/2",1/2") FL4.5(1/2",1/2") Set ofFLEXLINES Power supplycableforcompressor Water coolingdischargethrottle Accessories CP6200H CP6000H CP6000HD CP2200A CP2200 CP2000A CP2000 Compressor Compressors andFlexlines Ordering Information SeeOrdering Information forthecompressor unitsCOOLPAK 0 0 1 m(3.5ft) 3 m(10.5ft) " ANSI Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 igeOeain uloeain MultipleOperation COOLVAC 1.500CL Europe Dualoperation USA/Japan USA/Japan Europe Europe USA/Japan Europe SingleOperation – 844 256 844 256 844 256 844 256 (2x) 256(2x) 844 256 844 – 235 844 256 844 262 844 256 261 844 844 235 844 262 844 235 261 844 844 – 262 844 – 261 844 262 844 – 261 844 – 262 844 261 844 135 844 – 135 844 – – – –

– – – – – – – – 844 258 844 258 844 258 844 258(2x) 844 258 844 258 844 258 844 – 230 844 230 844 230 844 230 844 844200V0006 (3x) 844200V0004 (3x) 844200V0002 230 844 844200V0006 (3x) (2x) 844200V0004 (2x) 844200V0002 (2x) 844200V0006 844200V0004 844200V0002 – 840 253 (2x) 840 253 (2x) 840 253 (2x) – – 840253(2x) – 840253(2x) 840253(2x) – 88(2x) 892 – 88(2x) 892 – 87(2x) 892 88(2x) 892 87(2x) 892 87(2x) 892 – 88 892 87 892 840000V2000 – – – – – – – – 844 251 (2x) 844 251 (2x) 844 251 (3x) 251(3x) 844 251(2x) 844 251(2x) 844 – – – – 844 252 (2x) 844 252 (2x) 844 252(3x) 844 252(2x) 844 252(2x) 844 – – 844 129 844 129 – – – – 265 844 – 265 844 265 844 – – 129 844 129 844 – 4 3 8419 – – – – 139 844 139 844 4 4 8411 – – – – 141 844 141 844 9 4 9 4(x – – – – – – 89374 (2x) 89374 – 128(2x) 844 128 844 4 3 8418(x – – – – – – 138(2x) 844 – (2x) 138 844 E 400000323 E 400000323 E400000323 E400000323 840000V2010 –

atN. Pr o PartNo. PartNo. Part No. – – – – – – – – – – – – – – – – – – 1) 840000V2210 840000V2200

– E 840000133 – – – – – – – – – – – – 840000V6004 1)

– – – – – 840000V6001 1) –

– 840000V6201 1) –

– 840000V6001 ts”. – 840 254(2x) 88(3x) 892 87(3x) 892

1) – 840000V6201 840000V6201 – 479

High Vacuum Pumps COOLVAC 2.000 CL COOLVAC 3.000 CL

COOLVAC 2.000 CL COOLVAC 3.000 CL

Ø 370 (10" ANSI = Ø 406) Ø 304

300

345

559 604

Dimensional drawing for the COOLVAC 2.000 CL (DN 250 CF) Dimensional drawing for the COOLVAC 3.000 CL (DN 320 ISO-K / 10" ANSI)

480 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold H leybold Ar/N Max. throughput 1ts ae V AC COOLPOWER V Cooldown timetoT AC Weight kg W Built-in coldhead W 2nd stage 1st stage Temperature sensor DN 2nd DN stage (lbs) 1st stage Heaters Si diodeonaflange 4-way current feedthrough for DN for gasexhaustline DN Safety valvewithflangeconnection DN Flange fortheelectricalconnection DN Flange forconnectionagaugehead Fore vacuumflange High vacuum(HV)flange Technical Data Ar/N Capacity H Ar / N eimcnetos DN outside thread, type5400-S2-8) (Self-sealing couplings: Helium connections H rsoe au mbarxl(Torr xl) H Pumping speed Crossover value 2 2 2 2 lxs mbarxls lxs O at10 O 2 2 2 lxs barxl mbarxls -6 ma barxl mbar 2 =2 min =20K -1 -1 (Torr xls (Torr xls Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 ) )

60/20 2500/3000 500(375) 35(77.3) Sidiode 10500 1600/2100 80 250(187) 7/25 7000 25(55.2) Pt100 Sidiode 70 42 90 16KF 42 7/25 160 Pt100 42 90 42 160 16 16 40 16KF 40 16 KF 16 KF KF 25 KF 25 CF CF KF KF .0 L 3.000CL 2.000CL 250ISO-K /250CF8 COOLVAC 60/10 2500/ 6000 1600/ 3200 2()/1 9 15(11.2)/ 28 12(9)/ 1/2 10 6 15 (7.5) (4.5) " 1/2 " ANSI 320ISO-K/10 " " ANSI 481

High Vacuum Pumps Ordering Information COOLVAC 2.000 CL Single Operation Dual operation Multiple Operation Europe USA/Japan Europe Europe USA/Japan Europe USA/Japan

Part No. Part No. Part No. COOLVAC 2.000 CL DN 250 CF 844250V0002 844250V0002 (2x) 844250V0002 (3x) DN 8" ANSI 844250V0004 844250V0004 (2x) 844250V0004 (3x) DN 250 ISO-K 844250V0006 844250V0006 (2x) 844250V0006 (3x) Electronics and Cables System controller SC 844 230 844 230 844 230 844 230 844 230 Power supply PS (50/60 Hz) 230 V, 1-ph. (switchable to 115 V) 844 135 844 135 – – – 200 V, 3-ph. (switchable to 400 V) – – 844 235 844 235 844 235 Network communication cable – System controller to the pump(s) 10 m (35.0 ft) 844 261 844 261 844 261 844 261 844 261 20 m (70.0 ft) 844 262 844 262 844 262 844 262 844 262 Network PM cable for the link between the pumps 03 m (10.5 ft) – 844 256 844 256 844 256 844 256 (2x) 10 m (35.0 ft) – 844 258 844 258 844 258 844 258 (2x) Power supply cable from power supply to pump 10 m (35.0 ft) – – 844 251 (2x) 844 251 (2x) 844 251 (3x) 20 m (70.0 ft) – – 844 252 (2x) 844 252 (2x) 844 252 (3x) Remote control cable CP, 1 m (3.5 ft) – – 844 265 844 265 844 265 Cable compressor – Power supply 10 m (35.0 ft) 844 129 844 129 – – – 20 m (70.0 ft) 844 139 844 139 – – – Cable System Controller – Power Supply 01 m (3.5 ft) 844 141 844 141 – – – Cable pump module PM – Power supply 10 m (35.0 ft) 844 128 844 128 (2x) – – – 20 m (70.0 ft) 844 138 844 138 (2x) – – – Connecting cable E 400000323 E 400000323 compressor – pump, 4.5 m (15.75 ft) (2x) – – – Electric extension cable EL 4.5 893 74 893 74 (2x) – – – Compressors and Flexlines

Compressor CP 2000 840000V2000 – – – – – – CP 2000 A 840000V2010 – – – – – – CP 2200 – 840000V2200 – – – – – CP 2200 A – 840000V2210 – – – – – CP 6000 HD – – 840000V6004 – – – – CP 6000 H – – – 840000V6001 – 840000V6001 – CP 6200 H – – – – 840000V6201 – 840000V6201 Accessories Water cooling discharge throttle – – E 840000133 – – – – Power supply cable for compressor 1) 1) 1) 1) 1) Set of flexlines FL 4.5 (1/2", 1/2") 892 87 892 87 (2x) 892 87 (2x) 892 87 (2x) 892 87 (3x) or FL 9.0 (1/2", 1/2") 892 88 892 88 (2x) 892 88 (2x) 892 88 (2x) 892 88 (3x) Gas manifold (1 piece each) GD 2 – 840 253 (2x) 840 253 (2x) 840 253 (2x) – GD 4 – – – – 840 254 (2x)

The arrangement of the components is shown in the chapter “Accessories” under the heading “COOLVAC ClassicLine, System Components”.

1) See Ordering Information for the compressor units COOLPAK

482 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold DN320ISO-K leybold Electric extensioncableEL4.5 compressor –pump,4.5m(15.75ft) Connecting cable 20m(70.0ft) 10m(35.0ft) Cable pumpmodulePM–Powersupply Cable systemcontroller –Powersupply 20m(70.0ft) 10m(35.0ft) Cable compressor –Powersupply Remote control cableCP, 1m(3.5ft) 20m(70.0ft) 10m(35.0ft) to pump Power supplycablefrom powersupply 10m(35.0ft) the pumps Network PMcableforthelinkbetween 20m(70.0ft) 10m(35.0ft) System controller tothepump(s) Network communicationcable– 200V, 3-ph.(switchableto400V) 230V, 1-ph.(switchableto115V) Power supplyPS(50/60Hz) System controller SC Electronics andCables DN 10 COOLVAC 3.000CL 1) The arrangementofthecomponentsis showninthechapter“Accessories”underheading“COOLVAC ClassicLine,System Componen GD 2 Gas manifold(1pieceeach) orFL9.0(1/2",1/2") FL4.5(1/2",1/2") Set offlexlines Power supplycableforcompressor Water coolingdischargethrottle Accessories CP6200H CP6000H CP6000HD CP2200A CP2200 CP2000A CP2000 Compressor Compressors andFlexlines Ordering Information SeeOrdering Informationforthecompressor unitsCOOLPAK 0 0 1 m(3.5ft) 3 m(10.5ft) " ANSI Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 igeoeain Dualoperation COOLVAC 3.000CL Singleoperation Europe USA/Japan Europe USA/Japan Europe 4 4 8411 4 4 – – – – – – 400000323 E 141 844 – 400000323 E 139 844 (2x) 141 844 129 844 400000323 E 139 844 – 129 844 – – 844138 844138 844138 – 844128 844128 844128 141 844 – (2x) – (2x) 139 844 129 844 – – – 844 265 844 265 844 265 844 – – – – – – 844 252 (2x) 844 252(2x) 844 252(2x) 844 251(2x) 844 251(2x) 844 – – 258 844 256 844 258 844 256 844 – 258 844 – 256 844 – – 262 844 261 844 – 262 844 – 261 844 262 844 261 844 – 262 844 – 261 844 262 844 261 844 – – – – – – – 844 235 844 235 844 235 844 – – – – 230 844 135 844 230 844 230 844 135 844 – 230 844 135 844 230 844 844320V0006 844320V0004 844320V0006 844320V0004 (2x) (2x) – – – –

892 87 892 87 892 87 (2x) 892 87 (2x) 892 87 (2x) 87(2x) 892 87(2x) 892 87(2x) 892 87 892 87 892 – – 89374(2x) 89374 89374 Part Part No. No. – – – – –

892 88 892 88 892 88 (2x) 892 88 (2x) 892 88(2x) 892 88(2x) 892 88(2x) 892 88 892 88 892 – 4 5 2) 4 5 2) 840253(2x) 840253(2x) 840253(2x) – – 840000V2010 840000V2000 1) –

– – – – – – – – – 840000V2210 840000V2200 – E 840000133 – – – – – – – 840000V6004 1)

– – – 840000V6001 1) –

ts”. – 840000V6201 1) – 483

High Vacuum Pumps COOLVAC 5.000 CL COOLVAC 10.000 CL

COOLVAC 5.000 CL COOLVAC 10.000 CL

Typical Applications Typical Applications - Evaporators - Evaporators - Ion implanters - Space simulation chambers - Electron beam welding systems - Electron beam welding systems - Optical coating systems - Optical coating systems - Metallization systems - Metallization systems

Ø 450 Ø 550 DN 400 ISO-K DN 500 ISO-K

640 704

Ø 105 Ø 105

Dimensional drawing for the COOLVAC 5.000 CL Dimensional drawing for the COOLVAC 10.000 CL

484 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold H 1ts ae V AC COOLPOWER V Cooldown timetoT AC Weight kg W Built-in coldhead W 2nd stage 1st stage Temperature sensor DN 2nd DN stage (lbs) 1st stage Heaters Si diodeonaflange 4-way current feedthrough for for gasexhaustline DN Safety valvewithflangeconnection Flange fortheelectricalconnection leybold Ar/N Max. throughput oevcu lne DN DN Flange forconnectionofagaugehead Fore vacuumflange High vacuum(HV)flange Ar/N Capacity H Ar / N eimcneto DN outside thread, types5400-S2-8 (Self-sealing couplings: Helium connection H rsoe au mbarxl(Torr xl) H Pumping speed Crossover value Technical Data 2 2 2 2 mbarxls lxs lxs at10 O 2 2 2 lxs barxl mbarxls -6 ma barxl mbar 2 =2 min =20K -1 -1 (Torr xls (Torr xls DN Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 ) )

2(27 50(110.4) 5/100 42(92.7) 5/100 4000 / 5200 8400 / 10000 /10000 8400 800(600) Sidiode 30000 /5200 4000 150 700(525) 18000 Pt100 Sidiode 100 42 90 42 160 Pt100 42 90 42 160 53 7(5.3) 10(7.5)/ /5500 5500 7(5.3) 45 10(7.5)/ 1/2 /3000 3000 12000 32 6200 16KF 16KF 0K 40KF 40KF 0K 40KF 40KF 6K 16KF 16KF 0K 40KF 40KF 5.000 COOLVAC 10.000 CL CL 40I OK 500 400 ISO-K ISO-K " 1/2 " 485

High Vacuum Pumps Ordering Information COOLVAC 5.000 CL COOLVAC 10.000 CL Europe USA/Japan Europe USA/Japan

Part No. Part No. Part No. Part No. COOLVAC 05.000 CL, DN 400 ISO-K 844 410 844 410 – – 10.000 CL, DN 500 ISO-K – – 844610V0006 844610V0006

Electronics and Cables

System controller SC Part No. Part No. Part No. Part No. 844 230 844 230 844 230 844 230

Power supply PS 230 V, 1-ph. 844 135 844 135 844 135 844 135

Network communication cable – System controller to the pump(s) 10 m (35.0 ft) 844 261 844 261 844 261 844 261 20 m (70.0 ft) 844 262 844 262 844 262 844 262

Cable compressor – Power supply PS 10 m (35.0 ft) 844 129 844 129 844 129 844 129 20 m (70.0 ft) 844 139 844 139 844 139 844 139

Cable system controller – Power supply 01 m (3.5 ft) 844 141 844 141 844 141 844 141

Cable pump module PM – Power supply 10 m (35.0 ft) 844 128 844 128 844 128 844 128 20 m (70.0 ft) 844 138 P844 138 844 138 844 138 Compressors and Flexlines

Compressor CP 6000 H 840000V6001 – 840000V6001 – CP 6200 H – 840000V6201 – 840000V6201

Power supply cable for compressor see Ordering see Ordering see Ordering see Ordering Information Information Information Information for the Compressor for the Compressor for the Compressor for the Compressor Units COOLPAK Units COOLPAK Units COOLPAK Units COOLPAK

Set of flexlines FL 4.5 (1/2", 1/2") 892 87 892 87 892 87 892 87 or FL 9.0 (1/2", 1/2") 892 88 892 88 892 88 892 88 and EL 4.5 (electric extension cable) 893 74 893 74 893 74 893 74

The arrangement of the components is shown in the chapter “Accessories” under the heading “COOLVAC ClassicLine, System Components”

486 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold Notes Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 487

High Vacuum Pumps COOLVAC COOLVAC COOLVAC 18.000 CL 30.000 60.000

COOLVAC 60.000 LN2 cooled upon request

COOLVAC 18.000 CL with special flanges COOLVAC 30.000 with special flanges COOLVAC 60.000 with special flanges

Advantages to the User Advantages to the User Advantages to the User - Hydrocarbon-free high vacuum - Hydrocarbon-free high vacuum - Hydrocarbon-free high vacuum - High pumping speed for water - High pumping speed for water - High pumping speed for water vapor and nitrogen vapor and nitrogen vapor and nitrogen - Fast, safe and efficient regeneration - Fast, safe and efficient regeneration - Fast, safe and efficient regeneration with the electric regeneration system with the electric regeneration system with the electric regeneration system - Simple operation - Simple operation - Simple operation

Typical Applications Typical Applications Typical Applications - Space simulation chambers - Space simulation chambers - Space simulation chambers - Evaporators - Evaporators - Evaporators - Electron beam welding systems - Electron beam welding systems - Electron beam welding systems - Optical coating systems - Optical coating systems - Optical coating systems - Metallization systems - Metallization systems - Metallization systems

Ø 1060 (35" ANSI) 2 5,625˚ 5 ,25 ˚

2,5˚ 572 603

30° 5 721 2 787 886 55 2

6 6 658

608

130

25 6

Dimensional drawing for the COOLVAC 18.000 CL Dimensional drawing for the COOLVAC 30.000 Dimensional drawing for the COOLVAC 60.000

488 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold H a.truhu COOLPOWER Ar/N Max. throughput Built-in coldhead leybold H upn pe mbar DN H DN DN Pumping speed (opening pressure) DN connection forgasexhaustline DN Safety valvewithDN40KFflange Flange forotherpurposes for silicondiode Flange withcurrent feedthrough Fore vacuumflange High vacuumflange COOLVAC 30.000,35 COOLVAC 18.000CL,630ISO-F Cryopump Ar/N Capacity H Ar/N vrl egt min and secondstageofthecoldhead Regeneration heatersatthefirst min at thesecondstageofcoldhead Silicon diodefortemperature measurements Weight kg Overall height Cool downtimeto20K mbarxl(Torr xl) Crossover valueat20K H (lbs) Compact controller andcablekit andEL4.5(electric extensioncable) orFL9.0(1/2",1/2") FL4.5(1/2",1/2") Set offlexlines Power supplycable COOLPAK 6200H COOLPAK 6000H Compressor unit COOLVAC 60.000,1250ISO-F Ordering Information Technical Data 2 2 2 2 2 mbarxls lxs O bar at10 O x l e lxs / He 2 2 2 barxl mbarxls lxs -6 ma barxl mbar "

ANSI -1 -1 (Torr xls (Torr xls Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 -1 -1 -1 -1 -1 ) )

0 sedaig seedrawing seedrawing 330 1000 12 606 260 1200 7 180 850 7 ul-n(x biti 2) built-in(2x) 25/ built-in(2x) 450 built-in(2x) built-in 14/ 245 (2x) 5/100(2x)and140T 65 5/100(2x)and140T(1x) 14/ 150 5/100(2x) 100 945 65 00/50 60 50 9000/ 6500/ /5000 5000 14000 / 4000 30000 / 7000 60000 /15000 60000 /7000 30000 /4000 14000 13500 / 18000 25000 / 30000 47000 / 57000 /57000 47000 /30000 25000 180000 1100 /18000 13500 93000 1100 46000 1100 0K 4 F 40KF 40KF 40KF 0K 4 F 40KF 16KF(2x) 40KF 16KF(2x) 40KF 25KF(2x) pnrqet pnrqet upon request uponrequest Part No.89374(4x) Part No.89288(4x) uponrequest Part No.89287(4x) PartNo.89374(3x) PartNo.89288(3x) PartNo.89287(3x) PartNo.89374(2x) PartNo.89288(2x) PartNo.89287(2x) pnrqet(x uo eus 3) uponrequest (4x) uponrequest (4x) see Ordering Information forthecompressor unitsCOOLPAK uponrequest (3x) uponrequest (3x) uponrequest (2x) uponrequest (2x) COVC 800C COVC3.0 COOLVAC 60.000 COOLVAC 30.000 COOLVAC 18.000CL COOLVAC 60.000 COOLVAC 30.000 COOLVAC 18.000CL atN. atN. PartNo. PartNo. PartNo. 844630V0006 630 35 ISO-F

3IOK 3IOK 63ISO-K 63ISO-K 63ISO-K – – upon request " AS 1250ISO-F ANSI – – – upon request – – – 489

High Vacuum Pumps Products Cryogenics Cold Heads, Pneumatically Driven Single-Stage Cold Heads COOLPOWER 50 and 140 T

Single-stage cold head’s COOLPOWER 50 (left) and 140 T (right)

Advantages to the User

ø 87 Ø 115 Ø 105 ø 69 - For installation mostly in any

11,8 orientation 6

M 4 - High refrigerating capacity (8x) - No liquid refrigerants are required 148.5 Lenght 4.5 m - Very simple to operate - Short cooldown time

365 12 346 Typical Applications DN 160 ISO-K - Cooling of cryopanels in cryo pumps

31.5 and thus generation of high vacuum and ultra-high vacuum pressures - Calibration of sensors

117.75 - Cooling of samples and detectors; especially for cooling of - samples for spectroscopic Ø 105 approx. 121 investigations in solid state and

22.5° surface physics 45° - high temperature super conductor 8 x 45 and semiconductor conditions °

Middle of clamp - infrared and gamma detectors 60

appr 10°

ox. 124

approx. 124 Heli-Coil M4 x 7. 7 depth

Heli-Coil M4 x4, 7 depth

13.5° Ø 60 27°

Dimensional drawing for the COOLPOWER 50 (left) and COOLPOWER 140 T (right)

490 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold o2 min min °C(°F) Permissible ambienttemperature to20K,approx. to20K Cooldown timedown leybold 3) 2) 1) Measuring Lowtemperature measuring instrument cable Silicon diode Temperature measurement Options andEL4.5(electricextensioncable) orFL9.0(1/2",1/2") FL4.5(1/2",1/2") Set offlexlines 200V/50Hz;V, 230V/60Hz Power supplycable COOLPAK 6200H 400V/50Hz;470V/60Hz COOLPAK 6000H COOLPAK 2200A COOLPAK 2200 COOLPAK 2000A COOLPAK 2000 (for operationofonecoldhead) Compressor unit compressor –coldhead,4.5m(15.75ft) Connecting cable Accessories other withweld-onpipe flanges withDN160ISO-K withDN100CF-R Cold head He fillingpressure atroom temperature Refrigeration capacityat50/60Hz t2 ,apo. W W Lowest attainabletemperature at20K,approx. at80K,approx. otecmrso nt m(ft) to thecompressor unit Length oftheelectricalconnectionline Lowpressure connection Weight kg Highpressure connection Self-sealingscrewed connections He connections (lbs) Ordering Information Technical Data Series8from Aeroquip Series5400from Aeroquip orcompatible types Therefrigerating capacitiesandtemperatures statedapplyonlytoverticaloperationwiththecoldendatbottom 1) K 1)

bar Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 1/2 16 16

# OLOE 0 COOLPOWER140T COOLPOWER50 2 20 1.) 12(26.5) 8(17.7) +10to+40(+50+104) +10to+40(+50+104) COOLPOWER140T 140 50 COOLPOWER50 1/2

9 7 89287 89287 9 8 89288 89288 forthecompressor unitsCOOLPAK forthecompressor unitsCOOLPAK – 842050V0001 Part Part No. No. 842050V0000 9 4 89374 89374 seeOrdering Information 840000V6201 – seeOrdering Information 840000V6001 – – – – – 840000V2210 840000V2200 840000V2010 840000V2000 E upon upon 400000323 request request 9 9 89089 89089 pnrqet uponrequest uponrequest uponrequest uponrequest

– – – 26 " " 4.5 (15.75) # 20

2) 2) # 1/2 1/2 the coldhead included with 842 030

15 – – – 55 " "

3) 3)

491

High Vacuum Pumps Dual-Stage Cold Heads COOLPOWER 7/25, 5/100 and 5/100 T

Dual-stage cold head COOLPOWER 7/25 Dual-stage cold heads COOLPOWER 5/100 and COOLPOWER 5/100 T

Advantages to the User Typical Applications - For installation in any orientation - Cooling of cryopanels in cryo pumps - high temperature super conductors - High refrigerating capacity and thus generation of high vacuum - superconductors and semi and ultra-high vacuum pressures conductors - No liquid refrigerants are required - Cooling of samples and detectors; - infrared and gamma detectors - Very simple to operate especially for cooling of - Calibration of sensors - Short cooldown time - samples for spectroscopic - Cooling of accelerator components investigations in solid state and in the area of high energy physics surface physics - Cooling of superconducting mag nets; in nuclear magnetic resonance

47.5 View A ø 47,5 tomographs, for example (only M4 A 6 32.2 40 COOLPOWER 5/100 and 5/100 T) 30

6x60 6 ° 125,5 129 82,1 27 ø 69 View B B 18 M4 x 7 92.2 47.5 115 60 3 110 45 8 x ° 45 6 ° 80 474.5 ø 87 490 130 inside ø 75,5

129 108.5

19 149

117.5

105 135

135 13.5° 40 60 105 13.5°

ca. 120 127 M4 ca. 120 128.7 ca. = approx.

Dimensional drawing for the COOLPOWER 7/25 Dimensional drawing for the COOLPOWER 5/100 and COOLPOWER 5/100 T

492 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold s tg o3 ,apo. min min min °C(°F) min Permissible ambienttemperature K min 1ststageto30K,approx. K 2ndstageto6K,approx. min 1ststageto40K,approx. 2ndstageto10K,approx. 1ststageto80K,approx. 2ndstageto20K,approx. Cooldown timeofthe 2ndstage,approx. 1ststage,approx. leybold He fillingpressure atroom temperature Refrigeration capacityat50/60Hz 3) 2) 1) Measuringcable,3m(10.5 ft)long Lowtemperature controller MODEL9700 Electrical heaters Measuring Lowtemperature measuring instrument cable Silicon diode Temperature measurement /control Options andEL4.5(electricextensioncable) orFL9.0(1/2",1/2") FL4.5(1/2",1/2") Set offlexlines Power supplycable COOLPAK 6200H COOLPAK 6000H COOLPAK 2200A COOLPAK 2200 COOLPAK 2000A COOLPAK 2000 (for operationofonecoldhead) Compressor unit compressor –coldhead,4.5m(15.75ft) Connecting cable Accessories COOLPOWER5/100T COOLPOWER5/100withweld-onpipe COOLPOWER7/25 Cold head Ordering Information Technical Data s tg t4 ,apo. W W W W Lowest attainabletemperature 2ststageat40K,approx. 2ststageat10K,approx. 2ststageat20K,approx. 1ststageat80K,approx. icue ihcl ed m(ft) (included withcoldhead) to thecompressor unit Length oftheelectricalconnectionline Lowpressure connection Weight kg Highpressure connection Self-sealingscrewed connections He connections (lbs) SeeOrdering Information forthecompressor unitsCOOLPAK Series8from Aeroquip Therefrigerating capacities andtemperatures statedapply toverticaloperationwiththecold endatthebottom 1)

bar Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 1/2 1 1 16 16 +5 to+40(+41+104) +5to+40(+41+104) 16 +5to+40(+41+104) – 40 – – 4 0 8241 842401 842401 842401 – 45 – – 4 0 8240 842400 842400 842400 – 30 – – pnrqet pnrqet upon request uponrequest uponrequest – 35 – – pnrqet pnrqet upon request uponrequest uponrequest 2 2 20 20 20 pnrqet pnrqet upon request uponrequest uponrequest

2 2 20 20 20 9 9 9 9 89089 89089 89089 – 35 – – – 3.5 – – 9 4 9 4 89374 89374 89374 . 1.5 45(57) 4.5(15.75) 4.5(15.75) 4.5(15.75) 7 7.5 5 7 9 8 9 8 89288 89288 89288 1(43 1 2.) 11(24.3) 11(24.3) 11(24.3) 1/2 800V20 – – – – – 840000V6201 – 840000V6201 840000V6001 – 840000V6001 – – – 840000V2210 840000V2200 129 840000V2010 840000V2000 – – E 78 400000323 – – 842 – 893 040 05 – 2 10 100 100 25 atN. atN. PartNo. PartNo. PartNo. 9 7 9 7 89287 89287 89287 72 510 5/100 5/100 T 7/25 72 510 5/100 5/100 T 7/25 # # " " (#8 10 35 3) (8 1/2 (#8)

2) ) 1/2 COOLPOWER COOLPOWER h odha thecoldhead the coldhead nlddwt includedwith included with # # " " (#8 1 6 10 35 3) (8 1/2 (#8)

2) ) 1/2 # " " (#8 3) 35 (#8) 2) )

493

High Vacuum Pumps Cold Heads, Mechanically Driven Dual-Stage Cold Head COOLPOWER 10 MD

COOLPOWER 10 MD - the strongest 10 K GM cooler available on the market:

- High 2nd stage cooling capacity of > 18 W at 20 K - High 1st stage cooling capacity of > 25 W at 40 K and 110 W at 80 K

Dual-stage Cold Head COOLPOWER 10 MD

Advantages to the User Typical Applications - Excellent cooling performance The COOLPOWER 10 MD is a me cha- - 18 W at 20 K by press-button nically driven double-stage Gifford operation McMahon (GM) cryo cooler and ideally suited for - High reliability - Design optimized for MTBF - Cooling of cryo probes in NMR 100,000 h spectrometers - Long and maintenance-free - Shield cooling of superconducting operation magnets in MRI - Low vibration due to directly driven - Cooling of cryopanels in special displacer Cryo pumps and thus generation of high vacuum and ultra-high vacuum - No liquid refrigerants are required pressures - Very simple to operate - Cooling of larger samples and - Short cooldown time devices; especially - Easy operation - High temperature super conductor - Plug & Cool - as usual for all coils, wires and bulk materials Oerlikon Leybold Vacuum - Recondensation of liquid refrige- GM coolers rants such as H2, Ne - Simple variation of motor speed via - Samples for spectroscopic inves- the COOLPAK MD com pres sor tigations in solid state and surface unit physics - Infrared and gamma detectors - Calibration of sensors

494 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold 104 25 98 75

26 Ø 172 128

30° (179.3) 22.5° 45

Ø 154 51.3

10 M4x6 Ø 120 Ø 190 Ø 8.5 Ø 84 Ø 85.5

Sealing area for O-Rings Ø 96 56

12 364.2 214 Ø 47.2 Ø 112

Ø 96.5 High

Ø 38 Pumps Vacuum

200

Ø 122 Ø 47.5 125 62 160 12

Ø 56

Dimensional drawing for the COOLPOWER 10 MD

Technical Data COOLPOWER 10 MD

Refrigeration capacity at 50/60 Hz 1) 1st stage at 80 K, approx. W 110 2st stage at 20 K, approx. W 18 Lowest attainable temperature 1) 1st stage, approx. K # 28 2nd stage, approx. K # 8 Cooldown time of the 2nd stage to 20 K, approx. min 25 Permissible ambient temperature °C (°F) +5 to +40 (+41 to +104) He filling pressure at room temperature bar 16 He connections Self-sealing screwed connections High pressure connection 1/2" (#8 2)) Low pressure connection 1/2" (#8) Weight kg (lbs) 20 (44.15)

Ordering Information COOLPOWER 10 MD

Part No. Cold head COOLPOWER 10 MD 842 010 Accessories see Ordering Information for the compressor unit COOLPAK 6000 HMD/6200 HMD, connecting cable and flexline

1) The refrigerating capacities and temperatures stated apply to vertical operation with the cold end at the bottom 2) Series 8 from Aeroquip

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 495 Compressor Units for Pneumatically Driven Cold Heads and Pumps, Air Cooling COOLPAK 2000 A/2200 A

Compressor unit COOLPAK 2000 A (2200 A is similar)

Advantages to the User - High efficiency and increased perfor- - Simple installation and operation mance for cryogenic pumps and - Global mains voltage compatibility refrigerators - Perfect integration within complex - High long-term reliability due to systems due to the 24 V Sub-D long-life and highly efficient compo- interface nents and improved oil management - Simple adsorber replacement, - Very quiet and low vibration opera- otherwise maintenance-free tion through the innovative horizon- - Small footprint tally suspended scroll compressor - Low cost of ownership

Dimensional drawing of the COOLPAK 2000 A/2200 A

496 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold egt kg (lbs) mm(in.) dB(A) Weight Dimensions (WxHD) (at adistanceof1m(3.5ft)) low-pressureNoise level side(outsidethread) high-pressure side(outside thread) kW self-sealing fittings Helium connections kW Remote control through interface A withwarmedupcoldhead withcooleddowncoldhead A Electric powerconsumption V withwarmedupcoldhead °C(°F) withcooleddowncoldhead bar Operating current Mains voltage(singlephase) Ambient temperature at room temperature Helium systemfillingpressure for coldheads Number ofelectricalconnections Ordering Information Technical Data Absorber CPS-V8 Spare parts COOLPOWER20/21030510) RGD,RGSor (foroperatingoldercoldheadsoftype RC adapter box 19 Accessories, optional Compressor unit " installationkit Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 1/2 4 C 24VDC 11.5to12.5 208±10% 2.5 24VDC 2.3 13.0 9.5to10.5 2.4 2.2 230±10% 12.0 4017 E840001973 840910 840022 E840001973 840910 840022 840000V2210 840000V2010 5t 3 +1t 8) +5to+30 (+41to+86) 14 1 +5to+30(+41+86) 15 1 1/2 atN. PartNo. 69(152.32) <55 2200A (60Hz) PartNo. 2000A(50 Hz) 69(152.32) <55 COOLPAK 445x607400(17.5223.9015.74) 445x607400(17.5223.9015.74) 2200A(60Hz) 2000A(50Hz) COOLPAK " " 1/2 1/2 " "

497

High Vacuum Pumps Compressor Units for Pneumatically Driven Cold Heads and Pumps, Water Cooling COOLPAK 2000/2200

Compressor unit COOLPAK 2000 (2200 is similar)

Dimensional drawing of the COOLPAK 2000/2200

498 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Absorber CPS-V8 Spare parts COOLPOWER20/ 210 /30510) RGD,RGSor (foroperatingoldercoldheadsoftype RCadapterbox leybold egt kg (lbs) mm(in.) DN dB(A) Weight Dimensions (WxHD) (at adistanceof1m(3.5ft)) Noise level low-pressureWater side(outsidethread) connections high-pressure side(outside thread) kW self-sealing fittings VDC Helium connections kW Remote control through interface A withwarmedupcoldhead withcooleddowncoldhead A Electric powerconsumption V withwarmedupcoldhead withcooleddowncoldhead Operating current °C(°F) bar °C(°F) Mains voltage(singlephase) Cooling waterfeedtemperature Cooling waterconsumption Ambient temperature at room temperature Helium systemfillingpressure for coldheads Number ofelectricalconnections 19 Accessories, optional Compressor unit Ordering Information Technical Data " installationkit Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 . o1. 11.5to12.5 24 208±10% 2.5 2.3 1/2 13.0 24 9.5to10.5 2.4 2.2 230±10% 12.0 <5 +5to+25 (+41to+77) <5 +5to+25(+41+77) 4017 E840001973 840910 840022 E840001973 840910 840022 840000V2200 840000V2000 5t 4 +1t 14 +5to+40(+41+104) 14 1 +5to+40(+41+104) 15 1 1/2 atN. PartNo. 2200(60Hz) 69(152.32) <55 PartNo. 2000(50Hz) 69(152.32) <55 10 COOLPAK 445x395400(17.5215.5515.74) 445x395400(17.5215.5515.74) 10 2200(60Hz) 2000(50Hz) COOLPAK " " 1/2 1/2 " "

499

High Vacuum Pumps 500 Dimensional drawingfortheCOOLPAK 6000H/6200H/6000HD Compressor unitsCOOLPAK 6000H/6200H/6000HD COOLPAK 6000H/6200H/6000HD Cold HeadsandPumps,Water Cooling Compressor UnitsforPneumaticallyDriven Highly effective andevenmore - Advantages totheUser Silent andlowvibrationoperation - Excellent long-termreliability owing - pumps and OerlikonLeyboldVacuum cryo powerfulwhenconnectedwith through scroll compressors life components to themodulardesignandlong refrigerators 490 448 558 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 Lowcostofownership - - Small footprint - Almost maintenance-free Easyintegrationincomplexsystems - Globalpowersupplycompatibility - Simpleinstallationandoperation - faces due to24VDCorRS232Cinter-

62 52 528 36 628

628 257 122 72 64 230 273 415 439 leybold Lowpressure connection (outsidethread) leybold omtmeaue bar °C(°F) Cooling-water consumption Ambient temperature room temperature Helium systemfillingpressure at cold heads Number ofelectricalconnectionsfor Technical Data 4) 3) 2) 1) AdsorberCACP4000/6000 Spare parts Water coolingdischarge throttle withendsplice(AWG 10) Accessories 20m(70.0ft) withend splice(AWG 10) 10m(35.0ft) 20A/480 V, 3-pol+PE(AWG 12) NEMA plug, L16-20P, CEEplug, 32A/6h,3-pol+N+PE 3.5m(12.25ft) Power supplycable Connectionfor2coldheads(CP...HD) Connectionfor1coldhead(CP...H) (in.) without powersupplycable Compressor unit mm Weight kg Dimensions (WxHD) dB(A) Sound level(at1m(3.5ft)distance) Water connections (lbs) reigI frainCOOLPAK Ordering Information kW kW Self-sealing couplings Helium connections A A Remote control viainterface withthecoldheadwarm withthecoldheadcool V V Electrical powerconsumption withthecoldheadwarm withthecoldheadcool Operating currents alternative setting upon delivery °C(°F) Main voltage(3phase) Cooling-water entrytemperature OnlyforCOOLPAK 6000HD AlsosuitableforCOOLPAK 6000H(D) At14barfillingpressure Atacoolingwaterentrytemperature of 25°C(77°F) High pressure connection(outsidethread) 1) l/min Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 S22C S22C S22C RS232C 7.5to8.5 7.0to8.0 24VDCor RS232C 7.0to8.0 24VDC or 6.5to7.5 RS232C 24VDCor 7.5to 8.5 1/2 7.0to 8.0 RS232C 24VDCor 7.0to8.0 6.5to7.5 1t 3 2 o2 – 22to25 – 11to13 – – 840 840 – – 111 893 – – – 96 14 17 1615 1 1

4026 E80083 4026 E840002863 E840002863 E840002863 E840002863 0t1 – 0t 2 – ±10% 20to22 ±10% ±10% +1%/-10% – ±10% 200 200 10to12 470 ±10% – 839 – – PartNo. – PartNo. – 893 104(230) 95 PartNo. 104(230) PartNo. 104(230) 440x589558 440x589558 104(230) 440x589558 (17.32x23.1921.97) (17.32x23.1921.97) (17.32x23.1921.97) (17.32 x23.1921.97) 440x589558 HosenozzleDN12/ HosenozzleDN12/ HosenozzleDN12/ HosenozzleDN12/ 60 60 230 – 380-400 5.0 5.0 COOLPAK – – 840 840 – 112 – 1/2 0H 6 z 0H 60Hz 50Hz 60Hz 50Hz G 1/2 0H 6 z 0H 60Hz 50Hz 60Hz 50Hz 5t 4 +1t 14 + o+0(4 o+0) 5t 4 +1t 14 +5to+40(+41+104) +5to+40(+41+104) +5to+40(+41+104) +5 to+40(+41+104) +5 to+25(+41+77) E 840000133 E 840000133 840000V6004 840000V6001 " otietra G1/2 outsidethread 00H/60 D 6200 H 6000 H/HD 00H/60 D 6200H 6000 H/HD " " 1/2 1/2 4)

E 840000133

+5 to+25(+41+77) 40060 – 840000V6004 – 840000V6201 840000V6001 840000V6201 " otietra G1/2 outsidethread " " 1/2 1/2 4) – – –

+5 to+25(+41+77) " otietra G1/2 outsidethread " " 2) 1/2 1/2 3) 3) 840112 840112 840 111

+5 to+25(+41+77) " outsidethread 230 " "

3) 3) 501

High Vacuum Pumps 502 Dimensional drawingfortheCOOLPAK 6000HMD/6200HMD Compressor unitCOOLPAK 6000HMD/6200HMD Variable coldheadmotorspeed - Long maintenance-free periodof - - UL approved - Low noise - Selectable voltages Can becontrolled remotely - Simple tooperate - - Compact Advantages totheUser COOLPAK 6000HMD/6200HMD Heads andPumps,Water Cooling Compressor UnitsforMechanicallyDrivenCold operation 490 448 558 Oerlikon Leybold Vacuum FullLine Catalog 2015/2016

62 52 528 36 628

628 257 122 72 64 230 0.5 WATT and COOLPOWER 150,130,4.2GM, 10 MD,butalsooldercoldheadslike driven displacers;i.e.COOLPOWER ing thecoldheadswith Serves thepurposeofindividuallydriv- 273 415 439 4.2ONEWATT. mechanically leybold leybold 0.5 WATT and4.2ONE WATT COOLPOWER 10MD,150,130,4.2GM, Connection cableforthecoldheads FL20LP-DN16(8f/8f) 20m(75.0ft)(Low-pressure) FL20HP-DN16(8f/8f) 20m(75.0ft)(High-pressure) FL9LP-DN16(8f/8f) FL9HP-DN20(8f/8f) FL6LP-DN16(8f/8f) FL6HP-DN20(8f/8f) mechanically drivencoldheads) Flexible pressure line(foroperating 200-230V/3-ph.60Hz±10% 200V/3-ph.50Hzor 460V/3-ph.60Hz±10% 400V/3-ph.50Hzor Compressor type Ordering Information Mains voltage 1) Water coolingdischargethrottle withendsplice(AWGAccessories 10) 20m(75.0ft) withend splice(AWG 10) 10m(35.0ft) 20A/480V, 3-pol+PE(AWG 12) NEMA plug, L16-20P, CEEplug,32A/6h,3-pol+N+PE 3.5m(12.25ft) Power supplycable 30.0m(105.0ft) 20.0m( Technical Data Also suitableforCOOLPAK 4000(D)/6000(D) 0 0 0 0 0 9.0 m( 9 m(31.5ft)(Low-pressure) 9 m(31.5ft)(High-pressure) 6 m(21.0ft)(Low-pressure) 6 m(21.0ft)(High-pressure) 0 0 75.0 ft) 31.5 ft) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 00HD 6200HMD 6000HMD COOLPAK 00HD 6200HMD 6000HMD COOLPAK 4003 E840000133 E840000133 840 – 112 4 1 840210 PartNo. 840210 – 840000V6202 – PartNo. 60Hz,200-230±10% 50Hz,200±10% 840000V6002 ForallotherTechnical Data,seeCOOLPAK 6000Hand6200 60Hz,460±10% 50Hz,400±10% 4 1 840211 840211 4 1 840217 840217 4 1 840218 840218 4 3 840230 840230 4 3 840231 840231 4 1 842110 842110 4 1 842112 842112 4 1 842114 842114 839 – 893 95 839 – 893 96 – 840 – 111 1) 1) 503

High Vacuum Pumps General Accessories for Compressor Units COOLPAK

Technical Data Length Connections on both sides (inside thread) High pressure line (HD) Low pressure line (ND)

Flexlines 1), 2) FL 4.5 (1/2", 1/2") 4.5 m (15.75 ft) 1/2" 1/2" FL 9.0 (1/2", 1/2") 9.0 m (31.50 ft) 1/2" 1/2" Adaptor Adaptor Accessories for Flexlines Outside thread (m) Inside thread (f) Adaptor for flexlines AD (1/2" m, 3/4" f) 1/2" 3/4" AD (1/2" f, 3/4" m) 3/4" 1/2" Connections Connections Outside thread (m) Inside thread (f) Elbow 1/2" for flexlines 1/2" 1/2" Isolating piece 1/2" for flexlines 1/2" 1/2" Connections on both sides Outside thread (m) Coupling 1/2 for " interconnecting two 1/2“ flexlines 1/2" Gas Distributors Gas Manifold - Connections required quantity At the compressor (inside thread) At the cold head (outside thread)

Gas manifold (1 piece each)

GD 2 (for dual operation) 2) 2 1/2" 2 x 1/2" GD 4 (for up to quad operation) 2) 2 1/2" 4 x 1/2"

Length

EL 4.5 extension cable for linking cold head and compressor unit 4.5 m (15.75 ft)

Ordering Information General Accessories

Part No. Flexlines 1), 2) FL 4.5 (1/2", 1/2") 892 87 FL 9.0 (1/2", 1/2") 892 88 Adaptor AD (1/2" m, 3/4" f) 892 89 AD (1/2" f, 3/4" m) 892 90 Elbow 1/2" 891 73 Coupling 1/2" 891 71 Gas manifold (1 piece each) GD 2 (for dual operation) 2) 840 253 (2x) GD 4 (for up to quad operation) 2) 840 254 (2x) EL 25 extension cable for linking cold head and compressor unit 2) 200 20 900 EL 4.5 extension cable for linking cold head and compressor unit 2) 893 74

All flexible pressure lines, adaptor pieces, bends, isolating pieces, line couplings and gas manifolds are equipped with self-sealing Aeroquip fittings and filled in the factory with high-purity helium gas (purity: 99.999%). The filling pressure is 16 bar

1) Minimum bending radius: 30 cm (11.81 in.) 2) Only suited for pneumatically driven cold heads and cryo pumps

504 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Refrigerator Cryostat based on the RDK 6-320

The RDK 6-320 basic unit includes the Advantages to the User COOLPOWER 5/100 T two-stage cold - Compact 1 head. Its high refrigerating capacity at low temperatures permits experiments - Very reliable 233 274.5 124 which previously could not be per- - Comprehensive range of formed by relying on refrigerators and acces sories from one source which required the use of liquid helium. - For installation in any orientation 42.5 The RDK 6-320 basic unit is a - Simple to operate complete system for measurements in ø30.2 - Short cooldown time the temperature range between 6 and - Cost-effective in long-term 320 K. experi ments since no liquid helium The COOLPOWER 5/100 T cold head is re quired is augmented by: 30° - Simple and rapid servicing through the use of the standard - Silicon diode for measuring the tem- High COOLPOWER 5/100 T cold head peratures at the second stage of the Pumps Vacuum cold head with pneumatic drive system for the displacer - Heater at the second stage of the cold head provided with overheating protection Typical Applications Basic unit RDK 6-320 - 11-way current feedthrough with - Cooling of samples and detectors matching external connector - Material research and testing - DN 25 KF pumpdown port - Spectroscopic applications - DN 160 ISO-K vacuum flange - Matrix isolation spectroscopy with neon and argon

General Remarks on Refrigerator Cryostats Isolating Vacuum Temperature Measurement Temperature Control A two-stage rotary vacuum pump will In order to avoid measurement errors The temperature at the second stage normally be adequate to produce an due to thermal resistances, the of the cold head (or that of the probe) isolating vacuum. However, this pump temperature at the sample should is controlled by heating against the should be equipped on the suction side preferably be measured by a second cooling effect produced by the with an adsorption trap and a isolation optional silicon diode which is installed refrigerator (while the cold head is valve. as close to the sample as possible. If running). possible it should be maintained at the If the application requires that the cold same tem perature level as that of the surfaces remain free of hydrocarbons, probe. we recommend the use of our small turbomolecular pump system PT 50 (see Catalog Part “Vacuum Pump Systems” Section “High Vacuum Pump Systems).

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 505 Optical Refrigerator Cryostat based on the RDK 6-320

Upgraded as an optical cryostat Supplied Equipment (option) the RDK 6-320 is tailor-made - Basic unit RDK 6-320 for experiments involv ing temperatures down to about 7 K. - Temperature attenuation disk out of Pb Sn - Sample holder out of Al 99.5 - Thermal radiation shield out of E-Cu - Vacuum jacket out of aluminum / stainless steel - Five exchangeable windows (four windows on the sides, one window in the longitudinal axis of the cryostat); two windows on the sides and the window in the longitudinal axis are made of SUPRASIL I, the two other windows are blanked off and are made of brass

Optical refrigerator cryostat RDK 6-320

88 ø26 36.4° ø15

ø80 ø60 317 269 Blank 88 panel ø130

4 ø26 SUPRASIL I window

Section through the window area

Dimensional drawing for the optical refrigerator cryostat

506 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold s tg ftecl ed K K Silicon diodefortemperature measurements 1ststageofthecoldhead 2ndstageofthecoldhead Temperature range Sensor cable,3m(10.5ft)long low temperature controller MODEL9700 Temperature measurement at2ndstagewith FL4.5(1/2",1/2") Flexlines Power supplycable 200V/50Hz;V, 230V/60Hz COOLPAK 6200H 400V/50Hz;470V/60Hz COOLPAK 6000H Compressor unit RDK6-320andExpansionKitROK Optical cryostatconsistingof Basic unitRDK6-320 m(ft) Weight kg to thecompressor unit bar Length oftheconnectioncable Lowpressure connection(outsidethread) Highpressure connection(outsidethread) Self-sealingscrewed connections He connections at room temperature (lbs) He fillingpressure etn otg VDC A W °C(°F) Permissible ambienttemperature Heating voltage Heating current Heating power atthe2ndstageofcoldhead Heater at the2ndstageofcoldhead Ordering Information Technical Data Oerlikon Leybold Vacuum FullLine Catalog 2015/2016

see Ordering Informationforthecompressor unitsCOOLPAK +5 to+40(+41+104) 4.5 (15.75)[included)] 840000V6201 840000V6001 RDK 6-320 RDK 6-320 28 to320 842 404 842 403 842 401 842 400 Part No. 13 (28.7) 6 to320 892 87 built-in built-in 1/2 1/2 16 50 50 1

" "

507

High Vacuum Pumps Accessories for Cryo Pumps / Cryogenics

Controllers and Monitoring Units for Cryo Pumps

Advantages to the User Typical Applications - Interface to external system - For automated operation of controller the COOLVAC cryo pumps of - For easy integration with external the ClassicLine system controllers - For safe pumping of hydrogen

System Controller COOLVAC SC

The intelligent COOLVAC system Design Features controller SC automatically controls - 1/4 19" rack module and monitors up to 30 COOLVAC pumps. - 3 height units (HU) Online monitoring, help functions and - Dimensions (W x H x D) a service interface for easy diagnostic 106 x 129 x 178 mm are just a few user friendly features. (4.17 x 5.08 x 7.01) It can be installed as a “stand alone - Operation through pushbuttons System controller COOLVAC SC system” or remote controlled via an interface. Supplied equipment - Network terminator (Part No. 400 000 114) - Hardware interlock plug (Part No. 400 000 133) - O modem adapter for connection to the PC

Technical Data COOLVAC SC

Operating voltage Supply through RS 485 C cable from COOLVAC PM

Dimensions (W x H x D) mm (in.) 106 x 129 x 178 (4.17 x 5.08 x 7.01) [1/4 19", 3 HU]

Ordering Information COOLVAC SC

Part No.

System controller COOLVAC SC 844 230

System controller COOLVAC SC with Profibus interface 844230V0004

508 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold uptpwr W mm(in.) Weight kg Dimensions (WxHD) Rack mounting Output power (lbs) leybold Power supplyPS Power SupplyPSforuptoTwo CryoPumps 1) forupto2cryopumps Power supplyPS V AC VA (optional 115VACispossible Supply voltage,factorypreset Power consumption,approx. Ordering Information Technical Data Please contactOerlikonLeyboldVacuum 1) ) Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 space. (not included)willfitintotheempty The systemcontroller COOLVAC SC pumps. and off ifrequired bythe thecompressorthe PSturns uniton Controlled viathesystemcontroller SC up to2COOLVAC pumps. supplies voltagetotheelectronics for motor, theelectricalheatersand provides thepowerforcoldhead The COOLVAC powersupplyPS 483 x135320(19.025.3112.60)[3/419",3HU] connected for doubleconnection for doubleconnection Through 19 230 ±10%,1phase 844 135 Part No. 10 (22.1) 2 x250 " installationframe PS 900 PS Dimensions(WxHD) - 3heightunits(HU) - Design Features Approximately 3m(10.5ft)long - Supplied equipment - 19 (19.02 x5.3112.60) 483 x135320mm mains cord " rackmodule 509

High Vacuum Pumps Power supply PS for up to Three Cryo Pumps

The COOLVAC power supply PS Design Features provides the power for the cold head - 19" rack module motor, the electrical heaters and the supplies voltage to the electronics for - 4 height units (HU) up to 3 COOLVAC pumps. - Dimensions (W x H x D) Controlled via the system controller SC 483 x 177 x 440 mm the PS turns the compressor unit on (19.02 x 6.97 x 17.32) Power supply PS and off if required by the connected - Single LED indicates correct direc- pumps. tion of rotation for the rotating field

Supplied equipment - 20 m (70 ft) long mains cord, fitted, without plug - 19" mounting brackets for rack mounting

Technical Data PS for multiple connection

Nominal voltage (3 phase) factory default V AC 3 x 200 + PE switchable to V AC 3 x 400 + PE 3 x 460 to 480 + PE

Voltage tolerance ± 10%

Frequency range Hz 47 to 63

Fusing Power switch

Ambient temperature range °C (°F) 0 to +40 (+32 to +104)

Protection type IP 20

Dimensions (W x H x D) [without handles] mm (in.) 483 x 177 x 440 (19.02 x 6.97 x 17.32) [19", 4 HU]

Weight (including cord) kg (lbs) 38.8 (85.65)

Ordering Information PS for multiple connection

Part No.

Power supply PS for up to 3 cryo pumps 844 235

510 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold COOLVAC ClassicLine, Single System Configuration

COOL C

5 3 High Vacuum Pumps Vacuum

2 SC S CSS

PM = Pump module (included with the pump) SC = System controller PS = Power supply 1 = e.g. Part No. 844 262 2 = e.g. Part No. 844 139 3 = e.g. Part No. 844 138 4 = Part No. E 400000323 (necessary only for COOLVAC 800 CL, 1500 CL, 2000 CL und 3000 CL) 5 = Part No. 844 141 6 = to be provided by the customer

Single System Configuration

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 511 COOLVAC ClassicLine, Dual System Configuration

Only for European mains voltages and for compressors suited for dual operation

COOLVAC COOLVAC # # 2

PM PM

3 3

5 4 4

2 COMPO C P

22 C

Dual System Configuration

512 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold COOLVAC ClassicLine, Dual and Multiple System Configuration

7 7 7

COOLVAC COOLVAC COOLVAC # # # 3

PM PM PM

8 1

8 8 High Vacuum Pumps Vacuum

3 C C 9 6 PC COMPO

PM = Pump module (included with the pump) SC = System controller PS = Power supply 1 = e.g. Part No. 844 262 6 = to be provided by the customer 7 = e.g. Part No. 844 256 8 = e.g. Part No. 844 252 9 = Part No. 844 265

Dual and Multiple System Configuration

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 513 Low Temperature Controller MODEL 9700

Technical Data MODEL 9700

Mains connection, 50/60 Hz V AC 85 to 240 Power consumption, max. W 150 Entry of data 3 x 4 membrane key pad Data memory EPROM Display Two line, 20 digit LED digital display Temperature measurement Sensors 2 x silicon diodes type D or 2 x silicon diodes Low temperature controller MODEL 9700 with standard temperature resistance characteristics Advantages to the User Measurement current μA 10 - Microprocessor controlled PID Measurement range K 1.5 to 450 controller Measurement range of the silicon diode type D K 1.4 to 325 K - Digital temperature readout in Kelvin - Control by means of counter heating Number of channels 2 - High control accuracy over the Resolution Simultaneous display of both channels en tire temperature range (1.5 to A/D converter resolution bit 24 450 K) Switching outputs 2 relays (n.o. and n.c. contacts) - Electric heating power up to 50 W Temperature resolution K 0.1 - Programmable heater power limit Temperature control PID controller - Generation of linear temperature Heating power, max. W 50 ramps Heating current, max. A 1 - Up to 50 program steps are Heating voltage, max. V DC 0 to 50 programmable Computer interface RS 232 C and IEEE-488 - Standard interface RS 232 C and IEEE-488 Permissible ambient temperature °C (°F) +10 to +30 (+50 to +86) - Data from two sensors can be Mechanical design/cabinet Table-top unit (8.5" x 3.5" x 12") displayed Dimensions (W x H x D) mm (in.) 215.9 x 88 x 304.8 - Analogue temperature outputs for [high H without feet] (8.5 x 3.5 x 12.0) both channels Weight kg (lbs) 2.3 (5) - Can be used in three operating Dimensions of the packaging mm 360 x 230 x 450 modes (W x H x D) (in.) (14.17 x 9.06 x 17.72) - Manual Weight (incl. packaging, approx.) - Program kg (lbs) 4.2 (9.3) - External computer control Length of mains cord m (ft) 2.5 (8.75)

Typical Applications Ordering Information MODEL 9700 - Temperature control at refrigerator cryostats Part No. Low temperature controller MODEL 9700 842 400 Sensor cable, 3 m (10.5 ft) long 842 401 Silicon diode type D with connection cable and miniature plugs 890 89

514 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold leybold RS 232Cinterface - Two triggerthresholds - Temperature readout between - 3-digitLEDdisplay - Supportsonesilicondiode - Advantages totheUser Low temperature measuringinstrumentMODEL211S MODEL 211S Low Temperature Measuring Instrument Temperature measurements oncryo - Temperature measurements on - Typical Applications 1 and450Kelvin and tocontrol pumpsystems pumps formonitoringtheirop cryostats e ra tion Oerlikon Leybold Vacuum FullLine Catalog 2015/2016 HV cable4-way withplug,10m(35.0ft)long kg HV cable2-way (lbs) MODEL 211S Low temperature measuringinstrument mA mm(in.) V Weight (includingpackaging),approx. Dimensions (WxHD) Mechanical design/housing °C(°F) Admissible ambienttemperature RS 232Cinterface Current Voltage Analog output Switched output Trigger thresholds K Power supplyvoltage Accuracy Resolution Temperature range Display Measurement current 1) DN16CF, 4-way UHV current DN25KF, feedthrough onaflange 2-way HV current -withoutcurrent feedthrough feedthrough onaflange micro withconnectingcableand plugs Silicon diode,typeD, withplug,10m withplug,10m UHV cable4-way Ordering Information Technical Data ForCOOLPOWERandCOOLVAC pumps (35.0ft) (35.0ft) long long 1) 1) 1)

μ A b) External adjustmentofswitchingthresholdsb) External 2 relays (n.c.andn.o.)30VDCat1A 5 VDCat1Athrough thesupplied 96 x48166(3.781.896.54) 100-240 VACpoweradaptor ±0.05 Kfrom 100to475K ±0.05 Kfrom 1.5to99.9K 0.001 Kfrom 1.4to99.9K 0.01 Kfrom 100to475K +15 to+35(+59+95) a) Temperature output MODEL 211S MODEL 211S Benchtop unit 200 19256 LED, 5-digits 1.4 to475 500 217 844 114 844 113 844 112 844 110 0.45 (1.0) Part No. 890 89 4 to20 0 to10 10 2

515

High Vacuum Pumps Temperature Sensor

In contrast to vapor pressure In systems which are degassed at high ther mo meters, electric temperature temperatures, silicon diodes can only sensors can be used for continuous be fitted after degassing has been measurements within a wide range com pleted. of temperatures. The silicon diode type D matches Silicon diodes offer a negative the low temperature display unit and tempe r a ture coefficient of resistance, the low tempe rature control unit i.e. their resistance drops as the MODEL 9700. temperature increases. The slope of the tempera ture/resistance character - Dimensional drawing for the silicon diode, type D istic and the absolute resistance are decisive regard ing the suitability of these diodes. The slope determines the sensitivity of the sensor and a high electrical resis tance permits accurate measurements while keeping the thermal load small (microwatts).

Standard characteristic of the silicon diode

Technical Data Silicon Diode Type D

Temperature range K 1.4 to 325

Temperature coefficient (dR/dT) qualitative Negative in the entire temperature range quantitative V/K Non-linear characteristic

Measurement current μA 10

Bakeable to °C (°F) +60 (+140)

Ordering Information Silicon Diode Type D

Part No.

Temperature sensor 890 89

Silicon diode with 4-way electrical feedthrough 200 20 694

Flange DN 16 ISO-KF 200 20 616

516 Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 leybold Safety Valve

Typical Applications 32 - Protecting sealed vacuum systems like cryo pumps, cryostats, lifting devices, for example against internal overpressures 28 - Mandatory for systems which are separated when cold, as a means of protection against over pressures

DN 16 KF

Dimensional drawing for the safety valve

Safety Valve Technical Data High Vacuum Pumps Vacuum

Responding pressure mbar 150 ± 40, over-pressure

Flow at 140 mbar l x h-1 500

Valve disk Spring loaded, with O-ring seal

Leak rate in the closed state mbar x l x s-1 (Torr x l x s-1) < 1 x 10-8 (< 0.75 x 10-8)

Connection DN 16 KF

Diameter mm (in.) 32 (1.26)

Material Steel 1.4305

Overall height mm (in.) 28 (1.10)

Weight kg (lbs) 0.3 (0.7)

Ordering Information Safety Valve

Part No.

Safety valve on DN 16 KF flange 890 39

leybold Oerlikon Leybold Vacuum Full Line Catalog 2015/2016 517 Sales and Service Germany Great Britain America Oerlikon Leybold Vacuum Japan Co., Ltd. Oerlikon Leybold Vacuum GmbH Oerlikon Leybold Vacuum USA Tsukuba Technical Service Center Sales, Service, Support Center (3SC) UK LTD. 1959, Kami-yokoba Bonner Strasse 498 Unit 9 Oerlikon Leybold Vacuum Tsukuba-shi, Ibaraki-shi 305-0854 D-50968 Cologne Silverglade Business Park USA Inc. Japan Phone: +49-(0)221-347 1234 Leatherhead Road 5700 Mellon Road Service: Fax: +49-(0)221-347 31234 Chessington USA-Export, PA 15632 Phone: +81-29 839 5480 [email protected] Surrey (London) Phone: +1-724-327-5700 Fax: +81-29 839 5485 www.oerlikon.com/leyboldvacuum KT9 2QL Fax: +1-724-325-3577 [email protected] Sales: [email protected] Oerlikon Leybold Vacuum GmbH Phone: +44-13-7273 7300 Sales: Malaysia Sales Area North Fax: +44-13-7273 7301 Phone: +1-724-327-5700 Branch Office Berlin [email protected] Fax: +1-724-333-1217 Oerlikon Leybold Malaysia Industriestrasse 10b Service: Service: Oerlikon Leybold Vacuum D-12099 Berlin Phone: +44-13-7273 7320 Phone: +1-724-327-5700 Singapore Pte Ltd. Phone: +49-(0)30-435 609 0 Fax: +44-13-7273 7303 Fax: +1-724-325-3577 No. 1 Jalan Hi-Tech 2/6 Fax: +49-(0)30-435 609 10 [email protected] Kulim Hi-Tech Park [email protected] Brazil Kulim, Kedah Darul Italy Aman 09000 Oerlikon Leybold Vacuum GmbH Oerlikon Leybold Vacuum Malaysia Sales Office South Oerlikon Leybold Vacuum Brasil Sales and Service: Branch Office Munich Italia S.r.l. Rod. Vice-Prefeito Hermenegildo Tonolli, Phone: +604 4020 222 Karl-Hammerschmidt-Strasse 34 Via Trasimeno 8 nº. 4413 - 6B Fax: +604 4020 221 D-85609 Aschheim-Dornach I-20128 Mailand Distrito Industrial [email protected] Phone: +49-(0)89-357 33 9-10 Sales: Jundiaí - SP [email protected] Fax: +49-(0)89-357 33 9-33 Phone: +39-02-27 22 31 CEP 13.212-315 [email protected] Fax: +39-02-27 20 96 41 Sales and Service: South Korea [email protected] [email protected] Phone: +55 11 2152 0499 Service: Fax: +55 11 99467 5934 Oerlikon Leybold Vacuum Oerlikon Leybold Vacuum Phone: +39-02-27 22 31 [email protected] Korea Ltd. Dresden GmbH Fax: +39-02-27 22 32 17 [email protected] 3F. Jellzone 2 Tower Service Competence Center [email protected] Jeongja-dong 159-4 Zur Wetterwarte 50, Haus 304 Bundang-gu Sungnam-si D-01109 Dresden Netherlands Gyeonggi-do Service: Asia Bundang 463-384, Korea Oerlikon Leybold Vacuum Sales: Phone: +49-(0)351-88 55 00 P. R. China Fax: +49-(0)351-88 55 041 Nederland B.V. Phone: +82-31 785 1367 [email protected] Floridadreef 102 Fax: +82-31 785 1359 NL-3565 AM Utrecht Oerlikon Leybold Vacuum (Tianjin) [email protected] Sales and Service: International Trade Co. Ltd. Service: Europe Phone: +31-(30) 242 63 30 Beichen Economic 623-7, Upsung-Dong Fax: +31-(30) 242 63 31 Development Area (BEDA), Cheonan-Si Belgium [email protected] No. 8 Western Shuangchen Road Chungcheongnam-Do [email protected] Tianjin 300400 Korea 330-290 Oerlikon Leybold Vacuum China Phone: +82-41 589 3035 Nederland B.V. Switzerland Sales and Service: Fax: +82-41 588 0166 Belgisch bijkantoor Phone: +86-22-2697 0808 [email protected] Leuvensesteenweg 542-9A Oerlikon Leybold Vacuum Fax: +86-22-2697 4061 B-1930 Zaventem Schweiz AG, Pfäffikon Fax: +86-22-2697 2017 Singapore Sales: Churerstrasse 120 [email protected] Phone: +32-2-711 00 83 CH-8808 Pfäffikon [email protected] Oerlikon Leybold Vacuum Fax: +32-2-720 83 38 Warehouse and shipping address: Singapore Pte Ltd. [email protected] Riedthofstrasse 214 India 8 Commonwealth Lane #01-01 Service: CH-8105 Regensdorf Singapore 149555 Phone: +32-2-711 00 82 Sales: Oerlikon Leybold Vacuum Singapore Fax: +32-2-720 83 38 Phone: +41-44-308 40 50 India Pvt Ltd. Sales and Service: [email protected] Fax: +41-44-302 43 73 No. 82(P), 4th Phase Phone: +65-6303 7030 [email protected] K.I.A.D.B. Plot Fax: +65-6773 0039 France Service: Bommasandra Industrial Area [email protected] Phone: +41-44-308 40 62 Bangalore - 560 099 [email protected] Oerlikon Leybold Vacuum Fax: +41-44-308 40 60 Indien France S.A.S. [email protected] Sales and Service: Taiwan Parc du Technopolis, Bâtiment Beta Phone: +91-80-2783 9925 3, Avenue du Canada Spain Fax: +91-80-2783 9926 Oerlikon Leybold Vacuum F-91940 Les Ulis cedex [email protected] Taiwan Ltd. Sales and Service: Oerlikon Leybold Vacuum [email protected] No 416-1, Sec. 3 Phone: +33-1-69 82 48 00 Spain, S.A. Chunghsin Rd., Chutung Fax: +33-1-69 07 57 38 C/. Huelva, 7 Japan Hsinchu County 310 [email protected] E-08940 Cornellà de Llobregat Taiwan, R.O.C. [email protected] (Barcelona) Oerlikon Leybold Vacuum Sales and Service: Sales: Japan Co., Ltd. Phone: +886-3-500 1688 Oerlikon Leybold Vacuum Phone: +34-93-666 43 11 Headquarters Fax: +886-3-583 3999 France S.A.S. Fax: +34-93-666 43 70 Shin-Yokohama A.K.Bldg., 4th floor [email protected] Valence Factory [email protected] 3-23-3, Shin-Yokohama [email protected] 640, Rue A. Bergès Service: Kohoku-ku, Yokohama-shi B.P. 107 Phone: +34-93-666 46 11 Kanawaga 222-0033 F-26501 Bourg-lès-Valence Cedex Fax: +34-93-685 43 70 Japan Phone: +33-4-75 82 33 00 [email protected] Sales: Fax: +33-4-75 82 92 69 Phone: +81-45-471-3330 [email protected] Fax: +81-45-471-3323 [email protected] [email protected]

Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 0 Fax: +49-(0)221-347 1250 www.oerlikon.com/ [email protected] leyboldvacuum