National Aeronautics and Space Administration 2018 2004 2019 - 2020 2018 , IR telescope: 1991 1997, 1998 & 2003 Orbiter: Microwave 2009 ISS: SAM (Spacecraft Spectral and Photometric 2018 NASA's Upper Balloon Observations Instrument (MIRO); measured LRO (Lunar Atmosphere Monitor): Imaging Receiver (SPIRE) 2020, PIXL: diffractive Atmosphere of Millimetric gases from comet Churyumov- Reconnaissance next generation gas and silicon fan out boards for spot array generators, Satellite Extragalactic Radiation Gerasimenko, the first Orbiter), Diviner Lunar chromatograph — mass 2011 2012-2014+ the ASIC; looking back to the 2-D computer-generated (UARS) and JPL's and Geophysics microwave device in space to Radiometer Experiment: spectrometer; astronaut Mars Laboratory, AVIRIS-NG & HyTES: earliest moments of our universe, hologram (CGH) gratings, Microwave Limb (BOOMERANG): study a body. thermopile detectors; health and safety. 2009 SAM, Tunable Laser curved diffraction investigating Dark Energy. X-Ray maps of Martian Sounder (MLS): bolometers measured identified places that Herschel Space Spectrometer (TLS): gratings); terrestrial rock chemistry. first proof of CMB to show the 2004 could preserve ice 2019 - 2020 , Spectral tunable diode lasers; ecology observations. 2018 chlorine monoxide Universe is ‘flat.” Observing System for billions of years. SISTINE (Suborbital and Photometric detailed methane on Mars. Spacecraft Fire 2018 destroying ozone. (EOS) Microwave Limb Imaging Spectrograph for 1996 Imaging Receiver 2009 AVIRIS-NG & HyTES: Experiment (Saffire): , Sounder (MLS): first THz 2005 2010 Transition region Irradiance The High Altitude (SPIRE): enabling TacSat-3 spacecraft’s Quantum Well Infrared Combustion Product SHERLOC: gratings for the heterodyne radiometer Mars Reconnaissance Carnegie Airborne from Nearby ): Ozone Measuring and detectors; found primary payload, the Photodetector (QWIP) Monitor (CPM) Raman and fluorescence in space; measured Orbiter (MRO), Compact Observatory (CAO) Secondary mirror over- Educational Rocket: distant infrared- Advanced Responsive Focal Plane Arrays instrument, measure spectrometers; looking stratospheric molecules, with Reconnaissance Imaging and National Ecological coated for unmatched UV advanced delta-doped luminous galaxies. Tactically-Effective (FPAs); terrestrial specific fire products at Martian organics and radiometers & other devices. Spectrometer for Mars Observatory Network reflectivity; to validate CCD to measure ozone Military Imaging ecology observations. for astronaut safety. minerals. (CRISM): curved gratings; (NEON) received MDL observations. concentration in Earth’s 2008 2009 Spectrometer, or defined Gale Crater fabricated micromachined 2018 upper atmosphere. landing site. Chandrayaan-1, Herschel Space ARTEMIS, with MDL Mineralogy Observatory, fabricated gratings slits and e-beam fabricated 2012 EMIT (Earth Surface 2019 2020 1995 2001 2005 Mapper (M3): HIFI (extremely delivers processed triple-blaze convex gratings MICA (Magnetosphere Mineral Dust Source 2018 TIME (the Tomographic Mars 2020, Kuiper Airborne Mission: MDL coated Mars Reconnaissance curved gratings high-resolution far- information to the for instruments to address Ionosphere Coupling in Investigation), ISS: WFirst (Wide-Field Infrared Ionized Carbon Intensity Perseverance Mars Observatory (KAO): and shape verified >25% of the Orbiter (MRO), Mars for the imaging Infrared heterodyne warfighter on the ground a need for macroscale the Alfvén Resonator) imaging spectroscopy Survey Telescope), Hybrid- Mapping Experiment) is rover, Send Your Name heterodyne receivers; solar wind collector arrays; to Climate Sounder: spectrometer; first spectrometer): enabling within 10 minutes, measurements that reveal Sounding rocket, to study instrument, measuring Lyot : pupil-plane the first instrument for to Mars campaign; first detection of understand the evolution of uncooled IR thermopile signs of surficial detectors; found water following a single-pass the structural, functional aurorae: low voltage mineral compositions mask; directly image and spectral imaging array 10,932,295 names on interstellar space the solar nebula over the last detectors for Mars water in the moon’s vapor on Ceres in the collection opportunity and organismic composition delta-doped CCD array for of Earth’s dust sources characterize and to investigate the early three silicon chips, molecular water. 4.6 billion years. atmosphere analysis. sunlit area. belt. on a specified target. of Earth's ecosystems. auroral electron detectors. for climate prediction. debris disks in star systems. history of the universe. Public outreach. 1990 2000 2005 2010 2015 2020

1995 2000 2003-2008 2007 2009 2009 2010-2012 2012-2016 2014 2018 2019 2020 Space Shuttle: Earth Observing 1 Black Brant IX Sounding Mars Lander, Planck, HIFI (extremely SOFIA (Stratospheric Balloon-borne Large BICEP, BICEP2 & SPIDER, balloon-borne PREFIRE (Polar Radiant Clipper, Mapping Office of Naval Research Signature Chips (EO-1): Hyperion Rocket, Johns Hopkins U.: MECA (Microscopy high-resolution far- Observatory for Far Aperture Submillimeter BICEP3, Antarctic experiment for CMB Energy in the Far Infrared Imaging Spectrometer for Milliwave Telescope: fabricated, high resolution delta-doped CCD in Electrochemistry, Infrared heterodyne Infrared Astronomy): Telescope (BLASTPol): telescopes for polarization: filters, Experiment), first Europa (MISE): slits and focal plane of aluminum packaged, hyper-spectral the Long-Slit Imaging and Conductivity spectrometer): heterodyne receiver; 3 arrays of 280 CMB polarization: antenna components, cubesat IR and far-IR grating with a custom KIDs fabricated on delivered and imager; E-beam Dual Order Spectrograph Analyzer): detectors; enabled high mapped/detected bolometric 250, 350, TES polarization TES Arrays; seeking measurements of Earth’s groove profile tailored to crystalline silicon tiles; flown: Public grating; technology (LIDOS) on three missions. technologies for soil precision photometry interstellar molecules. & 500 µm detectors; bolometers; testing primordial gravity waves. atmosphere from space: permit a single focal to be mm wavelength imaging outreach. validation mission. sample analysis. and polarimetry of galaxies producing for early universe fully custom thermopile used; looking for ocean when visible observation the CMB. the FIR/submm cosmic variance. 2017 detector array. habitability. is obscured. 2000 background . Stratospheric Terahertz Space Technology Observatory (STO-2), 2018 2019 2020 Research Vehicle (STRV- balloon-borne radio- : Deep Space BICEP Array 30th anniversary of 1D): Quantum Well telescope; room- Optical Communications (Background Imaging successful operations Infrared Photodetector temperature, multi-pixel, (DSOC): Superconducting of Cosmic Extragalactic and deliveries from (QWIP) focal plane frequency-multiplied local nanowire single photon Polarization): TES the Microdevices array; testing new oscillator: Life Cycle detectors (SNSPDs); focal plane; Antarctic Laboratory (MDL). technologies in . of Interstellar Medium. improve communications telescopes testing for performance 10 to 100 times. early universe cosmic variability.

30 years for NASA MDL – A STORY OF CONTINUOUS ACHIEVEMENT In celebration of MDL’s 30th anniversary, the 2020 Annual Report design draws on the vibrant colors and 2005 Mars Reconnaissance Orbiter (MRO), In 1990, within a year of its opening, the Microdevices bold shapes of 1990s designs. The concept highlights Compact Reconnaissance Imaging Spectrometer the optimism and influence of digital technology for Mars (CRISM): curved gratings; defined Laboratory (MDL) was producing innovative solutions to that so strongly characterized that decade and Gale Crater landing site. Mars Climate Sounder: 1 undoubtedly contributed to the emergence and uncooled IR thermopile detectors for Mars the challenges presented by NASA mission requirements. success of MDL. atmosphere analysis. Not only did MDL meet these immediate demands, but its many world-class scientists, engineers and technicians also undertook research to develop new approaches that, in many cases, were disruptive technologies. These advances enabled the achievement of previously unattainable scientific goals.

The MDL staff continues this legacy today. NASA for 3 Decades of Innovation

JPL Microdevices Laboratory | 2020 Annual Report Beginning

The Orion nebula is a close neighbor in our Milky Way galaxy, only 1,500 light- the great years from Earth. venture Although visionary, the leaders Lew Allen, Jr. Terry Cole Carl Kukkonen responsible for the origin of the Microdevices Laboratory (MDL) came into existence in April 1990, and MDL in April 2020, we celebrated its 30th could not have imagined how anniversary. Although the COVID-19 pandemic meant it would go on developing that the celebration was virtual, it was nonetheless enthusiastic. The technology has changed in 30 years, from strength to strength but the ethos and the ability to produce unexpected, in the succeeding 30 years. innovative technology has stayed the same. This milestone anniversary is a suitable time to look back at the history of MDL, understand how its values have been perpetuated to the present and envision how they will continue into the future. Originally, MDL was a new laboratory facility, the jewel in the crown of the Center for Space Microelectronic Technology (CSMT), a JPL Center of Excellence. The CSMT arose from discussions in the early 1980s between the Caltech Board of Trustees and NASA to identify MDL HAS BEEN A KEY an emerging area in which JPL could take the lead for NASA. JPL already had expertise through the Advanced Microelectronics Program, established in 1983 at NASA’s PLAYER IN JPL’S EFFORTS request. Dr. Lew Allen, the JPL Director, asked his chief technologist, Dr. Terry Cole, to organize this new effort. TO CREATE AND DELIVER Dr. Cole envisioned a multidisciplinary approach to investigate many areas and produce a range of products, including microelectronic devices. To produce such HIGH-RISK, HIGH-PAYOFF devices, new cleanroom facilities and state-of-the- art equipment were needed; thus arose the need for TECHNOLOGY FOR NASA’S a new laboratory for the embryonic CSMT. Dr. Cole’s ambitious but realistic vision paved the way for future success. At this stage, Dr. Carl Kukkonen, who already 2 FUTURE PLANETARY, had a distinguished career at the Ford Motor Company, 3 was brought in as CSMT Director. Dr. Kukkonen was an able leader and was awarded the NASA Exceptional , Achievement Medal in 1992. AND EARTH SCIENCE A major change occurred in 2007, when MDL’s dispersed parts were first brought together into a single MISSIONS, AS WELL In January 1987, the construction of the new NASA-funded MDL organization centered on its unique laboratory facility. Its building was started. [left-right] Marvin Goldberger, Caltech president first director was Dr. Jonas Zmuidzinas. Thus, MDL’s 30- (1978-1987); Lew Allen, JPL Director (1982–1990); Burton Edelson, year history of success resulted from its nurturing by NASA’s Associate Administrator for Space ; and General Drs. Cole and Kukkonen, its subsequent stewardship by AS NASA’S OTHER Billie J. McGarvey, NASA’s Facilities Division Director. NASA for 3 Decades of Innovation MDL directors and deputy director, and strong support STRATEGIC NEEDS. from JPL directors.

JPL Microdevices Laboratory | 2020 Annual Report MDL HAS MADE SEMINAL CONTRIBUTIONS AS A RESULT This OF THE DEDICATION AND HARD is WORK OF MANY TALENTED MDL SCIENTISTS, TECHNOLOGISTS, AND RESEARCH STAFF. For the past 30 years, through the dedication and hard work of many talented scientists, technologists, and research staff, JPL’s Microdevices Laboratory (MDL) has made fundamental contributions to diffractive optics, detectors, nano- and microsystems, lasers, focal planes with breakthrough sensitivity from deep UV to submillimeter, life detection in extreme environments, and MEMS.

Through this research and development, MDL has produced novel, innovative, and unique components and subsystems enabling remarkable achievements in support of NASA’s missions and other national priorities. We are excited to have been a part of this important work and look forward to many years of continued success. Visit us online at microdevices.jpl..gov

4 5 3 Decades of Innovation for NASA for 3 Decades of Innovation

JPL Microdevices Laboratory | 2020 Annual Report MDL IS A JPL INSTITUTIONAL MDL’s FACILITY CHARTERED TO CREATE, commitment DEVELOP, DELIVER,AND INTEGRATE th We are excited to celebrate the 30th anniversary This year, we celebrate the 30 anniversary of MDL and of the Microdevices Laboratory at JPL and the many its many extraordinary contributions and achievements. NOVEL MICRODEVICES AND CRITICAL important contributions that MDL devices This year has also been unprecedented and challenging and technologies have made to NASA missions. with the arrival of the COVID-19 pandemic. MDL, along with much of JPL, was shut down in . However, as MICRO DEVICE TECHNOLOGIES TO Operations began at MDL in the spring of 1990 with a evidence of its importance to NASA missions, MDL was vision to develop new microelectronic devices that were restarted in early May with a rigorous set of new safe to ENABLE OR ENHANCE INSTRUMENTS not available elsewhere. Over the next three decades, work procedures and processes to facilitate critical flight MDL exceeded all expectations, contributing broadly mission device development. We are now advancing and deeply with original and enabling devices benefiting to deliver these devices for our customers. AND MISSIONS THAT BENEFIT the full spectrum of NASA missions. These contributions included novel spider web bolometers for measuring Over the past three decades, MDL has fulfilled its cosmic radiation in the PLANCK mission, multi-octave commitment to invent, develop, and deliver novel JPL AND NASA. gratings in the M3 instrument for detection of water microdevices and critical microdevice technologies that compounds on the illuminated surface of the Moon, enable new capabilities, instruments, and missions for and the advanced tunable lasers of TLS for measuring NASA. The key to this success is best exemplified by methane on the surface of Mars. the picture on page 4, taken at the February all-hands meeting: this community of scientists, technologists, More recently, MDL has contributed key optical and other professionals is the driving force behind components for astrophysics instruments on JWST and MDL. The group is committed to supporting the WFIRST, as well as for the PIXL and SHERLOC instruments JPL Directorates to develop and deliver the devices on the Mars Perseverance rover. An innovative calibration needed for a broad set of current and near-term NASA target was developed for ECOSTRESS and enabling missions. In parallel with fulfilling current commitments, devices are being developed for the EMIT and PREFIRE MDL is investing in new ideas, technologies, and Earth missions. MDL is fabricating single photon counting research to enable the next generation of novel devices detectors for the Deep Space Optical Communication for NASA. These future investments are guided by the demonstration, as well as elements of the Combustion biannual Visiting Committee review, the Directorates’ Product Monitor to benefit human space flight missions. needs, and interactions with universities and other Within MDL, we are also developing new technologies advanced technology laboratories. for in situ life detection, chemical analysis in space, and Within this annual report, you will learn more about the working to develop a range of new device types for NASA. 30-year history of MDL, our current activities, and our MDL embodies the Laboratory’s pioneering spirit and unique investments for an exciting future filled with advanced blend of scientific and engineering talent. I invite you to devices and innovations for discovery and exploration. learn more about MDL’s exceptional three-decade legacy. ROBERT O. GREEN MIKE WATKINS Director, Microdevices Laboratory Director, Jet Propulsion Laboratory

6 7 3 Decades of Innovation for NASA for 3 Decades of Innovation

JPL Microdevices Laboratory | 2020 Annual Report MDL IS MAKING INVESTMENTS IN PEOPLE, EQUIPMENT, AND TECHNOLOGIES TO ENABLE NEW CLASSES OF DEVICES THAT Contents WILL SUPPORT EXCEPTIONAL 10 MDL Coronavirus Challenge 12 MDL TECHNOLOGIES: MISSIONS FOR NASA IN THE PREPARING FOR THE NEAR FUTURE 14 Send Your Name to Mars 2025 AND 2035 TIMEFRAMES. 15 ONR Telescope 16 MISE 18 TLS Returns High-Impact Science 20 HyTI BIRD FPA 22 ASTHROS Balloon Mission 24 Lunar Trailblazer Mission 26 LCMS Lunar Instrument 28 SISTINE Suborbital Observatory 29 EMIT on ISS 30 The Roman Space Telescope 32 LEFT THEIR MARK 34 JPL & MDL: COLLECTIVE SUCCESS 36 MDL ABIDING STARS 38 MDL VISITING COMMITTEE 40 UNUSUAL ROUTES TO SUCCESS 44 TALKING TO A LARGER AUDIENCE 46 INNOVATING FROM THE GET GO 48 CORE COMPETENCIES 50 Diffractive Optics 52 Lasers & Integrated Photonics 54 UV-Visible Detectors 56 Mid-infrared Detectors 58 MEMS & Microsystems 59 Superconducting Devices 62 Submillimeter Devices 64 Next Generation Fabrication Technologies 66 Chemical Analysis & Life Detection 68 8 70 Tunable Laser Spectrometers 9 73 Facility & Capabilities 75 APPENDICES 75 Publications 78 New Technology Reports 78 Patents 79 MDL Equipment Complement

JPL Microdevices Laboratory | 2020 Annual Report MDL coronavirus Some of the dozens of JPL engineers involved in creating challenge the COVID-19 ventilator prototype. First, all acutely hazardous gases were shut off at their source. Second, all chemicals that were in process were When COVID-19 arrived, MDL poured into waste containers. Finally, all ALD chemical was very well prepared. The lab precursors were shut off and isolated. This Safe Idle state was maintained via safe daily monitoring by three individuals survived the lockdown thanks on separate shifts (one person at a time on site) who to many valiant efforts, and lthough 2020 is a year of great celebration at MDL, checked facilities systems values versus setpoints, as well as the status of safety monitors. recovery is already underway. Awe would be remiss if we did not acknowledge the MDL VENTILATOR CONTRIBUTION effects of the COVID-19 pandemic. The virus’ global reach The Safe Idle state was maintained successfully for 53 DL scientists and engineers specialize in building also affected MDL, and it was likely the greatest challenge days. Some routine cleanroom maintenance activities were Mdevices for spacecraft, but the COVID-19 pandemic the JPL staff has collectively faced. We owe a monumental performed as long as they required only very few people shifted their focus sharply away from distant galaxies debt of gratitude to many people, including JPL senior who could be adequately socially distanced during the work. and toward intensive care units. With the country’s clear, management; the MDL staff, particularly the MDL Support VITAL SUPPORT AGAINST COVID-19 For example, during the idle period, the wet scrubber was urgent need for ventilators, an MDL team came together Group; and especially the MDL team members who came serviced and some regulators were replaced. to design and produce a prototype ventilator that could be PRIMARY in during the shutdown to check on the lab. manufactured and distributed quickly. In just 37 days, the MDL Safety: James Lamb, Amy Posner, Mark Mandel On May 8, NASA headquarters granted permission for team working on the Ventilator Intervention Technology MDL Facilities: Ramzy Rizkallah The senior management at JPL, ahead of any directives from MDL to make a small, phased reopening. Given the critical NASA headquarters, made the safety of all staff their first Accessible Locally (VITAL) project designed, built, and MDL Equipment: James Wishard, Rick Leduc timelines associated with the WFIRST Coronagraph priority and planned accordingly for as many as possible tested a prototype ventilator specifically for COVID-19 Instrument project deliverables, MDL was permitted to patients. The ventilator can be readily built from parts that SECONDARY / CONTINGENCY to work “Safer at Home.” In line with this plan, the staff held have up to 6 people in the cleanroom at a time working a practice session for working remotely from home. The are already in the supply chain, and it can be easily modified MDL Safety: Michael Martinez on two specific tasks: fabrication of interconnects for to function in environments ranging from standard intensive MDL Facilities: Roopinderjit Bath, Toney Davis session included the first MDL User Forum/MMR held via the mission’s deformable mirrors and fabrication of WebEx. However, the situation changed very quickly as care units to field hospitals. The FDA granted Emergency MDL Equipment: Mike Fitzsimmons, Chuck Manning, occulting mask designs for the instrument testbeds. It COVID-19 escalated in southern California. Less than a week Use Authorization for VITAL on April 30 and authorized a Matt Dickie, Frank Greer, James Wishard—for most central took only two business days of cleanroom restart activities modified version of the device on June 4. On May 29, NASA later, and with only one day’s notice, it was announced that (facilities, safety, and equipment) to go from Safe Idle to processing equipment (RIEs and Deposition systems), from Tuesday, March 17, JPL would be moving to mandatory selected eight US manufacturers to begin mass-producing Mike Fitzsimmons—steppers and spin developer systems, fully operational. Only one piece of equipment, a Dektak8 VITAL units, which will soon be helping patients in need. telework; therefore, live semiconductor processing would profilometer, did not survive the restart, a testament Matt Dickie—for DRIEs, LPCVD, SEMs, furnace systems, stop. JPL would be closed to all but approximately 10% of to the value of avoiding a full shutdown. One MDL technologist who contributed to VITAL from Day & RCA wet bench, Frank Greer—for ALDs (John Hennessy employees. Those allowed in were required for the Mars 1 was Florian Kehl, who was tapped for his background in as back-up) precursor source shut-downs, 2020 mission and could not work from home or were staff After the partial restart, processing in MDL was very sensors and for a unique experience in Switzerland working and Black Si Cryo Etcher. performing laboratory security and maintenance functions. successful, with nearly half of the equipment in full use. on horse and camel ventilators at the Swiss Center for Extreme care was taken to ensure the safety of personnel Several deformable mirror test articles were delivered to Electronics and Microtechnology (CSEM). Horses, and, MDL TASK-SPECIFIC EQUIPMENT during the last day of work by shutting off cleanroom internal and external partners, and several coronagraph EBeam: Dan Wilson, Rich Muller in the Middle East, camels, are very valuable animals, but entry air showers and supplying liberal amounts of hand masks were provided to the testbeds. A lesson learned when they are anesthetized or undergoing surgery, their III-V MBE: Cory Hill, Arezou Khoshakhlagh sanitizer to MDL scientists as they attempted to complete from this shutdown has been that MDL must plan for large lungs often collapse. To solve this problem, CSEM Si MBE: April Jewell, Alex their devices. Completed devices could then be tested by more than just facilities and equipment startup: the human built a ventilator that could provide the large volumes UHV Lesker: Rick Leduc, Bruce Bumble collaborators in other states and countries—and sometimes element of restarting lab work after a two-month absence is and pressures of air that horses and camels require. FC300: Brian Pepper even in the JPL staff members’ own homes. also important. For example, fixtures and supplies must be CNT: Valerie Scott unpacked, and the regular routine of loading and calibrating Florian’s experience, combined with his background in Once the cleanroom processing was safely and successfully systems must be restored. biomedical engineering, made him a natural fit for the VITAL 10 complete, the MDL Support Group put MDL into a Safe Idle Design and Production Teams. As part of these teams, he was 11 state, with many pieces of equipment left powered on. MDL MDL’s system operated extremely well in the face of responsible for selecting a high-flow pneumatic valve, as well as is very safety oriented and would fail safe in the event of a the pandemic. The staff did a fantastic job under these sensors for flow, barometric pressure, and oxygen. He was also disaster, but the Safe Idle state was preferable to a complete unimaginable circumstances, finishing tasks rapidly to involved with the production of an injection-molded part. One shutdown because many of the types of semiconductor prepare for the shutdown. Approvals were obtained for challenge in his role was to secure the supply chain, for unlike processing equipment in MDL do not recover well from specific staff to enter at specific times. The safety assurance most MDL projects, the goal of VITAL was to build not one or being powered off. For example, process exhaust pumps maintenance staff still had to work, and they showed two devices but rather tens of thousands. Additionally, can have chemical byproduct residues that congeal when exemplary dedication. We especially acknowledge the MDL the device could not conflict with the medical market. Patterned photoresist the pump cools down, resulting in the motor seizing up staff who came to the lab every day to check its status in (left) and metal test permanently. After a full shutdown, a month or more would standby mode, even as JPL was generally closed to all but 10% The VITAL team included several foreign nationals, including pattern (right) produced be needed to return the cleanroom to a normal operating of the workforce. Overall, MDL weathered the unexpected Florian, reflecting the involvement and support of the entire

by photolithography to NASA for 3 Decades of Innovation define deformable mirror state. In going into Safe Idle state, a few additional steps impact of COVID-19 well, and from the viewpoint of early June, world. Florian has always been proud to be part of MDL, electrode connector pads. were taken to reduce the amount of intervention required the lab looks forward confidently to increasing occupancy and but thanks to his involvement with VITAL, he has never in the event of a disaster. returning to full capacity as soon as it is safe to do so. been prouder.

JPL Microdevices Laboratory | 2020 Annual Report MDL technologies preparing for the near The founders of MDL and its predecessor, future the CSMT, foresaw the need for products, approaches, materials, and microdevices whose performance could dramatically outstrip the state of the art at any time. Developments aimed at fulfilling that demand continue.

The various projects in the current MDL portfolio have one thing in common: they are all examples of technology for spaceflight, aimed at helping NASA achieve successful outcomes in its missions and other significant scientific advances.

12 13 3 Decades of Innovation for NASA for 3 Decades of Innovation

Cygnus approaches MEP thruster the International being assembled. Space Station.

JPL Microdevices Laboratory | 2020 Annual Report 960-MKID detector array. Send ONR The thin line meandering top to Brad Pitt shows off his bottom over the entire array is the “boarding pass” for Mars feedline used to read out the MKIDs. with Jennifer Trosper, your name the Mars 2020 project systems engineer. telescope JPL and Caltech are developing a to Mars Horn array block. The 960 feed 3,840 detector, 140 GHz imaging horns are drilled with a spline Gaining immortality by traveling profiled drill bit to produce an camera paired with a 1.5 meter array of wideband feedhorns. into space, albeit virtually, has changed A single chip is dwarfed by a crossed Dragone telescope. perceptions of space exploration. scanning electron microscope (SEM) video image of the letters and boarding pass. Naval Research Lab produced the world’s first space radio tele- scope in 1951, making the first radio detections from Mars, Venus, n keeping with a JPL tradition that started with the Star The chips were placed on a plate commemorating NASA’s he Office of Naval Research (ONR), more than most Jupiter, and Saturn (1956 – 1958). IDust spacecraft in the late 1990s and was continued by “Send Your Name to Mars” campaign and were installed on Tusers, wants to see clearly in adverse weather many other missions, MDL was asked to use its electron the Perseverance Mars rover on March 16, 2020, at NASA’s conditions, so they came to Caltech and JPL to improve their beam lithography capability to stencil millions of names in Florida. The three fingernail-sized vision with MDL technology. For this terrestrial application, In the full-scale 960-Microwave KID (MKID) Detector Array, submitted by the public onto silicon chips to generate chips, affixed to the upper-left corner of the plate under Kinetic Inductance Detector (KID) arrays enable passive the thin line winding from top to bottom over the entire array excitement about and worldwide participation in a clear plastic cover, feature the names of the 10,932,295 imaging at millimeter wavelengths that penetrate optical is the feedline used to read out the MKIDs. The horizontal the NASA’s Mars 2020 Mission and its Perseverance people who participated, along with the essays of the 155 obscurants such as fog. However, the same technology “bands” represent the inter-digitated capacitor section of Rover. Signing up for the “Send Your Name to Mars” web finalists in NASA’s “Name the Rover” contest. The huge can be used to look farther afield: by allowing for larger- each MKID, with the size of the capacitor varied to produce campaign, which opened on May 21, 2019, came with international interest and web participation in the “Send format, background-limited arrays, KIDs can improve an resonant frequencies between 200 and 600 MHz. The souvenir boarding passes and “frequent flier” points. Your Name to Mars” campaign led to two of the eight instrument’s overall sensitivity for cosmic microwave inductive sections of the MKID, which are too thin to be This public engagement campaign aimed to highlight Webby Awards that NASA received in 2020, one background measurements. seen in the photo, are located between each capacitor pair. missions involved in NASA’s journey from the Moon to for Best Social Community Building and Engagement, A vertically oriented inductor couples to one capacitor, Mars. Miles (or kilometers) were awarded for each “flight,” as well as the People’s Voice award in its category. The focal plane of the 1.5 m diameter ONR telescope is and a horizontally oriented inductor couples to the other with corresponding digital mission patches available for composed of aluminum KIDs fabricated on crystalline silicon capacitor, thus absorbing the incoming radiation in a download. The Mars Public Engagement Team collected tiles. The tiles contain 960 KIDs and are approximately polarization-selective way for each MKID. The image over 10.9 million names in every language. MDL’s Electron The work was funded by the NASA Mars 100 mm x 100 mm in size. KID pairs, each sensitive to an of the Horn array block shows the 960 feed horns drilled Beam Fabrication Team was responsible for converting Public Relations Office led by Carolina orthogonal linear polarization, are coupled to a waveguide/ with a spline-profiled drill bit to produce an array of Carnalla-Martinez. MDL contributors were bitmaps into tiny readable text and using the electron beam feedhorn machined from aluminum. A single block with wideband feedhorns. Radiation incident on the feedhorn Pierre Echternach, Rich Muller, James 480 waveguides/feedhorns arranged in a hexagonal array is focused onto the detector array. Two MKIDs per system to stencil the submitted names onto three silicon Wishard, Matt Dickie and Chuck Manning. chips. Using a deposition and lift-off process, they created close-pack configuration is paired with each detector tile. feedhorn are used to detect orthogonal polarizations. lines of text smaller than 75 nanometers. Initial tests with prototype KID tiles showed the expected noise and optical performance. Full-scale tiles have now The use of the KID array allows for many more pixels been fabricated with >90% yield and are currently being than would be practically feasible with other detector characterized. The imager is intended for terrestrial technologies while achieving noise levels at fundamental applications, and an initial demonstration with the ONR limits. KIDS are relatively straightforward to manufacture, telescope was planned for early 2020. With relatively minor typically requiring few fabrication steps, and they are A plate was designed to include changes to the KID design, it could also be optimized compatible with a readout multiplexing technique that allows the 3 chips. Within the sun’s rays for astronomical applications. for thousands of detectors to share a single readout channel, is a message reading “explore giving them an advantage in large arrays. as one” in Morse code.

Primary 14 mirror The MKID technology that enables the camera 15 to function was originally developed by Peter SEM image examples of some Flat mirror Secondary Day and Rick Leduc at MDL in collaboration of the millions of text characters mirror with Prof. Jonas Zmuidzinas at Caltech. which included over 100 modern and historic scripts.

8.2 mm x2.50 k x2.5 k SE(UL)

MDL used an electron beam to stencil the submitted names Cryostat onto silicon chips. Three different Overall schematic of the 140 GHz KID imager. NASA for 3 Decades of Innovation chips were needed to fit The 1.5 m diameter primary mirror can be driven all of the text (inset). to point in any viewing direction.

JPL Microdevices Laboratory | 2020 Annual Report Europa Clipper

MISE will assess the habitability of Europa’s ocean by understanding the inventory and distribution MISE of surface compounds. MISE is a near-infrared imaging uropa has long been of astrobiological interest because spectrometer on board the Europa Eit has a deep ocean and a thick surface layer of ice that appears to be constantly renewed from below and recycled Clipper mission to Jupiter’s moon into the ocean. The surface has areas that are rich in salts Europa. It uses a diffraction grating and contain complex organic compounds. These areas will be among the targets for investigation on the Europa Clipper and slit designed and fabricated at mission, which is due to launch later this decade and will orbit MDL. MISE will examine Europa’s Europa to assess whether it could support life. The spacecraft will perform 45 flybys of Europa at closest-approach altitudes surface composition and relate it of 1,700 miles to 16 miles (2,700 kilometers to 25 kilometers) to the habitability of its ocean. above the surface. The Mapping Imaging Spectrometer for Europa (MISE) is one of nine instruments that NASA selected in 2015 for the mission. It will take images in reflected infrared light, and spectral analysis will produce maps of salts, organic matter and ices. The MISE spectrometer will operate at global (≤ 10 km), regional (≤ 300 m) and local (~ 25 m) scales. Telescope mirrors: An artist’s impression of the Europa Clipper TM1 polish complete, MISE is being developed collaboratively by JPL and the spacecraft above the surface of Europa with ready for coating. Johns Hopkins University’s Applied Laboratory Jupiter in the background. The dark features are most likely fractures colored by , (APL). The instrument evolved from JPL’s Discovery Moon comprising many similar types of complex Mineralogy Mapper (M3) on Chandrayan-1 and APL’s Compact organic molecules. E-beam fabricated Reconnaissance Imaging Spectrometer for Mars (CRISM). concave flight grating (JPL) with shaped efficiency to The instrument works at F/1.4 and covers a spectral range equalize signal over entire from 0.8 to 5 µm (near-infrared to mid-infrared). It has wavelength range. 10-nm spectral resolution, an instantaneous field of view of 250 rad/pixel and a swath width of 300 active pixels. Slit Grating μ Mapping the composition of specific landforms is critical to understanding surface and subsurface geologic processes, MISE including recent or current activity. The 3–5-µm spectral spectrometer range is critical to detecting organics because weak C-C optical design. bonds (e.g., octane) in some aliphatic hydrocarbons contrast sharply with the stronger C=C (e.g., benzene) and C≡C bonds Dyson lens found in other hydrocarbons. These differences provide Partial melt an approach to distinguish classes of hydrocarbons and to Warm ice or liquid Grating differentiate biological molecules from their abiotic equivalents. The MISE high-optical-throughput, high-uniformity push- 16 broom imaging spectrometer is enabled by MDL’s electron 17 Spectrometer beam lithography capabilities, which were used to shape MISE’s gratings and slits. The MISE grating has a custom groove profile tailored to the MISE system’s response through the entire spectral range, which permits a single Telescope focal plane array detector to be used. The precise slit produced by electron beam lithography is central to achieving MISE’s uniformity.

Liquid water JPL’s Diana Blaney is the Principal Investigator, MISE will investigate the geologic NASA for 3 Decades of Innovation and Karl Hibbitts, APL, is the Deputy Principal Flight slits (black Slit history of Europa’s surface and search and gold side) at 200x. Investigator. for areas that are currently active.

JPL Microdevices Laboratory | 2020 Annual Report The Curiosity rover used SAM to detect seasonal changes Spring Summer Autumn Winter in atmospheric methane in the Gale Crater. The methane signal has been observed for nearly three TLS Martian years (nearly six Earth years), peaking each summer. returns Surface release high- Abiotic Microbial production or production

Surface uptake Surface uptake impact Microseepage Fissures Cracks Faults Subsurface reservoirs of methane created from water-rock chemistry and/or microbial activity. These include methane trapped in clathrates or magnetic chambers. science TLS has paved the way for semi- conductor lasers to play an important role in future missions, This subframe image shows Curiosity took this image with its with applications in spectroscopy, the covers in place over two Mastcam on Feb. 10, 2019 (Sol 2316). sample inlet funnels of the The rover is currently exploring a region laser altimeters, and metrology. rover’s SAM instrument suite. of Mount Sharp nicknamed “Glen Torridon” that has lots of clay minerals.

s part of the Sample Analysis of Mars (SAM) suite, on Earth (compared to six times those in the Martian Athe JPL’s Tunable Laser Spectrometer (TLS) uses atmosphere). These data indicate that at an earlier time, infrared semiconductor lasers designed and fabricated at the Gale Crater region had significant liquid water, with a MDL specifically for sample analysis at 2.78 and 3.27 µm global equivalent layer of ~150 m in depth. Measurements wavelengths. These lasers are used to make key of atmospheric CO2 isotope ratios on Mars at unprecedented measurements of Martian gas abundances and targeted accuracy of a few parts per thousand further show that the isotope ratios, both in the atmosphere and as evolved Martian atmosphere has changed little in 4 billion years. from heating solid samples. In addition to high-sensitivity The carbon-13 and carbon-12 results form a balance determination of atmospheric methane abundance, TLS between atmospheric loss and carbonate formation, is particularly suited to measuring very precise isotopic a key result for models of planetary evolution. Dr. Webster holds a laboratory ratios in stable species, such as D/H and 18O/16O in water, duplicate of the Mars TLS 13C/12C and 18O/17O/16O in carbon dioxide and 13C/12C in Now in its seventh year on Mars, the TLS instrument is instrument to be used evolved methane. These measurements have informed us performing exactly as it did on Earth when it was delivered for testbed studies. for integration into the Curiosity rover; there has been no of atmospheric composition and loss, transport, seasonal cycles, geological processes and planetary evolution. deterioration in performance or capability. As a result of its success, TLS instruments have been proposed for several TLS has achieved noteworthy successes reported in several New Frontiers and Discovery planetary missions, including SAM instrument suite that will analyze the chemical ingredients papers in Science magazine; these publications have as Venus and Saturn entry probes and as part of a Ceres 18 in samples of Martian atmosphere, received international attention in hundreds of news stories lander for surface chemical analysis. Miniaturized versions 19 rocks and soil during the mission worldwide. Findings include detection of low background of TLS instruments are going to the International Space of NASA’s Mars rover Curiosity. levels of methane on Mars at 0.4 parts per billion by volume Station (ISS), are part of the NASA astronaut space suit TLS . Tunable laser spectrometer. (ppbv) that occasionally spike to higher levels, once as high and Orion respiratory monitor, and have been deployed for QMS. Quadrupole mass spectrometer. GC. Gas chromatograph. as 20 ppbv. Monitoring the sub-ppbv background level over several commercial applications, such as methane detection SSIT. Solid sample inlet tubes. approximately six years has revealed a repeatable seasonal for the Pacific Gas and Electric Company (PG&E) and cycle in nighttime methane. hydrogen sulfide detection in Chevron pipelines. Moreover, recent daytime measurements show that the background seasonal cycle is a nighttime phenomenon, an The laser technology integral to the performance Infrared camera image shows of TLS was originally developed at MDL by the first 8 of the 40 bounces observation supported by surface-atmosphere modeling team led by Drs. Rui Yang and Siamak Forouhar. of the TLS lasers on the Herriott studies. TLS measurements of D/H in water evolved from Dr. Chris Webster is the Principal Investigator. NASA for 3 Decades of Innovation cell far mirror. Each spot is rock pyrolysis show values that are only three times those about 1 mm in diameter.

JPL Microdevices Laboratory | 2020 Annual Report The enlarged inset shows a novel nanostructure flat lens fabricated behind each detector. In future, these kind of flat lenses can be used The manufacturing process involves detector array HyTI to increase the detector sensitivity. processing, read out integrated circuit hybridization and epoxy backfilling, substrate removal via diamond point turning, and low-temperature FPA characterization. High- BIRD FPA operability, high-quantum-efficiency, high-uniformity, and high-yield long-wavelength infrared FPAs with elevated temperatures and low dark currents are selected for the anti- The Hyperspectral Thermal reflective coating process to reduce the reflection between Imager (HyTI) is a test of the interface of the vacuum and FPA surface. the technology that will be This process increases absorption of infrared light, as well as the signal-to-noise ratio, which allows operation with used in the next generation enhanced sensitivity. The packaging of the FPA into an of low Earth orbit imaging integrated cooler assembly requires precision and a specialized manufacturing process because a - spectrometers. Perot wedge filter is mounted just above the FPA surface. Alignment and mounting of FPA to ceramic carrier, cold shield to ceramic carrier, and ceramic carrier to cold finger are critical steps. Finally, referencing of the FPA optical center and orientation relative to an external structure he Hyperspectral Thermal Imager (HyTI) eases the alignment of the FPA and telescope. Tis an instrument technology demonstration funded by NASA’s Earth Science Technology This no-moving-parts hyperspectral imaging technique Office under the In-Space Verification of Earth is unique for its collection of the spectrum at each pixel, Science Technology program. The HyTI payload which corresponds to a target with a fixed area on Earth. is designed to fit in a 6U CubeSat planned for low The mission’s objective is to analyze the collected data Earth orbit. A Long-Wavelength Infrared (LWIR) cube (spatial, spectral and temporal) to obtain important Barrier Infrared Detector (BIRD) will serve as the Illustration depicting information on hydrological dynamics and land surface the HyTI CubeSat temperature. Importantly, this information can then be used detector for HyTI’s Focal Plane Array (FPA) and in low Earth orbit. enable the HyTI mission. BIRD technology, which for water resource management for agricultural applications. was developed and patented by JPL, is based Because the CubeSat and Earth are in relative motion, on band-gap engineering of multilayer growth of the ground speed and frame rate will be synchronized so III-V semiconductor compounds. The technology that the adjacent pixel along the direction of motion will makes it straightforward and cost effective to image the same fixed-area target as the previous adjacent design, grow and process the material and exploit An Integrated pixel. However, the Fabry-Perot wedge filter between the band-gap adjustability of high-performance Dewar Cooler the telescope and FPA introduces a varying optical path detectors. BIRDs are grown on GaSb substrates Assembly (IDCA). difference on the FPA along the direction of motion. From the at MDL using a molecular beam epitaxy machine. collection of frames, an interferogram can be constructed for The resulting wafers, where the detectors are each target. A fast transform of the interferograms grown on the substrates, are screened, and better- allows for the extraction of spectral radiance information performing wafers are manufactured into FPAs. and constructions of spectral images of the target. FPA mounted on cold HyTI is a joint project in collaboration with Drs. Robert Wright, finger before IDCA Paul Lucey, and Luke Flynn at the University of Hawaii; integration process. Dr. Miguel Nunes at the Hawaii Space Flight Laboratory; A HyTI focal plane array and Dr. Tom George at SaraniaSat, Inc. NASA awarded the mounted onto a leadless HyTI proposal in 2018 and selected it in 2019 to fly in late 2021 chip carrier. or later as part of its CubeSat Launch Initiative. 20 21 HyTI FPAs are being developed by Drs. Sarath Gunapala, Sir (Don) Rafol, Ting, Alexander Soibel, Brian Pepper, Sam Keo, Arezou Khoshakhlagh, and Cory Hill at JPL. 3 Decades of Innovation for NASA for 3 Decades of Innovation

JPL Microdevices Laboratory | 2020 Annual Report ASTHROS ASTHROS has been selected by NASA to fly from Antarctica in 2023 and will be the first long-duration balloon mission balloon led and managed by JPL. At its heart is a camera with MDL-produced terahertz

This Hubble image shows the spiral heterodyne technology. galaxy Messier 83, also known as the Southern Pinwheel Galaxy. At 15 million light years from Earth, mission this galaxy has presented many explosions and may have a double nucleus at its core. or millennia, humans observed the heavens with the By combining high-resolution mapping with large- Fnaked eye. Although did not invent the telescope, scale mapping, we will begin to understand how in the early 1600s, he became the first to systematically different stellar feedback mechanisms affect ionized use one for astronomy. Astronomical and astrophysical gas over a wide range of spatial scales in the Milky observations have since benefited from other similarly Way and the M83 galaxy. transformational improvements in technology. For example, satellite-borne telescopes can be used to avoid the problems The ASTHROS payload will consist of a 4-pixel, dual- inherent to viewing through Earth’s atmosphere and to polarization, dual-band cryogenic superconducting observe various parts of the electromagnetic spectrum. heterodyne array camera for high-spectral- However, such missions come with very high costs and resolution imaging at 1.4-1.5 THz and 2.4-2.7 THz. long lead times. Balloon-borne telescopes operating in The instrument design features a straightforward the stratosphere offer substantial returns with substantially receiver architecture based on MDL-produced state- lower costs and lead times, and they can improve our of-the-art ultra-broadband GaAs Schottky diode- understanding of how stars form within and outside the based frequency-multiplied local oscillator sources galaxy by greatly expanding the pool of available data. and NbN hot electron bolometer (HEB) mixers. Using a patented device topology, the ASTHROS receivers The Astrophysics Stratospheric Telescope for High will be able to cover many key spectral lines with a Spectral Resolution Observations at Submillimeter- single receiver, enormously increasing the scientific wavelengths (ASTHROS) builds on years of development return. ASTHROS will fly a 4-K-class low-power of THz high-power sources and heterodyne array receivers cryocooler for the first time and thus will not require at MDL. It is a 2.5-m (SOFIA-like size) balloon-borne liquid helium, enabling extended-lifetime missions. observatory that will make the first detailed spectrally resolved high-spatial-resolution 3D map of ionized gas By flying the latest MDL-produced THz heterodyne in galactic and extra-galactic star-forming regions via technology, ASTHROS will serve as a pathfinder for simultaneous observations of the 122 mm (2.459 THz) the Origins Space Telescope (OST), future NASA probe-class missions, or small satellite missions. Terahertz Schottky diode based and 205 mm (1.461 THz) fine structure lines of ionized sources and superconducting HEB nitrogen. It provides a low-risk, low-cost stepping stone ASTHROS is the first long-duration balloon mission mixers developed at MDL can be for future heterodyne missions. led and managed by JPL. JPL will also build the used to observe star-forming regions with very high spectral resolution. A 21-day Antarctic flight in 2023 will focus on high-angular- payload. Jorge Pineda, Jose V. Siles and Jonathan resolution mapping of two template galactic star-forming Kawamura of JPL are the Principal Investigator, 22 regions and the entire disk of the M83 barred spiral galaxy. Project Manager and Systems Engineer, respectively. 23 The resulting data will complement existing datasets from MDL engineers Choonsup Lee and Bruce Bumble SOFIA, WISE, Herschel, Spitzer and HST. ASTHROS will will be fabricating components essential be capable of tuning to nearby spectral lines (OH, HDO, to the submillimeter camera. HF, HD, CO) for target-of-opportunity observations. One compelling target is the HD 112 mm (2.674 THz) line that traces the gas mass distribution in protoplanetary disks. ASTHROS partners include the John ASTHROS’ resolution corresponds to 0.2 pc and 0.35 pc Hopkins University’s Applied Physics MDL designed and fabricated instrumentation Laboratory, Arizona State University is scheduled to fly via a high-altitude stratospheric at 122 mm and 205 mm, respectively, for a source 4 kpc and the University of Miami. balloon for three weeks in the skies above Antarctica in from the sun. This high angular resolution will enable the December 2023, offering new astronomical observational NASA for 3 Decades of Innovation opportunities in the far-infrared via supercooled resolution of structures ~750 times smaller than the typical superconducting high-spectral-resolution detectors. size of star-forming regions (~150 pc).

JPL Microdevices Laboratory | 2020 Annual Report Lunar he goal of the Lunar Trailblazer mission is to understand Tthe form, abundance and distribution of water on the Moon and the lunar water cycle. It is a SmallSat mission that will use the High-resolution Volatiles and Minerals Moon trailblazer Mapper (HVM3) instrument, which is an evolution of the Moon Mineralogy Mapper (M3). M3 was one of two instruments that NASA contributed to India’s first mission to the Moon, Chandrayaan-1, which launched on October 22, 2008. Like mission M3, an imaging spectrometer that discovered and mapped Radiator assembly pervasive water/hydroxyl (OH) signatures on the Moon, HVM3 will help to understand HVM3 builds on grating technology designed, developed and fabricated at MDL. the distribution of and change M3 paved the way for confirmatory observations and re- in volatile abundance over analyses by other instruments. However, its limited spectral time on the lunar surface. range, instrument sensitivity, and spatial coverage left several key questions unanswered. The new HVM3 instrument is an Offner imaging spectrometer based on a JPL developed Ultra S/C interface bipod (x3) Compact Imaging Spectrometer (UCIS) design and will resolve many of these issues. First, it will determine whether observed

signatures are due to adsorbed molecular H2O, H2O in ice Baseplate form, or OH. HVM3’s spectral range extends to 3600 nm, which captures the extended absorption shapes of OH,

Shroud water ice, and molecular H2O and will allow for their direct Cryocooler detection and mapping. Second, it will determine if and where permanently shadowed regions (PSRs) harbor water ice. Recent M3 data suggest that PSRs contain water ice. If true, this finding could guide

The High-resolution Volatiles and Minerals Moon Mapper future scientific sampling or resource extraction efforts on 3 instrument is a pushbroom shortwave infrared (SWIR) imaging the lunar surface. HVM aims to answer this question with spectrometer. With a spatial resolution of 70 m/pixel over a 20 km unprecedented sensitivity. It will enable direct observations swath width and a spectral resolution of 10 nm over a spectral within PSRs using terrain-scattered solar illumination, for which μ 3 range of 0.6 to 3.6 m, HVM is optimized for the detection it will provide SNR ≥ 50 in discriminative spectral intervals. of volatiles to map OH, bound H2O, and water ice. Third, HVM3 will help to understand the contribution of thermal emission effects to estimates of water abundance. The image shows the distribution of surface ice at the Moon’s HVM3’s extended spectral range will capture the entire south pole—blue represents the ice locations. The ice is concentrated at the darkest and coldest locations, in absorption feature with both ends of the continuum, providing the shadows of craters. M3, aboard the Chandrayaan-1 unprecedented power to fit reliable and accurate thermal spacecraft, launched in 2008, was uniquely equipped emissivity curves to allow unbiased estimations of lunar water to confirm the presence of solid ice on the Moon. deposits. Trailblazer’s Lunar Thermal Mapper instrument provides simultaneous direct temperature measurements at longer wavelengths. Finally, HVM3 will help to understand the distribution of and change in volatile abundance over time across the lunar surface. The observation plan includes repeat revisits to selected polar and midlatitude locations at many phase angles. 24 Measuring the lunar surface’s volatile deposits at multiple 25 times of the solar day will reveal any diurnal variability in Slit E-beam water availability. Figure A shows the optical layout: it is made grating entirely of reflective surfaces and uses a dispersive grating Spectrometer with efficiency tuned to improve signal in the low-illumination, longer-wavelength regions of the spectrum. Telescope Bethany Ehlmann of JPL and Caltech is the Principal Investigator, and MDL’s Director Robert Green is one of the Co-Investigators. Other JPL Filter and The HVM3 spectrometer and telescope,

detector array scientists involved include David Thompson, NASA for 3 Decades of Innovation an Offner design with reflective optical another Co-Investigator and the HVM3 Instrument elements and a grating tuned to improve Scientist, and Diana Blaney, a collaborator. the signal in long wavelengths.

JPL Microdevices Laboratory | 2020 Annual Report Solar wind composition: 95% H+, 4%He2+, 1% minor ions C+, N+, O+, Ne+, Mg+, Si+, Fe+ Solar wind protons Solar wind electrons Solar photons h ν LCMS Sources and “hop” he Moon is not dead; it even has a water cycle. dynamics of transport in TThe JPL mass spectrometer has been improved the Lunar atmosphere. upon for more than 25 years. The latest development, lunar the Lunar CubeSat Mass Spectrometer (LCMS) funded Escape orbit under the NASA Development and Advancement

of Lunar Instrumentation (DALI) program, is being Escape orbit developed at MDL to investigate the Moon’s vanishingly Source atoms Photoionization instru- thin atmosphere. h ν A - The Moon was long thought to have no atmosphere. Ambient atoms e Gravity However, many processes are now known to contribute A+ to the lunar atmosphere, which contains water vapor ment h ν and changes in a diurnal cycle. The lunar atmosphere’s Solar wind alphas Future missions to the Moon composition and density result from a balance between Meteoritic impact production and loss; the balance varies over time. The will need to address fundamental lunar atmosphere is primarily created via solar wind knowledge gaps about the sputtering, thermal desorption, photo-desorption, radioactive decay, and meteoric bombardment. It is lost Ar, He, Th, Po, Rn, Pb, K abundance and sources of lunar via kinetic gravity escape, freezing out, photoionization Photodesorbed Na, K Radioactive decay products Sputtered atoms Impact vapor capture by the solar wind or Earth’s magnetosphere, resources and ascertain the and bonding to chemically active surface atoms. The potential of the lunar surface key questions are: how does each of these processes The same technology is currently in the descendent of In contrast, linear quadrupole MS instruments detect only vary with time, and how might they relate to the to provide resources for future VCAM, the Spacecraft Atmosphere Monitor (SAM), which those charge-to-mass ratios they are programmed to visit in characteristics of the solar wind? These questions was developed by and is being operated from within MDL “mass-hopping” mode. All other created ions are lost. LCMS human exploration. became even more significant after surface water and has been on the ISS since 2019. has two major assemblies: The Sensor Head Assembly, was discovered on the Moon, and especially given built by JPL, and the Main Electronics Assembly, built the possibility of ice in permanently shadowed regions LCMS will be the first lunar instrument that can identify and by the University of Michigan’s Space Physics Research (PSRs) and at the poles. quantify species in the lunar atmosphere with sufficient Laboratory (SPRL). The QIT Sensor is housed in a vacuum sensitivity and precision to answer key scientific questions The instrument will measure the concentrations of assembly constructed entirely of titanium and alumina about the lunar atmosphere. It can measure 10 molecules together with small quantities of non-magnetic stainless volatiles at different times of the lunar day to test, 19 per cc. For context, 1 cc of air on Earth contains 2.9 x 10 steel fasteners. A “wireless” design holds it together in calibrate, and refine models for the mobility of water and molecules. LCMS uses a QITMS with an unsurpassed other volatiles on the lunar surface. These models will compression mode, ruggedizing it against launch, entry and combination of low mass (7 kg), low power (max 30 W with landing environments. All the electronics boards (Sensor provide constraints on understanding polar ice sources. 3 heater bulb on), high sensitivity (0.003 counts/cm /sec), Head and Main Electronics Assembly) are built with flight- Although we now know that the Moon The instrument will also help understand how landed and ultra-high precision (0.5% for noble gas isotope ratios like parts and designed to operate in a vacuum over a broad has an extremely thin atmosphere, it spacecraft perturb the fragile lunar atmosphere. The over 24 hours) that is tenfold better than the demonstrated was not known in 1972 when Harrison analytical core of the instrument is a quadrupole ion temperature range up to 80°C. “Jack” Schmitt walked on its surface. performance of any previous ITMS. trap mass spectrometer (QITMS) that has been under Dr. Stojan Madzunkov of JPL is the Principal Investigator development at JPL since 1994. It operated successfully Since 2003, JPL’s Mass Spectrometer group has been of the project and is collaborating with Dr. Dan Fry of the on the International Space Station (ISS) from March developing a three-dimensional QITMS (also known as , a Co-Investigator and PI of LETS. 2009 to November 2011 as the main component of the a “Paul trap” MS) for space applications. QITMS is the Co-Investigators at SPRL are building the MS’ Main Vehicle Cabin Atmospheric Monitor (VCAM) instrument. preferred MS type: its fundamental design and operating Electronics Assembly. Jurij Simcic, Dragan Nikolic and parameters make LCMS the most sensitive QITMS-based Murray Darrach are the MDL Co-Investigators. mass spectrometer type in existence. The ionizing electron beam creates ions at the center of the 3D trap, where trapping efficiency is maximal and higher-order electrical For this DALI project, the MS is being teamed that could distort the mass resolution are minimal. with the Linear Energy Transfer Spectrometer (LETS), which will monitor the radiation The QITMS is a “parallel” MS, meaning all ions created environment of the surface. 26 are also measured. 27

10 cm

Dust cap analog 8U total Modeled LCMS measurements of the lunar daytime surface exosphere show that it can make the first Kr 30 cm

and Xe abundance measurements to 4% accuracy on 78Kr NASA for 3 Decades of Innovation and 0.5% on 84Kr within 20 minutes on the lunar surface. Lunar CubeSat MS; The unique The SAM The VCAM bottom cover off. “wireless” QITMS. instrument. system.

JPL Microdevices Laboratory | 2020 Annual Report SISTINE EMIT Arid land regions of the Earth that will be measured by suborbital on ISS EMIT. observatory EMIT will use an imaging spectrometer mounted to the exterior of the ISS Snaptshot of to determine the mineral composition of mineral dust The Suborbital Imaging Spectrograph of differing natural sources of dust aerosols worldwide. composition being for Transition region Irradiance from emitted into the Earth’s atmosphere. Nearby Exoplanet host stars (SISTINE)

was successfully launched for its first August 11, 2019, from the White n the arid land regions of Earth, fine-grained The EMIT instrument is a high-optical-throughput Dyson flight on August11 , 2019, carrying Sands Missile Range (NM). Shown below is NASA/CU 36.346 UG, Imineral dust is routinely blown into the atmosphere, imaging spectrometer that measures from the visible to the an enabling MDL technology. Aug 11 2019, WSMR. where it reacts with many elements of the Earth system. short wavelength infrared portions of the electromagnetic Depending on the mineral dust’s composition, it can absorb spectrum with fine spectral sampling. The key minerals SISTINE aims to study how the light and heat the atmosphere or reflect light back to space (hematite, goethite, illite, vermiculite, calcite, dolomite, outer envelope of stars is dispersed and cool the atmosphere. Today, the effect of mineral dust montmorillonite, kaolinite, chlorite, and gypsum) needed for back into the interstellar medium by on cooling or heating is uncertain on both the local and the EMIT science objectives have unique spectral signatures observing the science target NGC global scales. Modern Earth system computer models in this range. The EMIT imaging spectrometer requires hen searching for life on exoplanets, it is essential 6828, a planetary nebula (Inset). Wto avoid false positive results. For example, oxygen are ready to address this question but lack accurate a specialized concave reflection grating, optical slit, and in Earth’s atmosphere is produced by plants and is a information on surface mineral composition. zero-order light trap that are fabricated using MDL’s unique sign of life. However, on a different planet, ultraviolet No previous or current observatory offers simultaneous combination of equipment and processes. spectral coverage of these important UV wavelengths. The science objectives of the Earth Surface Mineral Dust (UV) radiation from that planet’s star could break down Source Investigation (EMIT) are focused on understanding EMIT is currently under development at JPL and is planned carbon dioxide in the atmosphere to release oxygen. Owing to the frequent yet aperiodic and abrupt time variability of these sources, simultaneous observation and reducing uncertainty about the role of mineral dust to launch to the ISS in 2022, where it will begin making Therefore, to unambiguously interpret observations of aerosols in heating or cooling the Earth at the regional measurements and achieve NASA’s science objectives. All exoplanets, it is equally critical to examine their stars. of spectral tracers probing a range of stellar atmospheric layers is essential. and global scales. EMIT spectroscopic measurements will be calibrated and The SISTINE sounding rocket studies stars to find which made available to the wider science community to support gases are valid signs of life. Observing in the far UV is not Flares can alter UV luminosity by factors of 10 on timescales NASA has selected EMIT to close this knowledge gap. a broad range of additional Earth science studies. easy, but it has taken a major step forward due to MDL of seconds, and even non-flaring states show stochastic On the International Space Station (ISS), EMIT will use technology. SISTINE’s 100 mm convex secondary mirror fluctuations of ~30% per minute timescales. Furthermore, state-of-the-art imaging spectroscopy enabled by MDL was overcoated at MDL using MDL’s capabilities in atomic Hubble Space Telescope observations typically require two components to measure the spectral signatures of the Robert Green is the Principal Investigator, and JPL Co-Investigators are Olga Kalashnikova and layer deposition of AlF3. This coating resulted in high instrument configurations to simultaneously acquire both minerals in arid land regions. Vincent Realmuto in the JPL Science Division. reflectivity in the far UV, including the challenging Lyman Lyα and C IV observations. UV range, which is below the short wavelength cutoff Zero order Grating of the Hubble Space Telescope. The MDL-produced SISTINE was designed specifically to address these light trap technical hurdles and to provide the most robust stellar 1 Kaolinite Al4[Si4O10[(OH)8 coating gave SISTINE a spectroscopic capability 100 0.8 Goethite FeO.OH irradiances for state-of the–art terrestrial atmosphere Dolomite CaMg(CO3)2 times that of Hubble. 0.6 Illite (K,H3O)(Al,Mg,Fe)2(Si,Al)4O10[(OH)2,(H2O)] models. SISTINE provides a broad bandpass (100 – 160 0.4 Vermiculite (Mg,Fe+2,Al)3(Al,Si)4O10(OH)2.4H2O Montmorillonite (Na,Ca)0.33(Al,Mg)2Si4O10(OH)2.nH2O SISTINE was successfully launched for its first flight, Reflectance nm) to simultaneously cover O VI through C IV, employs 0.2 Gypsum CaSO4.2H2O a calibration test. The small count rate decrease (see the 0 Calcite CaCO3 advanced optical coatings providing sufficient sensitivity Slit 400 700 1000 1300 1600 1900 2200 2500 Hematite Fe2O3 figure above) was as the payload re-entered the atmosphere to measure a suite of lines in a single observation, and Wavelength (nm) Chlorite (Mg,Fe)3(Si,Al)4O10(OH)2-(Mg,Fe)3(OH)6 on the downward leg of the flight). The experiment, on a utilizes a new imaging spectrograph design providing Spectral signatures of minerals that Black Brant 9 rocket, flew to 161 miles of altitude, observed the spatial resolution needed to robustly subtract are the focus of the EMIT investigation. 28 Lyman-alpha (Lyα) signals with a good count rate, and geocoronal Lyα and to resolve nearby binary exoplanet 29 descended by parachute allowing instrument recovery. host star systems. High-throughput imaging With this successful initial test, a follow-on science flight is spectrometer design enabled planned for the summer of 2020. The goal of this flight is Successful use of a high-reflectivity UV mirror and UV by MDL components. to measure the UV radiation environment in the habitable detector for SISTINE will help test this technology on zones around nearby stars. More than one UV wavelength a relatively modest mission for use in future orbiting must be examined to make scientific deductions. . These missions will complement the EMIT instrument design for observations to be made by the James Webb Space the International Space Station. Telescope (JWST) scheduled to launch in 2021. SISTINE’s Kevin France of the University of Colorado UV contribution will be invaluable in interpreting the is the Principal Investigator of the project. In MDL, Shouleh Nikzad and April Jewell JWST’s visible to mid-infrared observations. SISTINE’s MDL-e-beam-fabricated developed the approach, while John Hennessy technology is a pathfinder for future UV instrumentation structured blaze concave NASA for 3 Decades of Innovation is responsible for the technology delivery. baselined by the flagship Large UV/Optical/IR Surveyor grating technology for the EMIT prototype imaging spectrometer. astrophysics mission concept.

JPL Microdevices Laboratory | 2020 Annual Report Roman Dr. Nancy Grace Roman is shown with a model of the Orbiting Solar The CGI SPC utilizes masks that are designed to be mounted Observatory (OSO) in 1962. in a pupil plane of the instrument and operate in reflective telescope mode to avoid chromatic transmission effects. They serve to shape/apodize the pupil amplitude for high-contrast spectroscopic and wide-field imaging modes. They consist of This NASA observatory will unravel binary patterns of highly reflective ~20-μm pixels surrounded the secrets of dark energy and by extremely black regions forming a roughly 20-mm- diameter aperture. These precisely designed diffractive dark matter, search for and image patterns are fabricated at MDL on silicon substrates; the exoplanets, and explore many topics reflective pixels are aluminum coated, and the black regions are cryogenically etched into needle-like structures to in infrared astrophysics. produce <10-7-level reflectivity. The CGI-SPC also requires a Shaped pupil focal plane mask for LOWFS and control, and it takes the form spectroscopy mode mask. of a metal bowtie-shaped aperture on antireflection-coated glass. The metal pattern has a central elliptical dimple with precisely controlled depth to provide the proper reflection he WFIRST mission was renamed to honor and phase for LOWFS. Several of these MDL-fabricated masks Ta NASA pioneer and is now the Nancy Grace have been successfully tested in JPL’s High Contrast Imaging Roman Space Telescope. It is commonly known Testbed (HCIT), demonstrating the performance required as the Roman Telescope. to meet NASA milestones. JPL’s Coronagraph Instrument (CGI) will be a crucial Both CGI-HLC and CGI-SPC require different Lyot stops to achieve the required high-contrast performance at the 10-9 part of the Roman Space Telescope mission, which is Shaped pupil wide- slated to launch in the mid-2020s. CGI is a technology field imaging mask. level in the final image. These stops are fabricated at MDL demonstration designed to suppress host starlight using deep reactive ion etching through silicon wafers and to 10-8 - 10-9 to contrast over a chosen region of are coated with metal for opacity. the image plane and spectral band to observe and spectrally characterize extremely faint exoplanets in CGI contains two deformable mirrors (DMs) manufactured the visible to near-IR spectral range. MDL is fabricating by Northrop Grumman’s AOA Xinetics (AOX), each allowing occulting masks and aperture stops for the two CGI exquisite control of the optical wavefront, achieving better operating modes, a Hybrid-Lyot Coronagraph (HLC) than a 20-pm incremental step size on each of 2304 and a Shaped Pupil Coronagraph (SPC). independent actuators within an area of approximately 3.5 square inches (a pm, or picometer, is one billionth of The HLC occulting mask is positioned at the focal a millimeter). In that same electrical interconnect real plane of CGI and will both reflect and diffract the light estate, there are 96 actuators linked together to form of the star, which will be blocked by the downstream grounding reference bars, for a total of 2,400 pins with Lyot stop. Fabricated on an antireflection-coated glass nearly no margin for shorts or opens. The extreme density substrate, the HLC mask is a metal spot with a precisely Silicon aperture of Wide-field Lyot of interconnecting wires and pins within such a small area hybrid-Lyot stop. mask for SPC. aligned grayscale electron-beam-profiled dielectric creates a number of fabrication challenges. The first is how pattern on top. The complex dielectric pattern was to ensure that electrical isolation and positional registration carefully optimized by the CGI mask design team to can be maintained for the interface between the capacitor fulfill two functions. First, it will modify the phase of electrodes of the DM and the gold pads that will be used to the partially transmitted light, creating an extremely ensure electrical contact to the connectors and cables that dark region around the star to allow exoplanet imaging. provide power to the mirror. MDL performs photo-lithography Second, it will modify the phase of the reflected light to precisely deposit these gold pads on the back side of to allow low-order wavefront sensing (LOWFS) and the AOX DM — a very important step in the DM fabrication 30 control of the CGI optics. The dielectric pattern can process. MDL has developed a unique fabrication process 31 be non-circularly symmetric. using photoresist spray coating, unique fixturing for contact lithography, and liftoff metallization patterning to ensure the tight precision and accuracy needed for the interconnect,

Microscope photo Atomic force microscope which is required for the DM’s function. of fabricated HLC measurement of the surface occulting mask. profile of a prototype HLC occulting mask. The contributors at MDL for the CGI work are primarily The Roman Space Telescope’s Dan Wilson, Victor White, Karl Yee, Frank Greer, 300-megapixel Wide Field Instrument Ilya Poberezhskiy, Rich Muller, Pierre Echternach will measure a sky area 100 times and Bala K. Balasubramanian. The designs come from larger than Hubble can measure. A.J. Eldorado Riggs and the CGI mask design team. Bowtie masks with LOWFS This means a single Roman Space NASA for 3 Decades of Innovation phase dimple on an AR- Telescope image will hold coated glass substrate. the equivalent detail of 100 pictures from Hubble.

JPL Microdevices Laboratory | 2020 Annual Report Left From its inception, MDL has been fortunate ERIC R. FOSSUM | PROFESSOR, DARTMOUTH COLLEGE 1990 Dr. Fossum is Associate Provost in the Office of Entrepreneurship and Technology Transfer to benefit from the contributions of extremely (OETT), Director of the PhD Innovation Program at the Thayer School of Engineering, and talented and skilled individuals. They made the John H. Krehbiel Senior Professor for Emerging Technologies at Dartmouth College. He joined JPL in 1990, where he invented the camera-on-a-chip technology for which he is best their their mark here and then went on to conquer known. He has published over 300 technical papers and holds 165 patents. Dr. Fossum has won numerous awards for his work, including the NASA Exceptional Achievement Medal, new challenges elsewhere. the NSF Presidential Young Investigator Award, and the Queen Elizabeth Prize. Nearly all the five billion CMOS cameras made each year use his intra-pixel charge transfer invention. He mark received his PhD in engineering and applied science (EE) from in 1984. PAUL MAKER | RETIRED 1987 ROBERT FATHAUER | ARTIST 1987 Dr. Maker joined JPL in 1987 after a successful career in non-linear optics at Ford Research In 1987, Dr. Fathauer joined the research staff of JPL. Long a fan of M.C. Escher, Dr. Fathauer Laboratories. His role was to lead MDL’s effort in Electron Beam Lithography, and until he began designing his own tessellations with lifelike motifs in the late 1980s. He learned retired in 2002, he utilized the e-beam’s unmatched precision to develop novel fabrication printmaking techniques to produce limited-edition screen prints and woodcuts of his processes that are still in use today. He invented direct-write e-beam techniques for creating tessellation designs. In 1993, he founded a business, Tessellations, to produce puzzles based grayscale surface-relief patterns, enabling the fabrication of high-efficiency diffractive optics on his designs. Over time, Tessellations’ product line has grown to include mathematics including blazed gratings, lenses, and computer-generated holograms. More importantly, manipulatives, classroom posters, and books. More recently, he has been working with he invented e-beam methods for fabricating such grayscale diffractive optics on convex ceramics to create sculptures that combine fractal character with hyperbolic geometry. and concave substrates, even though the e-beam tool was designed to write on flat wafers. These abstract sculptural forms are inspired by natural structure found in corals and plants. The ability of MDL to make convex and concave gratings has enabled JPL to develop and fly multiple airborne and spaceborne imaging spectrometers for NASA missions. Paul Maker was awarded the NASA Exceptional Achievement Medal in 2002. BARBARA WILSON | RETIRED 1988 Dr. Wilson joined JPL in 1988 as technical group supervisor of the Microdevices Section. Shortly thereafter, she was named manager of MDL. She retired from JPL in 2011 as its FRANK J. GRUNTHANER | RETIRED 1973 Chief Technologist. She also served as Chief Technologist for the Air Force Research Dr. Grunthaner came to JPL from Caltech in 1973 after his PhD. Awarded the NASA Laboratory. Dr. Wilson is a Fellow of the American Physical Society and former APS Executive Exceptional Scientific Achievement Medal, he and Dr. Paula Grunthaner invented Board Member. She was elected to the International Academy of Astronautics in 2000. the delta-doped CCD approach that gave orders of magnitude improvement in She has received two Exceptional Achievement Medals from NASA and the Decoration for device imager performance. He developed the science and technology for the Mars Exceptional Civilian Service and the Meritorious Civilian Service Award Medal from the US Air Oxidation Instrument (MOx) for (a failed Mars mission launched in 1996). Force. She holds a PhD in condensed matter physics. This was the first microchemical laboratory for spaceflight with key components from MDL. He developed the Urey Instrument Concept in collaborations with UC , UC Berkeley and NASA Ames, resulting in its initial inclusion in the ANDERS LARSSON | PROFESSOR, CHALMERS UNIVERSITY 1988 ExoMars Pasteur Instrument Package. Dr. Grunthaner retired from JPL in 2012. From 1984 to 1985, Dr. Larsson worked in the Department of Applied Physics at Caltech, and from 1988 to 1991, he worked at JPL. He has been a Guest Professor at Ulm University (Germany), at the Optical Science Center, University of Arizona at Tucson (USA), at Osaka PAULA GRUNTHANER | RETIRED 1974 University (Japan), and at the Institute of Semiconductors, Chinese Academy of Sciences Dr. Grunthaner came to JPL in 1974 while still an undergraduate (Caltech BS, 1975; (China). He has published more than 500 scientific journal and conference papers, as well PhD, 1980) and stayed until retiring in 2012. Her experience included hands- as two book chapters. He was a Member of the IEEE Photonics Society Board of Governors on research and supervision of R&D efforts that included UV/vis, IR, sub-mm, (2014–2016), an Associate Editor for the Journal of Lightwave Technology (2011–2016) and nanotechnology, and lab-on-a-chip sensors and instrumentation. In 1995, she is a Member of the Editorial Board of IET Optoelectronics. His scientific background is in received a NASA Engineering Award for development of UV-sensitive delta-doped optoelectronic materials and devices for optical communication, information processing, CCDs. After taking other roles in JPL, she returned to MDL as the manager of the and sensing. He is a Fellow of the Optical Society of America and EOS. In Situ Instrument Systems section with the responsibility to oversee MDL activities and initiate a cultural transition to ‘success is flying our technologies’. She led the flight implementation and delivery of the Phoenix/MECA Wet Chemistry Laboratory. ROBERT J. LANG | ORIGAMI EXPERT 1988 Dr. Lang began work at MDL in 1988. He studied the mathematics of origami and used computers to study the theories behind origami, and he is one of the foremost origami artists MICHAEL HECHT | PROFESSOR, MIT 1982 and theorists in the world. He is known for his complex and elegant designs, most notably A physicist at JPL, Dr. Hecht graduated from Stanford University in 1982 of insects and animals. He has made great advances in real-world applications of origami with a PhD in applied physics. He worked on semiconductor surface and interface to engineering problems. Dr. Lang has authored or co-authored over 80 publications on science, planetary science, micro electromechanical systems (MEMS), and scientific semiconductor lasers, optics, and integrated optoelectronics, and he holds 46 patents in these 32 instrument development. He left JPL in 2012 to become Assistant Director for fields. In 2001, Dr. Lang left engineering to be a full-time origami artist and consultant. However, 33 Research Management at the MIT Haystack Observatory. He is principal investigator he still maintains ties to his physics background: he was the editor-in-chief of the IEEE Journal of the Mars Oxygen ISRU Experiment (MOXIE), an exploration technology of Quantum Electronics from 2007 to 2010. He holds a PhD in applied physics from Caltech. investigation, which NASA selected in 2014 to fly on the Mars 2020 mission.

TOM KENNY | PROFESSOR, STANFORD UNIVERSITY 1989 WILLIAM JOSEPH KAISER | PROFESSOR, UCLA 1986 Dr. Kenny is currently the Richard W. Weiland Professor of Mechanical Engineering at Dr. Kaiser is the director of Actuated Sensing & Coordinated Embedded Networked Stanford. His group fundamental issues in and applications of micromechanical Technologies research group and co-director of the UCLA Wireless Health Institute. structures. These devices are usually fabricated from silicon wafers using integrated circuit He worked at JPL from 1986 to 1994, where he developed and demonstrated the first fabrication tools. Because this field is multidisciplinary, work in Dr. Kenny’s group includes electron tunnel sensors for acceleration and infrared detection and initiated the NASA/JPL strong collaborations with other departments, as well as local industry. Dr. Kenny worked microinstrument program. Dr. Kaiser is a winner of the 2007 Gold Shield Prize and has been at JPL from 1989 to 1993, where his research focused on the development of electron- 3 Decades of Innovation for NASA for 3 Decades of Innovation a Fellow of American Vacuum Society since 1994. He has received the Allied Signal Faculty tunneling high-resolution microsensors. Research Award, the Peter Mark Award of the American Vacuum Society, the NASA Medal for Exceptional Scientific Achievement, the Arch Colwell Best Paper Award of the Society of Automotive Engineers, and two R&D 100 Awards. In 2019, he became an elected Fellow of IEEE. JPL Microdevices Laboratory | 2020 Annual Report For the nearly three decades he has been at Caltech, Dr. Zmuidzinas has provided the JPL DIRECTORS vision and support that continue to secure MDL JPL & Dr. Allen attended West Point and earned MDL’s prominence. He ensures that MDL a PhD in physics from the University of works on creative new technologies for NASA DIRECTORS Illinois. During his military career (1945- and other government agencies. He laid the 1982), he attained the rank of General foundation of MDL’s Superconducting Devices JPL Director Dr. Charles Elachi MDL and a position as Air Force Chief of Staff, and Materials Group, and he continues to be appointed MDL’s first Director served as director of the National Security a source of ideas for truly novel technologies. Agency (NSA), and was a leading expert Jonas Zmuidzinas when MDL was reorganized in in the military space program. Most of the 2007 – 2011 2007. He and the subsequent collective work he did during these years was heavily JPL Director, Dr. Mike Watkins, Lew Allen, Jr. classified. He came to JPL as Director in 1982 – 1990 Dr. Webster is a JPL Fellow and Senior Research have chosen eminent 1982 and retired in 1990. Scientist who also formerly served as the Program success Manager of the Planetary Science Instruments Office. researchers to act as Director, Dr. Stone’s research specialty was cosmic He has developed and built innovative miniature all supported by the same, Since their inception, CSMT, and instruments for planetary missions to Mars, Venus radiation, whose existence was known very capable Deputy Director. later MDL, have been nurtured from the beginning of the 20th century and Titan and is the institutional principal investigator but was poorly understood. In 1972, JPL’s on the Tunable Laser Spectrometer (TLS) instrument and supported by the JPL Director, Bud Schurmeier, project manager for the in the SAM analytical suite on the Curiosity Rover while the MDL Director and Deputy Mariner-Jupiter-Saturn 1977 mission, later now operating on Mars. Christopher R. Webster Director have ensured that MDL’s named Voyager, invited Stone to become 2011 – 2017 the mission’s project scientist. His decade research, technology and products as JPL Director was tumultuous. He uniquely add value to JPL’s output Edward Stone became Director just as officials at NASA Dr. Green is a JPL Fellow and Senior Research 1991 – 2001 headquarters began to balk at the high cost Scientist and is the Principal Investigator of the in support of tasks for NASA. and slow pace of planetary missions. Earth Surface Mineral Dust Source Investigation (EMIT). In 2018, EMIT was selected by NASA to fly on the International Space Station. He is also a Senior In the spring of 1970, Dr. Elachi interviewed Research Scientist at JPL, Caltech. For more than for a summer job with Walter E. Brown Jr. 25 years, his research has used advanced imaging at JPL. Brown, head of JPL’s Radar Section, spectrometer instrumentation to test hypotheses introduced Elachi to what turned out to and pursue science investigations on Earth, Mars, be his life’s work. Brown put Elachi to work Robert Green the Moon, and throughout the solar system. on a proposal to send an imaging radar 2017 – Present instrument to Venus to map beneath the planet’s permanent cloud cover. This work became the Venus Orbiting Imaging Radar Charles Elachi proposal and, after a long evolution, 2001 – 2016 the mission. Dr. Forouhar pioneered semiconductor laser development at JPL three decades ago. He created JPL’s semiconductor laser capability, which has seen MDL Dr. Watkins became Director of JPL on infusion into a wide variety of flight projects in Earth July 1, 2016. In this role, he also serves as a and planetary science. He has received several NASA DEPUTY vice president of Caltech, which staffs and Exceptional Engineering Achievement Awards and 34 manages JPL for NASA. He was project the Jet Propulsion Laboratory Exceptional Technical 35 scientist for the GRACE, GRAIL and GRACE Excellence Award. He holds eight patents and has DIRECTORS Follow-On missions. He is also a pioneer published more than 70 articles in refereed journals. There has only been one in development and use of gravity data Deputy Director of MDL; for new science applications to better As the MDL deputy director, Dr. Forouhar has made understand Earth’s climate and evolution. Siamak Forouhar significant contributions to determining MDL’s long- he has worked with all Michael M. Watkins His other research interests include mission 2007 – Present term strategic direction, in line with JPL’s strategic three Directors. 2016 – Present design, instrument design and science plans. He serves as a primary contact between MDL analysis for acquisition and use of remote and JPL senior management, Caltech faculty, and

sensing data for Earth and other . other universities. NASA for 3 Decades of Innovation

JPL Microdevices Laboratory | 2020 Annual Report 1985 1984 SENIOR ENGINEER MDL MANAGER MDL Mr. Liu received his BS in Engineering Science, Mr. Lamb is Technical Group Supervisor Bioengineering from UC San Diego in 1984 and for the Central Processing and MDL his MSEE from California State University, LA, Support Group and a named JPL Principal in in 1986. From 1985 to 1989, he worked at JPL on Microdevice Engineering and Implementation. solar cell and III-V MBE growth. From 1989 to 1991, He is responsible for all facility, safety, and abiding he worked at TRW on III-V thin film growth using operational issues at this state-of the-art MBE for MMIC applications. After that, he worked semiconductor device processing facility. John K. Liu on the development of Quantum Well Infrared James L. Lamb He has facilitated 30 years of affordable, February 13, 1985 Photodetector (QWIP) cameras at JPL. February 27, 1984 safe, productive MDL operations. For stars His current interest is in developing a set his contributions, he received two NASA of reliable and reproducible microfabrication Exceptional Service Medals (1995 and 2011) 1980 techniques in support of MDL technologies. “in recognition of exemplary management The combination of the ENGINEERING TECHNICAL SPECIALIST of the technical infrastructure support to the Mr. Manning, an original member of the MDL leadership, vision, and Jet Propulsion Laboratory’s Microdevices Support Group, implements many of MDL’s Laboratory.” A physicist and JPL employee innovation of many dedicated general use fabrication capabilities. He works 1986 since 1984, he has been associated with MDL with MDL users and equipment manufacturers operations since MDL’s inception. to develop specifications and implement new TECHNOLOGIST and talented individuals at Dr. Bell first came to JPL as a postdoc in semiconductor fabrication processes and 1986 and was designated a Senior Research MDL, both past and present, equipment, working towards the never-ending Scientist in 2009. He develops detectors Chuck Manning need to modernize MDL’s capabilities. The has resulted in numerous September 9, 1980 based on novel materials and novel effects, 1986 work often entails equipment installations such as wide bandgap semiconductors, MDL DEPUTY DIRECTOR requiring large modifications to the building, Dr. Forouhar started as a Member of the Technical achievements that are shape-engineered tunnel barriers, nanocrystal including increased cleanroom space and Staff, became a Group Supervisor in 1996, storage elements, and nanostructured impressive in their scope, upgrades to the facilities that service the and became Deputy Section Manager in 2003. Douglas Bell metamaterials. He conducts nanoscale increasingly complex requirements of a Through his personal leadership, innovation, November 17, 1986 electronic and structural characterization significance, and ingenuity. modern semiconductor “fab”. He has led JPL unique expertise and research excellence, of materials and devices using scanning probe public outreach efforts, e.g., Send Your Name he has developed a strong research group and methods. His work is supported by both to Mars and public open house events, and has created and grown MDL’s semiconductor NASA and non-NASA sponsors. produced technology publications. Siamak Forouhar laser capability. These projects are a highlight September 28, 1986 of JPL’s capability and success. 1981 1988 MICRODEVICES ENGINEER MICRODEVICES ENGINEER Dr. Leduc, a Senior Research Scientist, Mr. Muller joined JPL in 1988 to run its first 1987 started at JPL in 1981 as an intern, electron beam (e-beam) lithography system, ENGINEERING DEVELOPMENT TECHNICIAN then a postdoc and employee. He has and he is currently in charge of operating Mr. Davis has supported MDL since its worked on superconducting materials, MDL’s JEOL JBX 9500FS e-beam lithography construction in 1987, first as a contractor devices, sensors, focal plane arrays, system and its associated tools. During his 29 and then as a JPL employee. He is formally and instruments for astrophysics, Earth years at JPL, he has operated three e-beam trained as a cleanroom maintenance and planetary observations. Over 20 tools and has contributed to the development technician. He has sustained all MDL Henry G. Leduc years ago, he started working on other Richard Muller and delivery of many optical and electronic cleanroom cleanliness levels, including July 11, 1988 July 7, 1981 superconducting detectors, including TES components for research and flight projects. certified ISO 4 (class 10) processing areas. Toney Davis His expertise in the cleaning of surfaces detectors and SQUIDs. He was involved October 29, 1987 with kinetic-inductance-based readout for has allowed him to clean equipment for superconducting pair-breaking detectors installation and use in the facility, as well as from their beginning, and most of his work decontaminate equipment after servicing 1989 and for removal from the facility – key over the last 15 years focuses on devices SUPERCONDUCTING MATERIALS & DEVICES ENGINEER based on the kinetic inductance effect, contributions due to the acutely hazardous 36 Dr. Bumble’s early work involved development and toxic materials used in MDL operations. 37 along with materials development and of SIS and HEB mixers for THz Radio fabrication of those devices. Toney also processes centralized waste for Astronomy on the Herschel Space Telescope. the facility and is a backup for both oversight Today, in collaboration with UCSB, he improves of the MDL Safety Monitoring systems and MKID devices for UV, optical, and near IR for Building Facilities support. telescope cameras; TES bolometers for mm wave spectrometers; quantum computing Bruce Bumble devices; and SNSPD detectors. In 1989, March 6, 1989 Dr. Bumble joined MDL as a Member of the Technical Staff, where he still works on superconducting materials and devices, mainly for astronomy applications. 3 Decades of Innovation for NASA for 3 Decades of Innovation

JPL Microdevices Laboratory | 2020 Annual Report The diverse staff has outstanding expertise, and their passion for the work was clearly evident. —The Visiting Committee, September 5-6, 2019

DR. THOMAS L. KOCH DR. BARBARA WILSON DR. EUSTACE DERENIAK DR. ERIC R. FOSSUM DR. JONAS ZMUIDZINAS Committee Chair Committee Co-Chair Former Chair (2008–2015) John H. Krehbiel Sr. Professor for Former JPL Chief Technologist, MDL Dean of College of Optical Retired Chief Technologist, Professor Emeritus of Optical Emerging Technologies, Director, PhD former Director of JPL’s Microdevices Sciences and Professor of Optical Jet Propulsion Laboratory Sciences and Electrical and Innovation Program, Thayer School Laboratory, and Merle Kingsley Sciences, University of Arizona Computer Engineering, of Engineering and Associate Provost Professor of Physics, California University of Arizona for Entrepreneurship and Technology Institute of Technology Visiting Transfer, Dartmouth College Committee The Visiting Committee was initiated shortly after MDL’s reorganization in 2007. Its membership comprises DR. DEBORAH CRAWFORD DR. JED HARRISON DR. WILLIAM HUNT DR. PAMELA S. MILLAR DR. NAI-CHANG YEH Vice President for Research, Department Chair and Professor of Electrical Program Director, Professor of Physics, Fletcher individuals with an enormous range George Mason University Professor of Chemistry, Engineering, Georgia NASA Earth Science Jones Foundation Co-Director, University of Alberta Institute of Technology Technology Office (ESTO) Kavli Nanoscience Institute, of skills and experience. The committee’s California Institute of Technology remit is not only to review past and current activities and plans but also to be proactive in giving advice.

The Committee comes to MDL every two years and then produces a formal report, DR. SUSAN M. LUNTE DR. ROBERT WESTERVELT DR. VENKATESH NARAYANAMURTI DR. GREGORY KOVACS N. Adams Distinguished Benjamin Peirce and Research Chief Technology Officer at SRI MR. GEORGE KOMAR most recently in 2019. As with previous Director of the NSF Science Retired Associate Director Professor of Chemistry and Professor of Technology International in Menlo Park, CA., and Technology Center for in the NASA Earth Science Pharmaceutical Chemistry, and Public Policy, Professor Emeritus of Electrical visits, their insights have proven very Integrated Quantum Materials Division and Program Manager, Director, Adams Institute Harvard University Engineering with a courtesy and Mallinckrodt Professor NASA Earth Science for Bioanalytical Chemistry, appointment in the Department valuable and are much appreciated. of Applied Physics and of Technology Office (ESTO) University of Kansas Physics, Harvard University of Medicine, Stanford University MDL management listened to and

The majority of R&D within is acting on their recommendations, 38 MDL is leading the field, which are taken very seriously. 39 producing exciting results, enabling new science, and is well aligned with the stated MDL and JPL objectives. DR. OSKAR PAINTER DR. ALBERT P. PISANO DR. DAVID SANDISON DR. AXEL SCHERER John G Braun Professor Dean of the Jacobs School Director of the Center for Neches Professor of Electrical —The Visiting Committee, of Applied Physics and Physics, of Engineering, Walter J. Zable Microsystems Science, Engineering, Applied Physics and September 5-6, 2019 Fletcher Jones Foundation Co- Chair in Engineering, Professor Technology & Components, Physics, California Institute of

Director of the Kavli Nanoscience of mechanical, aerospace, Sandia National Laboratories Technology and Director of the NASA for 3 Decades of Innovation Institute, California Institute electrical and computer Caltech Global Health Initiative of Technology engineering, University of California, San Diego

JPL Microdevices Laboratory | 2020 Annual Report Artist’s impression of the Urey Mars Organic Unusual Phoenix spacecraft, which and Oxidant Detector. landed near the northern routes to polar ice cap of Mars in 2008. MOx he history of Mars exploration features many notable Tsuccesses but also some failures. The NASA Viking success project launched two landers and two orbiters in 1975 and was the first mission to land a spacecraft safely on another Occasionally, despite careful UREY planet’s surface. NASA sent no successful landers toward Mars n addition to the MOx sensor developed previously, the planning and meticulous work, for many years. However, in the early 1990s, from within the IUrey instrument included remarkable MDL technological new MDL building, Dr. Frank Grunthaner saw an opportunity. advances. The instrument was named after Harold Urey, things don’t turn out as expected. Dr. Grunthaner had become enamored with the possibilities winner of the Nobel Prize in Chemistry in 1934, who had of silicon as a mechanical material and took his ideas to Dr. Some of these events are not the pioneered research on the origin of life. The instrument Bruce Murray at Caltech. Together, they developed a silicon- was developed in MDL in collaboration with Drs. Jeff result of anything that happened at based instrument with a mass of less than 850 g, complete Bada (UCSD) and Rich Mathies (UC Berkeley). The team with its own power supply, to be flown on the 1994 Russian MDL. On other occasions, a project rapidly realized that in addition to the solid-state MOx Mars Lander mission. The device, called the Mars Oxidation device, Urey would need methods for analyzing very, very is unsuccessful or ends earlier than experiment (MOx), was developed in collaboration with low concentrations of amino acids, the building blocks of scientists at Sandia National Laboratory. It was a sensor array proteins and one of the most compelling signatures of life. expected. These incidents can be to measure the oxidation potential of the Martian soil and There were many challenges to overcome in developing was to be placed in the Martian soil or exposed to the Martian these methods, and two of the biggest were extracting The Mars Surveyor 2001 project was a multi-part viewed constructively: the work Mars exploration mission intended as a follow-up to atmosphere. The Russian Surface Lander was scheduled to amino acids from samples of Martian soil or rock and launch in 1994 but was delayed for two years. Then, as the Mars Surveyor ‘98. After the two probes of the 1998 is not wasted, just postponed. then analyzing them. The team set a goal of using MDL’s project, and , rocket finally launched to take the probe out of earth’s orbit, capabilities in lithography, chemical and plasma etching, were both lost, NASA’s “better, faster, cheaper” it misfired, and MOx, along with all the other instruments on thin-film deposition and wafer bonding to develop a 6-inch- exploration philosophy was re-evaluated, with a particular eye on the two 2001 project probes. board, landed in or near the Pacific Ocean off South America. diameter device that could operate with the functionality Although MOx was physically lost, its concept lived on. of a fully equipped terrestrial lab. At that time, MDL was Not long after the failed launch, Dr. Grunthaner began developing instrument concepts and demonstrating amino what would become a long-standing collaboration with acid separation using capillary electrophoresis in deeply MECA and MECA Dr. Jeffrey Bada of UCSD to develop a much more capable patterned SiO2 wafers. This was the Microfluidic Lab-on-a-Chip. n the 1990s, MDL started producing an instrument for system to search for life on Mars. The instrument, called Urey, Another key problem was how to strip amino acids out of Ithe lander payload of the Mars Surveyor 2001 mission, comprised a complex microfluidic wet chemistry unit and an a soil matrix and put them into solution. Amino acids range which also included an orbiter. The Mars Environmental upgraded version of the MOx concept. In 2007, NASA selected from highly hydrophobic (oily or water repellant) to rather Compatibility Assessment (MECA) was designed to test if Probe, Mars 96 with Mars Urey as a contribution to the European Space Agency’s hydrophilic (water soluble), posing a challenge to getting dust in the Martian soil might be hazardous. MECA was to Oxidation Experiment. ExoMars mission. But the story did not end there; the “Urey” all amino acid types into an aqueous solution. Water’s run in situ tests using several different instruments produced section opposite has the conclusion. ability to dissolve various materials is a strong function of in collaboration with many different institutions. It included temperature. The novel approach developed, sub-critical optical and atomic force microscopes and a wet chemistry This is the first photograph ever water extraction, uses water at a range of temperatures (up lab unit that mixed Martian soil with water and analyzed the taken on the surface of the planet to 350°C) and pressures to dissolve all target amino acids. resulting solution. The instrument was completed and tested Mars. It was obtained by satisfactorily. Unfortunately, in the late 1990s, two Mars just minutes after the spacecraft At the same time, the European Space Agency (ESA) was missions failed, the Surveyor lander mission was canceled, landed successfully on July 20, 1976. planning a major mission to Mars, ExoMars, that would and only the orbiter, then renamed , include a rover and many instruments. NASA was a partner was launched. However, the work that had been invested 40 in the enterprise, and in January 2007, it selected Urey as in developing the instrument was not wasted. 41 one of the instruments it would contribute to the mission. Unfortunately, ESA suffered several financial setbacks and The complete instrument was mothballed with the was forced to postpone the launch date. NASA reviewed cancellation of the mission. However, it was later resurrected ESA’s plans and its commitments, and in July 2009, Urey with the same acronym, MECA, but now meaning Microscopy, was canceled. Electrochemistry, and Conductivity Analyzer. MECA was adapted for the successful Phoenix mission to Mars that Yet again, although the opportunity to be part of the mission launched in 2007. The unit performed well on Mars and was lost, the technology lived on. Some of the concepts made many discoveries, but the most remarkable was the developed for Urey have been continuously refined and presence of perchlorate on the Martian surface. This finding evolved since then and are now a part of the OWLS project, revolutionized our understanding of the surface of Mars and looking for life not on Mars but in the ocean worlds of the the ability to detect organic matter there, including the need NASA for 3 Decades of Innovation outer planets (see page 66). to re-examine the findings of the Viking missions.

JPL Microdevices Laboratory | 2020 Annual Report Creating the lab of the future MDL was born 30 years ago but has been updated continuously ever since; its facilities and equipment remain state of the art, and its staff is renewed with new and diverse minds, as well.

MDL is dedicated to and has cultivated an environment that values and promotes diversity, leadership, vision, and innovation. By fostering a community in which one can interact with people with different backgrounds, interests, and expertise, unexpected inspirations become a way of life. JPL excels at bringing experts together to create an environment where new ideas can evolve into useful technologies, and MDL exemplifies this spirit of collaboration.

42 43

Artwork submitted for the cover of the journal Analytical Methods, when an article Team members Fernanda Mora

on measuring silver (Ag) used to sterilize and Jessica Creamer performing NASA for 3 Decades of Innovation drinking water was accepted for publication. final assembly and inspection It visually summarizes the method and its of the Chemical Laptop analyzer potential for future human spaceflight. upper stage.

JPL Microdevices Laboratory | 2020 Annual Report Talking to a larger audience NASA encourages public outreach, and unsurprisingly, MDL scientists FERNANDA MORA and technologists attract media n 2012, Dr. Mora was interviewed about her work by FLORIAN KEHL Ithe largest newspaper in Cordoba, Argentina, where she attention. The examples here lorian, a native of Switzerland, has been grew up. She reached a wide audience, and it was especially important for the people of her hometown, Saldan. The show part of that effort. Fa space enthusiast since his early childhood and he gave presentations about JPL’s Mars news spread quickly in this small community, where most rovers when he was in elementary school. He still people know each other. Soon, Dr. Mora was contacted loves to motivate the next generation of explorers by the elementary school in Saldan and invited to talk to follow their dreams and to share his passion to the students. In 2018, she was invited to give a TEDx for spaceflight with the public. He was invited to presentation there. The event had more than 1600 people several public events, most recently as a keynote in attendance and 70,000 following via live streaming. speaker in San Francisco and at his alma mater The presentation was titled: “El desafío de buscar vida in Switzerland. extraterrestre” (“The challenge of looking for ”). During that week, she also visited three high schools to In his home country, he was featured in several chat with the students about her experience working at JPL. magazines, newspapers, television programs, She was also interviewed by two radio stations, a newspaper and a radio broadcast series, reaching millions of and a magazine. “I was terrified about being on the stage in 44 people. He also engaged with the public through front of so many people, but at the end it was a wonderful 45 a guest article and through his involvement as experience. As a scientist, I felt very honored to have an independent rocketry consultant for CBS’s the opportunity to reach such an audience. But more “Strange Angel,” a series about the life of Jack importantly, as a woman, I felt a huge responsibility: I wanted Parsons, one of the founders of JPL. The group to be an example for girls and young women, to show them simulated Mars missions in the Chilean Atacama that they can do whatever they set their mind to. I wanted Desert, where novel life-detection instruments them to know that there are no limits if you persevere and were tested on a rover in a relevant environment. are willing to make sacrifices. I believe if I got at least one These simulations were featured by media around person inspired by my talk, it was all worth it.” the globe, from Chile to Vietnam. Last year, an Argentinian news station interviewed Dr. Mora Since his childhood dream came true, Dr. Kehl and two other Argentinians working at JPL. The interview NASA for 3 Decades of Innovation regards it as his duty to share the wonders aired on one of the main TV stations in Argentina and was of space exploration with the world. also converted to a podcast format.

JPL Microdevices Laboratory | 2020 Annual Report Innovating from JESSICA ERIC EMMA ROGER SOFIA MATHIEU FERNANDA the get go JESSICA CREAMER ERIC KITTLAUS MATHIEU FRADET ould you believe that someone who got the lowest ric has always been very curious about the natural world or as long as he can remember, Mathieu has always been Wpossible score on the AP chemistry test in high school Eand how things work. When he was about five, he saw Fattracted to science because it allows us to understand Some MDL technologists and could later become a star research chemist at JPL? Jessica the moon and planets through a telescope for the first time. and explain the world around us. He was particularly scientists arrive and quickly started her undergraduate degree at Northern Arizona This experience kindled his lifelong fascination with space. interested in math, as math was the key to understanding University without having chosen a major. Taking her AP After earning a bachelor’s in physics and mathematics at physics. Not surprisingly, then, both his undergraduate make their mark with a truly chemistry experience as a challenge rather than a defeat, Santa Clara University, he went on to receive a PhD in applied and graduate degrees are in physics. While he was a original approach or product. she took Chemistry 101 in her freshman year. This time, the physics at Yale. While finishing his PhD and wondering what graduate student at the University of Montréal, he applied subject clicked, so she majored in chemistry and went on to to do next, Eric saw an announcement on the JPL website successfully for an internship at JPL. The three-month earn both a masters and PhD in pharmaceutical chemistry advertising a postdoctoral position. The position offers a internship turned into six months, and six months turned into from the University of Kansas. Chemistry truly suited Jessica; great deal of freedom and autonomy and allows him to focus a permanent position after he graduated. His job at JPL is after coming to JPL as a postdoc, she completed a project on developing completely new technologies that will be mainly focused on semiconductor lasers, spanning from their that led to a publication in the journal Analytical Chemistry. useful for NASA applications in the coming decades. He is characterization to their implementation on instruments for That publication was featured as the American Chemical developing devices that use electrically driven sound waves spaceflight. He assembled a semiconductor laser-based gas Society Editor’s Choice, and the work also led to her winning to control the behavior of light on the surface of a silicon chip. sensor that can identify six different species. This sensor will the Outstanding JPL Postdoc Research award two years This technology could enable many new functionalities for be used to detect combustion products during tests as part in a row. Jessica identifies Jani Ingram, her undergraduate signal processing to novel light sources. It could even raise of the SAFFIRE project, which focuses on spacecraft fires. advisor, and Sue Lunte, her PhD advisor, as her two biggest the possibility of something never before done on the chip The results will help us understand the risks to human health inspirations and mentors. She says, “Both are hardworking, scale: making an optical diode. Eric has also been working on posed by these fires and develop fire mitigation strategies. intelligent, and passionate woman that taught me a lot about an approach to generate low-noise microwaves by combining FERNANDA MORA science and life.” Jessica’s job is primarily research and lasers. This led to that most satisfying moment for any ernanda was born and raised in a small town in Córdoba development for an instrument suite called OWLS, which is scientist: seeing your research product perform satisfactorily. FProvince, Argentina, and has been fascinated by science being developed to look for life in the ocean worlds of the In this case, Eric’s device ran successfully in a field test since childhood. She moved to the United States in 2005 outer solar system. She spends much of her day in the lab of a JPL-built radar that detects clouds and rain. to pursue her graduate studies and received her PhD in setting up experiments or at her desk analyzing results. Her SOFIA RAHIMINEJAD chemistry in 2009. She then began looking for postdoctoral work will help the team decide how to build and operate their ofia’s road to JPL started when she was 14 and became positions and saw an ad for a position at JPL. Thinking that portable prototype instruments, which will define the design EMMA WOLLMAN Sinterested in technology through an after-school activity the spot was only available to US citizens, Fernanda did not of a final instrument suite for a future mission. hile growing up, Emma was interested in a wide range of called “Technology for Girls.” This imaginative program read the ad further, but the next day, the same ad appeared Wsubjects, from science to the arts, and she was unsure included weekly visits to large companies like Volvo and again. She saw it as a sign to explore JPL opportunities and which field to pursue. Influenced by the great physics teachers Ericsson. At these companies, the participants would meet found a posting for a microfluidics position. She had the ROGER O’BRIENT she had in high school, she went to Swarthmore College and female engineers, who explained what they did. According to exact background required, and soon after, she joined JPL oger was set on his path to JPL by an esoteric mixture majored in physics and minored in ancient Greek, reflecting Sofia, “I joined for the free cookies but realized soon this was as a postdoctoral scholar. Her postdoctoral work focused Rof Mr. Wizard and learning about the Manhattan the diversity of her interests. Emma came to JPL from Caltech something I wanted to do.” Sofia went on to study engineering on developing a fully integrated microfluidic device capable Project before he was even a teenager. In some respects, as a postdoc to develop UV single-photon detectors. She has physics at Chalmers University of Technology in Sweden and of performing automated analyses of amino acids for use in his path was conventional: he received a BS in physics from continued in the same field, working on detectors for the Deep achieved a double masters in nano-science and technology spaceflight. Her research since then has generally focused on Caltech followed by a PhD from UC Berkeley’s Physics Space Optical Communication project to be demonstrated on before completing her PhD in “Micromachining of high developing new strategies for using capillary electrophoresis Department. At JPL, Roger designs, tests, and fields the Psyche mission. She characterizes these detectors and frequency components.” Sofia learned about JPL when she (CE) and microchip electrophoresis (ME) to analyze inorganic 46 cryogenic detectors. He and others took a calculated integrates them into the ground receiver that will be located met a friend at a conference who, in turn, had a friend who and organic molecules. Her current work involves developing 47 risk and attempted to develop a new cryogenic detector, at ’s 5 m . She finds great worked at JPL. Sofia came to Caltech at the end of September strategies for simultaneous analysis of inorganic ions and defying conventional that suggested it would satisfaction in making a device that performs better than 2017 with three bags and five days to find an apartment. She organic acids via ME and contactless conductivity detection, not work. However, the sensor they developed, a thermal expected at the first attempt and then finding that her model’s did not know what to expect from Pasadena or JPL, where as well as analysis of organic by CE and mass kinetic inductance detector (TKID), did work. Roger still predictions match the measurements she has taken. Emma she would undertake her postdoctoral work. Before arriving, spectrometry. Fernanda enjoys sharing her work with others, remembers the day when the team finally got their testbed greatly enjoys volunteering one weekend each year when JPL she had an idea about developing a MEMS rotating switch. including her own family: she was proud to take her brother device working very well after a small adjustment and is open to the public, stating, “It’s fun to try and explain my job After much hard work to model, fabricate and test the device, and his friends on a tour of JPL. Fernanda says of their visit, found that the noise level dropped to an unimaginably to people from such diverse backgrounds.” This philosophy is Sofia experienced a magic moment she will never forget: she “The whole group was so fascinated with everything they saw low level. In fact, what they had developed was a working a reflection of her own development as a scientist. When asked saw her switch actually move. She presented her work to a that it made me value my work even more!” In 2019, Fernanda solution to many problems in the field. To quote Roger, what she would say to someone wanting to follow a career like larger audience and was rewarded by winning a JPL Best was a co-recipient of JPL’s Lew Allen Award in recognition “That sort of serendipity is magic.” Roger’s experiences, hers, she emphasized the need to pay attention to one’s life Postdoc Poster award. Sofia found an apartment only three of “excellence in the development and validation of chemical starting with those of his childhood, have made him realize outside of science and math, no doubt because she draws on days after arriving in Pasadena, but more importantly, she has analysis methodology and electrophoresis instruments NASA for 3 Decades of Innovation that physicists are modern-day wizards. many of her non-STEM skills for her job. thoroughly integrated into the Caltech and JPL communities. for future life detection missions.”

JPL Microdevices Laboratory | 2020 Annual Report To boldly Each member of the teams making go up the MDL workforce knows their plan for the present and the near future. However, each group also shares a common vision of where they will jointly go in the more distant future.

MDL’s leadership, vision, and innovation are illuminated in its rise to the challenge of JPL and NASA missions through its contributions of core competencies.

48 49 3 Decades of Innovation for NASA for 3 Decades of Innovation

New JEOL JBX 9500FS e-beam lithography system.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY

E-beam fabricated ultraviolet E-beam grating for Mars 2020 SHERLOC. lithography & diffractive optics E-Beam technologies are at the core or over three decades, electron-beam litho- The capability of MDL to fabricate diffractive optics on Fgraphy has been an enabling technology for MDL. convex and concave substrates and blackened precision of MDL and include state-of-the-art The MDL team has provided MDL users with state- slits has enabled JPL to design, build, and fly extremely nanolithography and development of of-the-art nanolithography capability and expertise high-performance imaging spectrometers for many and developed non-standard e-beam fabrication airborne and spaceborne missions. These spectrometers, new techniques to fabricate unique techniques to realize unique components and devices require custom designed and fabricated gratings with for JPL’s most challenging instrument designs for precisely shaped grooves that produce tailored spectral components for many JPL instruments NASA and non-NASA missions. MDL developed unique efficiency over multiple octaves in wavelength, allowing in areas including optics, electronics, analog e-beam techniques for creating grayscale equalized signal-to-noise spectral imaging. Prior to delivery, surface-relief structures in a variety of polymers, the performance of the optics is measured at MDL, and this and micro-mechanics, with applications dielectrics, metals, and semiconductors. This allowed capability has helped greatly over the years to optimize from Earth science to astronomy. creation of nearly arbitrary transmissive and reflective the spectral efficiency, scatter, and wavefront error diffractive optics such as blazed gratings, lenses, and characteristics of our components. Over the years, we have computer-generated holograms, for wavelengths delivered gratings and/or slits for the following spaceborne ranging from ultraviolet to long-wave infrared. More spectrometers: Hyperion (Earth Observing-1), CRISM importantly, MDL developed methods for fabricating (Mars Reconnaissance Orbiter), ARTEMIS (TacSat-3), these grayscale surfaces on non-flat (convex/concave) Moon Mineralogy Mapper (Chandrayaan-1), and airborne substrates with up to ten millimeters of height variation. spectrometers: AVIRIS-NG, CAO, NEON, HyTES, PRISM, This necessitated development of custom e-beam and UCIS. We have also recently fabricated and delivered calibration techniques, substrate mounting fixtures, optical components for instruments on the Mars 2020 and pattern preparation software. rover, Perseverance: an ultraviolet grating for SHERLOC and two spot-array generating diffractive optics for PIXL. The processes for fabricating binary nanoscale structures are continually evolved and utilize both metal The MDL team is constantly challenged by our JPL science lift-off and plasma etching to realize functional devices. and instrument colleagues to fabricate ever more difficult Precise patterns can be fabricated on tiny pieces of components with higher performance. Our current and MDL e-beam novel semiconductor materials as well as on very large near-future work is focused on developing fabrication fabricated concave grating for MISE. optical substrates up to 230 mm square. Combining processes for our largest ever concave grating, silicon MDL precision lithography with micro-mechanical silicon immersion reflection and transmission gratings, high- etching processes produces slits and shaped apertures efficiency and low-wavefront-error large echelle gratings, with unmatched accuracy and uniformity. These precise nanoscale metasurface gratings for spectrapolarimetry, silicon apertures are frequently made extremely black and plasmonic infrared bandpass filters. using a special cryo-etching process, making them ideal for many optical instruments. MISE Gratings. MDL recently fabricated and delivered 50 concave gratings for the Mapping Imaging Spectrometer 51 for Europa (MISE). The MISE grating design was our most challenging fabrication to date, due to the diameter and curvature (f/1.4) and wavelength range (0.8 to 5.0 μm). We had to develop new grayscale e-beam grayscale exposure schemes and concave grating fabrication The Mars 2020 Mission methods to achieve the tightly specified spectral will examine sand-grain efficiency curve with very low scattered light. size samples for signs of life, past or present.

MISE will produce maps of key NASA for 3 Decades of Innovation PIXL instrument compounds to answer questions about engineering model in test. Europa’s ocean and its habitability.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY Semiconductor

(A) Electro-mechanical transducer. waveguide Si (B) Acousto-optic modulation. lasers 250 m & μ

integrated Microwave Photonics. Photonics enables new Junction of field-assisted photodetector. capabilities for creating and manipulating microwave The integrated waveguide runs vertically underneath the emitter and collector MDL developed a specialized laser that signals, with dramatic improvements in performance, terminals, shown here with a multi-tip Harvard flew on a NASA high-altitude flexibility, and bandwidth over existing all-electronic configuration. The gap between tips is 25 nm, photonics research balloon. This was part of and emitted electrons in < 20 fs. systems. So-called “microwave-photonic” technologies the NASA Undergraduate Student Instrument Project (USIP) program. will be crucial to addressing challenges ranging from MDL’s pioneering work on development increased spectral utilization to developing state-of-the- THZ Detectors. The generation of radiation above 100 art subsystems for future spaceborne radars. MDL is and space qualification of unique hen MDL was established 30 years ago, GHz is a limiting technology for a number of applications developing microwave photonics devices to address these semiconductor lasers enabled a Wone of its first research areas was development in spectroscopy and microwave photonics. Existing of semiconductor lasers. Led by the pioneering work applications. One example is the demonstration of the first technologies generate photocarriers in a semiconductor via new era in planetary and Earth of Dr. Siamak Forouhar, MDL created and grew integrated acousto-optic modulators in a silicon photonic illumination with ultra-short optical pulses and then collect atmospheric studies, but it is now the capability to produce lasers that enabled a wide circuit. These components enable direct information the photocarriers in nearby terminals. The finite speed of variety of flight projects. The lasers were used for transduction between microwaves, hypersound, and carriers in the semiconductor and poor overlap between the optical mode and the absorber result in poor responsivity in flux, transitioning to the next spectrometers that allowed precise, sensitive analyses light, permitting a variety of operations, including optical at > 100 GHz. MDL is pursuing a potentially revolutionary transformational approach to produce of gas abundance and isotope ratios on Earth and for waveform synthesis, nonreciprocal light routing, and de- modulation—critical functions within a future chip-scale technology: a field-assisted photoemitting detector. This revolutionary new systems. in situ planetary instruments. Generally, lasers in the detector uses integrated photonics to efficiently focus light relevant wavelength were not commercially available LiDAR transceiver. Other areas of active research include ultralow-noise photonics-based microwave generation into an absorbing metal. Excited electrons generated in and had to meet very stringent specifications: they had the metal tunnel into a vacuum, assisted by a large electric for coherent spaceborne radars and high-performance to operate with high spectral purity and tunability, have field applied to the surface. The tunneled electrons travel high output power, and operate at ambient temperature. optomechanical oscillator technologies. ballistically to a nearby collecting terminal. Vacuum transport MDL created lasers with very long lifespans; for plan- Integrated Photonics with Applications in Metrology. and low capacitance result in theoretical bandwidths of etary use, their duration of use may be extensive to Optical metrology systems require extremely stable, narrow- > 500 GHz. Improved responsivity will allow operation with allow for time to reach the destination, undertake the linewidth, compact laser sources. Laser diodes can be continuous-wave, efficient telecommunications lasers, dramatically improving SWAP-C performance. This device Tunable Laser laser’s nominal operation, and, in many cases, continue made quite small with a narrow linewidth, but their stability would enable a host of remote sensing applications, including Spectrometer on during an extended mission. Thus, for many years, MDL depends upon environmental factors such as temperature NASA’s Curiosity micro-radar and THz spectroscopy on remote platforms. Mars Rover. was one of the few places that could make and qualify and air pressure. Consequently, these small lasers require semiconductor lasers for space. large feedback control systems to maintain particular Integrated Photonics Platform for UV. The UV region is ambient conditions. Sample analysis at particularly attractive for applications in spectroscopy and MDL’s achievements in producing lasers for NASA Mars Instrument suite. The alternative solution developed at MDL is to feed a precision metrology. It also holds great promise for planetary missions include the first space-qualified 2.0 m µ small fraction of the laser’s output signal through a chip- exploration, especially in the quest for habitable planets. For semiconductor laser for the 1998 Mars Polar Lander, scale 2x2 heterodyne interferometer, where a meter-long instance, instruments incorporating deep-UV light sources an interband cascade laser at 3.27 µm for TLS delay line in one branch of the interferometer creates an can facilitate the search for biosignatures and assist with (see page 18), and record high-power single-frequency ultra-sensitive phase imbalance between the two optical bacterial identification on planetary bodies. lasers at 2.6 m for the Earth Venture Suborbital µ outputs. This passive chip can measure instantaneous laser Currently, few optical materials are capable of operating 52 (EVS-3) mission, Dynamics and Chemistry frequency variations on the order of 1 MHz, or 10 parts in 1 at such short wavelengths. Furthermore, optical components 53 of the Summer Stratosphere (DCOTSS). billion. If necessary, the sensitivity of the 2x2 heterodyne for on-chip integration necessitate patterning on a scale that interferometer can be further improved by increasing is highly demanding for conventional lithographic techniques. MDL now envisions evolving its traditional strength the length of the on-chip delay line. in laser development by combining it with others to MDL is working towards realizing a chip-scale platform that jointly produce new systems as revolutionary as their exhibits low optical losses and offers nonlinear operation. Our predecessors. Integrated photonics, a key enabling approach relies on state-of-the-art material processing and technology in many scientific areas, is aligned with fabrication techniques. Such a platform will enable a wide the technical competency of MDL’s microfabrication range of functionalities, from optical modulation to frequency tools and the laser team. Future possibilities include 4.5 mm synthesis. The developed devices will be characterized using integrated systems for quantum photonics and the use a unique MDL measurement testbed designed, implemented, NASA for 3 Decades of Innovation and tailored for integrated photonic devices operating of new materials beyond silicon for wavelength ranges Top view of 0.25 m spiral waveguide. in the short-visible to deep-UV range. in the UV and IR.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY UV detectors & systems

Advances generated at MDL will 4kx2k SRI CMOS array Artist’s conception of a binary neutral star merger (photograph courtesy of creating gravitational waves and their electromagnetic extend our vision to unprecedented SRI) were SL doped and counterpart. Dorado will detect the UV counterpart UV optimized. of gravitational waves. (Inset) A 2D-doped version sensitivities, enabling future of this device with MDF would fly on Dorado. discoveries and capabilities. The team enjoys collaborations with universities and FIREBall-2 Flight of High-Efficiency UV Detector industry partners. Innovation often begins with identifying Enables Detection of Bright Targets. Analysis of flight technology gaps through conversations with astrophysicists, data from the Faint Intergalactic-medium Redshifted planetary scientists, and other scientists, fueling needed early 30 years ago, as part of a group of early MDL Emission Balloon (FIREBall or FB)-2 revealed detection technological innovations and paving the way for technology recruits, a new PhD from Caltech’s Physics Department of targets not observed with FIREBall-1. When FB-2 was N Sensor board and detector for the near Helix Of Nebula Venus crosses infusion through collaborations. To create better imaging started as a postdoctoral fellow at MDL and began what launched in the Fall of 2018, the instrument performed UV channel of the SPARCam for SPARCS. the line of sight between and detection technologies, the group has formed strategic has become a key vehicle to explore the ultraviolet universe. The NUV flight candidate detectors the sun and Earth four times beautifully despite the shortened flight due to a balloon industry partnerships with groups such as Teledyne-e2v, Another Caltech graduate then joined, nucleating the team, centered at 280 nm meet baseline every 243 years in pairs defect. These results were analyzed and described in requirements in preliminary tests. separated by eight years. SRI International, and STA. and the journey of the Advanced Detectors, Systems, and the paper, “Delta-doped electron-multiplying CCDs for FIREBall-2,” by lead author Gillian Kyne, who led the delivery Nanoscience Group began. The effort started as the first MDL continues pushing performance boundaries in of the FB-2 detector system. The paper was featured on demonstration of molecular beam epitaxy (MBE) growth on The team’s core efforts are to develop high-performance the UV by exploring novel device architectures, plasmonics, the cover of the Journal of Astronomical Telescopes, charge-coupled devices (CCDs) to create high-efficiency ultraviolet detectors via nanoengineering of surfaces and to and metamaterials, in collaborations with academia, e.g. with Instruments, and Systems (JATIS)-Detector special issue ultraviolet detectors with stable responses and to solve innovate methods for band structure engineering in silicon the University of Pennsylvania, USC, and Dartmouth. the hysteresis problem that had plagued the Hubble Space and other material systems. The atomically precise control in January 2020. The detection of GALEX targets by FB-2 is in large part because of the use of MDL’s delta-doped Telescope’s wide-field planetary camera-1. This was enabled of surfaces and interfaces using MBE 2D doping techniques, Enabling Astrophysics in CubeSats and Flagship by innovative MBE processes and concepts developed by including delta doping and, more recently, superlattice doping, and custom-coated Teledyne-e2v’s electron multiplying Missions. MDL UV detector technologies are enabling CCD (QE >5x over FB-1 detector). MDL scientists Drs. Paula and Frank Grunthaner. From those ensures detection of every photon absorbed into the silicon astrophysics science in compact instruments. Two beginnings emerged an internationally recognized team of detector, thereby rendering silicon detectors with 100% examples are: the Star-Planet Activity Research CubeSat Exploring Metamaterials for Tailoring Response. experts who are leading innovations in ultraviolet instrument internal quantum efficiency (QE) or reflection-limited response. (SPARCS)—a 6U CubeSat mission led by Arizona State technologies and instruments, including high-performance Furthermore, the innovative detector-integrated filters— Using asymmetric response for polarization discrimination University (PI, Evgenya Shkolnik) and Dorado—A Small in transmissive filter structures at UV wavelengths while detectors, highly reflective mirror coatings, filters, ultraviolet in part enabled by atomic layer deposition (ALD)— tailor the Explorer-Mission of Opportunity selected for step 1 and scientific cameras, and ultraviolet imaging spectrometers. absorption of the photons and therefore the spectral response rejecting of out-of-band wavelengths were rectangular led by Goddard Space Flight Center (PI, Brad Cenko), features. More optimization will be done to further reduce The team comprises leaders in their fields who have received of the detector. Because silicon is universally used for visible comprising two UV instruments in two 12U cubesats. Both recognitions including, collectively, three Lew Allen Awards of imaging, great investments have been made in development overlap between the two contributions. SEM image of a missions rely on the breakthrough MDL development that rectangular hole array in Al. The large aspect ratio of the Excellence; a Charles Elachi Early Career Achievement Award; and advancement of detector design in silicon, all of which tailors the UV response of the detector by incorporating three SPIE Rising Researcher Awards; a NASA Exceptional make silicon an attractive option as an ultraviolet imager. rectangles (50 x 150 nm) produces a large splitting visible rejection filters into the detector. The detectors in in the transmission peak of the two polarizations (right). Achievement Medal; IEEE Distinguished Lecturer Award; However, silicon is blind in ultraviolet and highly sensitive both of these missions are the result a collaborative effort and multiple individuals with fellow status with two in SPIE, in the visible spectrum. Using MBE’s 2D doping processes with Teledyne-e2v to apply MDL innovations to their CCDs. two in the American Physical Society (APS), one in IEEE silicon detector surfaces are engineered to allow detection and one in the National Academy of Inventors. of ultraviolet photons with long-term stability and without 2D-doped detectors and MDFs pioneered by this MDL hysteresis. The detector’s response can be enhanced with group have enabled several other astrophysics and dielectric coatings bytaking advantage of ALD’s exquisite planetary concepts. Two of four flagship mission concepts control and precision. The detector response can also be in astrophysics have baselined their detector or coating tailored using metal-dielectric filters (MDFs) incorporated innovations from this group. 54 into the detector surface. Using MDL’s two ALD machines, 55 QE records have been set in the 100-300-nm range and The results of the FIREBall flight were analyzed and published in JATIS and made beyond. In this breakthrough development, high efficiency the cover of its special issue on detectors. in UV is paired with an out-of-band photon rejection ratio Highly Uniform, High-efficiency Superlattice-doped of 3-4 orders of magnitude. CMOS Arrays for Planetary and Astrophysics The group has expanded MDL’s UV core competencies further Applications. In collaboration with SRI International and via innovations in mirror coatings, gratings, and filters. An early the Applied Physics Laboratory, MDL received and version of the coatings was incorporated into the SHERLOC processed wafers with the same design as the Europa- instrument on Mars2020 and one version was flown in the Clipper EIS—Europa Imaging System. These SRI CMOS SISTINE rocket (see page 28). Similar interface engineering devices are superlattice doped, optimized for FUV techniques in collaboration with SUNY-Poly have enabled air- and NUV, and baselined for an explorer mission. NASA for 3 Decades of Innovation stable GaN photocathodes—a significant improvement over the state of the art.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY

Mid- This group has been at the forefront of advanced infrared Illustration depicting detector technology development and has developed the HyTI CubeSat many patented concepts. Capabilities include novel in low Earth orbit. detector design, epitaxial material growth, end-to-end infrared large-area detector fabrication process, characterization of infrared focal plane arrays, and delivery of focal planes and integrated dewar cooler assemblies to infrared instruments. detectors One of the group’s outstanding recent achievements The goal of the Infrared has been the development of the antimonides type-II superlattice-based HOT BIRDs for space and terrestrial Photonics technology at MDL applications. HOT BIRD is a breakthrough infrared detector is to develop novel high- technology capable of operating at 150K with spectral Dr. Gunapala is preparing to open coverage of not only the entire mid-wavelength infrared performance III-V compound the front flange of an Integrated (MWIR) atmospheric transmission window (3–5 mm) but Dewar Cooler Assembly (IDCA) also the short-wave infrared (SWIR, 1.4–3 mm) and the near FPA mounted on cold to install a focal plane array on semiconductor-based infrared infrared (NIR, 0.75–1.4 mm) transmission windows with very finger before IDCA to the cold finger of the IDCA. integration process. detectors and focal plane arrays high quantum efficiency. The HOT BIRD focal plane array is at the heart of CIRAS and HyTI, the 6U CubeSat that was for NASA and other government recently selected by NASA’s In-Space Validation of Earth his year, MDL is celebrating its 30th anniversary as the Science Technologies (InVEST) program. agencies, thereby enhancing Tleading semiconductor device fabrication facility in the NASA community. Making infrared detectors has long been Innovations at MDL enable observations of our planet in An Integrated Dewar U.S. competitiveness worldwide. Cooler Assembly (IDCA). an MDL core competency, one that has been enabled by an infrared region just beyond our reach, as well as mapping having full access to MDL’s unique, constantly evolving, and of the world’s ecosystems, defense, cloud structures, and constantly improving semiconductor fabrication facility. This natural disasters. However, the current state of the art irreplaceable facility was essential during the development is never sufficient, even in a technology area that has of breakthrough infrared detector technologies such as produced devices that work at previously unimaginably Artist rendering High-Operating-Temperature Barrier Infrared Detectors (HOT high temperatures. The ultimate goal is to develop infrared of CubeSat Infrared BIRDs) and delivery of infrared focal plane arrays to flight sensor assemblies that could operate in space solely Atmospheric Sounder projects such as the CubeSat Infrared Atmospheric Sounder on passive cooling. (CIRAS) based on MWIR HOT-BIRD focal (CIRAS) and the Hyperspectral Thermal Imager (HyTI). Products for custom applications and space exploration plane array. Those working on this technology are eminent in their are designed, fabricated, characterized and delivered and include mid-wavelength and long-wavelength infrared The Infrared Photonics Technology field and have been recognized with many awards and Group. This group’s technical capability commendations. Some selected recognitions include a NASA instruments and integrated sensor assemblies. Other extends from basic device modeling products include large-format, state-of-the-art HOT- Outstanding Leadership Medal, two NASA Exceptional Two megapixel and based on quantum mechanics to Engineering Achievement Medals, a NASA Early Career MWIR and LWIR BIRD focal planes and high-performance one VGA, 1Kx1K focal fabrication and demonstration of novel multi-band and broadband infrared imaging solutions. planes 20 and 30 infrared detectors and focal planes that Public Achievement Medal, an IEEE Aron Kressel Award, microns pixel pitch. enable new instruments for NASA two IEEE Distinguished Lecture Awards, an MSS Herschel These new technologies, designs, system integration, and DoD missions. Award, a SPIE George Goddard Award, and two feature and instrumentation can enable new sensing capabilities articles in Applied Physics Letters. They have produced over that were previously not possible. There is also a quest for 350 publications and hold 26 US and international patents monolithic integration of metasurfaces such as flat lenses, on infrared detection technologies. Many of the infrared filters, and polarizers to further increase the sensitivity detector technologies developed at MDL, including the HOT and operating temperature of infrared detectors. 56 BIRD, have been successfully transferred to US industries for 57 government and commercial applications. FLIR, one of the leading infrared camera manufacturers for the commercial market, has also licensed these patents. At the heart of this area of work is the integrated design, fabrication and delivery of novel infrared (short-wave, mid- wave, long-wave, and very-long-wave) focal plane arrays based on III-V compound semiconductors. The Infrared Photonics Technology Group in the MDL family effectively owns this competency and has a goal of developing new high- Twenty-five 2Kx2K performance infrared detectors and focal plane arrays for HOT BIRD detector NASA for 3 Decades of Innovation NASA and other government agencies, thereby enhancing arrays on a 6-inch GaSb wafer. the United States’ competitiveness worldwide.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY CORE COMPETENCY MEMS & Super-

Herschel Space Observatory, Spectral microsystems conducting and Photometric Imaging Receiver (SPIRE): enabling detectors; found distant infrared-luminous galaxies. MEMS technology continues to shrink devices the mass, size and power requirements uperconductors operate at low temperatures with a small of vital instruments and systems needed (A) AlGaN/GaN heterostructures stack MDL’s superconductor technology with 2DEG and with fabricated IDTs/ Senergy gap and highly nonlinear electrical properties, for space missions, thus also shrinking pads for SAW devices, (B) 3D diagram will power communication in the next making them uniquely suited for use in ultrasensitive of the fabricated SAW. electromagnetic detectors. Even before MDL’s founding 30 the mission cost. generation of crewed missions and years ago, the JPL Superconducting Materials and Devices Tunable SAW-Based Diffraction Gratings. Grating- enable the precise measurement Group was exploiting these characteristics to develop and based imaging spectrometers are some of the most deploy novel superconducting sensors and closely related common remote sensing instruments in planetary, Earth, of the smallest things, from single non-superconducting sensors for applications in astrophysics; and astrophysical sciences. In such instruments, the grating photons to tiny shifts in temperature, Earth, planetary, and cometary sciences; and optical pitch affects the spectral resolving power, spectral coverage communications. versus overlap, image quality, and payload size, among to answer the biggest questions Heterodyne Mixers. The highly nonlinear current-voltage others. In all instruments in current/planned missions, about our universe. the diffraction grating is machined such that once it is characteristics of superconducting tunnel junctions enable patterned, its pitch cannot be changed. Therefore, to cover heterodyne mixers with unsurpassed sensitivity from he history of MEMS activities at MDL is as old as millimeter (mm)-wave to terahertz (THz) frequencies. MDL itself. In the late 1980s, the advent of silicon a wide spectral range, a number of diffraction gratings T are needed, resulting in increased payload size and cost. Beginning in the mid-1980s, Dr. Rick Leduc and several JPL micromachining led to the development of devices such coworkers, in collaboration with Caltech, produced tunnel- as accelerometers, , and thermal infrared The JPL Research and Technology Development program sponsored a project to develop a tunable diffraction grating junction-based mixers for deployment in terrestrial telescopes, detectors. In the past few years, MEMS technology has been balloons, aircraft, and the Herschel Space Observatory, which used to micro-fabricate the Pre-Concentrator (PC) and using surface acoustic waves (SAW) to enable broadband spectrometers with high resolving power, without trading operated from 2009–2013 . In 2019, worldwide excitement Gas Chromatograph (GC) unit (together forming the PCGC over the first images of a led to interest in new subassembly) of the SAM instrument, which checks the off spatial resolution. The final tunable pitch diffraction grating will lead to a new class of spectrometers that have mixers for the Next Generation Event Horizon Telescope quality of the cabin atmosphere on the International Space and even Very Long Baseline Interferometry (VLBI) in space; Station (see page 68). The unit was designed, fabricated, and high spectral resolution (<0.5 nm at 1 μm wavelength) over a large wavelength range (>2 octaves). Such instruments will these technologies would deploy in three to five years and tested at MDL and uses a novel MEMS technology to produce in the next decade, respectively. Additionally, Dr. Daniel the unit, which has 75% less mass and 85% less volume than enable improved science at planetary bodies by permitting identification of more surface materials. Cunnane is leading development of Josephson and Hot its predecessor. Electron Bolometer (HEB) mixers based on high-temperature MEMS technology has considerable breadth, but recently, The delay line between two sets of interdigitated superconductors for use at temperatures up to 20 K MDL work in this area has focused on three development transducers (IDTs) supports the SAW with surface and frequencies above 1 THz. efforts: Gallium Nitride Clocks (GaNTiming), a Resonant IR topography that is naturally sinusoidal. In our approach, this delay line is used as the diffraction grating without actually Transition Edge Sensors. In the transition between a Detector for operation in High Temperature Environments normal metal conductor and a superconductor, very small (HotIR), and a Tunable Pitch Diffraction Grating using Surface patterning anything on the delay line itself (Fig. A). As the SAW is sinusoidal, it can only support m = -1, 0, +1 diffractive changes in temperature cause large changes in resistance. Acoustic Waves (Tunable SAW Grating). The aim in all cases For two decades, Anthony Turner and coworkers at MDL is to produce performance equivalent to that of state-of- orders. By working near the Littrow angle, a mechanical baffle and beam dump can be placed to eliminate the spectral have collaborated with Caltech and other institutions to the-art devices or components but with reduced mass, produce imaging arrays based on Transition Edge Sensor size and power requirements. This is a particularly valuable overlap. To tune the frequency and thus the pitch of the diffraction grating, we tune the pitch of the IDTs using phased (TES) bolometers. Increasingly complex mm-wave focal plane 58 contribution to CubeSat missions, many more of which can (A) A 10,000 MKID PtSi on Sapphire 59 array. More specifically, the λSAW is varied by introducing a arrays (FPAs) have been deployed at the South Pole on several now be launched because of the lower overall cost. array for DARKNESS mounted generations of radio telescopes, including the Background matching phase delay to the IDT, similar to the constructive in its microwave package. Making MEMS components and devices requires most interference of a phase array radar (Fig. B). Imaging of Cosmic Extragalactic Polarization (BICEP) of MDL’s available technologies, including electron-beam telescopes (i.e. BICEP-2, BICEP-3, and the BICEP Array), To prove the concept, the frequency of the device was (B) Detail image of the array showing and the Keck Array. These instruments have enabled cosmic lithography, silicon micro-machining, aluminum nitride the CPW transmission line with bond sputtering, and electron-beam deposition. However, it is the demonstrated to be tunable by changing the configuration pad for one feedline. microwave background (CMB) polarization measurements with skillful design and integration of these approaches that marks of the IDT. A tunable device was fabricated on a lithium unprecedented sensitivity to search for the imprint of gravity niobate substrate. For this demonstration, the IDT finger waves on the CMB as a signature of inflation in the earliest the successful implementation of MEMS technology. This (C) Further detail of several MKID pixels. MDL technology has a history of past and present successes width was 5.5 mm. The frequency could be tuned by tuning The densely meandered patches at the top moments of the universe. Such technical demonstrations and achievements. We can extrapolate these successes to the effective spacing of the IDTs by applying specific phases of each pixel are the photosensitive and scientific studies are critical to making the case for CMB the future, confident in the ability to fulfill the ambition of to each IDT finger. The prototype SAW grating covers a inductors, and the large sparse sections are satellite observatories such as PICO, CoRE, and LiteBIRD, NASA for 3 Decades of Innovation frequency range of 86 MHz to 360 MHz, corresponding the interdigitated capacitors used to tune which are currently proposed or under study for startup continuing to reduce the size and improve the performance each MKID to a unique resonant frequency. of the products developed with MEMS technology. to an optical range of 1.3 μm to 9 μm. in the coming decades.

JPL Microdevices Laboratory | 2020 Annual Report Island 85 mm Tunnel (A) Scanning junction 4x ROIC Pedestal for electron micrograph 64x8 detector of an individual Mesh array absorber EMI filters detector. (B) QCD Bypass Wirebonds chip mounted in capacitors for RF box. power supply Voltage regulators MEC array. Mounted chip assembly On-sky diffraction limited Y-band of 20k pixel MEC array: 140 X 146 image from MEC of quintuple star pixels with 10 microwave drive system Theta Ori B. Quantum Capacitance Detectors. Combining Bicep Array Telescope: New dual band dual PREFIRE EM lines, 150 um pitch, 22 X 22 mm. superconductivity with nanoscale tunnel junctions introduces Focal plane for 30 and polarization TES Detector Focal plane assembly. 40 GHz CMB observation. Pixel (30 and 40 GHz). new properties, leading to an artificial quantum two-level Kinetic Inductance Devices. Superconductors have system, the single--pair box (SCB). The quantum a kinetic inductance that is sensitive to changes in capacitance detector (QCD) is a far-IR sensor based on the Higher-Temperature (non-superconducting) 2019 Technology Developments temperature and Cooper pair density (effectively the extreme sensitivity of the SCB to pair-breaking radiation that Detectors. Thermopiles are essentially series-connected PREFIRE. As the PREFIRE mission approaches its 2021 number of weakly bound electron pairs that cause is being developed by Drs. Pierre Echternach, Andrew Beyer thermocouples. Thermopile far-infrared (FIR)-IR imaging launch date, an MDL team led by Drs. Matt Kenyon and superconductivity). In a Kinetic Inductance Detector (KID), and Matt Bradford. The QCD consists of an SCB embedded in arrays are a non-superconducting technology that grew Giacomo Mariani has demonstrated a new focal plane array absorption of photons results in a shift in the resonance of a superconducting resonator. A single quasiparticle tunneling out of early MDL superconducting sensor development (FPA) board that meets mission requirements; completed an LC circuit (an inductor/capacitor tuned resonant circuit). event produces a frequency shift comparable to or larger than over 20 years ago. Frustration with materials problems in a new flight FPA board that is even more compact than In a KID array, each pixel has a unique resonant frequency a resonator linewidth. QCDs have demonstrated photon shot high-temperature superconductors led to the development the EM FPA board, enabling it to fit into the small payload and a single reactively coupled microwave feedline can read noise limited performance with useful optical efficiency for of uncooled detectors where extreme sensitivity is not volume; and developed a flight FPA design that minimizes out thousands of pixels. Microwave KIDs (MKIDs) originated optical loadings between 10-20 and 10-18 W, corresponding to a required and the desired operating temperature is too high the capacitance between the detector chip and ground to -20 1/2 for conventional superconductors. Development is currently two decades ago with Drs. Peter Day and Rick Leduc at noise-equivalent power (NEP) below 10 W/Hz . The QCD reduce the readout integrated circuit (ROIC) noise. JPL, Dr. Jonas Zmuidzinas at Caltech, and other coworkers. is being developed as a far-IR direct detector for the Origins being led by Dr. Matt Kenyon. Recent applications include The high sensitivity of MKIDs and ease of multiplexing Survey Spectrometer, an instrument intended for the Origins FIR spectrometers for the Radiation Budget Instrument (RBI) Frequency Multiplier. High-efficiency frequency led to wide interest in MKIDs for imaging arrays over Space Telescope. The telescope is under consideration and the planned Polar Radiant Energy in the Far Infrared multiplication was recently demonstrated using a device frequencies from mm-wave to UV for terrestrial, planetary, as a flagship mission in the 2030s. Experiment (PREFIRE). similar to the microwave parametric amplifier. The nonlinear kinetic inductance of a NbTiN microstrip was used to and astrophysical investigations. A recent example of this 2019 Highlights technology in action is a passive mm-wave telescope for Superconducting Nanowire Single-Photon Detectors. generate harmonics of a fundamental signal. A large use where optical wavelengths are obscured; the telescope The Superconducting Nanowire Single-photon Detector BICEP. In December of 2019, an MDL TES focal plane was percentage of the fundamental power can be converted to is being developed with Office of Naval Research (ONR) (SNSPD) is based on a narrow superconducting wire biased integrated into the 30/40 GHz BICEP Array telescope at the third harmonic, creating a very highly efficient frequency support (see page 15). This instrument also serves as a near its critical current. Absorption of as little energy as a the South Pole Station. This camera will help the BICEP multiplier. In this initial demonstration, the device achieved technology demonstrator for new astrophysics experiments single photon drives the wire into the normal state, producing CMB polarimetry program monitor galactic synchrotron approximately 40% efficiency at 1 K and approximately in the coming decade, such as the Stage-4 CMB experiment. a voltage pulse. SNSPDs provide the highest available timing foregrounds as part of ongoing efforts to constrain the 30% efficiency at 4 K, converting a 34 GHz signal to a 104 At shorter wavelengths, far through mid-infrared (IR), MKID resolution from UV to mid-IR wavelengths. Over the past inflationary tensor/scalar ratio r. The focal plane contains GHz output with 2-3% bandwidth. Simulations show that arrays are under development for the Terahertz Intensity decade, the MDL team led by Dr. Matt Shaw has been a leader 526 antenna-coupled TES bolometers and is the most the efficiency can be improved by a factor of two. A major Mapper (TIM) balloon experiment and flight mission in SNSPD development, currently holding world records sensitive to date for this application. JPL’s collaborators, benefit of this technology is that most of the power that is concepts Galaxy Evolution Probe (GEP) and the Origins for SNSPD detection efficiency, timing resolution, active including Caltech, Harvard, Stanford, and the University not converted to the desired output is reflected off the chip Space Telescope (OST). In the visible/NIR region, MKIDs area, and dark counts. MDL also collaborates extensively of Minnesota, will field test these detectors and advance rather than lost as heat on the cold stage. This technology can sense individual photons and measure their energies, with other leading groups, including MIT, the MIT Lincoln them to Technology Readiness Level 5. Drs. Roger O’Brient could have a major impact on future heterodyne receivers allowing for integral field spectroscopy. Working in this Laboratory, and the National Institute of Standards and and Anthony Turner designed the modules and detectors to enable much larger arrays than have been achieved in regime, Dr. Bruce Bumble is part of an ongoing collaboration Technology (NIST) Boulder. MDL SNSPDs have a central role in collaboration with Caltech students and staff. Dr. Clifford the past. Each pixel of an array needs a local oscillator, and with Dr. Ben Mazin’s group at the University of California in the Deep Space Optical Communication (DSOC) ground Frez, Krikor Megerian, and Dr. Alexis Weber fabricated the existing technology requires 0.5-5 W of power per pixel. Santa Barbara to develop the MKID Exoplanet Camera (MEC). terminal for the Psyche mission scheduled for launch in 2022. detector arrays at MDL, and Dr. Turner integrated them into The proposed technology should scale to 1-2 THz and They are also being integrated into several new NASA laser their packaging with readout electronics. JPL scientist and require just a few milliwatts of power per pixel. This work A suite of other promising technologies grew out of the initial communication demonstration projects, including Optical-to- Caltech Professor Jamie Bock has led the development of is funded by the JPL R&TD program. The team includes MKID development. For example, thermal KIDs (TKIDs) Orion, a crewed flight project; the RF/Optical Hybrid project, the camera itself. The BICEP Array will have a total of four Principal Investigator Dr. Daniel Cunnane and are bolometers that use the temperature-sensitive kinetic in which a retrofitted Deep Space Network antenna works as cameras, with JPL providing three additional focal planes Co-Investigators Drs. Peter Day and Rick Leduc. 60 inductance of a superconducting film in a resonator to an optical telescope; and SETH, a Pre-Phase A heliophysics over the next four years. This work is supported by the JPL 61 monitor temperature shifts from changes in loading. TKIDs SmallSat led by the Goddard Space Flight Center. Prospects Research & Technology Development (R&TD) program and SNSPD. In 2019, in collaboration with NIST Boulder and also offer multiplexing that is extendible to large arrays. for the coming decades include mid-IR SNSPD focal plane the NASA Strategic Astrophysics Technology program. Dr. Karl Berggren’s group at MIT, the JPL SNSPD team Currently, Dr. Roger O’Brient is leading the development of arrays for exoplanet transit spectroscopy on the Origins demonstrated both kilopixel imaging arrays and timing a 250 gigahertz (GHz) camera with 20,000 such detectors Space Telescope and ultra-low-jitter SNSPDs for an MIT resolution below 3 picoseconds (ps). In collaboration with for a BICEP deployment in 2021. Additionally, a microwave Lincoln Lab-proposed flight terminal for space-to-ground Dr. Rajeev Ram’s group at MIT, they also demonstrated frequency version of the kinetic inductance traveling-wave quantum teleportation. the first optical readout of an SNSPD using a cryogenic parametric amplifier developed at MDL has demonstrated modulator. quantum limited sensitivity over nearly an octave of bandwidth. Finally, Dr. Peter Day, Dr. Rick Leduc, and Dr. The Caltech team installs the JPL focal plane into the first BICEP Byeong Ho Eom continue to develop the Kinetic Inductance Array camera at the South Pole Observatory (left to right: student Parametric Upconverter (KPUP) for readout of TES Deep Space Optical Sofia Fatigoni, student Cheng Zhang, staff scientist Lorenzo Minutolo, NASA for 3 Decades of Innovation Communications (DSOC) will fly student Ahmed Solimon, and postdoctoral researcher bolometer arrays, and a highly efficient frequency multiplier on the Psyche Mission in 2022. Dr. Alessandro Schillaci). is also being developed (next page).

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY Submillimeter Bias area 100 μm 100 mm 10 μm he Submillimeter Wave Advanced Team (SWAT) Group Micrographs of the subwavelength emitting metasurface of a UCLA Terahertz Schottky diode based at MDL was started in early 1990 with the ambitious devices T made QC-VECSEL device (A) and of a JPL made MgB2 HEB mixer device sources developed at MDL goal of enabling new science missions using terahertz (THz) (B) used in the recent THz receiver demonstration. The mixer element can be used to observe star forming heterodyne instruments. At that time, most people had never is a small bridge seen in the center of the spiral antenna structure regions with very high spectral resolution. Submillimeter-wave and remote- heard of THz, even though at least 98% of the detectable covering the 0.6-5 THz spectral range. sensing technologies are used to radiation energy in the universe falls within the THz range. However, the demand for exploring the unknown 98% of The greater the number of pixels, the closer the instrument THz MgB2 HEB Receiver with Novel Solid-State Local develop components and technologies THz radiation compelled MDL to start the SWAT Group as gets to real-time scanning. Improvements in GaAs Oscillator Sources. An MDL team has demonstrated Schottky diodes also continuously break the world record the operation of a THz heterodyne receiver based on that enable spaceborne instruments a pioneer in THz research and to transform the status quo in THz technology with breakthrough developments. As for output power in frequency multipliers. Additionally, the MgB2 hot-electron bolometer (HEB) mixer with novel the early adoption of complementary metal-oxide- based on high-resolution heterodyne envisioned initially, MDL has successfully delivered many high-power solid-state local oscillator (LO) sources. MgB2 critical scientific instruments. For example, the Microwave semiconductor (CMOS) technology for THz applications is a high-temperature (≈ 39 K) superconductor that is a spectrometers. These instruments Limb Sounder (MLS) instrument measures OH radicals that enables instruments that are both compact and low cost. very attractive material for making HEB mixers because can be used for Earth remote sensing play a critical role in the ozone destruction cycle. Scientists Consequently, the mass, volume, and power requirements of the high operating temperature (~ 20 K) and the large using Microwave Instrument for the Rosetta Orbiter (MIRO) of CMOS-based radar, spectrometers, local oscillators, intermediate (IF) bandwidth of ~ 7 GHz that it provides. missions, planetary missions, and mapped the distribution of water in the plume of Comet synthesizers, and other devices have been reduced by MgB2 HEB mixers integrated with compact solid-state LO an order of magnitude. MDL will continue leading delivery sources can be prototyped for real astrophysics balloon astrophysics observatories. 67P/Churyumov-Gerasimenko as it approached the Sun. Additionally, the Heterodyne Instrument for the Far Infrared efforts for THz instruments. and SmallSat instruments. (HIFI) on the Herschel spacecraft enabled advances in A THz heterodyne instrument comprises an antenna, mixer, Recently, the same team gained access to the novel THz astrophysics by measuring the dynamics of . local oscillator, intermediate-frequency (IF) amplifier, back- Quantum Cascade Vertical External-Cavity Surface- Just as every person has unique fingerprints, atomic and end spectrometer, and CNC-machined waveguide blocks. Emitting Laser (QC-VECSEL) developed at UCLA. molecular gases have unique spectral lines. The heterodyne Each component plays a critical role in the successful Compared to the previous QCL, the new device is more THz spectrometer can identify the unique spectra of these implementation of future THz heterodyne instruments. powerful (up to 10 mW), operates at higher temperatures gases in THz for use in earth science, planetary science, THz heterodyne instruments are a core competency (at least 77 K) and has a very good quality Gaussian beam, astrophysics, and heliophysics applications. Furthermore, because of MDL’s capability to design and fabricate all which is important for telescope applications. QC-VECSEL the THz spectrometer can identify the adjacent spectral lines these core components. Major progress has been made LOs open the door to the development of new advanced of different molecules because of its high spectral resolution in developing most of the components, but in the last year, heterodyne array receivers at frequencies beyond 2 THz, (>106). As an example of this emerging technique, a THz Limb the greatest progress was made in antenna and mixer which have been difficult to access before. Many activities Sounder (TLS) can identify the 2.06 THz atomic oxygen (OI) technologies, as described below. are starting, and the goals are to achieve QC-VESCEL emission line and use it to measure the wind profile at devices at MDL and adjust the power consumption and an altitude of 100 – 140 km on Earth with the help Low-Profile Lens-Based Ultra-Light High-Performance dissipation of the lasers to make them compatible with of the wind-induced shift of the 2.06 THz balloon and satellite platforms. A 7-cm-diameter low-profile silicon lens Antenna at Submillimeter Wavelengths. Work at spectral line. It can also determine [OI] density and antenna fabricated at MDL. The antenna MDL has led to the development and fabrication of the first Another more-conventional THz LO technology has been neutral temperature. The TLS instrument has many useful has a leaky-wave feed and is less than low-profile high-gain THz antenna for CubeSat or SmallSat advanced by the recent development of a high-power 7 cm in height, making them very suitable advantages: it does not require cryogenic cooling, requires platforms. The antenna is based on a leaky-wave feed that (~ 100 W) 1.3-1.5 THz Schottky-diode-based frequency for CubeSat/SmallSat platforms. low power, and is highly sensitive due to the nature of GaAs µ illuminates a collimating silicon lens. The prototype 7-cm- multiplier source. This source is sufficient for pumping an Schottky diodes, the critical mixer component used in diameter low-profile antenna is directly integrated on the MgB HEB mixer. The importance of this demonstration heterodyne receivers. The MIRO instrument mentioned above spacecraft and does not require an external feed (as is needed 2 The Microwave Instrument for the Rosetta is in enabling THz heterodyne receivers for applications used the same principle as the TLS to detect the spectral Orbiter was built at JPL. for reflecting arrays) or a deploying mechanism. The thickness on SmallSat vehicles, where 20 K cryocoolers required for lines of water (556 GHz) in the plume of Comet 67P. MDL of the lens-based antenna is 7.2 cm, allowing the entire MgB HEB operations are affordable. A concept for such a has been developing spectrometers at different frequencies 2 instrument, along with the antenna, to fit in a small volume. receiver, called the Galactic Ecosystems Mapping SmallSat to detect different atoms and molecules, including 1 THz (GEMS), is now under consideration by NASA. A reduction spectrometers for water, 1.9 THz spectrometers for ionized For the low-profile antenna, a plane-convex lens was 62 in the mixer device size (currently underway) will reduce 63 carbon, 2.5 THz spectrometers for ionized nitrogen, made with high-resistivity silicon with a 0.25 f-number, the LO power requirement by another factor of ~ 20, thus and 4.7 THz spectrometers for neutral oxygen. thus reducing the overall thickness of the antenna. An antireflection coating of Parylene was deposited on both opening the door to the development of array receivers Although THz technology has made dramatic advances, faces of the lens to minimize silicon-air reflection losses. for SmallSats. the ultimate goal would be to produce a real-time, low-cost, By using a high-resistivity silicon wafer (> 10 kΩcm), the These developments were achieved by Dr. BorisKarasik and compact THz heterodyne imager. The SWAT group dielectric losses are negligible in the 500-600 GHz band. and his team. The QC-VECSEL LO was used in collab- at MDL is the closest to achieving this dream because of The structure was fabricated using Deep Reactive Ion oration with Professor B. Williams and Dr. C. Curwen MDL’s capabilities in packaging and GaAs Schottky diodes. Etching (DRIE) of high-resistivity silicon wafers to etch 15 µm (UCLA). Dr. Jose Siles developed the high-power frequency Current packaging uses conventional CNC metal machining, -radius holes on a hexagonal lattice with a 25-µm radius. multiplier source. The GEMS concept was originated placing an upper limit on the number of pixels. By contrast,

by Dr. Jorge Pineda. NASA for 3 Decades of Innovation a novel packaging technique developed at MDL uses silicon This breakthrough was achieved by Dr. Goutham micromachining and allows for a limitless increase in pixel Chattopadhyay and his team. numbers because of its batch-processing feature.

JPL Microdevices Laboratory | 2020 Annual Report Before After two step ALE 5 μm CORE COMPETENCY SiO2 removed prior to InP etch

HfO2 thermal Next- HfO2 plasma generation 3D nanostructure coated by atomic layer deposition. ALD coating of InAs. Atomic layer etch to smooth inp mesa. o clearly differentiate itself based on the quality Atomic-Scale Processing: ALE Smoothing of III-V ALE for Optoelectronic Devices. There is an increasing Tand performance of the products it delivers, MDL Materials. The advent of ALE has provided the final need to reduce the waveguide/resonator loss in laser has consistently focused on developing techniques and piece needed for complete atomic-scale processing. At applications (to increase the coherence and reduce the fabrication processes that allow for exquisite control at the atomic scale. MDL, a major use for ALE is to smooth films deposited threshold), sensors (to improve the detection limit), and As far back as 1989, MDL used techniques such as e-beam via other techniques. For example, amorphous silicon nonlinear photonics. A key source of loss in photonic lithography and Molecular Beam Epitaxy (MBE) to achieve (a-Si) is a dielectric material used for the fabrication of components is the surface roughness. MDL’s ALE processes atomic-scale precision in patterning and materials growth. superconducting devices. The plasma-enhanced chemical could be a breakthrough for the creation of ultra-low-loss technologies With the advent of Atomic Layer Deposition (ALD) and Atomic photonic waveguides, resonators, and other components. vapor deposition process (PECVD) used to form the Layer Etching (ALE), new capabilities have been achieved, a-Si coating results in 7-nm roughness. The subsequent In another MDL collaboration with USC, the team is working MDL’s capabilities in atomic-scale leading to a host of new MDL microdevices created using superconducting wiring layer is itself only 7 nm thick, which on low-scattering-loss structures bonded with III-epitaxial atomic-scale processing. results in integration issues. When ALE is used to treat the films to realize highly coherent semiconductor lasers with processing are enabling breakthroughs a-Si, the coating is smoothed through the precise removal Hz-level linewidths that can be used in fast coherent imaging Atomic-Scale Processing: ALD Applications from in the fabrication of semiconductors, of 10 Å per cycle. ALE preferentially attacks protrusions and sensing applications. Moreover, we plan to use this ALE Coatings and Films to Detectors. ALD deposits thin films from a surface, eventually achieving a final roughness of recipe to fabricate structures that will test the physics of superconducting films, detectors, and with unequaled conformality, uniformity, and angstrom (Å) 1.9 nm (Fig. E). This technique has also been successfully thermalization of light in multimoded cavities and can be used -level thickness control. It can coat over 3D objects (Fig. A) or applied to III-V semiconductors (Fig. F). as a new approach for spectrum cleaning and manipulation. optoelectronic devices. Some of these over ledges (Fig. B). For MDL, the first successful application The team’s aim is to fabricate silicon nitride ring resonators devices are only nanometers thick, of ALD was in the fabrication of ultra-high-performance ALE-enabled smoothing of III-V materials found immediate with quality factors on the order of 200 million (limited anti-reflection coatings in UV. This application was ideal for application with a new class of devices grown on non- by the material absorption loss). This would be a fivefold and some have set world records. ALD due to the wide variety of materials and the ability to epitaxial substrates. Recently, in MDL’s collaboration enhancement over the state of the art, which would enable the precisely control film thickness in the nanometer range. The with USC, the team demonstrated high-electron-mobility new classes of devices we seek to fabricate. For integrated use of ALD to make these coatings led to detectors with world single-crystal InAs mesas monolithically integrated on III-V structures, the team plans to fabricate various micro- and record external quantum efficiency in a wide range of the amorphous dielectric substrates at a growth temperature nano-lasers to measure the light-light curve, threshold, and of 300°C. Critically, a room temperature mobility of ~5800 ultraviolet spectrum (100-300 nm) (Fig. C) and was featured linewidth. For Si3N4 waveguides, the dispersion properties as the cover art for the Jan/Feb 2013 issue of the Journal of cm2/V-s was measured, the highest mobility reported for (anomalous versus normal) and hence the application Vacuum Science and Technology. Since then, ALD at MDL any thin-film semiconductor material system directly grown in nonlinear photonics highly depend on the waveguide now includes superconducting films with sharp transition on a non-epitaxial substrate. Detailed modeling of the thickness and width, while loss determines the efficiency of temperatures (Fig. D), passivating films for Sb-based scattering mechanisms in the grown material indicates that Single layer AR coating on δ-doped CCDs the nonlinear mechanism in the actual settings. This work 70 detectors, mirror coatings, filters, batteries, and many others. the mobility is limited by surface roughness scattering, not FUV Band 1 FUV Band 2 NUV Band 1 NUV Band 2 benefitted from collaboration with Professors Kapadia and 100-200nm 165-200nm 200-240nm 240-300nm the intrinsic material quality. Reducing the RMS roughness 60 The increasing numbers of materials and processes available Khajavikhan of USC. via ALD continue to expand the importance of this processing of the InAs from 1.8 nm to 1 nm is projected to produce 50 Bare MgF2* A12O3 A12O3 HfO2 technology, and it should continue to help MDL develop new materials with room temperature mobilities of >10,000 Atomic-scale processing has been and continues to be 40 13 nm 16 nm 23 nm 23 nm instruments and components in the coming years. cm2/V-s, and 0.5-nm RMS would result in a ~20,000 cm2/V-s a critical thrust area for MDL. The ability to grow, pattern, 30 *MgF2 result QE (%) for thermally mobility, essentially identical to epitaxially grown materials. deposit, and etch with this level of control is important now 20 evaporated film GALEX FUV These results pave the way for growth of high-mobility and in the future as MDL continues to invent, develop, GALEX NUV Fully packaged delta-doped 10 and deliver new technologies and microdevices. CCD with ALD-deposited anti- materials directly on the back end of silicon complementary 0 reflection coating. metal-oxide-semiconductor (CMOS) wafers, as well as other 125 150 175 200 225 250 275 300 2019 Highlights. Wavelength (nm) non-epitaxial substrates, such as glass, and polymers for flexible electronics. This work, funded by the JPL Strategic Beneq TFS-200 atomic The team achieved room temperature mobility for InAs ALD Coatings for silicon CCDs. layer deposition system. University Research Partnership, is targeted toward science- of ~5800 cm2/V-s, the highest mobility reported for any grade monolithic short-wave infrared (SWIR) detectors thin-film semiconductor material system directly grown 64 grown directly on CMOS readouts, but it has potential on a non-epitaxial substrate. They also demonstrated a 65 300 use in a wide variety of optoelectronic devices, sensors, nearly fourfold reduction in roughness for a-Si devices and 250 and active elements of interest. The work was conducted significant reductions for metals and II-V semiconductors collaboratively with Professor Kapadia’s group at USC. 200 300 with ALE. )

150 ) 200 Before Si ALE 100 100 7 nm RMS 16 nm PV After 100 cycles Si ALE Resistance ( Ω Resistance 4 nm RMS 10 nm PV 0 Resistance ( Ω Resistance 50 0 100 200 300 Temperature (K) 0 5 7 9 11 Temperature (K) 3 Decades of Innovation for NASA for 3 Decades of Innovation

Superconducting ALD films. After 220 cycles of Si ALE.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY

in situ instruments Technologies of the Future

he Life Detection and Chemical Analysis Group is so In 2019, two exciting achievements came during field Tnamed to highlight its unique capabilities in analytical tests with the team’s portable instruments. In July, the Chemical chemistry and instrument development. In 2019, Dr. Peter OWLS team took their CE and microscope subsystems Willis became its supervisor. While the official group is to the Kerckhoff Marine Laboratory in Newport Beach, The microchips used for relatively new, Dr. Willis has been leading a team of chemists California. There, samples of ocean water were collected daily and analyzed for both organic biosignatures and cell automated analyses on and engineers at MDL for the past 10 years. the Chemical Laptop. analysis motility. This was the first time many of the instruments, The focus of the group has been on the design of portable including the portable, automated CE instrument designed Electrophoresis system instrumentation for in situ chemical analysis. One of the and built by Dr. Konstantin Zamuruyev, were tested in for multi-mode detection. major achievements for this competency was developing the field. During the field campaign, the prototype was & life the Chemical Laptop, a truly portable, battery-powered, coupled to commercial MS and C4D systems, and low Additionally, Dr. Aaron Noell and postdoctoral researcher automated, and reprogrammable analysis system that uses levels of organics were detected in the ocean water. This Dr. Elizabeth Jaramillo have developed miniature, solid- a technique called capillary electrophoresis (CE). CE is a subsystem, along with the CE-LIF subsystem and data from contact-based ion selective electrodes (ISEs). These detection liquid-based separation technique, and the Chemical Laptop the microscope, was used to detect life! This was a major next-generation sensors can now be incorporated into uses a miniaturized version, microchip electrophoresis (ME). milestone for the OWLS project and marked the beginning microfluidic instruments, such as OWLS and the Microfluidic The engineers and scientists at MDL ME can be coupled to a variety of detection modes, including of the transition from the breadboard to the brass-board Icy-World Chemical Analyzer (MICA), a miniaturized version laser-induced fluorescence (LIF). With this technology, phase of development. of the Wet Chemistry Lab instrument that flew on the Mars working in the area of Chemical Analysis the Chemical Laptop is the first “end-to-end” ME-LIF Work done in the lab by Dr. Jessica Creamer helped answer Phoenix Lander mission. and Life Detection are pioneering the next instrument capable of receiving a liquid sample and performing all operations required for analysis in an questions regarding the stability of the chemical reagents The group is fortunate to be working with several NASA generation of spaceflight technologies automated fashion. This system would provide the sample used for chiral amino acid analyses. Her project was to centers on a variety of projects, including an ICEE-2 grant needed in the search for habitable processing capabilities required for in situ analysis with sub- determine the limitations of long-term storage on the with NASA Goddard; NASA Ames; Honeybee Robotics Ltd.; parts-per-billion sensitivity in a compact, low-mass, and low- fluorescent dye needed to achieve ppt limits of detection Dannel Consulting Inc.; and the University of Versailles, environments and life beyond Earth. power package. This instrument concept could be adapted for with CE-LIF. The resulting publication in Electrophoresis Saint-Quentin/LATMOS in France. The project is called the a variety of astrobiologically interesting targets like Europa, showed that even after two years at elevated storage “Europan Molecular Indicators of Life Investigation” (EMILI). Enceladus, or Titan. It also serves as a general prototype that temperatures, the CE-LIF assay was not affected; thus, The group is also collaborating with AMES on two additional could be reprogrammed for Earth-based analyses. the science goals needed to detect life can be achieved. projects, a ColdTech grant called “SPLICE” and MICA, which is another ICEE-2. The Life Detection and Chemical Analysis Much of the group’s work has focused on developing a The other major field test happened in September, Biosignatures in when Drs. Fernanda Mora and Florian Kehl performed a Group is also working with several industrial partners the Atacama Desert. Sample prototype for future astrobiology missions. The basic such as SCIEX, VICI-Valco, and Leiden Technology. funnel philosophy is that through detection of ionizable organic simulated Mars mission in the Atacama Desert of Chile. molecules, specific patterns in the size and type of the species Here, Dr. Mora demonstrated the Chemical Laptop. With The team’s partnership with the University of Kansas (KU) in a sample can be used to indicate the presence of either a single operator command, the instrument could accept also grew in 2019. In addition to the Willis group’s KU biotic or abiotic chemistry. These molecules can be analyzed a liquid sample and perform fluorescence labeling and graduates Dr. Creamer and postdoctoral researcher via CE, which can be coupled to a variety of detection modes, analysis in a truly automated fashion. This system was Dr. Nathan Oborny, Emily Kurfman, a graduate student, including LIF for parts per trillion (ppt) limits of detection, mass coupled to Dr. Kehl’s portable subcritical water extractor, joined the group and performed some of the very first spectrometry (MS) for identification, and capacitively coupled which had been demonstrated for remote operation in the characterization work on our first portable system capable contactless conductivity (C4D) for universal detection of ionic field a year earlier, with results published in Earth Space of performing mass spectrometry detection. Following species. Using these three detection modes, the team can Science. The instruments were mounted on a rover and her summer internship, Emily received a 3-year PhD grant search for several key classes of organic molecules that are operated remotely in the desert. End-to-end operation through the NASA NSTGRO20 program and will be pursuing Portable and was demonstrated by analyzing soil samples that the rover automated the building blocks of proteins, cell membranes, and DNA, her PhD in a research program jointly designed by JPL and extractor as well as metabolites. delivered to the instrument. This was the first demonstration KU. Finally, to formalize the connection between the two First portable and of automated “soil-to-data analysis.” This validation was a fully automated institutions, and in particular the research group of Professor ME-LIF instrument In 2019, the group was focused on an internally funded critical milestone in advancing this technology for future Susan Lunte, Dr. Willis was invited to join KU as an adjunct JPL program called JNEXT. The project, called Ocean implementation on a spaceflight mission. faculty member. Worlds Life Surveyor (OWLS), is an instrument suite that 66 combines The Life Detection and Chemical Analysis Group’s 67 CE analyzer, including all three detection modes, with a holographic microscope being developed by another team at JPL. OWLS is a unique instrument suite, and the powerful combination of chemical analysis and microscopy has yet to be explored in the astrobiology community. In the coming years, the group hopes to use OWLS to analyze analogs on Earth to help understand and define what constitutes a biosignature and to better prepare JPL Members of the Chemical Analysis and Life Detection Group and for future missions to targets like Europa and Enceladus. collaborators during field trips to Newport Beach (A-C) and Chile’s Atacama

Desert (D). From left to right: Florian Kehl, Fernanda Mora, Peter Willis, NASA for 3 Decades of Innovation This year the team performed the first true Vlad Cretu; Coleman Richdale, Elizabeth Jaramillo, Mauro Santos; end-to-end validation of a CE instrument Konstantin Zamuruyev, Fernanda Mora, Peter Willis, Emily Kurfman; suite in a Mars mission scenario. Fernanda Mora, Florian Kehl.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY

in situ instruments

riginally, two competing approaches to making Ominiature mass spectrometers potentially suitable for Mass spaceflight were being developed independently in the JPL Science Division: magnetic sector devices and quadrupole analyzers. These two efforts coalesced and were brought SAM goes to work aboard The SAM spec- into MDL in November 2017. MDL was a good home for the International Space Station. instrument. the technology, as it gave even readier access to MDL’s microfabrication facilities. trometry JPL’s miniature Quadrupole Ion Trap Mass Spectrometer Spacecraft Atmosphere Monitor: Next Generation (QITMS) has been evolving at JPL since 1994, and in that Gas Chromatograph Mass Spectrometer. The SAM NASA has included mass time, it has enjoyed a history of constant performance consists of the miniature QITMS interfaced with a micro- The QITMS is held in improvements and successively smaller size, mass and fabricated preconcentrator and gas chromatograph compression between two spectrometers in the payloads of power requirements. It started development for human unit (together forming the PCGC subassembly) and vacuum flanges enabling many planetary missions for in situ spaceflight applications in 2003 and for planetary a small gas carrier reservoir. All these components a robust, compact applications in 2011. The first flight instrument to incorporate were designed, fabricated, assembled and tested flight instrument. analysis. Developments at MDL a QITMS was the Vehicle Cabin Atmospheric Monitor at MDL. The micro-fabricated PCGC unit employs a have found a completely different (VCAM), which operated successfully on the International novel MEMS PCGC technology that is implemented by Space Station (ISS) from March 2009 to November 2011. Its combining a MEMS preconcentrator, a microvalve and application for these devices: successor is the Spacecraft Atmosphere Monitor (SAM). The gas chromatograph chips that replace the macro PCGC These are the first electrostatic MEMS valves to achieve SAM instrument is a highly miniaturized gas chromatograph/ components in the VCAM. This significantly reduces the more than a million cycles. In fact, they achieved 47 million checking the quality of the cabin mass spectrometer (GC-MS) that depends on MDL- total volume and mass of the GC-MS instrument from 64.4 cycles before failure, which is equivalent to 5.9 years of operation when the valve is switched every four seconds. air for human spaceflight. fabricated components and monitors the atmosphere of L and 37.9 kg (VCAM) to 10 L and 9.5 kg (SAM). crewed spacecraft for both trace organic compounds and Other unique features include a center pad to reduce the major constituents of the cabin air. The first version of The preconcentrator consists of a silicon-doped heater opening voltage and charge buildup; a pressure balancing the SAM instrument, which lacked the GC, was launched and a Carboxen layer in the chamber (see below). The mechanism to lower differential pressure across the to the ISS in 2019. The complete second version will be thermally isolated design and material of the heater, which membrane, lowering stress and allowing the valve to open launched in 2020. The future aim is to successfully produce are made possible by through-etching around the heating against high pressure; and an interface treatment to prevent an instrument for planetary scientific investigations, and first plate and a silicon insulator, respectively, allow the heater charge buildup, which is the main failure mode of most other steps have been taken in that direction with the selection to be flash heated to 250°C in just 0.5 seconds. The JPL electrostatic valves. of the Lunar CubeSat Mass Spectrometer for development preconcentrator demonstrated more than a 10,000-fold concentration increment for alcohols, which is high enough The gas chromatograph microcolumn is composed of under the NASA Development and Advancement of Lunar multiple stacks of a 1 m serpentine column and a capping Instrumentation (DALI) program (see page 26). to analyze parts per billion concentrations of volatile organic compounds. layer, which are hermetically sealed via metal diffusion or The QITMS as the core of an instrument is very versatile direct fusion bonding. The serpentine channel generates and can be configured in many different ways depending The electrostatically operated microvalve comprises three better separation than does a spiral channel design at on the specific application. Samples are analyzed as gases; main components: the top cap (TCAP)/valve closing (VC), the micro level of the chip design. Silicon-silicon layers however, the mass spectrometer can be interfaced very the membrane, and the valve opening (VO)/bottom cap of microcolumn deliver less tailing and peak broadening easily to many different sample preparation for introduction (BCAP) (see below). The VC/TCAP and VO/ BCAP are than do conventional silicon-Pyrex microcolumns due systems if the analyte is not a gas initially. The QITMS bonded as a stack via gold diffusion bonding technology. to the higher uniform temperature profile. A photograph possesses very high sensitivity and can make very precise The VC/TCAP and VO/BCAP stack sandwich is bonded of the serpentine channel and a cross-sectional scanning measurements. It can measure both the concentrations and to the membrane layer using benzocyclobutene adhesive electron microscope image of the bonded serpentine Gas chromatograph microcolumn. to complete the microvalve assembly. The membrane channel are below. The gas chromatograph microcolumn (A) JPL gas chromatograph isotopic compositions of the full range of inorganic species. microcolumn; (B) a scanning For example, it has measured the isotopic compositions layer has four membranes embedded, each of which also has a uniform self-assembly monolayer coating along electron microscope image of of krypton and xenon accurately and to a precision of independently moves up and down in response to the wall of the serpentine channel, which is facilitated the cross-sectional view of the gas less than 0.1%. It can also quantify the amounts of much an applied electric field between the stacks. by a unique coating methodology. 68 chromatograph serpentine channel. 69 larger organic molecules, such as those that form the building blocks of life, an essential capability in undertaking astrobiology investigations.

(A) Thermally isolated silicon heater Members of the Vehicle Cabin in the middle chamber where Carboxen Atmosphere Monitor team, adsorbent particles are packed; from left: Ara Chutjian, Dan Karmon, (B) microposts for attaching micro/nano Jim Hofman, Benny Toomarian, adsorbents; (C) Carboxen 1000 particles

Murray Darrach, John MacAskill, to be packed into the middle chamber NASA for 3 Decades of Innovation Stojan Madzunkov, Arvid Croonquist, that has no micropost. and Richard Kidd.

JPL Microdevices Laboratory | 2020 Annual Report CORE COMPETENCY

in situ instruments Tunable The Combustion Product Monitor instrument was delivered for NASA’s laser spec- Saffire project, a series of experiments to study the dynamics of combustion A hermetically sealed package designed events in low-gravity to house MDL mid-infrared semiconductor spacecraft environments. trometers lasers, including the lasers to be used for the Venus Tunable Laser Spectrometer. Over the past 30 years, MDL’s core The proposed DAVINCI+ probe Combustion Product Monitor. The CPM instrument is competency in the design and fabrication Laser-Based Instruments. Laser absorption includes the JPL-built Venus a laser absorption spectrometer built by MDL in support spectroscopy enables precise measurements of the Tunable Laser Spectrometer. of the Spacecraft Fire Safety Demonstration Project of semiconductor lasers has supported abundance and isotopic composition of specific molecules. (Saffire), led by the NASA . CPM the development of several laser-based Deployable laser spectrometer instruments help scientists measures ambient gas-phase concentrations of six specific understand the structure and dynamics of planetary Venus Tunable Laser Spectrometer. The DAVINCI+ compounds related to combustion events in spacecraft instruments, especially in situ laser atmospheres and the chemical composition of gases mission is one of four missions recently selected by NASA environments, enabling early detection of accidental fires spectrometers using novel infrared evolved from rocks and ice. In addition to providing cutting- as a finalist for the agency’s Discovery Program for solar as well as safe post-fire cleanup during human spaceflight edge laser technology to instrument builders at JPL and system exploration. The DAVINCI+ team proposes to operations. The final version of the CPM instrument has a semiconductor laser sources. elsewhere, MDL researchers have applied their expertise in drop a descent probe through the atmosphere of Venus mass of 2.3 kg, a volume of 3.3 L, and a steady-state power optical systems, electronics, and spectroscopic techniques to study the composition of the planet’s hot, dense cloud consumption of 12 W. As part of the Saffire project, the to build complete laser-based instruments for a range of layers. A critical component of the DAVINCI+ instrument CPM instrument will measure the mixing and evolution of environmental monitoring applications. suite is the JPL-built Venus Tunable Laser Spectrometer emissions from a combustion event in microgravity aboard (VTLS), which measures the concentration and isotopic a Cygnus automated cargo spacecraft after leaving the As an example of what can be achieved at JPL through composition of several specific compounds that are key to International Space Station. In early 2020, engineers the development of novel semiconductor laser the climate cycles of Venus. The data gathered by VTLS from MDL delivered a CPM instrument for integration technologies, MDL created the 3.3 µm wavelength will improve our understanding of not only Earth’s nearest with the Saffire VI experiment, which is expected semiconductor laser at the heart of the Tunable Laser planetary neighbor but also Venus-like exoplanets, and to be operational in 2021. Spectrometer (TLS). TLS is part of the scientific payload even Earth itself at a different time in its evolution. In of the Curiosity rover, which launched in November 2011 advance of the DAVINCI+ mission, MDL has developed In support of future fire safety experiments, MDL is currently and landed on Mars in August 2012. Curiosity has been developing a compact three-channel laser spectrometer, This self-portrait of the Mars rover mid-infrared quantum cascade lasers that can probe working ever since and has produced remarkable and carbonyl sulfide and sulfur dioxide molecules to quantify Mini-CPM, to measure concentrations of carbon monoxide, Curiosity combines dozens of exposures unexpected scientific results (see page 18). In particular, carbon dioxide, and oxygen with even higher accuracy than taken on Mars (Feb. 3, 2013), plus three sulfur isotope ratios. These lasers have watt-level power exposures taken during Sol 270 (May 10, the 3.3 µm laser built by MDL has enabled measurements consumption, and they have been tested and shown to that of the standard CPM instrument. The miniaturized 2013) to update the appearance of part of methane at part-per-billion levels and continues to withstand the mechanical shock and thermal cycling instrument can also be operated in either an open or sealed of the ground beside the rover. revolutionize our understanding of the atmosphere of Mars. expected inside the DAVINCI+ probe. configuration, allowing for ambient measurements or in-line monitoring of gas streams. The instrument volume is 0.5 L, Looking to the future, MDL researchers continue to build The JPL Project Element Manager for VTLS is former MDL more than six times smaller than the six-channel CPM. on this competency in semiconductor lasers, enabling Director Christopher Webster. The VTLS Instrument Lead measurements with new lasers and instruments to better is MDL engineer Ryan Briggs, and the quantum cascade Amid the global coronavirus pandemic, the CPM flight understand our solar system and even help humans lasers for VTLS were developed by MDL engineers spare for Saffire was repurposed to test the JPL emergency venture beyond low Earth orbit. Clifford Frez, Mathieu Fradet, and Ryan Briggs. COVID-19 ventilator, VITAL. The CPM instrument’s high- dynamic-range, accurate oxygen detection capability has 70 enabled leak-rate testing and validation of oxygen enrichment 71 in the gas mixtures generated by the VITAL ventilator. Mars’ Gale Crater is a fascinating place to explore because of the mountain of layered materials in The CPM project is managed by MDL engineer Ryan Briggs. the middle. The layers tell a story about what Mars The CPM instruments for Saffire were built and tested by was like in the past, perhaps spanning much MDL engineer Mathieu Fradet. MDL technologist Nicholas of the history of the Red Planet. Tallarida is designing the prototype Mini-CPM instrument. The overall project’s Principal Investigator is David Urban, Branch Chief at the NASA Glenn Research Center. An electron micrograph of a low-power consumption The ventilator prototype for

quantum cascade laser fabricated coronavirus disease patients NASA for 3 Decades of Innovation at MDL for the Venus Tunable designed and built by NASA’s Laser Spectrometer instrument. JPL in southern California.

JPL Microdevices Laboratory | 2020 Annual Report 30 YEARS ON & LOOKING TOWARDS 2050

The near the South Pole of the Moon hosts permanently shadowed regions that contain water ice. Such regions have the potential to provide ample source material for in situ extraction Facility of oxygen propellant and other resources needed for & sustained human presence on the lunar surface. capabilities MDL’s technical implementations rely on sophisticated instrumentation in

ultraclean environments. Sustained DEPOSITION and insightful investments in people, The baseline design of the Laser In situ Resource Analyzer infrastructure, and equipment allow is based on the Mars MiniTLS methane instrument developed by Erik Alerstam and Christopher Webster. To monitor trace MDL’s successful and significant water levels in oxygen propellant streams, the LIRA design includes a new laser source to target water absorption lines research, development, and deliveries. and high-pressure flow seals. ETCHING

Laser In Situ Resource Analyzer. As NASA pushes toward he 30th anniversary of full operations at MDL is an opportunity a sustained human presence on the Moon, return trips Tto reflect on how MDL’s facility infrastructure and equipment from the lunar surface will depend on the ability to refuel capabilities have evolved to support its technology advances. ascent vehicles using stored propellants. The dream of In The Base Building’s original design was sound, but it has since morphed Situ Resource Utilization (ISRU) is dependent upon the to meet changing demands. development of technologies that can be used to extract MDL’s equipment capabilities and operations have changed based on and process useful materials from the lunar environment. the need to improve controls across larger wafers. By controlling the A major component of ISRU operations will be extraction and Semiconductor Laser Frequency Combs. Interband energetics of impinging ions for etching and depositions; improving storage of cryogenic oxygen propellant from water ice and Cascade (IC) structures offer attractive potential for uniformity, cleanliness, sidewall smoothness and coverage; and other regolith materials using chemical reduction processes. enabling both broadband coherent optical sources of mid- using atomic-level precision, MDL’s staff has been able to manipulate Propellant-grade oxygen must be extremely dry, with water infrared light and fast photodetectors at room temperature. electromagnetic fields to enable new observables and generate contamination on the order of a single part per million; Recently, MDL researchers have demonstrated a compact greater scientific returns in instrumentation. therefore, NASA needs sensors capable of both operating broadband spectrometer based on co-integration of CHARACTERIZATION in the harsh environment of the lunar surface and reliably two free-running ICL comb devices with near-THz-wide For example, the use of global cleanrooms instead of validating propellant purity at these stringent levels. spans and an IC-based photodetector with several GHz of microenvironments enables flexibility as processes change electrical bandwidth. The spectrometer system was used to and accommodates multiple processes in one space. Our technology Laser spectrometers are not only capable of achieving the developments are diverse: the use of multiple material families sensitivity required for trace contamination measurements, measure 1,1-difluoroethane over 600 GHz of optical coverage around 3.6 µm. This work demonstrates a chip-based (Si, GaAs, GaSb, and superconducting materials) allows detector but, as shown with the JPL-built TLS instrument operating contributions ranging from soft X-rays to mm wavelengths. on the Mars Curiosity rover for more than seven years, the instrument enabling the measurement of high-resolution spectra of broadband hydrocarbons in the mid-infrared Consequently, wafers in a range of sizes and thicknesses, technology is also robust enough for extended operations along with compatible equipment, are needed. in harsh space environments. The Laser In situ Resource range without the need for moving parts. The spectrometer Analyzer (LIRA) is a laser spectrometer under development is the first demonstration of a compact dual-comb Our equipment investments also continue to evolve. Thanks to premier 72 at MDL with support from the NASA Game Changing system that enables broadband fast interrogation of the achievements in greyscale grating fabrications, our e-beam lithography 73 Development Program. The LIRA sensor will be capable environment. Furthermore, MDL is expanding its inventory investments continue, most recently with the installation of the third PACKAGING of continuously monitoring trace water levels in oxygen of comb devices to cover other spectral regions in the 2- and upgraded replacement system in 2018. This new system has state-of- propellant streams over a broad range of flow pressures 8-µm spectral bands, which not only allows measurements the-art nanoscale patterning capabilities on wafers of up to 225 mm and temperatures. Initial LIRA demonstration units will of a broader collection of molecules but also has applications (9 inches) in diameter and facilitates patterning on curved surfaces. be delivered to the NASA Johnson Space Center in 2022 in high-data-rate optical communication and high-angular- We also expanded our patterning capabilities via steppers (EX3, EX6, for integration into ISRU propellant testbeds. resolution imaging of stars and satellites. and I-line) and replaced an older I-line stepper with a maskless system in 2019/2020. Our fluorine and chlorine dry etching capabilities evolved The LIRA project is managed by MDL engineer Ryan Briggs. The effort to develop semiconductor laser frequency combs is led by MDL engineer Mahmood Bagheri. Fabrication of from RIEs to ICP RIEs, then to deep silicon etching (DRIE) and, most The LIRA team includes MDL engineers Nicholas Tallarida recently, atomic layer etching (ALE). Deposition system investments and Mathieu Fradet, as well as Lance Christensen and frequency comb devices is performed by MDL engineer

are also evolving: LPEs were replaced by MOCVDs, which were then NASA for 3 Decades of Innovation Christopher Webster from the JPL Science Division Clifford Frez, and system design and characterization are performed by MDL postdoctoral scholar Lukasz replaced by MBE super lattice growth capabilities for the fabrication and Erik Alerstam from the JPL Flight Communication of semiconductor lasers. Systems Section. Sterczewski.

JPL Microdevices Laboratory | 2020 Annual Report Appendices

Humidity control systems were upgraded in 2001, 2006, and Peer-Reviewed Journal Publications astrobiology spaceflight missions. Earth and 2012, and AH5 and AH6 were added in 2000 for better control. 1. Allmaras, J.P. et al. “Intrinsic Timing Jitter and Space Science, Vol 6 (12), 2443-2460 (2019). In 2002, noise reduction measures were taken in AH1, and in Latency in Superconducting Nanowire Single- 12. Kim, Y., Y. Zhang, T. Reck, D. J. Nemchick, G. photon Detectors” Phys. Rev. Applied, Vol. 11, Chattopadhyay, B. Drouin, M-C. F. Chang, 2009, variable speed drives were added to the cleanroom RCUs 034062 (2019) to save energy during off hours. Power upgrades include the and A. Tang, “A 183-GHz InP/CMOS-Hybrid 2. Alonso-delPino, M., C. Jung-Kubiak, T. Reck, Heterodyne-Spectrometer for Spaceborne addition of a 300 kVA transformer in 2000, 30 kW solar panels PATTERNING N. Llombart, and G. Chattopadhyay, “Beam Atmospheric Remote Sensing,” IEEE in 2008, a 45 kVA transformer in 2009, and a new replacement Scanning of Silicon Lens Antennas Using Transactions on Terahertz Science and 500 kW emergency generator in 2012. Integrated Piezomotors at Submillimeter Technology, vol. 9, no. 3, pp. 313-334 (2019). Wavelengths,” IEEE Transactions on MDL received new process cooling water circulation pumps 13. Mehdi, I, P Goldsmith, D Lis, J Pineada, B Terahertz Science and Technology, vol. 9, Langer, J Siles, J Kawamura, “Far-Infrared and filtration in 2009, and in 2010, the compressed dry air no. 1, pp. 47-54 (2019). Heterodyne Array Receivers,” Bulletin of system was upgraded and backups were installed. The MDL 3. Avice, G, A. Belousov, K. A. Farley, S. M. the American Astronomical Society 51 (7) DI/RO1 water plant was reconfigured to save water, and other Madzunkov, J. Simcic, D. Nikolić, M. R. (2019). upgrades followed with RO2 and RO3 additions in 2001 and Darrach, and C. Sotin, High-precision 14. Mora, M. F., Garcia, C. D., Schaumburg, F., 2003, respectively. Our safety monitoring system points have measurements of krypton and xenon Kler, P. A., Berli, C. L. A., Hashimoto, M.; expanded, and the entire safety monitoring system has been isotopes with a new static-mode quadrupole Carrilho, E., Patterning and Modeling Three- upgraded and replaced over the course of four years: in 2000, ion trap mass spectrometer, Journal of Dimensional Microfluidic Devices Fabricated SAMPLE PREPARATION Analytical Atomic Spectrometry, Vol. 34, on a Single Sheet of Paper. Analytical 2007, 2011, and 2017. Finally, MDL’s three original liquid nitrogen 104-117 (2019). tanks and their distribution connections were replaced in 2019. Chemistry, Vol 91 (13), 8298-8303 (2019). 4. Caloz, M. et al. “Intrinsically-limited 15. Nikolić, D, S.M. Madzunkov, M.R. Darrach, Future infrastructure improvements will include continued timing jitter in molybdenum silicide Response of QIT-MS to Noble Gas Isotopic cleanroom conversions to allow more processing space, the superconducting nanowire single-photon Ratios in a Simulated Venus Flyby, detectors” Journal of Applied Physics, Vol. Atmosphere, Vol. 10(5), 232 (21 pp) (2019). installation of bypass electrical feeds to critical systems to 126, 164501 (2019) minimize the effects of long maintenance shutdowns, and an 16. Onstott TC, Ehlmann BL, Sapers H, Coleman 5. Chahat, N., E. Decrossas, D. Gonzalez- M, Ivarsson M, Marlow JJ, Neubeck A and improved ultra high purity (UHP) water supply from the MDL Ovejero, O. Yurduseven, M. J. Radway, R. E. deionized water plant. A request for a replacement “MDL New Niles P. Paleo-Rock-Hosted Life on Earth The Tystar LPCVD capability to grow silicon rich low stress Hodges, P. Estabrook, J. D. Baker, D. J. Bell, T. and the Search on Mars: a Review and Exploration Technologies” (MDL NExT) building has also A. Cwik, and G. Chattopadhyay, “Advanced silicon nitride membranes was upgraded for larger wafers. Strategy for Exploration. Astrobiology, Vol. been initiated. CubeSat Antennas for Deep Space and Earth 19 1-33 (2019). DOI: 10.1089/ast.2018.1960 Our MBE capabilities include a unique silicon MBE with Science Missions: A review,” IEEE Antennas UHV evaporation capabilities for 200 mm (8 inch) diameter MDL’s operations and infrastructure are sustained and enabled and Propagation Magazine, vol. 61, no. 5, pp. 17. Pagano, Thomas S.; Carlo Abesamis; Andres wafers, enabling delta-doped UV CCDs. by the Central Processing and MDL Support Group, which 37-46, (2019). Andrade; Hartmut H. Aumann; Sarath D. Gunapala; Cate Heneghan; Robert F. is led by Technical Group Supervisor and MDL (Operations) 6. Chakrabarty, M. A. Lindeman, B. Bumble, Additionally, we have invested in III-V (Sb) MBE wafer Jarnot; Dean L. Johnson; Andy Lamborn; Manager James L. Lamb. The dedicated professionals who A. W. Kleinsasser), W. A. Holmes, and processing technologies that allow NIR, MIR, and LWIR Yuki Maruyama; Sir Rafol; Nasrat A. Raouf; make up this group not only bring technical expertise to their D. Cunnane “Operation of YBCO Kinetic- David M. Rider; Dave Ting; Dan Wilson; FPAs and a HOT BIRD design that can operate at higher own specialties but also work as a team, augmenting each Inductance Bolometers for Outer Solar Karl Y. Yee; Jerold Cole; Bill Good; Tom U. System Missions” Appl. Phys. Lett. , Vol. 114, cryo temperatures. We are also expanding our Atomic Layer other’s skill sets. Frank Greer, Central Processing Lead and Kampe; Juancarlos Soto; Arn L. Adams; Matt 132601 (2019). Deposition (ALD) capabilities. We are currently fabricating Alternate Manager, has expertise in ALD and ALE. Matt Dickie Buckley; Richard Graham; Fred Nicol; Tony a new ALD/metal evaporator system that will soon join our (DRIE, LPCVD, SEM, sputtering, bonding, patterning), Chuck 7. Creamer, J. S., Mora, M. F., Noell, A. C., Willis, P. Vengel; John Moore; Thomas Coleman; two existing systems. Advances in characterization include A., Long-term thermal stability of fluorescent Steve Schneider; Chris Esser; Scott Inlow; Manning (evaporations, etching, patterning), James Wishard dye used for chiral amino acid analysis on Devon Sanders; Karl Hansen; Matt Zeigler; a new cold cathode Scanning Electron Microscope (SEM), (dicing), and Mike Fitzsimmons (patterning, packaging) atomic force microscopes (AFMs), X-ray diffraction, an future spaceflight missions. Electrophoresis, Charles Dumont; Rebecca Walter; Joe provide semiconductor processing capabilities for those who Vol. 40 (23-24), 3117-3122 (2019,). Piacentine, “CubeSat Infrared Atmospheric upgraded XPS system, an extended range ellipsometer, do not want to utilize the facility directly. MDL Safety Engineers Sounder technology development status”, FTIR capabilities, and a 1.7 K cryo probe station. 8. Frasca, S., B. Korzh, M. Colangelo, D. Zhu, Mark Mandel, CIH (lead); Amy Posner; Michael Martinez; and A. E. Lita, J. P. Allmaras, E. E. Wollman, V. B. J. of Applied Remote Sensing, 13(3), Toney Davis provide safety assurance maintenance oversight, Verma, A. E. Dane, E. Ramirez, A. D. Beyer, S. 032512 (2019). https://doi.org/10.1117/1. We plan on continuing our larger-diameter wafer processing JRS.13.032512 capabilities via a lift-off and photoresist removal tool, including life safety monitoring systems maintenance and W. Nam, A. G. Kozorezov, M. D. Shaw, and K. K. chemical waste handling. Roopinderjit Bath, PE (lead); Ramzy Berggren “Determining the depairing current 18. Pepper, B., A. Soibel, D. Ting, C. Hill, A. replacing existing solvent and acid wet processing stations in superconducting nanowire single-photon Khoshakhlagh, A. Fisher, S. Keo, S .Gunapala, Rizkallah; Chuck Manning; and Toney Davis provide MDL with stations capable of processing cassettes of larger (150 detectors” Phys. Rev. B, Vol. 100, 054520, Spatial dependence of carrier localization mm/6 inch diameter) wafers, and improving particle control facilities maintenance and coordination. The MDL equipment (2019) in InAsSb/InSb digital alloy nBn detector, is maintained and qualified by James Wishard (lead), Mike 74 to improve yields for large-area deliverables. We would like 9. Gan, Y, B Mirzaei, JRG Silva, A Khalatpour, Infrared Physics & Technology 99, 64-70, 75 to retain some systems with no material constraints, as Fitzsimmons, Chuck Manning, Matt Dickie, and Frank Greer. Q Hu, C Groppi, JV Siles, “81 supra-THz (2019). https://www.sciencedirect.com/ these systems would allow for testing of new materials and Chuck Manning (lead), Frank Greer, Matt Dickie, Roopinderjit beams generated by a Fourier grating and a science/article/abs/pii/S1350449518305073 techniques, but footprint constraints limit these options. Bath, and Ramzy Rizkallah, together with input from quantum cascade laser,” Optics Express 27 19. Phan, HP, TK Nguyen, T Dinh, A Qamar, knowledgeable MDL Processors, coordinate new equipment (23), 34192-34203 (2019). A Iacopi, J Lu, DV Dao, Wireless battery- MDL’s infrastructure has also been maintained and specifications and installations. 10. Jafari, Mohsen, L. Jay Guo, Mina Rais- free SiC sensors operating in harsh Within the MDL clean room fabrication Zadeh A Reconfigurable Color Reflector environments using resonant inductive improved. The machine shop was converted into a areas, skilled and knowledgeable microfluidic processing lab in 2001. Cross-disciplinary by Selective Phase Change of GeTe in a coupling. IEEE Electron Device Letters, vol. processors make use of sophisticated 40 (4), 609-612 (2019) successes permitted the addition of an annex to the Base equipment to manipulate materials Multilayer Structure. Advanced Optical Building in 2004. This annex became home to the “light lab” MDL’s facilities, equipment and and structures on an atomic scale to Materials, vol. 7 (5) (2019) https://doi. 20. Qamar, A, M Rais-Zadeh Coupled baw/ org/10.1002/adom.201801214 saw resonators using AlN/Mo/Si and AlN/ testing laboratories, and the cleanrooms, whose footprints infrastructure capabilities were built on create unique devices for obtaining new

a solid foundation and were continuously observables for the science community. Mo/GaN layered structures. IEEE Electron NASA for 3 Decades of Innovation were very limited, were then expanded into the former light 11. Kehl, F., Kovarik, N. A., Creamer, J. S., updated to remain strong today. Da Costa, E. T., Willis, P. A., A subcritical Device Letters, vol. 40 (2), 321-324 (2019) lab space on the north side of the first floor. This cleanroom They have a bright future. water extractor prototype for potential expansion continues today.

JPL Microdevices Laboratory | 2020 Annual Report Appendices, cont.

21. Qamar, A, S Sherrit, XQ Zheng, J Lee, PXL 31. Zhu, Di, et al. “Superconducting nanowire 7. Briggs, Ryan M., Mathieu Fradet, Clifford Frez, 18. Cortez, A., E.Y. Cho, H. Li, D. Cunnane, B. 27. Gunapala, Sarath; Sir Rafol; David Ting; Environmental Systems ICES-2020-351, 12- Feng, M Rais-Zadeh. Study of energy loss single-photon detector with integrated Kevin He, Romain Blanchard, Laurent Diehl, Karasik, S.A. Cybart, High-Frequency Alexander Soibel; Arezou Khoshakhlagh; 16 July 2020, Lisbon, Portugal (2020). mechanisms in AlN-based piezoelectric impedance-matching taper” Appl. Phys. and Christian Pflügl, Quantum cascade lasers Properties of Y-Ba-Cu-O Josephson Sam Keo; Brian Pepper; Anita Fisher; Edward 36. Lee, C., M. Alonso-delPino, C. Jung-Kubiak, length extensional-mode resonators. Lett. , Vol. 114, 042601 (2019) for in situ planetary science spectrometers, Junctions Fabricated with Helium Ion Luong; Cory Hill; Kwong-Kit Choi; Arvind I. Mehdi, D. González-Ovejero, and G. Journal of Microelectromechanical Systems, 32. Zobrist, N., B.H. Eom, P. Day, B.A. Mazin, IEEE Photonics Conference, 2019. (invited) Beam Irradiation, 2019 IEEE Int. Supercond. D’Souza; Christopher Masterjohn,T2SL Chattopadhyay Fabrication Of Devices vol. 28 (4), 619-627 (2019) S.R. Meeker, B. Bumble, H.G. LeDuc, G. 8. Chattopadhyay, G., A. Tang, M. Alonso Electron. Conf. (ISEC), DOI: 10.1109/ LWIR Digital Focal Plane Arrays for Earth And Antennas For Millimeter-Wave And 22. Richard J. Roy, Matthew Lebsock, Luis Coiffard, P. Szypryt, N. Fruitwala, I. Lipartito, del-Pino, C. Jung-Kubiak, J. Kooi, J. Siles, ISEC46533.2019.8990898 Remote Sensing Applications, 2019 IEEE Terahertz Systems, Proc. 44th International Millán, Robert Dengler, Raquel Rodriguez C. Bockstiegel “Wide-band parametric and C. Lee, Highly Integrated Submillimeter- 19. Goldsmith, P., Y Seo, D Lis, J Siles, W Research and Applications of Photonics Conference on Infrared, Millimeter, and THz Monje, Jose V. Siles, and Ken B. Cooper, amplifier readout and resolution of optical Wave Spectrometer for CubeSats, Proc. Langer, J Kawamura, Source-A Space in Defense Conference (RAPID), Miramar Waves, Paris, France, September 2019. “Boundary-layer water vapor profiling using microwave kinetic inductance detectors” 44th International Conference on Infrared, Mission to Probe the Trail of Water, 2019 Beach, FL, USA, 2019, pp. 1-3. DOI: 10.1109/ RAPID.2019.8864258 (Invited) 37. Lee, Choonsup, D. Gonzalez-Ovejero, M. differential absorption radar,” Atmospheric Appl. Phys. Lett., Vol. 115, 042601 (2019) Millimeter, and THz Waves, Paris, France, 44th International Conference on Infrared, Alonso-delPino, C. Jung, I. Mehdi, and Measurement Techniques, vol. 11, no. 12, pp. 33. Zobrist, Nicholas, Gregoire Coiffard, Bruce September 2019. Millimeter, and Terahertz 28. Gunapala, Sarath; Sir Rafol; David TIng; Goutam Chattopadhyay, Fabrication of 6511-6523 (2018). Bumble, Noah Swimmer, Sarah Steiger, 9. Chattopadhyay, G., Cryogenic Sensors and 20. Goldsmith, Paul, Dariusz Lis, Jon Kawamura, Alexander Soibel; Arezou Khoshakhlagh; Devices and Antenna for Millimeter-Wave 23. Soibel, Alexander, David Z. Ting, Sir B. Miguel Daal, Giulia Collura, Alex Walter, Other Terahertz Technologies for Science Jose Siles and Youngmin Seo,THz Space Sam Keo; Brian Pepper; Anita Fisher; Cory Terahertz Systems, 44th International Rafol, Anita M. Fisher, Sam A. Keo, Arezou Clint Bockstiegel, Neelay Fruitwala, Isabel Applications, Indian Conference on Antennas Mission to Probe the Trail of Water, Int, Hill; Kwong-Kit Choi; Arvind D’Souza; Conference on Infrared, Millimeter, and Khoshakhlagh, and Sarath D. Gunapala, Lipartito, and Benjamin A. Mazin, “Design and Propagation (InCAP), Ahmedabad, India, Symp, on Space THZ Technology, 2020 Christopher Masterjohn; Sachidananda Terahertz Waves (IRMMW) 2019 September Mid-wavelength infrared InAsSb/InAs nBn and Performance of Hafnium Optical December 2019. R. Babu; Parminder Ghuman. Type-II 1-6 21. Goldsmith, Paul, Youngmin Seo, Dariusz Lis, strained-layer superlattice digital focal detectors and FPAs with very low dark Kinetic Inductance Detectors” Appl. Phys. 10. Chattopadhyay, G., M. Alonso-delPino, and Jose Siles, William Langer, & Jon Kawamura, 38. Maiwald, F.s S. Madsunkov, D. Nikolic, J. current density, Journal Reference: Applied Lett. , Vol 115, 213503 (2019); https://doi. plane arrays for earth remote sensing J. Kooi, Antennas, Arrays, and Systems for Source – A Space Mission to Probe the Trail instruments. Proceedings of SPIE 11151, Simcic, R. Kidd, M. Gonzalez, A. Belousov, Physics Letters 114, 161103 (2019), https:// org/10.1063/1.5127768 Submillimeter-Wave Radio Astronomy, Proc. of Water, 44th International Conference on B. Bae, M., V. Lopez, B. Kim, Planetary doi.org/10.1063/1.5092342 Sensors, Systems, and Next-Generation 13th European Conference on Antennas Infrared, Millimeter, and Terahertz Waves Satellites XXIII; 1115110 (2019) https://doi. Mass Spectrometry 389Team, Compact 24. Sterczewski, L. A., J. Westberg, M. Bagheri, Conference Publications and Propagation (EuCAP), Copenhagen, (IRMMW) 2019 September 1-6 org/10.1117/12.2527731 QIT-Mass Spectrometers for Lunar and C. Frez, I. Vurgaftman, C. L. Canedy, W. W. 1. Bagheri, M., Interband Cascade Frequency Denmark, April 2020. 22. González-Ovejero, C., A. Mahmoud, X. Planetary Applications, Presentation Bewley, C. D. Merritt, C. S. Kim, M. Kim, J. 29. Jafari M, LJ Guo, M Rais-Zadeh. Application at LPC2W December 02, 2019, Orleans, Comb Devices, IEEE Photonics Society 11. Chattopadhyay, G., Packaging and Morvan, M. Ettorre, R. Sauleau, S. Maci, G. of phase change material in tunable R. Meyer, and G. Wysocki, “Mid-infrared Summer Topical Meeting Series (SUM) Integration Solutions at Terahertz Chattopadhyay, and N. Chahat, Metal- France; Sondermolequium, I. Physikalisches dual-comb spectroscopy with interband optical filters and shutters Micro-and Institut der Universität zu Köln, Germany, (Keynote), TuC4.1, Fort Lauderdale, FL, USA, Frequencies, Proc. MTT-S International Only Modulated Metasurface Antenna for Nanotechnology Sensors, Systems, and cascade lasers,” Optics Letters, vol. 44, July (2019) Microwave Symposium, Boston, MA, CubeSat Platforms, Proc. IEEE International December 05, 2019; Extraordinary Space 2113-2113 (2019). https://doi.org/10.1364/ Applications XI 10982, 109820W Seminar December 13, 2019, University of 2. Baines, K. H., J. A. Cutts, D. Nikolić, S. M. June 2019. Symposium on Antennas and Propagation, OL.44.002113 Atlanta, GA, USA, July 2019. 30. Jafari, M, LJ Guo, M Rais-Zadeh Selective Bern, Switzerland. Madzunkov, M. L. Delitsky, S. S. Limaye, and 12. Chattopadhyay, G., Science Instruments light modulation in waveguide grating 25. Sterczewski, L. A., M. Bagheri, C. Frez, C. L. K. McGouldrick, The JPL Venus Aerosol Mass for CubeSats and SmallSats, European 23. González-Ovejero, D., M. Faenzi, A. 39. Maiwald, Frank, Stojan Madzunkov, Murray Canedy, I. Vurgaftman, M. Kim, C. S. Kim, using phase change materials (Conference Darrach, Dan Fry, Patrick McNally, Dragan Spectrometer Concept, Proceedings of the Microwave Week, Paris, France, September Mahmoud, M. Ettorre, R. Sauleau, N. Chahat, Presentation). Integrated Optics: Devices, C. D. Merritt, W. W. Bewley, and J. R. Meyer, 16th International Planetary Probe Workshop, 2019. G. Chattopadhyay, and S. Maci, Some Recent Nikolic, Jim M. Raines, Jurij Simcic, Sarah “Near-infrared frequency comb generation Materials, and Technologies XXIII 10921, Waller, Anton Belousov, Peter Willis, QIT- 8-12 July 2019, Oxford University, UK. 13. Chen, Christine P., Darren Hayton, Cecile Developments on Modulated Metasurface 109210L in mid-infrared interband cascade lasers,” Antennas, IEEE International Microwave Mass Spectrometer for Lunar and Planetary Optics Letters, vol. 44, 5828-5831 (2019). 3. Baines, K.H., J.A. Cutts, D. Nikolic, S.M. Jung-Kubiak, Joseph Lee, Jose Siles, Maria 31. Jafari, M, LJ Guo, M Rais-Zadeh Event: Applications, 13th HEMP workshop in Madzunkov, J.-B. Renard, O. Mousis, Alonso, Alex Peralta, Imran Mehdi, Designing and RF Conference (IMaRC), Mumbai, India, https://doi.org/10.1364/OL.44.005828 December 2019. SPIE Smart Structures + Nondestructive September 2019, Myrtle Beach L.M. Barge, and S.S. Limaye, An Aerosol and Fabricating a Three-Dimensional Silicon Evaluation, 2019, Denver, Colorado, United 26. Theiling B and Coleman M. Paleo- Instrument Package for Analyzing Venusian Stack for a 2.06 THz Receiver Front End, 24. Gunapala Sarath; Sir Rafol; David Ting; 40. Mehdi, Imran, Christine P. Chen, Jose microbial-ecology of the Monterey StatesA reconfigurable color reflector Siles, Silicon Micro-machined 2 THz Mixer Cloud Particles, 17th Meeting of the Venus Postdoc Research Poster Session, T-12, Alexander Soibel; Arezou Khoshakhlagh; by selective phase change of GeTe in a Formation: implications for Middle Miocene Exploration and Analysis Group (VEXAG), presented on July 10, 2019, Pasadena, CA. Sam Keo; Brian Pepper; Anita Fisher; for 3-D Winds, Darren Hayton, Research paleoclimatology. Mar. Geol. 413 112-128 multilayer structure Advanced Optical Conference Day, RPC-150 (RT&D), November 6-8, 2019 in Boulder, Colorado 14. Chen, Christine P., Darren Hayton, Robert Edward Luong; Cory Hill; Kwong-Kit Choi; Materials 7 (5), 1801214 (2019) (2019). https://doi.org/10. 10 l 6/j.margeo.20 USA, LPI Contribution No. 2193, id.8010 Arvind D’Souza; Christopher Masterjohn; submitted Sept 25, 2019, Pasadena, CA. l 9.04.001 Lin, Cecile Jung-Kubiak, Jose Siles, 32. Jafari,M, LJ Guo, M Rais-Zadeh, Waveguide (2019). Choonsup Lee, Maria Alonso, Alex Peralta, Sachidananda Babu; Parminder Ghuman 41. Nikolić, D., D. Keicher, F.-G. Fan, Design of 27. Waller, SE, A. Belousov, R.D. Kidd, D. Infrared Digital Focal Plane Arrays for Grating Color Reflector Using Germanium an Aerodynamic Lens for PM2.5 Chemical 4. Baines, K.H., J.A. Cutts, D. Nikolic, S.M. Imran Mehdi Design and Fabrication of Telluride 2019 20th International Nikolić, S.M. Madzunkov, J.S. Wiley, and Madzunkov, M.L. Delitsky, S.S. Limaye, K. Silicon Stacked Architecture for 2.06 THz Earth Remote Sensing Applications, 2019 Composition Analysis, Proceedings of M.R. Darrach, Chemical Ionization Mass IEEE Photonics Conference (IPC), San Conference on Solid-State Sensors, the 49th International Conference on McGouldrick, The JPL Venus Aerosol Mass Receiver Front End,, ISSTT Proceedings by Actuators and … Spectrometry: Applications for the In Situ Spectrometer Concept, 16th International NRAO, submitted June 28, 2019. Antonio, TX, USA, 2019, pp. 1-2. DOI: 10.1109/ Environmental Systems, July 7-11, 2019 Measurement of Nonvolatile Organics at Planetary Probe Workshop & Short Course IPCon.2019.8908367 33. Karasik, B.S., D.P. Cunnane, J.H. Kawamura, Boston Omni Parker House, Boston, MA Ocean Worlds, Astrobiology, Vol. 19(10), 15. Chen, Christine P., Darren Hayton, Robert D.J. Hayton, N. Acharya, W. Withanage, X. (ICES-2019-366). titled • Ice Giants: Exciting Targets for Solar Link, Cecile Jung-Kubiak, Jose Siles, 25. Gunapala, Sarath, Sir Rafol, David Ting, 1196-1210 (2019). System Entry Probes Exploration • 6–7 July Alexander Soibel, Arezou Khoshakhlagh, Xi, Far- and Mid-IR Heterodyne Detectors 42. Nikolic, D., J. Simcic, and S. Madzunkov, Choonsup Lee, Maria Alonso, Imran Mehdi Based on MgB2, 2019 44th Int. Conf. IR, MM 28. White, L.M., Shibuya, T., Vance, S., 2019 Oxford University Design and Fabrication of Silicon Stacked Sam Keo, Brian Pepper, Anita Fisher, Cory Expected Performance of the QIT-MS Christensen, L.E., Bhartia, R., Kidd, R.D., Hill, Kwong-Kit Choi, Arvind D’Souza, & THz Waves (IRMMW-THz), DOI: 10.1109/ Mass Spectrometer in Venus’ Atmosphere, 5. Bao, X, S Sherrit, CF Frez, V Scott, M Rais- Architecture for 2.06 THz Receiver Front IRMMW-THz.2019.8874175 Hoffman, A., Stucky, G.D., Kanik, I. & Russell, Zadeh Analysis of performances of MEMS End,, International Symposium on Space Christopher Masterjohn, Sachidananda 17th Meeting of the Venus Exploration 76 M.J.. Simulating serpentinization as it could infrared sensor based on piezoelectric Terahertz Technology, presented on April 15, Babu, Parminder Ghuman, Proc. SPIE 11129, 34. Kawamura, J., D. Cunnane, B. Karasik, and Analysis Group (VEXAG), November 77 apply to the emergence of life using the JPL bending resonators … Proceedings Volume 2019, Gothenberg, Sweden. Infrared Sensors, Devices, and Applications B. Bumble, D. Hayton, I. Mehdi, G. 6-8, 2019 in Boulder, Colorado USA, LPI hydrothermal reactor. Astrobiology, Vol. 20, IX, 111290C (9 September 2019); https://doi. Chattopadhyay, M. Alonso-delPino, J. Siles, Contribution No. 2193, id.8024 (2019). 10970, Sensors and Smart Structures 16. Cooper, Ken B., Richard J. Roy, Jose V. 307-326 (2019). Technologies for Civil, Mechanical, and org/10.1117/12.2533477 C. Curwen, and B. Williams, Development 43. Pepper, B. J., K. Y. Yee, A. Soibel, A. M. Fisher, Siles, Matthew Lebsock. Luis Millan, Omkar of THz Superconducting HEB Receiver 29. Wollman, E. E., V. B. Verma, A. E. Lita, W. Aerospace Systems 2019; 1097028 (2019) Pradhan, and Raquel Rodriguez Monje, 26. Gunapala, Sarath; David Ting; Alexander S. A. Keo, A. Khoshakhlagh, S. D. Gunapala H. Farr, M. D. Shaw, R. P. Mirin, and S. W. https://doi.org/10.1117/12.2514440 Soibel; Arezou Khoshakhlagh; Sir Rafol; Cory Systems for Balloons, Aircraft, SmallSats GaSb grass as a novel antireflective surface Differential Absorption Radar at 170 and 560 and Future Large Missions, Proc. 31st Nam ”Kilopixel array of superconducting 6. Boieriu Paul; Christoph Grein; Christopher GHz for Humidity Remote Sensing, Proc. Hill; Anita Fisher; Brian Pepper; Kwong- for infrared detectors, , Infrared Technology nanowire single-photon detectors. Opt. Kit Choi; Arvind D’Souza; Christopher International Symposium on Space and Applications XLV 11002, 110020X, Buurma; Jered Feldman; Richard Pimpinella; SPIE, 2020. Terahertz Technology (ISSTT), Tempe, AZ, Express, Vol. 27 (24), 35279-35289 (2019) Anthony Ciani; Alexander Soibel; David Masterjohn; Sachidananda Babu; Parminder May 2019, https://www.spiedigitallibrary. 17. Cortez, A. T., E. Y. Cho, H. Li, D. Cunnane, B. Ghuman, Antimonides Type-II superlattice USA, March 2020. org/conference-proceedings-of- 30. Yurduseven, O., K. Cooper, and G. Z. Ting, Inductively coupled plasma Karasik, and S. A. Cybart, Tuning Y-Ba- Chattopadhyay, “Point-Spread-Function hydrogenation of LWIR type-II superlattices, digital focal plane arrays for Space remote 35. Keicher, D., M. Essien, F-G. Fan, N. Verdier, spie/11002/110020X/GaSb-grass-as-a- Cu-O focused helium ion beam Josephson sensing instruments, SPIE Proceedings J-B. Renard, J. Simcic, and D. Nikolić, novel-antireflective-surface-for-infrared-

(PSF) Characterization of a 340-GHz March 2019 Proceedings of SPIE — The NASA for 3 Decades of Innovation junctions for use as THz mixers, IEEE Trans. 11180, International Conference on Space Advanced Aerosol Separator for PM2.5 detectors/10.1117/12.2521095.short?SSO=1 Imaging Radar Using Acoustic Levitation,” International Society for Optical Engineering Appl. Supercond., 29(5), 1102305 (2019). IEEE Transactions on Terahertz Science and XVI (109260I):17 Optics — ICSO 2018; 111803T (2019) https:// Chemical Composition and Size Distribution Technology, vol. 9, no. 1, pp. 20-26 (2019). doi.org/10.1117/12.2536056 Analysis, 50th International Conference on

JPL Microdevices Laboratory | 2020 Annual Report Appendices, cont.

44. Pradhan, Omkar, Ken Cooper, Leslie 52. Simcic, J., J.C. Lee, S. Madzunkov, D. Nikolic, 61. Yurduseven, O., C. Lee, N. Chahat, D. 5. Ting, David Z., Alexander Soibel, Arezou o Veeco Epi GEN III MBE (III-V Antimonide • Oxford PlasmaPro 100 Cobra Load-Locked Tampari, Brian Drouin, Raquel Monje, A. Belousov, Piezo-Electric Inlet System González-Ovejero, M. Ettorre, R. Sauleau, and Khoshakhlagh, Sarath Gunapala “Unipolar Materials) Cryo Etching / Atomic Layer Etching / Bosch Richard Roy, Jose Siles and Corey for Atmospheric Descent Probe, 16th G. Chattopadhyay, Design of a Quasi-Optical barrier dual-band infrared detectors”, Patent o Veeco GENxcel MBE (III-V Antimonide Etching System, primarily for Black Silicon. Cochrane,Submillimeter Wave Differential International Planetary Probe Workshop Si/GaAs W-Band Beam-Forming Metasurface Number: 9.799,785 Issued: 11/24 /2017. Materials) Chlorine-based Plasma Etching Systems Absorption Radar For Water Vapor & Short Course titled • Ice Giants: Exciting Antenna, Proc. IEEE International Symposium • Ultra-High-Vacuum (UHV) Sputtering • Unaxis Shuttleline Load-Locked Chlorine Sounding In The Martian Atmosphere, Int, Targets for Solar System Entry Probes on Antennas and Propagation, Atlanta, GA, Awards and Recognition Systems for Dielectrics and Metals (3) Inductively Coupled Plasma (ICP) RIE Symp, on Space THZ Technology, 2020 Exploration • 6–7 July 2019 Oxford USA, July 2019. by External Organizations University • Ultra-High-Vacuum (UHV) Sputtering • PlasmaTherm Versaline Chlorine-based 45. Rahiminejad, S., C. Jung-Kubiak, M. 62. Yurduseven, O., D. González-Ovejero, 1. Sarath Gunapala received the MSS Systems for Superconducting Materials (3) ICP Etcher Rais-Zadeh, and G. Chattopadhyay, 53. Sterczewski, Lukasz A., Mahmood Bagheri, M. Ettorre, R. Sauleau,V. Fusco, G. Levinstein Award from the Military Sensing Contactless rotating MEMS waveguide Clifford Frez, L. Canedy, Igor Chattopadhyay, and N. Chahat Towards a Symposia (MSS) for “outstanding technical Lithographic Patterning Wet Etching & Sample Preparation switch for water detection at 557 GHz, Proc. Vurgaftman, Mijin Kim, Chul Soo Kim, Si/GaAs Based Flat-Panel Quasi-Optical and management contributions in the • Electron-Beam (E-beam) Lithography: JEOL • RCA Acid Wet Bench for 6-inch Wafers 31st International Symposium on Space Charles D. Merritt, William W. Bewley, Metasurface Antenna with Switchable development of infrared focal plane arrays for JBX9500FS e-beam lithography system with • Solvent Wet Processing Benches (7) Terahertz Technology (ISSTT), Tempe, AZ, and Jerry R. Meyer, Interband Cascade Beam Characteristics, Proc. 13th European the military sensing community and national a 3.6-nm spot size, switchable 100,000 & 48,000-volt acceleration voltages, ability • Rinser/Dryers for Wafers including Semitool USA, March 2020. Laser Frequency Combs (invited), 6th Conference on Antennas and Propagation defense under the Vital Infrared Sensor 870S Dual Spin Rinser Dryer International WORKshop on Infrared (EuCAP), Copenhagen, Denmark, April 2020. Technology Acceleration (VISTA) program.”. to handle wafers up to 9 inches in diameter, 46. Robert Wright; Miguel Nunes; Paul Lucey; and hardware and software modifications • Chemical Hoods (7) Luke Flynn; Sarath Gunapala; David Ting; Technologies, Princeton, NJ, USA, October 2. Fernanda Mora was invited to contribute a 29-30 (2019). to deal with curved substrates having • Acid Wet Processing Benches (8) Sir Rafol; Alexander Soibel; Chiara Ferrari- Book Contributions manuscript to the “Emerging Investigator up to 10 mm of sag Wong; Andrea Gabrieli; Prasad Thenabail 54. Sterczewski, Lukasz A., Mahmood Bagheri, Series in Analytical Methods” that aims to • Jelight UVO-Cleaners (2) None for 2019 • Heidelberg MLA 150 Maskless Aligner .HYTI: thermal hyperspectral imaging from Clifford Frez, Igor Vurgaftman, Jerry R. highlight research being conducted by early- • Novascan UV8 Ultraviolet Light Ozone with 375nm, 405nm, and Gray scale modes a CubeSat platform, SPIE Proceedings Meyer, Injection locking of interband career scientists in the field of analytical Cleaner New Technology Reports (1.0 µm res.) 11131, CubeSats and SmallSats for Remote cascade laser frequency combs, Infrared chemistry. • Tousimis 915B Critical Point Dryer Sensing III; 111310G (2019) https://doi. Terahertz Quantum Workshop, Ojai, CA, 1. Briggs Ryan M., (2019) Ultraviolet lasers based • Canon FPA3000 i4 i-Line Stepper 3. Konstantin Zamuruyev received an Award for • Solaris 150 Rapid Thermal Processor org/10.1117/12.2530821 USA, September 15-20 (2019). on upconversion in orientation-patterned Best Doctoral Dissertation from the College (0.35-µm res.) 47. Schowalter, S. J., B. Bae, I. Cisneros, E. 55. Ting, David Z.; Alexander Soibel; Arezou crystals, NTR 51386. of Engineering at the University of California, • Canon FPA3000 EX3 Stepper with EX4 • Polishing and Planarization Stations (5) Diaz, M. P. Gonzalez, M. L. , R. D. Khoshakhlagh; Sam A. Keo; Sir B. Rafol; 2. Briggs, Ryan M., Clifford F. Frez, and Mathieu Davis. The award recognized his research Optics (0.25-µm res.) • Strasbaugh 6EC Chemical Mechanical Kidd, B. Moore, D. Nikolić, A. Oyake, R. Edward M. Luong; Anita M. Fisher; Brian J. Fradet, (2019) Tapered-grating single-mode on “Development of a Portable System for • Canon FPA3000 EX6 DUV Stepper Polisher , K. Reichenbach, R. Schaefer, J. Pepper; Cory J. Hill; Sarath D. Gunapala, lasers, NTR 51405. Analysis of Exhaled Breath Condensate” (0.15-µm res.) • Precitech Nanonform 250 Ultra Diamond Simcic, S. Madzunkov, and M. Darrach, InAs/InAsSb Type-II Strained Layer with a hand-held CE-ESI device. 3. Coleman, M and Christensen, L. E., (2019) An • Contact Aligners: Point Turning System The Technology Demonstration of Superlattice Barrier Infrared Detectors. apparatus to sample without a membrane for o Karl Suss MJB3 the Spacecraft Atmosphere Monitor, 2019 IEEE Photonics Conference (IPC), San • SET North America Ontos 7 Native Oxide in-situ underwater gas analysis using capillary MDL EQUIPMENT COMPLEMENT o Karl Suss MJB3 with backside IR Proceedings of the 49th International Antonio, TX, USA, 2019, pp. 1-2. DOI: 10.1109/ (Indium Oxide) Removal Tool with upgrade absorption spectrometry, NTR# 51275. Material Deposition o Suss MA-6 (UV300) with MO Exposure Conference on Environmental Systems, IPCon.2019.8908487 • SurfX Atomflo 500 Argon Atmospheric 4. Cunnane, D., B. Karasik, S. Cybert, and A. • Thermal Evaporators (5) Optics upgrade July 7-11, 2019 Boston Omni Parker House, Plasma Surface Activation System for wafer 56. Verma V. B. et al. Towards single-photon Cortez, (2019) Josephson Mixer Based on o Suss BA-6 (UV400) with jigging Boston, MA (ICES-2019-321) • Electron-Beam Evaporators (7) bonding spectroscopy in the mid-infrared using Focused Ion Beam Direct Writing of YBCO supporting Suss bonder 48. Siles, J. V., J. H. Kawamura, C. Lee, G. superconducting nanowire single-photon • Angstrom Engineering Indium-Metal • New Wave Research EzLaze 3 Laser Cutting Josephson Junctions, NTR #51503, • Wafer Track/Resist/Developer Dispense Chattopadhyay, R. H. Lin, M. Alonso-del- detectors. Proc. SPIE 10978, Advanced Evaporator System 5. Ledezma, Luis M., Hernandez, Ryan M. Briggs, Systems: Pino and M. Choukroun, Ultra-Broadband Photon Counting Techniques XIII, (2019) • AJA Load Locked Thermal Co-Evaporator Alireza Marandi, and Yinglun Xu, (2019) Thin- o Suss Gamma 4-Module Cluster System • Indonus HF VPE-150 Hydrofluoric Acid Vapor Submillimeter-Wave Schottky Array for Broadband IR Bolometer Depositions 57. Whitton, Cassandra, Christopher Groppi, film optical parametric oscillator, NTR 51163. o Site Services Spin Developer System Phase Etcher Receivers for High Spectral Resolution Philip Mauskopf, Jose Siles and Adrian Tang • PlasmaTherm 790 Plasma Enhanced 6. Mathieu, Fradet, M. Briggs, Linda Y. Del o SolarSemi MC204 Microcluster Spin • Laurell Technologies Dilute Dynamic Spectroscopy of and Comets, IEEE Development of a Dual-Band Metamaterial Chemical Vapor Deposition (PECVD) for Castillo, and Rais-Zadeh, (2019) Infrared/ Coating System Cleaning System (DDS), Model EDC 650 International Microwave and RF Conference Lens for Cubesat Water Observation, , Int, Dielectrics with Cortex Software Upgrade visible optical flow sensor for multi-phase • Yield Engineering System (YES) – a Dilute HF/Ozonated DI Water Spin (IMaRC), Mumbai, India, December 2019. Symp, on Space THZ Technology, 2020 mixtures, NTR 51456. • Oxford Plasmalab System 100 Advanced Reversal Oven Cleaning System with MKS Instruments 49. Siles, Jose V., Jonathan Kawamura, Robert 58. Wright, Robert; Miguel Nunes; Paul Lucey; Inductively Coupled Plasma (ICP) 380 Liquizon Ozonated Water Generator. • Sonotek Exacta Coat E1027 Photoresist Lin, Choonsup Lee, Alain Maestrini, Darren Luke Flynn; Thomas George; Sarath High-Density Plasma Enhanced Chemical Spray Coater • Osiris Fixxo M200 TT Wafer Mounting Tool Hayton, Ken Cooper, Maria Alonso del Pino Gunapala; David Ting; Sir Rafol; Alexander Patents Vapor Deposition (HD PECVD) System for Packaging and Imran Mehdi Compact Multi-Pixel Soibel; Chiara Ferrari-Wong; Abigail Flom; 1. Chattopadhyay, G., C. D. Jung-Kubiak, Low-Temperature Dielectric Growths • Ovens, Hotplates, Furnaces, and • SET FC-300 Flip Chip Bump Bonder Frequency Multiplied Local Oscillator John Mecikalski; Prasad Thenkabail; the T. J. Reck, D. Gonzalez_Ovejero, M. Alonso- with X20 PLC upgrade. Manual Spinners (4) Sources for Wideband Array Receivers in HyTI Team. HyTI: Thermal Hyperspectral delPino, Low-profile and high-gain modulated • Oxford Plasmalab 80 OpAL Atomic Layer Dry Etching • Karl Suss Wafer Bonder the 200-600 GHz & 1.4-2.7 THz Ranges, , Imaging from A Cubesat Platform, IGARSS metasurface antennas from gigahertz to Deposition (ALD) System with Radical • Commonwealth IBE-80 Ion Mill • Electronic Visions AB1 Wafer Bonder Int, Symp, on Space THZ Technology, 2020 terahertz range frequencies, US 10,418,721 B2, 2019 - 2019 IEEE International Geoscience Enhanced Upgrade • Branson Plasma Ashers (2) • EVG 520Is Semi-Automatic Wafer Bonding 50. Siles, Jose V., Jorge Pineda, Jonathan and Remote Sensing Symposium, September 17, 2019. • Beneq TFS-200 Atomic Layer Deposition System Kawamura, Christopher Groppi, Pietro Yokohama, Japan, 2019, pp. 4982-4985. • Tepla PP300SA Microwave Plasma Asher 2. Coleman, M and Christensen, L. E. An (ALD) System Bernasconi, Joshua Gundersen and Paul DOI: 10.1109/IGARSS.2019.8899887 Apparatus to Sample Without a Membrane Fluorine-Based Plasma Etching Systems • Finetech Fineplacer 96 “Lambda” 78 • Tystar (150-mm/6-inch) Low-Pressure Bump Bonder 79 Goldsmith ,ASTHROS - Astrophysics 59. Yoo, C., M. Huang, J. Kawamura, K. W. West, for In-Situ Underwater Gas Analysis Using • STS Deep Trench Reactive Ion Etcher (DRIE) Chemical Vapor Deposition (LPCVD) with 3 Stratospheric Telescope for High-Spectral B.S. Karasik, L. N. Pfeiffer, and M. S. Sherwin, Capillary Absorption Spectrometry CIT File with SOI Upgrade • Thinning Station and Inspection Systems Tubes for Resolution Observations at Submillimeter- Demonstration of a TACIT Heterodyne No.: CIT-8324-P. Filed: 7/31/2019. US patent • PlasmaTherm Versaline Deep Silicon Etcher for CCD Thinning o Low-Stress Silicon Nitride waves: Mission Overview and Development Detector at 2.5 THz, Proc. 30th Int. Symp. pending.US patent pending. (DSE/DRIE) • Wire Bonding o Atmospheric Wet/Dry Oxidation Status, Int, Symp, on Space THZ Spc. THz Technol., April 15-17, 2019, 3. Khoshakhlagh, Arezou, David Z. Ting and o Oxy-Nitride growths • Unaxis Shuttleline Load-Locked Fluorine • DISCO 320 and 321 Wafer Dicers (2) Technology, 2020 Gothenburg, Sweden, p.191. Sarath D. Gunapala, “P-compensate and Inductively Coupled Plasma (ICP) RIE • Tempress Scriber 51. Simcic, J., J. C. Lee, S. Madzunkov, D. Nikolić, P-doped superlattice infrared detectors” • Carbon Nanotube (CNT) Growth Furnace 60. Yoo, C., M. Huang, J. Kawamura, K. W. • PlasmaTherm APEX SLR Fluorine-based ICP and A. Belousov, Piezo-electric inlet system Patent Number: 9,831,372. Issued: 11/28/2017. Systems (2) • Pick and Place Blue Tape Dispenser System West, B.S. Karasik, L.N. Pfeiffer, and M.S. RIE with Laser End Point Detector for atmospheric descent probe, Proceedings Sherwin, Demonstration of a Frequency- 4. Siles, Jose V., and others. On-Chip Diplexed • Electroplating Capabilities • Loomis LSD-100 Scriber Breaker of the Workshop on In Situ Exploration of the with SW upgrade Agile Quantum Well Based THz Heterodyne Multi-Band Submillimeter-Wave/Terahertz • Molecular-Beam Epitaxy (MBE) • SCS Labcoater 2 (PDS 2010) Parylene Ice Giants, 25-27 February Marseille, France • Plasmaster RME-1200 Fluorine RIE Detector, 2019 44th Int. Conf. IR, MM & THz Sources”, CIT Preliminaty Patent File No.: CIT- o Veeco GEN200 (200-mm/8-inch) Si MBE Coating System (2019). Waves (IRMMW-THz), DOI: 10.1109/IRMMW- 8386-P, Filed: 11/7/2019. US patent pending. for UV CCD Delta Doping (Silicon) • Plasma Tech Fluorine RIE NASA for 3 Decades of Innovation THz.2019.8874259 with computer upgrades • STJ RIE for Superconductors • Custom XeF2 Etcher

JPL Microdevices Laboratory | 2020 Annual Report Appendices, cont.

Characterization • Surfscan 6200 Surface Analysis System • Fourier Transform Infrared (FTIR) • Profilometers (2) Wafer Particle Monitor with upgraded Spectrometers (3) including Bruker (Dektak 8 and Alphastep 500) Software Optics Vertex 80 FTIR • Frontier Semiconductor FSM 128-NT • JEOL JSM-6700 Field Emission • PANalytical X’Pert Pro MRD with DHS High (200-mm/8-inch) Film Stress and Wafer SEM with EDX Temperature Stage X-ray Diffraction System Bow Mapping System • Hitachi Regulus 8230 UHR Cold Field • Surface Science SSX501 XPS • LEI 1510 Contactless Sheet Resistance Tool Emission SEM with Aztec Energy Dispersive with Thermal Stage • FISBA μPhase 2 HR Compact Optical X-ray Microanalysis System and Critical • Custom Ballistic Electron Emission Interferometer Dimension Measurement capabilities Microscopy (BEEM) System • Horiba UVSEL 2 (190–2100 nm) Ellipsometer • Nanospec 2000 Optical Profilometer • Custom UHV Scanning Tunneling • Filmetrics F20-UV (190-1100 nm) Thin Film • Nikon and Zeiss Inspection Microscopes Microscope (STM) Spectrometer Measurement System with Image Capture (3) • Nanometrics ECV Pro Profiler • Filmetrics F40-UVX (190-1700 nm) • Keyence VHX-5000 Digital Microscope • VEECO / WYKO NT 9300 Surface Profiler Thin Film Spectrometer Measurement including low power lens (including 50X optics) System with Microscope • McBain BT-IR Z-Scope IR Microscope • Zygo ZeMapper non-contact 3D Profile Workstation • Bruker Dimension 5000 Atomic Force • Thermo Scientific LCQ Fleet CE / MS Microscope (AFM) • Olympus LEXT 3D Confocal Microscope (Capillary Electrophoresis / Mass • Park Systems Inc. NX20 Atomic Force • Mitaka NH-5Ns 3D Profiler Spectrometer) System Microscope (AFM) • Electrical Probe Stations (4) • Lakeshore Cryotronics Model CPX 1.7 Kelvin • KLA-Tencor Surfscan 6220 Wafer with Parameter Analyzers (2) Cryo Probe Station Particle Monitor • RPM2035 Photoluminescence Mapping System MDL The research described in this report was carried out at the Jet Propulsion Laboratory, California Institute of Technology, under a contract with the National Aeronautics and Space Administration. Reference herein to any specific commercial product, process, or service by trade name, trademark, manufacturer, or otherwise, does not constitute or imply its endorsement by the United States Government or the Jet Propulsion Laboratory, California Institute of Technology.

©2020 California Institute of Technology. Government sponsorship acknowledged.

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About the back cover: Exoplanet discovery and characterization are a key focus of NASA to understand how Earth and our solar system fit in the universe. This image is an artist’s concept of a gas giant exoplanet orbiting its star. MDL is contributing advanced devices and customized space flight packaging for missions with exoplanet capabilities. National Aeronautics and Space Administration Jet Propulsion Laboratory California Institute of Technology Pasadena, California www.jpl.nasa.gov www.microdevices.jpl.nasa.gov

CL#20-2833 JPL 400-1728 07/20