© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R1 10/07/07.0 -1 IeaCpctv Sensors Capacitive PISeca D-510 igePaeSnoswt xeln oiinResolution Position Excellent with Sensors Single-Plate ࡯ ࡯ ࡯ ࡯ ࡯ with. work to and easy are dynamics excellent stable, have very tally fundamen- are gauges pacitive ca- single-electrode PISeca The available. linearity resolution and highest the feature They target. conductive trically elec- of kind any against or motion position distance, of ments measure- non-contact perform PI single-elec- from sensors capacitive PISeca trode new The ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ plcto Examples Application industry Automotive storage Data urement meas- & test / technology Semiconductor rcso machining Precision ihBandwidth High Integration Easy μm 500 to Ranges Resolution Sub-Nanometer Sensing Vibration Position / Absolute Motion / Distance for Measurement Non-Contact lcrnc.Sno rbs(rmlf) -1.0 ih10μ,D5001with D-510.051 μm, 100 with D-510.101 left): (from probes Sensor electronics. Ieahg-rcso aaiiesno rbswt -5 inlconditioner signal E-852 with probes sensor capacitive high-precision PISeca 0μ,D5001wt 0μ oia esrmn range measurement nominal μm 20 with D-510.021 μm, 50 Piezo • n Lifetime and Accuracy Highest for Sensors Position Capacitive at hsmkste reo fric- of free them con- makes This tact. physical target without the conductive surface, a between and probe capacitance change of measure to field an electric direct use They devices. are metrology sensors pacitance) (ca- capacitive Single-electrode Nano • -1.2 ihLM connector LEMO with D-510.021 Positioning o ayhandling easy for width. h provides and hysteresis and tion ayHnln n Integration and Handling Easy linearity. measuring higher in results zone and measurement the in field electric homogeneous a sures en- electrode This effects. boundary sensor from the shields that electrode guard-ring a design uses PI superior The pacitor. ca- parallel-plate ideal an of on that based is principle operating the because linearity in- on strong fluence a has design Sensor Linearity Higher Provides Capacitor Guard-Ring attained (upto0.1%). be can linearity cellent With range. ex- accuracy, 1-nm mounting sufficient the to still down resolution a with kHz possible, 10 is to measure- up bandwidth a ments, high-dynamics band- achieved. For be can kHz and 10 sub- to widths range the to nanometer (E-852.10) down suitable resolutions electronics with sensor combination In lecs h -5.0pro- optionally calibrated, E-852.10 two vides The fluences. in- capacitance cable and eliminates offset and gain (lin- earization), ILS like opti- parameters also mizes probe. calibration sensor Factory particular for time one same be the at can calibrated ranges Two measurement electronics. signal conditioner the sensor with together the probe of calibration tory fac- with achieved are and accuracy linearity possible Highest Linearity Improved for Calibration Factory allows diameter flexibility. and compatibility shaft - ized The field. the in replace- ment and mounting easy for connector LEMO integrated an feature probes sensor PISeca All g hs ieiyadband- and fidelity phase igh lt aaiiesnosare 3-14 p. sensors (see recommended two- capacitive series plate D-100 re- the is quired, performance ultimate If available. also are elec- tronics custom with Systems match, etc. ranges, materials geometries, measuring for different versions a custom offer of can variety PI here, listed sen- sors standard the to addition In Sensors Two-Plate / Sensors Custom steel. stainless is rial mate- standard The highest resolution. obtain to required face the sur- is mirrored ultra-flat, smooth, result control The techniques. process so- using phisticated tools diamond machined with are sensors the PISeca of surfaces measuring The Machining High-Precision available. are ranges measurement extended s bu utmdesigns! custom about Ask request. on available lengths cable Other m 2 Connector, Right-Angle PISeca, Cable Sensor D-891.02A m 1 Connector, Right-Angle PISeca, Cable Sensor D-891.01A m 2 PISeca, Cable Sensor D-891.02E m 1 PISeca, Cable Sensor D-891.01E Accessories 1 S P D-510.101 Range Nominal μm 50 Diameter, mm 12 Probe, Sensor Capacitive Single-Electrode PISeca, D-510.051 Range Nominal μm 20 Diameter, mm 8 Probe, Sensor Capacitive Single-Electrode PISeca, D-510.021 Information Ordering 0μ oia Range Nominal μm 00 Sc,Snl-lcrd Capacitive Single-Electrode ISeca, no rb,2 mDiameter, mm 20 Probe, ensor ff ). Piezo • Nano • Positioning

Linear Actuators & Motors 11 1 Nanopositioning/Piezoelectrics

Nanometrology

Capacitive Sensors / Signal Conditioners

Nanometrology Fundamentals

Micropositioning

Index

D-510.021, D-510.051 and D-510.101 capacitive sensor probes, dimensions in mm. Sensor connection LEMO FFC00.650.CLA.543, triaxial

Technical Data Model D-510.021 D-510.051 D-510.101 Units Tolerance Sensor type Single-electrode, Single-electrode, Single-electrode, capacitive capacitive capacitive Measurement accuracy Nominal measurement range* 20 50 100 μm Min. gap 10 25 50 μm Max. gap 150 375 750 μm Static resolution** <0.001 <0.001 <0.001 % of measure- ment range typical Dynamic resolution** <0.002 <0.002 <0.002 % of measure- ment range typical Linearity*** <0.2 <0.1 <0.1 % Mechanical properties Sensor active diameter 3.8 6 8.4 mm Sensor active area 11.2 27.9 56.1 mm2 Sensor diameter 8 12 20 mm Sensor area 50.3 113.1 314.0 mm2 Mounting shaft diameter 8 8 8 mm Miscellaneous Operating temperature range -20 to +100 -20 to +100 -20 to +100 °C Material Stainless steel Stainless steel Stainless steel 8 10 16 g ±5 % Recommended signal E-852.10 E-852.10 E-852.10 (p. 3-10) conditioner electronics E-509.E E-509.E E-509.E (p. 3-12) *Extended measurement ranges available for calibration with E-852 signal conditioner electronics **Static resolution: bandwidth 10 Hz, dynamic: bandwidth 10 kHz, with E-852.10 signal conditioner electronics ***Linearity over nominal measurement range