Piezo • Nano • Positioning D-510 PISeca Capacitive Sensors Single-Plate Sensors with Excellent Position Resolution tion and hysteresis and provides Ordering Information high phase fidelity and band- width. D-510.021 PISeca, Single-Electrode Capacitive Sensor Probe, 8 mm Diameter, In combination with suitable 20 μm Nominal Range sensor electronics (E-852.10) D-510.051 resolutions down to the sub- PISeca, Single-Electrode Capacitive nanometer range and band- Sensor Probe, 12 mm Diameter, widths to 10 kHz can be achieved. 50 μm Nominal Range For high-dynamics measure- D-510.101 ments, a bandwidth up to 10 kHz PISeca, Single-Electrode Capacitive is possible, with a resolution still Sensor Probe, 20 mm Diameter, down to the 1-nm range. With 100 μm Nominal Range sufficient mounting accuracy, ex- Accessories PISeca high-precision capacitive sensor probes with E-852 signal conditioner cellent linearity can be attained electronics. Sensor probes (from left): D-510.101 with 100 μm, D-510.051 with D-891.01E 50 μm, D-510.021 with 20 μm nominal measurement range (upto0.1%). Sensor Cable PISeca, 1 m D-891.02E Guard-Ring Capacitor Provides Sensor Cable PISeca, 2 m ࡯ Non-Contact Measurement for Distance / Motion / Vibration Higher Linearity D-891.01A ࡯ Absolute Position Sensing Sensor design has a strong in- Sensor Cable PISeca, Right-Angle ࡯ Sub-Nanometer Resolution fluence on linearity because the Connector, 1 m operating principle is based on ࡯ Measurement Ranges to 500 μm D-891.02A that of an ideal parallel-plate ca- ࡯ Easy Integration Sensor Cable PISeca, Right-Angle pacitor. The superior PI design Connector, 2 m ࡯ High Bandwidth uses a guard-ring electrode that Other cable lengths available on shields the sensor electrode request. from boundary effects. This en- Ask about custom designs! sures a homogeneous electric field in the measurement zone extended measurement ranges The new PISeca single-elec- Capacitive Position Sensors and results in higher measuring are available. linearity. trode capacitive sensors from PI for Highest Accuracy High-Precision Machining perform non-contact measure- and Lifetime Easy Handling and Integration The measuring surfaces of the ments of distance, position or Single-electrode capacitive (ca- All PISeca sensor probes feature PISeca sensors are machined motion against any kind of elec- pacitance) sensors are direct an integrated LEMO connector with diamond tools using so- trically conductive target. They metrology devices. They use an for easy mounting and replace- phisticated process control electric field to measure change feature the highest resolution ment in the field. The standard- techniques. The result is the of capacitance between the and linearity available. ized shaft diameter allows smooth, ultra-flat, mirrored sur- probe and a conductive target compatibility and flexibility. face required to obtain highest surface, without physical con- The PISeca single-electrode ca- resolution. The standard mate- tact. This makes them free of fric- pacitive gauges are fundamen- Factory Calibration for rial is stainless steel. tally very temperature stable, Improved Linearity have excellent dynamics and Highest possible linearity and Custom Sensors / Two-Plate are easy to work with. accuracy are achieved with fac- Sensors tory calibration of the sensor In addition to the standard sen- Application Examples probe together with the signal sors listed here, PI can offer a conditioner electronics. Two variety of custom versions for ࡯ Semiconductor measurement ranges can be different measuring ranges, technology / test & meas- calibrated at the same time for geometries, materials match, urement one particular sensor probe. etc. Systems with custom elec- ࡯ Data storage Factory calibration also opti- tronics are also available. mizes parameters like ILS (lin- ࡯ Automotive industry earization), gain and offset and If ultimate performance is re- ࡯ Metrology eliminates cable capacitance in- quired, the D-100 series two- plate capacitive sensors are D-510.021 with LEMO connector fluences. The E-852.10 pro- ࡯ Precision machining © Physik Instrumente (PI) GmbHThe & newest Co. release KG for 2008. data Subject sheets to is change available without for notice. download All at data www.pi.ws. are R1 superseded 10/07/07.0 by any new release. for easy handling vides two calibrated, optionally recommended (see p. 3-14 ff ). Piezo • Nano • Positioning Linear Actuators & Motors 11 1 Nanopositioning/Piezoelectrics Nanometrology Capacitive Sensors / Signal Conditioners Nanometrology Fundamentals Micropositioning Index D-510.021, D-510.051 and D-510.101 capacitive sensor probes, dimensions in mm. Sensor connection LEMO FFC00.650.CLA.543, triaxial Technical Data Model D-510.021 D-510.051 D-510.101 Units Tolerance Sensor type Single-electrode, Single-electrode, Single-electrode, capacitive capacitive capacitive Measurement accuracy Nominal measurement range* 20 50 100 μm Min. gap 10 25 50 μm Max. gap 150 375 750 μm Static resolution** <0.001 <0.001 <0.001 % of measure- ment range typical Dynamic resolution** <0.002 <0.002 <0.002 % of measure- ment range typical Linearity*** <0.2 <0.1 <0.1 % Mechanical properties Sensor active diameter 3.8 6 8.4 mm Sensor active area 11.2 27.9 56.1 mm2 Sensor diameter 8 12 20 mm Sensor area 50.3 113.1 314.0 mm2 Mounting shaft diameter 8 8 8 mm Miscellaneous Operating temperature range -20 to +100 -20 to +100 -20 to +100 °C Material Stainless steel Stainless steel Stainless steel Mass 8 10 16 g ±5 % Recommended signal E-852.10 E-852.10 E-852.10 (p. 3-10) conditioner electronics E-509.E E-509.E E-509.E (p. 3-12) *Extended measurement ranges available for calibration with E-852 signal conditioner electronics **Static resolution: bandwidth 10 Hz, dynamic: bandwidth 10 kHz, with E-852.10 signal conditioner electronics ***Linearity over nominal measurement range.