Progress in Hot-Wire Deposited Nanocrystalline Silicon Solar Cells
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DEPARTAMENT DE FÍSICA APLICADA I ÒPTICA Av. Diagonal, 647, 08028 Barcelona PROGRESS IN HOT-WIRE DEPOSITED NANOCRYSTALLINE SILICON SOLAR CELLS Marta Fonrodona Turon Memòria presentada per optar al grau de Doctor Barcelona, juny de 2003 DEPARTAMENT DE FÍSICA APLICADA I ÒPTICA Av. Diagonal, 647, 08028 Barcelona PROGRESS IN HOT-WIRE DEPOSITED NANOCRYSTALLINE SILICON SOLAR CELLS Marta Fonrodona Turon Programa de doctorat: Tècniques Instrumentals de la Física i la Ciència de Materials Bienni: 1998-2000 Tutor: Enric Bertran Serra Director: Joan Bertomeu i Balagueró Memòria presentada per optar al grau de Doctor Barcelona, juny de 2003 A la Pepeta, la Núria i tots els que hi ha entremig. This work has been carried out in the Laboratory of Thin Film Materials of the Department of Applied Physics and Optics of the University of Barcelona, supervised by Dr. Joan Bertomeu Balagueró, in the framework of the projects TIC98-0381-C0201 and MAT2001-3541-C03-01 of the CICYT of the Spanish Government , and also with the aid of the project JOR3-CT97-0126 in the JOULE programme of the European Commission. The stage at Utrecht University was possible thanks to grant 2001BEAI200159 of Generalitat de Catalunya. Progress in Hot-Wire deposited nanocrystalline silicon solar cells 1 &RQWHQWV Agraïments ............................................................................................................................3 1- Introduction .......................................................................................................................5 1.1- Thin film silicon technology .................................................................................5 1.2- Nanocrystalline silicon .........................................................................................6 1.3- Hot-Wire Chemical Vapour Deposition ...............................................................7 1.4- Hot-Wire CVD research at Universitat de Barcelona ..........................................8 1.5- Aim and outlook of this thesis ............................................................................10 2- The HWCVD set-up. Characterisation techniques .........................................................13 2.1- The HWCVD set-up ...........................................................................................13 2.2- Strategies against contaminants. Set-up modifications ......................................15 2.2.1- External heater .......................................................................................15 2.2.2- The funnel ..............................................................................................17 2.3- The wire ..............................................................................................................18 2.4- Characterisation techniques ................................................................................21 2.4.1- Morphology and structural properties ....................................................21 2.4.2- Compositional analysis ..........................................................................22 2.4.3- Optical and electrical properties .............................................................23 2.4.4- Device characterisation ..........................................................................24 3- The search of a more chemically stable material ............................................................27 3.1-Initial approaches .................................................................................................27 3.1.1- Hydrogen dilution ..................................................................................30 3.1.2- Substrate temperature .............................................................................31 3.2- The role of the filament . .....................................................................................32 3.2.1- Structural properties ...............................................................................32 3.2.2- Oxygen incorporation after deposition ..................................................35 3.2.3- Application to solar cell .........................................................................40 3.3- The protective funnel ..........................................................................................42 3.3.1- O incorporation during growth ...............................................................42 3.3.2- Effect of the process pressure ................................................................44 3.3.3- Effect of the hydrogen dilution ..............................................................46 3.3.4- Essay on a solar cell ...............................................................................48 4- Substrate influence and doped layers ..............................................................................51 4.1- Introduction ........................................................................................................51 4.2- Intrinsic material .................................................................................................52 4.2.1- Glass as substrate. Effect of DH .............................................................52 4.2.2- Substrate dependence .............................................................................54 4.3- Doped material ...................................................................................................58 4.3.1- Substrate dependence .............................................................................58 4.3.2- Scaling to device size .............................................................................61 5- Solar cells ........................................................................................................................65 2 Contents 5.1- Leakage currents ................................................................................................66 5.2- Light confinement ..............................................................................................68 5.2.1- Front contact ..........................................................................................69 5.2.2- Back reflector .........................................................................................73 5.3- HW nc-Si:H solar cells .......................................................................................74 5.3.1- Structural properties ...............................................................................75 5.3.2- Stability of the devices ...........................................................................77 5.3.3- Best results and perspectives .................................................................84 Conclusions .........................................................................................................................87 Annexe I: Shutterless deposition of phosphorous-doped microcrystalline silicon by HWCVD ..............................................................................................................................91 I.1- Motivation and experimental set-up ...................................................................91 I.2- Results and discussion ........................................................................................92 I.2.1- Thickness homogeneity ..........................................................................93 I.2.2- Effect of the starting sequence ................................................................93 I.2.3- Effect of the thickness ............................................................................95 I.2.4- The role of the filament temperature ......................................................96 I.3- Conclusions .........................................................................................................97 Annexe II: Low Temperature Cat-CVD .............................................................................99 II.1- Motivation .........................................................................................................99 II.2- Design of the catalytic tube ...............................................................................99 II.3- H2 decomposition ............................................................................................101 II.4- Si deposition ....................................................................................................103 Annexe III: Variable Illumination Measurement technique (VIM) ..................................107 III.1- Qualitative approach ......................................................................................107 III.2- Defect evaluation using VIM .........................................................................110 III.3- Solar cell analysis from the Vc curve .............................................................111 References .........................................................................................................................115 Acronym list ......................................................................................................................121 Figure list ..........................................................................................................................123 Table list ............................................................................................................................129 Resum en català ................................................................................................................131