Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech

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Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Development and Application of Brand-new Atmospheric Plasma Sources Okino Lab. FIRST, Tokyo Institute of Technology © 2008- Akitoshi Okino, All rights reserved. Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. What is plasma ? Plasma is the fourth state of matter A simple plasma consists of positive ions, electrons, excited atoms and radicals,,, in a sea of neutral atoms (molecules). The particles in the plasma are moving in random directions. Plasma has some different electron電子 characteristics from normal gas. イオンion 0℃ 100℃ a few 1000℃ ice water water vapor ionized gas Solid Liquid Gas Plasma Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Plasmas around us Natural: Lightning bolt Solar wind Aurora Artificial: Fluorescent tube Neon sign Plasma display Xenon discharge light Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Characteristics of plasma Reactivity Can generate dense high reactive species (radicals, ions, electrons,,). → Semiconductor processing (CVD, etching) → New material processing (CNT, DLC) Emissivity Can emit light (~FIR~IR~visible~UV~EUV~) The wavelength is depend on the gas species and the temperature → PDP, Light source, Laser, Elemental analysis Electric conductivity Has electric conductivity and the degree is controllable (depend on the temperature) → Plasma switch High temperature Has very high temperature (over 10,000 K) (Combustion : below 3,000 K) In the nuclear fusion plasma it is higher than 10,000,000 K. → Decomposition of industrial wastes → Cutting of high melting point material, Nuclear fusion Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Generation method of plasmas In industrial use, plasma generation method is chosen according to demand of plasma pressure, temperature, purity, kind of gas,, ◆ Discharge frequency DC ~ HF (kHz) ~ RF (MHz) ~ Microwave (GHz) or HV pulse ◆ Electrode Electrode discharge or Electrode-less discharge ◆ Pressure Vacuum ~ Low ~ Atmospheric ~ High pressure It's very special ! Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Why atmospheric plasma is so special ? Merits (1) Eliminate vacuum chamber, pumping system → Low cost (2) Eliminate pumping → Continuous processing (3) High density plasma → High speed processing (4) Applicable for large targets → Car, Airplane (5) Applicable for hear sensitive targets → Human skin, Foods Low pressure Atmospheric Difficulty Plasma generation is (was) not so easy (compare with usual low pressure plasma) Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Research of atmospheric plasmas Presentation percentage of atmospheric plasma in IEEE ICOPS (International Conference on Plasma Science). until 2005 less than 1% 2006 Traverse City, USA 1.0% 2007 Albuquerque, USA 3.3% 2008 Karlsruhe, Germany 6.0% 2009 San Diego, USA 13.1% 2010 Norfolk, USA 25.0% 2011 Chicago, USA 26.1% 2012 Edinburgh, UK 26.4% 2018 Denver, USA more than 30% This increasing is because of Low Temperature Plasma ! Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Atmospheric low temperature plasmas Atmospheric plasma research has been widely spread because Low Temperature Plasma could be generated. Barrier discharge Corona discharge Plasma bullet Applications: Merit: ✓ Low temperature Improvement of (room temp ~ 200℃) ✓ Adhesion ✓ Paintability Problems: ✓ Limitation of target size/material Sterilization ✓ Limitation of plasma gas ✓ Temperature is not controllable Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Our atmospheric DAMAGE-FREE plasma sources PAT.P ✓ Low temperature ✓ No electric shock Damage-free plasma Applicable for living body/ It's touchable ! metal/plastic/paper/textile. 1m Long Line Type Plasma Jet Type Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Two problems of common low temperature plasma sources 1. Limitation of plasma gas 2. Temperature is not controllable Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Atmospheric damage-free MULTI-GAS plasma jet Flow rate : 5 L/min Voltage : 6 kV~ Power : 6~17 W ✓ Applicable for living body/metal/plastic/paper/textile ✓ Applicable for surface treatments such as cleaning, hydrophilization, oxidation, azotizing, coating Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Irradiation of multi-gas plasma jet ✓You can touch the plasma Paper Plastic Glass Fluits Ice Icecream Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Hydrophilization of polyimide film 3L/min, 15W, 15kHz Before After air Ar He O2 N2 ✓ Material surface is easily hydrophilized by plasma irradiation. ✓ Treatment speed is depend on the plasma gas species. Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Principle of hydrophilization ≒ Surface cleaning Plasma Intermolecular force Remove Remove Contaminations clean! before treatment after Hydrophobic Hydrophilic Contaminations on the surface are removed by reactive species. Then, the metal surface is cleaned up and hydrophilized. Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Can hydrophilize almost all materials Rubber Acrylic resin Glass Semiconductor Copper Polyimide film ✓ PTFE(Teflon) Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Can hydrophilize almost all materials Gauze (Cotton100%) Knit (Cotton100%) Rayon Weather (Poly65%, Cotton35%) Shading curtain Work clothes (Poly65%, Cotton35%) Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Can hydrophilize almost all materials Cardboard Woods Natural rubber Bamboo Drawing paper Floor tile Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Atmospheric damage-free MULTI-GAS plasma jet ダメージフリーマルチガスプラズマジェット PCT-DFMJ01 ハイエンドタイプのダメージフリーマルチガスプラズジェット。専 用設計のプラズマヘッドにより生成されたプラズマジェットを,直 径1mmのスポットより噴射。 高密度かつダメージフリーなプラズ マを必要とするあらゆる処理に。 ガス流量計(4本)標準装備。 Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. High speed removal of copper oxide Carry speed 50 mm (mm/sec) 3 mm 10 Treated 50 100 No-treated 200 (Oxide) Copper oxide ~ 10 nm 1 ~ 2 nm(Natural oxide) Copper ✓ Max carry speed: 700 mm/sec ✓ Removal speed: 93 µm/sec Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Atmospheric damage-free LINEAR plasma source Applications: Improvement of ✓ Adhesion ✓ Paintability Sterilization Light weight 830g and handy Outlet slit:1mm x 335mm Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Adhesion improvement of HDPE/epoxy resin HIDEN to HIDEN adhesion test ✓ Target samples are treated under atmospheric pressure ✓ Apply epoxy resin adhesive and cure perform compress test not glue at all good gluing ! Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Application to Medical Field Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Two problems of common plasma sources 1. Limitation of plasma gas 2. Temperature is not controllable 2010/03/12 2010/03/15 EZ2C s 10s 60s 600s 2 2010/03/12 2010/03/15 EZ2C s 10s 60s 600s Sterilization of 2 2010/03/12 2010/03/15 ✓ Irradiation time [sec] 600 10 Air EZ2C 60 Sterilization speed deeply dependson theplasma gas. 2010/03/17 2010/03/19 Sterilized EZ2C sAr 10s 60s 600s E.coli Not-sterilized 2010/03/12 2010/03/15 2 EZ2C Air Air CO2N2O ,O2 s 10s 60s 600s Atmospheric PlasmaandSpectroscopy,OkinoLab.,TokyoTech. Air N gas Plasma 2 2 2 Air CO2N2O ,O2 O 2 Air CO 2 2 2 Air Ar+O CO2N2O ,O2 Air 2 1 2 2 CO2N2O ,O2 1 Air 2 2 2 1 2 1 Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Sterilization of S.mutans Confidential Ar N2 O2 Ar+O2 CO2 Air Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Bactericidal effect against various bacteria Confidential グラム陰性好気性桿菌 グラム陽性通性嫌気性球菌 グラム陰性通性嫌気性桿菌 Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Bactericidal effect against various bacteria Confidential グラム陽性通性嫌気性連鎖球菌 グラム陰性通性嫌気性桿菌 グラム陽性通性嫌気性球菌 Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Bactericidal effect against various fungi Confidential コウジカビ カンジダ Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Reactive species in plasma irradiated water HO・ 2.80 V O3 2.07 V M] Effective for µ M] highly resistant µ bacteria Ozone [ OH radical [ M] µ M] 1 O2 Effective for H2O2 1.77 V µ viable bacteria Singlet Oxygen [ Hydrogen peroxide [ Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Temperature-controllable plasma PAT Japan, USA, China water freeze in 10 seconds Start cooling Ice ! zero ℃ Gas temperature (℃) −90℃ -90℃ plasma jet Plasma can safely irradiated for heat- sensitive materials and living body. Time (sec) It’s must use technique for medical/dental/biological field. Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Comparison of low temperature plasmas It's wide range and controllable ! Temperature controllable plasma "Real" Low temp. plasma ~ Intermediate temp. plasma Corona discharge "Common" Low temp. plasmas Barrier discharge Room -100 0 temp 100 200 Gas temperature (℃) Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. Control of the plasma gas temperature Helium, 1L/min, 15W, 15kHz 10秒のプラズマ照射で水が氷に Controllable from below 0 ℃ to high temperature Atmospheric Plasma and Spectroscopy, Okino Lab., Tokyo Tech. 3D-Printed Multi-gas Temperature-controllable Plasma Jet 20 mm Plasma Outlet CO2 O2 N2 Body: 3D-printed Aluminum Air
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