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Silane, Chlorosilane, and Related Compounds

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Silane, Chlorosilane, and Related Compounds Silane, Chlorosilane, and Related Compounds SUBSTANCE IDENTIFICATION Silane (SiH4) is found as a gas with an unpleasant odor. Silane i5 used in semiconduc- tor manufacture for the deposition of thin dielectric films. It is spontaneously com- bustible (pyrophoric) m air or may accumulate and detonate. The toxlcity of silane 1S limited to its irritant properties. Chlorosilanes (e.g., trichlorosilane [SiCl3H]) and orga- nochlorosilanes (e.g., methy1chlorosilane [CH3SiCI3]) are found as clear-to-white, fuming liquids with a sharp odor. They are used in chemical synthesis; in the produc- tion of sihcon ftuids, silicon reSlllS,and amorphous silicon; and in semiconductor manufacture. Triehlorosilane is used to clean silieon water surfaces. Chlorosilanes or organochlorosilanes on contact with water forro hydrochloric add. There are hmited human toxicity data on these compounds. ROUTE OF EXPOSURE Skin and eye contact Inhalation Ingestion Skin absorptlon TARGET ORGANS Primary Skin Eyes Respiratory system Gastrointestmal system Blood Secondary Central nervous system CardlOvascular system Renal LlFE THREAT Respiratory tract irritation; pulmonary edema. SIGNS AND SYMPTOMS BY SYSTEM Cardiovascular: Tachycardia, hypotension, arrhythmias, and cardiovascular collapse. Respiratory: Respiratory tract irritation, rhinitis, sinusius, pharyngitis, eoughing, dyspnea, and hypoxia. Pulmonary edema. CNS: Headaches, dizziness, incoordination, decreased level of consciousness, seizures, and coma. Gastrointestinal: Salivation, nausea, vomiting, diarrhea, and abdominal pain. GI traet irritanon and mucosal burns. Eye: Irritation, lacrimation, corneal damage, and chemical bums. Skin: Irritant dermatitis and severe chemical bums. Renal: Kidney damage. Blood: Red blood cell destruction (hemolysis) may occur with exposure to tetrachlo- rosilane. 438 Silane, Chlorosilane, and Related Compounds 107 SYMPTOM ONSET FOR ACUTE EXPOSURE Immediate Some symptoms such as pulmonary edema may be delayed CO-EXPOSURE CONCERNS Other rcspiratory irritants THERMAl DECOMPOSITION PRODUCTS INCLUDE Carbon dioxide Carbon monoxide Hydrogen chloride Silicon dioxide Silicates Silane cxhibits almost complete combustion above 450° e MEDICAl CONDITIONS POSSIBlY AGGRAVATED BY EXPOSURE Respiratory system disorders DECONTAMINATION o Wear positive-pressure SCBA and protective equipment specified by references such as {he DOT Emergency Response Guidebook or rhe CANUTEC Inicial Emergency Response Guide. If special chernical protective clothing is required, consult the chemical manufacturer or specific protective clothing compattbilíty charts. o Delay entry until trained personnel and proper protective equipmcnt are availahle. o Remove patient fram contaminated area. QUlckly remove and isolate patient' s c1othing, jewelry and shoes. o Gently brush away dry particles and blot excess liquids with absorbent material. Rinse patient with warm water, 30°C/86°F, if possible. o Wash patient with Tineture of Green soap or a mild liquid soap and large quantities of water. Refer to deconraminatlOn protocol in Section Three. IMMEDIATE FIRST AIO o Ensure that adequate decontamination has been earried out. If vlctirn is not breathing. start artificial respiratian. preferably with a demand-valve resuscitator, bag-valve-mask devlce, or poeket mask as trained. Perfonn CPR If necessary. Irnmediately flush contammated eyes with gently ftowing water. o Do llot mduce vomiting. If vomiting oecurs, lean patient forward or place on lcft sirle (head-dawn position. if possible) to maintain an open airway and prevent aspiration. Keep victim quiet and maintain normal body temperature. o Obtain medical attention. BAStC TREATMENT . Estah!ish a patent airv.:ay.Suction if necessary. o Watch for signs 01'resplratory insufficiency and assist ventílations if necessary- o Administer oxygen by nonrcbreather rnask at 10 to 15 L/min. o Monitor for pulmonary edema and treat ir necessary (refer to pulmonary edema pro- tocol In SectlOn Three). o Anticipate seizures and treat if necessary (refer to seizure pratocol in Sectlon Three). o Monitor tor shock and treat ir neeessary (rcfer to shock protocol in Sectíon Three). o For eye contamination, flush eyes immediately with water. Irrigate each eye continu- ously with normal saline during transpon (refer to eye irrigarion prorocol in Section Three ). 439 107 Silane. Chlorosilane, and Related Compounds . Do not use emetics. For ingestion, rinse mouth and administer 5 mllkg up to 200 mI of water for dilution if the patient can swallow, has a strong gag refiex, and does not drool. Administer activated charcoal (refer to ingestion protocol in Section Three and activated charcoal protocol in Section Four). Cover skin bums wlth sterile dressings after decontammation (refer 10chemical bum protocol in Section Three). ADVANCED TREATMENT . Consider orotracheal or nasotracheal intubatlOn for airway control in the patient who is unconscious. Early intubation at the first sign of upper atrway obstruction may be necessary. Monitor cardiac rhythm and treat arrhythmias if necessary (refer to cardiac protocol in Section Three). Start an IV with DsW TKO. Use lactated Ringer's if signs of hypovolemia are present. Watch for signs of fluid overload. Consider drug therapy for pulmonary edema (refer to pulmonary edema protocol in Section Three). Treat seizures with diazepam (Valium) (refer tú diazepam protocol in Section Four). For hypotension with signs of hypovolemia, administer fluid cautiously. Conslder va- sopressors for hypotension wÜh a normal fluid volume. Watch for signs of fluid over- load (refer to shock protocol in Section Three). Use proparacaine hydrochloride to assist eye irrigation (refer to proparacaine hydro- chloride protocol in Section Four). INITIAL EMERGENCV DEPARTMENT CONSIDERATIONS . Useful initiallaboratory studies include complete blood count, semm electrolytes, blood urea nitrogen (BUN), creatinine, glucose, urinalysis, and baseline biochemical profile, including serum aminotransferases (ALT and AST), calcium, phosphorus, and magnesíum. Al1erial blood gases (ABGs), chest radiograph, and electrocardio- gram may be required. Positive end-expiratory pressure {PEEP)-assisted ventilatíon may be necessary in pa- tlents wah acute parenchymal ínjury who develop pulmonary edema or adult respira- tory distress syndrome. Endoscopy may be needed to assess extent of gastromtestinal damage. Obtain toxicological consultatíon if necessary. SPECIAL CONSIDERATIONS . Products may be mixed in a variety of hydrocarbon solvents (e.g., methanol or tolu- ene). The solvent may contnbute to the overall toxicity. Identify solvent vehicle and consult appropriate guideline. 440 Phosphine and 108 Related Compounds SUBSTANCE IDENTIFICATION A colorless gas with an odor of decaying fish. The reaction of hydrogen and various metal phosphides (e.g. alummum, zinc, or gallium phosphide) forms phosphine gas (PH3). Phosphides may also release phosphine gas on contact with water. Used in fu~ migation and as a doping agent in semiconductor manufacture, a polyrnerization inhibi- tor, and a chemical intermediate. Products may be toxic at air concentrations below the odor threshold of 1 to 2 ppm. ROUTES OF EXPOSURE Inhalation TARGET ORGANS Primary Cardiovascular system Respiratory system Secondary Central nervous system Gastrointestinal system Renal Heparic lIFE THREAT Severe pulmonary irritation leading to pulmonary edema. SIGNS AND SYMPTOMS BY SYSTEM Cardiovascular: Cardiac arrhythmias, hypotension, and cardiovascular collapse. Direet myocardlal muscle damage with elevated MB-CPK myocardial enzyrne release. Respiratory: Acute pulmonary edema. respiratory traet mitation, chest tightness, cough, dyspnea and tachypnea. CNS: Headache, dizzlness. tremors, fatigue, ataxia, paresthesia, seizures, and coma. Gastrointestinal: Nausea, vomiting, diarrhea, and abdommal pain. Intense thirst. Skin: Diaphoresis. Renal: Kidney damage. Hepatic: Liver damage, Jaundlce with associated elevations in semm aminorransferases. Metabali5m: Metabolíc acidosls. Other: Products may spontaneously ignite. SYMPTOM ONSET FOR ACUTE EXPOSURE Immediate Some reSplratory symptoms (pulmonary edema) may be delayed THERMAL DECOMPOSITION PRODUCTS INClUDE Hydrogen Phosphorus MEDICAl CONDITIONS POSS1BLY AGGRAVATED BY EXPOSURE Respiratory disorders CardlOvascular disorders 441 108 Phosphine and Related Compounds DECONTAMINATION . Wear positIve-pressure SCBA and protective equipment specified by references such as the DOT Emergency Response GUldebook or [he CANUTEC /niria[ Emergency Response Guide. If special chemical protective c10thing is required, consult the chemical manufacturer or specific protective clothing compatibility charts. Delay entry until trained personnel and proper protective equipment are available. Remove patient frorn contaminated area. QuickIy remove and isolate patienfs c10,thing jewelry, and shoes. /f any concurrent [iquid or salid contaminatíon exists: Gently brush away dry partic1es and blot exeess liquids with absorbent material. Rinse patient with warm water, 30° C/86° F, if possible. Wash patient with Tincture of Green soap or a mild liquid soap and large quanti- ties of water. Refer to decontamination protocol in Section Three. IMMEDIATE FIRST AID . Ensure [hat adequate decontamination has been carried out. If victlm is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask as trained. Perforro CPR if necessary. Irnmediately flush contaminated eyes with gently flowing
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