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Impact of Li Non-Stoichiometry on the Performance of Acoustic Devices on Litao3 and Linbo3 Single Crystals Minerva Gonzalez

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Impact of Li Non-Stoichiometry on the Performance of Acoustic Devices on Litao3 and Linbo3 Single Crystals Minerva Gonzalez Impact of Li non-stoichiometry on the performance of acoustic devices on LiTaO3 and LiNbO3 single crystals Minerva Gonzalez To cite this version: Minerva Gonzalez. Impact of Li non-stoichiometry on the performance of acoustic devices on LiTaO3 and LiNbO3 single crystals. Chemical Physics [physics.chem-ph]. Université de Franche-Comté, 2016. English. NNT : 2016BESA2007. tel-01493665 HAL Id: tel-01493665 https://tel.archives-ouvertes.fr/tel-01493665 Submitted on 21 Mar 2017 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. Effet de la non-stœchiométrie en Li sur la performance des dispositifs à ondes élastiques à base de monocristaux de LiTaO3 et LiNbO3 Impact of Li non-stoichiometry on the performance of acoustic devices based on LiTaO3 and LiNbO3 single crystals MINERVA GONZALEZ iii THÈSE présenté par MINERVA GONZALEZ pour obtenir le Grade de Docteur de l’Université de Franche-Comté Spécialité : Sciences pour l’ingénieur Effet de la non-stœchiométrie en Li sur la performance des dispositifs à ondes élastiques à base de monocristaux de LiTaO3 et LiNbO3 Thèse soutenue le 19 juillet 2016 devant le Jury composé de : Président du Professeur des Universités, Université de M. Matthieu CHATRAS jury Limoges, Limoges Directeur de recherche au CNRS, Université Côte M. Marc P. DE MICHELI Rapporteur d’Azur, Nice Ingénieur-Chercheur, LCRF, CEA-LETI, M. Alexandre REINHARDT Examinateur Grenoble Responsable Développement Produit RF, TDK M. Stéphane CHAMALY Examinateur Electronics France SAS, Sophia-Antipolis Président-Directeur-Général de la société M. Sylvain BALLANDRAS, Examinateur frec|n|sys SAS, Besançon Co-directeur Professeur des Universités, ENSMM, Institut M. Bernard DULMET de thèse FEMTO-ST, Besançon Chaire d’excellence – Maître des Conférences, Directeur de Mme. Ausrine BARTASYTE Université de Franche-Comté, Institut FEMTO- thèse ST, Besançon i Remerciements Tout d’abord, je voudrais remercier les membres du jury pour m’avoir fait l’honneur de juger mon travail. Merci à M. Matthieu Chatras, professeur des universités à l’Université de Limoges et M. Marc P. de Micheli, Directeur de recherche au CNRS à l’Université Côte d’Azur, Nice pour avoir accepté d’être les rapporteurs de mon manuscrit et pour leurs remarques pertinentes. Merci à M. Alexandre Reinhardt, Ingénieur de recherche au CEA- LETI, Grenoble et à M. Stéphane Chamaly, responsable développement produit RF à TDK Electronics France d’avoir accepté d’être membres du jury et pour leurs remarques, leurs questions et pour l’intérêt porté à mon travail. J’exprime toute ma gratitude à ma directrice de thèse, Ausrine Bartasyte, qui m’a fait confiance pour mener à bien ce projet en collaboration avec la société TDK. Je lui suis très reconnaissante pour sa grande implication dans ce projet et pour toujours avoir dirigé mon travail avec enthousiasme et exigence, ce qui m’a permis de m’améliorer dans plusieurs domaines. Merci pour tout le temps consacré au suivi et à la révision de la thèse, pour sa disponibilité, pour ses conseils et son amitié. Je tiens à remercier également à mon co-directeur de thèse, Bernard Dulmet, qui a eu la gentillesse de me prendre au cours de la deuxième année de thèse et qui m’a aidé à comprendre le « monde » des ondes élastiques, modèles théoriques, dispositifs, etc.., un domaine que je ne maitrisais pas auparavant. Merci pour son temps dédié aux explications, à la révision du manuscrit, pour ses conseils et son amitié. Un grand merci à Sylvain Ballandras, qui a suivi mes travaux et qui a participé activement aux réunions du projet. Merci aussi pour son aide avec les simulations. Je voudrais exprimer ma gratitude envers Jean Michel Brice pour m’avoir confié ce projet, ainsi qu’aux autres membres de la société TDK pour leur suivi, leur conseils et pour leur engament dans l’avancée de ces travaux. I want to thank to Ingo Bleyl and Claudia Kajiyama for the follow-up, their advice and their feedback allowed the progress of this project. Thanks for all the time spent in the review of presentations, proceedings and thesis. Une grande partie du travail expérimental n’aurait pas été possible sans la contribution de plusieurs personnes. En commençant par mes collègues du département Temps-Fréquence, je remercie Florent Bassignot pour m’avoir appris la technique d’inversion de domaines, j’ai beaucoup apprécié travailler avec lui, toujours dans la bonne humeur. Merci également à Fabien Henrot, qui m’a beaucoup aidé pour la fabrication des « ridges » et merci pour son amitié. Je voudrais remercier également à Thomas Baron pour m’avoir aidé en plusieurs occasions lorsque la polisseuse ne marchait pas ainsi qu’à la réalisation de certaines caractérisations et merci aussi pour ses remarques utiles avant la soutenance. Un grand merci à Jean-Michel Friedt et David Rabus pour m’avoir aidé à faire des caractérisations dans l’étuve. Merci également à Gilles Martin et à Valérie Pétrini pour m’avoir aidé à faire les connections électriques de mes dispositifs. Je voudrais remercier également William Daniau pour son aide avec les simulations et pour l’installation d’opensuse sur mes différents ii ordinateurs. Un grand merci à Xavier Vacheret et à Jean Jacques Boy pour leur aide à la fabrication et caractérisation des résonateurs. Merci à mes collègues du département MN2S qui ont participé de près ou de loin à cette thèse. Merci à Etienne Herth pour les caractérisations avec l’interféromètre, merci à Nicolas Martin et Jean Yves Rauch pour l’installation du four. Thanks to Stefania for all her help (AFM measurements, microscope, etc.). Thank you very much for your support and for your friendship. I wish you all the best in your last year. Je remercie le personnel de la Centrale MIMENTO qui ont contribué à la réalisation de dispositifs : à Blandine Guichardaz pour les nombreuses découpes à la scie qu’elle a fait; à Ludovic Gauthier-Manuel pour le polissage et découpes des wafers; à Jean Claude Jeannot pour avoir eu la gentillesse de nous offrir le tout premier four, qui nous a permis de commencer nos traitements à haute température; à Laurent Robert pour toutes les gravures avec HF réalisées, à Franck Chollet pour m’avoir formé à l’utilisation de l’interféromètre Zygo avant même qu’il soit disponible à tout le monde. Merci également au personnel du service commun et administratif de FEMTO-ST : à Betty Baudinot, qui a fait des pièces mécaniques pour moi, à Adrien Gaudet qui m’a dépanné en informatique plus d’une fois ; à Joëlle Berthelot, à Sandrine Pyon, à Cindy Pointelin, à Jocelyne Renaut, à Sarah Djaouti et à Fabienne Cornu pour les différents aspects de gestion. Merci à mes collègues du TF et MN2S pour leur amitié et les moments de convivialités passés au labo ou dehors: Meddy, Loïc, Marc, David, Alexandre, Fabien, Florent, Nesrine, Lyes, Christophe, Stefania, Gautier, Xianlong et Anurupa. Un grand merci aux personnes extérieures : à Pascal Boulet, de l’Institut pour avoir fait des mesures de DRX et pour m’avoir appris la méthode de raffinement de structures, à Brice Gautier pour avoir effectué des caractérisation avec le PFM sur mes substrats et je veux remercier spécialement à Samuel Margueron pour avoir eu la gentillesse d’effectuer des milliers de mesures par Spectroscopie Raman sur les cristaux et les poudres. Je veux finir par remercier ma famille en France qui sont venus m’accompagner le jour de ma soutenance et à ma famille au Mexique, que malgré la distance m’a toujours soutenue moralement. Llegar hasta aquí no hubiera sido posible sin el apoyo de mis padres y mis dos hermanos. Agradezco a mis padres y a mi hermano Eduardo por todo el esfuerzo que hicieron para que yo pudiera realizar estudios superiores. Gracias a sus enseñanzas yo comprendí que para conseguir mis objetivos es necesario mucha entrega y dedicación. Finalement, je n’aurais pas pu arriver jusqu’ici sans l’aide précieuse de mon mari, Thomas, qui a su me comprendre et qui a tout fait pour que je puisse me dédier entièrement à la rédaction de ma thèse. Merci pour ton soutien, pour ton aide et pour m’avoir encouragé au cours de toutes ces années. iii Je dédie ce manuscrit : À Thomas À mes parents À mes frères iv v Table of contents Introduction ..............................................................................................................................1 Chapter 1: Acoustic wave devices based on LiTaO3 & LiNbO3 single crystals ................... 5 1.1 Introduction ............................................................................................................................................ 5 1.2 Piezoelectricity and ferroelectricity: generalities ................................................................................. 5 1.2.1 Piezoelectricity and piezoelectric materials ........................................................................... 5 1.2.2 Ferroelectricity and ferroelectric materials ........................................................................... 6 1.3. Properties of LiTaO3 and LiNbO3 .......................................................................................................
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