DOCSLIB.ORG

Roots Vacuum Pumps Vacuum Roots Vacuumroots Pumps Va

Total Page：16

File Type：pdf, Size：1020Kb

Download full-text PDF Read full-text
Roots Vacuum Pumps Vacuum Roots Vacuumroots Pumps Va Roots Vacuum Pumps Vacuum Roots VacuumRoots Pumps Va RUVAC Roots Vacuum Pumps 230.00.02 Excerpt from the Leybold Full Line Catalog (Edition 2021) Catalog Part Roots Vacuum Pumps 2 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold Contents Roots Vacuum Pumps General Applications and Accessories for RUVAC Pumps . 4 Oil for RUVAC pumps, for different fields of application . 5 Oil for RUVAC pumps, for different pump types . 5 General Information on Roots Vacuum Pumps . 6 Types . 9 Roots Products Vacuum Pumps Vacuum RUVAC WA/WAU Roots Vacuum Pumps with Air-Cooled Flange-Mounted Motors . 12 RUVAC WS/WSU Roots Vacuum Pumps with Air-Cooled Canned Motors . 18 RUVAC WH/WHU Roots Vacuum Pumps with Water-Cooled Hermetically Sealed Motors . 24 Accessories Pressure Switches . 32 Temperature Sensor Pt100 . 32 Miscellaneous Services . 34 2 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold leybold Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps 3 General Applications and Accessories for RUVAC Pumps Roots Vacuum WA/WAUWA/WAU(H) 251WS/WSU 501-2001WS/WSU(H) 251 WH 501-2001 700 WH/WHU 2500/4400/7000 Pumps Applications Semiconductor production n Vacuum coating n n n Large scale research n n Chemistry/Pharmaceutica n Metallurgy/Furnaces n n n n Lamps and tubes manufacturing n Packaging n Central vacuum supply systems n n n n Freeze drying n n n Leak testing systems n n n Electrical engineering n n n n High purity gases/closed refrigerant cycles n n n Mechanical engineering n n n n Automotive industry n n n n Accessories Frequency converters n n n n Pressure switches n n n n Temperature sensor Pt100 n 1) 1) For ATEX pumps only 4 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold Oil for RUVAC Pumps for different fields of application LVO 100LVO 210LVO 400 LEYBONOL Oils Applications Roots Vacuum Pumps Vacuum Semiconductor production s l n Vacuum coating n l l Research and development n l l Chemistry/Pharmaceutical n l l Metallurgy/Furnaces n l s Lamps and tubes manufacturing n l Packaging n l Central vacuum supply systems n l Freeze drying n l s Leak testing systems n Electrical engineering n High purity gases/closed refrigerant cycles n n = Standard Machanical engineering n l = Possible Automotive industry n l l s = Please contact Leybold The table only lists general applications . Your specific requirements might be subject to deeper analysis . For further questions, please contact our technical Sales support . Oil for RUVAC pumps for different pump types LEYBONOL Oils LVO 100LVO 210LVO 400 Pumps WA/WAU 251 n l l WA/WAU(H) 501-2001 n l l WS/WSU 251 n l l WS/WSU(H) 501-2001 n l l WS 501 W n l l WS/WSU 1001 and 2001 W n l l WH 700 n l WH/WHU 2500 n l n = Standard WH/WHU 4400/7000 l n l l = Possible For information on oil specifications please refer to Catalog Part “Oils / Greases / Lubricants LEYBONOL®”. 4 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold leybold Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps 5 General Information on Roots Vacuum Pumps Applications Torr For many years now Roots vacuum 10-3 10-2 10-1 100 101 102 750 1 Pumping speed of the backing pump pumps have been well established in 1000 500 2 Pumping speed of m3x h-1 the area of vacuum technology . 2,3 the Roots pump 600 cfm In combination with backing pumps, system without pres- 400 3 sure equalization line which compress against the 2 3 Pumping speed of 4 atmo sphere, these pumps offer the the Roots pump 200 following advantages: 1 100 system with pressure Pumping speed equalization line 4 Pumping speed 100 2468 -3 -2 -1 0 1 2 3 gained by the pres- Shifting the Operating 10 10 10 10 10 10 mbar10 sure equalization line Pressure Pressure into the High Vacuum Range Comparison of pumping speed characteristics with and without pressure equalization line As a rule of the thumb one may say that Roots va cuum pumps are capable of improving the attainable ultimate pressure of a pump system by a factor of 10 . With two Roots vacuum pump stages and a corresponding backing pump it is possible to attain pressures in the range down to 10-5 mbar (0 .75 x 10-5 Torr) . Under certain circumstances this will make the use of additional high vacuum pumps (turbo- molecular pumps or diffusion pumps) unnecessary . Multiplied Pumping Speed Pump system with WH 7000 Roots vacuum pump and SOGEVAC SV 630 B rotary vane vacuum pump Due to the non-contact rotation of the The use of Roots vacuum pumps in the seals in contact with the impellers, Roots vacuum pumps are area of vacuum technology has atmo sphere which might be subject able to run at higher speeds . Thus a resulted in further specializations and to wear . This prevents leaks and high pumping speed is obtained with a improvements: fail ures due to oil leaks . A service life relatively small size pump . Pumping of over 20,000 hours without main- - Through an integrated bypass speeds in excess of 1500 m3/h tenance is quite common . (pressure equalization line) it is also (589 cfm) can only be attained with possible to utilize the pumping - Tolerances and the quality of the Roots vacuum pumps . speed of the Roots vacuum pump balancing combined with forced When selecting the right kind of at high pressures and large lubricated bearings and toothed backing pump (sizing) it will be quantities of gas at an early stage . gears permit high speeds and the possible to pump large quan ti ties of This reduces the pumpdown time use of frequency converters . Thus it gas in connection with smaller backing especially for cyclic operation (see is possible to attain a high pumping pumps . Energy consumption of such a figure “Com -par ison of pumping speed while the process is in pro- pump sys tem is much less compared speed characteristics with and with- gress and to reduce the speed to a single backing pump offering the out pressure equalization line”) . when the process has been stopped or while changing the same pumping speed . - High-purity gases or hazardous batch . This results in a lower con­­- gases impose strict requirements on sumption of energy and a longer the leak-tightness of the system . service life with uncompromised Canned motors from the WS line or reliability . canned motors from the WH line are hermetically sealed . There are no 6 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold - Conversion from vertical to Semiconductor Technology Solar and Display hori zontal flow is easily implemented (RUVAC WH and WS) In the solar and display industry, Roots and can be performed at the place In the area of semiconductor techno- vacuum pumps can be found in almost where the pump has been installed . logy, Roots vacuum pumps are found all production steps . In connection with Thus the pump can be adapted in etching processes among others, the Czochralski process or at DSS more closely to the operating condi- and in use with dry compressing fur naces for the manufacture of silicon tions of your system . backing pumps . crystals, Roots vacuum pumps are Roots Lately, a further characteristic is gaining deployed to rapidly attain the Pumps Vacuum The pumping speed of the combina tion prominence: Roots vacuum pumps are demand ed conditioning pressure . In of backing pumps amounts to capable of compressing the media in connection with the various coating 200 to 500 m3/h (118 to 295 cfm) the pump chamber without the pres- processes they ensure the necessary and it ensures a cut-in pressure of ence of any further media . This mostly pumping speed at process pressure 10-1 mbar (0 .75 x 10-1 Torr) for the avoids interaction between different and very fast cycles at the load lock turbomolecular pump . In the process, media in the pump itself and also in chambers . In connection with lamina- corrosive gases need to be pumped the connected vacuum chamber . tion processes for the modules they together with a high particle count . Therefore assist in pumping down the laminators - the medium which is pumped is not Owing to the usage of media which quickly and ensure a high pumping contaminated with lubricants or present a health hazard, hermetically speed at lamination pressure . sealed pump versions are used . Due to sea lants; complex accessories Owing to the high production pressure, the LVO 400 lubricant filling in the gear, (ex haust filters, separators, etc .) are very much is demanded as to the a high degree of media resistance, long not needed; reli ability of the pumps during all service intervals a high reliability and - the lubricant in the side chambers is process steps and this despite of thus very low costs of ownership are hardly affected, so that service life is reduced maintenance and service attained . not reduced; complexity . - backstreaming of oil from the For use in clean rooms, Roots vacuum backing pump into the connected pumps with a water cooled motor with- vacuum chamber is prevented . out a motor fan are used . Process Industry This type of motor reduces the quantity These characteristics make the Roots Typical process industry applications of heat dissipated to the surround ings vacuum pump attractive for almost all are highly demanding regarding the to a minimum . rough and medium vacuum applica- ruggedness of Roots pumps . These tions . need not only to pump clean media but must also be suited for pumping dusty Central Vacuum Supply or vapor containing media within an Systems industrial environment .
Load more

Recommended publications
  • Vacuum – Nothing but Pressure
    By Mike Tuohey, Sales & Marketing Communications Manager, Piab USA Inc. Vacuum – nothing but pressure According to the dictionary, vacuum is a space completely empty of substance. Yet, in engineering, vacuum is employed for a number of tasks. So, how can nothing be utilized to do something? Well, without pressure it wouldn’t work. Vacuum is an ideal and elusive state, and from a practical point of view it is perhaps not necessary to use this theoretical term, once a hot topic among philosophers in ancient Greece, especially since most modern thinkers agree that a complete or perfect vacuum does not exist. Even if all matter could be removed from a volume, it would still not be empty due to dark energy, rays, neutrinos and other phenomena in quantum physics. However, in particle physics, the vacuum state is considered the basic state of matter. In applied physics and engineering, on the other hand, it is probably more helpful to view vacuum as a negative pressure, as this is the force that can be harnessed to do work. The pressure controlled by a vacuum pump can be a powerful force. In a vacuum system, it is the differential between the atmospheric pressure and the vacuum (negative) pressure that creates the ability to lift, hold, move, and perform many types of work. Atmospheric pressure – the pressure we’re all under Atmospheric pressure is the pressure of the weight of the air above us. A cross section of a column of air, measured from sea level to the top of the atmosphere, would exert a pressure of approximately 14.7 pounds per square inch (psi).
    [Show full text]
  • Introduction to the Principles of Vacuum Physics
    1 INTRODUCTION TO THE PRINCIPLES OF VACUUM PHYSICS Niels Marquardt Institute for Accelerator Physics and Synchrotron Radiation, University of Dortmund, 44221 Dortmund, Germany Abstract Vacuum physics is the necessary condition for scientific research and modern high technology. In this introduction to the physics and technology of vacuum the basic concepts of a gas composed of atoms and molecules are presented. These gas particles are contained in a partially empty volume forming the vacuum. The fundamentals of vacuum, molecular density, pressure, velocity distribution, mean free path, particle velocity, conductivity, temperature and gas flow are discussed. 1. INTRODUCTION — DEFINITION, HISTORY AND APPLICATIONS OF VACUUM The word "vacuum" comes from the Latin "vacua", which means "empty". However, there does not exist a totally empty space in nature, there is no "ideal vacuum". Vacuum is only a partially empty space, where some of the air and other gases have been removed from a gas containing volume ("gas" comes from the Greek word "chaos" = infinite, empty space). In other words, vacuum means any volume containing less gas particles, atoms and molecules (a lower particle density and gas pressure), than there are in the surrounding outside atmosphere. Accordingly, vacuum is the gaseous environment at pressures below atmosphere. Since the times of the famous Greek philosophers, Demokritos (460-370 B.C.) and his teacher Leukippos (5th century B.C.), one is discussing the concept of vacuum and is speculating whether there might exist an absolutely empty space, in contrast to the matter of countless numbers of indivisible atoms forming the universe. It was Aristotle (384-322 B.C.), who claimed that nature is afraid of total emptiness and that there is an insurmountable "horror vacui".
    [Show full text]
  • Vacuum Technology for Superconducting Devices
    Published by CERN in the Proceedings of the CAS-CERN Accelerator School: Superconductivity for Accelerators, Erice, Italy, 24 April – 4 May 2013, edited by R. Bailey, CERN–2014–005 (CERN, Geneva, 2014) Vacuum Technology for Superconducting Devices P. Chiggiato1 CERN, Geneva, Switzerland Abstract The basic notions of vacuum technology for superconducting applications are presented, with an emphasis on mass and heat transport in free molecular regimes. The working principles and practical details of turbomolecular pumps and cryopumps are introduced. The specific case of the Large Hadron Collider’s cryogenic vacuum system is briefly reviewed. Keywords: vacuum technology, outgassing, cryopumping, LHC vacuum. 1 Introduction Vacuum is necessary during the production of superconducting thin films for RF applications and for the thermal insulation of cryostats. On the other hand, vacuum systems take an advantage from the low temperatures necessary for superconducting devices. This chapter focuses on the principles and the main definitions of vacuum technologies; some insights about gas and heat transfer in a free molecular regime are given. Only turbomolecular pumping and cryopumping are described, since they are the most relevant for superconducting applications. Pressure measurement is not included because, in general, it is not considered a critical issue in such a domain. A comprehensive introduction to vacuum technology may be found in the books listed in the references. 2 Basic notions of vacuum technology The thermodynamic properties of a rarefied gas are described by the ideal gas equation of state: = (1) PV Nmoles RT where P, T and V are the gas pressure, temperature, and volume, respectively, and R is the ideal gas −1 −1 constant (8.314 J K mol in SI units); Nmoles is the number of gas moles.
    [Show full text]
  • History of Vacuum Coating Technologies the History of Vacuum Coating Technologies
    The History of Vacuum Coating Technologies The History of Vacuum Coating Technologies Donald M. Mattox © 2002 Donald M. Mattox 1 The History of Vacuum Coating Technologies About the Author Donald M. Mattox, co-owner of Management Plus, Inc., is the Technical Director of the Society of Vacuum Coaters and the Executive Editor of the magazine Vacuum Technology & Coating. © 2002, Donald M. Mattox. All rights reserved. No parts of this book may be reproduced, stored in a retrieval system, transmitted in any form or by any means, photocopied, or microfilmed without permission from Donald M. Mattox. The author encourages readers to provide comments, corrections, and/or additions, and would like to be made aware of any historical references not given in this work. Copies of such references would be appreciated. Donald M. Mattox 71 Pinon Hill Place NE Albuquerque, NM 87122-1914 USA [email protected] Fax (505) 856-6716 © 2002 Donald M. Mattox 2 The History of Vacuum Coating Technologies Introduction plasma-enhanced chemical vapor deposition—PECVD). In some cases PVD and CVD processes are combined to deposit the material in a Vacuum coatings processes use a vacuum (sub-atmospheric “hybrid process.” For example, the deposition of titanium carbonitride pressure) environment and an atomic or molecular condensable vapor (TiCxNy or Ti(CN)) may be performed using a hybrid process where the source to deposit thin films and coatings. The vacuum environment is titanium may come from sputtering; the nitrogen is from a gas and the used not only to reduce gas particle density but also to limit gaseous carbon from acetylene vapor.
    [Show full text]
  • Vacuum Pump (Edited from Wikipedia)
    Vacuum Pump (Edited from Wikipedia) SUMMARY A vacuum pump is a device that removes gas molecules from a sealed volume in order to leave behind a partial vacuum. The first vacuum pump was invented in 1650 by Otto von Guericke, and was preceded by the suction pump, which dates to antiquity. HISTORY The predecessor to the vacuum pump was the suction pump, which was known to the Romans. Dual-action suction pumps were found in the city of Pompeii. Arabic engineer Al-Jazari also described suction pumps in the 13th century. He said that his model was a larger version of the siphons the Byzantines used to discharge the Greek fire. The suction pump later reappeared in Europe from the 15th century. By the 17th century, water pump designs had improved to the point that they produced measurable vacuums, but this was not immediately understood. What was known was that suction pumps could not pull water beyond a certain height: 18 Florentine yards according to a measurement taken around 1635. (The conversion to meters is uncertain, but it would be about 9 or 10 meters.) This limit was a concern to irrigation projects, mine drainage, and decorative water fountains planned by the Duke of Tuscany, so the Duke commissioned Galileo to investigate the problem. Galileo advertised the puzzle to other scientists, including Gaspar Berti who replicated it by building the first water barometer in Rome in 1639. Berti's barometer produced a vacuum above the water column, but he could not explain it. The breakthrough was made by Evangelista Torricelli in 1643.
    [Show full text]
  • Oerlikon Leybold Products Overview 2019 Brochure.Pdf
    Product Overview 2019 Innovative Vacuum Pumps, Systems and Components for Diverse Applications 3613 0019 02 Technical alterations reserved Product Overview 2019 The entire world of vacuum Table of contents: Page Leybold - Consulting, Sales and Service ................................................ 4 Forevacuum pumps Oil sealed vacuum pumps: Rotary vane pumps SOGEVAC B/BI/D/DI ............................................. 4 Rotary vane pumps SOGEVAC NEO D ................................................ 5 Rotary vane pumps TRIVAC B, E and T ............................................... 5 Dry compressing vacuum pumps: Scroll pumps SCROLLVAC SC 30, SC 60 and SCROLLVAC plus ......... 6 Multiple stage roots pumps ECODRY plus .............................................. 6 Claw pumps CLAWVAC ........................................................................... 6 Screw pumps VARODRY ........................................................................ 7 Screw pumps and systems LEYVAC ...................................................... 7 Screw pumps and systems DRYVAC ..................................................... 8 Power saving unit for DRYVAC screw pumps ....................................... 8 Screw pumps and systems SCREWLINE ............................................... 9 Roots pumps: RUVAC WA(U)/WS(U) ............................................................................. 9 RUVAC WH(U) ........................................................................................ 10 High vacuum pumps Fluid entrainment
    [Show full text]
  • Bibliography and Index on Vacuum And
    NATL INST OF STANDARDS & TECH R.I.C. All 100988737 /NBS monograph QC100 .U556 W5;SUPP1;1967 C.I NBS-PUB-C NBS PUBLICATIONS NBS MONOGRAPH 35—Supplement 1 Bibliography and Index on Vacuum and Low Pressure IVIeasurement January 1960 to December 1965 U.S. DEPARTMENT OF COMMERCE NATIONAL BUREAU OF STANDARDS — THE NATIONAL BUREAU OF STANDARDS The National Bureau of Standards^ provides measurement and technical information services essential to the efficiency and effectiveness of the work of the Nation's scientists and engineers. The Bureau serves also as a focal point in the Federal Government for assuring maximum application of the physical and engineering sciences to the advancement of technology in industry and commerce. To accomplish this mission, the Bureau is organized into three institutes covering broad program areas of research and services: THE INSTITUTE FOR BASIC STANDARDS . provides the central basis within the United States for a complete and consistent system of physical measurements, coordinates that system with the measurement systems of other nations, and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce. This Institute comprises a series of divisions, each serving a classical subject matter area: —Applied Mathematics—Electricity—Metrology—Mechanics—Heat—Atomic Physics—Physical Chemistry—Radiation Physics—Laboratory Astrophysics-—Radio Standards Laboratory,^ which includes Radio Standards Physics and Radio Standards Engineering- -Office of Standard Refer- ence Data. THE INSTITUTE FOR MATERIALS RESEARCH . conducts materials research and provides associated materials services including mainly reference materials and data on the properties of ma- terials. Beyond its direct interest to the Nation's scientists and engineers, this Institute yields services which are essential to the advancement of technology in industry and commerce.
    [Show full text]
  • Gas Physics and Vacuum Technology
    1 1 Gas Physics and Vacuum Technology 1.1 The term “vacuum” In standard specification list DIN 28400, Part 1, the term “vacuum” is defined as follows: Vacuum is the state of a gas, the particle density of which is lower than the one of the atmosphere on the earth’s surface. As within certain limits the particle density depends on place and time, a general upper limit of vacuum cannot be determined. In practice, the state of a gas can mostly be defined as vacuum in cases in which the pressure of the gas is lower than atmosphere pressure, i.e. lower than the air pressure in the respective place. The correlation between pressure (p) and particle density (n) is p= n · K · T (1-1) k Boltzmann constant T thermodynamic temperature Strictly speaking, this formula is valid only for ideal gases. The legal pressure unit is Pascal (Pa) as SI unit. The usual pressure unit in vacuum technology is millibar (mbar). This pressure unit is valid for the whole vacuum range from coarse vacuum to ultrahigh vacuum. 1.2 Application of vacuum technology Vacuum is often used in chemical reactions. It serves to influence the affinity and therefore the reaction rate of the phase equilibrium gaseous – solid, gaseous – liquid and liquid – solid. The lowering of the pressure causes a decrease in the reaction density of a gas. This effect is used e. g. in the metallurgy for the bright-annealing of metals. There are several kilograms of metal for 1 liter annealing space, whereas less than 1/3 of the total volume is filled with gas; as a result, the oxygen content of Liquid Ring Vacuum Pumps, Compressors and Systems.
    [Show full text]
  • Present Status of Vacuum Metallurgy in the Iron-Steel Industry
    Present Status of Vacuum Metallurgy in the Iron-Steel Industry of Japan* Report of Vacuum Metallurgy S ubdivision, Nell' Technique Development Division, Joint Research Society By M llS ayoshi Hasega IV a**, Toshihiko Asakuma*** all d Tetsuya Watallabe*** * 1. Introduction arc melting of titanium, and since around 1957, steel The Vacuum Metallurgy Subdivision, establish­ m elting by vacuum arc melting furnace has been draw­ ed in 1958 within the Steel T echnology J oint R esearch ing the attention of industry. At present, 12 furnaces Society in order to promote the exchange of technical of 10 companies are in operation, including a 20-i nch informa tion among the mills concerned, a nd to push diameter furnace Cor 4-ton ingots imported from NRC rapid progress of domestic technique and improvement Equipment Corporation and a 640-mm diameter fur­ oCfacilities, has been m a king efforts to improve vacuum nace for 6.8-ton ingots. Although the latter is the larg­ metallurgy through a nnouncing the results oC technical e t at p resent, severa l larger furnaces- of 30-inch dia­ research, holding discussions, and publishing research meter-for melting ingots of over 10 tons will make reports. The history a nd the present status of vacuum their debut w ithin this year. metallurgy in J apan is outli ned hereunder. The vacuum induction melting process was initiated Vacuum techniques a lready employed on a commer­ by Tohoku Metal Industries, Ltd., which imported a cia l basis include vacuum degassing, vacuum arc melt­ 50-kg furnace from N R C Corporation in 1954 to ing a nd vacuum induction melting.
    [Show full text]
  • Fundamentals of Vacuum Technology
    B5 FUNDAMENTALS OF VACUUM TECHNOLOGY Fundamentals of Vacuum Technology Fundamentals of Vacuum Technology revised and compiled by Dr. Walter Umrath with contributions from Dr. Hermann Adam , Alfred Bolz, Hermann Boy, Heinz Dohmen, Karl Gogol, Dr. Wolfgang Jorisch, Walter Mšnning, Dr. Hans-JŸrgen Mundinger, Hans-Dieter Otten, Willi Scheer, Helmut Seiger, Dr. Wolfgang Schwarz, Klaus Stepputat, Dieter Urban, Heinz-Josef Wirtzfeld, Heinz-Joachim Zenker 1 Fundamentals of Vacuum Technology 2 Preface Preface A great deal has transpired since the final reprint of the previous edition of Fundamentals of Vacuum Technology appeared in 1987. LEYBOLD has in the meantime introduced a number of new developments in the field. These include the dry-running ALL×ex chemicals pump, the COOLVAC-FIRST cryopump systems with quick regeneration feature, turbomolecular pumps with magnetic bearings, the A-Series vacuum gauges, the TRANSPECTOR and XPR mass spectrometer transmitters, leak detectors in the UL series, and the ECOTEC 500 leak detector for refrigerants and many other gases. Moreover, the present edition of the ÒFundamentalsÓ goes into much greater detail on some topics. Among these are residual gas analyses at low pressures, measurement of low pressures, pressure monitoring, open- and closed-loop pressure control, and leaks and their detection. Included for the first time are the sections covering the devices used to measure and control the application of coatings and uses for vacuum technology in the coating process. Naturally LEYBOLDÕs ÒVacuum Technology Training CenterÓ at Cologne was dependent on the invaluable support of numerous associates in collating the literature on hand and preparing new sections; I would like to expressly thank all those individuals at this juncture.
    [Show full text]
  • High Vacuum Pumps
    HighHigh Vacuum Pumps Va TURBOVAC / TURBOVAC MAG Turbomolecular Pumps DIP / DIJ / OB / LEYBOJET Oil Diffusions Pumps COOLVAC Cryo Pumps COOLPOWER Cold Heads COOLPAK Compressor Units 240.00.02 Excerpt from the Leybold Full Line Catalog 2018 Catalog Part High Vacuum Pumps 2 Leybold Full Line Catalog 2018 - High Vacuum Pumps leybold Contents High Vacuum Pumps Turbomolecular Pumps TURBOVAC / TURBOVAC MAG 6 General General to TURBOVAC Pumps . 6 Applications for TURBOVAC Pumps . 12 Accessories for TURBOVAC Pumps . 13 Products Turbomolecular Pumps with Hybrid (magnetic/mechanical) Rotor Suspension General toTURBOVAC i / iX Pumps. 14 with integrated Frequency Converter . 22 with integrated Frequency Converter and integrated Vacuum System Controller . 22 Special Turbomolecular Pumps. 34 Turbomolecular Pumps with Magnetic Rotor Suspension MAG INTEGRA with integrated Frequency Converter with and without Compound Stage . 36 with separate Frequency Converter with Compound Stage . 50 Accessories Electronic Frequency Converters for Turbomolecular Pumps with Magnetic Rotor Suspension. 58 Vibration Absorber . 62 Flange Heater for CF High Vacuum Flanges . 62 Fine Filter . 63 Solenoid Venting Valve . 63 Power Failure Venting Valve. 63 Power Failure Venting Valve, electromagnetically actuated . 63 Purge Gas and Venting Valve . 64 Gas Filter to G 1/4" for Purge Gas and Venting Valve. 64 Accessories for Serial Interfaces RS 232 C and RS 485 C . 65 PC-Software LEYASSIST . 65 Interface Adaptor for Frequency Converter with RS 232 C/RS 485 C Interface. 65 Miscellaneous Services . 66 2 Leybold Full Line Catalog 2018 - High Vacuum Pumps leybold leybold Leybold Full Line Catalog 2018 - High Vacuum Pumps 3 Oil Diffusion Pumps DIP, LEYBOJET, OB 68 General Applications and Accessories for Oil Diffusion Pumps .
    [Show full text]
  • Fundamentals of Vacuum Technology
    Fundamentals of Vacuum Technology 00.200.02 Kat.-Nr. 199 90 Preface Oerlikon Leybold Vacuum, a member of the globally active industrial Oerlikon Group of companies has developed into the world market leader in the area of vacuum technology. In this leading position, we recognize that our customers around the world count on Oerlikon Leybold Vacuum to deliver technical superiority and maximum value for all our products and services. Today, Oerlikon Leybold Vacuum is strengthening that well-deserved reputation by offering a wide array of vacuum pumps and aftermarket services to meet your needs. This brochure is meant to provide an easy to read overview covering the entire range of vacuum technology and is inde- pendent of the current Oerlikon Leybold Vacuum product portfolio. The presented product diagrams and data are pro- vided to help promote a more comprehensive understanding of vacuum technology and are not offered as an implied war- ranty. Content has been enhanced through the addition of new topic areas with an emphasis on physical principles affecting vacuum technology. To us, partnership-like customer relationships are a funda- mental component of our corporate culture as well as the continued investments we are making in research and development for our next generation of innovative vacuum technology products. In the course of our over 150 year-long corporate history, Oerlikon Leybold Vacuum developed a comprehensive understanding of process and application know-how in the field of vacuum technology. Jointly with our partner customers, we plan to continue our efforts to open up further markets, implement new ideas and develop pioneer- ing products.
    [Show full text]