Roots Vacuum Pumps Vacuum Roots VacuumRoots Pumps Va RUVAC Roots Vacuum Pumps 230.00.02 Excerpt from the Leybold Full Line Catalog (Edition 2021) Catalog Part Roots Vacuum Pumps 2 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold Contents Roots Vacuum Pumps General Applications and Accessories for RUVAC Pumps . 4 Oil for RUVAC pumps, for different fields of application . 5 Oil for RUVAC pumps, for different pump types . 5 General Information on Roots Vacuum Pumps . 6 Types . 9 Roots Products Vacuum Pumps Vacuum RUVAC WA/WAU Roots Vacuum Pumps with Air-Cooled Flange-Mounted Motors . 12 RUVAC WS/WSU Roots Vacuum Pumps with Air-Cooled Canned Motors . 18 RUVAC WH/WHU Roots Vacuum Pumps with Water-Cooled Hermetically Sealed Motors . 24 Accessories Pressure Switches . 32 Temperature Sensor Pt100 . 32 Miscellaneous Services . 34 2 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold leybold Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps 3 General Applications and Accessories for RUVAC Pumps Roots Vacuum WA/WAUWA/WAU(H) 251WS/WSU 501-2001WS/WSU(H) 251 WH 501-2001 700 WH/WHU 2500/4400/7000 Pumps Applications Semiconductor production n Vacuum coating n n n Large scale research n n Chemistry/Pharmaceutica n Metallurgy/Furnaces n n n n Lamps and tubes manufacturing n Packaging n Central vacuum supply systems n n n n Freeze drying n n n Leak testing systems n n n Electrical engineering n n n n High purity gases/closed refrigerant cycles n n n Mechanical engineering n n n n Automotive industry n n n n Accessories Frequency converters n n n n Pressure switches n n n n Temperature sensor Pt100 n 1) 1) For ATEX pumps only 4 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold Oil for RUVAC Pumps for different fields of application LVO 100LVO 210LVO 400 LEYBONOL Oils Applications Roots Vacuum Pumps Vacuum Semiconductor production s l n Vacuum coating n l l Research and development n l l Chemistry/Pharmaceutical n l l Metallurgy/Furnaces n l s Lamps and tubes manufacturing n l Packaging n l Central vacuum supply systems n l Freeze drying n l s Leak testing systems n Electrical engineering n High purity gases/closed refrigerant cycles n n = Standard Machanical engineering n l = Possible Automotive industry n l l s = Please contact Leybold The table only lists general applications . Your specific requirements might be subject to deeper analysis . For further questions, please contact our technical Sales support . Oil for RUVAC pumps for different pump types LEYBONOL Oils LVO 100LVO 210LVO 400 Pumps WA/WAU 251 n l l WA/WAU(H) 501-2001 n l l WS/WSU 251 n l l WS/WSU(H) 501-2001 n l l WS 501 W n l l WS/WSU 1001 and 2001 W n l l WH 700 n l WH/WHU 2500 n l n = Standard WH/WHU 4400/7000 l n l l = Possible For information on oil specifications please refer to Catalog Part “Oils / Greases / Lubricants LEYBONOL®”. 4 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold leybold Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps 5 General Information on Roots Vacuum Pumps Applications Torr For many years now Roots vacuum 10-3 10-2 10-1 100 101 102 750 1 Pumping speed of the backing pump pumps have been well established in 1000 500 2 Pumping speed of m3x h-1 the area of vacuum technology . 2,3 the Roots pump 600 cfm In combination with backing pumps, system without pres- 400 3 sure equalization line which compress against the 2 3 Pumping speed of 4 atmo sphere, these pumps offer the the Roots pump 200 following advantages: 1 100 system with pressure Pumping speed equalization line 4 Pumping speed 100 2468 -3 -2 -1 0 1 2 3 gained by the pres- Shifting the Operating 10 10 10 10 10 10 mbar10 sure equalization line Pressure Pressure into the High Vacuum Range Comparison of pumping speed characteristics with and without pressure equalization line As a rule of the thumb one may say that Roots va cuum pumps are capable of improving the attainable ultimate pressure of a pump system by a factor of 10 . With two Roots vacuum pump stages and a corresponding backing pump it is possible to attain pressures in the range down to 10-5 mbar (0 .75 x 10-5 Torr) . Under certain circumstances this will make the use of additional high vacuum pumps (turbo- molecular pumps or diffusion pumps) unnecessary . Multiplied Pumping Speed Pump system with WH 7000 Roots vacuum pump and SOGEVAC SV 630 B rotary vane vacuum pump Due to the non-contact rotation of the The use of Roots vacuum pumps in the seals in contact with the impellers, Roots vacuum pumps are area of vacuum technology has atmo sphere which might be subject able to run at higher speeds . Thus a resulted in further specializations and to wear . This prevents leaks and high pumping speed is obtained with a improvements: fail ures due to oil leaks . A service life relatively small size pump . Pumping of over 20,000 hours without main- - Through an integrated bypass speeds in excess of 1500 m3/h tenance is quite common . (pressure equalization line) it is also (589 cfm) can only be attained with possible to utilize the pumping - Tolerances and the quality of the Roots vacuum pumps . speed of the Roots vacuum pump balancing combined with forced When selecting the right kind of at high pressures and large lubricated bearings and toothed backing pump (sizing) it will be quantities of gas at an early stage . gears permit high speeds and the possible to pump large quan ti ties of This reduces the pumpdown time use of frequency converters . Thus it gas in connection with smaller backing especially for cyclic operation (see is possible to attain a high pumping pumps . Energy consumption of such a figure “Com -par ison of pumping speed while the process is in pro- pump sys tem is much less compared speed characteristics with and with- gress and to reduce the speed to a single backing pump offering the out pressure equalization line”) . when the process has been stopped or while changing the same pumping speed . - High-purity gases or hazardous batch . This results in a lower con­­- gases impose strict requirements on sumption of energy and a longer the leak-tightness of the system . service life with uncompromised Canned motors from the WS line or reliability . canned motors from the WH line are hermetically sealed . There are no 6 Leybold Full Line Catalog (Edition 2021) - Roots Vacuum Pumps leybold - Conversion from vertical to Semiconductor Technology Solar and Display hori zontal flow is easily implemented (RUVAC WH and WS) In the solar and display industry, Roots and can be performed at the place In the area of semiconductor techno- vacuum pumps can be found in almost where the pump has been installed . logy, Roots vacuum pumps are found all production steps . In connection with Thus the pump can be adapted in etching processes among others, the Czochralski process or at DSS more closely to the operating condi- and in use with dry compressing fur naces for the manufacture of silicon tions of your system . backing pumps . crystals, Roots vacuum pumps are Roots Lately, a further characteristic is gaining deployed to rapidly attain the Pumps Vacuum The pumping speed of the combina tion prominence: Roots vacuum pumps are demand ed conditioning pressure . In of backing pumps amounts to capable of compressing the media in connection with the various coating 200 to 500 m3/h (118 to 295 cfm) the pump chamber without the pres- processes they ensure the necessary and it ensures a cut-in pressure of ence of any further media . This mostly pumping speed at process pressure 10-1 mbar (0 .75 x 10-1 Torr) for the avoids interaction between different and very fast cycles at the load lock turbomolecular pump . In the process, media in the pump itself and also in chambers . In connection with lamina- corrosive gases need to be pumped the connected vacuum chamber . tion processes for the modules they together with a high particle count . Therefore assist in pumping down the laminators - the medium which is pumped is not Owing to the usage of media which quickly and ensure a high pumping contaminated with lubricants or present a health hazard, hermetically speed at lamination pressure . sealed pump versions are used . Due to sea lants; complex accessories Owing to the high production pressure, the LVO 400 lubricant filling in the gear, (ex haust filters, separators, etc .) are very much is demanded as to the a high degree of media resistance, long not needed; reli ability of the pumps during all service intervals a high reliability and - the lubricant in the side chambers is process steps and this despite of thus very low costs of ownership are hardly affected, so that service life is reduced maintenance and service attained . not reduced; complexity . - backstreaming of oil from the For use in clean rooms, Roots vacuum backing pump into the connected pumps with a water cooled motor with- vacuum chamber is prevented . out a motor fan are used . Process Industry This type of motor reduces the quantity These characteristics make the Roots Typical process industry applications of heat dissipated to the surround ings vacuum pump attractive for almost all are highly demanding regarding the to a minimum . rough and medium vacuum applica- ruggedness of Roots pumps . These tions . need not only to pump clean media but must also be suited for pumping dusty Central Vacuum Supply or vapor containing media within an Systems industrial environment .