The History of Vacuum Coating Technologies The History of Vacuum Coating Technologies Donald M. Mattox © 2002 Donald M. Mattox 1 The History of Vacuum Coating Technologies About the Author Donald M. Mattox, co-owner of Management Plus, Inc., is the Technical Director of the Society of Vacuum Coaters and the Executive Editor of the magazine Vacuum Technology & Coating. © 2002, Donald M. Mattox. All rights reserved. No parts of this book may be reproduced, stored in a retrieval system, transmitted in any form or by any means, photocopied, or microfilmed without permission from Donald M. Mattox. The author encourages readers to provide comments, corrections, and/or additions, and would like to be made aware of any historical references not given in this work. Copies of such references would be appreciated. Donald M. Mattox 71 Pinon Hill Place NE Albuquerque, NM 87122-1914 USA
[email protected] Fax (505) 856-6716 © 2002 Donald M. Mattox 2 The History of Vacuum Coating Technologies Introduction plasma-enhanced chemical vapor deposition—PECVD). In some cases PVD and CVD processes are combined to deposit the material in a Vacuum coatings processes use a vacuum (sub-atmospheric “hybrid process.” For example, the deposition of titanium carbonitride pressure) environment and an atomic or molecular condensable vapor (TiCxNy or Ti(CN)) may be performed using a hybrid process where the source to deposit thin films and coatings. The vacuum environment is titanium may come from sputtering; the nitrogen is from a gas and the used not only to reduce gas particle density but also to limit gaseous carbon from acetylene vapor.