ULVAC INFORMATION SQUARE

Agreed to the Transfer of Iwatani Gas’s Renamed to ADVANCE RIKO with the Cryogenic Equipment Business to UCI Transfer of Shares to CHINO — ULVAC CRYOGENICS INCORPORATED — ULVAC, Inc. In May 2014, ULVAC CRYOGENICS In November 2014, a decision was made to INCORPORATED (hereinafter, UCI) took over transfer all shares of ULVAC-RIKO, Inc., a con- the and selling of cryogenic equip- solidated subsidiary of ULVAC, Inc. to CHINO ment from the Cryogenic Equipment Department Corporation. On December 25, 2014, ULVAC- of the Engineering Division at Iwatani Industrial RIKO, Inc. left the ULVAC Group and made a Gases Corporation (hereinafter, Iwatani Gas) and new start under the name of ADVANCE RIKO, started manufacturing and selling the equipment. Inc. as part of the CHINO Group. UCI is a manufacturer specializing in Since its founding under the name of cryopumps used for vacuum devices and equip- SHINKU-RIKO Inc. in 1962, ULVAC-RIKO, ment—such as chip making equipment, flat panel Inc. has developed its business as a manufacturer display production equipment and optical film specializing in heaters, thermal analysis production equipment—and has been supplying and thermal property measuring instruments and many cryopumps in and Asia for many Liquid nitrogen server other types of thermal analysis equipment. years. In 2009, UCI began manufacturing and The transferee, CHINO Corporation, is a selling cryogenic freezers used in the supercon- manufacturer specializing in temperature and ductor, medical equipment, measuring instru- Various cryostats other measuring devices and controls, and pro- ments and laboratory cryostats sectors. vides integrated solutions—from measuring tem- As a major manufacturer of cryogenic equip- This has generated synergy that has led to posi- perature to regulating temperature—as its main ment (mainly cryostats and cryogenic freezers), tive technical innovations; and it facilitates entry business. It is anticipated that combining CHINO Iwatani Gas developed products used for R&D in into the rapidly growing superconductor and Corporation's technologies with ULVAC-RIKO, the cryogenic field, but discontinued selling those medical equipment sectors. Inc.'s thermal technologies will generate synergy. products at the end of 2013. By taking over Iwatani Gas's business of ●Contact Information ●Contact Information manufacturing and selling cryogenic equipment, ULVAC CRYOGENICS INCORPORATED ULVAC, Inc. UCI has added cryostats to its product lineup and TEL:+81-467-85-0303 TEL:+81-467-89-2033 has acquired cryogenic element technologies. URL: http://www.ulvac-cryo.com/english/ URL: http://www.ulvac.co.jp/en/

New Products * Please visit our website for further information.

ULVAC, Inc. tor body, eliminating operational constraints and greatly improving usability. The 7-inch Sales Debut of New HELIOT 900 Series capacitance touch panel allows operators to Leak Detectors, work with the detector more intuitively and Improved Evacuation Capability promptly while holding it in hand. The con- and Usability for Faster Testing troller comes standard with wireless remote ULVAC, Inc. has begun selling new leak connection to enable remote control opera- detectors “HELIOT 900 Series”. tion. The display supports seven languages. Leak detectors are test equipment designed (3) Advanced mobile cart to measure the amount of leakage and locate To ensure safe movement — even through leaks during helium leak testing, a method of narrow passages — the cart embodies numer- testing leaks using helium gas. Helium leak test- ous features requested by professionals in ing provides higher sensitivity than any other product quality improvements. HELIOT 900 laboratories, such as a compact body, large leak test method and enables fast and accurate Series are compatible with the expansion of new wheels, a flat panel cover, and the ease of testing, even for minor leaks. Due to these advan- applications for leak testing and the inspection moving and placing. tages, helium leak testing is used in a wide range requirements that continue to get stricter. (4) Improved user serviceability of industries that require leak testing, including Main Features The service panel can be removed without production lines for various piping components, (1) The products provide a helium pumping speed tools. The internal structure provides good electronic devices, air-conditioners/chillers, and of 5 L/sec, which is two to three times higher serviceability. automobiles, as well as food/drug packaging and than competing models in the same class. Maintenance can be performed in accordance medical equipment. To meet today’s ever-demanding helium with a step-by-step video that can be dis- ULVAC has been selling leak detectors leak testing requirements, such as shorter test played on the controller. since the 1960s, and after 1995, the name of times and higher responsiveness, stability and (5) The products are interchangeable with exist- these products has been the HELIOT Series. We detection sensitivity, we have dramatically ing models to enable a smooth transition. have fully upgraded our time-tested HELIOT improved helium evacuation capability while 710 Series products to launch the brand-new increasing the sensitivity of the detection ●Contact Information HELIOT 900 Series. unit. ULVAC, Inc. Component Division The market size of leak testing is expand- (2) Tablet-type controller as a standard feature TEL:+81-467-89-2261 ing year by year, with the global trend regarding The display is no longer fixed to the detec- URL: http://www.ulvac.co.jp/en/

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This is the third time that SHOWA SHINKU Crystal Oscillator System has received an award (it was previously awarded for Regulating Frequency Won “The Grand Prize” and “The Encouragement “the Business Award” Award” (in the 1st and 11th competitions respec- at “The Kanagawa Industrial Technology tively). Development Grand Prize Competition” This system continuously measures and — SHOWA SHINKU CO., LTD. monitors the oscillation frequency of a crystal oscillator and etches the electrode film on the surface of the crystal oscillator with an argon ion beam to adjust the frequency to the target value. The Business Award was granted for capabilities of SFE-B03 to adjust and process smaller and higher-precision crystal oscillators at high pro- an overseas subsidiary of ULVAC, Inc. in Taiwan, ductivity. received “The 2013 Best Equipment Supplier It is expected that using this system will con- Award” from AU Optronics Corp. (hereinafter, tribute to further downsizing and increasing the AUO), which is a major panel manufacturer in efficiency of various types of electronic equip- Taiwan. This is the seventh straight year UTI has ment. received the award. The awards ceremony was held at the ●Contact Information Head Office of AUO in Hsinchu, Taiwan and SHOWA SHINKU CO., LTD. Masasuke Matsudai, the Director and Managing TEL:+81-42-764-0321 Executive Officer of ULVAC, Inc., received SHOWA SHINKU CO., LTD. received URL: http://www.showashinku.co.jp/corp_e/ the shield from Mr. Xie, the Deputy General “The Business Award” at “The 31st Kanagawa Manager of AUO. Industrial Technology Development Grand Prize Received its Seventh Straight UTI received this award for the improve- Competition” for its system for adjusting crystal ments it made to AUO's large-scale mass-pro- oscillator frequencies, SFE-B03. Kanagawa “AUO Best Equipment Supplier Award” duction line by making proposals for the IGZO Prefecture and the Kanagawa Newspaper jointly for Cooperating to Make Proposals for process and reducing the lead time of sputtering sponsor this competition to recognize excellent Improving the IGZO Process systems. industrial technologies and products developed and Reducing the Lead Time by small- and medium-sized companies in of Sputtering Systems ●Contact Information Kanagawa Prefecture, thereby encouraging their ULVAC TAIWAN INC. — ULVAC TAIWAN INC. efforts for improving their capabilities developing TEL:+886-3-579-5688 technologies. ULVAC TAIWAN INC. (hereinafter, UTI), URL: http://www.ulvac.com.tw/ New Products * Please visit our website for further information.

ULVAC, Inc. speed. The size of this new pump is compact by ULVAC, Inc. integrated controller design. There is no limita- Sales Debut of New Ceramic Ball Bearing tion in mounting orientation. Excellent high System for Integrating the Photonics Molecular Pump UTM300B, Compact Size backing pressure performance allows you to Crystal Process is Developed and Launched with Integrated Controller Design and Free select smaller backing pumps. Through collaborative research with Mounting Orientation The UTM300B is ideal and affordable MARUBUN CORPORATION, TOKYO OHKA ULVAC, Inc. solution for use in the small-size equipment for KOGYO CO., LTD., MACHINE has begun selling new academic research and R&D, compared with CO., LTD., the Institute of Advanced ceramic ball bearing conventional magnetic levitation type pumps. Industrial Science and Technology and the type turbo molecular Main Features Institute of Physical and Chemical Research, pump, UTM300B with (1) No limitation in the mounting direction. ULVAC, Inc. developed and launched a system 280L/s pumping speed. (2) Integrated controller to the pump body reduces of integrating the photonic crystal process, which Turbo molecular pump cable length and downsize pumping system. can significantly improve the light-extraction effi- is utilized to make (3) Advanced mobile cart. ciency in LED production processes. high and ultra high High compression ratio made it possible to Used in an LED manufacturing process, vacuum environment in various markets from run the pump at high backing pressure and this system forms a uniquely patterned photonic R&D or mass production line. ULVAC launches downsize its backing pump. crystal layer—through nanoimprinting and dry the ceramic ball bearing turbo molecular pump, (4) Inlet port flange is selectable from VG100, etching—on a sapphire substrate layer. This helps UTM300B, in addition to the existing line-up, ICF152, and ISO100-K. make an LED with significantly improved energy small size pivot bearing type, medium and large (5) Noise level at the no load is 50dB or less efficiency, as part of the light that would other- size magnetic levitation turbo molecular pumps, (with ISO-100K flange). wise go back into the device and change to heat to meet to the requirements such as free mount- (6) Applicable standard CE and NRTL. energy can also be extracted from the sapphire ing orientation, more compact design, smaller substrate layer. size backing pump, etc in the trend of diversified ●Contact Information Photonic crystals are structures that can applications of turbo molecular pumps. ULVAC, Inc. Component Division scatter and transmit light. By using this pho- The UTM300B is the ceramic ball bearing TEL:+81-467-89-2261 tonic crystal layer, in place of the conventional turbo molecular pump with 280L/s pumping URL: http://www.ulvac.co.jp/en/ PSS method, light-extraction efficiency can be

18 ULVAC ｜ No.65 ULVAC, Inc. JCSS Calibration Service ULVAC Group Expanded its Scope Japan ULVAC, Inc. is an MRA*1/ JCSS*2 accredited calibration ULVAC, Inc. laboratory for vacuum gauges. ULVAC TECHNO, Ltd. Received the Special Contribution Award Recently the range of calibration ULVAC KYUSHU CORPORATION from CSOT in Shenzhen for Making Tremendous pressure has been expanded ULVAC TOHOKU, Inc. and ULVAC, Inc. is allowed to ULVAC KIKO, Inc. Contributions to Reliable Mass Production calibrate all vacuum gauges ULVAC EQUIPMENT SALES, Inc. by Providing Services Promptly and Establishing (whether they are made by a Well-Organized System for Supplying Parts ULVAC, Inc. or not). ULVAC, ULVAC CRYOGENICS INCORPORATED ULVAC-PHI, Inc. — ULVAC () Trading Co., Ltd. Inc. will continue to provide its customers with calibration services for their vacuum TIGOLD CORPORATION gauges, whether they are made by ULVAC, Inc. ULVAC COATING CORPORATION or other manufacturers, by using JCSS secondary Nisshin Seigyo Co., LTD standard gauges and working reference standard ULVAC Human Relations, Ltd. gauges, and issue JCSS sealed certificates. SHINKU CERAMICS CO., LTD. *1 MRA (Mutual Recognition Agreement) FINE SURFACE TECHNOLOGY CO., LTD. International agreement for recognizing one another's conformity assessments Reliance Electric Limited *2 JCSS (Japan Calibration Service System) SHOWA SHINKU CO., LTD. Calibration laboratory registration system under the Measurement Act ULVAC (China) Holding Co., Ltd. China Star Optoelectronics Technology • Contact Information ULVAC (NINGBO) Co., Ltd. (hereinafter, CSOT), which is affiliated with ULVAC, Inc. Component Division, Standard and ULVAC (SUZHOU) CO. LTD. TCL Corporation, a major general home elec- Calibration Labor atory ULVAC Orient (Chengdu) Co., Ltd. TEL:+86-467-89-2418 tric appliances manufacturer in China, held a ULVAC Automation Technology (Shanghai) Corporation URL: http://www.ulvac.co.jp/en/ groundbreaking ceremony on September 16, ULVAC Tianma Electric (Jingjiang) Co., Ltd. 2014 in Wuhan, Hubei to celebrate the start of ULVAC Vacuum Furnace (Shenyang) Co., Ltd. construction of a G6 LTPS panel production line reliable G8.5 mass production line in Shenzhen ULVAC (Shanghai) Trading Co., Ltd. funded by a new investment by CSOT. by establishing a service center near the factory, ULVAC Materials (Suzhou) CO., LTD At the global vendor convention held on getting it up and running in a short time, provid- the same day, awards were presented to excel- ing services promptly, and establishing a well- ULVAC Opto-electronics Thin Film Technology (Shenzhen) Co., Ltd. lent vendors. Hisaharu Obinata, the President organized system for supplying parts. ULVAC CRYOGENICS (NINGBO) INCORPORATED and Chief Executive Officer of ULVAC, Inc., ULVAC NONFERROUS METALS (NINGBO) CO., LTD. received the Special Contribution Award from ●Contact Information ULVAC Research Center SUZHOU Co., Ltd. Mr. Li Dongsheng, the Chairman of TCL ULVAC (Shanghai) Trading Co., Ltd. Luoyang Xinyou Magnesium Co., LTD Corporation. The ULVAC Group was com- TEL:+86-21-6127-6618 Hong Kong ULVAC Co., Ltd. mended for making great contributions to a URL: http://www.ulvac-shanghai.com/english/ ULVAC VACUUM EQUIPMENT (SHANGHAI) CO.,LTD. Taiwan ULVAC TAIWAN INC. ULTRA CLEAN PRECISION TECHNOLOGIES CORP. ULCOAT TAIWAN, Inc. ULVAC AUTOMATION TAIWAN Inc. ULVAC SOFTWARE CREATIVE TECHNOLOGY, CO.,LTD. ULVAC Materials Taiwan, Inc. PSS South ULVAC KOREA, Ltd. Ulvac Korea Precision,Ltd. Pure Surface Technology, Ltd. ULVAC CRYOGENICS KOREA INCORPORATED PhC ULVAC Materials Korea, Ltd. UF TECH, Ltd. Southeast Asia ULVAC SINGAPORE PTE LTD Upper panel: Conventional PSS method ULVAC MALAYSIA SDN. BHD. (enlarged 10,000 times) Lower panel: Photonic crystal method ULVAC () LTD. (enlarged 50,000 times) North America increased to a maximum of about 80% from ULVAC Technologies, Inc. about 30% achieved by PSS. In addition, the MACHINE CO., LTD. are in charge of nanoim- pattern depth can be reduced to about one-fifth print systems that form photonic crystal layers. Physical Electronics USA, Inc. of that of PSS, resulting in less dry etching time In particular, ULVAC, Inc. is in charge of final Europe and, in turn, significantly reducing manufactur- shaping to the designed pattern after dry etching, ULVAC GmbH ing costs. by using the two-layer resist method. As a general distributor of this system in Japan, MARUBUN CORPORATION provides ●Contact Information sales support collectively for collaborative ULVAC, Inc. research licensing and the systems and materials TEL:+81-467-89-2033 ULVAC WEB SITE: of each company. ULVAC, Inc. and TOSHIBA URL: http://www.ulvac.co.jp/en/ http://www.ulvac.co.jp/en/

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