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Entire Research Accomplishments 250 Duffield Hall • 343 Campus Road • Ithaca NY 14853-2700 Phone: 607.255.2329 • Fax: 607.255.8601 • Email: [email protected] • Website: www.cnf.cornell.edu Cornell NanoScale Facility 2017-2018 Research Accomplishments CNF Lester B. Knight Director: Christopher Ober Director of Operations: Donald Tennant Cornell NanoScale Facility (CNF) is a member of the National Nanotechnology Coordinated Infrastructure (www.nnci.net) and is supported by the National Science Foundation under Grant No. NNCI-1542081, the New York State Office of Science, Technology and Academic Research, Cornell University, Industry, and our Users. The 2017-2018 CNF Research Accomplishments are also available on the web: http://www.cnf.cornell.edu/cnf_2018cnfra.html © 2018 2017-2018 Research Accomplishments i Cornell NanoScale Science & Technology Facility 2017-2018 Research Accomplishments Table of Contents Technical Reports by Section. ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... .ii Directors' Introduction .................................................................... vi A Selection of 2017 Patents, Presentations & Publications ... ... ... ... ... ... ... ... ix Photography Credits ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ...xxvii Full Color Versions of a few Research Images.............................. xxviii-xxix Abbreviations & Their Meanings ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... xxx Technical Reports ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... .. 2-233 Indexes....................................................................................... 234 Biological Applications ... ... ... ... ... ... 2-63 Topics in Nano-Biophotonics: Fabrication of Plasmonic Metasurfaces that Attract and Spectroscopically Interrogate Cancer Cells .. .. .. .. 2 Microfluidic Mixer for Time-Resolved Single-Molecule Fluorescence Experiments using Flip-Chip Bonded SU-8 Structures .. .. .. .. .. .. .. .. 4 Body-on-a-Chip Systems for Drug Development .. .. .. .. .. 6 Micropillar-Based Microfluidic Device for Cell Capture and DNA Analysis .. .. .. .. .. .. .. .. .. .. .. 8 The Number of SNARE Complexes Changing Conformation in Vesicle Fusion Events .. .. .. .. .. .. .. .. .10 Nanoneedles for Intracellular Measurements.. .. .. .. ..12 MoS2 Pixel Sensors for Optical Detection of Redox Molecules.. .. .. .. .. .. 14 Silicon Nitride Cantilevers for Muscle Myofibril Force Measurements .. .. .. .. .. .. .. .. .16 DNA Unzipping by Resonator-Based nSWATs.. .. .. .. .. .. .18 Generalized Platform for Antibody Detection Immunosensor .. .. .. .. .. .. .. .. .. .. .20 Development of a Salivary Microfluidic Diagnostic Device Using Hot Embossing .. .. .. .. .. .. .. .22 Rapid Detection of Antimicrobial Susceptibility at the Point-of-Care .. .. .. .. .. .. .. .. .. .. .. .24 An in vacuo Microfluidic Mixer for Biological X-Ray Solution Scattering.. .. .. .. .. .. ..26 Biomechanics of Bacteria.. .. .. .. .. .. .. .. .. .. .. .. ..28 Design and Application of Microfluidic Devices to Study Cell Migration in Confined Environments .. .. .30 ii Cornell NanoScale Facility Chemistry. ... ... ... ... ... ... ... ... ... ... 64-79 Fabricating 2D Silica with Atomic Layer Deposition .. .. .64 Attonewton Sensitivity Magnet-Tipped Cantilevers and Sample Preparation for Single-Electron Spin Detection .. .. .. .. .. .. .. .. .. .. .. .66 Investigation of Area Selective Atomic Layer Deposition with Microreactor and in situ Surface Analysis .. .. .. .. .68 Chemical Bonding Across the Periodic Table at High and Ambient Pressures .. .. .. .. .. .. .. .. ..70 Substrate Preparation for Ultrafast Vibrational Spectroscopy Experiments.. .. .. .. .. .. 72 A Thin Film Transfer Sample Preparation Technique for Single-Electron Magnetic Resonance Imaging .. .. .74 Study on the Electrochemically Stabilizing Effect of the High Dielectric Constant Oxide Artificial Solid Electrolyte Interphase on Electrodes in Aqueous Electrolytes .. .. .. .. .. .. 76 Measuring Refractive Index of Microscopy Slides .. .. ..78 Electronics ... ... ... ... ... ... ... ... ... ... 80-95 Vertical Tunneling Field Effect Transistors (Thin-TFETs) Based on BP/SnSe2 Heterostructure.. .. .. .. .. .. .. .80 Zero-Mode Waveguides on Thin SiN Membranes Self-Assembled Silica Nano-Spheres for Dual Metal for Efficient Single-Molecule Sequencing .. .. .. .. ..32 Junction-Barrier-Schottky Diodes .. .. .. .. .. .. .. .. .. .. .. .82 Microfabricated Devices for Cell Organization.. .. .. .. 34 Room Temperature Microwave Oscillators Electrochemical Detection Array Combining Amperometry Enabled by Resonant Tunneling Transport and Total Internal Reflection Fluorescence .. .. .. .. .. .. .36 in III-Nitride Heterostructures .. .. .. .. .. .. .. .. .. .. .. .. .. .84 Microfluidic Device for Studying HABs .. .. .. .. .. .. ..38 MBE Grown NPN GaN/InGaN HBTs on Bulk-GaN Substrates .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .86 Chip-Based Frequency Combs for High-Resolution OCT .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .40 Fabrication of GaN Quantum Well HEMTs .. .. .. .. .. .. .. .. .88 Handheld Chem/Biosensor Combining Metasurfaces MoS2/PtSe2 MOSFETs and CMOS Integration .. .. .. .. .. .. .90 and Engineered Sensor Proteins to Enhance SPR .. .. .42 Fabrication of FETs Based on Scalable Sensor Array Platform for Analysis La-BaSnO3 Perovskite Oxide .. .. .. .. .. .. .. .. .. .. .. .. .. .. .92 of Quantal Transmitter Release Events.. .. .. .. .. .. 44 Micro-Scale Opto-Electrically Droplet-Microfluidic Device for Stem Cell Culture .. .. .. .46 Transduced Electrodes (MOTEs) .. .. .. .. .. .. .. .. .. .. .. .. .94 Metasurfaces for Infrared Spectroscopy of Live Cells in a Microfluidic Chamber .. .. .. .. .. .48 Listeria Sensor Chip via SPR .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .50 Gut-on-a-Chip using Microfluidic Devices .. .. .. .. .. .. .. .. .52 Retinal Implant Project.. .. .. .. .. .. .. .. .. .. .. .. .. .54 Disseminating Glycocalyx Biopolymer-Induced Microvesicle Shedding through Nanoparticle Tracking Analysis and Cryo-Electron Microscopy .. .. .56 Investigation of the Mechanical Property of Drosophila Mature Oocytes using Microfluidic Devices .. .. .. .. .. .58 Rapid Point of Care Diagnostic for Sepsis Stratification .60 Patterning of Native Proteins in Supported Lipid Bilayers .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .62 2017-2018 Research Accomplishments iii Materials ... ... ... ... ... ... ... ... ... ... ... 96-131 Mechanical Devices.................. 132-147 New Photopatterning Materials Thin Films from Atomic Layer Deposition for for Advanced Lithography .. .. .. .. .. .. .. .. .. .. ..96 Membranes, Metamaterials, and Micromachines .. ..132 Electrical Characterization of In2Ga2ZnO7 Graphene-Based Bimorphs Crystallized by Millisecond Heating.. .. .. .. .. .. ..98 for Micron-Sized Autonomous Machines .. .. .. .. .. .. ..134 Fused Silica Substrate and Silicon Absorber NEMS Electrostatic Switch Film for use in Laser Spike Annealing (LSA) . .100 for Near Zero Power RF Wakeup .. .. .. .. .. .. .. .. .. .. .. ..136 Metal-Organic Complex Photoresists .. .. .. .. .. .. .. .. .. .. ..102 Origin of Microlayer in Pool Boiling. .138 Zinc-Based Nanoparticle Photoresist Making a Microfluidic Device to for Extreme Ultraviolet Lithography .. .. .. .. .. .. .. .. .. ..104 Mimic Flow Through Porous Medium. .140 Critical Size for Bulk-to-Discrete Transition Atomic-Scale Origami for the in 2D Layers: Abrupt Size Effect Observed Fabrication of Micron Sized Machines. .142 via Calorimetry and Solid-State NMR .. .. .. .. .. .. .. .. ..106 A MEMS Repulsive Force Accelerometer .. .. .. .. .. .. .. .. ..144 Manipulating and Controlling Graphene Adhesion. .108 Microfabrication of Micropillars Transient Laser Heating Derived Mesoporous inside a Microchannel .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. ..146 Materials Directed by Gyroidal Templates from Block Copolymer Self-Assembly. .110 Three-Dimensional Printing of Hierarchical Porous Architectures .. .. .. .. .. .. .. .. .. .. ..112 Optics & Opto-Electronics ......... 148-175 Three-Dimensional Printing of ZnO Macrostructures Lithium Niobate Photonic Crystal Nanocavities .. .. .. .. ..148 with Antibacterial Properties and Low Resistivity...114 Lithium Niobate Nanophotonic Waveguides Novel Platform for Characterization for Tunable Second-Harmonic Generation .. .. .. .. .. ..150 of Nanostructured Polymer Brushes .. .. .. .. .. .. .. .. .. ..116 Rabi-Like Oscillations in Photon Pair Correlations .. .. ..152 Materials Characterization Work .. .. .. .. .. .. .. .. .. .. .. .. .. ..118 X-Ray Transmission Optics Development . .154 Growth and Characterization of NbN/III-N Heterostructures by Molecular Beam Epitaxy. .120 TiO2 Slot Waveguide for Efficient On-Chip Raman Spectroscopy . .156 Nanotube Transistor Arrays on a TEM Substrate. .122 Developing Full Wafer Blazed Grating Stacking of Van der Waals Hetero-Structures . .124 Fabrication Method Using Stepper .. .. .. .. .. .. .. .. .. ..158 Characterization of Hexagonal Boron Nitride 512-Element Actively Steered Silicon Phased Thin Films Grown by Molecular Beam Epitaxy .. .. ..126 Array for Low-Power LIDAR .. .. .. .. .. .. .. .. .. .. .. .. .. ..160 Utilizing Polymer Nanofibers in Microfluidic Wide Bandgap Semiconductor Deep UV Devices .. .. .. ..162 Devices for Liquid Separation Applications .. .. .. .. ..128 Three-Dimensional Scanner Fabrication .. .. .. .. .. .. .. .. ..164 Silica Glass
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