For Ultrapure GORE® Filters Water Applications

Major Semiconductor Manufacturer Demonstrates GORE® Filters Perform Comparably to UF Module at Significantly Lower Cost

Results The performance of the GORE® Filters was nearly equivalent to that of the ultrafiltration module: • UF: ~50 to 100 counts/liter at 0.05µm • GORE® HR Filters: ~50 to 200 counts/liter at 0.05µm • GORE® 0.02µm Filters: ~200 to 500 counts/liter at 0.05µm • Manufacturer now has data proving that GORE® Filters meet the requirements for ultrapure water applications that had previously required the more costly UF modules Water Quality Test Results

Particles > 0.05 micron 1000 900 800 700 Situation 600 500 A major semiconductor manufacturer was seeking a lower-cost 400 300 alternative to ultrafiltration modules for an ultrapure water system. / Liter Counts 200 To compare filtration performance, parallel trials 100 ® 0 were run with GORE Filters and ultrafiltration (UF) modules. 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 Time (Hour) Trial Setup GORE® Filter 0.02µm Cartridge ® ® GORE Filter HR Cartridge • Single water source for GORE Filter and UF module UF Module • Single 10-inch GORE® Filter installed after pre-filter • Trial was run with GORE® 0.02µm Filters, then GORE® HR* Filters The manufacturer reported that in this • Water quality from UF module and GORE® Filters compared using ® UDI50 particle counter. application: “The GORE Filter provided

*HR: High Retention filter. Testing demonstrates retention superior to typical 0.02µm filter the same particle removal function and efficiency as the UF.” — Senior UPW Engineer UPW loop Water Quality Test was performed post-UF Module and post-GORE® Filter Benefits Realized • GORE® Filters can meet the requirements for most of the GORE® manufacturer’s ultrapure water applications at significantly Filter Storage Tank lower cost than UF modules. • Initial capital cost of final filtration skid will be 50 percent lower.

UV • Annual operating expenses will be 25 percent lower. Pre- UF Mixed Bed Filter Module • GORE® Filters will require significantly less floor space than a UF module skid.

gore.com/filters GORE® Filters Ultrapure Water Facilities | case history

® The Science Behind GORE Filters ® GORE® Filters improve the integrity of purified liquids from the point GORE Filters make it possible to get the of manufacture to the point of use in semiconductor, flat panel display, best combination of flow and retention and other microelectronics fabrication. Engineered using our unique liquid microfiltration membrane technology, GORE® Filters provide Conventional Microfiltration Membrane Water flow three times the flow rate of conventional filters with equal or better Pore retention. These advanced polytetrafluoroethylene (PTFE) membranes Conventional have more pores in any given area, which results in a high flow rate. filtration membrane 500X SEM At the same time, the small pore size ensures consistently high retention rates. These high performance membranes are available GORE™ Microfiltration Membrane exclusively in GORE® Filters and are backed by over thirty years of microfiltration product innovation and technology.

GORE™ PTFE Membrane The Gore Advantage 500X SEM W. L. Gore & Associates, founded in 1958, creates innovative, Greater porosity enables technology-driven solutions such as high-performance GORE-TEX® higher flow at equal retention, or fabrics, medical devices that treat aneurysms, and electronic tighter retention at equal flow cables used in space exploration. Gore products have set new standards for reliability and performance in the consumer, industrial, Gore’s most advanced liquid microfiltration -038-IMG-US-JAN12 UPW electronic, medical and surgical markets. Today, Gore employs membranes are only available in GORE® Filters. approximately 10,000 associates in 30 countries worldwide.

Contact Us GORE® Filters have been successfully integrated into many diverse processing operations to both improve system performance and maximize economic benefits. Contact your local sales team for FOR MICROELECTRONICS USE ONLY. Not for use in food, drug, cosmetic assistance in selecting the right filter for your unique application. or medical device manufacturing, processing, or packaging operations. W. L. Gore & Associates, Inc., is certified International Contacts according to ISO9001 standards. China +86.21.5172.8299 South Korea +82.2.393.3411 GORE-TEX, GORE and designs are trademarks of W. L. Gore & Associates. Germany +49.89.4612.2211 Taiwan +886.2.2173.7799 © 2012 W. L. Gore & Associates, Inc. All rights reserved. Japan +81.3.6746.2572 United States +1.410.392.3200 GORE ® Filters Singapore +65.6.733.2882 Redefining Filtration Performance

W. L. Gore & Associates, Inc. | Liquid Microfiltration Products 201 Airport Road • Elkton, MD 21921 • USA Telephone: 410.392.3200 • Toll free (US): 800.542.3146 Email: [email protected]

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