Constraints on the Effective Electron Energy Spectrum in Backscatter Kikuchi Diffraction Aimo Winkelmann,1, ∗ T. Ben Britton,2, y and Gert Nolze3 1Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany 2Department of Materials, Imperial College London, London, UK 3Federal Institute for Materials, Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, Germanyz (Dated: October 24, 2018) Abstract Electron Backscatter Diffraction (EBSD) is a technique to obtain microcrystallographic informa- tion from materials by collecting large-angle Kikuchi patterns in the scanning electron microscope (SEM). An important fundamental question concerns the scattering-angle dependent electron en- ergy distribution which is relevant for the formation of the Kikuchi diffraction patterns. Here we review the existing experimental data and explore the effective energy spectrum that is operative in the generation of backscatter Kikuchi patterns from silicon. We use a full pattern compari- son of experimental data with dynamical electron diffraction simulations. Our energy-dependent cross-correlation based pattern matching approach establishes improved constraints on the effective Kikuchi pattern energy spectrum which is relevant for high-resolution EBSD pattern simulations and their applications. arXiv:1810.09525v1 [cond-mat.mtrl-sci] 22 Oct 2018 ∗
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[email protected] 1 a FIG. 1. EBSD scattering geometry and raw diffraction pattern with key features. For a specific point on the phosphor screen, the angle α indicates the scattering angle relative to the primary ◦ ◦ beam, with 30 / α / 130 for typical EBSD patterns. I. INTRODUCTION Electron backscatter diffraction (EBSD) is a technique which is used to reveal the mi- crostructure of crystalline materials, including metals, ceramics, functional materials, and minerals in the scanning electron microscope (SEM) [1].