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Instruction Manual for Model S-3400N Scanning Electron Microscope

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Instruction Manual for Model S-3400N Scanning Electron Microscope INSTRUCTION MANUAL FOR MODEL S-3400N SCANNING ELECTRON MICROSCOPE (User’s Operation/Maintenance Edition) Please read through this manual carefully before using the instrument. • Before using the instrument, read the safety instructions and precautions carefully. • Keep this manual in a safe place nearby so it can be referred to whenever needed. Hitachi Science Systems, Ltd. Copyright C Hitachi Science Systems, Ltd. 2004. All rights reserved. Printed in Japan. Part No. 52E-9011-3 TG-G (HMS052008) NOTICE: 1. Information contained in this document is subject to change without notice for improvement. 2. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation. 3. Hitachi High-Technologies Corporation assumes no liability for any direct, indirect, or consequential damages arising from use not described in this manual. Utmost care must be exercised when using the instrument. 4. This document does not provide any warranty or permission for industrial properties or any rights to grant license lawfully and without infringement. FOREWORD APPLICATION • The S-3400N SEM utilizes an electron beam accelerated at 300V to 30kV. The instrument is designed mainly for observation and evaluation of specimens prepared for the SEM. • Note that Hitachi Science Systems, Ltd. will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual. CAUTION The electron microscope need not conform to the “Radiation Hazard Preventive Laws” or “Ionizing Radiation Hazard Preventive Regulations” currently in effect throughout the world, unlike the instruments designed to produce X-rays. The suggestion made by the ICRP (International Committee on Radiation Hazard Prevention), however, clearly defines that the electron microscope, like the home television set, will potentially produce a certain amount of X-rays as an undesirable byproduct. From a safety viewpoint, therefore, it is essential to operate the instrument carefully taking into account the following fundamental precautions. (1) Use the instrument within the application range specified in the catalog or instruction manual. (2) Do not operate the instrument with covers or doors removed, nor use alternatives for these components. (3) Do not apply modifications which may possibly result in deactivation of the built-in safety devices. FOREWORD - 1 Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment. Scope of Instruction Manual This instruction manual comprises the following: 1. Installation (Requirements and Items to be prepared by User) 2. Function (Description of Controls) 3. Operation (Viewing Images, Saving Data, and Taking Photographs) 4. Maintenance (Procedures, Troubleshooting, and Action on Power Failure) 5. Replacement Parts 6. Accessory Operation This instruction manual describes the operation, maintenance, and specific precautions pertinent to daily operation on the model S-3400N scanning electron microscope. First, read and get familiar with the safety precautions described in the opening pages and General Safety Guidelines. Windows Ⓡ is a registered trademark of Microsoft Corp., U.S.A. Windows Ⓡ XP is a registered trade name of Microsoft Corp., U.S.A. Microsoft Ⓡ EXCEL is a registered trade name of Microsoft Corp., U.S.A. Note that the Ⓡ mark is not indicated in this manual. Acronyms Listed below are acronyms frequently used in this manual. • SEM : Scanning Electron Microscope • WD : Working Distance • SE : Secondary Electron • BSE : Backscattered Electron • PC : Personal Computer • GUI : Graphical User Interface FOREWORD - 2 GUARANTEE Period of Guarantee The charge-free guarantee period is one year from the date of installation. Details of Guarantee (a) The instrument will be repaired free of charge if it malfunctions due to a defect in manufacture within the charge-free guarantee period. (b) Note that a substitute part may be used for repair, or replacement with an equivalent product may be made instead of repair. (c) Such system components as a personal computer and printer which are frequently modified for improvement may not be available in original versions at the time of replacement. (d) Maintenance procedures are provided to allow system operation for 10 years after its delivery. During this period, the maintenance of units or parts having a rather short product cycle such as personal computer and printer may entail the purchase of substitute parts because of limits on the repair period of the former, for which we request your understanding. Even when more than 10 years have elapsed after delivery, maintenance will basically be provided as long as the relevant units and parts are available. Exclusions from Guarantee The guarantee will not be valid for the following failures and/or cases even during the charge-free guarantee period. (a) Failure due to use in improperly installed condition. (b) Failure due to power supply voltage/frequency other than specified by Hitachi Science Systems Ltd. or due to power failure. (c) Corrosion or deterioration of the tubing due to impurities contained in gas, or air supplied by the customer. (d) Corrosion of electric circuits or deterioration of optical elements due to corrosive gases or much dust contained in the atmosphere. (e) Failure due to disassembly, modification, parts replacement, or relocation not approved by Hitachi Science Systems, Ltd. (f) Consumables and parts having a limited period of guarantee. (g) Failure attributable to use of non-guaranteed parts (parts not described in the instruction manual). (h) Failure due to acts of God, including fire, earthquake, storm, flood, lightning, social disturbance, riot, crime, insurrection, war (declared or undeclared), radioactive pollution, contamination with harmful substance, etc. FOREWORD - 3 GUARANTEE (i) Failure of instrument or damage of basic software, application software or other data due to a computer virus. (j) Failure of the PC used with the instrument or damage to basic software, application software and/or data because of momentary voltage drop caused by lightning or power interruption. (k) Failure of the PC used with the instrument or damage to basic software, application software and/or data caused by turning off the PC main power without taking the normal termination procedure. (l) Using the system in ways that are not covered in this operating manual, or employing operating procedures not covered in the same; or failure of the system due to repairs performed not under control of Hitachi or under service personnel authorized by Hitachi. (m) Failure of the system due to relocation or transport of the system after installation, not under Hitachi's control or under the control of service personnel authorized by Hitachi. (n) Failure of components outside the scope of the warranty, covered by operating manuals. Limitations on Guarantee HITACHI SCIENCE SYSTEMS, LTD. MAKE NO GUARANTEES, EITHER EXPRESS OR IMPLIED, EXCEPT AS PROVIDED HEREIN, INCLUDING WITHOUT LIMITATION THEREOF, GUARANTEES AS TO MARKETABILITY, MERCHANTABILITY, FOR A PARTICULAR PURPOSE OR USE, OR AGAINST INFRINGEMENT OF ANY PATENT. IN NO EVENT SHALL HITACHI SCIENCE SYSTEMS, LTD. BE LIABLE FOR ANY DIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES OF ANY NATURE, OR LOSSES OR EXPENSES RESULTING FROM ANY DEFECTIVE PRODUCT OR THE USE OF ANY PRODUCT. NO ORAL OR WRITTEN INFORMATION OR ADVICE GIVEN BY HITACHI SCIENCE SYSTEMS, LTD., ITS DEALERS, DISTRIBUTORS, AGENTS OR EMPLOYEES SHALL CREATE A GUARANTEE OR IN ANY WAY INCREASE THE SCOPE OF THIS GUARANTEE. FOREWORD - 4 INSTALLATION AND AFTER-SALES SERVICE Installation • Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work • Before installation, refer to section 1 and prepare the necessary utilities. • Installation at another place after delivery will be provided at charge. Consult your nearest Hitachi service representative for details. After-sales Service • For after-sales service of the instrument, contact the Hitachi sales or service representative in charge. • For service after the guarantee period, consult Hitachi service with regard to a maintenance and inspection service contract. CAUTION ON DISPOSAL OF INSTRUMENT Although at present the instrument does not use materials that will directly harm the environment, changes are apt to be made in relevant laws and/or regulations, so be sure to consult a qualified specialist when planning to dispose of the instrument. FOREWORD - 5 Available Training Programs Hitachi service offers various kinds of training programs at its own facilities or at the user's site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them. Applicants will be charged. Handling of Chemicals (1) The user is responsible for proper handling and disposal of chemicals used for cleaning of the equipment in accordance with applicable regulations. (2) Follow the supplier's instructions on handling, storage, and disposal of chemicals. Instruction Manual (1) This instruction manual and those instruction manuals for relevant accessories may be revised for improvement without
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