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MNTL MICRO AND LABORATORY DEDICATION

Thursday, September 4, 2008

UNIVERSITY OF ILLINOIS AT URBANA-CHAMPAIGN

MNTL MICRO AND NANOTECHNOLOGY LABORATORY DEDICATION

Thursday, September 4, 2008

Micro and Nanotechnology Laboratory Dedication

September 4, 2008

Dedication of the Micro and Nanotechnology Laboratory

Celebrating completion of an $18 million,state-funded expansion of one of the nation’s premier research laboratories for Micro and Nanoelectronics, Nanophotonics and Optoelectronics, and BioNanotechnology, and MEMS/NEMS and Integrated Systems research.

Dedication of the “Light Array Rhythm Catcher” by S.Thomas Scarff Celebrating art inspired by LED technology advanced at the University of Illinois.

Remarks & Ribbon Cutting

Ilesanmi Adesida Dean, College of Engineering

Board of Trustees

State of Illinois

B. Joseph White President, University of Illinois

Capital Development Board

Richard Herman Chancellor, University of Illinois at Urbana-Champaign

Rashid Bashir Director, Micro and Nanotechnology Laboratory

Balloon Launch

Students from Campus Middle School for Girls

Special Guests

Arden Bement Jr. Director, National Science Foundation and Keynote Speaker for the CNST Nanotechnology Workshop

Robert Leheny Deputy Director, Defense Advanced Research Projects Agency and Co-keynote Speaker at the CNST Nanotechnology Workshop

Tours

Guided tours of the building will begin in the atrium and include some of the cleanrooms, nanoelectronics and photonics, and bionanotechnology laboratories.

Video

Historical highlights are presented on the plasma screen in the atrium.

Luncheon

Preregistration required. Please check registration materials for directions.

Note: This year the University of Illinois Center for Nanoscale Science and Technology (CNST) Annual Nanotechnology Workshop is being held in conjunction with the Micro and Nanotechnology Laboratory Dedication. The workshop will resume following the ceremony in the afternoon. Registrants should check packets for instructions. www.cnst.illinois.edu

The Micro and Nanotechnology Laboratory

In the Micro and Nanotechnology Laboratory, researchers from around the world work to improve and invent novel devices and develop applications that are in high demand by industry and consumers in the state, the nation, and around the world. This is the kind of research that makes satellite communications, computers, telephones, display panels, and other devices more powerful, more efficient, and more reliable. It is the basis for new kinds of for advanced drug discovery, new vaccine delivery strategies, and faster, more cost-effective DNA sequencing techniques. Research in this laboratory is expected to lead to new industries and spur economic development. The Micro and Nanotechnology Laboratory is rooted in the visionary work of two-time Nobel Laureate John Bardeen, renowned for research leading to the invention of the transistor and for the theory of superconductivity in the 1950s. Professor Bardeen’s work was further advanced by his first graduate student, Nick Holonyak, Jr., who established a solid-state devices research lab on campus in 1963. Building on a reputation for excellence and innovation, the University of Illinois quickly became a leader in academic research on gallium arsenide and other compound semiconductors, as well as optoelectronic devices and systems. Bardeen’s and Holonyak’s research contributions to transistors and light emitting diodes (LEDs) have led to several multi-billion dollar industries. In the early 1980s, the state of Illinois committed $3.5 million to modify a campus building for microelectronics research. Senior leaders from industry advised the state and university to “invest seriously” in the future of microelectronics research, and the state committed an additional $10 million for a new building. Construction began in July 1987, and the new the Microelectronics Laboratory was dedicated in October 1989. The new laboratory was envisioned as a multidisciplinary facility for investigating new concepts in optical and electronic materials, devices, and systems based on gallium arsenide, indium phosphide, and other group III-V compound semiconductors. Under Director Gregory E. Stillman’s leadership, the Microelectronics Laboratory became home to a National Science Foundation (NSF) engineering research center, which in 1988-89 were led by Joseph Verdeyen.

Photography: James Vattano

In 1989, Stephen G. Bishop succeeded Stillman, and Verdeyen as director of the Microelectronics Laboratory, and served in that capacity until 2000, when he was succeeded by Ilesanmi Adesida. In the early years of the new century, Adesida, now Dean of the College of Engineering, shepherded the laboratory through an expansion of its mission in response to the growing use of exotic materials and new techniques in the engineering and biology disciplines. Kent Choquette led the Micro and Nanotechnology Laboratory for about two years during its recent transition. In 2007, he was succeeded by Rashid Bashir, who now serves as the director. The Microelectronics Laboratory was renamed the Micro and Nanotechnology Laboratory to signal a broader capacity for research in the areas of biotechnology, microelectronics, nanotechnology, and photonics. In 2000-01, the college began forming the Center for Nanoscale Science and Technology (CNST) collaboratory, to facilitate the development of campus- wide multidisciplinary teams for conducting nanotechnology research and development. These efforts led to the establishment of the NSF-funded Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems in 2003, and the National Cancer Institute-funded Siteman Center for Cancer Nanotechnology Excellence, co-located at Illinois, in 2005. In recent years, collaborative work conducted by Milton Feng and Holonyak yielded a novel type of device—the light emitting transistor (LET). Research on lasers has focused on novel types of devices, such as patterned quantum dot lasers and narrow linewidth diode laser arrays by James Coleman’s research group, and vertical cavity surface emitting lasers (VCSELs) and photonic crystal lasers by Choquette’s research team. In other areas of the laboratory, Director Bashir is conducting research to develop nanotechnology-based solutions to solve biomedical problems for diagnostics, therapeutics, and tissue engineering. Brian Cunningham is working at the intersection of nanotechnology, biology, electromagnetics, and optics to develop technology that impacts health care, the life sciences, agriculture, and the environment. Irfan Ahmad’s research in bionanotechnology has focused on the design and development of NEMS for plant pathogenesis, evaluating plant extracts for nanomedicine cancer research, and development of sensors for environment-friendly agriculture. Adesida’s research group is investigating the processing of semiconductors and other materials at the nanometer scale level and applying these techniques to the realization of ultra-high speed optoelectronic devices

and circuits. K. C. Hsieh has contributed to semiconductor materials and characterization, while K.Y.Cheng’s research focuses on the research and development of molecular beam epitaxy (MBE). S. L. Chuang’s research includes quantum-dot and quantum-well semiconductor devices for slow light or wavelength conversion. The central theme of Kanti Jain’s research is to advance the state-of-the-art in micro and optoelectronics and microsystem devices by developing and exploiting novel micro/nano- fabrication technologies. Lynford Goddard is building high-speed chip-scale monolithic photonic systems. Eric Pop’s research focuses on power dissipation challenges in integrated circuits, taking a “bottom-up” approach while looking at electrical and thermal transport in nanometer- scale devices. Xiuling Li recently demonstrated a new direction in the growth of III-V nanotubes and nanowires utilizing strained planar bilayers released from a substrate to form III-V nanotubes. Recently arrived Logan Liu will focus on developing synthetic molecular optical imaging probes by combining chemical/biological synthesis and physical fabrication techniques. Today, with the expansion of state-of-the-art cleanrooms and space for innovative collaborations, the Micro and Nanotechnology Laboratory is distinctively positioned to respond to new challenges and opportunities at the intersection of biology and micro and nanotechnology. The recently completed $18 million Illinois state-funded expansion will enable research groups to build on the rich history of innovation, excellence, and leadership—to address critical technical and societal challenges and create new opportunities for the betterment of society, and help prepare the next generation workforce. The MNTL has also seen Epiworks, Xindium, and other startups initiated by researchers working at MNTL grow into profit-making ventures. Faculty members are involved in various capacities with several other startups and companies. As a College of Engineering full user research and training facility, the Micro and Nanotechnology Laboratory, has become the preeminent laboratory, available to researchers around campus and from academic institutions, industry, and government organizations around the world interested in Nanophotonics and Optoelectronics, Micro and Nanoelectronics, Nanomedicine and BioNanotechnology, and MEMS/NEMS and Integrated Systems.

UNIVERSITY OF ILLINOIS AT URBANA-CHAMPAIGN

MNTL LIGHT ARRAY/RHYTHM CATCHER DEDICATION

Thursday, September 4, 2008

Light Array/Rhythm Catcher

This sculpture is designed to catch and magnify the ever-changing light that warmly bombards our planet. With the use of the LED-light source,* the art captures the constant stream of changing light.

Light Array/Rhythm Catcher, like the smallest seashell or the most giant of gaseous nebula, is always growing in its space.

Because of Light Array/Rhythm Catcher’s placement in the architecture, the piece reflects, multiplies, and reverberates around the whole environment contacting the viewer at every level.

Light Array/Rhythm Catcher’s glowing for all seasons will become the campus focal point.

S. Thomas Scarff

Excerpted from the art proposal. The Light Array/Rhythm Catcher can be viewed in the north atrium of the Micro and Nanotechnology Laboratory. The 24-foot by 3-foot by 8-foot sculpture is aluminum.

*The first practical light emitting diode (LED) was invented by Nick Holonyak Jr., a John Bardeen Professor of Electrical and and Physics who conducts research in the Micro and Nanotechnology Laboratory. Professor Holonyak was inducted into the National Inventors Hall of Fame for this invention, in addition to the body of work on transistor and laser electronics generated over a career that spans more than 55 years.

Micro and Nanotechnology Laboratory Dedication Organizing Committee

• Rashid Bashir; Professor ECE, Director MNTL (Event Chair) • Irfan Ahmad; Associate Director, CNST/ABE (co-Chair) • Angie Dimit; Director of Advancement, Engineering Administration, (co-Chair) • Ilesanmi Adesida; Dean, College of Engineering • Mark Bohr; Senior Fellow, Intel • James Coleman; Professor, ECE/MNTL • Sydney Cromwell; Business Manager, MNTL • Elizabeth Dennison; Assistant Director, CSL • Randy Ervin; Facilities Management Director, Engineering Administration • Edwin Hahn; Associate Dean Research, College of Vet. Med. Administration • John Hughes; Associate Director of Laboratory Operations, MNTL • Jozef Kokini; Associate Dean Research, College of ACES • Edgar Martinez; Associate Dean for Interdisciplinary Programs, Engr. Admin. • Ivan Petrov; Associate, Director, FSMRL • Debby Reynolds; Administrative Assistant, MNTL • Taher Saif; Professor, MechSE • Ken Tarman; Facilities Manager, MNTL • Molly Tracy; Associate Dean for Advancement, Engineering Administration • Lori Williamson; Senior Director of Engagement, Office of Vice Chancellor • Engineering Communications Office:Tina Prow, Jim Vattano, Rick Kubetz • Imaging Technology Group, Beckman Institute • Office of the Chancellor • Office of the Provost • Office of the Dean, College of Engineering

Architect, Engineers, and Contractors

• Teng & Associates, Chicago, Illinois • Henneman Engineering, Inc., Champaign, Illinois • CORE Construction, Morton, Illinois • A & R Services, Urbana, Illinois • Coleman Electric, Mansfield, Illinois • F.J. Murphy, Springfield, Illinois

Micro and Nanotechnology Laboratory

The Micro and Nanotechnology Laboratory, working as a collaboratory to the Illinois Center for Nanoscale Science and Technology, with 147,347 square feet of space, is one of the nation’s largest and most sophisticated university-based facilities for semiconductor, nanotechnology, and biotechnology research. It contains more than 8,000 square feet of class 100 and class 1000 cleanroom laboratories, a new 3,000 square-foot laboratory complex specifically designed for bionanotechnology, and state-of-the-art ultra-high-speed optical and electrical device and circuit measurement equipment. The bionanosystems area focuses on utilizing the various technologies developed in materials, nanofabrication, devices, MEMS, and NEMS to study and solve overarching biological problems.

Multidisciplinary research is carried out in four key areas:

• Micro and Nanoelectronics • Nanophotonics and Optoelectronics • Nanomedicine and BioNanotechnology • MEMS/NEMS and Integrated Systems

Please visit the Micro and Nanotechnology Laboratory website for a list of research groups, faculty, and centers, along with updates on activities and accomplishments.

Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign College of Engineering 2000 Micro and Nanotechnology Laboratory, MC-249 208 North Wright Street Urbana, IL 61801 USA

(217) 333-3097 Fax: (217) 244-6375 email: [email protected] www.mntl.illinois.edu