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Thin-Film Solar 02 Thin-Film Solar Production Equipment for Photovoltaics 09/2014 MetaCom - Printed in Germany - Technical alterations reserved alterations in Germany - Technical - Printed 09/2014 MetaCom 02 Thin-Film Solar SINGULUS TECHNOLOGIES Provides Modern PV Production Solutions Solar cells can be categorized according to the Due to a superior performance under low light applied production process and used materials, intensities thin-film solar cells deliver electrical for example in crystalline and thin-film solar cells. power already in the early morning and later evening hours or at clouded sky. In addition the In thin-film solar technology a large glass panel panels are more tolerant against local shadowing. forms the base material, on which a relatively thin Also thin-film solar cells do not suffer so much in layer of 1 to 2 μm of photoactive compound is their performance at high solar panel temperatures applied. Amongst others, alloys consisting of copper, occurring at full sun intensities. Furthermore, thin- indium, gallium and selenium or sulfur (CIGS), film solar panels can be used as an architectural compounds of cadmium and tellurium (CdTe) or design element for the frontside or the roof of thin silicon layers are used in this process. buildings due to their homogenous surface color and attractive visual appearance. 03 PV Technology Crystalline Silicon Thin Film Concentrator, Organic (c-Si) Multi Mono a-Si a-Si/µ-Si CdTe CIGS crystalline crystalline Amorphous Micromorph Cadmium- Copper-Indium-Gallium- Telluride Sulfur-Selenide SINGULUS TECHNOLOGIES SINGULUS TECHNOLOGIES Focus on the Market for Developer, Enabler and Supplier CIS/CIGS Solar Cells for CIS/CIGS Solar Cells For CIGS cells the absorption layer is comprised of SINGULUS TECHNOLOGIES is a supplier of copper, indium, gallium as well as selenium and partly manufacturing solutions and production equipment sulfur compounds. These thin-film cells have achieved for the markets Solar, Semiconductor and Optical Disc. laboratory efficiency levels of about 20.3 %. The With new machine concepts and manufacturing efficiency of modules is in a range from 13 to 17 % processes SINGULUS TECHNOLOGIES establishes depending on the module size. itself as development partner and equipment supplier for investments in new high-performance thin-film SINGULUS TECHNOLOGIES is increasingly consulted solar cell concepts. We have gained extensive know-how as a development partner for highly efficient solar cells in vacuum coating, wet processing, thermal processing and chosen as preferred machine supplier by leading as well as automation and process integration. solar cells producers for the relevant machines. With our production equipment we are one of the few companies able to equip both efficiently running factories for the manufacturing of CIS/CIGS thin-film modules as well as single machines and turn-keylines for the production of next generation solar cells. 04 SINGULUS Offers the Key Production Systems for CIS/CIGS Thin-Film Solar Cells SINGULUS TECHNOLOGIES’ strategy is based on In the Solar segment SINGULUS TECHNOLOGIES the expansion of the existing core competencies. is a leading supplier for new production solutions These are high levels of expertise in a combination for crystalline and thin-film solar cells, offering lower of process-technological, scientific know-how paired production costs to increase the level of efficiency with complex solutions of machines and plant or achieve a higher level of efficiency. SINGULUS engineering for Vacuum Coating, Nano Deposition, TECHNOLOGIES has established itself in this market Thermal Deposition as well as wet chemical processes. as a worldwide recognized machine supplier for Our machines are employed by globally operating technologies enabling a sustainable and chosen customers for their products in Solar, Semiconductor energy provision on the basis of renewable energies. and Optical Disc as well as new application areas. 05 In the past business year, development and pilot lines for important process steps in the CIS/CIGS manufacturing were developed and delivered. SINGULUS TECHNOLOGIES continues to expand its development partnerships and provides thin-film solar cell manufacturers with sophisticated machine technology guaranteeing the cost-efficient production of such cells. Within a couple of years we were successful in offering the relevant production equipment for the demanding CIS/CIGS technology as a one-stop provider. Accordingly, SINGULUS TECHNOLOGIES’ product range today already covers all relevant production steps, which determine the efficiency of the modules. Overall, this contributes to up to 70 % of the investment volume of a thin-film factory. SINGULUS TECHNOLOGIES will continue to work on this strong market position as a process-independent technological leader to maintain the leading position in this area. Production capacities for CIS/CIGS based cells should further rise in the coming years. Based on the CIS/ CIGS processes SINGULUS TECHNOLOGIES is able to provide customers qualified production lines and has gained extensive know-how to reduce the production costs together with the customers, to increase the cell performance and to enhance the cell output. For the production of CIS/CIGS solar cells SINGULUS TECHNOLOGIES has introduced many new machines and will offer all relevant manufacturing steps in the future: → Sputtering → Evaporation → RTP for Selenization & Sulphurisation → Buffer layer deposition → Wet-chemical cleaning 06 VITRUM II Inline Wet Process Equipment, Etching, Cleaning & Single Side Coating As part of the product family VITRUM the new The modular design of the VITRUM II family allows the processing machine, VITRUM II Cover, is dedicated to easy integration of different process steps according clean in a single working step wrap around coatings at to the requirements of CIGS, a-Si or CdTe technology, rear sides and edges of thin-film solar panels. While such as etching, rear side and substrate edge etching, the edges and the rear side are cleaned with brushes cleaning and single side coating. and chemicals the active layer is protected by means of a process hood. Therefore, the VITRUM II Cover is best suited for cleaning after dipping processes as well as for etching of undesirable coatings at rear side and edges, for example CdTe or CdS. VITRUM II Clean 07 Main Features The design of the VITRUM II features the same type of piping for all liquid circuits and generously dimensioned → Modular design installation compartments for optimized maintenance → Up to 30 % cost reduction work. lt offers a high cycle rate and due to the modular → Better accessibility concept is easy to be integrated into existing production → Smaller footprint lines. With the new VITRUM II process cost can be → Low cost of ownership reduced substantially. → High throughput → High availability (uptime > 99 %*) VITRUM II Clean → Standard and customer specific → Inline cleaning equipment (2200/1400/600) substrate sizes up to 2,600 mm → Pre-rinse and single side brush off (acid/caustic) → Parallel carrier transport for higher → Inline final rinse (cascade cleaner), metal free throughput → Inline standard cleaning, polishing, and → Reproducible process results brushing machine (glass corrosion) *depends on application → Ultrasonic and megasonic support (particle removal) The VITRUM II provides the platform for wet-chemical inline process steps: In a CdTe manufacturing line it VITRUM II Etch performs several process steps, starting with glass → Inline etching equipment (2200/1400/600) washing, removal of rear side coating, CdCl2 deposition → Inline TCO etcher (HCl/HF) using a roller, CdCl2 salt removal as well as chemical → Inline KCN etcher NP etch. → Inline NP etcher → Inline CuCl2 etcher When producing a thin-film solar cell, VITRUM is → Inline developer for photoresist capable of glass washing as well as TCO etching, → Inline CdCl2 salt removal KCN etching or NH3 treatment respectively. In addition, it also provides NP, DAE and EDTA etching VITRUM II Cover for substrate width up to 2,200 mm. With our newly → Inline etching equipment developed and unique soft shower process, a → Removal of wrap around coating at edges homogeneous, reliable, and reproducible etching and rear side became reality. Furthermore, it features several → Active layer protection (neither liquids nor advantages compared with inline dipping baths vapors attack the active layer) such as reduced process volume, saving energy, and chemicals as well as a higher process speed VITRUM II Coat of up to 5 m/min with minimized carryover. → Inline wet deposition of thin salt films by means of a soft roller (e. g. CdCl2, CuCl2 or NaCl) → Automated process control → Single side coating → Very high material usage Facility Management SINGULUS TECHNOLOGIES also supplies: → Chemical supply and mixing systems → Waste water treatment → Exhaust scrubber → Water purification 08 TENUIS II Process System for the Application of Buffer Layer SINGULUS TECHNOLOGIES presents a new development on the way to the efficient wet-chemical coating of thin-film solar modules made of copper- indium-gallium-selenide (CIGS) on glass: the second generation of the TENUIS production line has a modular clustered basis and enables both significant savings in terms of required floor space and the simultaneous one-side coating of two substrates. The TENUIS II also provides advantages upon commissioning and in the ramp-up stage. The new TENUIS generation offers substantial cost Because of the new cluster
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