Hollow Polydimethylsiloxane (PDMS) Foam with a 3D Interconnected Network for Highly Sensitive Capacitive Pressure Sensors
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Kim et al. Micro and Nano Syst Lett (2020) 8:24 https://doi.org/10.1186/s40486-020-00127-8 LETTER Open Access Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors Dong Hwan Kim1, Young Jung1,3, Kyungkuk Jung4, Dong Hwa Kwak1, Dong Min Park1, Myung Gyu Shin2, Hyeong Jun Tak1 and Jong Soo Ko1* Abstract We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stifness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (> 86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test. Keywords: Capacitive pressure sensor, Hollow PDMS foam, Porosity Introduction εr and the distance between the electrodes d are the key Over the last decade, fexible pressure sensors for a vari- factors afecting the performance capabilities of sensors ety of wearable applications, such as electronic skin [1], such as those designed to measure pressure responsive human health monitoring [2, 3], and human–machine sensitivity levels [17]. interfaces [4, 5], have received signifcant attention. Many To ensure the fabrication of high-performance capaci- researchers have concentrated on the development of tive pressure sensors, recent studies have reported that various types of fexible and wearable pressure sensors, microstructured or patterned polydimethylsiloxane including piezoresistive [6, 7], capacitive [8–10], piezo- (PDMS) dielectric layers represent the most efective electric [11, 12], and triboelectric types [13, 14]. In par- means of improving the sensitivity of the capacitive- ticular, capacitive-type pressure sensors show signifcant type sensors due to their excellent elasticity and bio- advantages given their high sensitivity, low power con- compatibility [18, 19]. Pyramidal [20, 21], micro-pillar sumption, simple design, and low hysteresis [15, 16]. A [22, 23], micro-wrinkle [24, 25], and microdome [26, parallel-plate capacitive sensor is composed of a dielec- 27] shapes created with elastic materials reportedly ofer tric layer sandwiched between two conductive electrode high sensitivity for use as electronic skin. However, the plates for the detection of capacitance changes. With fabrication of a Si microstructured mold is complicated, these sensors, the capacitance parameters change when with signifcant dependence on the equipment, multiple external pressure is applied to the dielectric layer, with necessary steps, and high-cost manufacturing processes. the result ultimately refected in the change of the capaci- Additionally, these sensors operate mainly at a low tance of the sensor. Specifcally, the relative permittivity measurement level (< 10 kPa), which is insufcient for wearable systems in the medium–high pressure regime (10–100 kPa, suitable for object manipulation), as such *Correspondence: [email protected] 1 Graduate School of Mechanical Engineering, Pusan National University, systems must be capable of detecting changes [8]. Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan 46241, Republic For these reasons, the 3D monolithic porous PDMS of Korea dielectric layer has attracted much attention for use Full list of author information is available at the end of the article © The Author(s) 2020. This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creat iveco mmons .org/licen ses/by/4.0/. Kim et al. Micro and Nano Syst Lett (2020) 8:24 Page 2 of 7 in capacitive-type pressure sensors [9]. Chhetry et al. synergy efect of the high elasticity of the PDMS elas- reported a pressure sensor based on a dielectric hybrid tomer and the highly porous 3D micro-hollow network sponge consisting of calcium copper titanate (CCTO), a structure, the as-prepared highly porous PDMS dielectric material with very high dielectric permittivity, encased in layer showed excellent mechanical resilience, extremely polyurethane (PU) for detection in low-pressure regime high compressibility, and stable cyclic performance. (< 1.6 kPa) [28]. Pruvost et al. also suggested a PDMS Tese fexible pressure sensors are also capable of not foam decorated with carbon black particles for use in the only detecting low pressure levels but also enabling real- fabrication of highly sensitive capacitive pressure sensors time human motion sensing applications. exceeding 35 kPa−1 for pressures of < 0.2 kPa [29]. Tese studies focused on improving performance capabilities Preparation of the hollow PDMS foam and the pressure via the use of conductive nanomaterials while main- sensor taining the porosity of the sponge. However, aggrega- Figure 1 shows a schematic of the fabrication process of tion and agglomeration cause low production reliability the PDMS foam for the capacitive pressure sensor. Com- of composites of nanomaterials and elastomers, and the mercial copper foam (supplied by ITASCO) with poros- methods above cannot regulate or tune sensor sensitiv- ity of approximately 95% was used as template. First, a ity levels. Te easiest and fastest way to tune a sensor PDMS precursor (Sylgard 184 Silicone Elastomer, Dow without conductive nanomaterials is to adjust its poros- Corning) consisting of a mixture of a resin and a hard- ity. Tus, many studies have focused on high sensitivity ener at a 5:1 ratio was prepared and placed in a vacuum and wide sensing ranges when applying a porous elasto- chamber for 20 min to remove bubbles. In this case, a mer to a capacitive pressure sensor. Kang et al. suggested PDMS diluent (OS-10, Sylgard 184, Dow Corning Corp., a capacitive pressure sensor with a porous structure USA) is used to adjust the porosity of the PDMS foam. consisting of a polydimethylsiloxane (PDMS) thin flm PDMS solution samples of 30 and 50 wt% in terms of the dielectic layer. Te morphology of the porous structured PDMS diluent were created by adding set amounts of the dielectric layer could be controlled by changing the pore PDMS diluent to the PDMS precursor mixture, followed sizes [30]. Jung et al. showed that a PDMS and micro- by ultrasonication for 30 min. Here, PDMS foam samples sphere composite could be applied to a capacitive pres- with diferent porosity levels are denoted as PDMS-x, sure sensor by maximizing the porosity of microspheres where x denotes the weight percentage (wt%) of PDMS via the efect of high compressibility and an enhanced in the immersion solution. Te porosity of the PDMS piezocapacitive efect [9]. Li et al. also reported a pres- dielectric layer in the fabricated pressure sensors was sure sensor based on a dielectric layer of PDMS with controlled by changing the weight percentage of PDMS uniformly distributed micropores which displayed high in the immersion solution. elasticity, a wide pressure-sensing range (> 200 kPa), and In order to remove impurities remaining on the copper high sensitivity (0.023 kPa−1) [31]. surface, the copper foam is rinsed with acetone, ethanol, In this report, we propose a facile approach by which and deionized water. After drying for 30 min in an oven to adjust the porosity of PDMS foam by controlling the at 60 °C, the copper foam was then soaked in a diluted viscosity of the PDMS immersion solution. Due to the PDMS solution (30, 50 wt%) for an hour to ensure a Fig. 1 Schematic illustration of the fabrication process of the porous structured capacitive pressure sensor using copper foam as a template Kim et al. Micro and Nano Syst Lett (2020) 8:24 Page 3 of 7 conformal coating, after which it was dried at 90 °C for min−1 for a mechanical evaluation. Te capacitance of 1 h. For the bare PDMS foam, the copper foam was then the pressure sensors was measured using an LCR meter immersed into the PDMS precursor mixture for 1 h and (Hioki-3536, Hioki, Japan) at 200 kHz with 1 V of bias. cured at 90 °C for 3 h. Finally, the sacrifcial copper foam A universal testing machine (JSV-H1000, Japan) was used template was removed by a wet etching method. Te to apply the pressure and a load cell (HF-1, maximum PDMS-coated copper foam was then positioned such load 10 N, load resolution 0.001 N) measured the applied that it foated on the solutions of acetic acid, hydrogen pressure values. All sensor evaluations were conducted peroxide, and deionized (DI) water at a ratio of 1:1:5 for by connecting the LCR meter to a computer for real-time 12 h to etch away the copper foam. After completely measurements. etching the copper, the PDMS foam was soaked in deion- ized (DI) water for 6 h to remove the acid residue. Sub- Results and discussion sequently, the PDMS foam samples were dried at room To confrm the efect of the diluent on the porosity of the temperature. Te fabrication process fnished with the PDMS foam structure, FE-SEM was utilized on various formation of the top and bottom electrodes. Polyethylene locations of the samples. Te porosity of the fabricated terephthalate (PET) flms (Fine chemical Industry, Korea) PDMS foams is calculated from the density of the PDMS attachable with double-sided bonding copper conduc- foam (ρ foam ) and the bulk PDMS density (ρ bulk ) using tive tape (DTS-272, Ducksunghitech Corp., Korea) were Eq.