Background Statement for SEMI Draft Document 5153

Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 Background Statement for SEMI Draft Document 5153 New Standard: DATA DEFINITION SPECIFICATION FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEM Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document. Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. What is the problem being solved? The SEMI standard “PV35 - Specification for horizontal communication between equipment for photovoltaic fabrication system” describes the general behavior of equipment interfaces between adjacent PV equipment. It does not describe the physical interface and the specific data to be transmitted via such an interface. This document proposes a new standard that defines, how such a data interface can be described using XML. This description is not specific for crystalline or thin film equipment; it should become standard for both equipment types. What is the history of this issue and ballot? This is the first proposal of this new specification. Whom will this affect? How? Why? This change will not conflict with existing standards or with existing implementations. New implementations should follow the definitions of this standard. Is this a change to an existing solution, or, is it a new activity? This is a new activity. Revision Control This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force. Date Version Name Edits 07/29/2013 0.1 Eberhard Teichmann First draft for review by PVEIS TF 08/12/2013 0.2 Friedemann Fincke First reviewed edition (first 8 chapters) 09/25/2013 0.30 Carsten Born 2nd reviewed edition 10/15/2013 0.35 Carsten Born 3rd reviewed edition 11/11/2013 0.40 Carsten Born and PV-EIS Team Document reworked based on TF-team input 12/03/2013 05 Carsten Born/ E. Teichmann Headings corrected

Review and Adjudication Information Task Force Review Committee Adjudication Group: PV-EIS TF Europe PV Automation Committee Date: June 5, 2014 June 5, 2014 Time & Time zone: TBD TBD Location: Intersolar Europe Intersolar Europe City, State/Country: Munich, Germany Munich, Germany Leader(s): Carsten Born (VITRONIC) Eberhard Teichmann (PEER Group) Standards Staff: Yann Guillou (SEMI Europe) Yann Guillou (SEMI Europe) yguillou @semi.org yguillou @semi.org

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

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1 Purpose The purpose of this specification is to define a standard description of data, to be exchanged on an interface for horizontal communication between adjacent PV equipment. XML and XML schemas are common and widely used techniques to describe data structures. This proposal uses these methods to describe data structures for crystalline and thin film equipment

2 Scope This standard applies to data exchanged between all PV equipment which provides a standardized description of interfaces for horizontal communications This standard is compliant with the definition from SEMI PV35. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations This specification addresses the description of data structures only. It does not describe the physical interface to transmit these data structures.

4 Referenced Standards and Documents 1. SEMI Standards and Safety Guidelines SEMI PV2 — Guide for PV Equipment Communication Interfaces (PVECI) SEMI PV35 — Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System 2. Other Standards Extensible Markup Language (XML) 1.0 (Fifth Edition) – W3C 26th November 2008; http://www.w3.org/TR/2008/REC-xml-20081126/ XML Schema Part 1: Structures Second Edition – W3C Recommendation 28th October 2004; http://www.w3.org/TR/2004/REC-xmlschema-1-20041028/ IEEE Standard for Floating-Point Arithmetic – IEEE 754-2008 – 29th August 2008; http://ieeexplore.ieee.org/servlet/opac?punumber=4610933 ASCII format for Network Interchange – ANSI X3.4-1968; http://tools.ietf.org/html/rfc20 8-bit single-byte coded graphic character sets - Part 1: Latin alphabet No. 1 – ISO/IEC 8859-1:1998 http://www.iso.org/iso/catalogue_detail.htm?csnumber=28245 Universal Coded Character Set (UCS) – ISO/IEC 10646:2012 http://www.iso.org/iso/home/store/catalogue_tc/catalogue_detail.htm?csnumber=56921 NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. The data description for a horizontal communication interface, defined by this specification is contained in the Complementary Files “SEMIxxx_DataDefinition_HC_files.zip”. These Complementary Files are an official part of and accompany this specification, which is available at the SEMI website: http://dom.semi.org/web/wstandards.nsf/schema

5 Terminology 1. Definitions attribute — a parameter of a xml node. commands — data that gives an order to the opposite communication end point. This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 data element node — a xml node describing a data element on the interface. design time attribute — a descriptive attribute of an interface data node, which is needed at design time, but not transmitted during run time. equipment — the combination of hardware and software required to perform an operation or activity (e.g., processing, transporting, storing), including all direct auxiliary support or peripheral equipment. handshake data — data that is needed to synchronize the interaction between two tools. horizontal communication — inter-equipment communication along or against the physical flow of a material in process. material data — material related data that is traveling from tool to tool synchronous with the material flow. run time attribute — the actual data transmitted during run time that is described by the interface data node. status data — data that reflects the status of a tool, which can be accessed from the opposite communication end point. structural element node — a xml node describing the hierarchical structure of data elements on the interface. UID — Unique Identifier. An attribute associated with a node, which is unique over the whole xml file. XML — Extensible Markup Language is a markup language that defines a set of rules for encoding documents in a text format that is both human-readable and machine-readable. XML Schema — a xml schema defines the rules (grammar) how the xml file has to be structured to fulfill the given purpose. It can be used to check the validity of a XML file. There are different formats for the schema file available. In the related information section of this document the same definition is given in form of a DTD file (Document Type Definition).

6 Definition of data being transferred between two consecutive PV tools 1. Concept of the Data Model The base concept is to standardize the basic data elements and describe the rules how to build data blocks used for transportation of data between one tool and another. There are different kinds of data categories in focus: Handshake Data, Material Data, Status Data and Commands. This document gives no instructions on how to transport the data using a specific media. This has to be defined in media specific sub-standard documents. Nevertheless the definition of data elements is done keeping an eye on the technical needs of the most common industrial media used today. It should offer a convenient definition that makes it easy to implement the data model on different media.

7 Representation of the Interface Specification Since the interface can be configured to meet the needs of a specific implementation, it has to be documented in a correct and profound manner. This avoids misinterpreting of the exchanged data between involved communication partners. To describe the data to be exchange, XML is one of the most convenient ways to do so. Advantages of using XML as language are:  It can be easily checked for syntactical correctness using a free defined syntax description.  It is structured in a convenient way for describing data organization into blocks.  It, to some point, stays human readable.  There are numberless free tools for editing, reading and writing XML structures.

Basic Data Element Types and their representation within this standard document The basic data element types defined within this chapter are building blocks which shall be used to describe the data provided through the interface. All of them have a name and attributes describing it in detail. Name of Element Type

Name of attribute 1 Data type of attribute 1 Description of attribute 1 Name of attribute 2 Data type of attribute 2 Description of attribute 2 … … … Name of attribute n Data type of attribute n Description of attribute n

Color Key of Attributes Attribute Design time attribute (not to be transmitted through the interface during runtime) Attribute Runtime attribute to be transmitted through the interface (not important at design time) Attribute Used at design time and media-dependent on runtime (transmission through the interface at runtime if media demands it)

“ Design Time Attributes” – The interface description consists of information describing the data that has to be transmitted. This meta-data gives the information what is transmitted (a byte, a integer, a string) and what the purpose of this element is (Name of the element, descriptive text). Beyond that it defines how the data has to be encoded during the transmission and gives information about the maximum amount of data that may be transmitted during a single communication cycle. Both communication partners need to have this information to configure their system for data exchange, but this meta- data itself does not have to be transmitted over the interface during run time. Because of that all attributes fulfilling this purpose are called “Design Time Attributes”. “ Run Time Attributes” – Element nodes included in an interface description describe data bites that have to be transmitted during runtime. This document defines what data is created by the different element types. All attributes used for this purpose are called “Run Time Attributes”. Some elements defined later on do not carry data itself. Instead they are used to group information and thereby give the data some inner structure (complex data elements, arrays etc.). These structural elements are defined to have a unique ID. This ID has to be part of the interface description, so both sides know the same ID for the same element. On some types of transmission media it may be favorable to transmit these IDs together with the runtime data e.g. to create additional resynchronization points on a streaming media. For that purpose these attributes are not clearly associated to the “Design Time” or “Run Time” class of attributes. It has to be defined in media specific sub-standard documents if the IDs have to be transmitted on this media. 1. Structural Elements There are two basic element types used for building the data structures communicated:  Data element nodes — defining the data carrying through the interface.  Structural element nodes — organizing the data into a hierarchical order and enabling the receiver to identify the data that is coming in. In this chapter the structural elements are defined.

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 1. Interface Description The interface element is the root node of every interface specification. It is a simple container that holds the interface specification built from any amount of other elements. Every structural element has an ID that is unique for the defined interface. That makes it possible to distinguish defined structures from each other on the receiver side. As the UID uses an 8 bit unsigned integer value, a maximum of 256 different structural elements can be defined for a single interface. Definition Interface Name Text A name that identifies this data structure uniquely across all type definitions UID UInt8 An 8 bit unsigned integer identifying this data structure uniquely across all type definitions. Because XML requires identifiers to be of string type the letters ‘id’ are added as a prefix to the integer value. Description Text A short description of the purpose of this structure Version Text The version string (version number) of this interface specification. DataElements List An ordered list of data- and/or structural elements that are contained within this structure XML schema

Example 2. Structure Description The structure element is a simple container that can hold any amount of other elements. Every structural element has an ID that is unique for the defined interface. That makes it possible to distinguish defined structures from each other on the receiver side. As the UID uses an 8 bit unsigned integer value, a maximum of 256 different structural elements can be defined for a single interface. Definition Structure Name Text A name that identifies this data structure uniquely across all type definitions UID UInt8 An 8 bit unsigned integer identifying this data structure uniquely across all type definitions. Because XML requires identifiers to be of string type the letters ‘id’ are added as a prefix to the integer value. Description Text A short description of the purpose of this structure DataElements List An ordered list of data- and/or structural elements that are contained within this structure XML schema

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3. List Description Same as the structure element, the list element is a container that can hold any amount of other elements. The difference is that the whole ordered list of elements is repeated n times during runtime, where n may be a fixed or dynamically changed number. From the programmers point of view this can be interpreted as a dynamical one dimensional array of complex data. Every structural element has an ID that is unique for the defined interface. That makes it possible to distinguish defined arrays from each other on the receiver side. As the UID uses an 8 bit unsigned integer value, a maximum of 256 different structural elements can be defined for a single interface. Definition List Name Text A name that identifies this array uniquely across all type definitions UID UInt8 An 8 bit unsigned integer identifying this array uniquely across all type definitions. Because XML requires identifiers to be of string type the letters ‘id’ are added as a prefix to the integer value. Description Text A short description of the purpose of this list MinElements UInt8 The minimum number of times, the contained list of data elements has to be repeated. May be 0 if the included data is optional. Maximum number is 255. If less than the given number of data is transmitted during runtime, this will cause a data consistency error event. If this value is not given it gets set to 1. MaxElements UInt8 The maximum number of times, the contained list of data elements may be repeated. Maximum number is 255. If more than the given number of data is transmitted during runtime, this will cause a data consistency error event. Current Elements UInt8 If MinElements is unequal to MaxElements the size of the array may dynamically change during runtime. In this case an 8 bit unsigned integer holding the number of currently transmitted element lists has to be transmitted before the first data element. DataElements List An ordered list of data- and/or structural elements that are contained within this array XML schema

Example

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 2. Data Elements This chapter defines the elements describing the data that has to be transmitted over the interface. The interfaces in focus of this document often have to carry data like command codes or process parameters with a limited valid range. The interface description therefor should be capable of include such information as the valid range of a parameter or a list of valid command codes. If this information is available, as a positive side effect some simple data validation checks may be done directly at the interface level. The following definitions include the information which checks to do. data consistency error – If a data element has a limited validity and the received data is not within the valid range, the interface software shall trigger an data consistency error event. If and how this error event is handled by the application software is not part of this standard. 1. Signed Integer Description A data element used for transmission of signed integer numbers. There are 3 integer sizes available (8, 16, 32 bit). Whenever possible the smallest integer type fitting the needs should be chosen. If there is no explicit specification given by the used transmission media, a signed integer value has to be transmitted using the two's complement representation. Definition Int8, Int16, Int32 Name Text A name that identifies this data element across all type definitions Description Text A short description of the purpose of this data element Bottom Int8, Int16 Lower limit of this value. or Int32 The receiver checks the received value against this limit. If the received value is smaller than the given value a data consistency error event is tripped. If this attribute is not given there is no lower limit defined and this check is not done by the receiver. Top Int8, Int16 Upper limit of this value. or Int32 The receiver checks the received value against this limit. If the received value is bigger than the given value a data consistency error event is tripped. If this attribute is not given there is no upper limit defined and this check is not done by the receiver. Enumeration Text If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes). If the received value is not part of the list a data consistency error event is tripped. If such a list is not given, this check is not done by the receiver. Value Int8, Int16 A single valid value. List element of the Enumeration. or Int32 Descriptio Text Short description of this value (e.g. Function of the command n code). Value Int8, Int16 Value of the Integer transmitted during runtime (signed 8, 16 or or Int32 32 bit)

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XML schema

Example

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 2. Unsigned Integer Description A data element used for transmission of signed integer numbers. There are 3 integer sizes available (8, 16, 32 bit). Whenever possible the smallest integer type fitting the needs should be chosen. Definition UInt8, UInt16, UInt32 Name Text A name that identifies this data element across all type definitions. Description Text A short description of the purpose of this data element. Bottom UInt8, Lower limit of this value. UInt16 or The receiver checks the received value against this limit. UInt32 If the received value is smaller than the given value a data consistency error event is tripped. If this attribute is not given there is no lower limit defined and this check is not done by the receiver. Top UInt8, Upper limit of this value. UInt16 or The receiver checks the received value against this limit. UInt32 If the received value is bigger than the given value a data consistency error event is tripped. If this attribute is not given there is no upper limit defined and this check is not done by the receiver. Enumeration If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes). If the received value is not part of the list a data consistency error event is tripped. If such a list is not given, this check is not done by the receiver. Value UInt8, A single valid value. List element of the Enumeration. UInt16 or UInt32 Descriptio Text Short description of this value (e.g. Function of the n command code). Value UInt8, Value of the Integer transmitted during runtime (signed 8, 16 or 32 UInt16 or bit). UInt32

3: The use of the Bottom, Top and Enumerated attributes may result in an interface definition that is not capable of accepting any values, if all enumerated values are out of the range specified by bottom and top or the top value is smaller than the bottom value. These are design time errors. As there are simply three independent checks for the three attributes, which may reject the received value, it creates no logical inconsistency on the program level of the interface software. 4: Interface definitions may be checked for such inconsistent definitions on the import of the XML file. But it has to be accepted, if some enumerated values are out of the defined range, as this may have been done with purpose (see example in ¶ Example).

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Example

3. Float Description A data element used for transmission of 32bit floating point numbers. If there is no explicit specification given by the used transmission media, a float value has to be transmitted using the representation defined by IEEE754. Definition Float Name Text A name that identifies this data element across all type definitions Description Text A short description of the purpose of this data element Bottom Float Lower limit of this value. The receiver checks the received value against this limit. If the received value is smaller than the given value a data consistency error event is tripped. If this attribute is not given there is no lower limit defined and this check is not done by the receiver. Top Float Upper limit of this value. The receiver checks the received value against this limit. If the received value is bigger than the given value a data consistency error event is tripped. If this attribute is not given there is no upper limit defined and this check is not done by the receiver. Value Float Value of the float transmitted during runtime (32 bit)

5: The use of the Bottom, Top attributes may result in an interface definition that is not capable of accepting any values, if the top value is smaller than the bottom value. This is a design time error. As there are simply two independent checks for the two attributes, which may reject the received value, it creates no logical inconsistency on the program level of the interface software. 6: Interface definitions may be checked for such inconsistent definitions on the import of the XML file.

XML schema

Example

4. Double Description A data element used for transmission of 64bit floating point numbers. If there is no explicit specification given by the used transmission media, a float value has to be transmitted using the representation defined by IEEE754. Definition This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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7: The use of the Bottom, Top attributes may result in an interface definition that is not capable of accepting any values, if the top value is smaller than the bottom value. This is a design time error. As there are simply two independent checks for the two attributes, which may reject the received value, it creates no logical inconsistency on the program level of the interface software. 8: Interface definitions may be checked for such inconsistent definitions on the import of the XML file.

XML schema

Example

5. Bool Description A data element used for transmission of the logical state of true or false. The representation of a boolean value may vary depending on the selected media. If there is no explicit specification given by the used transmission media, one of the following representations has to be used. Representations

Data type False Value True Value

Bit 0 1

Int8 0 Any other value

String false true

What representation has to be used on a specific media has to be defined in the subordinate standard documents. Definition Bool Name Text A name that identifies this data element across all type definitions Description Text A short description of the purpose of this data element Value Bool Value of the boolean transmitted during runtime

XML schema

Example 6. Binary Description A data element used for transmission of binary data. As the data is binary, this document does not include information of the encoding. If the content of the binary data is defined in a subordinate document, there has to be given some information regarding the network byte order too. Definition Binary Name Text A name that identifies this data element across all type definitions Description Text A short description of the purpose of this data element MaxByteLength UInt16 The maximum length of the binary data block in bytes as a 16 bit unsigned integer value. If the received number of bytes is larger than the given value a data consistency error event is tripped. FixedLength Bool If set to true the binary data block is not allowed to vary in size during runtime. It always has to use the number of bytes defined by MaxByteLength. If the received number of bytes is different from the given value a data consistency error event is tripped. CurrentByteLength UInt16 If FixedLength is set to false, the length of the transmitted binary data block has to be given as a 16 bit unsigned integer value. This value is transmitted first, before the binary data block transmission. Data Byte Array Binary data block transmitted during runtime.

XML schema

Example

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 7. Fixed String Description A data element used for transmission of text of fixed length. No matter if 7 or 8 bits are used for encoding there is always one byte per character transmitted. If the string to be transmitted is shorter than the defined string length it has to be filled up with spaces (20 hex) to the full length. The receiver has to cut off spaces present at the end of the string (trim right) before handing over the data to the application. Because of this, strings intentionally ending with a space cannot be transmitted, as the space will get lost during reception. If this is not acceptable, the variable string length type may be used instead of the fixed length type. Definition StringF Name Text A name that identifies this data element across all type definitions Description Text A short description of the purpose of this data element ByteLength UInt16 The length of the string data in bytes as 16 bit unsigned integer value. Encoding ASCII or May be set to ASCII (7 bit/char) or ISO/IEC 8859-1 (8 bit/char) ISO Enumeration If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes). If the received value is not part of the list a data consistency error event is tripped. If such a list is not given, this check is not done by the receiver. Value Text A single valid string value. List element of the Enumeration. Description Text Short description of this value (e.g. Function of the command code). Data String Data String data transmitted during runtime

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Example

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 8. Variable String Description A data element used for transmission of text of variable length. A minimum of 8 bit per character is transmitted even if only 7 bits are used for encoding. UTF-8 uses a variable number of bytes for character encoding and because of that the number of characters fitting into the given number of bytes (MaxByteLength) may vary too. Because of that together with a variable string the number of included characters is transmitted, not the byte length. As the byte order is clearly defined below (Chapter Network Byte Order), there is no need to add a Byte Order Mark (BOM) to the UTF-8 string. Definition StringV Name Text A name that identifies this data element across all type definitions Description Text A short description of the purpose of this data element MaxByteLength UInt16 The maximum length of the string data in bytes as a 16 bit unsigned integer value. Encoding ASCII, May be set to ASCII (7 bit/char) or ISO/IEC 8859-1 (8 bit/char) or ISO or ISO/IEC 10646 - UTF8 (8-24 bit/char). UTF8 Enumeration If an enumeration node is included, the received value will be checked against the given list of valid values (e.g. command codes). If the received value is not part of the list a data consistency error event is tripped. If such a list is not given, this check is not done by the receiver. Value Text A single valid value. List element of the Enumeration. Description Text Short description of this value (e.g. Function of the command code). CurrentCharLength UInt16 The length of the transmitted string data (amount of characters) has to be given as a 16 bit unsigned integer value. This value is transmitted first before the string transmission. Using UTF8 the char length of the string may differ from the byte length. Data String Data String data transmitted during runtime

XML schema Example

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 9. Timestamp Description A Unix (POSIX) time stamp is a simple Int32 counter counting the seconds starting from 1. January 1970 00:00 GMT. To increase the resolution without altering the default format of the Unix time stamp an additional Int16 value holds the milliseconds. Therefor the 1st of January 2014 00:00:00.357 would be encoded as  TimestampSeconds = 1388530800  TimestampMilliseconds = 357

Definition Timestamp Name Text A name that identifies this data element across all type definitions Description Text A short description of the purpose of this data element TimestampSeconds Int32 Unix time stamp (seconds since 1. January 1970 00:00 GMT) TimestampMillisecond Int16 Milliseconds since the last full second given by TimestampSeconds s

XML schema

Example

8 Network Byte Order If there is no explicit specification for the network byte order given by the used transmission media a little endian byte order has to be used. This means the low byte of a multi byte data type has to be transmitted first. Respectively while sending a data block, the byte with the lowest address has to be transmitted first.

9 Structure of a XML Interface description file The basic structure of an interface description file is given in the example below.  The file shall use a standard xml header and the encoding has to be UTF-8.  A DOCTYPE definition may be present referencing the PV35.dtd released together with this standard.  The root node of the interface definition has to be of the type.  The namespace shall be set to "urn:semi-org:xsd.PV35-1.V[Current Version].InterfaceDescription".  A reference to the PV35.xsd scheme released together with this standard may be present. 9: 7 Bit ASCII is a subset of UTF-8. Therefore a file encoded in 7 bit ASCII is although a valid UTF-8 document.

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 THE XSD SCHEMA FILE DEFINED BY THIS STANDARD NOTICE: The material in this Appendix is an official part of SEMI doc. 5153 and was approved by full letter ballot procedures on [A&R approval date].

The XSD Schema File Defined by this Standard

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 THE DOCUMENT TYPE DEFINITION (DTD) DEFINED BY THIS STANDARD NOTICE: This Related Information is not an official part of SEMI doc. 5153 and was derived from the work of the global PV Automation Technical Committee. This Related Information was approved for publication by full letter ballot procedures on [A&R approval date].

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 Top CDATA #IMPLIED >

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 EXAMPLE OF AN INTERFACE - BASIC INTERFACE AS DEFINED BY PV35 NOTICE: This Related Information is not an official part of SEMI doc. 5153 and was derived from the work of the global PV Automation Technical Committee. This Related Information was approved for publication by full letter ballot procedures on [A&R approval date].

NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

Doc.  SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Letter (Yellow) Ballot0Letter Phone: 408.943.6900, Fax: 408.943.7943 (Yellow) Ballot0Letter (Yellow) Ballot00Informational (Blue) Ballot0Document Under Development0Letter (Yellow) Ballot0Letter (Yellow) Ballot0 By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.

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