Standards Border Template s3

Background Statement for SEMI Draft Document 5026C Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background:

This proposed ballot contains the following corrections and revisions to SEMI F1-96:  Add a table title  Add floating-point arithmetic in a table  Correction of unit in a table and add a table note  Deletion of safety remarks  Update of mandatory notices  Addition of a new Related Information section to note an important point to be paid attention to when a measurement with higher sensitivity than SEMI F1 is required.

Throughout this ballot, text to be deleted is shown strikethrough and text to be added is shown underlined .

Doc.5026B was submitted for Cycle 5, 2011 and failed the committee review on Thursday, September 29. The F1 Revision Task Force reviewed all the negatives and comments and added some corrections to the proposed document.

The voting result of Doc.5026C will be discussed at the F1 Revision Task Force Meeting and be adjudicated at the Japan Gases and Facilities Committee Meeting on Friday, March 23, 2012 at SEMI Japan, Tokyo, Japan.

If you have any questions, please contact to the F1 Revision Task Force leaders as shown below: Shuji Moriya (Tokyo Electron), [email protected] Yoshifumi Machii (Fujikin), [email protected], or Akiko Yamamoto, SEMI Japan staff at [email protected] Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 3 3 the determine and practices health and safety appropriate other ofprior limitations use.applicability regulatoryor to establish to standard this of users the of responsibility NOTICE: and practices, health and safety other ofprior thelimitations use. applicability regulatoryor to determine appropriate establish to Documents the of users the of responsibility the is It use. NOTICE: qualification testing.and 2.3 2.2 areas. and research development and comparable manufacturing facilities 2.1 2 and services.equipment, materials, of procurement Itinand usedis as semiconductorinstallation in an the alsoaid components manufacturing. intended 1.1 1 Piping Gas SystemsComponentsand toSEMIF1-96, Revision Specification Leak Integrityfor ofHigh-Purity Draft Document SEMI 5026C reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This protective a flow, air substantial with area an in performed be must testing If testing. during minimum a to reduced 3.2.5 installing components. the downstream objecttest before the testing require may detector leak the and object test the between valves check or regulators as such Restrictions 3.2.4 the object. test 3.2.3 test enclosuresand avoidthe dilution.appliesto interiors to to This both of objects.evacuated 3.2.2 outboard. tests internal, at sensitivelevels. this andcontinually testing Therefore,performthe in inboard, inhibitorder: desorption later can subsequent a and materials, and permeable by indication absorbed is pressure leakage under gas delayed tracer Helium a rate. leakage by apparent rising indicated often is Permeation helium. by materials polymeric 3.2.1 3.2 safety systems applicable all componentspiping with comply regulations. and 3.1 Limitations Scope Purpose It states requirements for both the user and manufacturer and establishes leak rate limits for acceptance testing acceptance for limits rate leak establishes and manufacturer and user the both for requirements states It semiconductor in used components testing complete for systems,subsystems, methods It includes individual components. and and systems piping gas high-purity to applies specification This and systems piping high-purity gas for rates leakage and requirements testing leak the defines specification This Interferences that ensure to user the of responsibility the is It regulations. safety for replacement a not is specification This Air flow can severely hinder capture of leaking gas by a detector probe. If possible, such air flow should be should flow air such possible, If probe. detector a by gas leaking of capture hinder severely can flow Air sensitivity. test ensure to adequate be must detector leak the and object test the between Conductance reaches gas tracer the that purging ensure to require may inlet an at tubing diameter small or lines tubing Long or purged be must gas tracer with filled be to space the less, or psig) (147 MPa 1 tests, pressure low For of permeability high to due indications misleading in result can helium with testing leak spectrometer Mass This standard does not purport to address safety issues, if any, associated with its use. It is the is It use. its with associated any, if issues, safety address to purport not does standard This their with associated issues safety all address to purport not do Guidelines Safety and Standards SEMI Page 2 Document Number: Document Doc. Date: C

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American Society for Testing and Materials,Drive, 100 Barr forHarbor West Society Pennsylvania and Conshohocken, Testing USA. Telephone: American 19428-2959, Terminology Standards Referenced Documents and Definitions ASTM SEMI acceptance test — — test acceptance not effect. this does this performance.address mayHowever, specification affect leak variations Temperature leak — — leak — high-purity — pressure design — component

Such systems, componentssubsystems, or are and designed constructed that,if impurity introducedsuch an is into the

Unless otherwise indicated, all documents cited shall be theversions. latestpublished otherwise documents all cited be shall Unless indicated, Standard Standards a path (or paths) in a sealed system that will pass tracer gas when a pressure differential or diffusion or differential pressure a when gas tracer pass will that system sealed a in paths) (or path a s an individual piece or a complete assembly of individual pieces capable of being joined with joined being of capable pieces individual of assembly complete a or piece individual an 1 of a system, subsystem, or component used for the control of chemicals (gases or liquids), or (gases chemicals of control the for used component or subsystem, system, a of of a system or subsystem, the pressure at the most severe condition of internal and external and internal of condition severe most the at pressure the subsystem, or system a of a test conducted on each component, subsystem, or system produced. It is the basis for basis the is It produced. system or subsystem, component, each on conducted test a http://www.astm.org Page 3 Document Number: Document Doc. Date: C

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Express leak rates in in rates leak Express Inboard leak tests are easier tests to conduct to high sensitivity levels, but are typically not indicative of pressurized of indicative not typically are but levels, sensitivity high to conduct to tests easier are tests leak Inboard When testing with high-pressure 100% helium on a mass spectrometer leak detector, measured leak rates must be must rates leak measured detector, leak spectrometer mass a on helium 100% high-pressure with testing When a term indicating that a provision required norspecification.a a neither prohibitedby termthat this is indicating a term indicating that a provision is a requirement of provision thisa a term that specification. is indicating requirement a term indicating that a provision is recommended as good practice but is not a requirement of this of requirement a not is but practice good as recommended is provision a that indicating term a an assembly of two or more components manufactured as a single entity. A subsystem must be must subsystem A entity. single a as manufactured components more or two of assembly an a valve designed for, and capable of, positive closure to prevent flow within a system. a within flow prevent to closure positive of, capable and for, designed valve a leakage occurring within a component across a flow barrier, such as the seat of a closed a of seat the as such barrier, flow a across component a within occurring leakage leakage from outside to inside occurring when the internal pressure is less than the than less is pressure internal the when occurring inside to outside from leakage leakage from inside to outside occurring when the internal pressure is greater than the than greater is pressure internal the when occurring outside to inside from leakage a test conducted on samples of production articles manufactured to a single design to design single a to manufactured articles production of samples on conducted test a h auatrrs rcmedd mxmm alwbe oeaig pesr t the at pressure operating allowable maximum recommended manufacturer’s the kiloPascal-liters per second (kPa-L/sec) second per kiloPascal-liters the flow of helium at 21.1°C (70°F) and 101.3 kPa (1 atm) through a leak when the when leak a through atm) (1 kPa 101.3 and (70°F) 21.1°C at helium of flow the the rate of leakage of a given component, subsystem, or system measured under measured system or subsystem, component, given a of leakage of rate the

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Document Number: Document Doc. Date: C

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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 7.3 subsystem, or system. 7.2.2 7.2.1 7.2 c) b) a) should, a Suchpersonnel minimum: experience. as training and 7.1 7 e) d) c) b) a) 6.1 6 its manifold, source gas the includes system a specification, this of distribution piping, the gas to theequipment. process source,the controlconnection andmanifoldwithin the purpose the For functions. specific more 5.1.18 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table 1 7.4 7.3.4 7.3.3 7.3.2 7.3.1 Requirements OrderingInformation be familiar with the operation and calibration of the specific equipment used in performing the tests. in of and familiartheequipmentused specific performing the calibration operation with be bythis and methods familiarthetest specification, ASTM the use with be of referenced detectors, mass spectrometer the use in leak experienced of trained and be tests aof resultsrequired. report test oris and ofacceptance certification the qualification Whether of leakage testing systems,subsystems, and designfor pressureoutboard components. be to The used internal or being purchased.product thisthe testspecific for applicable requirements,ifspecification test any,of paragraphs and Qualification purchased. being of thistheproduct specific paragraphs andtest for requirements test specification applicable Acceptance issue. date number specification of This and Direction Outboard Test Tests — Qualifications Personnel this in with include: forservicesrequiringtesting shall specification accordance leak equipmentor Orders Leak Rate Limits Leak Internal Inboard If repairs or additions are made after the leakage tests, retest the affected portions of the component, the of portions affected the retest tests, leakage the after made are additions or repairs If with specification. each component, test subsystem,andaccordance this initialPrior in to operation, system Conduct leakage tests at a temperature between 18°C (64°F) and(78°F). 18°C 26°C tests (64°F) temperature between leakage at a Conduct pressure rating. pressure exceed not shall the manufacturer’s gas Tracer test. of portions being atested arenot Isolate that during system the examination during andfor the joints,test. welds,All exposed be including shall uninsulated,unpainted, system — — system Leak RateLimits

Conditions an integrated structure of components and subsystems capable of performing, in aggregate, one or one aggregate, in performing, of capable subsystems and components of structure integrated an Pa· 1 × × 1 × 1 × 1 m L/sec

3 /s 10 10 10 kPa - kPa -10 -10 -10 Component Personnel performing tests in accordance with this specification shall have suitable have shall specification this with accordance in tests performing Personnel a tm·cc/sec 1 × 1 × 1 × cc/sec 10 10 10 atm - -9 -9 -9 concentration by method)if probe (or 1 increase(or ppm in atmospheric Pa· 1 × × 1 Page 1 × × 1 × 1 m L/sec

3 /s 10 10 10 kPa - kPa -10 -9 -9 5 Subsystem a tm·cc/sec 1 × 1 × 1 × cc/sec 10 10 10 atm - -8 -9 -8 Pa· 1 × 1 increaseppm in atmospheric 1 × m point) L/sec 10

3 /s -10 0 kPa - kPa Document Number: Document -10 (per concentration System Doc. Date: a tm·cc/sec C

1 × 1 ×  1 ppm 1 cc/sec DRAFT SEMI 4/26/2018 10 10 atm - atm -9 -9  C

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and with the resulting fragmentation causing death or serious injury. Such components shall not be tested in a manner a in the manufacturer’s with specifications.inconsistent tested be not shall components Such injury. serious or death causing fragmentation resulting the with rupture, explosive cause could designed are they which for that than other manner a in components such of Testing 8.1.3 Such injury. systems elementshigher the beproposed of for these rated must pressure pressure. test than serious isolate or to used Valves death specifications. manufacturer’s the causing with inconsistent manner fragmentation a in tested be resulting not shall elements the with rupture, explosive cause could elements 8.1.2 test of thecomponent flow therupture. off event the in shut or of limit will that device rupture suitable a with provided and be should gas tracer pressurization of source The failure. equipment cause of event the could gas tracer of supply in personnel other and operator the protect will that shielding without performed unrestricted be not shall testing Such enclosure. an fail, to system the were of component test a if under addition, In injury. serious or death causing fragmentation resulting the with items, 8.1.1 8.1 8 and #6 #5 values by stated 100. bymultiplying the modified shall be #4 statedby100. the values multiplying #3 a as devices group.parallel #2 #1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 8.4.1 8.4 testing. theinternal piping during inboardleak of orand contamination system component 8.3 8.2.5 8.2.4 isthan 0.1µm required. 8.2.3 tothe design to pressure.nitrogen pressurize 8.2.2 8.2.1 8.2 In case that that case In atm specificationThe in Test Methods Test agree on The internal leakage specifications apply only if the test object is rated for positive closure. is for rated testobject positive only the internal if leakageapply specifications The The internal leakage specification applies to each positive closure. If positive shutoff devices are in parallel, the specification applies to the to applies specification the parallel, in are devices shutoff positive If closure. positive each to applies specification leakage internal The When new construction projects preclude measurement of outboard leakage at the leak rates specified above, the outboard leakage limits leakage outboard the above, specified rates leak the at leakage outboard of measurement preclude projects construction new When When piping systems or components employ polymeric seals, the internal and outboard leak rates specified above shall be modified by modified be shall above specified rates leak outboard and internal the seals, polymeric employ components or systems piping When Dangers Components hydrocarbon prevent to recommended is detector leak spectrometer mass helium oil-free dry, a of use The Gas — Tracer Some components may be designed for closure only in one direction or only under pressure or vacuum. or pressure under only or direction one in only closure for designed be may components Some system such of Pressurization pressurization. for designed be not may system piping a of elements Some these of rupture explosive cause could gas pressure high with components or subsystems, systems, of Testing Inboard at the outboarddesign pressure. areperformed tests and Internal at one atmosphere.Inboard areperformed tests of contaminants lessand atuse usethan point less a100ppbtotal filtered to ofwith level purity of The helium plus helium of atm) (1 kPa 101.3 gas, tracer with pressurized is object test the which in tests those For isgas, or 100% whichin sprayedtracer For thosein enclosed helium. tests theobject with test the test method the leak control with with control leak (Unless 8.4through Sections 8.6.) in specified otherwise ･ cc/sec is for convenience whocc/sec the this is users of unit. have beenusing to be usedto be more tightened criteria tightened more and and control value. is necessary due to technological development technological to due necessary is Page 6 , etc., etc., , t he user and supplier should should supplier and user he Document Number: Document Doc. Date: C

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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 8.4.3.3 8.4.3.2 by designated as the manufacturer. be shall sides outlet and Inlet side. inlet the to pressure atmospheric at gas tracer Apply detector. 8.4.3.1 8.4.3 8.4.2.3 8.4.2.2 as be shall sides outlet and Inlet side. inlet the to bythe manufacturer.designated pressure design component’s the at gas tracer Apply detector. 8.4.2.1 8.4.2 8.4.1.3 be may 8.6.1.2 Section of method leakage inboard the practical, not substituted. is technique In bagging helium. the the of dilution where minimize to instances air of well-purged sufficiently is enclosure the that Ensure component. the 8.4.1.2 segments in to integrity. enclosed total may determine envelope be helium single a in enclose to large too are that Components 6.8. Article E498, ASTM with accordance in integrity 8.4.1.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This specification. accordance this in tested with bythe purchaser be shall by the purchaser, 8.4.6.1 8.4.6 8.4.5 8.4.4.2 damage. component 5: NOTE d) c) b) a) 8.4.4.1 8.4.4 8.4.3.4 Pressurize the testPressurize the component. chamber. evacuate the chamber and the leak the vacuum to detector Connect chamber. vacuum Agas leakthecomponentof flowextendtest exterior to the tight passage must from chamber. flowInstallthe componenta andpathin through vacuum open regulators, the component. the For valves outlet the componentafitting. with integrity high of Cap the Internal–Acceptance Test Internal–Acceptance Internal–Qualification Unassembled Components Unassembled 2— Outboard–Method 1 Outboard–Method Test Time— Test — Method Reference — Tim Test Gas Pressure Tracer Gas Tracer — Method Reference Time— Test —100% helium. Gas Tracer — Method Reference Time— Test around enclosure other or bag a into helium introducing by leakage inboard total for component each Test — Method Reference Components that are assembled by the purchaser, rather than the manufacturer, or that are altered or altered thatrepaired than the or manufacturer, purchaser, are areassembled that rather Components by the

Special fixtures may be required to test components with tube stub ends to insure personnel safety and to prevent to and safety personnel insure to ends stub tube with components test to required be may fixtures Special —100% helium. Monitor the leak rate for rate the15seconds.Monitor leak Monitor the15seconds. leak for rate Monitor the15seconds. leak for rate Maintain the test condition for one minute.Maintain thecondition test one for

—Atmospheric. Test ASTM E498,Methodfollows:ASTM B, modifiedas ASTM E498, Method A. Component acceptance shall be based upon total component total upon based be shall acceptance Component A. Method E498, ASTM ASTM E 498, Method A. Connect the outlet side of the closed component to the leak the to component closed the of side outlet the Connect A. Method 498, E ASTM Same as for Method 1, except use 100% helium as the tracer gas. heliumthe tracer Same use asMethod 1,except 100% for as ASTM E498, Method A. Connect the outlet side of the closed component to leak to component closed the of side outlet the Connect A. Method E498, ASTM Page 7 Document Number: Document Doc. Date: C

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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and the subsystem from the leak detector.the from subsystem 8.5.2.3 8.5.2.2 b) a) 8.5.2.1 8.5.2 integrity.total 8.5.1.4 the leak detector.the from subsystem 8.5.1.3 substituted. leakageof method 8.6.1.2may Section practical,thebe inboard not is bagging technique the where In instances the helium. of dilution minimize to air of sufficiently well-purged enclosure is thethat Ensure 8.5.1.2 with 6.8. E498,Article accordance ASTM in integrity 8.5.1.1 8.5.1 8.5 ratings.manufacturer’s 8.4.6.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This leakage.possible 8.6.1.2 8.6.1.1 8.6.1 8.6 8.5.5.1 8.5.5 8.5.4.2 6: NOTE test. at constant pressure during the maintained 8.5.4.1 8.5.4 8.5.3 subsystem assubsystem small practicable. of portion the the valvethe to Keep evacuated the leakavailable outlet. the closest to detector point Connect pressurizetracer valvewith thegas. inlet theand shutoff Close Subsystems Systems Internal–Method 1 Internal–Method Inboard Inboard 2 Outboard–Method 1 Outboard–Method 2— Internal–Method Reference Method — Method Reference Time— Test — Method Reference in point furthest the at placed leak capillary standard a record to times actual on based be should time Test valve. subsystem of eachshutoff internalTest for leakage each — Method Reference determine to segments in tested be may envelope helium single a in enclose to large too are that Subsystems in point furthest the at placed leak capillary standard a record to times actual on based be should time Test subsystem. the around enclosure other or bag a into helium introducing by leakage inboard total for Test — Method Reference the exceed that conditions under performed be not shall purchaser the by components such of Test Test each system for total inboard leakage by spraying a small stream of tracer gas around each point of point each around gas tracer of stream small a spraying by leakage inboard total for system each Test — Method Reference

The maypressure be for portions the different different of subsystem. Monitor the15seconds. leak for rate As in Method 1, except use 100% helium as the tracer useAs Method 1,except gas. in 100%as helium the ASTM E498,MethodASTM A, modifiedas follows: ASTM E498, MethodASTM A. withprobe. probing. detector E499,MethodExamineASTM A, direct eachjoint a ASTM E498, Method A. Subsystem acceptance shall be based upon total subsystem total upon based be shall acceptance Subsystem A. Method E498, ASTM ASTM E493, Method B, modified such that the subsystem shall be prefilled and prefilled be shall subsystem the that such modified B, Method E493, ASTM Page 8 Document Number: Document Doc. Date: C

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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 10 or order applicable purchase with the accordance in specified in When tested met. been been have have requirements of report theresults test be shall furnished. a contract, furnished the and articles specification the this of that paragraphs stating purchaser the to furnished 9.1 9 probe. 8.6.4.1 8.6.4 8.6.3 leak fromdetector.subsystem the 8.6.2.3 8.6.2.2 d) c) 8.6.2.1 8.6.2 the leak detector.the from system 8.6.1.3 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 4 Fax: 610.832.9555; 610.832.9585; 3 http://www.ansi.org 42ndStreet, Office: 212.398.0023; NY202.293.9287. New New York 11West York, 212.642.4900; 10036,USA. Fax: Telephone: 2 Volume Handbook, Testing One: C.,Nondestructive Testing. Leak 2nded., ed., McMaster, Robert 10.3 Leak of GuidePreparation a for Specification Testing E479—Standard ASTM DefinitionsofTesting Leak Terms to E425—Standard ASTM Relating 10.2 and Piping PetroleumRefinery —ChemicalPlant ANSI/ASME B31.3 10.1

American Society forAmerican Nondestructive Testing, 4153Arlingate Plaza, Number Caller 28518,Columbus, OH 43228 American Society for Testing and Materials,Drive, 100 Barr forHarbor West Society Pennsylvania and Conshohocken, Testing USA. Telephone: American 19428-2959, Washington, Street, 1819L DC Institute,Headquarters: 202.293.8020; National NW, 20036,USA. Fax: Telephone: Standards American Certification subsystem assubsystem small practicable. of portion the the valvethe to Keep evacuated the leakavailable outlet. the closest to detector point Connect pressurizetracer valvewith thegas. inlet theand shutoff Close RelatedDocuments hn seiid i te prhs re r otat h auatrrs o sple’ etfcto hl be shall certification supplier’s or manufacturer’s the contract, or order purchase the in specified When Other ASTM ANSI Outboard 2— Internal–Method Internal Reference Method — — Method Reference furthest in leakpoint aat capillary the placed timestandard record beonactual to should based Test time valve. subsystem of eachshutoff internalTest for leakage each — Method Reference in point furthest the at placed leak capillary standard a record to times actual on based be should time Test

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Document Standards 2 4 3 http://www.astm.org Same as in Method 1, except use 100% helium as the tracer gas. heliumthe tracer Same asuse Method 1,except in 100% as ASTM E498,MethodASTM A, modifiedas follows: ASTM E499, Method A, Direct Probing. Each joint shall be examined with a detector a with examined be shall joint Each Probing. Direct A, Method E499, ASTM Page 9 Document Number: Document Doc. Date: C

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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, their ofown the riskresponsibility. ofsuch areentirely infringement rights and or rights patent such any of determination that advised expressly are Guideline Safety or Standard this of Users Guideline. Safety patent or Standard any this in mentioned of items any validity with connection in the asserted copyrights or respecting rights position no takes SEMI Guideline, Safety or Standard this of publication By change to subject are Guidelines Safety and notice.without Standards herein. mentioned The equipment or application. materials literature,particular any relevant respecting other any and sheets, data for product labels, product herein instructions, manufacturer’s to forth refer to set cautioned Guidelines Safety are Users user. the of and responsibility the solely is Guideline Safety or Standard the Standards of suitability the of determination the of suitability the to NOTICE: high Pa a of sensitivity10-11 (level test in gas of of during theperiod thetracer Payclosethebackgroundvalue rise to region. attention measurement measurement F1, a SEMI In in effect. described this of representative is detector leak the of signal background gas tracer the in increase An spectrometer. detector leak the to pump roughing the of port exhaust the from path reverse-diffusion a traversing gas tracer this find to uncommon not is it Therefore, room. the in gas tracer background of concentration local the increases This performed. is testing where room the throughout R1.1.1 R1.1 date]. ballot on[A&Rapproval by letter procedures full publication for approved was Information Related This Committee. Technical name] [committee global the of work NOTICE: ConsiderationMore on LeakSensitive Tests 1 RELATED INFORMATION reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Precaution Measurement More when a under Sensitive Tracer gas (helium in this case) that is released to ambient during routine lea routine during ambient to released is that case) this in (helium gas Tracer Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as representations or warranties no makes (SEMI) International Materials and Equipment Semiconductor the from derived was and number] [designation SEMI of part official an not is Information Related This an accurate leak rate cannot be measured when the background value approaches the approaches value background the when measured be cannot rate leak accurate an · m

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Leak Rate Rate isLeak RequiredSEMI than F1 Document Document Number: k testing naturally diffuses naturally testing Doc. Date: 5026 DRAFT 4/26/2018 C

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