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Nanolithography Toolbox NIST Handbook 160 Nanolithography Toolbox Krishna C. Balram, Daron A. Westly, Marcelo Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Richard J. Kasica, Christopher B. Wallin, Ian J. Gilbert, Brian A. Bryce, Gregory Simelgor, Juraj Topolancik, Nicolae Lobontiu, Yuxiang Liu, Pavel Neuzil, Vojtech Svatos, Kristen A. Dill, Neal A. Bertrand, Meredith G. Metzler, Gerald Lopez, David A. Czaplewski, Leonidas Ocola, Kartik A. Srinivasan, Samuel M. Stavis, Vladimir A. Aksyuk, J. Alexander Liddle, Slava Krylov, and B. Robert Ilic This publication is available free of charge from: http://dx.doi.org/10.6028/NIST.HB.160 NIST Handbook 160 Nanolithography Toolbox Krishna C. Balram, Daron A. Westly, Marcelo Pavel Neuzil Davanco, Karen E. Grutter, Qing Li, Thomas Brno University of Technology (BUT), Central Michels, Christopher H. Ray, Liya Yu, Richard J. European Institute of Technology (CEITEC), Kasica, Christopher B. Wallin, Ian J. Gilbert, Kristen Technicka 3058/10, CZ-616 00 Brno, Czech Republic A. Dill, Neal A. Bertrand, Kartik A. Srinivasan, Department of Microsystems, Northwestern Samuel M. Stavis, Vladimir A. Aksyuk, J. Alexander Polytechnical University, Xi’an, P.R. China Liddle, Slava Krylov, and B. Robert Ilic Vojtech Svatos Center for Nanoscale Science and Technology Brno University of Technology (BUT), Central Brian A. Bryce European Institute of Technology (CEITEC), Harvey Mudd College, Claremont, CA 91711 USA Technicka 3058/10, CZ-616 00 Brno, Czech Republic Gregory Simelgor, Meredith G. Metzler and Gerald Lopez Edico Genome, La Jolla, CA 92037 USA Quattrone Nanofabrication Facility, University of Pennsylvania, Philadelphia, PA 19104 USA Juraj Topolancik Roche Sequencing Solutions, Pleasanton, CA 94588 David A. Czaplewski and Leonidas Ocola Center for Nanoscale Materials, Argonne National Nicolae Lobontiu Laboratory, Lemont, IL 60439 USA University of Alaska, Mechanical Engineering, Anchorage, AK 99508 USA Slava Krylov Tel Aviv University, School of Mechanical Engineering, Ramat Aviv 69978 Tel Aviv, Israel This publication is available free of charge from: http://dx.doi.org/10.6028/NIST.HB.160 October 2016 U.S. Department of Commerce Penny Pritzker, Secretary National Institute of Standards and Technology Willie May, Under Secretary of Commerce for Standards and Technology and Director Nanolithography Toolbox Version 2016.10.01 Email: [email protected] This publication is available free of charge from: from: of charge free http://dx.doi.org/10.6028/NIST.HB.160 is available This publication National Institute of Standards and Technology Chapter Contents Images from various CNST projects. Platform Independent Fractals Vertex control of shapes Grayscale Image to GDS Curved geometries Scripting Polar and Hexagonal Arrays CNST Nanophotonics Library Pillar - Hole Arrays Couplers Grating Couplers Photonic Crystals Spirals Waveguides, S-Bends, Y-Bends Gratings Custom Tapers Verniers Reticle Frame Generator Arbitrary Function Generator JEOL Job File Generator Label Maker - Text To GDS JEOL Write Time Estimation 1 Contents Email: [email protected] This publication is available free of charge from: http://dx.doi.org/10.6028/NIST.HB.160 from: of charge free http://dx.doi.org/10.6028/NIST.HB.160 is available This publication 1 Nanolithography Toolbox 1 Nanolithography Toolbox 8 1.1 Overview ................................. 8 1.1.1 Terms Of Use ......................... 10 1.1.2 Disclaimer ........................... 10 1.1.3 Acknowledgements ..................... 10 1.1.4 Development Team ...................... 10 1.1.5 Future Developments .................... 11 1.1.6 Java 8 Requirements .................... 12 1.1.7 Distribution Package ..................... 12 1.1.8 Modes of Operation ..................... 12 1.1.8.1 CNST Scripting .................... 12 1.1.8.2 Graphical User Interface . 15 GDS Scripting 16 2.1 Setup, Execution and Examples .................... 16 2.1.1 Quick Start Setup ...................... 16 2.1.2 Setup - CNSTdefaultValues.xml open and save directories 17 2.1.3 Graphical User Interface Execution . 18 2.1.4 Running CNST Scripts From a Terminal Command Prompt 19 2.1.5 Running Multiple CNST Scripts - Batch File Mode . 19 2.1.6 Running CNST Scripts Within Matlab . 20 2.1.7 Python Script Generation . 21 2.1.8 NotePad++ Syntax Coloring . 22 2.1.9 Scripting Examples ...................... 23 2.1.9.1 Basic Scripting Example . 23 2.1.9.2 Scripting Example - Labeled Calibration Ruler . 24 2.1.9.3 Labeled Electrodes . 25 2.1.9.4 MEMS Comb Drive Flexures . 26 2.1.9.5 MEMS Radial Comb Drive Circular Hub . 27 2.1.9.6 Scripting Example Files Description . 28 2.2 Interface Functions ........................... 32 2.2.1 Comments ........................... 32 2.2.2 Creating Structures (Cells) . 32 2.2.3 Layer .............................. 32 2.2.4 Data Type ........................... 32 2.2.5 GDS Rendering Resolution . 32 2.2.6 Shape Resolution ....................... 33 2 Chapter 1 CONTENTS 2.2.7 Font Outline Width ...................... 33 2.2.8 Calls To Multiple CNST Script Files . 34 2.2.9 Log File Time Date Stamp . 34 2.3 Shapes .................................. 35 2.3.1 Circles and Ellipses ..................... 35 2.3.1.1 Primitive Ellipse . 35 2.3.1.2 Vectorized Ellipse . 35 2.3.2 Circle through three points . 36 This publication is available free of charge from: http://dx.doi.org/10.6028/NIST.HB.160 from: of charge free http://dx.doi.org/10.6028/NIST.HB.160 is available This publication 2.3.3 Circle With a Wave Boundary . 37 2.3.4 Cross .............................. 38 2.3.5 L-Shape ............................ 39 2.3.6 Pie Shaped Arc ........................ 40 2.3.7 Pie Shaped Arc - Vector . 40 2.3.8 Polygon ............................ 41 2.3.9 Rectangle ........................... 42 2.3.10 Rounded Rectangle ..................... 43 2.3.11 Rectangular SU-Shape . 44 2.3.12 Rectangle With a Linear Taper . 45 2.3.13 Star .............................. 46 2.3.14 Torus - Arc ........................... 47 2.3.15 Torus - Vector ......................... 47 2.3.16 Torus With a Wave boundary . 48 2.4 Arrays and Instances .......................... 49 2.4.1 Rectangular Arrays ..................... 49 2.4.2 Hexagonal Arrays ...................... 50 2.4.3 Polar Arrays .......................... 51 2.4.4 Instancing GDS Structures . 52 2.4.5 Points To Instance ...................... 53 2.4.6 Pillar-Hole Hexagonal and Square Arrays . 54 2.5 General Area Operations ....................... 56 2.5.1 Boolean Operations ..................... 56 2.5.2 General Area Copies, Shape Bias and Affine Transfor­ mations ............................ 58 2.6 Text Labels, PostScript and Logos . 60 2.6.1 Text ............................... 60 2.6.2 Text Outline .......................... 61 2.6.3 Label Maker .......................... 62 2.6.4 Label Maker - Outline Text . 64 2.6.5 PostScript to GDS ....................... 66 2.6.5.1 PostScript Pixel Value . 66 2.6.5.2 PostScript Fracturing . 66 2.6.5.3 Defining Postscript Shapes . 66 2.6.6 CNST and NIST logos .................... 68 2.7 Objects .................................. 69 2.7.1 Arc (Torus-Circle) bounded square-hex arrays . 69 2.7.2 Bezier Curve ......................... 70 NIST • CNST Nanolithography Toolbox v2016.09.01 • http://www.nist.gov/cnst/ page 3 of 488 Chapter 1 CONTENTS 2.7.3 Fractals ............................ 74 2.7.4 Function Plot ......................... 75 2.7.5 Grayscale ........................... 77 2.7.5.1 Polygons ....................... 77 2.7.5.2 Ramp ......................... 79 2.7.5.3 Spiral Staircase . 81 2.7.6 Interdigitated Electrodes . 83 2.7.7 Junctions ........................... 86 This publication is available free of charge from: http://dx.doi.org/10.6028/NIST.HB.160 from: of charge free http://dx.doi.org/10.6028/NIST.HB.160 is available This publication 2.7.7.1 T Junction ...................... 86 2.7.7.2 H Junction ...................... 87 2.7.7.3 Arrow Junction .................... 88 2.7.8 Meander Channel ...................... 89 2.7.9 Points To Shape ........................ 92 2.7.10 Polygon Along a Path .................... 93 2.7.11 Random Polygons ...................... 94 2.7.12 Random Ellipses and Vectorized Ellipses . 95 2.7.13 Resolution Test Pattern . 96 2.7.14 Spirals ............................. 99 2.7.15 Spiral - Rectangular ..................... 100 2.8 Alignment and Reticle Elements . 101 2.8.1 Alignment Marks - Predefined . 101 2.8.2 Alignment Marks - Custom . 105 2.8.3 Reticle Barcode and Label Frames . 107 2.8.4 Vernier ............................. 108 2.8.5 Vernier With Labels ..................... 109 2.8.6 Arrows ............................. 110 2.9 CNST Nanophotonics Library ..................... 111 2.9.1 Waveguides .......................... 112 2.9.1.1 Waveguide ...................... 112 2.9.1.2 Waveguide Slot . 113 2.9.1.3 Waveguide Inverse . 114 2.9.1.4 Waveguide Inverse Slot . 115 2.9.1.5 Waveguide Expander . 116 2.9.2 Tapers ............................. 117 2.9.2.1 Linear Taper ..................... 117 2.9.2.2 Linear Taper Slot . 118 2.9.2.3 Linear Taper Inverse Slot . 119 2.9.2.4 Exponential Taper . 120 2.9.2.5 Exponential Taper Inverse . 121 2.9.2.6 Exponential Taper Inverse Slot . 122 2.9.2.7 Custom Taper .................... 123 2.9.3 Couplers ............................ 124 2.9.3.1 Directional Couplers . 124 2.9.3.2 S-Bend Taper ..................... 128 2.9.3.3 S-Bend Funnel .................... 129 2.9.3.4 S-Bend ........................ 130 NIST • CNST Nanolithography Toolbox v2016.09.01 • http://www.nist.gov/cnst/ page 4 of 488 Chapter 1 CONTENTS 2.9.3.5 S-Bend Inverse .................... 131 2.9.3.6 S-Bend Inverse Slot . 132 2.9.3.7 Y-Bend ........................ 133 2.9.3.8 Y-Bend Inverse .................... 134 2.9.3.9 Y-Bend Inverse Slot . 135 2.9.3.10 Y-Bend - 90 degree . 136 2.9.3.11 Y-Bend Inverse - 90 degree . 137 2.9.3.12 Y-Bend Inverse Slot - 90 degree . 138 This publication is available free of charge from: http://dx.doi.org/10.6028/NIST.HB.160 from: of charge free http://dx.doi.org/10.6028/NIST.HB.160 is available This publication 2.9.3.13 90 Degree Bend .
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