Microlens Array Grid Estimation, Light Field Decoding, and Calibration

Total Page:16

File Type:pdf, Size:1020Kb

Microlens Array Grid Estimation, Light Field Decoding, and Calibration 1 Microlens array grid estimation, light field decoding, and calibration Maximilian Schambach and Fernando Puente Leon,´ Senior Member, IEEE Karlsruhe Institute of Technology, Institute of Industrial Information Technology Hertzstr. 16, 76187 Karlsruhe, Germany fschambach, [email protected] Abstract—We quantitatively investigate multiple algorithms lenslet images, while others perform calibration utilizing the for microlens array grid estimation for microlens array-based raw images directly [4]. In either case, this includes multiple light field cameras. Explicitly taking into account natural and non-trivial pre-processing steps, such as the detection of the mechanical vignetting effects, we propose a new method for microlens array grid estimation that outperforms the ones projected microlens (ML) centers and estimation of a regular previously discussed in the literature. To quantify the perfor- grid approximating the centers, alignment of the lenslet image mance of the algorithms, we propose an evaluation pipeline with the sensor, slicing the image into a light field and, in utilizing application-specific ray-traced white images with known the case of hexagonal MLAs, resampling the light field onto a microlens positions. Using a large dataset of synthesized white rectangular grid. These steps have a non-negligible impact on images, we thoroughly compare the performance of the different estimation algorithms. As an example, we apply our results to the quality of the decoded light field and camera calibration. the decoding and calibration of light fields taken with a Lytro Hence, a quantitative evaluation is necessary where possible. Illum camera. We observe that decoding as well as calibration Here, we will focus on the estimation of the MLA grid benefit from a more accurate, vignetting-aware grid estimation, parameters (to which we refer to as pre-calibration), which especially in peripheral subapertures of the light field. is the basis for all decoding and calibration schemes found in the literature. In spite of the importance of the pre-calibration I. INTRODUCTION pipeline, the literature focuses mostly on the camera models and decoding but pays little or no attention to the necessary Computational cameras, that is, cameras utilizing combined details emerging in the pre-calibration, most importantly non optical and digital image processing techniques, have been trivial effects such as mechanical and natural vignetting. While gaining attention both in consumer applications, such as multi- for a correct pre-calibration, the detection of the perspectively lens camera systems in mobile devices, as well as scientific projected ML centers is necessary, all methods proposed and industrial applications, such as light field cameras [1], [16] in the literature rely on estimating the center of each ML or snapshot hyperspectral cameras [2]. Computational imaging image brightness distribution, approximating the orthogonally systems can usually well be described using the so-called 4D projected centers. Due to natural and mechanical vignetting, light field L (u; v; a; b), where λ describes a wavelength, λ,t this results in severe deviations from the true projected centers, t the time, and the coordinates (u; v; a; b) correspond to a in particular in off-center MLs. This is the main scope of this certain parametrization of the spatio-angular dependency of article. In particular, our contributions are as follows: the light field of which there are numerous. For computational cameras, one usually uses the plane-plane parametrization: • We propose a camera model and ray tracer implementa- a light ray inside a camera is uniquely described by the tion to synthesize application-specific white images with intersection points u = (u; v) and a = (a; b) of two parallel known ML centers as reference data. planes, e.g. the main lens plane and the sensor plane. • We propose a new pre-calibration algorithm motivated by In particular, microlens arrays (MLAs) are used in computa- our physical camera model, taking into account natural arXiv:1912.13298v1 [eess.IV] 31 Dec 2019 tional imaging applications allowing for a complex coding (or and mechanical vignetting effects. multiplexing) scheme of the light field onto an imaging sensor. • We present detailed accuracy requirements that the pre- Most prominently, MLAs are used in compact MLA-based calibration pipeline has to fulfill and show that the light field cameras [16], [13], but also in other applications proposed algorithm, in case the of a Lytro Illum camera, such as multi- or hyperspectral imaging [19], [20]. As usual, a fulfills these requirements. We compare our algorithm to certain camera model is then used to calibrate the intrinsic (and different schemes proposed in the literature (which we extrinsic) parameters of the camera to relate the image-side to show fail the accuracy requirements). the object-side light field. The model is then evaluated, e.g. • We evaluate the full light field decoding pipeline for the by using the ray re-projection error. In most light field camera different pre-calibration algorithms for simulated as well models [7], [6], [22], [23], the calibration is performed using as real light field data. image-side light fields that have been decoded from the sensor • We investigate the influence of the quality of the pre- calibration on the full calibration of a Lytro Illum light © 2020 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, field camera for different calibration methods. including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers Since the ML grid parameters are application-specific, we or lists, or reuse of any copyrighted component of this work in other works. make the source code for a full evaluation pipeline (image 2 x y a F f p ( 1, 2) (0, 2) (1, 2) (2, 2) − c2 ( 1, 1) (0, 1) (1, 1) (2, 1) h c2 p − 2 c1 ( 1, 0) (0, 0) (1, 0) (2, 0) c1 − p z c0 x c0 dx p c 1 c 1 dy − − p c 2 c − 2 β − w Aperture Lens MLA Sensor 2 (a) (b) Figure 1. Schematic drawings of the used camera model of the unfocused plenoptic camera with exaggerated ML size. (a) A 2D section (y = 0) of the used p camera model. The coordinates c i denote the centers of the ML (which are not explicitly depicted) and their perspective projections c i. (b) The used ± ± MLA model before rotation and tilt. The ML centers cij are depicted in orange with corresponding index labels (i; j). synthesis, ML grid estimation, and decoding) freely available A. Camera model [10] to be used in scientific research for any kind of MLA- The camera model used is depicted in Fig.1. In our model, based application. This includes the release of an open source the camera consists of a main lens and a collection of MLs, Python framework for light field decoding and analysis as well arranged in a hexagonal grid, which may be rotated (not as for applications in hyperspectral imaging. Even though the depicted in the figure) and tilted. All lenses are modeled as thin following presentation relies on a light field camera in the lenses. As is usual in the focused design, f-number matching unfocused design [16], the proposed pre-calibration method is of main lens and MLs is assumed. To simulate irregularities of equally applicable to cameras in the focused design [13]. the grid, we add independent uncorrelated Gaussian noise to The remainder of this paper is organized as follows. We the ideal grid point’s x- and y-coordinates. Natural vignetting introduce the used camera model and chosen camera pa- is implemented by using the cos4 Φ law and the ray’s incident rameters in SectionII. In Section III, we review different angle Φ. Finally, an object-side aperture with variable entrance methods for the estimation of ML grids and formulate precise pupil is placed at distance a to the main lens to account for accuracy requirements which the algorithms ought to fulfill. mechanical vignetting effects. Note, that we do not model Furthermore, we introduce a new estimation method which systematic, non-rigid deformations of the MLA as considered we thoroughly motivate using the physical camera model. All in [18]. We argue that these irregularities should be eradicated estimation methods are then quantitatively evaluated. In the in the manufacturing process of high-quality MLAs as they remaining SectionsIV andV, we investigate the influence of introduce irreducible blur in the light field (on which we will the ML grid estimation accuracy on light field decoding and elaborate in Section II-B). calibration, respectively. The ideal, unrotated, untilted and unshifted ML center coordinates are given by II. CAMERA MODEL AND REFERENCE DATA 0±i ± 1 j mod 2 d 1 The pre-calibration of MLA-based cameras is usually per- 2 x cid = o + ±jd + ; (1) formed using so-called white images (WIs)—images of a ±i±j g @ y A ±i±j 0 white scene, for example taken using an optical diffuser. In order to quantitatively evaluate the performance of the 2 for (i; j) 2 N . Here, dx; dy denote the ideal grid spacing, ML grid estimation algorithms, appropriate reference data is T T og = (og;x; og;y; 0) the grid offset, and = (, , 0) the needed. Of course, real WIs, as for example provided by the 2 grid noise with variance σg . The ideal hexagonal grid is de- Lytro cameras, are unsuited since the actual ML centers are p termined by a single grid spacing d via dx = d, dy = 3 d=2, unknown. Therefore, reference data has to be synthesized. where the ML radius is given by r = d=2. The ideal grid Previously, Hog et al.
Recommended publications
  • Modeling of Microlens Arrays with Different Lens Shapes Abstract
    Modeling of Microlens Arrays with Different Lens Shapes Abstract Microlens arrays are found useful in many applications, such as imaging, wavefront sensing, light homogenizing, and so on. Due to different fabrication techniques / processes, the microlenses may appear in different shapes. In this example, microlens array with two typical lens shapes – square and round – are modeled. Because of the different apertures shapes, the focal spots are also different due to diffraction. The change of the focal spots distribution with respect to the imposed aberration in the input field is demonstrated. 2 www.LightTrans.com Modeling Task 1.24mm 4.356mm 150µm input field - wavelength 633nm How to calculate field on focal - diameter 1.5mm - uniform amplitude plane behind different types of - phase distributions microlens arrays, and how 1) no aberration does the spot distribution 2) spherical aberration ? 3) coma aberration change with the input field 4) trefoil aberration aberration? x z or x z y 3 Results x square microlens array wavefront error [휆] z round microlens array [mm] [mm] y y x [mm] x [mm] no aberration x [mm] (color saturation at 1/3 maximum) or diffraction due to square aperture diffraction due to round aperture 4 Results x square microlens array wavefront error [휆] z round microlens array [mm] [mm] y y x [mm] x [mm] spherical aberration x [mm] Fully physical-optics simulation of system containing microlens array or takes less than 10 seconds. 5 Results x square microlens array wavefront error [휆] z round microlens array [mm] [mm] y y x [mm] x [mm] coma aberration x [mm] Focal spots distribution changes with respect to the or aberration of the input field.
    [Show full text]
  • Design and Fabrication of Flexible Naked-Eye 3D Display Film Element Based on Microstructure
    micromachines Article Design and Fabrication of Flexible Naked-Eye 3D Display Film Element Based on Microstructure Axiu Cao , Li Xue, Yingfei Pang, Liwei Liu, Hui Pang, Lifang Shi * and Qiling Deng Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China; [email protected] (A.C.); [email protected] (L.X.); [email protected] (Y.P.); [email protected] (L.L.); [email protected] (H.P.); [email protected] (Q.D.) * Correspondence: [email protected]; Tel.: +86-028-8510-1178 Received: 19 November 2019; Accepted: 7 December 2019; Published: 9 December 2019 Abstract: The naked-eye three-dimensional (3D) display technology without wearing equipment is an inevitable future development trend. In this paper, the design and fabrication of a flexible naked-eye 3D display film element based on a microstructure have been proposed to achieve a high-resolution 3D display effect. The film element consists of two sets of key microstructures, namely, a microimage array (MIA) and microlens array (MLA). By establishing the basic structural model, the matching relationship between the two groups of microstructures has been studied. Based on 3D graphics software, a 3D object information acquisition model has been proposed to achieve a high-resolution MIA from different viewpoints, recording without crosstalk. In addition, lithography technology has been used to realize the fabrications of the MLA and MIA. Based on nanoimprint technology, a complete integration technology on a flexible film substrate has been formed. Finally, a flexible 3D display film element has been fabricated, which has a light weight and can be curled.
    [Show full text]
  • Scanning Confocal Microscopy with a Microlens Array
    Scanning Confocal Microscopy with A Microlens Array Antony Orth*, and Kenneth Crozier y School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA Corresponding authors: * [email protected], y [email protected] Abstract: Scanning confocal fluorescence microscopy is performed with a refractive microlens array. We simul- taneously obtain an array of 3000 20µm x 20µm images with a lateral resolution of 645nm and observe low power optical sectioning. OCIS codes: (180.0180) Microscopy; (180.1790) Confocal microscopy; (350.3950) Micro-optics High throughput fluorescence imaging of cells and tissues is an indispensable tool for biological research[1]. Even low-resolution imaging of fluorescently labelled cells can yield important information that is not resolvable in traditional flow cytometry[2]. Commercial systems typically raster scan a well plate under a microscope objective to generate a large field of view (FOV). In practice, the process of scanning and refocusing limits the speed of this approach to one FOV per second[3]. We demonstrate an imaging modality that has the potential to speed up fluorescent imaging over a large field of view, while taking advantage of the background rejection inherent in confocal imaging. Figure 1: a) Experimental setup. Inset: Microscope photograph of an 8x8 sub-section of the microlens array. Scale bar is 80µm. b) A subset of the 3000, 20µm x 20µm fields of view, each acquired by a separate microlens. Inset: Zoom-in of one field of view showing a pile of 2µm beads. The experimental geometry is shown in Figure 1. A collimated laser beam (5mW output power, λex =532nm) is focused into a focal spot array on the fluorescent sample by a refractive microlens array.
    [Show full text]
  • Focus Cue Enabled Head-Mounted Display Via Microlens Array
    Focus Cue Enabled Head-Mounted Display via Microlens Array Ryan Burke Leandra Brickson Stanford University Stanford University Electrical Engineering Department Electrical Engineering Department [email protected] [email protected] high field of view scene while still supporting focus cues. Abstract While these systems are good solutions for the A new head mounted display (HMD) is designed utilizing a vergence-accommodation conflict, they still are not as microlens array to resolve the vergence-accommodation accessible to the public as google cardboard. Our project conflict common in current HMDs. The hardware and investigates adding focus cues to the google cardboard software are examined via simulation to optimize a depth system via microlens array, eliminating the vergence and resolution tradeoff in this system to give the best -accommodation conflict. overall user experience. Ray tracing was used to design the optics so that all viewing zones were mapped to the eye to 2. Optical System Design provide focus cues. A program was also written to convert Lytro stereo pairs to a light field useable by the system. The proposed optical design of the focus cue enabled head mounted system is shown in figure 1. In this, the 1. Introduction google cardboard system is augmented by placing a microlens array (MLA) in front of the display to create a There has recently been a lot of research going into light field, which will then be projected to the virtual image developing consumer virtual reality (VR) systems aiming plane by the objective lens. In this system, the MLA will to give the user an immersive 3D experience through the create different viewing zones, which will provide depth use of head mounted displays.
    [Show full text]
  • Microlenses for Stereoscopic Image Formation
    MICROLENSES FOR STEREOSCOPIC IMAGE FORMATION R. P. Rocha, J. P. Carmo and J. H. Correia Dept. Industrial Electronics, University of Minho, Campus Azurem, 4800-058 Guimaraes, Portugal Keywords: Microlenses, Optical filters, RGB, Image sensor, Stereoscopic vision, Low-cost fabrication. Abstract: This paper presents microlenses for integration on a stereoscopic image sensor in CMOS technology for use in biomedical devices. It is intended to provide an image sensor with a stereoscopic vision. An array of microlenses potentiates stereoscopic vision and maximizes the color fidelity. An array of optical filters tuned at the primary colors will enable a multicolor usage. The material selected for fabricating the microlens was the AZ4562 positive photoresist. The reflow method applied to the photoresist allowing the fabrication of microlenses with high reproducibility. 1 INTRODUCTION stereopsis). This means that bad quality stereoscopy induces perceptual ambiguity in the viewer (Zeki, Currently, the available image sensing technology is 2004). The reason for this phenomenon is that the not yet ready for stereoscopic acquisition. The final human brain is simultaneously more sensitive but quality of the image will be improved because of the less tolerant to corrupt stereo images as well as stereoscopic vision but also due to the system’s high vertical shifts of both images, being more tolerant to resolution. Typically, two cameras are used to monoscopic images. Therefore, the brain does not achieve a two points of view (POV) perspective consent the differences between the images coming effect. But this solution presents some problems from the left and right channels that are originated mainly because the two POVs, being sufficiently from the two independent and optically unadjusted different, cause the induction of psycho-visual cameras.
    [Show full text]
  • 0.8 Um Color Pixels with Wave-Guiding Structures for Low Optical Crosstalk Image Sensors
    https://doi.org/10.2352/ISSN.2470-1173.2021.7.ISS-093 © 2021, Society for Imaging Science and Technology 0.8 um Color Pixels with Wave-Guiding Structures for Low Optical Crosstalk Image Sensors Yu-Chi Chang, Cheng-Hsuan Lin, Zong-Ru Tu, Jing-Hua Lee, Sheng Chuan Cheng, Ching-Chiang Wu, Ken Wu, H.J. Tsai VisEra Technologies Company, No12, Dusing Rd.1, Hsinchu Science Park, Taiwan Abstract development of pixel schemes. While electrical crosstalk can Low optical-crosstalk color pixel scheme with wave-guiding be largely decreased by the deep trench isolation (DTI), structures is demonstrated in a high resolution CMOS image optical crosstalk is becoming severe due to the wave nature of sensor with a 0.8um pixel pitch. The high and low refractive index light, and the effect of diffraction must be considered in the configuration provides a good confinement of light waves in array of pixels and microlenses [2-4], when their dimensions different color channels in a quad Bayer color filter array. The are comparable to the wavelength. Figure 3 shows pixel measurement result of this back-side illuminated (BSI) device schemes of Bayer CFA and quad-Bayer CFA with large exhibits a significant lower color crosstalk with enhanced SNR photodiodes and small photodiodes separately. The performance, while the better angular response and higher distribution of light field after the micro lenses is illustrated in angular selectivity of phase detection pixels also show the each scheme to show the optical crosstalk due to diffraction in suitability to a new generation of small pixels for CMOS image small pixels after the focusing of microlenses.
    [Show full text]
  • Long Working Range Light Field Microscope with Fast Scanning Multifocal Liquid Crystal Microlens Array
    Vol. 26, No. 8 | 16 Apr 2018 | OPTICS EXPRESS 10981 Long working range light field microscope with fast scanning multifocal liquid crystal microlens array 1 1 1 1 PO-YUAN HSIEH, PING-YEN CHOU, HSIU-AN LIN, CHAO-YU CHU, 1 1 1 CHENG-TING HUANG, CHUN-HO CHEN, ZONG QIN, MANUEL 2 3 1,* MARTINEZ CORRAL, BAHRAM JAVIDI, AND YI-PAI HUANG 1Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan 2Department of Optics, University of Valencia, E46100 Burjassot, Spain 3Department of Electrical and Computer Engineering, University of Connecticut, Storrs, Connecticut 06269, USA *[email protected] Abstract: The light field microscope has the potential of recording the 3D information of biological specimens in real time with a conventional light source. To further extend the depth of field to broaden its applications, in this paper, we proposed a multifocal high-resistance liquid crystal microlens array instead of the fixed microlens array. The developed multifocal liquid crystal microlens array can provide high quality point spread function in multiple focal lengths. By adjusting the focal length of the liquid crystal microlens array sequentially, the total working range of the light field microscope can be much extended. Furthermore, in our proposed system, the intermediate image was placed in the virtual image space of the microlens array, where the condition of the lenslets numerical aperture was considerably smaller. Consequently, a thin-cell-gap liquid crystal microlens array with fast response time can be implemented for time-multiplexed scanning. © 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement OCIS codes: (180.0180) Microscopy; (180.6900) Three-dimensional microscopy; (110.6880) Three-dimensional image acquisition; (230.3720) Liquid-crystal devices; References and links 1.
    [Show full text]
  • Fabrication of High Quality and Low Cost Microlenses on a Glass Substrate by Direct Printing Technique
    Fabrication of high quality and low cost microlenses on a glass substrate by direct printing technique Zhigang Zang, Xiaosheng Tang,* Xianming Liu, Xiaohua Lei, and Weiming Chen Key Laboratory of Optoelectronic Technology & Systems (Ministry of Education), Chongqing University, Chongqing 400044, China *Corresponding author: [email protected] Received 21 August 2014; revised 13 October 2014; accepted 14 October 2014; posted 22 October 2014 (Doc. ID 221452); published 13 November 2014 The fabrication of high quality and low cost microlenses on a glass substrate using a simple, rapid, and precise direct microplotting technique is shown in this paper. The fabrication method is based on the use of a microplotter system, which is significantly different from the existing inkjet, roll-to-roll printing, and reactive ion etching technology and could work with higher viscosity materials. By optimizing the param- eters of voltage, dispense time, and concentration of the polymer solution, high quality microlenses with a diameter of 20 μm could be obtained. The geometrical and optical characteristics of the microlenses are analyzed by measurement of the surface profile and the imaging properties in the near-field and far-field zones as well as the diffraction pattern. We think that the fabricated microlenses could be attractive for enhancing the light extraction efficiency of light emitting diodes. © 2014 Optical Society of America OCIS codes: (350.3950) Micro-optics; (220.3630) Lenses; (220.4000) Microstructure fabrication. http://dx.doi.org/10.1364/AO.53.007868 1. Introduction moulding [11], and a soft-lithography technique [12]. Microlenses are small lens with a diameter of less In addition, inkjet technology [13], roll-to-roll printing than 1 mm and often as small as 10 μm, which are [14], and reactive ion etching [15]havealsobeenused commonly composed of small lenses with one plane to manufacture micrometer-sized lenses.
    [Show full text]
  • 3D Holoscopic Imaging for Cultural Heritage Digitalisation
    3D Holoscopic Imaging for Cultural Heritage Digitalisation Taha Alfaqheri [email protected] Seif Allah El Mesloul Nasri [email protected] Abdul Hamid Sadka [email protected] Abstract:-The growing interest in archaeology has enabled the discovery of an immense number of cultural heritage assets and historical sites. Hence, preservation of CH through digitalisation is becoming a primordial requirement for many countries as a part of national cultural programs. However, CH digitalisation is still posing serious challenges such as cost and time-consumption. In this manuscript, 3D holoscopic (H3D) technology is applied to capture small sized CH assets. The H3D camera utilises micro lens array within a single aperture lens and typical 2D sensor to acquire 3D information. This technology allows 3D autostereoscopic visualisation with full motion parallax if convenient Microlens Array (MLA)is used on the display side. Experimental works have shown easiness and simplicity of H3D acquisition compared to existing technologies. In fact, H3D capture process took an equal time of shooting a standard 2D image. These advantages qualify H3D technology to be cost effective and time-saving technology for cultural heritage 3D digitisation. Key words: Cultural Heritage, 3D Holoscopic, Acquisition, Microlens Array. ___________________________________________*****______________________________________________ 1. Introduction: replication of light to construct a true 3D scene in space. The developed H3D camera is a single-aperture DSLR Cultural Heritage is a key factor for maintaining the camera with a transformed optical composition, where the communities‘ identity and ensuring cultural and cognitive primary added element is the micro lens array which allows communication between generations,hence the importance capturing light field from different perspectives.
    [Show full text]
  • Optical Center Estimation for Lenslet-Based Plenoptic Cameras
    Optical Center Estimation for Lenslet-based Plenoptic Cameras Wei Hu Mozhdeh Seifi Erik Reinhard Peking University Technicolor Technicolor Beijing, China Rennes, France Rennes, France [email protected] mozhde.seifi@gmail.com [email protected] Abstract—Plenoptic cameras enable a variety of novel post- radial lens distortion and field curvature. An accurate estimate processing applications, including refocusing and single-shot 3D of the optical center would help any techniques aimed at imaging. To achieve high accuracy, such applications typically correcting for these effects. In addition, the optical center require knowledge of intrinsic camera parameters. One such parameter is the location of the main lens’ optical center relative could play a role in novel light field applications such as light to the sensor, which is required for modeling radially symmetric field stitching. Here, camera rotations around the optical center optical effects. We show that estimating this parameter can be would be used to increase the size of the acquired light field achieved to an accuracy of less than half a pixel by utilising the [8]. symmetry inherent in each micro-image. Further, we show that Further, the estimation of intrinsic camera parameters is estimating this parameter separately allows all other intrinsic camera parameters to be estimated with higher accuracy than normally achieved through optimization schemes. Their ac- can be achieved using a single optimization scheme, and leads curacy and speed of convergence depend on the number of to better vignetting correction than with an inaccurate optical parameters to be optimized. We show that their accuracy may center. be improved by separately calculating the optical center using our proposed technique, leaving an optimization problem with I.
    [Show full text]
  • Microlens Arrays with Integrated Pores As a Multipattern Photomask
    APPLIED PHYSICS LETTERS 86, 201121 ͑2005͒ Microlens arrays with integrated pores as a multipattern photomask ͒ Shu Yanga Department of Materials Science and Engineering, University of Pennsylvania, 3231 Walnut Street, Philadelphia, Pennsylvania 19104 Chaitanya K. Ullal and Edwin L. Thomas Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139 ͒ Gang Chen and Joanna Aizenbergb Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974 ͑Received 17 January 2005; accepted 28 March 2005; published online 13 May 2005͒ Photolithographic masks are key components in the fabrication process of patterned substrates for various applications. Different patterns generally require different photomasks, whose total cost is high for the multilevel fabrication of three-dimensional microstructures. We developed a photomask that combines two imaging elements—microlens arrays and clear windows—in one structure. Such structures can be produced using multibeam interference lithography. We demonstrate their application as multipattern photomasks; that is, by using the same photomask and simply adjusting ͑i͒ the illumination dose, ͑ii͒ the distance between the mask and the photoresist film, and ͑iii͒ the tone of photoresist, we are able to create a variety of different microscale patterns with controlled sizes, geometries, and symmetries that originate from the lenses, clear windows, or their combination. The experimental results agree well with the light field calculations. © 2005 American Institute of Physics. ͓DOI: 10.1063/1.1926405͔ Fabrication techniques for integrated circuits often rely focused by the microlens array to transfer, for example, mac- on a patterned photoresist layer to protect underlying struc- roscopic figures on the mask into multilevel microstructures tures during etches and material depositions.
    [Show full text]
  • Fabrication of Microlens Array and Its Application: a Review Wei Yuan1,2, Li‑Hua Li1,2* , Wing‑Bun Lee1,2 and Chang‑Yuen Chan1,2
    Yuan et al. Chin. J. Mech. Eng. (2018) 31:16 https://doi.org/10.1186/s10033-018-0204-y Chinese Journal of Mechanical Engineering REVIEW Open Access Fabrication of Microlens Array and Its Application: A Review Wei Yuan1,2, Li‑Hua Li1,2* , Wing‑Bun Lee1,2 and Chang‑Yuen Chan1,2 Abstract Microlens arrays are the key component in the next generation of 3D imaging system, for it exhibits some good opti‑ cal properties such as extremely large feld of view angles, low aberration and distortion, high temporal resolution and infnite depth of feld. Although many fabrication methods or processes are proposed for manufacturing such precision component, however, those methods still need to be improved. In this review, those fabrication methods are categorized into direct and indirect method and compared in detail. Two main challenges in manufacturing microlens array are identifed: how to obtain a microlens array with good uniformity in a large area and how to pro‑ duce the microlens array on a curved surface? In order to efectively achieve control of the geometry of a microlens, indirect methods involving the use of 3D molds and replication technologies are suggested. Further development of ultraprecision machining technology is needed to reduce the surface fuctuation by considering the dynamics of machine tool in tool path planning. Finally, the challenges and opportunities of manufacturing microlens array in industry and academic research are discussed and several principle conclusions are drawn. Keywords: Microlens array, Ultraprecision machining, 3D image system, MEMS 1 Introduction crucial potential in a variety of applications in image Natural compound eyes are extensively prominent in systems, under the condition that high-resolution is not the biological optical systems of many diurnal insects always required.
    [Show full text]