Quality Precision Reliability

INFICON vacuum instrumentation and components

T h e o n e s t o p s h o p for SOLAR cell production Product Overview

Thin fi lm based PVD PE-CVD Solar panel

Crystal puller

Crystalline process Crystal ingot Etch Diffusion Laminating Solar panel

procEss prEssurE procEss prEssurE procEss prEssurE sYstEm prEssurE control control control control inFicon proDuct FamilY • Capacitance Family • Capacitance Family • Capacitance Family • Pirani Family at a GlancE • Valves & Fittings • Valves & Fittings • high accurate pressure measurement instrumentation sYstEm prEssurE sYstEm prEssurE • wide range combination gauges control control • Capacitance / Pirani / Hotion / • Capacitance / Pirani / Hotion / • high conductance valve family Cold Cathode Family Cold Cathode Family • massive variety of high quality vacuum fi ttings • Valves & Fittings • Valves & Fittings

capacitancE DiapHraGm Hotion GauGE FamilY pirani capacitancE GauGE FamilY (cDGxxxD) (BpG, BcG, HpG) comBination GauGE FamilY pirani GauGE FamilY colD catHoDE GauGE FamilY ValVEs & FittinGs

• High accurate and gas type • Triple sensor • Double sensor technology • All stainless steel measuring cell • Wide measurement range • Industrial designed valves independent • From ATM to UHV • Tungsten, Nickel or fully ceramic • Tungsten, Nickel or fully ceramic • Easy to clean • Wide variety of different drives • Excellent long term stability • Plug and play replacement sensor coated sensor coated sensor version • Excellent ignition properties • High quality fi ttings • Corrosion resistant ceramic sensor • High accurate and gas type • Optional display, setpoints independence above 10 mbar or digital interface option

2 3 Excellent Customer Support is a Commitment

INFICON provides a global network of sales and service / centers. These centers are staffed with local service and INFICON SARL INFICON AG Courtaboeuf Cedex, Orsay Balzers application experts who can assist you in choosing the best Phone: +33.1.6013.7695 Phone: +423.388.3111 E-mail: [email protected] solution for your individual product application and provide E-mail: [email protected] fast support if service is needed. INFICON GmbH INFICON Ltd. Cologne Blackburn, Lancashire Phone: +49.221.347.41321 Phone: +44.1254.678250 E-mail: [email protected] E-mail: [email protected]

USA Asia

INFICON Inc. INFICON Ltd. INFICON Co. Ltd. East Syracuse, NY Beijing Yokohama-shi, Kanagawa-ken Phone: +1.315.434.1100 Phone: +86.10.6590.0164 Phone: +81.45.471.3328 E-mail: [email protected] E-mail: [email protected] E-mail: [email protected]

INFICON Inc. INFICON Ltd. Santa Clara, CA Guangzhou, Guangdong INFICON Ltd. Phone: +1.408.361.1225 Phone: +86.20.8723.6963 Kyunggi-do E-mail: [email protected] E-mail: [email protected] Phone: +82.31.783.2942 E-mail: [email protected] INFICON Inc. INFICON Ltd. Wanchai, Hong Kong Austin, TX Phone: +852.2520.2880 INFICON PTE Ltd. Phone: +1.512.448.0488 E-mail: [email protected] Singapore E-mail: [email protected] Phone: +65.6890.6250 INFICON Ltd. E-mail: [email protected] Shanghai Phone: +86.21.6209.3094 E-mail: [email protected] INFICON Co. Ltd. Chupei City Phone: +886.3.552.5828 E-mail: [email protected]

www.inficon.com [email protected] Due to our continuing program of product improvements, specifications are subject to change without notice.

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