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Etude Des Techniques De Super-Résolution Latérale En Nanoscopie Et Développement D’Un Système Interférométrique Nano-3D Audrey Leong-Hoï

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Etude Des Techniques De Super-Résolution Latérale En Nanoscopie Et Développement D’Un Système Interférométrique Nano-3D Audrey Leong-Hoï Etude des techniques de super-résolution latérale en nanoscopie et développement d’un système interférométrique nano-3D Audrey Leong-Hoï To cite this version: Audrey Leong-Hoï. Etude des techniques de super-résolution latérale en nanoscopie et développement d’un système interférométrique nano-3D. Micro et nanotechnologies/Microélectronique. Université de Strasbourg, 2016. Français. NNT : 2016STRAD048. tel-02003485 HAL Id: tel-02003485 https://tel.archives-ouvertes.fr/tel-02003485 Submitted on 1 Feb 2019 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. UNIVERSITÉ DE STRASBOURG ÉCOLE DOCTORALE MATHEMATIQUES, SCIENCES DE L'INFORMATION ET DE L'INGENIEUR (MSII) – ED 269 LABORATOIRE DES SCIENCES DE L'INGENIEUR, DE L'INFORMATIQUE ET DE L'IMAGERIE (ICUBE UMR 7357) THÈSE présentée par : Audrey LEONG-HOI soutenue le : 2 DÉCEMBRE 2016 pour obtenir le grade de : Docteur de l’université de Strasbourg Discipline / Spécialité : Electronique, microélectronique, photonique Étude des techniques de super-résolution latérale en nanoscopie et développement d'un système interférométrique nano-3D THÈSE dirigée par : Dr. MONTGOMERY Paul Directeur de recherche, CNRS, ICube (Strasbourg) Pr. SERIO Bruno Professeur des Universités, Université Paris Ouest, LEME (Paris) RAPPORTEURS : Dr. GORECKI Christophe Directeur de recherche, CNRS, FEMTO-ST (Besançon) Pr. PICART Pascal Professeur des Universités, LAUM (Le Mans) AUTRES MEMBRES DU JURY : Pr. HAEBERLE Olivier Professeur des Universités, MIPS (Mulhouse) Dr. TWARDOWSKI Patrice Maître de conférence, Télécom Physique Strasbourg, ICube (Strasbourg) A mes parents… Remerciements Ces trois années de recherche n’auraient pas pu se réaliser sans l’aide ni le soutien de nombreuses personnes qui m’ont encouragée de près ou de loin, que ce soit par leurs conseils ou simplement par leur présence ou leur bonne humeur. En premier lieu, je tiens à exprimer ma gratitude à mon directeur de thèse, Paul Montgomery, pour avoir encadré mon travail de recherche. Je le remercie également pour tous les conseils qu’il m’a donnés, pour sa grande disponibilité ainsi que pour toutes les heures qu’il a consacrées à la relecture et à la correction de mes articles. J’ai beaucoup apprécié l’enthousiasme qu’il exprimait à chacune de mes idées et à chacun de mes résultats. Je souhaiterais évidemment remercier mon co-directeur de thèse, Bruno Serio, pour m’avoir encouragée et donné l’envie de réaliser une thèse sur la microscopie super-résolue à travers ses cours et après son encadrement lors de mon stage de fin d’étude. Je lui suis également reconnaissante pour sa disponibilité malgré la distance entre nos lieux de travail à chaque fois que j'ai sollicité son aide, ainsi que pour ses encouragements, son enthousiasme et son optimisme lors de mes premières communications internationales aux conférences SPIE Bruxelles et Munich. Mes remerciements vont également à mon co-encadrant, Patrice Twardowski, pour sa disponibilité, pour l’ambiance de travail très agréable et sa très grande ouverture d’esprit. Il va de soi que sans la très bonne ambiance présente dans l’équipe IPP, ce travail de thèse ne se serait pas déroulée de façon aussi plaisante. C’est pour cela que j’adresse mes remerciements à tous les membres de l’équipe. Je remercie plus particulièrement Camille Hairaye, Marion Gstalter, Julien Zelgowski, Rémy Claveau et Stéphane Perrin pour tout le temps que nous avons passé à discuter, pour les repas du midi et pour leurs conseils avisés. Je suis également reconnaissante envers Sylvain Lecler, Pierre Pfeiffer, Yoshitate Takakura, Manuel Flury et Wilfried Uhring pour leurs nombreux conseils, leur ouverture d’esprit ainsi que pour l’intérêt qu’ils ont manifestée pour mon travail de recherche à chaque fois que j’ai sollicité leur aide. J'exprime ma gratitude à tous les amis qui m'ont soutenue de manière concrète et également implicitement de par leur présence. Je suis plus particulièrement reconnaissante envers mes parents, ma sœur et mon frère, ainsi qu’envers la famille Dufay et Rebholtz, qui m’ont apportée tout leur soutien moral et affectif durant ces trois années. Enfin, je remercie vivement Térence Dufay pour ses nombreux conseils, son soutien affectif, sa présence et notamment pour sa patience lors de mes moments de stresse. v Résumé en anglais With the 2014 Nobel Prize for chemistry, far field fluorescent optical nanoscopy has been brought to the forefront with stimulated emission depletion microscopy (STED) and single molecule microscopy being able to reveal intra-cellular details of tens of nm. While fluorescent techniques and other labelling methods such as those using gold nanoparticles allow the imaging of specific proteins and certain structures, they are generally very invasive for living samples. There now exists a growing number of unlabelled optical nanoscopy techniques, several techniques and principles having already been developed in materials science at the beginning of the 1990's. Unlabelled superresolution and nanodetection techniques stand out in particular amongst optical nanoscopy techniques since they provide respectively real improved resolving power and unresolved nanostructure detection power without the use of invasive markers. In order to be able to better apprehend the many different optical nanoscopy techniques that exist, we recently introduced a classification scheme and underlined the difference between superresolution techniques and those using nanodetection. Nanodetection techniques can be classified into four sub-categories that make use of the contrast, phase, deconvolution or nanomarkers to achieve nanodetection. High sensitivity phase measurement using interference microscopy demonstrates how nanostructured surfaces and structures can be characterized in biomaterials, laser textured stainless steel and µm defects within thin Mylar polymer films. There are a growing number of far field optical nanoscopy techniques that do not require labelling but that are capable of resolving nanostructures below 100 nm in size or providing useful information of nanostructures down to nm and sub-nm measurement sensitivity. Among them, interference microscopy is a well-established non-invasive imaging technique for three-dimensional imaging. There are two main ways of using interference microscopy to measure samples according to whether observations are performed on the surface or inside a layer. First, coherence scanning interferometry (CSI) provides rapid, contactless measurements of surface roughness using the single fringe envelope associated with the surface. Second, full-field optical coherence tomography (FF-OCT) is another associated technique that can be used to measure the thickness and internal structures of transparent layers by detection of multiple fringe envelope signals. However, some sample characteristics such as the transparency or the high surface roughness can make structural analysis a challenge for any technique. Basic post processing methods, such as image averaging, and dark and flat corrections, can be used to improve the quality of the fringe images by increasing the signal to noise ratio. Likewise, the image contrast can be enhanced by combining images with different exposures. vii Résumé en anglais In this research project, I have developed a protocol “IMage Processing Optimization for fringe Visibility Enhancement (IMPROVE)-Protocol” using an optimized combination of image processing techniques and a new hybrid high dynamic range (HDR) technique to enable normally unmeasured features to be observed. The result is an enhancement of the signal-to-noise ratio (SNR) in images, resulting in an improvement in the lateral resolution of the system and the increase of its power of detection, enabling new sub-diffraction sized structures to be detected. The final part of my work has involved in the development of an exciting new super-resolution technique using glass microspheres under a classical microscope to be able to observe structures of a size that is inferior to the diffraction limited resolution of the system. By adding interference fringes through the microspheres, the 3D reconstruction of the nano-object is possible, resulting in an optical far field "nano-3D" system and representing an entirely new high resolution 3D microscopy technique. viii Table des matières REMERCIEMENTS......................................................................................................................... V RÉSUMÉ EN ANGLAIS ................................................................................................................. VII TABLE DES MATIERES ................................................................................................................. IX LISTE DES FIGURES .................................................................................................................. XIII LISTE DES TABLEAUX ............................................................................................................. XVII LISTE DES EQUATIONS ..........................................................................................................
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