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On Demand Available April 26 - June 30, 2021 Systems On Demand available April 26 - June 30, 2021 systems. Cr-rich samples presented faceted columns with intercolumnar pores and cauliflower-like surface morphology. The growth of the h-Cr2N Hard Coatings and Vapor Deposition Technologies phase caused a decrease of the grain sizes, and their morphology changed Room On Demand - Session B1 to pyramidal or stacked pyramids at lower duty-cycles. The transformation of the h-Cr2N to CrN leads to highly dense columnar microstructures, while PVD Coatings and Technologies the residual stresses of the coating increased with the higher duty-cycle. Keywords: HiPIMS, duty-cycle, CrxN, graded microstructure. B1-1 On Electron Heating and Ion Recycling in the High Power Impulse Magnetron Sputtering Discharge, Jon Tomas Gudmundsson ([email protected]), B1-3 New Approaches for AlCrN-Based Coatings for High Speed University of Iceland; D. Lundin, Linköping University, Sweden; M. Raadu, Applications, Markus Schenkel ([email protected]), KTH Royal Institute of Technology, Sweden; T. Petty, T. Minea, LPGP, voestalpine Eifeler Vacotec GmbH, Düsseldorf, Germany; S. Spor, Universite Paris-Sud, France; N. Brenning, KTH Royal Institute of voestalpine Eifeler Vacotec GmbH, Düsseldorf, Germany, Austria; N. Technology, Sweden Gerhards, U. Zimmermann, F. Nahif, voestalpine Eifeler Vacotec GmbH, In the past it has been assumed that the magnetron sputtering discharge is Düsseldorf, Germany maintained by the sheath acceleration of secondary electrons emitted from The CO2 debate—a global challenge requires the necessity of renewed the target, upon ion impact. This is described by the well-known Thornton investments and innovations by manufacturers and suppliers with a strong equation, which in its original form [1] is formulated to give the minimum focus on an increase of sustainability. Especially, the automotive sector required voltage to sustain the discharge. However it has been (driven by the governmentally regulated CO2 emission limit), in detail the demonstrated recently that Ohmic heating of electrons outside the trends for the e-mobility, which has reached higher levels of importance. cathode sheath is roughly of the same order as heating due to acceleration Consequently, high-performance materials and versatile material across the sheath in dc magnetron sputtering (dcMS) discharges [2]. combinations with focus on weight reduction and energy-efficient Furthermore, for the high power impulse magnetron sputtering (HiPIMS) automotive design are replacing conventional materials. The trend to a discharge we find that direct Ohmic heating of the plasma electrons is reduction of the cycle times of the production lines, leads to new found to dominate over sheath acceleration by typically an order of challenges in the application of tools, such as higher mechanical and magnitude [3]. In HiPIMS discharge a high density plasma is created by thermal loads exposure during operation. applying high power pulses at low frequency and low duty cycle to a Thus, the talk will focus on the technical possibilities to overcome these magnetron sputtering device. Here we discuss the large discharge currents challenges by the appropriate choice of coating design using the example and the discharge current composition at the target surface in HiPIMS of aluminum-chromium nitride based coatings. discharges. We discuss the role of self-sputter(SS-) recycling and working gas recycling within the discharge. We find that above a critical current B1-4 Investigation of the Influence of the Thickness of Nanolayers in 2 density Jcrit ≈ 0.2 A/cm , a combination of self-sputter recycling and working Wear-resistant Layers of Ti-TiN-(Ti,Cr,Al)N Coating on Destruction in the gas-recycling is the general case [4]. For high self-sputtering yields, the Cutting and Wear of Carbide Cutting Tools, Alexey Vereschaka discharges become dominated by SS-recycling, contain only a few energetic ([email protected]), S. Grigoriev, MSTU Stankin, Russian Federation; N. secondary electrons. For low self-sputtering yields, the discharges operated Sitnikov, National Research Nuclear University MEPhI, Russian Federation; above Jcrit are dominated by working gas recycling, and secondary electrons J. Bublikov, Ikti Ran, Russian Federation play a more important role. We explore a discharge with Al target which The paper presents the results of the investigation into the formation of develops almost pure self-sputter recycling, a discharge with Ti target that the nanolayer structure of the Ti-TiN-(Ti,Cr,Al)N coating and its influence on exhibits a mix of self-sputter recycling and working gas-recycling [5] and a the thickness of coatings, their resistance to fracture in scratch testing, and reactive Ar/O2 gas mixture where working gas-recycling is dominating [6]. the wear resistance of coated tools in turning 1045 steel. The structure of [1] J A Thornton, J. Vac. Sci. Technol. 15 (1978) 171 the coatings with the nanolayer thicknesses of 302, 160, 70, 53, 38, 24, 16, [2] N. Brenning et al., Plasma Sources Sci. Technol. 25 (2016) 065024 and 10 nm was studied using scanning electron microscopy (SEM), transmission electron microscopy (TEM), and high-resolution (HR) TEM. It is [3] C Huo et al., Plasma Sources Sci. Technol. 22 (2013) 045005 shown that the grain sizes in the nanolayers decrease to certain values with [4] N. Brenning et al. Plasma Sources Sci. Technol. 26 125003 (2017) an increase in the thickness of the nanolayers, and then, with a further [5] C. Huo et al., J. Phys. D: Appl. Phys. 50 354003 (2017). decrease in the nanolayer thickness, the grain sizes of the nanolayer grow as the interlayer interfaces cease to produce a restraining effect on the [6] J. T. Gudmundsson et al. Plasma Sources Sci. Technol. 25, 065004 growth of the grains. The study found that the nanolayer thickness (2016). influenced the wear of carbide cutting tools and the pattern of fracture for B1-2 Tailoring the Chemical Composition and Microstructure of CrxN the Ti-TiN-(Ti,Cr,Al)N coatings. Deposited by HiPIMS through Duty-cycle Modifications, Martha Cedeño- B1-5 INVITED TALK: Industrial Scale ta-C Coating Using Laser Arc Vente ([email protected]), G. Mondragón-Rodríguez, N. Technology, Wolfgang Fukarek ([email protected]), B. Camacho, A. Gómez-Ovalle, J. González-Carmona, J. Alvarado-Orozco, D. Gebhardt, VTD Vakuumtechnik Dresden GmbH, Germany; V. Weihnacht, F. Espinosa-Arbeláez , Centro de Ingeniería y Desarrollo Industrial (CIDESI), Kaulfuss, Fraunhofer IWS, Germany INVITED Mexico First reports about a Laser-initiated vacuum arc date back to 1976 /1/. The main challenge in hard coating manufacturing is developing dense, Laser ignition has many advantages particularly for pulsed high current flawless, and smooth surface morphology coatings, which improve the vacuum arcs when spatial and temporal control at high pulse repetition performance of components exposed to severe service conditions. One of rates for millions of pulses is required. This holds especially for the carbon the most promising coating techniques to achieve this goal is the High- arc which deviates markedly from metal arcs with respect to arc Power Impulse Magnetron Sputtering (HiPIMS), which produces highly movement, charge state and degree of ionization and particle generation. ionized plasmas, resulting in definite improvements on the film The carbon arc is preferentially operated at pulsed arc currents in the kA microstructure and properties. The application of pulses (50 - 500 μs) range and pulse lengths of some 100 µs. The Carbon Laser-Arc has been during the deposition process attains a high ionization rate in HiPIMS. The investigated and applied to deposition of highly tetrahedral amorphous pulse modification (e.g., duty-cycle, also known as τ) affects the current carbon films (ta-C) since the 1990th/2/. Only in recent years the Carbon density, modifying the stoichiometry and chemical composition of the Laser-Arc was introduced in mass production for coating of automotive coating; this indicates that the pulse appropriate selection is a viable and powertrain components as well as for other tribological applications and practical alternative for obtaining graded or multilayer metal nitrides at a cutting tools. In this paper we discuss different aspects of upscaling ta-C fixed gas flow, thus tailoring the coating internal stress distribution, Laser-Arc coating systems in order to increase the throughput and the total microstructure, and mechanical properties. amount of deposited carbon per batch. The importance of process stability In this work, the duty-cycle design to modify the chemistry, microstructure, for long coating runs is discussed. We also report on deviating film and residual stresses of CrxN coatings is presented and discussed. The properties that have been observed on films deposited at intermittent average current tends to increase from 2.9 to 12 % with the variation of τ high-rate deposition of ta-C. during the HiPIMS process. These process conditions lead to a significant /1/ J.E. Hirshfield, Laser-initiated vacuum arc for heavy ion sources. IEEE increment of the deposition rate and the chromium content in the CrxN Transact. Nucl. Sci. 23, 1006-1007 (1976) coating. Various crystalline phases like α-Cr, α-Cr + h-Cr2N, h-Cr2N, and h- Cr2N + c-CrN were obtained in the film, resulting in graded multilayer On Demand available April 26 - June 30, 2021 1 On Demand available April 26 - June 30, 2021 /2/ H.-J. Scheibe et al, Laser-arc: a new method for preparation of CapEx and operations costs, regulatory acceptance and quality assurance diamond-like carbon films. Surf. Coat. Technol. 47, 455-464 (1991). protocols, and applicability for both pressurized-water and boiling-water conditions. In this study we evaluate a high-throughput fabrication method B1-7 Key Importance of the Controlled Reactive HiPIMS for Low- for nanolayered Cr-based corrosion-resistant and fracture-resistant temperature Preparation of Tunable Oxynitrides and Thermochromic coatings using a high-power impulse magnetron sputtering innovation— Oxides, Jaroslav Vlček ([email protected]), J. Houška, University of West namely the IMPULSE® + Positive KickTM.
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