Nilusha Perera Thesis
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Glancing Angle Deposition of Thin Films Engineering the Nanoscale
Wiley Series in Materials for Electronic & Optoelectronic Applications Matthew M. Hawkeye Michael T. Taschuk Michael J. Brett Glancing Angle Deposition of Thin Films Engineering the Nanoscale Glancing Angle Deposition of Thin Films Wiley Series in Materials for Electronic and Optoelectronic Applications www.wiley.com/go/meoa Series Editors Professor Arthur Willoughby, University of Southampton, Southampton, UK Dr Peter Capper, SELEX Galileo Infrared Ltd, Southampton, UK Professor Safa Kasap, University of Saskatchewan, Saskatoon, Canada Published Titles Bulk Crystal Growth of Electronic, Optical and Optoelectronic Materials, Edited by P. Capper Properties of Group-IV, III–V and II–VI Semiconductors, S. Adachi Charge Transport in Disordered Solids with Applications in Electronics, Edited by S. Baranovski Optical Properties of Condensed Matter and Applications, Edited by J. Singh Thin Film Solar Cells: Fabrication, Characterization and Applications, Edited by J. Poortmans and V. Arkhipov Dielectric Films for Advanced Microelectronics, Edited by M. R. Baklanov, M. Green and K. Maex Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials, Edited by P. Capper and M. Mauk Molecular Electronics: From Principles to Practice, M. Petty CVD Diamond for Electronic Devices and Sensors, Edited by R. S. Sussmann Properties of Semiconductor Alloys: Group-IV, III–V and II–VI Semiconductors, S. Adachi Mercury Cadmium Telluride, Edited by P. Capper and J. Garland Zinc Oxide Materials for Electronic and Optoelectronic Device Applications, Edited by C. Litton, D. C. Reynolds and T. C. Collins Lead-Free Solders: Materials Reliability for Electronics, Edited by K. N. Subramanian Silicon Photonics: Fundamentals and Devices, M. Jamal Deen and P. K. Basu Nanostructured and Subwavelength Waveguides: Fundamentals and Applications, M. -
Thin Films Sectional Programme Overview THIN FILMS Prof. Dr. Bernd Rauschenbach
Thin Films Sectional Programme Overview THIN FILMS DUNNE¨ SCHICHTEN (DS) Prof. Dr. Bernd Rauschenbach (DPG) Prof. Dr. Klaus Wandelt (EPS) Leibniz-Institut f¨urOberfl¨achenmodifizierung Universit¨at Bonn Permoserstr. 15 Institut f¨urPhysikalische und Theoretische Chemie 04318 Leipzig Wegelerstr. 12 [email protected] 53115 Bonn [email protected] OVERVIEW OF INVITED TALKS AND SESSIONS (lecture rooms GER 37, GER 38) Invited Talks DS 2.1 Mon 11:15 (GER 37) Phase change materials for optical and electronic storage, Ch. Steimer, R. Detemple, H. Dieker, J. Kalb, D. Wamwangi, W. Welnic, M. Wuttig, RWTH Aachen DS 3.1 Mon 09:30 (GER 38) X-ray diffraction analysis of residual stress fields in thin films - basic aspects and applications, Ch. Genzel, Hahn-Meitner-Institut, Berlin DS 6.1 Mon 14:00 (GER 38) Direct observation of substrate-dependent organic layer growth, E. Umbach1, T. Schmidt1, A. Sch¨oll1, H. Marchetto2, H.-J. Freund2, R. Fink3, 1University of W¨urzburg, 2Fritz-Haber-Institute Berlin, 3Max-Planck-Gesellschaft, University of Erlangen DS 8.1 Tue 09:30 (GER 37) Strained silicon-transistor performance increase with new materials, M. Hecker, L. Zhu, J. Rinderknecht, H. Geisler, E. Zschech, AMD Dresden DS 11.2 Tue 11:30 (GER 38) Fluorescence from ultrathin organic films on crystalline surfaces, M. Sokolowski, Universit¨at Bonn DS 15.1 Wed 15:30 (GER 38) Nanoparticulate films of high anisotropy magnetic materials: A status quo, B. Rellinghaus, Leibniz-Institut f¨urWerkstofforschung, Dresden DS 16.1 Thu 09:30 (GER 37) Ion beam shaping of nanometals, A. Vredenberg, Utrecht University DS 18.5 Thu 10:30 (GER 38) Formation and decay of Si/Ge nanostructures at the atomic level, B. -
Perspectives on Oblique Angle Deposition of Thin Films
Progress in Materials Science 76 (2016) 59–153 Contents lists available at ScienceDirect Progress in Materials Science journal homepage: www.elsevier.com/locate/pmatsci Perspectives on oblique angle deposition of thin films: From fundamentals to devices ⇑ Angel Barranco, Ana Borras, Agustin R. Gonzalez-Elipe , Alberto Palmero Instituto de Ciencia de Materiales de Sevilla (CSIC-US), c/ Americo Vespucio 49, 41092 Seville, Spain article info abstract Article history: The oblique angle configuration has emerged as an invaluable tool Received 9 October 2014 for the deposition of nanostructured thin films. This review Received in revised form 19 May 2015 develops an up to date description of its principles, including the Accepted 12 June 2015 atomistic mechanisms governing film growth and nanostructuration Available online 28 August 2015 possibilities, as well as a comprehensive description of the applica- tions benefiting from its incorporation in actual devices. In contrast Keywords: Oblique angle deposition with other reviews on the subject, the electron beam assisted evap- Glancing angle deposition oration technique is analyzed along with other methods operating at Magnetron sputtering oblique angles, including, among others, magnetron sputtering and Electron beam evaporation pulsed laser or ion beam-assisted deposition techniques. To account Nanostructured films for the existing differences between deposition in vacuum or in the Growth modeling presence of a plasma, mechanistic simulations are critically revised, Monte Carlo discussing well-established paradigms such as the tangent or cosine Thin film devices rules, and proposing new models that explain the growth of tilted Transparent conductive oxide porous nanostructures. In the second part, we present an extensive Energy harvesting Sensors description of applications wherein oblique-angle-deposited thin Optical devices films are of relevance. -
Examing Anisotropic Optical Properties of Anatase and Rutile
Optical Properties of Anatase and RutilePhase TiO2 Nanotubes by Yun Zhang A thesis submitted in partial fulfillment of the requirements for the degree of Master of Science in Microsystems and Nanodevices Department of Electrical and Computer Engineering University of Alberta © Yun Zhang, 2017 Abstract Nanofabricated optically anisotropic uniaxial thin films with deep submicron feature sizes are emerging as potential platforms for low-loss all-dielectric meta-materials and for Dyakonov surface wave-based sub-wavelength optical confinement and guiding at interfaces with isotropic media. In this context, we fabricated anatase and rutile phased titania nanotube arrays (TNTAs) and investigated the optical properties of one such uniaxial platform, namely self-organized TNTAs grown by the bottom-up nanofabrication process of electrochemical anodization on silicon wafer substrates. Transmittance spectra measurement was used to investigate the isotropic properties of TNTAs, and refractive index was extracted from the spectra fringes. Variable angle spectroscopic ellipsometry was used to investigate the optical anisotropy in two phases of TNTAs. One phase is anatase and the other phase contains a mixture of anatase and rutile. Both kinds of TNTAs were found to have positive birefringence (n). The experimentally measured anisotropy in the refractive index of the TNTAs was compared with model-predictions of two different effective medium approximations incorporating the uniaxial geometry. The measured value of n for anatase-phase TNTAs exceeded that of bulk anatase single crystals, indicating the potential of nanostructured dielectrics to outperform dielectric crystals of the same material with respect to the magnitude of the achievable directional refractive index contrast. ii Preface The dissertation is submitted for the degree of the Master of Science at the University of Alberta.