Total Pressure Measurement

Vacuum Sensors

Display and control unit 5

Accessories Contents

Introduction Page 5-3 to 5-6

Hot Cathode Ionization Vacuum Sensorss Page 5-7 to 5-14

Cold Cathode Ionization Vacuum Sensors Page 5-15 to 5-17

Heat Loss Vacuum Sensors Page 5-18 to 5-25

Capacitance Diaphragm Sensors Page 5-26 to 5-30

Relative Pressure Sensors Page 5-31 to 5-33 5 Display and Control Units Page 5-34 to 5-39

Contamination Protection Page 5-39

Cables Page 5-40 to 5-41

5-2 www.vacom-vacuum.com Total Pressure Measurement

Introduction

For all types of vacuum applications VACOM offers reliable total pressure sensors covering a wide pressure range from atmosphere to XHV. This catalogue introduces VACOM’s own, technologically leading products that can be used out-of-the-box or adapted in a customer specific version. The following chapter provides an overview of VACOM-selected sensors for total pressure measurement as well as suitable controllers. Used to determine the absolute pressure in almost every application. For more detailed information about vacuum gauges please do not hesitate to contact our technical support team.

Measuring Principles for Total Pressure Instruments and Typical Measurement Ranges

Extreme/Ultra high vacuum High vacuum Medium/Rough vacuum

Bourdon 5

Heat loss (Pirani, Thermocouple)

Membrane (capacitance, piezo)

Wide range (ionization and heat loss)

Ionization (Hot Cathode Ionization, Cold Cathode Ionization)

Custom made (ionization, heat loss)

10-12 10-10 10-8 10-6 10-4 10-2 100 102 mbar

Pressure Units

1 Pa = 0.01 mbar = 0.0075 Torr 1 micron = 1 mTorr = 0.133 Pa = 1.33E-3 mbar 1 mbar = 100 Pa = 1 hPa = 0.75 Torr 1 psi = 6895 Pa = 69 mbar = 51.7 Torr 1 Torr = 1 mmHg = 133 Pa = 1.33 mbar 1 atm = 760 Torr = 1013 hPa = 1013 mbar = 14.7 psi

Vacuum Pressure Ranges

Pressure range Absolut pressure in mbar Molecules per cm3 Mean free path Atmosphere 1013 2,7 · 10-19 68 nm Rough Vacuum 1013 …1 1019 … 1016 0,1 … 100 µm Medium Vacuum 1 … 10-3 1016 … 1013 0,1 … 100 mm High Vacuum (HV) 10-3 … 10-7 1013 … 109 0,1 … 1000 m Ultra high Vacuum (UHV) 10-7 … 10-11 109 … 105 1 km … 104 km Extreme Ultra high Vacuum (XHV) < 10-11 < 105 > 104 km

www.vacom-vacuum.com 5-3 Total Pressure Measurement

Selection Criteria for Vacuum Gauges

Measurement Measurement Measurement Measurement range accuracy conditions results

 Measurement  Reproducibility  Process media  Display principles  Response time  Process environment  Process control  Bakeout capability  Signal transmission

5 Measurement range Which method offers an appropriate measurement range? Is one single method sufficient or is it necessary to combine different methods? Are combination gauges suitable?

Accuracy, reproducibility, and response time What accuracy does the vacuum application require? Which method offers a sufficient precision? Which reproducibility and response time of the sensor is necessary?

Composition of the measured process media Are correction factors for gas-type dependent measurements relevant/known? Is the gas composition variable?

Process and environmental conditions Which gases and conditions is the sensor exposed to? (Gas: corrosive, hazardous, oxidizing/reductive, etc.; Conditions: contaminated areas, particle-rich environment, low/high temperatures, high voltages, strong magnetic fields, electric discharges, fast pressure rise or surge pressures, etc.) Is a protection of the inlet port necessary, by means of a baffle, a valve, a bent tube etc.? Which other requirements must the sensor of choice meet? (Protection against contaminants and water; mechanical strength; climatic and geographical conditions; ionizing radiation; etc.) Is the examined gas mixture flammable? Are explosion-proof gauges required?

Bakeout capability What temperature limit is required for the gauge and the cable? Need temperature sensitive parts to be removable? Do temperature sensitive parts need to bee removable?

Display Is a pressure display required? If yes, is a an active sensor with integrated display useful or is a separate display unit needed?

Process control, data logging What type of communication interface (analog, RS232, profibus, …) is needed? How many setpoints are necessary?

Signal transmission Which type of signal (analog/digital) needs to be transmitted over which cable length and in which quality?

5-4 www.vacom-vacuum.com Total Pressure Measurement

Order information and compatibilities

Order code example:

BARION - EXTENDED - S - 0 - CF40

Product range - Product type - Characteristic - Interface2 - Size of flange BASICII, PROII, S 0 CF40 EXTENDED BARION CF40, CF16, KF16, ATMII, HV S,E,C 0, A3 KF25 VaX linkB E A3 4 VaX S1S2S3 E SBU35 BASIC, PRO, COLDION S 0 CF40 EXTENDED 5 KF16, NPT18, ANYGAS BASIC C 0 NPT14 RFM CU or 316 S 0, A KF16, G14 NPN5V or PNPV, SWITCH NPN20MA or C A SL14, VCR,14 PNP20MA CF16R, KF16, MEMBRAN 10TORR25 C A3 12, VCR8 KF25, KF16, THERM 20 or 1 S 0 NPT18 KF16, KF25, PIRANI SDM3 or 000 C 0, A, 3A NPT18, 12 COLD P C A CF40, KF40, KF25 1 S: Sensors | E: Electronics | C: Complete 2 0: none | R: RS232 | 3A: Analog + RS232 | A: Analog 3 SDM= Setpoint (S: yes, 0: no) | Display (D: yes, 0: no) | Membrane (M: yes, 0: no) 4 S 1: Slot 1 (0, A or H) | S2: Slot 2 (0, A or H) | S3: Slot 3 (0, A or H) A: Active module | H: Hot cathode sensor module | 0: free Module area

Control units - Product range - - Sensors1 - Examples - Length Old name Examples CABLE VAX BARIONBPS 3M, 5M, 10M, 15M CABLE VAX BARIONBPE 3M, 5M, 10M, 15M CABLE MVC3 BARIONBPE 3M, 5M, 10M, 15M BATL, BSL CABLE VAX LAH 3M, 5M, 10M, 15M CABLE VMG LAH 3M, 5M, 10M, 15M CABLE VAX ANYGAS 3M, 5M, 10M, 15M CABLE VMG ANYGAS 3M, 5M, 10M, 15M CABLE VAX PIRANISD0 3M, 5M, 10M, 15M SSL CABLE VMG PIRANISD0 3M, 5M, 10M, 15M SSL+Adapter CABLE VAX PIRANIS00 3M, 5M, 10M, 15M LSL CABLE VMG PIRANIS00 3M, 5M, 10M, 15M LSL+Adapter CABLE VAX MEMBRAN 3M, 5M, 10M, 15M CSL CABLE VMG MEMBRAN 3M, 5M, 10M, 15M CSL+Adapter CABLE VAX COLD 3M, 5M, 10M, 15M LSL CABLE VMG COLD 3M, 5M, 10M, 15M LSL+Adapter CABLE PIRANIC PIRANI000 3M, 5M, 10M, 15M CB421 1 BARIONBPS: BARION basic II, BARION pro II, BARION smart(F) PIRANISD0: Pirani sensors of the type SD0 BARIONBPE: BARION basic, pro, extended PIRANIS00: Piranisen sensors of the type S00 LAH: BARION atm(II), BARION HV, VaX linkB MEMBRAN: Diaphragm sensors ANYGAS: Anygas COLD: Cold PIRANI000: Pirani sensors of the type 000 www.vacom-vacuum.com 5-5 Total Pressure Measurement

Selection Criteria for Vacuum Gauges

In general, it is essential to decide if an active (also called transmitter) or a passive one should be used. The transmitter is a gauge with integrated measuring and control electronics. It provides standardized analog voltage (e.g. 0…10 V), current (e.g. 4…20 mA) or digital output signals (e.g., via RS232, Profibus DP). BARION® atm II is one example of transmitters. A passive gauge consists only of one sensor head. The power supply and data processing is provided by an external controller. The advantage of using a passive sensor is the possibility to use higher operating temperatures in applications, where bake-outs cannot be avoided. BARION® pro II is an example of the passive gauge.

An exact definition of the measured value is important since most gauges measure the absolute pressure. These sensor suit well in applications and processes dependent on the ambient pressure such as valves opening only when there is no pressure gradient.

Total pressure instruments – Made by VACOM®

As our partners you can benefit from our long-term experience. Our well established product line is distinguished through its high accuracy, robustness, safety, quality, and long life-time as well as through its user-friendliness in various industrial and research processes. 5 We are happy to customize our devices according to your specific requirements.

5-6 www.vacom-vacuum.com Product Overview

To facilitate your search for the right vacuum gauge, the sensors in this chapter are arranged according to their measurement principle. Each sensor group is introduced with a small description of the physical processes that are used for the pressure determination.

Compatibility Measurement range (10n mbar / 10n+2 Pa / 10n Torr) Control units

Sensors n= -12 -11 -10 -9 -8 -7 -6 -5 -4 -3 -2 -1 0 1 2 3 VMG CU-100 VaX linkB VaX VaX Vacuum Explorer Vacuum VaX

BARION® basic II P BARION® pro II P 5 BARION® P extended BARION® smart P

BARION® smartF P

BARION® move P

BARION® atm II A

BARION® HV A

COLDION® basic A

COLDION® pro A

COLDION® A extended

COLD A

RFM M

SWITCH A

ANYGAS A

MEMBRAN* A

PIRANI A THERM P (Thermocouple) * Membrane: There are different device version with 3/4 pressure decade reliable.

www.vacom-vacuum.com 5-7 Hot Cathode Ionization Vacuum Gauges

Measurement Principle

With decreasing absolute pressure levels it is difficult to measure the pressure as force per area unit. The force differences become so small that they are no longer resolvable. A very practical but indirect method of measuring high vacuum is the "counting" of gas particles. Thus, the particle number density n (gas density) is determined, which is proportional to the gas pressure p according to the relation p=nkT.

The idea is to ionize the gas, since ions can be easily detected with a collector electrode. Therefore, electrons are accelerated to cause collision ionizations. This is possible in a wide pressure range from medium up to extreme high vacuum, where the particles have a sufficiently high mean free path. Regarding the generation of ions, there are two different types of ionization vacuum gauges:

 Hot cathode: Thermal emission from a hot cathode generates electrons. Those leave the filament because their thermal energy is higher than the characteristic work function of the filament material (or coating).

 Alternative method: Gas discharge in a cold cathode, see section cold cathode ionization vacuum gauges.

The electron emission from the cathode is restricted to a constant current Ie, e.g. 1 mA. The cathode is brought to a temperature of 1500° C releasing several watt of electrical power in form of heat. This heat causes electrons to leave the metal. The electrons accelerate to an anode grid where most electrons pass through and ionize the gas inside the grid (Fig. 2). The ions are directed towards the 5 collector and neutralized there. The neutralization generates a current Ic, which can be measured. The collector current is proportional to the particle number density, hence to the pressure (Fig. 3). The fundamental equation for hot cathode gauges is

p = Ic / (Ie x S)

with S describing the sensitivity of the gauge (i.e. the ion detection rate). It has to be taken into account that the sensitivity depends on the gas composition as well, due to the different ionization probabilities for different chemical species.

Fig. 1: Functional principle of a hot cathode gauge Fig. 1: Typical Ic(p) curve of a hot cathode gauge

www.vacom-vacuum.com 5-8 Hot Cathode Ionization Vacuum Gauges

Physical Effects, Limiting Factors

The pressure range of a hot cathode, where the pressure is proportional to the collector current, is limited. Depending on the design of the gauge the upper limit varies between 0.1 mbar and 10-4 mbar (Fig. 3). This constraint is imposed by space-charge effects and a small mean free path of the electrons. The lower limit ranges between 10-8 mbar and 10-13 mbar, since the collector current contains a residual component which cannot be totally eliminated. The residual current sums up the contribution from various effects (Fig. 4). The so called x-ray limit is generally used as a synonym for the residual current in hot-cathode pressure gauges (Fig. 3).

Contributions to the collector current:

Measurement 1. Gas phase ion current. (The current is proportional to the particle-number density, hence to the pressure.)

5 Error effects (not proportional to pressure) 2. X-ray effect (Bremsstrahlung from an electron impact on the anode with following photoemission at the collector)

3. Electron stimulated desorption (ESD) from particles at the anode (local pressure increase)

4. Outgassing of heated sensor parts (local pressure increase)

5. Inverse x-ray effect (Bremsstrahlung generated by electron bombardment of the anode; following photoemission of electrons from the outer wall; electron absorption at the collector, i.e. inverse to the x-ray effect)

Fig. 3: Physical effects in a hot cathode (schematic, plan view with cylindrical anode grid)

Application

Hot cathode gauges are available in various designs (see below). They offer high stability, accuracy, and reproducibility. However, the sensitivity is influenced by several factors:

 their changes which affect the electron trajectories (e.g. external magnetic fields, geometrical changes of the electrodes or the surrounding wall – especially for nude gauges);

 contamination of electrodes, e.g. by material from the vacuum system

 gas type (specific ionization probabilities can be considered with a gas type correction factor).

The lower range of hot cathode gauges is limited by the residual current. Therefore, the measurement has an increasingly large uncertainty if the pressure is smaller than 3 to 4 times the x-ray limit (Fig. 3).

The life time of the hot cathode gauge is usually limited by the contamination from the vacuum system or by the depletion of the filament coating layer. For coating applications it is recommended to use a baffle in order to slow down the contamination process. Under harsh industrial conditions (e.g. sputtering processes at relatively high pressures), problematic glow discharges or electric flashovers between the electrodes can occur. In those cases, grids or baffles help to protect the sensor from charge carriers and electromagnetic fields.

The established iridium-cathodes with yttrium oxide coating are stable in oxygen environments (air intrusion) and demonstrate a very high life time. Most hot cathode gauges have a second cathode, in case the first one breaks down.

5-9 www.vacom-vacuum.com Hot Cathode Ionization Vacuum Gauges

Types of Hot Cathode Gauges

Ionic Bayard-Alpert (BA) collector 0 V Since 1950, gauges are built according to the BA principle with various designs: with a stainless steel case (advantage: stable Cathode sensitivity); as a nude gauge and as a glass gauge (traditional (Filaments) design, has hardly been used in the past). +30 V Anode grid X-ray limit: between 3E-11 and 1E-9 mbar +180 V Upper limit: between 1E-2 and 0.1 mbar

Fig. 4: Bayard-Alpert hot cathode gauge

Bayard-Alpert sensor with X-ray effect compensation (BARION® extended) The innovative design of the Bayard-Alpert gauge reduces the residual current by two orders of magnitude. This is achieved by controlled use of negative x-ray effects and optimized outgassing properties.

Lower limit: 5E-12 mbar Upper limit: 1E-2 mbar.

www.vacom-vacuum.com 5-10 Hot Cathode Ionization Vacuum Sensors

BARION basic II / pro II

Passive Hot Cathode Sensor

Excellent accuracy and reproducibility Low heat input < 6W Replaceable filaments Technical data Measurement principle hot cathode ionization (Bayard-Alpert) Measurement range 1E-9...1 Pa | 1E-11...1E-2 mbar | 7.5E-12...7.5E-3 Torr Accuracy BARION® basic II:± 20 % (1e-8...1e-2 mbar) BARION® proc II:± 10 % (1e-8...1e-2 mbar) Reproducibility BARION® basic II:± 10 % (1e-8...1e-2 mbar) BARION® pro II:± 5 % (1e-8...1e-2 mbar) Gas dependent pressure display yes 5 Vacuum connection DN40CF txtAbstand Bakeout temperature 200°C (in operation with VaX and cable) 150°C at chamber flange (in operation with VaX linkB) Operating temperature 200 °C (in operation with VaX and cable) 50 °C (in operation with VaX linkB) Filaments 2 x yttria coated iridium Materials in vacuum BARION basic II: SS, W, Au, Y2O3 on Ir, glass, Ag BARION pro II: SS, W, Au, Y2O3 on Ir, glass, Ag, CU Weight BARION® basic II:0.3 kg BARION® pro II:1 kg (flange dependent) Mounting position any Electrical connector VACOM special plug (11 pins) Dimensions BARION® basic II:D x H: 70 x 70 BARION® pro II:D x H: 70 x 91 Scope of delivery sensor txtAbstand Compatible with Display and control units VaX Vacuum Explorer, VaX linkB Gauge cable CABLE-VAX-BARIONBPS-X (X: cable lenght in m)

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par BARION-BASICII-S-0-CF40 BARION® basic II BARION-PROII-S-0-CF40 BARION® pro II

Accessories

txtAbstand Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par BARION-FILAMENT-SINGLE replacement filament for BARION®

5-11 www.vacom-vacuum.com Hot Cathode Ionization Vacuum Sensors

BARION extended

Passive sensor, medium vacuum to UHV

Low heat input < 6W Excellent reproducibility BARION^® extended: Extended measurement range down to 5E-12 mbar Technical data Measurement range BARION® extended: 5E-10... 1 Pa | 5E-12…1E-2 mbar | 3.7E- 12...7.5E-3 Torr Measurement principles hot cathode ionization (Bayard-Alpert) Accuracy ± 10 % of reading (1E-8…1E-2 mbar) Reproducibility ± 5 % of reading (1E-8…1E-3 mbar) Vacuum connection DN40CF txtAbstand Bakeout temperature max. 400 °C (without cable) Filaments (cathodes) 2 x yttria coated iridium 5 Materials in vacuum BARION® extended: stainless steel, W, Au, Y2O3 on Ir, glass ceramics, Ag-coated Cu, Mo Scope of delivery sensor, manual

Compatible with Display and control units MVC-3 B0/BM Gauge cable BATLX (X: cable lenght in m)

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par txtAbstand BARION-EXTENDED-S-0-CF40 BARION® extended

Accessories

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par FILAMENT-BARION dual replacement filament, V form, CU40 gasket

txtAbstand

www.vacom-vacuum.com 5-12 Hot Cathode Ionization Vacuum Sensors

BARION® smart / smartF

Passive wide range sensor (hot cathode and Pirani)

Innovative in-situ bakeable wide range sensor Transducer (VaX linkB) or conventional cable usage (VaX) possible Low heat load < 6 W Technical data Measurement principle hot cathode ionization (Bayard-Alpert) & heat conduction (Pirani) Measurement range 1e-9...1e5 Pa | 1e-11...1000 mbar | 7.5e-12...750 Torr Accuracy ± 10 % (1e-8...1e-2 mbar ± 25 % (1e-2...10 mbar & for 25°C at flange) Reproducibility ± 5 % of reading (1e-8...1e-2 mbar) Gas-type dependent pressure yes display 5 Vacuum connection BARION® smartF: DN40CF BARION® smart: KF16 / KF 25 / CF40 txtAbstand Bakeout temperature 200°C (in operation with VaX + cable) 150°C at chamber flange (in operation with VaX linkB) Operating temperature 200°C (in operation with VaX + cable) 50°C (in operation with VaX linkB) Filaments BARION® smartF: 2x yttria coated iridium (replaceable) BARION smart: 2x yttria coated iridium (non replaceable) Materials in vacuum SS, W, Au, Y2O3 on Ir, glass, Ag, Pt, CU Weight BARION smartF: 1 kg BARION smart: ca. 0.5 kg (flange dependent) Mounting position any for < 10 mbar, position-dependent for > 10 mbar (see manual) Electrical connector VACOM special plug (11 pins) Mounting position any Dimensions BARION® smartF: D x H: 70 x 91 BARION smart: D x H: max. 70 x 97 (flange dependent) txtAbstand Scope of delivery sensor

Compatible with Display and control unit VaX Vacuum Explorer, VaX linkB Gauge cable CABLE-VAX-BARIONBPS-X (X: cable lenght in m)

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par BARION-SMARTF-S-0-CF40 BARION® smartF, DN40CF BARION-SMART-S-0-KF16 BARION® smart, DN16KF BARION-SMART-S-0-KF25 BARION® smart, DN25KF BARION® smart, DN40CF txtAbstand BARION-SMART-S-0-CF40

Accessories

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par BARION-FILAMENT-SINGLE Ersatzfilament für BARION®

5-13 www.vacom-vacuum.com Hot Cathode Ionization Vacuum Sensors

BARION HV / atm II

Hot Cathode (HV) and Pirani (atm) sensors with on top electronics

Excellent reliability (accuracy and reproducibility) in prozess releted pressure range 1e-8...10 mbar Easy usability and maintenance because of intelligent safety precautions and plug`n play replacements Robust standard Bayard-Alpert design with low outer dimensions Technical data Measurement principle BARION® HV: hot cathode ionization (Bayard-Alpert) BARION® atm II: hot cathode ionization (Bayard-Alpert) & heat conduction (Pirani) Measurement range BARION® HV: 5E-8...1 Pa | 5E-10...1E-2 mbar | 3.75E-10...7.5E-3 Torr BARION® atm II: 5e-8...1e5 Pa | 5e-10...1000 mbar | 3.75e-10...750 Torr 5 Accuracy BARION® HV: ± 10 % (1e-8 ... 1e-2 mbar) BARION® atm II: ± 10 % (1e-8 ... 1e-2 mbar) txtAbstand ± 25 % (1e-2 ... 10 mbar) Reproducibility ± 5 % (1 · 10-8 to 1 · 10-2 mbar) Gas dependent pressure display yes Vacuum connection KF16 / KF 25 / CF41 Bakeout temperature 150°C at chamber flange Operating temperature 10…50°C Filaments 2x yttria coated iridium (not replacable) txtAbstand Materials in vacuum BARION® HV: SS, W, Au, Y2O3 auf Ir, glass, Ag, CU BARION® atm II: SS, W, Au, Y2O3 auf Ir, glass, Ag, Pt, CU Weight ca. 570 g (flange dependent) Mounting position any for < 10 mbar, position-dependent for > 10 mbar (see manual) Dimensions 122x73x66 mm (WxHxD) Voltage supply 24 V +/-10%, 24 W Interfaces data I/O: D-Sub, 9 pin (female) with RS232, analog (0…10 V, 0…20 mA, 4…20 mA) Type of protection IP 40 Set points 1x relais (floating, max. 30 V/0.5 A 1x open collector (OC) (max. 30 V/ 0.5 A) Scope of delivery sensor, plug power supply Accompanying software VACOM Vacuum measurement & Demonstration program (VVD) txtAbstand Compatible Display and control unit VaX Vacuum Explorer, VMG Cable CABLE-VAX-LAH-X, CABLE-VMG-LAH-X (X: cable lenght in m)

Order code Vacuum connectionTravelLengthlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par length [mm] [mm] BARION-HV-C-3A-KF16 DN16KF BARION-HV-C-3A-KF25 DN25KF BARION-HV-C-3A-CF40 DN40CF BARION-ATMII-C-3A-KF16 DN16KF BARION-ATMII-C-3A-KF25 DN25KF BARION-ATMII-C-3A-CF40 DN40CF

Replacement sensor/ - electronics

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par BARION-HV-S-X X = flange: KF16 / KF 25 / CF40 BARION-ATMII-S-X X = flange: KF16 / KF 25 / CF40 BARION-HV-E-3A BARION-ATMII-E-3A

5-14 www.vacom-vacuum.com Cold Cathode Ionization Vacuum Gauges

Measurement Principle

Determination of the particle-number density of a gas through gas discharge

In a cold cathode, the gas is ionized by collisions with electrons in the measurement volume, moving in crossed electric and magnetic fields in spiral paths. If a high voltage potential is applied between cathode and anode, all charged particles are accelerated towards the the corresponding electrode. During this process, other molecules can be ionized through inelastic collisions and secondary electrons can be generated. The accelerated particles initiate the gas discharge. The ionization of the residual gas is mainly achieved via electron ionization. Therefore, it is important to preserve those electrons in order to increase the ionization probability and to assure the discharge as long as possible, especially at low pressures. This is achieved with the additional external magnetic field.

As shown in figure 8, a Penning cell contains two parallel cathodes with a ring anode between them. A strong permanent magnet encloses the cell. The magnetic field lines point perpendicular to the electric field vector and have typical strength of 100 up to 200 mT. The voltage difference between the cathodes and the anode is around 2 kV. In this configuration the potential energy surface reaches a saddle point in the middle of the anode ring, where all electrostatic forces are nearly cancelled out. Electrons are emitted from the cathode and accelerate towards the ring anode. As soon as one component of the velocity vector is perpendicular to the magnetic field, the Lorentz force holds the electron on a spiral trajectory inside the anode, where the ionization occurs. 5

Cathodes

Anode ring S

Fig. 8: Schematic sketch of a cold cathode gauge (Penning type).

Positive charged ions follow the electric field to the cathode. The impact of the ions generates a discharge current that can be measured. Ions are influenced by the magnetic field only slightly because of their high mass as compared to electrons. The correlation between the pressure and the discharge current is described by p=const·Im, where m varies between 1 and 1.4 depending on the design of the gauge. Hence, the discharge current is proportional to the pressure over a wide range. The ionization energy and the ionization probability are typically different for different atoms and molecules. Therefore, pressure measurement with cold cathodes is gas-type dependent.

Typically, cold cathodes are used for pressure ranges below 10-3 mbar. Starting with this pressure the mean free path length is sufficient to keep the recombination probability low and the power needed for their operation reasonable. The lower pressure limit is given by the smallest detectable ion current, which is typically reached if the pressure drops to 10-11 mbar. Another physical bound- ary is the ceasing of the plasma-discharge in the cell, which can be to some extent prevented by improving the sensor geometry. Another type of cold-cathode ionization vacuum gauges, are magnetrons or inverted magnetrons. For more detailed descriptions of their principle the reader is referred to the literature, however, the physical principle of their operation is similar to the Penning cell.

5-15 www.vacom-vacuum.com Cold Cathode Ionization Vacuum Sensors

COLDION® basic/pro/extended

Passive Sensor, COLDION®

Reliable and long-term stable pressure measurement Very short ignition times even in extreme high vacuum Extremely low magnetic field Technical data Measurement range COLDION® basic: 1E-7...0.01 Pa | 1E-9...1E-4 mbar | 7.5E-10…7.5E-5 Torr COLDION® pro: 1E-9...0.01 Pa | 1E-11...1E-4 mbar | 7.5E-12…7.5E-5 Torr COLDION® extended: 5E-10 ...0,01 Pa | 5E-12...1E-4 mbar | 3.8E-12…7.5E-5 Torr Measurement principle Penning discharge 5 Accuracy 30 % of reading Voltage in operation Max. 5 kV txtAbstand Power consumption Max. 200 µA Power consumption Max. 1.25 W Materials in vacuum stainless steel, Al, Al2O3, Zr Vacuum connection DN40CF Ignition time 1 < 10 s at p > 5E-9 mbar Operating temperature basic: 0...80 °C, pro/extended: 0...200 °C Bakeout temperature basic: temporary 165 °C pro/extended: max. 200 °C in operation / with cable connected max. 250 °C without high voltage cable at gauge max. 400 °C without iron yoke, magnets and HV-cable Weight 2,5 kg Scope of delivery sensor, manual

Compatible with Display and control units COLDION® CU-100

Order code Description TravelLengthlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par length [mm] [mm] COLDION-BASIC-S-0-CF40 cold cathode for high vacuum COLDION-PRO-S-0-CF40 cold cathode for high vacuum COLDION-EXTENDED-S-0-CF40 cold cathode for extrem high vacuum

txtAbstand Compatible displaystxtAbstand and controllers

5-16 www.vacom-vacuum.com Cold Cathode Ionization Vacuum Sensors

Inverted Magnetron / Pirani

Wide Range Sensor consisting of cold cathode and Pirani

Simple wide range sensor for continous measurement between atmosphere and UHV Permanent pressure monitoring with the Pirani sensor

Technical data Measurement range 5E-7...1E+5 Pa | 5E-9…1000 mbar | 3.8E-9…750 Torr Measurement principles cold cathode ionization (inverted Magnetron); heat loss (Pirani) Accuracy ± 30 % of reading(1E-8...100 mbar) Reproducibility ± 5 % of reading (1E-8...100 mbar) Analog outputs log-linear, 0…10.5 V, 0.6 V / pressure decade Temperature range (operation) 5…55 °C txtAbstand Bakeout temperature max. 150 °C (without electronics and magnet) Mounting position any 5 Ionization sensor auto on/off on (< 1E-2 mbar), off (> 1E-2 mbar) Heat loss vacuum sensor tungsten, constantly active Materials in vacuum stainless steel, ceramics, FKM 75, Mo, Ni, Au, W Protection category IP 40 Power supply 15…30 V DC (< 2 W) Electrical connectors RJ45 (DC in, analog out, status) Scope of delivery sensor

Compatible with Display and control units VaX Vacuum Explorer, VMG txtAbstand Gauge cable CABLE-VAX-COLD-X,CABLE-VMG-COLD-X (X: Kabellänge in m) Compatible displaystxtAbstand and controllers Order code Description Vacuum connectionTravellbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par length [mm] COLD-P-C-A-KF25 Inv. Magnetron + Pirani DN25KF COLD-P-C-A-KF40 Inv. Magnetron + Pirani DN40KF COLD-P-C-A-CF40 Inv. Magnetron + Pirani DN40CF

www.vacom-vacuum.com 5-17 Heat Loss Vacuum Gauges

Measurement Principle

Use the pressure-dependent heat transfer properties of the gas for the pressure measurement

Heat conduction is another characteristic feature of gases which is closely related to the particle density. The thermal energy is transferred by molecule collisions. The efficiency of the transfer depends on the mean free path length of the particles. At a certain pressure range, the thermal conductivity is proportional to the pressure, but disturbing effects such as heat flow, thermal radiation, heat conduction from the contacts, etc. are to be expected.

≈ 400 K

5 Heat loss

Fig. 10: Cut through a Pirani vacuum gauge

The basic concept of a Pirani vacuum gauge relies on a thin wire (Fig. 10) heated to a constant temperature, which is significantly higher than the temperature of the surrounding gas in the vacuum. The wire (typical diameter: 5 - 25 µm; length between 50 and 100 mm) transfers the heat to the gas and is simultaneously part of an electrical circuit, for example of a Wheatstone bridge. The pressure dependent temperature can be derived from the monitored wire resistance. The actual parameter (the electric power that is required for the temperature stabilization) is pressure-dependent due to the proportionality of the thermal conductivity of a gas to the pressure.

With a Wheatstone bridge, which is used for temperature stabilization, the difference between the heater voltage and a defined reference voltage can be measured at the same time. The difference between the actual and the reference voltage is adjusted to zero at a pressure value, where heat conduction does not play a role anymore. This calibration mainly eliminates the unwanted effects of heat radiation and thermal conduction at connector pins of the wire. In general, the reference voltage corresponds with the heating voltage that has to be applied when the pressure in the system is far below the lower measuring limit.

Advantages of the Pirani vacuum gauge are the wide measuring range from 10-4 mbar up to atmospheric pressure, as well as the high accuracy of ±10 % in a range below 1 mbar.

www.vacom-vacuum.com 5-18 Heat Loss Vacuum Gauges

Measurement Principle

Since the thermal conductivity of a gas is also a function of the average speed of the molecules and thus a function of the molar mass of the gas, thermal conductivity vacuum gauges measure the pressure dependent on the gas type. Therefore, the display is usually calibrated for nitrogen and air. Other gases like argon or helium will lead to a pressure reading significantly different from the real pressure (Fig. 11). For example, chamber venting with argon can generate a slight overpressure in the chamber which cannot be displayed by a Pirani gauge.

Fig. 11: Pressure display of a Pirani vacuum gauge with various gas types.

Furthermore, it is essential to ensure the installation of the vacuum gauge in the correct mounting position and to follow the manufacturer's instructions. The reason for this is that in pressure ranges is 10 mbar gas convection increases and the movement is influenced by gravitational forces. Figure 12 schematically shows the displayed pressure for different installation positions of the Pirani sensor. Improvements in accuracy in the range of 500-1300 mbar are obtained with convection Pirani sensors in which the housing wall temperature is also measured in a similar way as the Pirani filament. This compensates not only the variations in the heat loss caused by varying conditions; it also improves the accuracy up to 2 % via the regulation of the convection and the defined mounting position.

Fig. 12: The influence of the mounting position on the measuring signal in the convection range

Low-priced versions of heat-loss vacuum gauges are thermocouples. Those heat the wire with a constant power and determine its temperature. An advantage of this setup is the simple design. However, thermocouples are limited in their measuring range and their accuracy.

5-19 www.vacom-vacuum.com Heat Loss Vacuum Sensors

Passive Convection-Enhanced Pirani Sensor

Passive gauge with convection enhancement (depending on position), ATM to medium vacuum

Improved accuracy compared to standard Pirani sensors due to convection enhancement and improved temperature compensation Short response time Replaceable without previous calibration

Technical data Measurement range 1,3E-2...1,33E5 Pa | 1,33E-4...1333 mbar | 1E-4...1000 Torr txtAbstand Measurement principles heat loss (Pirani) convection enhanced Accuracy (typically) ± 2 % of reading (500...1000 mbar) ± 10 % of reading (1E-3...500 mbar) Temperature range (operation) 0...50 °C Bakeout temperature max. 150 °C (without cable) 5 Mounting position horizontal (recommended) Heat loss vacuum sensor gold plated tungsten wire Materials in vacuum Au on W, stainless steel, glass, Ni, PTFE Housing stainless steel with plastic housing txtAbstand Electrical connectors special plug connector Compatible displaystxtAbstand and controllers Scope of delivery sensor

Compatible with Gauge cable see control units

Order code Vacuum connection TravelHlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par length [mm] PIRANI-000-S-0-NPT18 1/8” NPT / 1/2” tube 25.4 PIRANI-000-S-0-KF16 DN16KF 33 PIRANI-000-S-0-KF25 DN25KF 33 PIRANI-000-S-0-CF16 DN16CF 27.4 PIRANI-000-S-0-CF40 DN40CF 21.6

Accessories

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par CK431-01 mating connector for PIRANI-000-S without cable

5-20 www.vacom-vacuum.com Heat Loss Vacuum Sensors

Active Convection-Enhanced Pirani Sensor

Active gauge with convection enhancement (depending on position), ATM to medium vacuum, analog output, digital display, setpoint

Improved accuracy to standard Pirani sensors due to convection enhancement and temperature compensation Short response time Set point und adjustment programmable

Technical data txtAbstand Measurement range 1,3E-2...1,33E5 Pa | 1,33E-4...1333 mbar | 1E-4...1000 Torr Measurement principles heat loss (Pirani) convection enhanced Resolution 0.01 Pa | 1E-4 mbar | 1E-4 Torr Accuracy (typically) ± 2 % of reading (500...1000 mbar) ± 10 % of reading (1E-3...500 mbar) Units bar / mbar (torr version on request) 5 Display LED, 2- to 3-digit, red Analog outputs a) non-linear 0.375...5.659 V, or b) log-linear 1...8 V (1 V / pressure decade) Process control relais 1 relais (SPDT), 30 V DC / 1 A txtAbstand Temperature range (operation) 0...40 °C Bakeout temperature max. 70 °C Mounting position horizontal (recommended) Heat loss vacuum sensor gold plated tungsten wire Materials in vacuum Au on W, stainless steel, glass, Ni, PTFE Housing stainless steel with plastic housing Power supply 11...30 V DC (< 5 W) Electrical connectors SUB-D 9 pin (DC in, analog out, relais, relais disable) Scope of delivery sensor

Compatible with Display and control units VaX Vacuum Explorer, VMG Gauge cable CABLE-VAX-PIRANI-SD0-X, CABLE-VMG-PIRANI-SD0-X txtAbstand (X: cable lenght in m) Compatible displaystxtAbstand and controllers Order code Vacuum connection Analog output lbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH PIRANI-SD0-C-A-KF16 DN16KF log-linear 33 PIRANI-SD0-C-A-CF16 DN16CF log-linear 37

Accessories

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par SUPPLY-PIRANI-SD0 Power supply 100-230 V AC (EU)/ 12 V DC (D-Sub 9) BATTERY-PIRANI-SD battery adapter for 2 x 9 V block (D-Sub 9 pin.)

www.vacom-vacuum.com 5-21 Heat Loss Vacuum Sensors

Active Convection-Enhanced Pirani Sensor

Active gauge with convection enhancement (depending on position), ATM to medium vacuum, analog output, digital display, serial setpoints

Detachable electronics, replaceable sensor tube Analog output configurable

Technical data Measurement range 1,3E-2...1,33E5 Pa | 1,33E-4...1333 mbar | 1E-4...1000 Torr Measurement principles heat loss (Pirani) convection enhanced Resolution 0.01 Pa | 1E-4 mbar | 1E-4 Torr Accuracy (typically) ± 2 % of reading (500...1000 mbar) ± 10 % of reading (1E-3...500 mbar) Units Pa, mbar, Torr (adjustable) 5 txtAbstand Display graphic LCD (illuminated), 2 to 4 digits Analog outputs adjustable: non-linear 0.375...5.659 V linear 0...10 V (scaleable) log-linear 1...8 V (1 V / pressure decade) Process control relais 2 relais (SPDT), 30 V DC / 1 A Operating elements 4 front keys Interfaces RS232 and RS485 Temperature range (operation) 0...40 °C Bakeout temperature max. 150 °C (with dismantled electronics) Mounting position horizontal (recommended) Heat loss vacuum sensor gold plated tungsten wire Materials in vacuum Au on W, stainless steel, glass, Ni, PTFE (polyimide instead PTFE txtAbstand on request) Power supply 11...30 V DC (< 5 W) Electrical connectors SUB-D 9-pin (DC in, analog1+2, relay1, relay disable), SUB-D 15-pin (DC in, analog1, relay1+2, relay disable, RS232, RS485) Scope of delivery sensor

Order code Vacuum connection Hlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH PIRANI-SD0-C-3A-KF16 DN16KF 30 PIRANI-SD0-C-3A-CF16 DN16CF 34

Accessories

txtAbstand Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par SUPPLY-PIRANI-SD0 Power supply 100-230 V AC (EU)/ 12 V DC (D-Sub 9) BATTERY-PIRANI-SD0 battery adapter for 2 x 9 V block (D-Sub 9 pin.)

5-22 www.vacom-vacuum.com Heat Loss Vacuum Sensors

Pirani Sensor

Active gauge, ATM to medium vacuum, analog output, optional setpoints

Robust against overpressure up to approx. 5 bar Replaceable sensor unit Shared push-button for adjustment of ATM and HV Technical data Measurement range 0.05...1E+5 Pa | 5E-4…1000 mbar | 3.8E-4…750 Torr Measurement principles heat loss (Pirani), temperature compensated Resolution 1 % of reading Accuracy ± 15 % of reading (1E-3…100 mbar) ± 50 % of reading (< 1E-3 mbar; > 100 mbar) Reproducibility 2 % of reading (1E-3…100 mbar) Response time 80 ms Analog outputs log-linear, 1.9…10 V 5 txtAbstand Process control relais 2 relais, 30 V DC / 0,5 A (optional) Compatible displaystxtAbstand and controllers Temperature range (operation) 5...60 °C Bakeout temperature Max. 80 °C at flange (horizontal position) Max. 250 °C at flange (CF with long tube only) Mounting position any Heat loss vacuum sensor tungsten (TTR 91, 91 S), nickel (TTR 96 S) Materials in vacuum stainless steel, glass, Ni, NiFe, W or Ni optional Protection category IP40 Power supply 14...30 V DC ( 1 W) Electrical connectors RJ45 (DC in, analog out, optional relais) Scope of delivery sensor

Compatible with Connectable sensors VaX Vacuum Explorer, VMG Gauge cable CABLE-VMG-PIRANI-S00-X, CABLE-VAX-PIRANI-S00-X (X: cable lenght in m)

Order code Vacuum connection Hlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH PIRANI-000-C-A-KF16 DN16KF 15 PIRANI-000-C-A-CF16R DN16CF-R 14 PIRANI-000-C-A-CF16RL DN16CF-R long 115 PIRANI-000-C-A-NPT18 1/8" NPT 29 PIRANI-S00-C-A-KF16 DN16KF 15 PIRANI-S00-C-A-CF16R DN16CF-R 14 PIRANI-S00-C-A-CF16RL DN16CF-R long 115 PIRANI-S00-C-A-NPT18 1/8" NPT 29

www.vacom-vacuum.com 5-23 Heat Loss Vacuum Sensors

Pirani Sensor

Active gauge, ATM to medium vacuum, analog output, optional: digital display, setpoints, profibus

Improved accuracy at rough vacuum compared to standard Pirani gauges Gas type independent measurement from 10 … 1500 mbar Mixed output signal of Pirani and diaphragm sensor from 1 … 10 mbar Replaceable sensor unit

Technical data Measurement range 0.05...1,5E+5 Pa | 5E-4…1500 mbar | 3.8E-4…1125 Torr Measurement principles heat loss (Pirani); diaphragm (Al2O3, capacitive, absolute pressure) (both temperature-compensated) Accuracy ± 50 % of reading (5E-4...1E-3 mbar) ± 15 % of reading (1E-3...100 mbar) ± 5 % of reading (100…950 mbar) 5 ± 2.5 % of reading (950…1050 mbar) Reproducibility ± 2 % of reading (1E-3…1100 mbar) txtAbstand Units optional mbar, Pa, torr, micron (adjustable) Compatible displaystxtAbstand and controllers Display optional LCD (graphic) Response time < 30 ms Analog outputs log-linear, 0...10,23 V, 1.286 V / pressure decade Process control relais optional: 2 relais, 30 V DC / < 0.3 A Temperature range (operation) 10...50 °C Bakeout temperature max. 80 °C at flange (horizontal position) Mounting position any Heat loss vacuum sensor tungsten, constantly active Materials in vacuum stainless steel, W, Al2O3, glass, Ni, NiFe, SnAg Vacuum connection DN16KF (others on request) Protection category IP40 Power supply 15...30 V DC (< 3 W) Electrical connectors RJ45 (DC in, analog out, optional relais), optional SUB-D 9 pin (Profibus) Scope of delivery sensor

Compatible with Display and control units VaX Vacuum Explorer, VMG Gauge cable CABLE-VMG-PIRANI-S00-X, CABLE-VAX-PIRANI-S00-X (X: cable lenght in m)

Order code Options lbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH PIRANI-00M-C-A-KF16 PIRANI-0DM-C-A-KF16 display PIRANI-S0M-C-A-KF16 2 set points PIRANI-SDM-C-A-KF16 2 set points, display

5-24 www.vacom-vacuum.com Heat Loss Vacuum Sensors

Thermocouple Sensors

Passive sensors, rough and medium vacuum

Corrosion resistant Temperature compensated Sensors are matched and without adjustment replaceable Technical data Measurement range THERM-20: 0.01...20 Torr THERM-1: 1...1000 mTorr Measurement principles heat loss (thermocouple) Most sensitive area THERM-20: 0.2...5 Torr THERM-1: 10...200 mTorr Accuracy see control units Temperature range (operation) 5…50 °C Mounting position any 5 txtAbstand Materials in vacuum steel nickel-plated, stainless steel, glass, nobel metal Electrical connectors special plug connector Scope of delivery sensor

Compatible with Display and control units Gauge cable CABLE-THERM-THERMOC

Order code Vacuum connection lbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH txtAbstand THERM-20-S-0-NPT18 1/8" NPT THERM-1-S-0-NPT18 1/8" NPT THERM-1-S-0-KF16 DN16KF THERM-1-S-0-KF25 DN25KF

txtAbstand Compatible displaystxtAbstand and controllers

www.vacom-vacuum.com 5-25 Capacitance Diaphragm Gauges

Measurement Principle

Capacitively determine the deflection of an elastic membrane

Diaphragm vacuum gauges are particularly suitable for gas type independent pressure measurements from atmosphere up to high vacuum. They measure the elastic deformation (Δs) of a membrane, which is a result of different forces acting on different sides of the membrane (Fig. 13).

Fig. 13: Principle of a capacitance diaphragm vacuum gauge. The recipient has the pressure p1.

The capacitance diaphragm vacuum gauge measures the relative pressure. A reference volume in the gauge is evacuated to a defined value p2, p2 being much smaller than the smallest pressure that has to be measured in the recipient p1. Thus, a total pressure measurement takes place with a negligible error, given by the residual pressure p2.

In the capacitance diaphragm vacuum gauge the pressure sensible membrane acts as one of the electrodes of a capacitor. The deformation (Δs) as a function of the pressure difference causes a change in its capacity, which can be directly and accurately measured. The membranes are manufactured either out of stainless steel with a small thermal expansion coefficient or out of metal coated ceramics. In practice, ceramic based membranes have proven to be less sensitive to thermal temperature fluctuations and zero point stable due to improved relaxivity. Furthermore, they offer improved corrosion resistance and can be used under harsh conditions. The membrane should be insensitive to length changes triggered by temperature variations, since this could affect the measurement. The thickness of the membrane is a crucial factor determining the smallest measurable pressure. Typically, a membrane with a given thickness can cover a pressure range of approximately 4 decades.

The accuracy can be improved by temperature-stabilized sensors that are regulated at 45° C constantly. Thus, the influence of the temperature on the measurement results is minimized. The advantage of the capacitance diaphragm vacuum gauge is the independence on the gas type, a high accuracy (typically 0.2 % of the measured value) as well as the resistance against corrosive gases.

www.vacom-vacuum.com 5-26 Diaphragm sensor

ANYGAS

Medium and rough sensor

Stainless steel diaphragm Temperature compensated Short response time Technical data Measurement principle piezoresistive diaphragm Measurement range 100...1e5 Pa | 1...1000 mbar | 7.5e-1...750 Torr Accuracy ± 1,5 % FSS txtAbstand Gas dependent pressure display no Vacuum connection DN16KF, G 1 / 8, 1 / 4 NPT Bakeout temperature 120 °C Operating temperature temperature compensated: -20 to +85 °C 5 Material in vacuum stainless steel Weight 100 g Mounting position any txtAbstand Electrical connector SAL M12x1, 5 pin Compatible displaystxtAbstand and controllers Dimensions max. 34x96 (DxH) (flange dependent) Scope of delivery sensor

Compatible with Display and control unit VaX Vacuum Explorer, VMG Gauge cable CABLE-VMG-ANYGAS-X, CABLE-VAX-ANYGAS-X (X: cable lenght in m)

Order code Description lbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH ANYGAS-BASIC-C-0-KF16 with KF connection ANYGAS-BASIC-C-0-NPT14 with 1/4 NPT connection ANYGAS-BASIC-C-0-G18 with G 1/8 connection

www.vacom-vacuum.com 5-27 Diaphragm sensor

Capacitive Membrane Sensor, temperature compensated

Universal sensor with aluminum oxide diaphragm for gas-type independent measurement

Corrosion resistant, applicable for corrosive processes Compact capacitance sensor Improved lomg-term stability and reduceddiaphragm reset time Technical data Measurement range MEMBRAN-10TORR: 0.67...1333 Pa | 6.7E-3...13 mbar | 5E-3...10 Torr MEMBRAN-100TORR: 6.7...1.3E+4 Pa | 6.7E-2...133 mbar | 5E- 2...100 Torr MEMBRAN-1000TORR: 67...1.3E+5 Pa | 0.67...1333 mbar | 0.5...1000 Torr Accuracy 1% of reading 5 Vacuum connection DN16KF Analog voltage 0-10 V linear txtAbstand Electrical connector FCC, 8 pin Operating temperature 10-50°C

Compatible with Display and control units VaX Vacuum Explorer, VMG Gauge cable CABLE-VMG-MEMBRAN-X, CABLE-VAX-MEMBRAN-X

Order code Descriptionlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH MEMBRAN-1000TORR25-C-A-KF16 MEMBRAN-100TORR25-C-A-KF16 MEMBRAN-10TORR25-C-A-KF16

txtAbstand Compatible displaystxtAbstand and controllers

5-28 www.vacom-vacuum.com Diaphragm sensor

Capacitive Membrane Sensor, temperature compensated

Active gauge, ATM to medium vacuum, ceramic diaphragm, analog output, serial interface

Multi-purpose sensor with aluminum oxide diaphragm for gas type independent measurement Corrosion resistant, suitabel for corrosive processes Improved long-term stability and reduced diaphragm reset time Technical data Measurement range 5 versions: 13.3 Pa | 0.133 mbar | 0.1 Torr (1E-5…0.1 Torr); 133 Pa | 1.33 mbar | 1 Torr (1E-4…1 Torr); 1330 Pa | 13.3 mbar | 10 Torr (1E-3…10 Torr); 1.33E+4 Pa | 133 mbar | 100 Torr (0.01…100 Torr); 1.33E+5 Pa | 1330 mbar | 1000 Torr (0.1…1000 Torr) Measurement principles diaphragm (Al2O3, capacitive, absolute pressure, temperature compensated) 5 Temperature control (optional) 45°C, 100°C, 160°C, 200°C Picture similare Resolution 0.003 % F.S. (Full Scale) txtAbstand Accuracy 0.2 % of reading; 0,5 % (for 0,1 Torr version) Response time 30 ms Analog outputs linear, 0...10 V DC Interfaces RS232-C Temperature range (operation) 5...50 °C Bakeout temperature max. 110 °C at flange Materials in vacuum Al2O3, stainless steel 316L, glass ceramics solder, AgTiCu hard solder, Vacon 70 txtAbstand Protection category IP30 Power supply 14…30 V DC (< 1 W) Electrical connectors SUB-D 15 pin (DC in, analog out, RS232) Scope of delivery sensor

Compatible with txtAbstand Display and control units VMG, VaX Vacuum Explorer Compatible displaystxtAbstand and controllers Gauge cable CABLE-VMG-MEMBRAN-X, CABLE-VAX-MEMBRAN-X (X: cable lenghte in m)

Order code Vacuum connection Measurement rangelbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH MEMBRAN-1TORR25-C-3A-12 1/2" tube 1 Torr MEMBRAN-10TORR25-C-3A-12 1/2" tube 10 Torr MEMBRAN-100TORR25-C-3A-12 1/2" tube 100 Torr MEMBRAN-1000TORR25-C-3A-12 1/2" tube 1000 Torr MEMBRAN-1TORR25-C-3A-CF16R DN16CF-R 1 Torr MEMBRAN-10TORR25-C-3A-CF16R DN16CF-R 10 Torr MEMBRAN-100TORR25-C-3A-CF16R DN16CF-R 100 Torr MEMBRAN-1000TORR25-C-3A-CF16R DN16CF-R 1000 Torr MEMBRAN-1TORR25-C-3A-KF16 DN16KF 1 Torr MEMBRAN-10TORR25-C-3A-KF16 DN16KF 10 Torr MEMBRAN-100TORR25-C-3A-KF16 DN16KF 100 Torr MEMBRAN-1000TORR25-C-3A-KF16 DN16KF 1000 Torr MEMBRAN-1TORR25-C-3A-VCR8 VCR8 1 Torr MEMBRAN-10TORR25-C-3A-VCR8 VCR8 10 Torr MEMBRAN-100TORR25-C-3A-VCR8 VCR8 100 Torr MEMBRAN-1000TORR25-C-3A-VCR8 VCR8 1000 Torr Ɣ For temperature controlled versions replace 25 to 45, 100, 160 or 200. For temperature controlled versions slightly different specifications are possible

www.vacom-vacuum.com 5-29 Diaphragm sensor

Capacitance Diaphragm Sensors

Battery-operated sensor, ATM to rough vacuum, ceramic diaphragm, ATEX version on request

Gas type independent measurement Corrosion resistant ceramic diaphragm Splash proof Technical data Measurement range 1...1080 hPa | 1...1080 mbar | 1...810 Torr Measurement principles diaphragm (Al2O3, capacitive, absolute pressure) Accuracy < ± 1 hPa ±1 digit | < ± 1 mbar ±1 digit | < ± 0.75 Torr ±1 digit Temperature coefficient < ± 0.07 hPa / K | < ± 0.07 mbar / K | < ± 0.05 Torr / K txtAbstand Measurement rate automatically, 3 s, 1 s, 1/3 s Units mbar, hPa, Torr (switchable) 5 Display LCD, digital and analog Temperature range (operation) 10...60 °C Medium termperature max. 80 °C at pressure transducer Materials in vacuum aluminum oxide, stainless steel, chemically resistant fluorelastomer, PBT / PPS Housing plastics Power supply internal lithium battery, 9 V, 1.2 Ah Vacuum connection flange DN16KF with screwable, staged hose clip DN6/DN10 Scope of delivery sensor, battery

Order code DescriptionMeasurementlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH range txtAbstand MEMBRAN-810TORR25-C-0-KF16 Standard MEMBRAN-810TORR25-C-0-KF16-ATEX ATEX version

Accessories

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par VB-612220 replacement battery 9 V lithium 1.2 Ah

txtAbstand

5-30 www.vacom-vacuum.com Relative Pressure Gauges

Measurement Principle Bourdon Gauge

Determination of the deformation of an elastic tube

Pressure is the force, acting on unit area. In many cases, applying a force leads to a deformation of the object under study. The resulting deformation can be measured and is proportional to the applied force (Hooke's law). Hence, the deformation can be used to determine the pressure. This deformation is especially significant in the upper pressure range (up to atmosphere conditions).

In the simplest case (e.g. Bourdon gauge), the deformation of a metal ring is directly displayed on a stamped scale. This type of gauge measures the relative pressure (relative to the atmospheric pressure). Thus, the upper limit of the scale corresponds to 1000 mbar. Taking this value as the absolute pressure would yield in a high systematic error due to oscillation of the atmospheric pressure.

5 Bourdon gauge Lever system

Pointer

Fig. 14: Bourdon gauge. The mechanical deformation of a metal ring is directly transferred to a scale via a lever system

Piezo-Resistive Diaphragm Vacuum Gauges Piezo-resistive determination of the deflection of an elastic membrane

Piezo-resistive diaphragm vacuum gauges can achieve higher accuracy than Bourdon gauges. They work similar to the capacitive diaphragm vacuum gauges: the pressure is derived from the mechanical deformation of a membrane measured with a piezo-resistive element. The specific resistivity of the piezo element depends on the deflection of the membrane and thus it provides information about the pressure difference on both sides of the membrane. The accuracy of the pressure determination is typically around 0.5 % FS, i.e. the useable measurement range is about 3 decades.

Regular piezo-resistive diaphragm vacuum gauges have a full scale deflection between 1300 and 1500 mbar (slightly above atmospheric pressure). The long-term and temperature stability as well as the resolution are slightly lower than the ones of capacitive diaphragm vacuum gauges. However, piezo-resistive diaphragm vacuum gauges are considerably cheaper.

5-31 www.vacom-vacuum.com Relative Pressure Sensors

Relative Pressure Sensors

Standard and stainless steel version (corrosion resistant), ATM to rough vacuum

Visual control of prevacuum pipes and evacuation processes Relative pressure sensor with absolute pressure scale (1000 mbar = ATM) Two versions: RFM (standard) and RFMC (corrosion resistant) Technical data Measurement range < 10...1020 mbar on the absolute pressure scale Measurement principles Bourdon-tube sensor, relative pressure Units mbar Temperature range (operation) -40…+60 °C Standard Medium termperature RFM: max. 60 °C txtAbstand RFMC: max. 200 °C Materials in vacuum RFM: RFM-CU 5 RFMC: RFM-316 Housing RFM: plastics (black), dimension 80 or 63 mm RFMC: stainless steel, dimension 63 mm Protection category RFMC: IP 65 Scope of delivery sensor

Order code Description Vacuum connectionlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH RFM-CU-S-0-G14 RFM, standard G 1/4" B txtAbstand RFM-CU-S-0-KF16 RFM, standard DN16KF RFM-316-S-0-G14 RFM, stainless steel G 1/4" B RFM-316-S-0-KF16 RFM, stainless steel DN16KF

RFM-I Bourdon Sensor with Analog Output

Stainless steel version (corrosion resistant), ATM to rough vacuum, linear analog output

Visual monitoring of prevacuum lines and evacuation processes A non-contact electronic rotary position sensor converts the position of the needle into a 4…20 mA analog output signal Relative pressure sensor with absolute pressure scale (1000 mbar = ATM)

Technical data Measurement range < 10...1020 mbar on the absolute pressure scale Measurement principles Bourdon-tube sensor, relative pressure with precision swiveling angle sensor at needle shaft (contact-free) txtAbstand Units mbar Analog outputs linear, 4…20 mA, two-wire Temperature range (operation) -40…+60 °C Medium termperature max. 100 °C Materials in vacuum stainless steel 316L Housing stainless steel, nominal size 63 mm Protection category IP 54 Power supply 12…30 V DC, max. 1 W Electrical connectors cable, 2 m, free ends (DC in, analog output) Scope of delivery sensor txtAbstand Order code Description Vacuum connectionlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10parH RFM-316-S-A-G14 RFM-I, stainless steel, analog output G 1/4 " B RFM-316-S-A-KF16 RFM-I, stainless steel, analog output DN16KF

5-32 www.vacom-vacuum.com Relative Pressure Sensors

SWITCH Digital Precision Pressure Switch Module

Piezoresisitive pressure determination (relative)

Stainless steel diaphragm for gas type independent measurement Transistor outputs with the adjustable setpoints, switchable output-modes (inverted or not-inverted), and further options "hysteresis mode" or "window comparator mode" Auto reference is used to adjust the transistor setpoints in the case of strong fluctuations of the pressure source

Technical data Measurement range -100…+100 kPa | -1…+1 bar (referred to air pressure) Measurement principles diaphragm (stainless steel, piezoresistive, relative pressure) Resolution 0.1 kPa | 1 mbar Accuracy display: ± 2 % of ultimate value max. ± 1 position analog output: ± 2.5 % of ultimate value Reproducibility set points: ± 0,2 % of end value max. ± 1 position 5 Response time max. 2.5 ms (with deactivated anti chatter function) Units kPa, bar, psi, mmHg, inHg, kgf/cm² (adjustable) version …-M: kPa (not adjustable) Display LED, 3½-digit, red; one status-LED per switch output txtAbstand Analog output linear: 4…20 mA or 1…5 V Process control relais NPN or PNP open collector (N.C.), 2 outputs; NPN: max. 28 V DC / 80 mA; PNP: max. 80 mA, max. 1 V Operating elements 3 front keys (UP / SET / DOWN) Temperature range (operation) 0…50 °C Bakeout temperature max. 180 °C Leak rate 1E-10 Pa·m3/s | 1E-9 mbar·l/s | 7.5E-10 Torr·l/s Materials in vacuum stainless steel 304 and ASTM630 Housing plastics Protection category IP65 Power supply 12…24 V DC, max. 45 mA (without load) Electrical connectors 5 pins, oil-resistant cable (DC in, analog I/O, transistors) txtAbstand Scope of delivery pressure switch incl. connecting cable 2 m

Order code Vacuum connection Analog Seit point l output b SWITCH-NPN5V-C-A-VCR14 1/4" VCR 1 … 5 V 2 x NPN N.C. SWITCH-NPN20MA-C-A-VCR14 1/4" VCR 4 … 20 mA 2 x NPN N.C. SWITCH-PNP5V-C-A-VCR14 1/4" VCR 1 … 5 V 2 x PNP N.C. SWITCH-PNP20MA-C-A-VCR14 1/4" VCR 4 … 20 mA 2 x PNP N.C. SWITCH-NPN5V-C-A-SL14 1/4" Swagelok 1 … 5 V 2 x NPN N.C. SWITCH-NPN20MA-C-A-SL14 1/4" Swagelok 4 … 20 mA 2 x NPN N.C. txtAbstand SWITCH-PNP5V-C-A-SL14 1/4" Swagelok 1 … 5 V 2 x PNP N.C. SWITCH-PNP20MA-C-A-SL14 1/4" Swagelok 4 … 20 mA 2 x PNP N.C.

www.vacom-vacuum.com 5-33 Display and control units

VaX linkB

Electronics for passive BARION® sensors

From passive (conventional) to active (transducer) gauge – with VaX linkB Compatible to all new passive BARION^® sensors Compact and robust design Technical data Measurement range 5e-8...1e5 Pa | 5e-10...1000 mbar | 3.75e-10...750 Torr Unit mbar, Pa, Torr (switchable) Measurement rate max. 2 / s Interfaces data I/O: D-Sub, 9 pin with RS232, analog (0…10 V, 0…20 mA, 4…20 mA) sensor control: special connector for Barion® sensors, 11 pin txtAbstand Operating temperature 10…50 °C 5 Compatible displaystxtAbstand and controllers Housing / dimensions 73x84x66 mm (WxHxD) Weight 300 g Type of protection IP40 Power supply 24 V +/-10%, 24 W Set points 1x relais (floating, max. 30 V/0.5 A 1x open collector (OC) (max. 30 V/ 0.5 A) Upgrade via firmware yes Accompanying software VACOM Vacuum measurement & Demonstration program (VVD) Scope of delivery device, power supply

Compatible with Display and control unit VaX, VMG Sensors passive sensors: BARION® basic II, BARION® pro II, BARION® smart, BARION® smartF Cable CABLE-VAX-LAH-X, CABLE-VMG-LAH-X (X: cable lenght in m)

Order code Description AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output VAX-LINKB-E-3A Electronic for BARION® series

5-34 www.vacom-vacuum.com Display and control units

Vacuum Explorer VaX

Multichannel controller with innovative operating concept

Operates 9 vacuum sensors simultaneously Mobile pressure display – wireless Innovative operation via VACOM-App Modular design that fits your application One controller for all VACOM sensors

Technical data Display and operation smartphone or tablet display range 3e-10…1.5e5 Pa / 3e-12…1500 mbar / 2.3e-12…1125 Torr Units Pa, mbar, Torr (adjustable) Number of module positions 3 Compatible modules max. 3x hot cathode module up for one passive BARION® sensor max. 3x active sensor module up for 3 active sensors 5 txtAbstand freely combined Number of channels max. 9 (3x active sensor module) Compatible displaystxtAbstand and controllers Measurement rate/ display rate max. 2 / s (adjustable) Interfaces back: 1 x RJ45 (RS485 and RS232), 1 x power supply, front: 1 x USB-data transfer (USB-B),1 x USB charging (USB-A), hot cathode module (back): 1x D-Sub mixed for passive BARION®- gauges (11 pins) active sensor module (back): 3 x RJ45 for active sensors Operating temperature 10…50°C Housing / dimensions 19" rack: 3 HE, 21 TE, 106x128x202 mm (WxHxD) Weight ca. 2 kg (dependent on the modules) Type of protection IP40 Power supply 24 V +/-10%, 100 W Upgrade via firmware yes Accompanying software VACOM® App, VACOM Vacuum measurement & Demonstration program (VVD) Scope of delivery device, power supply incl. power cable (type F, others on request)

Compatible with Sensors passive sensors: BARION® basic II, BARION® pro II, BARION® smart, BARION® smartF active sensors: VaX linkB (electronics for sensors of the BARION® series), BARION® atm II, BARION® HV, Cold-P, Anygas, PIRANI- XXX-C-X, MEMBRAN-1XXX25-X (X - all available versions) Gauge cable passive sensors:CABLE-VAX-BARIONBPS-X active sensors: CABLE-VAX-LAH-X, CABLE-VAX-ANYGAS-X, CABLE-VAX-PIRANI-SD0-X, CABLE-VAX-PIRANI-S00-X, CABLE- VAX-MEMBRAN-X (X: cable length in m)

Order code Description AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output VAX-E-XXX-XBU35 control unit for BARION® series

www.vacom-vacuum.com 5-35 Display and control units

VMG

Display and control unit for analoge and digitale sensor

Technical data Number of measurement 2 (1x analog, 1x digital) channels display range 1E-10…1E+3 mbar Display graphic LCD: current pressure / 60min history / 24h history Units mbar, Pa, Torr (switchable) Interfaces RS232 Process control relais 2 reed switch contact (30 V DC / 1 A) needed power supply 24 V DC ±10 % (max. 24 W) Operating elements 4 front keys Temperature range 0...40 °C 5 Scope of delivery device, power supply (EU)

txtAbstand Compatible with Wide range sensor VACOM, digital: BARION® atm, BARION® atm II, BARION® HV, VaX linkB VACOM, analog: ANYGAS other: digital: MEMBRAN-xxTORR analog: MEMBRAN-xxTORR, PIRANI-000-C, PIRANI-SD0-C-A Cable CABLE-VMG-XXX-X (X: cable lenght in m)

Order code Description AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output VMG Display and control unit

COLDION® CU-100

Display and control unit with an attached cable for one cold cathode ionization gauge

Technical data display range 1E-10...0.01 Pa | 1E-12...1E-4 mbar | 7.5E-13...1E-4 Torr Display graphic LCD; current value / pressure gradient 1 hour / 24 hours Units mbar, Pa, Torr (switchable) Voltage in operation Max. 5 kV Power consumption < 15 W Protection category IP40 Set points 3 (configured independently) 30 V DC / 1 A Operating elements 4 capacitive front keys Temperature range 0...40 °C txtAbstand Analog output 0..10 V oder 0…20 mA / 4..20 mA Interfaces RS232, Profibus (optional), other fieldbus on request Power supply 24 V DC ±10 % (max. 24 W) Scope of delivery device, gauge cable, power supply (EU)

Compatible with Measurement devices COLDION® basic COLDION® pro COLDION® extended

Order code Cable lengthAnalog [m]Seitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output COLDION-CU-100-3M 3 COLDION-CU-100-5M 5 COLDION-CU-100-10M 10 Ɣ Other cable length on request.

5-36 www.vacom-vacuum.com Display and control units

Control unit for PIRANI-000-S heat conduction sensor

Display and control unit for a passive convection Pirani sensor PIRANI-000-S

Measurement range 7 pressure decades All functions and sensor adjustment programmable via 4 front keys (menu-driven) Analog output configurable Technical data Connectable sensors PIRANI-000-S txtAbstand Number of channels 1 Measurement range 0.01...1,33E+5 Pa | 1E-4...1333 mbar | 1E-4...1000 Torr Resolution 0.01 Pa | 1E-4 mbar | 1E-4 Torr Units mbar, Pa, Torr (adjustable) Display graphic LCD (illuminated), 2 to 4 digits Display units 0.5 s 5 Analog outputs adjustable: non-linear 0.375...5.659 V txtAbstand linear 0...10 V (scaleable) log-linear 1...8 V (1 V / pressure decade) Process control relais 2 relais (SPDT), 1 A max. at 30 V Interfaces RS232 and RS485 Temperature range (operation) 0...40 °C Housing aluminum, 1/8 DIN, for panel installation Power supply 100...240 VAC (50/60 Hz) oder 12...30 V DC (ca. 4.5 W) txtAbstand Electrical connectors IEC plug (AC), 2-pin clamp (DC in), SUB-D 9-pin (sensor), SUB-D 9-pin (analog/serial I/O), 6-pin clamp (relais) Scope of delivery controller, power cable 1.5 m (EU) (please order sensor and measuring cable separately)

Order code Description AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output PIRANI-C for PIRANI-000-S

Cable for the connection of passive pirani sensors to PIRANI-C

Order code Length [m]lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par CABLE-PIRANI-C-PIRANI-3M 3 CABLE-PIRANI-C-PIRANI-7M 7.5 CABLE-PIRANI-C-PIRANI-15M 15 SUPPLY-PIRANI-C

www.vacom-vacuum.com 5-37 Display and control units

Control Unit for Thermocouples

Device containing measurement and control for a passive thermocouple sensor THERM-1, THERM-20

Adjustment of zero points and ATM via 2 rotary potentiometers at the front of the device Calibrier reference (NIST traceable) available Two versions with different measurment ranges (VT-4 und VT-6) Technical data Connectable sensors Serie THERM-20 (20 Torr) oder Serie THERM-1 (1000 mTorr) txtAbstand Number of channels 1 Measurement range THERM-C-20: 0.01...20 Torr THERM-C-1: 1...1000 mTorr Accuracy THERM-C-20: ±(30 % of reading + 0.02 Torr) THERM-C-20: ±(15 % of reading + 1 mTorr) Temperature coefficient THERM-C-20: ±(1 % of reading + 2 mTorr) / °C 5 txtAbstand THERM-C-20: ±(1 % of reading + 0.2 mTorr) / °C Units THERM-C-20: Torr THERM-C-1: mTorr Display LED, 3-digit, green Temperature range (operation) 5...50 °C Housing plastics, 1/8 DIN, for panel installation Power supply 4,5...5,3 V DC, 155 mA txtAbstand Electrical connectors clamped connection (DC in, sensor) Scope of delivery control unit, power supply 90...240 V AC (US) / 5 V DC, with 2 m cable, 2.5 m measuring cable (other lengths on request), please order sensors separately

Order code Description AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output 55-288DV4 DIGITAL VT-4 (20 Torr) 55-288DV6 DIGITAL VT-6 (1000 mTorr) Ɣ X= vacuum connection

Accessories

Order code Description lbl11parlbl12parlbl13parlbl14parlbl02parlbl03parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par 12-01-165 UK plug adapter for power supply 12-01-164 EU plug adapter for power supply

5-38 www.vacom-vacuum.com Contamination control

Lamella baffle

Increases the life time of hot cathode measuring cells in critical applications by many times Protects the total pressure sensors against harmful effects from the vacuum system Effective barrier against particles, vapor, charge carriers and electromagnetic fields Used in the flange connection between sensor and chamber Easy cleaning (demountable), thereby long-time usability

Technical data Max. bakeout temperature stainless steel: 250 °C FKM: 150 °C (temporary 200 °C) Mounting position sensor preferably vertical and above baffle Materials in vacuum stainless steel (1.4301, 1.4310), FKM (KF versions only) txtAbstand Order code Flange AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output5 BAFFLE-KF25 DN25KF BAFFLE-CF40 DNCF40 Ɣ Please enclose "-CRP" on the order code for clean room compatible packaging. Ɣ Other flange dimensions (KF or CF) on request.

txtAbstand

www.vacom-vacuum.com 5-39 Cable

Sensor cable

Cable for the connection of one BARION basic II/pro II/smart(F) to VaX

Sensor plug: 11-pins, gold plated spring contacts, stainless steel body, PTFE insulator Controller plug: D-Sub with mixed pins, 11-pins Cable insulation: FEP Bakeout temperature: max. 200 °C Bending radius static: min. 110 mm (at 25°C) Bending radius dynamic: min. 150 mm (at 25 °C)

Order code AnalogApplicationSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-BARIONBPS-X Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

5 Cable for the connection of one BARION® atm/ atm II/ HV & VaX linkB to a display unit

Order code Application AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-LAH-X VaX Vacuum Explorer CABLE-VMG-LAH-X VMG Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

Cable for the connection of one ANYGAS to a display unit

Order code Application AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-ANYGAS-X VaX Vacuum Explorer CABLE-VMG-ANYGAS-X VMG via CABLE-VMG-ADAPTER Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

Cable for the connection of active membrane sensors without display to a display unit

Order code Application AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-MEMBRAN-X VaX Vacuum Explorer CABLE-VMG-MEMBRAN-X VMG via CABLE-VMG-ADAPTER Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

Cable for the connection of active Pirani sensors with display via adapter (CABLE-VMG-ADAPTER) to a display unit

Order code Application AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-PIRANI-SD0-X VaX Vacuum Explorer CABLE-VMG-PIRANI-SD0-X VMG via CABLE-VMG-ADAPTER Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

Cable for the connection of active Pirani sensors without display to a display unit

Order code Application AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-PIRANI-S00-X VaX Vacuum Explorer CABLE-VMG-PIRANI-S00-X VMG via CABLE-VMG-ADAPTER Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

5-40 www.vacom-vacuum.com Cable

Sensor cable

Cable for the connection of one COLD sensor to a display unit

Order code Application AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-COLD-X VaX Vacuum Explorer CABLE-VMG-COLD-X VMG via CABLE-VMG-ADAPTER Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

Cable for the connection of passice Pirani sensors to PIRANI-C

Order code AnalogApplicationSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-PIRANIC-PIRANI-000-X Ɣ Standard length are 3 m, 7.5 m, 15 m 5

Cable for the connection of one BARION® extended to MVC3-B0 or MVC3-BM

Gauge plug: gold plated spring contacts, PTFE insulator, aluminum body (dia. 40 mm) Controller plug: D-Sub with mixed pins (male) Cable insulation: PTFE Bakeout temperature: 250 °C max.

Order code AnalogApplicationSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output BATLX-O Ɣ Standard length are 3 m, 5 m, 10 m, 15 m

Cable for the connection of VaX to PC

Order code Application AnalogSeitlbl11parlbl12parlbl13parlbl14parlbl04parlbl05parlbl06parlbl07parlbl08parlbl09parlbl10par point output CABLE-VAX-PC-RS232-X RJ45 on D-Sub 9 pin, RS232 CABLE-VAX-PC-RS485-X RJ45 on USB-A, RS485 CABLE-VAX-PC-USB-1.8M USB-B on USB-A Ɣ Standard length are 3 m, 5 m, 10 m, 15 m