Ultra System Overview Introduction Safety Introduction WARNING! This test system is capable of producing potentially lethal Instrument Safety voltages. All internal areas of the system must be accessed and Information serviced ONLY by trained and qualified personnel. Do not perform any servicing other than that contained in this documentation and This section describes the UltraFLEX read all safety information before attempting any operation or test system safety precautions. The maintenance procedures. test system generates and uses AC and DC high power and high voltage. The purpose of this section is to identify the hazards in the system to !!CAUTION! operation, service and applications personnel. Such personnel should Always wear safety glasses or safety goggles when working on the test system. read and understand this information before operating or servicing the system. !!CAUTION!
Internal sheet metal portions of the test system may contain sharp edges, use care when working inside the test system.
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General Safety Information Subsystem Safety Information The following general safety Table 1 identifies the safety concerns for the UltraFLEX subsystems. information is included in this section: Table 1 • General Safety Information • Safety Terms, Labels and Subsystem Safety Lockout/ Electrostatic Weight Liquid Safety Symbols Section Tagout Discharge Safety • Lockout/Tagout Computer Safety XX • ESD Damage Prevention and Control Measure Cooling XXX • Safety Certification DIB 24-Slot Interface XX • Material Handling Digital Signal Processor XX • Switches and Protective Barriers • Weight Safety Manipulator XX • Anti-Tip Fixture PDU XXX • Torque Specifications System Monitor and XXX Note Controller (SMC) Primary Support Board only. Support Board XX See Note
Support Cabinet X
12-Slot Test Head XXXX Backplane and Distribution Board
Pneumatics X
Nitrogen Purge Option X Safety
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Instrument Safety Information Table 2 Table 2 identifies the safety concerns for the UltraFLEX instruments. Instrument Safety Lockout/ Electrostatic Weight Liquid Safety Section Tagout Discharge Safety Note The test system instruments are BBAC X grouped into three categories. Each category highlights the instrument’s DC-30/DC-90 potential hazard. See the HSD-M XX Instruments safety section for additional information. HEX15AVS X
GigaDig X
GPIO
PMO
Turbo AC X X
System Reference Clock XX (SRC)
Microwave X
VHFAC X X
VSM XX
Page 3 of 3 Rev. 0736 Ultra System Overview General Safety Information General Safety Information Introduction This section provides general safety information about the test system. The following information is Included in this section: • Safety Precautions • Electrical Code Requirements • Switches • Protective Barriers to Operators • Internal Hazardous Power Connections • Power Control and Distribution • Power Supplies • Internal Protective Barriers • Laser Energy • Heavy Weight Removal Instructions • Special Hazard Warnings • External Mechanical Hazards • Electrostatic Discharge Damage • Materials Handling • Safe Work Practices • Electrical Hazards • Hardware Torque Requirements • Safe Equipment Practices • Environmental Conditions • Grounding • Summary
Page 1 of 8 Rev. 0736 Ultra System Overview General Safety Information Safety Precautions Numerous features incorporated in the test system provide a minimum of safety, such as: • Grounded or nonconductive system covers that require tools for removal • Safety warnings and information labels on the system where appropriate • Detailed installation, checkout and service documentation Electrical Code Requirements All inputs to the main facility AC service disconnect must meet local electrical code requirements. The cables, circuit breakers, contactors and transformers selected have defined qualities that meet the electrical code requirements as understood by Teradyne, Inc., for the countries where the product may be sold. These parts should be replaced only with Teradyne approved FRUs or equivalents. All AC power connections must be torqued to their defined specifications to avoid localized heating and possible ignition, or damage to the screw connections, whenever screw type connections are used. Switches The test system has many safety switches. Never attempt to defeat a switch or interlock in any way. See the Switches and Protective Barriers section of this documentation for additional information. The switches include: • Main Power • Test System Power • Emergency Off (EMO) Protective Barriers to Operators There are safety interlocks and warning labels to impede operator access to service or electrical hazard areas of the test system and test head electronics. See the Switches and Protective Barriers section of this documentation for additional information. Internal Hazardous Power Connections The internal power connections of the test system present many safety hazards. Detailed safety hazard information can be found in each safety section and specific test system section of this documentation. All internal areas of the system must be accessed and serviced only by trained and qualified personnel.
Page 2 of 8 Rev. 0736 Ultra System Overview General Safety Information Power Control and Distribution All power connections inside the power distribution, support cabinet or power supply units, as well as distribution between these assemblies, are extremely hazardous and potentially lethal. Trained and qualified personnel must exercise extra caution and care when servicing these areas. Internal plug-connected AC power is also hazardous and should be handled with the reasonable care due any AC service. Power Supplies Most power supply terminals and backplane buses in the test system present a high-voltage or high-current power hazard. Hazardous voltages are present on power supply connections and power buses, therefore extra caution must be taken when servicing these areas. Because of these high-power hazards, jewelry, such as rings, watches and necklaces, and other conductive ornaments should not be worn when servicing these areas. Caution should also be used with conductive tools. Current levels are sufficient to cause severe sparking or welding if conductive parts bridge different potentials. Internal Protective Barriers The inner doors provide protective barriers to internal hazards for unauthorized personnel. The following internal protective measures have been implemented: • Warning labels and strategic design and layout provide the primary protection to service personnel. • Special hazard areas may have additional mechanical barriers, such as an AC mains transformer and power supplies. • All conductive framing has been electrically connected to a protective ground by green ground wires with a yellow stripe, or by electrically conductive joints. • Interlock switches are present in various locations throughout the system. These switches remove power to certain areas when doors are opened or components are moved. Never defeat an interlock switch. • EMO switches are present in various locations of the system. These switches remove power to the test system when they are activated.
Page 3 of 8 Rev. 0736 Ultra System Overview General Safety Information Laser Energy
CAUTION
Laser Class 1 System Laser Klasse 1 System according to EN 60825-1:1994+A1+A2
! CAUTION! !
Use of controls or performing adjustment or maintenance procedures other than those specified in this documentation may result in hazardous radiation exposure.
There are as many as 4 lasers present in the UltraFLEX test system. Two are always present - the laser for the databus card and the matching laser on the support board. Two additional lasers are added when the DSP option is installed. One in the DSP computer and one on the XGEM module. Laser Specifications 1. Databus Card and Support Board Fiber Optics Communications Transceiver: Laser Class: 1 Laser Power: 0 dBm Wavelength: 850nm Operational temporal mode: continuous
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2. DSP Option: DSP computer and XGEM module communications: • Laser Class: 1M • Laser Power: -2 dBm • Wavelength: 850nm • Operational temporal mode: continuous Heavy Weight Removal Instructions See the Weight Safety section of this documentation for information and details on heavy weight removal. Special Hazard Warnings Information symbols and electrical hazard or other appropriate warnings have been placed close to hazards to alert service personnel to potential hazards. See the Safety Terms, Labels and Symbols section of this documentation for additional information. External Mechanical Hazards Computer displays and some optional external assemblies are movable. Caution should be used when in proximity to these assemblies to prevent bodily injury and damage to the equipment. Electrostatic Discharge Damage The test system contains semiconductors that, by the nature of their material (such as MOS) or design (such as LSI, VLSI, FET), are susceptible to damage from electrostatic discharge (ESD). ESD control measures are therefore necessary and offer protection by degree, with static-prevention techniques providing the most protection. The following control measures are strongly recommended for consideration and implementation. • Wear a tested-grounded wrist strap. Refer to the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. Refer to the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation for additional information. Materials Handling See the Material Handling section of this documentation for information and details on materials handling. Page 5 of 8 Rev. 0736 Ultra System Overview General Safety Information Safe Work Practices Teradyne recommends following the safety practices: • Always wear safety glasses or safety goggles when working on the test system. • Read and understand the instructions before performing any procedure. • Only qualified personnel should operate or service the system. Do only the tasks you are trained to do. • Use lockout procedures. See the Lockout/Tagout section of this documentation for additional information. • When nitrogen is used with the DIB interface, undetected nitrogen leaks in a closed area may result in an oxygen-deficient atmosphere which can cause unconsciousness, coma or death. The test system does not detect, store, nor process the supplied nitrogen gas. • Facilities which use dry nitrogen instead of air are expected to provide a nitrogen detection and alarm system to prevent oxygen-deficient atmospheres and to comply with all applicable local occupational health and safety codes regarding the use of nitrogen in equipment and in the facility. • Operator and maintenance personnel should remove conductive items, such as rings and watches, before using or servicing the system. Wearing jewelry (particularly gold and silver, which are excellent conductors of electricity) increases the potential of receiving a shock. Remove jewelry when working on any high-voltage equipment, and any equipment receiving AC, DC or low-voltage current. Be aware of articles of clothing that have metal buttons, zippers, or snaps that can conduct electricity. • Visitors to the test system area should be supervised by qualified personnel. • Tools, food, liquids and other miscellaneous items should not be placed on top surfaces of the system. • Adequate work space should be provided for operators and service personnel. Refer to the UltraFLEX Site Preparation Guide, Teradyne Document Number 553-706-01, for floor plan information. When handling components or circuit assemblies, exercise ESD control measures. See the ESD Damage Prevention and Control Measure section of this documentation for additional information. • When working on high-voltage or high-power systems, have an assistant present if possible. As a minimum, notify someone in the area of your actions before and upon completion of service. • When replacing or repairing modules or subassemblies, shut off and Lockout/Tagout the power controller. Refer to the Lockout/Tagout Procedure outlined in the Lockout/Tagout section of this documentation. If necessary, disconnect the test system from the AC mains service. Refer to each section of this documentation for specific safety instructions about that particular module or subassembly. • Before servicing power supplies or sources storing 10 joules or more of energy, discharge the output terminals and capacitors with a low-resistance power bleeder resistor. Discharge at a rate of 1 ampere or less to avoid sparks or tool welding. Page 6 of 8 Rev. 0736 Ultra System Overview General Safety Information
• Pay attention to warning signs. • Take immediate corrective action if safety issues are found. • Wear proper personal protective equipment. Electrical Hazards Be aware of and exercise caution around all electrical hazards, which include: • DC voltages equal to or greater than 60V • AC voltages equal to or greater than 30 Vrms, 42.4V peak • 24V pulses • 240 VA (volt-ampere) power combination or greater than 150 VA for an unlimited circuit • 10 joules of reactive energy Hardware Torque Requirements See the Torque Specifications section of this documentation for information and details on proper torque values for the test system hardware. Safe Equipment Practices • Make certain that the instrument that is being worked on is turned off before replacing any component. Wait before removing the component to allow any charged devices to discharge. • Always leave safety shields in place unless work must be done on equipment behind the shields. • Make certain that test instruments are used within their rated specifications. • Use probe clips whenever possible to avoid having your hands near the point of test. • Always check equipment wires and probes for damaged or cracked insulation. • Never reach across or around high-voltage circuits. Always turn equipment off. • Never have one hand on the chassis or other ground point when using measuring equipment. Use the one-hand- in-the-pocket rule when working with electrical items. • Know the location and use of power disconnects, breakers, or emergency off switches of all equipment you work on. • Keep your area neat and free of conductive material and sharp objects. Never defeat an interlock switch.
Page 7 of 8 Rev. 0736 Ultra System Overview General Safety Information Environmental Conditions Environmental conditions that increase the potential for electrical shock include: • Poor lighting • Lack of personal protective equipment (insulated tools, rated gloves, glasses) • Wet or damp conditions Grounding
WARNING!
If the correct protective ground connections are not made, a shock hazard can occur. This may result in the injury or death of anyone operating the test system.
Electrical current typically stays between two electrodes. If stray current occurs, a grounding device closes the loop (capturing the stray current) and safely grounds or diminishes the current. If the grounding device is removed and stray current occurs, there is no means of diminishing the current. Consequently, if a person using the device touches an item that closes the loop, the current will travel from the device through the person until the current is grounded. Never remove a grounding device for any reason. Summary 1. Use common sense. If you are not properly trained, do not touch. 2. Whenever possible, follow the Lockout/Tagout Procedure outlined in the Lockout/Tagout section of this documentation. 3. Whenever possible, observe the one-hand rule. 4. Do not wear jewelry or other metal objects while working around electricity. 5. Be aware of your surroundings. 6. Use proper personal protective equipment. 7. Never remove a grounding device for any reason.
Page 8 of 8 Rev. 0736 Ultra System Overview Safety Terms, Labels and Symbols Safety Terms, Labels and Symbols Introduction Symbols, labels, and terms used in this manual are derived from requirements of IEC 417 for internationally recognized labeling and OSHA 29 CFR 1920 for U.S. recognized labeling. The following information is included in this section: • Safety Terminology • Symbols • Definition of Labels • Additional Labels Safety Terminology This section defines the safety terminology used in Teradyne product support documentation. Warning • A hazard is present. Before proceeding, the user should refer to the appropriate service documentation to avoid personal injury and/or damage to equipment. • A hazard is not immediate, but the removal of a barrier will lead to an extreme hazard. • Failure to follow safety warnings could result in severe injury or death. The following is an example of a warning.
WARNING!
The test system should be shut off and Lockout/Tagout procedures performed before servicing the test system.
Warning Example
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Caution • A potential hazard is present. Before proceeding, the user should refer to the appropriate service documentation to avoid personal injury and/or damage to equipment. The following is an example of a caution.
!!CAUTION!
This information must be read and fully understood before performing service.
Caution Example AC Mains AC mains is a universal generic term used to describe the AC input service of equipment connected to a facility’s main AC service outlet or fused disconnect. AC mains also describes all the parts of the equipment’s AC input that can have the input voltage applied to them. AC mains parts include: • AC plugs • AC cords • AC circuit breakers, switches, and fuses used to disconnect and protect the AC mains path • Other components that are connected to the AC service input, such as RFI filters, surge suppressors, and isolation transformer primaries
Page 2 of 10 Rev. 0736 Ultra System Overview Safety Terms, Labels and Symbols Lockout Tagout OSHA requirements for electrical machinery require, for both installation and maintenance, a power lockout/tagout capability with proper instructions on usage. The power lockout/tagout capability requires that the main power to the machine can be de-energized and secured against being re-energized until the installation or maintenance is completed. OSHA 29 CFR 1910.331-335 requires that installation and service personnel be protected from electrical hazards by means of a lockout/tagout provision. It is also recommended that acceptable tagout warnings and identity forms be applied to the lockout mechanism when it is used. See the figure Tagout Example. See the Lockout/Tagout section of this documentation for additional information and specific procedures.
WARNING!
When it is necessary to service the system power, the lockout/tagout mechanism at the facility branch service connection supplying power to the main facility AC service disconnect should be used. This is the only way to ensure that power to the test system main power is totally disabled.
WARNING!
This equipment is locked out for service. Before removing this lockout mechanism and applying power to the system, contact: ______
Tagout Example Note Insert the name of the appropriate person in the space on the tag.
Page 3 of 10 Rev. 0736 Ultra System Overview Safety Terms, Labels and Symbols Symbols The following symbols may be used on the test system or in this service documentation.
The PROTECTIVE GROUND symbol is used to define any connection point where a safety ground wire is added to the hardware. The symbol enclosed in a circle references the entrance point of the safety ground wire of the AC mains input. The GROUND symbol without a circle indicates any conductive point referenced to the safety ground wire of the AC mains input, but that is not part of the AC service wiring. Used for earth (ground) terminals. The CHASSIS GROUND symbol identifies where a wire is connected to a chassis point for ground reference or other function, such as static discharge. The INSTRUMENTATION GROUND symbol indicates that the connection is grounded remotely from the connections point. This symbol will typically be near coaxial connections. The BLACK HIGH VOLTAGE FLASH symbol defines any connection where a hazardous voltage (between 60V and 999V), either DC or AC, may be present. Hazardous voltages greater than 30Vrms, 4.24 V peak, 60 Vdc, or hazardous energy levels grater than 240 VA or 150 VA in an unlimited circuit. The FUSE REPLACEMENT symbol indicates that a fuse must be replaced by a fuse with the same type and rating for safe and proper operation.
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This FUSE REPLACEMENT symbol indicates that the fuse must be a slo-blow type.
INFORMATION symbols are placed in close proximity to specific areas of the hardware that have important servicing or operating requirements documented in the manual. Information symbols may have a yellow or white background. Direct current
Alternating current
Both direct and alternating current
Three-phase alternating current 3
Equipotentiality
On (Supply)
Off (Supply)
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Equipment protected throughout by DOUBLE INSULATION or REINFORCED INSULATION
Caution, risk of electric shock
Caution, hot surface
Caution, refer to accompanying documents !
In position of a bistable push control
Out position of a bistable push control
The HIGH VOLTAGE FLASH symbol is used to define any connection where a high voltage, either AC or DC above 60V may be present (black in color signifies 60V to 999V, red in color signifies 1000V or higher).
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The CIRCUIT GROUND symbol identifies any connection point where instrumentation is referenced to ground. Instrumentation grounding may reference various grounds, such as protective, chassis, RF, signal, and so on. This symbol typically will be near coaxial connections, for example.
Definition of Labels Labels may be stand-alone symbols, words, or combinations of both, as appropriate. Caution: The CAUTION label, with wording, has a yellow or white and black background and is used to define a potential but not immediate hazard, or to provide instructions for actions required to avoid potential hazards. Danger: The DANGER label, with wording, has a red or white and black background and is used to define an immediate hazard or to provide instructions for actions required to avoid an immediate hazard. Additional Labels There are other agency-defined labels. Several special situations have been defined and have unique labels to identify them. Examples of some these labels follow:
The ANTISTATIC label is used when special antistatic or preventive measures must be taken to avoid hardware damage or equipment malfunction.
CAUTION - HEAVY OBJECT LABEL
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WARNING - HAZARDOUS VOLTAGE LABEL
WARNING - LINE VOLTAGE PRESENT LABEL
DANGER - HAZARDOUS VOLTAGE LABEL
DANGER - HAZARDOUS VOLTAGE LABEL
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DANGER - HAZARDOUS VOLTAGE LABEL
PINCH HAZARD LABEL
SIDE PINCH HAZARD LABEL
CAUTION - MANIPULATOR COUNTERBALANCE LABEL
WARNING - CRUSH LABEL
WARNING - DIB ELECTRICAL SHOCK LABEL
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WARNING - PDU 48 VOLT LABEL
Page 10 of 10 Rev. 0736 Ultra System Overview Lockout/Tagout Lockout/Tagout Introduction Lockout/tagout procedures establishes the minimum requirements for the lockout of energy-isolating devices whenever servicing the test system equipment. The following information is included in this section: • Lockout/Tagout Key Definitions • Types of Hazardous Energy • Lockout/Tagout Procedure • Lockout/Tagout Summary Lockout/Tagout Key Definitions Lockout: Blocking the flow of energy to the equipment by installing a locking device at the energy source. Lockout prevents the operation of the equipment. Guards and interlocks are not acceptable as substitutes for locks. Tagout: A visual warning not to touch the equipment, usually a tag placed on the equipment. Tagout does not prevent operation of the equipment. Authorized employee: Anyone trained to apply locks to the equipment. An authorized employee is not necessarily the same employee who operates the equipment. Affected employee: Anyone who operates equipment that may be locked out or works in the area when the equipment is locked out. Zero mechanical state: A condition that occurs when all of the energy to and within the equipment is de-energized. Service and Maintenance: Activities such as installing, adjusting, repairing, cleaning or un-jamming the test system equipment.
Page 1 of 23 Rev. 0736 Ultra System Overview Lockout/Tagout Types of Hazardous Energy When working on the test system, be aware of the following types of hazardous energy: • Electrical • Mechanical (belts/pulleys/gears) • Pneumatic (air) • Hydraulic (fluid) • Thermal (heat) • Gravity • Chemicals (gas or liquid) • Cryogenic Lockout/Tagout Procedure This section describes how to perform the lockout/tagout procedures and contains the following information: • Purpose • Compliance with This Procedure • Lockout/Tagout Equipment • Lockout/Tagout Procedure • Lockout/Tagout Sequence Purpose This lockout/tagout procedure establishes the minimum requirements for the lockout of energy-isolating devices whenever servicing the test system equipment. It must be used to ensure that the equipment is stopped, isolated from all potentially hazardous energy sources and locked out before anyone servicing the equipment could be injured by an unexpected energizing or startup of the equipment, or the release of stored energy.
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Compliance with This Procedure Before authorizing entry to service access areas of the equipment, service personnel - including, but not limited to, employees of the manufacturer, customer and third-party service providers - must be trained in both general safety hazards (electrical, fire, mechanical, chemical, and so on) and on this specific equipment. When in doubt that training is adequate, contact Teradyne for servicing. Authorized employees are also required to comply with the restrictions and limitations imposed on them during lockout and when required to perform the lockout procedure. All personnel, including other service personnel, operators, users and casual visitors, upon observing that a piece of equipment is locked, must not attempt to start, energize or use that equipment. Violations of these safety precautions should be reported immediately to the employee and his or her supervisor for enforcement and corrective action. Any violation not corrected is grounds for Teradyne service personnel to refuse to service the equipment.
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Lockout/Tagout Equipment This section describes and provide examples of acceptable types of lockout/tagout equipment. Locks • Locks must be identified and used only for lockout. • Each person entering the area must have their own lock. • You should never give your key to another person. The figure Lockout Locks shows an example of some different type of locks.
Electrical Water Air
Personal Assigned Lock Multiple Energy Source Lockout Box Lockout Locks
If using the multiple energy source locks: 1. Remove the desired locks from the box and install on the appropriate energy sources. 2. Place the master key inside the box and lock the box using a personal assigned lock. Note The box is provide with multiple lock/hasp holes to facilitate multi-person lockout.
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Tags • Must be a DANGER warning tag. • Must be signed and dated by the person applying it to the energy source. The figure Tagout Tags shows a sample of a tag.
Other Text Options: • DO NOT START DANGER • EQUIPMENT LOCKED OUT • DO NOT REMOVE LOCK • DO NOT OPEN VALVE DO NOT OPERATE
Signed By: ______
Date: ______
Tagout Tags
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Hasps A device that allows multiple people to perform lockout on the same energy source. The figures Hasp and Hasp Installed on Test System Equipment show examples of a lockout hasp.
Hasp
Hasp
Hasp
Lock
Tag
Hasp Installed on Test System Equipment
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Specialty Devices Any number of devices used for a special type of lockout application. These can include, valve covers, plug boxes, breaker locks, connector boots, etc. For recommendations on Lockout/Tagout for the test system pneumatics see the Recommendations for the Pneumatic System section of this documentation. The figure Manipulator Z-Motion Service Lock shows and example of a special type of gravity lock device.
Unlocked Position Locked Position Manipulator Z-Motion Service Lock
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The figure Facility AC Input Power Circuit Breaker shows an example of a special type of electrical lock device.
Facility AC Input Power Circuit Breaker
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The figure Chilled Water Valve Cover Lockout Device shows an example of a special type of hydraulic lock device.
Chilled Water Valve Cover Lockout Device
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The figure Cooling Distribution Unit Ball Valve Cover Lockout Device shows another example of a special type of hydraulic lock device.
Cooling Distribution Unit Ball Valve Cover Lockout Device
Note This type of device is only used when the chilled water valve cover lockout device cannot be used.
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The figure Hydraulic Pressure Bleed-Off Valve shows a special hydraulic bleed-off device.
CDU Service Side
Hydraulic Pressure Bleed-Off Valve
Note Use a bucket and the drain hoses provided in the UltraFLEX drain kit to drain the facility supply and return lines to bleed-off the system pressure.
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The figure UltraFLEX Pressure Meter shows a special pressure meter.
CDU Service Side Check Supply line pressure here
Check Return line pressure here.
UltraFLEX Pressure Meter
UltraFLEX Pressure Meter
Note Use the pressure meter from the UltraFLEX drain kit to verify water line pressure has been released from the system.
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The figure Liquid Nitrogen Lockout Device shows an example of a lockout device for liquid nitrogen.
Liquid Nitrogen Lockout Device
Note If liquid nitrogen is used it must be locked out at the source.
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Recommendations for the Pneumatic System Lockout/Tagout equipment for the UltraFLEX pneumatic system is not provided by Teradyne. The customer is expected to provide external devices to disconnect the compressed air source from the system and prevent reapplication of air during periods of service or maintenance. Any such customer provided devices should provide a method to remove and lock out air pressure to the test system and also provide a method to bleed residual pressure. A sample system is shown in the figure Lockout/Tagout for Typical Customer Air System. The figures Air Valve Lockout Devices and Air Regulator show examples of special pneumatic lockout devices.
Customer Supplied Regulator Padlock
UltraFLEX
Compressed Air Hose Lockout Air Valve Quick Release
Lockout/Tagout for Typical Customer Air System
! CAUTION! !
If the test system has a nitrogen purge option installed, be sure to shut off and lock out the nitrogen gas at the source.
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The UltraFLEX Pneumatic System is used to deliver compressed air to the docking interface. This air is used to drive the outer docking apparatus and the Inner Pull Down (IPD). Follow the appropriate site procedure to remove air pressure from the test system equipment and to Lockout/Tagout the equipment. The figure Air Valve Lockout Devices shows examples of typical devices used to Lockout/Tagout the compressed air.
Air Valve Lockout Devices
To remove pressure internally, locate the air regulator inside the support cabinet. Lift the regulator control knob to unlock it and rotate counter-clockwise until the air pressure reads zero. When service is complete, remove the lockout devices from the air system, reapply external air and set the regulator back to 80 PSI by lifting the control lock and rotating the control clockwise. The figure Air Regulator shows the air regulator.
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Regulator Control Knob Air Regulator
Air Pressure Gauge
Air Regulator
Lockout Stanchions Lockout stanchions are placed around the test system to provide a visual warning to affected employees and anyone else who may approach the system that it is under lockout/tagout. The figure Typical Stanchion Setup shows an example of how to place the stanchions around the test system.
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If wall is not present, place additional stanchions on all sides of test system.
Approaching Approaching Fr o m Fr o m
The size of the lockout area should increase or decrease as appropriate Approaching for the test system. Fr o m Use additional stanchions as required.
Typical Stanchion Setup
Lockout/Tagout Procedure The basic steps of Lockout/Tagout are as follows: 1. Prepare test system equipment for shutdown 2. Shutdown test system 3. Isolate energy sources with energy isolating devices 4. Release stored energy 5. Apply Lockout/Tagout devices 6. Verify isolation 7. Perform service/maintenance 8. Prepare to re-energize equipment 9. Remove tags, locks and hasps Page 17 of 23 Rev. 0736 Ultra System Overview Lockout/Tagout
10.Re-energize test system equipment See the Lockout/Tagout Sequence section of this documentation for a detailed Lockout/Tagout procedure for the UltraFLEX test system. The figure High Level Lockout Process Flow shows the basic process.
De-Energize Service Re-Energize Service is Equipment Equipment Equipment Service is Requested Complete (Step A) (Step B) (Step C)
Steps A and C are performed by the Authorized Equipment Owner Step B is performed by the Service Employee
High Level Lockout Process Flow
Lockout/Tagout Sequence The following information details the steps to follow for Lockout/Tagout: Prepare Test System Equipment for Shutdown Performed by Authorized Equipment Owner 1. Notify all affected employees, the area supervisor and all service employees that the test system equipment must be shut down and locked out. Confirm that all affected employees have been notified before starting the lockout sequence. 2. The authorized employee must review all appropriate documentation to identify the type and magnitude of the energy used by the equipment, understand the hazards of that energy and how to control it. 3. Set up the Lockout/Tagout stanchions and warning signs completely around the test system area. 4. Stop any production run, calibration or diagnostic test that may be running on the test system equipment. 5. Undock the test head from any peripheral equipment. 6. Move the manipulator to a service position, then using the pendant, drive the manipulator up or down until the “Z” motion service lock can be applied. Page 18 of 23 Rev. 0736 Ultra System Overview Lockout/Tagout
7. Slide the deadbolt of the “Z” motion service lock to the locked position on the manipulator. Refer to the previous figure Manipulator Z-Motion Service Lock. Note Wear safety glasses when bleeding pressure from air and water lines.
8. Bleed the internal air pressure of the pneumatic system of the test system at the air regulator located inside the Support Cabinet. Bleed the internal air pressure down to 0 psi. Refer to the previous figure Air Regulator. 9. Turn off the test system power switch. Use the appropriate power-down sequence as identified in the UltraFLEX Installation and Checkout Guide, Teradyne Document Number 553-706-02. 10.Properly power down the test system computer. Note If other peripheral equipment is connected to the UltraFLEX test system such as a handler or prober, this equipment may also be needed to be properly shut down and locked out. Check with the authorities of that particular equipment for proper Shutdown and Lockout/Tagout procedures for this equipment.
Shutdown Test System Performed by Authorized Equipment Owner 1. Turn off the test system’s main circuit breaker CB1 located inside the power distribution unit (PDU).
WARNING!
Line voltage is present when CB1 is OFF, risk of electrical shock or burn hazard. Turn off and lock out facility main AC power circuit breaker before servicing. Never perform lockout at the CB1 circuit breaker.
2. Turn off the facility main AC power circuit breaker that supplies power to the system you are performing Lockout/Tagout on. 3. Turn off the compressed air line that supplies the system you are performing Lockout/Tagout on. 4. Turn off the facility chilled water supply line valve that supplies the system you are performing Lockout/Tagout on, wait 30 seconds, then turn off the return line valve.
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5. If the Nitrogen Purge Option is installed in the test system, turn off the nitrogen line that supplies the system you are performing Lockout/Tagout on. Isolate Energy Sources with Energy Isolating Devices Performed by Authorized Equipment Owner 1. Apply a hasp to the facility main AC power circuit breaker in the off position. 2. Apply valve covers to both the supply and return water lines of the facility chilled water supply. Note If valve covers can not be used on the individual lines, apply a cover to the CDU as shown in previous figure Cooling Distribution Unit Ball Valve Cover Lockout Device.
3. Apply a hasp to the water valve cover(s). 4. Apply a valve lock to the facility compresses air valve. If this is not possible, bleed the air line, then remove the air line from the valve. 5. Place the air line hose into a lockbox and close the box. 6. Apply a hasp to the air valve lock or hose lockbox. 7. If applicable, apply a valve lock to the facility nitrogen valve. Refer to the previous figure Liquid Nitrogen Lockout Device. 8. Apply a hasp to the nitrogen valve lock. Release Stored Energy Performed by Authorized Equipment Owner Note Always wear safety glasses when bleeding air or water lines to protect you eyes
1. Bleed off the pressure in the chilled water supply and return lines at the CDU. Use a bucket and the drain hoses provided in the UltraFLEX drain kit. Refer to the previous figure Hydraulic Pressure Bleed-Off Valve. 2. Bleed off the pressure in the air line at the regulator valve of the facility compressed air source until the pressure reads 0 psi.
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Apply Lockout/Tagout Devices Performed by Authorized Equipment Owner
WARNING!
Line voltage is present when CB1 is OFF, risk of electrical shock or burn hazard. Lockout facility main AC power circuit breaker before servicing. Never perform lockout at the CB1 circuit breaker.
Note Complete lockout tags with the following: reason for the lockout, the responsible person and the date.
1. Fill out a tag with the appropriate information for the facility main AC power circuit breaker and apply it to the hasp. 2. Apply an individual assigned lock to the hasp on the breaker. 3. Fill out a tag with the appropriate information for the facility chilled water valves and apply it to the hasp. 4. Apply an individual assigned lock to the hasp on the valve. 5. Fill out a tag with the appropriate information for the compressed air valve and apply it to the hasp. 6. Apply an individual assigned lock to the hasp on the air valve or hose lock box. 7. If applicable, fill out a tag with the appropriate information for the facility nitrogen valve and apply it to the hasp. 8. Apply an individual assigned lock to the hasp on the valve. Verify Isolation Performed by Authorized Equipment Owner 1. At the customers facility main AC power circuit breaker, verify that the breaker is in the OFF position and that the breaker is properly locked out and tagged out. 2. Check the Power Distribution Unit (PDU) and verify that the Main Power Available Lamp is off. 3. Turn on CB1 at the PDU and verify that none of the lamps illuminate. 4. Turn CB1 back to the OFF position. 5. Verify that the pressure of the facility chilled water supply and return lines has been bled down to 0 psi. Refer to the previous figure UltraFLEX Pressure Meter.
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6. Verify that the air pressure at the facility compressed air connection has been either been bleed all the way down to 0 psi, or that the air hose going to the tester is disconnected and locked in a valve cover lock box. 7. Verify that the manipulator “Z” motion deadbolt lock is in the locked position. 8. If applicable, verify that the facility nitrogen supply has been shut off and properly locked out and tagged out. Perform Service/Maintenance Performed by Service Employee 1. Install a personal assigned lock to each hasp or lockout box/lockout device attached to the test system. 2. Perform the required service or maintenance. 3. Once the service/maintenance work is complete, remove the personal assigned locks. 4. Notify the Authorized Equipment Owner when the work is complete. Prepare to Re-energize Equipment Performed by Authorized Equipment Owner 1. Check the test system equipment and around the area of the equipment to ensure that all non-essential items (tools, parts, rags, etc.) have been removed and that the test system equipment components are operationally intact. 2. Clear all employees from the test system equipment. 3. Notify all affected employees, the area supervisor and all service employees that the test system equipment is ready to be re-energized. Remove Tags, Locks and Hasps Performed by Authorized Equipment Owner 1. Remove all personal assigned locks. 2. Remove the tags from all hasps, lockout boxes and other lockout devices. 3. Remove the hasps, lockout boxes/lockout devices from the test system equipment. Re-energize Test System Equipment Performed by Authorized Equipment Owner 1. Energize the facility air, facility water, facility power and if applicable, facility nitrogen. 2. Restart the test system equipment using the appropriate power-up sequence identified in the UltraFLEX Installation and Checkout Guide, Teradyne Document Number 553-705-02. 3. Adjust the air pressure regulator in the support cabinet to obtain a reading of 80 psi on the gauge.
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4. Unlock the deadbolt of the manipulator “Z” motion service lock. 5. Ensure the test system equipment is functioning properly. 6. Remove the Lockout/Tagout stanchions and warning signs from around the test system area. 7. Release the equipment to the owner. Note If other peripheral equipment is connected to the UltraFLEX test system such as a handler or prober, this equipment may also be re-energized. Check with the authorities of that particular equipment for proper Power-up procedures for this equipment.
Special Circumstances Pay particular attention to special Lockout/Tagout circumstances, such as: • Group Lockout/Tagout • Shift changes • Emergency lock removal Check with the appropriate authorities at the site and use the customer’s procedure for these special circumstances. Lockout/Tagout Summary • Electricity is involved in every part of our business. • Pay attention to your surroundings. • Ask if you are not sure. • Report hazards to your supervisor. • Make sure you take all steps necessary to protect yourself and those around you. • Always look for obvious and hidden energy sources. • Remember, lockout/tagout procedures and electrical precautions are for your safety.
Page 23 of 23 Rev. 0736 Ultra System Overview ESD Damage Prevention and Control Measure ESD Damage Prevention and Control Measure Introduction Electrostatic discharge (ESD) can have a major impact on the operation and long-term reliability of complex test system equipment. The following recommendations are offered to help avoid ESD damage. The test system contains semiconductors that, by the nature of their material (such as MOS) or design (such as LSI, VLSI, or FET), are susceptible to damage from ESD. The nature of the ESD damage may be either: • Hard failures, such as open or fused semiconductor junctions • Partial failure, caused by stressing device leads and junctions, which degrades electrical performance and increases failure susceptibility ESD control starts with understanding the problem and incorporating preventive measures that include special work area materials and practices. These techniques and their effectiveness should be monitored and changes implemented as required. ESD control measures are necessary, and offer protection by degree, with static-prevention techniques providing the most protection. The following control measures are strongly recommended for consideration and implementation. The following information is included in this section: • Static Prevention • Static Control
Page 1 of 3 Rev. 0736 Ultra System Overview ESD Damage Prevention and Control Measure Static Prevention To minimize electronic charge generation: 1. Educate operators and maintenance personnel about the electrostatic charge phenomenon, discharge damage and methods to help prevent problems. 2. Eliminate static producing materials from test and work areas, such as: • Plastic and foam coffee cups • Food containers and wrappers • Clothing and shoes fabricated from man-made materials • Cellophane and paper tapes 3. Maintain area humidity between 40% and 60%. 4. Create a static-conductive work area, including static-conducting floors and tables, and, if necessary, use antistatic spray solutions. 5. To prevent ESD damage during the unpacking, installation or removal of test system instruments, it is strongly recommended that the operator and the instruments be properly grounded. 6. Wear an antistatic coat and tested-grounded wrist strap. Refer to the figure ESD Equipment. Note In severe static-inducing environments such as low-humidity or automated work areas, use air ionizers and, if possible, consult an ESD control specialist.
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Wrist Strap Antistatic Coat Antistatic Containers ESD Equipment
Static Control Minimize electronic charge generation by using the following techniques: 1. Drain static charges from personnel and tools in the work area by: • Using static-conductive floor mats and grounded anti-static service mats. • Using tested-grounded wrist straps with 1 Mohm resistors. See the previous figure ESD Equipment. • Wearing an anti-static coat. See the previous figure ESD Equipment. 2. When handing electronic devices or assemblies to another person, both persons should be discharged before the exchange to neutralize static charges by following these procedures: • Move, handle and store electronic parts and assemblies in antistatic containers. See the previous figure ESD Equipment. • Do not touch printed-circuit board leads or component leads of electronic assemblies. • Service electronic assemblies in a static-controlled area. • Discharge static from tools before servicing electronic assemblies.
Page 3 of 3 Rev. 0736 Ultra System Overview Safety Certification Safety Certification Introduction This section includes the following information: • Regarding Product Certification • Rules for TЬV Certified Product Labeling and Product Certification Requirements • Regarding EMC Certification for the UltraFLEX Test System • Regarding SEMI Standards and Guidelines • Rules for Product Disposal • Lockout Procedure for the UltraFLEX Test System • SEMI E6 Requirements • SEMI S13 Requirements Regarding Product Certification The UltraFLEX test system has been certified by an independent agency as conforming to certain international standards. The certification is noted with one or more appropriate labels placed on the system. Please be advised that certain changes to the system may invalidate this certification, in which case the system certification label must be removed. Examples of changes that require label removal are: • Adding subsystems that have not themselves been certified to standards applicable to that subsystem. • Modifications to the system itself that affect critical parts as listed on the certifying agency’s construction data form. Altering or defeating any safety features provided with the system. Teradyne engineers are instructed to remove these labels when they make customer-requested modifications that invalidate the certification. Ultimate responsibility for removing the labels when required rests with the customer. If you have any questions, please contact the nearest Teradyne Global Customer Services (GCS) center.
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Rules for TЬV Certified Product Labeling and Product Certification Requirements Overview TЬV Rheinland N.A. requires that Teradyne protect their certification mark that is placed on our products. This means that only products that conform to the TЬV Certification Standard should carry the TЬV Bauart, GS, or Tmark markings. At the factory, the certification mark is placed on a product or system if it is faithfully reproduced per the certification standard. If parts are added or changed that are not listed on the constructional data forms (CDF), which is an official TЬV list of authorized critical parts, then the certification mark cannot be placed on the product. Additionally, if the product is at the customer’s site, we must inform them that any compromising changes initiated by Teradyne or themselves require that the certification mark be removed. Background Throughout the world, there are legal requirements to have all electrical and mechanical products used in industry "certified" by a recognized test agency. Examples of these requirements are: • The EC Directives for Safety and EMC in the Common Market countries • The OSHA and FCC rules in the USA • The Canadian CSA Standards • Japan and Korea’s Safety RFI laws Most of Teradyne’s systems have been certified by the internationally recognized test agency TЬV Rheinland N.A. for safety and other regulated issues, such as EMC. Certification of products by this agency meets most of the legal requirements of the various countries, and in many cases satisfies the safety requirements of Teradyne’s customers. Certified products are identified by the test agency label (certification mark) located near the main power label. In addition, major subassemblies requiring certification have an agency certification mark near the assembly nameplate or identification label. Rules and Regulations TЬV requires that Teradyne and its customers take reasonable actions to protect and use their agency certification and markings properly. Products bearing the certification mark are subject to several restrictions imposed by the test agency as part of the approval. Deviation from these restrictions constitutes a violation of the certification process and approval agreement, and effectively decertifies that system. The test agency requires that a decertified product have the test agency certification mark and label removed.
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Changes to a product that decertify it create legal and liability problems for Teradyne and the customer, and should be avoided. Whenever a situation occurs where avoidance is not possible, the customer should be informed of the situation and must agree to the proposed action before the changes are made. The basic guidelines to preserve certification are as follows: • Prior approval from the test agency is necessary when substituting any critical parts defined by the test agency on their construction data form. In addition, any similar parts added to a product must also have prior approval. • The system may not have changes made to the operator-accessible area that create an operator hazard that was not allowed in the original certification. • Teradyne and the customer, either of whom can make changes, are responsible for maintaining the integrity of the certification. Decertification and agency certification mark removal, as required by the test agency, applies when any of the following issues arise. If Teradyne or the customer - prior to shipping, during installation, during either service or application support, or when providing replacement parts: • Substitutes parts not listed on the CDFs. • Adds any subassembly that uses AC power and that is not on the CDFs, and does not have prior approval from the test agency. • Modifies the system or any subassembly that creates an electrical, mechanical, or thermal hazard within the limits of the certification standard used. • Adds any subassembly or accessory that creates an electrical, mechanical, or thermal hazard within the limits of the certification standard used. This includes internal and external assemblies, as well as data processing, instrumentation, power supply assemblies and test head manipulators and interfaces. • Significantly alters the basic system by changing or adding parts, whether they are listed on the CDFs or not, and changes the power or thermal profile of the system. • Adds AC powered or hazardous parts and assemblies to the test head interface as an applications package. • Assists anyone, by instruction or direct action, to add or use parts that create hazards or alter the electrical or thermal system profile. • Removes or defeats any safety feature designed into the product as part of the certification. TЬV requires that Teradyne notify its customers that they must also take responsibility for removing the agency certification label if they take any of the previously defined actions, unilaterally or in conjunction with other parties such as Teradyne, OEM parts suppliers, or outside contract services.
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Additional Information Copies of the test agency certification license are attached to the Customer Notice Regarding Product Certification that is sent with each system. If further assistance or clarification of the certification rules is required, please contact the Teradyne Product Safety Group, a part of the Central Engineering Services in Boston, Mass., USA. Regarding EMC Certification for the UltraFLEX Test System This product has been tested and certified by an independent agency to the requirements of the European Union EMC Directive via the Technical Construction File method. Please be advised that the Technical Construction File method incorporates both equipment and site criteria when determining conformity to the essential requirements of the EMC directive. To ensure that the final installation of the product conforms to the EMC directive and to maintain the integrity of the EMC certification, the user has the responsibility to: • Understand and address the EMC issues. • Maintain the system hardware EMC features. • Ensure that site criteria are met. If you have further questions or require additional assistance, please contact the nearest Teradyne Support Center. EMC Hardware Requirements Incorporated in the test system are the following EMC features that the user must maintain to keep the EMC certification valid: • RFI filters are incorporated in the system. The system must be properly grounded through either a low impedance ground wire in the AC mains service or a local ground rod. • RFI gasketing has been added to the test system doors and covers. Internal conductive shields are used for EMC control where covers are polymeric and uncoated. • RFI filtered AC outlets have been incorporated for all user-accessible outlets or AC cord sets. • RFI shielded digital cables are used when the cables are accessible from the exterior of the test system. To maintain the RFI containment, these cables must always be shielded and have grounded connectors at both ends for termination. Shielded cables or filtered digital connectors are used: • All digital connectors used as a normal part of the system incorporate a shielded cable to the connector and external assembly. These digital cables must always have a shield if replaced or added by the end user.
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• Unused digital connectors are covered and require tools for access. Any cables to be added must be of a shielded type. • The shielded cables and covered connectors are necessary to minimize RFI and to protect the internal circuitry against damage from external RFI, ESD and fast transient signals. • An RFI-shielded harness cover is used to cover the wiring between the test head and the support cabinet. This harness cover is specially made to incorporate an RFI shield in its construction. The closure extending down the length of the cover must be properly overlapped to maintain the RF seal. The harness cover shield, secured at the ends of the cover, must maintain the coaxial ground connections to maintain the RF seal. Installation Site Criteria The following EMC control techniques are specific for this test system. These techniques are permitted by the European Union EMC Directive for use on special purpose industrial equipment. This product has been certified by the competent body, TЬV Rheinland, using the Technical Construction File method. The Technical Construction File, which was prepared by TЬV Rheinland, defines the needed hardware, site criteria and testing for conformance. The following four site criteria must be met to maintain the system’s EMC integrity and certification: RF emissions, RF immunity, static control, and power. RF Emissions The system site is considered part of the criteria defining the specifications for radiated RFI. In normal applications, the test head interface is open for manual testing, and interfaces to another assembly, such as a prober or handler. When used in this manner, the RF seal of the system is interrupted, causing RF emissions above the CISPR 11 Class A limits. When the test system is used properly for EMC, the following criteria apply: • The system may radiate RF energy above CISPR limits at the site. The management at the time of installation either accepts interference to any other electrical apparatus (such as PC-type computers or office machines), or moves such apparatus 10 meters (32.8 feet) from the test area. Ideally, the test area should be an RF-shielded room. • It is recommended that metal or shielded walls be installed. If the test area has windows, the glass must have RF shielding. Test area enclosures should be selected for EMC control features. • In the adjacent environment, there may still be RF energy levels above the CISPR Class A limits. This environment: 1. Should have an installation plan that is carefully reviewed by the Teradyne personnel responsible for EMC conformity. This site criterion is part of the certification. 2. Would normally not be an office area.
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The various shielding or RF attenuator schemes used must ensure 20 dB of RF reduction from the test system to the outside wall of the building. If the site criteria cannot be met, then an RF audit of the site and system must be performed by a laboratory approved by TЬV Rheinland. The results are then given to Teradyne and TЬV Rheinland for review and recommendations. These recommendations may provide other conformance criteria or an acceptance of the existing site. These recommendations are not an arbitrary option of the user. The site criteria are considered part of the certification and must be met to an acceptable standard. RF Immunity Portable telephones, two-way radios, or similar RF-generating apparatus should not be used within 10 meters (32.8 feet) of the installed system because they are intrinsically susceptible to external EMI/RFI. The instrumentation cannot be protected and still perform as intended. Static Control Anti-static control measures must always be used. Connection points for anti-static wrist straps are provided at the test head and the support/expansion cabinets. Tested grounded anti-static wrist straps must always be worn when working at the test head or other instrumentation I/O ports. Refer to the ESD Damage Prevention and Control Measure section of this documentation for additional information. Power Installation sites must have dedicated AC power service for the test systems. Test area AC power must be separate from the power in the office areas. Regarding SEMI Standards and Guidelines Overview of SEMI Standards Program Founded in 1970, Semiconductor Equipment and Materials International (SEMI) is a worldwide trade association that provides a variety of services to its global network of member companies. One such service is providing a forum for members to develop internationally accepted standards for components, materials, and equipment interfaces. For additional information, visit SEMI on-line at www.semi.org or call SEMI Standards Subscription Service at (415) 940- 6904.
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SEMI Safety Guidelines SEMI Standards Facility and Safety Division manages the development of safety guidelines. In the 1996 edition of the SEMI Facility and Safety’s Book of SEMI Standards (BOSS) are ten safety-related guidelines. The primary guideline is SEMI S2, entitled “Safety Guideline for Semiconductor Manufacturing Equipment,” which is a performance-based safety document. It is not intended to be limited to technology but to provide the path to integration of environmental health and safety features into the initial design of the equipment. SEMI S2 Versus Other International Safety Standards The UltraFLEX test system equipment is also safety certified by TЬV Rhineland N.A.A to the international IEC/European EN safety standard for test equipment IEC1010/EN61010. SEMI S2 guidelines for electrical safety exceed IEC1010 in the areas mentioned below. Per SEMI S2, the supplier should design the equipment to minimize the need to calibrate, test, or maintain equipment that may be energized and to minimize work that must be performed on components near exposed, energized circuits. Work in categories type 3 and 4 (SEMI definitions quoted below) should have specific written instructions in the maintenance documentation. The supplier should list type 3 or higher electrical hazard tasks by their type in its equipment operation and maintenance documentation: Type 3 - Equipment is energized. Live circuits are exposed and accidental contact is possible. Potential exposures are not greater than 30 volts rms, 42.2 volts peak, 240 volt-amperes, and 60 volts dc. Type 4 - Equipment is energized. Live circuits are exposed and accidental contact is possible. Voltage potentials are greater than 30 volts rms, 42.2 volts peak, 240 volt-amperes, and 60 volts dc or radio frequency (RF) is present.
WARNING!
Live power supply output adjustments is typically type 4 category (hazardous) work. Service personnel should carefully follow the instructions in this documentation for live adjustments to the power supply outputs. To prevent serious burns, service personnel should also remove all rings, watches, and any metal objects capable of bridging hazardous energy parts.
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Recommendation: Teradyne service personnel have the appropriate technical training and experience necessary to minimize hazards intrinsic to the equipment, and also to minimize the danger to themselves or other personnel. Customers using self- maintenance and third-party maintenance should ensure that anyone using a tool to access the equipment enclosure have the training and experience equivalent to that of Teradyne service personnel. Operator servicing and service by maintenance personnel are not allowed unless the individuals are also qualified service personnel with the appropriate test system specific training as well as experience working with hazardous voltages and electrical energy. Per SEMI S2, the main facility AC service disconnect (AC mains) must have a lockout/tagout capability. Recommendation: The customer should review site-specific lockout/tagout training procedures with all personnel authorized to enter service access areas of the equipment. See 29CFR1910.147 for OSHA-USA codes pertaining to lockout/tagout as an example of a typical minimal lockout procedure that all parties at the customer site must meet before entering service access areas of the equipment. Recommendation: A service disconnect device, readily accessible to the user, must be installed in the permanent building wiring to the equipment within the facility. If so, all SEMI requirements for lockout/tagout should also be met at the facility disconnect. Per SEMI S2, the main test system circuit breaker CB1 has at least 10,000 rms symmetrical amperes at 208/120 volt operation, and 14,000 rms symmetrical amperes at 480/277 volt operation. Recommendation: This SEMI requirement should also be addressed where additional overcurrent protectors are installed in the permanent building wiring to the equipment within the facility. Per SEMI S2, the equipment must have an “emergency off” (EMO) circuit and per SEMI S2, all EMO actuators should be readily accessible from operation and maintenance locations. The test system has four EMO actuators: one on the front of the support cabinet and another on the rear. A third EMO actuator is located on the front of the test head and the fourth is located on the manipulator. Recommendation: The customer should review access to the EMO actuators when laying out the facility and verify that the EMO actuators are close, defined as unobstructed access within 10 feet (3.1 meters), to operation and maintenance locations. Where necessary, remote EMO actuators may be considered, but only after consultation with Teradyne. Per SEMI S2, the equipment should have tie-ins to prevent movement during earthquakes.
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Recommendation: In locations where earthquake protection is a concern or requirement, the test system manipulator/support/expansion cabinet should be bolted to the floor using the shipping brackets. Where use of shipping brackets is not practical, additional attachments may be considered, but only after consultation with Teradyne. Some manipulators are not provided with shipping brackets; however, if the customer so requests, Teradyne will design and provide tie-ins unique to the specific facility and manipulator. Per SEMI S2, the supplier should routinely provide to the end user’s equipment owner, purchasing agent, and environmental health and safety department with bulletins that describe any safety-related upgrades or newly identified hazards associated with the equipment. Recommendation: To receive future Product Support Bulletins, end user’s equipment owner, purchasing agent, and environmental health and safety department or other party, should contact the Teradyne customer care center at 1-800-TERADYNE. Product Support Bulletins describe safety-related upgrades or newly identified hazards whenever issued by Teradyne product safety engineers. Per SEMI S2, equipment with enclosures (primarily of plastic) greater than 1.4 cubic meters (50 cubic feet) should be evaluated for a fire detection system capable of interfacing with the user’s facility alarm system. Recommendation: The equipment is certified by an accredited third party to IEC1010, an international IEC standard applicable to test equipment where the design objectives for prevention of fire are met by: • Taking all reasonable steps to avoid high temperature that might cause ignition • Controlling the position of combustible materials in relation to possible ignition sources • Limiting the use of combustible materials • Ensuring that, if combustible materials are used, they have the lowest flammability practicable • Using enclosures or barriers, if necessary, to limit the spread of fire within the equipment • Using suitable materials for the outer enclosures of the equipment. Teradyne test equipment uses all the above design principles, coupled with thermal sensors connected to the EMO circuit to prevent overheating. Where necessary, fire detectors capable of interfacing to the facility fire alarm may be considered, but only after consultation with Teradyne. The type, location and rating of smoke and heat detectors, if installed in the equipment, must take into consideration the air movement within the enclosure so that the detectors operate correctly.
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Per SEMI S2, chemicals used with the equipment should be reviewed jointly by the supplier and the end user to determine if regulatory restrictions apply. As part of the evaluation process, a materials safety data sheet (MSDS) for each of the chemicals should be available. Recommendation: Any cleaners, lubricants, and coolants used by Teradyne service personnel are a subset of the same chemicals used at the Teradyne manufacturing facilities. A controlled book with the list of the chemicals used and an MSDS for each chemical is posted, for internal use only, in every Teradyne manufacturing facility. The list of chemicals is also included in the SEMI assessment report, and each MSDS is available upon request. Customers using self- maintenance and third-party maintenance should also review regulatory restrictions with the service provider. Rules for Product Disposal All electronic products contain substances that must be disposed of properly. Please be kind to our shared environment. Check with your local government authority for details regarding where to recycle or dispose of obsolete systems, assemblies and components. It may be illegal to dispose of obsolete systems, assemblies and components by placing them in the trash in many countries: • Disposal in the USA: Check federal, state, and local laws. • Disposal in Europe: Check the EU Directives, and national and local laws. • Disposal in the rest of the world: Check national and local laws. If you cannot find recycling or disposal information that you need elsewhere, call your local Teradyne representative. The following items should not be thrown in the regular trash or put down the drain: • Integrated circuits (ICs) • Video monitors • Printed wiring board assemblies and bare printed wiring boards • Cathode ray tubes • Mercury relays and mercury wetted relays • Rechargeable and nonrechargeable batteries • Solder/lead • Solvents and cleaners (flux, Alcohol, acetone) • Adhesives or glues (Loctite Thread-lock) • Lubricating oils • Fluorescent light bulbs Page 10 of 16 Rev. 0736 Ultra System Overview Safety Certification
• Material in contact with process solvent • Filtering/polishing media used in a process (carbon, resin, cartridge filter) • Rags/materials containing oil • Used oil • Material containing lead, mercury, silver or other metals • Paint • Miscellaneous electronic devices • Any other chemical or product that may have chemicals and/or metals in them which could potentially contaminate the environment Lockout Procedure for the UltraFLEX Test System Purpose This procedure establishes the minimum requirements for the lockout of energy-isolating devices whenever servicing the test system equipment. It must be used to ensure that the equipment is stopped, isolated from all potentially hazardous energy sources, and locked out before anyone performs service where the unexpected energizing or startup of the equipment or release of stored energy can cause injury. Compliance with this Program Before authorizing entry to service access areas of the test system equipment, service personnel - including, but not limited to, employees of the manufacturer, customer, and third-party service providers - must be trained in both general safety hazards (electrical, chemical, fire, mechanical, and so on) as well as trained on this specific equipment. When in doubt that training is adequate, contact Teradyne for servicing. Authorized employees are also required to comply with the restrictions and limitations imposed when required to perform lockout procedures. All personnel, including other service personnel, operators, users and casual visitors, upon observing a piece of equipment that is locked, shall not attempt to start, energize or use that equipment. Violations of these safety precautions should be reported immediately to the employee and his or her supervisor for enforcement and corrective action. Any violation not corrected is grounds for Teradyne service personnel to refuse service. Lockout Sequence See the Lockout/Tagout section of this documentation for Lockout/Tagout procedures and additional information.
Page 11 of 16 Rev. 0736 Ultra System Overview Safety Certification SEMI E6 Requirements SEMI E6 - Facilities Interface Specifications Guideline and Format. SEMI E6 is intended to assist suppliers with the communication of information about the facilities needs of their equipment to those who are responsible for the facilities design and the equipment installation. The successful installation and operation of semiconductor equipment is the mutual objective of the owner of the equipment, the operator, the installer and the supplier. SEMI E6 is designed to cover all activities that may be included with equipment installation. The supplier is expected to include within the documentation provided to the user all requirements for the site facilities, equipment shipping, installation, startup, acceptance test and training. Sections included in SEMI E6 are: • Terminology – P&ID – Interconnect – Facilitations • Instructions and Sample – Introduction • Instructions for Introduction • Sample for Introduction • Administrative Interface – Instructions for Administrative Interface – Sample for Administrative Interface • Safety – Instructions for Safety • Non-Physical Conditions • Monitoring Communications • Clearances – Sample for Safety • Facilities Installation Requirements – Environment • Instructions for Environment • Sample for Temperature
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• Sample for Relative Humidity • Sample for Special Lighting - Provide Table for Special Equipment – Requirements • Sample for Vibration Requirements • Sample for Noise Requirements • Sample for Seismic Requirements • Sample for Environment Cleanliness – Schematic (Single Line) Diagram and Equipment Data Sheet • Instructions for Schematic (Single Line) Diagrams • Sample for Schematic (Single Line) Diagram • Notes on Equipment Data Sheet – Equipment Facilitations Drawings • Instructions for Equipment Facilitations Drawings • Shipping and Receiving Requirements – Instructions for Shipping and Receiving Requirements – Sample for Shipping and Receiving Requirements • Installation Requirements – Instructions for Installation Requirements – Sample for Transport and Locating Equipment – Sample for Assembly and Hookup Tools and Equipment • Start-Up Requirements – Instructions for Start-Up Requirements – Sample for Equipment – Sample for Material – Sample for Personnel • Acceptance Test – Instructions for Acceptance Test – Sample for Acceptance Test •Training – Instructions for Training – Sample for Training
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• Addenda – Instructions for Addenda • Addendum Topics – Topics without Examples Provided in this Document – Topics with Examples • Addendum A, Computer Interface • Addendum B, Vacuum Requirements • Addendum C, Electrical Requirements • Addendum D, Vibration Requirements • Addendum E, Floor Loading • Addendum F, Wafer Handling • Addendum H, Contractual Language • Equipment Performance • Monthly status report of facility design, construction, and materials • Complete facility drawings, specifications, and calculations • Facility supplier materials list, test procedures, and certifications – Supplier Inspection • Re-audit of customer’s facility by supplier will be at customer's expense • Customer shall be responsible for supplier's costs associated with failure of the facility to meet specifications SEMI S13 Requirements • SEMI S13 - Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment. • SEMI S13 guidelines present considerations when drafting operation and maintenance manuals in order to help hazard reduction in the operation and maintenance of equipment used in semiconductor manufacturing. • SEMI S13 guidelines apply to the operation and maintenance manuals used with equipment that is used in the production, measurement, assembling and testing of semiconductor products. Sections included in S13 are: • Terminology – Caution – Danger – Equipment
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– Warning • Concept of Operation and Maintenance Manuals – Provide sufficient information – Conform to ANSI Guide for Developing User Product Information – Understand the risk associated with each task – Primary language of the equipment location – Additional safety features • Hazards Inherent in Equipment – Risk Assessment (SEMI S10) of the equipment – Summarize equipment hazards, their locations, and safety procedures • Hazardous Energy Control Procedures – Source, isolation and control • Hardware Safety Interlocks – Describe hardware safety interlocks – Location of hardware safety interlocks • Hazard Alerts – Visual alerts, auditory alarms, status indicators or hazard alert systems (SYSMON) – Location of each hazard alert • Hazards Inherent in Tasks – Signal word and recommended safety procedures – Include definition of signal word • Material Safety Data Sheet (MSDS) – Chemical substances inherent in and shipped with the equipment – International Labor Convention No. 170 and ANSI Z400.1 • Personal Protective Equipment (PPE) – PPE required per task • Inspection of System Equipment and Maintenance of Consumables – Preventative Maintenance – List of consumable parts and materials – Specific tools and PPE required
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• Training Requirements – Describe training • Place of Supplier's Contact in Case of Emergency – Whom to contact – Notify user in writing when change in contact • Laws and Regulations – Relevant Administrative Laws and Regulations – Issues Regarding Product Liability (PL)
Page 16 of 16 Rev. 0736 Ultra System Overview Material Handling Material Handling Introduction This section contains safety information needed to properly handle hazardous materials used to maintain and repair the test system or for handling any waste created as a result of maintenance and repair activities. The following information is included in this section: • Handling of Hazardous Materials • Handling of Solid Waste • Handling of Liquid Waste • Material Safety Data Sheets (MSDS) Handling of Hazardous Materials Hazardous materials used in any maintenance or repair activities should be handled and disposed of in accordance with facility guidelines and local regulations. The test system is not used in hazardous material environments so no special handling is required for decommissioning. Handling of Solid Waste Materials that become solid waste as a result of any maintenance or repair activities (wipes, cotton or foam tip swabs) should be handled and disposed of in accordance with facility guidelines and local regulations whenever practical. No part of the test system is considered solid waste when removed as part of a repair activity. Test system components may be disposed of in accordance with factory guidelines and local regulations whenever practical. Solid Waste Disposal The test system is constructed mainly of solid materials consisting of: • Electrical components such as circuit breakers, contactors, relays and insulated wires. • Electronic components such as resistors, capacitors and ICs the majority of which are soldered onto printed circuit boards. • Mechanical components such as tubular steel structures, sheet metal covers, and other small hardware such as screws, nuts and bolts. All such components, assemblies and any replaceable materials should be disposed of properly according to the applicable federal, state and local laws where the equipment is situated.
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To the best of Teradyne's knowledge, there are no known hazardous materials presently being used in the Test System. Furthermore, any substances used have an MSDS (Material Safety Data Sheet) available. Handling of Liquid Waste Materials that become liquid waste as a result of any maintenance or repair activities (alcohol, lubricants, coolant, etc.) should be handled and disposed of in accordance with facility guidelines and local regulations whenever practical. Liquid Waste Disposal The test system uses HFE-7100 3MTM NovatecTM coolant to cool the test head, any coolant removed from the test system should be disposed of properly according to the applicable federal, state and local laws where the equipment is situated. To the best of Teradyne's knowledge, there are no known hazardous materials presently being used in the Test System. Furthermore, any substances used have an MSDS (Material Safety Data Sheet) available. Material Safety Data Sheets (MSDS) This section contains MSDS information for the following chemicals: • Isopropyl Alcohol • EMB Lubriplate Lubricant
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Isopropyl Alcohol
HAZARD RATING Fire JNJ Industries, Inc. 4 = Extreme 290 Beaver Street 3 3 = High Reactivity Franklin, MA 02038 Toxicity 1 0 2 = Moderate 0 Phone: 508-553-0529 * Fax: 508-553-9973 1 = Non-Toxic, Slight Web Site: www.jnj-industries.com * E Mail: [email protected] 0 = Insignificant Special
FOR CHEMICAL EMERGENCY call INFOTRAC at 1-800-535-5053 24 Hrs. per day, 7 days per week MATERIAL SAFETY DATA SHEET MATERIAL GlobalTech® CODE KEY HAZARD CLASS Isopropyl Alcohol, 70% IPA/DI Flammable Liquid FORMULA DATE ISSUED CHEMICAL NAME OR SYNONYMS NA 4/1/01 2-Propanol I - APPROXIMATE COMPOSITIONAL INFORMATION APPROX. WEIGHT % TWA/TLV USP Isopropyl Alcohol 70 400 ppm TWA USP Water DI 30 NE II - PHYSICAL PROPERTY INFORMATION APPEARANCE; ODOR; pH VISCOSITY Water Clear Liquid pH=7 NA MELTING/FREEZING POINT BOILING POINT VAPOR DENSITY (Air) = 1) -88.5° C F.P. 179°F (82°C) 2.0
SOLUBILITY IN WATER % VOLATILE (By Weight) VAPOR PRESSURE (mm Hg) Complete 100% 33 SPECIFIC GRAVITY (Water = 1) EVAPORATION RATE (Butyl Acetate = 1) 0.88 2.88 III - FIRE AND EXPLOSION HAZARD INFORMATION FLASH POINT AUTO IGNITION TEMP LOWER EXPLOSION LIMIT % UPPER EXPLOSION LIMIT % 64°F (18° C, TCC) Will Not Occur NA NA EXTINGUISHING MEDIA
X Foam "Alcohol" Foam X CO2 X Dry Chemical X Water Spray Other SPECIAL FIRE FIGHTING PROCEDURES Use water spray to cool containers and to prevent flammable vapor from escaping. Water may be ineffective on direct flame, but can be used to flush spills from ignition or disperse vapor
UNUSUAL FIRE AND EXPLOSION HAZARDS Liquid is invisible and flammable, vapors may travel in low areas to ignition source IV - HEALTH HAZARD INFORMATION RECOMMENDED WORK PLACE EXPOSURE LIMITS 500 ppm STEL OSHA & ACGIH EFFECTS OF OVEREXPOSURE Inhalation: May cause mild irritation to nose, throat or above TLV-headache Eye Contact: Slight to moderate irritation, may cause corneal injury Skin Contact: Prolonged contact results in skin drying Ingestion: May cause vomiting, diarrhea, drowsiness, cramps EMERGENCY AND FIRST AID PROCEDURES Inhalation: Move subject to fresh air, give artificial respiration if breathing has stopped Eye or Skin Contact: Flush with large amount of water. Contact Physician. Remove contaminated clothing and wash before reuse Ingestion: If patient is conscious give two glasses of water/milk and induce vomiting. Get medical attention
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V - REACTIVITY INFORMATION STABILITY CONDITIONS TO AVOID X Stable Unstable Keep away from ignition sources: sparks, heat and flame HAZARDOUS DECOMPOSITION PRODUCTS Will Not Occur HAZARDOUS POLYMERIZATION CONDITIONS TO AVOID May Occur X Will Not Occur INCOMPATIBILITY (Materials To Avoid) Water X Other Concentrated Nitric & Sulfuric acids, Oxidizers, Aldehydes, Halogens, Halogen Compounds VI - SPILL OR LEAK PROCEDURE INFORMATION STEPS TO BE TAKEN IN CASE MATERIAL IS RELEASED OR SPILLED Eliminate ignition sources. Ground handling equipment to prevent sparking. Wear respirator and protective clothing. Dike and contain spill. Suppress vapors with water fog. Soak up residue with absorbent clay or sand. Place in non-leaking containers for disposal
WASTE DISPOSAL METHODS Incinerate waste in accordance with Federal, State, and Local regulations VII - SPECIAL PROTECTION INFORMATION VENTILATION TYPE Use local exhaust ventilation to prevent build-up of explosive vapor concentrations and keep below TLV - also see section IV RESPIRATORY PROTECTION None required during normal use with adequate ventilation PROTECTIVE GLOVES EYE PROTECTION Natural Rubber Safety Glasses OTHER PROTECTIVE EQUIPMENT Eye Bath, Safety Shower VIII - STORAGE AND HANDLING INFORMATION STORAGE TEMPERATURE INDOOR HEATED REFRIGERATED OUTDOOR Ambient Ambient NA NA Ambient
Drum containers should be grounded. Keep containers closed when not in use. Avoid eye and skin contact. Keep away from children. Keep away from heat and flame. Use with adequate ventilation. Wash with soap and water after use IX - TOXICITY INFORMATION SARA Title III: Acute Health: Yes Sudden release of pressure: No Chronic Health: No Reportable quantity (RQ): NE Fire: Yes 313 Toxic Chemical: Yes X - MISCELLANEOUS INFORMATION
Isopropanol - 3, UN1219, PG II
NA = Not Available KEY DATE OF ISSUE SUPERSEDES NE = Non Established IPA/DI 4/1/01 7/14/00 The information contained herein is based on data considered JNJ accepts no responsibility for any personal injury, property accurate. However, no warranty is expressed or implied regarding damage, or other type of loss due to negligence or otherwise resulting the accuracy of these data or the results to be obtained from the use from the use or handling of this material. Manufacturer's Liability is of the material. limited to the net purchase price of the product or at manufacturer's option to the replacement of the product upon its return to us
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HFE-7100 Novec Fluid
3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
Material Safety Data Sheet
Copyright, 2003, 3M Company. All rights reserved. Copying and/or downloading of this information for the purpose of properly utilizing 3M products is allowed provided that: (1) the information is copied in full with no changes unless prior written agreement is obtained from 3M, and (2) neither the copy nor the original is resold or otherwise distributed with the intention of earningprofit a thereon.
SECTION 1: PRODUCT AND COMPANY IDENTIFICATION
PRODUCT NAME: HFE-7100 3M (TM) Novec (TM) Engineered Fluid MANUFACTURER: 3M DIVISION: Electronics Markets Materials Division Performance Materials Division ADDRESS: 3M Center St. Paul, MN 55144-1000
EMERGENCY PHONE: 1-800-364-3577 or (651) 737-6501 (24 hours)
Issue Date: 05/01/2003 Supercedes Date: 04/01/2003
Document Group: 07-6378-9
Product Use: Intended Use: FOR INDUSTRIAL USE ONLY. NOT INTENDED FOR USE AS A MEDICAL DEVICE OR DRUG. Specific Use: Cleaning and Coating Solvent; Heat Transfer Fluid
SECTION 2: INGREDIENTS
Ingredient C.A.S. No. % by Wt METHYL NONAFLUOROISOBUTYL ETHER 163702-08-7 20 - 80 METHYL NONAFLUOROBUTYL ETHER 163702-07-6 20 - 80
SECTION 3: HAZARDS IDENTIFICATION
3.1 EMERGENCY OVERVIEW
Specific Physical Form: liquid Odor, Color, Grade: Clear, colorless, liquid. Slight ethereal odor. General Physical Form: Liquid Immediate health, physical, and environmental hazards: None Known
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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
3.2 POTENTIAL HEALTH EFFECTS
Eye Contact: Contact with the eyes during product use is not expected to result in significant irritation.
Skin Contact: Contact with the skin during product use is not expected to result in significant irritation.
Inhalation: If thermal decomposition occurs: Respiratory Effects: Signs/symptoms may include cough, sneezing, shortness of breath, chest tightness, nasal discharge, and wheezing.
Ingestion: No health effects are expected.
3.3 POTENTIAL ENVIRONMENTAL EFFECTS
A 3M Product Environmental Data Sheet (PED) is available. This substance has chemical moieties that are resistant to biodegradation and is likely to only undergo partial biodegradation in the environment. The high potential of this substance to move from water to the atmosphere means its potential to bioconcentrate is likely to disappear rapidly from aerobic environments. Take precautions to prevent direct release of this product to the environment.
AQUATIC TOXICITY: Testing results indicate that this product has insignificant toxicity to aquatic organisms at its saturation point (Lowest LC50, EC50, or IC50 > substance water solubility). This substance is highly volatile and has a high Henry's Law constant and is thus expected to move rapidly through vaporization from solution in an aquatic compartment or from a soil surface in a terrestrial compartment to the atmosphere.
ATMOSPHERIC FATE: Zero Ozone Depletion Potential (ODP). Atmospheric Lifetime: approximately 4.1 yrs. Global Warming Potential (GWP): 280 (100 year ITH, IPCC1995 method). Global Warming Potential (GWP): 320 (100 yr ITH, IPCC2001 method). Atmospheric degradation products are expected to include: for methyl nonafluoroisobutyl ether: predominantly isoperfluorobutyric acid, CO2, HF, and perhaps also CF3COOH; for methyl nonafluorobutyl ether: n-perfluorobutyric acid, CO2, and HF.
SECTION 4: FIRST AID MEASURES
4.1 FIRST AID PROCEDURES
The following first aid recommendations are based on an assumption that appropriate personal and industrial hygiene practices are followed.
Eye Contact: Flush eyes with large amounts of water. If signs/symptoms persist, get medical attention.
Skin Contact: Wash affected area with soap and water. If signs/symptoms develop, get medical attention.
Inhalation: If signs/symptoms develop, remove person to fresh air. If signs/symptoms develop, get medical attention.
If Swallowed: If signs/symptoms develop, get medical attention. No need for first aid is anticipated.
SECTION 5: FIRE FIGHTING MEASURES
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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
5.1 FLAMMABLE PROPERTIES
Autoignition temperature 405 ºC [Details: (ASTM E659-84)] Flash Point Not Applicable Flammable Limits - LEL [Details: NONE acc to ASTM E681-94, @100C] Flammable Limits - UEL [Details: NONE acc to ASTM E681-94, @100C]
5.2 EXTINGUISHING MEDIA Material will not burn.
5.3 PROTECTION OF FIRE FIGHTERS
Special Fire Fighting Procedures: Water may be used to blanket the fire. Exposure to extreme heat can give rise to thermal decomposition. Wear full protective clothing, including helmet, self-contained, positive pressure or pressure demand breathing apparatus, bunker coat and pants, bands around arms, waist and legs, face mask, and protective covering for exposed areas of the head.
Unusual Fire and Explosion Hazards: No unusual fire or explosion hazards are anticipated. No unusual effects are anticipated during fire extinguishing operations. Avoid breathing the products and substances that may result from the thermal decomposition of the product or the other substances in the fire zone. Keep containers cool with water spray when exposed to fire to avoid rupture.
Note: See STABILITY AND REACTIVITY (SECTION 10) for hazardous combustion and thermal decomposition information.
SECTION 6: ACCIDENTAL RELEASE MEASURES
Accidental Release Measures: Observe precautions from other sections. Call 3M- HELPS line (1-800-364-3577) for more information on handling and managing the spill. Ventilate the area with fresh air. Contain spill. Working from around the edges of the spill inward, cover with bentonite, vermiculite, or commercially available inorganic absorbent material. Mix in sufficient absorbent until it appears dry. Collect as much of the spilled material as possible. Clean up residue with an appropriate organic solvent. Read and follow safety precautions on the solvent label and MSDS. Collect the resulting residue containing solution. Place in a metal container approved for transportation by appropriate authorities. Seal the container. Dispose of collected material as soon as possible.
In the event of a release of this material, the user should determine if the release qualifies as reportable according to local, state, and federal regulations.
SECTION 7: HANDLING AND STORAGE
7.1 HANDLING Avoid skin contact with hot material. For industrial or professional use only. Contents may be under pressure, open carefully. No smoking: Smoking while using this product can result in contamination of the tobacco and/or smoke and lead to the formation of the hazardous decomposition products mentioned in the Reactivity Data section of this MSDS. Store work clothes separately from other clothing, food and tobacco products. Use general dilution ventilation and/or local exhaust ventilation to control airborne exposures to below Occupational Exposure Limits. If ventilation is not adequate, use respiratory protection equipment. Avoid continuous exposure of the material to extreme conditions of heat, i.e., above 150 C (welding, open flame, misuse or equipment failure). Avoid exceeding a watt density of 50 watts/inch2 from a heater surface. Continuous exposure to 150 C results in very slight decomposition of this product and therefore, is a very conservative use temperature threshold. Applications involving exposure of the fluid to temperatures exceeding 150 C or watt densities exceeding 50 watts/inch2 have been safely implemented. Applications which may exceed these use parameters should be reviewed with 3M Technical Service.
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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
7.2 STORAGE Keep container tightly closed. Keep container in well-ventilated area. Store away from heat. Store away from strong bases.
SECTION 8: EXPOSURE CONTROLS/PERSONAL PROTECTION
8.1 ENGINEERING CONTROLS Use with appropriate local exhaust ventilation. Provide local exhaust ventilation at transfer points. Provide appropriate local exhaust when product is heated. For those situations where the fluid might be exposed to extreme overheating due to misuse or equipment failure, use with appropriate local exhaust ventilation sufficient to maintain levels of thermal decomposition products below their exposure guidelines.
8.2 PERSONAL PROTECTIVE EQUIPMENT (PPE)
8.2.1 Eye/Face Protection Avoid eye contact. The following eye protection(s) are recommended: Safety Glasses with side shields.
8.2.2 Skin Protection Avoid skin contact with hot material. Wear appropriate gloves, such as Nomex, when handling this material to prevent thermal burns.
Select and use gloves and/or protective clothing to prevent skin contact based on the results of an exposure assessment. Consult with your glove and/or protective clothing manufacturer for selection of appropriate compatible materials. Gloves made from the following material(s) are recommended: Nitrile Rubber.
8.2.3 Respiratory Protection Under normal use conditions, airborne exposures are not expected to be significant enough to require respiratory protection. If thermal degradation products are expected, use fullface supplied air respirator.
8.2.4 Prevention of Swallowing Do not eat, drink or smoke when using this product. Wash exposed areas thoroughly with soap and water.
8.3 EXPOSURE GUIDELINES
Ingredient Authority Type Limit Additional Information METHYL NONAFLUOROBUTYL ETHER AIHA TWA - 750 ppm as total isomers specific form METHYL NONAFLUOROISOBUTYL AIHA TWA - 750 ppm as total isomers ETHER specific form
SOURCE OF EXPOSURE LIMIT DATA: ACGIH: American Conference of Governmental Industrial Hygienists CMRG: Chemical Manufacturer Recommended Guideline OSHA: Occupational Safety and Health Administration AIHA: American Industrial Hygiene Association Workplace Environmental Exposure Level (WEEL)
SECTION 9: PHYSICAL AND CHEMICAL PROPERTIES
Specific Physical Form: liquid
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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
Odor, Color, Grade: Clear, colorless, liquid. Slight ethereal odor. General Physical Form: Liquid Autoignition temperature 405 ºC [Details: (ASTM E659-84)] Flash Point Not Applicable Flammable Limits - LEL [Details: NONE acc to ASTM E681-94, @100C] Flammable Limits - UEL [Details: NONE acc to ASTM E681-94, @100C] Boiling point 61 ºC [@ 760 mmHg] Density 1.5 g/ml Vapor Density 8.6 [Ref Std: AIR=1]
Vapor Pressure 202 mmHg [@ 25 ºC]
Specific Gravity 1.5 [Ref Std: WATER=1] pH Not Applicable Melting point -135 ºC Solubility In Water < 12 ppm
Evaporation rate 49 [Ref Std: BUOAC=1] Volatile Organic Compounds [Details: Exempt] Percent volatile 100 % VOC Less H2O & Exempt Solvents [Details: Exempt] Viscosity 0.6 centipoise [@ 23 ºC]
SECTION 10: STABILITY AND REACTIVITY
Stability: Stable.
Materials and Conditions to Avoid: Strong bases
Hazardous Polymerization: Hazardous polymerization will not occur.
Hazardous Decomposition or By-Products
Substance Condition Hydrogen Fluoride At Elevated Temperatures - extreme conditions of heat Perfluoroisobutylene (PFIB) At Elevated Temperatures - extreme conditions of heat
Hazardous Decomposition: Perfluorinated Acid Fluorides
Hydrogen Fluoride has an ACGIH Threshold Limit Value of 3 parts per million (as fluoride) as a Ceiling Limit and an OSHA PEL of 3 ppm of fluoride as an eight hour Time_Weighted Average and 6 ppm of fluoride as a Short Term Exposure Limit. The odor threshold for HF is 0.04 ppm, providing good warning properties for exposure.
Decomposition of this product at temperatures above 300 degrees C can form perfluoroisobutylene (PFIB), but PFIB will only accumulate with continuous exposure to excessive heat in a sealed vessel. The formation rate for PFIB is about 1000 times less than the rate for primary thermal decomposition products such as HF. During normal use conditions, no health hazard is associated with the use of this material due to PFIB exposure.
SECTION 11: TOXICOLOGICAL INFORMATION
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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
Please contact the address listed on the first page of the MSDS for Toxicological Information on this material and/or its components.
SECTION 12: ECOLOGICAL INFORMATION
ECOTOXICOLOGICAL INFORMATION
Test Organism Test Type Result Fathead Minnow, Pimephales promelas 96 hours Lethal Concentration 50% >7.9 mg/l Green algae, Selenastrum capricornutum 96 hours Inhibitory Concentration 50% >8.9 mg/l Water flea, Daphnia magna 48 hours Effect Concentration 50% >10 mg/l
CHEMICAL FATE INFORMATION
Test Type Result Protocol See Section 3.3.
SECTION 13: DISPOSAL CONSIDERATIONS
Waste Disposal Method: Reclaim if feasible. As a disposal alternative, incinerate in an industrial or commercial facility in the presence of a combustible material. Combustion products will include HF. Facility must be capable of handling halogenated materials. To reclaim or return, check product label for contact.
EPA Hazardous Waste Number (RCRA): Not regulated
Since regulations vary, consult applicable regulations or authorities before disposal.
SECTION 14:TRANSPORT INFORMATION
ID Number(s): 98-0211-8895-2, 98-0211-8940-6, 98-0211-8941-4, 98-0211-8942-2, 98-0211-8943-0, 98-0211-8944-8, 98-0211-8945-5, 98- 0211-8946-3, 98-0212-1011-1, 98-0212-1035-0, 98-0212-1102-8, 98-0212-1128-3, 98-0212-1148-1, 98-0212-3138-0, 98-0212- 3139-8, 98-0212-3140-6, 98-0212-3159-6
Please contact the emergency numbers listed on the first page of the MSDS for Transportation Information for this material.
SECTION 15: REGULATORY INFORMATION
US FEDERAL REGULATIONS
Contact 3M for more information.
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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
311/312 Hazard Categories: Fire Hazard - No Pressure Hazard - No Reactivity Hazard - No Immediate Hazard - No Delayed Hazard - No
STATE REGULATIONS
Contact 3M for more information.
CHEMICAL INVENTORIES
The components of this product are in compliance with the chemical notification requirements of TSCA.
Contact 3M for more information.
Additional Information: The components of this product are in compliance with the chemical registration requirements of ELINCS, METI, AICS, KECI, PICCS, CICS, CEPA.
INTERNATIONAL REGULATIONS
Contact 3M for more information.
ADDITIONAL INFORMATION
The U.S. Environmental Protection Agency (EPA) has listed 3M(TM) HFE-7100 as an acceptable substitute for ozone depleting substances in specific solvent cleaning and aerosol industry applications under its Significant New Alternatives Program (SNAP). Section 612 of the Clean Air Act requires the EPA to administer this program to evaluate and approve alternatives for ozone depleting substances.
This MSDS has been prepared to meet the U.S. OSHA Hazard Communication Standard, 29 CFR 1910.1200.
SECTION 16: OTHER INFORMATION
NFPA Hazard Classification Health: 3 Flammability: 1 Reactivity: 0 Special Hazards: None
National Fire Protection Association (NFPA) hazard ratings are designed for use by emergency response personnel to address the hazards that are presented by short-term, acute exposure to a material under conditions of fire, spill, or similar emergencies. Hazard ratings are primarily based on the inherent physical and toxic properties of the material but also include the toxic properties of combustion or decomposition products that are known to be generated in significant quantities.
HMIS Hazard Classification Health: 0 Flammability: 1 Reactivity: 0 Protection: X - See PPE section. Hazardous Material Identification System (HMIS(r)) hazard ratings are designed to inform employees of chemical hazards in the workplace. These ratings are based on the inherent properties of the material under expected conditions of normal use and are not intended for use in emergency situations. HMIS(r) ratings are to be used with a fully implemented HMIS(r) program. HMIS(r) is a registered mark of the National Paint and Coatings Association (NPCA).
Revision Changes:
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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003
Section 3: Potential environmental effects comment was modified. Section 1: Division name was modified. Section 1: Division name was added.
DISCLAIMER: The information in this Material Safety Data Sheet (MSDS) is believed to be correct as of the date issued. 3M MAKES NO WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING, BUT NOT LIMITED TO, ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR COURSE OF PERFORMANCE OR USAGE OF TRADE. User is responsible for determining whether the 3M product is fit for a particular purpose and suitable for user's method of use or application. Given the variety of factors that can affect the use and application of a 3M product, some of which are uniquely within the user's knowledge and control, it is essential that the user evaluate the 3M product to determine whether it is fit for a particular purpose and suitable for user's method of use or application.
3M provides information in electronic form as a service to its customers. Due to the remote possibility that electronic transfer may have resulted in errors, omissions or alterations in this information, 3M makes no representations as to its completeness or accuracy. In addition, information obtained from a database may not be as current as the information in the MSDS available directly from 3M.
3M MSDSs are available at www.3M.com
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EMB Lubriplate Lubricant
LUBRIPLATE£ MATERIAL SAFETY DATA SHEET
Section 1 PRODUCT NAME OR NUMBER FORMULA LUBRIPLATE EMB Lithium Soap, Mineral Oil and Additives GENERIC/CHEMICAL NAME: USDA AUTHORIZATION: Petroleum Lubricating Grease H-2 Manufacturer's Name Emergency Telephone Number Fiske Brothers Refining Co. 1-800-255-3924 - CHEM-TEL (24 hour) Address Telephone Number for Information 1500 Oakdale Ave., Toledo, Ohio 43605 - 129 Lockwood St., Newark, NJ 07105 419-691-2491 - Toledo Office
Section 2 - Hazardous Ingredients/Identity Information Hazardous Components OSHA PEL ACGIH TLV Other Limits Recommended % (optional) Non-hazardous Hazardous Material Identification System (HMIS): Health - 1, Flammability - 1, Reactivity - 0 Not a Controlled Product under (WHMIS) - Canada Special Protection: See Section 9
Section 3 - Health Hazard Data Threshold Limit Value 5 mg/m3 for oil mist in air. OSHA Regulation 29 CFR 1910.1000 - 0.5 mg/m3 for Antimony Compound (as Sb) Effects of Overexposure Prolonged or repeated skin contact may cause skin irritation. Product contacting the eyes may cause eye irritation. Human health risks vary from person to person. As a precaution, exposure to liquids, vapors, mists and fumes should be minimized. This product has a low order of acute oral toxicity, but minute amounts aspirated into the lungs during ingestion may cause mild to severe pulmonary injury. Carcinogenicity: NTP? No IARC Monographs? No OSHA Regulated? No
Section 4 - Emergency and First Aid Procedures EYE CONTACT: Flush with clear water for 15 minutes or until irritation subsides. If irritation persists, consult a physician.
SKIN CONTACT: Remove any contaminated clothing and wash with soap and warm water. If injected by high pressure under skin, regardless of the appearance or its size, contact a physician IMMEDIATELY. Delay may cause loss of affected part of the body.
INHALATION: Vapor pressure is very low and inhalation at room temperature is not a problem. If overcome by vapor from hot product, immediately remove from exposure and call a physician.
INGESTION: If ingested, call a physician immediately. Do not induce vomiting.
Section 5 - Fire and Explosion Hazard Data
Flash Point (Method Used) COC - 425oF Flammable Limits LEL 0.9% UEL 7.0%
Extinguishing Media Foam, Dry Chemical, Carbon Dioxide or Water Spray (Fog)
Special Fire Fighting Procedures Cool exposed containers with water. Use air-supplied breathing equipment for enclosed or confined spaces. Unusual Fire and Explosion Hazards Do not store or mix with strong oxidants. Empty containers retain residue. Do not cut, drill, grind, or weld, as they may explode.
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PRODUCT NAME OR NUMBER - LUBRIPLATE EMB Section 6 - Physical/Chemical Characteristics o Boiling Point >550 F Specific Gravity (H 2O = 1) 0.92 Vapor Pressure (mm Hg.) <0.01 Melting Point Semi-solid
Vapor Density (AIR = 1) >5 Evaporation Rate <0.01 (Butyl Acetate = 1) Solubility in Water Negligible
Appearance and Odor Yellowish, off-white grease with mineral oil odor.
Section 7 - Reactivity Data
Stability Unstable Conditions to Avoid N/A Stable X Incompatibility (Materials to Avoid) Avoid contact with strong oxidants like liquid chlorine, concentrated oxygen.
Hazardous Decomposition or Byproducts May form SO 2. If incomplete combustion, Carbon Monoxide. Hazardous Polymerization May Occur Conditions to Avoid N/A Will Not Occur X
Section 8 - Spill or Leak Procedures
Steps to be taken in case material is released or spilled Scrape up grease, wash remainder with suitable petroleum solvent or add absorbent. Keep petroleum products out of sewers and water courses. Advise authorities if product has entered or may enter sewers and water courses.
Waste disposal method Assure conformity with applicable disposal regulations. Dispose of absorbed material at an approved waste disposal facility or site.
SARA/TITLE III, Section 313 Status - Zinc Compounds - <3% Antimony Compounds - <3%
Section 9 - Special Protection Information
Respiratory Protection (Specify type) Normally not needed
Ventilation Local Exhaust Used to capture fumes and vapors Special N/A Mechanical (General) Other N/A
Protective Gloves Use oil-resistant gloves, if needed. Eye Protection If chance of eye contact, wear goggles.
Other Protective Equipment Use oil-resistant apron, if needed.
Section 10 - Special Precautions
Precautions to be taken in handling and storing Keep containers closed when not in use. Do not handle or store near heat, sparks, flame, or strong oxidants.
Other Precautions Remove oil-soaked clothing and launder before reuse. Cleanse skin thoroughly after contact.
The above information is furnished without warranty, expressed or implied, except that it is accurate to the best knowledge of Fiske Brothers Refining Company. The data on these sheets relates only to the specific material designated herein. Fiske Brothers Refining Company assumes no legal responsibility for use or reliance upon this data.
Date Prepared: January, 2003 Prepared by: James R. Kontak
Page 14 of 14 Rev. 0736 Ultra System Overview Switches and Protective Barriers Switches and Protective Barriers Introduction The following information is included in this section: • EMO Switches • Enhanced EMO Connector • Enhanced EMO Loop • Main Power • Test System Power • Interlock Switches • Protective Barriers to Operators • Circuit Breakers
!!CAUTION!
The information in the General Safety Information section of this documentation should be read and understood before performing service on the test system.
EMO Switches An emergency off (EMO) switch is a safety feature that shuts down all power to the entire test system when activated. The UltraFLEX test system has a total of three EMO switches. The test system support cabinet has two EMO switches, one on the operator side and one on the service side. The test head has one EMO switch. See the figure EMO Switch Locations. Note Power will not be removed from the test system EMO loop when CB1 is turned off.
Page 1 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
Support Cabinet Support Cabinet Operator Side Service Side EMO Switch EMO Switch
Te s t H e a d EMO Switch EMO Switch Locations
Page 2 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
The EMO switches shut down all power back to the main AC circuit breaker CB1 in the test system, as well as any peripheral equipment connected to the enhanced EMO loop connector. Circuit breaker handle is on position 1. Enhanced EMO Connector The test system also has an enhanced EMO loop connector located on the bottom of the convenience panel on the service side of the support cabinet. The connector is provided so that customers can connect their handler or prober EMO circuit into the test system EMO loop, if desired. If the external peripheral equipment is connected to pins 1 and 2 of the enhanced EMO connector, the test system and peripheral equipment will be shut down if the EMO switch on the external equipment is activated. If the external peripheral equipment is connected to pins 3 and 4 of the enhanced EMO connector, the test system and peripheral equipment will be shut down if any one of the three EMO switches on the test system are activated. A loopback connector must be installed at the test system connector to complete the EMO circuit if external peripheral equipment is not connected. The figure Enhanced EMO Loop Connector Location shows the location of the connector.
Page 3 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
Enhanced EMO Loop Connector Enhanced EMO Loop Connector Location
Enhanced EMO Loop When properly connected, the tester EMO loop can be tripped by the peripheral equipment connection and the tester EMO push buttons will trip the EMO of the peripheral equipment. The figure Enhanced EMO Loop Circuit Diagram shows the loop. Additional information about the EMO loop can be found in the Power section of this documentation.
Page 4 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
Legend - EMO Temp Sensor Support Cabinet (TESTER) SMC/SCR
Normally Support Cabinet - EMO Push Button Closed Activation opens both Te m p S e n s o r To contacts. Controlled by SMC >70C Expansion Cabinets
PDU Operator Side EMO Push TESTHEAD Button CB1 On/Off “Main switch 906-040-00 Te m p Power” Sensor >70C x3 Service Side EMO Push Button
Testhead EMO Push Button J67 J68 J69 J70
Example connection for external customer equipment 885-951-00 EMO P/S
CB 4 3 2 1 CB
Enhanced EMO Interface Panel 979-266-02
Enhanced EMO Loop Circuit Diagram
Page 5 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers Main Power The main power switch is used as a main shutoff for the entire test system, including power to the test system computer and it’s peripherals. This disables all AC power to the test system except for the EMO loop. See the figure Main Power Switch.
Main Power Circuit Beaker Handle
Positions 1 (ON)
Main Power Switch
The main power switch is located in the support cabinet on the service side of the PDU. Main power is ON when the main power circuit breaker handle is on position 1. Main power is OFF when the main power circuit breaker handle is on position 0. Note Power will not be removed from the test system EMO loop when CB1 is turned off.
Page 6 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers Test System Power The test system power on/off switch (located on the operator side of the support cabinet) controls contactors in the PDU that enable and disable power distributed to the test system. Refer to the Test System Power On/Off Switch. Refer to the System Monitor and Control Subsystem section of this documentation for additional information.
Test System Power On/Off Switch
Interlock Switches Test Head Door Interlock An interlock switch is provided on the Test Head door. Refer to the figure Test Head Door Interlock Switches. The primary purpose of this switch is to disable Test System power in the event that the Test Head door is opened during operation. The Test Head door is an integral part of the Test Head cooling system and opening during operation may reduce the effectiveness of the cooling system. This switch is monitored by the System Monitor and Control (SMC) computer which interrupts test power when the switch is activated.
Page 7 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
WARNING!
Never defeat any interlock switch.
WARNING!
The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed at the main facility AC service disconnect as outlined in the Lockout/Tagout section of this documentation before servicing the test system. Failure to follow safety precautions can result in severe injury or death.
Page 8 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
Switch Locations Interlock Switch
Standoff Closes the Switch Test Head Door Interlock Switches
Page 9 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
DIB Interlock Switch The test system is also equipped with a test head DIB interlock circuit that is intended to protect operators and service personnel by reducing the hazardous outputs, on instrument cards, to safe levels. This occurs whenever metal parts at the test head measuring terminals or on the DIB itself are accessible. Additional information about the DIB interlock can be found in the 24-Slot DIB Interface section of this documentation. Protective Barriers to Operators There are safety interlocks, warning labels and barriers to impede operator access to service or electrical hazard areas of the test system and test head electronics. At the test head, warning labels identify electrical hazard areas for operator-accessible parts. Circuit Breakers A series of circuit breakers on the PDU protect various outlet receptacles. Refer to the Power section of this documentation for additional information. If a circuit breaker fails after a reset, additional troubleshooting may be needed. The figure Circuit Breakers shows the location of the breakers.
! CAUTION! !
Never override or defeat a test system safety barrier or device.
Page 10 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers
Circuit Breakers
Receptacles
Circuit Breakers
Page 11 of 11 Rev. 0736 Ultra System Overview Weight Weight Introduction This section identifies the weight hazards of the test system for operation, service and applications personnel. This information should be read and understood before operating or servicing the system. Some subassemblies, components and boards in the test system require special handling because of their weight. Some require lifting equipment such as fork lifts or pallet jacks. All require proper lifting techniques and great care when moving, handling, shipping or storing them. The table Major Component Weights lists the weight of some of the major test system components. The following information is included in this section: • Heavy Weight Removal Instructions • Special Weights • Adding Counterbalance Weights • When to Add or Remove Counterbalance Weights • Safety Shoes • Earthquake Provision Note Consult the specific section for additional cautions, warnings and information with respect to lifting and weight specifications.
Page 1 of 7 Rev. 0736 Ultra System Overview Weight
Major Component Weights
Component Weight (pounds) Weight (kilograms)
Test head (full) 1200.0 545.5 (See Note)
Test head (empty) 600.0 272.8
Counterbalance weights 8.0 3.6 (RAM Manipulator)
DIB Interface plate 50.0 22.7
Computer 35.0 15.9
DIB 15.0 6.8
Standard CDU 365.0 - 510.0 165.9 - 231.8
PDU 550.0 249.5
Note Weight reflects all instruments and options installed in test head.
Heavy Weight Removal Instructions Removable assemblies exceeding 45 lb (20.4 kg) may require special handling requirements, such as: • Two persons to lift or position the assembly. • Special mechanical lifting and placement of the assemblies. Special Weights Note Because of their weight, the following units require special handling:
Page 2 of 7 Rev. 0736 Ultra System Overview Weight
Unit Weight Material lb kg
Installed Test System) 5000.0 2260.0
Test Head (full) 1200.0 545.5
Manipulator 2700.0 1210.0
Support Cabinet (No expansion cabinet) 1700.0 770.0
Computer workstation with Anthro cart 100.0 45.0
Because of their weight and movement, the manipulator and test head require special handling. When handling printed circuit boards, subassemblies and major components repeatedly during the course of the day, take care to prevent muscle strain and injury. Also, Safety Shoes should be worn because severe toe and foot injury can occur if a board is dropped. Note Safety Shoes will not protect foot injury in all instances. Care should be exercised when working around components that are very heavy. Consult the shoe manufacturer for the specific shoe tolerances.
Adding Counterbalance Weights
! CAUTION! !
Never allow the test head/manipulator to become un- balanced see the Adding Counterbalance Weights section of this documentation for additional information.
Page 3 of 7 Rev. 0736 Ultra System Overview Weight
! CAUTION! !
Gloves and safety shoes should be worn when working with counterbalance weights. See the Safety Shoes section of this documentation for additional information.
!!CAUTION!
Make sure that you have added enough weights to the manipulator counterbalance weight box to offset the weight of the loaded or unloaded test head. Failing to do so could cause the test head to move up or down too quickly, causing damage to the test head and the cables and creating a personal safety risk.
!!CAUTION!
• Only lift one weight at a time. • Use the appropriate tool to separate the weights when removing them from the weight chamber. • Watch for pinch points (between the weights) when adding or removing weights from the manipulator weight box.
The manipulator uses a counterbalance system to offset the weight of the test head. The counterbalance weights are loaded into the counterbalance weight box located in the manipulator frame. Each weight weighs approximately 8 lb. (3.6 kg). The weights are loaded into the weight box with the nipples facing up, six weights per row. See the figure Counterbalance Weights.
Page 4 of 7 Rev. 0736 Ultra System Overview Weight
Counterbalance Weight
Counterbalance Weights
Weights should be added or removed to maintain balance when you remove or install instrument boards from the test head. Typical weight quantities are as follows: • 42 weights for an empty test head (no instruments, outer ring or device interface board (DIB) • Instruments weight between 4.8 - 24.0 lb. (2.2 - 10.9 kg) each. Refer to the table Instrument Weights for specific weights for each instrument. A fully loaded test head requires approximately 90 counterbalance weights to be added to the manipulator weight box.
Page 5 of 7 Rev. 0736 Ultra System Overview Weight
Instrument Weights
Number of Instrument Counterbalance Weight (pounds) Weight (kilograms) Weight Plates
Test Head Heat 3.0 24.0 10.9 Exchanger
Master Support Board 2.0 16.0 7.3
Slave Support Board 2.0 16.0 7.3
HSD 3.0 24.0 10.9
HexVS 3.0 24.0 10.9
VSM 3.0 24.0 10.9
BBAC 2.0 16.0 7.3
DC30 2.0 16.0 7.3
Filler Board 0.6 4.8 2.2
When to Add or Remove Counterbalance Weights Weights should be added or removed to maintain balance when you remove or install instrument boards. The counterbalance weights are installed in the counterbalance weight chamber to offset the weight in the test head. Refer to the Manipulator section of this documentation for additional information on adding or removing counterbalance weights, as appropriate. Safety Shoes Some subassemblies, components and boards require special handling because of their weight. When handling heavy items, Safety Shoes should be worn to prevent severe toe and foot injury if a component is dropped. Note Safety shoes will not protect foot injury in all instances. Care should be exercised when working around components that are very heavy. Consult the shoe manufacturer for the specific shoe tolerances.
Page 6 of 7 Rev. 0736 Ultra System Overview Weight
Safety Shoes Earthquake Provision The test system components should be stabilized in the event of an earthquake, to prevent the system from tumbling or moving. The customer's facilities group should determine the best way of securing the system to their floor to meet Uniform Building Code (UBC) Zone 4 requirements along with their company and local seismic codes. Threaded blocks that are welded in the corner of the each cabinet that can be used as tie-downs. The shipping brackets (and hardware attaching them to the frame) provided with the cabinet have been sized appropriately for the system to pass safety certification. A total of (4) shipping brackets should be used for proper earthquake attachment. Two locations in the front outrigger bar, and two in the rear bottom beam of the cabinets. Each bracket uses (3) 3/8-16 bolts: (2) into the cabinet, (2) anchoring it into the floor. Refer to the UltraFLEX Installation and Checkout Guide (553-706-02) for additional information. The test system manipulator cabinet should also be anchored in a similar manner.
Page 7 of 7 Rev. 0736 Ultra System Overview Anti-Tip Fixture Anti-Tip Fixture Introduction Test Head/Manipulator Support Cabinet The test head is supported by the manipulator. The weights in the manipulator counterbalance weight box as well as the weight of the components located in the support PDU cabinet act to counterbalance the Weight weight of the test head. Tray This section details instructions for installing a special anti-tip fixture to the test system before performing the following maintenance tasks: CDU • Separating the support cabinet from the manipulator. • Removing the entire PDU from the support cabinet. • Removing the entire CDU from the support cabinet. See the figure Test System Weight Test System Weight Locations Locations.
Page 1 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture
Installation Procedure
! CAUTION! !
There is a possibility that the UltraFLEX test system may tip over when certain types of maintenance procedures are performed.
!!CAUTION!
Failure to install the anti-tip fixture prior to performing the specified maintenance tasks will cause an unsafe condition. Rear Manifold Mounting Screws Front Manifold Mounting Screws Note (4 places) (4 places) Once the maintenance activity has been completed, perform these steps in reverse order to remove the anti-tip fixture. 5/32 in. Hex Wrench
1. Undock the test head from the handler/prober then swing it so it is over an unobstructed area of the test floor. 2. Twist the test head the DUT 90° position. 3. Turn off test system power. 4. Using a 5/32 in. hex wrench, remove the 8 manifold mounting screws on each end of the test Manifold Mounting Screw Location head. There are 4 on the front and 4 on the rear. Refer to the figure Manifold Mounting Screw Location. Page 2 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture
5. Install the 2 test head support bars onto the front and rear manifolds of the test head and secure using the 8 screws previously removed. Refer to the figure Test Head Support Bar Locations.
Rear Manifold Front Manifold
Test Head Support Bars Test Head Support Bar Locations
Page 3 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture
6. Reapply test system power. 7. Twist the test head to the DUT down position. 8. Lower the test head until the support bars touch the floor. Refer to the Test Head Lowered to the Floor.
Floor Test Head Support Bars Test Head Lowered to the Floor
Page 4 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture
9. Once the bars are touching the floor, continue lowering the test head until the manipulator drive stops at it’s compliance limit. 10.Disconnect the manipulator pendant controller from the test head side panel. Refer to the figure Pendant Controller Connector Location.
Pendant Controller Connector
Pendant Controller Connector Location
Page 5 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture
11.Switch CB1 to the OFF position to turn off Main power. 12.Perform Lockout/Tagout on the test system using the Lockout/ Tagout Procedure outlined in the Lockout/Tagout section of this documentation. 13.Count and record the number of weights loaded into the manipulator counterbalance weight box. Note You will need this number to return the test head to the correct counterbalance state after performing maintenance.
14.Add all of the remaining weights to the manipulator counterbalance weight box. Refer to the Weight Safety section of this documentation for information on adding counterbalance weights. The anti-tip fixture is now properly installed, you can now safely perform the desired maintenance activity. Refer to the appropriate section of this documentation for the specific Field Replaceable Unit (FRU) removal/installation procedure required.
Page 6 of 6 Rev. 0736 Ultra System Overview Torque Specifications Torque Specifications Introduction When performing test system repair and maintenance activities all hardware should be torqued to the appropriate requirements. These torque requirements ensure proper test system operation and safety. Most of the connections use the general industry standard torque requirements outlined in table Hardware Torque Specifications. Some of the test system hardware may require different torque values. If applicable, these specific torque requirements will be identified in the appropriate FRU replacement procedures, as required.
Hardware Steel Brass Aluminum Size
cm-kg in-lb cm-kg in-lb cm-kg in-lb
1-56 2.6 2.25 2.0 1.8 1.38 1.2
4-40 5.2 4.5 4.5 3.9 3.0 2.6
6-32 10.4 9.0 8.3 7.2 5.5 4.8
8-32 20.1 18.0 17.25 15.0 11.2 9.7
10-3234.530.027.523.820.017.5
20 (1/4”)80.570.067.058.048.042.0
18 (5/16”) 161.0 140.0 124.0 108.0 92.0 80.0
16 (3/8”) 276.0 240.0 221.0 192.0 164.0 143.0
13 (1/2”) 575.0 500.0 460.0 400.0 345.0 300.0
Hardware Torque Specifications
Page 1 of 1 Rev. 0736 Ultra System Overview Cooling Cooling Introduction The test system uses a closed-loop liquid cooling system to remove heat from the test head. The cooling system transfers the heat from the teat head to the customers facility water supply. A series of thermostats protects the system from overheating. Additional environmental cooling requirements and specifications can be found in the UltraFLEX Site Preparation Guide (553-706-01). See the Cooling System section of this documentation for specific information about the closed-loop system and thermostats in the test system. The following information is included in this section: • Electrical Shock • Electrostatic Discharge • Liquid Cooling System • Coolant Properties • Coolant Exposure Control • Liquid Spills • Spill Prevention • Movement of Components • Weight
! CAUTION! !
The information in both the General Safety Information and the Cooling System sections of this documentation should be read and understood before performing service on the cooling system.
Page 1 of 14 Rev. 0736 Ultra System Overview Cooling Electrical Shock
WARNING!
The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the cooling system. Failure to follow safety precautions can result in severe injury or death.
High voltages may be present in several places in the test system support cabinet. Refer to the Cooling System section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test system. The test system is equipped with multiple EMO switches that allow all system power except the SMC/EMO circuit in the test head to be shut down quickly in an emergency. Refer to the EMO Switches information in the Switches and Protective Barriers section of this documentation for additional information on the test system EMO switches and system. The CDU is the only component in the liquid cooling system that requires electricity and is housed in the support cabinet. There are two versions of the CDU, Standard and High Capacity. The physical layout of the two different CDUs is very similar. The Standard CDU is shown in this documentation. The CDU receives its input power (208 VAC) from the power distribution unit (PDU) when test system main power is on and the CDU main circuit breaker is closed. The 208VAC enters the CDU at the back (service side) of the unit, near the top of the CDU cabinet, at connector P1. The 208 VAC is present at the input connector (P1), where it is routed to the CDU electrical box and Variable Frequency Drive (VFD) on the operator side. From the electrical box and VFD, the 208V is sent to the pump via an interconnect connector, as shown in the CDU Input Power.
Page 2 of 14 Rev. 0736 Ultra System Overview Cooling
208V InputConnector (P1)
Pump 208V Interconnect
Electrical Box
CDU Main Circuit Breaker
CDU Input Power
Additional power is supplied to the CDU at two connectors located on the front (operator side) of the unit. Connector CDU-P2 connects the SMC to the CDU, in which ±5V is routed to the electrical box to power the SMC rider board and the local operating network (LON) adapter board. Connector CDU-P3 connects the EMO to the CDU, in which +24V is routed to the EMO temperature switch located inside the electrical box in the CDU. Refer to the EMO Switch Location.
Page 3 of 14 Rev. 0736 Ultra System Overview Cooling
EMO Connection
Electrical Box SMC Connection
EMO Switch Location
Sensors are located throughout the piping area of the CDU. All sensors are electrically powered and connect to the CDU controller, which is located inside the electrical box. Care should be taken when working on or near any of the sensors. For the location of the sensors, refer to the Theory of Operation information in the Cooling System section of this documentation.
Page 4 of 14 Rev. 0736 Ultra System Overview Cooling Electrostatic Discharge
!!CAUTION!
To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded anti-static service mats when handling printed circuit boards.
Static-sensitive equipment resides in the CDU electrical box, such as the system monitor and control (SMC) rider board shown in the figure SMC Rider Board. The electrical box is located in the front of the CDU.
SMC Rider Board Electrical Box
SMC Rider Board
Page 5 of 14 Rev. 0736 Ultra System Overview Cooling
Always minimize electronic charge generation when working on or near the cooling system by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation. Liquid Cooling System
! CAUTION! !
Caution must be taken when handling or working near the chilled water because facilities often add chemicals to treat the water for corrosion and bacterial growth. Follow the company’s local regulations and all MSDS guidelines.
The UltraFLEX cooling system uses two types of fluids: process coolant and facility chilled water. The process coolant circulates from the support cabinet, through hard pipes and flexible hoses and through the test head. The cooling medium is the dielectric fluid, HFE-7100. No other type of fluid can be used. Spills must be treated according to the installation site and local regulations. MSDS guidelines should always be followed. Refer to the Material Handling section of this documentation for additional information. The test head coolant is cooled by using facility chilled water. The chilled water enters and exits the test system at the CDU, which resides in the support cabinet. The facility chilled water is only present in the CDU and does not pass into any other component of the test system. For more information about cooling system components and fluid paths, refer to the Physical Description and Theory of Operation information in the Cooling System section of this documentation.
Page 6 of 14 Rev. 0736 Ultra System Overview Cooling Coolant Properties Although the liquid coolant is not listed as a hazardous material, the coolant’s more notable properties are highlighted below. This information can help ensure the coolant is properly handled and stored. HFE-7100: • Is chemically inert and does not conduct electricity. • Has almost twice the density of water; therefore, care should be taken when moving containers of the fluid. • Evaporates rapidly at room temperature, so it must be stored in a sealed container. • Has a vapor that, in high concentration, can displace the breathable air in a given volume. • Does not have a flashpoint, but will start to decompose into toxic products at 200oC (392oF). Refer to the Material Handling section of this documentation for additional information on the HFE-7100 fluid. Coolant Exposure Control The following considerations should be kept in mind when working with or around the HFE-7100 fluid. Hazard Identification: Eyes - Not expected to result in significant irritation. Skin - Not expected to result in significant irritation. Inhalation - Repeated exposure could cause elevated fluoride levels. Ingestion - Not a likely route of exposure. No adverse effects expected. First Aid Measures: Eyes - Flush with water. Get medical attention. Skin - Wash with soap and water. Inhalation - Get to fresh air. Get medical attention. Ingestion - Do NOT induce vomiting. Do NOT drink. Get medical attention. Personal Protective Equipment: Safety goggles or glasses with sideshields to protect your eyes. Impermeable gloves for skin contact (such as, neoprene or nitrile) Refer to the Material Handling section of this documentation for additional information on the HFE-7100 fluid.
Page 7 of 14 Rev. 0736 Ultra System Overview Cooling Liquid Spills The following are general guidelines for responding to a chilled water spill, a liquid coolant spill or a leak from the UltraFLEX liquid cooling system. In the event of a spill, follow the installation site specific spill control process. Ensure that the following equipment is available for spill containment: • Absorption pads • Water vacuum • Mop and bucket • Cloth rags and other heavy-duty wipes • Vinyl boots and gloves • CAUTION signs for the wet floor • Safety goggles or glasses with side shields The figure UltraFLEX Test System Top View shows an example of spill containment for the UltraFLEX test system.
Absorbant pads
Facility Water Facility Hoses Water Connections
Manipulator Cabinet Expansion Test Head CDU Cabinet (in Support Cabinet)
UltraFLEX Test System Top View
Page 8 of 14 Rev. 0736 Ultra System Overview Cooling
The Liquid Spill Flowchart presents a general guideline for responding to a liquid spill for the UltraFLEX liquid cooling system. Refer to the following sections for additional details: • Small Spill • Medium Spill • Large Spill
Page 9 of 14 Rev. 0736 Ultra System Overview Cooling
Liquid Spill
Assess Spill