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Ultra System Overview Introduction Introduction WARNING! This test system is capable of producing potentially lethal Instrument Safety voltages. All internal areas of the system must be accessed and Information serviced ONLY by trained and qualified personnel. Do not perform any servicing other than that contained in this documentation and This section describes the UltraFLEX read all safety information before attempting any operation or test system safety precautions. The maintenance procedures. test system generates and uses AC and DC high power and high voltage. The purpose of this section is to identify the in the system to !!CAUTION! operation, service and applications personnel. Such personnel should Always wear safety glasses or safety goggles when working on the test system. read and understand this information before operating or servicing the system. !!CAUTION!

Internal sheet metal portions of the test system may contain sharp edges, use care when working inside the test system.

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General Safety Information Subsystem Safety Information The following general safety Table 1 identifies the safety concerns for the UltraFLEX subsystems. information is included in this section: Table 1 • General Safety Information • Safety Terms, Labels and Subsystem Safety Lockout/ Electrostatic Liquid Safety Symbols Section Tagout Discharge Safety • Lockout/Tagout Computer Safety XX • ESD Damage Prevention and Control Measure Cooling XXX • Safety Certification DIB 24-Slot Interface XX • Material Handling Digital Signal Processor XX • Switches and Protective Barriers • Weight Safety Manipulator XX • Anti-Tip Fixture PDU XXX • Torque Specifications System Monitor and XXX Note Controller (SMC) Primary Support Board only. Support Board XX See Note

Support Cabinet X

12-Slot Test Head XXXX Backplane and Distribution Board

Pneumatics X

Nitrogen Purge Option X Safety

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Instrument Safety Information Table 2 Table 2 identifies the safety concerns for the UltraFLEX instruments. Instrument Safety Lockout/ Electrostatic Weight Liquid Safety Section Tagout Discharge Safety Note The test system instruments are BBAC X grouped into three categories. Each category highlights the instrument’s DC-30/DC-90 potential . See the HSD-M XX Instruments safety section for additional information. HEX15AVS X

GigaDig X

GPIO

PMO

Turbo AC X X

System Reference Clock XX (SRC)

Microwave X

VHFAC X X

VSM XX

Page 3 of 3 Rev. 0736 Ultra System Overview General Safety Information General Safety Information Introduction This section provides general safety information about the test system. The following information is Included in this section: • Safety Precautions • Electrical Code Requirements • Switches • Protective Barriers to Operators • Internal Hazardous Power Connections • Power Control and Distribution • Power Supplies • Internal Protective Barriers • Laser Energy • Heavy Weight Removal Instructions • Special Hazard Warnings • External Mechanical Hazards • Electrostatic Discharge Damage • Materials Handling • Safe Work Practices • Electrical Hazards • Hardware Torque Requirements • Safe Equipment Practices • Environmental Conditions • Grounding • Summary

Page 1 of 8 Rev. 0736 Ultra System Overview General Safety Information Safety Precautions Numerous features incorporated in the test system provide a minimum of safety, such as: • Grounded or nonconductive system covers that require tools for removal • Safety warnings and information labels on the system where appropriate • Detailed installation, checkout and service documentation Electrical Code Requirements All inputs to the main facility AC service disconnect must meet local electrical code requirements. The cables, circuit breakers, contactors and transformers selected have defined qualities that meet the electrical code requirements as understood by Teradyne, Inc., for the countries where the product may be sold. These parts should be replaced only with Teradyne approved FRUs or equivalents. All AC power connections must be torqued to their defined specifications to avoid localized heating and possible ignition, or damage to the screw connections, whenever screw type connections are used. Switches The test system has many safety switches. Never attempt to defeat a switch or interlock in any way. See the Switches and Protective Barriers section of this documentation for additional information. The switches include: • Main Power • Test System Power • Emergency Off (EMO) Protective Barriers to Operators There are safety interlocks and warning labels to impede operator access to service or electrical hazard areas of the test system and test head electronics. See the Switches and Protective Barriers section of this documentation for additional information. Internal Hazardous Power Connections The internal power connections of the test system present many safety hazards. Detailed safety hazard information can be found in each safety section and specific test system section of this documentation. All internal areas of the system must be accessed and serviced only by trained and qualified personnel.

Page 2 of 8 Rev. 0736 Ultra System Overview General Safety Information Power Control and Distribution All power connections inside the power distribution, support cabinet or power supply units, as well as distribution between these assemblies, are extremely hazardous and potentially lethal. Trained and qualified personnel must exercise extra caution and care when servicing these areas. Internal plug-connected AC power is also hazardous and should be handled with the reasonable care due any AC service. Power Supplies Most power supply terminals and backplane buses in the test system present a high-voltage or high- power hazard. Hazardous voltages are present on power supply connections and power buses, therefore extra caution must be taken when servicing these areas. Because of these high-power hazards, jewelry, such as rings, watches and necklaces, and other conductive ornaments should not be worn when servicing these areas. Caution should also be used with conductive tools. Current levels are sufficient to cause severe sparking or welding if conductive parts bridge different potentials. Internal Protective Barriers The inner doors provide protective barriers to internal hazards for unauthorized personnel. The following internal protective measures have been implemented: • Warning labels and strategic design and layout provide the primary protection to service personnel. • Special hazard areas may have additional mechanical barriers, such as an AC mains transformer and power supplies. • All conductive framing has been electrically connected to a protective ground by green ground wires with a yellow stripe, or by electrically conductive joints. • Interlock switches are present in various locations throughout the system. These switches remove power to certain areas when doors are opened or components are moved. Never defeat an interlock switch. • EMO switches are present in various locations of the system. These switches remove power to the test system when they are activated.

Page 3 of 8 Rev. 0736 Ultra System Overview General Safety Information Laser Energy

CAUTION

Laser Class 1 System Laser Klasse 1 System according to EN 60825-1:1994+A1+A2

! CAUTION! !

Use of controls or performing adjustment or maintenance procedures other than those specified in this documentation may result in hazardous radiation exposure.

There are as many as 4 lasers present in the UltraFLEX test system. Two are always present - the laser for the databus card and the matching laser on the support board. Two additional lasers are added when the DSP option is installed. One in the DSP computer and one on the XGEM module. Laser Specifications 1. Databus Card and Support Board Fiber Optics Communications Transceiver: Laser Class: 1 Laser Power: 0 dBm Wavelength: 850nm Operational temporal mode: continuous

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2. DSP Option: DSP computer and XGEM module communications: • Laser Class: 1M • Laser Power: -2 dBm • Wavelength: 850nm • Operational temporal mode: continuous Heavy Weight Removal Instructions See the Weight Safety section of this documentation for information and details on heavy weight removal. Special Hazard Warnings Information symbols and electrical hazard or other appropriate warnings have been placed close to hazards to alert service personnel to potential hazards. See the Safety Terms, Labels and Symbols section of this documentation for additional information. External Mechanical Hazards Computer displays and some optional external assemblies are movable. Caution should be used when in proximity to these assemblies to prevent bodily injury and damage to the equipment. Electrostatic Discharge Damage The test system contains semiconductors that, by the nature of their material (such as MOS) or design (such as LSI, VLSI, FET), are susceptible to damage from electrostatic discharge (ESD). ESD control measures are therefore necessary and offer protection by degree, with static-prevention techniques providing the most protection. The following control measures are strongly recommended for consideration and implementation. • Wear a tested-grounded wrist strap. Refer to the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. Refer to the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation for additional information. Materials Handling See the Material Handling section of this documentation for information and details on materials handling. Page 5 of 8 Rev. 0736 Ultra System Overview General Safety Information Safe Work Practices Teradyne recommends following the safety practices: • Always wear safety glasses or safety goggles when working on the test system. • Read and understand the instructions before performing any procedure. • Only qualified personnel should operate or service the system. Do only the tasks you are trained to do. • Use lockout procedures. See the Lockout/Tagout section of this documentation for additional information. • When nitrogen is used with the DIB interface, undetected nitrogen leaks in a closed area may result in an oxygen-deficient atmosphere which can cause unconsciousness, coma or death. The test system does not detect, store, nor process the supplied nitrogen gas. • Facilities which use dry nitrogen instead of air are expected to provide a nitrogen detection and alarm system to prevent oxygen-deficient atmospheres and to comply with all applicable local occupational health and safety codes regarding the use of nitrogen in equipment and in the facility. • Operator and maintenance personnel should remove conductive items, such as rings and watches, before using or servicing the system. Wearing jewelry (particularly gold and silver, which are excellent conductors of electricity) increases the potential of receiving a shock. Remove jewelry when working on any high-voltage equipment, and any equipment receiving AC, DC or low-voltage current. Be aware of articles of clothing that have metal buttons, zippers, or snaps that can conduct electricity. • Visitors to the test system area should be supervised by qualified personnel. • Tools, food, liquids and other miscellaneous items should not be placed on top surfaces of the system. • Adequate work space should be provided for operators and service personnel. Refer to the UltraFLEX Site Preparation Guide, Teradyne Document Number 553-706-01, for floor plan information. When handling components or circuit assemblies, exercise ESD control measures. See the ESD Damage Prevention and Control Measure section of this documentation for additional information. • When working on high-voltage or high-power systems, have an assistant present if possible. As a minimum, notify someone in the area of your actions before and upon completion of service. • When replacing or repairing modules or subassemblies, shut off and Lockout/Tagout the power controller. Refer to the Lockout/Tagout Procedure outlined in the Lockout/Tagout section of this documentation. If necessary, disconnect the test system from the AC mains service. Refer to each section of this documentation for specific safety instructions about that particular module or subassembly. • Before servicing power supplies or sources storing 10 joules or more of energy, discharge the output terminals and capacitors with a low-resistance power bleeder resistor. Discharge at a rate of 1 ampere or less to avoid sparks or tool welding. Page 6 of 8 Rev. 0736 Ultra System Overview General Safety Information

• Pay attention to warning signs. • Take immediate corrective action if safety issues are found. • Wear proper personal protective equipment. Electrical Hazards Be aware of and exercise caution around all electrical hazards, which include: • DC voltages equal to or greater than 60V • AC voltages equal to or greater than 30 Vrms, 42.4V peak • 24V pulses • 240 VA (volt-ampere) power combination or greater than 150 VA for an unlimited circuit • 10 joules of reactive energy Hardware Torque Requirements See the Torque Specifications section of this documentation for information and details on proper torque values for the test system hardware. Safe Equipment Practices • Make certain that the instrument that is being worked on is turned off before replacing any component. Wait before removing the component to allow any charged devices to discharge. • Always leave safety shields in place unless work must be done on equipment behind the shields. • Make certain that test instruments are used within their rated specifications. • Use probe clips whenever possible to avoid having your hands near the point of test. • Always check equipment wires and probes for damaged or cracked insulation. • Never reach across or around high-voltage circuits. Always turn equipment off. • Never have one hand on the chassis or other ground point when using measuring equipment. Use the one-hand- in-the-pocket rule when working with electrical items. • Know the location and use of power disconnects, breakers, or emergency off switches of all equipment you work on. • Keep your area neat and free of conductive material and sharp objects. Never defeat an interlock switch.

Page 7 of 8 Rev. 0736 Ultra System Overview General Safety Information Environmental Conditions Environmental conditions that increase the potential for electrical shock include: • Poor lighting • Lack of personal protective equipment (insulated tools, rated gloves, glasses) • Wet or damp conditions Grounding

WARNING!

If the correct protective ground connections are not made, a shock hazard can occur. This may result in the injury or death of anyone operating the test system.

Electrical current typically stays between two electrodes. If stray current occurs, a grounding device closes the loop (capturing the stray current) and safely grounds or diminishes the current. If the grounding device is removed and stray current occurs, there is no means of diminishing the current. Consequently, if a person using the device touches an item that closes the loop, the current will travel from the device through the person until the current is grounded. Never remove a grounding device for any reason. Summary 1. Use common sense. If you are not properly trained, do not touch. 2. Whenever possible, follow the Lockout/Tagout Procedure outlined in the Lockout/Tagout section of this documentation. 3. Whenever possible, observe the one-hand rule. 4. Do not wear jewelry or other metal objects while working around electricity. 5. Be aware of your surroundings. 6. Use proper personal protective equipment. 7. Never remove a grounding device for any reason.

Page 8 of 8 Rev. 0736 Ultra System Overview Safety Terms, Labels and Symbols Safety Terms, Labels and Symbols Introduction Symbols, labels, and terms used in this manual are derived from requirements of IEC 417 for internationally recognized labeling and OSHA 29 CFR 1920 for U.S. recognized labeling. The following information is included in this section: • Safety Terminology • Symbols • Definition of Labels • Additional Labels Safety Terminology This section defines the safety terminology used in Teradyne product support documentation. Warning • A hazard is present. Before proceeding, the user should refer to the appropriate service documentation to avoid personal injury and/or damage to equipment. • A hazard is not immediate, but the removal of a barrier will lead to an extreme hazard. • Failure to follow safety warnings could result in severe injury or death. The following is an example of a warning.

WARNING!

The test system should be shut off and Lockout/Tagout procedures performed before servicing the test system.

Warning Example

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Caution • A potential hazard is present. Before proceeding, the user should refer to the appropriate service documentation to avoid personal injury and/or damage to equipment. The following is an example of a caution.

!!CAUTION!

This information must be read and fully understood before performing service.

Caution Example AC Mains AC mains is a universal generic term used to describe the AC input service of equipment connected to a facility’s main AC service outlet or fused disconnect. AC mains also describes all the parts of the equipment’s AC input that can have the input voltage applied to them. AC mains parts include: • AC plugs • AC cords • AC circuit breakers, switches, and fuses used to disconnect and protect the AC mains path • Other components that are connected to the AC service input, such as RFI filters, surge suppressors, and isolation transformer primaries

Page 2 of 10 Rev. 0736 Ultra System Overview Safety Terms, Labels and Symbols Lockout Tagout OSHA requirements for electrical machinery require, for both installation and maintenance, a power lockout/tagout capability with proper instructions on usage. The power lockout/tagout capability requires that the main power to the machine can be de-energized and secured against being re-energized until the installation or maintenance is completed. OSHA 29 CFR 1910.331-335 requires that installation and service personnel be protected from electrical hazards by means of a lockout/tagout provision. It is also recommended that acceptable tagout warnings and identity forms be applied to the lockout mechanism when it is used. See the figure Tagout Example. See the Lockout/Tagout section of this documentation for additional information and specific procedures.

WARNING!

When it is necessary to service the system power, the lockout/tagout mechanism at the facility branch service connection supplying power to the main facility AC service disconnect should be used. This is the only way to ensure that power to the test system main power is totally disabled.

WARNING!

This equipment is locked out for service. Before removing this lockout mechanism and applying power to the system, contact: ______

Tagout Example Note Insert the name of the appropriate person in the space on the tag.

Page 3 of 10 Rev. 0736 Ultra System Overview Safety Terms, Labels and Symbols Symbols The following symbols may be used on the test system or in this service documentation.

The PROTECTIVE GROUND symbol is used to define any connection point where a safety ground wire is added to the hardware. The symbol enclosed in a circle references the entrance point of the safety ground wire of the AC mains input. The GROUND symbol without a circle indicates any conductive point referenced to the safety ground wire of the AC mains input, but that is not part of the AC service wiring. Used for earth (ground) terminals. The CHASSIS GROUND symbol identifies where a wire is connected to a chassis point for ground reference or other function, such as static discharge. The INSTRUMENTATION GROUND symbol indicates that the connection is grounded remotely from the connections point. This symbol will typically be near coaxial connections. The BLACK HIGH VOLTAGE FLASH symbol defines any connection where a hazardous voltage (between 60V and 999V), either DC or AC, may be present. Hazardous voltages greater than 30Vrms, 4.24 V peak, 60 Vdc, or hazardous energy levels grater than 240 VA or 150 VA in an unlimited circuit. The FUSE REPLACEMENT symbol indicates that a fuse must be replaced by a fuse with the same type and rating for safe and proper operation.

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This FUSE REPLACEMENT symbol indicates that the fuse must be a slo-blow type.

INFORMATION symbols are placed in close proximity to specific areas of the hardware that have important servicing or operating requirements documented in the manual. Information symbols may have a yellow or white background. Direct current

Alternating current

Both direct and alternating current

Three-phase alternating current 3

Equipotentiality

On (Supply)

Off (Supply)

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Equipment protected throughout by DOUBLE INSULATION or REINFORCED INSULATION

Caution, risk of electric shock

Caution, hot surface

Caution, refer to accompanying documents !

In position of a bistable push control

Out position of a bistable push control

The HIGH VOLTAGE FLASH symbol is used to define any connection where a high voltage, either AC or DC above 60V may be present (black in color signifies 60V to 999V, red in color signifies 1000V or higher).

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The CIRCUIT GROUND symbol identifies any connection point where instrumentation is referenced to ground. Instrumentation grounding may reference various grounds, such as protective, chassis, RF, signal, and so on. This symbol typically will be near coaxial connections, for example.

Definition of Labels Labels may be stand-alone symbols, words, or combinations of both, as appropriate. Caution: The CAUTION label, with wording, has a yellow or white and black background and is used to define a potential but not immediate hazard, or to provide instructions for actions required to avoid potential hazards. Danger: The DANGER label, with wording, has a red or white and black background and is used to define an immediate hazard or to provide instructions for actions required to avoid an immediate hazard. Additional Labels There are other agency-defined labels. Several special situations have been defined and have unique labels to identify them. Examples of some these labels follow:

The ANTISTATIC label is used when special antistatic or preventive measures must be taken to avoid hardware damage or equipment malfunction.

CAUTION - HEAVY OBJECT LABEL

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WARNING - HAZARDOUS VOLTAGE LABEL

WARNING - LINE VOLTAGE PRESENT LABEL

DANGER - HAZARDOUS VOLTAGE LABEL

DANGER - HAZARDOUS VOLTAGE LABEL

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DANGER - HAZARDOUS VOLTAGE LABEL

PINCH HAZARD LABEL

SIDE PINCH HAZARD LABEL

CAUTION - MANIPULATOR COUNTERBALANCE LABEL

WARNING - CRUSH LABEL

WARNING - DIB ELECTRICAL SHOCK LABEL

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WARNING - PDU 48 VOLT LABEL

Page 10 of 10 Rev. 0736 Ultra System Overview Lockout/Tagout Lockout/Tagout Introduction Lockout/tagout procedures establishes the minimum requirements for the lockout of energy-isolating devices whenever servicing the test system equipment. The following information is included in this section: • Lockout/Tagout Key Definitions • Types of Hazardous Energy • Lockout/Tagout Procedure • Lockout/Tagout Summary Lockout/Tagout Key Definitions Lockout: Blocking the flow of energy to the equipment by installing a locking device at the energy source. Lockout prevents the operation of the equipment. Guards and interlocks are not acceptable as substitutes for locks. Tagout: A visual warning not to touch the equipment, usually a tag placed on the equipment. Tagout does not prevent operation of the equipment. Authorized employee: Anyone trained to apply locks to the equipment. An authorized employee is not necessarily the same employee who operates the equipment. Affected employee: Anyone who operates equipment that may be locked out or works in the area when the equipment is locked out. Zero mechanical state: A condition that occurs when all of the energy to and within the equipment is de-energized. Service and Maintenance: Activities such as installing, adjusting, repairing, cleaning or un-jamming the test system equipment.

Page 1 of 23 Rev. 0736 Ultra System Overview Lockout/Tagout Types of Hazardous Energy When working on the test system, be aware of the following types of hazardous energy: • Electrical • Mechanical (belts/pulleys/gears) • Pneumatic (air) • Hydraulic (fluid) • Thermal (heat) • Gravity • Chemicals (gas or liquid) • Cryogenic Lockout/Tagout Procedure This section describes how to perform the lockout/tagout procedures and contains the following information: • Purpose • Compliance with This Procedure • Lockout/Tagout Equipment • Lockout/Tagout Procedure • Lockout/Tagout Sequence Purpose This lockout/tagout procedure establishes the minimum requirements for the lockout of energy-isolating devices whenever servicing the test system equipment. It must be used to ensure that the equipment is stopped, isolated from all potentially hazardous energy sources and locked out before anyone servicing the equipment could be injured by an unexpected energizing or startup of the equipment, or the release of stored energy.

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Compliance with This Procedure Before authorizing entry to service access areas of the equipment, service personnel - including, but not limited to, employees of the manufacturer, customer and third-party service providers - must be trained in both general safety hazards (electrical, fire, mechanical, chemical, and so on) and on this specific equipment. When in doubt that training is adequate, contact Teradyne for servicing. Authorized employees are also required to comply with the restrictions and limitations imposed on them during lockout and when required to perform the lockout procedure. All personnel, including other service personnel, operators, users and casual visitors, upon observing that a piece of equipment is locked, must not attempt to start, energize or use that equipment. Violations of these safety precautions should be reported immediately to the employee and his or her supervisor for enforcement and corrective action. Any violation not corrected is grounds for Teradyne service personnel to refuse to service the equipment.

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Lockout/Tagout Equipment This section describes and provide examples of acceptable types of lockout/tagout equipment. Locks • Locks must be identified and used only for lockout. • Each person entering the area must have their own lock. • You should never give your key to another person. The figure Lockout Locks shows an example of some different type of locks.

Electrical Water Air

Personal Assigned Lock Multiple Energy Source Lockout Box Lockout Locks

If using the multiple energy source locks: 1. Remove the desired locks from the box and install on the appropriate energy sources. 2. Place the master key inside the box and lock the box using a personal assigned lock. Note The box is provide with multiple lock/hasp holes to facilitate multi-person lockout.

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Tags • Must be a DANGER warning tag. • Must be signed and dated by the person applying it to the energy source. The figure Tagout Tags shows a sample of a tag.

Other Text Options: • DO NOT START DANGER • EQUIPMENT LOCKED OUT • DO NOT REMOVE LOCK • DO NOT OPEN VALVE DO NOT OPERATE

Signed By: ______

Date: ______

Tagout Tags

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Hasps A device that allows multiple people to perform lockout on the same energy source. The figures Hasp and Hasp Installed on Test System Equipment show examples of a lockout hasp.

Hasp

Hasp

Hasp

Lock

Tag

Hasp Installed on Test System Equipment

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Specialty Devices Any number of devices used for a special type of lockout application. These can include, valve covers, plug boxes, breaker locks, connector boots, etc. For recommendations on Lockout/Tagout for the test system pneumatics see the Recommendations for the Pneumatic System section of this documentation. The figure Manipulator Z-Motion Service Lock shows and example of a special type of gravity lock device.

Unlocked Position Locked Position Manipulator Z-Motion Service Lock

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The figure Facility AC Input Power Circuit Breaker shows an example of a special type of electrical lock device.

Facility AC Input Power Circuit Breaker

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The figure Chilled Water Valve Cover Lockout Device shows an example of a special type of hydraulic lock device.

Chilled Water Valve Cover Lockout Device

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The figure Cooling Distribution Unit Ball Valve Cover Lockout Device shows another example of a special type of hydraulic lock device.

Cooling Distribution Unit Ball Valve Cover Lockout Device

Note This type of device is only used when the chilled water valve cover lockout device cannot be used.

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The figure Hydraulic Bleed-Off Valve shows a special hydraulic bleed-off device.

CDU Service Side

Hydraulic Pressure Bleed-Off Valve

Note Use a bucket and the drain hoses provided in the UltraFLEX drain kit to drain the facility supply and return lines to bleed-off the system pressure.

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The figure UltraFLEX Pressure Meter shows a special pressure meter.

CDU Service Side Check Supply line pressure here

Check Return line pressure here.

UltraFLEX Pressure Meter

UltraFLEX Pressure Meter

Note Use the pressure meter from the UltraFLEX drain kit to verify water line pressure has been released from the system.

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The figure Liquid Nitrogen Lockout Device shows an example of a lockout device for liquid nitrogen.

Liquid Nitrogen Lockout Device

Note If liquid nitrogen is used it must be locked out at the source.

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Recommendations for the Pneumatic System Lockout/Tagout equipment for the UltraFLEX pneumatic system is not provided by Teradyne. The customer is expected to provide external devices to disconnect the compressed air source from the system and prevent reapplication of air during periods of service or maintenance. Any such customer provided devices should provide a method to remove and lock out air pressure to the test system and also provide a method to bleed residual pressure. A sample system is shown in the figure Lockout/Tagout for Typical Customer Air System. The figures Air Valve Lockout Devices and Air Regulator show examples of special pneumatic lockout devices.

Customer Supplied Regulator Padlock

UltraFLEX

Compressed Air Hose Lockout Air Valve Quick Release

Lockout/Tagout for Typical Customer Air System

! CAUTION! !

If the test system has a nitrogen purge option installed, be sure to shut off and lock out the nitrogen gas at the source.

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The UltraFLEX Pneumatic System is used to deliver compressed air to the docking interface. This air is used to drive the outer docking apparatus and the Inner Pull Down (IPD). Follow the appropriate site procedure to remove air pressure from the test system equipment and to Lockout/Tagout the equipment. The figure Air Valve Lockout Devices shows examples of typical devices used to Lockout/Tagout the compressed air.

Air Valve Lockout Devices

To remove pressure internally, locate the air regulator inside the support cabinet. Lift the regulator control knob to unlock it and rotate counter-clockwise until the air pressure reads zero. When service is complete, remove the lockout devices from the air system, reapply external air and set the regulator back to 80 PSI by lifting the control lock and rotating the control clockwise. The figure Air Regulator shows the air regulator.

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Regulator Control Knob Air Regulator

Air Pressure Gauge

Air Regulator

Lockout Stanchions Lockout stanchions are placed around the test system to provide a visual warning to affected employees and anyone else who may approach the system that it is under lockout/tagout. The figure Typical Stanchion Setup shows an example of how to place the stanchions around the test system.

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If wall is not present, place additional stanchions on all sides of test system.

Approaching Approaching Fr o m Fr o m

The size of the lockout area should increase or decrease as appropriate Approaching for the test system. Fr o m Use additional stanchions as required.

Typical Stanchion Setup

Lockout/Tagout Procedure The basic steps of Lockout/Tagout are as follows: 1. Prepare test system equipment for shutdown 2. Shutdown test system 3. Isolate energy sources with energy isolating devices 4. Release stored energy 5. Apply Lockout/Tagout devices 6. Verify isolation 7. Perform service/maintenance 8. Prepare to re-energize equipment 9. Remove tags, locks and hasps Page 17 of 23 Rev. 0736 Ultra System Overview Lockout/Tagout

10.Re-energize test system equipment See the Lockout/Tagout Sequence section of this documentation for a detailed Lockout/Tagout procedure for the UltraFLEX test system. The figure High Level Lockout Process Flow shows the basic process.

De-Energize Service Re-Energize Service is Equipment Equipment Equipment Service is Requested Complete (Step A) (Step B) (Step C)

Steps A and C are performed by the Authorized Equipment Owner Step B is performed by the Service Employee

High Level Lockout Process Flow

Lockout/Tagout Sequence The following information details the steps to follow for Lockout/Tagout: Prepare Test System Equipment for Shutdown Performed by Authorized Equipment Owner 1. Notify all affected employees, the area supervisor and all service employees that the test system equipment must be shut down and locked out. Confirm that all affected employees have been notified before starting the lockout sequence. 2. The authorized employee must review all appropriate documentation to identify the type and magnitude of the energy used by the equipment, understand the hazards of that energy and how to control it. 3. Set up the Lockout/Tagout stanchions and warning signs completely around the test system area. 4. Stop any production run, calibration or diagnostic test that may be running on the test system equipment. 5. Undock the test head from any peripheral equipment. 6. Move the manipulator to a service position, then using the pendant, drive the manipulator up or down until the “Z” motion service lock can be applied. Page 18 of 23 Rev. 0736 Ultra System Overview Lockout/Tagout

7. Slide the deadbolt of the “Z” motion service lock to the locked position on the manipulator. Refer to the previous figure Manipulator Z-Motion Service Lock. Note Wear safety glasses when bleeding pressure from air and water lines.

8. Bleed the internal air pressure of the pneumatic system of the test system at the air regulator located inside the Support Cabinet. Bleed the internal air pressure down to 0 psi. Refer to the previous figure Air Regulator. 9. Turn off the test system power switch. Use the appropriate power-down sequence as identified in the UltraFLEX Installation and Checkout Guide, Teradyne Document Number 553-706-02. 10.Properly power down the test system computer. Note If other peripheral equipment is connected to the UltraFLEX test system such as a handler or prober, this equipment may also be needed to be properly shut down and locked out. Check with the authorities of that particular equipment for proper Shutdown and Lockout/Tagout procedures for this equipment.

Shutdown Test System Performed by Authorized Equipment Owner 1. Turn off the test system’s main circuit breaker CB1 located inside the power distribution unit (PDU).

WARNING!

Line voltage is present when CB1 is OFF, risk of electrical shock or burn hazard. Turn off and lock out facility main AC power circuit breaker before servicing. Never perform lockout at the CB1 circuit breaker.

2. Turn off the facility main AC power circuit breaker that supplies power to the system you are performing Lockout/Tagout on. 3. Turn off the compressed air line that supplies the system you are performing Lockout/Tagout on. 4. Turn off the facility chilled water supply line valve that supplies the system you are performing Lockout/Tagout on, wait 30 seconds, then turn off the return line valve.

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5. If the Nitrogen Purge Option is installed in the test system, turn off the nitrogen line that supplies the system you are performing Lockout/Tagout on. Isolate Energy Sources with Energy Isolating Devices Performed by Authorized Equipment Owner 1. Apply a hasp to the facility main AC power circuit breaker in the off position. 2. Apply valve covers to both the supply and return water lines of the facility chilled water supply. Note If valve covers can not be used on the individual lines, apply a cover to the CDU as shown in previous figure Cooling Distribution Unit Ball Valve Cover Lockout Device.

3. Apply a hasp to the water valve cover(s). 4. Apply a valve lock to the facility compresses air valve. If this is not possible, bleed the air line, then remove the air line from the valve. 5. Place the air line hose into a lockbox and close the box. 6. Apply a hasp to the air valve lock or hose lockbox. 7. If applicable, apply a valve lock to the facility nitrogen valve. Refer to the previous figure Liquid Nitrogen Lockout Device. 8. Apply a hasp to the nitrogen valve lock. Release Stored Energy Performed by Authorized Equipment Owner Note Always wear safety glasses when bleeding air or water lines to protect you eyes

1. Bleed off the pressure in the chilled water supply and return lines at the CDU. Use a bucket and the drain hoses provided in the UltraFLEX drain kit. Refer to the previous figure Hydraulic Pressure Bleed-Off Valve. 2. Bleed off the pressure in the air line at the regulator valve of the facility compressed air source until the pressure reads 0 psi.

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Apply Lockout/Tagout Devices Performed by Authorized Equipment Owner

WARNING!

Line voltage is present when CB1 is OFF, risk of electrical shock or burn hazard. Lockout facility main AC power circuit breaker before servicing. Never perform lockout at the CB1 circuit breaker.

Note Complete lockout tags with the following: reason for the lockout, the responsible person and the date.

1. Fill out a tag with the appropriate information for the facility main AC power circuit breaker and apply it to the hasp. 2. Apply an individual assigned lock to the hasp on the breaker. 3. Fill out a tag with the appropriate information for the facility chilled water valves and apply it to the hasp. 4. Apply an individual assigned lock to the hasp on the valve. 5. Fill out a tag with the appropriate information for the compressed air valve and apply it to the hasp. 6. Apply an individual assigned lock to the hasp on the air valve or hose lock box. 7. If applicable, fill out a tag with the appropriate information for the facility nitrogen valve and apply it to the hasp. 8. Apply an individual assigned lock to the hasp on the valve. Verify Isolation Performed by Authorized Equipment Owner 1. At the customers facility main AC power circuit breaker, verify that the breaker is in the OFF position and that the breaker is properly locked out and tagged out. 2. Check the Power Distribution Unit (PDU) and verify that the Main Power Available Lamp is off. 3. Turn on CB1 at the PDU and verify that none of the lamps illuminate. 4. Turn CB1 back to the OFF position. 5. Verify that the pressure of the facility chilled water supply and return lines has been bled down to 0 psi. Refer to the previous figure UltraFLEX Pressure Meter.

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6. Verify that the air pressure at the facility compressed air connection has been either been bleed all the way down to 0 psi, or that the air hose going to the tester is disconnected and locked in a valve cover lock box. 7. Verify that the manipulator “Z” motion deadbolt lock is in the locked position. 8. If applicable, verify that the facility nitrogen supply has been shut off and properly locked out and tagged out. Perform Service/Maintenance Performed by Service Employee 1. Install a personal assigned lock to each hasp or lockout box/lockout device attached to the test system. 2. Perform the required service or maintenance. 3. Once the service/maintenance work is complete, remove the personal assigned locks. 4. Notify the Authorized Equipment Owner when the work is complete. Prepare to Re-energize Equipment Performed by Authorized Equipment Owner 1. Check the test system equipment and around the area of the equipment to ensure that all non-essential items (tools, parts, rags, etc.) have been removed and that the test system equipment components are operationally intact. 2. Clear all employees from the test system equipment. 3. Notify all affected employees, the area supervisor and all service employees that the test system equipment is ready to be re-energized. Remove Tags, Locks and Hasps Performed by Authorized Equipment Owner 1. Remove all personal assigned locks. 2. Remove the tags from all hasps, lockout boxes and other lockout devices. 3. Remove the hasps, lockout boxes/lockout devices from the test system equipment. Re-energize Test System Equipment Performed by Authorized Equipment Owner 1. Energize the facility air, facility water, facility power and if applicable, facility nitrogen. 2. Restart the test system equipment using the appropriate power-up sequence identified in the UltraFLEX Installation and Checkout Guide, Teradyne Document Number 553-705-02. 3. Adjust the air pressure regulator in the support cabinet to obtain a reading of 80 psi on the gauge.

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4. Unlock the deadbolt of the manipulator “Z” motion service lock. 5. Ensure the test system equipment is functioning properly. 6. Remove the Lockout/Tagout stanchions and warning signs from around the test system area. 7. Release the equipment to the owner. Note If other peripheral equipment is connected to the UltraFLEX test system such as a handler or prober, this equipment may also be re-energized. Check with the authorities of that particular equipment for proper Power-up procedures for this equipment.

Special Circumstances Pay particular attention to special Lockout/Tagout circumstances, such as: • Group Lockout/Tagout • Shift changes • Emergency lock removal Check with the appropriate authorities at the site and use the customer’s procedure for these special circumstances. Lockout/Tagout Summary • Electricity is involved in every part of our business. • Pay attention to your surroundings. • Ask if you are not sure. • Report hazards to your supervisor. • Make sure you take all steps necessary to protect yourself and those around you. • Always look for obvious and hidden energy sources. • Remember, lockout/tagout procedures and electrical precautions are for your safety.

Page 23 of 23 Rev. 0736 Ultra System Overview ESD Damage Prevention and Control Measure ESD Damage Prevention and Control Measure Introduction Electrostatic discharge (ESD) can have a major impact on the operation and long-term reliability of complex test system equipment. The following recommendations are offered to help avoid ESD damage. The test system contains semiconductors that, by the nature of their material (such as MOS) or design (such as LSI, VLSI, or FET), are susceptible to damage from ESD. The nature of the ESD damage may be either: • Hard failures, such as open or fused semiconductor junctions • Partial failure, caused by stressing device leads and junctions, which degrades electrical performance and increases failure susceptibility ESD control starts with understanding the problem and incorporating preventive measures that include special work area materials and practices. These techniques and their effectiveness should be monitored and changes implemented as required. ESD control measures are necessary, and offer protection by degree, with static-prevention techniques providing the most protection. The following control measures are strongly recommended for consideration and implementation. The following information is included in this section: • Static Prevention • Static Control

Page 1 of 3 Rev. 0736 Ultra System Overview ESD Damage Prevention and Control Measure Static Prevention To minimize electronic charge generation: 1. Educate operators and maintenance personnel about the electrostatic charge phenomenon, discharge damage and methods to help prevent problems. 2. Eliminate static producing materials from test and work areas, such as: • Plastic and foam coffee cups • Food containers and wrappers • Clothing and shoes fabricated from man-made materials • Cellophane and paper tapes 3. Maintain area humidity between 40% and 60%. 4. Create a static-conductive work area, including static-conducting floors and tables, and, if necessary, use antistatic spray . 5. To prevent ESD damage during the unpacking, installation or removal of test system instruments, it is strongly recommended that the operator and the instruments be properly grounded. 6. Wear an antistatic coat and tested-grounded wrist strap. Refer to the figure ESD Equipment. Note In severe static-inducing environments such as low-humidity or automated work areas, use air ionizers and, if possible, consult an ESD control specialist.

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Wrist Strap Antistatic Coat Antistatic Containers ESD Equipment

Static Control Minimize electronic charge generation by using the following techniques: 1. Drain static charges from personnel and tools in the work area by: • Using static-conductive floor mats and grounded anti-static service mats. • Using tested-grounded wrist straps with 1 Mohm resistors. See the previous figure ESD Equipment. • Wearing an anti-static coat. See the previous figure ESD Equipment. 2. When handing electronic devices or assemblies to another person, both persons should be discharged before the exchange to neutralize static charges by following these procedures: • Move, handle and store electronic parts and assemblies in antistatic containers. See the previous figure ESD Equipment. • Do not touch printed-circuit board leads or component leads of electronic assemblies. • Service electronic assemblies in a static-controlled area. • Discharge static from tools before servicing electronic assemblies.

Page 3 of 3 Rev. 0736 Ultra System Overview Safety Certification Safety Certification Introduction This section includes the following information: • Regarding Product Certification • Rules for TЬV Certified Product Labeling and Product Certification Requirements • Regarding EMC Certification for the UltraFLEX Test System • Regarding SEMI Standards and Guidelines • Rules for Product Disposal • Lockout Procedure for the UltraFLEX Test System • SEMI E6 Requirements • SEMI S13 Requirements Regarding Product Certification The UltraFLEX test system has been certified by an independent agency as conforming to certain international standards. The certification is noted with one or more appropriate labels placed on the system. Please be advised that certain changes to the system may invalidate this certification, in which case the system certification label must be removed. Examples of changes that require label removal are: • Adding subsystems that have not themselves been certified to standards applicable to that subsystem. • Modifications to the system itself that affect critical parts as listed on the certifying agency’s construction data form. Altering or defeating any safety features provided with the system. Teradyne engineers are instructed to remove these labels when they make customer-requested modifications that invalidate the certification. Ultimate responsibility for removing the labels when required rests with the customer. If you have any questions, please contact the nearest Teradyne Global Customer Services (GCS) center.

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Rules for TЬV Certified Product Labeling and Product Certification Requirements Overview TЬV Rheinland N.A. requires that Teradyne protect their certification mark that is placed on our products. This means that only products that conform to the TЬV Certification Standard should carry the TЬV Bauart, GS, or Tmark markings. At the factory, the certification mark is placed on a product or system if it is faithfully reproduced per the certification standard. If parts are added or changed that are not listed on the constructional data forms (CDF), which is an official TЬV list of authorized critical parts, then the certification mark cannot be placed on the product. Additionally, if the product is at the customer’s site, we must inform them that any compromising changes initiated by Teradyne or themselves require that the certification mark be removed. Background Throughout the world, there are legal requirements to have all electrical and mechanical products used in industry "certified" by a recognized test agency. Examples of these requirements are: • The EC Directives for Safety and EMC in the Common Market countries • The OSHA and FCC rules in the USA • The Canadian CSA Standards • Japan and Korea’s Safety RFI laws Most of Teradyne’s systems have been certified by the internationally recognized test agency TЬV Rheinland N.A. for safety and other regulated issues, such as EMC. Certification of products by this agency meets most of the legal requirements of the various countries, and in many cases satisfies the safety requirements of Teradyne’s customers. Certified products are identified by the test agency label (certification mark) located near the main power label. In addition, major subassemblies requiring certification have an agency certification mark near the assembly nameplate or identification label. Rules and Regulations TЬV requires that Teradyne and its customers take reasonable actions to protect and use their agency certification and markings properly. Products bearing the certification mark are subject to several restrictions imposed by the test agency as part of the approval. Deviation from these restrictions constitutes a violation of the certification process and approval agreement, and effectively decertifies that system. The test agency requires that a decertified product have the test agency certification mark and label removed.

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Changes to a product that decertify it create legal and liability problems for Teradyne and the customer, and should be avoided. Whenever a situation occurs where avoidance is not possible, the customer should be informed of the situation and must agree to the proposed action before the changes are made. The basic guidelines to preserve certification are as follows: • Prior approval from the test agency is necessary when substituting any critical parts defined by the test agency on their construction data form. In addition, any similar parts added to a product must also have prior approval. • The system may not have changes made to the operator-accessible area that create an operator hazard that was not allowed in the original certification. • Teradyne and the customer, either of whom can make changes, are responsible for maintaining the integrity of the certification. Decertification and agency certification mark removal, as required by the test agency, applies when any of the following issues arise. If Teradyne or the customer - prior to shipping, during installation, during either service or application support, or when providing replacement parts: • Substitutes parts not listed on the CDFs. • Adds any subassembly that uses AC power and that is not on the CDFs, and does not have prior approval from the test agency. • Modifies the system or any subassembly that creates an electrical, mechanical, or thermal hazard within the limits of the certification standard used. • Adds any subassembly or accessory that creates an electrical, mechanical, or thermal hazard within the limits of the certification standard used. This includes internal and external assemblies, as well as data processing, instrumentation, power supply assemblies and test head manipulators and interfaces. • Significantly alters the basic system by changing or adding parts, whether they are listed on the CDFs or not, and changes the power or thermal profile of the system. • Adds AC powered or hazardous parts and assemblies to the test head interface as an applications package. • Assists anyone, by instruction or direct action, to add or use parts that create hazards or alter the electrical or thermal system profile. • Removes or defeats any safety feature designed into the product as part of the certification. TЬV requires that Teradyne notify its customers that they must also take responsibility for removing the agency certification label if they take any of the previously defined actions, unilaterally or in conjunction with other parties such as Teradyne, OEM parts suppliers, or outside contract services.

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Additional Information Copies of the test agency certification license are attached to the Customer Notice Regarding Product Certification that is sent with each system. If further assistance or clarification of the certification rules is required, please contact the Teradyne Product Safety Group, a part of the Central Engineering Services in Boston, Mass., USA. Regarding EMC Certification for the UltraFLEX Test System This product has been tested and certified by an independent agency to the requirements of the European Union EMC Directive via the Technical Construction File method. Please be advised that the Technical Construction File method incorporates both equipment and site criteria when determining conformity to the essential requirements of the EMC directive. To ensure that the final installation of the product conforms to the EMC directive and to maintain the integrity of the EMC certification, the user has the responsibility to: • Understand and address the EMC issues. • Maintain the system hardware EMC features. • Ensure that site criteria are met. If you have further questions or require additional assistance, please contact the nearest Teradyne Support Center. EMC Hardware Requirements Incorporated in the test system are the following EMC features that the user must maintain to keep the EMC certification valid: • RFI filters are incorporated in the system. The system must be properly grounded through either a low impedance ground wire in the AC mains service or a local ground rod. • RFI gasketing has been added to the test system doors and covers. Internal conductive shields are used for EMC control where covers are polymeric and uncoated. • RFI filtered AC outlets have been incorporated for all user-accessible outlets or AC cord sets. • RFI shielded digital cables are used when the cables are accessible from the exterior of the test system. To maintain the RFI containment, these cables must always be shielded and have grounded connectors at both ends for termination. Shielded cables or filtered digital connectors are used: • All digital connectors used as a normal part of the system incorporate a shielded cable to the connector and external assembly. These digital cables must always have a shield if replaced or added by the end user.

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• Unused digital connectors are covered and require tools for access. Any cables to be added must be of a shielded type. • The shielded cables and covered connectors are necessary to minimize RFI and to protect the internal circuitry against damage from external RFI, ESD and fast transient signals. • An RFI-shielded harness cover is used to cover the wiring between the test head and the support cabinet. This harness cover is specially made to incorporate an RFI shield in its construction. The closure extending down the length of the cover must be properly overlapped to maintain the RF seal. The harness cover shield, secured at the ends of the cover, must maintain the coaxial ground connections to maintain the RF seal. Installation Site Criteria The following EMC control techniques are specific for this test system. These techniques are permitted by the European Union EMC Directive for use on special purpose industrial equipment. This product has been certified by the competent body, TЬV Rheinland, using the Technical Construction File method. The Technical Construction File, which was prepared by TЬV Rheinland, defines the needed hardware, site criteria and testing for conformance. The following four site criteria must be met to maintain the system’s EMC integrity and certification: RF emissions, RF immunity, static control, and power. RF Emissions The system site is considered part of the criteria defining the specifications for radiated RFI. In normal applications, the test head interface is open for manual testing, and interfaces to another assembly, such as a prober or handler. When used in this manner, the RF seal of the system is interrupted, causing RF emissions above the CISPR 11 Class A limits. When the test system is used properly for EMC, the following criteria apply: • The system may radiate RF energy above CISPR limits at the site. The management at the time of installation either accepts interference to any other electrical apparatus (such as PC-type computers or office machines), or moves such apparatus 10 meters (32.8 feet) from the test area. Ideally, the test area should be an RF-shielded room. • It is recommended that metal or shielded walls be installed. If the test area has windows, the glass must have RF shielding. Test area enclosures should be selected for EMC control features. • In the adjacent environment, there may still be RF energy levels above the CISPR Class A limits. This environment: 1. Should have an installation plan that is carefully reviewed by the Teradyne personnel responsible for EMC conformity. This site criterion is part of the certification. 2. Would normally not be an office area.

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The various shielding or RF attenuator schemes used must ensure 20 dB of RF reduction from the test system to the outside wall of the building. If the site criteria cannot be met, then an RF audit of the site and system must be performed by a laboratory approved by TЬV Rheinland. The results are then given to Teradyne and TЬV Rheinland for review and recommendations. These recommendations may provide other conformance criteria or an acceptance of the existing site. These recommendations are not an arbitrary option of the user. The site criteria are considered part of the certification and must be met to an acceptable standard. RF Immunity Portable telephones, two-way radios, or similar RF-generating apparatus should not be used within 10 meters (32.8 feet) of the installed system because they are intrinsically susceptible to external EMI/RFI. The instrumentation cannot be protected and still perform as intended. Static Control Anti-static control measures must always be used. Connection points for anti-static wrist straps are provided at the test head and the support/expansion cabinets. Tested grounded anti-static wrist straps must always be worn when working at the test head or other instrumentation I/O ports. Refer to the ESD Damage Prevention and Control Measure section of this documentation for additional information. Power Installation sites must have dedicated AC power service for the test systems. Test area AC power must be separate from the power in the office areas. Regarding SEMI Standards and Guidelines Overview of SEMI Standards Program Founded in 1970, Semiconductor Equipment and Materials International (SEMI) is a worldwide trade association that provides a variety of services to its global network of member companies. One such service is providing a forum for members to develop internationally accepted standards for components, materials, and equipment interfaces. For additional information, visit SEMI on-line at www.semi.org or call SEMI Standards Subscription Service at (415) 940- 6904.

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SEMI Safety Guidelines SEMI Standards Facility and Safety Division manages the development of safety guidelines. In the 1996 edition of the SEMI Facility and Safety’s Book of SEMI Standards (BOSS) are ten safety-related guidelines. The primary guideline is SEMI S2, entitled “Safety Guideline for Semiconductor Manufacturing Equipment,” which is a performance-based safety document. It is not intended to be limited to technology but to provide the path to integration of and safety features into the initial design of the equipment. SEMI S2 Versus Other International Safety Standards The UltraFLEX test system equipment is also safety certified by TЬV Rhineland N.A.A to the international IEC/European EN safety standard for test equipment IEC1010/EN61010. SEMI S2 guidelines for electrical safety exceed IEC1010 in the areas mentioned below. Per SEMI S2, the supplier should design the equipment to minimize the need to calibrate, test, or maintain equipment that may be energized and to minimize work that must be performed on components near exposed, energized circuits. Work in categories type 3 and 4 (SEMI definitions quoted below) should have specific written instructions in the maintenance documentation. The supplier should list type 3 or higher electrical hazard tasks by their type in its equipment operation and maintenance documentation: Type 3 - Equipment is energized. Live circuits are exposed and accidental contact is possible. Potential exposures are not greater than 30 volts rms, 42.2 volts peak, 240 volt-amperes, and 60 volts dc. Type 4 - Equipment is energized. Live circuits are exposed and accidental contact is possible. Voltage potentials are greater than 30 volts rms, 42.2 volts peak, 240 volt-amperes, and 60 volts dc or radio frequency (RF) is present.

WARNING!

Live power supply output adjustments is typically type 4 category (hazardous) work. Service personnel should carefully follow the instructions in this documentation for live adjustments to the power supply outputs. To prevent serious burns, service personnel should also remove all rings, watches, and any metal objects capable of bridging hazardous energy parts.

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Recommendation: Teradyne service personnel have the appropriate technical training and experience necessary to minimize hazards intrinsic to the equipment, and also to minimize the danger to themselves or other personnel. Customers using self- maintenance and third-party maintenance should ensure that anyone using a tool to access the equipment enclosure have the training and experience equivalent to that of Teradyne service personnel. Operator servicing and service by maintenance personnel are not allowed unless the individuals are also qualified service personnel with the appropriate test system specific training as well as experience working with hazardous voltages and electrical energy. Per SEMI S2, the main facility AC service disconnect (AC mains) must have a lockout/tagout capability. Recommendation: The customer should review site-specific lockout/tagout training procedures with all personnel authorized to enter service access areas of the equipment. See 29CFR1910.147 for OSHA-USA codes pertaining to lockout/tagout as an example of a typical minimal lockout procedure that all parties at the customer site must meet before entering service access areas of the equipment. Recommendation: A service disconnect device, readily accessible to the user, must be installed in the permanent building wiring to the equipment within the facility. If so, all SEMI requirements for lockout/tagout should also be met at the facility disconnect. Per SEMI S2, the main test system circuit breaker CB1 has at least 10,000 rms symmetrical amperes at 208/120 volt operation, and 14,000 rms symmetrical amperes at 480/277 volt operation. Recommendation: This SEMI requirement should also be addressed where additional overcurrent protectors are installed in the permanent building wiring to the equipment within the facility. Per SEMI S2, the equipment must have an “emergency off” (EMO) circuit and per SEMI S2, all EMO actuators should be readily accessible from operation and maintenance locations. The test system has four EMO actuators: one on the front of the support cabinet and another on the rear. A third EMO actuator is located on the front of the test head and the fourth is located on the manipulator. Recommendation: The customer should review access to the EMO actuators when laying out the facility and verify that the EMO actuators are close, defined as unobstructed access within 10 feet (3.1 meters), to operation and maintenance locations. Where necessary, remote EMO actuators may be considered, but only after consultation with Teradyne. Per SEMI S2, the equipment should have tie-ins to prevent movement during earthquakes.

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Recommendation: In locations where earthquake protection is a concern or requirement, the test system manipulator/support/expansion cabinet should be bolted to the floor using the shipping brackets. Where use of shipping brackets is not practical, additional attachments may be considered, but only after consultation with Teradyne. Some manipulators are not provided with shipping brackets; however, if the customer so requests, Teradyne will design and provide tie-ins unique to the specific facility and manipulator. Per SEMI S2, the supplier should routinely provide to the end user’s equipment owner, purchasing agent, and environmental health and safety department with bulletins that describe any safety-related upgrades or newly identified hazards associated with the equipment. Recommendation: To receive future Product Support Bulletins, end user’s equipment owner, purchasing agent, and environmental health and safety department or other party, should contact the Teradyne customer care center at 1-800-TERADYNE. Product Support Bulletins describe safety-related upgrades or newly identified hazards whenever issued by Teradyne product safety engineers. Per SEMI S2, equipment with enclosures (primarily of plastic) greater than 1.4 cubic meters (50 cubic feet) should be evaluated for a fire detection system capable of interfacing with the user’s facility alarm system. Recommendation: The equipment is certified by an accredited third party to IEC1010, an international IEC standard applicable to test equipment where the design objectives for prevention of fire are met by: • Taking all reasonable steps to avoid high that might cause ignition • Controlling the position of combustible materials in relation to possible ignition sources • Limiting the use of combustible materials • Ensuring that, if combustible materials are used, they have the lowest flammability practicable • Using enclosures or barriers, if necessary, to limit the spread of fire within the equipment • Using suitable materials for the outer enclosures of the equipment. Teradyne test equipment uses all the above design principles, coupled with thermal sensors connected to the EMO circuit to prevent overheating. Where necessary, fire detectors capable of interfacing to the facility fire alarm may be considered, but only after consultation with Teradyne. The type, location and rating of smoke and heat detectors, if installed in the equipment, must take into consideration the air movement within the enclosure so that the detectors operate correctly.

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Per SEMI S2, chemicals used with the equipment should be reviewed jointly by the supplier and the end user to determine if regulatory restrictions apply. As part of the evaluation process, a materials safety data sheet (MSDS) for each of the chemicals should be available. Recommendation: Any cleaners, lubricants, and coolants used by Teradyne service personnel are a subset of the same chemicals used at the Teradyne manufacturing facilities. A controlled book with the list of the chemicals used and an MSDS for each chemical is posted, for internal use only, in every Teradyne manufacturing facility. The list of chemicals is also included in the SEMI assessment report, and each MSDS is available upon request. Customers using self- maintenance and third-party maintenance should also review regulatory restrictions with the service provider. Rules for Product Disposal All electronic products contain substances that must be disposed of properly. Please be kind to our shared environment. Check with your local government authority for details regarding where to recycle or dispose of obsolete systems, assemblies and components. It may be illegal to dispose of obsolete systems, assemblies and components by placing them in the trash in many countries: • Disposal in the USA: Check federal, state, and local laws. • Disposal in Europe: Check the EU Directives, and national and local laws. • Disposal in the rest of the world: Check national and local laws. If you cannot find recycling or disposal information that you need elsewhere, call your local Teradyne representative. The following items should not be thrown in the regular trash or put down the drain: • Integrated circuits (ICs) • Video monitors • Printed wiring board assemblies and bare printed wiring boards • Cathode ray tubes • Mercury relays and mercury wetted relays • Rechargeable and nonrechargeable batteries • Solder/lead • Solvents and cleaners (flux, Alcohol, acetone) • Adhesives or glues (Loctite Thread-lock) • Lubricating oils • Fluorescent light bulbs Page 10 of 16 Rev. 0736 Ultra System Overview Safety Certification

• Material in contact with process solvent • Filtering/polishing media used in a process (carbon, resin, cartridge filter) • Rags/materials containing oil • Used oil • Material containing lead, mercury, silver or other metals • Paint • Miscellaneous electronic devices • Any other chemical or product that may have chemicals and/or metals in them which could potentially contaminate the environment Lockout Procedure for the UltraFLEX Test System Purpose This procedure establishes the minimum requirements for the lockout of energy-isolating devices whenever servicing the test system equipment. It must be used to ensure that the equipment is stopped, isolated from all potentially hazardous energy sources, and locked out before anyone performs service where the unexpected energizing or startup of the equipment or release of stored energy can cause injury. Compliance with this Program Before authorizing entry to service access areas of the test system equipment, service personnel - including, but not limited to, employees of the manufacturer, customer, and third-party service providers - must be trained in both general safety hazards (electrical, chemical, fire, mechanical, and so on) as well as trained on this specific equipment. When in doubt that training is adequate, contact Teradyne for servicing. Authorized employees are also required to comply with the restrictions and limitations imposed when required to perform lockout procedures. All personnel, including other service personnel, operators, users and casual visitors, upon observing a piece of equipment that is locked, shall not attempt to start, energize or use that equipment. Violations of these safety precautions should be reported immediately to the employee and his or her supervisor for enforcement and corrective action. Any violation not corrected is grounds for Teradyne service personnel to refuse service. Lockout Sequence See the Lockout/Tagout section of this documentation for Lockout/Tagout procedures and additional information.

Page 11 of 16 Rev. 0736 Ultra System Overview Safety Certification SEMI E6 Requirements SEMI E6 - Facilities Interface Specifications Guideline and Format. SEMI E6 is intended to assist suppliers with the communication of information about the facilities needs of their equipment to those who are responsible for the facilities design and the equipment installation. The successful installation and operation of semiconductor equipment is the mutual objective of the owner of the equipment, the operator, the installer and the supplier. SEMI E6 is designed to cover all activities that may be included with equipment installation. The supplier is expected to include within the documentation provided to the user all requirements for the site facilities, equipment shipping, installation, startup, acceptance test and training. Sections included in SEMI E6 are: • Terminology – P&ID – Interconnect – Facilitations • Instructions and Sample – Introduction • Instructions for Introduction • Sample for Introduction • Administrative Interface – Instructions for Administrative Interface – Sample for Administrative Interface • Safety – Instructions for Safety • Non-Physical Conditions • Monitoring Communications • Clearances – Sample for Safety • Facilities Installation Requirements – Environment • Instructions for Environment • Sample for Temperature

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• Sample for Relative Humidity • Sample for Special Lighting - Provide Table for Special Equipment – Requirements • Sample for Vibration Requirements • Sample for Noise Requirements • Sample for Seismic Requirements • Sample for Environment Cleanliness – Schematic (Single Line) Diagram and Equipment Data Sheet • Instructions for Schematic (Single Line) Diagrams • Sample for Schematic (Single Line) Diagram • Notes on Equipment Data Sheet – Equipment Facilitations Drawings • Instructions for Equipment Facilitations Drawings • Shipping and Receiving Requirements – Instructions for Shipping and Receiving Requirements – Sample for Shipping and Receiving Requirements • Installation Requirements – Instructions for Installation Requirements – Sample for Transport and Locating Equipment – Sample for Assembly and Hookup Tools and Equipment • Start-Up Requirements – Instructions for Start-Up Requirements – Sample for Equipment – Sample for Material – Sample for Personnel • Acceptance Test – Instructions for Acceptance Test – Sample for Acceptance Test •Training – Instructions for Training – Sample for Training

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• Addenda – Instructions for Addenda • Addendum Topics – Topics without Examples Provided in this Document – Topics with Examples • Addendum A, Computer Interface • Addendum B, Vacuum Requirements • Addendum C, Electrical Requirements • Addendum D, Vibration Requirements • Addendum E, Floor Loading • Addendum F, Wafer Handling • Addendum H, Contractual Language • Equipment Performance • Monthly status report of facility design, construction, and materials • Complete facility drawings, specifications, and calculations • Facility supplier materials list, test procedures, and certifications – Supplier Inspection • Re-audit of customer’s facility by supplier will be at customer's expense • Customer shall be responsible for supplier's costs associated with failure of the facility to meet specifications SEMI S13 Requirements • SEMI S13 - Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment. • SEMI S13 guidelines present considerations when drafting operation and maintenance manuals in order to help hazard reduction in the operation and maintenance of equipment used in semiconductor manufacturing. • SEMI S13 guidelines apply to the operation and maintenance manuals used with equipment that is used in the production, measurement, assembling and testing of semiconductor products. Sections included in S13 are: • Terminology – Caution – Danger – Equipment

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– Warning • Concept of Operation and Maintenance Manuals – Provide sufficient information – Conform to ANSI Guide for Developing User Product Information – Understand the risk associated with each task – Primary language of the equipment location – Additional safety features • Hazards Inherent in Equipment – (SEMI S10) of the equipment – Summarize equipment hazards, their locations, and safety procedures • Hazardous Energy Control Procedures – Source, isolation and control • Hardware Safety Interlocks – Describe hardware safety interlocks – Location of hardware safety interlocks • Hazard Alerts – Visual alerts, auditory alarms, status indicators or hazard alert systems (SYSMON) – Location of each hazard alert • Hazards Inherent in Tasks – Signal word and recommended safety procedures – Include definition of signal word • Material Safety Data Sheet (MSDS) – Chemical substances inherent in and shipped with the equipment – International Labor Convention No. 170 and ANSI Z400.1 • Personal Protective Equipment (PPE) – PPE required per task • Inspection of System Equipment and Maintenance of Consumables – Preventative Maintenance – List of consumable parts and materials – Specific tools and PPE required

Page 15 of 16 Rev. 0736 Ultra System Overview Safety Certification

• Training Requirements – Describe training • Place of Supplier's Contact in Case of Emergency – Whom to contact – Notify user in writing when change in contact • Laws and Regulations – Relevant Administrative Laws and Regulations – Issues Regarding Product Liability (PL)

Page 16 of 16 Rev. 0736 Ultra System Overview Material Handling Material Handling Introduction This section contains safety information needed to properly handle hazardous materials used to maintain and repair the test system or for handling any waste created as a result of maintenance and repair activities. The following information is included in this section: • Handling of Hazardous Materials • Handling of Solid Waste • Handling of Liquid Waste • Material Safety Data Sheets (MSDS) Handling of Hazardous Materials Hazardous materials used in any maintenance or repair activities should be handled and disposed of in accordance with facility guidelines and local regulations. The test system is not used in hazardous material environments so no special handling is required for decommissioning. Handling of Solid Waste Materials that become solid waste as a result of any maintenance or repair activities (wipes, cotton or foam tip swabs) should be handled and disposed of in accordance with facility guidelines and local regulations whenever practical. No part of the test system is considered solid waste when removed as part of a repair activity. Test system components may be disposed of in accordance with factory guidelines and local regulations whenever practical. Solid Waste Disposal The test system is constructed mainly of solid materials consisting of: • Electrical components such as circuit breakers, contactors, relays and insulated wires. • Electronic components such as resistors, capacitors and ICs the majority of which are soldered onto printed circuit boards. • Mechanical components such as tubular steel structures, sheet metal covers, and other small hardware such as screws, nuts and bolts. All such components, assemblies and any replaceable materials should be disposed of properly according to the applicable federal, state and local laws where the equipment is situated.

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To the best of Teradyne's knowledge, there are no known hazardous materials presently being used in the Test System. Furthermore, any substances used have an MSDS (Material Safety Data Sheet) available. Handling of Liquid Waste Materials that become liquid waste as a result of any maintenance or repair activities (alcohol, lubricants, coolant, etc.) should be handled and disposed of in accordance with facility guidelines and local regulations whenever practical. Liquid Waste Disposal The test system uses HFE-7100 3MTM NovatecTM coolant to cool the test head, any coolant removed from the test system should be disposed of properly according to the applicable federal, state and local laws where the equipment is situated. To the best of Teradyne's knowledge, there are no known hazardous materials presently being used in the Test System. Furthermore, any substances used have an MSDS (Material Safety Data Sheet) available. Material Safety Data Sheets (MSDS) This section contains MSDS information for the following chemicals: • • EMB Lubriplate Lubricant

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Isopropyl Alcohol

HAZARD RATING Fire JNJ Industries, Inc. 4 = Extreme 290 Beaver Street 3 3 = High Reactivity Franklin, MA 02038 1 0 2 = Moderate 0 Phone: 508-553-0529 * Fax: 508-553-9973 1 = Non-Toxic, Slight Web Site: www.jnj-industries.com * E Mail: [email protected] 0 = Insignificant Special

FOR CHEMICAL EMERGENCY call INFOTRAC at 1-800-535-5053 24 Hrs. per day, 7 days per week MATERIAL SAFETY DATA SHEET MATERIAL GlobalTech® CODE KEY HAZARD CLASS Isopropyl Alcohol, 70% IPA/DI Flammable Liquid FORMULA DATE ISSUED CHEMICAL NAME OR SYNONYMS NA 4/1/01 2-Propanol I - APPROXIMATE COMPOSITIONAL INFORMATION APPROX. WEIGHT % TWA/TLV USP Isopropyl Alcohol 70 400 ppm TWA USP Water DI 30 NE II - PHYSICAL PROPERTY INFORMATION APPEARANCE; ODOR; pH VISCOSITY Water Clear Liquid pH=7 NA MELTING/FREEZING POINT BOILING POINT VAPOR DENSITY (Air) = 1) -88.5° C F.P. 179°F (82°C) 2.0

SOLUBILITY IN WATER % VOLATILE (By Weight) VAPOR PRESSURE (mm Hg) Complete 100% 33 SPECIFIC GRAVITY (Water = 1) EVAPORATION RATE (Butyl Acetate = 1) 0.88 2.88 III - FIRE AND EXPLOSION HAZARD INFORMATION FLASH POINT AUTO IGNITION TEMP LOWER EXPLOSION LIMIT % UPPER EXPLOSION LIMIT % 64°F (18° C, TCC) Will Not Occur NA NA EXTINGUISHING MEDIA

X Foam "Alcohol" Foam X CO2 X Dry Chemical X Water Spray Other SPECIAL FIRE FIGHTING PROCEDURES Use water spray to cool containers and to prevent flammable vapor from escaping. Water may be ineffective on direct flame, but can be used to flush spills from ignition or disperse vapor

UNUSUAL FIRE AND EXPLOSION HAZARDS Liquid is invisible and flammable, vapors may travel in low areas to ignition source IV - HEALTH HAZARD INFORMATION RECOMMENDED WORK PLACE EXPOSURE LIMITS 500 ppm STEL OSHA & ACGIH EFFECTS OF OVEREXPOSURE Inhalation: May cause mild irritation to nose, throat or above TLV-headache Eye Contact: Slight to moderate irritation, may cause corneal injury Skin Contact: Prolonged contact results in skin drying Ingestion: May cause vomiting, diarrhea, drowsiness, cramps EMERGENCY AND PROCEDURES Inhalation: Move subject to fresh air, give artificial if has stopped Eye or Skin Contact: Flush with large amount of water. Contact Physician. Remove contaminated clothing and wash before reuse Ingestion: If patient is conscious give two glasses of water/milk and induce vomiting. Get medical attention

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V - REACTIVITY INFORMATION STABILITY CONDITIONS TO AVOID X Stable Unstable Keep away from ignition sources: sparks, heat and flame HAZARDOUS DECOMPOSITION PRODUCTS Will Not Occur HAZARDOUS POLYMERIZATION CONDITIONS TO AVOID May Occur X Will Not Occur INCOMPATIBILITY (Materials To Avoid) Water X Other Concentrated Nitric & Sulfuric acids, Oxidizers, Aldehydes, Halogens, Halogen Compounds VI - SPILL OR LEAK PROCEDURE INFORMATION STEPS TO BE TAKEN IN CASE MATERIAL IS RELEASED OR SPILLED Eliminate ignition sources. Ground handling equipment to prevent sparking. Wear respirator and protective clothing. Dike and contain spill. Suppress vapors with water fog. Soak up residue with absorbent clay or sand. Place in non-leaking containers for disposal

WASTE DISPOSAL METHODS Incinerate waste in accordance with Federal, State, and Local regulations VII - SPECIAL PROTECTION INFORMATION VENTILATION TYPE Use local exhaust ventilation to prevent build-up of explosive vapor and keep below TLV - also see section IV RESPIRATORY PROTECTION None required during normal use with adequate ventilation PROTECTIVE GLOVES Natural Rubber Safety Glasses OTHER PROTECTIVE EQUIPMENT Eye Bath, Safety Shower VIII - STORAGE AND HANDLING INFORMATION STORAGE TEMPERATURE INDOOR HEATED REFRIGERATED OUTDOOR Ambient Ambient NA NA Ambient

Drum containers should be grounded. Keep containers closed when not in use. Avoid eye and skin contact. Keep away from children. Keep away from heat and flame. Use with adequate ventilation. Wash with soap and water after use IX - TOXICITY INFORMATION SARA Title III: Acute Health: Yes Sudden release of pressure: No Chronic Health: No Reportable quantity (RQ): NE Fire: Yes 313 Toxic Chemical: Yes X - MISCELLANEOUS INFORMATION

Isopropanol - 3, UN1219, PG II

NA = Not Available KEY DATE OF ISSUE SUPERSEDES NE = Non Established IPA/DI 4/1/01 7/14/00 The information contained herein is based on data considered JNJ accepts no responsibility for any personal injury, property accurate. However, no warranty is expressed or implied regarding damage, or other type of loss due to negligence or otherwise resulting the accuracy of these data or the results to be obtained from the use from the use or handling of this material. Manufacturer's Liability is of the material. limited to the net purchase price of the product or at manufacturer's option to the replacement of the product upon its return to us

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HFE-7100 Novec Fluid

3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

Material Safety Data Sheet

Copyright, 2003, 3M Company. All rights reserved. Copying and/or downloading of this information for the purpose of properly utilizing 3M products is allowed provided that: (1) the information is copied in full with no changes unless prior written agreement is obtained from 3M, and (2) neither the copy nor the original is resold or otherwise distributed with the intention of earningprofit a thereon.

SECTION 1: PRODUCT AND COMPANY IDENTIFICATION

PRODUCT NAME: HFE-7100 3M (TM) Novec (TM) Engineered Fluid MANUFACTURER: 3M DIVISION: Electronics Markets Materials Division Performance Materials Division ADDRESS: 3M Center St. Paul, MN 55144-1000

EMERGENCY PHONE: 1-800-364-3577 or (651) 737-6501 (24 hours)

Issue Date: 05/01/2003 Supercedes Date: 04/01/2003

Document Group: 07-6378-9

Product Use: Intended Use: FOR INDUSTRIAL USE ONLY. NOT INTENDED FOR USE AS A MEDICAL DEVICE OR DRUG. Specific Use: Cleaning and Coating Solvent; Heat Transfer Fluid

SECTION 2: INGREDIENTS

Ingredient C.A.S. No. % by Wt METHYL NONAFLUOROISOBUTYL ETHER 163702-08-7 20 - 80 METHYL NONAFLUOROBUTYL ETHER 163702-07-6 20 - 80

SECTION 3: HAZARDS IDENTIFICATION

3.1 EMERGENCY OVERVIEW

Specific Physical Form: liquid Odor, Color, Grade: Clear, colorless, liquid. Slight ethereal odor. General Physical Form: Liquid Immediate health, physical, and environmental hazards: None Known

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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

3.2 POTENTIAL HEALTH EFFECTS

Eye Contact: Contact with the eyes during product use is not expected to result in significant irritation.

Skin Contact: Contact with the skin during product use is not expected to result in significant irritation.

Inhalation: If thermal decomposition occurs: Respiratory Effects: Signs/symptoms may include cough, sneezing, shortness of breath, chest tightness, nasal discharge, and wheezing.

Ingestion: No health effects are expected.

3.3 POTENTIAL ENVIRONMENTAL EFFECTS

A 3M Product Environmental Data Sheet (PED) is available. This substance has chemical moieties that are resistant to biodegradation and is likely to only undergo partial biodegradation in the environment. The high potential of this substance to move from water to the atmosphere means its potential to bioconcentrate is likely to disappear rapidly from aerobic environments. Take precautions to prevent direct release of this product to the environment.

AQUATIC TOXICITY: Testing results indicate that this product has insignificant toxicity to aquatic organisms at its saturation point (Lowest LC50, EC50, or IC50 > substance water ). This substance is highly volatile and has a high Henry's Law constant and is thus expected to move rapidly through vaporization from in an aquatic compartment or from a soil surface in a terrestrial compartment to the atmosphere.

ATMOSPHERIC FATE: Zero Depletion Potential (ODP). Atmospheric Lifetime: approximately 4.1 yrs. Global Warming Potential (GWP): 280 (100 year ITH, IPCC1995 method). Global Warming Potential (GWP): 320 (100 yr ITH, IPCC2001 method). Atmospheric degradation products are expected to include: for methyl nonafluoroisobutyl ether: predominantly isoperfluorobutyric acid, CO2, HF, and perhaps also CF3COOH; for methyl nonafluorobutyl ether: n-perfluorobutyric acid, CO2, and HF.

SECTION 4: FIRST AID MEASURES

4.1 FIRST AID PROCEDURES

The following first aid recommendations are based on an assumption that appropriate personal and industrial hygiene practices are followed.

Eye Contact: Flush eyes with large amounts of water. If signs/symptoms persist, get medical attention.

Skin Contact: Wash affected area with soap and water. If signs/symptoms develop, get medical attention.

Inhalation: If signs/symptoms develop, remove person to fresh air. If signs/symptoms develop, get medical attention.

If Swallowed: If signs/symptoms develop, get medical attention. No need for first aid is anticipated.

SECTION 5: FIRE FIGHTING MEASURES

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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

5.1 FLAMMABLE PROPERTIES

Autoignition temperature 405 ºC [Details: (ASTM E659-84)] Flash Point Not Applicable Flammable Limits - LEL [Details: NONE acc to ASTM E681-94, @100C] Flammable Limits - UEL [Details: NONE acc to ASTM E681-94, @100C]

5.2 EXTINGUISHING MEDIA Material will not burn.

5.3 PROTECTION OF FIRE FIGHTERS

Special Fire Fighting Procedures: Water may be used to blanket the fire. Exposure to extreme heat can give rise to thermal decomposition. Wear full protective clothing, including helmet, self-contained, positive pressure or pressure demand breathing apparatus, bunker coat and pants, bands around arms, waist and legs, face mask, and protective covering for exposed areas of the head.

Unusual Fire and Explosion Hazards: No unusual fire or explosion hazards are anticipated. No unusual effects are anticipated during fire extinguishing operations. Avoid breathing the products and substances that may result from the thermal decomposition of the product or the other substances in the fire zone. Keep containers cool with water spray when exposed to fire to avoid rupture.

Note: See STABILITY AND REACTIVITY (SECTION 10) for hazardous combustion and thermal decomposition information.

SECTION 6: ACCIDENTAL RELEASE MEASURES

Accidental Release Measures: Observe precautions from other sections. Call 3M- HELPS line (1-800-364-3577) for more information on handling and managing the spill. Ventilate the area with fresh air. Contain spill. Working from around the edges of the spill inward, cover with bentonite, vermiculite, or commercially available inorganic absorbent material. Mix in sufficient absorbent until it appears dry. Collect as much of the spilled material as possible. Clean up residue with an appropriate organic solvent. Read and follow safety precautions on the solvent label and MSDS. Collect the resulting residue containing solution. Place in a metal container approved for transportation by appropriate authorities. Seal the container. Dispose of collected material as soon as possible.

In the event of a release of this material, the user should determine if the release qualifies as reportable according to local, state, and federal regulations.

SECTION 7: HANDLING AND STORAGE

7.1 HANDLING Avoid skin contact with hot material. For industrial or professional use only. Contents may be under pressure, open carefully. No smoking: Smoking while using this product can result in contamination of the tobacco and/or smoke and lead to the formation of the hazardous decomposition products mentioned in the Reactivity Data section of this MSDS. Store work clothes separately from other clothing, food and tobacco products. Use general dilution ventilation and/or local exhaust ventilation to control airborne exposures to below Occupational Exposure Limits. If ventilation is not adequate, use respiratory protection equipment. Avoid continuous exposure of the material to extreme conditions of heat, i.e., above 150 C (welding, open flame, misuse or equipment failure). Avoid exceeding a watt density of 50 watts/inch2 from a heater surface. Continuous exposure to 150 C results in very slight decomposition of this product and therefore, is a very conservative use temperature threshold. Applications involving exposure of the fluid to exceeding 150 C or watt densities exceeding 50 watts/inch2 have been safely implemented. Applications which may exceed these use parameters should be reviewed with 3M Technical Service.

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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

7.2 STORAGE Keep container tightly closed. Keep container in well-ventilated area. Store away from heat. Store away from strong bases.

SECTION 8: EXPOSURE CONTROLS/PERSONAL PROTECTION

8.1 Use with appropriate local exhaust ventilation. Provide local exhaust ventilation at transfer points. Provide appropriate local exhaust when product is heated. For those situations where the fluid might be exposed to extreme overheating due to misuse or equipment failure, use with appropriate local exhaust ventilation sufficient to maintain levels of thermal decomposition products below their exposure guidelines.

8.2 PERSONAL PROTECTIVE EQUIPMENT (PPE)

8.2.1 Eye/Face Protection Avoid eye contact. The following eye protection(s) are recommended: Safety Glasses with side shields.

8.2.2 Skin Protection Avoid skin contact with hot material. Wear appropriate gloves, such as Nomex, when handling this material to prevent thermal burns.

Select and use gloves and/or protective clothing to prevent skin contact based on the results of an . Consult with your glove and/or protective clothing manufacturer for selection of appropriate compatible materials. Gloves made from the following material(s) are recommended: Nitrile Rubber.

8.2.3 Respiratory Protection Under normal use conditions, airborne exposures are not expected to be significant enough to require respiratory protection. If thermal degradation products are expected, use fullface supplied air respirator.

8.2.4 Prevention of Swallowing Do not eat, drink or smoke when using this product. Wash exposed areas thoroughly with soap and water.

8.3 EXPOSURE GUIDELINES

Ingredient Authority Type Limit Additional Information METHYL NONAFLUOROBUTYL ETHER AIHA TWA - 750 ppm as total isomers specific form METHYL NONAFLUOROISOBUTYL AIHA TWA - 750 ppm as total isomers ETHER specific form

SOURCE OF EXPOSURE LIMIT DATA: ACGIH: American Conference of Governmental Industrial Hygienists CMRG: Chemical Manufacturer Recommended Guideline OSHA: Occupational Safety and Health Administration AIHA: American Industrial Hygiene Association Workplace Environmental Exposure Level (WEEL)

SECTION 9: PHYSICAL AND CHEMICAL PROPERTIES

Specific Physical Form: liquid

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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

Odor, Color, Grade: Clear, colorless, liquid. Slight ethereal odor. General Physical Form: Liquid Autoignition temperature 405 ºC [Details: (ASTM E659-84)] Flash Point Not Applicable Flammable Limits - LEL [Details: NONE acc to ASTM E681-94, @100C] Flammable Limits - UEL [Details: NONE acc to ASTM E681-94, @100C] Boiling point 61 ºC [@ 760 mmHg] Density 1.5 g/ml Vapor Density 8.6 [Ref Std: AIR=1]

Vapor Pressure 202 mmHg [@ 25 ºC]

Specific Gravity 1.5 [Ref Std: WATER=1] pH Not Applicable Melting point -135 ºC Solubility In Water < 12 ppm

Evaporation rate 49 [Ref Std: BUOAC=1] Volatile Organic Compounds [Details: Exempt] Percent volatile 100 % VOC Less H2O & Exempt Solvents [Details: Exempt] Viscosity 0.6 centipoise [@ 23 ºC]

SECTION 10: STABILITY AND REACTIVITY

Stability: Stable.

Materials and Conditions to Avoid: Strong bases

Hazardous Polymerization: Hazardous polymerization will not occur.

Hazardous Decomposition or By-Products

Substance Condition Hydrogen Fluoride At Elevated Temperatures - extreme conditions of heat Perfluoroisobutylene (PFIB) At Elevated Temperatures - extreme conditions of heat

Hazardous Decomposition: Perfluorinated Acid Fluorides

Hydrogen Fluoride has an ACGIH Threshold Limit Value of 3 parts per million (as fluoride) as a Ceiling Limit and an OSHA PEL of 3 ppm of fluoride as an eight hour Time_Weighted Average and 6 ppm of fluoride as a Short Term Exposure Limit. The odor threshold for HF is 0.04 ppm, providing good warning properties for exposure.

Decomposition of this product at temperatures above 300 degrees C can form perfluoroisobutylene (PFIB), but PFIB will only accumulate with continuous exposure to excessive heat in a sealed vessel. The formation rate for PFIB is about 1000 times less than the rate for primary thermal decomposition products such as HF. During normal use conditions, no health hazard is associated with the use of this material due to PFIB exposure.

SECTION 11: TOXICOLOGICAL INFORMATION

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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

Please contact the address listed on the first page of the MSDS for Toxicological Information on this material and/or its components.

SECTION 12: ECOLOGICAL INFORMATION

ECOTOXICOLOGICAL INFORMATION

Test Organism Test Type Result Fathead Minnow, Pimephales promelas 96 hours Lethal 50% >7.9 mg/l Green algae, Selenastrum capricornutum 96 hours Inhibitory Concentration 50% >8.9 mg/l Water flea, Daphnia magna 48 hours Effect Concentration 50% >10 mg/l

CHEMICAL FATE INFORMATION

Test Type Result Protocol See Section 3.3.

SECTION 13: DISPOSAL CONSIDERATIONS

Waste Disposal Method: Reclaim if feasible. As a disposal alternative, incinerate in an industrial or commercial facility in the presence of a combustible material. Combustion products will include HF. Facility must be capable of handling halogenated materials. To reclaim or return, check product label for contact.

EPA Hazardous Waste Number (RCRA): Not regulated

Since regulations vary, consult applicable regulations or authorities before disposal.

SECTION 14:TRANSPORT INFORMATION

ID Number(s): 98-0211-8895-2, 98-0211-8940-6, 98-0211-8941-4, 98-0211-8942-2, 98-0211-8943-0, 98-0211-8944-8, 98-0211-8945-5, 98- 0211-8946-3, 98-0212-1011-1, 98-0212-1035-0, 98-0212-1102-8, 98-0212-1128-3, 98-0212-1148-1, 98-0212-3138-0, 98-0212- 3139-8, 98-0212-3140-6, 98-0212-3159-6

Please contact the emergency numbers listed on the first page of the MSDS for Transportation Information for this material.

SECTION 15: REGULATORY INFORMATION

US FEDERAL REGULATIONS

Contact 3M for more information.

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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

311/312 Hazard Categories: Fire Hazard - No Pressure Hazard - No Reactivity Hazard - No Immediate Hazard - No Delayed Hazard - No

STATE REGULATIONS

Contact 3M for more information.

CHEMICAL INVENTORIES

The components of this product are in compliance with the chemical notification requirements of TSCA.

Contact 3M for more information.

Additional Information: The components of this product are in compliance with the chemical registration requirements of ELINCS, METI, AICS, KECI, PICCS, CICS, CEPA.

INTERNATIONAL REGULATIONS

Contact 3M for more information.

ADDITIONAL INFORMATION

The U.S. Environmental Protection Agency (EPA) has listed 3M(TM) HFE-7100 as an acceptable substitute for ozone depleting substances in specific solvent cleaning and aerosol industry applications under its Significant New Alternatives Program (SNAP). Section 612 of the Clean Air Act requires the EPA to administer this program to evaluate and approve alternatives for ozone depleting substances.

This MSDS has been prepared to meet the U.S. OSHA Hazard Communication Standard, 29 CFR 1910.1200.

SECTION 16: OTHER INFORMATION

NFPA Hazard Classification Health: 3 Flammability: 1 Reactivity: 0 Special Hazards: None

National Fire Protection Association (NFPA) hazard ratings are designed for use by emergency response personnel to address the hazards that are presented by short-term, acute exposure to a material under conditions of fire, spill, or similar emergencies. Hazard ratings are primarily based on the inherent physical and toxic properties of the material but also include the toxic properties of combustion or decomposition products that are known to be generated in significant quantities.

HMIS Hazard Classification Health: 0 Flammability: 1 Reactivity: 0 Protection: X - See PPE section. Hazardous Material Identification System (HMIS(r)) hazard ratings are designed to inform employees of chemical hazards in the workplace. These ratings are based on the inherent properties of the material under expected conditions of normal use and are not intended for use in emergency situations. HMIS(r) ratings are to be used with a fully implemented HMIS(r) program. HMIS(r) is a registered mark of the National Paint and Coatings Association (NPCA).

Revision Changes:

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3M MATERIAL SAFETY DATA SHEET HFE-7100 3M (TM) Novec (TM) Engineered Fluid 05/01/2003

Section 3: Potential environmental effects comment was modified. Section 1: Division name was modified. Section 1: Division name was added.

DISCLAIMER: The information in this Material Safety Data Sheet (MSDS) is believed to be correct as of the date issued. 3M MAKES NO WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING, BUT NOT LIMITED TO, ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR COURSE OF PERFORMANCE OR USAGE OF TRADE. User is responsible for determining whether the 3M product is fit for a particular purpose and suitable for user's method of use or application. Given the variety of factors that can affect the use and application of a 3M product, some of which are uniquely within the user's knowledge and control, it is essential that the user evaluate the 3M product to determine whether it is fit for a particular purpose and suitable for user's method of use or application.

3M provides information in electronic form as a service to its customers. Due to the remote possibility that electronic transfer may have resulted in errors, omissions or alterations in this information, 3M makes no representations as to its completeness or accuracy. In addition, information obtained from a database may not be as current as the information in the MSDS available directly from 3M.

3M MSDSs are available at www.3M.com

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EMB Lubriplate Lubricant

LUBRIPLATE£ MATERIAL SAFETY DATA SHEET

Section 1 PRODUCT NAME OR NUMBER FORMULA LUBRIPLATE EMB Lithium Soap, Mineral Oil and Additives GENERIC/CHEMICAL NAME: USDA AUTHORIZATION: Petroleum Lubricating Grease H-2 Manufacturer's Name Emergency Telephone Number Fiske Brothers Refining Co. 1-800-255-3924 - CHEM-TEL (24 hour) Address Telephone Number for Information 1500 Oakdale Ave., Toledo, Ohio 43605 - 129 Lockwood St., Newark, NJ 07105 419-691-2491 - Toledo Office

Section 2 - Hazardous Ingredients/Identity Information Hazardous Components OSHA PEL ACGIH TLV Other Limits Recommended % (optional) Non-hazardous Hazardous Material Identification System (HMIS): Health - 1, Flammability - 1, Reactivity - 0 Not a Controlled Product under (WHMIS) - Canada Special Protection: See Section 9

Section 3 - Health Hazard Data Threshold Limit Value 5 mg/m3 for oil mist in air. OSHA Regulation 29 CFR 1910.1000 - 0.5 mg/m3 for Antimony Compound (as Sb) Effects of Overexposure Prolonged or repeated skin contact may cause skin irritation. Product contacting the eyes may cause eye irritation. Human health risks vary from person to person. As a precaution, exposure to liquids, vapors, mists and fumes should be minimized. This product has a low order of acute oral toxicity, but minute amounts aspirated into the lungs during ingestion may cause mild to severe pulmonary injury. Carcinogenicity: NTP? No IARC Monographs? No OSHA Regulated? No

Section 4 - Emergency and First Aid Procedures EYE CONTACT: Flush with clear water for 15 minutes or until irritation subsides. If irritation persists, consult a physician.

SKIN CONTACT: Remove any contaminated clothing and wash with soap and warm water. If injected by high pressure under skin, regardless of the appearance or its size, contact a physician IMMEDIATELY. Delay may cause loss of affected part of the body.

INHALATION: Vapor pressure is very low and inhalation at room temperature is not a problem. If overcome by vapor from hot product, immediately remove from exposure and call a physician.

INGESTION: If ingested, call a physician immediately. Do not induce vomiting.

Section 5 - Fire and Explosion Hazard Data

Flash Point (Method Used) COC - 425oF Flammable Limits LEL 0.9% UEL 7.0%

Extinguishing Media Foam, Dry Chemical, Carbon Dioxide or Water Spray (Fog)

Special Fire Fighting Procedures Cool exposed containers with water. Use air-supplied breathing equipment for enclosed or confined spaces. Unusual Fire and Explosion Hazards Do not store or mix with strong oxidants. Empty containers retain residue. Do not cut, drill, grind, or weld, as they may explode.

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PRODUCT NAME OR NUMBER - LUBRIPLATE EMB Section 6 - Physical/Chemical Characteristics o Boiling Point >550 F Specific Gravity (H 2O = 1) 0.92 Vapor Pressure (mm Hg.) <0.01 Melting Point Semi-solid

Vapor Density (AIR = 1) >5 Evaporation Rate <0.01 (Butyl Acetate = 1) Solubility in Water Negligible

Appearance and Odor Yellowish, off-white grease with mineral oil odor.

Section 7 - Reactivity Data

Stability Unstable Conditions to Avoid N/A Stable X Incompatibility (Materials to Avoid) Avoid contact with strong oxidants like liquid chlorine, concentrated oxygen.

Hazardous Decomposition or Byproducts May form SO 2. If incomplete combustion, . Hazardous Polymerization May Occur Conditions to Avoid N/A Will Not Occur X

Section 8 - Spill or Leak Procedures

Steps to be taken in case material is released or spilled Scrape up grease, wash remainder with suitable petroleum solvent or add absorbent. Keep petroleum products out of sewers and water courses. Advise authorities if product has entered or may enter sewers and water courses.

Waste disposal method Assure conformity with applicable disposal regulations. Dispose of absorbed material at an approved waste disposal facility or site.

SARA/TITLE III, Section 313 Status - Zinc Compounds - <3% Antimony Compounds - <3%

Section 9 - Special Protection Information

Respiratory Protection (Specify type) Normally not needed

Ventilation Local Exhaust Used to capture fumes and vapors Special N/A Mechanical (General) Other N/A

Protective Gloves Use oil-resistant gloves, if needed. Eye Protection If chance of eye contact, wear goggles.

Other Protective Equipment Use oil-resistant apron, if needed.

Section 10 - Special Precautions

Precautions to be taken in handling and storing Keep containers closed when not in use. Do not handle or store near heat, sparks, flame, or strong oxidants.

Other Precautions Remove oil-soaked clothing and launder before reuse. Cleanse skin thoroughly after contact.

The above information is furnished without warranty, expressed or implied, except that it is accurate to the best knowledge of Fiske Brothers Refining Company. The data on these sheets relates only to the specific material designated herein. Fiske Brothers Refining Company assumes no legal responsibility for use or reliance upon this data.

Date Prepared: January, 2003 Prepared by: James R. Kontak

Page 14 of 14 Rev. 0736 Ultra System Overview Switches and Protective Barriers Switches and Protective Barriers Introduction The following information is included in this section: • EMO Switches • Enhanced EMO Connector • Enhanced EMO Loop • Main Power • Test System Power • Interlock Switches • Protective Barriers to Operators • Circuit Breakers

!!CAUTION!

The information in the General Safety Information section of this documentation should be read and understood before performing service on the test system.

EMO Switches An emergency off (EMO) switch is a safety feature that shuts down all power to the entire test system when activated. The UltraFLEX test system has a total of three EMO switches. The test system support cabinet has two EMO switches, one on the operator side and one on the service side. The test head has one EMO switch. See the figure EMO Switch Locations. Note Power will not be removed from the test system EMO loop when CB1 is turned off.

Page 1 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

Support Cabinet Support Cabinet Operator Side Service Side EMO Switch EMO Switch

Te s t H e a d EMO Switch EMO Switch Locations

Page 2 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

The EMO switches shut down all power back to the main AC circuit breaker CB1 in the test system, as well as any peripheral equipment connected to the enhanced EMO loop connector. Circuit breaker handle is on position 1. Enhanced EMO Connector The test system also has an enhanced EMO loop connector located on the bottom of the convenience panel on the service side of the support cabinet. The connector is provided so that customers can connect their handler or prober EMO circuit into the test system EMO loop, if desired. If the external peripheral equipment is connected to pins 1 and 2 of the enhanced EMO connector, the test system and peripheral equipment will be shut down if the EMO switch on the external equipment is activated. If the external peripheral equipment is connected to pins 3 and 4 of the enhanced EMO connector, the test system and peripheral equipment will be shut down if any one of the three EMO switches on the test system are activated. A loopback connector must be installed at the test system connector to complete the EMO circuit if external peripheral equipment is not connected. The figure Enhanced EMO Loop Connector Location shows the location of the connector.

Page 3 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

Enhanced EMO Loop Connector Enhanced EMO Loop Connector Location

Enhanced EMO Loop When properly connected, the tester EMO loop can be tripped by the peripheral equipment connection and the tester EMO push buttons will trip the EMO of the peripheral equipment. The figure Enhanced EMO Loop Circuit Diagram shows the loop. Additional information about the EMO loop can be found in the Power section of this documentation.

Page 4 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

Legend - EMO Temp Sensor Support Cabinet (TESTER) SMC/SCR

Normally Support Cabinet - EMO Push Button Closed Activation opens both Te m p S e n s o r To contacts. Controlled by SMC >70C Expansion Cabinets

PDU Operator Side EMO Push TESTHEAD Button CB1 On/Off “Main switch 906-040-00 Te m p Power” Sensor >70C x3 Service Side EMO Push Button

Testhead EMO Push Button J67 J68 J69 J70

Example connection for external customer equipment 885-951-00 EMO P/S

CB 4 3 2 1 CB

Enhanced EMO Interface Panel 979-266-02

Enhanced EMO Loop Circuit Diagram

Page 5 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers Main Power The main power switch is used as a main shutoff for the entire test system, including power to the test system computer and it’s peripherals. This disables all AC power to the test system except for the EMO loop. See the figure Main Power Switch.

Main Power Circuit Beaker Handle

Positions 1 (ON)

Main Power Switch

The main power switch is located in the support cabinet on the service side of the PDU. Main power is ON when the main power circuit breaker handle is on position 1. Main power is OFF when the main power circuit breaker handle is on position 0. Note Power will not be removed from the test system EMO loop when CB1 is turned off.

Page 6 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers Test System Power The test system power on/off switch (located on the operator side of the support cabinet) controls contactors in the PDU that enable and disable power distributed to the test system. Refer to the Test System Power On/Off Switch. Refer to the System Monitor and Control Subsystem section of this documentation for additional information.

Test System Power On/Off Switch

Interlock Switches Test Head Door Interlock An interlock switch is provided on the Test Head door. Refer to the figure Test Head Door Interlock Switches. The primary purpose of this switch is to disable Test System power in the event that the Test Head door is opened during operation. The Test Head door is an integral part of the Test Head cooling system and opening during operation may reduce the effectiveness of the cooling system. This switch is monitored by the System Monitor and Control (SMC) computer which interrupts test power when the switch is activated.

Page 7 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

WARNING!

Never defeat any interlock switch.

WARNING!

The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed at the main facility AC service disconnect as outlined in the Lockout/Tagout section of this documentation before servicing the test system. Failure to follow safety precautions can result in severe injury or death.

Page 8 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

Switch Locations Interlock Switch

Standoff Closes the Switch Test Head Door Interlock Switches

Page 9 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

DIB Interlock Switch The test system is also equipped with a test head DIB interlock circuit that is intended to protect operators and service personnel by reducing the hazardous outputs, on instrument cards, to safe levels. This occurs whenever metal parts at the test head measuring terminals or on the DIB itself are accessible. Additional information about the DIB interlock can be found in the 24-Slot DIB Interface section of this documentation. Protective Barriers to Operators There are safety interlocks, warning labels and barriers to impede operator access to service or electrical hazard areas of the test system and test head electronics. At the test head, warning labels identify electrical hazard areas for operator-accessible parts. Circuit Breakers A series of circuit breakers on the PDU protect various outlet receptacles. Refer to the Power section of this documentation for additional information. If a circuit breaker fails after a reset, additional troubleshooting may be needed. The figure Circuit Breakers shows the location of the breakers.

! CAUTION! !

Never override or defeat a test system safety barrier or device.

Page 10 of 11 Rev. 0736 Ultra System Overview Switches and Protective Barriers

Circuit Breakers

Receptacles

Circuit Breakers

Page 11 of 11 Rev. 0736 Ultra System Overview Weight Weight Introduction This section identifies the weight hazards of the test system for operation, service and applications personnel. This information should be read and understood before operating or servicing the system. Some subassemblies, components and boards in the test system require special handling because of their weight. Some require lifting equipment such as fork lifts or pallet jacks. All require proper lifting techniques and great care when moving, handling, shipping or storing them. The table Major Component lists the weight of some of the major test system components. The following information is included in this section: • Heavy Weight Removal Instructions • Special Weights • Adding Counterbalance Weights • When to Add or Remove Counterbalance Weights • Safety Shoes • Earthquake Provision Note Consult the specific section for additional cautions, warnings and information with respect to lifting and weight specifications.

Page 1 of 7 Rev. 0736 Ultra System Overview Weight

Major Component Weights

Component Weight (pounds) Weight (kilograms)

Test head (full) 1200.0 545.5 (See Note)

Test head (empty) 600.0 272.8

Counterbalance weights 8.0 3.6 (RAM Manipulator)

DIB Interface plate 50.0 22.7

Computer 35.0 15.9

DIB 15.0 6.8

Standard CDU 365.0 - 510.0 165.9 - 231.8

PDU 550.0 249.5

Note Weight reflects all instruments and options installed in test head.

Heavy Weight Removal Instructions Removable assemblies exceeding 45 lb (20.4 kg) may require special handling requirements, such as: • Two persons to lift or position the assembly. • Special mechanical lifting and placement of the assemblies. Special Weights Note Because of their weight, the following units require special handling:

Page 2 of 7 Rev. 0736 Ultra System Overview Weight

Unit Weight Material lb kg

Installed Test System) 5000.0 2260.0

Test Head (full) 1200.0 545.5

Manipulator 2700.0 1210.0

Support Cabinet (No expansion cabinet) 1700.0 770.0

Computer workstation with Anthro cart 100.0 45.0

Because of their weight and movement, the manipulator and test head require special handling. When handling printed circuit boards, subassemblies and major components repeatedly during the course of the day, take care to prevent muscle strain and injury. Also, Safety Shoes should be worn because severe toe and foot injury can occur if a board is dropped. Note Safety Shoes will not protect foot injury in all instances. Care should be exercised when working around components that are very heavy. Consult the shoe manufacturer for the specific shoe tolerances.

Adding Counterbalance Weights

! CAUTION! !

Never allow the test head/manipulator to become un- balanced see the Adding Counterbalance Weights section of this documentation for additional information.

Page 3 of 7 Rev. 0736 Ultra System Overview Weight

! CAUTION! !

Gloves and safety shoes should be worn when working with counterbalance weights. See the Safety Shoes section of this documentation for additional information.

!!CAUTION!

Make sure that you have added enough weights to the manipulator counterbalance weight box to offset the weight of the loaded or unloaded test head. Failing to do so could cause the test head to move up or down too quickly, causing damage to the test head and the cables and creating a personal safety risk.

!!CAUTION!

• Only lift one weight at a time. • Use the appropriate tool to separate the weights when removing them from the weight chamber. • Watch for pinch points (between the weights) when adding or removing weights from the manipulator weight box.

The manipulator uses a counterbalance system to offset the weight of the test head. The counterbalance weights are loaded into the counterbalance weight box located in the manipulator frame. Each weight weighs approximately 8 lb. (3.6 kg). The weights are loaded into the weight box with the nipples facing up, six weights per row. See the figure Counterbalance Weights.

Page 4 of 7 Rev. 0736 Ultra System Overview Weight

Counterbalance Weight

Counterbalance Weights

Weights should be added or removed to maintain balance when you remove or install instrument boards from the test head. Typical weight quantities are as follows: • 42 weights for an empty test head (no instruments, outer ring or device interface board (DIB) • Instruments weight between 4.8 - 24.0 lb. (2.2 - 10.9 kg) each. Refer to the table Instrument Weights for specific weights for each instrument. A fully loaded test head requires approximately 90 counterbalance weights to be added to the manipulator weight box.

Page 5 of 7 Rev. 0736 Ultra System Overview Weight

Instrument Weights

Number of Instrument Counterbalance Weight (pounds) Weight (kilograms) Weight Plates

Test Head Heat 3.0 24.0 10.9 Exchanger

Master Support Board 2.0 16.0 7.3

Slave Support Board 2.0 16.0 7.3

HSD 3.0 24.0 10.9

HexVS 3.0 24.0 10.9

VSM 3.0 24.0 10.9

BBAC 2.0 16.0 7.3

DC30 2.0 16.0 7.3

Filler Board 0.6 4.8 2.2

When to Add or Remove Counterbalance Weights Weights should be added or removed to maintain balance when you remove or install instrument boards. The counterbalance weights are installed in the counterbalance weight chamber to offset the weight in the test head. Refer to the Manipulator section of this documentation for additional information on adding or removing counterbalance weights, as appropriate. Safety Shoes Some subassemblies, components and boards require special handling because of their weight. When handling heavy items, Safety Shoes should be worn to prevent severe toe and foot injury if a component is dropped. Note Safety shoes will not protect foot injury in all instances. Care should be exercised when working around components that are very heavy. Consult the shoe manufacturer for the specific shoe tolerances.

Page 6 of 7 Rev. 0736 Ultra System Overview Weight

Safety Shoes Earthquake Provision The test system components should be stabilized in the event of an earthquake, to prevent the system from tumbling or moving. The customer's facilities group should determine the best way of securing the system to their floor to meet Uniform Building Code (UBC) Zone 4 requirements along with their company and local seismic codes. Threaded blocks that are welded in the corner of the each cabinet that can be used as tie-downs. The shipping brackets (and hardware attaching them to the frame) provided with the cabinet have been sized appropriately for the system to pass safety certification. A total of (4) shipping brackets should be used for proper earthquake attachment. Two locations in the front outrigger bar, and two in the rear bottom beam of the cabinets. Each bracket uses (3) 3/8-16 bolts: (2) into the cabinet, (2) anchoring it into the floor. Refer to the UltraFLEX Installation and Checkout Guide (553-706-02) for additional information. The test system manipulator cabinet should also be anchored in a similar manner.

Page 7 of 7 Rev. 0736 Ultra System Overview Anti-Tip Fixture Anti-Tip Fixture Introduction Test Head/Manipulator Support Cabinet The test head is supported by the manipulator. The weights in the manipulator counterbalance weight box as well as the weight of the components located in the support PDU cabinet act to counterbalance the Weight weight of the test head. Tray This section details instructions for installing a special anti-tip fixture to the test system before performing the following maintenance tasks: CDU • Separating the support cabinet from the manipulator. • Removing the entire PDU from the support cabinet. • Removing the entire CDU from the support cabinet. See the figure Test System Weight Test System Weight Locations Locations.

Page 1 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture

Installation Procedure

! CAUTION! !

There is a possibility that the UltraFLEX test system may tip over when certain types of maintenance procedures are performed.

!!CAUTION!

Failure to install the anti-tip fixture prior to performing the specified maintenance tasks will cause an unsafe condition. Rear Manifold Mounting Screws Front Manifold Mounting Screws Note (4 places) (4 places) Once the maintenance activity has been completed, perform these steps in reverse order to remove the anti-tip fixture. 5/32 in. Hex Wrench

1. Undock the test head from the handler/prober then swing it so it is over an unobstructed area of the test floor. 2. Twist the test head the DUT 90° position. 3. Turn off test system power. 4. Using a 5/32 in. hex wrench, remove the 8 manifold mounting screws on each end of the test Manifold Mounting Screw Location head. There are 4 on the front and 4 on the rear. Refer to the figure Manifold Mounting Screw Location. Page 2 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture

5. Install the 2 test head support bars onto the front and rear manifolds of the test head and secure using the 8 screws previously removed. Refer to the figure Test Head Support Bar Locations.

Rear Manifold Front Manifold

Test Head Support Bars Test Head Support Bar Locations

Page 3 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture

6. Reapply test system power. 7. Twist the test head to the DUT down position. 8. Lower the test head until the support bars touch the floor. Refer to the Test Head Lowered to the Floor.

Floor Test Head Support Bars Test Head Lowered to the Floor

Page 4 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture

9. Once the bars are touching the floor, continue lowering the test head until the manipulator drive stops at it’s compliance limit. 10.Disconnect the manipulator pendant controller from the test head side panel. Refer to the figure Pendant Controller Connector Location.

Pendant Controller Connector

Pendant Controller Connector Location

Page 5 of 6 Rev. 0736 Ultra System Overview Anti-Tip Fixture

11.Switch CB1 to the OFF position to turn off Main power. 12.Perform Lockout/Tagout on the test system using the Lockout/ Tagout Procedure outlined in the Lockout/Tagout section of this documentation. 13.Count and record the number of weights loaded into the manipulator counterbalance weight box. Note You will need this number to return the test head to the correct counterbalance state after performing maintenance.

14.Add all of the remaining weights to the manipulator counterbalance weight box. Refer to the Weight Safety section of this documentation for information on adding counterbalance weights. The anti-tip fixture is now properly installed, you can now safely perform the desired maintenance activity. Refer to the appropriate section of this documentation for the specific Field Replaceable Unit (FRU) removal/installation procedure required.

Page 6 of 6 Rev. 0736 Ultra System Overview Torque Specifications Torque Specifications Introduction When performing test system repair and maintenance activities all hardware should be torqued to the appropriate requirements. These torque requirements ensure proper test system operation and safety. Most of the connections use the general industry standard torque requirements outlined in table Hardware Torque Specifications. Some of the test system hardware may require different torque values. If applicable, these specific torque requirements will be identified in the appropriate FRU replacement procedures, as required.

Hardware Steel Brass Aluminum Size

cm-kg in-lb cm-kg in-lb cm-kg in-lb

1-56 2.6 2.25 2.0 1.8 1.38 1.2

4-40 5.2 4.5 4.5 3.9 3.0 2.6

6-32 10.4 9.0 8.3 7.2 5.5 4.8

8-32 20.1 18.0 17.25 15.0 11.2 9.7

10-3234.530.027.523.820.017.5

20 (1/4”)80.570.067.058.048.042.0

18 (5/16”) 161.0 140.0 124.0 108.0 92.0 80.0

16 (3/8”) 276.0 240.0 221.0 192.0 164.0 143.0

13 (1/2”) 575.0 500.0 460.0 400.0 345.0 300.0

Hardware Torque Specifications

Page 1 of 1 Rev. 0736 Ultra System Overview Cooling Cooling Introduction The test system uses a closed-loop liquid cooling system to remove heat from the test head. The cooling system transfers the heat from the teat head to the customers facility water supply. A series of thermostats protects the system from overheating. Additional environmental cooling requirements and specifications can be found in the UltraFLEX Site Preparation Guide (553-706-01). See the Cooling System section of this documentation for specific information about the closed-loop system and thermostats in the test system. The following information is included in this section: • Electrical Shock • Electrostatic Discharge • Liquid Cooling System • Coolant Properties • Coolant Exposure Control • Liquid Spills • Spill Prevention • Movement of Components • Weight

! CAUTION! !

The information in both the General Safety Information and the Cooling System sections of this documentation should be read and understood before performing service on the cooling system.

Page 1 of 14 Rev. 0736 Ultra System Overview Cooling Electrical Shock

WARNING!

The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the cooling system. Failure to follow safety precautions can result in severe injury or death.

High voltages may be present in several places in the test system support cabinet. Refer to the Cooling System section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test system. The test system is equipped with multiple EMO switches that allow all system power except the SMC/EMO circuit in the test head to be shut down quickly in an emergency. Refer to the EMO Switches information in the Switches and Protective Barriers section of this documentation for additional information on the test system EMO switches and system. The CDU is the only component in the liquid cooling system that requires electricity and is housed in the support cabinet. There are two versions of the CDU, Standard and High Capacity. The physical layout of the two different CDUs is very similar. The Standard CDU is shown in this documentation. The CDU receives its input power (208 VAC) from the power distribution unit (PDU) when test system main power is on and the CDU main circuit breaker is closed. The 208VAC enters the CDU at the back (service side) of the unit, near the top of the CDU cabinet, at connector P1. The 208 VAC is present at the input connector (P1), where it is routed to the CDU electrical box and Variable Frequency Drive (VFD) on the operator side. From the electrical box and VFD, the 208V is sent to the pump via an interconnect connector, as shown in the CDU Input Power.

Page 2 of 14 Rev. 0736 Ultra System Overview Cooling

208V InputConnector (P1)

Pump 208V Interconnect

Electrical Box

CDU Main Circuit Breaker

CDU Input Power

Additional power is supplied to the CDU at two connectors located on the front (operator side) of the unit. Connector CDU-P2 connects the SMC to the CDU, in which ±5V is routed to the electrical box to power the SMC rider board and the local operating network (LON) adapter board. Connector CDU-P3 connects the EMO to the CDU, in which +24V is routed to the EMO temperature switch located inside the electrical box in the CDU. Refer to the EMO Switch Location.

Page 3 of 14 Rev. 0736 Ultra System Overview Cooling

EMO Connection

Electrical Box SMC Connection

EMO Switch Location

Sensors are located throughout the piping area of the CDU. All sensors are electrically powered and connect to the CDU controller, which is located inside the electrical box. Care should be taken when working on or near any of the sensors. For the location of the sensors, refer to the Theory of Operation information in the Cooling System section of this documentation.

Page 4 of 14 Rev. 0736 Ultra System Overview Cooling Electrostatic Discharge

!!CAUTION!

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded anti-static service mats when handling printed circuit boards.

Static-sensitive equipment resides in the CDU electrical box, such as the system monitor and control (SMC) rider board shown in the figure SMC Rider Board. The electrical box is located in the front of the CDU.

SMC Rider Board Electrical Box

SMC Rider Board

Page 5 of 14 Rev. 0736 Ultra System Overview Cooling

Always minimize electronic charge generation when working on or near the cooling system by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation. Liquid Cooling System

! CAUTION! !

Caution must be taken when handling or working near the chilled water because facilities often add chemicals to treat the water for corrosion and bacterial growth. Follow the company’s local regulations and all MSDS guidelines.

The UltraFLEX cooling system uses two types of fluids: process coolant and facility chilled water. The process coolant circulates from the support cabinet, through hard pipes and flexible hoses and through the test head. The cooling medium is the dielectric fluid, HFE-7100. No other type of fluid can be used. Spills must be treated according to the installation site and local regulations. MSDS guidelines should always be followed. Refer to the Material Handling section of this documentation for additional information. The test head coolant is cooled by using facility chilled water. The chilled water enters and exits the test system at the CDU, which resides in the support cabinet. The facility chilled water is only present in the CDU and does not pass into any other component of the test system. For more information about cooling system components and fluid paths, refer to the Physical Description and Theory of Operation information in the Cooling System section of this documentation.

Page 6 of 14 Rev. 0736 Ultra System Overview Cooling Coolant Properties Although the liquid coolant is not listed as a hazardous material, the coolant’s more notable properties are highlighted below. This information can help ensure the coolant is properly handled and stored. HFE-7100: • Is chemically inert and does not conduct electricity. • Has almost twice the density of water; therefore, care should be taken when moving containers of the fluid. • Evaporates rapidly at room temperature, so it must be stored in a sealed container. • Has a vapor that, in high concentration, can displace the breathable air in a given volume. • Does not have a flashpoint, but will start to decompose into toxic products at 200oC (392oF). Refer to the Material Handling section of this documentation for additional information on the HFE-7100 fluid. Coolant Exposure Control The following considerations should be kept in mind when working with or around the HFE-7100 fluid. Hazard Identification: Eyes - Not expected to result in significant irritation. Skin - Not expected to result in significant irritation. Inhalation - Repeated exposure could cause elevated fluoride levels. Ingestion - Not a likely route of exposure. No adverse effects expected. First Aid Measures: Eyes - Flush with water. Get medical attention. Skin - Wash with soap and water. Inhalation - Get to fresh air. Get medical attention. Ingestion - Do NOT induce vomiting. Do NOT drink. Get medical attention. Personal Protective Equipment: Safety goggles or glasses with sideshields to protect your eyes. Impermeable gloves for skin contact (such as, neoprene or nitrile) Refer to the Material Handling section of this documentation for additional information on the HFE-7100 fluid.

Page 7 of 14 Rev. 0736 Ultra System Overview Cooling Liquid Spills The following are general guidelines for responding to a chilled water spill, a liquid coolant spill or a leak from the UltraFLEX liquid cooling system. In the event of a spill, follow the installation site specific spill control process. Ensure that the following equipment is available for spill containment: • Absorption pads • Water vacuum • Mop and bucket • Cloth rags and other heavy-duty wipes • Vinyl boots and gloves • CAUTION signs for the wet floor • Safety goggles or glasses with side shields The figure UltraFLEX Test System Top View shows an example of spill containment for the UltraFLEX test system.

Absorbant pads

Facility Water Facility Hoses Water Connections

Manipulator Cabinet Expansion Test Head CDU Cabinet (in Support Cabinet)

UltraFLEX Test System Top View

Page 8 of 14 Rev. 0736 Ultra System Overview Cooling

The Liquid Spill Flowchart presents a general guideline for responding to a liquid spill for the UltraFLEX liquid cooling system. Refer to the following sections for additional details: • Small Spill • Medium Spill • Large Spill

Page 9 of 14 Rev. 0736 Ultra System Overview Cooling

Liquid Spill

Assess Spill

Size of spill Proximity to potentail hazards Proximity to other personnel Type of substance Source of spill

Is type Yes No of substance known ?

Is affected No area safe ? Yes

Do Not Attempt to Contain, Containment Clean up or Dispose of Liquid Shut down power if potential hazard Shut off energy source, if safe Shut down source of spill Get to a safe location Inform personnel in affected area Notify people in area of spill Contain spill, as required Notify safety group of spill Isolate area Do not return to area until it is safe

Cleanup Final Assessment Wear personnel protective equipment (PPE) Confirm equipment is operating normally Gather absorbent material Inform area supervisor Clean up Dispose material in proper containers and follow local disposal rules and regulations

Liquid Spill Flowchart

Page 10 of 14 Rev. 0736 Ultra System Overview Cooling

Small Spill Use the following procedure for a small spill resulting from a small, continuous leak inside or outside the test system: 1. Notify the area supervisor immediately. If the area supervisor is not available, contact the site safety/security department and notify them of the leak. 2. Ensure that the test system is shut off by a trained system operator. After the system is off, evaluate the size of the leak and use either a mop and rags or a water vacuum to remove the liquid. Medium Spill Use the following procedure for a medium leak or spill of more than 1 gallon but less than 20 gallons: 1. Shut down the main system by pressing the system EMO button. 2. Locate and shut off the main chilled water supply. 3. Attempt to use a water vacuum to absorb the spill. If the spill kit is needed, use the small spill kit drum (11-gallon or 41.6 liter). 4. Place absorbent material around the spill area. Place absorbent mats and pillows inside the spill area to help absorb the spill. 5. After all spills have been absorbed, place all absorbent material inside approved bags and/or drums. 6. Follow local rules and regulations for labeling and disposing of the spilled liquid and the absorbent material. Large Spill

WARNING!

The facility power cables going into the test system will be live after you press the EMO button. If these wires and conduit are in water, shut off the source of power to the test system by pressing the power pack or the circuit breaker in the electrical room.

Use the following procedure for a major leak or spill of more than 20 gallons. These spills typically occur when a main supply or return fails.

Page 11 of 14 Rev. 0736 Ultra System Overview Cooling

Perform these steps only if it is safe to do so. 1. Shut down the main system by pressing the system EMO button. 2. Place absorbent material around the spill area. Place absorbent mats and pillows inside the spill area to help absorb the spill. 3. After all spills have been absorbed, place all absorbent material inside approved bags and/or drums. 4. Follow local rules and regulations for labeling and disposing of the spilled liquid and the absorbent material. Spill Prevention For spill prevention, the CDU has an integrated drip pan at the base of the unit which can hold approximately 3 gallons (11.4 liters) of fluid. The drip pan has a float safety switch, which is monitored by the SMC. This switch shuts down test system main power if more than 1 gallon (3.8 liters) of fluid is detected in the pan. There is a drain connection in the drip pan to allow a facility drain line to be installed. Because the drip pan can not hold the entire amount of fluid in the CDU, it is recommended that the customer install a drain line to this connection. Also, to meet SEMI S2 requirements, making this connection to a drain system is required. Refer to the figure CDU Drip Pan.

Page 12 of 14 Rev. 0736 Ultra System Overview Cooling

CDU Drip Pan

Drip Pan Drain Connection CDU Drip Pan

Movement of Components Before moving any of the cooling system components in the support cabinet, perform the appropriate Lockout/Tagout Procedure as outlined in the Lockout/Tagout section of this documentation, when applicable. Also observe proper Static Prevention practices as outlined in the ESD Damage Prevention and Control Measure section. Refer to the Replacing Cooling System FRUs section of this documentation for specific information on replacing cooling system components. Weight Some of the cooling system components and subassemblies require special handling because of their weight. When handling components repeatedly during the course of the day, take care to prevent muscle strain and injury. Also, Safety Shoes should be worn to prevent severe toe and foot injury if a component or subassembly is dropped.

Page 13 of 14 Rev. 0736 Ultra System Overview Cooling

Note Safety Shoes will not protect foot injury in all instances. Care should be exercised when working around components or subassemblies that are very heavy. Consult the shoe manufacturer for the specific shoe tolerances.

Page 14 of 14 Rev. 0736 Ultra System Overview Cooling Cabinet Safety Cooling Cabinet Safety Outriggers The cooling cabinet outriggers are required to be installed anytime the cooling cabinet is not attached to a support cabinet. Note DO NOT REMOVE THE OUTRIGGERS UNTIL THE COOLING CABINET IS SECURELY FASTENED TO THE SUPPORT CABINET. NEGLECTING TO DO THIS WILL RESULT IN THE COOLING CABINET TIPPING OVER.

The cooling cabinet outriggers should be removed by trained Teradyne service personnel only. Once the cooling cabinet is secured to the support cabinet, the outriggers should be retained by the customer for future use.

Outriggers

Cooling Cabinet Outriggers

Page 1 of 4 Rev. 0736 Ultra System Overview Cooling Cabinet Safety

Electrical The impeller is powered by 208VAC Impeller Assembly from the PDU. The 208VAC input power is routed from the support cabinet to a bulkhead connector at the back of the impeller housing. Voltage is present to the impeller assembly when test system power is ON.

208VAC Power Connector

208V

Impeller Assembly Power Connections

Page 2 of 4 Rev. 0736 Ultra System Overview Cooling Cabinet Safety

Impeller Assembly

Impeller Assembly Safety Precautions

WARNING!

The impeller assembly has rotating parts. Safety precautions should be exercised at all times during installation, operations and maintenance. Always disconnect power prior to working on the impeller. Defeating the impeller or test head thermostat will cause the test system to overheat. Never remove the impeller safety (finger) guards. Never place fingers or foreign objects into the fan blades.

Page 3 of 4 Rev. 0736 Ultra System Overview Cooling Cabinet Safety

Weight Safety Shoes should be worn to Safety Shoes prevent severe toe and foot injury if a component is dropped. Note Safety Shoes will not protect foot injury in all instances. Care should be exercised when working around components that are very heavy. Consult the shoe manufacturer for the specific shoe tolerances.

Page 4 of 4 Rev. 0736 Ultra System Overview DIB 24-Slot Interface DIB 24-Slot Interface Introduction The DIB interface contains certain safety hazards as well as certain safety features designed into the interface. Use this section to better understand these hazards and features. • DIB Safety Cover • Override Switches • Hazardous Voltage Protection • IPD Override DIB Release • Weight Safety • DIB Interface Pinch Points DIB Safety Cover The DIB safety cover is used to cover the DIB interface. It provides a physical barrier to electrical hazards that can be present when you run your test system. The cover is attached to the test head docking plate using four twist screws. The DIB safety cover also provides a high voltage safety interlock. It does this by means of a magnet mounted on a bracket. When the cover is installed on the test head docking plate and over the interface board, the magnet activates the safety cover reed switch located on the surface of the test head docking plate. The switch opens as the safety cover is removed, disabling the test head instrument boards from being able to force high voltage into the interface. Refer to the figure DIB Safety Cover.

Page 1 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

Magnet

Tw i s t S c r e w Tw i s t S c r e w

Safety Cover Reed Switch

DIB Safety Cover

Page 2 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface Override Switches Two override key switches are located on test head docking plate, the safety override key switch, and the maintenance mode key switch. An important part of the safety interlock is the safety override key switch. When the key switch is in the down or safe position, the magnetic switch can by activated by installing the DIB safety cover. However, when the key switch is in the up or in the DIB cover override position and a DIB is latched, high voltage is enabled, and the DIB cover has no effect on the safety interlock. The latch control logic board has a feature, whereby the test head is required to be in a DUT up orientation to perform an IPD undock cycle to detach an interface board. This prevents the board from accidentally falling to the floor if the operator presses the wrong pendant button. The maintenance mode switch will allow the operator to override this feature during certain maintenance and docking applications. Refer to the figure Override Switches.

Page 3 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

Maintenance Mode Key Switch Safety Override Key Switch

Test Head Docking Plate

Maintenance Mode Key Switch Safety Override Key Switch

Maintenance Mode

DIB Cover Override Position

Normal Operation Safe Position

Override Switches

Page 4 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface Hazardous Voltage Protection There are three mechanisms in the test head and DIB interface for hazardous voltage protection. • High voltage connect • High voltage gate • Shutdown The high voltage connect and the high voltage gate control signals go to the DIB interface. The shutdown control line is internal to the test head boards. In order to use high voltage features on test system instruments capable of producing high voltages, users must connect control signals HV_CONNECT_N and HV_GATE_N to ground on their interface board, enabling high voltages to the interface board. Once connected, the user’s device program or certain Teradyne diagnostic programs can instruct the individual instrument boards to force high voltage. HV_CONNECT_N is an interlock that prevents the connection of a high voltage signal to the interface board and cannot be overridden by hardware or software. HV_GATE_N is an interlock that prevents the enabling of high voltage on a particular instrument board in the test head, and can be overridden by both hardware and software for debug or diagnostic purposes. Only Teradyne trained individuals should be working within the test system, and thus the reason to allow this override mode. SHD_N, the shutdown control signal, provides a mechanism that an instrument can use to shut itself and other instruments off. Any test head instrument that can generate power levels that can adversely affect other instruments, or can be damaged by excess terminal voltage, current, or internal temperature, should monitor and drive the shutdown signal. This signal is internal to the test head boards. In order to force high voltage to the test head interface, the following must occur: • An interface board must be present and latched properly on the inner pull-down with all four DIB down sensors activated. • Either the safety cover reed switch or the safety override key switch must be closed. • The HV_CONNECT_N and HV_GATE_N controls signals must be connected to ground on the interface board. High voltage connect, high voltage gate and shutdown only control each instrument output buffer or DIB connect relay. These signals are not part of the EMO or the SMC subsystem and do not affect system power. The high voltage connect and high voltage gate circuitry passes through the test head instrument boards, the test head backplane, the master support board, the latch control logic board, and the interface boards. Refer to the figure Hazardous Voltage Protection - Sheet 1.

Page 5 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

OPTO 9 Pin DSUB ISOLATOR Connector All 4 DIB 5 HV_LN2 HV_CON_LN2 Sensors Activated J3 HV_LN1 HV_CON_LN1 6 Safety Safety Cover Override Key Reed Switch Switch

Latch Control Logic Board

High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) JIB INT Voltage BLOCK Connect SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane G213&H213 via the 885-829-02 Cable O ohm to GND jumpers on DIB. High HV_GATE_N HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots E213&F213 Gate Circuitry To/From Slave Backplane via the 885-829-02 Cable DIB HV_GATE_FRC_EN_P (for Checkers) FPGA HV_CON_RDB_N HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots

SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection - Sheet 1

Page 6 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

A soldered jumper or trace (0 ohm to GND), located on the DIB and activated by the user, grounds a safety wire, HV_CONNECT_N. HV_CONNECT_N is bussed through the backplane (via the DIB interface and support board) and the 885-829-02 cable to all instrument slots. The HV_CONNECT_N wire prevents the output of the instrument from being connected to the DIB unless the HV_CONNECT_N wire is grounded. An instrument board must monitor the HV_CONNECT_N wire, if it is capable of sourcing (including a fault condition) in excess of: • +/-60 VDC relative to system ground • 42.4V peak or 30V RMS • 240VA of continuos power at greater than 2V potential The user should only activate the user switch (either manually or through an interlock) when the DIB region is in an operator safe condition. Refer to the figure Hazardous Voltage Protection - Sheet 2.

Page 7 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

OPTO 9 Pin DSUB ISOLATOR Connector All 4 DIB 5 HV_LN2 HV_CON_LN2 Sensors Activated J3 HV_LN1 HV_CON_LN1 6 Safety Safety Cover Override Key Reed Switch Switch

Latch Control Logic Board

High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) JIB INT Voltage BLOCK Connect SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane G213&H213 via the 885-829-02 Cable O ohm to GND jumpers on DIB. High HV_GATE_N HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots E213&F213 Gate Circuitry To/From Slave Backplane via the 885-829-02 Cable DIB HV_GATE_FRC_EN_P (for Checkers) FPGA HV_CON_RDB_N HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots

SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection - Sheet 2

Page 8 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

The HV_CONNECT_N signal can be pulled low in one of two different methods. Refer to the figure Hazardous Voltage Protection - Sheet 3. Method One Manually use the provided key to close the safety override key switch. When the DIB is seated and latched with all four DIB down sensors activated, and the safety override key switch has been closed, the HV_CONNECT_N signal is pulled low. Method Two When the system has the DIB cover installed and the DIB safety cover is closed and fastened, the safety cover reed switch closes. When the DIB is seated and latched, with all four DIB down sensors activated, and the safety cover reed relay is closed, the HV_CONNECT_N signal is pulled low. The CPU can monitor the HV_CONNECT_N status by reading the HV_CON_RDB_N signal from the support board ASIC/FPGA.

Page 9 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

OPTO 9 Pin DSUB ISOLATOR Connector All 4 DIB 5 HV_LN2 HV_CON_LN2 Sensors Activated J3 HV_LN1 HV_CON_LN1 6 Safety Safety Cover Override Key Reed Switch Switch

Latch Control Logic Board

High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) JIB INT Voltage BLOCK Connect SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane G213&H213 via the 885-829-02 Cable O ohm to GND jumpers on DIB. High HV_GATE_N HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots E213&F213 Gate Circuitry To/From Slave Backplane via the 885-829-02 Cable DIB HV_GATE_FRC_EN_P (for Checkers) FPGA HV_CON_RDB_N HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots

SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection - Sheet 3

Page 10 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

A soldered jumper or trace (0 ohm to GND), located on the DIB and activated by the user, grounds a safety wire, HV_GATE_N. HV_GATE_N is bussed through the backplane (via the pogo pins and support board) and the 885-829- 02 cable to all instrument slots. The HV_GATE_N wire prevents the instrument’s output from turning on internally unless the HV_GATE_N wire is grounded An instrument board must monitor the HV_GATE_N wire, if it is capable of sourcing (including in a fault condition) in excess of: • +/-60 VDC relative to system ground • 42.4V peak or 30V RMS • 240VA of continuos power at greater than 2V potential The user should only activate the user switch when the DIB region is in an operator safe condition. The CPU can monitor the HV_GATE_N status by reading the HV_GATE_RDB_N signal from the support board ASIC/FPGA. The CPU can also ground the HV_GATE_N signal (for checkers use) through the use of the HV_GATE_FRC_EN_P signal and a relay connected to ground. Refer to the figure Hazardous Voltage Protection - Sheet 4.

Page 11 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

OPTO 9 Pin DSUB ISOLATOR Connector All 4 DIB 5 HV_LN2 HV_CON_LN2 Sensors Activated J3 HV_LN1 HV_CON_LN1 6 Safety Safety Cover Override Key Reed Switch Switch

Latch Control Logic Board

High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) JIB INT Voltage BLOCK Connect SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane G213&H213 via the 885-829-02 Cable O ohm to GND jumpers on DIB. High HV_GATE_N HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots E213&F213 Gate Circuitry To/From Slave Backplane via the 885-829-02 Cable DIB HV_GATE_FRC_EN_P (for Checkers) FPGA HV_CON_RDB_N HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots

SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection - Sheet 4

Page 12 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

The shutdown wire, signal name SHD_N, provides a mechanism that an instrument can use to shut itself and other instruments off. Any board that can be damaged by excess terminal voltage, current, or internal temperature should monitor and drive the shutdown wire. If a board senses a self-hazardous condition, it must shut itself down and ground the shutdown wire. If it senses a ground condition on the shutdown wire, generated from another instrument, it should also shut itself down. The shutdown conditions, or whether an instrument will use the shutdown wire, are chosen by the designer. The instrument is required to capture a shutdown condition with a latch. After the shutdown condition is latched, it can be broadcast out as the SHD_N signal on the backplane. Resources requiring adherence to the shutdown protocol are: • Utility supplies • Utility bits • Any test head instrument that requires the additional protection provided by the shutdown protocol • Any test head instrument that can generate power levels that can adversely affect other instruments. Refer to the figure Hazardous Voltage Protection - Sheet 5.

Page 13 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface

OPTO 9 Pin DSUB ISOLATOR Connector All 4 DIB 5 HV_LN2 HV_CON_LN2 Sensors Activated J3 HV_LN1 HV_CON_LN1 6 Safety Safety Cover Override Key Reed Switch Switch

Latch Control Logic Board

High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) JIB INT Voltage BLOCK Connect SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane G213&H213 via the 885-829-02 Cable O ohm to GND jumpers on DIB. High HV_GATE_N HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots E213&F213 Gate Circuitry To/From Slave Backplane via the 885-829-02 Cable DIB HV_GATE_FRC_EN_P (for Checkers) FPGA HV_CON_RDB_N HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots

SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection - Sheet 5

Page 14 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface IPD Override DIB Release An IPD override DIB release air fitting is provided. It is located on the master support side of the test head on the side panel. The fitting accepts a 6mm outer diameter air hose and is a push-to-connect style. When a compressed air hose (75 psi) is connected to the fitting, the inner pull-down immediately performs an IPD undock cycle and releases the interface board. This feature can be useful to detach an interface board from the test head if there is no power present, an EMO shutdown has occurred, or due to some other electrical issue. Refer to the Inner Pull-Down Override DIB Release.

Inner Pull-Down Override DIB Release Page 15 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface Weight Safety Sub-assemblies located in the DIB interface such as the test head docking plate and the peripheral docking plate are heavy and awkward to handle, and they require two people to remove and install them. Always undock and move the test head to a location and height that makes it easier to perform maintenance prior to beginning work. Interface boards can be heavy and can easily be dropped when installing and removing them. Care should be taken in handing the interface boards. Refer to the figure Weight Safety.

Weight Safety

Page 16 of 17 Rev. 0736 Ultra System Overview DIB 24-Slot Interface DIB Interface Pinch Points When installing and removing interface boards, be careful not to pinch your fingers between the board and the inner pull-down assembly when performing an IPD docking cycle. Refer to the figure DIB Interface Pinch Points.

DIB Interface Pinch Points Page 17 of 17 Rev. 0736 24-Slot InTEST Docking Solution Ultra System Overview DIB 24-Slot InTEST Docking Solution Safety DIB 24-Slot InTEST Docking Solution Safety The InTEST 3 cam and 4 cam docking plates both have a few areas of concern when it comes to safety. 1. Always use lockout/tagout procedures when performing = pinch points maintenance. Safety glasses should be employed during maintenance when bleeding the pressure from the air lines. 2. When removing the docking plates while performing maintenance, caution should be used. The plates are heavy and can be dropped causing damage to persons and equipment. Two people are recommended when removing the plates due to their weight. 3. There are many exposed pulleys along the cam cable path where pinch points exit. Caution must be used to avoid injury. 4. During an OPD docking cycle and undocking cycle, as the operator selects an OPD dock or OPD undock on the pendant controller, the manual override pin will suddenly swing and the cams will Manual override pin travel path close or open. The operator should be clear from the manual override pin travel path to avoid possible injury. One may remove the manual override pin during automatic docking modes.

Page 1 of 1 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety DIB 36-Slot Interface Safety Introduction The DIB interface contains certain safety hazards as well as certain safety features designed into the interface. Use this section to better understand these hazards and features. The safety topics are: • Optional DIB safety cover • Override switches • Hazardous voltage protection • IPD override DIB release • Weight safety • Pinch points A 24 slot Test Head DIB interface is pictured. The 36 slot is longer to allow for the additional 12 slots - 6 on each side.

Safety Introduction Page 1 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

Optional DIB Safety Cover The optional DIB safety cover is used to cover the DIB interface. It provides a physical barrier to electrical hazards that can be present when you run your test system. The cover is Tw i s t S c r e w attached to the test head docking plate using four twist screws. The DIB safety cover also provides a high voltage safety interlock. It does this by means of a magnet mounted on a bracket. When the cover is installed on the test head docking plate and over the interface board, the magnet activates the safety cover reed switch located on the surface of the test head docking plate. The switch opens as the safety cover is removed, disabling the test head instrument boards from being able to force high voltage into the interface. The DIB safety cover is an option for those customers requiring this type of feature.

Magnet

DIB Safety Cover Reed Switch

Optional DIB Safety Cover Page 2 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

Test Head Key Switches Two key switches are located on test head docking plate, the DIB safety cover override key switch, and the maintenance mode key switch. An important part of the safety interlock is the DIB safety cover override key switch. When the key switch is in the down or production position, the magnetic switch can by activated by installing the DIB safety cover. However, when the key switch DIB Safety Cover is in alignment with the indicator Maintenance Mode Key Switch indent (DIB cover override position) Override Key Switch and a DIB is latched, high voltage is enabled, and the DIB cover has no effect on the safety interlock function. Test Head Docking Plate The docking control board has a feature, whereby the test head is required to be in a DUT up orientation Maintenance Mode Key Switch DIB Safety Cover Override Key Switch to perform an IPD undock cycle to detach an interface board. This prevents the board from accidentally falling to the floor if the operator Maintenance Mode presses the wrong pendant button. The maintenance mode switch will DIB Cover Override Position allow the operator to override this feature during certain maintenance and docking applications. Indicator Indent Indicator Indent Production Mode Production Position

Override Switches Page 3 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

Hazardous Voltage Protection There are three mechanisms in the 9 Pin DSUB Connector test head and DIB interface for On Test Head Bulkhead Panel OPTO hazardous voltage protection. ISOLATOR J21 J21 All 4 DIB 44 HV_LN2 HV_CON_LN2 Sensors • High voltage connect Activated J3 • High voltage gate HV_LN1 HV_CON_LN1 15 Safety Cover • Shutdown Safety J108 Override Key Reed Switch The high voltage connect and the Switch high voltage gate control signals go to the DIB interface. Docking Control Board The shutdown control line is internal to the test head boards. High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) In order to use high voltage features JIB INT Voltage BLOCK Connect on test system instruments capable of SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane producing high voltages, users must G213&H213 via the 885-829-02 Cable connect control signals O ohm to GND HV_CONNECT_N and HV_GATE_N jumpers on DIB. High HV_GATE_N to ground on their interface board, HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots enabling high voltages to the interface E213&F213 Gate Circuitry board. Once connected, the user’s To/From Slave Backplane device program or certain Teradyne via the 885-829-02 Cable diagnostic programs can instruct the DIB HV_GATE_FRC_EN_P individual instrument boards to force (for Checkers) high voltage. FPGA HV_CONNECT_N is an interlock that HV_CON_RDB_N prevents the connection of a high HV_GATE_RDB_N voltage signal to the interface board HV_GATE_FRC_EN_P and cannot be overridden by SHD_N To/From All Slots SHUTDOWN_RCV_N hardware or software. (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Page 4 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

HV_GATE_N is an interlock that prevents the enabling of high voltage on a particular instrument board in the 9 Pin DSUB Connector On Test Head Bulkhead Panel test head, and can be overridden by OPTO both hardware and software for ISOLATOR J21 J21 All 4 DIB 44 HV_LN2 HV_CON_LN2 debug or diagnostic purposes. Only Sensors Activated J3 Teradyne trained individuals should HV_LN1 HV_CON_LN1 be working within the test system, and 15 Safety Cover Safety J108 thus the reason to allow this override Override Key Reed Switch mode. Switch

SHD_N, the shutdown control signal, Docking Control Board provides a mechanism that an instrument can use to shut itself and other instruments off. Any test head High HV_CONNNECT_N instrument that can generate power To/From All Slots (0 = OK to Connect to DIB) levels that can adversely affect other JIB INT Voltage instruments, or can be damaged by BLOCK Connect SDWLK 2 Circuitry excess terminal voltage, current, or HV_CN_DIB_N To/From Slave Backplane internal temperature, should monitor G213&H213 via the 885-829-02 Cable O ohm to GND and drive the shutdown signal. This jumpers on DIB. signal is internal to the test head High HV_GATE_N HV_Gt_DIB_N To/From All Slots boards. Voltage (0 = OK to Enable) E213&F213 Gate Circuitry In order to force high voltage to the To/From Slave Backplane test head interface, the following must via the 885-829-02 Cable occur: DIB HV_GATE_FRC_EN_P • An interface board must be (for Checkers) present and latched properly on FPGA the inner pull-down with all four HV_CON_RDB_N DIB down sensors activated. HV_GATE_RDB_N • Either the safety cover reed switch or the safety override key switch HV_GATE_FRC_EN_P SHD_N To/From All Slots

must be closed. SHUTDOWN_RCV_N (0 = Shutdown) • The HV_CONNECT_N and SHUTDOWN_XMT_N To/From Slave Backplane HV_GATE_N controls signals via the 885-829-02 Cable must be connected to ground on Master Support Board Master Backplane the interface board.

Page 5 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

High voltage connect, high voltage gate and shutdown only control each instrument output buffer or DIB 9 Pin DSUB Connector On Test Head Bulkhead Panel connect relay. These signals are not OPTO ISOLATOR J21 J21 part of the EMO or the SMC All 4 DIB 44 HV_LN2 HV_CON_LN2 Sensors subsystem and do not affect system Activated J3 power. HV_LN1 HV_CON_LN1 15 Safety Cover Safety J108 The high voltage connect and high Override Key Reed Switch voltage gate circuitry passes through Switch the test head instrument boards, the test head backplane, the master Docking Control Board support board, the docking control board, and the interface boards. High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) JIB INT Voltage BLOCK Connect SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane G213&H213 via the 885-829-02 Cable O ohm to GND jumpers on DIB. High HV_GATE_N HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots E213&F213 Gate Circuitry To/From Slave Backplane via the 885-829-02 Cable DIB HV_GATE_FRC_EN_P (for Checkers) FPGA HV_CON_RDB_N HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots

SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection Page 6 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

A soldered jumper or trace (0 ohm to GND), located on the DIB and activated by the user, grounds a 9 Pin DSUB Connector On Test Head Bulkhead Panel safety wire, HV_CONNECT_N. OPTO ISOLATOR J21 J21 All 4 DIB 44 HV_LN2 HV_CON_LN2 HV_CONNECT_N is bussed through Sensors Activated J3 the backplane (via the DIB interface HV_LN1 HV_CON_LN1 and support board) and the 15 Safety Cover Safety J108 885-829-02 cable to all instrument Override Key Reed Switch slots. Switch

The HV_CONNECT_N wire prevents Docking Control Board the output of the instrument from being connected to the DIB unless the HV_CONNECT_N wire is grounded. High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) An instrument board must monitor the JIB INT Voltage BLOCK Connect HV_CONNECT_N wire, if it is capable SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane of sourcing (including a fault G213&H213 via the 885-829-02 Cable condition) in excess of: O ohm to GND jumpers on DIB. • +/-60 VDC relative to system High HV_GATE_N HV_Gt_DIB_N To/From All Slots ground Voltage (0 = OK to Enable) E213&F213 Gate • 42.4V peak or 30V RMS Circuitry To/From Slave Backplane • 240VA of continuos power at via the 885-829-02 Cable greater than 2V potential DIB HV_GATE_FRC_EN_P The user should only activate the user (for Checkers) (for switch (either manually or through an FPGA interlock) when the DIB region is in an HV_CON_RDB_N operator safe condition. HV_GATE_RDB_N The HV_CONNECT_N signal can be HV_GATE_FRC_EN_P pulled low in one of two different SHD_N To/From All Slots SHUTDOWN_RCV_N methods. (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection Page 7 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

Method One Manually use the provided key to 9 Pin DSUB Connector close the DIB safety cover override On Test Head Bulkhead Panel OPTO key switch. When the DIB is seated ISOLATOR J21 J21 All 4 DIB 44 HV_LN2 HV_CON_LN2 and latched with all four DIB down Sensors sensors activated, and the DIB safety Activated J3 HV_LN1 HV_CON_LN1 cover override key switch has been 15 Safety Cover closed, the HV_CONNECT_N signal Safety J108 Override Key Reed Switch is pulled low. Switch

Method Two Docking Control Board When the system has the optional DIB cover installed and the DIB safety cover is closed and fastened, the High HV_CONNNECT_N To/From All Slots (0 = OK to Connect to DIB) safety cover reed switch closes. JIB INT Voltage BLOCK Connect SDWLK 2 Circuitry When the DIB is seated and latched, HV_CN_DIB_N To/From Slave Backplane with all four DIB down sensors G213&H213 via the 885-829-02 Cable activated, and the safety cover reed O ohm to GND jumpers on DIB. relay is closed, the HV_CONNECT_N High HV_GATE_N signal is pulled low. HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots E213&F213 Gate Circuitry The CPU can monitor the To/From Slave Backplane HV_CONNECT_N status by reading via the 885-829-02 Cable the HV_CON_RDB_N signal from the DIB support board ASIC/FPGA. HV_GATE_FRC_EN_P (for Checkers) (for FPGA HV_CON_RDB_N HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots

SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N To/From Slave Backplane via the 885-829-02 Cable Master Support Board Master Backplane

Hazardous Voltage Protection Page 8 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

A soldered jumper or trace (0 ohm to GND), located on the DIB and activated by the user, grounds a 9 Pin DSUB Connector On Test Head Bulkhead Panel safety wire, HV_GATE_N. OPTO ISOLATOR J21 J21 HV_GATE_N is bussed through the All 4 DIB 44 HV_LN2 HV_CON_LN2 Sensors backplane (via the pogo pins and Activated J3 support board) and the 885-829-02 HV_LN1 HV_CON_LN1 15 Safety Cover cable to all instrument slots. The Safety J108 Override Key Reed Switch HV_GATE_N wire prevents the Switch instrument’s output from turning on internally unless the HV_GATE_N Docking Control Board wire is grounded An instrument board must monitor the High HV_CONNNECT_N HV_GATE_N wire, if it is capable of To/From All Slots (0 = OK to Connect to DIB) sourcing (including in a fault JIB INT Voltage BLOCK Connect condition) in excess of: SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane • +/-60 VDC relative to system G213&H213 via the 885-829-02 Cable O ohm to GND ground jumpers on DIB. • 42.4V peak or 30V RMS High HV_GATE_N HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots • 240VA of continuos power at E213&F213 Gate Circuitry greater than 2V potential To/From Slave Backplane The user should only activate the user via the 885-829-02 Cable switch when the DIB region is in an DIB HV_GATE_FRC_EN_P operator safe condition. (for Checkers) The CPU can monitor the FPGA HV_GATE_N status by reading the HV_CON_RDB_N HV_GATE_RDB_N signal from the HV_GATE_RDB_N support board ASIC/FPGA. The CPU HV_GATE_FRC_EN_P can also ground the HV_GATE_N SHD_N To/From All Slots SHUTDOWN_RCV_N signal (for checkers use) through the (0 = Shutdown) SHUTDOWN_XMT_N use of the HV_GATE_FRC_EN_P To/From Slave Backplane via the 885-829-02 Cable signal and a relay connected to ground. Master Support Board Master Backplane

Hazardous Voltage Protection Page 9 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

The shutdown wire, signal name SHD_N, provides a mechanism that an instrument can use to shut itself 9 Pin DSUB Connector and other instruments off. OPTO On Test Head Bulkhead Panel ISOLATOR J21 J21 All 4 DIB 44 HV_LN2 HV_CON_LN2 Any board that can be damaged by Sensors Activated J3 excess terminal voltage, current, or HV_LN1 HV_CON_LN1 internal temperature should monitor 15 Safety Cover Safety J108 and drive the shutdown wire. If a Override Key Reed Switch board senses a self-hazardous Switch condition, it must shut itself down and ground the shutdown wire. If it senses Docking Control Board a ground condition on the shutdown wire, generated from another High HV_CONNNECT_N instrument, it should also shut itself To/From All Slots (0 = OK to Connect to DIB) down. The shutdown conditions, or JIB INT Voltage BLOCK Connect whether an instrument will use the SDWLK 2 Circuitry HV_CN_DIB_N To/From Slave Backplane shutdown wire, are chosen by the G213&H213 via the 885-829-02 Cable designer. The instrument is required O ohm to GND to capture a shutdown condition with jumpers on DIB. High HV_GATE_N a latch. After the shutdown condition HV_Gt_DIB_N Voltage (0 = OK to Enable) To/From All Slots is latched, it can be broadcast out as E213&F213 Gate Circuitry the SHD_N signal on the backplane. To/From Slave Backplane via the 885-829-02 Cable Resources requiring adherence to the DIB shutdown protocol are: HV_GATE_FRC_EN_P (for Checkers) • Utility supplies FPGA • Utility bits HV_CON_RDB_N • Any test head instrument that HV_GATE_RDB_N requires the additional protection provided by the shutdown protocol HV_GATE_FRC_EN_P SHD_N To/From All Slots • Any test head instrument that can SHUTDOWN_RCV_N (0 = Shutdown) SHUTDOWN_XMT_N generate power levels that can To/From Slave Backplane adversely affect other via the 885-829-02 Cable instruments. Master Support Board Master Backplane

Hazardous Voltage Protection Page 10 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

IPD Override DIB Release An IPD override DIB release air fitting is provided. It is located on the master support side of the test head on the side panel. The fitting accepts a 6mm outer diameter air hose and is a push-to- connect style. When a compressed air hose (75 psi) is connected to the fitting, the inner pull-down immediately performs an IPD undock cycle and releases the interface board. This feature can be useful to detach an interface board from the test head if there is no power present, an EMO shutdown has occurred, or due to some other electrical issue.

Inner Pull-Down Override DIB Release Page 11 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

Weight Safety Sub-assemblies located in the DIB interface such as the test head docking plate and the peripheral docking plate are heavy and awkward to handle, and they require two people to remove and install them. Always undock and move the test head to a location and height that makes it easier to perform maintenance prior to beginning work. Interface boards can be heavy and can easily be dropped when installing and removing them. Care should be taken in handing the interface boards. Note A 24 slot Test Head and Peripheral Docking plate is pictured. The 36 slot is longer to allow for the additional 12 slots - 6 on each side.

Weight Safety Page 12 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

DIB Interface Pinch Points When installing and removing interface boards, be careful not to pinch your fingers between the board and the inner pull-down assembly when performing an IPD docking cycle. Note A 24 slot Test Head and Peripheral Docking plate is pictured. The 36 slot is longer to allow for the additional 12 slots - 6 on each side.

DIB Interface Pinch Points Page 13 of 14 Rev. 0736 Ultra System Overview DIB 36-Slot Interface Safety

DIB Interface Fence Pinch Points Pinch Points With the interface board removed, be careful to kept your hands and fingers away from the fence that is part of the inner pull-down assembly when IPD cycling the fence. FENCE UP Used for manual testing

Pinch Points

IPD FENCE DOWN Used for peripheral docking to probers and handlers

DIB Interface Fence Pinch Points

Page 14 of 14 Rev. 0736 Ultra System Overview Digital Signal Processor Digital Signal Processor Laser Safety

!!CAUTION!

The UltraFLEX test system uses a Laser Class 1 (Laser Klasse 1) System according to EN 60825-1:1994+A1+A2. Use of controls, adjustments, or performance of procedures other than those specified may result in hazardous radiation exposure.

Laser Energy As many as six lasers reside in the UltraFLEX test system. Two lasers are always present: the laser for the databus card and the matching laser on the support board. Two lasers are added with the two-processor DSP option: one in the DSP computer and one on the XGEM module. Another two lasers are added with the four-processor DSP option. Laser Specifications • Databus card and support board fiber-optic communications transceiver: Laser Class: 1 Laser Power: 0 dBm Wavelength: 850 nm Operational temporal mode: Continuous • DSP Option: DSP computer and XGEM module communications: Laser Class: 1M Laser Power: -2 dBm Wavelength: 850 nm Operational temporal mode: Continuous

Page 1 of 2 Rev. 0736 Ultra System Overview Digital Signal Processor Weight Safety The DSP PC weighs 42 lb (19 kg). Be careful when lifting, removing, and installing it.

Page 2 of 2 Rev. 0736 Ultra System Overview Manipulator Manipulator Introduction The following information is included in this section: • General Safety Issues • Locking the Manipulator • Moving the Manipulator • Operating the Manipulator • Ballast Requirements • Counterbalance Weights • Pinch Points • Twist Caution

!!CAUTION!

The information in both the General Safety Information and the Manipulator sections of this documentation should be read and understood before performing service on the manipulator.

General Safety Issues Only trained personnel should operate the manipulator. Untrained personnel should not be in the area around the test head or in the manipulator range of motion. All personnel should observe the following safety precautions when operating or performing service on the test head or manipulator: • Never go underneath the test head while it is mounted on the manipulator. • Never put your hands on the manipulator or test head when it is in motion. • Never place tools or other items on the manipulator or test head. • Do not lean equipment or material against the manipulator. • Always move the manipulator slowly and in a controlled manner.

Page 1 of 11 Rev. 0736 Ultra System Overview Manipulator

• When moving or relocating the manipulator, always wear foot protection and make sure the path is free of obstructions. See the figure Safety Shoes in the Weight Safety section of this documentation for additional information. • Never remove weights from the manipulator unless the test head is properly supported. • Never allow the test head/manipulator to become unbalanced. • Never move the test head on the manipulator in more than one direction at one time. • Ensure that the manipulator is moved to the SERVICE POSITION and the Service Lock engaged before performing any service on the manipulator. Refer to the Manipulator section of this documentation for information on moving the manipulator. Locking the Manipulator Movement of the test head is prevented during servicing by positioning the test head at the deadbolt locking location on the front of the manipulator cabinet. Engage the deadbolt by lifting the lever and sliding the bolt into the desired striker. Refer to the figure Service Lock.

!!CAUTION!

Do not attempt to move the manipulator with the dead bolt engaged or the shipping brackets installed.

Page 2 of 11 Rev. 0736 Ultra System Overview Manipulator

Striker Plate

Dead Bolt

Dead Bolt

Service Lock

The weight tray inside the manipulator column may also be secured by re-installing the shipping brackets provided. There are two shipping brackets, one on each side of the weight tray. Follow the instructions in the UltraFLEX Installation and Checkout Guide (553-706-02) to remove and install the brackets. Refer to the figure Weight Tray Shipping Bracket. Refer to the Manipulator section of this documentation for details about the counterweights.

Page 3 of 11 Rev. 0736 Ultra System Overview Manipulator

Securing Hardware

Weight Tray Shipping Bracket

Weight Tray Shipping Bracket

Moving the Manipulator When moving or relocating the manipulator, take the following precautions: • Never move the manipulator cabinet with the test head installed in the arms. • Install the stabilizer bracket to the base of the manipulator cabinet. (Refer to the figure Stabilizer Brackets.) • Install the two caster brackets to the rear of the manipulator cabinet. • Install the two red weight tray shipping brackets. • Always wear foot protection and make sure the path is free of obstructions.

Page 4 of 11 Rev. 0736 Ultra System Overview Manipulator

Stabilizer Bracket Caster Bracket Stabilizer Brackets Operating the Manipulator Only trained personnel should operate the manipulator. Untrained personnel should not be in the area around the test head or in the manipulator range of motion. Always move the test head on the manipulator in a slow and controlled manner. Refer to the Manipulator section of this documentation for information on manipulator movement.

Page 5 of 11 Rev. 0736 Ultra System Overview Manipulator

! CAUTION! !

Do not attempt to move the test head on the manipulator if the service lock or dead bolt are locked.

! CAUTION! !

Never move the test head on the manipulator in more than one direction at one time.

!!CAUTION!

Never allow the test head/manipulator to become unbalanced, see the Adding Counterbalance Weights information in the Weight Safety section of this documentation for additional information.

Ballast Requirements The manipulator is an integrated component of the UltraFLEX test system. As such, the manipulator uses the weight of the support cabinet as ballast for supporting the weight of the test head. The manipulator cabinet is attached to the support cabinet with eleven bolts, five on the service side and six on the operator side. The manipulator must remain secured to the support cabinet when the test head is attached to the arms. Never detach the manipulator from the support cabinet when the manipulator is supporting the weight of the test head. Also, if a major component, such as the CDU or PDU, is removed from the support cabinet, the test head must be supported by the test head shipping cart or a Teradyne-designed support brace. Refer to the Manipulator Cabinet (Service Side) for the hardware mounting locations. For more information, refer to the Anti-Tip Fixture section of this documentation.

Page 6 of 11 Rev. 0736 Ultra System Overview Manipulator

Mounting Locations

Manipulator Cabinet (Service Side)

Counterbalance Weights The manipulator uses a counterbalance system to offset the weight of the test head.The counterbalance weights are loaded into the counterbalance weight box located in the manipulator frame. Refer to the Manipulator section of this documentation for additional information. Each weight weighs approximately 8 lb (3.6 kg). The weights are loaded into the counterbalance box, located in the manipulator cabinet.

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The counterbalance weights are installed in the counterbalance weight box to offset the weight in the test head. Weights should be added or removed to maintain balance when you remove or install boards. If the system becomes unbalanced, the vertical motor may not function properly and the test head could raise or drop approximately 0.5 in. (1.3 cm). The figure Counterbalance Weights shows the weights. . ! CAUTION! !

Safety shoes should be worn when working with counterbalance weights. See the figure Safety Shoes in the Weight Safety section of this documentation for additional information.

! CAUTION! !

Never allow the test head/manipulator to become unbalanced.

Page 8 of 11 Rev. 0736 Ultra System Overview Manipulator

Counterbalance Weights

Pinch Points Finger pinch points exist in several locations on the manipulator. Observe the following precautions: • Never go underneath the test head. • Never put your hands on the manipulator or test head when it is in motion. • Never place tools or other items on the manipulator or test head. • Do not lean equipment or material against manipulator or test head components. • When moving or relocating the manipulator, always wear foot protection and make sure the path is free of obstructions. The manipulator areas identified as potential pinch points have warning labels affixed at each point. Refer to the figure Pinch-Point Warning Labels.

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! CAUTION! !

A finger or hand can be severely injured at any one of these pinch points. Because the manipulator exerts extreme force, the utmost care should be taken to avoid putting hands in the pinch-point areas.

Pinch-Point Warning Labels Twist Caution When the test head is moving vertically, the manipulator has a hard stop that prevents the test head from hitting the floor in either the DUT up or DUT down position. When the test head is near the lowest range of travel, care must be taken to not rotate the test head with the arm set below the indicated level. Rotating the test head when the armset is below the indicated level places the test head into a potential crush hazard condition. Refer to the figure Twist Caution Area.

Page 10 of 11 Rev. 0736 Ultra System Overview Manipulator

Twist Caution Area

Page 11 of 11 Rev. 0736 Ultra System Overview Computer Safety Computer Safety Introduction The following information is included in this section: • Electrical Shock • Electrostatic Discharge ! CAUTION! !

The information in both the General Safety Information and the Computer sections of this documentation should be read and understood before performing service on the test system power distribution unit.

Page 1 of 4 Rev. 0736 Ultra System Overview Computer Safety Electrical Shock

WARNING!

To avoid electrical shock, do not open the power supply. There are no user-serviceable parts inside.

WARNING!

For your safety always connect the equipment to a grounded wall outlet. Always use a power cord with a properly grounded plug, such as the one provided with the equipment, or one in compliance with your national safety standards. This equipment can be disconnected from the power by removing the power cord from the power outlet. This means the equipment must be located close to an easily accessible power outlet.

Multimedia Models

WARNING!

If your system is a multimedia model, or if you have installed a sound card in your system, always turn the volume down before connecting the headphones or speakers. This prevents discomfort from unexpected noise or static.

WARNING!

Listening to loud sounds for prolonged periods of time may permanently damage your hearing. Before putting on headphones, place them around your neck and turn the volume down. When you put on the headphones, slowly increase the volume until you find a comfortable listening level. When you can hear comfortably and clearly, without distortion, leave the volume in that position.

Page 2 of 4 Rev. 0736 Ultra System Overview Computer Safety Removing and Replacing the Cover

WARNING!

For your safety, never remove the system cover without first disconnecting the power cord from the power outlet and removing any connection to a telecommunications network. Always replace the cover before switching the workstation on again.

WARNING!

There is a danger of explosion if the battery is incorrectly installed. For your safety, never attempt to recharge, disassemble, or burn an old battery. Replace the battery with the same or equivalent type, as recommended by the manufacturer. The battery in this workstation is a lithium battery that does not contain any heavy metals. However, to protect the environment, do not dispose of batteries in household waste. Return used batteries either to the shop from which you bought them, to the dealer from whom you purchased your workstation so that they can either be recycled or disposed of in the correct way. Returned batteries will be accepted free of charge.

If you have a modem: Do not attempt to connect this product to the phone line during a lightning storm. Never install telephone jacks in wet locations unless the telephone line has been disconnected at the network interface. Never touch uninsulated telephone wires or terminals unless the telephone line has been disconnected at the network interface. Use caution when installing or modifying telephone lines. Avoid using a telephone (other than a cordless type) during an lightning storm. There may be a risk from lightning. Do not use the telephone to report a gas leak in the vicinity of the leak. Never touch or remove the communications board without first removing the connection to the telephone network.

Page 3 of 4 Rev. 0736 Ultra System Overview Computer Safety Electrostatic Discharge

! CAUTION! !

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded antistatic service mats.

The components of the computer are susceptible to damage from Electrostatic Discharge (ESD). Always minimize electronic charge generation when working with or near the test system computer by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation.

Page 4 of 4 Rev. 0736 Ultra System Overview PDU PDU Introduction The following information is included in this section: • Electrical Shock • Electrostatic Discharge • Movement of Components • Weight • PDU Capacitors • Safety Labels

! CAUTION! !

The information in both the General Safety Information and the Power sections of this documentation should be read and understood before performing service on the test system power distribution unit.

Electrical Shock

WARNING!

The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the PDU. Failure to follow safety precautions can result in severe injury or death.

High voltages may be present in several places in the test system. Refer to the Power section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test system.

Page 1 of 4 Rev. 0736 Ultra System Overview PDU

Even with CB1 in the off position, there is high voltage (200VAC to 480VAC) present at the service side (on the input of CB1) and at the operator side (T3 EMO transformer). An indicator of this is the Power_Available LED. Refer to the figure PDU AC Input Block Diagram. Note On the high capacity PDU, T3 is labeled T2.

PDU P/S (T3) 24VDC EMO Control

On/Off CB1 switch Main Facility Power High Voltage AC Voltage Transformer AC Input

PDU AC Input Block Diagram

The test system is equipped with multiple EMO switches that allow all system power to be shut down quickly in an emergency. Refer to the EMO Switches information in the Switches and Protective Barriers section of this documentation for additional information on the test system EMO switches and system.

Page 2 of 4 Rev. 0736 Ultra System Overview PDU Electrostatic Discharge

!!CAUTION!

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded antistatic service mats to prevent electrostatic discharge.

The components of the PDU are susceptible to damage from Electrostatic Discharge (ESD). Always minimize electronic charge generation when working with or near the test system by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation. Movement of Components Before moving any components in the test system support cabinet, perform the appropriate Lockout/Tagout Procedure as outlined in the Lockout/Tagout section of this documentation, when applicable. Also observe proper Static Prevention practices as outlined in the ESD Damage Prevention and Control Measure section. Refer to the Replacing the Low Capacity PDU information in the Power section of this documentation for specific information on replacing the PDU. Weight The PDU weighs 550 lb (249.5 kg). Any attempt to move the PDU should be done using equipment properly rated for this size of a load. Install the anti-tip fixture to the test head prior to removing the PDU from the support cabinet. Refer to the Anti-Tip Fixture section of this documentation for additional information. Also, Safety Shoes should be worn to prevent severe toe and foot injury if a component or subassembly is dropped.

Page 3 of 4 Rev. 0736 Ultra System Overview PDU PDU Capacitors

WARNING!

Hazardous energy is present from the capacitors inside the PDU. Allow 20 seconds to pass after power is removed before accessing internal PDU components.

The PDU contains a series of capacitors that contains potentially hazardous energy. Two bleeder circuits are in place to drain the hazardous energy from the capacitors. Before accessing internal components in the PDU, always allow 20 seconds to pass. This ensures that the bleeder circuits have removed the hazardous energy from the capacitors. Safety Labels Refer to the Safety Terms, Labels and Symbols section of this documentation for PDU safety labels.

Page 4 of 4 Rev. 0736 Ultra System Overview System Monitor and Controller (SMC) System Monitor and Controller (SMC) Introduction The following information is included in this section: • Electrical Shock • Electrostatic Discharge • Movement of Components • Miscellaneous SMC Safety

!!CAUTION!

The information in both the General Safety Information and the System Monitor and Control Subsystem sections of this documentation should be read and understood before performing service on the test system.

Electrical Shock

WARNING!

The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the SMC. Failure to follow safety precautions can result in severe injury or death.

High voltages may be present in several places in the test system. Refer to the System Monitor and Control Subsystem section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test system. The test system is equipped with multiple EMO switches that allow most of the test system to be shut down quickly in an emergency.

Page 1 of 2 Rev. 0736 Ultra System Overview System Monitor and Controller (SMC)

Refer to the EMO Switches section of this documentation for additional information on the test system EMO switches and system. Electrostatic Discharge

!!CAUTION!

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded anti-static service mats when handling printed circuit boards.

The electrical components on the SMC are susceptible to damage from Electrostatic Damage (ESD). Always minimize electronic charge generation when working on or near the SMC by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation. Movement of Components Before moving any components in the test system support cabinet, perform the appropriate Lockout/Tagout Procedure as outlined in the Lockout/Tagout section of this documentation, when applicable. Also observe proper Static Prevention practices as outlined in the ESD Damage Prevention and Control Measure section. Refer to the System Monitor and Control Subsystem section of this documentation for specific information on replacing the SMC. Miscellaneous SMC Safety A step stool or small ladder that is approximately 21 in (53.34 cm) high is required to safely service the SMC.

Page 2 of 2 Rev. 0736 Ultra System Overview Test Head Test Head Introduction This UltraFLEX test head has the potential for the following hazards: • Mechanical Hazards • Electrical Hazards This section provides information pertaining to these hazards. This topic should be read and understood before operating or servicing the testhead. Mechanical Hazards The following types of mechanical hazards are present in the UltraFLEX test head: • Moving the testhead (watch finger/hands and obstacles when rotating, vertical, and or horizontal swing) • Installing or Removing Test Head Instrument cards (proper lifting, and balance of weight tray) • HFE presence (eye protection) Moving the Test Head When moving the testhead (up/down, swing, twist …): • Check that there are no obstacles that will interfere with the planned movement. • Make sure that there are no objects on the testhead that may fall off. • Keep all body parts away from pinch points. • Never go underneath the test head. • Never put your hands on the manipulator or test head when it is in motion. • Never place tools or other items on the manipulator or test head. • Do not lean equipment or material against manipulator components. Refer to the figure Test Head Motions.

Page 1 of 11 Rev. 0736 Ultra System Overview Test Head

Theta

Tumble

Swing Up/Down

Twist

In/Out

Side-to-Side

Test Head Motions

Moving Instruments When installing or removing test head Instruments follow these safety guidelines: • Make sure Test System Power is off. • Use proper lifting techniques to avoid back injury. • Use ESD protection to prevent ESD damage to instrument cards. • Balance the manipulator weight tray (2 weights for every board). Refer to the Weight safety section of this documentation for additional information.

Page 2 of 11 Rev. 0736 Ultra System Overview Test Head

Refer to the figure Test Head Instruments. Refer to the Test Head section of this documentation for additional information.

Weight Tray in Manipulator

Test Head Instruments

Pressurized HFE HFE-7100 is a chemical (very low toxicity) that is present in the test head cooling system. Although HFE-7100 is not listed as a hazardous material, you should still use caution when working around it. Refer to the figure Cooling System. Page 3 of 11 Rev. 0736 Ultra System Overview Test Head

HFE Coolant Heat Exchanger Return

Distribution Board (2 PLCs)

QD Manifolds

HFE Coolant Supply

HFE Bleed Valves

Cooling System Page 4 of 11 Rev. 0736 Ultra System Overview Test Head

When installing or removing test head cooling system FRUs (i.e., QDs, heat exchanger, distribution board) follow these safety guidelines: • Power down and Lockout/Tagout the test system. • Wear eye protection and appropriate PPE (personal protection equipment). • Depressurize the HFE cooling system loop by connecting a hose to the HFE Bleed Valve on the Supply or Return side of the testhead manifold. • Use common sense to maintain a safe work environment. Electrical Hazards The following types of electrical hazards are present in the UltraFLEX test head: • Opening the test head doors exposes you to 48VDC inside the test head. • High Voltage present at DIB/JIB (use common sense and electrical safety practices) • EMO (Emergency Off) • Test Head Backplane 48VDC Inside Test Head

WARNING!

Never defeat an interlock switch.

All test head instruments are powered by a high current (375amps) 48VDC power source (PDU) in the Support Cabinet. The 48VDC bus bars run vertically in the center of the test head when in the Service position. Refer to the figure Power Connectors and Interlock Switches.

Page 5 of 11 Rev. 0736 Ultra System Overview Test Head

48VDC Power Bus Bars and Connectors

Test Head Door Interlock Switch

Power Connectors and Interlock Switches

Page 6 of 11 Rev. 0736 Ultra System Overview Test Head

Follow these guidelines when working in the test head: • Do not defeat the door interlock switches. Before replacing test head FRUs perform Lockout/Tagout. There are two door interlock switches located on each side of the test head. If either door is opened with Test System Power on, these switches will activate and turn Test System Power off. See the System Monitor and Control Subsystem section of this documentation for additional information. High Voltage Present Some instruments are capable of generating high voltage or current out to the DUT. The DIB safety cover is used to cover the DIB interface. It provides a physical barrier to electrical hazards that can be present when “hand testing” devices. The UltraFLEX test head has the following safety features/requirements that must be met before allowing instruments capable of producing hazardous voltage or hazardous energy to route that voltage or energy to the DUT: 1. A interface board (i.e., DIB) must be latched 2. The test head safety cover must be closed, or, the safety override switch must be enabled. 3. The interface board (i.e., DIB) must be wired to enable the two HV signals The safety override key switch is used to over ride as identified in 2 above (Safety cover must be closed). In the 9 o’clock position, this switch will allow high voltage to be present with the cover off or open, or when production mode testing while attached to a Prober or Handler. Refer to the figure Safety Override Switch. For more information, refer to the DIB 24-Slot Interface and Switches and Protective Barriers safety sections of this documentation.

Page 7 of 11 Rev. 0736 Ultra System Overview Test Head

Safety Override Key Switch

DIB Cover Override (9 o’clock position)

Safe (6 o’clock position)

Safety Override Switch

Page 8 of 11 Rev. 0736 Ultra System Overview Test Head

Emergency Off (EMO)

! CAUTION! !

There will still be live AC power in the EMO loop circuitry, even if the main circuit breaker is OFF.

An emergency off (EMO) button is a safety feature that shuts down all power to the entire test system when activated. Refer to the figure Test Head EMO Button.

Page 9 of 11 Rev. 0736 Ultra System Overview Test Head

Test Head EMO Button

The EMO button should be used in an emergency only when it is safe to do so. Depressing the EMO button will shut down power back to the primary AC circuit breaker. The EMO button will cut off power to the secondary side of CB1 (facility input AC circuit breaker). The EMO buttons will turn off the power to external peripherals only if they are connected correctly to the external Enhanced EMO loop connector. This connector is located on the convenience panel on the service side of the support cabinet.

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Refer to the Switches and Protective Barriers section and the Low Capacity PDU Theory of Operations information in the Power section of this documentation for additional information. Test Head Backplane The UltraFLEX test head backplane has three mechanisms to protect against hazardous voltage. See the 12-Slot Test Head Backplane and Distribution Board safety section of this documentation for additional information.

Page 11 of 11 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board 12-Slot Test Head Backplane and Distribution Board Introduction The UltraFLEX test head backplane has three mechanisms for hazardous voltage protection: • High-voltage connect • High-voltage gate • Shutdown The high-voltage connect, high-voltage gate and shutdown control only the instrument output buffer or DIB connect relay. They are not part of the EMO or the system monitor and control (SMC) subsystem, and do not affect system power. The high-voltage connect and high-voltage gate circuitry are on both the master and slave support boards; at present, only the circuitry on the master support board is used. The following information is included in this section: • Electrical Shock • Electrostatic Discharge • Hazardous Voltage Protection: High-Voltage Connect • Hazardous Voltage Protection: High-Voltage Gate • Hazardous Voltage Protection Shutdown

!!CAUTION!

The information in both the General Safety Information and the Test Head 12-Slot Theory of Operation sections of this documentation should be read and understood before performing service on the test head.

Page 1 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board Electrical Shock

WARNING!

The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the test head. Failure to follow safety precautions can result in severe injury or death.

WARNING!

The PDU is capable of producing potentially lethal voltages. Refer to the PDU Safety section of this documentation for additional information. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the test head. Failure to follow safety precautions can result in severe injury or death. Refer to the PDU Safety section of this documentation for additional information.

WARNING!

Operators and service personnel should be aware of the additional electrical risks during servicing and troubleshooting test head instrument cards with hazardous voltage (>60Vdc) and/or hazardous energy (>240VA) outputs.

Page 2 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board

High voltages may be present in several places in the test head. Refer to the Test Head Backplane and Distribution Board section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test head. Depending on the system options and test programs used, hazardous voltages may be present at the DIB during testing. The test system is equipped with multiple EMO switches that allow all system power except the SMC/EMO circuit in the test head to be shut down quickly in an emergency. Refer to the EMO Switches section of this documentation for additional information on the test system EMO switches and system. Electrostatic Discharge

! CAUTION! !

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded anti-static service mats when handling printed circuit board.

The components and circuit boards in the test head are susceptible to damage from Electrostatic Discharge (ESD). Always minimize electronic charge generation when working with or near the test head by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation.

Page 3 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board Hazardous Voltage Protection: High-Voltage Connect A mechanical DIB-mounted switch (or jumper), activated by the user, grounds safety wire HV_CONNECT_N. The HV_CON_DIB_N wire is routed from the DIB to the master support board, where it becomes HV_CON_LN2. After the latch control electronics verifies that all safety requirements are met, the signal is routed back to the master support board as HV_CON_LN1. The signal leaves the support board as HV_CONNECT_N, which is bused through the backplane and the 885-829-02 cable on the 24-slot tester or the 885-829-05 cable on the 36-slot tester to all instrument slots. The HV_CONNECT_N wire prevents the output of the instrument from being connected to the DIB, unless the HV_CONNECT_N wire is grounded. Any instrument board must monitor the HV_CONNECT_N wire if it can source, in a fault or no-fault condition, voltages or power greater than the following values: • ±60 VDC relative to system ground • 42.4V peak or 30V RMS • 240 VA of continuous power at greater than 2V potential It is expected that the user will activate their user switch (either manually or through an interlock) only when the DIB region is in an operator-safe condition. The CPU can monitor the HV_CONNECT_N status by reading the HV_CON_RDB_N signal from the support board ASIC/FPGA. Refer to the figure High-Voltage Connect.

Page 4 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board

LCL Electronics

HV_CON_LN1 HV_CON_LN2 DIB Optical I/O Isolator

Jumper required only on master support board's HV_CON_DIB_N Master Support Board Master Backplane I/O. High HV_CONNECT_N (0 = OK to Connect to DIB) To/From All Slots Voltage Connect Circuitry To/From Slave Backplane via the 885-829-02/05 Cable

High HV_GATE_N Voltage (0 = OK to Enable) To/From All Slots Gate Circuitry To/From Slave Backplane via the 885-829-02/05 Cable DIB I/O HV_GATE_N HV_GATE_FRC_EN_P (for Checkers) (for Jumper required FPGA only on master support board's HV_CON_RDB_N I/O. HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots (0 = Shutdown) SHUTDOWN_RCV_N

SHUTDOWN_XMT_N To/From Slave Backplane DIB via the 885-829-02/05 Cable

High-Voltage Connect

Page 5 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board Hazardous Voltage Protection: High-Voltage Gate A mechanical DIB-mounted switch (or jumper), activated by the user, grounds safety wire HV_GATE_N. The HV_GATE_N wire is bused through the backplane (via the pogo pins and support board) and the 885-829-02 cable on the 24-slot tester or the 885-829-05 cable on the 36-slot tester to all instrument slots. The HV_GATE_N wire prevents the instrument’s output from turning on internally, unless the HV_GATE_N wire is grounded. Any instrument board must monitor the HV_GATE_N wire if it can source, in a fault or no-fault condition, voltages or power greater than the following values: • ±60 VDC relative to system ground • 42.4V peak or 30V RMS • 240 VA of continuous power at greater than 2V potential The expectation is that the user can activate their user switch (either manually or through an interlock) only when the DIB region is in an operator-safe condition. The CPU can monitor the HV_GATE_N status by reading the HV_GATE_RDB_N signal from the support board ASIC/FPGA. The CPU can also ground the HV_GATE_N signal (for maintenance program use) through the use of the HV_GATE_FRC_EN_P signal and a relay connected to ground. Refer to the figure High-Voltage Gate Circuit.

Page 6 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board

LCL Electronics

HV_CON_LN1 HV_CON_LN2 DIB Optical I/O Isolator

Jumper required only on master support board's HV_CON_DIB_N Master Support Board Master Backplane I/O. High HV_CONNECT_N (0 = OK to Connect to DIB) To/From All Slots Voltage Connect Circuitry To/From Slave Backplane via the 885-829-02/05 Cable

High HV_GATE_N Voltage (0 = OK to Enable) To/From All Slots Gate Circuitry To/From Slave Backplane via the 885-829-02/05 Cable DIB I/O HV_GATE_N HV_GATE_FRC_EN_P (for Checkers) (for Jumper required FPGA only on master support board's HV_CON_RDB_N I/O. HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots (0 = Shutdown) SHUTDOWN_RCV_N

SHUTDOWN_XMT_N To/From Slave Backplane DIB via the 885-829-02/05 Cable

High-Voltage Gate Circuit

Page 7 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board Hazardous Voltage Protection Shutdown The shutdown wire, signal name SHD_N, provides a mechanism that an instrument can use to shut off itself and other instruments. Any board that can be damaged by excess terminal voltage, current, or internal temperature should both monitor and drive the shutdown wire. If a board senses a self-hazardous condition, it must shut itself down and ground the shutdown wire. If a board senses a ground condition on the shutdown wire, generated from another instrument, it should also shut itself down. The designer chooses the shutdown conditions or whether an instrument can use the shutdown wire. The instrument is required to capture a shutdown condition with a latch. After the shutdown condition is latched, it can be broadcasted as the SHD_N signal on the backplane. Resources requiring adherence to the shutdown protocol are: • Utility supplies • Utility bits • Any test head instrument that requires the additional protection that the shutdown protocol provides • Any test head instrument that can generate power levels that can adversely affect other instruments Refer to the figure Hazardous Voltage Protection Shutdown Circuit.

Page 8 of 9 Rev. 0736 Ultra System Overview 12-Slot Test Head Backplane and Distribution Board

LCL Electronics

HV_CON_LN1 HV_CON_LN2 DIB Optical I/O Isolator

Jumper required only on master support board's HV_CON_DIB_N Master Support Board Master Backplane I/O. High HV_CONNECT_N (0 = OK to Connect to DIB) To/From All Slots Voltage Connect Circuitry To/From Slave Backplane via the 885-829-02/05 Cable

High HV_GATE_N Voltage (0 = OK to Enable) To/From All Slots Gate Circuitry To/From Slave Backplane via the 885-829-02/05 Cable DIB I/O HV_GATE_N HV_GATE_FRC_EN_P (for Checkers) (for Jumper required FPGA only on master support board's HV_CON_RDB_N I/O. HV_GATE_RDB_N

HV_GATE_FRC_EN_P SHD_N To/From All Slots (0 = Shutdown) SHUTDOWN_RCV_N

SHUTDOWN_XMT_N To/From Slave Backplane DIB via the 885-829-02/05 Cable

Hazardous Voltage Protection Shutdown Circuit

Page 9 of 9 Rev. 0736 Ultra System Overview Pneumatics Pneumatics Introduction The UltraFLEX pneumatic system contains and controls air pressurized to a volume as high as 100 psi. The control voltages to the pneumatic system electrical components uses 24 VDC signals of less than 100mA which is not considered high voltage. The figure Pneumatics System shows a drawing of the test system pneumatics. See the Pneumatics section of this documentation for specific information about the test system pneumatics.

! CAUTION! !

The information in both the General Safety Information and the Pneumatics sections of this documentation should be read and understood before performing service on the pneumatics system.

WARNING!

The test system pneumatics present potential hazards. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the pneumatics system. Failure to follow safety precautions can result in severe injury or death.

Page 1 of 2 Rev. 0736 Ultra System Overview Pneumatics

Lock Control

IPD and OPD

Pressure Regulator Assembly Test Head

Support or Expansion Cabinet Manipulator

Facility Pressurized Air Regulated Pressurized Air

Pneumatics System

Page 2 of 2 Rev. 0736 Ultra System Overview Instruments Instruments Introduction The test system instruments are grouped to highlight potentially hazardous instruments as follows: • Instruments with Hazardous Voltage • DC-75 Board • DC-90 Board • HDVS instrument board • Instruments with Hazardous Energy •HexVS •VSM • Instruments Considered Low Voltage/Non-Hazardous • DC-30 Board •BBAC •HSD-M • GigaDig • Microwave • VHFAC Board •GPIO • System Reference Clock (SRC) •PMO • Turbo AC Also refer to the Miscellaneous Instrument Safety and the General Safety Information sections of this documentation for general test head board safety information.

! CAUTION! !

The information in both the General Safety Information and the specific instrument sections of this documentation should be read and understood before performing service on the test system.

Page 1 of 10 Rev. 0736 Ultra System Overview Instruments Electrical Shock

WARNING!

The test system instruments are capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the test system. Failure to follow safety precautions can result in severe injury or death.

High voltages may be present in several places in the test system. Refer to the specific instrument section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test system. The test system is equipped with multiple EMO switches that allow all system power except the SMC/EMO circuit in the test head to be shut down quickly in an emergency. Refer to the EMO Switches information in the Switches and Protective Barriers section of this documentation for additional information on the test system EMO switches and system.

Page 2 of 10 Rev. 0736 Ultra System Overview Instruments Instruments with Hazardous Voltage

WARNING!

Potential Shock Hazard. If the device interface board (DIB) is not being removed from the test head when the test head and mating enclosure of the sorter, handler, prober or other material transport equipment are being separated, the following precautions should be observed: Properly shut down the test application program before separating the test head from the mating equipment. Once the test head has been separated and turned to the DIB up position, replace the DIB safety cover and turn the key switch to the Safe position. Refer to the figures DIB Safety Cover and Override Switches in the DIB 24-Slot Interface Safety section of this documentation.

These are instruments which use, generate or accept a hazardous voltage defined as a voltage between two terminals or between one terminal and ground exceeding 60Vdc. The hazardous voltage instruments are typically component certified by an independent qualified testing laboratory recognized in the USA and Europe for such evaluations. For most docking applications, the interface board must be unlatched prior to separating the mating equipment from the test head. Teradyne provides an interlock which senses the presence of the interface board on the test head, and de-energizes the hazardous voltage when the board is unlatched. Once separated the interface board will usually remain with the peripheral. For certain docking applications, where the interface board remains on the test head after separating the mating equipment from the test head, a potential shock hazard exists if the test application program is not properly shut down prior to undocking. If performing hand socket testing, always install the DIB Safety Cover, verify that the cover is properly closed and that the Safety Key switch is switched to the Safe position.

Page 3 of 10 Rev. 0736 Ultra System Overview Instruments

The following cards are categorized as instruments which may have potentially hazardous voltage: • DC-75 Board • DC-90 Board Instruments with Hazardous Energy

WARNING!

Potential Energy Hazard. If the device interface board (DIB) is not being removed from the test head when the test head and mating enclosure of the sorter, handler, prober or other material transport equipment are being separated, the following precautions should be observed: Properly shut down the test application program before separating the test head from the mating equipment. Once the test head has been separated and turned to the DIB up position, replace the DIB safety cover and turn the key switch to the Safety position. Refer to the figures DIB Safety Cover and Override Switches in the DIB 24-Slot Interface Safety section of this documentation.

These are instruments which use, generate or accept high currents such that the there is an energy hazard defined as available energy between two terminals or between one terminal and ground exceeding 240VA. The hazardous energy instruments are typically component certified by an independent qualified testing laboratory recognized in the USA and Europe for such evaluations. For most docking applications, the interface board must be unlatched prior to separating the mating equipment from the test head. Teradyne provides an interlock which senses the presence of the interface board on the test head, and de-energizes the hazardous energy when the board is unlatched. Once separated the interface board will usually remain with the peripheral. For certain docking applications, where the interface board remains on the test head after separating the mating equipment from the test head, a potential shock hazard exists if the test application program is not properly shut down prior to undocking. If performing hand socket testing, always install the DIB Safety Cover, verify that the cover is properly closed and that the Safety Key switch is switched to the Safe position. The following cards are categorized as instruments which may have potentially hazardous energy: Page 4 of 10 Rev. 0736 Ultra System Overview Instruments

• HexVS Board • VSM Instruments Considered Low Voltage/Non-Hazardous These are instruments which do NOT use, generate or accept more than 60Vdc or 240VA. Their outputs are defined as low voltage/non-hazardous. They should not be energized while accessible to protect the instrument against damage. The following cards are categorized as instruments which are considered low voltage/non-hazardous: • DC-30 Board • BBAC • HSD-M • GigaDig • Microwave • VHFAC Board •GPIO • System Reference Clock (SRC) •PMO • Turbo AC General Instrument Safety Generally all test head instrument boards use common safety procedures and standards. These include: • Electrostatic Discharge • Measurement Categories • Instrument Replacement

Page 5 of 10 Rev. 0736 Ultra System Overview Instruments Electrostatic Discharge

!!CAUTION!

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded anti-static service mats when handling printed circuit boards.

All of the boards are susceptible to damage from Electrostatic Discharge (ESD). Always minimize electronic charge generation by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation. Measurement Categories ALL Teradyne measuring terminals are classified as Measurement Category I. Refer to IEC61010-1 for more information on Measurement Categories. Measurement Category IV is for measurements performed at the source of the building electrical system. Measurement Category III is for measurements performed in the building electrical system. Measurement Category II is for measurements performed directly on mains connected circuits. Measurement Category I is for measurements performed on secondary circuits/devices not directly connected to the mains. It is important to understand that Measurement Category II, III and IV are designed to withstand transient voltages typically found in primary and building power systems. Teradyne equipment is not designed for and not intended for making measurements in primary and building power applications. All measurement applications should always be measurement category I, including those instrumentations cards rated for use in secondary circuits with high voltage (more than 60Vdc) and/or secondary circuits with hazardous energy (exceeding 240VA).

Page 6 of 10 Rev. 0736 Ultra System Overview Instruments

Regardless of the voltage or current rating, Teradyne measuring terminals always MC: I and should never be connected directly to the source of the building electrical system (MC: IV), the building electrical system (MC: III) or directly on mains connected circuits/devices (MC: II). Instrument Replacement All UltraFLEX instruments should be replaced using the instructions outlined in the Test Head section of this documentation. Miscellaneous Instrument Safety The following instruments have special safety concerns: • HDVS • VSM • DC-30/DC-90 • DC-75 • HSD-M • GigaDig HDVS The installed HDVS instrument board represents an electrical hazard to operators and equipment. Each HDVS can supply up to a maximum of 1A, however when merging a maximum of 4 DPS channels, the HDVS can supply up to a maximum of 4A. The HDVS instrument: • Weighs approximately 28 lb. • Contains delicate state-of-the-art integrated circuits. • Has exposed interface contacts (JIBs).

Page 7 of 10 Rev. 0736 Ultra System Overview Instruments

Observe the following additional safety precautions when using the HDVS instrument: 1. Keep the HDVS high-current areas clear of any items that might alter their contacts. They must be clean and free of liquid or other conductors. Resistance from poor electrical contact may also result from physical damage, wear or operation. 2. ) Inspect the high-current areas frequently and repair any unsafe DIBs before use. Affix a DANGER ELECTRICAL HAZARD warning label to any DIB that uses the HDVS instrument, including customer-designed DIBs. Refer to the Definition of Labels section of this documentation for an example of the label. 3. Make sure that DIBs using the HDVS instrument have a protective cover with recessed or protected probe points, if present, to prevent operators from inadvertently touching the high-current components, or dropping conductive tools or equipment on them. Have an emergency response plan that all operators are familiar with. If an emergency occurs, immediately stop testing, get medical help if needed, and report the emergency to proper site personnel. Do not touch the test head. Items may be burning, hot or still electrically charged. If you detect smoldering, sparks, component burning, melting, or other severe failure, power down the test system immediately by pressing an EMO button. Do not touch any of the damaged parts, because they may still be very hot. VSM The installed VSM board represents an electrical hazard to operators and equipment. Each voltage sources on each VSM can supply up to 162W (a value that can be obtained through various current and voltage combinations such as 81A at 2V). Ganging the two voltage sources on each VSM can supply up to 324W (for example, two sources programed to162A at 2V). You can gang up to three VSM boards for a total of up to 972 W (for example 2 sources per board programed to162A at 2V times 3 boards). The VSM is powered by +48V with a maximum of 4V distributed to the test head terminals. The VSM instrument: • Weighs approximately 26 lb • Contains delicate state-of-the-art integrated circuits • Has exposed interface contacts (JIBs) • Observe the following additional safety precautions when using the VSM: • Keep the VSM high-current areas clear of any items that might alter their contacts. They must be clean and free of liquid or other conductors. Resistance from poor electrical contact may also result from physical damage, wear, or operation. • Inspect the high-current area frequently, and repair unsafe DIBs before use.

Page 8 of 10 Rev. 0736 Ultra System Overview Instruments

• Affix a DANGER ELECTRICAL HAZARD warning label to any DIB that uses the VSM instrument, including customer-designed DIBs. Refer to the Safety Terms, Labels and Symbols section of this documentation for an example of the label. • Make sure that DIBs using the VSM option have a protective cover with recessed or protected probe points, if present, to prevent operators from inadvertently touching the high-current components or dropping conductive tools or equipment on them. • Have an emergency response plan that all operators are familiar with. If an emergency occurs, immediately stop testing, get medical help if needed, and report the emergency to proper site personnel. Do not touch the test head, because items may be burning, hot, or still electrically charged. • If you detect smoldering, sparks, component burning or melting, or other severe failure, power down the test system immediately by pressing an EMO button. Do not touch any of the damaged parts, because they may still be very hot. DC-30/DC-90 • The DC-30/DC-90 instrument: • Weighs approximately 16 lb • Contains delicate state-of-the-art integrated circuits • Has exposed interface contacts (JIBs) DC-75 The installed DC-75 board represents an electrical hazard to operators and equipment. Each voltage supply on each DC-75 can reach a hazardous voltage and Potential Shock Hazard The DC-75 instrument: • Weighs approximately 17 lb • Contains delicate state-of-the-art integrated circuits • Has exposed interface contacts (JIBs) • Observe the following additional safety precautions when using the VSM: • Keep the DC-75 DIB areas clear of any items that might alter their contacts. They must be clean and free of liquid or other conductors. • Inspect the DIB area frequently, and repair unsafe DIBs before use. • Affix a DANGER ELECTRICAL HAZARD warning label to any DIB that uses the DC-75 instrument, including customer-designed DIBs. Refer to the Safety Terms, Labels and Symbols section of this documentation for an example of the label.

Page 9 of 10 Rev. 0736 Ultra System Overview Instruments

• Make sure that DIBs using the DC-75 option have a protective cover with recessed or protected probe points, if present, to prevent operators from inadvertently touching the high-voltage components or dropping conductive tools or equipment on them. • Have an emergency response plan that all operators are familiar with. If an emergency occurs, immediately stop testing, get medical help if needed, and report the emergency to proper site personnel. Do not touch the test head, because items may be burning, hot, or still electrically charged. • If you detect smoldering, sparks, component burning or melting, or other severe failure, power down the test system immediately by pressing an EMO button. Do not touch any of the damaged parts, because they may still be very hot. HSD-M Due to its size and weight (28 lb or 12.7 kg), the HSD-M instrument card is difficult to maneuver. Use proper lifting and handling processes when moving the board in or out of its shipping box and test head slot. Failure to follow proper lifting and handling processes may result in personal injury. The HSD-M instrument card has many solder-side components that can easily be damaged by contact. Use proper lifting and handling processes, and avoid component contact when handling the board. GigaDig The GigaDig instrument: • Weighs approximately 16 lb • Contains delicate state-of-the-art integrated circuits • Has exposed interface contacts (JIBs)

Page 10 of 10 Rev. 0736 Ultra System Overview Nitrogen Purge Option Safety Nitrogen Purge Option Safety Introduction The UltraFLEX Nitrogen Purge Option is used to prevent the build-up of condensation or moisture on the under surface of the interface board during low-temperature device testing. A dry nitrogen or dry air source is connected to a fitting on the test head pendant panel. The nitrogen/air is delivered to the bottom of the interface board using tubing and a purge bracket that is assembled to the test head. See the Nitrogen Purge Option section of this documentation for additional information.

!!CAUTION!

The information in both the General Safety Information and the Nitrogen Purge Option sections of this documentation should be read and understood before installing or performing service on the option.

WARNING!

The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before installing or servicing the option. Failure to follow safety precautions can result in severe injury or death.

WARNING!

Even with CB1 in the OFF position, there is still power present at the interface assembly. See the PDU Safety section of this documentation for additional information.

Page 1 of 2 Rev. 0736 Ultra System Overview Nitrogen Purge Option Safety

! CAUTION! !

Secure the facility nitrogen or air source according to the facility procedures before installing or servicing the option.

Note There is no need to bleed-off pressure in the option before servicing. This will happen automatically once the facility source has been secured.

Page 2 of 2 Rev. 0736 Ultra System Overview System Reference Clock (SRC) System Reference Clock (SRC) Introduction The following information is included in this section: • Electrical Shock • Electrostatic Discharge • Movement of Components • Miscellaneous SRC Safety

!!CAUTION!

The information in both the General Safety Information and the Reference Clock sections of this documentation should be read and understood before performing service on the test system.

Electrical Shock

WARNING!

The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the SRC. Failure to follow safety precautions can result in severe injury or death.

High voltages may be present in several places in the test system. Refer to the Reference Clock section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test system. The test system is equipped with multiple EMO switches that allow most of the test system to be shut down quickly in an emergency.

Page 1 of 2 Rev. 0736 Ultra System Overview System Reference Clock (SRC)

Refer to the EMO Switches section of this documentation for additional information on the test system EMO switches and system. Electrostatic Discharge

!!CAUTION!

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded anti-static service mats when handling printed circuit boards.

The electrical components on the SRC are susceptible to damage from Electrostatic Damage (ESD). Always minimize electronic charge generation when working on or near the SRC by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation. Movement of Components Before moving any components in the test system support cabinet, perform the appropriate Lockout/Tagout Procedure as outlined in the Lockout/Tagout section of this documentation, when applicable. Also observe proper Static Prevention practices as outlined in the ESD Damage Prevention and Control Measure section. Refer to the Replacing Reference Clock FRUs information in the Reference Clock section of this documentation for specific information on replacing the SRC. Miscellaneous SRC Safety A step stool or small ladder that is approximately 21 in (53.34 cm) high is required to safely service the SRC.

Page 2 of 2 Rev. 0736 Ultra System Overview Support Board Support Board Introduction The following information is included in this section: • Electrical Shock • Electrostatic Discharge • Movement of Components • Miscellaneous Support Board Safety • Support Board Replacement

!!CAUTION!

The information in both the General Safety Information and the Support Board sections of this documentation should be read and understood before performing service on the test system.

Electrical Shock

WARNING!

The test system is capable of producing potentially lethal voltages. The test system should be shut off and the appropriate Lockout/Tagout Procedure performed as outlined in the Lockout/Tagout section of this documentation before servicing the support board. Failure to follow safety precautions can result in severe injury or death.

High voltages may be present in several places in the test system. Refer to the Support Board section of this documentation for additional Warnings and Cautions. Also, check for labels and symbols on and in the test system. The test system is equipped with multiple EMO switches that allow most of the test system to be shut down quickly in an emergency.

Page 1 of 3 Rev. 0736 Ultra System Overview Support Board

Refer to the EMO Switches section of this documentation for additional information on the test system EMO switches and system. Electrostatic Discharge

!!CAUTION!

To prevent electrostatic discharge, always wear a tested-grounded wrist strap and use grounded anti-static service mats when handling printed circuit boards.

The electrical components on the support board are susceptible to damage from Electrostatic Damage (ESD). Always minimize electronic charge generation when working on or near the support board by using the following techniques: • Wear a tested-grounded wrist strap. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • Use static-conductive floor mats and grounded anti-static service mats. • Move, handle and store electronic parts and assemblies in proper anti-static containers. See the figure ESD Equipment in the ESD Damage Prevention and Control Measure section of this documentation for additional information. • For further information, refer to the ESD Damage Prevention and Control Measure section of this documentation. Movement of Components Observe proper practices as outlined in the ESD Damage Prevention and Control Measure section. Refer to the Support Board section of this documentation for specific information on replacing the Support Board. Miscellaneous Support Board Safety There are two areas of concern in regards to safety and the support board. These are: • personnel safety (preventing personal injury) • board safety (preventing component damage) Personal Safety: Due to its size and weight (~26 lbs or 11.8 Kg), the support board card is awkward to maneuver. Use proper lifting and handling processes when moving these boards in/out of shipping boxes and testhead slots. Failure to follow proper lifting and handling processes may result in personal injury.

Page 2 of 3 Rev. 0736 Ultra System Overview Support Board

Board Safety: The support board has many components that can easily be damaged from contact. Use proper lifting and handling processes, and avoid component contact when handling these boards. Do not carry the support board as shown here. There are solder-side components that will rub against the smock which will result in damaged components. Also, your hand has body oil that will contaminate the traces and pads on the board. Support Board Replacement Replace the support board using the instructions outlined in the Support Board section of this documentation.

Page 3 of 3 Rev. 0736 Ultra System Overview Overview Maintenance Software Overview IG-XL Maintenance IG-XL Maintenance, also referred to as maintenance software or maintenance user interface (MUI), is a software program that has three integrated functions: (1) checks the functionality of the hardware by using diagnostics; (2) calibrates the instruments; and (3) checks the system monitor/control (SMC) status.

Systems are shipped with the IG-XL Maintenance maintenance software installed on the computer. If the maintenance software must be reinstalled for any reason, refer to the ReadMe.doc file in the root directory of the IG-XL CD. Note Allow the electronics to warm up for 30 minutes before initiating calibration and/or checkers. VHFAC, DC-30, DC-75, BBAC, TurboAC, AWG, GigaDig, HexVS, and Microwave electronics must warm up with test system power on and an instance of IG-XL (MUI, New Test Program, and so on) up and running for a minimum of 30 minutes prior to running calibration and/or checkers. Some instruments require initialization for the clocks to start. Some components may not warm up unless started.

Page 1 of 8 Rev. 0736