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Shallow trench isolation
(12) United States Patent (10) Patent No.: US 6,737,723 B2 Farrar (45) Date of Patent: *May 18, 2004
Introduction to Microelectronic Fabrication
Characterization and Modeling of Polysilicon MEMS Chemical-Mechanical Polishing by Brian D
2003Nnunreura.Pdf
Chapter 1 Process Integration
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