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Contact lithography
Materials and Anti-Adhesive Issues in UV-NIL Achille Francone
Pattern-Integrated Interference Lithography
Photolithography (Source: Wikipedia)
Artificial Evolution for the Optimization of Lithographic Process Conditions Künstliche Evolution Für Die Optimierung Von Lithographischen Prozessbedingungen
UV-LED Projection Photolithography for High-Resolution Functional
Nanolithography Using High Transmission Nanoscale Bowtie
Plasmonic Waveguide Lithography for Patterning Nanostructures with High Aspect-Ratio and Large-Area Uniformity
Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication
And Multi-Layer Silver Superlenses
Printing Meets Lithography
Sub-10 Nm Feature Chromium Photomasks for Contact Lithography
Resolution Enhancement Using Plasmonic Metamask for Wafer
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