Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 ()

SECTION 1: Identification of the substance/mixture and of the company/undertaking

Product identifier Material Name CASCADE Chemical Family inorganic, salt Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Emergency Telephone Number: Chemtrec Local in Country (Tel Aviv) (972)-37630639 Chemtrec International 1-703-527-3887 E-mail: [email protected]

SECTION 2: Ingredients

CAS Component Name Percent

Proprietary Metal chloride 100 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 3: Hazard Identification

GHS Classification Acute Toxicity - Oral - Category 4 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system ) Hazardous to the Aquatic Environment - Acute - Category 2 Label elements Hazard symbols

Signal word ______Page 1 of 10 Issue date: 2018-09-21 Revision 1.1 Print date: 2018-09-21

Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Danger Hazard statements H302 Harmful if swallowed. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. H401 Toxic to aquatic life. Precautionary statements Prevention P260 Do not breathe dust. P280 Wear protective gloves/protective clothing/eye protection/face protection. P264 Wash thoroughly after handling. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. P273 Avoid release to the environment. Response P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P321 Specific treatment (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification Reacts violently with water. Combustible Dust: May form combustible dust concentrations in air.

SECTION 4: First aid measures

Description of Necessary Measures Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Symptoms: Immediate ______Page 2 of 10 Issue date: 2018-09-21 Revision 1.1 Print date: 2018-09-21

Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Harmful if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Symptoms: Delayed No information on significant adverse effects. Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis. Indication of any immediate medical attention and special treatment needed Treat symptomatically and supportively.

SECTION 5: Firefighting measures

Suitable extinguishing media regular dry chemical, carbon dioxide. Large fires: Flood with water. Apply water from a protected location or from a safe distance. Unsuitable Extinguishing Media water Specific hazards arising from the chemical Negligible fire hazard. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Do not get water inside container. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. Do not scatter spilled material with high-pressure water streams. Stay away from the ends of tanks. Use extinguishing agents appropriate for surrounding fire. Do not get water directly on material. Large fires: Flood with fine water spray. Reduce vapors with water spray. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Hazardous Combustion Products hydrogen chloride, oxides of zirconium. Water or Moisture: hydrogen chloride, oxides of zirconium

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods for Containment Fully encapsulating, vapor protective clothing should be worn for spills and leaks with no fire. Do not touch spilled material. Stop leak if possible without personal risk. Reduce vapors with water spray. Do not get water directly on material. Do not get water inside container. Do not direct water at spill or source of leak. If sweeping of a contaminated area is necessary, use a dust suppressant agent. Avoid contact with combustible materials. Only personnel trained for the hazards of this material should perform clean up and disposal. Dike for later disposal. Keep unnecessary people away, isolate hazard area and deny entry. Ventilate closed spaces before entering. Collect spill using a vacuum cleaner with a HEPA filter or wet and scoop up dry spills. Avoid sweeping spilled dry material. Eliminate ignition sources including sources of electrical, static or frictional sparks.

SECTION 7: Handling and storage ______Page 3 of 10 Issue date: 2018-09-21 Revision 1.1 Print date: 2018-09-21

Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Precautions for safe handling Do not breathe dust. Wear protective gloves/clothing and eye/face protection. Wash thoroughly after handling. Do not eat, drink, or smoke when using this product. Use only outdoors or in a well-ventilated area. Avoid significant deposits of material, especially on horizontal surfaces, which may become airborne and form combustible dust clouds and may contribute to secondary explosions. Use methods to minimize dust. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Store in a cool, dry place. Avoid contact with water or moisture. Keep separated from incompatible substances. Incompatible Materials bases, combustible materials, lithium, metals, water

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits Metal chloride Proprietary

ACGIH: 5 mg/m3 TWA as Zr (related to Zirconium compounds)

10 mg/m3 STEL as Zr (related to Zirconium compounds)

5 mg/m3 TWA (except Zirconium tetrachloride ) as Zr (related to Zirconium NIOSH: compounds)

10 mg/m3 STEL (except Zirconium tetrachloride ) as Zr (related to Zirconium compounds)

OSHA (US): 5 mg/m3 TWA as Zr (related to Zirconium compounds)

OSHA 5 mg/m3 TWA as Zr (related to Zirconium compounds) (Vacated):

10 mg/m3 STEL as Zr (related to Zirconium compounds)

Israel: 5 mg/m3 TWA as Zr (related to Zirconium compounds)

10 mg/m3 STEL as Zr (related to Zirconium compounds) Biological limit value There are no biological limit values for any of this product's components. IDLH 50 mg/m3 Appropriate engineering controls Provide local exhaust or process enclosure ventilation system. Ensure that dust-handling systems (such as exhaust ducts, dust collectors, vessels, and processing equipment) are designed in a manner to prevent the escape of dust into the work area (i.e., there is no leakage from the equipment). Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT ______Page 4 of 10 Issue date: 2018-09-21 Revision 1.1 Print date: 2018-09-21

Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Respiratory Protection The following respirators and maximum use concentrations are drawn from NIOSH and/or OSHA. Measurement Element: Zirconium (Zr) 25 mg/m3 Any quarter-mask respirator. 50 mg/m3 Any particulate respirator equipped with an N95, R95, or P95 filter (including N95, R95, and P95 filtering facepieces) except quarter-mask respirators. The following filters may also be used: N99, R99, P99, N100, R100 or P100. Any air-purifying respirator with a high-efficiency particulate filter. Any air-purifying, full-facepiece respirator equipped with an R100 or P100 filter. Any supplied-air respirator. Any self-contained breathing apparatus with a full facepiece. Emergency or planned entry into unknown concentrations or IDLH conditions - Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. Any supplied-air respirator with a full facepiece that is operated in a pressure- demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Escape - Any air-purifying, full-facepiece respirator equipped with an R100 or P100 filter. Any appropriate escape-type, self-contained breathing apparatus. Hand protection Wear appropriate chemical resistant gloves. Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin and Body Protection Wear appropriate chemical resistant clothing.

SECTION 9: Physical and chemical properties

Appearance lustrous solid Physical State solid

colorless to Odor irritating odor Color white Odor Threshold Not available pH (Acidic ) (Not applicable Melting Point Not available Boiling Point ) Boiling Point Range Not available Freezing point Not available Evaporation Rate Not available Flammability (solid, gas) Not flammable Autoignition (Not flammable Not available Flash Point Temperature )

Lower Explosive Decomposition Not available Not available Limit temperature Upper Explosive 1 mmHg @ 190 Not available Vapor Pressure Limit °C Vapor Density (Not applicable ) Specific Gravity (water=1) Not available (air=1) (Decomposes, Partition coefficient: n- Water Solubility Not available Reacts ) octanol/water

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Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Viscosity Not available Kinematic viscosity Not available Solubility (Other) Not available Change in color hygroscopic Density 2.803 g/cc Physical Form fuming solid Sublimation 331 °C Molecular Formula Proprietary Molecular Weight Proprietary triple point 437 °C Solvent Solubility Soluble alcohol, ether, concentrated hydrochloric acid

SECTION 10: Stability and reactivity

Reactivity Reacts violently with water. Releases toxic and/or corrosive gases. Chemical stability Reacts violently with water. Releases toxic and/or corrosive gases. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid accumulation of airborne dusts. Avoid contact with combustible materials. Keep dry. Dangerous gases may accumulate in confined spaces. Keep out of water supplies and sewers. Materials to Avoid (Incompatibilities) bases, combustible materials, lithium, metals, water Hazardous decomposition products Thermal decomposition products hydrogen chloride, oxides of zirconium Water or Moisture hydrogen chloride, oxides of zirconium

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation burns Skin skin burns Eye eye burns Ingestion Harmful if swallowed, burns Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: Metal chloride (Proprietary) Oral LD50 Rat 1688 mg/kg Acute Toxicity Estimate Oral 1688 mg/kg

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Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Immediate Effects Harmful if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed Effects No information on significant adverse effects. Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization No data available. Component Carcinogenicity Metal chloride Proprietary

ACGIH: A4 - Not Classifiable as a Human Carcinogen (related to Zirconium compounds) Mutagenic Data No data available. Reproductive Effects Data No data available. Tumorigenic Data No data available. Specific Target Organ Toxicity - Single Exposure Respiratory system Specific Target Organ Toxicity - Repeated Exposure No target organs identified Aspiration hazard No data available. Medical Conditions Aggravated by Exposure No data available.

SECTION 12: Ecological information

Ecotoxicity Toxic to aquatic life. Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Algal Toxicity 2.6 mg/L 96 hours EC50 Selenastrum capricornutum (Green algae) Mobility in soil No data available. Abiotic degradation Instantly hydrolyzes in water to zirconium oxide dichloride octahydrate and hydrogen chloride. Persistence and Degradability No data available. Bioaccumulative potential No data available. Other adverse effects No data available

SECTION 13: Disposal considerations

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Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Disposal Methods Dispose in accordance with all applicable regulations. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: Shipping Name: ZIRCONIUM TETRACHLORIDE Hazard Class: 8 UN#: UN2503 Packing Group: III Required Label(s): 8

ICAO Information: Shipping Name: ZIRCONIUM TETRACHLORIDE Hazard Class: 8 UN#: UN2503 Packing Group: III Required Label(s): 8

IMDG Information: Shipping Name: ZIRCONIUM TETRACHLORIDE Hazard Class: 8 UN#: UN2503 Packing Group: III Required Label(s): 8 International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Environmental Protection Law - Pollutant Release and Transfer Register (PRTR) - Threshold Quantities None of this product's components are on the list Risk Management for Hazardous Materials - Separation Distances in Stationary Hazardous Sources - Toxic Substances None of this product's components are on the list Risk Management for Hazardous Materials - Policy of Accidental Release Prevention - Flammable Substances None of this product's components are on the list Risk Management for Hazardous Materials - Policy of Accidental Release Prevention - Propellant Substances None of this product's components are on the list Hazardous Substances Law Metal chloride Proprietary

List of Toxins - Schedule II Present (related to Zirconium compounds)

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Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Component Analysis - Inventory Metal chloride (Proprietary) KR KR JP - JP - KECI KECI KR - VN A M T US CA EU PH ENC ISH - - REAC CN NZ (Draft U X W S L Anne Anne H CCA ) x 1 x 2

Ye NS EI Ye Ye Ye Ye Ye Ye Yes Yes Yes No No Yes s L N s s s s s s

SECTION 16: Other information

NFPA Ratings Health: 3 Fire: 0 Instability: 2 Other: W Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 9/20/2018 - Update to Section(s) 2, 11, 16. Preparation Date 12/15/2015 Revision date 9/20/2018 Product Use semiconductor manufacture Restrictions on Use None known. Key literature references and sources for data Available upon request. Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- ______Page 9 of 10 Issue date: 2018-09-21 Revision 1.1 Print date: 2018-09-21

Safety Data Sheet Material Name: CASCADE SDS ID: 00232370 (ISRAEL)

Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved. The information contained in this sheet is based on the best knowledge and experience currently available.

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