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MOCVD, CVD & ALD Precursors The Strem Product Line Biocatalysts & Organocatalysts Metallocenes Electronic Grade Chemicals Nanomaterials Fullerenes Organofluorines High Purity Inorganics & Alkali Metals Organometallics Ionic Liquids Organophosphines & Arsines Ligands & Chiral Ligands Porphines & Phthalocyanines Metal Acetates & Carbonates Precious Metal & Rare Earth Chemicals Metal Alkoxides & beta-Diketonates Volatile Precursors for MOCVD, CVD & ALD Metal Alkyls & Alkylamides Metal Carbonyls & Derivatives Bulk Manufacturing Metal Catalysts & Chiral Catalysts Custom Synthesis Metal Foils, Wires, Powders & Elements cGMP Facilities Metal Halides, Hydrides & Deuterides FDA Inspected Metal Oxides, Nitrates, Chalcogenides Drug Master Files Metal Scavengers Complete Documentation Strem Chemicals, Inc. Strem Chemicals, Inc. 7 Mulliken Way 15, rue de l’Atome Dexter Industrial Park Zone Industrielle Newburyport, MA 01950-4098 F-67800 BISCHHEIM, France U.S.A. Tel.: +33 (0) 3 88 62 52 60 Fax: +33 (0) 3 88 62 26 81 Email: [email protected] Office Tel: (978) 499-1600 Office Fax: (978) 465-3104 Toll-free Orders Tel.: (800) 647-8736 Strem Chemicals, Inc. Fax: (800) 517-8736 Postfach 1215 (U.S. & Canada only) D-77672 KEHL, Germany Tel.: +49 (0) 7851 75879 Email: [email protected] Fax: +33 (0) 3 88 62 26 81 www.strem.com Email: [email protected] Strem Chemicals UK Ltd. An Independent Distributor of Strem Chemicals products Newton Hall, Town Street Newton, Cambridge, CB22 7ZE, UK Tel.: 0845 643 7263 Fax: 0845 643 7362 Email: [email protected] Check out our new website search capabilities. Follow us on Twitter and LinkedIn. View our blogs on our home page at strem.com MOCVD © 2015 Strem Chemicals, Inc. Strem Chemicals, Inc. manufacturers and markets specialty chemicals of high purity. Our products are used for research and development as well as commercial scale applications, especially in the pharmaceutical, microelectronic and chemical/petrochemical industries. We also provide custom synthesis and cGMP manufacturing services. For more information, visit Strem Chemicals at www.strem.com. Our 50+ years of experience in the manufacture of inorganic and organometallic chemicals has allowed us to expand our product offering of MOCVD, CVD, and ALD precursors. We are continually adding new products for this dynamic and exciting field. Our range of products are presented in this brochure (sorted by key element) and include: ▪Metal alkyls ▪Volatile organometallics ▪Metal alkylamides and alkylimides ▪Volatile metal carbonyls ▪Metal amidinates ▪Fluorinated derivatives ▪Metal alkoxides ▪Electronic grade chemicals ▪Metal beta-diketonates ▪Single source precursors for ▪Metal halides mixed metal oxides ▪Metal cyclopentadienyls We also offer electropolished stainless steel bubblers at 150ml to 3000ml capacities. (See page 54-57). Both horizontal-in-line and vertical configurations are available. Standard bubblers are equipped with diaphragm valves rated to 121°C (PCTFE stem tips). Bubblers equipped with high temperature bellows valves rated to 315°C are also available. Please note that we now offer NEW DOT 4B, UN stamped electropolished stainless steel bubblers (See pages 55 & 57). Cylinders (50ml, 150ml and 200ml) for ALD are also offered. See (pages 58-64). To request a free copy of our catalog, email [email protected] or visit our website at strem.com. We welcome your custom synthesis or bulk manufacturing inquiries. Ephraim S. Honig, Ph.D., M.B.A. Chief Operating Officer CVD0615 ©2015 Strem Chemicals, Inc. Article “Hybrid Organic-Inorganic Films Grown Using Molecular Layer Deposition” By Steven M. George (See pages 7-18) MOCVD, CVD & ALD PRECURSORS INDEX OF PRECURSOR TYPES Metal Alkyls Page # 34-0380 Diethyldiselenide ................................................................................................................................................................ 42 93-3030 Diethylzinc, min. 95%......................................................................................................................................................... 51 98-4000 Diethylzinc, min. 95%, 93-3030, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD..................................... 52 98-4005 Diethylzinc, min. 95%, 93-3030, contained in 50 ml Swagelok® cylinder (96-1071) for CVD/ALD..................................... 52 97-4525 Diethylzinc, elec. gr. (99.9999%-Zn) PURATREM.............................................................................................................. 52 13-1600 Dimethylaluminum i-propoxide, 98% (99.99+%-Al) ............................................................................................................ 19 97-5040 Dimethylcadmium, elec. gr. (99.995+%-Cd) PURATREM.................................................................................................. 22 48-5040 Dimethylcadmium, min. 97%.............................................................................................................................................. 22 34-0550 Dimethylselenide, 99% ....................................................................................................................................................... 42 97-5060 Dimethylzinc, elec. gr. (99.999%-Zn) PURATREM............................................................................................................. 52 98-4002 Dimethylzinc, elec. gr. (99.999%-Zn) PURATREM, 97-5060, contained in 50 ml electropolished Swagelok® cylinder (96-1077) for CVD/ALD ...................................................................................................................................................... 52 97-5061 Dimethylzinc, 99%.............................................................................................................................................................. 52 98-4001 Dimethylzinc, 99%, 97-5061, contained in 50ml Swagelok® cylinder (96-1070) for CVD/ALD .......................................... 52 32-2050 Tetra-n-butylgermane, min. 98% ........................................................................................................................................ 27 93-3227 Tetraethylgermane, 99% .................................................................................................................................................... 28 32-2125 Tetramethylgermane, 99%................................................................................................................................................. 28 93-1458 Tetramethylsilane, 99.9+% (NMR) grade ........................................................................................................................... 43 50-1900 Tetramethyltin, 98%............................................................................................................................................................ 47 93-1358 Tri-i-butylaluminum, min. 95% ............................................................................................................................................ 19 13-1850 Triethylaluminum, min. 93%............................................................................................................................................... 19 98-1855 Triethylaluminum, elec. gr. (99.999+%-Al) PURATREM..................................................................................................... 19 33-3400 Triethylarsine, 99%............................................................................................................................................................. 20 93-0540 Triethylboron, 98% ............................................................................................................................................................. 22 98-1862 Triethylgallium, elec. gr. (99.9999%-Ga) PURATREM ....................................................................................................... 27 93-1559 Triethylphosphate, 99%...................................................................................................................................................... 38 13-1900 Triethyl(tri-sec-butoxy)dialuminum(contains diethyl(tetra-sec-butoxy)dialuminum and tetraethyl(di-sec-butoxy) dialuminum) ...................................................................................................................................................................... 19 98-1955 Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM.................................................................................................. 20 98-4008 Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD ...................................................................................................................................................................... 20 98-4007 Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml electropolished Swagelok® cylinder (96-1077) for CVD/ALD ......................................................................................................................................... 20 93-1360 Trimethylaluminum, min. 98% ............................................................................................................................................ 19 98-4003 Trimethylaluminum, min. 98%, 93-1360, contained in 50ml Swagelok® cylinder (96-1070) for CVD/ALD......................... 20 98-4004 Trimethylaluminum, min. 98%, 93-1360, contained in 50 ml Swagelok®
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