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250 Duffield Hall • 343 Campus Road • Ithaca NY 14853-2700 Phone: 607.255.2329 • Fax: 607.255.8601 • Email: [email protected] • Website: www.cnf.cornell.edu Cornell NanoScale Facility 2018-2019 Research Accomplishments CNF Lester B. Knight Director: Christopher Kemper Ober Director of Operations: Ronald Olson Cornell NanoScale Facility (CNF) is a member of the National Nanotechnology Coordinated Infrastructure (www.nnci.net) and is supported by the National Science Foundation under Grant No. NNCI-1542081, the New York State Office of Science, Technology and Academic Research, Cornell University, Industry, and our Users. The 2018-2019 CNF Research Accomplishments are also available on the web: http://cnf.cornell.edu/publications/research_accomplishments © 2019 Cornell NanoScale Science & Technology Facility 2018-2019 Research Accomplishments Table of Contents Technical Reports by Section .. .... .... .... .... .... .... .... .... .... ... ii Directors' Introduction, 2019.. .... .... .... .... .... .... .... .... .... vii Full Color Versions of a Few Research Images .... .... .... .... .xiv A Selection of 2018 Patents, Presentations & Publications..xvi Abbreviations & Their Meanings . .... .... .... .... .... .... .... ....xxix Photography Credits .... .... .... .... .... .... .... .... .... .... .... .. xxxii Technical Reports .... .... .... .... .... .... .... .... .... .... .... .... 2-207 Index .... .... .... .... .... .... .... .... .... .... .... .... .... .... .... .. 208-212 Biological Applications, 2-51 Investigating the Effect of Environment Shape on Bacteria Growth at the Microscale ............................................2 Microfluidic Chip Manufacturing for Point of Care Sepsis Diagnosis . .... .... .4 Developing Microfluidic Devices for Assisted Reproductive Technologies .... .6 Measuring Non-Equilibrium RNA Dynamics One Molecule at a Time with SU-8 Microfluidics.. .... .... .... .... .... .... .... .8 Table ot Contents & Introdution Table Body-on-a-Chip Systems for Drug Development (LaValley). .... .... .... .... ....10 Body-on-a-Chip Systems for Drug Development (Wang, Miller, LaValley) ....12 Silicon Nitride Cantilevers for Muscle Myofibril Force Measurements .... ....14 Unzipping an Array of DNA Molecules by Resonator Based Nanophotonic Tweezers...................................16 Development of a Salivary Microfluidic Diagnostic Device using Hot Embossing .... .... .... .... .... .... .... .... .... ....18 An in vacuo Microfluidic Mixer for Biological X-Ray Solution Scattering ....20 Biomechanics of Bacteria ...............................................................22 Design and Application of Microfluidic Devices to Study Cell Migration in Confined Environments ...........................24 Electrochemical Lasso for Trapping Biomolecules inside Zero-Mode Waveguides. .... .... .... .... .... .... .... .... .... .... .... .... ....26 Zero-Mode Waveguides Fabrication for DNA Nucleosome Sequencing Application . .... .... .... .... .... .... .... ....28 Dual-Gradient Microhabitat Platform for Microalgae Growth .. .... .... .... ....30 ii Cornell NanoScale Facility Shear-Rate Controlled Microfluidic Devices to Examine von Willebrand Factor-Mediated Platelet Deposition. .... .... .... .... .... ....32 Handheld Chem/Biosensor Combining Metasurfaces and Engineered Sensor Proteins to Enhance Surface Plasmon Resonance (SPR) ...........34 Metasurface Enhanced Infrared Spectroscopy for Live Cells .... .... .... .... ....36 Retinal Implant Project . .... .... .... .... .... .... .... .... .... .... .... .... .... .... .... ....38 Characterizing the Role of Tumor-Derived Extracellular Vesicles in Breast Cancer .. .... .... .... .... .... .... .... .... .... ....40 Circulating Extracellular Vesicles and Physical Stress in ME/CF ...............42 Development of Microfluidic Device for Protein Synthesis and Modification.. .... .... .... .... .... .... .... .... .... ....44 Development of a Heparin-Based Coacervate Loaded Liposomes as Non-Invasive Therapy for Myocardial Infarction...........................46 Phytophthora Zoospore Chemotaxis .... .... .... .... .... .... .... .... .... .... .... ....48 Characterization of Cancer Microvesicles ...........................................50 Table ot Contents & Introdution Table Chemistry, 52-61 Sample Preparation for Single-Electron Spin Detection . .... .... .... .... .... ....52 Investigation of Area Selective Atomic Layer Deposition with Microreactor and in situ Surface Analysis .... .... .... .... .... .... .... ....54 Thin Film, Laser-Etched Sorbent Sheets for Spatially Resolved and High Throughput Analysis of Volatiles .... ....56 Fabrication of Graphene Microelectrodes ...........................................58 Small Molecule Photoresists for EUV Lithography .... .... .... .... .... .... .... ....60 Electronics, 62-75 Power Electronic Devices Based on Ga2O3...........................................62 WSe2 RF MOSFETs and CMOS Integration .. .... .... .... .... .... .... .... .... .... ....64 Fully Transparent Oxide Thin-Film Transistor with Record Current and On/Off Ratio.. .... .... .... .... .... .... .... .... .... ....66 Injectable Micro-Scale Opto-Electrically Transduced Electrodes ...............68 Trench Formation and Filling in Silicon Carbide...................................70 Emerging III-Nitride Devices for Terahertz Electronics...........................72 Fully Passivated InAlN/GaN HEMTs on Silicon with fT/fMAX of 144/141 GHz .. .... .... .... .... .... .... .... .... .... ....74 2018-2019 Research Accomplishments iii Materials, 76-109 Area-Selective Deposition to Enable Single-digit nm Fabrication .. .... .... ....76 Metal-Organic Hybrid Photoresists ...................................................78 Transient Laser Heating Derived Mesoporous Materials Directed by Gyroidal Templates from Block Copolymer Self-Assembly...............80 Three-Dimensional Printing with Silica Cages . .... .... .... .... .... .... .... .... ....82 Fabricating Advanced Characterization Platforms for Polyelectrolyte Brushes .... .... .... .... .... .... .... .... .... .... ....84 Nanometer-Scale Area-Selective Formation of Polymer Brushes ...............86 Engineering Transport in Confined Environments of Stable Radical Polymers .. .... .... .... .... .... .... .... .... ....88 Production of Beta-Tungsten as a Function of Sputtering Pressure .... .... ....90 Nanotube Transistor Arrays on a TEM Substrate .. .... .... .... .... .... .... .... ....92 Inertial Spreading and Imbibition of a Liquid Drop Through a Porous Surface .... .... .... .... .... .... .... .... ....94 Fabrication of Graphene-Encapsulated Photocathodes...........................96 Al2O3 Deposition and Characterization on III-Nitride Surfaces for Improvement of Dielectric/Semiconductor Interface Properties and Device Reliability. .... .... .... .... .... .... .... .... ....98 Thermal and Electrical Properties of Quasi-1D van der Waals Nanowires.........................................100 Fabricating Lithographically Designed Cylindrical Colloidal Particles .... ..102 Development of Microsensors for Air Quality Monitoring .....................104 Scissionable Polymer Photoresist for Extreme Ultraviolet Lithography.....106 Quantum Materials for Communication, Computing, and Storage .... .... ..108 Table ot Contents & Introdution Table Mechanical Devices, 110-135 Responsive Liquid Crystal Micro Actuators for Microrobotic Applications . .... .... .... .... .... .... .... .... .... .... .... .... ..110 ALD for Membranes, Metamaterials, and Mechanisms.........................112 Localized Microfluidic Actuation and Mixing Using Planar Fresnel Type Gigahertz Ultrasonic Transducer .... .... .... ..114 N-Z Power NEMS Electrostatic RF Wakeup Receiver with Pt Contact . .... ..116 Boiling Heat Transfer Enhancement by Coupling Nanoscale Evaporation in Buried Nanochannels.. .... .... .... ..118 Fabrication of AlN HBAR Devices for Spin Manipulation of Diamond NV Centers .... .... .... .... .... .... .... ..120 NanoThermoMechanical Logic Thermal Gates. .... .... .... .... .... .... .... .... ..122 Making a Microfluidic Device to Mimic Flow Through Porous Medium .. ..124 Atomically Thin Metamaterial Robots, Origami, and Artificial Flagella . .... .... .... .... .... .... .... .... .... ..126 iv Cornell NanoScale Facility A MEMS Microphone Using Levitation Force .....................................128 Carbon Dioxide as Thermal Fluid in Micro Systems . .... .... .... .... .... .... ..130 Fabricating Vitreous Silica Micropillars for Uniaxial Compression with in situ Raman Spectroscopy .... .... .... ..132 Construction of Microplasma Test Array .... .... .... .... .... .... .... .... .... .... ..134 Optics & Opto-Electronics, 136-157 Self-Starting Lithium Niobate Soliton Microcombs .... .... .... .... .... .... .... ..136 High-Q Two-Dimensional Lithium Niobate Photonic Crystal Slab Nanoresonators.........................................138 Fabrication of Anti-Resonant Reflecting Optical Waveguides for On-Chip Raman Spectroscopy.....................140 High Quality Factor PECVD Si3N4 Ring Resonators Compatible with CMOS Process. .... .... .... .... .... .... ..142 III-N UV Photonic Devices .. .... .... .... .... .... .... .... .... .... .... .... .... .... .... ..144 Development of Single and Double Layer ot Contents & Introdution Table Anti-Reflective Coatings for Astronomical Instruments.. .... .... .... .... ..146 Fabricating All-Glass, 1 cm Diameter Metalens Working at Visible Wavelength .... ...
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