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UNIVERSITÀDEGLISTUDIDICAGLIARI DipartimentodiFisica DottoratodiricercainFisica XIXCiclo(20032006) TesidiDottorato Porousapplicationsin biotechnology Relatore Dottoranda Dott.GuidoMula ValeriaDemontis

1

Acknowledgements Vorreiinnanzituttoringraziareilmiosupervisoreditesi,ilDott.Guido Mula, che mi ha dato l’opportunità di lavorare su un tema di ricerca estremamenteinteressanteechemihasempresostenutoeincoraggiatocon pazienzadurantetuttoilpercorsodistudi. Un ringraziamento particolare alla D.ssa Susanna Setzu, che mi ha introdottoallostudioSilicioPorosoechemihaseguitopertuttoillavoro concostanzaedentusiasmo. VorreipoiringraziarelaD.ssaSilviaSalis,ilDott.GianlucaManunzae ilDott.DanieleChiriuconiqualihocollaboratoinalcunefasidellavoro sperimentale. Un grosso contributo alla ricerca è stato dato dalla Prof.ssa Maura Monduzzi e dal Dott. Andrea Salis, che mi hanno guidato nella fase di realizzazione e caratterizzazione del biosensore. Ringrazio entrambi per la grande disponibilità dimostratami e perle preziose discussioniscientifiche svolte. Je voudrais remercier Dr. Thierry Pagnier et Dr. Pierre Bouvier pour m’avoiraccueillidansleLaboratoired’ElectrochimieetPhysicochimiedes MateriauxetdesInterfaces(LEPMI)del’InstituteNationalePolytechnique deGrenoble(France).Jelesremerciepourm’avoirtransmiseunpetitepeu deleursconnaissancesdansledomainedelaspectroscopieRamanetdela Photoelectrochimieetpourleursconseillesquim’ontaidéependantlereste de mon travaille. J’adresse aussi mes remerciement au Prof. Didier Delabouglise qui m’a aidée pour l’étude de immobilisation d’ADN sur le siliciumporeux. Ringrazio inoltre la Prof. A. M. Fadda e la D.ssa C. Sinico del Dipartimento Farmaco Chimico Tecnologico dell’Università degli Studi di CagliariperlostudiodirealizzazionediunsistemaDrugDeliveryinSilicio poroso. Infine ringrazio il nostro coordinatore di dottorato, il Prof Luciano Colombo,chehaseguitocongrandededizioneilnostropercorsodistudi,e tuttiidocentidelcorso.

2 Contents

Contents

CONTENTS...... 3

INTRODUCTION...... 9

CHAPTER1: ...... 12

1 POROUSSILICON ...... 12

1.1 INTRODUCTION ...... 12

1.2 ELECTROCHEMICALFORMATIONOF POROUS SILICON ...... 12 1.2.1 FundamentalpropertiesofSC/ElectrolyteInterfaces ...... 12 1.2.2 Flatbandpotential ...... 16 1.2.3 OpenCircuitPotential ...... 19 1.2.4 TheSi/Electrolyteinterface ...... 20

1.3 POROUSSILICONFORMATION ...... 20 1.3.1 Formationregimebyanodization...... 20 1.3.2 Dissolutionchemistry ...... 23 1.3.3 Theoriesofporeformation ...... 25

1.4 CHARACTERISTICSOF PS LAYERS :DEPENDENCEONANODIZATION CONDITIONS ...... 25 1.4.1 Morphology ...... 25 1.4.2 ...... 27 1.4.3 Crystallineproperties...... 28 1.4.4 Thickness ...... 29 1.4.5 Surfacearea...... 30

1.5 POROUSSILICONSURFACEMODIFICATION ...... 31 1.5.1 Aging ...... 31 1.5.2 Dissolutionofporoussiliconinaqueoussolutions...... 33

3 Contents

1.5.3 Thermaloxidation...... 34 1.5.4 Anodicoxidation...... 34 1.5.5 Chemicaloxidation ...... 37 1.5.6 Othertechniquesforsurfacestabilization...... 38

1.6 POROUSSILICONASABIOMATERIAL ...... 38 1.6.1 Biocompatibilityandbioactivity...... 38

CHAPTER2: ...... 40

2 BIOSENSORS ...... 40

2.1 INTRODUCTION ...... 40

2.2 BIOSENSORS :GENERALITIES ...... 42 2.2.1 Characterizationofthebiosensorsresponse ...... 43

2.3 ENZYMATICBIOSENSORS ...... 44 2.3.1 Catalysis...... 44 2.3.2 Enzymes...... 45 2.3.3 Kineticsofenzymecatalysedreactions...... 45 2.3.4 TheMichaelisMententheory...... 46

2.4 ENZYMEIMMOBILIZATION ...... 48 2.4.1 StateofartofPSapplicationinbiosensing ...... 50

2.5 INTERESTINTHEREALIZATIONOFANEW PSBASEDBIOSENSORFOR TRIGLYCERIDESANALYSIS ...... 52

CHAPTER3: ...... 54

3 EXPERIMENTALMETHODS...... 54

3.1 INTRODUCTION ...... 54

3.2 PREPARATIONOFCRYSTALLINESILICONWAFERS ...... 54

4 Contents

3.3 FORMATIONANDANODICOXIDATION ...... 55 3.3.1 Formation...... 55 3.3.2 Anodicoxidation...... 56

3.4 CHARACTERIZATIONOF PS LAYERS ...... 57 3.4.1 Porosity...... 57 3.4.2 Thickness ...... 57 3.4.3 Poresizedistributionandspecificarea...... 57

3.5 STUDYOFENZYMEIMMOBILIZATIONON PS...... 60 3.5.1 Theenzyme:lipasefromCandidarugosa...... 60 3.5.2 Enzymaticactivitymeasurements...... 63

3.6 POTENTIOMETRICMEASUREMENTS ...... 66

CHAPTER4: ...... 68

4 PREPARATIONANDCHARACTERIZATIONOFN+TYPE POROUSSILICONASAMATRIXFORENZYME IMMOBILIZATION...... 68

4.1 INTRODUCTION ...... 68

4.2 CHOICEOFTHEFORMATIONPARAMETERS ...... 69 4.2.1 Crystallinesiliconwafer ...... 69 4.2.2 Porosity...... 70 4.2.3 Thickness ...... 72 4.2.4 DryingProcess...... 73

4.3 CHARACTERIZATIONOF PS LAYERS ...... 74 4.3.1 XRHRD ...... 74 4.3.2 SEMFEG ...... 75 4.3.3 CharacterizationbyBETmeasurements...... 78

4.4 SUMMARY :FORMATIONANDCHARACTERIZATION ...... 81

CHAPTER5: ...... 82

5 Contents

5 PSSURFACESTABILIZATIONTHROUGHOXIDATION...... 82

5.1 INTRODUCTION ...... 82

5.2 CHEMICALANDTHERMALOXIDATIONMETHODS ...... 83

5.2.1 ChemicaloxidationinH 2O2solution...... 83 5.2.2 ThermalOxidation...... 84

5.3 ANODICOXIDATIONOFPOROUSSILICON ...... 85 5.3.1 Processdescription...... 85 5.3.2 Dependenceoncurrentdensity...... 87 5.3.3 Dependenceonthesamplethickness...... 89 5.3.4 Realizationofsampleswithdifferentoxidationlevels...... 90

5.4 DETERMINATIONOFTHECONTENTBYMEANSOF EDS MEASUREMENTS ...... 92 5.4.1 Thermallyoxidizedsamples ...... 92 5.4.2 Dependenceofoxygencontentontheanodicoxidationlevel94

5.5 NEWINFORMATIONABOUTN +PS MORPHOLOGY ...... 96

CHAPTER6: ...... 99

6 IMMOBILIZATIONOFLIPASEONPS...... 99

6.1 INTRODUCTION ...... 99

6.2 THEIMMOBILIZATIONPROCESS ...... 99 6.2.1 Definitionofimmobilizationparameters...... 100 6.2.2 Preparationoftheenzymaticsolution...... 102 6.2.3 PhysicaladsorptionoflipaseonPS...... 102

6.3 OPTIMIZATIONOFTHEIMMOBILIZATIONPARAMETERS ...... 104 6.3.1 Immobilizationduration...... 104 6.3.2 InfluenceofpH ...... 105 6.3.3 Influenceoftheoxidationlevel ...... 106

6 Contents

6.4 SENSITIVITYTOSUBSTRATECONCENTRATION ...... 108

6.5 DEVICESTORAGEANDSTABILITY ...... 109

CHAPTER7: ...... 112

7 REALIZATIONOFAN N+-TYPE POROUSSILICONBASED POTENTIOMETRICQUANTITATIVEBIOSENSORFOR TRIGLYCERIDESANALYSIS ...... 112

7.1 INTRODUCTION ...... 112

7.2 OPERATIONPRINCIPLE ...... 113

7.3 THE PS/ ELECTROLYTEINTERFACE ...... 113 7.3.1 Photoelectrochemicalcharacterization...... 114 7.3.2 DependenceoftheopencircuitpotentialonpH...... 115 7.3.3 VariationofOCPduringhydrolysis ...... 119 7.3.4 Sensitivityofthesystemtodifferenttriglycerides concentrations ...... 121

8 APPENDIXA:PSMATRIXASDRUGCARRIER ...... 123

8.1 INTRODUCTION ...... 123

8.2 BUILDINGADRUGDELIVERY PS SYSTEM ...... 123 8.2.1 Poroussiliconpreparation ...... 124 8.2.2 Drugloading ...... 124

8.3 DRUGRELEASESTUDY ...... 125

9 APPENDIXB:PHOTOELECTROCHEMICAL CHARACTERIZATIONOFPSFORDNASENSING ...... 128

9.1 INTRODUCTION ...... 128

7 Contents

9.2 PHOTOELECTROCHEMICAL CHARACTERIZATION OF THE PS/ELECTROLYTEINTERFACE...... 129 9.2.1 Experimentalsetting ...... 129 9.2.2 Results...... 129 9.2.3 DNAsensing...... 132

10 CONCLUSIONS ...... 134

11 PERSPECTIVES...... 137

12 REFERENCES...... 138

8 Introduction

Introduction

Biotechnologyisnowadaysafieldingreatexpansionandthecontinuous boostforobtainingsmallerandmoreefficientdevicesstimulatesanalways increasinginterestfromtheresearchcommunity.Thefieldsofapplicationof biotechnological devices are very numerous, ranging from industry, medicine,environmentalstudies,pharmacologyetc. Theuseofnanostructuredmaterialsinbiotechnologyisveryattractive, since their unique properties offer excellent prospects for interfacing biological recognition events with electronic signal transduction and for designing a new generation of bioelectronic devices exhibiting novel functions 1. The field of biosensing devices ( biosensors ), i.e. sensors which use a biologicalcomponenttoexerttheirfunctioning,isaveryattractivefieldof research. In fact biosensors couple the selectively and sensitivity of a biologicalcomponentwiththepowerofdetectionofatechnologicaldevice. Inthisthesiswewillmainlyfocusourattentiontotherealizationofa poroussiliconbasedbiosensorfortriglyceridesanalysis. Poroussilicon(PS),discovered 2in1956,hasbeenwidelystudiedmainly for its optical properties (the room temperature luminescence 5 and the possibility to modulate the refractive index in a simple way during formation 3), but since the interest of the scientific community has been triggeredtoitspotentialbiotechnologicalapplications,PShasshownmany advantagesrespecttostandardmaterials. Inparticularporoussiliconappearsatobeagoodcandidateforcoupling withbiologicalmoleculesbecauseofitspeculiarcharacteristics. The most noticeable are the very large specific area, reaching 900 m 2/cm 3 for nanoporous Si, which allows the loading of large amounts of biological materialinaverysmallvolumeandthepossibilitytoeasilytailorthepore sizeandmorphology 30 asfunctionofthekindofmoleculestobeintroduced. Besides,theprovenbiocompatibility 34 andnontoxicity 4ofPSlayersallow

9 Introduction the possibility to develop devices to be directly implanted into living organismswithoutriskofrejection 53 . Moreover, the possibility to integrate the PSbased biotechnological device in the traditional siliconbased electronics, opens the way to the realization of compact systems for the in vivo and online diagnostics and treatments. Thefirstchapterofthismanuscriptisdedicatedtoporoussilicon.We will start with a general description of the interfaces between a and an electrolyte and then we will consider the particular caseofthePS/electrolyteinterface.TheanodicformationinHFsolutionand themainpropertiesofthisattractingmaterialwillbediscussedindetail. In chapter 2 we will give a short overview on biosensors. We will describethemainelementsthatconstitutethosedevicesandwewillmakea briefintroductiontoenzymaticcatalysis,thatisthebiochemicalprocesson whichourdeviceisbased.Then,wewilldiscussthestateofartofporous siliconapplicationsinthefieldofbiosensors. InChapter3wewillshowtheexperimentalmethodsusedtorealizeand characterizeourbiosensor. InChapter4wewillfirstlydealwiththeprocessofformationofourPS samples, discussing the choice of the formation parameters (HF concentration, current density, anodization time etc.) and morphological properties(porosity, specific area,thickness etc.)for the realization ofthe biosensor.Then,theresultsofHighResolutionXrayDiffraction(HRXRD),

Field Emission Gun Scanning Electron Microscopy (SEMFEG) and N 2 adsorptionmethodcharacterizationswillbepresented. Inchapter5wewilldiscusstheprocessofstabilization of the porous silicon surface through oxidation, needed to protect the samples against dissolutioninaqueoussolutions. Inchapter6wewillthendescribetheimmobilizationoflipaseonPS layers.Themethodweusedisphysicaladsorption,whichhasbeenpreferred with respect to other techniques because it is based on weak interactions betweenthesurfaceandthebiologicalmolecules,with very limitedor no interferences on the biological functioning of the enzyme. We will then describe optimization of the immobilization process with respect to the 10 Introduction immobilization duration and the pH. The goodness of PS as matrices for enzyme immobilization will be demonstrated by measurement of the catalytic activity of the lipaseloaded PS system performed with standard techniques of analytical chemistry. The sensitivity of the device towards different triglycerides concentration will be shown. We will see that the velocitywithwhichoursystemtransformsagivenquantityoftriglyceridesis afunctionoftheirconcentrationintheemulsion.Thisfunction,aswewill see,verywellmatchtheMichaelisMentenequation,thatistheequationon whichisbasedthetheoryofenzymaticcatalysisincaseoffreeenzymes. Finallyinchapter7wewilldescribetherealizationofthepotentiometric biosensor.Theloadedporoussiliconsampleswillbeusedaselectrodesinan electrochemical cell containing an emulsions where triglycerides act as electrolytes. The operation of our device is based on the sensitivity of PS/electrolyte interface to changes in the pH of the electrolyte solution. FirstofallwewilldescribethesensitivityofoursystemtochangesinthepH of test solutions, by using buffer solutions with different pH. Then will describethecalibrationofthedevicemadeusingemulsions with different concentrations of tributyrin, showing the reliability and efficiency of our biosensor. InAppendixAandaBwewilldescribetwomoreapplicationsofPSwe investigated,thatareataveryearlystageofdevelopment.InAppendixA willbedescribedtheuseofPSasamaterialfordrugdeliverysystems,while inAppendixBwewillpresenttheuseofPSfortherealizationofaDNA biochip.

11 1: Porous Silicon

Chapter 1:

1 PorousSilicon

1.1 Introduction

Poroussilicon(PS)wasfirstobservedmorethan50yearsagobyUhlir 2 during some experimentsof electropolishing ofcrystalline silicon in aqueous hydrofluoric acid solutions. However, since crystalline silicon, due to its indirect bandgap, do not show luminescence even at low temperature, the interestofthescientificcommunityonPSwasonlytriggeredwhenitsroom temperaturevisibleluminescencewasdiscoveredin1990 5.

1.2 Electrochemical formation of Porous Silicon

1.2.1 Fundamental properties of SC/ Electrolyte Interfaces

The properties of semiconductor (SC)/electrolyte interface have been extensivelyreviewed 6,andherewewilldescribebrieflythemaincharacteristics neededforabetterunderstandingoftheporoussiliconformationprocessandof itsapplications.

12 1: Porous Silicon

Thediagramoftheenergylevelsinanelectrolytemaybedescribedina waysimilartothatusedforthedescriptionoftheenergylevelsinasolid 7.A system(thatisasystemcomposedbytwoormoreelementswhichcan changetheiroxidationnumberduringareaction)isrepresentedbyanenergy levelthatcorrespondstoanoccupiedelectronicstateforthereducedformand toanemptystatefortheoxidizedform.Inthisrepresentation,wecandefinethe redoxFermilevel(E F,red ),thatistheequivalentfortheelectrolyteoftheFermi level,astheenergylevelatwhichtheprobabilitiestofindoxidizedorreduced speciesinsolutionarethesame(Fig.1.1(b)).

Fig. 1.1: Schematic representation of the energetic levels of a n typesemiconductor(a)andanelectrolyte(b)beforecontact.E CB andE VC aretheenergiesoftheconductionandvalencebands,E F istheFermilevel.W(E OX )andW(E RED )areGaussianfunctions which represent the probability to find the oxidized or reduced species at energy E. E F,redox , is the redox Fermi level and correspondstotheenergyatwhichtheprobabilitiesareequal.

Whenasemiconductorelectrodeisbroughtincontactwithanelectrolyte, anequilibriumisestablishedthroughamechanismofchargetransportbetween thetwophases,leadingtoabandbendingwhichcontinuesuntiltheFermilevel ofthesemiconductorequalstheRedoxFermileveloftheelectrolyte. This transport is carried out by electron transfer through the conduction bandorbyholetransferthroughthevalenceband.Ingeneral,thenetresultof the redistribution of charges at the interface is the formation of an electric doublelayer,withthreedistinctzones:theSpaceChargeLayer(SCL)inthe semiconductorside,theHelmholtzlayer(HL)andthediffuselayer(DL)inthe

13 1: Porous Silicon solution side. The definition of these three layers is given in the following discussion.

Fig. 1.2: The energy levels across an nSi/Electrolyte interface; Ebisthebandbendingenergy.

AccordingtotherelativepositionoftheFermiLevelandtheRedoxFermi Level,threedifferentsituationsarepossible(Fig.1.3):

EF>EF,redox .Inversion(Fig.1.3a):thereisaflowofelectrons from the semiconductor into the electrolyte. As a consequence, electrons are drained fromthesurface,givingrisetoadepletionlayerinthesemiconductor,called SpaceChargeLayer(SCL),whichtypicallyextendsfromafewtenstoafew hundredsofnmindepth.Sincesurfaceisdepletedfromelectrons,itremains positivelycharged.Theelectricfieldinthisregionisafunctionofthedistance from the surface. On the electrolyte side, this mechanism is followed by a reorientationofdipolesandions,sothatanegativechargeaccumulatestoform theHelmholtzlayer(HL).Itcontainsionsthatarespecificallyadsorbedonthe electrode(protonsonanamphotericsurfaceforexample)andpolarizedsolvent molecules.Theconcentrationoftheseionsdefinesthepotentialdropacrossthe Helmoltzlayerandcontrolsthepositionofthecontactpotentialatthesurfaceof the semiconductor (as we will see in the following paragraphs, the flatband potential);thedepthofthisregionislessthan1nm. The region between the Helmoltzlayerandthebulkelectrolyteischaracterizedbyadeviationofion

14 1: Porous Silicon concentrationwithrespecttothebulkvaluesandiscalledDiffuselayer(DL)or GouyChapmanregion. Thespacechargelayerwithinthesemiconductorleadstoadependenceof electronenergyondistance,whichisreferredtoasbandbendingatthesurface. Bandbendingcausesthemajoritycarriersatthesurfacetomovetowardsthe bulk of the semiconductor, while holes are attracted to the surface. The semiconductorelectrodesisthensaidtobeindepletionmodebecauseelectrons aredrainedawayfromthesurface.

Ef<EF,redox .Accumulation(Fig.1.3b):Electronsflowfromtheelectrolyte towards the semiconductor. As a consequence, at equilibrium there is an accumulationofmajoritycarrierintheSpaceChargeLayer,whosedepthisin thiscaseshorterthaninthecaseofinversion.

EF=EF,redox .Flatband(Fig.1.3c):Thetwophasesareinequilibriumand thereisnochargetransfer,noranelectricdoublelayer;thisconditioniscalled flat band. DifferentkindsofbandbendingareshowninFig.1.3for ntypesilicon.

15 1: Porous Silicon

Fig.1.3:DifferenttypesofbandbendingforanntypeSielectrode inequilibriumwithanelectrolyte.a)Inversion;b)Accumulation; c)Flatband.E VB isthevalencebandenergy,E CB istheconduction bandenergy,E FistheFermilevelinthesemiconductorandE F,redox istheredoxFermileveloftheelectrolyte.

The potential difference between the semiconductor and solution phases canbevariedbyapplyinganexternalpotentialandthejunctioncanbemodified fromaccumulationtoflatbandandinversion.

1.2.2 Flatband potential

Theappliedpotentialatwhichthereisnobandbendingiscalled flatband potential andisaquantityofgreatrelevancein.Indeed,since theflatbandpotentialisdeterminedbythepotentialdropacrosstheHelmoltz layer,itdependsontheconcentrationofionsadsorbedontothesurface,thatis inturninfluencedbythereactionsoccurringattheinterface.

16 1: Porous Silicon

In general, if X is the ion that can be adsorbed onto the surface, the potentialdropacrosstheinterfaceisdescribedbyanernstianequation: RT V −V = const. − log(a ) s sol nF X sol whereV s andV sol arethepotentialinsolidphaseandintheelectrolytephase, respectively,Risthegasconstant,Tisthetemperature(inthiscase298K), nis the number of exchanged electron, F is the Faraday constant and a X is the activityoftheionX,thatistheconcentrationoftheionXinthesolution 8.In general,itiscommonlyusedthefollowingapproximatedform: .0 059[V ] V −V = const. + ⋅ pX s sol n IfX=H +,theflatbandpotentialisexpectedtoshiftcathodicallyby59mV whenthepHoftheelectrolyteisincreasedbyoneunitatT=298K: .0 059 V = const. + []V ⋅ pH fb n Thisisthecaseofcoveredbyathinoxidelayerincontact with an aqueous electrolyte (that is also the case for the system we want to study)forwhichtheflatbandpotentialshowsastrongdependenceonthepHof theelectrolyte. Itiscommonlyaccepted 8thatthisphenomenonisduetothefactthatthe oxide’s surface in contact with aqueous solutions is positively charged, negativelychargedorneutraldependingonthepHofthesolution,asshownin

Fig.1.4.Thebluerectanglesindicatethesurfaceoftheoxide,whilep 0isthe zerochargepoint.

Fig.1.4:Schemeofthebehaviouroftheoxide’ssurfaceincontact withsolutionsatdifferentpH.

17 1: Porous Silicon

IndeedforseveralsemiconductorstheplotofflatbandasfunctiononpH showstheexpectedlinearbehaviourwithaslopeof60mVperpHunit. However,itsisverydifficulttoknowexactlythereactionsoccuringata semiconductor/ electrolyte interface and deviations from the nernstian 9 behaviourareoftenobserved .Forexample,forTiO 2thedependenceofV fb on pHis50mVperpHunit,for6HSiCis40mV/pHunit,forGaPis37mV/pH unitetc. IncaseofSi/aqueouselectrolyteinterface,aweakersensitivityofflaband potentialonpHhasbeenobserved 10 .Experimentalmeasurementsshow,infact, slopesofabout30mVperpHunit.Eveninthiscasethemainreactionwhich determinestheV fb variationonpHisattributedtotheamphotericbehaviourof the Si–OH (silanol) groups on the Si surface. The frequent deviations from nernstianbehaviourhavenotbeenyetclearlyexplained.

Vfb isalsoinfluenced by other parametersthatcanmodify the interface, suchasthedopinglevel,oxidationofthesurface,adsorptionofchargedspecies and variations in the concentration of the electrolyte. Then since the V fb is highly sensitive to the surface modifications it is a good parameter to study electrochemicalprocessesinvolvingasemiconductorasoneoftheelectrodes. One of the most used techniques to determine the flatband potential is photoelectrochemistry. The semiconductor/electrolyte junction at inversion regimeisaphotoconductivesystem:whenlightenedusingphotonswithenergy largerthantheelectronicbandgap,electronholepairsarecreatedand,dueto thebandbending,chargescandiffuseinthematerial.Thesechargesgiveriseto an electric current, called photocurrent, which is greater for higher band bending.Photocurrentdecreaseswhenanexternalpotentialisappliedinsuch waytoreducethebandbendingandiszerowhentheappliedpotentialequals theflatbandpotential.Thephotoelectrochemicalstudyoftheevolutionofthe flatbandpotentialduringareactionisnotpossiblebecausethelightbeamused to excite the electronhole pairs can interfere with the system. It is instead possible to take advantage of another simple and powerful technique to investigateandcharacterizeasemiconductorsurfaceimmersedinanelectrolyte. Thistechnique,introducedin1995 11 ,consistsinmeasuringthetimeevolution oftheopencircuitpotential(OCP).

18 1: Porous Silicon

1.2.3 Open Circuit Potential

Theopencircuitpotential(OCP)(alsoreferredtoasequilibriumpotential or rest potential) of an electrode, is the overall voltage generated in the electrochemical cell measured with respect to the potential of a reference electrode.This voltage ismeasured inthe open circuit configuration using a highimpedancevoltmeter,sothatonlyanegligiblecurrentcanflowthrough thecell.OCPisthemosteasilymeasurableelectrochemicalparameter,butat thesametimeisacomplexquantityasitisthesumofallpossiblepotential drops in the system. In fact, in such experimental setup additional potential drops ( V0) are involved respect to V fb , for example potential drops at electrolyte/referenceelectrodeandsemiconductor/metalinterfaces.

OCP = V fb + V0 The absolute value of OCP gives no useful information about interface reactions.However,asweareinterestedinthedifferencesofthepotentialdrop acrosstheinterface,OCPvariationisagoodparametertoinvestigatereactions. In fact, the only contribution to OCP that can vary as a consequence of a reactionattheelectrodeisV fb ,becauseallotherpossiblepotentialdropsareon first approximation not affected by interface modifications. The study of the timeevolutionofOCPisthenequivalenttothestudyofthetimeevolutionof theflatbandpotential. Anelectrodeintheopencircuitconfigurationisinequilibriumifnonet chemicalchangeoccursinthesystemduringthetimeofmeasurement.Thisis thecaseforexamplewhentheFermilevelofthesemiconductorhasthesame valueoftheredoxFermilevelofanelectrolyte.Inmanysituations,andalmost alwaysforcrystallinesilicon,theelectrode/electrolyteinterfaceatopencircuit isatanonequilibriumconditionandanetchemicalchangeinthesystemoccurs whentwoormoreredoxcouplesarepresentintheelectrolyte. In this cases OCPisnotaconstantparameter. When one of the redox couples is associated withthe dissolution of the electrode, OCP is also called potential (it is the case of a silicon electrodeatOCPinaqueoussolution). Any change in the system, such as surface preparation, solution composition and concentration, pH, temperature, convection, lighting, and so on, can affect the OCP. For applications like biosensing, in case of non

19 1: Porous Silicon equilibrium electrodes, i.e. redox or dissolution reactions, a surface stabilizationisrequiredinordertoeliminatethecontributionstoOCPdueto interfacemodifications. AllthisconsiderationsmaketheOCPaveryimportantparameterinmany applications, such as standard pH measurements with glass membrane electrodes,andwillbeusedinthecourseofthisthesisasakeyparameterfor thecharacterizationandcalibrationofbiosensors.

1.2.4 The Si/ Electrolyte interface

Silicon is known to be a highly oxidizable material so that the surface stabilityhasbeenamajorissueforelectrochemists.Inpresenceofsilicon reactsforminganoxidelayerwithpassivatingnature,thatpreventssiliconfrom furtheretchings.Thegreatlikelihoodofthesiliconoxidationreactionandthe stabilityofSiO 2explainswhyunderambientconditionssiliconisalmostalways foundwithanativesurfaceoxidelayer,ofatypicalthicknessofabout2nm.HF is one of the few substances that can dissolve this SiO 2 layer at room temperature,leadingtoaprevalenceofsiliconhydridespeciesonthesurface. AqueousHFsolutionsarealsomostwidelyusedtoperformthedissolutionof crystallinesilicontoformporoussilicon.

1.3 Porous silicon formation

1.3.1 Formation regime by anodization

Since early studies Porous Silicon (PS) has been mainly obtained by electrochemical etching of crystalline silicon in aqueous or ethanolic HF solutions. Several reports 12 show the possibility to form PS by chemical reactions,commonlycalled“stainetching”,wheredissolutioniscarriedoutina mixture of HF and a strong oxidizing agent, suchas KNO 3, with no current flow.Thesetechniqueshoweverarenotsoversatileorreproducibleasanodic etching,thatstillremainsthemostusedtechnique. Theanodicdissolutioniscarriedoutinacellwherethesiliconwaferacts as and a HFresistant electrode (generally made of platinum) acts as

20 1: Porous Silicon cathode.Thecellbodyisconstructedwithahighlyacidresistantmaterial,as Teflon. PoroussiliconpreparationinaqueousHFelectrolyteisnowcontrolledup to a very high level of reproducibility, permitting also the construction of complex structures (for example superlattices). However, the formation parameters are only known on empirical basis, while the exact formation mechanism, after an almost fifty years long debate, is still not completely understood 13,14,15,16,17,18,19,20 . AbasicknowledgeofSi/HFelectrochemistryisthestartingpointforany understandingofporeformation. Isusefultodefinethefourcategoriesinwhichsiliconwafersareclassified accordingtothedopingtypeandlevel: ptype: pdopedsampleswitharesistivityoftheorderofthecm; p+type:heavilydoped ptypesampleswithresistivityoftheorderof10 3 cm; ntype: n-dopedsampleswithresistivityoftheorderofthecm; n+type:heavily ndopedsampleswithresistivityoftheorderof10 3cm. Fig. 1.5 shows the typical i-V curves for n and ptype doped silicon in aqueousHF. These curves show some similarities with the Schottky diode model, expected for a semiconductor/electrolyte interface, including photogenerated currents.However,therearealsosignificantdifferences:forexample,thefact thatevenifthesignofmajoritycarriesisdifferentin nand ptypesilicon,the reactionsatSi/HFinterfaceremainthesameorthethreeorderofmagnitude highercurrentvalueswithrespecttonormalShottkydiode,whichindicatesa possiblesurfacestatecontribution 21 . Undercathodicpolarizationboth nand ptypesiliconarenormallystable, thatissilicondoesn’tdissolve.Theonlyreactionthattakesplaceinthisregion isthereductionofwaterwiththesubsequentliberationofgas.Itis onlyunderanodicpolarizationthatsilicondissolutionoccurs,butporoussilicon formationtakesplaceonlyinaparticularregionoftheanodicregime.

21 1: Porous Silicon

Fig.1.5:Typical i-Vcurvesfor(a) ptypeand(b) ntypesilicon in aqueous HF solutions 21 . The solid line indicates the dark responseandthedashedlineindicatesthelightresponse.

Fig.1.6showsamagnificationofthepartoftheanodic potential region interestingforporoussiliconformation.Threeregions must be distinguished, labelledwiththethreelettersA,BandC. PoreformationtakesplaceinregionA,where i-Vcharacteristicsshowan exponentialbehaviour.InregionC,athighpotentialvalues,thereisthesilicon electropolishing. Region B is a transition region, where the process of PS formationandelectropolishingcompete. ThecurveinFig.1.6isthesameforboth p- type, p+-type and n+-type, except for ntype silicon (poorly doped n silicon), for which the process of

22 1: Porous Silicon poresformationdoesnottakeplacewithoutillumination.The i-Vcurveforthis typeofwaferbecamesimilartotheothersonlyunderillumination.

Fig. 1.6:Typical anodic i-V curve, showing the salient region of silicon dissolution in aqueous HF. In region A porous silicon formationoccurs,inregionCsiliconelectropolishesandregionB isatransitionregion 21 .

The formation of porous silicon has been a subject of investigation for many decades, but still no agreement on the exact mechanism has been obtained. In the electrochemical formation of PS two aspects must be distinguished:theporeinitiationandtheirsubsequentpropagation.Asfarasthe theporesinitiationisconcerned,itiscommonlyacceptedthatitwilloccurin presenceofsurfacedefectsorinhomogeneities.

1.3.2 Dissolution chemistry

Themostacceptedmodelforthedissolutionchemistry of silicon during anodicetchinginHFisthatproposedbyLehmannandGösele 16 showninFig. 1.7.

23 1: Porous Silicon

Fig. 1.7: Reaction model proposed for the silicon electrodes dissolutioninaqueousHFsolutions,associatedwithporoussilicon formation 16 .Thedescriptionisinthetext.

When PS is immersed in HF solution it is characterized by hydrogen terminatedsurface. When a hole reaches the hydrogen saturated surface, attack of the SiH bondsbyfluorideionscanoccurandaSiFbondisestablished(Stepa).The bondedFexertsapolarisinginfluencesothatanotherF ioncanbondtosilicon, withthegenerationofanH 2moleculeandtheinjectionofoneelectronintothe electrode(stepbandstepc).ThepolarizationinducedbythetwoSiFbonds weakenstheSiSibackbondsthatareeasilyattackedbyHForH 2O,inpresence of a second hole (Steps d and e); then one silicon atom remains bonded to fluorineatomsanddisperseinthesolution(Stepe).TheSiF 4isnotstableand reactswithHFformingH 2SiF 6. Theholeprocessrequirestwoholestotakeasiliconatominsolution. Whenasiliconatomisremovedfromthesurface,itleavesanatomicsize dip that causes a change in surface geometry and in the electric field distribution. In particular, as in correspondence of a dip the surface has a smaller curvature radius, the electric field lines are concentrated in these locations.Asaconsequence,apreferentialholetransferwilloccur,amplifying surface inhomogeneities and causing the gradual formation of the porous structure.

24 1: Porous Silicon

1.3.3 Theories of pore formation

Ifthechemistryoftheformationprocessisreasonablywellunderstood,the mechanismsbehindporepropagationarestillunclearandseveralmodelshave beenproposed. Allproposedtheoriesagreetothefactthatatthesemiconductor/electrolyte interfacetheformation mechanisms are more easily explained by taking into account the physical parameters (such as band bending, electric field lines, depletion layers, tunnelling, …) than the specific chemical reactions that are involvedinthedissolutionofthesemiconductor.Asamatteroffact,itseems that the mechanisms driving the pores’ formation are similar whatever the semiconductor(Si,GaN,GaAs,…) 18 . At present, the Beale model is one of the most accepted theories. It considersthesemiconductordepletionlayerasthe parameter determining the distributionoftheelectricfieldandthentheporepropagation.Aswehavejust seen,forthedissolutiontooccurthepresenceofholesisneeded,andthepores propagateuntilholesareavailable.Whenthediameter of crystallites(silicon skeleton) is of the order of two times the space charge layer thickness, a depletion of the remaining silicon occurs, because of the overlapping of the spacechargeregionsattheporesurfaces. Whenthisconditionisreachedthestructurebecomesinerttowardsfurther electrochemicaletchingandtheformedlayerdoesn’tparticipateatthereaction anymore.Inthebottomofpores,wherethecurvatureofthesurfaceissmaller and the electric field more intense, the depletion layer is thinner and the probabilityforaholetoreachthesurfacethroughtunneleffectisgreater.Then, itistherethatthereactionpropagate.

1.4 Characteristics of PS layers: dependence on anodization conditions

1.4.1 Morphology

Themicrostructureofporoussiliconhasbeenextensivelystudiedbymany groupsbymeansofmicroscopytechniques.Bealeetal 18 ,characterizedseveral

25 1: Porous Silicon porous silicon layers obtained with different substrate doping and different anodization currents by Transmission Electron Microscopy (TEM). They observed that the doping level, and therefore the substrate resistivity, is the parameterwhichdeterminesthemorphologyoftheformedlayer. Fig.1.8showthetypicalmorphologiesofthefourdifferentwafertypes.In p-typeporoussiliconboththeporediameterandthecrystallitesizesarevery small,generallybetween1and5nm.The morphology is characterized by a homogeneousandhighlyinterconnectedporenetwork,thatisoftenreferredto as‘sponge’structure. In n-typeporoussilicontheporesizesareconsiderablylargerthanin p- type and they tend to form straight channels in the direction of the crystallographic axis. In general the structure is macroporous, but the pore formationprocessshowstwophases:atthebeginning(thefirstfewhundredsof nm)theformedlayerisnanoporous,afterthisnanoporouslayer,macroporesare formed. Bothheavily n-and p-dopedsiliconsamplesgiverisetoporousfilmswith amicrostructurecharacterisedbymanylongvoidsrunningperpendiculartothe surface,withoccasionalbranchesandnumeroussmallbudsonthesideofthe main pores. Main columns have in general a diameter of a few tens of nanometers,thatislargerthanthatof p-typePSnanopores,andthesematerials arethereforeclassifiedas“mesoporous”.

Fig. 1.8: XTEM micrographs showing different morphologies obtainablewith p, n, p+, n+21 .

26 1: Porous Silicon

Thedifferenceinporesizebetweenvariousmorphologiescanbeevaluated by the analysis of the gas adsorption isotherms by using the BJH (Barett JoynerHalend)method 22 andtheD.H.(DollimoreHeal)extensionmethod 23 .

Fig. 1.9: Pore size distribution of (A) p+type and (B) ptype poroussiliconobtainedbyBJHmethod 24 .

Almost all literature studies refer to p-type porous silicon, that has been studied more in detail than n-type.AswecanseeinFig.1.9,theporesize distributioninlightlydopedsamplesisremarkablylowerthaninheavilydoped samplesunderthesameanodizationconditions.

1.4.2 Porosity

Porosity is defined as the fraction of void in the porous silicon layer 30 . PorosityisacombinedfunctionofHFconcentrationintheetchingsolutionand ofcurrentdensity.Themeasuredporosityasafunctionofthesetwoparameters isshownfor pand p+typePSinFig.1.10.

27 1: Porous Silicon

Fig. 1.10: Porosity as a function of current density for two differentHFconcentrationfor ptype(a)and p+typePS 30 .

For a given HF concentration, porosity increases with increasing current densityandforafixedcurrentdensitytheporosity decreases with increasing HF concentration. Not all the porosity values are accessible experimentally, sincebelowacriticalporosityvaluethereisnodissolution,whileanupperlevel isimposedbythelowmechanicalstabilityofthehighporouslayers.Thisisan empiricallimitationduetothefactthatthehighstressestowhomthestructure isexposedduringthedryingphasecancausethecrackingofthelayer.Agreat caremustbetakeninthisphaseinordertoobtainlevelsofporosityveryclose to100%.

1.4.3 Crystalline properties

Oneimportantpropertyofporoussiliconisthatitsskeletonmaintainsthe structureofasinglecrystalafteranodization,asshownbyXraytopography studies.Fig.1.11showsthetypicaldiffractionpatternofPS 25 .Whenstudyinga poroussiliconlayeronthecrystallinesiliconsubstrate,twodistinctdiffraction peaksoccurforeachXrayreflection:onefromthecrystallinesiliconandthe otherfromtheporouslayer,locatedatasmallerBraggangle. TheshiftofthePSrelatedBraggpeaktowardssmalleranglesindicatesthat the pore formation affects the silicon lattice by slightly expanding its lattice parameterbyanamountthatdependsonthedetailsoftheporestructure. Moreover,thewidthathalfmaximumoftheporoussiliconpeak(7’’)isnot toodifferentfromthatrelativetocrystallinesilicon(5’’),whichconfirmsthat theporoussiliconskeletonisanearlyperfectcrystaldespitesitsporosity. As far as the elastic propertiesare concerned, PSdiffers from crystalline silicon.Thesepropertieshavebeenstudiedfromthemeasuredstrainsproduced bythelatticemismatchandtheresultsdemonstratethatporoussiliconisless stiff than crystalline silicon, and stiffness decreases with porosity 25 . This property seems to be very useful for using porous silicon as a substrate for molecularbeamepitaxy.Forinstancetheuseofporousmaterialsasasubstrate forepitaxyhasbeensuggestedforafewmaterials 26,27,28 .

28 1: Porous Silicon

Fig.1.11:XRaydiffractionpatternof p+typeporoussiliconlayer onasiliconsubstrate 25 .

1.4.4 Thickness

The thickness of porous silicon layers increases linearly with increasing anodization time 30 , as shown in Fig. 1.12. This means that the formation velocityisconstantandthatthethicknessofasampleisdeterminedonlybythe anodizationtimeoncetheformationparametersarefixed.Typicalvaluesofthe formation velocity are of some tens of nanometers per second, but slow variationsoccursbychangingthesubstratedoping.

29 1: Porous Silicon

Fig.1.12:Thicknessoftheporoussiliconlayersasafunctionof anodizationtimefora) psubstrateandb) p +substrate 30 .

1.4.5 Surface area

Thespecificsurfaceareaofporoussiliconisdefinedastheaccessiblearea ofsolidsurfaceperunitvolumeofmaterial 29 .Itsvaluesareveryhighandcan range from ~100 m2cm 3 for macroporous silicon to ~900 m2cm 3 for nanoporous. Measurements by N 2 adsorption method (BET) have shown that specificsurfacedependsonporosity.Inparticular,beyondavalueofporosity of 50%, specific surface decreases with increasing porosity. In Fig. 1.13 is represented the evolutionof the specific surface oftwo lightly doped ptype samples with different starting porosity (51% and 65%) as a function of porosity 30 .Theporosityofthesampleswasthenvariedbychemicaldissolution. Forallvaluesofporositythetwosampleshavethesamespecificsurface,asa demonstrationthatinthiscasetheporosityistherelevantparameterforspecific surfaceindependentlyonotheranodizationconditions.

30 1: Porous Silicon

Fig.1.13:Specificsurfaceareaasafunctionofporosityfor1m thick ptypePSsampleandstartingporosityof51%(●)and65% (○) 30 .

Aswecanseemaximumofspecificsurfaceisfoundincorrespondenceof 50%ofporosity,andthevalueofthismaximumisatabout900m 2cm 3.The highvaluesofspecificsurfacemakeporoussiliconamaterialsuitableformany application,especiallyinbiotechnology.

1.5 Porous silicon surface modification

AspreparedPSlayersshowagreatreactivityduetotheinstabilityofthe surfacejustafterformationandrapidmodificationofthesurfaceoccursifthe surfaceisnotintentionallypassivated.

1.5.1 Aging

Thesurfaceoffreshporoussilicon(thatisPSshortlyafterformation)is almostcompletelycoveredbyhydridespecies(SiH,SiH 2,andSiH 3groups),as evidencedbyinfraredvibrationalspectroscopy 31 .Hydrogenterminatedporous silicon,whichexhibitsahighlyhydrophobiccharacter, has been shown to be sufficientlystabletoperformstudiesonthismaterialininertatmospheresorin airforshortperiodsoftime.

31 1: Porous Silicon

LongtermuseofasformedPSisprecludedduetoitsgreatpropensityto oxidize.Infact,ithasbeenobserved 5,32 thatthestorageinambientairatroom temperature (aging) causes natural oxidation and contamination by chemical species from the atmosphere, giving rise to a passivated surface of highly variable composition. The resulting surface is mainly covered with surface hydroxylgroups(SiOH)calledsilanolgroupsand,oppositetofreshPS,shows hydrophilicproperties. Fig.1.14showsinfraredtransmissionspectraoffreshandaged ptypePS; wecanseethatchangesconcernsmainlyhydrogenandoxygencontent. AsformedPSshowstheabsorptionbandsassociatedwithvibrationsofthe 1 SiHx (2115, 2090, 906, and 630670 cm ) and, but only for this particular sample, the bands associated with SiF bonds (815 cm 1). During aging, absorptionbandsassociatedwithSiOgroups(10501200and450cm 1)appear whileabsorptionofSiHxgroupsdecrease;alsoSiFbandsdisappears,because theyareprogressivelyreplacedbySiOHbonds.

Fig.1.14:Infraredtransmissionspectraofasformed80%porosity PSlayerandthesameafteragingover92weeksinair 32 .

The aging process is affected by illumination conditions, humidity, temperature and sample porosity and, since it is very difficult to control all storageconditions,thispreventstheobtainmentofidenticallayers.

32 1: Porous Silicon

1.5.2 Dissolution of porous silicon in aqueous solutions

TheinstabilityofPSsiliconsurfaceisincreasedbycontactwithaqueous solutions. It is well known that PS dissolves in alkaline solutions, but more recentpapers 33,34,35showedthatdissolutionalsooccursinaqueoussolutionand undersimulatedphysiologicalconditions.Unfortunately,evenifmanyarticles referstoit,thisprocesshasnotbeenyetextensivelystudied. Andersonetal 34 studiedtheprocessofdissolutionfor ptypePS,observing thatdissolutionisdependentonthelayerporosityanonthepHofthesolution. Fig. 1.15 shows the dissolution kinetics of three porous silicon layers with medium(62%),high(80%)andveryhighporosity(88%)insolutionatpH=7.

Fig. 1.15: Dissolution kinetics of p-type porous silicon layers at pH=7 for Medium (62%) silicon porosity film (white); high (83%) porosity film (grey); and very high (88%) porosity film (hatched) 34 .

The dissolution rate is besides affected by the pH of the solution, in particularitincreasesbyincreasingthepHvalue.Formediumporositysamples (≈60%)thedissolutionprocessisnotappreciableforsolutionhavingpHvalues smallerthan6,whileforpH>6thedissolutioneffectsarealreadyvisibleafter afewhours. Inourcase,weobservedthisphenomenoninacetatebufferatpH4and pH5andinphosphatebufferatpH6,pH7andpH8.

33 1: Porous Silicon

If for some biomedical application (for example drug delivery) material corrosion may even be desirable, for others, such as biosensensing, a stable interfacebetweentheporesandanaqueousenvironmentisnecessary. One strategy to obtain longterm stability is to intentionally oxidize the surfaceundercontrolledconditions 36 .Threeapproachesarepossible: 1.Thermaloxidation 2.Electrochemicaloxidation 3.Chemicaloxidation

1.5.3 Thermal oxidation

Thermaloxidationisthemostcommonlyusedtechniqueforthe ofsiliconinmicroelectronics.Thistechniquehasbeenappliedtotheoxidation ofporoussiliconsincemanydecadesinordertoprovideastabilizationofthe luminescence 41 . It consists in the annealing of porous samples at high temperatureinambientairorundercontrolledO2atmospherefortimeintervals rangingfromafewtensofminutestoafewhours.Ingeneral,thetemperatures usedarewithinthe300°C÷1000°Crange.PSlayers are then partially or totallytransformedinSiO 2:

Si + O2 → SiO2 depending on the formation parameters. The oxidation temperature must not exceed1000°C,unlessapreoxidationstepat300°Cisperformed,sincethe porousstructurecanbemodifiedandtheporescancollapse 41 .Thecontentof oxygenattheendoftheprocessvarieswithsubstrate, oxidation temperature and duration, but it is uniform aver all the surface. In mesoporous material formedonn+typedopedsubstratesandoxidizedat1050°C,morethan90%of theSiisoxidizedwithin30s 37 .

1.5.4 Anodic oxidation

Electrochemicaloxidationofporoussiliconoccursinelectrolytesolutions underanodicpolarization,andisthereforecalled“anodicoxidation”.Generally, the process is carried out at constant current density using a 0.1 M aqueous 38 KNO 3 solution .Sincefreshporoussiliconsurfaceishydrophobic,electrolyte mustbegraduallysubstitutedavoidingtheairexposureofthepores’surface.

34 1: Porous Silicon

Severalarticles 38, 39, 40, 41 reportthatanodicoxidationof pand p+typePS proceedswithslowvariationsofpotentialduringtime,untilacriticalvalueof potentialV 0isreached.Beyondthatcriticalvalueasharpincreaseofpotential occurs, which is interpreted as the breaking of the electrical contact in the porouslayer.Theoxidationprocess,infact,causes the electricalisolation of parts of the Siskeleton that prevents the achievement of a complete layer oxidation.Ingeneral4050%ofthestructureremainsunoxidedattheendofthe process.

Fig. 1.16: Time evolution of the anodization potential during oxidationatconstantcurrentdensityof0.3mAcm2fora1m thickptypesampleof65%ofporosity 41 .

+ ThevalueV0 atwhichtheinterruptionoftheelectriccontactoccursfor p samplesiscomprisesbetween7Vand10Vat5mAcm 238 . Agoodparameterthatasbeenappointedforthedescriptionoftheanodic oxidationisthe exchanged charge duringtheprocess.Iftheoxidationprocessis stoppedbeforethebreakoftheelectriccontact,exchangedchargecanalsobeen chosentomeasuretheanodicoxidationlevelofthesample 41 . The anodic oxidation level ( q) is defined as the ratio between the exchangedchargeatthemomentofoxidationprocessinterruption( Q)andthe maximumexchangedchargeforaprocesswherethecontactbreakingisreached

(Q0):

35 1: Porous Silicon

Q Oxidationlevel = q = Q0

Theexchangedcharge Q0isinafirstapproximationindependentoncurrent density,butdependsonthelayerthickness 42 .Fig.1.17showsthecompleteplots oftheanodizationpotentialasafunctionoftheexchangedchargefor p-typePS samplesoxidizedusingaconstantcurrentdensityof0.1mA/cm 2.Wecansee thatthepotentialV 0atwhichthebreakingoftheelectriccontactoccursisequal to3Vforallsamples,butthetotalexchangedchargeincreaseswhenincreasing thesamplethickness.

Fig.1.17:Anodizationpotentialasafunctionofexchangedcharge forfour ptypesamplesofdifferentthickness:a)0.3 m,b)1 m, c)3 m,d)5 m43 .

Incontrastwiththermaloxidation,completeconversionofPStosilicais not achieved, because electrical isolation of parts of PS skeleton occurs preventing further current flow and thereby oxidation. In mesoporous p+ samples of 65% porosity for example, about 40% of the structure remains unoxidizedbytheendoftheanodizationprocess 40 . SurfacecompositionofanodicallyoxidizedPShasbeenstudied,anditwas showntodependontheoxidationconditions.Aconstant oxygen distribution overthethicknessofthelayerisnotguaranteedandobservationsrevealedthat

36 1: Porous Silicon in some cases oxidation takes place at the bottom of the pores and remains confinedmainlyinthatregion 38 . FTIRanalysisperformedonsamplesshowedthattheoxygenpresentinthe anodicallyoxidizedlayersisnotallincorporatedintheformofSiO 2.

Fig.1.18:FTIRspectraofPSlayersfreshlyprepared(a),oxidized at0.5mAcm 2.

Theporoussiliconsurfaceafteranyoxidationprocess,appearshydrophilic, i.e.,alayerofwaterisabsorbedwhenthesampleisremovedfromanaqueous solution.Thisfactfavourtheintroductionofthesolutionwithinthepores.

1.5.5 Chemical oxidation

AwiderangeofchemicaloxidationofPShavebeendeveloped. Among themwecanremembertheimmersioninH 2O2solutionforatimevaryingfrom 44 45 a few seconds to a few tens of minutes , the immersion in KNO 3 , the immersion in boiling water 46 . In the most cases the oxidation degree of the structureobtainedwithchemicalmethodsisqualitativelyreviewed.Ingeneral howeveronlyapartialoxidationofthestructureisobtainable 47 .

37 1: Porous Silicon

1.5.6 Other techniques for surface stabilization

Besides oxidation, other techniques are available to stabilize PS surface; herewelimitedtoashortoverview,suggestingthearticleofJ.N.Chazavielet al 31 in“PropertiesofporousSilicon”foramorecompletereview:

Capping (epitaxially deposited layers (CoSi 2, SiGe, Si on PS, GaAs etc) organic/polymericlayers,metalliclayers(TiandCosilicides));

Nitridation(rapidthermalannealinginN 2orNH 3); Organic chemical derivatization (stabilization by organic groups, process stoppedatamonolayer). Thesetechniqueshavenotbeenconsideredinthecourseofthisthesis,but theywillbeansubjectofstudyinfuturework.

1.6 Porous silicon as a biomaterial

1.6.1 Biocompatibility and bioactivity

Biocompatibility is the ability of a material to interface with a natural substance without provoking a defence response. The human body typically respondstocontactwithsyntheticmaterialsbydepositingproteinsandcellsat thesurfaceofthematerials.Thiscancauseinfectionandrejectionofdevices manufactured from noncompatible materials. The majority of today medical devicesaremadefrom‘bioinert’materialssuchastitanium,stainlesssteeletc. that not interact with the biological environment and are ‘tolerated’ by the humanbody. Abiomaterialcanbebiocompatibleevenifitis‘bioactive’, that is if it bonds to living tissue. The success of any medical implant depends on the behaviour of cells in the vicinity of the interface between the host and the biomaterialusedinthedevice.Allbiomaterialshavemorphological,chemical andelectricalsurfacecharacteristicsthatinfluencetheresponseofcellstothe implant. The initial event is the adsorption of a layer of protein on to the biomaterial.

38 1: Porous Silicon

Porous silicon can be either a bioactive, a bioinert or a ‘resorbable’ material,dependingonthecharacteristicsofthelayerandontheenvironmentin whichitisinserted 48 . We have already explained that PS completely dissolves in aqueous solutions, in physiological simulated conditions, showing a complete biodegradability 34 .Wehavealsoseenthatmodificationofthesurfacethrough oxidationcantransformthelayerinaninertmaterial.Studiesofthebehaviour ofagedPSinsimulatedhumanplasmashowsrapiddissolution 49 . Cahnametal 50 showedthattherateatwhichPSisdegradedbythebodyis tunablebysurfacechemistry. Studies in vitro involving the immersion of various kinds of material in simulated body fluids show that the immersion of meso and nanoporous siliconwithsuitableporosity,inducesinsomecasestheprecipitationofaform ofhydroxyapatite,thatisthemineralphaseof,onitssurface 51 . Thebioactivitytowardslivingcellularsystemshasalsobeeninvestigated and,untilnow,notoxiceffectshavebeenobservedfromthesiliconstructureor itsdegradationproductsontheadheredcells 52 . Alltheseobservationsdemonstratethepotentialitiesofporoussiliconfor theconstructionof in-vivo implantabledevicesforcontrolledreleaseofdrugs, diagnostics of the bodily functions, replacements of failed bodily processes etc 53 .Atpresent,aparticularkindofnanostructuredsilicon(BioSilicon TM )has already been patented by the company PSiVida mainly for drug delivery applicationswithinthehumanbody.

39 2: Biosensors Chapter 2:

2 Biosensors

2.1 Introduction

Biosensorsareaspecialclassofsensingdeviceswhichuseabiological mechanismtorecogniseatestspeciesinamixture. According to IUPAC definition, a biosensor is precisely defined as a selfcontaining integrated device, capable of providing specific quantitative or semiquantitative analytical information using a biological recognition element which is in contactwithatransductionelement 54 . The biological recognition system is usually a receptor protein, an enzyme,anantibodyetc.withintrinsicselectiveproperties,thatconferhigh selectivitytothebiosensorsincomparisonwithotherchemicalsensors.This property together with compact size, onestep reagentless analysis, sensitivity and reusability, make biosensors very attractive alternatives to conventionalanalysistechniques. Some interesting commercial biosensors are already available for the detection of glucose,lactate, penicillin and urea, but their number is very smallincomparisonwiththeoreticaleffortsintheirdevelopment.

40 2: Biosensors

Inthelastdecadesthepotentialuseofbiosensorinmanyfields(suchas industry, medicine, environmental control etc.) has led to a great deal of research activity, that is characterized by a strong multidisciplinarity, spanningphysics,biochemistry,chemistry,electrochemistry,electronicsand softwareengineering Inordertogetanideaofthedevelopmentthatthisfieldisreaching,we canlookatthetrendofthenumberofarticles,havingbiosensorsassubject, publishedinthelast15years(Fig.2.1).Thedatahavebeenobtainedbya searchontheOviddatabaseusingthekeyword“biosensor”.

1200

1000

800

600

400

200 Number of publications Number 0

0 3 6 9 9 94 9 97 00 03 9 9 0 19 1991 1992 19 1 1995 19 1 1998 1999 2 2001 2002 20 2004 2005

Year

Fig.2.1:Numberofpublicationdealingwithbiosensorsinthe lastfifteenyears.

Nanotechnologyisplayinganalwaysincreasinglyimportantroleinthe developmentofbiosensing 55 .Inparticular,theuseofnanomaterialsappears very advantageous because it allows the introduction of many new signal transduction technologies. Because of their submicron dimensions, nanosensors, nanoprobes and other nanosystems can be constructed. Preferably, nanotechnologybased biosensors should be integrated within tinybiochipswithonboardelectronics,samplehandlingandanalysis.This will greatly enhance functionality, by providing devices that are small, portable,easytouse,lowcost,disposable,andhighly versatile diagnostic instruments. Medicine is one of the fields with the main interest in developing biosensors, because stable and reliable devices would make

41 2: Biosensors possible on-line and in-vivo monitoring of important substances for the livingorganism,suchasmetabolites,hormonesanddrugs.Forinstance,one couldthinktointegratean in-vivo bloodsugarmonitorwithanautomatic insulindeliveryforpatientssufferingfromdiabetes. Theworkpresentedinthisthesisisalsoinsertedinthefieldofresearch on biosensors development. In particular our goal was to couple a nanostructuredmaterial,suchasporoussilicon,withabiologicalelement,an enzyme, in order to fabricate a new biosensor, suitable for quantitative analysisoftriglycerides,thatshouldbecompactandreusable,allowinga significantcostreductionwhilemaintainingahighdetectionefficiency. Inthischapterwewillmakefirstashortgeneraloverviewonbiosensors andthestateofartofporoussiliconapplicationinthisfield;thenwewill describethebasicmechanismsgoverningtheenzymaticcatalysis,tohaveall ingredientsforthedevelopmentofourenzymaticbiosensor.

2.2 Biosensors: generalities

Biosensorsarebasicallymadeupofthreeelements: The selector ,thatisthebiologicalcomponentcreatingtherecognition eventwhenincontactwiththesubstancetobedetected; The transducer , which transforms the interaction between the selector andtheanalyteinaphysicallymeasurablesignal; The detector ,whichallowstoprocessanddisplaythephysicalchemical signalinasuitableform. The biological component may be constituted by a tissue, a microorganism,acellreceptor,anenzyme,anantibody,anucleicacidetc. When it interacts with the substance to be revealed (that is generally dispersed in a mixture) there is a change in some physicochemical parameters associated with the interaction, that can be revealed by the transducer. The detector then provides a useful signal, by working in a physicochemical,optical,electrochemical,thermometric,magneticwayetc. In Table 1 some transduction methods are reported. One of the most usefulisthetransformationofabiochemicalreactionintoanelectricsignal,

42 2: Biosensors currentorpotential,becauseononehanditisrelativelysimpletoconstruct andhandleelectrochemicaldevices,ontheothertheycanbe miniaturized andintegratedinelectronicdevices. Selector Transducer Detector Enzyme Current Amperometricelectrode Antibody Potential Potentiometricelectrode DNA,RNA Surfaceplasmon Laserlightreflectometer Receptor Impedance Conductometer

Table1:Basicelementsofabiosensor:someexamples 56 .

Biosensor are in general classified on the basis of the nature of the transduction method. Therefore one can distinguish electrochemical biosensors, amperometric biosensor, interferometric biosensor and so on. Anotherclassificationcanalsobeenmadeonthebasisofthenatureofthe biologicalelement,sothereareenzymaticbiosensors,immunosensorsetc.

2.2.1 Characterization of the biosensors response

Themainparameterscharacterizingtheperformancesofabiosensorare the selectivity, the sensitivity, the reproducibility, the time response, the stability andthe life time. Some of them depends upon the choice of the biologicalelementusedasselector,othersonthesystemgeometry,otherson theworkingandstorageconditions.Forexample,selectivityistheabilityof adevicetorecogniseaspecificelementinamixture,withoutinterferences inthedeviceperformancesderivingfromadditionofothersubstances.This propertyisstrictlyconnectedwiththeselectivityofthebiologicalelement usedasselector,forexampleenzymaticbiosensorshaveingeneralahigh selectivity, deriving from the selectivity of enzymes. Sensitivity, reproducibilityandtimeresponsearerespectivelydefined,asforothertype ofdetectors,asthesmalleramountofsubstancethatcanbedetected,asthe measureofthescatteringofaseriesofobservationsperformedinthesame conditions,andasthetimenecessarytoreachthe90%oftheresponse;they alldependbothonthebiologicalelement,onthegeometryofthesystemand

43 2: Biosensors on the detection methods. For what concerns stability we can distinguish operationalstabilityandlifetime.Operationalstabilityisthepreservationof thegoodperformancesofthedeviceformultipleorlengthymeasurements, whilethelifetimeisthestorageoroperationaltimeduringwhichthedevice keeps its performances unaltered.These parameters depend mainly on the storagecondition,i.e.dryorwet,temperature,pHetc.

2.3 Enzymatic biosensors

Amongvariouskindofbiosensorswefocusourattentiontotheclassof enzymaticbiosensors,whichincludesthebiosensorthatwedevelopedinthis thesis.Letusmakeabriefrecalloncatalysisandonfundamentalsofthe kineticsofenzymecatalysesreactionatthebasisofourwork.

2.3.1 Catalysis

Thetermcatalysiswascoinedin1836byJonsJacob Berzelius, who observed for the first time that some substances, called catalysts, can acceleratethevelocityofareaction.

Fig.2.2:Reactionprofilesshowingahigherenergybarrierfor anuncatalysedreactionwithrespecttoacatalysedreactions.

44 2: Biosensors

A catalyst is a substance that increases the rate at which a chemical reaction approaches equilibrium without becoming itself permanently involved.Itactsbyloweringthebarrierofactivationofareaction,thatisby loweringtheactivationenergy,asshowninFig.2.2.

2.3.2 Enzymes

Enzymes are biological catalysts. Like all catalysts, they are not themselves consumed in the reaction in which they participate, but are regenerated to take part in multiple cycles. Very slow reactions can be acceleratedbymanyordersofmagnitudebyanappropriateenzyme.Agiven enzymemaybeveryselective,bothinthesubstanceswithwhichitinteracts andinthereactionthatitcatalyzes.Thesubstancesuponwhichanenzyme actsaretraditionallycalled substrates. Mostofenzymesareproteinsandthusaremadeupofaminoacids.In general, there is a specific binding site for capturing the substrate and executingthechemicaltransformationthroughvariouspolarandnonpolar interaction. Asalreadymentioned,animportantpropertyofenzymesisselectivity, that is the ability to discriminate among various kind of substrates. The selectivequalitiesofanenzymearecollectivelyrecognizedasits specificity . Specificity has its basis on the fact that intimate interaction between an enzyme and its substrates occurs through molecular recognition, that is strongly dependent on structural complementarities. Then the products formed by a given enzyme are also very specific and therefore clearly identifiable.

2.3.3 Kinetics of enzyme-catalysed reactions

Thereactionvelocity, v,ofanenzymecatalysedreactiondependsonthe substrate concentration, [S]. Experimental observations show that at low substrate concentrations [S], visproportionalto[S].However, v does not increaseproportionallyas[S]increases,butinsteadbeginstoleveloff.At high [S], v becomes virtually independent of [S] and approaches asymptoticallyamaximum.Thevalueof vatthislimitiscalledV MAX .This behaviourisasaturationeffect:when v showsnoincreaseeventhough[S]is

45 2: Biosensors increased, the system is saturated with substrate. Such plots are called substrate saturation curves (Fig. 2.3). The physical interpretation is that everyenzymemoleculeinthereactionmixturehasitssubstratebindingsite occupiedbyS.

Fig. 2.3: Substrate saturation curve for an enzymecatalysed reaction.Theamountofenzymeisconstant,andthevelocityof thereactionisdeterminedatvarious substrateconcentrations. The reaction rate, v, as a function of [S] is described by a rectangular hyperbola. At very high [S], v = V MAX , that is v becomes independent of [S]. The H 2O molecule provides a roughguidetoscale.Thesubstrateisboundattheactivesiteof theenzyme.

2.3.4 The Michaelis- Menten theory

The general theory to describe the enzyme kinetics was proposes in 1913byLenoreMichaelisandMaudL.Menten. Theirtheorywasbasedontheassumption,proposedbyBrownin1902, that the enzyme, E, and its substrate, S, associate reversibly to form an enzymesubstratecomplex,ES:

k1 → E + S ES ← k −1

46 2: Biosensors

TheproductPisformedinasecondstepwhenESbreaksdowntoyield E+P:

k1 → k2 E + S ES → E + P ← k −1 After the reaction the enzyme is then free to interact with another moleculeofsubstrate.Therateconstants k1, k1, k2,describetherateateach stepinthereaction. ThemodelofMichaelisandMentenwasrefinedandextendedin1925 byBriggsandHaldane,whointroducedthe steady-state assumption. They assumed the concentration of the enzymesubstrate complex ES quickly reachesaconstantvalueinsuchadynamicsystem.Thatis,ESisformedas rapidly as it disappears by a dissociation to regenerate E + S, or by the reactiontoformE+P: d[ES] = 0 dt One other simplification advantageous to study enzyme kinetics is to observe only initial velocity, v 0. Since enzymes accelerate the rate of the reversereactionaswellastheforwardreaction,itwouldbehelpfultoignore anybackreactionbywhichE+PmightformES.Thevelocityofthisback reactionwouldbegivenby v= k2[E][P].However,ifweobserveonlythe initialvelocityforthereactionimmediatelyafterEandSaremixedinthe absenceofP,therateofanybackreactionisnegligiblebecauseitsratewill beproportionalto[P],and[P]isessentially0. Giventheseassumptions,theexpressionwhichcorrelates the reaction velocitytothesubstrateconcentrationisgivenbythesocalled Michaelis- Menten equation :

V MAX [S ] v 0 = K M + [S ] where, VMAX = k2 ⋅[E0 ],with[ E0]equaltotheenzymeconcentration,and

(k −2 + k2 ) K M = . k1

47 2: Biosensors

The MichaelisMenten equation states that the rate of an enzyme catalysedreaction, v,atanymomentisdeterminedbytwoconstants, KMand

VMAX ,andtheconcentrationofsubstrateatthatmoment.

KMiscalledMichaelisMentenconstantandisveryimportantbecause itcorrespondstothesubstrateconcentrationatwhichthereactionvelocityis ahalfof V MAX . TheMichaelisMentenequationperfectlyfitstheplotinFig.2.3.

2.4 Enzyme immobilization

Onepossiblewaytoimprovebiosensingperformancesistoimmobilize the enzyme on a support.The main advantage in employing immobilized catalysts isthatthey arenot mixed with otherreagents and can be easily recovered after use, for example by filtration if the support is a powder. Moreover, it has been demonstrated that immobilization can improve the stabilityofthecatalyst 57,58. Boththechoiceofthesupportmaterialandtheimmobilizationmethod canaffecttheperformancesofabiosensor.Thepotentialadvantagesoffered by the use of supports with a large developed surface, has suggested the employmentofporousmaterials,whichallowstheimmobilizationoflarger amounts of enzyme molecules with respect to conventional supports. At present,sensorindustryusesmaterialssuchasporousglassesandpolymers assupportsfortherealizationofbiosensingdevices. Therearefiveprincipalmethodstoimmobilizeanenzymeonasupport: physicaladsorption,covalentbinding,entrapment,encapsulation and cross linking(Fig.2.4).Thedetaileddescriptionofallthesemethodsgoesbeyond thescopeofthisthesis.Wediscusshereonlycovalentbondingandphysical adsorption. Enzymes are usually immobilized on solid matrices by physical adsorption or by formation of covalent bonds. The choice of one method ratherthantheotherdependsondifferentfactors.Enzymesandproteinsin general,arelowstablemolecules.Theycanlosetheirbiologicalfunctionif subjectedtoharshtreatments,suchasextremepHvalues,hightemperatures,

48 2: Biosensors andpresenceofhighlyreactivechemicalagents.Covalentbondingproduces astablebiocatalyst,butsometimesalotoftheinitialactivityislostduring theimmobilizationprocess.Thishappenssincetheenzymemoleculecanbe distorted during the formation of the covalent bonds with the chemically modifiedsupportsurface.

Fig.2.4:Mostusedmethodsofimmobilization

Physicaladsorptionisinsteadamoregentlemethodthatisobtainedjust impregnatingtheporoussupportwiththeenzymesolution.Obviouslyonly physical interactions (electrostatic interactions, dipoledipole, hydrogen bonding,dipoledipoleinduced,hydrophobicinteractionsetc.)arepresentin this case, but they are usually strong enough to bind the enzyme to the supportsurfacewithoutleachingduringoperation.Thismethodhasalsothe advantagethattheenzymemaylikelyberemovedwhenitlosesthecatalytic activity allowing the reuse of the immobilization matrix. In fact the

49 2: Biosensors desorptionofproteinfromthesupportcanbeinducedbyaddingasurfactant tothesolution 59 . Physicaladsorptionistheimmobilizationmethodthatweusedinthis work,whileothertechniquesareatthemomentunderinvestigation. Another reason for the use of the physical adsorption method is that chemicalmodificationofthesurfacecanreducethematrixporediameter. Thus,iftheyareofthesameorderofmagnitudeofthesizeoftheenzyme molecules as in this case it may happen that after chemical immobilizationtheporesturnouttobeoccluded.Thisfactwouldnotallow thediffusionofthesubstrateinsidetheporechannelswherethebiocatalyst is located. In this case only external bounded enzyme molecules would work,leadingtoasignificantlossofcatalyticefficiency 60 .

2.4.1 State of art of PS application in biosensing

Porous silicon has attracted the interest of the scientific world for possible applications in biosensing since 1995, when its abilitity in gas sensing was observed 61 . The first biosensor having porous silicon as substrateformoleculesimmobilization(inthatcasea penicillase enzyme) appearedin1997 62 .Afterthisdateanincreasingattentionhasbeenreserved tothismaterial. Infactitpossesscharacteristicssuitableforbiosensingapplications,that areitshighsurfacetovolumeratio(asmuchas900m 2cm 3),thepossibility tomodifythesurfaceafterformationtoadaptthesampletotheapplication, andthefactthatitcanbeeasilyintegratedintheusualsilicontechnology. Poroussiliconhasbeenusedasanopticalinterferometrictransducerfor detecting small organic molecules, DNA, and proteins at pico and femtomolaranalyteconcentrations 63,64 . Fig. 2.5 shows on the left a scheme of a PS based interferometric biosensor for DNA recognition, realized by V. S.Y. Lin et al. (1997) 63 . Sensingmeasurementsconsistinevaluatingthedifferencesinthereflectance spectraduetotheanalyzedevent.Theinterferencespectrumofwhitelight reflected at the top and bottom of a PSi layer depends on the optical thickness (product of the refractive index n and thickness L) of the film

50 2: Biosensors accordingtothefollowingrelation mλ = 2nL ,where misthespectralorder andλisthewavelengthoflight. Ontherighttheresultsobtainedbyusingthisbiosensorareshown.A given DNA sequence was immobilized on porous silicon pores, and the devicewasthenexposedtootherDNAsequences.ThebindingofaDNA strand to its complementary, immobilized on the PSi substrate, causes a changeintherefractive indexofthelayerthatisdetectedthroughashiftin theinterferencepattern.Ifthesolutiondoesnotcontainthecomplementary sequences,spectrabeforeandaftertheanalyteexposurearesuperimposable.

Fig.2.5:SchemeofaPSbasedinterferometricbiosensor(left); interferometricreflectancespectraofaDNAmodifiedPSlayer before and after hibrydization (right). In spectrum A, hybridizationtakesplaceinpresenceofacomplementaryDNA sequences respect to that immobilized on the pores; in spectrumBispresentedthecaseofanoncomplementaryDNA sequence 63 .

Microcavityresonatorsmadeofporoussiliconhavealsobeenusedin biosensensing 65 . These resonators possess the characteristics of line 51 2: Biosensors narrowing which allows a better sensitivity in detection. Chan et al. fabricated a DNA biosensor based on a porous silicon microcavity structure 66 . The microcavity structure was highly sensitive to substances introduced inthe pores because any slight change in the effective optical thicknessmodifieditsreflectivityspectrum,causingaspectralshiftinthe interferencepeaks. Potentiometric biosensors based on porous silicon have been described 67 . The enzymes penicillinase and lipase were separately used to detectpenicillin 68 andtriglycerides 69,70 byexploitingthehydrolysisreaction oftriglyceridesinwater.Theyobservedthatthecapacitance–voltage(C–V) curvesofaoxidizedporoussiliconelectrolytesystemisaffectedbythepH oftheelectrolyte,andsincethehydrolysisreactionoftriglyceridesinwater leads to changes in the pH of the solution, by using as electrolyte an emulsion of tryglycerides and enzymes, they could measure the concentrationoftriglycerides. ThemainlimitfromwhichthebiosensorofReddyetalsuffers,isthat the enzyme used to catalyze the hydrolysis reaction is dispersed in the analyteandcannotberecoveredafterthemeasurements.

2.5 Interest in the realization of a new PS-based biosensor for triglycerides analysis

Triglyceridesaretriestersoffattyacidsandglycerol.Theyareimportant moleculesfromtheclinicalpointofview.Triglyceridescanbeassumedwith food (exogenous) or synthesized (endogenous) by living organisms. Endogenous triglycerides are formed in adipose tissues and in the liver, mainly starting from carbohydrates. Exogenous triglycerides, instead, are hydrolyzed in their constituents during the digestive process, and re synthesized in the cells of intestinal villus. From there, triglycerides are transportedbythebloodflowintheentireorganism,wheretheyareusedfor thevariousmetabolicprocessesanddepositedintheadiposetissue.Aswell as it happens for hypercholesterolemy, a high level of triglycerides enhances the exposure to the infarct of the myocardium and to

52 2: Biosensors atherosclerosis.Thus,inordertofindouttheriskfactor,itisimportantto quantitatively know the blood concentration of triglycerides. Triglycerides arecontainedinmanyfoods,thustheirquantificationisalsoimportantinthe fieldoffoodindustries. The great importance of triglycerides in everyday life justifies the interest for the development of more efficient detection methods, besides those already existing, for their quantitative analysis. For example, in the fieldofmedicalanalysis,triglyceridesconcentrationiscommonlymeasured bymeansoffourconsecutiveenzymereactions.Achromogeniccompound is produced leading to a modification of the absorbance value at a fixed wavelength, that is proportional to the triglycerides content in the sample (LambertBeer equation). This assay is rapid (about 10 min), but it is negativelyaffectedbyinterferingreactions.Moreover,enzymescanbeused only once, since it is practically impossible to recover them from the sampledemulsion. Allexistingsensingdevicesfortriglyceridesshowamainlimitationthat istheyarenotreusableinthesensethattheydoesnotallowtherecovering oftheenzymeafteruse.Itisclearthatthedevelopmentofanewdevicethat isreusableandcompactispotentiallyveryinterestingsinceitwillallowa significantlycostreduction. Inourworkwewillexploitthesamereactioninvolvedinthebiosensing deviceofReddyatal.,butwewillovercomethelossoftheenzymeafterthe analysisbyimmobilizingtheenzymemolecules,beforethemeasurements, intheporoussiliconsurface. Oneotherdifferenceisthatweusedpotentiometricmeasurementsasa transductiontechnique,thatisourmeasurementsareperformedincondition of zero current flowing, without any external polarization. This is an advantagebecauseitallowstostudythereactionwithoutinfluencesderiving fromtheexternalappliedvoltage.

53 3: Experimental Methods Chapter 3:

3 ExperimentalMethods

3.1 Introduction

Inpreviouschapterswedescribedtheformationmechanismofporous silicon, its main properties and the stateof artin the field of biosensors. Now, before entering in the details of the realization of our triglycerides biosensor, we will give on overview of the techniques, instruments and experimentalsetupsweused.

3.2 Preparation of wafers

Aswealreadymentionedin§1.3,theformationofporoussiliconcan becarriedoutinseveralways.However,onlytheelectrochemical etching givesahighlevelofreproducibility. First steps before PS formation are the cleavage and cleaning of crystallinesiliconwafers. Ingeneral,crystallinesiliconformicroelectronicapplicationisputon marketincircularwafers,withatypicalthicknessinthe400mto1mm

54 3: Experimental Methods rangeandadiameterof2”to8”.Sinceourcellhasbeenrealisedtoprepare circular samples of 1cm diameter, the first step is to adapt the wafer’s dimensiontothoseoftheanodizationcell,thatistocuttheoriginalwafer into1,5×1,5cmsquarechips.Thecleavageiscarriedoutbyengravingthe surfacefollowingthecrystallographicaxisusingadiamondtippedpen,and byexertingaweakpressurewithfingersuntilthewafercleaves. After cleavage the chips are rinsed in absolute and distilled water, in order to eliminate impurities from the surface, and dried under nitrogenflow.

3.3 Formation and anodic oxidation

3.3.1 Formation

The basic equipment to fabricate Porous Silicon consists in an anodizationcellandahighstabilitypotentiostat. InFig.3.1isshownacrosssectionalviewoftheanodizationcellused toformPS.

Fig.3.1:Schemeoftheanodizationcell.

The body of the cell is made of grey PVC, a highly acidresistant material,andthesiliconwaferservesasanode.Astainlesssteelcontactis madeonthebacksideofthewaferandthelatterissealedsothatonlythe

55 3: Experimental Methods frontsideofthewaferisexposedtothesolution,inanareaof0,9cm 2.The cathode is a grid plunged in the HF solution and is made of platinum, anotheracidresistantmaterial. Boththecellandtheplatinumgridhaveacylindricalgeometryinorder toassureauniformelectricfieldonthewafer. The cell is kept at room temperature and in the dark, to avoid photogenerationofholes. Theplatinumgridandthemetalcontactareconnectedrespectivelyto the negative and positive terminals ofa generator, which supplies current flowduringanodization.WeusedaPotentiostat/GalvanostatMod.273from EG&G Princeton Applied Research, which ensures great stability both in galvanostatandinpotentiostatmodes. Apreanodizationtreatmenthasbeenperformedinordertoremovethe nativeoxideonthesurfaceofcrystallinesilicon wafer: wafers have been immersedinHFsolutioninthedarkfor10minutesbeforeanodization. After formation samples are accurately rinsed in deionized water to eliminatetheresidualHFsolution.

3.3.2 Anodic oxidation

Anodicoxidationisobtainedunderanodicpolarizationofthesamplein anaqueouselectrolyte. Theprocessisperformedintheanodizationcelljustaftertherinsingof thesampleindeionizedH 2O.Waterisrapidlyreplacedbya0.1MKNO 3 aqueoussolution,takingcarenottoexposetheporouslayertoairinorderto ensureagoodwettingofthehydrophobicsample.Theprocessisperformed usingaconstantcurrentdensity.

56 3: Experimental Methods

3.4 Characterization of PS layers

3.4.1 Porosity

Porosity is one of the most important parameters which characterises PS.Theporosityisdefinedasthefractionofvoidwithinthevolumeofthe poroussiliconlayer. Itcanbesimplydeterminedbygravimetricmethod,sinceitisgivenby thefollowingequation: m − m P(%) = 1 2 m1 − m3 wherem1isthemassofthewaferbeforeanodization,m2isthemassjust afteranodizationandm3isthemassofthesampleafterthedissolutionof thewholePSlayerina0.1MNaOHaqueoussolution. ForweightmeasurementswehaveusedaMettlerAJ100balancewitha sensitivityof10 4g.

3.4.2 Thickness

The sample thickness has been determined by stepheights measurements after the dissolution of porous layer in NaOH 0.1 M. The instrumentweusedforsuchmeasurementswasaprofilometerTencorP10. Itrecordsverticalsurfaceprofilesbymeansofscanningacrossthesamplea mechanical stylus connected to a piezoelectric transducer. Thickness is determinedasthedifferenceinlevelbetweenthenonetchedportionofthe waferandthebottomofthesample.

3.4.3 Pore size distribution and specific area

Theknowledgeoftheporesizedistributionisalsoabasicrequirement whendealingwithporousmaterials,especiallywhentheyareemployedin application areas such sensing. In fact pore size determines much of the adsorption properties of a material and is therefore a parameter of great relevanceintheprocessofimmobilizationofmolecules.

57 3: Experimental Methods

The IUPAC guidelines make a classification of pores in three ranges accordingtoitsdiameters: Porewidth Typeofpore (nm) ≤2 Micro 250 Meso >50 Macro

Table2:IUPACclassificationofporesize.

Pores with diameter of the order of the nanometer are often caller “nanopores”. Unfortunatelythemeasurementofporesizesisnotasimpletask,and differentmethodscanbeuseddependingonthesizerangeinvolved. In case of mesoporous structures (that is the type of morphology expected for n+-type porous silicon, as we will see later) the most widely usedmethodisbasedontheanalysisofadsorptionisothermsofgasesatlow temperature, which present particular characteristics, with respect to non porousmaterials. Thistechnique,isanondestructivemethodwhichconsistsinmakinga gas, generally N 2, adsorb to the surface of the sample at a constant temperature,lowerthanthecriticaltemperatureoftheusedgas(460Kfor

N2).Theamountofadsorbedgasdependsonthepressure, on the specific surfaceandontheinteractionwhichareestablishedbetweengasmolecules andsamplesurface. Gas adsorption isotherms are constructed by recording the amount of adsorbedgasattheincreasingofthepressureuntilapressurecorresponding tothesaturationequilibriumpressureofthegasattheworkingtemperature is reached. The cycle is then completed by reducing pressure in order to makethegasdesorb. Fig.3.2showsatypicaladsorptiondesorptionisothermobtainedfora mesoporousPSsampleformedonp +typesilicon.

58 3: Experimental Methods

Fig.3.2:Schematicrepresentationofthetypicaladsorptionisothermof nitrogenat77Kbyap+typeporoussiliconlayer 72 . In presence of mesopores, isotherms have a particular shape characterized by a hysteresis, that is the desorption curve is not superimposedontheadsorptionone. The first part of the isotherm, up to a relative pressure of 0.4, correspondstotheadsorptionofnitrogenontheporoussurface;thisregime isveryimportantbecauseitallowstoobtainthevalueofthespecificsurface byusingthestandardBETmethod(BrunauerEmmettTeller) 71 .TheBET modeldescribestheadsorptiondynamics,correlatingthetotalvolumeofthe adsorbedgas(V)withthepressureatwhichtheadsorptiontakesplace(P):

V  1  =   Vm 1− p / p0  whereV misthesaturationvolumewithamonolayerofadsorbedgasandp0 isthesaturationpressureofthegas.Oncethevalue of V m is known, the 71 samplepores’surfacecanbecalculatedfromtheN 2moleculesize . Theincreaseintherelativepressurebeyond0.4(Fig.3.2)resultsina sharpincreaseoftheadsorbedvolume.Inthisregionthephysicaladsorption ofgasesbythesurfacerapidlyincreasesasaconsequenceofthe

59 3: Experimental Methods condensationofgasmoleculesinthepores,whichtakesplaceatvaluesof relative pressure where the smallest pores begin to be filled 72 . At higher relativepressures,whenallporesarefilled,thecurvereachesaplateau.The volumeofcondensedliquidcorrespondingtotheamountofgasadsorbedat theplateauisequaltothevoidvolumeinthematerialandgivesinformation aboutporosity. Decreasing the relative pressure and letting the condensed gas evaporate,wecanobservethatthedesorptioncurveisshiftedwithrespectto theadsorptionandthereisahysteresisloop. The pore dimension can be determined either from desorption or adsorptionbranchbyusingtheBJH(BarettJoynerHalend)method 22 andits extensionD.H.(DollimoreHeal)method 23 .

3.5 Study of enzyme immobilization on PS

3.5.1 The enzyme: lipase from Candida rugosa

Lipases(triacylglycerolacylhydrolases,EC3.1.1.3)areenzymesthat innaturehydrolyzetriglycerides.Theyareamongthemostusedenzymesin food industries and for biotechnological applications 73 because of their ability to catalyze esterification and transesterification reactions 74 . Lipases forbiotechnologicalapplicationsareofmicrobialorigin;inparticularthey comefrombacteria,yeastandfungi 75 .Amongtheseverallipasescommonly usedinbiocatalysis,onlyinafewcasesthestructurehasbeenresolvedby Xraydiffraction.Thisknowledgeisimportanttoexplore the coupling of this biological catalyst with an inorganic matrix, as porous silicon, to fabricateabiosensingnanodeviceforbiomedicalorfoodapplications. Theenzymethatwehaveusedfortheimmobilizationonporoussilicon istheLipaseproducedby Candida rugosa fermentation,anenzymethathas beeninvestigatedbymeanofXraysdiffractionandwhosestructureisthen well known. Candida rugosa lipaseisaglobularproteinwithamolecular weight of about 64 KDa and a length of about 5 nanometers. Two conformations (closed and open) of Candida rugosa lipase have been determined 76 . 60 3: Experimental Methods

Fig. 3.3 shows the open structure of Candida rugosa lipase as determinedbyGrochulskyetal 77 .

Fig. 3.3: Structure of Candida rugosa lipase. Lysine (pK=10.72) is coloured in red, Arginine (pK=12.48) is coloured in yellow and Histidine (pK = 6.04) is coloured in green.

Thefundamentalelementofthestructureistheactivesite,inwhichis locatedthe“catalytictriad”,agroupofthreeaminoacids,responsibleforthe catalyticaction.ThesurfacechargeoftheproteindependsonpH,andin particularif: pH<pI(pI:isoelectricpoint)thenumberof positive chargesishigher thanthatofnegativecharges. pH>pIthenumberof negative chargesishigherthanthatofpositive charges. pH=pIthesamenumberofpositiveandnegativechargesarepresent. Themainspecificationprovidedbytheproducerofthelipaseusedin thiswork,the“AmanoEnzymeEuropeL.T.D.”,are:

61 3: Experimental Methods

Lipaseactivity:Notlessthan30.000units/g(Oneunitistheamountof enzymethatreleases1moleoffattyacidperminuteatpH=7.0) Molecularweight:64.000Da Isoelectricpoint:4.30 InactivationConditions:85°Cfor10minutes. It is well known hattheactivity of lipases depends on pH. Also the differentbuffers used to obtain a certainpH may affect the activity (Fig. 3.4):

Fig.3.4:CurveofRelativeactivityasafunctionofpH.Values areobtainedwiththreedifferentbuffersolutions,thatjustifies thedifferentvaluesforpH=778 .

The enzyme shows a maximum activity for pH=7, which rapidly decreases towards pH=10. Measurements were made using the same techniqueandthreedifferenttypeofbuffersolution.Asamatteroffact,the activityisweaklydependentonthecompositionofthebuffersolutionused forthemeasurements. Anotherparameterthataffecttheenzymeactivityisthetemperature,as wecanseeinFig.3.5. The enzyme activity is maximum for temperature comprises between 2030°C,whileitisinhibitedbyaugmentingtemperatureabove40°C.

62 3: Experimental Methods

Fig. 3.5: Curve of the relative activity as a function of temperature.Theactivityhasamaximumforatemperatureof 40to50°Canddecreasesuntiltheenzymeinactivationbeyond 70°C 78 .

3.5.2 Enzymatic activity measurements

Theamountofenzymewhichisadsorbedontothesupport during an immobilization process is impossible to be determined in absolute terms (e.g.grams),asitspurityisoftenlowandapartmaybeinaninactive,or partiallyactive,state.Forthisreason,enzymesareusuallycharacterizedin termsofactivityratherthanmass. The determination of the enzymatic activity, which has been very important for the studies of enzyme immobilization of lipase on porous silicon,hasbeencarriedoutbythepHStatmethode 79 ,using718StatTitrino pHmeterfromMetrohm(Herisau,Switzerland). The method of activity determination is based on lipasecathalyzed hydrolysisoftriglyceridesinwateremulsion(Fig.3.6). Aswecansee,inwater,lipasecatalyzestriglyceridehydrolysistogive glycerol and fatty acids. A common nomenclature used in biochemistry givesthenameof“substrate”tothesubstancewhosereactioniscatalysedby anenzyme.Inthiscasewecansaythatthetriglycerideisthesubstratefor thelipase.

63 3: Experimental Methods

Fig.3.6:Schemeofthehydrolysisreactionoftriglyceridesin water.

Totestlipaseactivity,weusedasmalltriglyceride,thetributyrin,thatin water hydrolyses forming glycerol and butyric acid. Tributyrin was homogenized in water thanks to an emulsification reagent, prepared by dissolvinggumarabic(6.0g),glycerol(54ml),NaCl(1.79g)andKH 2PO 4 (0.041g)indistilledwater(40ml).Thissubstrateemulsioncontained3ml oftributyrin,10mlofemulsificationreagentand47mlofdistilledwaterand washomogenizedbyanUltraTurraxhomogeniser. The product of the hydrolysis of tributyrin is butyric acid, whose presencelowersthepHoftheemulsion.Theenzymaticactivityisdefinedas themolesoftransformedsubstrateorformedproductperminute. ThepHstatmethodconsistsinmaintainingfixedandequalto7.00the pHoftheemulsionduringhydrolysis,bycontinuoustitrationwith10mM NaOHsolution.Theneutralizationreactionis:

+ CH 3CH 2CH 2COOH+NaOH →CH 3CH 2CH 2COO +Na +H 2O thatisonemoleofNaOHexactlyneutralisesonemoleofbutyricacid. ThenumberofmolesofNaOHperminuteaddedtotheemulsionto keepconstantthepHvaluethenequalstheenzymeactivity. Duringmeasurements,theemulsionwaskeptundercontinuousstirring and at temperature of 25°C to guarantee homogeneity and optimum emulsiondiffusionwithinthePSpores.

64 3: Experimental Methods

In Fig. 3.7 is represented a scheme of the device for activity measurements:

Fig.3.7:SchemeofthepHSTAT.

Particular care must be taken in the determination of the emulsion volumes used for the activity determination. In fact, since the results are givenintermsofaddedNaOHmoles,anyerrorinthe emulsion volume determinationwilldirectlyaffectthenumberofmolesadded.Thevolume ofsubstrateemulsion,preparedaccordingtotherecipedescribedin§3.5.2, wasfixedat3ml.Thevolumeofthesamplingvolumeswithdrawnfromthe immobilization solution for the measurement of the time evolution of its activitywasfixedat100L. Duringthisthesis,thepHstatmethodhasbeenusedformeasurements of the lipase activity in the immobilization solution, by introducing fixed quantities of enzymatic solution in the tributyrin emulsion, and for the measurementsoftheactivityoflipaseimmobilizedintothepores(thatisfor the characterization of porous silicon as a matrix for enzyme immobilization)byintroducingtheloadedsampledirectlyintheemulsion (seeFig.6.1).

65 3: Experimental Methods

3.6 Potentiometric measurements

Once verified that PS is a good nanostructured material for enzyme immobilization, the next step was the realization of the biosensor for trygliceridesanalysis. We chose to build our biosensor using a configuration for potentiometric measurements. In electrochemistry, potentiometry is a methodwhereelectrodesareusedtomeasurevoltageswhicharerelatedto chemicalinformation.The electrode potentialis measured without current flow, that is in open circuit configuration, and is called Open Circuit Potential(OCP). TheOCPsignalwerecordduringexperimentsisthenthetimeevolution ofthePSelectrodepotentialinducedbythecompositionmodificationofthe triglyceridesemulsion.Wearethenabletotransformtheinformationabout theamountofthehydrolyzedtriglyceridesmoleculesintoanelectricsignal. Asamatteroffact,thequantityofinterestisnottheabsolutevalueofthe OCP but only its variations ∆OCP: the absolute value depends on many parameters, and can be different for slightly different experimental conditions, while its variations are just related to the composition modifications in the emulsion. We will use then the ∆OCP to check the emulsionpHvariations(see§1.2.3). Another advantage of using OCP as parameter to monitor hydrolysis reaction Is that we avoid electrode polarizations that may affect in a unknownwaythenormaldevelopmentofthereaction.

66 3: Experimental Methods

Fig. 3.8: Scheme of the electrolytic cell used for OCP measurements.

The electrochemical measurements consist in measurements of the potentialofagivenelectrodewithrespecttoanotherone,whosepotentialis keptconstant.Duetothepotentialdropacrossthecell,however,thereisthe needofathird(reference)electrodetopreciselycontrolthepotentialofthe secondelectrode.Thisthreeelectrodeconfigurationingeneralneededonly forelectrochemicalmeasurementswherethereisanetcurrentflowbetween theelectrodes,whileforpotentiometricmeasurementsthethirdelectrodeis generallynotneeded.However,inourcasewenoticedthatthesignalnoise wassignificantlyreducedwhenusingthethreeelectrodeconfiguration,and wechosethentousethisconfigurationforourmeasurements. TheelectrolyticcellisthesameusedforPSformation,adaptedforthe threeelectrodesconfiguration.Theexperimentalsetupiscomposedbythe electrolyticcell,representedinFig.3.8,andbyapotentiostatusedasahigh impedancevoltmeter.ThePSwaferactasworkingelectrode.

67 4: n+-type Porous Silicon as a matrix for enzyme immobilization Chapter 4:

4 Preparationandcharacterizationofn+type PorousSiliconasamatrixforenzyme immobilization

4.1 Introduction

Theaimofthisworkwastherealizationofapotentiometricbiocatalytic sensorfortriglycerides,withthebiologicalsensingelementintegratedinthe deviceinordertoguaranteecompactness,easeofuseandreusability. The great importance of triglycerides in everyday life justifies the interest for the development of more efficient detection methods, besides thosealreadyexisting,fortheirquantitativeanalysis. Inpreviouschapterswehaveexplainedtheadvantages deriving from enzyme immobilization on solid supports, and especially on porous materials. Porous silicon is a material with great potentiality for this kind of applications because it combines the advantages deriving from the great surfaceareawiththepossibilitytointegratethe device in microelectronic circuits.

68 4: n+-type Porous Silicon as a matrix for enzyme immobilization

Inthischapterwewilldescribeallthestepsinvolvedinthepreparation and characterization of porous silicon enzymatic biochips. We will first describethepreparationandcharacterizationofPSlayersandtheprocessof enzymeimmobilizationinthepores’surface.Thenwe will show that the porous silicon matrix is a good support for enzyme immobilization, by comparingitscompetitiveperformancestothoseofstandardsupports. The characterization and optimization of the porous siliconenzyme system will be performed by using standard techniques of analytical chemistry used in enzymatic activity measurements. The results will be comparedtothoseobtainedwithotherkindsofsupports.Inthesixthchapter wewilldiscussthepropertiesofPSbiochipsaselectrodesforpotentiometric biosensors.

4.2 Choice of the formation parameters

Aswehaveexplainedin§1.4,thepropertiesofporoussiliconlayers (morphology,poresize,surfacearea,porosity,thickness)aredependenton the type and level of the crystalline silicon substrate doping and on the anodizationparameters.Theinfluenceoftheseparametersontheproperties oftheformedlayerwereanalysedinordertoobtainsampleswelladaptedto ourrequirements. First of all, the samples must have a reasonably high porosity and a large developed surface to allow the immobilizationofalargeamountof enzyme molecules into the pores. Second, the porous layers must keep a goodmechanicalstability.Thisisaveryimportantpoint,sinceononehand weneedseveralstepsbeforetheimmobilizationprocessiscomplete,and,on theotherhand,oneofourgoalistofabricateareusablebiosensor,whichis impossiblewithoutagoodmechanicalstability.

4.2.1 Crystalline silicon wafer

The first requirement is to choose a matrix whose pores are large enoughtoallowtheintroductionoftheenzymewithinthepores.

69 4: n+-type Porous Silicon as a matrix for enzyme immobilization

Lipaseisa5nmsizemolecule,thereforetheporesizemustbeofthe orderofafewtensofnanometersatleast. This condition limits the possibilities in the choice of the crystalline siliconusedforanodization,because,aswesawin§1.4.1,thesizeandthe shapeoftheporesdependontheconcentrationandtypeofthesiliconwafer dopant:wecanformsampleswithporesizerangingfromnanopores(pore diameterofafewnanometers)tomacropores(porediameterinthe200nm 20mrange). Among variouskindofsiliconwafers, ptypeSihasbeenexcludeda prioribecauseitgivesrisetolayerswithporediameterofafewnanometers, toonarrowforlipaseintroduction.With ntype siliconispossibletorealize macroporous samples which are suitable for lipase immobilization. However,thefinallayerhasnotahomogeneousmorphologyindepth,since the first few hundreds of nanometers of the sample are nanoporous, impedingthentheintroductionoftheenzymeinthemacropores. Both n+type and p+type siliconproducesampleswithamorphology characterized by long void channels with a diameter of few tens of nanometers,largeenoughforlipaseintroduction. Betweenthem,wechose n+typePS,becauseofapreviousknowledge ofthematerialdevelopedduringotherworksofthisgroup 81 . We used Czochralski 80 grown Si (100) n+type (3<ρ<7⋅10 3cm) waferswithathicknessof500m,suppliedbySiltronixCompany.

4.2.2 Porosity

Oncechosenthetypeofsiliconwafertouseforanodization,weneedto selectthebestanodizationconditions. Forbiosensensingapplicationsitisveryimportanttohavesampleswith alargedevelopedsurfaceinordertoallowimmobilizationoflargeamount of enzyme. In §1.4.5 we saw that the specific surface is a function of porosityforagivenmorphology.Theexactdependenceofspecificsurface on porosity for n + type PS is not known, However, it is a reasonable assumptionthat,inanalogy withthe ptypecase,thespecificsurfacewill reachitsmaximumvalueforofabout50%andwillbedecrease fordifferentvalues.Therefore,wedecidedtouseamaterialwithamedium

70 4: n+-type Porous Silicon as a matrix for enzyme immobilization porosity (about 5060%), to have large developed surface for the immobilization of the enzyme while maintaining a good mechanical stability,aswewillseein§4.2.4 Theporositylevelisacombinedfunctionofanodizationcurrentdensity and HF concentration. The influence of these parameters on porosity has beenstudiedfor n+typesamplesinapreviouswork 81 ,andresultsareshown inFig.4.1:

Fig.4.1:Porosityof n+typePSasafunctionofcurrentdensity fordifferentHFconcentrations 81 .

For a given HF concentration the porosity increases with increasing currentdensity,whileforfixedcurrentdensitythe porosity decrease with increasingHFconcentration. With fixed current density and HF concentration, porosity increases withthicknessandporositygradientsindepthcanoccur.Thisisaneffectof the extra chemical dissolution of PS layer in HF, but is negligible for thicknesssmallerthan100m. AswecanseefromgraphinFig.4.1,forHFconcentrationsof25%and 35%thereareonlyveryslowvariationsofporositywithcurrentdensity,and even for current densities of the order of 500 mA/cm 2 we can fabricate samples with a maximum porosity of55%. On the other hand, using HF

71 4: n+-type Porous Silicon as a matrix for enzyme immobilization concentrations of 10% we cannot obtain samples with a porosity degree smaller than 80% and therefore the resulting layers do not show a good mechanical stability. In many cases samples are so brittle that the stress involved in the drying process after anodization is sufficient for the collapsingofthestructure(seeparagraph4.2.4). The HF concentration which makes accessible the largest range of porosityis15%,becausebyvaryingcurrentdensitiesfromafewmA/cm 2to 500mA/cm 2,wecanobtainporositiesinthe50%to90%range. Tofabricatesampleswithaporosityofabout5060%,weused15%HF solutionsandacurrentdensityof50mAcm 2. Thereproducibilityofthesamples’porosity,resultedtobeensuredwith anerrorlowerthat5%. In order to ensure a good wettability of the surface and complete diffusionoftheHFsolutionintothepores,asubstancecapabletoreducethe surfacetensionisalwaysaddedtothesolution.Wechoseethanolsinceitisa standardchoiceforPSformation 30 .Theaddedtensioactivesubstancedoes not have a direct part in the dissolution process, but its role is only to improveaqueoussolutiondiffusion. InsummarythecompositionofouretchingsolutionisHF,Ethanoland waterH 2Ointhe15%:70%:15%proportionrespectively.

4.2.3 Thickness

Thethicknessofthesampleswasfixedat50m.Thisvalueresultedto be the good compromise between the requirement of a large available surfaceforenzymeimmobilization,ofagoodstabilityofthestructureandof ahomogeneousmorphologyindepth.Infact,incaseofverythicksamples the diffusion of liquid solutions in the whole sample’s depth could be hindered by capillary forces causing a gradual impoverishment of the solutioninF ionsthatwillleadtoainhomogeneousmorphology. ForafixedHFconcentrationinthesolutionandafixedcurrentdensity, thethicknessisalinearfunctionoftheanodizationtime.Fig.4.2showsthe plot 81 ofthesample’sthicknessasafunctionoftheanodizationtime,fora 15%HFsolutionandacurrentdensityof50mAcm 2.

72 4: n+-type Porous Silicon as a matrix for enzyme immobilization

9 15% HF 8

7 m

6

5

4 Thickness,

3

2 Vgrowth = 0.045 m/s

1 20 40 60 80 100 120 140 160 180 200 Anodization time, s

Fig.4.2:Samplethicknessversusanodizationtimefor n+type PS,15%HFsolutionandcurrentdensityof50mAcm 281 .

Theplotshowalinearbehaviour,whoseslopeisthe dissolution rate, equalto0.045m/s.Tofabricate50mthicksamplestheanodizationtime wasfixedat1110s. The optimization of the thickness with respect to the immobilization processhasbeenlefttofuturestudies.

4.2.4 Drying Process

Thedryingofporoussiliconfilmsaftertherinsingstepattheendofthe electrochemical etching, is a crucial step in the fabrication process. In general, drying is a problem for samples of high porosity and thickness higher than a critical value 82 . Above this critical value, in fact, when the rinsingwaterevaporatefromporesinthedryingprocess,acrackingofthe structureisobserved.InFig.4.3isshownanopticalmicroscopyimageof thesurfaceofhighlyporoussampleafterdryinginair.

73 4: n+-type Porous Silicon as a matrix for enzyme immobilization

Fig.4.3:Opticalmicroscopeimageofthesurfaceofahighly porositysampleafterdryinginair.

Macroscopicsignsofthefilmcrackingareclearlyvisible:portionsof sample are detached from the wafer and manifestly deformed as a consequenceofstressforces.Theoriginofthisphenomenonisduetothe large capillary pressure exerted on the porous structure during liquid evaporation,thatincaseofparticularlyfragilesamplesissufficienttobreak thestructure.Capillarystresscanbereducedbyreplacingwaterbyadrying liquidwithlowersurfacetension,forexamplepentane 83 . Inourcase,thegoodmechanicalstabilityagainstdrying,evenwithout introducing such substances, confirmed the goodness of our choice of a mediumporosityandamoderatethickness(50m).Thisresultisimportant forourapplicationsincewehadtotakecaretonotcontaminatethematerial with substances thatcould compromise the functioning of the enzyme we wanttoadsorbontothepores’internalsurface.

4.3 Characterization of PS layers

4.3.1 XRHRD

ThefirstanalysisofporoussiliconsampleswasperformedbyusingX raydiffractiontechnique.Fig.4.4showsaXRDspectrumofa50mthick

74 4: n+-type Porous Silicon as a matrix for enzyme immobilization sample,realizedbyusing D8 discover Bruker-AXS diffractometerlocatedin “LIMINA”laboratoriesofCagliariUniversity.

4 16.0x10

4 14.5x10

4 13.0x10

4 11.5x10

4 10.0x10

4 8.5x10

4 7.0x10

4 5.5x10 Intensity [counters/s] Intensity 4 4.0x10

4 2.5x10 c-Si 4 1.0x10 PSi

34.04 34.08 34.12 34.16 34.20 34.24 34.28 Scattering angle2 θ [deg]

Fig. 4.4: n+type PS HRXD spectrum. It consists of two contributions, the crystalline silicon peak and the peak attributedtotheexpandedlatticeofporoussilicon

TheXraydiffractionspectrashowtwodistinctcontributions:one,with higher intensity and at larger scattering angles, is attributed to crystalline siliconsubstrate,whiletheother,shiftedtowardslowerscatteringangles,is attributed to the PS layer. This peak in fact indicates the presence of a structure with a larger lattice parameter but with the characteristics of a nearlyperfectcrystal.Theresultisinagreementwiththose 25 obtainedfor p- typeporous siliconlayers. SimilarlytothecaseofotherkindsofPSlayers,eveninthecaseof n+ typetheelectrochemicaletchingleadstoastructurewiththecharacteristics ofaperfectcrystal,butwithalatticeparameterslightlydifferentfromthatof thecrystallinesiliconsubstrateusedfortheanodization.

4.3.2 SEM-FEG

Theporousnatureofthelayerthatunderwenttheelectrochemicaletch has been confirmed by Field Effect Gun Scanning Electron Microscopy

75 4: n+-type Porous Silicon as a matrix for enzyme immobilization

(SEMFEG)studies,byusingaZeissSUltra55microscopelocatedatthe CMTCINP laboratory at the Institut National Polytechnique de Grenoble (France). This instrument allows to obtain images at very high resolution comparedtoconventionalscanningelectronmicroscopes. AswecanseeinFig.4.5(a),whereafrontviewimageofthesurfaceof thesampleisshown,SEMFEGisabletoresolvethefinestructureofthe surfaceandrevealsthepresenceofhomogenouslydistributedporeswithan approximate size of the order of ten nanometers, compatible with those expectedfora n+-type sample. Fig. 4.5 (b)showsa cross sectional view of thesample. It is clearly visible the porous layer microstructure consisting of many long void channels propagating in the direction perpendicular to the surface, with numeroussidebranches.Thismorphologyisthetypicalstructureobserved in n+-type PS 21 .Theinterfacebetweentheporousfilmandthecrystalline siliconisplanar,withonlylocalimperfectiononascalecomparabletothe sizeofpores.Thispropertyisaconsequenceoftheformationmechanism, which consists in a plane dissolution front propagating in a direction perpendicular to the surface. The average pore diameter appears in good agreementwithwhatexpectedforamesoporouslayer(§1.4.1).

76 4: n+-type Porous Silicon as a matrix for enzyme immobilization

Fig. 4.5: SEMFEG images of n +type porous silicon layer. Frontview(a)andcrosssection(b).

77 4: n+-type Porous Silicon as a matrix for enzyme immobilization

4.3.3 Characterization by BET measurements

The porous nature of our samples has also been investigated by the methodofadsorptionisothermsofgasesatlowtemperature,thatisoneof the most common techniques used to obtain a comprehensive characterizationofporousmaterialswithrespecttothespecificsurfacearea, poresizedistributionandporosity. Measurements were done making use of a SORPTOMATIC 1990 porosimeter by Thermoquest at the Industrial Chemistry laboratory of CagliariUniversity.Thisdeviceisequippedofasoftwarefortheisotherm analysiswhichcalculatesinformationaboutporosity,developedsurfaceand poredimensionusingBETandBJHmethods 71,22 . Fig.4.6showstheadsorption/desorptionisothermsobtainedat77Kfor a50mthickporoussiliconsample:

500

400 -1 g 3

, cm 300 ads V 200

100

0.0 0.2 0.4 0.6 0.8 1.0 0 P/P

Fig.4.6:Nitrogenadsorption(○)anddesorption(●)isotherms at77Kobtainedfora n+typePSsample.

The shape of the curve agrees with the typical trends expected for mesoporousmaterials,thatisforporesofdiameterinthe2–50nmrange

(§3.4.3):inthelowrelativepressureregime,up to 0.7, N 2 molecules are

78 4: n+-type Porous Silicon as a matrix for enzyme immobilization gradually adsorbed by the surface andthe volume of adsorbed gas varies smoothly with pressure. The increase of the relative pressure causes the phenomenonofcapillarycondensationofgasinthepores,whichisclearly distinguishableintheisothermbythesharpincreaseoftheadsorbedvolume. Thedistributionoftheporesizeinthematerialhasbeencalculatedfrom theisothermsofFig.4.6usingtheD.H.method 23 .Theresultsareshownin Fig. 4.7, where the volume occupied by pores per gram of material is presentedasafunctionoftheporediameter,andaresummarizedinTable3.

Fig.4.7:Poresizedistributionin n+typePSsamplecalculated byDHmethod.

Pore Pore BETSpecific Typeofpores Porediameter volume volume Surface (Å) (cm³g 1) (%) (m²g 1) micropores 0÷20 0,0058 0,7 mesopores 20÷500 0,8341 95,2 361 macropores 500÷1000 0,0364 4,1

Table3:Poresizedistributionandspecificsurfacecalculated fromadsorptionisothermsbyDHmethod.

79 4: n+-type Porous Silicon as a matrix for enzyme immobilization

AswecanseeintheTable3,thefractionofthevoid volume in the material due to micropores, that is pores with diameter inferior of 2 nm, representsonly0.7%ofthetotal. Thelargestpartoftheporevolume,about95%,isrelatedtoporeswith diametersrangingfrom2to50nm,confirmingthemesoporousnatureof n+- type porous silicon. The pore distribution in this size range is not homogeneous:itisinfactcharacterizedbyanarrowpeakatabout3.7nm, andabroaderbandrangingfrom5to20nm,withamaximumatabout10 nm. This results must be interpreted in the light of the information on morphologyobtainedbySEMFEGanalysis(§4.3.2).Thisstudiesrevealed amicrostructureconstitutedofvoidchannelsrunninginthedirectionnormal tothesurfacewithmanybranchesonthesideofeachpore.Thediameterof void columns was estimated of about few tens of nanometers, while the diameterofbrancheswasestimatedtobenarrowerbyafactoroftenwith respecttothatofthemainpores. Consideringthisinformation,wecanattributethelargebandbetween5 and20nmtothemaincolumnsandthenarrowpeakat3.7nmtothethin branchesonthepores’side. Theremaining4.1%isrepresentedbymacroporesand correspondsin thecurvetothelargelowbandbeyond30nm. Aslipasedimensionisabout5nanometers,thisstudydemonstratethat, inprinciple,thevastmajorityofporesisavailableforlipaseimmobilization. Fromthevaluesofpores’volumewecandeducethe porosity of the sample. Density of bulk silicon is equal to 2.33 g cm 3, and its specific volume is thenequalto0.4292 cm 3g1.Thespecificvolumefoundforour samples is instead 0.8763 cm 3g1. The porosity is given by the ratio of specificvolumeofbulksilicontothespecificvolumeofporoussiliconand iscalculatedtobeequalto49%,withanerrorof5%.Thisvalueisingood agreementwiththevalueofporosityof5060%thatwehadevaluatedfor oursamplefromgravimetricstudy.. ThevalueofthespecificsurfacecalculatedusingtheB.E.Tequationis 361m 2g1,thatmustbetransformedintom 2cm 3tobecomparedwithvalues showninliterature.Withaspecificvolumeof0.8763cm 3g1thecalculated specificsurfaceisequalto412m 2cm 3.

80 4: n+-type Porous Silicon as a matrix for enzyme immobilization

4.4 Summary: formation and characterization

Theanodizationconditionsandthecharacteristicsofallsamplesused for enzyme immobilization, if not otherwise specified, are resumed as follows: Anodization conditions: Wafertype= n+(100);3<ρ<7 ⋅10 3cm

SolutionComposition=15%HF,15%H 2O,70%Ethanol FormationCurrentDensity=50mAcm 2 Illumination=No Morphology : Mesoporouscolumnarstructure. Porediameter=0.7%with0<d<2nm,95.2%with2<d<50nm,4.1% with50<d<100nm.

81 5: PS surface stabilization through oxidation

Chapter 5:

5 PSsurfacestabilizationthroughoxidation

5.1 Introduction

Oneofthemajorproblemsthatwehadtosolvetorealizethebiosensor hasbeenthedissolutionofporoussiliconinaqueoussolutions. In paragraph 1.5.1 we said that ‘fresh’ porous silicon, that is PS just afterformation,ischaracterizedbyahydrophobicsurfacealmostcompletely covered by SiHx groups. This hydrogenpassivated surface exhibits good stabilityoveraperiodofhours,butitundergoesasignificantmodification forlongerstorageinambientair.Thismodificationconsistsinapassivation ofthesurfacethroughnaturaloxidationand/orsaturationofdanglingbonds withspeciescomingfromatmosphere. This surface is not at all stable in contact aqueous solution, and a processofdissolutionofthelayerisobserved.Thisphenomenonhasbeen reportedbyotherauthors(§1.5.2)for ptypePS,butaspecifictechniqueto avoid it has not been discussed. Anderson et al. 34 showed that the dissolutionratedependsonpHandonporosity.Mediumporositysamples (50÷60%)showevidenceofdissolutionatpH≥6afteronly24hours. Wealsofoundthatthedissolutionprocessissignificantlyacceleratedby lightexcitation:justafewminutesinasolutionatpH=7andunderlaser

82 5: Porous Silicon surface stabilization through oxidation powersofafewtensofmW,wereenoughtoobserveadramaticsamples’ degradation. The fact that aqueous solutions at physiological pH values, that is aroundpH=7,arethesametimetheidealenvironmentforenzymesactivity butalsoapHinwhichPSmatrixdissolves,implythatweneedtofindaway to stabilize the pore’s surface. As a matter of fact, even if a single measurement would be still possible in this situation, our goal is the realizationofareusablesensingdevice,andtheprocessofdissolutionwould prevent this result, because as silicon dissolves the enzyme is lost in the solution. Amongthepossiblepassivationtechniques,wechosetooxidizethePS surface, since SiO 2 is a very stable molecule and the oxide surface layer wouldbeabletoprotectthesamplefromdissolution. Moreover,oxidationoffersthefurtheradvantagethatittransformsthe PSsurfacefromhydrophobictohydrophilic,whichismoreadaptedforthe diffusionoftheaqueoussolutionintothepores. We will describe first of all our results for PS oxidation using two simple techniques whose application has been proposed in literature 29 : chemicaloxidationbyimmersionofthesampleinH 2O2solutions,anddry thermaloxidationinO 2atmosphere.

5.2 Chemical and thermal oxidation methods

5.2.1 Chemical oxidation in H 2O2 solution Afirstattempttooxidizethesurfacewasmadeinapreviouswork 84 by immersingthesamplefor15minutesinaaqueoussolutionH 2O2 dilutedat 3%.Thistreatmentleadstoaveryblandoxidation,thatmoreoverwasfound toreducethemechanicalstabilityofthesample. Fig.5.1showsascanningelectronmicroscopeimageofthesurfaceofa samplewith55%ofporosityand20mthickafterH 2O2treatment.Wecan seethatthesampleisclearlydamagedintheprocess.

83 5: Porous Silicon surface stabilization through oxidation

Fig.5.1:Scanningelectronmicroscopeimageofthesurfaceof asamplewith55%ofporosityand20mofthickness.Images arerelativetotwodifferentmagnifications(1200Xand2500X respectively) 84 .

ChemicaloxidationthroughH 2O2resultedthenaninadequatetechnique to stabilize PS sample before molecules immobilization, therefore other methodswereinvestigated.

5.2.2 Thermal Oxidation

Thermal oxidation was performed by annealing the PS samples at a temperatureof450°CundercontrolledunderO 2flow(1L/min). Wepreparedfournominallyidenticalsamples,thatwereoxidizedusing theparametersdescribedabovefordurationrangingfrom30minutesto2 hours,withtimestepsof30minutesfromonesampletothenextonesto studytheeffectofthelengthoftheoxidationprocessontheoxidationlevel. Attheendoftheprocessallsamplesshowedagood morphology and no evidenceofstructuraldamage.Theoxidationlevelswewereabletoobtain willbediscussedindetailin§5.4.1.

84 5: Porous Silicon surface stabilization through oxidation

5.3 Anodic oxidation of porous silicon

5.3.1 Process description

Electrochemical oxidation of PS is achieved in aqueous electrolyte prepared with deionized water with the addition of salts, under anodic polarizationconditions. Anodicoxidationisperformedjustaftertherinsingphaseinwaterthat immediately follows the formation process.Waterisreplacedbya0.1M

KNO 3aqueoussolutionandaconstantcurrentdensityisapplied.Itisvery importantthatintheprocessofchangingthesolutions in contact with the porouslayercareistakentoavoidexposingthesamples to the air, since freshPSishighlyhydrophobicandiftheporeswallwerepartiallydried,the

KNO 3solutionwouldnotbeabletothoroughlypervadethepores,leadingto anonuniformoxidelayer. Theanodizationprocess,whichwerecallisperformed by applying a constantcurrent,canbemonitoredbyrecordingtheevolutionoftheapplied potential with time. Fig. 5.2 shows a plot of the applied potential as a functionoftimeduringtheanodizationofa50mthicksampleusinga currentdensityof6.67mAcm 2.

10 Q0

8

6 Potential,V 4

2

0 2000 4000 6000 8000 Time, s

Fig.5.2:Evolutionoftheanodizationpotentialduringanodic oxidation of a 50 mthick sample and 60% of porosity, in KNO 3 0.1 M aqueous solution at constant current density of 6.67mAcm 2.

85 5: Porous Silicon surface stabilization through oxidation

In analogy with literature’s results for the ptype nanoporous PS (§1.5.4),intheoxidationprocesstworegimesaredistinguishable:first,the oxidation proceeds with relatively slow variations of the potential during time,untilaparticularvalueofpotentialV 0,inourcaseabout6V,atwhicha sharpincreaseofthepotentialisobserved.Thissuddenincreaseofthecurve slope is interpreted as an increase in resistivity due the formation of the insulatingoxidelayer,whicheventuallyleadstothebreakingoftheelectric contact on the porous layer. In our case, the process is interrupted at a potentialof10Vbyourexperimentalsetuplimitation,butsincetheslopeof thecurveinthisregionisincreasingveryrapidly,wecansupposethatthe realinterruptionoftheelectriccontactwouldhavereasonablyoccurredafter a 12 minutes, a time negligible with respect to the total duration of the oxidationprocess.Asamatteroffact,whatreallycountsisnottheapplied potentialvaluebutthetimeduringwhichtheconstantcurrentflowsintothe circuit. The fact that the real interruption of the electrical contact would happenjust12minutesafterweactuallystoptheexperimentmeansthatthe fraction of Si atoms that would be further oxidized by prolonging the experimentwouldbeirrelevantwithrespecttothetotaloxidizedSiatoms. Forthisreasontheinterruptionat10Vcanbeassumedastherealbreaking oftheelectricalcontact.

Thetotalexchangedchargeatthemomentofcontactbreaking, Q0,can be simply calculated as the product of the current and the anodization duration:

−2 2 Q0 = J[Acm ]× Surface[cm ]×Time[s] Aswearedealingwithananoporouselectrode,wheretheelectrodeand theelectrolytearetwointerpenetratingphases,theanodicoxidationmustbe furthercharacterizedinordertocheckiftheoxidationprocesssignificantly differsfromastandardelectrochemicalprocessduetotheporousnatureof theelectrode. Inthenextdiscussionwewillcallthesampleoxidized up to 10V as ‘fully’oxidized.

86 5: Porous Silicon surface stabilization through oxidation

5.3.2 Dependence on current density

First of all we want to know if the current density was a critical parameter,orifitsinfluenceontheprocesswasnegligible.Fiveidentical50 mthick samples were formed and oxidized at five different current densities of 3.33, 6.67, 10, 13.33 and 16.67 mA cm 2. The electrolytic solutionusedwas0.1MKNO 3.Fig.5.3showstheoxidationcurvesrelative tothesefivesamples:

12

-2 3.33 mA cm -2 10 6.67 mA cm 10.00 mA cm -2 -2 8 13.34 mA cm 16.67 mA cm -2 -2 22.22 mA cm 6

Potential, V 4

2

0 0 4000 8000 12000 16000

Time, s

Fig. 5.3: Anodization curves for 50 m n+type PS samples realizedatdifferentcurrentdensities.

Oxidation curves have qualitatively the same shape for all current densities. The sharp bending of all curves occurs at the same potential, around 6V, and they only differ for the duration of the regime of slow potential variation, that is for the time that is necessary to complete the oxidation process: the process duration increases by decreasing current density.Fig.5.4showstheplotoftheoxidationtimeasafunctionofcurrent density:

87 5: Porous Silicon surface stabilization through oxidation

20000

15000

10000 Time,s

5000

0 5 10 15 20 -2 Current Density, mA cm

Fig. 5.4: Plot of oxidation process duration as a function of current density for 50 mthick samples oxidized in 0.1 M KNO 3solutionatdifferentcurrentdensities.

Wefoundthatexperimentaldataareinverygoodagreementwithafit byahyperbolicfunctionoftheform: const y − y = 0 x Thisimpliesthattheproductofcurrentandtimedurationisconstantfor allsamplesand,beingthisproductequaltothetotalexchangedcharge,that

Q0 is constant forallcurrentdensities: Q = Current[A]×Time[s] = (52 ± )1 C 0 Thisisan important result becauseit demonstrates that the oxidation processbehavesasanormalelectrochemicalprocess:increasingthecurrent densitytherateofchargetransferishigher,buttheexchangedchargeisthe same.Itimpliesthatintheprocessthechargediffusionisnotlimitedbythe facttheelectrodeisnanostructured. In§5.5wewillseethattheaverageoxygencontent in samplesfully oxidizedusingdifferentcurrentdensitiesisthesame.

88 5: Porous Silicon surface stabilization through oxidation

5.3.3 Dependence on the sample thickness

Oneimportantproblemthatemergesfromliteratureisthatinthecaseof ptypeporoussilicon,theoxidationprocessisinterpretedasstartingonlyat thepores’bottomandremainingconfinedinthatregion(§1.5.4).Ifthiswas also the case for our morphology, that would imply that it would be impossibletoanodicallyoxidizeoursamples.Infact,inourcasethepores structureisnothomogeneousinalldirectionsbuthasaclearasymmetrydue tothecolumnarstructureofthepores.Iftheoxidationprocesswaslimitedto thepores’bottomthatwouldimplythattheoxidationprocesswouldmainly affect the region near the porous Si – crystalline Si interface. As a consequence,therewouldbealargepartofthepores’surfacethat,stillnot oxidized,wouldbesubjecttodissolutioninaqueoussolution. Inordertostudythisphenomenon,weinvestigatedtheinfluenceofthe samplethicknessontheoxidationcurves.Iftheoxidationoccursonlyatthe pores’ bottom, the oxidation process would be almost the same for all samples’thicknesses,andtheplotsofvoltagevs. time would overlap. By converse,iftheoxidationprocessishomogeneousinthesamples’thickness, theplotswoulddiffer,andtheoxidationtypewouldbeproportionaltothe samples’thickness. Wepreparedsixsampleswiththicknessof1,5,10,20,30and50m respectivelyandoneachofthemweperformedtheoxidationprocessuntil breakingofelectriccontact,atacurrentdensityof6.67mAcm 2. Theoxidationcurvesrelativetosamplesofdifferentthicknessarenot thesame,buttheoxidationprocessdurationincreasesproportionallytothe samplethickness(Fig.5.5).Thisisanimportantresultbecauseitisaproof ofthefactthattheprocessinvolvesallstructureandnotonlyonthebottom ofporesasobservedinthecaseofnanoporousSi.Besides,italsoimplies thateveniftheporeshavediameteroffewtensofnanometers,therearenot capillaryforcesthatpreventthediffusionoftheelectrolyteintothepores.

89 5: Porous Silicon surface stabilization through oxidation

1 m 10 5 m 10 m 20 m 8 30 m 50 m 6

4 Potential, V

2

0 0 2000 4000 6000 8000 Time, s

Fig. 5.5: Dependence of anodization curves on the sample thickness.

5.3.4 Realization of samples with different oxidation levels

Anodic oxidation allows the preparation of samples with different oxidationlevel,bysimplyinterruptingtheprocessatgiventimes. Currentdensitywasfixedat6.67mAcm 2,andtheoxidationprocess wasstoppedtheappliedpotentialreachedthevaluesof2,4,6,8and10V (see Fig. 5.2). The oxidation level q of these samples can be calculated accordingtoequation: Q q = Q0 where Qisthechargeexchangeduptothemomentatwhichtheprocess is stopped and can be calculated as the product of the duration of the oxidationprocessandtheappliedcurrent.NB:thetimeconsideredhereis thetimenecessaryforthepotentialtoreachtheprefixedvaluesof2,4,6,8, 10V.

90 5: Porous Silicon surface stabilization through oxidation

20000 2 V 4 V 15000 6 V 8 V 10 V

10000 Time, s Time,

5000

0 4 6 8 10 12 14 16 18 20 Current, mA

Fig. 5.6: Duration time as a function of current density for oxidationprocessesstoppedatprefixedvaluesofpotentialof 2V,4V,6V,8Vand10V.Currentdensityof6.67mAcm 2.

Theexchangedcharge Qisobtainedfromthehyperbolicfitofoxidation timecurrentcurvesinFig.5.6accordingtoequation: Q y − A = x where xisthecurrentappliedtothesystem,Aisaconstantand y isthe oxidationtime. Thecorrespondencebetweenexchangedcharge,potentialandoxidation levelofthesamplesisshowninTable4.

V Q q = Q/ Q0 2V (17±2)C 0.33±0.05 4V (35±1)C 0.67±0.05 6V (47±1)C 0.90±0.05 8V (49±2)C 0.94±0.07 10V (52±2)C 1.00±0.04

Table4:correspondencebetweenexchangedcharge,potential anddifferentoxidationlevelofthesamples.

91 5: Porous Silicon surface stabilization through oxidation

5.4 Determination of the oxygen content by means of EDS measurements

The content of oxygen in porous silicon samples after different oxidation treatments was evaluated by Energy Dispersive Spectroscopy (EDS)orXraymicroanalysis. EDS is an analytical technique for the determination of the chemical compositionofsolidsamples,thinlayersorparticlesunderinvestigationin scanningelectronmicroscopes.ItallowstorecordaspectrumoftheXray intensityasafunctionoftheXrayenergy,thatshowspeaksrisingabovea background composed primarily of scattered Xrays. The energies correspondingtothesepeaksaretheenergiesofshellbindingenergiesofthe chemicalelementsinthesample,whichareunambiguouslyidentifiedsince those energies are different for each chemical element. The relative abundanceofthedifferentchemicalspeciesinthesamplesiscalculatedbya suitablesoftwarebytakingintoaccountthepropercrosssection. Thermallyandanodicallyoxidizedsampleswereanalysed.Inthetwo casestheEDSspectrashowtwopeaks:theonewithhigherintensity,centred at 1.7 KeV, is relative to crystalline silicon, that constitutes the porous siliconskeleton.Theother,centredat0.5KeV,isrelativetooxygen,present atporoussiliconsurfaceasaneffectoftheoxidation.

5.4.1 Thermally oxidized samples

Fig.5.7showstheEDSspectraoffoursamplesthermallyoxidizedfor 30min,1h,1h30minand2hours.Measurementwhereperformedonthe topofthesurface. Spectra of different samples are nearly perfectly superimposed indicatingthatthermaloxidationdoesnotallowahighdegreeoftuningof theoxidationlevel.

92 5: Porous Silicon surface stabilization through oxidation

3 Silicon 25x10 30 min 1 hour 1hours 30 min 3 20x10 2 hours

3 15x10 Arb. Units 3 10x10

3 5x10 Oxygen

3 0x10 0.5 1.0 1.5 2.0 2.5 Energy, KeV

Fig. 5.7: EDS spectrum of 50mthick samples thermally oxidized at 450 °C, under O 2 flow (1L/min) at different oxidation times. Measurement performed on the top of the surface

Fig. 5.8 shows the plot of the oxygen content as a function of the oxidationtimeforthesamplesanalyzed.

50 Thermal Oxidation T= 450 °C O2 flux= 1l/min 40

30

20 Oxygencontent, % atoms in

10 30 60 90 120 Thermal oxidation time, min

Fig.5.8:Oxygencontent(expressedasatomicpercent)offour 50mthicksamplesthermallyoxidizedat450°C,underO 2 fluxof1l/min,for30min,1h,1h30minand2hrespectively.

93 5: Porous Silicon surface stabilization through oxidation

Thisimageclearlyshowsthatevenwhenvaryingtheoxidationtimesin awiderange,samplesdonotshowappreciabledifferencesincomposition, buttheoxygencontentwithrespecttothetotalatoms is comprised in the 25%30% range. A dependence on the oxidation time is not apparent, indicatingthatinthermaloxidationwecannotcontroltheoxidationlevel.

5.4.2 Dependence of oxygen content on the anodic oxidation level

Energy Dispersive Spectroscopy has also been used to evaluate the oxygencontentinsampleswithdifferentanodicoxidation level. Both top surfaceandcrosssectionmeasurementshavebeenperformed. Fig. 5.9 shows the EDS spectrum of the top of four PS samples anodicallyoxidizedatdifferentlevels.

q = 0.33 q = 0.67 Silicon 4 q = 0.90 3x10 q = 0.94 q = 1.00

4 2x10 Arb. Units

4 1x10

Oxygen

0.0 0.5 1.0 1.5 2.0 2.5 Energy, KeV

Fig. 5.9: EDS spectra of 50 m thick samples anodically oxidizedatdifferentoxidationlevels.Measurementperformed onthetopofthesurface

Fig. 5.10 presents a enlargement of the oxygen peak, that allows to distinguish differences between samples at different oxidation levels. Measurementwhereperformedonthetopofthesamples’ssurface.

94 5: Porous Silicon surface stabilization through oxidation

3 3.0x10 q = 0.33 Oxygen q = 0.67 3 2.5x10 q = 0.90 q = 0.94 q = 1.00 3 2.0x10

3 1.5x10 Arb.Units 3 1.0x10

3 0.5x10

0.2 0.4 0.6 0.8 1.0 Energy, KeV

Fig. 5.10: Enlargement of the oxygen peak in EDS spectra showing the different oxygen content in samples anodically oxidizedatdifferentlevels.Theoxygencontentincreaseswith theoxidationlevel.Measurementperformedonthetopofthe surface

InFig.5.11isshowntheplotofoxygencontentasafunctionofthe oxidationlevel.

50 Anodic Oxidation -2 I=6.67 mA cm 40

30

20 Oxygen % content, in atoms

10 0.4 0.6 0.8 1.0 q

Fig.5.11:Oxygencontent(%)inPSlayerasafunctionofthe anodicoxidationlevel.

95 5: Porous Silicon surface stabilization through oxidation

IfwecompareFig.5.11withFig.5.8,wecanseethatanodicoxidation allowsawiderrangeofvariationoftheoxygencontentinthestructurewith respecttothermaloxidation. In the next chapter, where we will describe the immobilization of the enzymeonPS,wewillseethatsurfaceoxidationlevelaffectstheprocessof physical adsorption of lipase; the possibility to tune in a simple way the oxygencontentisthereforeusefulforthecharacterizationoftheprocess. AnotherinformationthatweobtainedfromtheEDSstudyisthatevenif onafirstapproximationbasistheoxidationprocessisindependentonthe appliedcurrentdensity(see§5.3.2),thesamplesoxidizedusinghighcurrent values are relatively inhomogeneous, as compared to those oxidized with lowercurrentdensities.Onthebasisoftheseresults, a current density of 6.67mAcm 2hasbeenusedforallsamples.Infact,wehaveobservedthat ononehandforhighvalueofcurrentdensity(>9mAcm 2)therearesome inhomogeneitiesintheoxygencontentonthelayer’sthickness,ontheother handadensityof3.33mAcm 2woulddemandoxidationtimesexcessively long. A current density of 6.67 mAcm 2 was then a good compromise betweenhighhomogeneityandreasonabledurationsoftheprocess.

5.5 New information about n +-PS morphology

The study of the oxidation process has allowed us to find new information about n +type PS morphology. In particular results obtained when characterizating oxidation respect to sample thickness and sample depthrevealedpropertiescompatiblewithaninhomogeneityofmorphology indepth. InFig.5.12wereportedthetimedurationasafunctionofthesample thickness and in Fig. 5.13 the oxygen content in the cross section of the samples,measuredbyEDStechnique.

96 5: Porous Silicon surface stabilization through oxidation

8000

6000

4000 Time, s

2000

0 0 10 20 30 40 50 Thickness, m

Fig. 5.12: Anodicxidation process duration as a function of samplethickness.

The linear fit is performed imposing the crossing of the origin (thickness=0,time=0)bythefittingline.FromFig.5.12itispossibletosee thatalldatapointsforsamplesthinnerthanabout10mlieabovethefitting lineindicatingthatthebehaviourislinearonlyforhigherthicknesses.

70

10 m 60

50

40 Oxigen content,% in atoms 30 0 10 20 30 40 Depth, m

Fig.5.13:Oxigencontent(%)asafunctionofdepthfora50 mthick sample anodicallyoxidized at 6.67 mA cm 3 and an oxidationlevel q=1.Crosssectionmeasurements.

97 5: Porous Silicon surface stabilization through oxidation

The oxygen content measurements by EDS performed in the cross sectionofthesamples(Fig.5.13)clearlyexcludeanydiffusionproblemof theoxidizingsolutionsincetheoxygencontentishigherinthefirst10m, inagreementwithhigheroxidationtimes,butisconstantintherestofthe depth. Thisfactindicatesthattheoxidationofthefirst10moftheporous layer below the surface requires more electrons than the porous layer underneath.Sincethereisnoreasonfortheoxidationprocesstobeslowerin thefirstfewm,themostreasonableexplanationisthattherearemoreSi atomsinvolvedintheprocess. Themostprobableexplanationisthenthatthedifferentoxygencontents arerelatedtoslightmorphologicalinhomogeneities.Inparticular,sincethe oxygencontentishigherinthefirstmicrometersundersurfacethanindepth, wecansupposethatnearthesurfacethelayerischaracterizebyagreater specificsurface,duetoadifferentporosityortothepresenceofnanopores. AsSEMFEGdidnotrevealedanevidentmorphologicaldifferenceindepth (§4.3.2), we can suppose that in the first microns under the surface, the columnarporeshaveahigherdensityofnanometersize ramifications that may significantly increase the specific surface while keeping the porosity almostunchanged.

98 6: Immobilization of lipase on PS

Chapter 6:

6 ImmobilizationoflipaseonPS

6.1 Introduction

Inthepreviouschapterswedescribedthepreparationofporoussilicon samples as matrixes for enzyme immobilization. We determined the formationparametersneededtoobtainsampleswiththeporesize,porosity, specificsurfaceandthicknesssuitablefortherealizationofourbiosensor. Then we described the anodic oxidation treatment, that has been necessarytostabilizeoursamplesagainstdissolutioninaqueousmedia. Inthischapterwewilldescribetheimmobilizationofenzymesinthe pores’ internal surface through physical adsorption and we will study the parametersaffectingthisprocess.

6.2 The immobilization process

The immobilization of lipase was performed using simple physical adsorption.Wepreferredthisapproach,insteadofchemicalbindingofthe

99 6: Immobilization of lipase on Porous Silicon molecules,sincephysisorptionismoregentleandtheenzymemoleculesare morelikelytokeeptheirfunctionality.

6.2.1 Definition of immobilization parameters

Beforedescribingtheoptimizationoftheimmobilization processit is worthwhile to make a brief introduction about the parameters useful to characterizetheefficiencyofanenzymaticdevice. Ingeneral,thequantitativeevaluationofhowmuchenzymeentersthe pores during immobilization process is not feasible and, moreover, is not useful to evaluate the device efficiency. In fact, as we have explained in §3.5.2,theenzyme is rarely pure andpart of the immobilized molecules maybeinatotallyorpartiallyinactivestate.Forthisreasontheamountof immobilizedenzymeisingeneralexpressedintermsof activity . Thedefinitionofthe activity ofanenzymeisbasedonthevelocityof theenzymecatalysedreaction.Infact,theactivityisdefinedasthenumber ofmolesofproductformedpertimeunitandpergramofenzyme. Aswearedealingwithimmobilizedenzymes,thedefinitionofactivity shouldbeslightlymodified.Inparticular,weusedtwoparameterstoexpress thecatalyticactivity: Theimmobilizedactivity. Thedeviceactivity.

a) The “immobilized activity” (A Imm ) is defined as the difference 75 betweentheinitial(A i)andfinal(A f)activityofthelipasesolution usedin theimmobilizationprocess:

AIm m = (Ai − Af ) Thisformulaisvalidonlyintheassumptionthatthelossofactivityof theenzymaticsolutionfromthebeginningtotheendoftheimmobilization processismainlyduetothephysisorptionoftheenzymeintothepores.This isnotalwaystrue,andparticularcaremustbetakenusingthisdefinitionof activitytoevaluatetheactivityoftheenzymephysisorbedintothepores.

100 6: Immobilization of lipase on Porous Silicon

Ingeneral,theimmobilizedactivityvaluesarereferredperunitmassof support.Inourcase,sinceallsamplesweusedwerenominallyidenticalwith aporouslayermass3.7mg ∗,allourmeasurementsarereferredtothatvalue. Inthisthesisweusedthisdefinitionofactivityonlytodescribethetime evolutionoftheimmobilizationprocess.Thisstudywasperformedsampling theimmobilizationsolutionatgiventimeintervalsduringtheimmobilization process.Thiswasdonebywithdrawingsmallvolumesofsolution(e.g.1% of total volume for each sample) from the test tube, and measuring their activityusingpHstatmethod. b) Once optimized the time duration, all other activity measurements were expresses in terms of “ Biosensor Activity”. This quantity is the activityoftheloadedPSsamplesmeasuredwith“pHstatmethod”(§3.5.2). These measurements were performed by directly inserting the loadedPS sampleinthetributyrinemulsionasshowninFig.6.1.

Fig.6.1:Schemeofthebiosensoractivitymeasurementsetup.

∗The massofaporoussiliconsamplecanbecalculated by multiplying the mass of a cylinder of silicon with volume V= πr2×thickness by the silicon density (2.33gcm 3),withthepercentofporosity,inthiscase49%.

101 6: Immobilization of lipase on Porous Silicon

6.2.2 Preparation of the enzymatic solution

Lipase Ay from Candida rugosa fungi fermentation was supplied by Amano Enzyme Europe L.T.D. It is put on the market as a powder compound containing, besides the enzyme, lipids, carbohydrates, nucleic acidsandsaltsresultingfromprocessoffermentationandlipaseextraction. In principle, we can not exclude a priori that all these substances will interfere with the immobilization process, but preliminary test revealed a good enzymatic activity even without enzyme purification. Enzyme purificationwillbeimplementedinfuturework. Enzymaticsolutionwaspreparedbydissolving0.0125gofenzymatic powderin25mLofbuffersolutionatdifferentpH(20mMacetatebuffer forpH4andpH5and20mMphosphatebufferforpH6,pH7andpH8), paying attention to shake the solution gently in order to avoid the denaturationoftheenzyme.Inapreviouswork 84 enzymemasseshigherbya factorof10wereused,buttheresultingactivitywasofafactor10lowerthat inourcase.Thisprobablyindicatethatalessconcentrated solutionenters moreeasilyinthepores,butasystematicstudyofactivityasafunctionof theenzymeconcentrationintheimmobilizationsolutionhasbeenpostponed forfutureworks. The pH of the immobilization solution was fixed at pH=7 at the beginning of the study, since at this pH value the enzyme activity is maximum.AcomparisonoftheimmobilizationasafunctionofthepHof thelipasesolutionwillbedescribedinthefollowingparagraphs.

6.2.3 Physical adsorption of lipase on PS

The freshly prepared enzymatic solution was inserted in a testtube, whosecapacitywasabout14mL,togetherwiththeporoussiliconsampleas indicatedinFig.6.2.

102 6: Immobilization of lipase on Porous Silicon

Fig. 6.2: Scheme of the testtube used for enzyme immobilizationonPSsamples.

Thetesttubeisthenplacedinrotatingagitator(seeFig.6.3)andleft under weak and continuous stirring in order to favour the introduction of lipasemoleculesintopores.Asforthepreparationoftheenzymaticsolution, wehavetotakecarethattherotationvelocityisnottoohigh,sotoavoidthe denaturation of the enzyme. The immobilization process is carried out at roomtemperature.

Fig. 6.3: The rotating agitator used for lipase immobilization process.

103 6: Immobilization of lipase on Porous Silicon

6.3 Optimization of the immobilization parameters

6.3.1 Immobilization duration

The first step for optimizing the immobilization process, is the determinationofthetimenecessarytomaximizetheporoussiliconenzyme load 84 .

Af was determined by withdrawing small volumes of solution at different time intervals. In particular, the sampling of the solution was performedafter50min,1h,15h,33h,36h,52h,57h,123h. In order to consider negligible the variation of the volume of the immobilizationsolutionduringtheanalysis,thesumofwithdrawnvolumes hasbeenkeptbelow7%oftheinitialvolume.Forseven time steps, this conditionissatisfiedforwithdrawalsof100Leach. Fig. 6.4 shows dynamic evolution of the immobilized activity during timefora20mPSsample.Wecanseethattheimmobilizationprocess requiresverylongtimetoreachthethermodynamicequilibrium.However, after24h,theimmobilizedactivitywasabout90%ofitsmaximum value. Theimmobilizationtimewasthenfixedat24h,asacompromisebetween maximumloadandreasonabledurationoftheimmobilizationprocess.

1.2

1.0 mol/ min min mol/ 0.8

0.6

0.4

0.2

Immobilized Activity, Immobilized 0.0 0 20 40 60 80 100 120 Immobilization Time, h

Fig. 6.4: Immobilized activity versus time 84 for a PS sample loadedwiththeCandidarugosalipaseatpH=7.

104 6: Immobilization of lipase on Porous Silicon

In order to remove all nonadsorbed enzyme molecules, the lipase loadedPSwassubmittedtotworinsingcyclesof1houreach,withthesame buffer used for the immobilization process. The check of the released activityshowedthatalreadyafterthefirstrinsingcyclethereleasedactivity wasbelowthedetectionlimitsofthepHstat.Thisconfirmsthereachingof astablelipasePSpreparation.

6.3.2 Influence of pH

We stated at the beginning of this chapter that the immobilization processwasperformedinitiallyatpH=7sincethiswas the optimum pH value to maximize the lipase’ activity. However, the physical adsorption processmaybedependentonthepHvalueandbeoptimumforadifferent pH value. In fact, physical adsorption is due to a cooperation of intermolecular forces (electrostatic, dipoledipole, hydrophobic interaction etc.)thatcanbemodifiedbypHchangesinawaythatisnotpredictablea priori. The study of the effect of the pH of the enzyme solution on the immobilizationprocessandonthedevice’performanceswasthennecessary. Inprinciple,itispossibiletoguesstheoptimumpHvaluebyanalysing chargestatesontheporoussiliconsurfaceandenzymemoleculesimmersed in different pH. Unfortunately, this study implies the knowledge of the isoelectricpoints(pI)that,inourcase,isnotknown.Inapreviouswork 84an attempttodeducepHinfluenceonimmobilizationwaspresented,basedon valuesofsilicapIrecoveredfromliterature 85 (andgivenequalto2) andonpI ofenzymeprovidedbyproducerspecification.However, theresultsbased onthisanalysisdisagreedwithexperiments,probablybecauseporoussilicon isoelectricpointdoesnotmatchthatofsilicaevenifathinlayerofoxideis presentonthesurface. Thedirectmeasurementsoftheoperationofthebiosensorwaschosen as the best method to evaluate the ideal pH condition. We prepared six buffer solutions at pH values of 3 (3.02),4 (4.08),5 (5.01),6 (6.04),7 (7.00),8(7.91),thatwereusedtopreparesixenzymaticsolutions. Fig. 6.5 show the plot of loaded PS activity as a function of the immobilizationpH.

105 6: Immobilization of lipase on Porous Silicon

0.20

0.18 mol/min 0.16

0.14

0.12 Biosensor activity, 0.10 3 4 5 6 7 8 pH

Fig.6.5:BiosensorActivityasafunctionoftheimmobilization pHfora50mPSsample.

BiosensoractivityisquitedependentonimmobilizationpH.Itshowsa maximumatvalueofpHbetween5and6.Thisresultisinagreementwith previous studies 84 . pH = 5 was then chosen as reference value for all immobilizationsandstorageofthesamples. Wealsoexploredothermethodstoimprovetheenzymeimmobilization. Forinstance,weaddedasmallamountofethanoltoimprovethediffusion into the pores, but the presence of even a few percents of ethanol dramaticallyreducedtheoverallenzymeactivity 84 .

6.3.3 Influence of the oxidation level

WealreadydiscussedthefactthatPSoxidationisneededtoavoidthe samples’dissolutioninaqueousmedia.However,thepresenceoftheoxide layermodifythepropertiesofthesurfaceofthepores,anditsEffectonthe immobilization process must be investigated. Four samples oxidized at differentoxidationlevels q(see§5.3.4),wereusedforlipaseimmobilization andthefinalbiosensoractivitiesofthesampleswerecompared.Theresults areshowninFig.6.6;

106 6: Immobilization of lipase on Porous Silicon

0.26

0.24

0.22 mol mol /min 0.20

0.18

0.16

0.14 Biosensor activity, 0.12 0.0 0.2 0.4 0.6 0.8 1.0 q

Fig. 6.6: Biosensor activity as a function of the anodic oxidationlevel.

Thebiosensoractivitydecreasesbyincreasingtheoxidationlevelandis reduced by a factor of two when going from the q ~0.1 to q ~0.9. Is important to note that the activity values reported for highly oxidized samplesarestillverygoodvaluestofabricateaperformingbiosensor. IfwecomparetheplotofFig.5.8withthatofFig.5.11fortheoxygen contentasafunctionofoxidationlevelwecanobservethatthehigherthe oxidation level the lower, all others parameters being the same, the final activity. Sincetheoxidationcausesatransformationofthepores’surfacefrom hydrophobictohydrophilic,wecansupposethattheinteractionswhichlead tophysicaladsorptionareweakerincaseofoxidizedsurface. Eveniftheactivitymeasuredforthehighestoxidationlevelshowastill good activity value, we chose for the oxidation an intermediate value (q~0.33) that, while still protecting the surface from rapid degradation, allowedahighfinalactivity.

107 6: Immobilization of lipase on Porous Silicon

6.4 Sensitivity to substrate concentration

After the study of the behaviour of our biosensor as a function of parameters such as the immobilization pH and the oxidation level of the porous silicon layer, we had to study its sensitivity to substrate concentration,inordertocomparethebehaviouroftheimmobilizedenzyme withthatofafreeenzyme.Onewaytoobtainthisinformationistoverifyif the enzyme kinetics follows the Michaelis Menten model. This study has beenthesubjectofaLaureadegreestageinourgroup 84 .

Theinitialvelocity V0ofthehydrolysisreactionforafreelipaseintoa tributyrinemulsionfollowstheMichaelisMenten(MM)equation:

VMAX [S] V0 = K M + [S]

whereV MAX isthemaximumvelocity,[S]isthesubstrateconcentration and K M is the MichaelisMenten constant, equal to the concentration at which the velocity is half maximum. The MM equation describes the behaviour of most enzymesubstrate couples, and states that there is an univocal correspondence between the initial reaction velocity and the substrateconcentrationforsubstrateconcentrationsbelowacriticalvalue.

In fact, according to the MM equation, V0 increases with [S] for substrate concentrations below 2K M, indicating that the first part of the MichaelisMentenplotcanbeusedforthecalibrationabiosensor.For[S] exceeding 2K M, instead, V 0 reaches a maximum value and becomes independentonthesubstrateconcentration. ThereactionvelocitywasmeasuredwiththepHstatmethod,byusing the experimental configuration for biosensor activity measurements describedinparagraph§6.2.1. The result of the study performed with a lipaseloaded PS sample immersedintributyrinemulsionsatdifferentconcentrationarereportedin Fig.6.7.

108 6: Immobilization of lipase on Porous Silicon

Fig.6.7: Reaction velocity(expressedasthe numberof mole hydrolyzedperlitreofemulsioninthetimeunit)asafunction oftributyrinconcentrationintheemulsion.Thebiosensorhas beenrealizedwithaPSsampleswithoxidationlevel q=0.92, and using a enzymatic solution containing 0.125g of enzymaticpowderin25mLofpH=7buffersolution84 .

Wecanseetheverygoodagreementbetweenthedatapointsandthe 8 solidcurvefitobtainedusingaMMequationwithVmax =1.3310 mol/l/s 4 andK M=8.0310 mol/l. The fact that the physisorbed enzyme kinetics follows the Michaelis Mentenequationisveryimportantbecauseitindicatesthatitsbehaviouris the same as that of the free enzyme, and therefore that there are no limitationstothesolutiondiffusionwithinthepores. Wehavethereforedemonstratethatporoussiliconisagoodmatrixfor enzymeimmobilization.

6.5 Device storage and stability

One of the objectives of this work was the realization of a reusable device.Toverifythispropertywetestedoursamples’lifetimeintheshort and long period stability. In the intervals between the measurements the samplesarepreservedimmersedinpH=5buffersolutionat4°C.

109 6: Immobilization of lipase on Porous Silicon

The results for a sample oxidized at q≈0.33 are shown in, Fig. 6.8, wherethemeasuredactivityisplottedversustime.

0.14

mol/min 0.12

0.10

0.08 Biosensor activity, 0 30 60 90 120 150 Storage time, days

Fig. 6.8: Biosensor activity as a function of storage time in pH=5buffersolutionandtemperatureT=4°C.

Wecanseethatthedevicemaintainsanunalteredactivityforthefirst two months. However, after this period the activity of the biosensor significantly decreases, probably as a consequence of the fact that an oxidation at q≈0.33 is not enough to completely prevent the layer’s dissolution,eveniftherateisnoticeablyreduced.Wethendecidedtousea higheroxidationlevel,thatis q ~0.9. We studied the stability of the biosensor activity for repeated measurements.Eachreportedmeasurementconsistsintheaverageofthree measurementsoffiveminuteseach.Betweeneachmeasurementthesample wasrinsedinwater.TheresultsareshowninFig.6.9.

110 6: Immobilization of lipase on Porous Silicon

0.12

0.10

0.08

mol/ min] mol/ 0.06

0.04

Activity [ 0.02

0.00 5 10 15 20 Test number

Fig.6.9:Reusabilitytest:biosensoractivityfor22consecutive tests in a 0.12 M tributyrin emulsion. Each reported measurementistheaverageofthreemeasurementofaduration onfiveminuteseach.Thetotalbiosensorworkingtimeexceed 5hours.

Wecanseethatthecatalyticefficiencyofthebiosensorisreasonably stableforalltests,andwecanthereforeconcludethatthebiosensorcanbe reused many times, for atotaloperationtime that is surely longer than 5 hours. The longperiod stability and verification of the goodness of storage conditionsisatthistimeanongoingmeasurement.

111 7: Realization of n +-type PS based potentiometric biosensor for triglycerides Chapter 7:

7 Realizationofan n+-type PorousSiliconbased potentiometricquantitativebiosensorfor triglyceridesanalysis

7.1 Introduction

Inpreviouschapters,wedescribedallstepsinvolvedinthepreparation of porous silicon samples and in the immobilization of lipase on their surface.Wediscussedalltheproblemsinvolvedin the matrix preparation andthesolutionwechoseforthem. Thefinalstepofourworkisnowtherealizationofaproofofprinciple deviceforthequantitativedeterminationofthetriglyceridesconcentrationin agivenemulsion.Wechosetodevelopapotentiometricbiosensor,thatisto measurethepHvariationsinducedbythehydrolysisreactionbymeasuring theopencircuitpotential(OCP)ofthecell.OCPisthepotentialmeasured onthecellwhennocurrentisflowingWewilldescribethisprocedurein detailinthenextparagraphs.

112 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

7.2 Operation principle

Ourprototypebiosensorconsistsinanelectrochemicalcell,wherethe hydrolysisoftriglyceridestakesplace,andahighimpedancevoltmeterfor the potentiometric measurements. The porous silicon samples loaded with lipase are inserted in the electrochemical cell and used as the working electrode,whileaplatinumelectrodeactsascounterelectrode;thereference electrode wasasaturatedcalomelelectrode.The triglycerides emulsion is keptunderconstantstirringtofavouritsdiffusionintothePSmatrix. Theoperationprinciplemaybedescribedasfollows:whentriglycerides emulsion entersthe poreswherethelipase is immobilized, the hydrolysis reactionstartsproducingfattyacidsandleadingtothereductionofthepHof theemulsion.Aswesawin§1.2.2,thispHvariationaffectstheflatband voltageofthesemiconductor/electrolyteinterfaceandthentheopencircuit potentialofthecell.Thedeterminationofthetriglyceridesconcentrationis then made by studying the pH change rate. As a matter of fact, for triglycerides’concentrationsthatdonotsaturatetheactivelipasemolecules available,thepHchangerateisproportionaltothe fatty acids production rate,whichisitselfdirectlyrelatedtothetriglyceridesconcentrationinthe emulsion.

7.3 The PS/ Electrolyte interface

If the semiconductor/electrolyte interface has been extensively reviewed 6, there are very few data available about the PS/electrolyte interface. Nanocrystalline electrodes could have unusual properties as a consequence of the fact that the electrode/electrolyticsolution system consists oftwo interpenetrating contiguous phases.Toverifythat,forour applications, the system behaves as a normal semiconductor/electrolyte interface we first characterized the interface through photocurrent measurements.

113 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

7.3.1 Photo-electrochemical characterization

The porous silicon/electrolyte interface has been first investigated by photoelectrochemistry. APSsamplewasusedaselectrodeinanelectrochemicalcellcontaining apH=7buffersolutionaselectrolyte. FirstofallwemeasuredtheOCPvalueinthedarkforourexperimental setup,thatwasequaltoabout650mV.Thesamplewasthenpolarizedata voltageequaltoOCPandthephotocurrentspectrawas taken for exciting wavelengthsinthe300700nmrangeusingaHglamp.Themaximumof photocurrent was found at λ=450 nm (see Appendix A). A cyclic voltammetrywasthenperformedundercontrolledilluminationusinga450 nmradiationandpolarizationvoltagerangingfrom 200mVto+200mV withrespecttoOCP(thatisrangingfrom450to850mV)(Fig.7.1).The i-V characteristic confirms that the interface behaves as a normal ntype semiconductor/electrolyteinterface.Thephotocurrenthasamaximumwhen thepolarizationvoltageequalstheopencircuitpotentialvoltage,whilefor cathodicpolarizationwithrespecttoOCPthephotocurrentdecreasesdueto the flattening of the bands. The applied voltage that leads to zero photocurrentistheflatbandpotential.Foranodicpotentialrangingfrom0to 200mVrespecttoOCP,photocurrentdecreasestoa minimum value and thenincreasesagain.Wedidnotexceed200mVpolarizationwithrespectto OCPinordertoavoidsurface’modifications.Infact,itispossibletoseein Fig. 7.1 that when we reduce the applied voltage towards cathodic polarization,foranodicpotentialsthephotocurrentvalueisslightlyreduced, indicating that anodic oxidation of the surface has occurred. This can be understoodsincetheformationofanoxidelayerontothesurfacecreatesan insulatingbarrierwhichpreventschargediffusionandcausesadecreaseof thephotocurrent.Forthisreasonthephotoelectrochemical characterization ofPSwasperformedonnonintentionallyoxidizedsamples.

114 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

Fig. 7.1: i-V characteristics of non oxidized PS/electrolyte interfaceunderillumination(λ=450nm).

7.3.2 Dependence of the open circuit potential on pH

Aswehaveseeninthefirstchapter(§1.2.2),theflatbandpotentialV fb of a semiconductor/electrolyte interface is affected by the pH of the electrolyteandissensitivetoreactionsoccurringattheelectrode.Agood parameterthatcanbeusedtofollowthevariationsofV fb istheopencircuit potential(OCP).OCPisinfactequaltoV fb apartfromaconstantvaluethat dependsonthedetailsoftheexperimentalsetupandthatcanbeconsidered independent on the reaction occurring in the cell. Moreover, we are not interestedintheabsolutevalueoftheOCP,butonlyinitsvariationsdueto hydrolysis reaction. As a matter of fact, the parameter that will give informationaboutthetriglyceridesconcentrationinagivenemulsionisthe rate of the production of the fatty acids, and this value is related to the variation ofthepHandnottoitsabsolutevalue.Thismeansthatourresults willbeindependentfromthevalueoftheoffsetconstant. ThedependenceofOCPonpHwasinvestigatedfordifferent kind of samples: Sampleswithapartialanodicaloxidation(q<1);

115 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

Sampleswithafullanodicaloxidation(q=1); Samplesthermallyoxidized. SixbuffersolutionswithpHvaluesrangingfrom4to8wereprepared andusedaselectrolytes.ForpH4andpH5weused20mMacetatebuffer, whileforpH6,pH7andpH8weused20mMphosphatebuffer. For each pH value, the measurements where carried out for several minutes,inordertoverifythatatagivenpHandwhennoreactionistaking placetheOCPvalueremainsconstant.TheresultsareshowninFig.7.2.

pH=8

-0.30 pH=7

-0.35 pH=6

pH=5 -0.40 pH=4 Open circuit potential/ SCE, V

-0.45 0 100 200 300 400 500 600 700 Time, s

Fig.7.2:PlotofOCPasafunctionoftimefordifferentpH.

wherewecanseethatOCPisconstantafterafewminutes,indicating that the interface reaches equilibrium in a short time (probably the time necessaryforthesolutiontopervadethepores).ThestableOCPvaluesare, asexpected,afunctionofpH,asshowninFig.7.3. The plot of open circuit potential as a function of pH is linear, in agreementwiththeory,buttheslopeisdifferentforsampleswithdifferent oxidationlevels. The results show that we can divide the samples in two groups, dependingontheobservedslope.First,ataslopeofabout70mV/pHthere are all samples with an oxidation level q <1, and, second, there are all samples with an oxidation level q=1 (fully oxidized samples).Thermally

116 7: Realization of n +-type PS based potentiometric biosensor for triglycerides oxidizedsamples(fullsquaresintheplot)showabehaviouridenticaltothat offullyanodicallyoxidizedsamples.

partially anodically oxidized sample -0.10 fully anodically oxidized sample thermally oxidized sample -0.15

Slope=(75±5) mV/ pH -0.20

-0.25

-0.30

-0.35 Slope=(37±1) mV/ pH

-0.40 Open Circuit Potential/ SCE, V SCE, Potential/ Circuit Open

-0.45 4 5 6 7 8 pH

Fig.7.3:PlotofOCPasafunctionofpHforsamplesoxidized atdifferentlevels.

We discussed in Chapter 1 the pH dependence of the Vfb of semiconductorscoveredbyathinoxidelayerasmainlydue 8tothedifferent charge that can accumulate on the surface depending on the pH of the solution. Generally,adependenceof59mVperpHunitisexpected for these systems,inagreementwithNernstequation,butdeviationfromthenernstian behaviourareoftenobserved 86 .Forinstance,inthecaseofsiliconcovered withathinoxide,Madouetal. 87 reportedaslopeofonly30mV,attributing this result to the amphoteric behaviour of the Si–OH sites, that can both + acceptaprotonyieldingaSi–OH 2group,anddonateaproton,yieldingaSi–

O group. Inourcase,theobservedbehaviourforbothfullyandpartiallyoxidized samplesdeviatesfromwhatispredictedbytheNernstlaw. We interpret our experimental results by referring to two different phenomenathatareverylikelytooccuratthesametimeinoursamples:

117 7: Realization of n +-type PS based potentiometric biosensor for triglycerides first,theamphotericbehaviourofthesurfaceoxide,and,second,thesilicon dissolutioninaqueoussolution. Literature results (§1.5.3) show that the thermal oxidation of porous silicon is homogeneous over all the available surface, and we can expect that,evenifnotalltheinternalskeletonofsiliconistransformedinsilica, thesurfaceisuniformlycoveredbyanoxidelayerandnounoxidizedsilicon isexposedtotheelectrolyte.InthiscaseweexpectadependenceofOCPon pHcloseto30mVinagreementtoMadouetal. 87 .Thisisactuallythecase fortheobservedvalueof37mV/pH. In case of partial anodic oxidation, the PS surface is not uniformly covered by a thick oxide layer and there could be some regions where unoxidizedsiliconatomsareindirectcontactwiththeelectrolyte.Inthese regionsthesurfaceissubjectedtothedissolutionprocessthatpassesthrough anintermediatestepofoxidationofsiliconatoms.Theexactchemistryof thisprocessisnotknown,butbeingaredoxreactionweexpectabehavior governedbytheNernstequation. .0 059 [ox] E = E + log 0 n [red] However,sincethesamples’surfaceispartiallycoveredwithsilica,we expectthatwhenputincontactwiththeaqueoussolutionthisportionofthe surfacewillshowamphotericSiOHgroups,thatwillcontributetothecurve slopebyanamountof37mV. In a first approximation we can reasonably suppose that the two contributions (from the Si atoms oxidation and from the amphoteric behaviourofsilica)simplyadd.Thevalueofsloperesultingfromthissumis in our case 75 mV/pH. If our approximation is correct, the oxidation reaction,whichcontributestothetotalslopetogetherwiththe37mV/pH deriving from the amphoteric groups, would involve two electrons

(~30mV/pH),thatisnotcoherentwiththeformation of SiO 2. A further investigationofthesurfacecomposition,forexamplethroughIRabsorption spectroscopy,isrequiredtogiveaproperinterpretationofourdata. Incaseoffullyanodicallyoxidizedsamples,sincethemeasuredslopeis thesameasincaseofthermaloxidizedsamples,wecanreasonablysuppose thatalsoforanodicoxidationthesurfaceisfullycoveredwithSioxide.

118 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

Thepresenceoftworeactionsinpartiallyoxidizedsamplesissupported bythefactthattheydegradesafterafewmonthinaqueoussolution(ref.to §6.5), while fully oxidized samples are stables even after a time span of morethanoneyear. On the basis of our experimental results, we can then conclude that, whiletheOCPvaluesshowawelldefinedresponsetodifferentpHvalues, well beyond measurements errors for both partially and fully oxidized samples,thebestreproducibilityisobtainedforfullyoxidizedsamples,since theabsenceofcorrosionleadstoamuchhigherstability.

7.3.3 Variation of OCP during hydrolysis

WiththeinformationabouttheOCPsensitivitytopHvariations,wecan proceedtoOCPmeasurementsintriglyceridesemulsions.The triglyceride wechoseforthisworkasthesubstrateforthelipaseistributyrin,asmall triglyceride whose hydrolization leads to the formation of glycerol and butyricacid. ThelipaseloadedPSsampleswereusedaselectrodesintheelectrolytic cellcontainingthetriglycerideemulsion,inthesameconfigurationusedfor theOCPsensitivitydeterminationwiththelipasefreePSsamples. For results presented in this work, samples oxidized at an oxidation level q=0.9wereused.Thesesamplesarestableoveratimespanofseveral months, during which the biosensor can be used without noticeable corrosion.Atributyrinemulsion0.028MwaspreparedandtitratedatpH=7 throughadditionoflittleamountsofNaOH0.1M.Infacttheasprepared emulsions have a pH value that is around 4.5 due to a natural partial hydrolizationoftributyrinthat occurs during shelf preservation. However, sincelipasehasitsmaximumactivityatpH=7wecorrectthenaturalpHof the emulsion to ensure optimum enzyme functioning. Moreover, our biosensorwillbemainlyusedinphysiologicalmediathathavepHvalues around7. Fig.7.4showsthetimeevolutionofOCPusinga0.028Mtestemulsion.

119 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

0.06

0.05

0.04

0.03

Open Circuit Potential/ SCE SCE [V] Open Potential/ Circuit 0.02

0.01

0 100 200 300 400 500 600 Time [s]

Fig.7.4:VariationofOCPduringtimeforaloadedPSsamples usinga0.028Mtestemulsion.

AnexponentialvariationofOCPwithtimeisobserved.Thisiscoherent withwhatisexpectedforfirstorderreactions 88 .Whathappenshereisthat the lipase catalyze the hydrolysis reaction of the available tributyrin molecules, whose concentration is such that the lipase molecules are not saturated.Withtime,thetributyrinconcentrationdecreasesandatthesame timetherateofformationofbutyricacidslowsdown,sothattheemulsion pHwilleventuallystabilize. The total OCP variation (about 30 mV in 5 minutes), using the calibrationcurveofthepreviousparagraph,correspondstoapHvariationof about0.4units.ThisconclusionwasconfirmedbydirectpHmeasurement. This is a very important point, since this confirmation indicate that the surface phenomena that lead to the OCP variations stay unaffected in presenceoflipasemoleculeswithinthepores. ThisresultsdemonstratethatOCPmeasurementsusingalipaseloaded PSsamplesareavalidalternativetodirectpHvariationmeasurementsfor thedeterminationoftriglycerides’concentrationinanemulsion.

120 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

7.3.4 Sensitivity of the system to different triglycerides concentrations

Tocalibratethebiosensor,onceknownthepHsensitivity,weneedto performaseriesofmeasurementsusinganumberofemulsionwithdifferent tributyrinconcentrations. Inourcasewewanttoexpressthereactionvelocity,intermsoftherate of variation of the OCP that must depend itself on the substrate concentration. Toverifythis,weproceededasfollows:toplotthe variation of OCP duringtimeforeachemulsionwasplotted,sincewe can not measurethe valueofthetangenttoOCPvstimecurveexactlyatthestartingmoment, becausesystemneedsafewtensofsecondstostabilize, we averaged the valueofOCPvariationrateinthefirstminute. The obtained value were plotted against tributyrin concentration, as showninFig.7.5

0.020

-1 0.015

0.010 OCP/SCE, V min 0.005

0.000

0.00 0.02 0.04 0.06 0.08 Tributyrin Concentratiom, mol/L

Fig. 7.5: Values of OCP averaged in the first minute of reactionasafunctionoftributyrinconcentration.

121 7: Realization of n +-type PS based potentiometric biosensor for triglycerides

ThecurvepresentedinFig.7.5showsthattherateofvariationofOCP is dependent on the substrate concentration. The OCP/t is a linear function of the tributyrin concentration, until a critical value is reached. AbovethissubstrateconcentrationtherateofvariationofOCPwithtimeis independentonthesubstrateconcentrationandremainsconstant,indicating thatalllipaseactivesitesaresaturated. TheunivocalcorrespondencebetweenOCPvariationrateandsubstrate concentrationistheninthe00.03mol/Lrange, and give the calibration curveforourbiosensor.Thismeasurementrangeiscompatible,forinstance, withtheusualhumanbloodtriglyceridesconcentrations. We must specify that the substrate concentration at which the lipase saturationoccursdependsontheloadedPSlayerparameters,andthatthis upper limit is valid only for the samples fabricated in our standard conditions. It may be interesting, for instance, to lower or raise the limit valuetoimprovethebiosensorsensitivityto,respectively,lowerorhigher substrateconcentrationsintheemulsionthatmustbecharacterised. The upper detection limit can be easily reduced, for instance, by reducing the immobilization time, and may be easily increased by using largerPSlayeror,possibly,byincreasingthePSlayerthicknessand/orwith adetailedoptimizationoftheimmobilizationprocess. Theseresultsdemonstratethatwewereabletorealizeafullyfunctional biosensorprototypeforthequantitativedeterminationoftriglyceridesusing poroussiliconasimpregnationmatrix.

122 8: PS matrix as a carrier for drug delivery

8 AppendixA:PSmatrixasdrugcarrier

8.1 Introduction

In 1.6.1 we said that the biocompatibility and non toxicity of porous siliconhassuggesteditsuseinthefieldofdrugdelivery. Oneoftheresearchlinesthatwearenowdeveloping focuses on the application of PSsiliconfor therealization of a drug delivery system for tretinoin. The work is developed by our group in collaboration with the Dept.FarmacoChimicoTecnologicooftheCagliariUniversitydirectedby Prof.AnnaMariaFadda. Tretinoin( trans retinoicacid,TRA)isanaturalretinoidwidelyusedin proliferativeandinflammatoryskindiseases,suchaspsoriasis,acneandskin cancer. Due to the severe side effects when systematically administered, tretinoin is almost exclusively topically employed. It can in fact cause photoreactions,allergy,scaling,erythema,stinging,asaconsequenceofthe formation of degradation products due to the TRA high instability in the presenceofair,lightandheat 89 . Theavailabilityofacarrierabletoprotecttretinoin from degradation wouldreducethesideeffectsinvolvedintheuseofthispowerfuldrug. Theaimoftheworkistoevaluatethepotentialofporoussiliconasa topicaldeliverysystemcapableofimprovingthephotostabilityoftretinoin andtoobtainacontrolleddrugrelease.

8.2 Building a drug delivery PS system

Therealizationofaporoussilicondrugdeliverysystemconsistintwo phases:thematerialpreparationandthedrugloading.

123 8: PS matrix as a carrier for drug delivery

Fig.8.1:StepsinvolvedinthebuildingofaPScarrierforthe drugdelivery.

8.2.1 Porous silicon preparation

Porous silicon samples were prepared from n+type silicon with a resistivity of 37 10 3 cm. PS layers were obtained, by using an HF solution containing 15% of HF, 15% of water and 70% of ethanol. Anodization current wasfixed at 45 mA cm 3andtheanodizationtimeat 3000s.Theobtainedsampleshadaporosityof5060%andathicknessof 150 m. After formation, the samples were detached from the crystalline siliconsubstratethroughelectropolishing.Thefreestandinglayerwasthen fragmented and reduced to a powder. No preventive oxidation step was requiredsincetretinoinisbettermixedinnonaqueous solutionthat don’t dissolvePSandbetterdiffuseinthiscaseafhydrophobicsurface[ref]

8.2.2 Drug loading

DrugloadingintoporoussiliconisachievedbysoakingthePSpowder in a methanolic saturated solution of tretinoin, for two days, at room temperature,undercontinuousstirring. The determination of the drug load is determined by analysing the concentrationoftretinoinafterandbeforetheloadingprocess.Thesolvent,

124 8: PS matrix as a carrier for drug delivery in fact, is separated from loadedporous silicon by centrifugation and analysedbyHPLC,usingaliquidchromatographAlliance 2690 (), equipped with a photodiode array detector and a computer integrating apparatus(Millennium32). Theamountofdrugloadedbyporoussiliconhasbeendeterminedasthe amountofimpregnateddrug(%w/w)withrespecttothemassoftheporous siliconmatrix.Wefoundthatdrugloadingwasabout20%.

8.3 Drug release study

Afterloadingthesamplesaredriedinanovenat65°Candthenusedfor thereleasetest. Thereleasestudyhasbeenperformed in vitro byusingahydrophobic membrane (Perthèse ®), composed by a donor compartment and a receiver compartment.TRAloadedporoussiliconwassuspendedinagelandplaced onthemembranesurfaceinthedonorcompartment. The receiver compartment had a volume of 7 cm 3 and an effective diffusion area of 0.785 cm 2andwasfilledwithahydroalcoholicsolution. Thesolutionwasconstantlystirredwithamagneticbarandthermostatedat 37°Cthroughouttheexperiments.Inthiswaythebehaviourofthehuman skinissimulated.

Fig.8.2:Schemeofthemembraneusedforthedrugreleasetest.

The drug release has been controlled during 24 h and at fixed time intervals(1,2,6,8,24h),samplesofthereceivingsolutionwerewithdrawn

125 8: PS matrix as a carrier for drug delivery tomeasurethetretinoincontent.Theprofileofthe release during time is shown in Fig. 8.3. The study revealed that 40% of the loaded drug was released in 24 h. The amount of tretinoin released is a linear function of time,thatisthevelocityofreleaseisconstant.Thisisaveryimportantresult intheperspectiveofrealapplications,becauseitwouldimplythepossibility toguaranteeaconstantadministrationofdrugtothepatient. WealsoperformedthestudyofthestabilityoftretinoinloadedinPS. We already said that one of the main agent which causes tretinoin degradation is illumination with light in the visible and UV range. Since thesewavelengtharewithintheabsorptionbandofporoussilicon,wecan expect that the matrix can protect the molecules loaded within the pores fromdegradation.Tostudythedegradation,weexposedloadedsamplesto UVlightandwethenanalyzedthereleaseddrugwith HPLC. The results show no trace of degraded TRA molecules, indicating that the drug was successfully protected from light degradation when inserted with the PS pores.

Fig. 8.3: Curve of the tretinoin release from porous silicon dispersedintwodifferentmedia.

Whilebeingonlypreliminaryresults,alltheseobservationsdemonstrate the potentiality of PS applications in drug delivery and encourage further studies. Inparticularthefirststepwouldbytoverifythereproducibilityofthe processofdrugloadandrelease,inordertopredicttheamountofdrugthat

126 8: PS matrix as a carrier for drug delivery thedevicecanreleasepertimeunit.Thesubsequentstudywouldbetostudy ifthemaximumloadandthereleasevelocitycanbetunedbymodifyingthe characteristicsofporoussiliconstructure,i.e.theporosity,theporesizeetc. AlsothestudyoftretinoinstabilityunderUVilluminationhavetobe investigated.

127 9: Photoelectrochemical characterization of PS for DNA sensing

9 AppendixB:Photoelectrochemical characterizationofPSforDNAsensing

9.1 Introduction

This work has been developed during a six monthsstage which took place at the LEPMI (Laboratoire d’Electrochimie et Physicochime des Materiaux et des Interfaces) of the Institute Nationale Polytecnique de Grenoble (France), finalized to the verification of the feasibility of a PS basedphotoelectrochemicalbiosensorforDNAsensing. The idea is to use photoelectrochemistry as a technique for DNA recognition. The interest in this study comes from the property of PS/electrolyteinterfacetoproduceelectriccurrentwhen illuminated with radiationofenergylargerthanitsgap.Thispropertyisstrictlyconnectedto thebandbendinganditsreasonablyitselfaffectedbyreactionoccurringat the interface (§1.2.2). The operation basics are the following: we immobilizedaparticularDNAsequenceonPSsamplesandthenweexposed thesampletoasolutioncontainingotherDNAsequences. We expecteda differentresponseinphotocurrentwhenthesequenceisthecomplementary tothatimmobilizedornot. Twodifferentresearchgroupswereinvolvedinthework,besidesour: The CMESSIE (Couches Minces et Spectroscopie des Surfaces et des InterfacesElectrochimiques)groupdirectedbyDr.ThierryPagnierandthe POE (Photo et OptoElectrochimie) group directed by Prof. Didier Delabouglise.

128 9: Photoelectrochemical characterization of PS for DNA sensing

9.2 Photoelectrochemical characterization of the PS / electrolyte interface

Here we present preliminary results obtained from the photoelectrochemicalcharacterizationofthePS/electrolyteinterface.

9.2.1 Experimental setting

Theschemeofthephotocurrentmeasurementsexperimentalsetting is showninFig.9.1.ThelightsourceisanHglamp,Lindicateslens,Cisthe chopper,MCisthemonochromatorandMisamirror. A monochromator allowsthechoiceofparticularwavelengthsinthelampspectrum.

Fig. 9.1: Scheme of the apparatus used for photoelectrochemicalmeasurements.

9.2.2 Results

In §7.3.1 we have seenthatthe photocurrent has its maximum for a polarizationvoltageequaltotheOCP;thereforewefirstdeterminedtheOCP of the cell, and then we polarised the interface at that value for all

129 9: Photoelectrochemical characterization of PS for DNA sensing measurements.Thespectrumofphotocurrentasafunctionoftheexcitation energy is shown in Fig. 9.2, where a comparison with the spectrum of a crystalline silicon sample is shown. The first observation is that porous siliconexhibitshigherefficiencyascomparedtocrystallinesilicon.

Fig.9.2:PhotocurrentspectrumofPS.

According to literature 90 , we can observe a large band in the visible rangewithamaximumatλ=450nm.Theenergyatwhichlightbeginstobe absorbed form porous silicon is compatible with a value of the indirect energygapof1.2eV(Fig.9.3).

0.16

0.14

0.12

1/2 0.10 ) ν

xh 0.08 ph (I 0.06

0.04 1.2 eV 0.02

0.00 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 E, eV

Fig.9.3:PhotocurrentspectrumofPSwiththephotonenergies asxaxis.

130 9: Photoelectrochemical characterization of PS for DNA sensing

Once determined the photocurrent maximum, measurements were performedbyexcitingthesampleswiththe488nmrayofanArgonlaserof powerequalto20mW.Photocurrentwasmeasuredbyalternatingperiodsof darkandenlighteningof100seach(Fig.9.4).Wecanseethatforapower of20mWthephotocurrent(givenbythedifferencebetweenthedarkcurrent andthelightcurrent)isquiteconstantandequalto400nA.

-4 8x10 -4 6x10 -4 4x10 -4 2x10 -4 0x10 -4 -2x10 -4 Photocurrent, A -4x10 -4 -6x10 -4 -8x10 0 200 400 600 800 1000 Time,s

Fig. 9.4: Photocurrent as a function of time, alternating dark andenlightening.

Thevalueofphotocurrentasafunctionofthelaserpowerisshownin Fig. 9.5. For laser powers lower than 60 mW, photocurrent increasess linearlywithpower.Forimpingingpowerslargerthan60mWasaturationis observed,duetothefactthattheincreaseofthesampletemperaturecauses thermal agitation which favour the recombination of electron hole pairs, whichdonotdiffusetogivefurthercontributiontophotocurrent..

131 9: Photoelectrochemical characterization of PS for DNA sensing

12x10 -4

10x10 -4

8x10 -4

6x10 -4

4x10 -4 Photocurrent, A

2x10 -4

0x10 -4 20 40 60 80 100 Laser power, mW

Fig.9.5:Photocurrentasfunctionofthelaserpower.

We observed that surface oxidation is a critical parameter for photoconductivepropertyofPS.Infactthepresenceofanoxidelayeronthe surface, that is indispensable to prevent dissolution in aqueous media, creates an insulating barrier which prevents chargediffusionandcauses a strongdecreaseofphotocurrent.Theonlywaytostabilizethesurfaceusing oxidationistofullyoxidizethesamples,becausepartiallyoxidizedsamples immersed in aqueous solutions are stable only for short periods of time (§6.5).Inordertoformsamplesstablesandsuitablefortheconstructionof a photoelectrochemical biosensor, other techniques of surface stabilization mustbedevelopedinalternativetooxidation.

9.2.3 DNA sensing

Preliminary characterizations were performed using samples naturally oxidized,whichguaranteestabilityforaperiodofafewdays. WeimmobilizedasinglestrandofDNAonporoussiliconsamples,by passiveimmersionindilutephysiologicalsolutionfor24h.Wehavetested thephotocurrentevolutionduringinsituinjectionofotherDNAstrands,i.e. complementarystrand(Fig.9.6)ornoncomplementarystrand.Theresponse isclearlydifferentinthetwocases.

132 9: Photoelectrochemical characterization of PS for DNA sensing

3x10 -5

-5 2x10

-5 1x10 Injection of the complementary -5 DNA strand at t = 530 s. 0x10

-1x10 -5 Photocurrent,mA -2x10 -5

-3x10 -5

0 200 400 600 800 Time, s

Fig. 9.6: Photocurrent plot of DNAloaded PS layer during time.ADNAstrandcomplementarytothatimmobilizedinthe poresisinjectedintheelectrolyteatatimet=530s.

-5 3x10

2x10 -5

1x10 -5

-5 0x10

-1x10 -5 Photocurrent, mA Injection of the non-complementary

-5 DNA strand at t = 1130 s. -2x10

0 500 1000 1500 2000 2500 Time, s

Fig.9.7:PhotocurrentplotoftheDNAloadedPSlayerduring time. A DNA strand noncomplementary to that immobilized intheporesisinjectedintheelectrolyteatatimet=1130s.

These results are very promising and will need further experiments.

133 10: Conclusions

10 Conclusions In this Ph.D. work we fabricated a porous siliconbased proofof principle potentiometric biosensor for the detectionof trygliceridesthat is compact,easytouse,efficient,reusable.Thisresultwasobtainedinaclose collaborationwiththegroup‘Biocatalisi’directedbyProf.MauraMonduzzi oftheChemicalSciencesDepartmentofCagliariUniversity, ThedeviceisbasedonthecouplingbetweenPSwithanenzyme(lipase) able to catalyze the hydrolysis of triglicerides. It is constituted by a PS electrode, on which the lipase is immobilized, that is immersed in the solution tobe analysed.The parameter usedfor the detection is the open circuit potential (OCP),thatisthepotentialofthePSelectrodereferredtoa reference electrode, with no current flow. OCP is in fact a parameter characteristicofsemiconductor/electrolytesystemsthatisverysensitiveto reactionsoccurringattheinterface. Fortherealizationofourbiosensorwerequiredthatthematerialtobe usedhadalargedevelopedsurfacefortheimmobilizationoflargeamounts ofbioactivemolecules,poredimensionadaptedtothemolecules’size,good mechanicalandchemicalstability.Inthisview,poroussiliconshowedmost ofthedesiredattributes.ThestructuralpropertiesofourPSlayerswerethen characterized by means of HRXRD, SEMFEG and N 2adsorption measurements,inordertoverifytheirfitfortherealizationofthebiosensor andfortheoptimizationoftheformationparameters. Amajordrawbackduringthefirsttestsofenzymeimmobilizationwas the observed dissolution of the porous layers in aqueous media, which prevents the realization of stable and reusable devices. This problem was overcame by performing anodic or thermal oxidation of the porous layers just after formation, that lead to samples stability in aqueous solution for

134 10: Conclusions timeperiodslongerthanoneyear.Thedetailedstudyoftheanodicoxidation processhasleadtonewinsightsintheunderstandingofthePSformation process.Inparticular,weobservedaslightmorphologicalinhomogeneityin theporouslayers,sinceitappearsthatthelayersfirsttenmicrometershavea higher porosity likely due to a larger amount of nanosized pores in this region. This morphology inhomogeneity is not visible by SEMFEG investigation,butcanbededucedfromtheoxygencontentdetermination. The immobilization process has been optimized, using standard analytical techniques, to obtain the greatest device efficiency in terms of thenzymatic activity. The sensitivity of the loaded PS matrix to the triglyceridesconcentrationshowedabehaviourthatalmostperfectlyfitthe Michaelis–Mentenequation.Sincethisequationreferstoafreeenzymein asolution,thisresultdemonstratethattheimmobilizedenzymebehavesasa freeenzymeandthattherearenodiffusionproblemwithinthepores,which isveryimportanttofabricateawellperformingdevice. Thesensitivityoftheporoussilicon/electrolyteinterfacetochangesin pHwastestedbyOCPmeasurementsusingbuffersolutionswithdifferent pH,andshowedadependencewellabovetheinstrumental sensitivity and wellfittedforstandardapplications.ThisOCPdependenceonpHwasfound tobeindependentonthepresenceofimmobilizedlipase onto the pores’s surface,atleastwithinthepHrangeofthetriglyceridesemulsionsweused inourtest. Foralltriglyceridesconcentrationmeasurementsweusedashortchain triglyceride,tributyrin,commonlyusedforthiskindoftests. Thebiosensorwascalibratedperformingaseriesofmeasurementsusing emulsionswithdifferenttributyrinconcentrations. The rate of variation of OCPwasfoundtodependonthesubstrateconcentration,witharesponse time shorter than 5 minute. The biosensor response to different tributyrin concentrationsinthe00.03mol/Lrange,thatiscompatible,forinstance, withtheusualhumanbloodtriglyceridesconcentrations,wasunivocaland welldefined. Study on life time and reusability of the device have been made, showing that the device can be safely stocked in a pH=5 buffer at a temperatureof4°C,andreusedforatotalworkingtimecorrespondentto morethan100assayswithoutlossofefficiency.

135 10: Conclusions

Wewerethenabletofabricateaprototypebiosensorthatmatchallour objectives,sincethedeviceshowanunivocalandwelldefinedfastresponse todifferenttributyrinconcentration,unitedwithahighdegreeofreusability. Moreover,thereducedsizeofthesamplesunitedwiththesimplicityofOCP measurementswillallowthefabricationofcompactsizedevices. Inthecourseofthisthesis,wealsoinvestigatedtwoothersapplications of porous silicon in biotechnology, that have been presented in the appendicesofthismanuscriptsincetheyareataveryearlystage:theuseof PSmatricesascarriersfordrugdelivery(incollaborationwiththe‘Farmaco ChimicoTecnologico’departmentofCagliariUniversity)andthestudyofa PS biochip for DNA recognition based on photoelectrochemical measurements(developedduringasixmonthstageattheINPGofGrenoble, France).Bothapplicationsshowveryinterestingpreliminaryresultsthatare veryencouragingforcontinuingtheirdevelopment.

136 Perspectives

11 Perspectives ThefirstdevelopmentinthedevelopmentofthePSbasedtriglycerides biosensor would be the check of the functioning for longer chain triglyceridesandtheapplicationtorealsituations(analysisofbloodsamples for example). Second, it would be interesting to develop chemical immobilization techniques to improve the biosensor performance. For instance,wecitedthepossibilitytofunctionalizetheinnerpores’surfaceby meansofsomechemicalspeciesadaptedforthechemical bonding of the lipase.This possibility may be very interesting to improve the amount of enzymemoleculesbondedtothepores’surface,butitdemandsagreatcare tokeeptheenzymemoleculesfunctionalityreasonablyunchanged. Foracompleteunderstandingofthereactionsoccurringattheoxidized PS/electrolyteinterfaceanaccurateinvestigationofthesurfacebonds,for examplethroughFTIR,wouldberequired.

137 References

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