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Low-Frequency Vibrational Energy Harvesting at the Micro and Meso Scale by Haluk Akay Bachelor of Science, Mechanical Engineering Carnegie Mellon University (2016) Submitted to the Department of Mechanical Engineering in partial fulfillment of the requirements for the degree of Master of Science in Mechanical Engineering at the Massachusetts Institute of Technology June 2018 Massachusetts Institute of Technology 2018. All rights reserved. Signature redacted Author Department o>echanical Engineering May 19, 2018 Certified by Signature redacted Sang-Gook Kim Professor of Mechanical Engineering Thesis Supervisor Accepted by Signature redacted Rohan Abeyaratne Chair, Department Committee on Graduate Theses MASSACHUSETS INSTITUTE OF TECHNOLOGY JUN 2 5 2018 LIBRARIES 2 Low-Frequency Vibrational Energy Harvesting at the Micro and Meso Scale by Haluk Akay Submitted to the Department of Mechanical Engineering on May 19, 2018 in partial fulfillment of the requirements for the degree of Master of Science in Mechanical Engineering Abstract Energy harvesting from environmentally available vibrations is a solution to providing electric power for remote and mobile applications, such as the Internet of Things. A buckled beam-based MEMS device can harvest power from low frequency, low amplitude vibrations which has never been achieved by a micro-scale device. Due to the poor fabricated quality of the active piezoelectric material in the device, however, the generated power has been an order of magnitude less than expected. It is important to harvest more than 1 micro Watt at the device size smaller than a coin in order to implement this technology for real world application. The buckled beam vibrational energy harvesting device has been evaluated for its power generation performance and its specific microfabrication recipe with respect to piezoelectric materials has been analyzed from a process control standpoint to identify areas of improvement. The process has been redesigned for a simpler and streamlined recipe. Complex residual stress control feedback loops have been replaced with a simple post-fabrication assembly to induce controlled buckling in active MEMS beams. Using a custom-designed fixture, the post-fabrication buckling concept has been demonstrated to achieve accurately buckled beams. With regard to mesoscale energy harvesting, a product has been designed that converts regular human walking motion to electricity. The device harvests electric power using air bulbs, distributed in the sole of a shoe to drive a series of micro-turbines connected to small DC motors. The number and position of air bulbs is optimized to harvest the maximum airflow from each foot-strike. The system is designed to continuously drive the micro- turbines by utilizing both outflow and inflow from the air bulbs. A prototype combat boot was fitted on the right foot of a 75kg test subject, and produced an average continuous power on the order of lOs of mW over a 22Q load during walking at 3.0 mph. This combat boot provides enough electric power to a passive GPS tracker that periodically relays geographical coordinates to a smartphone via satellite. Thesis Supervisor: Sang-Gook Kim Title: Professor of Mechanical Engineering 3 4 Acknowledgements I would like to acknowledge and thank my advisor Professor Sang-Gook Kim for his mentorship and encouragement. I also need to recognize and thank Dr. Ruize Xu, my former group-mate who preceded me on this energy harvesting project for the knowledge he lent me before graduating. I would like to thank the MTL staff, especially Dennis Ward, for their help and exceeding any expectations one could have in providing advice and help while I learned the microfabrication process. Finally, I would like to thank everyone in my personal life who are constantly helping to push me ahead. 5 6 Table of Contents Chapter 1 Introduction........................................................................................ 12 1.1 Thesis Objective.................................................................................................. 12 1.2 Thesis Organization............................................................................................ 12 Chapter 2 Low-Frequency Vibration MEMS Energy Harvesting ........................ 14 2.1 Background ........................................................................................................... 14 2.2 Device Design and Dynamic Modeling of Low Frequency Energy Harvesting............ 18 2.3 Piezoelectric Performance of Previous Generation Device ........................................ 21 2.5 Chemical Vapor Deposition Process Control.......................................................... 30 2.5.1 CVD Process Outline ........................................................................................ 31 2.5.2 Experimental Design............................................................................................ 32 2.5.3 Testing and Experimental Results ........................................................................ 34 2.5.4 Data Analysis.................................................................................................. 36 Chapter 3 Post-Fabrication Buckling Design ...................................................... 39 3.1 M otivation............................................................................................................. 39 3.2 Design Goals ......................................................................................................... 41 3.3 M odeling...............................................................................................................45 3.3.1 Analytical Buckled Beam Model ....................................................................... 45 3.3.2 Experimental Buckled Beam Model.................................................................... 49 3.4 Design Paths..........................................................................................................51 3.4.1 Achieving Buckling without Frame Modification.................................................... 52 3.4.2 Achieving Buckling by Frame Modification .......................................................... 55 3.5 Proposed Designs ................................................................................................... 56 3.5.1 Experimental Frame Bending Fixture.................................................................... 56 3.5.2 Snap-Fit Corrective Frame Fixture Design and Process ............................................ 59 3 .6 T estin g .................................................................................................................. 6 3 3.6.1 Fixture Construction ........................................................................................ 63 3.6.2 R esults ............................................................................................................. 6 6 Chapter 4 Energy Harvesting Footwear ............................................................ 71 4.1 Introduction to W earable Energy Harvesting.......................................................... 71 4.2 M esoscale Energy Harvesting System Design ............................................................ 73 4.2.1 Air Bulb Design and Placement.......................................................................... 73 4.2.2 Turbine Enclosure Geometry .............................................................................. 76 4.3 Theoretical Calculations of Upper Bound Power .................................................... 77 7 4.4 GPS - Equipped Combat Boot Prototype................................................................ 79 4 .5 R esu lts .................................................................................................................. 8 2 4.6 Discussion.............................................................................................................85 Chapter 5 Sum m ary........................................................................................... 87 5.1 Thesis Summary.....................................................................................................87 5.2 Future work ........................................................................................................... 88 Appendix A 90 A. 1 PECVD Process Capability Study Data ................................................................. 90 A.2 Electric Testing of Experimental Frame Bending Fixture......................................... 93 Bibliography 94 8 List of Figures FIGURE 2 - 2 BUCKLED BEAM ENERGY HARVESTER SCHEMATIC [1].................................................... 17 FIGURE 2 - 3 MASS-SPRING-DAMPER M ODEL SCHEMATIC ................................................................... 19 FIGURE 2 - 4 CLAMPED-CLAMPED BUCKLED BEAM ENERGY HARVESTER............................................... 20 FIGURE 2 - 5 POLARIZATION - ELECTRIC FIELD CURVE (R. Xu 2018) [1] ............................................. 23 FIGURE 2 - 6 JEON RECIPE, CRACKED PZT ........................................................................................ 26 FIGURE 2 - 7 M ITSUBISHI RECIPE, CRACKED PZT ............................................................................. 26 FIGURE 2 - 8 XRD OF ANNEALED PZT (R. Xu BASELINE RECIPE) [1]................................................. 27 FIGURE 2 - 9 POLARIZATION CURVE FROM FABRICATION WITH NEW SOL-GEL ...................................... 28 FIGURE 2 - 10 POLARIZATION OF VARIOUS