sensors

Review Giant : Basic Concepts, Microstructure, Magnetic Interactions and Applications

Inga Ennen 1,*, Daniel Kappe 1, Thomas Rempel 1, Claudia Glenske 2 and Andreas Hütten 1

1 Faculty of Physics, University of Bielefeld, P.O. Box 100131, 33501 Bielefeld, Germany; [email protected] (D.K.); [email protected] (T.R.); [email protected] (A.H.) 2 Sensitec GmbH, Georg-Ohm-Straße 11, 35633 Lahnau, Germany; [email protected] * Correspondence: [email protected]; Tel.: +49-521-106-5418

Academic Editors: Subhas Mukhopadhyay and Chinthaka Pasan Gooneratne Received: 4 May 2016; Accepted: 3 June 2016; Published: 17 June 2016

Abstract: The (GMR) effect is a very basic phenomenon that occurs in magnetic materials ranging from nanoparticles over multilayered thin films to permanent magnets. In this contribution, we first focus on the links between effect characteristic and underlying microstructure. Thereafter, we discuss design criteria for GMR-sensor applications covering automotive, biosensors as well as nanoparticular sensors.

Keywords: giant magnetoresistance; granular GMR; automotive applications; biosensors; nanoparticular sensors

1. Introduction It has been almost 30 years since one of the most fascinating advances in solid state physics occurred, the discovery of the giant magnetoresistance effect (GMR) by Grünberg and Fert in 1988 [1,2]. In thin metallic film systems, they observed that the of adjacent ferromagnetic films, separated by a thin non-magnetic interlayer, spontaneously align parallel or antiparallel, depending on the thickness of the interlayer. The orientation of the magnetization in the ferromagnetic layers strongly influences the resistance of the system. A parallel orientation is characterized by an electrical state of low resistance, while an antiparallel orientation is a state of high resistance. Due to the fact that the spacer layer thickness determines the initial configuration, an initially antiparallel orientation can be realized. The charm of this system lies in the fact that it enables a sensing of external magnetic field strengths in electrical units in between the two electric states of resistance. This discovery triggered an extensive research activity in this field in order to understand the underlying physical phenomenon as well as to exploit its technological potential. A remarkably short period, only a decade, lies between the discovery of the GMR effect and its first commercial realization in the form of magnetic field sensors and hard-disk read-heads [3]. Nowadays the spectrum of successful applications of GMR technology is impressively broad, ranging from applications in the air- and space or automotive industry, non-destructive material testing, or the compass functionality in mobile phones to biomedical techniques, like biometric measurements of eyes and biosensors, e.g., for the detection of viruses [3–5]. Thus, the potential of magnetoresistive technology seems to be far from being exhausted. Nowadays the underlying physics of GMR and the interlayer exchange coupling are broadly understood. Nevertheless, when it comes to detail, discrepancies between experimental observations and theoretical models can arise: a realistic theoretical description of electron scattering at lattice discontinuities, disorder or defects is still a crucial factor [6,7].

Sensors 2016, 16, 904; doi:10.3390/s16060904 www.mdpi.com/journal/sensors Sensors 2016, 16, 904 2 of 24

Sensors 2016, 16, 904 2 of 24 In this review, we intend to provide an overview of different aspects of the GMR effect. The first In this review, we intend to provide an overview of different aspects of the GMR effect. The first section will focus on some of the ideas used to describe GMR effects theoretically in multilayers and to section will focus on some of the ideas used to describe GMR effects theoretically in multilayers and extend them into granular systems. Thereafter, we will have a look at different systems in which GMR to extend them into granular systems. Thereafter, we will have a look at different systems in which can occur, with emphasis on the application-relevant side. GMR can occur, with emphasis on the application-relevant side. 2. Theory 2. Theory 2.1. Giant Magnetoresistance in Magnetic Multilayered Systems 2.1. Giant Magnetoresistance in Magnetic Multilayered Systems The giant magnetoresistance effect is the change of electric conductivity in a system of metallic layersThe when giant an magnetoresistance external magnetic fieldeffect changes is the change the magnetization of electric conductivity of the ferromagnetic in a system layers of metallic relative tolayers each when other. an A external parallel magnetic alignment, field like changes it is depicted the magnetization in Figure1a,has of the usually ferromagnetic a lower resistance layers relative than anto each antiparallel other. A alignment, parallel alignment, Figure1b. like The it effect is depicted size is in defined Figure as: 1a, has usually a lower resistance than an antiparallel alignment, Figure 1b. The effect size is defined as: ∆R RÒÓ ´ RÒÒ Δ“ ↑↓−↑↑ (1) R = RÒÒ (1) ↑↑ where R and R are the resistivity’s for parallel and antiparallel alignment, respectively. where ÒÒ↑↑ and ÒÓ↑↓ are the resistivity’s for parallel and antiparallel alignment, respectively. Alternatively the ratio is sometimes defined with R as denominator. The effect originates from Alternatively the ratio is sometimes defined with ÒÓ↑↓ as denominator. The effect originates from -dependentspin-dependent transporttransport ofof electronselectrons inin magneticmagnetic metals.metals.

Figure 1. GMR double layer in Current in Plane (CIP) configuration. (a) Layer magnetization parallel; Figure 1. GMR double layer in Current in Plane (CIP) configuration. (a) Layer magnetization parallel; (b) antiparallel in respect to each other. (b) antiparallel in respect to each other. This section will introduce the Boltzmann equation approach for treating the GMR effect in multilayersThis section in a classical will introduce picture. theThere Boltzmann are also a equationlot of publications approach presenting for treating quantum the GMR mechanical effect in multilayerstreatments of in athe classical GMR,picture. which Therewill not are be also discussed a lot of publications here. The Kubo presenting formalism quantum [8] mechanicaluses linear treatmentsresponse theory of the to GMR, calculate which the will effe notct of be small discussed electric here. fields The on Kubo currents. formalism Examples [8] uses for linear this ansatz response are theoryworks toby calculateCamblong the [9], effect Camblong, of small Levy electric and fields Zhang on currents.[10] and Levy, Examples Zhang for and this Fert ansatz [11]. are A works detailed by Camblongdescription [ 9and], Camblong, additional Levy literature and Zhang may [be10] obta andined Levy, in Zhang the extensive and Fert [treatment11]. A detailed of CPP description GMR in andmultilayers additional by Gijs literature and Bauer may be[12]. obtained in the extensive treatment of CPP GMR in multilayers by Gijs andThe Bauersemi-classical [12]. Boltzmann equation is used to describe the transport of electrons in metals. The modelThe semi-classical builds on the Boltzmann work of Fuchs equation and Sondheim is used toer describe who used the it transport to calculate of electrons the dependence in metals. of Thefilm modelthickness builds on onthe the conductivity work of Fuchs of thin and metal Sondheimer films [13,14]. who used The itBoltzmann to calculate theory the dependence describes the of filmdistribution thickness of oncarriers, the conductivity here electrons, ofthin of wave metal vector films k [ 13in ,vicinity14]. The of Boltzmann position r theorywith the describes distribution the distribution of carriers, here electrons, of wave vector k in vicinity of position r with the distribution() function (). The distribution function changes through processes of diffusion , the B fkprq function fk prq. The distribution function() changes through processes () of diffusion Bt , the influence of the external field and due to scattering . The total rate ofdi change f f B fprq B f prq ´ ¯ influence of the external field k and due to scattering k . The total rate of change vanishes in the steady state case whichBt f ield leads to: Bt scatt vanishes in the steady state case´ which¯ leads to: ´ ¯ () () () =− B f prq B f prq Bf prq (2) k diff` k field “ ´ k scatt (2) Bt di f f Bt f ield Bt scatt or after inserting the suitableˆ expressions:˙ ˆ ˙ ˆ ˙

() () ⋅() ⋅=− (3) scatt with the velocity, the energy, the charge of the electrons and the electric field. At this point the description varies depending on the system at hand. In case of a Current In Plane (CIP)

Sensors 2016, 16, 904 3 of 24 or after inserting the suitable expressions:

B f prq B f prq v ¨ ∇ f prq ` e k v ¨ E “ ´ k (3) k k BE k Bt ˆ k ˙ ˆ ˙scatt Sensors 2016, 16, 904 3 of 24 with vk the velocity, Ek the energy, e the charge of the electrons and E the electric field. At this point the descriptiongeometry, see varies Figure depending 2b, where on th thee current system atis hand.applied In parallel case of ato Current the layers, In Plane the electric (CIP) geometry, field will see Figurebe homogenous2b, where thethroughout current is the applied layers, parallel which to simplifies the layers, the the equation electric field significantly.E will be homogenousIn case of a throughoutCurrent Perpendicular the layers, whichto Plane simplifies (CPP) geometry, the equation see significantly.Figure 2a, the In electric case of fiel a Currentd differs Perpendicular from layer to tolayer. Plane This (CPP) description geometry, will see be Figure limited2a, on the the electric simpler field CIP differs case, a from treatment layer to of layer. the CPP This geometry description can willbe derived be limited from on [15]. the simpler CIP case, a treatment of the CPP geometry can be derived from [15].

Figure 2. Simple double layer stacks in CPP (a) and CIP (b) configuration. CPP leads to a Figure 2. Simple double layer stacks in CPP (a) and CIP (b) configuration. CPP leads to a homogeneous homogeneous current density (arrows) while the electric field is inhomogeneous, where CIP exhibits current density (arrows) while the electric field is inhomogeneous, where CIP exhibits a homogenous a homogenous electric field and an inhomogeneous current density. electric field and an inhomogeneous current density.

Assuming that the electric field introduces just small perturbations into the electron distribution Assuming that the electric field introduces just small perturbations into the electron distribution one can separate into: one can separate fk into: () = 0 () (4) fk prq “ fk ` gk prq (4) where gpr()q represents represents the the deviation deviation of the of distributionthe distribu fromtion thefrom equilibrium the equili distributionbrium distributionf 0 which is k k ´1 which is given by the Fermi-Dirac distribution0 =1expEk´EF . Furthermore, assuming given by the Fermi-Dirac distribution fk “ 1 ` exp kT . Furthermore, assuming negligible temperatures,negligible temperatures, spin-flip scattering spin-flip canscattering be omitted” can be which omitted´ governs ¯ıwhich the governs scattering the term:scattering term:

() B fk prq =(1−) −(1−) (5) “ rP 1 p1 ´ f q f 1 ´ P 1 p1 ´ f 1 q f s (5) Bt scatt kk k k k k k k scatt k1 ˆ ˙ ÿ with being shorthand for (), being the probability of a electron of momentum being with f being shorthand for f prq, P being the probability of a electron of momentum k being scatteredk into ′ and vice versa.k Thekk 1principle of microscopic reversibility, meaning =, scatteredinserting Equation into k1 and (4) viceand assuming versa. The elastic principle scattering of microscopic only lead to: reversibility, meaning Pk1k “ Pkk1, inserting Equation (4) and assuming elastic scattering only lead to: () =(() − ()) (6) B fk prq scatt “ P 1 pg 1 prq ´ g prqq (6) Bt kk k k ˆ ˙scatt k1 The scattering term may be simplified furtherÿ by introducing the relaxation time = ∑ , which neglects the scattering-in processes. This relaxation time approximation decouples the The scattering term may be simplified further by introducing the relaxation time τk “ k1Pkk1, whichBoltzmann neglects equations the scattering-in and a linearization processes. by discarding This relaxation the second time order approximation term () decouples leads to the linearized Boltzmann equation: ř Boltzmann equations and a linearization by discarding the second order term Egk prq leads to the linearized Boltzmann equation: () () ⋅() ⋅ =− (7) B f 0 prq g prq ¨ ∇ p q ` ¨ k “ ´ k Solving this equation for vk ()g k leadsr toeE thevk density (): (7) ˜ BEk ¸ τk () =− () Ω (8)

with Ω the systems volume. Assuming that () is a distribution depending on the direction, the direction parallel to the current, and splitting () into a term with the velocity component being positive () or negative () () =g () g (), the general solution of Equation (7) is: () ∓ () = ⋅ 1 exp (9) v The coefficients are given by the boundary conditions set at the outer surfaces and the interior interfaces. Derivations may also be found in [16].

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Solving this equation for gk prq leads to the electric current density J prq: e J prq “ ´ v g prq (8) Ω k k ÿk with Ω the systems volume. Assuming that gk prq is a distribution depending on the x direction, the direction parallel to the current, and splitting gk prq into a term with the velocity z component being ` ´ ` ´ positive gk prq or negative gk prq gk prq “ gk prq ` gk prq, the general solution of Equation (7) is:

B f 0 prq ¯x g˘ pxq “ eτ E ¨ v k 1 ` A˘ exp (9) k k k BE k τ tv u k „ ˆ k x ˙ ˘ The coefficients Ak are given by the boundary conditions set at the outer surfaces and the interior interfaces. Derivations may also be found in [16]. An extensive treatment of this approach in the CIP geometry is given by Hood and Falicov [17]. They use specular and diffusive scattering at outer boundaries, tuned with the parameter 1 ą Pσ ą 0 where 1 equals complete specular scattering. The metal interfaces allow for transmission parameter Tσ and reflection Rσ “ 1 ´ Tσ, which both might be specular or diffusive depending on the parameter 1 ą Sσ ą 0. Furthermore they examined cases where relaxation times where identical τk for all layers and spins, the magnetic layers where equally thick dF and the electrons effective masses m. They found the following:

∆R (a) R increases with increasing specular scattering at the outer boundaries as long as the scattering at the interfaces is not completely specular for both spin channels. ∆R (b) R is in general small as long as the type of scattering at interfaces for both spin channels is equal Sσ“Ò “ Sσ“Ó. ∆R (c) R dependence on the thickness dF of the magnetic layers is in general dependent on the scattering parameters, but its asymptotic value as function of ds, the non-magnetic layer’s thickness is zero ∆R ∆R R pds Ñ 8q “ 0, as well as for R pdF Ñ 8q “ 0. ∆R (d) R increases with increasing relaxation time τ to a maximum and then stays constant, or slowly decreases when the difference in specular scattering chances SÒ and SÓ are high.

For CPP geometry Valet and Fert found that spin-dependent scattering at the interfaces is the main contribution to GMR as long as the layers are thin, i.e., for thicknesses of a couple of hundreds of angstroms, the contribution from bulk scattering becomes predominant [15]. In contrast to previous CIP treatments, the CPP geometry gives rise to an interface resistance. Furthermore the electrons of the minority spin accumulate at the magnetic interfaces and increase the spin-flip chance of electrons into the majority conduction band. Additionally this disparity is decreased by reversed spin-flip scattering, which is accounted to by introducing a spin diffusion length ls f . For a spin-diffusion length ls f much higher than the layer thickness, a simple resistor scheme was found to be an adequate description of the process, which leads to a GMR effect of:

2 ∆R Rp ´ Rap RÒ ´ RÓ “ “ (10) R Rap ` 4RÒRÓ ˘ with Rp and Rap the resistances of the layered system with parallel and antiparallel respectively and RÒ and RÓ the resistivity of the majority and minority electrons in a magnetic layer. Lastly Ustinov and Kravtsov presented a unified theory of parallel and perpendicular GMR based on the Boltzmann equation [18]. They found CPP GMR to be higher than CIP GMR in most cases, but no definite relation between both. They found GMR even if the magnetic layers are not aligned antiparallel in zero magnetic field, in case the angle between magnetizations is exceeding a critical angle. The dependence of the GMR effect on the applied magnetic field was found to be different Sensors 2016, 16, 904 5 of 24

´ M H in CIP and CPP cases, while ∆R pHq “ Rp0q RpHq ă µ2, with µ “ p q being the relative R CIP RpHq CIP MS magnetization, no such limit´ exists¯ in the CPP´ geometry.¯

2.2. Giant Magnetoresistance in Granular Solids The giant magnetoresistance effect is not exclusively found in magnetic multilayers, but may also be found in systems with multiple ferromagnetic moments, which align parallel in exterior magnetic fields. An example of this are granular systems of a conducting non-magnetic matrix with embedded magnetic, conducting particles. In general, these systems have, without the influence of an external magnetic field, a random distribution of magnetic domains, caused by dipole interaction and depending on the distances between particles, Ruderman-Kittel-Kasuya-Yoshida (RKKY) coupling. Sensors 2016, 16, 904 5 of 24 By applying an external field, magnetic particles can be aligned in the corresponding direction, resulting in a decrease of resistance of the overall granular systems (see Figure() 3). It was found in found in experiments, that the global relative magnetization () = is a good variable to experiments, that the global relative magnetization µ pHq “ MpHq is a good variable to describe the describe the GMR in granular systems: MS GMR in granular systems: R0R0pH(Hq) ´−RR p(HHq) « Aµ2(pH) q (11)(11) Rp(Hq) where A determinesdetermines thethe effecteffect amplitudeamplitude and is to be measured for each experimental setup separately [19]. [19].

Figure 3. Schematic illustrationillustration of of the the granular granular GMR GMR (solid (solid line) line) in dependencein dependence of theof the applied applied field field and andsample sample magnetization magnetization (dotted (dotted line). line). The granular The granul GMRar exhibitsGMR exhibits the highest the highest resistance resistance at the coercive at the coercivefield asthe field magnetic as the magnetic moments moments of the particles of the partic are randomlyles are randomly oriented oriented there. there. The dashed The dashed lines arelines a areguide a guide to the to eye. the eye.

A couple of models exist, which try to evaluate the parameter on a theoretical basis. A couple of models exist, which try to evaluate the parameter A on a theoretical basis. Kim et al. [20] proposed a model based on the Kubo formalism. They modeled the magnetic grains as Kim et al. [20] proposed a model based on the Kubo formalism. They modeled the magnetic grains centers for potential barriers. They found their model to be in agreement with data by Xiao, Jiang and as centers for potential barriers. They found their model to be in agreement with data by Xiao, Jiang Chien [19], but as approaches 1, the GMR deviated from ∝(() →). Additionally, they ∆R 2 and Chien [19], but as µ approaches 1, the GMR deviated from R 9µ pM pHq Ñ MSq. Additionally, examinedthey examined the GMR the GMR dependence dependence on grain on grain size size compared compared to toexperiments experiments by by Xiao Xiao etet al. al. [21][21] and Xiong etet al.al. [[22].22]. TheyThey foundfound anan optimaloptimal sizesize forfor grains grains (compare (compare Figure Figure 14). 4). The The GMR effect rises rapidly untiluntil it reachesit reaches a maximum a maximum at the optimalat the grainoptimal size grain and then size slowly and decreases.then slowly They decreases. assumed Theythis to assumed be an effect this of to larger be an grains effect acting of larger as conduction grains acting medium as conduction instead of onlymedium scattering instead centers. of only scatteringZang centers. and Levy using a CPP like formalism they derived previously [23,24]. They found: Zang and Levy using a CPP like formalism they derived previously [23,24]. They found: (a) Magnetoresistance increases with the mean free path of the electrons in the matrix material. (a) Magnetoresistance increases with the mean free path of the electrons in the matrix material. (b) Magnetoresistance increases with the ratio between spin-dependent and spin-independent (b) Magnetoresistancepotentials, which they increases expect with to be comparablethe ratio between to those spin-dependent found in multilayers. and spin-independent (c) potentials,Magnetoresistance which they increases expect withto be spin-dependentcomparable to those scattering found roughness in multilayers. of the interfaces. (c) Magnetoresistance increases with spin-dependent scattering roughness of the interfaces. (d) Magnetoresistance increases with decreasing grain size as long as the external is strong enough to saturate all granules. (e) Magnetoresistance increases with concentration of granules as long as the granules do not form magnetic domains at high concentrations. (f) Magnetoresistance depends on the size distribution of the grains and needs to be precisely known to compare theory and experiment. (g) Magnetoresistance differs from () when the grain size distribution is broad as approaches 1.

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(d) Magnetoresistance increases with decreasing grain size as long as the external magnetic field is strong enough to saturate all granules. (e) Magnetoresistance increases with concentration of granules as long as the granules do not form magnetic domains at high concentrations. (f) Magnetoresistance depends on the size distribution of the grains and needs to be precisely known to compare theory and experiment. ∆R 2 (g) Magnetoresistance differs from R « A µ pHq when the grain size distribution is broad as µ approachesSensors 2016, 16, 1.904 6 of 24

Ferrari,Ferrari, da Silvada Silva and and Knobel Knobel found found that that granulargranular systems systems exhibits exhibits a behavior a behavior similar similar to the to CPP the CPP GMRGMR in multilayers in multilayers for for the the case case of of the the granule granule conductivityconductivity being being much much larger larger than than the conductivity the conductivity of theof matrix the matrix [25, 26[25,26]. ].

Figure 4. Micromagnetic simulation of nanoparticles (20 nm) combined with a molecular dynamics Figure 4. Micromagnetic simulation of nanoparticles (20 nm) combined with a molecular dynamics simulation to model clustering of particles, see [27]. simulation to model clustering of particles, see [27]. These models all use some kind of averaging the magnetic moments of the systems, which seems Theseto work models fine as all long use as some the concentration kind of averaging of grai thens is magnetic low enough. moments As soon of theas the systems, distance which between seems to workgrains fine as becomes long as thesmall concentration their dipole of grainsinteractions is low lead enough. to the As soonassembly as the of distance ferromagnetic between or grains becomesantiferromagnetic small their dipole domains, interactions or more leadcomplex to the ordering. assembly Teich of ferromagneticet al. [27] used or micromagnetic antiferromagnetic domains,simulations or more to calculate complex magnetic ordering. ground Teich stateset al. for[ 27magnetic] used particle micromagnetic assemblies, simulations an example tomay calculate be seen in Figure 4. These areas of magnetic ordering are likely to have influence on the electric magnetic ground states for magnetic particle assemblies, an example may be seen in Figure4. These conductivity of the system. To the best of our knowledge, there are to this point no studies on the areasinfluence of magnetic of this. ordering Systematic are likelyaddition to haveof differently influence shaped on the particles electric or conductivity the removal of of particles the system. could To the best oflead our to knowledge,increased GMR there and are tailoring to this of point a granular no studies system on to thespecific influence needs. of this. Systematic addition of differently shaped particles or the removal of particles could lead to increased GMR and tailoring of a granular3. GMR system Systems to specific needs.

3. GMR3.1. Thin Systems Film Systems The first GMR multilayer stack was prepared in 1988 by Fert et al. [1]. They examined the 3.1. Thin Film Systems characteristics of a {Fe/Cr}N system to explore the origin of the GMR effect. Driven by possible Theapplications first GMR as sensors multilayer in automotive stack was and prepared read-head in 1988 industry, by Fert numerouset al. [1 ].studies They have examined been the performed to improve the GMR characteristic since then [6,7,28]. A main goal was the improvement characteristics of a {Fe/Cr}N system to explore the origin of the GMR effect. Driven by possible applicationsof layer asmaterials sensors and in automotivethicknesses in and order read-head to identify industry, the optimum numerous microstructural studies have and been magnetic performed features which enhances the GMR effect amplitudes in the multilayer systems and therefore, achieve to improve the GMR characteristic since then [6,7,28]. A main goal was the improvement of layer higher sensitivities for sensor applications. Interface roughness is one of these microstructural materialscharacteristics and thicknesses that determines in order the to GMR identify potential the an optimumd has been microstructural intensively studied and (for magnetic a review features of whichnumerous enhances interface the GMR studies effect performed amplitudes on Fe/Cr in the and multilayer Co/Cu multilayers systems and see therefore,[6]). Furthermore achieve the higher grain size has to be considered [29,30]. It has been found that neither the crystallite size nor the interface roughness alone determine the GMR of a multilayer, but the combination of both aspects. A combination of large grains with moderate interface roughness has been reported to be an ideal candidate for good GMR [29,31,32]. The interface roughness can be influenced employing a suitable buffer layer, whereas an appropriate buffer layer thickness has to be chosen depending on the materials used and the number of double layers. In Figure 5 the influence of the number of

Sensors 2016, 16, 904 7 of 24 sensitivities for sensor applications. Interface roughness is one of these microstructural characteristics that determines the GMR potential and has been intensively studied (for a review of numerous interface studies performed on Fe/Cr and Co/Cu multilayers see [6]). Furthermore the grain size has to be considered [29,30]. It has been found that neither the crystallite size nor the interface roughness alone determine the GMR of a multilayer, but the combination of both aspects. A combination of large grains with moderate interface roughness has been reported to be an ideal candidate for good GMR [29,31,32]. The interface roughness can be influenced employing a suitable buffer layer, whereas an appropriateSensors 2016, 16 buffer, 904 layer thickness has to be chosen depending on the materials used and the7 of number 24 of double layers. In Figure5 the influence of the number of Co 1.1nm/Cu2.0nm double layers on the Co1.1nm/Cu2.0nm double layers on the GMR amplitude has been shown for two different Py buffer layer GMR amplitude has been shown for two different Py buffer layer thicknesses. For small numbers of thicknesses. For small numbers of bilayers an increasing thickness of the buffer layer is favorable to bilayersobtain an increasinga larger GMR thickness amplitude of thedue buffer to the layerenhanc isement favorable of the to antiferromagnetic obtain a larger GMR coupling amplitude in the due to theundermost enhancement bilayers. of the antiferromagnetic coupling in the undermost bilayers.

Figure 5. GMR amplitude measured at room temperature as a function of the number of double layers Figure 5. GMR amplitude measured at room temperature as a function of the number of double N of (Co1.1 nm/Cu2.0 nm)N for two Py buffer layer thicknesses of 3.4 nm (red) and 8.1 nm (black), layers N of (Co /Cu ) for two Py buffer layer thicknesses of 3.4 nm (red) and 8.1 nm (black), respectively.1.1 Data nm taken2.0 nmfromN [33]. respectively. Data taken from [33]. This concept fails when sputtering a large number of bilayers, because the shunting of the thicker Thisbuffer concept or bilayer fails compensates when sputtering or even a destroys large number the effect of bilayers,of a larger because antiferromagnetically the shunting ofcoupled the thicker bufferlayer orbilayer fractioncompensates [33]. However, or due even to the destroys high GMR the effectmagnitude of a largerand, therefore, antiferromagnetically sensitivity for small coupled layerchanges fraction of [ 33magnetic]. However, fields, dueGMR to systems the high are GMRvery a magnitudettractive for sensor and, therefore, applications sensitivity in industry. for In small the following section we will have a closer view on different GMR applications: changes of magnetic fields, GMR systems are very attractive for sensor applications in industry. In the following3.1.1. sectionInformation we willTechnology have a closer view on different GMR applications:

3.1.1. InformationThe first industrial Technology application of GMR thin film systems after the discovery of the effect was in the field of information technology: the realization of GMR based hard-disk read-heads in 1997 [3,28]. TheHere, first the industrialGMR sensor application is used to of detect GMR the thin magn filmetization systems direction after the of discovery the bits on of the the magnetic effect was in the fieldrecording of information medium, technology:which are assigned the realization to a logical of GMR 0 or based 1, respectively. hard-disk Due read-heads to the continual in 1997 [3 ,28]. Here,improvement the GMR sensor of storage is used dens to detectity, and the thus magnetization reduction of bit direction size, a good of the scalability bits on and the magnetichigh sensitivity recording medium,of the which sensor areelement assigned are necessary to a logical requirements. 0 or 1, respectively. Furthermore, Due a linear to the sensor continual characteristic improvement for the of storagereliable density, detection and thusof bits reduction and long-term of bit stability size, a are good crucial scalability factors. To and detect high the sensitivity transition ofbetween the sensor elementbits GMR are necessary spin-valve requirements.sensors are commonly Furthermore, used, which a have linear been sensor first proposed characteristic by Dieny for et theal. [34]. reliable As schematically shown in Figure 6a, these spin-valves consist of three functional layers: a detection of bits and long-term stability are crucial factors. To detect the transition between bits ferromagnetic (FM) layer with a fixed direction of magnetization (reference system), a non-magnetic GMR spin-valve sensors are commonly used, which have been first proposed by Dieny et al. [34]. As (NM) interlayer and another ferromagnetic layer, which magnetization direction can freely align with schematicallyexternal magnetic shown infields Figure (free6a, layer). these To spin-valves achieve a maximum consist of stability three functional of the reference layers: system a ferromagnetic against (FM)external layer with fields, a fixed it typically direction consists of magnetization of an artificial (referenceantiferromagnet system), (AM) a non-magneticwith a pinned layer (NM) and interlayer an and anotherantiferromagnetically ferromagnetic coupled layer, whichreference magnetization layer. That way, direction the magnetization can freely align of the with reference external layer magnetic can fieldsbe (free fixed layer). into a Tocertain achieve direction, a maximum employing stability the exch ofange the bias reference effect [35]. system The againstexchange external bias field fields, is it typicallytemperature consists dependent of an artificial and antiferromagnetvaries for different (AM) materi withals. In a pinnedorder to layerlet the and free anlayer antiferromagnetically follow changes in the external magnetic field, the thickness of the non-magnetic interlayer has to be chosen to ensure a minimal magnetic coupling of the magnetic layers. Moving a spin-valve across the interface between two bits with opposite magnetization direction, the orientation of the magnetization of the free layer changes according to the stray field of the bits, resulting in a resistance change of the entire reading structure (compare Figure 6b). The resistance change causes a variation of current flowing through electronic circuits connected to the

Sensors 2016, 16, 904 8 of 24 coupled reference layer. That way, the magnetization of the reference layer can be fixed into a certain direction, employing the effect [35]. The exchange bias field is temperature dependent Sensors 2016, 16, 904 8 of 24 and varies for different materials. In order to let the free layer follow changes in the external magnetic field,reading the thickness structures. of This the non-magneticchange of the current interlayer is detected has to and be chosen decoded to to ensure reveal athe minimal information magnetic couplingstored of on the the magnetic disk. layers.

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reading structures. This change of the current is detected and decoded to reveal the information stored on the disk.

Figure 6. (a) Schematic setup of the stack configuration of a GMR spin-valve sensor; (b) Conceptual Figure 6. (a) Schematic setup of the stack configuration of a GMR spin-valve sensor; (b) Conceptual operation of a GMR read head: when a spin-valve sensor moves across an interfaces between two bits operationwith magnetic of a GMR moments read head: oriented when in a spin-valveopposite direction sensor moves(marked across by “1” an and interfaces “0”), the between magnetic two bits withmoment magnetic of momentsthe free layer oriented is reoriented in opposite according direction to the (markedorientation by of “1” the andnext “0”),bit. the magnetic moment of the free layer is reoriented according to the orientation of the next bit. For sensing small magnetic fields the distance between the stray field source and the sensor elementMoving is a an spin-valve important across parameter, the interface because betweenthe stray field two bitsstrength with drops opposite strongly magnetization with increasing direction, distance [36]. In Figure 7 the magnetic stray field strength as a function of the distance z is shown, the orientation of the magnetization of the free layer changes according to the stray field of the bits, illustrating the 1/z³ dependence. Therefore the reading head is required to maintain a constant resulting in a resistance change of the entire reading structure (compare Figure6b). The resistance distanceFigure to the 6. ( aspinning) Schematic hard setup disk of surfacthe stacke, whichconfiguration has to ofbe a as GMR small spin-valve as possible. sensor; (b) Conceptual change causesoperation a variationof a GMR read of head: current when flowing a spin-valve through sensor moves electronic across circuitsan interfaces connected between two to bits the reading structures.with This magnetic change moments of the oriented current in is opposite detected direction and decoded (marked toby reveal“1” and the “0”), information the magnetic stored on the disk. moment of the free layer is reoriented according to the orientation of the next bit. For sensing small magnetic fields the distance between the stray field source and the sensor element isFor an sensing important small parameter, magnetic fields because the distance the stray between field strength the stray drops field source strongly and with the sensor increasing element is an important parameter, because the stray field strength drops strongly with increasing distance [36]. In Figure7 the magnetic stray field strength as a function of the distance z is shown, distance [36]. In3 Figure 7 the magnetic stray field strength as a function of the distance z is shown, illustratingillustrating the 1/ thez dependence.1/z³ dependence. Therefore Therefore the the reading reading head head is required is required to maintain to maintain a constant a constant distance to thedistance spinning to the hard spinning disk surface, hard disk which surfac hase, which to be has as smallto be as as small possible. as possible.

Figure 7. Magnetic stray field strength as a function of the distance from the layer surface, calculated for a bit structure with opposing magnetic moments as shown in the sketch. The arrows in the sketch mark the positions of the stray field calculations (black curve: middle of bits, red curve: interface between bits).

Recently, hard disk drives came onto market, which use He as filling gas between disks and read heads to reduce turbulences, and thus allowed a reduction of the distance between the disks and their read heads. Combined with e.g., the shingled magnetic recording technique for hard disks, where data tracks overlap with the adjacent tracks like shingles, GMR technology allows one to realize hard diskFigure drivesFigure 7. Magnetic with7. stray stray capaci field field strengthties strength of up as asto a a10 function function TByte of [37]. the the distance distance from from the the layer layer surface, surface, calculated calculated for a bit structure with opposing magnetic moments as shown in the sketch. The arrows in the sketch for a bit structure with opposing magnetic moments as shown in the sketch. The arrows in the sketch 3.1.2. markAutomotive the positions Applications of the stray field calculations (black curve: middle of bits, red curve: interface mark the positions of the stray field calculations (black curve: middle of bits, red curve: interface between bits). betweenThe bits).automotive industry offers a great field of applications for GMR sensors like sensing rotational speed, angle and position [38–40]. Several technical requirements have to be fulfilled to Recently, hard disk drives came onto market, which use He as filling gas between disks and read heads to reduce turbulences, and thus allowed a reduction of the distance between the disks and their read heads. Combined with e.g., the shingled magnetic recording technique for hard disks, where data tracks overlap with the adjacent tracks like shingles, GMR technology allows one to realize hard disk drives with storage capacities of up to 10 TByte [37].

3.1.2. Automotive Applications The automotive industry offers a great field of applications for GMR sensors like sensing rotational speed, angle and position [38–40]. Several technical requirements have to be fulfilled to

Sensors 2016, 16, 904 9 of 24

Recently, hard disk drives came onto market, which use He as filling gas between disks and read heads to reduce turbulences, and thus allowed a reduction of the distance between the disks and their read heads. Combined with e.g., the shingled magnetic recording technique for hard disks, where data tracks overlap with the adjacent tracks like shingles, GMR technology allows one to realize hard disk drives with storage capacities of up to 10 TByte [37].

3.1.2. Automotive Applications The automotive industry offers a great field of applications for GMR sensors like sensing rotational speed, angle and position [38–40]. Several technical requirements have to be fulfilled to make the GMR technology compatible for automotive applications: linear and non-hysteretic GMR characteristics, high sensitivity, small temperature drift and long-term stability under application conditions. For application in rotational speed sensing for example, spin-valve sensors are commonly used (see Section 3.1.1) to ensure the desired sensor characteristics and sensitivity for small magnetic fields. For this purpose, the free layer of the spin-valve system needs to have an anisotropy axis, to which the magnetization preferably orients, if no external magnetic field is applied. This axis can be realized by using crystal anisotropy or by adjusting the geometry of the GMR structure and making use of the shape anisotropy. To obtain a high anisotropy and therefore a strong alignment, a high aspect ratio of the GMR structure has to be achieved. For example, for realization of linear transition regions in the range of several mT, the width of the GMR device has to be structured down to sizes of 1 µm and below [41,42]. A configuration which considers these aspects is the arrangement of meander shaped GMR sensors in a Wheatstone bridge [43]. This configuration minimizes the effects of temperature and disturbing magnetic fields. Furthermore, in this configuration hysteresis effects can be minimized e.g., by a slight change of the pinning directions out of the primary 90˝ orientation. In [43] a reduction of hysteresis by about 1/5 of the primary value has been reported. However, due to this geometry the GMR sensitivity is decreased and finally, for the optimization of GMR sensors always a compromise between sensitivity and magnetic reversal characteristic have to be found in consideration of the application of the sensor. Since a lot of automotive magnetic sensors are implemented into security-relevant functions, it is of importance that the magnetic behavior of the GMR sensors be stable under the applied conditions. Thermal stability is a main factor here due to the exposure to high temperatures in the range of 200–360 ˝C during manufacturing as well as temperatures up to 200 ˝C for extended periods during up to 40,000 h of operation, which have to be tolerated by the sensor without loss of performance. Many studies report an initial increase of the GMR magnitude, compared to the as prepared samples, after an annealing for a short time at moderate temperatures between 250 ˝C and 380 ˝C[44–49]. This increase of the GMR effect originates from an improvement of the quality of the interfaces between the magnetic/non-magnetic layers as well as defect recovery by diffusion processes [45,48,50]. Sensors 2016, 16, 904 9 of 24 make the GMR technology compatible for automotive applications: linear and non-hysteretic GMR characteristics, high sensitivity, small temperature drift and long-term stability under application conditions. For application in rotational speed sensing for example, spin-valve sensors are commonly used (see Section 3.1.1) to ensure the desired sensor characteristics and sensitivity for small magnetic fields. For this purpose, the free layer of the spin-valve system needs to have an anisotropy axis, to which the magnetization preferably orients, if no external magnetic field is applied. This axis can be realized by using crystal anisotropy or by adjusting the geometry of the GMR structure and making use of the shape anisotropy. To obtain a high anisotropy and therefore a strong alignment, a high aspect ratio of the GMR structure has to be achieved. For example, for realization of linear transition regions in the range of several mT, the width of the GMR device has to be structured down to sizes of 1 µm and below [41,42]. A configuration which considers these aspects is the arrangement of meander shaped GMR sensors in a Wheatstone bridge [43]. This configuration minimizes the effects of temperature and disturbing magnetic fields. Furthermore, in this configuration hysteresis effects can be minimized e.g., by a slight change of the pinning directions out of the primary 90° orientation. In [43] a reduction of hysteresis by about 1/5 of the primary value has been reported. However, due to this geometry the GMR sensitivity is decreased and finally, for the optimization of GMR sensors always a compromise between sensitivity and magnetic reversal characteristic have to be found in consideration of the application of the sensor. Since a lot of automotive magnetic sensors are implemented into security-relevant functions, it is of importance that the magnetic behavior of the GMR sensors be stable under the applied conditions. Thermal stability is a main factor here due to the exposure to high temperatures in the range of 200–360 °C during manufacturing as well as temperatures up to 200 °C for extended periods during up to 40,000 h of operation, which have to be tolerated by the sensor without loss of performance. Many studies report an initial increase of the GMR magnitude, compared to the as prepared samples, after an annealing for a short time at moderate temperatures between 250 °C and 380 °C [44–49]. This increase of the GMR effect originates from an improvement of the quality of the Sensorsinterfaces2016, 16between, 904 the magnetic/non-magnetic layers as well as defect recovery by diffusion10 of 24 processes [45,48,50].

FigureFigure 8.8. 3D3D reconstructionreconstruction ofof atomatom probeprobetomography tomography of of a a Fe Fe (red) (red) Ni Ni (yellow)/Cu (yellow)/Cu (blue)/Co(blue)/Co (green) trilayer:trilayer: ((a)) asas preparedprepared Co/CuCo/Cu interface (upper image)image) asas wellwell asas Cu/PyCu/Py interface (lower image);image); ((bb,)c )and show (c) the show element the element distribution distribution after annealing after annealin at 350 ˝gC at for 350 30 °C min for for 30 the min marked for the Co/Cu marked interface Co/Cu regioninterface in (regiona) (adapted in (a) from(adapted [51]). from [51]).

The optimum temperature depends on the choice of layer materials, thicknesses, the possibly used buffer layer and substrate materials. Within the framework of this review the focus is on Co/Cu based layer systems. For example, if the thickness of the individual layers has been optimized for the first antiferromagnetic coupling (AFC) maximum an optimum temperature of about 150 ˝C has been reported [52], while for systems optimized for the second AFC maximum a critical temperature of about 375 ˝C has been observed [53]. For annealing processes above the critical temperature a breakdown of the GMR amplitude is observed. Different reasons for this deterioration of GMR in Co/Cu multilayers have been discussed in literature: Observations of Co bridges through Cu layers have been reported by means of field ion microscopy and transmission electron microscopy (TEM) [54,55]. These defects of the layered structure were observed in systems with high interface roughnesses even in the as prepared state leading to a strong ferromagnetic coupling of the adjacent Co layers. TEM studies of Co/Cu multilayer samples reported by Rätzke et al. show the transport of Cu into the Co layers along grain boundaries [47]. An alternative method for the observation of the mechanism of GMR deterioration is the atom probe tomography (APT) [51,56,57]. In Figure8a a 3D reconstruction of a Py25nm/Cu20nm/Co10nm trilayer obtained by APT is shown. After an annealing at 350 ˝C for 30 min. (Figure8b,c) it can be clearly seen that Ni atoms from the Py buffer layer segregate along grain boundaries into the Cu layer (red dots in Figure8c). This segregation path forms the initial stage of pinhole formation and causes ferromagnetic bridges through the non-magnetic coupling layer, causing a decrease of GMR effect [51]. A concept how to avoid these effects and to improve the temperature stability of Cu/Co multilayer systems has been reported by Heitmann et al. [58]: For a [Py3nm/Cu6nm/Co3nm/Cu6nm]20 multilayer system it has been shown that an annealing at 500 ˝C for 24 h triggered a complete recrystallization of the sample from a dominating polycrystalline [111] texture in the as prepared state to a [100] quasi single crystalline state after annealing. The most striking aspect of the microstructural evolution is the preservation of the layered structure (compare Figure9a,b). This crystallographic reorientation is triggered by the minimization of lattice mismatch elastic energy: Under equal strain the elastic energy in a [111] oriented CoCu material is higher than the energy in a [100] structure due to the elastic Sensors 2016, 16, 904 10 of 24

The optimum temperature depends on the choice of layer materials, thicknesses, the possibly used buffer layer and substrate materials. Within the framework of this review the focus is on Co/Cu based layer systems. For example, if the thickness of the individual layers has been optimized for the first antiferromagnetic coupling (AFC) maximum an optimum temperature of about 150 °C has been reported [52], while for systems optimized for the second AFC maximum a critical temperature of about 375 °C has been observed [53]. For annealing processes above the critical temperature a breakdown of the GMR amplitude is observed. Different reasons for this deterioration of GMR in Co/Cu multilayers have been discussed in literature: Observations of Co bridges through Cu layers have been reported by means of field ion microscopy and transmission electron microscopy (TEM) [54,55]. These defects of the layered structure were observed in systems with high interface roughnesses even in the as prepared state leading to a strong ferromagnetic coupling of the adjacent Co layers. TEM studies of Co/Cu multilayer samples reported by Rätzke et al. show the transport of Cu into the Co layers along grain boundaries [47]. An alternative method for the observation of the mechanism of GMR deterioration is the atom probe tomography (APT) [51,56,57]. In Figure 8a a 3D reconstruction of a Py25nm/Cu20nm/Co10nm trilayer obtained by APT is shown. After an annealing at 350 °C for 30 min. (Figure 8b,c) it can be clearly seen that Ni atoms from the Py buffer layer segregate along grain boundaries into the Cu layer (red dots in Figure 8c). This segregation path forms the initial stage of pinhole formation and causes ferromagnetic bridges through the non-magnetic coupling layer, causing a decrease of GMR effect [51]. A concept how to avoid these effects and to improve the temperature stability of Cu/Co multilayer systems has been reported by Heitmann et al. [58]: For a [Py3nm/Cu6nm/Co3nm/Cu6nm]20 multilayer system it has been shown that an annealing at 500 °C for 24 h triggered a complete recrystallization of the sample from a dominating polycrystalline [111] texture in the as prepared Sensorsstate2016 , to16 ,a 904 [100] quasi single crystalline state after annealing. The most striking aspect of the11 of 24 microstructural evolution is the preservation of the layered structure (compare Figure 9a,b). This crystallographic reorientation is triggered by the minimization of lattice mismatch elastic energy: propertiesUnder of equal the materials.strain the elastic By recrystallization energy in a [111] in orie a [100]nted CoCu structure material a reduction is higher ofthan elastic the energy energy in in the orderaof [100] 0.8 structure eV per interface due to the atom elastic is achievedproperties [of33 ,the59]. materials. But it is By important recrystallization to note, in that a [100] a prior structure annealing of thea samplereduction at of moderate elastic energy temperatures in the order which of 0.8 has eV led per to interface a considerable atom is achieved reduction [33, of59 dislocations]. But it is in the courseimportant of recovery, to note, that while a prior the temperature annealing of the was sa notmple high at moderate enough totemperatures activate recrystallization which has led to process, a a furtherconsiderable temperature reduction increase of dislocations not necessarily in the cour initiatese of recovery, a recrystallization while the temperature any more. was This not ishigh caused by theenough decrease to activate of the recrystallization driving force [60 process,]. Therefore, a further recrystallization temperature increase can onlynot necessarily occur after initiate heating a up recrystallization any more. This is caused by the decrease of the driving force [60]. Therefore, the sample directly to sufficient temperatures. The GMR measurements, given in Figure9d, for the recrystallization can only occur after heating up the sample directly to sufficient temperatures. The recrystallizedGMR measurements, Co/Cu multilayer given in Figure show 9d, that for the the GMR recrystallized effect remains Co/Cu multilayer stable at show further that heat the treatmentGMR beloweffect the initialremains annealing stable at further temperature heat treatment for 64 h.below the initial annealing temperature for 64 h.

Sensors 2016, 16, 904 11 of 24

(c) Figure 9. Cont(d) . as prepared CuCo 5 @ 500°C, 1 h 500°C for 1h fcc [200] 10000 + 400°C, 64 h 4

[%] 3 CuCo sat 1000 fcc [111] 2 R / R R /  Intensity[cps] 1

100 0 38 40 42 44 46 48 50 52 54 56 58 -2000 -1000 0 1000 2000 2  [deg] External magnetic field [Oe]

Figure 9. Comparison of TEM images of a [Py3nm/Cu6nm/Co3nm/Cu6nm]20 multilayer in the as prepared Figure 9. Comparison of TEM images of a [Py /Cu /Co /Cu ] multilayer in the as state (a) and after annealing at 450 °C for 24 h (b3nm). The insets6nm show3nm the corresponding6nm 20 selected area prepared state (a) and after annealing at 450 ˝C for 24 h (b). The insets show the corresponding selected diffraction pattern. The micrographs prove that the layered structure of the sample is preserved area diffractionduring annealing pattern. while The the micrographs microstructure prove changes that from the layered polycrystalline structure to qu ofasi the single sample crystalline, is preserved duringoriented annealing in fcc while[100] direction; the microstructure (c) X-ray diffraction changes pattern from of polycrystalline a Co/Cu multilayer to quasi system single before crystalline, and orientedafter inannealing fcc [100] showing direction; the (recrystallizationc) X-ray diffraction effect; pattern(d) GMR of measurements a Co/Cu multilayer at room temperature system before for and afterthe annealing recrystallized showing Co/Cu the multilayer: recrystallization the GMR effect; effect remains (d) GMR stable measurements at further heat at treatment room temperature at 400 °C for the recrystallizedfor 64 h [33]. Co/Cu multilayer: the GMR effect remains stable at further heat treatment at 400 ˝C for 64 h [33]. 3.1.3. Biosensors 3.1.3. BiosensorsDue to the ability of GMR systems to sense even small magnetic fields, the potential of GMR sensors for the detection of magnetic beads was realized and led to another growing technological Duefield, tothe the development ability of GMRof magnetic systems biosensors to sense for even life science small applications. magnetic fields, Only theten years potential after ofthe GMR sensorsdiscovery for the of detection GMR the first of magnetic magnetic beadsbiosensor was was realized presented and by led Baselt to anotheret al. [61]. growing technological field, theIn development Figure 10 an illustration of magnetic of the biosensors detection forprinciple life science is shown. applications. Specific proteins Only are ten immobilized years after the discoveryon the of sensor GMR surface. the first Superparamagnetic magnetic biosensor nanoparticles was presented or beads, by Baseltwhich areet al. specifically[61]. attached to Ina target Figure antibody, 10 an illustration are used for of detection. the detection In a wa principleshing step, is unbound shown. Specificmagnetic proteinsmarkers are are removed immobilized on theand sensor beads surface. bound to Superparamagnetic antigen molecules are nanoparticles measured. or beads, which are specifically attached to a target antibody, are used for detection. In a washing step, unbound magnetic markers are removed and beads bound to antigen molecules are measured.

Figure 10. Schematic representation of a magnetic biosensor: (a) a superparamagnetic bead functionalized with a receptor molecule hybridize to the target molecule attached onto the sensor surface; (b) An external field align the magnetic moment of the bead and the magnetic stray field can be detected by the GMR sensor (adapted from [62]).

The superparamagnetic nature of the beads allows to switch on their magnetic stray field by a homogeneous external magnetic field oriented perpendicular to the sensor surface, see Figure 10b. Hence, the stray field components of the magnetic markers within the sensitive sensor area can be detected by a drop in the electrical resistance of the GMR sensor. For an optimum bead detection,

Sensors 2016, 16, 904 11 of 24

(c) (d) as prepared CuCo 5 @ 500°C, 1 h 500°C for 1h fcc [200] 10000 + 400°C, 64 h 4

[%] 3 CuCo sat 1000 fcc [111] 2 R / R R /  Intensity[cps] 1

100 0 38 40 42 44 46 48 50 52 54 56 58 -2000 -1000 0 1000 2000 2  [deg] External magnetic field [Oe]

Figure 9. Comparison of TEM images of a [Py3nm/Cu6nm/Co3nm/Cu6nm]20 multilayer in the as prepared state (a) and after annealing at 450 °C for 24 h (b). The insets show the corresponding selected area diffraction pattern. The micrographs prove that the layered structure of the sample is preserved during annealing while the microstructure changes from polycrystalline to quasi single crystalline, oriented in fcc [100] direction; (c) X-ray diffraction pattern of a Co/Cu multilayer system before and after annealing showing the recrystallization effect; (d) GMR measurements at room temperature for the recrystallized Co/Cu multilayer: the GMR effect remains stable at further heat treatment at 400 °C for 64 h [33].

3.1.3. Biosensors Due to the ability of GMR systems to sense even small magnetic fields, the potential of GMR sensors for the detection of magnetic beads was realized and led to another growing technological field, the development of magnetic biosensors for life science applications. Only ten years after the discovery of GMR the first magnetic biosensor was presented by Baselt et al. [61]. In Figure 10 an illustration of the detection principle is shown. Specific proteins are immobilized on the sensor surface. Superparamagnetic nanoparticles or beads, which are specifically attached to Sensorsa 2016target, 16 antibody,, 904 are used for detection. In a washing step, unbound magnetic markers are removed12 of 24 and beads bound to antigen molecules are measured.

FigureFigure 10. 10.Schematic Schematic representation representation of a magnetic biosensor: biosensor: (a) (aa) superparamagnetic a superparamagnetic bead bead functionalizedfunctionalized with with a receptora receptor molecule molecule hybridizehybridize to to the the target target molecule molecule attached attached onto onto the sensor the sensor surface;surface; (b) An(b) An external external field field align align the the magnetic magnetic moment of of the the bead bead and and the themagnetic magnetic stray stray field can field can be detectedbe detected by theby the GMR GMR sensor sensor (adapted (adapted fromfrom [[62]).62]).

The superparamagnetic nature of the beads allows to switch on their magnetic stray field by a homogeneousThe superparamagnetic external magnetic nature field of theoriented beads perpen allowsdicular to switch to the onsensor their surface, magnetic see Figure stray field10b. by a homogeneousHence, the externalstray field magnetic components field of orientedthe magnetic perpendicular markers within to the sensitive sensor surface, sensor area see can Figure be 10b. Hence,detected the stray by a fielddrop componentsin the electrical of resistance the magnetic of the markersGMR sensor. within For thean optimum sensitive bead sensor detection, area can be detected by a drop in the electrical resistance of the GMR sensor. For an optimum bead detection,

GMRSensors sensors 2016, 16 with, 904 isotropic signals and high sensitivities are needed. In [62,63] the12 useof 24 of a Py1.6nm [Cu1.9nm/Py1.6nm]10/Ta3nm multilayer stack for the detection of magnetic beads was reported. To preventGMR sensors any influences with isotropic of magnetic signals and anisotropies high sensitivities of the are used needed. materials In [62,63] on the theGMR use of characteristic a Py1.6nm [Cu1.9nm/Py1.6nm]10/Ta3nm multilayer stack for the detection of magnetic beads was reported. To prevent a spiral-shaped structure has been chosen. In Figure 11a the nearly isotropic GMR characteristic for any influences of magnetic anisotropies of the used materials on the GMR characteristic a spiral-shaped two perpendicular oriented in-plane magnetic fields are shown. For this type of sensor a sensitivity structure has been chosen. In Figure 11a the nearly isotropic GMR characteristic for two perpendicular of 0.6%oriented per kA/min-plane for magnetic in plane fields magnetic are shown. fields For hasthis type been of achieved, sensor a sensitivity resulting of in 0.6% a detection per kA/m limit of a DNAfor in plane concentration magnetic fields of only has b 16een pg/ achieved,µL, which resulting is superior in a detection to standard limit of a DNA fluorescence concentration detection methodsof only [63 16]. pg/µL, The dependence which is superior of the to standard resistance fluorescence change ∆ detectionR on the methods particle [63]. coverage The dependence of the sensor surfaceof the is shownresistance in change Figure Δ 11R b.on the A nearlyparticle linear coverage behavior of the sens of theor surface output is signalshown isin observedFigure 11b. forA low particlenearly concentrations linear behavior [62 of]. the output signal is observed for low particle concentrations [62].

FigureFigure 11. ( 11.a) Isotropic(a) Isotropic GMR GMR characteristic characteristic measuredmeasured at at room room temperature temperature for fora spiral a spiral shaped shaped GMR GMR sensor for two in-plane fields oriented perpendicular to each other; (b) Change in the resistance of sensor for two in-plane fields oriented perpendicular to each other; (b) Change in the resistance of meander shaped GMR sensors, each with an area of 100 × 100 µm2, as a function of particle density. meander shaped GMR sensors, each with an area of 100 ˆ 100 µm2, as a function of particle density. The SEM images show the particle coverage of the sensors corresponding to the measurements The SEMmarked images by colored show circles the particle (data taken coverage from offrom the [62]). sensors corresponding to the measurements marked by colored circles (data taken from from [62]). On the way from a simple bead detection to a fully integrated, easy to use, hand held “lab on a Onchip” the device way fromfor applications a simple beadin human detection or veterinary to a fully diagnostics, integrated, several easy tochallenges use, hand have held to “labbe on a chip”mastered: device (1) for The applications magnetic core in humanof the magnetic or veterinary markers diagnostics, has to be stabilized several challenges to preserve have their to be mastered:magnetic (1) Theproperties. magnetic Usually, core of thethis magnetic is achiev markersed by embedding has to be stabilized superparamagnetic to preserve magnetite their magnetic nanoparticles in a polymer matrix. Chemically synthesized FeCo nanoparticles are good candidates even for single molecule detection as well, due to their superior saturation magnetization and, therefore, larger stray fields [64]; (2) the interface between chemistry and biology has to be fitted for each application, to allow a specific functionalization of the marker and sensor surface, e.g., for the detection of biotin-labeled DNA, streptavidin coated particles can be used [65,66]; (3) the GMR sensors have to be incorporated in fluidic environments, which enable the magnetic markers to pass the sensor surfaces at close distances to ensure a binding onto the surface within an acceptable time scale [67]. Due to the magnetic nature of the markers, magnetic attraction forces, created e.g., by on-chip conducting lines or magnetically structured thin films, can be employed to pull beads towards the sensors [68–75]. Another way to concentrate beads on a sensing surface uses of ultrasonic standing waves inside a microfluidic channel system [76,77] or the microfluidic system itself can be utilized to transport beads towards the sensor surface, e.g., by designing a ramp like structure [67,78]. A new concept to transport the magnetic particles in a “lab on a chip” environment without the need of external forces like microfluidic pumps, is a magnetic on-off ratchet [79,80]. Here, a combination of asymmetric magnetic potential and Brownian motion of magnetic beads moves particles through the device. The asymmetric magnetic potential is achieved by combining an external magnetic field with a spatially periodic array of conducting lines. When the asymmetric field is applied, particles move towards the minima of the potential. After switching off the diffusion process starts. Due to the asymmetric shape of the potential the particles are transported to the next minima when the field is reactivated and thus, a net transport process is achieved [79].

Sensors 2016, 16, 904 13 of 24 properties. Usually, this is achieved by embedding superparamagnetic magnetite nanoparticles in a polymer matrix. Chemically synthesized FeCo nanoparticles are good candidates even for single molecule detection as well, due to their superior saturation magnetization and, therefore, larger stray fields [64]; (2) the interface between chemistry and biology has to be fitted for each application, to allow a specific functionalization of the marker and sensor surface, e.g., for the detection of biotin-labeled DNA, streptavidin coated particles can be used [65,66]; (3) the GMR sensors have to be incorporated in fluidic environments, which enable the magnetic markers to pass the sensor surfaces at close distances to ensure a binding onto the surface within an acceptable time scale [67]. Due to the magnetic nature of the markers, magnetic attraction forces, created e.g., by on-chip conducting lines or magnetically structured thin films, can be employed to pull beads towards the sensors [68–75]. Another way to concentrate beads on a sensing surface uses of ultrasonic standing waves inside a microfluidic channel system [76,77] or the microfluidic system itself can be utilized to transport beads towards the sensor surface, e.g., by designing a ramp like structure [67,78]. A new concept to transport the magnetic particles in a “lab on a chip” environment without the need of external forces like microfluidic pumps, is a magnetic on-off ratchet [79,80]. Here, a combination of asymmetric magnetic potential and Brownian motion of magnetic beads moves particles through the device. The asymmetric magnetic potential is achieved by combining an external magnetic field with a spatially periodic array of conducting lines. When the asymmetric field is applied, particles move towards the minima of the potential. After switching off the diffusion process starts. Due to the asymmetric shape of the potential the particles are transported to the next minima when the field is reactivated and thus, a net transport process is achieved [79]. TheSensors realization 2016, 16, 904 of a lab-prototype of a “lab on a chip” device is shown in Figure 1213. Anof 24 array of 32 meander shaped GMR sensors combined with a suitable microfluidic design, which optimizes the The realization of a lab-prototype of a “lab on a chip” device is shown in Figure 12. An array of bead capture32 meander rate. shaped The measurement GMR sensors combined of individual with a sensorsuitable coverage microfluidic can design, be improved which optimizes by application the of the guardingbead capture procedure. rate. The This measurement procedure of employs individual an sensor additional coverage amplifier can be improved which switchesby application the voltage on the adjacentof the guarding sensor procedure. rows, enabling This procedure an equal empl potentialoys an ofadditional the rows amplifier (see Figure which 12 d,e).switches Provided the that the resistancesvoltage ofon thethe matrix adjacent elements sensor are rows, of the enabling same magnitude an equal andpotential much of larger the thanrows the (see resistance Figure 12d,e). Provided that the resistances of the matrix elements are of the same magnitude and of the supply lines, the measurement current will not expand on other paths and every resistance in much larger than the resistance of the supply lines, the measurement current will not expand on other the sensorpaths matrix and every can resistance be addressed in the individually.sensor matrix can be addressed individually.

Figure 12.FigureLab-prototype 12. Lab-prototype of a of “lab a “lab on on a a chip” chip” device:device: (a (a) )SEM SEM image image of the of device the device heart consisting heart consisting of of 32 GMR32 sensors. GMR sensors. The markedThe marked region region of of four four meandermeander shaped shaped GMR GMR sensors sensors is shown is shown enlarged enlarged in (b); in (b); (c) Photograph of the connected device; (d,e) illustrate the advantage of the guarding procedure for (c) Photograph of the connected device; (d,e) illustrate the advantage of the guarding procedure for an an analysis of a matrix of 32 sensors. Only the green labeled sensor element (line 3, column D) should analysisbe of measured. a matrix Possible of 32 sensors.other paths Only of the the current green are labeled marked sensorin red; (d element) the matrix (line without 3, column guarding; D) should be measured.(e) when Possible the guarding other approach paths ofis applied. the current are marked in red; (d) the matrix without guarding; (e) when the guarding approach is applied. 3.2. Granular Bulk Systems Four years after the discovery of the GMR effect in multilayer structures it was shown by Berkowitz et al. and Xiao et al. that GMR is not restricted to thin film systems, but occurs in heterogeneous bulk alloys, too [19,81]. Both groups utilized magnetron sputtering or melt spinning to create ferromagnetic Co precipitates in a non-magnetic Cu matrix, respectively. Underlying physical mechanisms which can induce the formation of such granular bulk GMR structures in alloys are summarized in the schematic phase diagram shown in Figure 13. Different decomposition types for the formation of magnetic precipitates (metal A) in non-magnetic matrix materials (metal B) have been observed: (1) decomposition by classical nucleation and growth, e.g., in Ag-Co systems [21,82,83]; (2) coherent or spinodal decomposition, e.g., in Cu-Co systems [84,85] and (3) eutectic decomposition, e.g., in Au-Co alloys [86,87]. However, it is expected that Ag-Co and Cu-Co systems will behave as decomposed due to a large content of Co [88]. By applying an external magnetic field during the decomposition process (see Figure 13, case 2), elongated magnetic precipitates can be prepared. This has been demonstrated by Hütten et al. in AlNiCo5 bulk alloys [89]. It has been shown that the probability of spin scattering is two times higher, if the direction of the current is perpendicular to the direction of the particle elongation. The GMR characteristics in these granular systems is closely correlated to the magnetic behavior of the samples, as discussed in Section 2.2. Due to TEM investigations it is known that an annealing of granular systems causes a coarsening of the magnetic precipitates and an increase of interparticle distances as it has been reported for Cu-Co [19,88] and melt-spun Au-Co [87,90]. Furthermore, in [88]

Sensors 2016, 16, 904 14 of 24 Sensors 2016, 16, 904 14 of 24 it has been confirmed by Lorentz microscopy that single domain Co particles exist in as-quenched Au71.6 Co28.4 ribbons, and multidomain Co particles in annealed ribbons, respectively. The changes in 3.2. Granulargrain size Bulk and Systemsthe formation of multidomain particles reflect in the magnetic measurements and, therefore, in the GMR characteristics. While a constant decrease of the granular GMR with increasing Fourparticle years size afterwas observed the discovery by some of groups the GMR [81,91,92], effect it in was multilayer found in structuresrefs. [19,93–95], it was that shown the by Berkowitzgranularet GMR al. and first Xiaoincreaseset al. up thatto a maximum GMR is notvalue restricted at about the to thinelectron film mean systems, free path but occurs and in heterogeneousthen decreases bulk (see alloys, Figure too 14). [19 ,In81 both]. Both cases, groups the granular utilized GMR magnetron decreases sputtering approximately or melt with spinning the to createinverse ferromagnetic of particle Co size. precipitates It was concluded in a non-magnetic that the decrease Cu matrix, of the respectively.granular GMR Underlying arises from physicalthe mechanismsdecreasing which spin-dependent can induce interfacial the formation electron of scatte suchring granular as the surface bulk GMR to volume structures ratio decreases in alloys are summarizedwith increasing in the size schematic [23,96]. Ge phase et al. diagram concluded, shown that for in low Figure annealing 13. Different temperatures, decomposition defects, disorder types for the formationand mismatch of magnetic stress are precipitates reduced [94]. (metal Thus, A) the in overall non-magnetic film resistance matrix reduces, materials which (metal leads B) haveto an been increased granular GMR. At higher temperatures, particles grow fast enough compared to the curing observed: (1) decomposition by classical nucleation and growth, e.g., in Ag-Co systems [21,82,83]; of the film defects and the granular GMR degrades. Wang et al. noted on particle size dependence of (2) coherent or spinodal decomposition, e.g., in Cu-Co systems [84,85] and (3) eutectic decomposition, the granular GMR, that it depends on whether the particles are superparamagnetic, single domain e.g., inferromagnetic Au-Co alloys or multidomain [86,87]. However, ferromagnetic. it is expected While their that calculations Ag-Co and show Cu-Co a constant systems decrease will behave for as decomposedsuperparamagnetic due to a large particles, content it exhibits of Co a [ 88maximum]. for single domain ferromagnetic particles [93].

Figure 13. Schematic phase diagram of two metals A (magnetic) and B (non-magnetic) illustrating Figure 13. Schematic phase diagram of two metals A (magnetic) and B (non-magnetic) illustrating different types of decomposition which can lead to GMR effects in heterogeneous bulk alloys: different types of decomposition which can lead to GMR effects in heterogeneous bulk alloys: (1) classical nucleation and growth of precipitates; (2) coherent or spinodal and (3) eutectic (1) classical nucleation and growth of precipitates; (2) coherent or spinodal and (3) eutectic decomposition, which forms a lamellar microstructure similar to multilayers. decomposition, which forms a lamellar microstructure similar to multilayers.

By applying an external magnetic field during the decomposition process (see Figure 13, case 2), elongated magnetic precipitates can be prepared. This has been demonstrated by Hütten et al. in AlNiCo5 bulk alloys [89]. It has been shown that the probability of spin scattering is two times higher, if the direction of the current is perpendicular to the direction of the particle elongation. The GMR characteristics in these granular systems is closely correlated to the magnetic behavior of the samples, as discussed in Section 2.2. Due to TEM investigations it is known that an annealing of granular systems causes a coarsening of the magnetic precipitates and an increase of interparticle distances as it has been reported for Cu-Co [19,88] and melt-spun Au-Co [87,90]. Furthermore, in [88] it Figure 14. Schematic illustration of the granular GMR effect in dependence of the particle size. has been confirmed by Lorentz microscopy that single domain Co particles exist in as-quenched Au71.6 Co28.4 ribbons,The dependence and multidomain of the granular Co particles GMR on inthe annealed ferromagnetic ribbons, volume respectively. fraction is comparable The changes to inthe grain size andparticle the size formation dependency: of multidomain At low ferromagnetic particles reflectvolume in fractions, the magnetic the particles measurements are small and and, few therefore, in in thenumber, GMR characteristics. therefore only a Whilesmall granular a constant GMR decrease is measurable. of the With granular increasing GMR ferromagnetic with increasing volume particle size wasfraction, observed the granular by some GMR groups increases [81, 91until,92 ],it itreaches was found the optimum in refs. value [19,93 at– 95a ferromagnetic], that the granular volume GMR first increasesfraction between up to a 15% maximum and 30%, value depending at about on the the used electron material mean system. free pathThereafter,λ and it then decreases decreases with (see Figurean 14 increasing). In both ferromagnetic cases, the granular volume fraction GMR decreases as the particles approximately become larger with and the more inverse densely of particlepacked size. It was concluded that the decrease of the granular GMR arises from the decreasing spin-dependent interfacial electron scattering as the surface to volume ratio decreases with increasing size [23,96]. Ge et al. concluded, that for low annealing temperatures, defects, disorder and mismatch stress are reduced [94]. Thus, the overall film resistance reduces, which leads to an increased granular GMR. At higher temperatures, particles grow fast enough compared to the curing of the film defects and the Sensors 2016, 16, 904 14 of 24

it has been confirmed by Lorentz microscopy that single domain Co particles exist in as-quenched Au71.6 Co28.4 ribbons, and multidomain Co particles in annealed ribbons, respectively. The changes in grain size and the formation of multidomain particles reflect in the magnetic measurements and, therefore, in the GMR characteristics. While a constant decrease of the granular GMR with increasing particle size was observed by some groups [81,91,92], it was found in refs. [19,93–95], that the granular GMR first increases up to a maximum value at about the electron mean free path and then decreases (see Figure 14). In both cases, the granular GMR decreases approximately with the inverse of particle size. It was concluded that the decrease of the granular GMR arises from the decreasing spin-dependent interfacial electron scattering as the surface to volume ratio decreases with increasing size [23,96]. Ge et al. concluded, that for low annealing temperatures, defects, disorder and mismatch stress are reduced [94]. Thus, the overall film resistance reduces, which leads to an increased granular GMR. At higher temperatures, particles grow fast enough compared to the curing of the film defects and the granular GMR degrades. Wang et al. noted on particle size dependence of the granular GMR, that it depends on whether the particles are superparamagnetic, single domain ferromagnetic or multidomain ferromagnetic. While their calculations show a constant decrease for superparamagnetic particles, it exhibits a maximum for single domain ferromagnetic particles [93].

Sensors 2016, 16, 904 15 of 24

granular GMR degrades. Wang et al. noted on particle size dependence of the granular GMR, that it depends onFigure whether 13. Schematic the particles phase diagram are superparamagnetic, of two metals A (m singleagnetic) domain and B (non-mag ferromagneticnetic) illustrating or multidomain different types of decomposition which can lead to GMR effects in heterogeneous bulk alloys: ferromagnetic. While their calculations show a constant decrease for superparamagnetic particles, (1) classical nucleation and growth of precipitates; (2) coherent or spinodal and (3) eutectic it exhibitsdecomposition, a maximum which for single forms domaina lamellar ferromagneticmicrostructure similar particles to multilayers. [93].

Figure 14. Schematic illustration of the granular GMR effect in dependence of the particle size. Figure 14. Schematic illustration of the granular GMR effect in dependence of the particle size. The dependence of the granular GMR on the ferromagnetic volume fraction is comparable to the Theparticle dependence size dependency: of the granular At low ferromagnetic GMR on the volume ferromagnetic fractions, volume the particles fraction are small is comparable and few in to the particlenumber, size dependency:therefore only Ata small low granular ferromagnetic GMR is volumemeasurable. fractions, With increasing the particles ferromagnetic are small volume and few in number,fraction, therefore the granular only a GMR small increases granular until GMR it reaches is measurable. the optimum With value increasing at a ferromagnetic ferromagnetic volume volume fraction,fraction the between granular 15% GMR and increases 30%, depending until iton reaches the used the material optimum system. value Thereafter, at a ferromagnetic it decreases with volume an increasing ferromagnetic volume fraction as the particles become larger and more densely packed fraction between 15% and 30%, depending on the used material system. Thereafter, it decreases with an increasing ferromagnetic volume fraction as the particles become larger and more densely packed reducing the surface to volume ratio. Furthermore, multidomain particles can arise and dipole interactions between neighboring ferromagnetic particles become more important. Finally, particles form a large connecting network with ferromagnetic domains at the percolation threshold of 55% and only an anisotropic magnetoresistance (AMR) is observable [93–95,97–104]. Summarizing the findings of many studies, it can be stated that the size, distribution and amount of ferromagnetic particles as well as the interface roughness determines the resulting GMR effect in granular alloys [87,88,90,105]. Therefore, it is essential to control these parameters to improve the GMR effect in granular systems.

3.3. Hybrid Structures GMR is not restricted to thin films or bulk systems only. It also occurs in pure particular systems (see next section) and hybrid materials containing thin films as well as magnetic clusters. These hybrid structures can be prepared e.g., by heating of films or by preparing multilayers with ultrathin and therefore discontinuous magnetic layers [106–110]. Holody et al. showed that Co/Py hybrid systems reveal advantages for sensor applications like a lateral decoupling in the cluster layer in combination with a low coercive field [106]. Unfortunately, the above mentioned techniques for the preparation of hybrid materials typically lead to large cluster size distributions, making the investigation of influences like cluster size, distances and concentration on the resulting GMR characteristic hard to uncover. In [110] the idea to employ a “bottom-up” method by replacing a ferromagnetic electrode of a thin film trilayer by predefined magnetic nanoparticles has been presented. Here, a Co3nm/Ru0.8nm/Co4nm thin film system has been prepared by sputtering as a reference, which shows a GMR amplitude of 0.36% at room temperature (see black curve in Figure 15). The thickness of Ru interlayer has been chosen according to the best interlayer exchange coupling. For preparation of the hybrid system, Co nanoparticles with a mean diameter of 12 nm have been prepared via a wet chemical synthesis [111,112]. A monolayer of these particles have been spin coated on top of the Ru interlayer, thus replacing the 4 nm thick Co film as magnetic electrode. The corresponding GMR characteristic (see red curve in Figure 15) shows a similar behavior compared to the reference system with an effect amplitude of 0.28% at room temperature. Sensors 2016, 16, 904 15 of 24 reducing the surface to volume ratio. Furthermore, multidomain particles can arise and dipole interactions between neighboring ferromagnetic particles become more important. Finally, particles form a large connecting network with ferromagnetic domains at the percolation threshold of 55% and only an anisotropic magnetoresistance (AMR) is observable [93–95,97–104]. Summarizing the findings of many studies, it can be stated that the size, distribution and amount of ferromagnetic particles as well as the interface roughness determines the resulting GMR effect in granular alloys [87,88,90,105]. Therefore, it is essential to control these parameters to improve the GMR effect in granular systems.

3.3. Hybrid Structures GMR is not restricted to thin films or bulk systems only. It also occurs in pure particular systems (see next section) and hybrid materials containing thin films as well as magnetic clusters. These hybrid structures can be prepared e.g., by heating of films or by preparing multilayers with ultrathin and therefore discontinuous magnetic layers [106–110]. Holody et al. showed that Co/Py hybrid systems reveal advantages for sensor applications like a lateral decoupling in the cluster layer in combination with a low coercive field [106]. Unfortunately, the above mentioned techniques for the preparation of hybrid materials typically lead to large cluster size distributions, making the investigation of influences like cluster size, distances and concentration on the resulting GMR characteristic hard to uncover. In [110] the idea to employ a “bottom-up” method by replacing a ferromagnetic electrode of a thin film trilayer by predefined magnetic nanoparticles has been presented. Here, a Co3nm/Ru0.8nm/Co4nm thin film system has been prepared by sputtering as a reference, which shows a GMR amplitude of 0.36% at room temperature (see black curve in Figure 15). The thickness of Ru interlayer has been chosen according to the best interlayer exchange coupling. For preparation of the hybrid system, Co nanoparticles with a mean diameter of 12 nm have been prepared via a wet chemical synthesis [111,112]. A monolayer of these particles have been spin coated on top of the Ru interlayer, thus replacing the 4 nm thick Co film as magnetic electrode. The corresponding GMR characteristic (see red curve in Figure 15) shows a similar behavior Sensorscompared2016, 16to, the 904 reference system with an effect amplitude of 0.28% at room temperature. 16 of 24

Figure 15. Proof of concept of the idea that Co nanopa nanoparticlesrticles can be coupled to a Co layer via a Ru

spacer layer layer coupling. coupling. As As references, references, the the GMR GMR characteristics characteristics of a of Co a3nm Co/Ru3nm0.8nm/Ru/Co0.8nm4nm/Co layered4nm layeredsample (blacksample curve) (black and curve) a Co and3nm a/Ru Co0.8nm3nm/Ru system0.8nm (bluesystem curve) (blue are curve) given. are The given. resulting The resulting GMR GMRcurve curve(red) (red)measured measured at room at roomtemperature temperature of the of Co the3nm Co/Ru3nm0.8nm/Ru/Co0.8nm particles/Co particles (diameter: (diameter: 12 nm) hybrid 12 nm) system hybrid clearlysystem shows clearly a shows spin-valve a spin-valve character character (adapted (adapted from [110]). from [110]).

ThisThis indicatesindicates that the magnetic Co nanoparticles can be coupled to a Co layer utilizing the spacer layer coupling. The smaller saturation field field of the hybrid structure indicates a smaller spacer layer coupling compared to the layered system of the same spacer layer thickness, but due to the larger magnetic magnetic moment moment of of the the 12 12 nm nm sized sized Co Co na nanoparticlesnoparticles compared compared to the to the4 nm 4 nmthick thick Co film, Co film, the contributionthe contribution of the of theZeeman Zeeman energy energy is higher, is higher, too. too. Thus, Thus, in inthe the case case of of the the hybrid hybrid system system is is the saturation field field is smaller than for the layered structure for an assumed equal equal coupling coupling strength. strength. Nevertheless, this method seems to allow a finer tuning of GMR characteristics of hybrid systems, which is of great interest from an application point of view.

3.4. Nanoparticular GMR Systems Typically, granular materials are prepared by top-down methods such as co-sputtering or co-evaporation of matrix and precipitated materials as well as by metallurgic techniques [97,113–115]. Particle size, volume fraction and magnetic configuration of the particles have to be controlled due to the GMR’s dependence on these parameters. These requirements can be fulfilled more easily by employing bottom-up approaches for the preparation of the granular systems like the embedment of prefabricated magnetic nanoparticles into non-magnetic matrix materials. This approach has been applied at first by Dupuis et al., who used in the gas-phase prefabricated Co and Fe particles simultaneously deposited with Ag as matrix material onto cold substrates [116]. This technique allows the independent variation of particle size and volume ratios and therefore the study of the dependence of GMR on these parameters. Furthermore, different material systems can be realized in a simple manner [116–118]. In 2007 Tan et al. showed that chemically synthesized ligand stabilized magnetic FeCo nanoparticles can be used for a preparation of magnetoresistive granular super-crystals [119]. In this case, the electrically isolating ligand shell acts as a tunneling barrier. effect amplitudes of up to 3000% at low temperatures have been reported for these nanoparticular systems [120]. In [121] such ligand stabilized nanoparticles have been used to create two-dimensional granular GMR structures. Therefore superparamagnetic Co nanoparticles with a mean diameter of 8 nm have been arranged in a monolayer onto a SiO substrate via a self-assembly process. The insulating ligand shells have been removed by an annealing process in a reducing gas atmosphere. Afterwards, without breaking the vacuum, a thin Cu layer has been deposited on top of the nanoparticles in order to establish an electrical contact between the particles. In Figure 16 a result of a GMR measurement at room temperature is shown. The bell shaped GMR characteristic follows mostly the expected behavior for non-interacting particles deduced from the magnetization reversal by Equation (11) (red curve, Figure 16). Sensors 2016, 16, 904 16 of 24

Nevertheless, this method seems to allow a finer tuning of GMR characteristics of hybrid systems, which is of great interest from an application point of view.

3.4. Nanoparticular GMR Systems Typically, granular materials are prepared by top-down methods such as co-sputtering or co-evaporation of matrix and precipitated materials as well as by metallurgic techniques [97,113–115]. Particle size, volume fraction and magnetic configuration of the particles have to be controlled due to the GMR’s dependence on these parameters. These requirements can be fulfilled more easily by employing bottom-up approaches for the preparation of the granular systems like the embedment of prefabricated magnetic nanoparticles into non-magnetic matrix materials. This approach has been applied at first by Dupuis et al., who used in the gas-phase prefabricated Co and Fe particles simultaneously deposited with Ag as matrix material onto cold substrates [116]. This technique allows the independent variation of particle size and volume ratios and therefore the study of the dependence of GMR on these parameters. Furthermore, different material systems can be realized in a simple manner [116–118]. In 2007 Tan et al. showed that chemically synthesized ligand stabilized magnetic FeCo nanoparticles can be used for a preparation of magnetoresistive granular super- crystals [119]. In this case, the electrically isolating ligand shell acts as a tunneling barrier. Tunnel magnetoresistance effect amplitudes of up to 3000% at low temperatures have been reported for these nanoparticular systems [120]. In [121] such ligand stabilized nanoparticles have been used to create two-dimensional granular GMR structures. Therefore superparamagnetic Co nanoparticles with a mean diameter of 8 nm have been arranged in a monolayer onto a SiO substrate via a self-assembly process. The insulating ligand shells have been removed by an annealing process in a reducing gas atmosphere. Afterwards, without breaking the vacuum, a thin Cu layer has been deposited on top of the nanoparticles in order to establish an electrical contact between the particles. In Figure 16 a result of a GMR measurement at room temperature is shown. The bell shaped GMR Sensors characteristic2016, 16, 904 follows mostly the expected behavior for non-interacting particles deduced from the 17 of 24 magnetization reversal by Equation (11) (red curve, Figure 16).

FigureFigure 16. 16.GMR GMR characteristic characteristic ofof a monolayer a monolayer of 8 nm of sized 8 nm Cosized nanoparticles Co nanoparticles measured at room measured at roomtemperature temperature with with an anin-plane in-plane external external magnetic magnetic field (sample field current: (sample 1 current:mA, R0: 1.6 1 mA,kΩ). The R0: 1.6 kΩ). The measurementmeasurement is is compared compared to tothe the expected expected behavi behavioror of non-interacting of non-interacting particles particles (red curve). (red curve). Additionally,Additionally, the correspondingthe corresponding magnetic magnetic measurement is shown is shown (blu (bluee curve) curve) (adapted (adapted from [121]). from [121]).

Aside from the expected magnetoresistance characteristic, additional features appear Asidesymmetrically from for the in- expected and decreasing magnetoresistance external fields, which characteristic, can be attributed additional to the inner magnetic features appear symmetricallyarrangement for in in- the and particle decreasing assembly. external Caused by fields, a dipolar which coupling can beof adjacent attributed particles, to the magnetic inner magnetic arrangement in the particle assembly. Caused by a dipolar coupling of adjacent particles, magnetic domains can be formed with an antiparallel arrangement of magnetic moments which maintains a higher stability against external influences compared to the non-interacting particles [121]. Vargas et al. established a model to simulate the dipole coupling between ferromagnetic particles and its influence on the granular GMR [122]. They showed that the particles couple ferromagnetically in the near field, while in the far field an antiferromagnetic coupling is present. Considering a model system of two parallel particle chains with particle moments aligned in one direction within each chain, but opposite to the orientation of the moments of the adjacent chain, a 20% higher GMR has been expected compared to non-interacting nanoparticles. In order to realize such a nanoparticular GMR model system Meyer et al. have incorporated carbon coated Co nanoparticles into conductive agarose gels as a non-magnetic matrix [123]. These systems allow an alignment of ferromagnetic Co particles along magnetic field lines of an applied external field. The agarose gel has been heated above the melting point and the nanoparticles are spread in the liquid phase of the gel. During cooling of the gel below the gelling temperature an external magnetic field can be applied. Thus, this technique allows to trigger different particle arrangements in the conductive matrix, which are fixed after the gel’s solidification. Thereby, a variation of the GMR characteristic with every measurement caused by a change of particle positions during switching the external field, which can be observed in the case of a liquid gel matrix like a glycerin-water mixture, can be prevented [123]. Optical microscope images of a sample prepared without and with the influence of a homogenous magnetic field during the cooling process are shown in Figure 17a,b, respectively. A comparison of the corresponding GMR measurements performed at room temperature is given in Figure 17c. The impact of particle arrangement on the nanoparticular GMR effect can be seen clearly. The higher GMR amplitude in the case of the field cooled sample, compared to the sample with the randomly distributed particles, can be attributed to the larger particle volume fraction along the current path, when the current is applied parallel to the field [123]. However, the particle density inside these particle superstructures is different. Hence, the dipole coupling inside these superstructures varies as shown by spin-dynamic simulations for a homogenous and a rotating field sample [27]. As a higher particle density is present in the rotating field sample, the interparticle distance is smaller and therefore, more and larger areas of ferromagnetic coupled particles are present compared to the homogenous field sample. As suggested by Vargas et al., these different Sensors 2016, 16, 904 17 of 24

domains can be formed with an antiparallel arrangement of magnetic moments which maintains a higher stability against external influences compared to the non-interacting particles [121]. Vargas et al. established a model to simulate the dipole coupling between ferromagnetic particles and its influence on the granular GMR [122]. They showed that the particles couple ferromagnetically in the near field, while in the far field an antiferromagnetic coupling is present. Considering a model system of two parallel particle chains with particle moments aligned in one direction within each chain, but opposite to the orientation of the moments of the adjacent chain, a 20% higher GMR has been expected compared to non-interacting nanoparticles. In order to realize such a nanoparticular GMR model system Meyer et al. have incorporated carbon coated Co nanoparticles into conductive agarose gels as a non-magnetic matrix [123]. These systems allow an alignment of ferromagnetic Co particles along magnetic field lines of an applied external field. The agarose gel has been heated above the melting point and the nanoparticles are spread in the liquid phase of the gel. During cooling of the gel below the gelling temperature an external magnetic field can be applied. Thus, this technique allows to trigger different particle arrangements in the conductive matrix, which are fixed after the Sensors 2016, 16, 904 18 of 24 gel’s solidification. Thereby, a variation of the GMR characteristic with every measurement caused by a change of particle positions during switching the external field, which can be observed in the case of a liquid gel matrix like a glycerin-water mixture, can be prevented [123]. Optical microscope dipole couplings may have an additional influence on the granular GMR effect as well [122]. To further images of a sample prepared without and with the influence of a homogenous magnetic field during improvethe the cooling stability process of theare shown agarose in Figure gel based 17a,b, nanoparticular respectively. A comparison GMR characteristics, of the corresponding it is recommended GMR to use anmeasurements alternating currentperformed (AC) at insteadroom temperature of a direct is current given in (DC) Figure (compare 17c. The Figure impact 18 ).of Inparticle doing so, the electrolysisarrangement of the ions on the in nanoparticular the gel and theGMR buildup effect can of be electrical seen clearly. double The higher layers GMR are amplitude inhibited in [the123 ]. This results incase an of enhancement the field cooled of sample, reproducibility compared to of the nanoparticular sample with the GMR randomly effects distributed and therefore, particles, opens can a way to realizebe printable,attributed to high the larger sensitivity particle sensorsvolume fraction without along the the need current of photo- path, when or e-beam the current lithography is applied [67]. parallel to the field [123].

Sensors 2016, 16, 904 18 of 24 fieldFigure sample, 17. Optical the interparticlemicroscope pictures distance of carbonis smal coatedler and 18 nmtherefore, sized Co more particles and in largeran agarose areas gel of Figure 17. Optical microscope pictures of carbon coated 18 nm sized Co particles in an agarose gel ferromagneticprepared without coupled (a) and particles with aare homogenous present compared (b) external to the magnetic homogenous field applied field sample. during Asthe suggested cooling preparedbyprocess. Vargas without Theet al. (particlesa, )these and withdifferent clusters a homogenous aredipole randomly couplings distri (b) may externalbuted have in magneticthean sampleadditional fieldwithout influence applied field, onwhile during the particlegranular the cooling process.GMRchains The effect particlesare formedas wellclusters during[122]. To the are further influence randomly improve of the distributed homothe stabilitygenous in field.of the the The sampleagarose granular withoutgel GMRbased is field,nanoparticular measured while at particle chainsGMR areroom formedcharacteristics, temperature during for it theisboth recommended influence samples and of to shown the use homogenous an in al (cternating) (data taken field.current from The (AC) from granular instead [123] © ofIOP GMR a direct Publishing. is measuredcurrent at room(DC) temperatureReproduced (compare with for Figure bothpermission 18). samples In. Alldoing rights and so, shown reserved). the electrolysis in (c) (data of the taken ions from in the from gel [and123 ]the© IOPbuildup Publishing. of Reproducedelectrical with double permission. layers are All inhibited rights reserved).[123]. This results in an enhancement of reproducibility of nanoparticularHowever, the GMR particle effects density and therefore, inside these opens particle a way superstructures to realize printable, is different. high sensitivity Hence, thesensors dipole couplingwithout inside the need these of photo- superstructures or e-beam lithography varies as [67]. shown by spin-dynamic simulations for a homogenous and a rotating field sample [27]. As a higher particle density is present in the rotating

Figure 18. (a) Comparison of a nanoparticular GMR measurements at room temperature with DC and Figure 18.AC(a) at Comparison 110 Hz; (b) The of GMR a nanoparticular effect development GMR over measurements a number of measurements at room temperature for DC and AC with at DC and AC at 110110 Hz; Hz (b (data) The taken GMR from effect [124]). development over a number of measurements for DC and AC at 110 Hz (data taken from [124]). 4. Conclusions We have shown that the GMR effect occurs in magnetic materials ranging from heterogeneous bulk systems over multilayered thin films to magnetic nanoparticles, synthesized by bottom-up methods. The microstructural as well as magnetic features have found to be crucial to trigger full potential of the GMR effect in all systems. For the future-oriented nanoparticular GMR systems, we have shown that an extensive control of the particle arrangement and magnetic configuration will be the key to a successful establishment of printable detection devices in industrial applications.

Acknowledgments: This work is supported by the Ministry of Innovation, Science, and research of the State of North Rhine-Westphalia (MiWF) as part of the research cooperation “MoRitS-Model-based realization of intelligent Systems in Nano- and Biotechnologies” (grant No. 321-8.03.04.03-2012/02). Furthermore, the work of D.K. T.R. C.G. and A.H. is supported by the BMBF project “Bead.Plus” (FKZ: 16SV5403), by ZIM KF2140607US3 and by the Deutsche Forschungsgemeinschaft (DFG) within the Research Unit 945

Author Contributions: All authors equally contributed to this review.

Conflicts of Interest: The authors declare no conflict of interest.

Abbreviations

The following abbreviations are used in this manuscript:

Sensors 2016, 16, 904 19 of 24

4. Conclusions We have shown that the GMR effect occurs in magnetic materials ranging from heterogeneous bulk systems over multilayered thin films to magnetic nanoparticles, synthesized by bottom-up methods. The microstructural as well as magnetic features have found to be crucial to trigger full potential of the GMR effect in all systems. For the future-oriented nanoparticular GMR systems, we have shown that an extensive control of the particle arrangement and magnetic configuration will be the key to a successful establishment of printable detection devices in industrial applications.

Acknowledgments: This work is supported by the Ministry of Innovation, Science, and research of the State of North Rhine-Westphalia (MiWF) as part of the research cooperation “MoRitS-Model-based realization of intelligent Systems in Nano- and Biotechnologies” (grant No. 321-8.03.04.03-2012/02). Furthermore, the work of D.K. T.R. C.G. and A.H. is supported by the BMBF project “Bead.Plus” (FKZ: 16SV5403), by ZIM KF2140607US3 and by the Deutsche Forschungsgemeinschaft (DFG) within the Research Unit 945 Author Contributions: All authors equally contributed to this review. Conflicts of Interest: The authors declare no conflict of interest.

Abbreviations The following abbreviations are used in this manuscript: GMR Giant magnetoresistance CIP Current in plane CPP Current perpendicular to plane RKKY Ruderman-Kittel-Kasuya-Yoshida (interaction) AMR Anisotropic magnetoresistance DC Direct current AC Alternating current TEM transmission electron microscopy AFC Antiferromagnetic coupling APT Atom probe tomography

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