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Development of an Atmospheric Pressure Microwave Induced Plasma Beam Stephen Allan Gower University of Wollongong

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Development of an Atmospheric Pressure Microwave Induced Plasma Beam Stephen Allan Gower University of Wollongong University of Wollongong Research Online University of Wollongong Thesis Collection University of Wollongong Thesis Collections 1998 Development of an atmospheric pressure microwave induced plasma beam Stephen Allan Gower University of Wollongong Recommended Citation Gower, Stephen Allan, Development of an atmospheric pressure microwave induced plasma beam, Doctor of Philosophy thesis, School of Electrical, Computer and Telecommunications Engineering, University of Wollongong, 1998. http://ro.uow.edu.au/ theses/1946 Research Online is the open access institutional repository for the University of Wollongong. For further information contact Manager Repository Services: [email protected]. DEVELOPMENT OF AN ATMOSPHERIC PRESSURE MICROWAVE INDUCED PLASMA BEAM A thesis submitted in fulfilment of the requirements for the award of the degree DOCTOR OF PHILOSOPHY from THE UNIVERSITY OF WOLLONGONG by STEPHEN ALLAN GOWER, BSC (HONS) SCHOOL OF ELECTRICAL, COMPUTER AND TELECOMMUNICATIONS ENGINEERING 1998 TABLE OF CONTENTS. ABSTRACT I LIST OF PUBLICATIONS/CONFERENCE PROCEEDINGS HI LIST OF FIGURES VII LIST OF TABLES XVII ACKNOWLEDGEMENTS XVHI CHAPTER 1. LITERATURE REVIEW 1 1.1 INTRODUCTION 1 1.2 REVIEW OF MICROWAVE CAVITY THEORY 1 1.3 A CHRONOLOGY OF APPLICATOR DEVELOPMENT 8 1.4 DETERMINATION OF PLASMA PARAMETERS 42 1.5 SUMMARY OF LITERATURE REVIEW.... 54 1.6 CONCLUSION 57 CHAPTER 2. EXPERIMENTAL DESIGN, EQUIPMENT AND PROCEDURES 61 2.1 INTRODUCTION 61 2.2 PULSED POWER SUPPLY 62 2.3 CONTINUOUS WAVE POWER SUPPLY 63 2.4 CIRCULATOR 64 2.5 DUAL DIRECTIONAL COUPLER 65 2.6 THREE STUB TUNER 66 2.7 SLOTTED WAVEGUIDE SECTION 67 2.8 POWER METER 68 2.9 MICROWAVE LEAKAGE METER 68 2.10 WELDING TABLE AND CONTROLLER 68 2.11 EXPERIMENTAL PROCEDURE 69 2.12 CONCLUSION 70 ii CHAPTER 3. APPLICATOR DEVELOPMENT 71 3.1 INTRODUCTION 71 3.2 CYLINDRICAL CAVITY DESIGN 71 3.3 RECTANGULAR CAVITY DESIGN 82 3.4 WAVEGUIDE CAVITY DESIGN 84 3.5 WATER-COOLED WAVEGUIDE CAVITY DESIGN 88 3.6 CONCLUSION 96 CHAPTER 4. CHARACTERISATION OF THE PLASMA/APPLICATOR SYSTEM 99 4.1 INTRODUCTION 99 4.2 BACKGROUND THEORY OF VSWR 101 4.3 VSWR MEASUREMENTS ON THE NON-COOLED WAVEGUIDE APPLICATOR 102 4.4 ELECTRIC CIRCUIT MODEL OF THE WAVEGUIDE APPLICATOR 117 4.5 PLASMA IMPEDANCE MEASUREMENTS 124 4.6 VSWR MEASUREMENTS ON THE WATER-COOLED WAVEGUIDE APPLICATOR 129 4.7 PLASMA IMPEDANCE MEASUREMENTS ON THE WATER-COOLED WAVEGUIDE APPLICATOR. 131 4.8 PLASMA IMPEDANCE COMPARISONS 142 4.9 PLASMA BEAM LENGTH 143 4.10 HEAT CAPACITY OF THE PLASMA BEAM 153 4.11 PLASMA BEAM PRESSURE 158 4.12 CONCLUSION 161 CHAPTER 5. PLASMA TEMPERATURE DETERMINATION BY LASER SCATTERING TECHNIQUES 165 5.1 INTRODUCTION 165 5.2 TEMPERATURE DETERMINATION 166 5.3 TEMPERATURE COMPARISONS 191 5.4 CONCLUSION 194 CHAPTER 6. APPLICATION OF THE PLASMA BEAM TO WELDING OF SHEET STEEL . 197 6.1 INTRODUCTION 197 6.2 RESULTS OF WELDING TRIALS 198 6.3 MODELLING OF WELDING PARAMETERS 209 6.4 COMPARISON WITH CONVENTIONAL WELDING TECHNIQUES 213 6.5 CONCLUSION 218 CHAPTER 7. CONCLUSION 219 CHAPTER 8. SUGGESTIONS FOR FURTHER WORK 230 8.1 INTRODUCTION 230 8.2 THE USE OF DIFFERENT DISCHARGE GASES 230 8.3 INCREASING THE ENERGY DENSITY AT THE WELD POOL 230 8.4 BEAM SHAPING TECHNIQUES 231 8.5 APPLICATION TO WELDING STEEL 231 8.6 APPLICATION TO WELDING CERAMICS 232 8.7 APPLICATION TO WELDING OF PLASTICS 232 8.8 APPLICATION TO CHEMICAL VAPOUR DEPOSITION OF DIAMOND FILMS 233 8.9 APPLICATION TO PLASMA SPRAYING 233 REFERENCES 234 APPENDKA 239 ENGINEERING DRAWING OF THE THREE-STUB TUNER GENERAL ASSEMBLY 239 APPENDIX B 240 ENGINEERING DRAWINGS OF THE PLASMA BEAM APPLICATOR AND COMPONENTS 240 REFERENCES 234 IV ABSTRACT Development of a device capable of producing a high power atmospheric pressure plasma beam has been one of the goals of researchers since the development of the magnetron. Until now, progress has been hampered for a variety of technical reasons not the least being materials limitations and the unavailability of suitable microwave generators. The work set forth in this dissertation describes the development of an efficient, atmospheric pressure, plasma beam applicator capable of sustained operation at powers in excess of 5 kW. Sustained operation at such high powers is accomplished through innovative cooling techniques. The operating parameters necessary to produce a stable plasma beam are elaborated upon, as are the physical properties of the plasma. Properties such as beam temperature, length and pressure are characterised as a function of the operating parameters of the system. Beam temperatures are determined using laser scattering techniques from which 2D temperature profiles of the beam are reconstructed. The voltage standing wave ratio and complex impedance of the plasma are determined as a function of microwave power, discharge gas flow rate and state of tuning of the applicator for both cooled and non-cooled versions of the waveguide applicator. An electric circuit model of the plasma/applicator system is then derived from these measurements. Temperatures and impedances are compared to those reported in the literature for similarly generated microwave plasmas. Application of a microwave plasma beam to welding and joining applications is totally absent from the literature. In this thesis, autogenous butt welding of sheet steel is I detailed and examination of the weld strength and weld microstructure as a function of microwave power, discharge gas flow rate and travel speed performed. Results indicate that welds performed using a microwave plasma beam are comparable in appearance and quality to those generated using gas tungsten arc welding techniques. n LIST OF PUBLICATIONS/CONFERENCE PROCEEDINGS Title: Microwave Induced Plasma Jet Welding and Joining. Authors: S. A. Gower and D. DoRego. Venue: CRC Project Number 93/15 Annual Technical Progress report, 1994. Title/Seminar: Modelling of a Microwave Plasma Jet. Authors: S. A. Gower and F. J. Paoloni Venue: 20th AESfSE Plasma Physics Conference, Flinders University, 13th - 14th of February, 1995. Seminar: A Microwave Induced Plasma Jet Welder (MIPJ). Authors: S. A. Gower. th th Venue: CRC Project Leaders Meeting, CSIRO DMT Adelaide, AT -c 5m of April, 1995. Seminar: Modelling of a Microwave Plasma Jet. Authors: S. A. Gower and F. J. Paoloni. Venue: Inaugural JWRI-CRC for Material Welding and Joining Technical Exchange, 6:thm of April, 1995. Seminar: A Microwave Induced Plasma Jet Welder (MIPJ} Authors: S. A. Gower. Venue: WTIA Ulawarra Branch, Monthly Meeting, 21st of June, 1995. ffl Poster/Seminar: Microwave Induced Plasma Jet Welding (MIPJ). Authors: S. A. Gower. Venue: Postgraduate Research Student Open Day, 31 of August, 1995 Seminar: Applications of a Microwave Induced Plasma Jet. Authors: S. A. Gower. Venue: Vacuum arc ion beam workshop, Lawrence Berkeley National Labs, Berkeley California, 25th - 28th of September, 1995. Title: Microwave Induced Plasma Jet (MIPJ) Welding and Joining. Authors: S. A. Gower. Venue: 1994-1995 CRC for Materials Welding and Joining Annual Report. Seminar: Microwave Induced Plasma Jet Welding and Joining. Authors: S. A. Gower. Venue: 2nd JWRI-CRC Technical Exchange, University of Wollongong, 11th of March, 1996. Seminar: Microwave Induced Plasma Jet. Authors: S. A. Gower. Venue: WTIA Panel 14 meeting, CSIRO Lindfield, Sydney, April 1996. Title: High Power Microwave Gas Plasma Generation. Authors: S. A. Gower, D. McLean and F. J. Paoloni. Venue: Australian Provisional Patent #PO0286, 6tmh of June, 1996 Seminar: Microwave Induced Atmospheric Pressure Plasma Jet. Authors: S. A. Gower, C. Montross and F. J. Paoloni. Venue: 12th Australian Institute of Physics Congress, University of Hobart,St 1 5th of July, 1996. Title/Seminar: Microwave Induced Plasma Jet for Welding. Authors: S. A. Gower, D. DoRego and D. McLean. Venue: Scientific and Industrial RF and Microwave Applications Conference, RMIT, 9th-10th of July, 1996. Seminar: Microwave Induced Plasma Jet Welding. Authors: S. A. Gower. Venue: Industrial Automation Research Centre Meeting, 5t h of September, 1996 Poster: Microwave Induced Plasma Jet Welding. Authors: S. A. Gower and D. DoRego. Venue: Post Graduate Research Student Open Day, 17th of September, 1996. V Title: Microwave Induced Plasma Jet Welding of Sheet Steel. Authors: S. A. Gower, D. DoRego and A. Basu. Venue: Australasian Welding Journal-Research Supplement, Vol 42, 40-46, 1997. VI LIST OF FIGURES. FIGURE 1. EVOLUTION OF A CAVITY RESONATOR FROM A SIMPLE LC CIRCUIT, [l] 2 FIGURE2. COORDINATE SYSTEM AND DIMENSIONS USED FORTE MODE FIELD DERFVATION [3] 3 FIGURE 3. ELECTRIC AND MAGNETIC FIELD LINES FOR A TE101 RECTANGULAR CAVITY [3] 6 FIGURE4. SECTIONS THROUGH A CYLINDRICAL CAVITY SHOWING TM010 FIELD PATTERNS [3] 7 FIGURE 5. THE "ELECTRONIC TORCH" OF COBINE AND WILBUR [4], 1951 9 FIGURE6. THE TAPERED WAVEGUIDE APPLICATOR OF FEHSENFELD [5], 1965 11 FIGURE7. THE FORESHORTENED 3/4 WAVE COAXIAL APPLICATOR OF FEHSENFELD [5], 1965 12 FIGURE 8. THE FORESHORTENED 3/4 COAXIAL APPLICATOR OF FEHSENFELD [5], 1965 12 FIGURE 9. THE FORESHORTENED 1/4 WAVE RADIAL APPLICATOR OF FEHSENFELD [5], 1965 13 FIGURE 10. THE COAXIAL TERMINATION APPLICATOR OF FEHSENFELD [5], 1965 13 FIGUREII. THE FORESHORTENED 1/4 WAVE COAXIAL APPLICATOR OF FEHSENFELD [5], 1965 14 FIGURE 12. SCHEMATIC LAYOUT OF A COAXIAL PLASMA TORCH AS DESCRIBED BY SWIFT [12], 1966 15 FIGURE 13. WAVEGUIDE CONFIGURATION OF THE DISCHARGE GENERATOR OF MURAYAMA[ 13], 1968. 16 FIGURE 14. SCHEMATIC LAYOUT OF THE "MICROWAVE PLASMATRON" AS DESCRIBED BY ARATA ET AL [14], 1973 17 FIGURE 15. CROSS SECTIONAL FRONT VIEW OF THE 30 KW PLASMATRON AS DESCRIBED BY ARATA ET AL [15], 1973 18 FIGURE 16. CROSS SECTIONAL FRONT VIEW OF THE 30 KW PLASMATRON USED FOR CUTTING AS DESCRIBED BYARATAETAL[16], 1975 20 FIGURE 17. SCHEMATIC DIAGRAM OF THE CUTTING SYSTEM DESCRIBED BY ARATA ETAL[ 17], 1975 20 FIGURE 18. CYLINDRICAL RESONANT CAVITY OF ASMUSSEN [18], 1974 21 FIGURE 19. THE MICROWAVE CAVITY OF BEENAKKER [19] FOROES APPLICATIONS, 1976 22 FIGURE 20. THE MICROWAVE SURFATRON OFMOISAN ET AL [20], 1979 23 FIGURE21.
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