TRITA-IIP-02-03 ISSN-1650-1888
Industrial Applications of Speckle Techniques
-Measurement of Deformation and Shape
Wei An
Doctoral Thesis Chair of Industrial Metrology & Optics Department of Production Engineering Stockholm 2002 Royal Institute of Technology
Industrial Applications of Speckle Techniques
-Measurement of Deformation and Shape
Wei An
Doctoral Thesis
TRITA-IIP-02-03 ISSN-1650-1888
Royal Institute of Technology Department of Production Engineering Chair of Industrial Metrology & Optics 100 44 Stockholm, Sweden 2002
TRITA-IIP-02-03 ISSN-1650-1888
Copyright © Wei An Department of Production Engineering Royal Institute of Technology S-100 44 Stockholm Sweden
ABSTRACT
Modern industry needs quick and reliable measurement methods for measuring deformation, position, shape, roughness, etc. This thesis is mainly concerned with industrial applications of speckle metrology. Speckle metrology is an optical non-contact whole field technique that provides the means to measure; deformation and displacement, object shape, surface roughness, vibration, and dynamic events, on rough surfaces and with a sensitivity of the order of a light wavelength. In particular, the electronic speckle metrology technique combined with advanced computers, fast frame grabbers, and image processing makes it very suitable for industrial applications.
The thesis consists of four main parts. The first part presents the basic principle of speckle metrology. Some formulas and theoretical analysis are reviewed. The procedure of recording electronic speckle patterns is discussed. The phase shifting and the phase unwrapping techniques are also presented in this part.
The second part considers some applications of speckle metrology technique. Four types of measurements have been done during this thesis period. They correspond to deformation measurements of solder joints on electronic device boards, 3D shape measurement with light-in-flight electronic speckle pattern interferometry, continuous deformation measurement, and cutting tool monitoring. Because the parameters under the measurements are different, the speckle metrology test beds are also different. We discuss the different set-up configurations for measuring different parameters in this part. The basic theoretical analyses are described for each application and some measurements results are included.
The last part of the thesis summarizes the speckle metrology applications and potential areas of investigation for future works. The selected papers written by the author is appended at the end of the thesis.
Keyword: Interferometry, ESPI, deformation measurement
LIST OF PAPERS
This thesis includes the following papers:
1. Wei An and Torgny E. Carlsson, Digital measurement of three- dimensional shapes using light-in-flight speckle interferometry, Optical Engineering. 38(8), pp.1366-1370 (1999).
2. Wei An and Torgny E. Carlsson, Direct object-shape comparison by light-in-flight speckle interferometry, Optics Letters, Vol. 22, pp.1538- 1540 (1997).
3. Wei An and Torgny E. Carlsson, Measurement of deformation of solder joint during heating with speckle interferometry, Proc. SPIE, Vol. 3783: Optical Diagnostics for fluids / Heat / Combustion and Photomechanics for Solids, Eds: S. S. Cha, P. J. Bryanston-Cross, C. R. Mercer, pp.382-388, Denver, July (1999).
4. Torgny E. Carlsson and Wei An, Phase evaluation of speckle patterns during continuous deformation using phase shifting interferometry, Applied Optics. Vol. 39(16), pp.2628-2637 (2000).
5. Torgny E. Carlsson and Wei An, Evaluation of phase changes of interferograms during continuous deformations, Proceeding SPIE Vol. 4101: Laser Interferometry X: Techniques and Analysis, Eds: M. Kujawińska, R. J. Pryputniewicz, M. Takeda, pp.29-36, San Diego, August (2000).
6. Wei An and Torgny E. Carlsson, Speckle interferometry for measurement of continuous deformation, accepted for publication in Optics and Lasers in Engineering (2002).
7. Wei An, Torgny E. Carlsson and Ryan Ramanujam, Use of optical scattering technique in cutting tool monitoring, TID (Teknologiskt
Integrerade Detaljtillverkningssystem) Conference Proceeding, pp.KTH1- 16, Stockholm, November (1999).
Other papers, which the author has contributed to:
1. Wei An and Torgny E. Carlsson, Speckle interferometry for measurement of continuous deformations, Optical Measurement System For Industrial Inspection II: Applications in Production Engineering, Eds: R. Höfling, W. P. O. Jüptner, M. Kujawinska, Proc. SPIE, Vol. 4399, pp.124-130 (2001).
2. Torgny E. Carlsson and Wei An, Three-dimensional shape measurement using light-in-flight speckle interferometry, Fringe ‘97- 3rd international work-shop on automatic processing of fringe patterns, W. Jüptner/W. Oster (eds), pp.164-170, Bremen (1997).
3. Yang, Zhiwen and Wei An, Directional shearing interferometer for collimation testing, Proc. SPIE, Vol. 2899, pp.425-431 (1996).
ACKNOWLEDGMENTS
This work has been carried out in the research group of Industrial Metrology and Optics, the Department of Production Engineering, KTH, Stockholm, Sweden.
I am grateful to my supervisor Prof. Lars Mattsson for his encouragement, support, and fruitful discussions.
I am grateful to my supervisor Ass. Prof. Torgny E. Carlsson for his continuous support and guidance throughout this work. He introduced me to this exciting subject.
I also thank other personnel in the research group, Bruno Nilsson, Jonny Gustafsson, Bengt Nilsson and Prof. Nils Abramson for their helps.
Volvo Research Foundation , Ericsson Radio System AB and Ericsson Component AB supported this work.
CONTENTS
1 INTRODUCTION ------1 1.1 Background ------2 1.2 Problem statement ------3 1.2.1 Measurement of solder joint on a printed circuit board ------3 1.2.2 3D shape measurement------4 1.2.3 Measurement of continuous deformation------6 1.2.4 Cutting tool monitoring ------6 1.3 Thesis outline------7 1.4 Original work------8 2 SPECKLE METROLOGY ------12 2.1 Some statistical properties of the speckle pattern ------12 2.2 Speckle photography ------15 2.3 Speckle interferometry ------17 2.4 Electronic speckle pattern interferometry ------20 2.5 Phase shifting------25 2.6 Phase unwrapping------27 3 APPLICATIONS OF SPECKLE METROLOGY------29 3.1 3D shape measurement with light-in-flight ESPI------29 3.1.1 Light-in-flight recording by holography------29 3.1.2 Measurement set-up and results ------31 3.2 Solder deformation measurement with ESPI------34 3.2.1 Solder deformation ------34 3.2.2 Measurement set-ups and results ------35
3.3 Continuous deformation measurement with ESPI------41 3.3.1 The principle of the fringe analysis method------41 3.3.2 Experimental results------44 3.4 Monitoring of cutting tool ------47 3.4.1The principle of measurement ------47 3.4.2 experiment ------50 4 CONCLUSIONS, DISCUSSIONS AND FUTURE WOR ------53
References ------55
Section 1 Introduction
1 INTRODUCTION
1.1 Background
In the early 1960s, the advent of the laser caused a tremendous improvement in the performance of existing optical metrology. It also promoted the developments and applications of new techniques. Speckle metrology technique was one of them. Around 1967 it was found that the speckle pattern could function as a carrier of information. Since then, a number of books and review articles on this subject have been presented [1, 2, 3, 4].
The Speckle pattern is formed by the self-interference of a large number of random coherent waves scattered from a rough object surface or propagated through a medium of random refractive index fluctuations. The remarkably simple and effective way to use the speckle effect in the measurement of displacement and deformation is used in speckle photography and speckle interferometry. They can give point-by-point or whole-field data, and the level of sensitivity can be adjusted.
Speckle interferometry is based on the coherent addition of scattered light from an object surface with a reference beam that may be a smooth wavefront or a scattered field from a reference object or from the sample. Compared to the speckle photography method, speckle interferometry is more sensitive.
In spite of their obvious merits, speckle photography and traditional speckle interferometry have not been widely used by either industrial or research users. The main reasons for this are the stability requirements, the necessity for photo processing, the requirements for post-processing (such as image reconstruction), and the difficulties in fringe interpretation.
1 Section 1 Introduction
In recent years, the use of electronic image acquisition and computer image processing has revolutionized optical measurement methods. Some of the traditional optical metrology has become automated, effective and easy to handle. The measurement results have become easier to visualize. The new electronic technique has been applied to the speckle metrology and lead to a versatile method called electronic speckle pattern interferometry (ESPI), television holography, or electro-optic holography. The advances in the development of CCD cameras and computer based image processing have propelled ESPI to the forefront of both scientific and engineering applications.
The attractiveness and versatility of speckle metrology lies in its ability to measure:
• deformation or displacement with variable sensitivity to in-plane and out-of-plane direction
• three-dimensional object shape
• surface roughness
• vibration
The measurements can be performed on rough, diffusely reflecting surfaces, which occur frequently in industrial engineering. The object to be measured may be of almost arbitrary shape. Some barely accessible areas can also be studied.
The book “Holographic and Speckle Interferometry” by Robert Jones and Catherine Wykes [1] gives a detailed introduction to the field of Speckle interferometry, and a detailed introduction to the light-in-flight technique, which is used with speckle metrology in this thesis can be found in the book “Light in Flight or The Holodiagram” by Nils Abramson [5]. Some important scientific papers about speckle metrology techniques are found in the SPIE Milestones series: Selected papers on Speckle metrology [6]. Some others are listed in the reference part.
2 Section 1 Introduction
1.2 Problem statement
The traditional industrial metrology methods for measuring the deformation or displacement and 3D shape use “contact” or “point by point” measurement techniques. They are not particularly efficient. The measurement systems are also complex and expensive, and applications are limited. This thesis is based on four problems, where traditional industrial metrology suffers from severe difficulties. They are:
• Measurement of solder joint deformation on a printed circuit board
• 3D shape measurement
• Continuous deformation measurement
• Cutting tool monitoring
The aim of the thesis is to develop suitable methods to effectively and accurately measure these parameters. The following four sub-sections describe separately these four problems and solutions.
1.2.1 Measurement of solder joint on a printed circuit board
The overall reliability of a printed circuit board is directly related to the reliability of solder joints. The solder joint is deformed because of the thermal expansion when an electric current pass through the solder joint. If this deformation is cyclic, fatigue problems may occur in the solder joint. If the deformation is large enough, the connection can be broken at the solder joint. To study this deformation, the measurement system must be able to measure the deformation during working condition of the circuit board, and be accurate enough to analyze the behavior of the joint. Contact sensors are not suitable for this case because they can interfere with the deformation or
3 Section 1 Introduction affect the circuit‘s performance. The joint has a small size and a rough surface. The deformation of the solder joint is in the micrometer range. Electronic speckle pattern interferometry is particularly suited for this investigation of solder joint deformation. It is a non-contact measurement method with accuracy in the range of the order of the wavelength of the illuminating light, and has a full field image of the deformation. It uses digital information processing technique, which is suitable for industrial application. Figure 1 shows the printed circuit board with measured solder joint. A thorough description of how this measurement problem was solved is given in Section 3.2.
Figure 1. The measured solder joints on a printed electric cuircuit board
1.2.2 3D shape measurement
There are several different techniques that can be used for three-dimensional shape measurements of small structures and components. The common problems for those methods are: they are not efficient enough, time consuming calculation of data or fringes are needed, some special shape can’t be measured. The light-in-flight (LiF) technique has been extensively studied in our research group and has been developed for engineering applications in several fields [7, 8, 9, 10, 11]. This 3-D shape measurement
4 Section 1 Introduction project is a further development along this line, by combining it with electronic speckle technique. We call it light-in-flight (LiF) electronic speckle pattern interferometry (ESPI). In comparison with other techniques, such as moiré or scanning laser triangulation probes, the advantages of this method are:
• The measurement is absolute; no fringes have to be counted.
• The depth resolution is, in contrast to most other measuring techniques, almost independent of the distance to the object.
• Only one beam is used, thus the depth of a hole can be measured.
Figure 2 shows one example of an object measured with LiF electronic speckle interferometry. It has a narrow deep step.
Figure 2. Example of an object measured with LiF electronic speckle pattern interferometry
5 Section 1 Introduction
1.2.3 Measurement of continuous deformation
For the measurement of continuous deformation, it is difficult to collect enough useful information because the state of the object changes dynamically. Several research groups throughout the world are engaged in this field trying to find the best way to solve this difficult problem. The aim of this thesis is to try to find a simple and effective algorithm to calculate the continuous phase change from the limited information, in order to solve the unwrapping problem and reduce the noise in the image processing, required for increasing the accuracy.
This thesis presents a new method for the measurement of continuous displacements and deformations. The method may be used in e.g. speckle interferometry, moiré, and other optical measurement methods based on evaluation of phase changes. The initial random phase of the interference pattern is either known or evaluated before the displacements take place using e.g. phase shifting. The changing phase thereafter is achieved only from one image at a time by a least square algorithm. The technique can be used for measuring deformations such as transients and other dynamic events, heat expansion, as well as other phenomena where it is difficult to accomplish phase shifting during deformation. We present three methods for calculating the continuous phase change. Different computer simulations have also been done to test the algorithm. A more detailed description about this method is found in section 3.3.
1.2.4 Cutting tool monitoring
In order to transform raw materials into a work piece having the desired shape, size and surface quality, it has to be processed by some means. There are many different ways in which this transformation can be achieved where cutting in a turning process is the most common. The efficiency of the cutting process plays an important role in the cost and productivity of machining operations. This is due to the fact that the cutting time has
6 Section 1 Introduction increased owing to higher material strength, greater complexity of work pieces and more stringent machining tolerances. The ideal cutting conditions can vary considerably for the tool-machine-work piece combination. Because of the limitation of cutting environment and the demand of on-line measurement, the traditional method cannot be used to check the cutting tool condition. In this thesis, the possibility of monitoring the condition of the cutting tool by measuring the surface roughness using an optical scattering method is studied. The optical scattering measurement technique, which is based on the statistical analysis of scattered light from the sample, is applied to inspect the surface and satisfy the requirements for an on-line, non-contact inspection method. Figure 3 shows the cutting tool fixed in the turning station[12].
Secondary cutting edge
Primary cutting edge Nose radius
Figure 3. The cutting tool fixed in the turning station
1.3 Thesis outline
This thesis is arranged into four sections. The first section gives an introduction of industrial applications of speckle metrology. It also includes an introduction of the published papers appended in this thesis. In order to
7 Section 1 Introduction make it easy to read the thesis for one who does not have a general background of optical metrology or physics, a relatively thorough introduction of ESPI is given in section 2. Some formulas for calculating the average size of speckle patterns are included. In addition, the principle and basic configurations of an ESPI are presented, a brief theoretical explanation of the processing of secondary correlation fringe and the widely used phase modulation techniques are also described in this section. Section 3 describes the four applications of speckle techniques in detail, which have been fulfilled during the thesis period. The basic principles for each project are described and some central formulas and results are included. The thesis ends with the summary and suggestions for future work.
1.4 Original work
Most of this thesis have been published or accepted for publishing, and are appended as separate articles. They are listed below.
Article A
Wei An and Torgny E. Carlsson, "Digital measurement of three- dimensional shapes using light-in-flight speckle interferometry", Optical Engineering, 38(8), pp.1366-1370 (1999).
In this article, theoretical and experimental results for evaluation of 3D- shapes using Light-in-Flight speckle interferometry are described. Light-in- Flight is a technique that uses laser light sources that emit ultra short pulses or have a short coherence length. The interferogram of the object under study is only registered for the object parts for which the difference in path length between the reference and the object beam is less than the coherence length. Here, the electronic speckle pattern interferometry (ESPI) for the measurement of out-of-plane displacements is used to record the interferogram. An automatic evaluation system which consists of a computer controlled image processing system, combined with a positioning
8 Section 1 Introduction system has been built to read the different contouring lines and transform them into spatial coordinates, thereby detecting the overall three- dimensional shapes.
Article B
Wei An and Torgny E. Carlsson, "Direct object-shape comparison by light-in-flight speckle interferometry", Optics Letters, Vol. 22, pp.1538- 1540 (1997).
This article proposes a method for direct optical comparison of three- dimensional shapes between objects, using light-in-flight speckle interferometry. The basic idea of this technique is to use an ultra short laser pulse with short coherence length to produce interference patterns, presenting one single contouring of the object. A simple test using diffuse objects has been performed to validate the method.
Article C
Wei An and Torgny E. Carlsson, “Measurement of deformation of solder joint with speckle interferometry," Proc. SPIE Vol. 3783, pp.382- 388, Optical Diagnostics for fluids / Heat / Combustion and Photomechanics for Solids, Eds, S. S. Cha/P. J. Bryanston-Cross/C. R. Mercer, Denver, July (1999).
In this article, the heat expansion of the solder joint on a PCB board has been investigated using speckle interferometry. Set-ups for measuring in- plane and out-of-plane displacements have been used separately. The component was heated in a stepwise manner by increasing the working current. During the heating procedure the temperature was measured by a thermocouple. For each step, the heating was halted until thermal equilibrium occurred, then four phase-shifted interferograms were recorded for each temperature Tn. In this way the deformation between two temperatures Tn+1 and Tn was evaluated. The deformation was measured in different directions and the solder joint strains were calculated.
9 Section 1 Introduction
Article D
T. E. Carlsson and Wei An, "Phase evaluation of speckle patterns during continuos deformation using phase shifting interferometry", Applied Optics, Vol. 39(16), pp.2628-2637(2000).
A method for measurement of continuous displacements using phase shifting speckle interferometry is presented in this article. The initial random phase of the speckle pattern is evaluated before deformation using phase shifting. The changing phase is thereafter achieved from one image at a time, by a least square algorithm. The technique can be used for measuring transients and other dynamic events e.g. heat expansion, as well as other phenomena where it is difficult to accomplish phase shifting during deformation. In addition to the theory, computer simulations and experimental results are also described.
Article E
T.E. Carlsson, Wei An, “Evaluation of phase changes of interferograms during continuous deformations,” Proceeding SPIE Vol. 4101, pp.29-36: "Laser Interferometry X: Techniques and Analysis," Eds: M. Kujawińska, R. J. Pryputniewicz, M. Takeda, San Diego, August (2000)
This article is also about the method for measurement of continuous displacements and deformations. In this article some additional results and how the method can be used for other "fringe based" optical measurement techniques are presented.
Article F
Wei An and T.E. Carlsson, “Speckle interferometry for measurement of continuous deformations”, accepted for publication by “Optics and lasers in Engineering”.
10 Section 1 Introduction
Improvements of the method for measurement of continuous displacements and deformations with digital phase shifting speckle pattern interferometry are presented. The initial random phase of the speckle pattern is evaluated using a number of phase-shifted images before deformation was studied. This is used for increasing the accuracy of the initial phase estimation and reducing influences from image noise and other measurement disturbances. The phase shifted speckle patterns are used as references for comparison with the speckle patterns of the deformed object, thereby increasing the reliability and accuracy of the phase estimations of the deformed patterns.
Article G
Wei An, Torgny E. Carlsson and Ryan Ramanujam, "Use of optical scattering technique in cutting tool monitoring", TID (Teknologiskt Integrerade Detaljtillverkningssystem) Conference Proc., pp.KTH1-16, Stockholm, November (1999).
Sensing and monitoring of the cutting tool condition is important for improving the productivity and quality of manufacturing processes. The optical scattering measurement technique, which is based on the statistical analysis of scattered light from the sample, provides a suitable way to inspect the surface and satisfy the requirements for an on-line, non-contact inspection method. In this article, the possibility of monitoring the condition of the cutting tool by measuring the surface roughness using an optical scattering method is investigated.
11 Section 2 Speckle Metrology
2 SPECKLE METROLOGY
Speckle metrology can be classified into two large groups according to the fact that speckle fields can be either incoherently superposed or coherently superposed. If the technique involves incoherent recording of two speckle fields and if no reference beam is employed, then it is called “speckle photography”. If a reference beam is present, this the n modifies the speckle fields. In this case, the two resulting interference fields can be compared. The comparison of the two fields corresponds to the object state before and after an object deformation or displacement. Each one is generated by coherent superposition of the reflected speckle and a reference wave. This is called speckle interferometry [13].
2.1 Some statistical properties of the speckle pattern
When coherent light is incident on a rough surface of height variations in the same order as or a little greater than the wavelength of the light, light is scattered in all directions. (See figure 4.) These scattered waves interfere and form an interference pattern consisting of dark and bright spots, which are randomly distributed in space. This pattern is called a speckle pattern. A typical speckle pattern is showed in figure 5.
Figure 4. Coherent light is incident on an optically rough surface
12 Section 2 Speckle Metrology
Figure 5. A typical magnified speckle pattern
The speckle pattern can be formed either by free-space propagation or from an imaging system. The first one is called objective speckle pattern. The scattered light directly reaches the screen as shown in figure 6a. The second one is called subjective speckle pattern, which is formed by imaging the scattering surface to a screen with a lens as shown in figure 6b.
Figure 6a. The formation of Figure 6b. The formation of objective speckle pattern subjective speckle pattern
In general, the statistical properties of the speckle pattern depend upon both the coherence of the incident light and the detail properties of the scattering surface. The statistical properties of speckle patterns are quite complicated. Goodman gives a thorough analysis in his book and papers [14][15]. He showed that the brightness distribution follows an probability function:
13 Section 2 Speckle Metrology
1 − I = (1) P(I) exp I I where 〈I〉 is the average brightness. P(I) is the probability that the intensity exceeds a threshold I that is of chief interest. This relationship is plotted in Fig. 7, and it shows that the most probable intensity value is zero.
Figure 7. The probability intensity function
The average size σ of objective speckles formed on a screen at a distance Z for a monochromatic uniform illumination over a circular surface area with diameter D is approximately given by:
λZ σ ≈1.22 (2) D where λ is the wavelength of the light.
For subjective speckles, the average size of the individual speckle is related to the effective numerical aperture NA of the lens and can be calculated by:
14 Section 2 Speckle Metrology
λ σ ≈ 0.61 NA (3) or
σ ≈1.22(1+ M )λF where M is the magnification of the image system, and F is the relative aperture of the lens. From this equation we see that the speckle size increases with decreasing aperture of the lens.
2.2 Speckle photography
In speckle photography, the subjective speckle pattern is recorded on a high- resolution photographic plate before the object is deformed. The second exposure is made on the same plate as the first, after the object has been deformed. In this way a double exposed specklegram is acquired. The information about the displacement, can be obtained by two separate methods from the developed photographic plate; By pointwise (or point-by- point) filtering and by whole-field (Fourier) filtering [16, 17, 18].
For the pointwise filtering method, a narrow laser beam illuminates the pre- assigned point on the specklegram. Young’s type fringes are then observed in the far field. The separation of those fringes is inversely proportional to the average positional shift in the region of light illumination at the specklegram plate, and the orientation of the fringes is perpendicular to the direction of displacement. Figure 8a shows an experimental arrangement of pointwise filtering and 8b shows the Young's type fringes obtained [19].
15 Section 2 Speckle Metrology
( a ) ( b )
Figure 8. The arrangement of pointwise filtering for obtaining the displacement information from a double exposed specklegram. (a) The narrow laser beam illuminates the pre-assigned point on the specklegram. (b) The Young's type fringes observed in the far field on the screen. The separation of fringes has a relationship with the displacement of object.
In the whole-field filtering method, an expanded collimated laser beam illuminates the whole specklegram. An aperture filter is put at the Fourier plane of the imaging lens. Fringes are then observed at the image plane. Figure 9a shows an experimental arrangement of the whole field filtering method. Figure 9b shows the different sensitivity fringes pattern obtained from different filter positions [20].
( a ) ( b )
Figure 9. The arrangement of whole-field filtering for obtaining the displacement information from double exposed specklegram.
16 Section 2 Speckle Metrology
The speckle patterns can also be recorded by a CCD camera where the displacement is achieved by correlation of the images before and after the deformation. This method is called electronic speckle photography [21, 22].
Speckle photography has been used to measure in-plane displacement, and rigid body tilt [23, 24, 25]. But it offers a limited sensitivity, which is affected by the speckle size. The speckle displacement should be equal to or larger than the speckle size for at least obtaining a single fringe or more in the diffraction halo. By using speckle interferometry one can increase the sensitivity of the measurement.
2.3 Speckle interferometry
Speckle interferometry is based on the coherent interference of scattered light from the object surface with a reference beam. The reference beam may be a uniform or scattered field, originating from the same source of light but reflected by a mirror or a reference object. The effect of the reference beam is to make the speckle very dependent on the path difference, and thereby by the distance between the reference and the object. If the average phase in a speckle changes by one-half of the wavelength, λ/2, because of object motion, then the speckle in the image changes from being bright to being dark. The sensitivity of speckle interferometry is given by the geometry of the set-up and the wavelength. Speckle decorrelation limits the range of motion or deformation that can be recorded with speckle interferometry.
Many different speckle interferometer configurations have been proposed and used for a variety of different applications [26]. Depending on the optical configuration, the speckle interferometer can be made sensitive to out-of-plane displacements, in-plane displacement, or both. In early experiments [27], the Michelson interferometer configuration was used, but the mirror was replaced by diffuse scatterers. Figure 10 shows a diagram of the set-up [4]. An imaging system is now needed so that the two
17 Section 2 Speckle Metrology
superimposed wave fields from the object and reference surfaces can be recorded photographically.
reference object diffuse scatters
collimated laser beam
object
beam splitter
image lens
specklegram
Figure 10. Modified Michelson interferometer for speckle interferometry. The reference mirror is replaced by diffuse scatterers
The coherent addition of the two speckle fields from the two scatterers will result in a third speckle pattern I(x, y) present in the image plane. The intensity distribution of this pattern is expressed as:
= + + []ψ I(x, y) I obj (x, y) I ref (x, y) 2 I obj (x, y)I ref (x, y) cos (x, y)
ψ = φ − φ (x, y) obj (x, y) ref (x, y) (4)
Where Iobj(x, y) and Iref (x, y) are the speckle pattern intensity distributions in the image plane from the object and from the reference object, respectively. ψ(x, y) is the stochastic phase difference between the reference and object speckles.
18 Section 2 Speckle Metrology
Equation (4) is often written in the following form:
= []+ ψ I(x, y) I 0 (x, y) 1 v(x, y)cos( (x, y)) (5)
Where I0 is the background intensity of the interferogram recorded at the image plane and v is the fringe visibility. They are defined as:
= + I 0 (x, y) I obj (x, y) I ref (x, y) (6) 1 2[]I (x, y)I (x, y) 2 v(x, y) = obj ref + I obj (x, y) I ref (x, y)
These expressions can be applied both to classical interferometry and speckle interferometry. In classical interferometry, the spatial distribution of ψ I 0 (x, y), v(x, y) and (x, y) are essentially smooth and fully deterministic, whereas in speckle interferometry they are random and noisy. In the most general case, all the terms in the expression (5) are functions both of time (t) and of the position (x, y) on the image.
φ Assume that a deformation happens, and changes the phase 0 (x, y) of each point by ∆φ(x, y) , but not the amplitude. Then the intensity distribution (4) can be rewritten as
I ′(x, y) = I (x, y) + I (x, y) obj ref (7) + []ψ + ∆φ 2 I obj (x, y)I ref (x, y) cos (x, y) (x, y)
Subtract (7) from (5)
I(x, y) − I ′(x, y) (8) ∆φ(x, y) ∆φ(x, y) = 4 I (x, y)I (x, y) sin ψ (x, y) + sin obj ref 2 2
19 Section 2 Speckle Metrology
In equation (8), the square-root describes the background illumination. The first sine factor gives the stochastic speckle noise, which varies randomly from pixel to pixel. This noise is modulated by the sine of the half phase difference induced by the deformation. This low frequency modulation of the high frequency speckle noise is recognized as a speckle interference pattern. When ∆φ(x, y)=(2n+1)π (n is integer), the two speckle patterns will interfere destructively. But when ∆φ(x, y) takes on values 2nπ, the patterns will once again interfere constructively. Conceptually, each individual pixel has gone through a complete phase cycle, and ends up with the same brightness distribution as before. The position of constructive interference in the specklegram between two speckle patterns produced before and after the movement has taken place, can be detected by the general method of photographic subtraction. This procedure results in the production of speckle interference fringes. By analyzing the fringes, the deformation information is acquired. Figure 11 shows typical speckle interference fringes presented in one-dimension.
I
X
Figure 11. The low frequency modulation of the high frequency speckle noise is recognized as a speckle interference pattern, in a one-dimensional presentation.
2.4 Electronic speckle pattern interferometry
Electronic speckle pattern interferometry (ESPI) appeared in the early 1970s. The basic principle of ESPI was developed almost simultaneously by
20 Section 2 Speckle Metrology
Macoski et al [28] in the USA, Schwomma [29] in Austria, and Butters and Leendertz [30] in England. Since then, more than hundred papers have been published on ESPI. Particularly, the advances in the development of CCD cameras and image processing units have advanced ESPI to the forefront of both scientific and engineering applications. Researchers have developed ESPI to measure out-of-plane and in-plane deformations, contouring, stress analysis, vibration analysis and so on [31, 32, 33, 34, 35]. Some research groups developed their own prototypes and new techniques, and gave them different names. The commonly used names include “electro-optical holography” (EOH) [36], “TV holography”(TVH) [37], “digital speckle patten interferometry” (DSPI) [38]. The major features of electronic speckle techniques are:
• It is a non-contact measurement method with wavelength order accuracy.
• A full field measurement. It is not limited to single points as for a contact sensor.
• It is well suited for computer aided measurements since the information is acquired and evaluated electronically.
• The sensitivity is much higher than that of holographic plates and thus allows one to use shorter exposure times than those in classical holography. The vibration isolation requirement cab thus be relaxed a bit.
• Almost a real-time operation. The correlation fringes can be displayed on a monitor without the recourse to any form of photographic processing, or plate relocation.
• The resolution of the recording medium used, need not to be high compared with that required for traditional holography.
A block diagram of a generic system for ESPI is shown in Figure 12 [39]. It comprises two parts: the optical part, a speckle interferometer with electronic recording, wherein the speckle interferograms are generated, and
21 Section 2 Speckle Metrology
the electronic part, wherein correlation fringes are eventually generated and analyzed.
Optical part Coherent light source
Beam splitter device
Beam path Beam path
Phase modulation device
Measured object Reference object
Beam combination device
Video camera Electronic part
Fringe generation
Fringe analysis
Figure 12. The generic ESPI system includes an optical part and an electronic part.
The optical part includes the coherent light source, beam splitter, beam path controlling components, and beam combiners. Sometimes a phase modulation device is needed and is added in the reference beam path.
22 Section 2 Speckle Metrology
Typically the light source is a laser, and the beam is separated to two coherent parts. The beam path controlling components determines the illumination and observation geometry, which decides the magnitude and direction of sensitivity of ESPI. The speckle pattern produced from the object and the reference wave, which may or may not be a speckle pattern, pass the beam combiner to produce the interference patterns on the sensitive elements of a video camera. The instantaneous value of the speckle pattern intensity at every image point of the object is encoded in the resulting interferogram.
The electronic part reveals the information encoded in the interferograms. The most elementary function of ESPI is the generation of secondary correlation fringes (see below), which can be displayed on the video monitor in real time. A further fringe analysis can be applied either to the secondary fringes or directly to the output of the video camera to yield the quantitative measurements. The basic principles of ESPI have been thoroughly discussed well elsewhere [39][40][41].
Figure 13 shows a typical example of an ESPI. The object is illuminated by the laser beam at an angle θ to the surface normal. The speckle image is formed by the lens at the image plane (CCD target). A reference wave, which is a smooth spherical wavefront and nominally normal incident, is added to the image. By interference between the object speckle pattern and the reference field, a new speckle pattern appears on the CCD target. This is recorded into the computer. When the object is displaced out of its plane, there will be a change in the speckle pattern. The change in the phase of the object beam relative to the reference beam is
2π ∆φ = ( )(1 + cos(θ ))∆Z (9) λ where θ is the incidence angle of the illumination, ∆φ is the phase change, and ∆Z is the deformation along the Z direction (out-of-plane). The secondary correlation fringe can be used to reveal the phase changes of speckle pattern, that is to say the deformation. The easiest and by far the
23 Section 2 Speckle Metrology
most commonly used way to produce the secondary correlation fringe, is to subtract one primary interferogram from another. Figure 14 shows the processing of secondary correlation fringe generation.
laser
object reference θ wave Z
object wave beam CCD splitter target Figure 13. A typical example of an ESPI. The reference wave is a smooth spherical wavefront and nominally normal incident onto the CCD target.
The primary interferogram
Image buffer
Subtraction
Secondary correlation fringe
Figure 14. Production of secondary correlation fringes by subtraction of one primary interferogram from another.
24 Section 2 Speckle Metrology
To interpret these patterns, one counts the fringes and multiplies the fringe order by some factor depending on the wavelength, and the geometry of the set-up. Then it is possible to obtain the variables of interest. This process tends to be slow and tedious and is subject to many difficulties, although it has worked well for some cases. Sometimes there are not enough fringes to interpret the information. For the complex fringes and unpredicted direction of deformation, it is almost impossible to use the fringe counting method. The following part will present a short introduction about the automatic fringe pattern analysis.
2.5 Phase shifting
Automatic fringe pattern analysis is performed in two steps: phase evaluation and phase unwrapping. There are many phase evaluation methods, which can be classified into different groups by different authors with different criteria [42]. The commonly mentioned methods include temporal phase-shifting method [35], spatial phase-shifting method [43], Fourier transform methods [44][45], spatial carrier phase-shifting method [46], the heterodyne method [47], and others [48][49]. Many phase evaluation methods use phase-stepping algorithms as a tool for phase calculation
The direct measurement of phase information has many advantages over simple tracing of fringes in the secondary interferogram. The precision of phase shifting interferometry is a factor of ten or more higher than tracing fringes, and the phase modulation is simple. The only necessary modification to an interferometer is to place a shifting device in one of the beam paths. When the phase is modulated, the speckle pattern distribution is similar to the typical interferometry case as expressed by equation (5), but with exception for the phase term α = {}+ γ []ψ + α I (x, y) I 0 (x, y) 1 (x, y)cos (x, y) (10)
25 Section 2 Speckle Metrology
where α is the induced phase shift between the object and reference beam of the interferometer, γ is the fringe visibility, I0 is the background intensity of the interferogram, and assumed to be constant across the entire interferogram. In most of the cases, α is known. The value of α can be anything between 0 and π. For solving equation (8), the three unknowns require a minimum of three phase-shift steps to determine the phase. Other algorithms for calculating the phase include the four-frame method, the five-frame method and the n-frame method [50]. Among those methods, the four step technique [51] is a common algorithm for phase calculations. In this case, a phase shift of π/2 for one step is applied to the reference beam. The phase at each point for this method is calculated by:
I (x, y) − I (x, y) ψ (x, y) = arctan 4 2 (11) − I1 (x, y) I 3 (x, y) and the visibility can be calculated from
[][]I (x, y) − I (x, y) 2 + I (x, y) − I (x, y) 2 γ (x, y) = 4 2 1 3 (12) 2I 0
The ESPI phase-shift method is often used to measure the phase difference between two states before and after the object deformation. At the simplest level, the deformation can be directly calculated using equation (13)
∆ψ =ψ ′ −ψ (x, y) 0 (x, y) 0 (x, y) (13)
where ψ0(x, y) and ψ0'(x, y) are the modulo 2π phase before and after object deformation. They are acquired by calculation with phase shift calculation algorithms, for example the four-frame phase calculation algorithm of equation (11).
An alternative way to calculate the phase of the object displacement was demonstrated by Stetson and Brohinsky [52]. They recorded eight frames
26 Section 2 Speckle Metrology
π with phase shift of /2. Four frames I1 , I 2 , I 3 and I 4 before deformation, four I'1 , I'2 , I '3 and I'4 after deformation. The phase change is then calculated by:
C − C ∆ψ = arctan( 1 2 ) (14) − C3 C4
= []()()− + ′ − ′ 2 + []()()− + ′ − ′ 2 C1 I1 I 3 I1 I 3 I 2 I 4 I 2 I 4
Where = []()()− − ′ − ′ 2 + []()()− − ′ − ′ 2 C2 I1 I 3 I1 I 3 I 2 I 4 I 2 I 4
= []()()− + ′ − ′ 2 + []()()− + ′ − ′ 2 C3 I1 I 3 I 2 I 4 I 2 I 4 I1 I 3
= []()()− − ′ − ′ 2 + []()()− + ′ − ′ 2 C4 I1 I 3 I 2 I 4 I 2 I 4 I1 I 3
2.6 Phase unwrapping
The modulo 2π wrapped phase map includes the sharp discontinuities caused when the phase rolls over the 2π boundary. These phase ambiguities can be removed by comparing phase differences between adjacent pixels. When the phase difference between adjacent pixels is greater than π, a multiple of 2π is added or subtracted to make the difference less than π. This process is called phase unwrapping. Some papers about phase unwrapping techniques can be found in references [53][54][55][56]. Figure 15 is an example of a phase map before and after the phase unwrapping. The patterns are generated by computer simulation. In general, fringe contrast in speckle inferometry is not nearly as high as it is in other types of interferometry, and special attention must often be exerted in order to see the fringes at all. In ESPI, much of the difficulty with fringe visibility can be handled by image processing, contrast enhancement, averaging, and other digital filtering in the computer.
27 Section 2 Speckle Metrology
Figure 15. The phase maps before (a) and after (b) the phase unwrapping. The patterns are generated by computer simulations.
28 Section 3 Applications of Speckle Metrology
3 APPLICATIONS OF SPECKLE METROLOGY
Based on the principle of speckle metrology discussed in section 2, different test beds have been built to measure the deformation, three-dimensional object shapes, and dynamic deformation. As each of the parameters for the measurement are different, the measurement set-ups are also different. But the main equipment used for these measurements is the same, and includes; optical mirrors, lens, phase modulation device, CCD video camera, image capture card, and a computer. The laser source for the shape measurement with Light-in-flight ESPI is different from other measurements. A pulsed laser with short coherence length is the key component for Light-in-flight ESPI. In ordinary ESPI, a CW laser is good enough. The power requirement for the laser is determined by the sensitivity of the CCD camera, and the size of the object. The software for the image processing, phase calculation, fringe analysis, phase unwrapping, and visualization of the results was developed during the thesis period. In this section, each measurement is discussed separately and each measurement principle presented. Some results are included. More detailed description can be found in appended papers.
3.1 3D Shape measurement with light-in-flight ESPI
3.1.1 Light-in-flight recording by holography
Shape measurement with Light-in-flight ESPI was developed from the light- in-flight recording by holography. The method of light-in-flight (LiF) recording by holography as a means of making single-line contours of an object was proposed by Abramson in 1983 and has since been further developed for measuring three-dimensional shapes [57, 58, 59, 8, 10]. The basic idea of light-in-flight recording by holography is to use an ultra-short
29 Section 3 Applications of Speckle Metrology
laser pulse with short coherence length to illuminate the object and then to holographically record the propagation of light. The two light beams reflected from the object and from the reference mirror are made to coincide on a photographic plate. Due to the short coherence length, the hologram records a gated viewing. When the holographic image is reconstructed with a continuous laser, only a thin slice of the object is seen from the observation point. This slice represents those parts of the object for which the length of object beam path is identical to that of the reference beam path. By moving the observation point along the hologram plate, the slice appears to move forwards or backwards across the object as height curves in a topography map. The “thickness” of the slice is about the same as the coherence length. By acquiring all of the slices, by moving the observation point a constant step each time, a three-dimensional shape of the object can be retrieved. Figure 16 shows the principle of LiF recording by holography.
Figure 16. The principle of light-in-flight recording by holography.
30 Section 3 Applications of Speckle Metrology
3.1.2 Measurement set-up and results
For light-in-flight recording by holography, a photographic film is used as the recording medium for the hologram. In the reconstruction process, the different contour lines of the object are acquired by moving the viewpoint of a CCD-camera along the hologram plane. By combining the light-in-flight technique with ESPI, the photographic film can be replaced by a CCD detector array. The drawback of wet chemistry for film development can then be overcome. The light-in-flight electronic speckle pattern interferometer presented here is a truly digital measurement system. It is therefore more suitable for industrial applications. The main drawback of this method is the need for mechanical scanning compared to the light-in- flight recording by a conventional hologram.
Object translated by stepping motor 1 L'
Object lens Reference mirror Beam splitter translated by PZT
Short pulse light source Spatial filter L1 and collimator CCD array
Figure 17. The schematic of light-in-flight electronic speckle interferometry.
Figure 17 shows the schematic of light-in-flight electronic speckle interferometer. A mode locked dye laser was used to produce short coherence length light. The reference mirror is translated forwards and backwards by a piezo translator (PZT) to find the maximum interference
31 Section 3 Applications of Speckle Metrology
point at each step of the object translation. A thin contouring slice of the object representing the intersection between the light pulse and the object is captured by the CCD array and stored in the computer. By moving the object with a stepping motor, different intersection-contouring slices are recorded and stored. After the images have been processed by the computer, these slices are assembled into a three-dimensional depth map of the object. Figure 18a shows parts of intersection-contouring slices of a light bulb, and Figure 18b shows the final 3D-image. Figure 19 shows another shape measurement result of a somewhat large metal axis. The units in the figure 18b and 19 is centimeter
a
Figure 18a. The original object image (a) and a sequence of the contouring image of the object at different positions(b,c,d,e,f).
32 Section 3 Applications of Speckle Metrology
cm
cm
Figure 18b. The final measurement result of a lamp.
cm
cm
Figure 19. The final measurement result of a metal axis.
The light-in-flight speckle interferometer uses a co-linear set up, in which the illuminating light and the image capturing camera are positioned along the same optical axis, thereby avoiding the shading drawback of triangulation methods. It is also almost independent of focusing, since the lens is constantly focused on to the reference mirror, which is moved only within a wavelength. Furthermore, there is no need for fringe calculation. Instead of measuring the phase, the reference mirror is moved in order to obtain the maximum contrast image of the coherence region. A computer program has been developed for the image processing and 3D-map presentation in this project. The detailed discussion about this project and more different contour images are found in attached paper [A].
33 Section 3 Applications of Speckle Metrology
3.2 Solder deformation measurement with ESPI
3.2.1 Solder deformation
The solder joint reliability is a very important parameter to consider when predicting the overall reliability of electronic devices. Cracking and delaminating failures of solder joints have frequently been observed in electronic packaging. Figure 20 shows one solder joint on a printed circuit board (PCB). When in operation, the electric current passes through the transistor, which is connected by solder joints to the PCB board. The electric current causes a temperature increase of the transistor and solders, and gives rise to a mechanical deformation. The deformation characteristics can be influenced by various factors. For instance, the shape of the solder joint, the material, the creep strain, the temperature and so on. Mathematical methods such as the finite element method (FEM) and the boundary element method (BEM) [60, 61] have been used to analyze thermal-mechanical deformation of solder. These methods provide very good ways for designers to predict the thermal-mechanical stress. Reference [62] used real-time moiré interferometry to monitor and measure the time–dependent de- formation of a package. Speckle pattern interferometry has a higher measurement resolution than moiré interferometry, and is well suited for the measurement of displacements in the micrometer range. We have therefore used it in our Fig. 20 The solder joints on a printed work. circuit board
34 Section 3 Applications of Speckle Metrology
3.2.2 Measurement set-up and results
Depending on the required sensitivity direction (i.e. on what direction the displacement of interest occurs), the optical set-up differs. We have built two set-ups to separately measure the out-of-plane displacements (i.e. in the z-direction, perpendicular to the objects xy-plane), and the in-plane displacements (i.e. in the x- or y-direction). The electric current through the solder was increased in a stepwise manner. The temperature was measured using two thermocouples. For each step, the heating was halted until thermal equilibrium occurred, then four images were recorded with phase shifts by 0, π/2, π, and 3π/2. The result was four phase-shifted interferograms for each temperature Tn. In this way the deformation between two temperatures Tn+1 and Tn was evaluated.
Figure 21 shows the set-up for the out-of-plane displacement measurement. It is essentially a Michelson type interferometer. A phase shift device (piezo-electric transducer) is attached at the back of the reference object and a CCD camera is used to record the electronic speckle pattern. For this configuration, the illumination angle θ is 0o. In the interferometer, one fringe represents the phase change of π or the deformation of λ/2 out of the plane.
Figure 22 shows the in-plane deformation measurement setup. Two expanded collimated laser beams are symmetrically incident on the object surface at the angles ±θ to the z-axis. The object is imaged by a camera along the Z-axis. The two light beams are scattered at the object’s surface and form two separate speckle patterns that interfere in the image plane of the camera. Consider an arbitrary point P(x, y) on the object’s surface. This point is imaged onto the CCD target where it receives contributions of two speckle patterns with a certain mutual phase difference. When the object is deformed, this phase difference will change. For the out-of-plane displacement, this phase difference will be cancelled. For a displacement ∆d
35 Section 3 Applications of Speckle Metrology
Fig.21 The setup for out-of-plane deformation measurement along the Z-axis. The reference light is phase modulated by a piezo- electric transducer attached at the back of a reference object
Fig.22 The setup for in-plane (X,Y plane) deformation meas- urement. The reference light is phase modulated by a piezo- electric transducer attached at the back of a mirror.
36 Section 3 Applications of Speckle Metrology on the object along the Y-direction, the resulting phase difference in the Z- direction equals to:
2sinθ ∆φ = 2π ∆d (15) λ
The advantages of those two separated configurations are that in-plane and out-of-plane deformation can be independently measured. Furthermore, the fringes are always localized at the object surface. The strains in the solder can be evaluated by numerical differentiation.
During the measurement, special care had to be taken to reduce the air turbulence caused by the heat spreading. If the temperature is too high, the accuracy and the range of measurement will be greatly reduced because the noise level is getting too high.
An automatic computer control system with image processing software has also been developed for dealing with speckle patterns and strain calculations. Figure 23 shows a picture of the measured solder. Some final measurement results are shown in figures from 24 to 27. The in-plane deformation is used for calculating the stress of the solder joint. The out-of- plane measurement is used here for controlling the measurement accuracy. Figure 24 and 25 show the deformation along X axis and Y axis (in-plane).
The total in-plane deformation is shown in figure 26. The direction of in-plane deformation is plotted in figure 27. More detail description can be found in the attached article [C].
Fig.23 The measured solder joint
37 Section 3 Applications of Speckle Metrology
[um] um 1.5 0.8 1 0.4 0.5 0 0 5 5 4 4 3 3 2 6 2 6 4 5 4 5 1 3 1 2 3 Y [mm] 1 2 Y (mm) 1 0 X [mm] 0 X (mm) Fig. 24 The deformation along X Fig. 25 The deformation along Y axis direction vs. position on the axis direction vs. position on the solder solder
y [mm] mm um 4 4 1 3 3 0.8
2 2 0.6
0.4 1 1 0.2 0 0 0 1 2 3 4 5 mm 0 1 2 3 4 x [mm] Fig. 26 Total in-plane deformation Fig. 27 The amount and the (color scale coded) direction of in-plane deformation (Quiver-plot)
Another PCB investigated by this technique is shown in figure 28. The solder joints in this case are the tiny squares marked on the image of fig. 28. Because the size of these solder joints was small (0.4×0.6 mm2), a microscope lens was used to reveal the details of in-plane deformation. The circuit was in this case heated stepwise with an electric heat foil, and the temperature was measured using two thermocouples. Figure 29 shows the speckle pattern and the explanation of what is shown in the resulting images. Figure 30 (color map) shows the in-plane deformation (x direction) at heating from 29 to 43 centigrade. Figure 31 is the 3D-image of the deformation.
38 Section 3 Applications of Speckle Metrology
Fig. 28 The measurement object
Speckle pattern
width[mm] 0.5
1
1.5 Figure 29. The speckle pattern and the 2 explanation of what is shown in the calculated 0.2 0.6 1 1.4 1.8 results image X width [mm]
39 Section 3 Applications of Speckle Metrology
width [mm]
0.4 1.8
0.8 1.4
1.2 1
1.6 0.6 0.4 0.8 1.2 1.6 2
Figure 30. The in-plane deformation (x direction) in [um] is given by the color scale at heating from 29 to 43 centigrade.
Figure 31. The in-plane deformation(x direction) in [um] at heating from 29 to 43 centigrade.
40 Section 3 Applications of Speckle Metrology
3.3 Continuous deformation measurement with ESPI
When studying continuous events such as mechanical transients, heat expansion, and other dynamic processes with ESPI, it is desirable to record a series of images. The difficulties in measuring the continuous deformation are the random variation of the phase from speckle to speckle and the sign of the displacement. In these cases it can be difficult to use the phase shifting modulation technique, though some solutions to this problem have been proposed. Spatial carrier techniques based on Fourier transformation of the whole image are frequently used [63][64][65]. These methods require production of carrier fringes and have poorer spatial resolution compared with temporal phase shifting methods. Other approaches that have been proposed are based on multiple wavelengths [66], frequency scanning [67] or use of a multi-camera system [68]. Speckle interferometers combined with high-speed video cameras have also been suggested. The temporal phase shifting is carried out by use of a piezoelectric translator (PZT) [69] or a Pockels cell [70] in the reference beam. Another approach proposed by Adachi et. al. [71], is when phase shifting is performed prior to the study, to acquire the initial phase, contrast and intensity for each speckle. In this way, the absolute value of the phase can be calculated for the images recorded during the deformation. To solve the sign ambiguity a histogram is made in the pixel neighborhood, where the most frequent value decides the phase change.
In this thesis, we present in article [F] a fringe analysis method that requires only one interferogram during deformation to extract the phase modulo 2π. The initial random phase of the speckle pattern is evaluated before deformation using phase shifting techniques. The changing phase is thereafter achieved from only one image at a time. This is accomplished by a least square algorithm.
41 Section 3 Applications of Speckle Metrology
3.3.1 Principle of the fringe analysis method
Suppose the intensity I(x, y) for each speckle with pixel coordinates around (x, y) varies according to:
= + γ φ I(x, y) I0 (x, y) (x, y) cos 0 (x, y) (16)
φ where the initial phase 0 (x, y) varies randomly from speckle to speckle,
I 0(x, y) is the constant background term. The second term is the γ = modulation factor (x, y) I0 (x, y)v(x, y) , where v(x, y) is the visibility.
During object displacement a time dependent term ∆φ(x, y,t) will be added to the phase resulting in the intensity I d (x, y,t) :
I d (x, y,t) = I (x, y,t) + γ (x, y,t) cosφ(x, y,t) 0 = + γ []φ + ∆φ I0 (x, y,t) (x, y,t) cos 0 (x, y) (x, y,t)
(17)
2π ∆ φ ( x, y , t ) = s ⋅ ∆ r ( x, y , t ) λ
φ = φ + ∆φ where t is the time, (x, y,t) 0 (x, y) (x, y,t) is the phase at time t, λ is the wavelength of the light source used, s is the sensitivity vector given by the geometry of the set-up and ∆r(x, y,t) is the displacement of the object point imaged at (x, y) at time t.
Our goal is to find a solution that minimizes the errors of the estimates of γ φ ∆φ I 0 (t) , (t) and 0 , and from them find the unknown phase change (t) .
To simplify the notation and increase the clarity, the (x, y, t) is sometimes omitted in the following equations.
42 Section 3 Applications of Speckle Metrology
γ φ The calculation of I 0 (t) , (t) and 0 can be realized with the SPS-method (Scanning Phase Shift method) proposed by Vikhagen [72]. The main problem is that the arccos function only gives the absolute value. Equation (17) therefore gives an ambiguous result with two values for the phase:
φ = ± [ d − γ ] arccos(I (t) I 0 (t)) (t) (18)
Now consider the pixel neighborhood point (x±i, y±j) around pixel (x, y). Suppose that the neighborhood is larger than the mean speckle size whilst still being small enough so that the average phase change, due to deformation ∆φ()t , is almost constant in the neighborhood. Then utilizing the knowledge of the original phase and using a least square estimate method, the mean phase change ∆φ can be calculated by:
cosφ sinφ cosφ cosφ − cos 2 φ cosφ sinφ tan ∆φ = 0 0 0 0 0 0 0 2 φ φ φ − φ φ φ φ sin 0 cos 0 cos 0 cos 0 sin 0 cos 0 sin 0
(19) where the 〈…〉 denotes the average value in the pixel neighborhood.
In other words, by finding out the initial phase φ0 with general phase modulation method, and since we only need one image at a time to determine cosφ , the continuous phase change during a deformation can be calculated.
The procedure for calculating the continuous phase changes is summarized in figure 32. The attached articles [D] and [F] cover the detailed information about the above equations.
43 Section 3 Applications of Speckle Metrology
Shift the phase. Calculate the maximum and minimum value for each (x, y)
Calculate the background I0 and modulation γ Pixels with invalid values are given a weighted average of those of the neighboring pixels Calculate the initial phase φ0 with the scanning phase shift method.
Resolve the sign problem
Record a sequence of interferograms during the continuos deformation.
Calculate the maximum and minimum value for each (x, y) to estimate the instantaneous background I0 and modulation γ of the continuous event. Find the pixels with invalid values and replace them with a weighted average value of those of the neighboring pixels Use the least square algorithm to calculate the continuous phase change
Unwrap the continuous phase change.
Figure 32. The procedure for calculating the continuous phase change
3.3.2 Experimental results
Several experimental tests have been performed to validate the algorithm. Figure 33 is an image of the test bed. It is based on a Michelson interferometer configuration. A He-Ne laser with 5mW output was used as the light source. The laser beam is expanded through a reversed telescope system and a spatial filter. This collimated beam is then divided by the beam
44 Section 3 Applications of Speckle Metrology
splitter into two beams. One of the beams was directed to illuminate the solder joint, while the other goes to a reference scatterer. The beams were then recombined and imaged onto CCD camera. A computer controlled piezoelectric actuator translation device (PZT) was put at the back of the reference scatterer in order to produce the phase shift for calculating the initial phase before the deformation. The camera was connected to a PC- based image processing system.
Figure 33. The image of the speckle interferometer set-up for measuring the continuous phase changes
The measurement procedure was divided into two steps. First the initial phase is measured. Thirty phase-shifted interferograms of the object are recorded before the deformation occurred. The deformation refers to this undisturbed state. Then, when the deformation of the object happens, a series of real time speckle patterns are recorded by the image capturing system. The deformation is monitored during the testing to assure that the phase changes in the speckle between two successive recordings are less
45 Section 3 Applications of Speckle Metrology
than λ/2. After all images were recorded and saved, the calculation was performed and final results were obtained
Figure 34 shows a set of phase maps of a continuously deformed thin metal disk represented by grayscale-coded. The deformation was obtained by a point load at the center of the disk. In total 350 images were recorded throughout the continuous deformation. The phase maps are: (a) image #100, (b) image #150, (c) image #200, (d) image #250, (e) image #300, and (f) image #350. During the calculation, the median filter is used to reduce the speckle noise in the final results images. Figure 35 shows the unwrapped phase map of image#350.
(a) (b) (c)
(d) (e) (f)
Figure 34. The deformation of a thin metal disk represented by grayscale-coded phase maps. A point load was applied at the center of the disk. (a) image #100, (b) image #150, (c) image #200, (d) image #250, (e) image #300, (f) image #350.
46 Section 3 Applications of Speckle Metrology
Figure 35. Unwrapped phase map of image # 350
3.4 Monitoring of cutting tool
The method developed for monitoring the cutting tool condition is based on the analysis of scattered light. The scattered light distribution has a relationship with the surface roughness. The negative imprint of the cutting edge on the work piece surface shows a texture pattern, which is the micro profile of the work piece surface. By studying the change of surface roughness of the work piece during cutting, the condition of the cutting tool can be indirectly monitored.
3.4.1 The principle of measurement
Surface roughness can be regarded as the variation of surface height within a lateral scale ranging from microns to mm. Assuming this variation to be random and isotropic, the roughness can be characterized in a statistical manner. A main text source about the nature and measurement of surface roughness, is the book Introduction to Surface Roughness and Scattering,
47 Section 3 Applications of Speckle Metrology
second ed. by J. M. Bennett and L. Mattsson, published in 1999 by the Optical Society of America [73].
The traditional method of measuring surface roughness is to let a stylus probe make a trace across the surface and measure the stylus movements as it follows the surface profile. This technique has been developed to a very sophisticated level and can achieve surprisingly high sensitivity. But limitations of this method, in particularly the speed, makes it unsuitable in this project.
Light scattering from a rough surface can be characterized by many different parameters, such as the angular distribution, speckle contrast, etc. The best-established light-scattering method is the so-called “glossy measurement technique”. It consists essentially of measuring the ratio between the intensity of the light scattered in the specular direction and the light scattered in the other directions. Figure 36a shows the principle of the method. When light is incident on a rough surface that has a roughness of the same order or less, as the incident light wavelength, it will be reflected either specularly (mirror reflection) or diffusely (in all directions) or both, depending on the properties of the surface. For a work piece machined by a turning station, the light reflections from the surface are a mixture, i.e. neither completely specular nor completely diffused. The reflected power in the specular direction, is determined by the angle of the incident light and the surface roughness. In practice, there is a broad spectrum of surface wavelengths on the work piece surface. The light is scattered into a range of angles. Figure 36b shows a typical scattering pattern when light is incident on a work piece. The shape of the pattern is determined by the surface roughness within the illuminated area [74]
48 Section 3 Applications of Speckle Metrology
.
Figure 36. (a) Scattering of light from the grooves of a machined component. The groove spacing is large compared to the wave- length of the light (b) Scattering image in the observation plane.
In general, the surface of the work piece looks like figure 37, where f is the feed and d is the depth of cut. The cutting tool shape dramatically affects the profile cusp along the small range f. By monitoring the roughness along this profile, the cutting tool condition is obtained. If the surface roughness along the profile cusp is examined continuously following the cutting process, the cutting tool performance can be monitored on-line.
49 Section 3 Applications of Speckle Metrology
Figure 37. Surface of a machined workpiece
In the developed cutting tool monitoring system the light scattering measurement instrument is used as a comparator, and not as a tool for measuring the absolute values of the roughness. A simple set-up was made to detect the width of the scatter pattern, and more or less complicated algorithms were used to decide the condition of the cutting tool.
3.4.2 Experiments
The cutting monitoring system includes three main parts: sensor head, signal converter with amplifier, and computer software. Figure 38 shows a photograph of the sensor head mounted on a turning station. In the sensor head there is a diode laser, which illuminates the surface, and three optical fibers connected to photo sensors that detect the scattered light in three different directions. The light is incident on the profile cusp of the work piece. The incident angle is about 45 degrees. The distance between the cutting tool and the monitoring system can be adjusted according to the feed, in order to keep the laser light spot located at the bottom the profile curve in focus. The photo sensors convert the light signal to a voltage, which is amplified and sent to a computer. A specially developed LabView software is developed for monitoring in real time the change of the signal level, which represents the roughness change of the work piece. When the signal changes beyond a certain level, this indicates that the cutting tool has become badly worn and need to be replaced.
50 Section 3 Applications of Speckle Metrology
Figure 38. Photograph of the sensor head mounted on a turning station
Several test work pieces were produced by machining them on a standard turning station. In order to verify the method and find out the range of roughness, the surface character was measured with a mechanical stylus probe (Talysurf) and a Nomarski microscope. Figure 39 shows the results for a test work piece created with an old (worn) cutting tool on a standard turning station. In the Nomarski microscope image, the grooves created by the cutting tool can be observed very clearly. In this small area incident light will be diffused and produce the scattering pattern. In the lower left part of figure 39, the scratches on the tip of the cutting tool corresponding to the grooves, are clearly visible.
51 Section 3 Applications of Speckle Metrology
Figure 39. Image of the work piece, cutting tool, and the microscope image of profile cusp.
In order to test the sensor, it was used to directly measure the surface profile by scanning along the axis of the turned cylinder. The signal output was found to directly represents the profile of the surface. The surface profile of the same work piece was also measured with a contact probe. The two results match very well with each other. A more detailed description about the cutting tool monitoring can be found in article [G].
52 Section 4 Conclusions, Discussions and Future Work
4 CONCLUSIONS, DISCUSSIONS AND FUTURE WORK
This thesis discussed applications of speckle metrology in industry. As has been shown in this thesis, deformation and shape measurements have been accomplished with a speckle metrology technique. This technique has several distinct advantages over other methods, especially the simplicity of its experimental arrangement. The resolution of the recording medium need not be too high compared with that required for holography. The speckle size can be varied to a certain extent to suit the resolution limits of the CCD camera. A computer has been used to control the entire measurement process, to calculate fringes, and to present results in a graphical format.
The main technique used in the thesis is the ESPI. The sensitivity of ESPI without phase modulation for an in-plane deformation measurement is λ/(2sinθ), where λ is the wavelength of illuminating light and θ is the angle of incidence of the illuminating light. For out-of-plane deformation measurement, the sensitivity is λ/2. When phase modulation technique is used, the sensitivity can be increased about 20 times. The range of measurement of ESPI is limited by speckle pattern decorrelation and the video camera resolution. It can be up to 50µm.
Even though the theory of speckle metrology has been fully acknowledged, for some particular applications, special care still has to be taken. The measurement range of a speckle interferometer is small, and limited by the speckle correlation. For relatively large objects, a high power laser is needed because of the small aperture size, which determines the average speckle pattern size.
When using ESPI, the light intensity should be optimized. The minimum light intensity reaching the CCD sensor must be able to produce electronic signals strong enough to be above the background electronic noise level. The maximum light intensity should be below the saturation level of the
53 Section 4 Conclusions, Discussions and Future Work
camera for the entire useful picture area. The reference beam intensity should be selected to give the best fringe contrast.
When selecting the video camera, the spatial resolution and the dynamic range of the video system, are considerably less than those of photographic and holographic emulsions. These factors affect the design of speckle pattern interferometers. By adjusting the aperture size of the lens, the size of speckle pattern can be changed. But we need to think about the ratio of fringe spacing so as to optimize the speckle size to obtain reasonably visible fringes. If continuous events are studied, the image capturing speed of the camera is particularly important.
The sensitivity of speckle interferometry to vibrations also affects the applications in industrial environments. Stable isolation techniques and methods are therefore required.
The continuous improvement of the resolution of video cameras and the calculation speed of computers has recently allowed the recording of Fresnel and Fourier holograms and their subsequent analysis and reconstruction by numerical method [75][76][77], with currently available devices. This is feasible only with small objects located far from the camera and for small angles between the object and reference beams. In spite of being in its early development stages, the numerical reconstruction of holograms has already been used to implement methods for measurements of displacements [78], surface contouring [79], shape measurement with short laser pulse [10] [80] and others. Many of its potential methods have not yet been investigated. The new Fresnel/Fourier techniques are beyond the scale of this thesis. But they will ultimately be embraced in the branches of ESPI.
54 References
References
1. Jones, R. and Wykes, C., Holographic and speckle interferometry, Cambridge University press (1983).
2. M. Francon, Laser speckle and applications in optics, Academic press (1979).
3. P. K. Rastogi, Holographic and interferometry, principle and methods, Springer-Verlag (1994).
4. J. C. Dainty, Laser speckle and related phenomena, Springer- Verlag, Heidelberg, Vol. 5 (Topics in applied physics) (1975).
5. N. Abramson, Light in Flight or The Holodiagram, SPIE optical engineering press (1996).
6. R. S. Sirohi, Selected papers on Speckle Metrology, SPIE milestone series, Vol. MS 35 (1991).
7. N. Abramson, K. G. Spears, Single pulse light-in-flight recording by holography, Appl. Opt., Vol. 28, pp.1834-1841 (1989).
8. T. E. Carlsson, Measurement of three-dimensional shapes using light-in-flight recording by holography, Opt. Eng., Vol. 32, pp.2587-2592 (1993).
9. T. E. Carlsson, J. Gustafsson, B. Nilsson, Development of a 3D camera, Proc. SPIE, Vol. 3637, pp.218 – 224 (1999).
10. B. Nilsson, T. E. Carlsson, Direct 3-D shape measurement by digital Light-in-flight holography, Appl. Opt. Vol. 37, pp.7954- 7959 (1998).
11. T. E. Carlsson, J. Gustafsson, B. Nilsson, Comparison of measurements of ultrashort pulses with autocorrelator, Light-in-
55 References
Flight recording by holography and nonscanning white-light interferometry, Proc. SPIE, Vol. 2951, pp.92-100 (1996).
12. David J Whitehouse, Surface metrology in manufacture, handbook of surface metrology, Institute of physics publishing, Bristol and Philadelphia (1994).
13. C. Wykes, R. Jones, K. Creath, and X. L. Chen, Part VII, Speckle methods, Optical methods of engineering analysis, Ed, Gary L. Cloud, Cambridge University Press (1998).
14. J. W. Goodman, Statistic properties of laser speckle patterns, in Laser speckle and related phenomena, ed, J. C. Dainty, Springer- Verlag, Heidelberg, pp.9-75 (1975).
15. J. W. Goodman, Some fundamental properties of speckle, J. Opt. Soc. Am. A, Vol. 66(11), pp.1145-1150 (1976).
16. E. Archbold, J. M. Burch, and A. E. Ennos, Recording of in-plane surface displacement by double-exposure speckle photography, Opt. Acta, Vol. 17, pp.883-898 (1970).
17. K. A. Stetson, A review of speckle photography and speckle interferometry, Opt. Eng., Vol.14, pp.482-489 (1975).
18. G. B. Smith and K. A. Stetson, Heterodyne read-out of specklegram halo interference fringes, Appl. Opt., Vol.19, pp.3031-3033 (1980).
19. Pramod K. Rastogi, Optical Measurement Techniques and Application, Artech House, Inc (1997).
20. P. K. Rastogi, Techniques of Displacement and Deformaion measurements in Speckle Metrology, Speckle Metrology, ed, R. S. Sirohi, Marcel Dekker, Inc., (1993)
56 References
21. M. Sjodahl and L. R. Benkert, Electronic speckle photography: analysis of an algorithm giving the displacement with subpixel accuracy, Appl. Opt., Vol. 32, pp.2278-2284 (1993).
22. M. Sjodahl, Electronic speckle photography: increase accuracy by Nonintegral pixel shifting, Appl. Opt., Vol. 33, pp.6667-6673 (1994).
23. L. C. Debacker, In-plane displacement measurement by speckle interferometry, Nondestruct. Test. Vol. 8, pp.177-182 (1975).
24. E. Archbold and A. E. Ennos, Displacement measurement from double-exposure laser photographs, Optica Acta, Vol. 19(4), pp.252-271 (1972).
25. H. J. Tiziani, A study of the use of laser speckle to measure small tilts of optically rough surfaces accurately, Optics Communications, Vol. 5(4), pp.271-276 (1972).
26. R. Jones and C. Wykes, Holographic and speckle interferometry, second edition, Cambridge University press, Cambridge (1989).
27. J. A. Leendertz, Interferometric displacement measurement on scattering surfaces utilizing speckle effect, Journal of physics E: Scientific Instruments, Vol. 3, pp.214-218 (1970).
28. Macovski A, Ramsey S D and Schaefer L F, Time-lapse interferometry and contouring using television system, Appl. Opt., Vol. 10, pp.2722-2727 (1971).
29. Schwomma O, Holographisch-interferometrisches oder moirė- metrissches verfahren, Austria patent 298 830 (1972).
30. J. N. Butters and J. A. Leeudertz, Holographic and video techniques applied to Engineering measurement, Transactions of the institute of measurement and control, Vol.4 (12), pp.349-354 (1971).
57 References
31. R. J. Pryputniewicz and K. A. Stetson, Measurement of vibration patterns using electro-optic holography, Proc. SPIE, Vol. 1162, pp.456-467 (1989).
32. A. R. Ganesan and R. S. Sirohi, New method of contouring using digital speckle pattern interferometry (DSPI), Proc. SPIE. Vol. 954, pp.327-332 (1988).
33. J. R. Tyrer, Critical review of recent developments i electronic speckle pattern interferometry, Proc. SPIE, Vol. 604, pp.95-111 (1986).
34. R. Jone and C. Wykes, De-correlation effects in speckle-pattern interferomtry 2. Displacement dependent de-correlation and applications to the observation of machine-induced strain, Optic Acta, Vol. 24(5), pp.533-550 (1977).
35. K. Creath, Phase shifing speckle interferometry, Appl. Opt., Vol. 24, pp.3053-3058 (1985).
36. Stetson K. A. and Brohinsky W. T. Electrooptic holography and its application to hologram interferometry, Appl. Opt. Vol. 24, pp.3631-3637 (1985).
37. Gåsvik K. J. Vibration analysis of a circular saw blade by means of moiré technique and TV-holography, OSA, Technical digest of the topical meeting on hologram interferometry and speckle metrology (1980)
38. Creath K. Digital speckle pattern interferometry (DSPI) using a 100×100 imaging array, Proc. SPIE, Vol. 501, pp.292-298 (1984).
39. Ángel F Doval, A systematic approach to TV holography, Meas. Sci. Technol. Vol. 11, pp.R1-R36 (2000).
58 References
40. Ole J. Løkberg, Electronic speckle pattern interferometry, Physics in Technology, Vol. 11, pp.16-22 (1980).
41. Ole J. Løkberg, Recent developments in video speckle interferometry, Speckle Metrology, ed, R. S. Sirohi, Marcel Dekker, Inc. (1993).
42. B. V. Dorrío and J. L. Fernández, Phase-evaluation methods in whole-field optical measurement techniques, Meas. Sci. Technol. Vol. 10, pp.R33-R55 (1999).
43. Barrientos B., Moore A. J., Pérez-López C, Wang L. L. and Tschudi T., Transient deformation measurement with ESPI using a diffractive optical element for spatial phase-stepping, Automatic processing of Fringe patterns, ed, W. Jüptner and W. Osten (Berlin: Akademie), pp.371-375 (1997).
44. H. O. Saldner, N. Molin, and K. A. Stetson, Fourier-transform evaluation of phase data in spatially phase-biased TV holograms, Appl. Opt., Vol. 35, pp.332-336 (1996).
45. Liu J. B. and Ronney P. D., Modified Fourier transform method for interferogram fringe pattern analysis, Appl. Opt., Vol. 36, pp.6231- 6241 (1997).
46. Lesne J. L., Le Brun A., Roger D. and Dieulesaint E., High bandwidth laser heterodyne interferometer to measure transient mechanical displacements, Proc. SPIE, Vol. 863, pp.13-22 (1987).
47. Pirga M. and Kujawinska M., Two directional spatial carrier phase-shifting method for analysis of crossed and closed fringe patterns, Opt. Eng. Vol. 34, pp.2459-99 (1995).
48. J. M. Huntley, Noise immune phase unwrapping algorithm, Appl. Opt. Vol. 28, pp.3268-3270 (1989).
59 References
49. M. Rivera, R. Rodriguez-Vera, and J. L. Marroquin, Robust procedure for fringe analysis, Appl. Opt., Vol. 36, pp.8391–8396 (1997).
50. T. Kreis, Holographic interferometry, principle and methods, Akademie Verlag, Berlin (1996).
51. Wyant, J. C., Interferometric optical metrology, basic systems and principles, Laser Focus, Vol. 18, pp.65-71 (1982).
52. K. A. Stetson and W. R. Brohinsky, Measurement of phase change in heterodyne interferometry: a novel scheme, Appl. Opt., Vol. 25, pp.2643-2644 (1986).
53. G. Fornaro, G. Franceschetti, R. Lanari, E. Sansosti, Robust phase- unwrapping techniques: a comparison, J. Opt. Soc. Am. A, Vol. 13, pp.2355-2366 (1996).
54. P. G. Charette and L. W. Hunter, Robust phase-unwrapping method for phase images with high noise content, Appl. Opt., Vol. 35, pp.3506-3513 (1996).
55. Olov Marklund, Noise-insensitive two-dimensional phase unwrapping method, J. Opt. Soc. Am. A, Vol. 15, pp.42-60 (1998).
56. P. D. Ruiz, G. H. Kaufmann, and G. E. Galizzi, Unwrapping of digital speckle-pattern interferometry phase maps by use of a minimun L0-norm algorithm, Appl. Opt., Vol. 37, pp.7632-7644 (1998).
57. T. E. Carlsson, A. Wei, Three-dimensional shape measurement using light-in-flight speckle interferometry, Fringe ‘97-3rd international work shop on automatic processing of fringe patterns, W. Jüptner/W. Oster (eds), pp.164-170, Bremen (1997).
60 References
58. J. Pomarico, U. Schnars, H. J. Hartmann and W. Jüptner, Digital recording and reconstruction of holograms: a new method for displaying light in flight, Appl. Opt. Vol. 34, pp.8095-8099 (1995).
59. H. Rabal, J. Pomarico and Arizaga, Light-in-flight digital holography display, Appl. Opt. Vol. 33, pp.4358-4360 (1994).
60. Gunnar Gustafsson, Solder joint reliability of a lead-less RF- transistor, 48th Electronic Components & Technology Conference, Seattle, Washington, Session02 (1998).
61. Bart Vandevelde and Eric Beyne, Thermal fatigue reliability analysis of Redistributed Flip chip Assemblies, 48th Electronic Components & Technology Conference, Seattle, Washington, Session07 (1998).
62. Xiaoyan He, Daqing Zou, Sheng Liu and Yifan Guo, Phase-shifting analysis in moire interferometry and it's application in electronic packaging, Opt. Eng. 37(5), pp.1410-1419 (1998).
63. G. Pedrini and H.J. Tiziani, Double-pulse electronic speckle interferometry for vibration analysis, Appl. Opt., Vol. 33/34, pp.7857-7863 (1994).
64. U. Schedin and P. Gren, Phase evaluation and speckle averaging in pulsed television holography, Appl. Opt., Vol. 36, pp.3941-3947 (1997).
65. C. Joenathan, P. Haible, and H. J. Tiziani, Speckle interferometry with temporal phase evaluation: influence of decorrelation, speckle size, and no linearity of the camera, Appl. Opt., Vol. 38, pp.1169- 1178 (1999).
66. G. Gülker, O. Haack, K. D. Hinsch, C. Hölscher, J. Kuls and W. Platen, Two-wavelength electronic speckle-pattern interferometry
61 References
for the analysis of discontinuous deformation fields, Appl. Opt., Vol. 31/22, pp.4519-4521 (1992).
67. J. Kato, I. Yamaguchi and Q. Ping, Automatic deformation analysis by a TV speckle interferometer using a laser diode, Appl. Opt., Vol. 32, pp.77-83 (1993).
68. A. J. P. Van Haasteren and H. J. Frankena, Real-time displacement measurement using a multicamera phase-stepping speckle interferometer, Appl. Opt. Vol. 33, pp.4137–4142 (1994).
69. A. J. Moore, D. P. Hand, J. S. Barton, and J. D. C. Jones, Transient deformation measurement with electronic speckle pattern interferometry and a high-speed camera, Appl. Opt. Vol. 38, pp.1159–1162 (1999).
70. J. M. Huntley, G. H. Kaufmann, D. Kerr, Phase-shifted dynamic speckle pattern interferometry at 1 khz, Appl. Opt., Vol. 38, pp.6556-6563 (1999).
71. M. Adachi, Y. Ueyama and K. Inabe, Automatic deformation analysis in electronic speckle pattern interferometry using one speckle interferogram of deformed object, Optical Review, Vol. 4/3, pp.429-432 (1997).
72. E. Vikhagen, Nondestructive testing by use of TV holography and deformation phase gradient calculation, Appl. Opt., Vol. 29, pp.137-144 (1990).
73. J. M. Bennett and L. Mattsson, Introduction to Surface roughness and scattering, second edition, Optical Society of America, Washington, D. C., (1999).
74. D. J. Whitehouse, Chap. 4.3 in Handbook of Surface Metrology, IOP Publishing, pp.453-531 (1994).
62 References
75. M. Taketa, H. Ina, and S. Kobayashi, Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry, J. Opt. Soc. Am. A. Vol. 72, pp.156-160 (1981).
76. Schnars U and Jüptner W, Direct recording of holograms by a CCD target and numerical reconstruction, Appl. Opt. Vol. 33, pp.179- 181 (1994).
77. Thomas M. Kreis, Werner P. O. Jüptner, Principles of digital holography, Fringe ‘97-3rd international work shop on automatic processing of fringe patterns, W. Jüptner/W. Oster (eds), pp.353- 363, Bremen (1997).
78. Schnars U., Direct phase determination in hologram interferometry with use of digitally recorded holograms, J. Opt., Soc. Am. A., Vol. 11, pp.2011-2015 (1994).
79. Zou Y. L., Pedrini G. and Tiziani H. J., Two-wavelength contouring with a pulsed ruby laser by employing TV-holography, J. Mod. Opt. Vol. 43, pp.639-646 (1996).
80. B. Nilsson, T. E. Carlsson, Simultanous measurement of shape and deformation using digital Light-in-Flight holography, Opt. Eng., Vol. 39, pp.244-253 (2000).
63