ANGLE-RESOLVED PHOTOEMISSION SPECTROSCOPY of Sr1−Xlaxcuo2 THIN FILMS GROWN by MOLECULAR-BEAM EPITAXY
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Plasma Enhanced Chemical Vapor Deposition of Organic Polymers
processes Review Plasma Enhanced Chemical Vapor Deposition of Organic Polymers Gerhard Franz Department of Applied Sciences and Mechatronics, Munich University of Applied Sciences (MUAS), 34 Lothstrasse, Munich, D-80335 Bavaria, Germany; [email protected] Abstract: Chemical Vapor Deposition (CVD) with its plasma-enhanced variation (PECVD) is a mighty instrument in the toolbox of surface refinement to cover it with a layer with very even thickness. Remarkable the lateral and vertical conformity which is second to none. Originating from the evaporation of elements, this was soon applied to deposit compound layers by simultaneous evaporation of two or three elemental sources and today, CVD is rather applied for vaporous reactants, whereas the evaporation of solid sources has almost completely shifted to epitaxial processes with even lower deposition rates but growth which is adapted to the crystalline substrate. CVD means first breaking of chemical bonds which is followed by an atomic reorientation. As result, a new compound has been generated. Breaking of bonds requires energy, i.e., heat. Therefore, it was a giant step forward to use plasmas for this rate-limiting step. In most cases, the maximum temperature could be significantly reduced, and eventually, also organic compounds moved into the preparative focus. Even molecules with saturated bonds (CH4) were subjected to plasmas—and the result was diamond! In this article, some of these strategies are portrayed. One issue is the variety of reaction paths which can happen in a low-pressure plasma. It can act as a source for deposition and etching which turn out to be two sides of the same medal. -
Lecture06-Thin Film Deposition
EE143 – Fall 2016 Microfabrication Technologies Lecture 6: Thin Film Deposition Reading: Jaeger Chapter 6 Prof. Ming C. Wu [email protected] 511 Sutardja Dai Hall (SDH) 1 Vacuum Basics • Units – 1 atmosphere = 760 torr = 1.013x105 Pa – 1 bar = 105 Pa = 750 torr – 1 torr = 1 mm Hg – 1 mtorr = 1 micron Hg – 1 Pa = 7.5 mtorr = 1 newton/m2 – 1 torr = 133.3 Pa • Ideal Gas Law: PV = NkT – k = 1.38E-23 Joules/K = 1.37E-22 atm cm3/K – N = # of molecules (note the typo in your book) – T = absolute temperature in K 2 1 Dalton’s Law of Partial Pressure • For mixture of non-reactive gases in a common vessel, each gas exerts its pressure independent of others • ������ = �� + �� + ⋯ . +�� – Total pressure = Sum of partial pressures • ������ = �� + �� + ⋯ . +�� – Total number of molecules = sum of individual molecules • Ideal gas law observed by each gas, as well as all gases – ��� = ���� – ��� = ���� – ��� = ���� 3 Average Molecular Velocity • Assumes Maxwell- Boltzman Velocity Distribution 7 ��� �3 = �� • where m = molecular weight of gas molecule 4 2 Mean Free Path between collisions �� � = 7 ����� • where – K = Boltzmann constant – T = temperature in Kelvin – d = molecular diameter – P = pressure • For air at 300K �. � �. �� �(�� ��) = = � (�� ��) � (�� ����) 5 Impingement Rate • � = number of molecules striking a surface per unit area per unit time [1/cm2-sec] � � = �. �×���� 7 �� • where – P = pressure in torr – M = molecular weight 6 3 Question • How long does it take to form a monolayer of gas on the surface of a substrate? 7 Vacuum Basics -
Amperean Pairing and the Pseudogap Phase of Cuprate Superconductors
PHYSICAL REVIEW X 4, 031017 (2014) Amperean Pairing and the Pseudogap Phase of Cuprate Superconductors Patrick A. Lee* Department of Physics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA (Received 17 April 2014; published 29 July 2014) The enigmatic pseudogap phase in underdoped cuprate high-Tc superconductors has long been recognized as a central puzzle of the Tc problem. Recent data show that the pseudogap is likely a distinct phase, characterized by a medium range and quasistatic charge ordering. However, the origin of the ordering wave vector and the mechanism of the charge order is unknown. At the same time, earlier data show that precursive superconducting fluctuations are also associated with this phase. We propose that the pseudogap phase is a novel pairing state where electrons on the same side of the Fermi surface are paired, in strong contrast with conventional Bardeen-Cooper-Schrieffer theory which pairs electrons on opposite sides of the Fermi surface. In this state the Cooper pair carries a net momentum and belongs to a general class called pair density wave. The microscopic pairing mechanism comes from a gauge theory formulation of the resonating valence bond (RVB) picture, where spinons traveling in the same direction feel an attractive force in analogy with Ampere’s effects in electromagnetism. We call this Amperean pairing. Charge order automatically appears as a subsidiary order parameter even when long-range pair order is destroyed by phase fluctuations. Our theory gives a prediction of the ordering wave vector which is in good agreement with experiment. Furthermore, the quasiparticle spectrum from our model explains many of the unusual features reported in photoemission experiments. -
Pseudogap Formation Above the Superconducting Dome in Iron-Pnictides
Pseudogap formation above the superconducting dome in iron-pnictides T. Shimojima1,2,*, T. Sonobe1, W. Malaeb3,4,, K. Shinada1, A. Chainani5,6, S. Shin2,3,4,5,T. Yoshida4,7, S. Ideta1, A. Fujimori4,7, H. Kumigashira8, K Ono8, Y. Nakashima9,H. Anzai10, M. Arita10, A. Ino9, H. Namatame10, M. Taniguchi9,10, M. Nakajima4,7,11,S. Uchida4,7, Y. Tomioka4,11, T.Ito4,11, K. Kihou4,11, C. H. Lee4,11, A. Iyo4,11,H. Eisaki4,11, K. Ohgushi3,4, S. Kasahara12,13, T. Terashima12, H. Ikeda13, T. Shibauchi13, Y. Matsuda13, K. Ishizaka1,2 1 Department of Applied Physics, University of Tokyo, Bunkyo, Tokyo 113-8656, Japan. 2 JST, CREST, Chiyoda, Tokyo 102-0075, Japan 3 ISSP, University of Tokyo, Kashiwa 277-8581, Japan. 4 JST, TRIP, Chiyoda, Tokyo 102-0075, Japan 5 RIKEN SPring-8 Center, Sayo, Hyogo 679-5148, Japan 6 Department of Physics, Tohoku University, Aramaki, Aoba-ku, Sendai 980-8578, Japan 7 Department of Physics, University of Tokyo, Bunkyo, Tokyo 113-0033, Japan. 8 KEK, Photon Factory, Tsukuba, Ibaraki 305-0801, Japan. 9 Graduate School of Science, Hiroshima University, Higashi-Hiroshima 739-8526, Japan. 10Hiroshima Synchrotron Center, Hiroshima University, Higashi-Hiroshima 739-0046, Japan 11National Institute of Advanced Industrial Science and Technology, Tsukuba 305-8568, Japan. 12 Research Center for Low Temperature and Materials Sciences, Kyoto University, Kyoto 606-8502, Japan. 13Department of Physics, Kyoto University, Kyoto 606-8502, Japan. The nature of the pseudogap in high transition temperature (high-Tc) superconducting cuprates has been a major issue in condensed matter physics. It is still unclear whether the high-Tc superconductivity can be universally associated with the pseudogap formation. -
Deposition Lecture Day 2 Deposition
Deposition Lecture Day 2 Deposition PVD - Physical Vapor Deposition E-beam Evaporation Thermal Evaporation (wire feed vs boat) Sputtering CVD - Chemical Vapor Deposition PECVD LPCVD MVD ALD MBE Plating Parylene Coating Vacuum Systems, pumps and support equipment Differences, Pros and Cons for depositing various materials Physical vs. Chemical Deposition Metallization - depositing metal layers or thin films - E-beam & Thermal Evaporation, Sputtering, Plating - Contact layer, mask/protection layer, interface layers Dielectric Deposition - depositing dielectric layers or thin films -CVD, e-beam, sputtering - insulating/capacitor layer, mask/protecting layer, interface layers *Dielectric = an electrical insulator that can be polarized by an applied electric field. ~energy storing capacity → capacitor Environment of the Deposition *Cleanroom is not enough! Must also be in vacuum! Purity of the deposited film depends on the quality of the vacuum, and on the purity of the source material. Cryo pumps Evaporation is a common method of thin-film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel directly to the target object (substrate), where they condense back to a solid state. Evaporation is used in microfabrication, and to make macro-scale products such as metallized plastic film. Any evaporation system includes a vacuum pump. It also includes an energy source that evaporates the material to be deposited. Many different energy sources exist: ● In the thermal method, metal material (in the form of wire, pellets, shot) is fed onto heated semimetal (ceramic) evaporators known as "boats" due to their shape. A pool of melted metal forms in the boat cavity and evaporates into a cloud above the source. -
Evaporation Sources
MATERIALS EVAPORATION I SOURCES • Evaporation Source Selection Guide ................... .I 02 • Tungsten Filaments for Vacuum Metalizing.......... .I 04 I • Tungsten Rod Source ..................................... .I 07 • Point Source Loop Filaments............................. .I 08 • Heater Filaments ............................................ I 10 • Baskets ........................................................ .I 11 • Crucibles ...................................................... .I 14 • Heat Shielded Crucible Heaters ......................... .I 16 • Boat Sources ................................................. .I 18 • Folded Boats ................................................. .I 29 • Alumina Coated Evaporation Sources.................. .I 31 • Special Tantalum Boats.................................... I 37 • Folded Baffled Box Sources .............................. .I 41 • Baffled Box Sources for SiO, ZnS ....................... .I 43 • Microelectronic Sources Tungsten – Tantalum – Molybdenum .................................. .I 48 • Chrome Plated Tungsten Rods .......................... .I 53 • Tungsten Screens .......................................... .I 54 I 01 MATERIALS EvaporatioN SOUrces ManufacturingEvaporation Source Processes Selection Guide Evaporation Source Selection Guide This source selection guide is provided to help you determine which evaporation source type might fit your needs. How to use the Guide: 1. Determine how much current your power supply is capable of safely producing. 2. Establish the vapor -
Technical Paper
TECHNICAL PAPER Materials & Deposition Technology for Coating Optical Surfaces Understanding the Components of the Process Author: Samuel Pellicori Materion Coating Materials News The materials and deposition processes employed to make coatings that are intended for use at wavelength regions between UV and far IR are described in this overview of the technology. Coatings composed of special materials are deposited as nano- and micro- meter thicknesses by specific techniques to control the optical, mechanical, chemical and electrical properties of optical surfaces. Design & Engineering Considerations for Coating Optical Components The components of the deposition process, starting with the performance specifications and continuing through the finished coated surface, are diagrammed in Figure 1. It is evident from the number and descriptions of the process components that material science and deposition technology play complex interdependent roles in the overall process of producing optical coatings. It is important for the system designer to understand the individual components of the process and their interactions. When presented with the spectral and environmental requirements and the substrate material to be coated, the coating engineer has the responsibility of selecting the appropriate coating materials and deposition process. A thin-film design is then generated that includes the wavelength dependencies of the optical constants, refractive index and extinction coefficient - quantities that need to be pre-determined for specific materials and their deposition process parameters. From this theoretical layer-by-layer design, the performance is predicted and evaluated with respect to spectral coverage, incidence angle, surface shape, substrate temperature constraints, mechanical durability and verification measurement. The technology of preparing the coating material is equally complex and includes consideration of such factors as chemical composition, form, and deposition technique. -
Pseudogap and Charge Density Waves in Two Dimensions
1 Pseudogap and charge density waves in two dimensions S. V. Borisenko1, A. A. Kordyuk1,2, A. N. Yaresko3, V. B. Zabolotnyy1, D. S. Inosov1, R. Schuster1, B. Büchner1, R. Weber4, R. Follath4, L. Patthey5, H. Berger6 1Leibniz-Institute for Solid State Research, IFW-Dresden, D-01171, Dresden, Germany 2Institute of Metal Physics, 03142 Kyiv, Ukraine 3Max-Planck-Institute for the Physics of Complex Systems, Dresden, Germany 4BESSY, Berlin, Germany 5Swiss Light Source, Paul Scherrer Institut, CH-5234 Villigen, Switzerland 6Institute of Physics of Complex Matter, EPFL, 1015 Lausanne, Switzerland An interaction between electrons and lattice vibrations (phonons) results in two fundamental quantum phenomena in solids: in three dimensions it can turn a metal into a superconductor whereas in one dimension it can turn a metal into an insulator1, 2, 3. In two dimensions (2D) both superconductivity and charge-density waves (CDW)4, 5 are believed to be anomalous. In superconducting cuprates, critical transition temperatures are unusually high and the energy gap may stay unclosed even above these temperatures (pseudogap). In CDW-bearing dichalcogenides the resistivity below the transition can decrease with temperature even faster than in the normal phase6, 7 and a basic prerequisite for the CDW, the favourable nesting conditions (when some sections of the Fermi surface appear shifted by the same vector), seems to be absent8, 9, 10. Notwithstanding the existence of alternatives11, 12, 13, 14, 15 to conventional theories1, 2, 3, both phenomena in 2D still remain the most fascinating puzzles in condensed matter physics. Using the latest developments in high-resolution angle-resolved photoemission spectroscopy (ARPES) here we show that the normal-state pseudogap also exists in one of the most studied 2D examples, dichalcogenide 2H-TaSe2, and the formation of CDW is driven by a conventional nesting instability, which is masked by the pseudogap. -
Physical Vapor Deposition
EE-527: MicroFabrication Physical Vapor Deposition R. B. Darling / EE-527 / Winter 2013 Physical Vapor Deposition (PVD) Gas Phase Gas Phase Transport Evaporation Condensation Condensed Phase Condensed Phase (solid or liquid) (usually solid) R. B. Darling / EE-527 / Winter 2013 Equilibrium Vapor Pressure • P* is the partial pressure of a gas in equilibrium with its condensed phase at a given temperature T. – There is no net transfer of material from one state to the other. • For a given material, P* is only a function of T. – But the dependence of P* on T is rather complicated. R. B. Darling / EE-527 / Winter 2013 Evaporation Rates - 1 • P* is the equilibrium vapor pressure of the evaporant at T. • P is the ambient hydrostatic pressure acting upon the evaporant in the condensed phase. • Heinrich Hertz found experimentally that the evaporation rate was proportional to (P* - P). – This is consistent with kinetic theory in which the impingement rates are proportional to pressure. – Hertz also found that the evaporation rate could not be increased by supplying more heat unless the equilibrium vapor pressure was also increased by this action. – Thus, there is a maximum evaporation rate set by P*, and this is only achieved in a vacuum, where P = 0. R. B. Darling / EE-527 / Winter 2013 Evaporation Rates - 2 • This can be viewed as two opposing fluxes: The net evaporation flux is the difference between the impingement rates for the evaporant vapor two fluxes: rate goes as P dNe 1/ 2 * 2mkBT P P Aedt rate goes as P* condensed evaporant R. B. -
Pseudogap in High-Temperature Superconductors
Physics ± Uspekhi 44 (5) 515 ± 539 (2001) # 2001 Uspekhi Fizicheskikh Nauk, Russian Academy of Sciences REVIEWS OF TOPICAL PROBLEMS PACS numbers: 74.20.Mn, 74.72. ± h, 74.25. ± q, 74.25.Jb Pseudogap in high-temperature superconductors M V Sadovski|¯ DOI: 10.1070/PU2001v044n05ABEH000902 Contents 1. Introduction 515 2. Basic experimental facts 516 2.1 Specific heat and tunneling; 2.2 NMR and kinetic properties; 2.3 Optical conductivity; 2.4 Fermi surface and ARPES; 2.5 Other experiments 3. Theoretical models of the pseudogap state 522 3.1 Scattering on short-range-order fluctuations: Qualitative ideas; 3.2 Recurrent procedure for the Green functions; 3.3 Spectral density and the density of states; 3.4 Two-particle Green function and optical conductivity 4. Superconductivity in the pseudogap state 529 4.1 Gor'kov equations; 4.2 Transition temperature and the temperature dependence of the gap; 4.3 Cooper instability; 4.4 Ginzburg ± Landau equations and the basic properties of superconductors with a pseudogap near Tc; 4.5 Effects of the non-self-averaging nature of the order parameter 5. Conclusion. Problems and prospects 536 References 538 Abstract. The paper reviews the basic experimental facts and a the very unusual properties of these systems in the normal number of theoretical models relevant to the understanding of (nonsuperconducting) state, and without a clear understand- the pseudogap state in high-temperature superconductors. The ing of the nature of these properties there is little hope for state is observed in the region of less-than-optimal current- completely elucidating the microscopic mechanism of high-Tc carrier concentrations in the HTSC cuprate phase diagram superconductivity. -
High Temperature Superconductivity in the Cuprates B. Keimer1, S. A
High Temperature Superconductivity in the Cuprates B. Keimer1, S. A. Kivelson2, M. R. Norman3, S. Uchida4, J. Zaanen5 The discovery of high temperature superconductivity in the cuprates in 1986 triggered a spectacular outpouring of creative and innovative scientific inquiry. Much has been learned over the ensuing 28 years about the novel forms of quantum matter that are exhibited in this strongly correlated electron system. This progress has been made possible by improvements in sample quality, coupled with the development and refinement of advanced experimental techniques. In part, avenues of inquiry have been motivated by theoretical developments, and in part new theoretical frameworks have been conceived to account for unanticipated experimental observations. An overall qualitative understanding of the nature of the superconducting state itself has been achieved, while profound unresolved issues have come into increasingly sharp focus concerning the astonishing complexity of the phase diagram, the unprecedented prominence of various forms of collective fluctuations, and the simplicity and insensitivity to material details of the “normal” state at elevated temperatures. New conceptual approaches, drawing from string theory, quantum information theory, and various numerically implemented approximate approaches to problems of strong correlations are being explored as ways to come to grips with this rich tableaux of interrelated phenomena. Introduction: The discovery of high temperature superconductivity in the cuprate perovskite LBCO1 ranks among the major scientific events of the 20th century – it triggered developments in both theoretical and experimental physics that have significantly changed our understanding of condensed matter systems. Most obviously, the superconducting transition temperatures in the cuprates exceed those of any previously known superconductor by almost an order of magnitude, passing by a large factor what was, at the time, widely believed to be the highest possible temperature at which superconductivity could survive (Fig. -
Absence of Superconducting Dome at the Charge-Density-Wave Quantum Phase Transition in 2H-Nbse2
PHYSICAL REVIEW RESEARCH 2, 043392 (2020) Absence of superconducting dome at the charge-density-wave quantum phase transition in 2H-NbSe2 Owen Moulding,1 Israel Osmond,1 Felix Flicker,2,3,4 Takaki Muramatsu,1 and Sven Friedemann 1,* 1HH Wills Laboratory, Tyndall Avenue, University of Bristol, Bristol, BS8 1TL, United Kingdom 2Rudolf Peierls Centre for Theoretical Physics, University of Oxford, Department of Physics, Clarendon Laboratory, Parks Road, Oxford, OX1 3PU, United Kingdom 3School of Physics and Astronomy, Cardiff University, Cardiff CF24 3AA, United Kingdom 4School of Mathematics, University of Bristol, Bristol BS8 1TW, United Kingdom (Received 15 June 2020; revised 11 November 2020; accepted 25 November 2020; published 18 December 2020) Superconductivity is often found in a dome around quantum critical points, i.e., second-order quantum phase transitions. Here, we show that an enhancement of superconductivity is avoided at the critical pressure of the charge-density-wave (CDW) state in 2H-NbSe2. We present comprehensive high-pressure Hall effect and magnetic susceptibility measurements of the CDW and superconducting state in 2H-NbSe2. Initially, the second-order CDW transition is suppressed smoothly but it drops to zero abruptly at PCDW = 4.4 GPa thus indicating a change to first order, while the superconducting transition temperature Tc rises continuously up to PCDW but is constant above. The putative first-order nature of the CDW transition is suggested as the cause for the absence of a superconducting dome at PCDW. Indeed, we show that the suppression of the superconducting state at low pressures is due to the loss of density of states inside the CDW phase, while the initial suppression of the CDW state is accounted for by the stiffening of the underlying bare phonon mode.