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Arxiv:1609.06182V4 [Cond-Mat.Supr-Con] 18 May 2018 C

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Arxiv:1609.06182V4 [Cond-Mat.Supr-Con] 18 May 2018 C NanoSQUIDs: Basics & recent advances M. J. Mart´ınez-P´erez1 and D. Koelle1 1Physikalisches Institut { Experimentalphysik II and Center for Quantum Science in LISA+, Universit¨atT¨ubingen,Auf der Morgenstelle 14, D-72076 T¨ubingen,Germany (Dated: May 21, 2018) Superconducting Quantum Interference Devices (SQUIDs) are one of the most popular devices in superconducting electronics. They combine the Josephson effect with the quantization of magnetic flux in superconductors. This gives rise to one of the most beautiful manifestations of macroscopic quantum coherence in the solid state. In addition, SQUIDs are extremely sensitive sensors allow- ing to transduce magnetic flux into measurable electric signals. As a consequence, any physical observable that can be converted into magnetic flux, e.g., current, magnetization, magnetic field or position, becomes easily accessible to SQUID sensors. In the late 1980's it became clear that down- sizing the dimensions of SQUIDs to the nanometric scale would encompass an enormous increase of their sensitivity to localized tiny magnetic signals. Indeed, nanoSQUIDs opened the way to the investigation of, e.g., individual magnetic nanoparticles or surface magnetic states with unprece- dented sensitivities. The purpose of this review is to present a detailed survey of microscopic and nanoscopic SQUID sensors. We will start by discussing the principle of operation of SQUIDs, plac- ing the emphasis on their application as ultrasensitive detectors for small localized magnetic signals. We will continue by reviewing a number of existing devices based on different kinds of Josephson junctions and materials, focusing on their advantages and drawbacks. The last sections are left for applications of nanoSQUIDs in the fields of scanning SQUID microscopy and magnetic particle characterization, putting special stress on the investigation of individual magnetic nanoparticles. CONTENTS C. Susceptibility measurements 16 I. Introduction 1 V. nanoSQUIDs for scanning SQUID microscopy 18 A. SQUID microscopes using devices on planar II. SQUIDs: some basic considerations 2 substrates 18 A. Resistively and capacitively shunted junction B. SQUID-on-tip (SOT) microscope 19 model 2 B. dc SQUID basics 3 VI. Summary and outlook 20 C. SQUID readout 4 1. Flux-locked loop 4 Acknowledgments 20 2. Voltage readout 4 3. Critical current readout & threshold References 20 detection 5 4. Dispersive read out 5 I. INTRODUCTION III. nanoSQUIDs: design, fabrication & performance 5 The superconducting quantum interference device A. nanoSQUIDs: design considerations 6 (SQUID) consists of a superconducting ring intersected B. nanoSQUIDs based on metallic by one (rf SQUID) or two (dc SQUID) Josephson junc- superconductors 7 tions. SQUIDs constitute, still at present, the most sen- 1. Sandwich-type SIS junctions 7 sitive sensors for magnetic flux in the solid state1,2. For 2. Sandwich-type SNS junctions 8 more than 50 years, a plethora of devices exploiting this 3. Constriction junctions 9 property have been envisioned, fabricated and used in 4. Proximized structures 11 many fields of applications3. These devices include volt- arXiv:1609.06182v4 [cond-mat.supr-con] 18 May 2018 C. NanoSQUIDs based on cuprate meters, current amplifiers, metrology standards, motion superconductors 12 sensors and magnetometers. One of the key applications of SQUIDs is in magnetometry. Here, a superconduct- IV. nanoSQUIDs for magnetic particle detection 13 ing input circuit (flux transformer) picks up the mag- A. Nanoparticle positioning 13 netic flux density B, captured by superconducting pick- 1. In-situ nanoparticle growth 14 up loops of some mm2 or cm2 area, and the induced cur- 2. Scanning probe-based techniques 14 rent is then (typically inductively) coupled to a SQUID. 3. Techniques based on chemical The figure ofp merit ofp SQUID magnetometers is the field functionalization 15 resolution SB = pSΦ=Aeff , which can reach values B. Magnetization measurements 15 down to about 1fT= Hz. Here, SΦ is the spectral den- 2 sity of flux noise of the SQUID and Aeff is the effective making the interpretation of the results much more di- area of the magnetometer. rect and simple. While their sensitivity deteriorates To ensure good coupling from an input circuit to a rapidly when Hall sensors are reduced to the submicron SQUID, typically thin film multiturn input coils are in- size, miniaturized SQUID-based sensors can theoretically tegrated on top of a washer-type SQUID loop. Typical reach quantum limited resolution. thin film washer SQUIDs have lateral outer dimensions In this review, we give an overview on some basics of 19 of several 100 µm, the inner hole size is several tens of nanoSQUIDs and recent advances in the field. After a µm and the lateral size of the Josephson junctions is sev- brief description of some SQUID basics in section II, we eral µm. Such devices are fabricated by conventional thin will review in section III important design considerations film technology, including micropattering by photolithog- for optimizing nanoSQUID performance and the state of raphy. With the development of a mature junction tech- the art in fabrication and performance of nanoSQUIDs nology, based on sandwich-type Nb/Al-AlOx/Nb junc- based on low-Tc and high-Tc superconductors, with em- tions in the 1980s4, Nb based dc SQUIDs became the phasis on the various types of Josephson junctions used. most commonly used type of devices for various appli- Subsequently, we will review important applications of cations. At the same time, first attempts were started nanoSQUIDs, divided into two sections: Section IV gives to further miniaturize the lateral dimensions of SQUIDs, an overview on applications of nanoSQUIDs for magnetic including the Josephson junctions5. This was made pos- particle detection, and section V addresses nanoSQUIDs sible by advances in nanolithography6 and was motivated for scanning SQUID microscopy. We will conclude with by the development of the theory for thermal noise in a short section VI, which gives a summary and outlook. the dc SQUID7, which showed that the energy resolution " = SΦ=(2L) of dc SQUIDs can be improved by reducing the SQUID loop inductance L and junction capacitance II. SQUIDS: SOME BASIC CONSIDERATIONS C, to eventually reach and explore quantum limited res- 8 olution of such devices . These developments have trig- The working principle of a SQUID is based on two gered the realization of miniaturized dc SQUIDs for the fundamental phenomena in superconductors, the flux- investigating of small magnetic particles and for imag- oid quantization and the Josephson effect. The fluxoid ing of magnetic field distributions by scanning SQUID quantization arises from the quantum nature of super- microscopy to combine high sensitivity to magnetic flux conductivity, as the macroscopic wave function describ- 9 with high spatial resolution. In 1984, Ketchen et al. ing the whole ensemble of Cooper pairs shall not in- presented the first SQUID microsusceptometer devoted terfere destructively. This leads to the quantization of to detect the tiny signal produced by micron-sized mag- the magnetic flux Φ threading a superconducting loop20, netic objects, and in 1983 Rogers and Bermon developed in units of the magnetic flux quantum Φ0 = h=2e ≈ the first system to produce 2-dimensional scans of mag- 2:07 × 10−15 Vs. 10 netic flux structures in superconductors . Both devel- The Josephson effect21,22 results from the overlap of opments were pushed further in the 1990s. Wernsdorfer 11,12 the macroscopic wave functions between two supercon- et al. used micron-sized SQUIDs to perform experi- ducting electrodes at a weak link forming the Josephson ments on the magnetization reversal of nanometric par- junction (JJ). The supercurrent Is through the weak link ticles, which were placed directly on top of the SQUIDs. and the voltage drop U across it satisfy the Josephson At the same time, scanning SQUID microscopes with relations miniaturized SQUIDs and/or pickup loop structures have been developed, at that time with focus on studies on Φ I (t) = I sin δ(t) (a) U(t) = 0 δ_ (b) ; (1) the pairing symmetry in the high transition temperature s 0 2π 13 (high-Tc) cuprate superconductors . Since then much effort has been dedicated to the further miniaturization with the gauge-invariant phase difference δ between the of SQUID devices and to the optimization of their noise macroscopic wave functions of both superconductors and 14 characteristics . the maximum attainable supercurrent I0; the dot refers Studies on the properties of small spin systems, such to the time derivative. The simple sinusoidal current- as magnetic nanoparticles (MNPs) and single molecule phase relation (CPR), Eq. (1(a)), is found for many kinds of JJs. However, some JJ types exhibit a non-sinusoidal magnets (SMMs), have fueled the development of new 23 magnetic sensors for single particle detection and imag- CPR, which can even be multivalued . ing with improved performance. Many of the recent ad- vances in this field include the development of magneto- optical techniques based on nitrogen vacancy centers in A. Resistively and capacitively shunted junction diamond15,16 or the use of carbon nanotubes (CNTs) as model spin detectors17. Alternatively, miniature magnetome- ters, based on either microHall bars18 or micro- and A very useful approach to describe the phase dynamics nanoSQUIDs, provide direct measurement of the stray of a JJ is the resistively and capacitively shunted junction magnetic fields generated by the particle under study, (RCSJ) model24{26. Within this model, the current flow 3 (a) I B. dc SQUID basics The dc SQUID27 is a superconducting loop (with in- Id Iqp Is ductance L) intersected by two JJs [Fig. 2(a)]. With an externally applied magnetic flux Φ through the loop, the C R I I U 0 N fluxoid quantization links the phase differences δ1 and δ2 of the two JJs to the total flux in the SQUID ΦT = Φ+LJ via 2π δ1 − δ2 + 2πn = (Φ + LJ) : (5) (b) i= Φ0 2EJ 0 Here, J is the current circulating in the SQUID loop and UJ n is an integer28.
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