Gian Antonio Susto – Post Doctoral Researcher
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Gian Antonio Susto Post Doctoral Researcher Padua (Italy) - April 15, 2013 Personal information Date of birth April 7th, 1984 Nationality Italian Home address Via Spin 109, 35047, Solesino, Padova, Italy Marital status Single Current Positions Sep. 2012– Post-Doctoral Researcher, National University of Ireland, Ireland, Machine Learn- ing and Data Mining for Manufacturing. Collaborations with Pfizer Inc., Seagate Technology and the Irish Centre of Manufacturing Research Feb. 2013– Owner, SpeedUp Consulting SRL, Italy, Machine Learning and Control Systems consultancy for manufacturing. Collaborations with Infineon Technologies AG and University of Pavia Education Jan. 2010– Ph.D. in Information Engineering, University of Padova, Italy, Thesis: Statistical Dec. 2012 Methods for Semiconductor Manufacturing, Advisor: Alessandro Beghi. Oct. 2006– Master of Science in Control Engineering, University of Padova, Italy, Thesis: Apr. 2009 Control of ODE systems with actuator or sensor dynamics modelled by PDEs, Ad- visors: Alessandro Beghi and Miroslav Krstic (University of California, San Diego). Grade: 110/110 summa cum laude Oct. 2003– Bachelor of Science in Control Engineering, University of Padova, Italy, Thesis: Oct. 2006 Variable Structure Observers (in Italian), Advisor: Alessandro Beghi. Grade: 107/110 Sep. 1998– Scientific High School Diploma, Liceo Scientifico "Carlo Cattaneo", Monselice, Jul. 2003 Padova, Italy. Grade: 100/100 via Spin 109, 35047 Solesino (PD) – ITALY H +39 340 1522827 • B [email protected] 1/5 Í http://automatica.dei.unipd.it/people/gianantoniosusto.html Research Interests Current Machine Learning and Control Systems for Manufacturing with application to Virtual Metrology, Predictive Maintenance, Fault Dection and Run-to-Run Control Knowledge Extraction from Time Series Dataset Past Control of Partial Differential Equations Projects Jan. 2012– Involved in the Irish Centre of Manufacturing Research activities (www.icmr.ie) Collaborations with Pfizer Inc., Seagate Technologies, Intel Jul. 2009– Involved in the European Project IMPROVE (www.eniac-improve.eu) in the Jul. 2012 Work Plan 2, Virtual Metrology, and Work Plan 3, Predictive Maintenance Collaborations with Infineon Technologies Austria, STMicroelectronics Catania, Micron, University of Pavia Experience Vocational Mar. 2011– Research Internship, Infineon Technologies AG, Villach, Austria. Aug. 2011 Internship with research theme on Predictive Maintenance Systems for semiconductor manufacturing processes Jul. 2009– Research Internship, Department of Information Engineering, University of Dec. 2009 Padova. Research theme: modeling of semiconductor manufacturing processes Sep. 2008– Education Abroad Program, University of California, San Diego, USA. Apr. 2009 Visiting student during the Master Degree in an exchange program with UCSD, attending full-time classes and working on Master Thesis Miscellaneous Aug. 2006– Internship, B Onward SRL, Fontaniva. Oct. 2006 Internship on LAN management Honors and Awards Oct. 2012 Best Student Paper Award, 2012 IEEE Multi-Conference on Systems and Control (MSC), Dubrovnik, Croatia. Sponsored by the IEEE Control Systems Society May 2012 Best Student Paper Award, 23rd IEEE/SEMI Advanced Semiconductor Manu- facturing Conference (ASMC), Saratoga Springs, US. Sponsored by the IEEE Robotics and Automation Society Aug. 2011 Best Student Paper Award, 7th IEEE Conference on Automation Science and Engineering (CASE), Trieste, Italy. Sponsored by the Semiconductor Equipment and Materials International via Spin 109, 35047 Solesino (PD) – ITALY H +39 340 1522827 • B [email protected] 2/5 Í http://automatica.dei.unipd.it/people/gianantoniosusto.html Relevant Experiences Academics Co-Advisor Co-advisor of the Thesis ’Virtual Metrology for Semiconductor Manufacturing Applications’, written by the M.Sc. student Nicola Bertorelle Reviewer Reviewer for the Scientific Journals ’System and Control Letters’, ’IEEE/ASME Transactions on Mechatronics’, ’IEEE Transactions on Automation Science and Engineering’, ’International Journal of Robust and Nonlinear Control’, ’IEEE Trans- actions on Semiconductor Manufacturing’ and ’Journal of The Franklin Institute’ and for the IEEE conferences ’CDC 2010-2011-2012-2013’ ’IROS 2010’, ’CASE 2011-2012-2013’, ’MSC 2012’ Jul. 2011 Summer School. 2011 SIDRA Antonio Ruperti Summer School on Distributed Control, Game Theory and Model Predictive Control, Bertinoro, Italy. Jul. 2010 Summer School. 2010 Neural Network Summer School, Porto. Affiliations and Institutional positions Mar. 2011– Institutional positions, Department of Information Engineering. Mar. 2012 Ph.D. student representative in the Department Council Board. Mar. 2010– Institutional positions, Department of Information Engineering. Mar. 2011 Ph.D. student representative in the Ph.D. School Council Board. Mar. 2011– Affiliations. Jan 2013 IEEE Student Member Ago. 2011– Affiliations. today SIDRA, Italian Society of Professors and Researchers in Automatic Controls Oct. 2001– Institutional positions, Liceo Scientifico ’Carlo Cattaneo’. Oct. 2002 Student representative in the High School Board. Professional licenses achievement Jan 2010 Professional Engineer Languages Italian Mother Tongue English Advanced European level: Understanding C2, Speaking C2, Writing C1 Last Certification: TOEFL iBT, 12 Sept. 2007, 101/120 Computer skills General Advanced knowledge of Windows Databases Oracle, MySQL and Office (Certification ECDL 2002) Programming Advanced knowledge of Matlab and Typesetting Advanced knowledge of LATEX, Simulink basic knowledge of Java, basic knowledge of HTML Assembly MIPS, C, C# and Visual Studio, Step7 via Spin 109, 35047 Solesino (PD) – ITALY H +39 340 1522827 • B [email protected] 3/5 Í http://automatica.dei.unipd.it/people/gianantoniosusto.html Publications S. Pampuri, A. Schirru, G.A. Susto, A. Beghi, G. DeNicolao, and C. DeLuca. Multistep virtual metrology approaches for semiconductor manufacturing processes. In 8th IEEE Conference on Automation Science and Engineering (CASE), pages 91 – 96, 2012. A. Schirru, G. A. Susto, S. Pampuri, and S. McLoone. Learning from time series: Supervised aggregative feature extraction. In 51st IEEE Conference on Decision and Control 2012 (CDC), pages 5254 – 5259, 2012. A. Schirru, G. A. Susto, S. Pampuri, and S. McLoone. Supervised aggregated feature extraction for functional regression in time series spaces. IEEE Transactions on Neural Networks and Learning Systems, -:Submitted, 20XX. G A Susto, A Beghi, and C DeLuca. A virtual metrology system for predicting cvd thickness with equipment variables and qualitative clustering. In 16th IEEE Conference on Emerging Technologies & Factory Automation (EFTA), pages 1 – 4, 2011. G.A. Susto and A. Beghi. An information theory-based approach to data clustering for virtual metrology and soft sensors. In 3rd International conference on Circuits, Systems, Control, Signals (CSCS), pages 198 – 203, 2012. G.A. Susto and A. Beghi. Least angle regression for semiconductor manufacturing modeling. In IEEE Multi-Conference on Systems and Control (MSC), pages 658 – 663, 2012. G.A. Susto and A. Beghi. A virtual metrology system based on least angle regression and statistical clustering. Applied Stochastic Models in Business and Industry, -:Early View, 2012. G.A. Susto, A. Beghi, and C. DeLuca. A predictive maintenance system for silicon epitaxial deposition. In 7th IEEE Conf. on Automation Science and Engineering (CASE), pages 262 – 267, 2011. G.A. Susto, A. Beghi, and C. DeLuca. A predictive maintenance system for epitaxy processes based on filtering and prediction techniques. IEEE Transactions on Semiconductor Manufacturing, 25:638 – 649, 2012. G.A. Susto, A. Johnston, P. O’Hara, and S. McLoone. Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes. In 9th IEEE Conf. on Automation Science and Engineering (CASE) - Submitted, 2013. G.A. Susto and M. Krstic. Control of pde-ode cascades with neumann intercon- nections. Journal of the Franklin Institute, 347:284Ű314, 2010. G.A. Susto, S. Pampuri, A. Schirru, and A. Beghi. Optimal tuning of epitaxy py- rometers. In 23rd IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), pages 294 – 299, 2012. via Spin 109, 35047 Solesino (PD) – ITALY H +39 340 1522827 • B [email protected] 4/5 Í http://automatica.dei.unipd.it/people/gianantoniosusto.html G.A. Susto, S. Pampuri, A. Schirru, G. DeNicolao, S. McLoone, and A. Beghi. Automatic control and machine learning for semiconductor manufacturing: Review and challenges. In 10th European Workshop on Advanced Control and Diagnosis (ACD), 2012. G.A. Susto, A. Schirru, S. Pampuri, and A. Beghi. A predictive maintenance system based on regularization methods for ion-implantation. In 23rd IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), pages 175 – 180, 2012. G.A. Susto, A. Schirru, S. Pampuri, G. DeNicolao, and A. Beghi. An information- theory and virtual metrology-based approach to run-to-run semiconductor manu- facturing control. In 8th IEEE Conference on Automation Science and Engineering (CASE), pages 358 – 363, 2012. G.A. Susto, A. Schirru, S. Pampuri, G. DeNicolao, and A. Beghi. Exploiting virtual metrology systems for run-to-run ewma control in semiconductor manufacturing: an information-theoretic approach. Computers & Operations Research, -:Submitted, 20XX. G.A. Susto, A. Schirru, S. Pampuri, D. Pagano, S. McLoone, and A. Beghi. A predictive maintenance system for integral type faults based on support vector machines: an application to ion implantation. In 9th IEEE Conf. on Automation Science and Engineering (CASE) - Submitted, 2013. via Spin 109, 35047 Solesino (PD) – ITALY H +39 340 1522827 • B [email protected] 5/5 Í http://automatica.dei.unipd.it/people/gianantoniosusto.html.