AGILENT ION Pumps
AGILENT ION PUMPS 2-3 Ion Pumps Features and Benefits 4,5 Controllers Features and Benefits 6,7 SEM Pump Controller Features and Benefits 8-11 Typical Applications 12-40 Pump Models and Controllers 41-51 Technical Notes 52-53 Service and Support Plan AGILent ION PUmps FeatURes anD Benefits Ion Pump Evolution ● Since the late 1950’s, when the ion pump was invented at Varian, now Agilent Technologies, many changes and technical Wide Pumping Speed Range improvements have taken place. • Miniature/Appendage pumps from Virtually all of the major innovations have come from us, from the first 0.2 to 10 l/s Diode VacIon pump to the Triode, then to the StarCell series pumps, and • Small/Medium pumps from 20 to 75 l/s the VacIon Plus. • Large size pumps from 150 to 2500 l/s • TSP/Combi pumps VacIon Plus • Custom solutions with special pumping ● VacIon Plus is a complete family of ion pumps, controllers, options, speed, size, magnetic field and accessories, designed to provide solutions to every application. Parameters such as operating pressure, the gas mixture to be pumped, the starting pressure, etc. can vary so dramatically that Varian, today Agilent, decided to develop dedicated ion pump solutions (including controllers and all other accessories) for different applications. ● The VacIon Plus family includes Diode, Noble Diode, and StarCell pump versions that allow Agilent to provide the best technology for each field of application. The family is complemented by the new 4UHV Ion Pump controllers, that provide different power levels and interface capabilities. Vacuum Processing In order to ensure cleanliness, all pumps are: Titanium Sublimation Combination Pumps (TSP) • Factory processed at high temperature (450°) in ultra-high vacuum for a ● The titanium sublimation creates extra high getterable gas pumping thorough outgassing of the body and all speed while the ion pumping mechanisms handle the non-getterable internal components gases such as argon and methane.
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