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AGILENT ION Pumps AGILENT ION PUMPS 2-3 Ion Pumps Features and Benefits 4,5 Controllers Features and Benefits 6,7 SEM Pump Controller Features and Benefits 8-11 Typical Applications 12-40 Pump Models and Controllers 41-51 Technical Notes 52-53 Service and Support Plan AGILent ION PUmps FeatURes anD Benefits Ion Pump Evolution ● Since the late 1950’s, when the ion pump was invented at Varian, now Agilent Technologies, many changes and technical Wide Pumping Speed Range improvements have taken place. • Miniature/Appendage pumps from Virtually all of the major innovations have come from us, from the first 0.2 to 10 l/s Diode VacIon pump to the Triode, then to the StarCell series pumps, and • Small/Medium pumps from 20 to 75 l/s the VacIon Plus. • Large size pumps from 150 to 2500 l/s • TSP/Combi pumps VacIon Plus • Custom solutions with special pumping ● VacIon Plus is a complete family of ion pumps, controllers, options, speed, size, magnetic field and accessories, designed to provide solutions to every application. Parameters such as operating pressure, the gas mixture to be pumped, the starting pressure, etc. can vary so dramatically that Varian, today Agilent, decided to develop dedicated ion pump solutions (including controllers and all other accessories) for different applications. ● The VacIon Plus family includes Diode, Noble Diode, and StarCell pump versions that allow Agilent to provide the best technology for each field of application. The family is complemented by the new 4UHV Ion Pump controllers, that provide different power levels and interface capabilities. Vacuum Processing In order to ensure cleanliness, all pumps are: Titanium Sublimation Combination Pumps (TSP) • Factory processed at high temperature (450°) in ultra-high vacuum for a ● The titanium sublimation creates extra high getterable gas pumping thorough outgassing of the body and all speed while the ion pumping mechanisms handle the non-getterable internal components gases such as argon and methane. • Shipped under vacuum, and an RGA The combination pump includes the cylindrical cryopanel and TSP source spectrum can be provided with mounted to the extra port. each pump Customized pump configurations are also available. • HE-Leak check Application Specific Solutions for SEM: a complete line of Element Cells and Insulators ion getter pumps dedicated to • Cells’ sizes and geometries are Electron Microscopy. optimized in order to: - maximize the discharge intensity - maximize the pumping speed • The special design of the ceramic insulators allows: - no buildup of sputtered conductive coating - longer pump life 2 ION PUMPS Custom Design The pump body can be configured to meet optional requirements including: • Cryopanel and TSP side or bottom mounted • Integral heaters • Additional roughing ports Ion Feedthroughs Pumps • Eliminate corrosion • Implement the “High Voltage Cable Interlock” • Provide an easy connection • Prevent unintentional extraction • Minimize overall dimensions Pumping Elements Cables Heaters Three different types of pumping elements • Agilent cables have an “HV Safety • The pump can be supplied with heaters are available to cover all possible gas Interlock” that prevents any chance of designed to perform the pump baking mixtures and optimize the application electrical shock • Minimize operational costs specific performances: • If the cable is disconnected from the • Diode pump, the voltage is automatically cut off • Noble Diode • Available in different lengths • Our unique StarCell • Robust, flexible metal-shielded cable • 107 Gy radiation tolerance 3 The NEW AGILent 4UHV ION PUmp COntROLLER FeatURes anD Benefits More Choice and Flexibility ● The VacIon Plus pump family is complemented by the new 4UHV Ion Pump controller, that provides different power levels and interface capabilities. ● The compact MiniVac controller and a dedicated TSP controller are also available. ● The new series of IPCU controller units completes Agilent’s offer (see next pages). ● The existing range of ion pump controllers offers more choice and flexibility than ever before. With the latest in design features, they are simple and easy to operate; just select the right controller to fit your specific application. Versatility The 4UHV is available in different 4UHV - For Ultra High Vacuum configurations, in order to independently power, control and monitor any combination The new state-of-the-art Agilent 4UHV Ion Pump Controller operates up to four of multiple pumps of different sizes, from pumps simultaneously and independently. The 4UHV starts and controls ion one to four pumps, from 10 to 2500 l/s. pumps of any type (Diode, Noble Diode, StarCell) and size (from 10 to 2500 l/s). For each number of pumps to be operated A large four-line LCD display allows simultaneous reading of individual pump several options are available, voltage, current and pressure. The variable voltage feature ensures optimum 120 W or 200 W for a single pump, pumping speed and pressure reading throughout the operating pressure range. 2 x 80 W or 2 x 200 W for two pumps, Built-in set points, remote operation and RS232/485 computer interface are 2 x 80 + 200 W for three pumps, standard. Ethernet and Profibus are options. 4 x 80 W for four pumps. Optimized Pumping Speed The 4UHV will select the right operating applied HV, reduced by the space charge voltage to optimize the pumping speed of effect due to the electron cloud present in your ion pumps. By applying High Voltage in the ion pump cell. Since the space charge accordance with operating pressure, effect is pressure related, a variable HV is pumping speed performance is improved. applied to maintain optimum bombardment This is because the energy with which the energy, resulting in the best possible Intelligence ion bombards the cathode is the nominal pumping performance at any pressure. To access the unit you can use analog or RS232/485 ports. The controller uses the same protocol as our other intelligent Pumping Speed vs Pressure at Different Voltages vacuum devices (Navigator turbo pump 100 Controller and Inverter scroll & rotary vane pumps), giving you fast, convenient access to all elements of the vacuum system. Profibus and Ethernet communications available on request, please call Agilent for details. 50 % of Nominal Speed 0 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 Pressure (mbar) 4 ION PUMPS Low Noise For SEM applications especially, the remaining AC component of the HV output was reduced to a minimum. It is much lower than in any other existing unit, eliminating the need for additional filters completely in many cases. Ion Pumps Typical Current vs Pressure Curve Typical Leakage Current Area 1000 µ with Conventional Controller 100 µ Safety Pressure Reading To protect you against high voltage the The 4UHV is preprogrammed to 10 µ cable is equipped with an interlock system automatically convert current reading Current (A) 4UHV Reading which immediately shuts down the high of any Vaclon Plus pump into pressure. 1 µ voltage when the plug is removed from the Thanks to its ability to detect ion current pump. The protect mode limits the current as low as 10 nA, it allows pressure 0,1 µ -10 to protect the pump and the controller. measurement in the 10 mbar range. 10-10 10-9 10-8 10-7 10-6 10-5 To ensure reliable pressure reading down Pressure (mbar) to the UHV region, the 4UHV optimizes the applied high voltage as a function of pressure. As a result, the leakage current of the ion pump is eliminated, thereby providing more accurate pressure readings. 5 AGILent SEM ION PUmps FeatURes anD Benefits The Agilent Advantage: Dedicated Solutions for SEM Applications ● Agilent is the only manufacturer to offer specially designed SEM ion pumps. These pumps are ideal for the high vacuum guns where stable Wide, Dedicated Range vacuum and low leakage current is required to control and preserve the charged particle filament. • A complete range of SEM ion pumps from 10 to 75 l/s, tailored to your ● The key to this superior performance is Agilent’s patented anode design specific vacuum needs which uses contoured cells and simplified electrical elements. • Small footprint for easier system This insures stable current readings and lower particle generation. integration ● When combining the SEM ion pump on the gun with a StarCell ion pump on the lower column, Agilent ion pumps can offer a powerful combination optimised for modern E-beam columns. SEM Ion Pumps are available on request; please ask Agilent for technical details. Dedicated Heaters • Dedicated Heater for every pump size • The new heaters are designed to perform a more effective pump baking • Lower power and operational costs Innovative SEM Anode Geometry Very Compact Design IPCU3 / IPCU 2 Power Supplies • Better current stability Improved design for: Two versions: 3 or 2 supply channels • Lowest leakage current in the industry • Lighter pump weight • Special low noise electronics for better (< 10 nA) • Fast magnets replacement SEM imaging • Double Shielded Ceramics • Easy maintenance • Battery backup (optional): up to 30 days 24/7 of battery life • Longer pump life • Optional display and front panel • Longer pressure stability • Maximum uptime New 4UHV Controller • Special low noise electronics for better SEM imaging 6 ION PUMPS Dedicated Magnetic Stray Shields Agilent Feedthrough and Cables Higher Pumping Speed • External magnetic shields for stray • The HV Safety Interlock prevents any • Optimized magnetic circuit for max. magnetic field reduction available chance of electrical shock performance in a very
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