Edgetm CDG045D2 and CDG100D2 High Precision Vacuum Gauge

Visionary Sensor Technology

EdgeTM CDG045D2 and CDG100D2 High Precision Vacuum Gauge

Hot Inside – Small Outside Edge CDG045D2 and CDG100D2 Vacuum Gauges

INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.

Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface.

The innovative heating concept enables a cool to the touch surface and saves valuable tool space. INFICON Edge is the smallest vacuum measurement instrument of its kind.

Typical applications • CVD, Etch, PVD • Analytical applications • General high temperature vacuum applications Fully ceramic sensor Air insulation Error (F.S.) Outstanding stability CDG working principle structure combined with 0.40 PTB CheckStd Bonded ceramic Ceramic CDG 1 Direct pressure measurement Edge digital signal processing provides superior • Temperature controlled Ceramic CDG 2 by diaphragm 0.30 p measurement performance. at ± 0.1°C Ceramic CDG 3 Ceramic CDG 4 ΔCΔC Δd ~ p • Fast warm up p CDG045D2 and CDG100D2 Vacuum Gauges 0.20 Capacitance readout • Insulated to changing Δd 1 0.10 ~ p ambient ΔC p 0 p Electrode Diaphragm -0.10 p = pressure time -0.20 0 1 2 3 4 5 6 7 8 9 10 (years)

Interface I / O

• Classic analog signal 0 … 10V • Wide range power supply • Zero adjust, push button / remote DI • 2 individual setpoints • Status LED • Diagnostic port • Fieldbus: EtherCAT

EtherCAT Analog Span stability Any mounting orientation

Rendering

modern integration, flexible real time

Gas type independence Digital signal processing CDG sensor technology Other typical sensor technologies dynamic + He Ne

(mbar) slow

INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides fast superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented Gauge protection for increased lifetime Temperature ramp / stability °C unique sensor shield which protects the gauge from undesired process by-products. Digital filters

Level 1 Baffle 100 Air insulated Uout = a • p + b (a = slope / b = off-set) Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT Stops coating, particles standard fieldbus interface. architecture U assures an excellent gain offset

Indicated pressure Level 2 Heater The innovative heating concept enables a cool to the touch surface and saves valuable tool space. Prevents condensation/deposition temperature stability. 45 INFICON Edge is the smallest vacuum measurement instrument of its kind. Level 3 Shield Protects diaphragm Typical applications Level 4 Protective coating • CVD, Etch, PVD Corrosion protection 5 Temperature True pressure (mbar) coefficient / accuracy • Analytical applications Setable output P • General high temperature vacuum applications EDGE ADVANTAGES AT A GLANCE

• Low tool space required – Smallest instrument in class • Flexible integration – EtherCAT fieldbus • Long lifetime – Proven ceramic sensor • Forget recalibration – 90 ppm /year full scale stability

Measurement ranges Space-saving design Full Scale (Torr)

10 63 mm 100 82 mm

1000

0.0001 0.001 0.01 0.1 1 10 100 1000 Pressure (Torr) Excellent Customer Support is a Commitment INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed.

Asia and Pacifica

CHINA KOREA INFICON Ltd. INFICON Ltd. Beijing Kyunggi-do Phone: +86.10.6590.0164 Phone: +82.31.783.2942 E-mail: reach.china@inficon.com E-mail: [email protected]

INDIA SINGAPORE and AUSTRALIA INFICON PVT. Ltd. INFICON PTE Ltd. Pune Singapore Phone: +91.20.4120.4854 Phone: +65.6631.0300 Europe, Middle East E-mail: reach.india@inficon.com E-mail: [email protected] Americas and Africa JAPAN TAIWAN INFICON Inc. INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. East Syracuse, NY Cologne Yokohama-shi, Kanagawa-ken Chupei City Phone: +1.315.434.1100 Phone: +49.221.567.881.00 Phone: +81.45.471.3328 Phone: +886.3.552.5828 E-mail: [email protected] E-mail: [email protected] E-mail: [email protected] E-mail: [email protected]

inficon.com [email protected] twitter.com/inficon Due to our continuing program of product improvements, specifications are subject to change without notice.