TOPICS ISSUE 46 PIEZO NANO POSITIONING

NEXLINE® for the Large Binocular Telescope Precision Gimbal Optical Mount for Astronomical Interferometry

GimbalGimbal mirrormmirror mountmount withwith NEXLINENEXLINE® drivedrive andand matchinmatchingg drive electronics (picture: PIPI))

ContentsContents PaPagege For the Large Bino- drives from PI which direct- cular Telescope (LBT) in ly act on the pivot points of the NEXLINE® Technology for the tilt axes. The result is a tip/tilt mirror LLargearge BBinocularinocular TTelescopeelescope 1 – 2 Arizona, the Max Planck Institute system whose resonant frequency of Precise anandnd Stable: M M-687-687 for Astronomy (MPIA) in Heidelberg 125 Hz is more than four times higher MMicroscopeicroscope StaStagesges with Direct Drive 2 than that of conventional mirror mounts. Assembly LinLinee P Productionroduction in Va Vacuumcuum 3 has developed alternative tip/tilt The resolution is 0.3 arc seconds (closed- C-872 Universal Driver for PILine® 4platforms for dichroitic mirrors in a loop), and the position stability is better N-664: For step sizes in the nanometer critical optical path. range 5 than 0.15 arc seconds. Miniature Piezo Amplifi er Module The NEXLINE® piezo drives combine Classic kinematic mirror mounts with for Individual Multi-Axis Control 5 large travel ranges with high stiffness standard actuators were not able to E-712: The Smart Way to a Millionth and better than 0.1 nm resolution. of a Millimeter 6 provide the necessary stability, resonant PICMA® Bending Actuators 7 frequency and resolution in the limited Expansion of PIs Management 8 space conditions. The innovative design uses piezoelectric NEXLINE® stepping Continued on page 2 1

WWW.PI.WS TOPICS PIEZO NANO POSITIONING

Continued from page 1 The Max Planck Institute for Astronomy (MPIA) in Brief: Piezoceramic longitudinal and shear elements act on a moving rod coupled Astronomy is one of the oldest natural the birth of planetary systems are the to the payload. This allows an arbitrarily sciences and at the same time it is one objects of scientifi c curiosity. “Is Earth small position resolution that only of the most modern. This is proven by the only populated place in space?” depends on the stability of the control the Max Planck Institute for Astronomy is one of the burning questions in voltage signal. While the rod can be in Heidelberg. Here, researchers solve research. But the Max Planck astrono- moved in full-step mode at maximum the mysteries of the universe with mers are also present in the depths velocity over long distances, the nano- high-tech instruments, manufacture of space and time, examining active stepping mode allows uniform motion clever accessories and detectors for galaxies and quasars to get a picture at a constant velocity. When de-energi- telescopes and satellites which exam- of the beginning and development ine the light from strange sources by of the now so richly structured uni- zed, the drives provide maximum hold- every trick in the book. New stars and verse. ing force with a nanometer stability, irrespective of their position.

Precise and Stable: M-687 Stages with Direct Drive

With the M-687 PI offers a new, fast, DC motors with large lead screw, ducts micrometers per second the movement high-precision XY positioning system do not increase the footprint. This facili- is constant and very smooth. It can still tates the integration of the stage under be observed under the microscope at optimized for applications with in- the microscope and offers an unhindered 1000-fold magnifi cation. verted . access to the specimen. The PILine® By combining a PILine® drive with a motors transmit the force directly to the high-resolution position sensor, a stiff moving platform and thus keep the The M-687 XY stage provides travel and high-precision stage has been de- position stable, even when powered ranges of up to 100 × 75 mm, and its signed which can reach positions repeat- down with no heat generation. M-687 large clear aperture of up to 160 × 100 mm edly with sub-micron accuracy. This is stages provide maximum closed-loop can accomodate specimen holders as particularly useful for imaging methods velocities of up to 250 mm/s.Their behav- well as Z-specimen scanners. The cur- such as tiling and stitching which are ior is optimized, i.e. settling takes place rently available models can be used required for large specimen. for Olympus IX2 series and for Nikon within a few milliseconds. On the other Eclipse TI inverted microscopes.The hand, a slow movement is also of impor- M-687 stage is driven by integrated tance for users: Even with only a few PILine® piezoceramic linear motors which, in contrast to fl anged stepper or

Dynamic and precise: The combined stage, consisting of a motorized XY stage with a travel range of 100 × 75 mm and a Z stage for specimen scanning, fi ts on inverted microscopes of the Olympus IX2 series and Nikon Eclipse TI without using an adapter 2 (picture: PI)

WWW.PI.WS tion. In addition to several modifi cations of the standard SpaceFAB design, cus - tom three-phase servo motors ensure the necessary dynamics. A vacuum- com patible holding brake was also redesigned since the solutions on the market did not meet the requirements of this application regarding material properties and heat dissipation. PI miCos also assumed responsibility for the con- trol software of the sandwich assembly process, the integration of the sensor and camera measurements as well as for the monitoring of the gripper mag- nets. The vast experience and fl exibility of the PI miCos team have turned this complex multidisciplinary high-tech project into another success story.

miCos GmbH was founded in 1990 in Eschbach, near Freiburg, and it is now known as PI miCos after joining the Parallel kinematics from PI miCos integrated in a fully automated vacuum PI group in late 2011. With currently process (picture: PI miCos) more than 50 employees, the company develops, produces and markets inno- vative motion systems and compon- ents for high-precision positioning Assembly Line Production applications throughout the world. A main focus is on optical measurement in Vacuum technology in research and industry. For this purpose, PI miCos offers cus- tomized system solutions with multi ple A special challenge for the Eschbach take no longer than 10 seconds, could axes in addition to a comprehensive engineers was a precision assembly line only be achieved with a 6-degree-of- standard program. Wide-ranging appli- under vacuum conditions of 10–6 mbar. freedom positioning system. For the cation know-how guarantees the im - The fully automated assembly of a desired travels of 50 mm in the direction plementation of technically demand- precision foil sandwiched between a of assembly and 20 mm perpendicular ing solutions. Flexible positioning carrier and a counter holder had to be to this, a SpaceFAB was recommended systems for ultra-high vacuum appli- integrated in the production process. cations with parallel-kinematics and due to its low height. The 1 m² foil has to be positioned with six degrees of freedom, as well as an accuracy of ±20 μm in relation to the The system developed for this applica- systems with linear motors and air carrier. Since the position of the carrier tion can easily move loads of 100 kg, bearings are but a few examples of PI varies, the assembly process, which can fast and very precisely with low vibra- miCos’s capabilities. 3 TOPICS PIEZO NANO POSITIONING

Drive electronics for fast ultrasonic piezomotors: the C-872 from PI (picture: PI)

Fast and Efficient Positioning Drives Universal Driver for Ultrasonic Piezomotors

The PILine® series includes complete multi-axis positioning systems but also Drive systems that are based on ultra- ultrasonic piezomotors for OEMs. The operation of ultrasonic piezomotors sonic piezomotors offer advantages over classic rotary motor drive systems in requires specifi c drive electronics that generate high-frequency AC voltage to respect to dynamics as well as velocity, excite the piezoelectric oscillations. start-stop behavior and installation space. They also outperform magnetic The C-872 universal drive electronics quency tracking improves performance linear motors when the target position was especially designed for OEMs. It is and effi ciency. Velocity is controlled via has to be kept stable without the drive optimized for low heat generation and an analog interface by input signals in being energized or in the presence of power consumption and the active fre- the range between ±10 V. strong magnetic fi elds.

4

WWW.PI.WS High-resolution positioning system for incremental motion in the nanometer range Perfectly Aligned Precision

With the new N-664 linear positioning incremental resolution. The N-664 is nal brakes. The drive does not have to stage, PI has succeeded in developing equipped with precision-aligned high- be supplied with current and does not load crossed-roller bearings made of hheateat upup.. a groundbreaking reference-class posi- stainless . The PIOne linear encoder tioning system combining long travel is based on an interferometric meas- with the advantages of piezo preci- urement principle capable of providing sion, speed and stiffness. very precise measurement results in the subnanometer range even at high posi- A NEXACT® piezo linear drive replaces tioning speeds. the usual stepper or DC servo motor in ® The self-clamping NEXACT piezo-walk The N-664 micropositioning stage com- the N-664, making sub-nanometer reso- motor direct drive keeps the position bines long travel, speed to 10 mm/s lution feasible. Closed-loop position stable even when powered down, reduc- and laser-interferometer documented feedback is provided by the novel PIOne ing energy consumption, heat dissipa- incremental motion of 2 nm (picture: PI) optical linear encoder featuring 0.5 nm tion and eliminating the need for exter-

Cost-Effective and Compact: Miniature Piezo Amplifi er Module for Modular Multi-Axis Control

Smaller, more powerful, and more dy - a large number of PICMA® multilayer modules, PI also offers compact DC/DC namic: The E-831.05 piezo amplifi er piezo actuators. With dimensions of only converters to provide the supply voltage module for piezo voltages from –30 to 60 x 28 x 6 mm, the mini-driver is well- for up to three amplifi er modules. The 130 V, with a peak current of 250 mA, suited to be mounted close by the actua- DC/DC converters can be customized to and a bandwidth of up to 15 kHz offers tor, easing the use in active vibration facilitate integration into the customer’s more than previous miniature modules. damping or other adaptive systems system. This benefi ts OEM customers operating applications. In addition to the miniature

Successful multi-channel customization: 40 PICMA® multilayer piezo actuators are controlled by a compact amplifi er. One single power supply is used to supply the miniature modules with current (picture: PI)

Small and even smaller: The new E-831.05 piezo amplifi er module (picture: PI)

5 TOPICS PIEZO NANO POSITIONING

E-712: The Smart Way to a Millionth of a Millimeter Digital Controllers for Piezo-Based Nanopositioning Systems

Modern piezo-nanopositioning systems motors magnetic motors, purpose-built as the E-712 can handle a variety of achieve the highest performance and digital controllers are the premium piezo-based positioning systems, from fl exibility through a combination of choice. Together with direct-measuring fl exure based drives to NEXACT® and precision mechanical and electrical engi- position sensors, modern digital servo NEXLINE® piezo-walk type linear motors. neering. Since the control requirements piezo controllers can provide higher The E-712 modular digital controller of piezo ceramic positioning systems linearity, and faster response than is system is probably the most effi cient are signifi cantly more demanding than possible with traditional analog servo device for the nanopositioning with those of traditional stepper or serve controllers. In addition, controllers such piezo ceramic actuators or PiezoWalk® motors.

Nanometer Positioning Accuracy Digital piezo controllers from PI infl uence all motion parameters through adaptive algorithms and enable the use of a vari- ety of correction models, e.g for the linearity deviations of the sensors. Thus linearity values below 0.001 % with posi- tioning applications can be achieved, corresponding to a precision of below a nanometer for travel ranges of 100 μm.

Dynamic Linearization Digital technology minimizes phase shift and trajectory errors in dynamic-periodic applications. This is especially important for scanning applications and for dyna- mic synchronization with other proces- Piezo-based multiaxis sys tems ses. PIs proprietary DDL (Digital Dynamic for precise positioning (picture: PI) Linearization) algorithm reduces rolloff, phase error and hysteresis improving dynamic linearity and effective band- width by up to 3 orders of magnitude Piezo Actuators for repetitive (periodic) signals. High Accuracy and Dynamics Advanced Piezo Control The Advanced Piezo Control algorithm Piezo actuators convert electrical actuators are therefore practically actively counteracts resonances up to energy directly into mechanical ener- maintenance-free and nonwearing, approx. 1 kHz as opposed to classic PID gy and vice versa. Typically, travel and since no lubrication is necessary, and achieves much higher suppression ranges of up to around 1 mm can be they are also vacuum compatible. rations than classical PID algorithms with covered with nanometer resolution They can move large loads, cannot passive notch fi lters can do. The result and high dynamics, with frequencies be dis turbed by even strong mag- is faster settling, considerably better of several kilohertz. Since the motion netic fi elds and have very compact disturbance suppresion and better is based on crystalline effects, there dimensions. phase accuracy. The algorithm requires are no rotating parts or friction; piezo a mechanical design with clearly sepa- 6 rated resonant frequencies.

WWW.PI.WS PICMA® bender actuators with various contours and dimensions (picture: PIC)

High reliability and compact dimensions make them ideal for use in medical technology PICMA® Bending Actuators from PI Ceramic Can Be Easily Customized

Thanks to a new type of production voltages are limited to only 10 V fea- optimum support from prototype-phase technology, multilayer bender actuators sible. PICMA® benders can be produced to the integration into the customer’s can now be manufactured in large quan- in very small dimensions of only a few OEM product. tities with almost any desired contour milli meters, e.g. with a 4 x 10 mm edge and dimension. Even unusual shapes length. such as trapezoid and internal holes with As a result of their fl exible size and PIC in Brief: a full ceramic insulation are feasible. The operating voltage, PICMA® bender actua- PI Ceramic (PIC) has been develop- piezo actuator is protected against hu - tors are ideal for integration into mo bile ing and piezo ceram- mid ity and has a high insulation resist- devices such as hearing aids. Here the ic materials and components for ance signifi cantly improving its lifetime piezo element functions as an acousto- standard and OEM solutions for 2 compared to common polymer-insulated mechanical transducer, and the sound decades: piezo components, ultra- actuators. The thickness of the active transmission takes place e.g. via bone layers is variable starting from 15 μm, conduction. In addition to reasonable sonic transducers, actuators, and ® making even applications where drive prices for customized versions, PIC offers system solutions. The PICMA multi- layer actuator technology, which received an award for its reliability, is one of many innovations of PIC. PI Ceramic, a subsidiary of Physik Instrumente (PI), is located in the city of Lederhose, Thuringia, Ger- many.

Linear Actuators with Piezomotor Ceramic Drivers for Higher Precision

Piezo stepping drives replace the usual when not in operation, without drift or about one nanometer and lower. PI also electromagnetic motors in the linear oscillations. The position holding force offers controllers suitable for the linear actuators of the N-381 series. The linear is 15 N. The drive does not have to be actuator. piezo-stepping motor is free of precision supplied with current in its target posi- ® losses due to the conversion of rotary tion and does not heat up. Furthermore, The N-381 linear actuator with NEXACT motion to linear motion. The N-381 is the drive principle of the piezo stepping piezo stepping drive combines dynamic motion and high position resolution in a 10 mm/s fast, provides resolution of motor enables very high resolution compact design (picture: PI) 20 nanometers based on an integrated within one step cycle. In open-loop op- linear encoder. The position is locked eration, the motion can be resolved to From left to right: Dr. Peter Schittenhelm, Dr. Karl Spanner, Headquarters Markus Spanner, Norbert Ludwig (picture: PI) GERMANY Physik Instrumente (PI) PI miCos GmbH Expansion of PIs Management GmbH & Co. KG Eschbach Auf der Roemerstr. 1 [email protected] 76228 Karlsruhe/Palmbach www.pimicos.de Continuity Spread Across Tel. +49 (721) 4846-0 Fax +49 (721) 4846-1019 PI Ceramic GmbH [email protected] Lederhose Several Shoulders www.pi.ws [email protected] www.piceramic.de On April 01, 2012, PI appointed three new managing directors. Norbert Ludwig, Dr. Peter Schittenhelm and Markus Spanner Subsidiaries together with Dr. Karl Spanner, who also acts as chairman, USA (East) & CANADA USA (West) & MEXIKO now constitute a committee of four which will lead the com- PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P. pany in the future. 16 Albert St. 5420 Trabuco Rd., Suite 100 The commercial management of the entire PI group is in good Auburn, MA 01501 Irvine, CA 92620 Tel. +1 (508) 832 3456 Tel. +1 (949) 679 9191 hands with Mr. Markus Spanner who graduated in economics Fax +1 (508) 832 0506 Fax +1 (949) 679 9292 and spent some time in Asia. Mr. Ludwig takes on the respon- [email protected] [email protected] www.pi-usa.us www.pi-usa.us sibility for Sales and Marketing and Dr. Schittenhelm is responsible for Operations. Both hold masters degrees in JAPAN physics and with that the background knowledge to understand PI Japan Co., Ltd. PI Japan Co., Ltd. market demands and to realize technical solutions. Tachikawa Hanahara Daini Bldg. #703 Business Center Bldg. 5F 4-11-27 Nishinakajima 2-38-5 Akebono-cho Yodogawa-ku, Osaka-shi

Tachikawa-shi, Tokyo 190-0012 Osaka 532-0011 NUZ46E 12/05/25.0,125 Subject to change without notice © Physik Instrumente (PI) GmbH & Co. KG Tel. +81 (42) 526 7300 Tel. +81 (6) 6304 5605 Fax +81 (42) 526 7301 Fax +81 (6) 6304 5606 [email protected] [email protected] www.pi-japan.jp www.pi-japan.jp

UK & IRELAND ITALY PI (Physik Instrumente) Ltd. Physik Instrumente (PI) S. r. l. Trent House, University Way, Via G. Marconi, 28 Cranfi eld Technology Park, 20091 Bresso (MI) Cranfi eld, Bedford MK43 0AN Tel. +39 (02) 665 011 01 Tel. +44 (1234) 756 360 Fax +39 (02) 610 396 56 International Conference and Exhibition Fax +44 (1234) 756 369 [email protected] [email protected] www.pionline.it on New Actuators and Drive Systems www.physikinstrumente.co.uk

Bremen, Germany, 18 – 20 June 2012 FRANCE CHINA Call for Participants PI France S.A.S. Physik Instrumente 244 bis, avenue Marx Dormoy (PI Shanghai) Co., Ltd. 92120 Montrouge Building No. 7-106 Tel. +33 (1) 55 22 60 00 Longdong Avenue 3000 Fax +33 (1) 41 48 56 62 201203 Shanghai, China [email protected] Tel. +86 (21) 518 792 98 www.pifrance.fr Fax +86 (21) 687 900 98 [email protected] www.pi-china.cn

SOUTH EAST ASIA KOREA PI (Physik Instrumente) PI Korea Ltd. Singapore LLP 6F Jeongu Bldg. 20 Sin Ming Lane Cheonho-Daero 1111 #05-60 Midview City Gangdong-gu Singapore 573968 138-814 Seoul

Photo: Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany Bremen, Design:7, Germany Büro Tel. +65 665 98400 Tel. +82 2475 0060 Fax +65 665 98404 Fax +82 2475 3663 www.actuator.de [email protected] [email protected] www.pi-singapore.sg www.pi-korea.ws For ID / MY / PH / SG / TH

8

WWW.PI.WS