History of the UC Berkeley Microlab

History of the UC Berkeley Microlab Katalin Voros Electrical Engineering and Computer Sciences University of California at Berkeley Technical Report No. UCB/EECS-2013-158 http://www.eecs.berkeley.edu/Pubs/TechRpts/2013/EECS-2013-158.html September 11, 2013 Copyright © 2013, by the author(s). All rights reserved. Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. To copy otherwise, to republish, to post on servers or to redistribute to lists, requires prior specific permission. UNIVERSITY OF CALIFORNIA, BERKELEY COLLEGE OF ENGINEERING MICROFABRICATION LABORATORY 406 CORY HALL, MC 1770 (510) 642-2716 FAX: (510) 642-2916 ERL/ERSO BERKELEY, CALIFORNIA 94720-1770 History of the UC Berkeley Microlab 1983-2010 Closing Report Katalin Voros Operations Manager (1987-2010) Abstract The UC Berkeley Microfabrication Laboratory (Microlab) in Cory Hall had its opening dedication ceremony on 23 March 1983. It was officially closed on 31 December 2010. This report is the documentation, in wide swathes, of 28 years of operation, including management of resources: facilities, staff, finances, and related activities of control, communications and planning. Although the Microlab in Cory Hall ceased to exist, research operations continue in the new Marvell Nanofabrication Laboratory (NanoLab) in Sutardja Dai Hall, the second reincarnation of the original Integrated Circuits Laboratory of 1962. Thus, the tradition of cutting edge research based on micro/nano-electronic fabrication continues at Berkeley. 2013 i List of Figures .............................................................................................................................. iv List of Tables ..............................................................................................................................viii Glossary ........................................................................................................................................ix I. Introduction ........................................................................................................................1 II. History .................................................................................................................................2 III. Timeline ...........................................................................................................................10 IV. Organization .....................................................................................................................15 V. Operations ........................................................................................................................20 Management of Resources 1. Facilities ...........................................................................................................20 Laboratory Space .....................................................................................20 Satellite Labs ...........................................................................................21 2. Utilities .............................................................................................................23 Monitoring of Utilities .............................................................................24 Utilities Dependencies Database ..............................................................25 Campus Utilities .......................................................................................27 Other Factors – Neighborhood Construction Projects .............................28 3. Equipment ........................................................................................................36 Equipment Access Control ......................................................................39 Equipment and Utilities Maintenance ......................................................40 4. Machine Shop ..................................................................................................47 5. Microlab Staff ..................................................................................................49 Maintenance Staff ...................................................................................51 Process Staff .............................................................................................53 Baseline Engineering ...............................................................................56 Associated Researchers ............................................................................62 Administration .........................................................................................63 Computer Support ....................................................................................64 Staff Development ...................................................................................66 6. Safety ...............................................................................................................70 VI. Finances ............................................................................................................................73 The Microlab’s User Base ....................................................................................73 Microlab as a Recharge Center ............................................................................74 Record Keeping and Reports ...............................................................................77 Capital Equipment ...............................................................................................78 Financial History of the Microlab ........................................................................79 Industrial Members (BMLA) ...............................................................................81 Funding Laboratory Development .......................................................................82 6” Upgrade ...............................................................................................82 Move of the Microlab into the New NanoLab .........................................84 ii VII. Computer Information and Management System ............................................................85 System Description ..............................................................................................87 Development and Upgrades .................................................................................89 New equipment control system, WIS ......................................................90 The Common and Personal Environment, CAPE ....................................90 Microlab Gas Database ............................................................................91 Resource Utilization Management System, RUMS .................................91 New Design – Mercury ........................................................................................94 Database ...................................................................................................95 MercuryClient ..........................................................................................96 MercuryWeb ............................................................................................97 New Equipment Interlock System – Hydra .........................................................98 Parallel Operations and Synchronization ............................................................ 99 Summary of the Microlab’s Computer System Development ...........................100 VIII. Planning, Development, and Communications ..............................................................102 Laboratory Development ...................................................................................102 Start-up: 1983-1986 ...............................................................................102 Expansion into Satellite Labs: 1993-2004 .............................................103 Six-Inch Upgrade: 1998-2004 ................................................................104 New Lab Development: 2004-2009 .......................................................106 Membership Development .................................................................................107 User Training – Lab Orientation ........................................................................110 Controls ..............................................................................................................111 Lab Members’ Meetings ....................................................................................112 Outreach – Summer Internship ..........................................................................112 Departmental Activities .....................................................................................113 EE143 Support .......................................................................................113 Competitive Semiconductor Manufacturing Program ...........................114 Graduate Seminar ...................................................................................115 Staff Activities .......................................................................................115 Public Relations .................................................................................................117 Labnetwork ........................................................................................................120 Microlab Events

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