Sensors 2011, 11, 3135-3144; doi:10.3390/s110303135 OPEN ACCESS sensors ISSN 1424-8220 www.mdpi.com/journal/sensors Article A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica Thorsten Wagner 1,*, Sören Krotzky 2, Alexander Weiß 3, Tilman Sauerwald 3, Claus-Dieter Kohl 3, Jan Roggenbuck 4 and Michael Tiemann 1 1 Department of Chemistry, Faculty of Science, University of Paderborn, Warburger Str. 100, D-33098 Paderborn, Germany; E-Mail:
[email protected] 2 Max-Planck-Institute for Solid State Research, Nanoscale Science Department, Heisenbergstr. 1, D-70569 Stuttgart, Germany; E-Mail:
[email protected] 3 Institute for Applied Physics, Justus Liebig University, Heinrich-Buff-Ring 16, D-35390 Giessen, Germany; E-Mails:
[email protected] (A.W.);
[email protected] (T.S.);
[email protected] (C.-D.K.) 4 Institute of Inorganic and Analytical Chemistry, Justus Liebig University, Heinrich-Buff-Ring 16, D-35390 Giessen, Germany * Author to whom correspondence should be addressed; E-Mail:
[email protected]. Received: 30 January 2011; in revised form: 20 February 2011 / Accepted: 25 February 2011 / Published: 14 March 2011 Abstract: Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectric in a simple sensor design based on pressed silica pellets.