micromachines Review Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review Zhaoxin Lao 1,2,3,* , Neng Xia 1, Shijie Wang 1 , Tiantian Xu 4, Xinyu Wu 4 and Li Zhang 1,* 1 Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Sha Tin, Hong Kong 999077, China;
[email protected] (N.X.);
[email protected] (S.W.) 2 Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China 3 CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230022, China 4 Guangdong Provincial Key Laboratory of Robotics and Intelligent System, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China;
[email protected] (T.X.);
[email protected] (X.W.) * Correspondence:
[email protected] (Z.L.);
[email protected] (L.Z.) Abstract: Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive Citation: Lao, Z.; Xia, N.; Wang, S.; functional devices. However, traditional planar processing techniques based on photolithography are Xu, T.; Wu, X.; Zhang, L.