micromachines Article Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 Emil Ludvigsen 1 , Nina Ritter Pedersen 1, Xiaolong Zhu 2, Rodolphe Marie 2, David M. A. Mackenzie 3 , Jenny Emnéus 4, Dirch Hjorth Petersen 5, Anders Kristensen 2 and Stephan Sylvest Keller 1,* 1 National Centre for Nano Fabrication and Characterization, DTU Nanolab, Technical University of Denmark, Ørsteds Plads, Building 345B, 2800 Kgs. Lyngby, Denmark;
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[email protected] (N.R.P.) 2 Department of Health Technology, DTU Health Tech, Technical University of Denmark, Ørsteds Plads, Building 345C, 2800 Kgs. Lyngby, Denmark;
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[email protected] (A.K.) 3 Department of Physics, DTU Physics, Technical University of Denmark, Fysikvej, Building 311, 2800 Kgs. Lyngby, Denmark;
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[email protected] 5 Department of Energy Conversion and Storage, DTU Energy, Technical University of Denmark, Fysikvej, Building 310, 2800 Kgs. Lyngby, Denmark;
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[email protected]; Tel.: +45-45-25-58-46 Abstract: Pyrolytic carbon microelectrodes (PCMEs) are a promising alternative to their conventional metallic counterparts for various applications. Thus, methods for the simple and inexpensive patterning of PCMEs are highly sought after. Here, we demonstrate the fabrication of PCMEs through Citation: Ludvigsen, E.; Pedersen, the selective pyrolysis of SU-8 photoresist by irradiation with a low-power, 806 nm, continuous N.R.; Zhu, X.; Marie, R.; Mackenzie, wave, semiconductor-diode laser.